Edwards iXH, iXL, pXH Instruction Manual

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Instruction Manual

iXH, iXL and pXH Dry Pumping Systems

M561-00-880

Issue C Original

iXH and pXH Dry Pumping Systems

ACXXXXXXXXX0

Booster Size

Low Voltage

0 = None 1 = 600G 2 = r 3 = 1200 4 = 1800 5 = 3000 6 = 4500 7 = 6000

Dry Pump

Standard

0 = None (pXH) 1 = 100 2 = 200 3 = 300 4 = r 5 = r 6 = r 7 = r

TMS System

0 = Standard 1 = T-Variant 2 = T-Variant + heated booster 3 = r 4 = r 5 = r

Gas Module

0 = None (pXH) 6 = Single Mode + 1 = Loadlock (44 slm flow) (4 slm flow) 2 = Single Mode 7 = Single Mode + (44 slm flow) (96 slm flow) 3 = Single Mode 8 = Single Mode + (96 slm flow) (133 slm flow) 4 = Single Mode 9 = Single Mode + (133 slm flow) (204 slm flow) 5 = Single Mode A = Multi Mode (204 slm flow) (44 slm flow)

B = Multi Mode (96 slm flow) C = Multi Mode (133 slm flow) D = Multi Mode

(204 slm flow)

Exhaust

0 = r 1 = Standard without check valve. 2 = r 3 = Standard with check valve.

Seals

0 = r 1 = r 2 =Standard

Pump Motor

0 = None 1 = 4.5 kW 2 = 7.5 kW 3 = 11 kW

Booster Motor

0 = None 1 = 1.9 kW 2 = 4.5 kW 3 = 7.5 kW 4 = r

High Voltage

A = None B = 600G C = r D = 1200 E = 1800 F = 3000 G = 4500 H = 6000

Harsh

A = 100 B = 200 C = 300 D = 450 E = 500

Where r = reserved for future use

Special Features

0 = None 1 = Application Specific 2 = Application Specific 3 = Application Specific 4 = Application Specific 5 = Application Specific 6 = Application Specific 7 = Application Specific 8 = Application Specific 9 = Application Specific

iXL Dry Pumping Systems

ASXXXXXXXX00

Where r = reserved for future use

Booster Size

Low Voltage 0 = None

1 = r 2 = r 3 = r 4 = 1800 5 = 3000

High Voltage A = None

B = r C = r D = r E = 1800 F = 3000

TMS System

0 = Standard 1 = r

Exhaust

0 = r

1 = Standard

without

check valve.

2 = r

3 = r

Seals

0 = r 1 = r 2 = Standard 3 = EES

Pump Motor

0 = None 1 = 4.5 kW 2 = 7.5 kW 3 = 11 kW

Booster Motor

0 = None 1 = r 2= 4.5 kW 3 = 7.5 kW 4 = r

Gas Module 0 = None

1 = Loadlock (4 slm flow) 2 = r 3 = r 4 = r

Dry Pump 0 = None

1 = r 2 = r 3 = 250 4 = r 5 = 500 6 = 750

Declaration of Conformity

We, Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

Low Volt Systems High Volt Systems (200 - 230V) (380 - 460V)

iXH100 AC010xy21000 ACA10xy21000 iXH200H AC0B0xy22000 ACAB0xy22000 iXH610 AC110xy21100 ACB10xy21100 iXH1210 AC310xy21200 ACD10xy21200 iXH1210H AC3A0xy22200 ACDA0xy22200 iXH1210HT AC3A1xy22200 ACDA1xy22200 iXH1220H AC3B0xy22200 ACDB0xy22200 iXH1220HT AC3B1xy22200 ACDB1xy22200 iXH1220HTX AC3B2xy22200 ACDB2xy22200 iXH1820 AC420xy22200 ACE20xy22200 iXH1820H AC4B0xy22200 ACEB0xy22200 iXH1820T AC421xy22200 ACE21xy22200

Where x = 1, 2, 3, 4, 5, 6, 7, 8, 9, A, B, C or D depending on gas module type Where y=1 means 'no check valve' and y=3 means 'check valve supplied'

to which this declaration relates is in conformity with the following standard(s) or other normative document(s):

EN1012-2: 1997 Compressor and Vacuum Pumps Safety Requirements; Part 2 - Vacuum Pumps. EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement, Control and

Laboratory Use; Part 1 – General Requirements.

EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory use -

EMC requirements (Industrial Location Immunity – Class A Emissions)

EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic Products

with respect to the Restriction of Hazardous Substances

ANSI/UL 61010-1 and CAN/CSA-C22.2 No. 61010-1, 2

Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory Use, Part 1: General Requirements

SEMI S2-0709 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

when installed in accordance with the instruction manual supplied with the pump, following the provisions of:

2006/95/EC Low Voltage Directive. 2004/108/EC Electromagnetic Compatibility Directive. 2006/42/EC Machinery Safety Directive.

2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive ). The RoH S Directive does not legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was signed

onwards.

22.10.2013, Burgess Hill

Mr Mark Hope, Global Technical Support Manag er Date and Place

Edition July 12, 2004, including revision July 22, 2005 -

This product has been manufactured under a quality system certifie

to ISO9001:2008

P200-02-320 Issue J

Declaration of Conformity

We, Edwards Limited, Crawley Business Quarter Manor Royal, Crawley, West Sussex RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

Low Volt Systems High Volt Systems

(200-230V) (380-460V)

iXH3030 AC530xy22300 ACF30xy22300 iXH3030T AC531xy22300 ACF31xy22300 iXH3030TX AC532xy22300 ACF32xy22300 iXH3045H AC5D0xy23310 ACFD0xy23310 iXH4545HT AC6D1xy23300 ACGD1xy23300 iXH4545HT - ACGD1B123390 iXH6045H AC7D0xy23300 ACHD0xy23300 iXH6045H AC7D02123310 ACHD02123310 iXH6045HT AC7D1xy23300 ACHD1xy23300 iXH450H AC0D0xy23000 ACAD0xy23000 pXH4500 AC6000120300 ACG000120300 pXH4500 - ACG000120310 pXH6000 AC7000120300 ACH000120300 iXL500Q AS450zy23300 ASE50zy23300

Where y = 1 means 'no check valve' and y=3 means 'check valve supplied' Where z = 1, 2, 3, 5, A or B depending on gas module type for iXL

EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory use - EMC requirements (Industrial Location Immunity – Class A Emissions)

22.10.2013, Burgess Hill

Mr Mark Hope, Global Technical Support Manager Date and Place

iXL500R AS550zy23300 ASF50zy23300

Where x = 1, 2, 3, 4, 5, 6, 7, 8, 9, A, B, C or D depending on gas module type

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN1012-2: 1997 Compressor and Vacuum Pumps Safety Requirements. Part 2 - Vacuum Pumps EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory

EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic Products

ANSI/UL 61010-1 and CAN/CSA-C22.2 No. 61010-1, 2 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory Use, Part 1: General Requirements

SEMI S2-0709 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

when installed in accordance with the instruction manual supplied with the pump, following the provisions of:

2006/95/EC Low Voltage Directive 2004/108/EC Electromagnetic Compatibility Directive 2006/42/EC Machinery Safety Directive 2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards.

This product has been manufactured under a quality system certified to ISO9001:2008

Use. Part 1 – General Requirements.

with respect to the Restriction of Hazardous Substances

Edition July 12, 2004, including revision July 22, 2005 -

P200-02-720 Issue K

Declaration of Conformity

We, Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

Low Volt Systems High Volt Systems (200-230V) (380-460V)

iXH500H AC0E0xy23000 ACAE0xy23000 iXH3050H AC5E0xy23310 ACFE0xy23310 iXH3050HTX AC5E2xy23300 ACFE2xy23300

iXH4550HT AC6E1xy23300 ACGE1xy23300 iXH6050H AC7E0xy23300 ACHE0xy23300 iXH6050HT AC7E1xy23300 ACHE1xy23300

Where x = 1, 2, 3, 4, 5, 6, 7, 8, 9, A, B, C or D depending on gas module type

to which this declaration relates is in conformity with the following standard(s) or other normative document(s) EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements.

Part 2 - Vacuum Pumps. EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement,

EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory

EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic Products

ANSI/UL 61010-1 and CAN/CSA-C22.2 No. 61010-1, 2nd Edition July 12, 2004, including revision July 22, 2005 – Safety

Requirements for Electrical Equipment for Measurement, Control and Laboratory Use - Part 1: General Requirements and fulfils all the relevant provisions of 2006/42/EC Machinery Directive

2006/95/EC Low Voltage Directive 2004/108/EC Electromagnetic Compatibility (EMC) Directive 2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards.

22.10.2013, Burgess Hill

Where y = 1 means ‘no check valve’ and y = 3 means ‘check valve supplied’

Control and Laboratory Use. Part 1 - General Requirements. Use - EMC requirements. (Industrial Location Immunity

- Class A Emissions)

with respect to the Restriction of Hazardous Substances

Mr Mark Hope, Global Technical Support Manager Date and Place

This product has been manufactured under a quality system certified to ISO9001:2008

P200-06-000 Issue C

Declaration of Conformity

We, Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

Low Volt Systems High Volt Systems

(200-230V) (380-460V)

iXL250Q AS43001x2300 ASE3001x2300 iXL750Q AS46001x4300 ASE6001x4300

Where x = 2 means 'standard booster oilbox evacuation' and x=3 means 'external booster oilbox evacuation'

EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory use - EMC requirements (Industrial Location Immunity – Class A Emissions)

iXL750R AS56001x4300 ASF6001x4300

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN1012-2: 1997 Compressor and Vacuum Pumps Safety Requirements. Part 2 - Vacuum Pumps EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory

ANSI/UL 61010-1 and CAN/CSA-C22.2 No. 61010-1, 2 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory Use, Part 1: General Requirements

when installed in accordance with the instruction manual supplied with the pump, following the provisions of:

2006/95/EC Low Voltage Directive 2004/108/EC Electromagnetic Compatibility Directive 2006/42/EC Machinery Safety Directive

Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards.

Mr Mark Hope, Global Technical Support Manager Date and Place

This product has been manufactured under a quality system certified to ISO9001:2008

Use. Part 1 – General Requirements.

Edition July 12, 2004, including revision July 22, 2005 -

22.10.2013, Burgess Hill

P200-06-620 Issue B

P601-01-100

2020

NWNW

Issue C Original

The Chinese regulatory requirement on the Control of Pollution Caused by Electronic Information Products No. 39 (also known as ‘China RoHS’) mandates that manufacturers of certain categories of electronic products sold in Ch ina after 1st March 2007 –

 Mark the product and packaging

 Define the Product’ s Environment Protection Use Period (EPUP)

 Provide a Materials Content Declaration.

Product Labels

Product Product Label Meaning

All iXH, iXL500 and

pXH models

Indicates toxic or hazardous substance contained in at least one of the homogeneous materials used for this part is above the limit requirement in SJ/T11363-2006. Environmental Protection Use Period is 20 years.

Packaging information

Pallet Overshipper Protection Pieces Support Braces

Recyclable Natural Wood Recyclable Cardboard Recyclable Polypropylene Recyclable Mild Steel

Environment Protection Use Period (EPUP)

This is the period in years during which the toxic or hazardous substances or elements contained in this product will not leak or mutate under normal operating conditions so that the use of such electronic information products will not result in any severe environmental pollution, any bodily injury or damage to any assets.

The Environmental Protection Use Period is 20 years for this product. For the purposes of EPUP, normal operating conditions are considered to be use in accordance with the product’s

instruction manual.

Materials Content Declaration for all iXH, iXL & pXH models

Toxic or Hazardous Substances and Elements

Part name

Motor (Mechanical Booster)

Motor (pump) O O O O O O Pump & Booster O O O O O O Electronics and Controls O O X O O O Cooling System O O O O O O Purge System O O O O O O O: Indicates that this toxic or hazardous substance contained in all of the homogeneous materials for this part is below the limit requirement in

SJ/T11363-2006. X: Indicates that this toxic or hazardous substance contained in at least one of the homogeneous materials used for this part is above the limit requirement in SJ/T11363-2006.

Lead (Pb) Mercury (Hg) Cadmium (Cd)

OO O O O O

Hexavalent

Chromium (Cr (VI))

Poly brominated

biphenyls (PBB)

Poly bromi nat ed

diphenyl ethers (PBDE)

DJD 24/03/10

M561-00-880 Issue C

Section Page

1 Introduction .......................................................................................1

1.1 Scope and definitions ................................................................................................... 1

1.2 Applications ............................................................................................................... 2

1.3 Description ................................................................................................................ 2

1.4 Priority of control ........................................................................................................ 2

1.5 Active utility control .................................................................................................... 3

2 Technical data ....................................................................................5

2.1 General technical data .................................................................................................. 5

2.2 Performance data ........................................................................................................ 7

2.3 Loading data .............................................................................................................. 8

2.4 Nitrogen purge data ..................................................................................................... 9

2.5 Electrical data ...........................................................................................................11

2.6 Cooling-water data .....................................................................................................17

2.7 T variants ................................................................................................................20

2.8 T rac er gas analysis .....................................................................................................20

Contents

3 Installation .................................................... ................................... 23

3.1 Locate the dry pumping system ......................................................................................24

3.2 Lubric ation ............................................................................................................... 25

3.3 Connect the dry pumping system to your vacuum/exhaust system .............................................25

3.4 Connect to your factory extraction system (optional) ............................................................27

3.5 Connect the nitrogen supply ..........................................................................................28

3.5.1 Flammable/pyrophoric materials ....................................................................................28

3.5.2 Gas purges ...............................................................................................................29

3.6 Leak-test the system ...................................................................................................29

3.7 Electrical supply ........................................................................................................29

3.7.1 Mains supply cable connection .......................................................................................31

3.8 Connect an additional RF earth (ground) (optional) ..............................................................35

3.9 Connect to your emergency stop circuit ............................................................................35

3.10 Connect and set up the cooling-water ..............................................................................36

3.11 Accessories ............................................................................................................... 37

3.12 Commission the system ................................................................................................37

3.13 Install additional safety equipment ..................................................................................38

4 Operation ........................................................................................ 39

4.1 Start-up ..................................................................................................................39

4.1.1 MicroTIM operation .....................................................................................................40

4.1.2 PDT operation ...........................................................................................................40

4.1.3 Front panel control operation ........................................................................................40

4.2 Status indicators ........................................................................................................40

4.3 Manual shut-down ......................................................................................................41

4.3.1 Shut-down modes .......................................................................................................41

4.3.2 MicroTIM operation .....................................................................................................41

4.3.3 PDT operation ...........................................................................................................41

4.3.4 Front panel control operation ........................................................................................41

4.4 Automatic shut-down ..................................................................................................42

4.5 Unplanned shut-down and alarms ....................................................................................43

4.6 Emergency stop .........................................................................................................44

4.7 Restart the pump after an emergency stop or automatic shut-down ..........................................44

4.8 Advanced control and monitoring ....................................................................................44

gea/0179/01/12

M561-00-880 Issue C

Contents

5 Maintenance ..................................................................................... 45

5.1 Safety and maintenance frequency ..................................................................................45

5.2 Relocate the system for maintenance ...............................................................................46

5.3 Draining the cooling water ............................................................................................47

5.4 General maintenance ..................................................................................................48

5.5 Inspect the connections, pipelines, cables and fittings ..........................................................48

5.6 Gas module configuration .............................................................................................49

5.6.1 iXH single mode and single mode+ ...................................................................................49

5.6.2 Multi mode ...............................................................................................................49

5.6.3 iXL variants ..............................................................................................................50

5.7 System operating temperature configuration ......................................................................50

6 Transportation, storage and disposal ........................................................ 51

6.1 Transportation ..........................................................................................................51

6.2 Storage ...................................................................................................................51

6.3 Disposal ...................................................................................................................51

7 Service, spares and accessories .............................................................. 53

7.1 Introduction .............................................................................................................53

7.2 S ervice ....................................................................................................................53

7.3 Ordering accessories ...................................................................................................54

Appendix A1 Pump display terminal .................................................................. 57

A1.1 LEDs .......................................................................................................................57

A1.2 Pump start / stop and control ........................................................................................57

A1.3 Warning / Alarm display and acknowledgement ...................................................................58

A1.4 Menus ..................................................................................................................... 58

A1.4.1 Normal menu ............................................................................................................58

A1.4.2 Status menu .............................................................................................................59

A1.4.3 SETUP menu .............................................................................................................60

A1.4.4 COMMANDS menu .......................................................................................................61

A1.4.5 INV FAULT HIST (Display Inverter Fault History) menu ...........................................................61

A1.4.6 SOFTWARE VERSION Display menu ...................................................................................62

A1.4.7 FIT ACCESSORY menu ..................................................................................................62

A1.4.8 IP Configuration menu .................................................................................................62

A1.4.9 Display attributes menu ...............................................................................................63

Appendix A2 Troubleshooting .......................................................................... 65

A2.1 Warnings .................................................................................................................65

A2.1.1 LED warning indicators ................................................................................................. 65

A2.1.2 PDT warnings ............................................................................................................65

A2.2 Alarms ....................................................................................................................68

A2.2.1 LED alarm indicators ...................................................................................................68

A2.2.2 PDT alarms ...............................................................................................................68

A2.3 Inverter warnings and alarms .........................................................................................70

A2.4 Other problems .........................................................................................................75

A2.4.1 Pump controller communications ....................................................................................75

For return of equipment, complete the HS Forms at the end of this manual.

Page ii © Edwards Limited 2012. All ri ghts reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

Illustrations

Figure Page

1 Applications ............................................................................................................... 2

2 The front panel controls ................................................................................................ 3

3 Front view of pumping system ......................................................................................... 3

4 The controls/connectors on the rear of the pump ................................................................. 4

5 Centre of gravity and levelling foot loads ........................................................................... 9

6 Reduce the effective system footprint ..............................................................................25

7 Connecting the pump inlet ............................................................................................27

8 The Harting Han

9 The Harting 100A axial screw module cable-mounted connector ...............................................33

10 Customer connection kit - combination low volts iXL750 ........................................................34

11 Electrical connector locking mechanism ............................................................................35

A1 Pump display terminal .................................................................................................57

K 4/4 cable-mounted connector ...............................................................32

Tables

Contents

Table Page

1 General technical data .................................................................................................. 5

2 General technical data .................................................................................................. 6

3 Performance data ........................................................................................................ 7

4 Loading data (refer to Figure 5) ....................................................................................... 8

5 Nitrogen purge data for iXH and iXL systems ........................................................................ 9

6 Gas module types and flows ..........................................................................................10

7 Electrical data iXH100 to iXH1820/H/T .............................................................................11

8 General electrical data ................................................................................................14

9 Electrical connections ..................................................................................................15

10 Wire assembly according to VDE 0295 ...............................................................................16

11 Water cooling system data ............................................................................................17

12 Cooling water supply temperature ...................................................................................18

13 Water consumption data ...............................................................................................19

14 Heater data ..............................................................................................................20

15 Tracer gas test parameters ...........................................................................................20

16 Tracer gas test system parameters ..................................................................................20

17 Worst case test results .................................................................................................21

18 Extraction rates required by system variant .......................................................................22

19 Alarm actions ............................................................................................................42

20 Pump protection sensors ..............................................................................................43

21 Dry pump and booster temperature settings .......................................................................50

22 Accessories ...............................................................................................................54

23 Seismic bracket kits ....................................................................................................55

24 Exhaust check valve kits ...............................................................................................55

A1 Pump start control ......................................................................................................57

A2 Pump stop and control .................................................................................................58

A3 Normal menu ............................................................................................................58

A4 Normal menu ............................................................................................................59

A5 Status menu .............................................................................................................59

A6 SETUP menu .............................................................................................................60

A7 COMMANDS menu .......................................................................................................61

A8 GAS VALVES menu ......................................................................................................61

A9 INV FAULT HIST (Display Inverter Fault History) menu ...........................................................61

A10 FIT ACCESSORY menu ..................................................................................................62

M561-00-880 Issue C

Contents

A11 IP Configuration menu .................................................................................................62

A12 Display attributes menu ...............................................................................................63

A13 SELECT LINE (Normal display selection menu) .....................................................................63

A14 UNITS (Units to display) ................................................................................................63

A15 Warnings .................................................................................................................65

A16 Alarms ....................................................................................................................68

A17 Hexadecimal to digital conversion ...................................................................................70

A18 Inverter alarm codes ...................................................................................................71

A19 Inverter warnings codes ...............................................................................................72

A20 Inverter diagnostic display text ......................................................................................73

Associated publications

Publication title Publication number

Vacuum Pump and Vacuum System Safety P400-40-100 Semiconductor Pumping Application Guide P411-00-090

Trademark Credits

Han® is a registered trademark of Harting Electric GmbH EtherCon® is a registered trademark of Neutrik® AG Fomblin® is a registered trademark of Solvay Solexis SpA

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

CAUTION

WARNING

1Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards iXH, iXL and pXH dry pumping systems. You must use your pumping system as speci fied i n th is man ual otherw is e the protecti on provided by the equipment may be impaired.

Read this manual before you install and operate your pump. Important safety information is highlighted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

Warnings are given where failure to observe the instruction could result in injury or death to people.

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and/or process.

Introduction

The units throughout this manual conform to the SI international system of units of measurement. The following warning labels are on the pump:

Warning - Refer to accompanying documentation.

Warning - Risk of electric shock. Warning - Heavy object.

Warning - Hot surfaces. Protective earth (ground).

Warning - Moving parts present.

Warning - Maximum angle between paired slings

Warning - use protective equipment. RF earth (ground).

M561-00-880 Issue C

Introduction

The following warnings only appear in this manual:

Warning - Risk of explosion. Warning - pressurised.

Material Safety Data Sheets for chemicals supplied by Edwards can be obtained by contacting Edwards, or on www.edwardsvacuum.com.

1.2 Applications

iXH, iXL and pXH pumping systems are intended for use on the Semiconductor, Solar and FPD processes shown in

Figure 1.

Figure 1 - Applications

iXH, iXL and pXH applications

ALD Metal Etch RTP

HDP-CVD Metrology SACVD

Implant Source Oxide etch Silicon Etch

Lithography PECVD Strip/Ashing

Load lock PVD Pre-Clean Transfer

LPCVD PVD Process

MOCVD RTA The iXL systems are intended for use on clean duty applications. If you use the system on an application for which it is not suitable, you may invalidate your warranties. If in doubt,

contact Edwards who will advise you as to the suitability of the system for any particular application.

1.3 Description

The iXH dry pump range has been developed to m ee t the demanding requirements for process pumping solutions in the Semiconductor, Flat Panel and Solar industries. The range se ts new standards for harsh process capability, reliability and reduced cost of ownership in lo w footprint packages.

The iXL pump range has been developed to meet cyclic loadlock duty applications used in the flat panel and solar industries.

The pXH booster systems are not intended for use as stand-alone units. Each system must be backed using a suitable Edwards dry pump selected to match process and performance specifications.

1.4 Priority of control

The pumping system can be controlled by a number of modules: the front control panel (refer to Figure 2), a Pump Display Terminal (PDT), the Edwards System Controller or by the tool through the MicroTIM or one of the serial interfaces. Only one of these can have control of the system at any one time. That is, once one of these has control of the system, control requests from the others are denied.

In addition to the control modules listed above, the pXH proximity booster can control or be controlled by the Edwards backing pump. C ontact Edwards for more information on how to control a pXH using an iXH or other Edwards pumping system.

The PDT indicates who is in control. LEDs are also provided on the rear pane l, front panel or PDT, which illuminate to indicate 'in control'.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

Item

Control/connector identification

1EMS button 2 Running LED (green) 3 Start button 4Stop button 5 Local control button 6 Local control LED (green) 7 Power LED (green) 8 Warning LED (amber)

9Alarm LED (red) 10 Green Mode LED (green) 11 PDT (Pump Display Terminal)

connection

Item

Control/connector identification

1 Front panel control 2 Levelling feet (4 off) 3Castors (4 off) 4 Seismic bracket (4 off if

fitted) 5 Pumped gas inlet connection 6 RF Earth (ground) cable 7Extraction port 8 Lifting eyebolts (4 off)

1.5 Active utility control

The Active Utility Control (Green Mode) function reduces utility consumption of the system while on stand-by. The Green Mode functionality is controlled by the on/off process signal from the Tool Interface Module. Contact Edwards for advice on application and activation.

Figure 2 - The front panel controls

Introduction

Figure 3 - Front view of pumping system

Note: iXH 100, iXH 200H and iXH 610 variants have only two eyebolts provided for lifting.

M561-00-880 Issue C

Item Control/connector identification

1 Ethernet LAN LED (green) 2 Ethernet link LED (yellow) 3 Ethernet connection 4Power LED (green) 5System interface 6 Warning LED (yellow) 7 Running and Alarm LEDs (2 colours,

either green or red) 8 Accessory interface 9 MicroTIM in control LED (green)

10 EMS interface

11 Micro TIM connection (if fitted) 12 Electrical supply connection 13 Electrical connector locking

mechanism 14 Nitrogen purge connection 15 Cooling water supply connection 16 Protective earth (ground) stud 17 Exhaust gas outlet connection 18 Cooling water return connection 19 RF earth (ground) stud

Item Control/connector identification

Introduction

Figure 4 - The controls/connectors on the rear of the pump

Edwards and the Edwards logo are trademarks of Edwards Limited.

Edwards and the Edwards logo are trademarks of Ed wards Limited.

2Technical data

2.1 General technical data

Table 1 - General technical data

Characteristics

Body dimensions

Pump

Units mm kg dB(A) mm/s kg force kg force mm

iXH100 784 x 390 x 526 260 < 70 < 1.5 < 20 < 4 ISO63 NW40 105 iXH200H 901 x 390 x 526 287 < 70 < 1.5 < 20 < 4 ISO63 NW40 105 iXH450H 1000 x 517 x 650 455 < 70 < 1.5 < 20 < 10 ISO63 NW40 105 iXH500H 1000 x 517 x 650 490 < 70 < 1.5 < 20 < 10 ISO63 NW40 105

iXH610 784 x 390 x 780 355 < 70 < 1.5 < 20 < 4 ISO100 NW40 105

iXH1210/H 784 x 390 x 780 413 - 430 < 70 < 1.5 < 20 < 4 ISO100 NW40 105

iXH1220H/T 901 x 390 x 780 455 - 460 < 70 < 1.5 < 20 < 4 ISO100 NW40 105

iXH1820/H/T 901 x 390 x 780 471 - 487 < 70 < 1.5 < 20 < 4 ISO160 NW40 105

iXH3030/T 915 x 517 x 966 619 - 624 < 70 < 1.5 < 20 < 10 ISO160 NW40 105

iXH3045H 1000 x 517 x 966 776 70 < 1.5 < 20 < 10 ISO160 NW40 105

iXH3050H 1000 x 517 x 966 811 70 < 1.5 < 20 < 10 ISO160 NW40 105 iXH4545HT 1000 x 517 x 966 814 70 < 1.5 < 20 < 10 ISO200 NW40 105 iXH4550HT 1000 x 517 x 966 849 70 < 1.5 < 20 < 10 ISO200 NW40 105

iXH6045H/T 1080 x 517 x 966 860 - 865 74 < 1.5 < 20 < 10 ISO250 NW40 105 iXH6050H/T 1080 x 517 x 966 899 70 < 1.5 < 20 < 10 ISO250 NW40 105

pXH4500 1086 x 517 x 531 400 < 70 < 1.5 < 20 < 10 ISO200 ISO160 - pXH6000 1086 x 517 x 531 435 < 70 < 1.5 < 20 < 10 ISO250 ISO160 -

iXL250Q 1092 x 390 x 830 515 <64 <1.5 <20 <10 ISO160 NW40 105 iXL500Q 1186 x 517 x 966 860 < 70 < 1.5 < 20 < 10 ISO160 NW50 105

iXL500R 1186 x 517 x 966 874 < 70 < 1.5 < 20 < 10 ISO160 NW50 105

Length x Width x

Height

(excludes exhaust

enclosure)

Mass (excluding packaging)

Noise level

(at ultimate)

Typical

vibration

level at inlet

Initial force to push the

pump

†

Sustained

force to push

the pump

†

Pump inlet

flange

(bolted)

Exhaust gas

outlet

Extraction

diameter

port

M561-00-880 Issue C

Technical data

Body dimensions

Pump

Units mm kg dB(A) mm/s kg force kg force mm

iXL750Q 1622 x 517 x 1031 918 <70 <1.5 22 <10 ISO160 NW50 105

iXL750R 1622 x 517 x 1031 976 <70 <1.5 22 <10 ISO160 NW50 105

Contact Edwards for installation drawings

†

Measured in laboratory on level concrete surface

Edwards and the Edwards logo are trademarks of Edwards Limited.

Item Description Rating Units

Operating conditions

Materials in contact with process gas

Degree of protection provided by enclosure

Length x Width x

Height

(excludes exhaust

enclosure)

Mass (excluding packaging)

Intended use Indoor Ambient temperature range:

Operating 5 to 40 °C Storage -45 to 55 °C

Maximum relative humidity: 80% for temperatures up to 31 °C decreasing linearly to 50% relative

Maximum operating altitude 2000 m Pollution degree 2 (IEC 61010) Pump, shaft and rotors Ca st Iron, Steel Seals PTFE and fluoroelastomer Gas system Stainless steel, aluminium, brass, PTFE and fluoroelastomer Enclosure protection when installed IP21D (IEC60529)

Table 1 - General technical data (continued)

Characteristics

Noise level

(at ultimate)

Table 2 - General technical data

Typical

vibration

level at inlet

humidity at 40 °C

Initial force to push the

pump

†

Sustained

force to push

the pump

†

Pump inlet

flange

(bolted)

Exhaust gas

outlet

Extraction

port

diameter

M561-00-880 Issue C

Edwards and the Edwards logo are trademarks of Ed wards Limited.

2.2 Performance data

Table 3 - Performance data

Characteristics

Pump

Units m

Typical peak pumping speed

/h mbar mbar

iXH100 100 < 3 x 10 iXH200H 215 < 3 x 10 iXH450H 500 < 3 x 10 iXH500H 500 < 3 x 10

iXH610 665 < 5 x 10

iXH1210/H 1025 - 1065 < 5 x 10

iXH1220H/T 1200 - 1250 < 5 x 10

iXH1820/H/T 1700 - 1900 < 5 x 10

iXH3030/T 2750 - 2900 < 5 x 10

iXH3045H 3225 < 5 x 10

iXH3050H 3200 < 5 x 10 iXH4545HT 4450 < 5 x 10 iXH4550HT 4220 < 5 x 10

iXH6045H/T 5000 - 5200 < 5 x 10 iXH6050H/T 5000 - 5200 < 5 x 10

pXH4500 N/A < 5 x 10 pXH6000 N/A < 5 x 10

iXL250Q 1900 < 1 x 10 iXL500Q 2150 < 5 x 10

iXL500R 3100 < 5 x 10

iXL750Q 2300 < 1 x 10

iXL750R 3450 < 1 x 10

Speed may be limited

†

Ultimate achieved when pXH used in conjunction with an appropriate backing pump. Please contact Edwards to discuss your application. The pXH does not have a shaft seal purge.

Ultimate

(shaft seal purge only)

-2

-3

-3†

-3

Maximum continuous inlet pressure

1000 1000

1000

1000 1000 1000 1000

1000

M561-00-880 Issue C

Technical data

M561-00-880 Issue C

2.3 Loading data

Table 4 - Loading data (refer to Figure 5)

Pump

Unitsmmmmmmmmmm kg kg kg kg

iXH100 697 295 165.5 311 280 80 59 51 70 iXH200H 814 403 165.5 311 261 77 76 66 68 iXH450H 924 443 220 427 323 122 112 106 115 iXH500H 924 422 220 427 324 137 115 109 129

iXH610 697 329 165.5 311 374 100 89 78 88

iXH1210/H 697 330 165.5 311 430 122 106 94 108

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iXH1220H/T 814 457 165.5 311 430 107 136 120 94

iXH1820/H/T 814 400 165.5 311 433 134 127 112 118

iXH3030/T 829 395 230 436 545 183 147 131 164

iXH3045H 924 422 220.5 427 534 218 183 171 203

iXH3050H 924 409 220 427 524 233 185 174 219 iXH4545HT 924 422 220.5 427 539 228 192 180 214 iXH4550HT 924 411 220.5 427 529 243 195 183 228

iXH6045H/T 1004 398 220.5 427 549 269 177 166 252 iXH6050H/T 1004 388 220.5 427 539 285 179 168 267

pXH4500 990 460.5 225 438 325 110 96 90 104 pXH6000 990 422 224.5 438 326 128 95 90 122

iXL250Q 1038 421 130.5 261 463 154 103 103 154 iXL500Q 1110 497 219 427 468 212 172 164 202

iXL500R 1110 497 219 427 468 241 195 185 229

iXL750Q 1547 730.9 169 338 512.2 215 244 244 215

iXL750R 1547 722.1 169 338 534.6 229 259 259 229

ABCDE1234

Dimension to centre of gravity Load at levelling foot position

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Figure 5 - Centre of gravity and levelling foot loads

2.4 Nitrogen purge data

Table 5 - Nitrogen purge data for iXH and iXL systems

Characteristics Rating Units

Nitrogen supply pressure range 2.5-6.9 bar gauge

Nitrogen supply quality To ISO 8573 Nitrogen inlet connection 1/4 inch tube fitting

Note: pXH systems do not have a nitrogen purge facility.

M561-00-880 Issue C

36 - 100 psi gauge

Technical data

Edwards and the Edwards logo are trademarks of Edwards Limited.

Note: If you are not sure which gas module is fitted to your system, find the product code number on the label on the rear of the pump and then refer to the

product configurators at the start of this manual.

Table 6 - Gas module types and flows

For iXH systems:

Gas module type

Loadlock Shaft seal only 4 4 - - - - -

Single mode

Single mode +

Multi mode

Contact Edwards

Note: H variant pumps fitted with Single Mode+ modules include the innovative Gas Buster

Description

Gas ballast purge with harsh/medium manually selected

Gas ballast purge with harsh/medium manually selected + inlet purge

Gas ballast purge with electronically selected harsh/medium + inlet purge + exhaust purge

Module

sizes

available

44 44 28 - - - slm

96 96 56 - - - slm 133 133 88 - - - slm 204 204 133 - - - slm

44 44 28 60 - - slm

96 96 56 122 - - slm 133 133 88 173 - - slm 204 204 133 264 - - slm

44 44 22 60 94 110 slm

96 96 34 122 146 172 slm 133 133 65 173 183 223 slm 204 204

Total fl ow,

harsh

setting

Total flow,

medium

setting

inlet purge for improved powder handling.

Total flow with inlet

purge

264 254 314 slm

Total fl ow

with

exhaust

purge

Total flow with inlet

and exhaust

purge

Units

M561-00-880 Issue C

For iXL systems:

iXL systems are designed for use on clean applications only.

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2.5 Electrical data

Table 7 - Electrical data iXH100 to iXH1820/H/T

Characteristics iXH100 iXH200H iXH450H iXH500H iXH610 iXH1210 iXH1210H iXH1220H/T iXH1820/H/T Units

Dry pump motor rating 4.5 7.5 11 11 4.5 4.5 7.5 7.5 7.5 kW Mechanical booster

motor rating Current rating

(200 - 230 V systems) Current rating

(380 - 460 V systems) Recommended branch

circuit fuse UL (200 - 230 V systems)

Recommended branch circuit fuse IEC (200 - 230 V systems)

Recommended branch circuit fuse UL (380 - 460 V systems)

Recommended branch circuit fuse IEC (380 - 460 V systems)

Min cable size for 200 230 V systems (or corresponding AWG size)

Min cable size for 380 460 V systems (or corresponding AWG size)

Mains connector Han

----1.94.54.54.54.5kW

21 38 44 44 28 28 38 38 38 A

11 20 23 23 14 14 20 20 20 A

25 45 55 55 35 35 45 45 45 A

25 40 45 45 30 30 40 40 40 A

15 25 30 30 20 20 25 25 25 A

15 20 25 25 15 15 20 20 20 A

6 (8)

K 4/4 Han® K 4/4 Han® K 4/4 Han® K 4/4 Han® K 4/4 Han® K 4/4 Han® K 4/4 Han® K 4/4 Han® K 4/4 -

10 (6) 10 (6) 10 (6) 6 (8)

6 (8)

10 (6) 10 (6) 10 (6) mm2 (AWG)

6 (8)

mm2 (AWG)

M561-00-880 Issue C

The minimum geometric wire gauge for Han® K 4/4 is 6mm2 and minimum AWG size is 8 AWG

Technical data

M561-00-880 Issue C

Table 7 - Electrical data iXH3030/T to pXH6000 (continued)

Characteristics iXH3030/T iXH3045H iXH3050H iXH4545HT iXH4550HT iXH6045H/T iXH6050H/T pXH4500 pXH6000 Units

Dry pump motor rating7.5111111111111 - - kW Mechanical booster

7.5 7.5 7.5 7.5 7.5 7.5 7.5 7.5 7.5 kW

motor rating Current rating

44 63 63 63 63 63 63 28 28 A

(200 - 230 V systems) Current rating

23 32 32 32 32 32 32 14 14 A

(380 - 460 V systems) Recommended branch

55 80 80 80 80 80 80 35 35 A circuit fuse UL (200 - 230 V systems)

Recommended branch

45 65 65 65 65 65 65 30 30 A circuit fuse IEC

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(200 - 230 V systems) Recommended branch

30 40 40 40 40 40 40 20 20 A circuit fuse UL (380 - 460 V systems)

Recommended branch

25 35 35 35 35 35 35 15 15 A circuit fuse IEC (380 - 460 V systems)

Min cable size for 200 -

10 (6) 25 (4) 25 (4) 25 (4) 25 (4) 25 (4) 25 (4) 6 (8)

6 (8)

mm2 (AWG) 230 V systems (or corresponding AWG size)

Min cable size for 380 -

6 (8)

10 (6)

†

10 (6)

†

10 (6)

†

10 (6)

†

10 (6)

†

10 (6)

†

6 (8)

mm2 (AWG) 460 V systems (or corresponding AWG size)

Mains connector Han

K 4/4 Han® 100 A

module

The minimum geometric wire gauge for Han® K 4/4 is 6mm² and minimum AWG size is 8 AWG

†

The minimum geometric wire gauge for Han® 100A module is 10mm² and minimum AWG size is 6 AWG

Han® 100 A

module

Han® 100 A

module

Han® 100 A

module

Han® 100A

module

Han® 100A

module

Han® K 4/4 Han® K 4/4 -

Edwards and the Edwards logo are trademarks of Ed wards Limited.

Table 7 - Electrical data iXL250Q, iXL500Q/R and iXL750Q/R (continued)

Characteristics iXL250Q iXL500Q iXL500R i XL750Q iXL750R Units

Dry pump motor rating 7.5 11 11 22 22 kW Mechanical booster motor rating 4.5 7.5 7.5 7.5 705 kW Current rating (200 - 230 V systems) 38 75 63 140 135 A Current rating (380 - 460 V systems) 20 40 32 78 74 A Recommended branch circuit fuse UL (200 - 230 V

systems) Recommended branch circuit fuse IEC (200 - 230 V

systems) Recommended branch circuit fuse UL (380 - 460 V

systems) Recommended branch circuit fuse IEC (380 - 460 V

systems) Min cable size for 200 - 230 V systems (or corresponding

AWG size) Min cable size for 380 - 460 V systems (or corresponding

AWG size) Mains connector for 200 - 230 V systems Han

Mains connector for 380 - 460 V systems Han® K 4/4 Han® 100 A

†

The minimum geometric wire gauge for Han® 100A module is 10mm² and minimum AWG size is 6 AWG

50 100 80 170 160 A

35 80 65 140 135 A

25 50 40 95 90 A

20 50 35 80 75 A

10 (8) 25 (4) 25 (4) 50 (1/0) 50 (1/0) mm

6 (8)

K 4/4 Han® 100 A

10 (6)

module

†

Han® 100 A

10 (6)

module

†

25 (4) 25 (4) mm2 (AWG)

Han® 200 A

module

Han® 100 A

module

Han® 200 A

module

Han® 100 A

module

(AWG)

M561-00-880 Issue C

Technical data

Description Rating Units

Supply voltage 3-phase either 200 - 230 or 380 - 460 (see rating plate) V a.c. Frequency 50/60 Hz Wiring configuration 3 wire plus earth (ground) Branch circuit protection requirement Current rating, refer to Table 7 Fuse Class gG (IEC 60269), UL class T, class J or class RK5, Bussmann type JJS or equivalent

Voltage tolerance range +/- 10% Installation category II (IEC 60664) Input supply voltage unbalance Should not exceed 2% when assessed over any one minute period Short circuit current rating (when installed with

Edwards and the Edwards logo are trademarks of Edwards Limited.

class T or class J fuses) Second protective earth (ground) conductor Must be fitted with cross-sectional area at least equal to phase conductor size up to 16 mm Maximum permitted overcurrent protection for

systems with the Han

for 200 - 230 V systems 60 A for 380 - 460 V systems 35 A

Typical earth leakage

For 200 - 230 V systems

- for iXL750Q and iXL750R

- for all other systems For 380 - 460 V systems

- for iXL750Q and iXL750R

- for all other systems

If you use overcurrent protection above the ra tings in Table 7 for systems with the Han® K 4/4, the minimum cable sizes no longer apply and you must ensure that the pump cable size is appropriately rated and in accordance with local legislation and electrical regulations. Ensure that cable size is compatible with the mains connector, refer to Table 9.

†

Typical earth leakage values were measured at steady-state conditions. Note that higher leakage currents ma y occur: i) under transient conditions such as power on or pump acceleration or ii) with abnormal supply configurations such as a missing or earthed phase or unbalanced supply voltages.

K 4/4 mains connector

†

t characteristic rate d to 600 V

200 kA

9 <5

18 <10

Table 8 - General electrical data

mA mA

M561-00-880 Issue C

Contact Edwards for more information about configuration requirements for earth leakage reduction.

Edwards and the Edwards logo are trademarks of Ed wards Limited.

Table 9 - Electrical connections

Description Mating Connector description / external supply rating Internal supply rating Mains connection

Refer to insta llation section for wiring diagram

Harting Han® Axial Screw module 100A (2 off required), 09 14 002 2753 10-25 mm

Harting Han® Axial Screw module 200A (3 off required), part number of mating

40 - 70 mm2 wire. Use fine stranded wire (VDE 0295 class 5, refer to Table 10)

PDT Interface (front) XLR type 5-way plug 24 V d.c. 0.2 A System Interface (rear) XLR type 5-way plug 24 V d.c. 0.75 A

Ethernet interface EMS interface

External emergency stop switch Pin 1 - supply, Pin 2 - return

Note: If there is no external connection a link plug must be fitted to operate the pump.

Internal emergency stop switch Pin 3 - common, Pin 4 - normally open 30 V a.c. 1 A, 60 V d.c. 0.55 A

Comms 24 V supply Pin 5 - supply, Pin 6 - 0 V supply common

Chassis

Refer to Table 7 for the mains connector fitted to each variant.

Connector is either:

Harting Han® K 4/4-F finger safe

09 38 008 2703, 6-16 mm

(VDE 0295 class 5, refer to Table 10), 8.9mm max insulation diameter

or 09 14 002 2751, 16-35 mm2 fine stranded wire

(VDE 0295 class 5, refer to Table 10)

half suitable for 25 - 40 mm

Standard RJ45 type or Neutrik® EtherCon® RJ45 (IEEE802.3i

wire is 09 14 001 2763 or 09 14 001 2762 for

XLR type 6-way plug

fine stranded wire

10 Base T Ethernet)

24 V d.c. 100 mA

24 V d.c. 0.75 A

M561-00-880 Issue C

Technical data

Description Mating Connector description / external supply rating Internal supply rating Accessory interface 15-way D socket

Analogue measurement for water flow meter Pin 1 - input, Pin 5 common

Active accessory module Pin 3 - RS485 +, Pin 10 - RS485 –

Pump running status contacts Pin 6 - Dry pump (normally open) Pin 14 - Mechanical booster (normally open) Pin 15 – common 30 V a.c. 1 A, 60 V d.c. 0.5 A

Gate valve Pin 4 - Gate valve drive transistor (open collector)

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Gate valve position sense Pin 7 - ‘Closed’, Pin 8 - ‘Open’

Power Supplies Pin 12 - Accessory 24 V supply Pin 13 - Accessory 24 V supply Pin 5 - 0 V supply common

The System interface, the EMS interface and the Accessory interface have a combined current rating of 0.75 A.

†

This supply will be disconnected in the event of an emergency stop.

†

Table 9 - Electrical connections (continued)

24 V d.c. 0.75 A

24 V d.c. 0.2 A

M561-00-880 Issue C

Table 10 - Wire assembly according to VDE 0295

Wire Size (mm²) Fine stranded wires VDE 0295 class 5

6 84 x 0.30 10 80 x 0.40 16 128 x 0.40 25 200 x 0.40 35 280 x 0.40 50 400 x 0.40

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2.6 Cooling-water data

Table 11 - Water cooling system data

Description Rating Units

Maximum supply pressure 6.9 barg

100 psig Maximum allowable system differential pressure 5.5 bar Minimum required pressure differential across supply and return Refer to Table 13 Supply temperature range Refer to Table 12 Water type Treated or non-corrosive industrial Maximum particle size 0.03 mm Acidity 6.5 to 8.0 pH Hardness <100 ppm of CaCO Resistivity 1k ≤ ρ ≤ 1000k ohm-cm Materials in contact with

cooling water Water inlet connection 3/8 inch BSP male quick connector Water outlet connection 3/8 inch BSP female quick connector

Stainless steel, Nitrile, PTFE, brass and

fluoroelastomer

(<100 mg of CaCO3 per litre)

M561-00-880 Issue C

Technical data

Table 12 - Cooling water supply temperature

Cooling water supply temperature Units Applies to pump models

10 - 30 °C iXH100

iXH200H iXH610 iXH1210/H iXH1220H/T iXH1820/H/T iXH3030/T iXL250Q

10 - 25 °C iXH450H

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iXH500H iXH3045H iXH3050H iXH4545HT iXH4550HT iXH6045H/T iXH6050H/T pXH4500 pXH6000 iXL500Q iXL500R iXL750Q iXL750R

M561-00-880 Issue C

Table 13 - Water consumption data

Characteristics

Pump

Units l/min l/min bar

iXH100 22 1 iXH200H 42.7 1 iXH450H 66 1.25 iXH500H 66 1.25

iXH610 43 1

iXH1210 54 1

iXH1210H 64.2 1

iXH1220H/T 74.7 1

iXH1820 64.2 1 iXH1820H 74.7 1 iXH1820T 6 3.5 1

iXH3030 87 1.5 iXH3030T 88 1.5 iXH3045H 12 11 2 iXH3050H 12 11 2

iXH4545HT 12 11 2

iXH4550HT 12 11 2 iXH6045H/T 12 11 2 iXH6050H/T 12 11 2

pXH4500 66 1.25 pXH6000 66 1.25

iXL250Q 7 61 iXL500Q 12 11 2

iXL500R 12 11 2

iXL750Q 10 92.5

iXL750R 10 92.5

Water consumption varies with pump operating temperature and water temperature; these figures measured at factory default internal pump temperature, 15°C water inlet temperature and ultimate inlet pressure.

†

The TMS is a valved system and the ‘Rated Min Pressure Differential’ may not correlate with water flow rates stated in the table under all operating conditions. The ‘Rated Min Pressure Differential’ is required to maintain adequate cooling water flow under adverse operating conditions.

Min flow rate required

(for low temp operation)

Typical water flow rate

Rated Min Pressure Differential

†

Technical data

M561-00-880 Issue C

Technical data

2.7 T variants

Table 14 - Heater data

Description Rating Units

Exhaust heater control temperature 160 °C Exhaust heater power consumption 0.2 kW Typical booster heater control

temperature Typical booster heater power

consumption

2.8 Tracer gas analysis

Tracer gas fugitive emission testing was carried out in accordance w ith the method given in Appendix A2 of SEMI S6 on three different systems, iXH100, iXH1820 and iXH6045H.

Table 15 - Tracer gas test parameters

Test Parameters

Tracer gas SF Tracer gas concentration 100% Tracer gas release rate 2 slpm Tracer gas release points Tracer gas flow evenly split between 2 release points

Process gas Nitrogen

(Sulphur Hexafluoride)

1) exhaust flange on pump

2) exhaust elbow joint within exhaust extraction cover

106 °C

1kW

Table 16 - Tracer gas test system parameters

System Parameters iXH100 iXH1820 iXH6045H Units

Extraction flow rate: From port on top of enclosure From port on exhaust extraction kit

Volume of enclosure 0.13 0.24 0.46 m Free volume of enclosure 0.074 0.118 0.229 m Air changes per minute 40.54 25.4 11.2 Hardware configuration:

- 150mm duct connected to port on top of enclosure

- Exhaust extraction cover kit fitted

- 50mm duct connected to exhaust extraction kit

180

 

180

 

310

  

3 3

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Table 17 - Worst case test results

M561-00-880 Issue C

Technical data

Process Gas

Chlorine Cl Ammonia NH Arsine AsH Boron

BCl

Trichloride Carbon

CO 1 25 6.25 2 0.079 0.04 Pass

Monoxide Chlorine

ClF

Trifluoride DCS SiCl2H Diborane B Fluorine F Hydrogen H Hydrogen

2H6

HCl 20 5 1.25 2 0.079 0.79 Pass

Chloride Hydrogen

HF 2 3 0.75 2 0.079 0.08 Pass

Fluoride Nitrogen

Trifluoride Phosphine PH Silane SiH Sulphur

Hexafluoride TEOS SiC Tungsten

8H20O4

Hexafluoride

Maximum

Gas Flow

(slm)

TLV/LEL

(ppm)

25% TLV/

LEL (ppm)

Release

rate (slm)

Max SF

Detected

outside

enclosure

1 0.5 0.125 2 0.079 0.04 Pass 10 25 6.25 2 0.079 0.40 Pass

0.1 0.05 0.0125 2 0.079 0.00 Pass 1 5 1.25 2 0.079 0.04 Pass

0.5 0.1 0.025 2 0.079 0.02 Pass

2 5 1.25 2 0.079 0.08 Pass

0.05 0.1 0.025 2 0.079 0.00 Pass

4.5 1 0.25 2 0.079 0.18 Pass 150 4000 1000 2 0.079 5.93 Pass

10 10 2.5 2 0.079 0.4 Pass

0.2 0.3 0.075 2 0.079 0.01 Pass 6 5 1.25 2 0.079 0.24 Pass 2 1000 250 2 0.079 0.08 Pass

2 10 2.5 2 0.079 0.08 Pass 1 3 0.75 2 0.079 0.04 Pass

ERC

(ppm)

Pass/ Fail *

* where Pass indicates acceptable enclosure (satisfies SEMI S2 criteria of less than 25.0% of the TLV) The pumps tested represent the extremes of the full range of systems. The results in Table 17 are therefore

considered representative across the full range of iXH and iXL systems. Extraction flow rates required for each system are detailed in Table 18.

M561-00-880 Issue C

Technical data

Table 18 - Extraction rates required by system variant

System

iXH100 180 0 iXH200H 180 0 iXH450H 310 60 iXH500H 310 60 iXH610 180 0 iXH1210/H 180 0 iXH1220H/T 180 0 iXH1820/H/T 180 0 iXH3030/T 310 60 iXH3045H 310 60 iXH3050H 310 60 iXH4545HT 310 60 iXH4550HT 310 60 iXH6045H/T 310 60 iXH6050H/T 310 60 iXL250Q 180 60 iXL500Q 310 60 iXL500R 310 60 iXL750Q 310 60 iXL750R 310 310

Extraction rate required at top of enclosure

/h)

Extraction rate required at exhaust cover (m3/h)

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M561-00-880 Issue C

WARNING

3 Installation

Obey the safety instructions given below and take the appropriate precautions. If you do not, you can cause injury to people and damage to equipment.

The system should not be operated with the enclosure panels removed.

The system contains electrolytic capacitors which may emit dangerous fumes under certain fault conditions. Ensure the system is installed in a well-ventilated area.

Potential hazards on the dry pumping system include electricity, hot surfaces, process chemicals, F ombli n® oil, nitrogen and water under pressure.

Installation

Detailed safety information is given in Section 4 and Edwards Safety Manual Publication Number P400-40-100 Vacuum Pump and Vacuum Systems.

 Only Edwards trained engineers may install the dry pumping system. Users can be trained by Edwards to

conduct the tasks described in this manual, contact your local service centre or Edwards for more information.

 Do not remove the temporary cover or blanking plate from the dry pumping system inlet and exhaust until

you are ready to connect the dry pumping system to your vacuum or exhaust-extraction system. Do not operate the dry pumping system unless the inlet and exhaust are connected to your vacuum and exhaust-extraction system.

 V ent and purge the process system (if the dry pumping system is to replace an existing pumping system) with

nitrogen for 15 minutes before you start installation work. Refer to Section 5.

 Systems containing the Loadlock gas module must not be used with hazardous process gases. If you are not

sure which gas module is fitted to your system, find the product code number on the label on the rear of the pump and then refer to the product configurators at the start of this manual. If in doubt, consult Edwards.

 Disconnect the other components in the process system from the electrical supply so that they cannot be

operated accidentally.

 Electrical, nitrogen and water supplies are all potentially hazardous energy sources. Before carrying out any

maintenance the supply of these sources should be locked and tagged out.

 The pump system includes provision for ventilation extraction and secondary containment of oil and water

leaks. Any unintended overflows or spills must be removed immediately to avoid risk of slips.

 Obey all national and local rules and safety regulations when you install the dry pumping system. Consult

Edwards Safety Manual Publication Number P400-40-100 before you pump hazardous materials. This publication is available on request: contact your supplier or Edwards.

 Route and secure cables, hoses and pipework during installation to avoid possible risk of trips.  Before you locate the pump, ensure that the installation area is clean and free from de bris and

contamination (such as oil).

In order for the pumping system to perform to specification, you must provide appropriate facilities as detailed in this manual.

M561-00-880 Issue C

WARNING

Installation

3.1 Locate the dry pumping system

You must use suitable lifting equipment to move the system. It is too heavy to lift by hand.

Do not exceed the to pple angle o f 10 ° when m oving the pump. Wheel the system on its castors to move it into its operating position. The system should only be wheeled short distances over flat surfaces. If the floor surface is uneven or has obstacles the system should be lifted with suitable lifting equipment. If lifting the system is impractical, or there are other site difficulties, please consult Edwards for further advice.

Ensure that the maximum angle between paired slings used to lift the system is 45°.

Use the following procedure to locate the system in its operating position. The system must be loca ted on a firm, level surface, to ensure that it works correctly and the system is not d amaged. The pump must be level to a maximum of 3 degrees in any direction, measured at the pump inlet.

It is important to note that the castors are intended only to aid manoeuvre of the system into its final operating position. The force required to push a pump on its castors varies greatly depending on the surface finish and cleanliness of the floor and any slopes or inclines. It is the user's responsibili ty to carry out a risk assessm ent of their own location and take appropriate measures to ensure that the system is manoeuvred safely and in accordance w ith local and national manual handling guidelines.

1. Use suitable lifting equipment attached to all four lifting eyebolts to move the system close to its final operating position.

Note: The iXH100, iXH200H and iXH 610 variants have only two eyebolts provided for lifting. Figure 3, item 8.

2. Adju st the lev el lin g fe et ( Figure 3, item 2) to make sure that the system is level and is not supported by the castors, suggested jacking height is 5 mm.

3. Remove the lifting eyebolts and replace with the lifting eyebolt hole plugs supplied with the systems.

4. Ensure that access is possible to the emergency stop button (refer to Figure 2, item 1), if not use an iXH Disconnect Box (refer to Section 7.3).

If you want to secure the system in place to prevent inadvertent movement (for example, during an earthquake), take note of the following:

 The seismic brackets (Figure 3, item 4) are designed to withstand a level 4 earthquake in a ground floor

installation (available as an accessory, refer to Section 7.3).

 The system can be secured to the floor by fitting suitable bolts or studs (not supplied) through the 17.5 mm

diameter hole in the seismic brackets.

 If vibration transmission to the floor is a concern, suitable vibration isolators (not supplied) should be fitted

between the seismic brackets and the bolt or stud.

 Ensure that the bolt spacing is adequate for the floor strength and loads anticipated.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

WARNING

Figure 6 - Reduce the effective system footprint

 The pumping system has provision to attach four seismic brackets however on the smaller systems, two

brackets are capable of restraining the system during an earthquake. The smaller systems can therefore be secured as shown in Figure 6 for example, to reduce the effective system footprint if required. Refer to Section 7.3 to determine the correct seismic bracket kit for your system and for information about the

systems which may be restrained with only two brackets.

Installation

3.2 Lubrication

The pumping systems are given a charge of oil before leaving the factory. There is no requirement to check and adjust the oil level.

3.3 Connect the dry pumping system to your vacuum/exhaust

system

Pipe the exhaust to a suitable treatment plant to prevent the discharge of dangerous gases or vapours to the surrounding atmosphere.

Do not touch the pump exhaust and check-valve (if fitted) whilst the pump is running since the temperatures of these parts can cause burns. These parts will remain hot after the pump has stopped.

Do not operate the system with the exhaust pipeline blocked. If the exhaust pipeline is blocked, the system can generate exhaust pipeline pressures of up to 10 bar (10 x 105 Pa). Note that a pressure spike up to a maximum 15 bar (15 x 10 the exhaust pipeline on large pumps (iXH450H, iXH500H and iXL500*) if the inlet is instantaneously exposed to atmospheric pressure when the pump is running and the exhaust is blocked.

If you are not sure which dry pump you have, find the product code number on the label on the rear of the pump and then refer to the product configurator at the front of this manual.

Pa) can be generated for less than 1 second in

M561-00-880 Issue C

CAUTION

Installation

Use a catchpot to prevent the drainage of condensate back into the system. Condensate that drains back into the system could damage the pump.

Do not reuse any O-ring or O-ring assembly and do not allow debris to get into the system during installation. When you connect your pumping system to your vacuum system, take note of the following:

 To get the best pumping speed, ensure that the pipeline which connects the vacuum system to the pumping

system is the minimum length possible and has an internal diameter not less than the system inlet-port.

 Ensure that all components in the vacuum pipeline have a maximu m pressure rating which is gre ater than the

highest pressure that can be generated in your system.

 Incorporate flexible pipelines in the vacuum pipeline to reduce the transmission of vibration and to prevent

loading of coupling-joints. We recommend that you use Edwards braided flexible pipelines.

 For T variants and systems containing the iXH450H and iXH500H dry pumps, ensure that exhaust pipelines are

rated for 160 °C at the point of connection to the pump. For all other pump variants, ensure that pipelines are rated for 110 °C. Edwards recommends the use of metal seals at any joint where the continuous

operating temperature of the exhaust is greater than 160 °C.

 Adequately support vacuum/exhaust pipelines to prevent the transmission of stress to pipeline

coupling-joints.

 Incorporate a pressure gauge in the inlet pipeline, so that you can determine that the dry pumping system

operates correctly.

 You must be able to isolate the dry pumping system inlet from the atmosphere and from your vacuum system

if you have pumped or produced corrosive chemicals.

 The outlet of the iXH and iXL exhaust pipe can have a check-valve fitted which prevents the suck-back of

exhaust vapours after the pumping system is shutdown. The check-valve also provides additional attenuation of the pulses in exhaust pressure.

 On very dusty applications, use a low-impedance inlet-filter to minimise damage to the pump.

1. Referring to Figure 7, remove the temporary cover or blanking plate from the inlet of the pumping system. Take care not to drop screws, tools etc into the pump inlet. Retain the nuts, bolts, washers and blanking plate for future use. Retain the temporary cover for future use on non-contaminated pumps only. The inlet O-ring is supplied with the pump, it is fitted underneath the inlet flange cover.

2. Use the O-ring supplied and suitable nuts, bolts and washers (not supplied) to connect the inlet-flange (Figure 3, item 5) to your vacuum system. The inlet flange is not designed for use with a trapped O-ring or centering ring. Use Edwards half claw clamps when connecting an ISO style foreline flange to the pumping system inlet. Refer to Figure 7.

3. For iXH and iXL use the trapped O-ring seal and clamp supplied to connect the exhaust outlet (Figure 4, item 17) on the exhaust pipe, to your exhaust extraction system. underneath the product.

Note: The system is supplied with either a trapped O-ring or a metal seal depending on pump type and anticipated

exhaust temperatures. Ensure that you always replace seals with the same type.

For pXH systems, the exhaust connection is situated

Edwards and the Edwards logo are trademarks of Edwards Limited.

Figure 7 - Connecting the pump inlet

M561-00-880 Issue C

Installation

Use Edwards half claw clamps:

Flange diameter

ISO63 C10007093 4 5 ISO100 C10007093 8 5 ISO160 C10011093 8 5 ISO200 C10011093 12 5 ISO250 C10011093 12 5

Half Claw Clamp

Part No.

Qty Required

Tightening T orque

(Nm)

3.4 Connect to your factory extraction system (optional)

An extraction port is provided on iXH and iXL systems to allow secondary exhaust ventilation. Wh en conne cted, the airflow operates continuously and will extract substances of concern that may be released during a failure.

Refer to Section 2.8 for extraction rates required for each pump model and to Section 7.3 for the required exhaust extraction cover kit.

Refer to Figure 3, item 7 for location of the extraction port. The pXH does not have facility for extraction.

M561-00-880 Issue C

CAUTION

WARNING

Installation

3.5 Connect the nitrogen supply

Ensure that your nitrogen supply conforms to the requirements given in the Technical Data Section. If it doesn’t, the gas pipelines may become blocked or the system may be damaged.

Refer to Figure 4, item 14 for location of the nitrogen purge port. The gas module inside the system may be adjusted to suit process demands. Refer to Section 5.6 for instructions on gas module configuration. The pXH does not have the facility for a nitrogen purge.

Note: Refer to Section 2.4 for nitrogen supply requirements.

3.5.1 Flammable/pyrophoric materials

You must obey the instructions and take note of any precautions given below to ensure that pumped gases do not enter their flammable ranges.

When flammable or pyrophoric materials are present within the pump there may be additional risks that the user is responsible for assessing and managing as part of the entire Process Tool installation. The severity of the risks and the necessary control measures will depend largely on whether the tool exhaust is i n the flammable region, i f this is part of normal Process Tool operation, or if it might only occur under rare conditions. The additional risks arise because all dry pumps must be considered a potential source of ignition owing to the heat of compression, or possibly friction. If ignition occurs then the following may happen:

 High pressures could occur within the pump and may not be contained  A flame front could travel back up the foreline  A flame front could travel downstream from the exhaust of the pump.

Industry best practice suggests that the following measures will reduce the risks of pu mping flammable mi xtures and pyrophoric materials, but it is the user's responsibility to carry out a risk assessment and take appropriate measures:

 Do not allow air to enter the equipment  Ensure that the system is leak tight  Ensure that gases in the pump do not enter the flammable range. This may be achieved by diluting gases in

the pump by supplying sufficient inert gas purge. For example, dilution with nitrogen to below one quarter LEL (lower explosive limit) or, if that is not practical, to below 60% LOC (limiting oxidant concentration).

 The gas module supplied with the pump is not intended to perform a safety function. Users may need to

consider adding appropriate measures to monitor the flow of purge gas, for example external sensors. Systems that are fitted with the loadlock gas module must not be used on applications pumping flammable or pyrophoric materials.

For further information please refer to Semiconductor Pumping Application Guide (Publication no. P411-00-090) or contact Edwards.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

WARNING

3.5.2 Gas purges

If you use inert gas purges to dilute dangerous gases to a safe level, ensure that the pump is shut down if an inert gas supply fails.

Switch on the inert gas purge to remove air from the pump and the exhaust pipeline before the process starts. Switch off the purge flow at the end of the process only after the remaining flammable gases or vapours have b een purged from the exhaust pipeline.

If liquids that produce flammable vapours could be present in the pump foreline, then the inert gas purge to the dry pumping system should be left on all the time this liquid is present. Flammable liquids could be present in the foreline as a result of condensation or may be carried over from the process.

When calculating the flow rate of inert gas required for dilution, consider the maximum flow rate for the flammable gases/vapours that could occur. For example, if a mass flow controller is being used to supply flammable gases to the process, you should assume a flow rate for flammable gases that could arise if the mass flow controller is fully open.

Continually measure the inert gas flow rate: if the flow rate falls below that required, then the flow of flammable gases or vapours to the pump must be stopped.

Installation

3.6 Leak-test the system

Leak test the system after installation and seal any leaks found to prevent leakage of dangerous substances out of the system and leakage of air into the system.

Note: If you need further information on leak-testing, contact your supplier or Edwards for advice.

3.7 Electrical supply

Ensure that the electrical installation of the pumping system conforms with your local and national safety requirements. It must be connected to a suitably fused and protected electrical supply and a suitable earth (ground) point.

This equipment is suitable for Installation Category II as defined in IEC 60664-1. The dry pumping system must be connected to an isolator that disconnects all current carrying conductors and can be locked out in the off position (LOTO). The isolator must be in close proximity to the equipment, within easy reach of the operator and identified as the disconnect device for the equipment.

Isolate the electrical supply before you disconnect the electrical supply cable from the dry pumping system.

M561-00-880 Issue C

CAUTION

WARNING

Installation

Ensure that the system and your electrical supply cable are suitably protected against earth (ground) faults and that the earth (ground) conductor of the electrical supply cable is longer than the phase conductors in the connector. You must fit a second protective earth (ground) conductor (with a cross-sectional area at least equal to phase conductor size up to 16 mm earth (ground) stud, Figure 4, item 16.

All connections to the interface control must be double insulated or have equivalent protection. Do not connect voltages greater than 30 V a.c. or 60 V d.c. to the control/interface connections. If you do, the interface control will not provide protection against electric shock.

The power wiring to the system must be properly protected.

) to the protective

All systems are supplied already configured for your electrical supply. You cannot reconfigure the system between the low voltage (200 V to 230 V) and high voltage (380 V to 460 V) ranges.

This is an industrial (Class A) product as defined by EN61326. To ensure compliance with European Electromagnetic Compatibility (EMC) requirements for EMC emissions, please note that it is not intended for use in domestic buildings, or in properties directly connected to an electrical supply network which also supplies domestic buildings.

Do not connect voltages greater than specified in Table 9 to the control/interface connections. If you do, the interface control may be damaged.

Contact Edwards if you wish to use the system with a power supply in a different voltage range to that specified on the rating plate.

The system is protected from motor overloads and short circuits by solid state electronics. The power wiring be tween the system and your electrical installation must be protected. When selecting overload protection, refer to

Section 2.5. Pump rating information can be found on the label on the rear of the pump.

If you connect the electrical supply to your system through an ELCB (or RCD depending on territory) it must be suitable for protection of equipment with a d.c. component in the fault current, and suitable for short duration switch-on surges, and for high leakage current (for example, type B, according to EN50178).

The secondary protective earth (ground) is required in case of failure of the primary earth and b ecause pump filters can cause high earth leakage currents, refer to Table 8.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

WARNING

3.7.1 Mains supply cable connection

The Harting connector is not approved for connection and disconnection under load.

If you need further information on connecting the electrical supply, contact Edwards for advice. Three different types of electrical supply connector are used on these pumping systems. Refer to Section 2.5 for

details of the connector types and the systems to which they are fitted. Some pump variants are supplied with the appropriate parts needed to make up the mating half of the electrical connector available as an accessory, refer to Section 7.3. Refer to either Figure 8,9 or 10 for the appropriate electrical connector for your system and follow these instructions to make your electrical supply cable:

1. Screw the strain relief bush onto the connector outer cover.

2. Pass a suitable cable through the strain relief bush and cover. Refer to Section 2.5 for suitable cable sizes and type. Cables must be bare-ended without ferrules to ensure correct clamping in the connector block.

3. Before starting the assembly, use the hex (Allen) key specified in the appropriate figure to ensure that the axial cone is screwed fully downward to completely open the contact chamber.

, otherwise the connectors are

Installation

4. Carefully remove the cable insulation to the exact dimension specified in the appropriate figure. Do not twist the cable strands.

5. Referring to the appropriate figure to identify the connections, insert each wire completely into the contact chamber until the copper strands reach the bottom. Keep the cable in position while applying the recommended tightening torque.

6. Fit the earth (ground) wire to the Protective Earth connection as shown in the appropriate figure.

Note: The Protective Earth connection on the Han

to use one of the cable shoes (provided in the connecto r kit) to fit the protective earth (ground) wire. The cable shoe provided for the 380 - 460V systems is intended for 16 mm includes cable shoe options for 16mm2, 25mm2 and 35mm2 cables - you should choose the most appr opriate solution for the size of cable that you are using.

7. If coding pins are supplied, fit them to the connector block according to voltage variant as shown in the appropriate figure.

8. Refit the outer cover to the c onnector block then tighten the strain relief bush.

Note: Harting (the manufacturer of the connector) states that after initial assembly, the recommended

tightening torque must only be reapplied once in order to avoid damage to the individual cable strands.

9. The pumping system has an electrical connector locking mechanism (Figure 4, item 13) which requires use of a suitable screwdriver to release. Refer to Figure 11, the pumping system is supplied with a protective cover (item 5) fitted and the locking mechanism (item 1) may be applied. Follow these instructions to fit your electrical supply cable.

 Slacken off the locking screw (item 3) by a few turns to loosen the locking mechanism if necessary.

100A connector is on the hinged frame. It may be necessary

wire. The kit for 200 - 230V systems

 Move the locking mechanism (item 1) to the left as far as possible, then lift it up so that it rotates around the

pivot screw (item 2) and clears the left hand lever (item 4).

 Push back both levers (item 4) to release the protective cover.  Remove the protective cover and fit your electrical supply cable.  Pull both levers back towards you to lock your electrical supply cable connector in place.  Push the locking mechanism down as far as possible and then push to the right so that it prevents the left

hand lever from actuating.

M561-00-880 Issue C

Low volt pin configuration

High volt pin configuration

Pin identification

Pin 1 Phase 1 Pin 2 Phase 2 Pin 3 Phase 3 Pin 4 Not connected

PE Protective earth

Torque settings for connector pins

Cable size (mm

)

Max torque setting

(Nm)

62 10 3 16 4

Installation

 Tighten the locking screw (item 3) to firmly hold the locking mechanism in place.  Connect the other end of your electrical supply cable to your electrical supply through a suitable isolator.

Figure 8 - The Harting Han

K 4/4 cable-mounted connector

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Figure 9 - The Harting 100A axial screw module cable-mounted connector

Low volt pin configuration

High volt pin configuration

Pin identification

Pin A1 Phase 1 Pin A2 Phase 2 Pin D1 Not connected Pin D2 Phase 3

Torque settings for connector pins

Cable size (mm2) Max torque setting (Nm)

10 6

16 6

25 7

35 8

M561-00-880 Issue C

Installation

M561-00-880 Issue C

Item Identification

124 Frame hood 6 module A-F 2 200A female insert 4-70 mm

324 Hood M50 4 CONDUIT SLEEVE KIT 50 MM LV iXL750 5 Cable Gland M50 x 1.5 6 EARTH TERM 24B LV CON KIT iXL750 7 Clamp for 10 mm cable diameter Ground

Term

Installation

Figure 10 - Customer connection kit - combination low volts iXL750

Edwards and the Edwards logo are trademarks of Edwards Limited.

Figure 11 - Electrical connector locking mechanism

Item

Control/connector identification

1 Electrical connector

locking mechanism 2Pivot screw 3Locking screw 4 Lever (2 off) 5 Protective cover

M561-00-880 Issue C

Installation

3.8 Connect an additional RF earth (ground) (optional)

If you will operate the system in an area subject to high RF (radio frequency) emissions, in accordance with good RF installation practice, we recommend that you:

 Use a star washer to connect the end of the earth (ground) cable (Figure 3, item 6) connected to the system

inlet to one of the bolts that you use to secure the inlet-flange.

 Connect an additional earth (ground) cable to the RF earth (ground) stud (Figure 4, item 19). You must use a

suitable low-impedance cable (for example, use braided cable).

3.9 Connect to your emergency stop circuit

The EMS (Emergency Stop) button on the front panel of the system (Figure 2, item 1) is used to stop the pump in an emergency.

Note: Used on its own, the EMS does not isolate the electrical supply to the pumping system and so does not

provide an EMO (Emergency Off) function.

The pumping system has an external emergency stop circuit that can be connected into your own control equipment. (In this case, the emergency stop control should be compliant with IEC 60947-5-1 , a red self-latching mushroom p ush button on a yellow background).

If you wish to operate the pumping system without connecting it to your own control equipment you must fit the external EMS link plug (suppli ed) to the EMS connection on the rear of the s ystem (Figure 4, item 10). If you do not fit the EMS link plug the system will not operate.

If you require EMO functionality (for example, to satisfy the requirements of Semi S2) you can install the pumping system in combination with an Edwards Disconnect Box (available as an accessory, refer to Section 7.3). Refer to the Disconnect Box manual for installation instructions and information abou t the different ways the pumping system can be shut down in an emergency.

For pumps that are installed into an integrated system and receive their power from that system, an emergency off can be achieved by connecting the emergency stop circuit on the pump into the integrated system's emergency off circuit.

Refer to Section 4.6 for more information about pump behaviour after an emergency stop.

M561-00-880 Issue C

WARNING

Installation

3.10 Connect and set up the cooling-water

Do not turn on the cooling-water supply until after you complete the electrical installation of the pump. If you do, condensation may form inside the enclosure and there may be a risk of electric shock.

Notes: 1. For optimum water-cooling, ensure that your cooling-water supply meets the specification given in

Section 2.6. Ensure water supplies are connected in parallel. Refer to Figure 4, items 15 and 18. Edwards

recommends that quick connectors be used to reduce the risk of water spillage during connection/ disconnection. available as an accessory kit, refer to Section 7.3.

2. For minimum water consumption, regulate the cooling-water flow to the system.

Use the following procedure to connect the cooling-water supply and ensure that the system is receiving the correct water flow rate. Before you start, ensure that the electrical power supply to the system is switched off:

1. Use 3/8 inch BSP male pipe fittings to fit the female quick-release connector to the cooling-water supply hose and to fit the male quick-release connector to the cooling-water return hose.

2. Remove the dust-caps from the cooling-water inlet and outlet.

Some pump variants are supplied with quick connector mating halves, otherwise they are

3. Connect your water return hose to the cooling-water outlet (Figure 4, item 18), fit a water flow meter into the water supply line close to the pump and then connect your water supply hose to the cooling-water inlet (Figure 4, item 15).

4. Turn on the cooling-water supply.

5. Switch on the electrical power to the system. The water valves in the pump cooling system will automatically open in a pre-determined sequence. 12 Seconds after power is switched on, all the mai n pump water valves will open for a period of 20 seconds.

6. Whilst the main pump water valves are open, adjust the water flow rate so that it meets the requirements given in Table 13. Note that the water valves will all close again after 20 seconds and the flow rate displayed by the water flow meter will decrease - this is normal. If necessary, cycle the power to the p ump to re-open the valves for a further 20 seconds to continue setting the water flow rate.

7. Once the water flow rate has been set the water flow meter may be removed.

8. Inspect the water hoses, pipelines and connections and check that there are no leaks.

Turn off the water supply while you complete the remainder of the installation procedures.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

CAUTION

WARNING

3.11 Accessories

When fitting accessories inside the system enclosure, ensur e that you switch off the pump and lock and tag out the electrical supply before removing the enclosure panels.

The surfaces of the dry pump, booster and spools are very hot when the system is running. Allow these surfaces to cool to safe temperatures before installing accessories inside the system enclosure.

The power to the system must be switched off when the MicroTIM or active accessories module is installed or removed. If it is not, these modules may be damaged. Refer to the appropriate accessory manual for more information.

Refer to the individual accessories manuals for information about installation.

Installation

The disconnect box, when fitted, is used to energize and isolate the power to the system. It also allows the isolation of the electrical supply during an emergency and for maintenance and troubleshooting the syst em, thereby satisfying SEMI S2 requirements. The photohelic switch / gauge when fitted, allows monitoring for loss of extraction from the enclosure, thereby satisfying SEMI S2 requirements.

3.12 Commission the system

During some application cycles it is possible that the system may exceed OSHA 1910.95 Occupational Noise Exposure Limits, the EU noise directive 2003/10/EC or other regional noise limits dependent upon the process, duty cycle, installation or environment in which the pumping system is being operated. A sound pressure survey must be conducted after installation and, if necessary, controls implemented to ensure that the relevant limits are not exceeded during operation and that adequate precautions are taken to prevent personnel from exposure to high noise levels during operation.

The exhaust of T variant systems will heat up to maximum temperature as soon as the electrical supply is switched on.

1. Switch on the external electrical supply and check that the POWER LEDs (Figure 2, item 7 and Figure 4, item 4) go on. If the LEDs do not go on, contact Edwards.

2. Switch on the cooling-water and nitrogen supplies.

3. Ensure that the exhaust-extraction system is not blocked (for example, that valves in the exhaust-extraction system are open).

4. Ensure that all openings to atmospheric pressure in the foreline vacuum system are closed.

5. Press the LOCAL CONTROL button (Figure 2, item 5) and check that the green LOCAL CONTROL LED (Figure 2, item 6) comes on and then remains continuously illuminated.

6. Press START button (Figure 2, item 3)

M561-00-880 Issue C

WARNING

Installation

7. If the system starts and continues to operate, continue at Step 8. If a warning or alarm condition is indicated:

 Shut down the system: refer to Section 4.3.  Contact Edwards.

8. Look at the pressure gauge in your inlet pipeline:

 If the pressure is increasing, immediately shut down the system, and contact Edwards.  If the pressure is decreasing continue at Step 9.

9. After you have commissioned the system:

 If you want to continue to operate the system, refer to Section 4.1.  Otherwise, shut down the system, refer to Section 4.3.

3.13 Install additional safety equipment

If your Process Tool/control system needs to know the total flow rate of nitrogen to the system for safety reasons, install suitable measurement equipment in the nitrogen supply pipeline.

If you use the nitrogen purges to dilute dangerous gases to a safe level, ensure that the system shuts down if the nitrogen supply to the system fails.

If the sensors or microprocessors fa il, the total flow ra te of nitrogen displa yed or output by the pumping system ma y be incorrect. If you need to know the total flow rate of nitrogen to the dry pump for safety reasons, you should therefore fit suitable measurement equipment in the nitrogen supply pipeline. If you fit a rotameter, ensure that it is suitable for use with nitrogen and that it is correctly calibrated.

If the nitrogen supply to the pu mping system fails, a warning message will be shown on the Pump Display Terminal (if fitted) and will be sent to any interfacing system connected to the pum ping system. Ensure that your installatio n is configured so that it remains safe if there is a failure of the nitrogen supply to the pumping system.

If an alarm condition is detected (and the pumping system is not configured to ‘run til crash’ refer to Section 4.4) the pumping system will shut down automatically. Yo u must ensure that your installation remain s safe if the pumping system shuts down automatically.

Edwards and the Edwards logo are trademarks of Edwards Limited.

4 Operation

CAUTION

WARNING

Do not operate the system with the lifting eyebolts still fitted or with any enclosure panels removed or damaged and do not touch any parts of the pump(s) when the system is on. Surfaces of the pump(s) are very hot and can cause injury to people. In accordance with Semi S2, hot surface warning labels are applied to the side panels of some iXH T variants because testing has shown that accessible temperatures can exceed 65°C in small areas at worst case pressure conditions at an ambient temperature of 40°C. Under normal process operating conditions and an ambient below 25°C, accessible enclosure temperatures are unlikely to reach this level.

Do not operate the system with any enclosures removed or damaged. If you do there may be a risk of an electric shock.

4.1 Start-up

M561-00-880 Issue C

Operation

Ensure that it is safe to start the system. If you do not (and, for example, maintenance is being performed on components downstream of the system), you could cause injury to people.

After the power is applied, all mains circuits will be energised.

The exhaust of T variant systems will heat up to maximum temperature as soon as the electrical supply is switched on.

The system is designed to ride through transient term power interruption and to automatically restart once the power is restored.

Do not operate the pump if the pipeline is restricted or blocked as the pump will not operate correctly and may be damaged.

Refer to Section 1.4.

1. Switch on the cooling-water and nitrogen supply.

2. Switch on the electrical supply.

3. Check that the exhaust-extraction system is not restricted, and that any valves in the exhaust-extraction system are open.

The pump can be started using either the MicroTIM, the PDT or the fro nt panel control.

M561-00-880 Issue C

Operation

4.1.1 MicroTIM operation

If the system is to be operated by your own control equipment using the MicroTIM, ensure that no other devices have control of the pumping system. If they do, you must first release control before you can start the pump by the MicroTIM.

 Use your control equipment to set the pump start/stop signal to the interface connector and check that the

Running LEDs are illuminated.

 The MicroTIM takes control. The message 'MTIM IN CONTROL' will be displayed on the PDT if connected. The

green ‘Tool Control’ LED (Figure 4, item 9) on the rear panel will illuminate.

4.1.2 PDT operation

If the system is to be operated using the PDT:

 Connect the PDT to the r equired PDT connection, front (Figure 2, item 11) or rear (iXH/iXL only,

Figure 4 item 5).

 Control must be taken with the PDT - press 'Control' button. The message 'PDT1 IN CONTROL' will be

displayed if the front connection is used and the message 'PDT2 IN CONT ROL' will be displayed if the rear connection of the iXH/iXL is used.

 Press START button (refer to Appendix A1 for more information).  Press ENTER.  The system will start and the Run ning LEDs on the pump and the Pump On LED on the PDT will flash whilst

the pump is on and warming up. These LEDs will stop flashing and remain illuminated continuously when the pump has reached full speed.

4.1.3 Front panel control operation

To operate the system using the front panel controls (refer to Figure 2):

 Pres s a nd hold the 'Loca l Control' button ( Figure 2, item 5). The Green ‘Local Control’ LED (Figure 2, item 6)

will illuminate continuously when control is taken. The message 'Keys in Control' will be displayed on the PDT if connected.

 Press and hold the Start button (Figure 2, item 3) until the pumps starts. The Running LED (Figure 2, item 2)

will flash whilst the pump is coming on and will remain illuminated continuously when the pump is running normally.

4.2 Status indicators

Refer to Figures 2 and 4.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

CAUTION

WARNING

4.3 Manual shut-down

If you shut the system down and don’t isolate it from the electrical supply, do not disconnect the Pump Display Terminal or release control from the Pump Display Terminal or front panel. If you do the system could be started by another Module.

Do not remove the inlet connections until the pump has been allowed to stop rotating and the power has been isolated. The pump can take up to three minutes to completely stop.

If you stop the pump without the nitrogen purge cycle, for example by using the EMS button, on processes that have condensable or solid by-products then the pump may not restart.

The pump can be shut down using either the MicroTIM, the PDT or the front panel controls. Note that only the item in control can stop the pump (refer to Section 1.4).

Operation

Note: The EMS button will always stop the pump. It does not matter which item has contro l. Refer to Section 4.6.

If the pump is not going to be required for some time, switch off the electrical supply and the cooling-water supply.

4.3.1 Shut-down modes

Auto shut-down introduces a nitrogen purge cycle which lasts for 15 minutes befo re the pu mp i s s hut dow n. Th is is

the recommended shut-down mode.

Fast shut-down immediately stops the pump without gas purge. Ramped shut-down is an optional mode for iXH. In some harsh applications, process residues can accumulate in the

pump mechanism during shut-down, making it difficult to restart the pump next time. To prevent this problem a special ramped shut-down can be performed. Contact Edwards for more information.

4.3.2 MicroTIM operation

Use your control equipment to reset the pump start/stop signal to the interface connector. The Running LEDs will then go off, and the pump running status output signal will open.

4.3.3 PDT operation

Press the stop button on the PDT (refer to Appendix A1 for more information). You can choose whether to select Auto or Fast shut-down mode.

4.3.4 Front panel control operation

Press and hold the stop button (Figure 2, item 4) for 5 seconds to stop the pump in Auto shut-down mode (recommended, refer to Section 4.3.1 above). Repeat within 10 seconds to stop the pump in Fast shut down-mode. The running LED (Figure 2, item 2) flashes whilst the pump is slowing down and will then turn off when the pump has shut down.

M561-00-880 Issue C

CAUTION

Operation

4.4 Automatic shut-down

If you select 'Run 'til crash', the pump(s) can be damaged and you may invalidate any warranties on the system equipment.

Normally, if an alarm condition exists, the control system will shut down the dry pumping system. For pumping systems containing a dry pump and booster combination, some alarms will cause only the booster to stop, and not the full system.

Notes: 1. If required you can request 'Run 'til crash' operation. In this mode of operation, most alarm conditions

will be ignored and the pump(s) will continue to operate. For safety reasons, some alarms cannot be overridden and the system will automatically shut down even if you have selected 'Run 'til crash'. Refer to Table 19.

2. 'Run 'til crash' is automatically reset to 'off ' when the electrical supply is removed.

3. The Tool Interface overrides the 'Run 'til crash' state selected provided it has control of the pump.

Table 19 - Alarm actions

Alarm Description

EMS or System Configuration (set-up) fault Yes Yes Yes Exhaust Pressure Booster Stator or End Cover Temperature Dry Pump Stator or End Cover Temperature Booster status Dry Pump status

Not applicable to pXH systems.

†

Not applicable to systems which do not contain a booster.

†

Alarm stops dry

pump

Yes Yes Yes

No Yes No

Yes Yes No

No Yes Yes

Yes Yes Yes

Alarm stops booster

pump

Alarm overrides

‘Run ‘til crash’

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M561-00-880 Issue C

4.5 Unplanned shut-down and alarms

The system is fitted with a number of pump protection sensors that will give warnings and alarms, refer to Table 20.

Table 20 - Pump protection sensors

Sensor Warning condition triggered Alarm condition triggered

Exhaust pressure transducer

- for iXH excluding systems containing the 450H dry pump

- for all systems containing iXH450H dry pump 0.2 barg (3.2 psig) 0.35 barg (5 psig)

- for all iXL 500 systems 0.3 barg (4.4 psig) 0.4 barg (5.8 psig)

DP TEMP

- iXH systems containing 100 and 200 dry pumps: Standard 130 °C 140 °C T variants 160 °C 170 °C

- iXH systems containing 200H dry pump: Standard and T variants 160 °C 170 °C

- iXH3030: Standard 160 °C 170 °C T variant 170 °C 180 °C

- iXH systems containing 450H and 500H dry

pumps:

Standard and T variants 175 °C 185 °C

- iXL250Q 150 °C 165°C

- all iXL500 systems 139 °C 144 °C

- all iXL750 systems 180°C 190°C

DP TEMP 2

- iXH3030T 140 °C 150°C

- iXH4550HT 145 °C 155 °C

- iXH6050HT 145 °C 155 °C

DP Endcover

- iXH3030T 100°C 110°C

MB Stator

- iXH610 only 60 °C 70 °C

- all other iXH and iXL variants 120 °C 130 °C

MB endcover, T variants only 100 °C 110 °C

0.35 barg (5 psig) 0.55 barg (8 psig)

Operation

Refer to Section 4.4 for information about alarms and automatic shut-down conditions. If the system has an unplanned shut-down, ensure that the cause of the shut-down is identifi ed and rectified before

restarting. If you are in any doubt, contact Edwards.

Note: The high temperature alarms on Edwards vacuum pumping systems are system protection trips and should

be considered as an abnormal running condition. If a system has tripped due to any high temperature alarm the system should be investigated and the reason for the alarm established. Once the fault has been remedied the system should be left for a minimum of 30 minutes before attempting to restart.

M561-00-880 Issue C

WARNING

Operation

4.6 Emergency stop

For T variants only, the exhaust heaters will remain powered on even when the emergency stop is activated.

Note: The emergency stop switch is not an electrical isolator.

To shut down the system in an emergency, press the emergency stop switch (Figure 2, item 1). Alternatively, you can operate the emergency stop controls in your own control system if you have connected your emergency s top circui t to the system as described in Section 3.9.

When emergency stop is selected:

 The dry pump and/or the booster pump is switched off.  The solenoid-valve(s) in the Gas Module close, to switch off the supply of nitrogen to the pump.  The solenoid-valve(s) in the temperature control manifold(s) de-energise with loss of temperature control.  The Pump Display Terminal will display '1.01 ALARM/STOP ACTIVA TED' (if connected) or it may display

‘ALARM 186.01/ DP INV 0040 000 / EMS’

 The Running LED will go off.  The Alarm LED illuminates.  For T variants, the exhaust heaters remain powered on.  Booster heaters on T variants (where fitted) switch off.

4.7 Restart the pump after an emergency stop or automatic shutdown

Note: If the system has automatically shut down because of high pump power, check that the pump is free to

rotate before you restart the system: contact Edwards.

If you have used the emergency stop switch on the front panel to shut down the system, you must reset the emergency stop switch before you can restart the system. Turn the emergency stop switch to reset it, then restart the system as described in Section 4.1.

If the system has been automatically shut down because of an alarm condition, the alarm condition must be re ctified before you can restart the system. Restart the system as described in Section 4.1.

4.8 Advanced control and monitoring

FABworks is a tool that can be used to monitor pumping systems over a network. Contact Edwards for more information.

For advanced applications, Edwards has a tool that allows the pumping system configuration to be changed. Contact Edwards for more information.

For some applications it may be desirable to adjust the system operating temperatures to suit process demands. Contact Edwards to discuss your requirements and refer to Section 5.7 for instructions on configuration.

Edwards and the Edwards logo are trademarks of Edwards Limited.

5Maintenance

WARNING

Only personnel specially trained to perform electrical maintenance should attempt troubleshooting inside electrical enclosures. These enclosures contain hazardous voltages and are not operator areas.

Leak test the system after maintenance and seal any leaks found to prevent leakage of dangerous substances out of the system and leakage of air into the system.

5.1 Safety and maintenance frequency

Obey the safety instructions given below and take the appropriate precautions. If you do not, you can cause injury to people and damage to equipment.

M561-00-880 Issue C

Maintenance

Electrical, nitrogen and water supplies are all potentially hazardous energy sources. Before carrying out any maintenance the supply of these sources should be locked and tagged out.

Do not touch the pump exhaust and check-valve (if fitted) whilst the pump is running since the temperatures of these parts can cause burns. These parts will remain hot after the pump has stopped.

Personal protective equipment should be checked and used as specified by its supplier. Hazardous chemicals that have been pumped are located within the pumps and piping. Use of suitable protective gloves and clothing along with a respirator is recommended if contact with substances is anticipated. Particular caution should be exercised when working with fluorinated materials which may have been exposed to temperatures greater than 260 °C. Refer to Edwards Material Safety Data Sheets for detailed information.

 Ensure that the maintenance technician is familiar with the safety procedures which relate to the products

pumped.

 Allow the pumps to cool to a safe temperature before you fit lifting eye bolts or start maintenance work.  Vent and purge the dry pumping system with nitrogen before you start any maintenance work.  Isolate the dry pumping system and other components in the process system from the electrical supply so

that they cannot be operated accidentally. Note that the emergency stop switch on the dry pumping system is not an electrical isolator, unless a disconnect box accessory is installed.

M561-00-880 Issue C

WARNING

Maintenance

 Wait for at least four minutes after you have switched off the electrical supply before you touch an y

electrical component on the dry pumping system.

 Route and secure cables, hoses and pipelines during maintenance to avoid possible risk of trips or

entrapment.

 Ensure that any oil or water collected in the secondary containment drip tray is removed before moving the

system.

 The enclosure panels should only be removed with the use of a special tool, when the pump system has be en

stopped and allowed to cool sufficie ntly (as an indication the system should be left for one hour with cooling water still connected with flow characteristics as defined in Section 2).

 Wear the appropriate safety-clothing when you come into contact with contaminated components. Dismantle

and clean contaminated components inside a fume-cupboard.

 Re-check the pump rotation direction if the electrical supply has been disconnected.  O-ring replacement intervals vary depending on your application.  Dispose of components, grease and oil safely.  Take care to protect sealing-faces from damage.  Do not touch or inhale the thermal breakdown products of fluorinated mate rials which may be present if the

system has been overheated to 260 °C and above. These breakdown products are very dangerous. Fluorinated materials in the system may include oils, grease s and seals. The system may have overheated if it was misused, if it malfunctioned or if it was in a fire. Edwards Material Safety Data Sheets for fl uorinated materials used in the pump are available on request.

The system requires little user maintenance. Pump protection sensors fitted to the system do not require routine maintenance. The maintenance operations you can carry out are described in the following sections, any other maintenance must be carried out by Edwards service centres (refer to Section 7). The frequency of maintenance operations depends on your process. Adjust the frequency of maintenance operations according to your experience.

When you maintain the system, use replacement parts, seals and fittings supplied by Edwards, refer to Section 7. Ensure that your nitrogen and cooling-water supplies are connected in parallel and that they meet the specifications given in Section 2. Contact Edwards for more information.

5.2 Relocate the system for maintenance

The substances that accumulate in the exhaust-pipe, elbow and check-valve can be dangerous. Do not allow these substances to come into contact with your skin or eyes. Do not inhale vapours from these substances. Fit blanking caps to the inlet and outlet flanges when you move the exhaust pipe, elbow or check-valve around your workplace. The majority of synthetic oils/grease can cause inflammation of the skin (dermatitis). Safety precautions must be taken to prevent prolonged skin contact with these substances. Use of suitable protective gloves and clothing along with a respirator is recommended if contact with the substance is anticipated. System process gases and residue can be highly toxic. T ake all necessary precautions when handling components that have, or could have, come into contact with them, including O-rings, lubricants and all exhaust accessories.

You must use suitable lifting equipment to move the system. It is too heavy to lift by hand.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

CAUTION

WARNING

Drain the cooling-water from the system if you will transport or store it in conditions where the cooling-water could freeze. If you do not, cooling-water may freeze in the system and damage the pump(s) and/or the coolingwater pipelines.

If you want to remove the system from its operating location and move it to another location where you will do maintenance, use the following procedure:

1. Purge the system and shut down as described in Section 4 and allow the system to cool down.

2. Isolate the power and then disconnect the mating-half from the electrical supply connector, then isolate the

water and the gas purge supply.

3. Switch off your nitrogen and cooling water supplies. Disconnect the nitrogen supply, taking care as any trapped

gas under pressure is released. Disconnect the cooling-water supply followed by the cooling-water return.

Maintenance

4. Disconnect the inlet and outlet from the vacuum and exhaust systems and fit blanking caps.

5. If necessary, disconnect the air-extraction port from your factory extraction system.

6. If necessary disconnect any accessories from the system.

7. Adjust the levelling feet so that the system rests on the castors.

8. Move the system to the location where you will do maintenance.

After maintenance is complete, re-install the system as described in Section 3.

5.3 Draining the cooling water

Use of suitable protective gloves and eye protection is recommended when carrying out this procedure. Personal protective equipment should be checked and used as specified by its supplier.

The exhaust of T variant systems will heat up as soon as the electrical supply is switched on.

1. Relocate the system for maintenance as stated in Section 5.2.

M561-00-880 Issue C

CAUTION

WARNING

Maintenance

2. Connect a regulated clean dry air supply (5 barg or 73 psig) to the cooling water supply connection

(Figure 4, item 15). Do not turn on the air supply yet.

3. Connect a drain hose to the cooling water return connection (Figure 4, item 18). Position the open end of the

drain hose in a suitable collection container.

4. Turn on the clean dry air supply.

5. Monitor the drain hose outlet until no further cooling water is purged.

6. Fit the external EMS link plug (supplied) to the EMS connection on the rear of the system (Figure 4, item 10). If

you do not, you will not be able to purge the water system effectively.

7. Connect the system to a suitable mains electrical supply. The control system will now open each temperature

control valve, purging the cooling water from all flow paths. After two minutes, remove the electrical supply. Wait for 10 seconds and then re-connect the electrical supply and repeat the entire process. Continue repeating until no further cooling water is purged from the system.

8. The cooling water drain procedure is now complete. Disconnect the air supply, electrical supply and the drain

hoses. Dispose of the drained cooling water appropriately.

5.4 General maintenance

Do not use cleaning materials based on strong alkalis, aggressive or chlorinated solvents. Do not use cleaning materials containing abrasives.

The system is given a charge of oil before it leaves the factory. You should not need to check or adjust oil levels between major overhauls.

We recommend that you carry out a monthly visual inspection of the system in situ. Check that the cables, hoses and pipelines bringing services to the pump are in good condition and ensure that all connections are secure.

The following maintenance can also be carried out on the system, contact Edwards for details and training:

 Inspect the connections, pipelines, cables and fittings inside the pump enclosure, refer to Section 5.5.  Inspect and clean exhaust pipe, elbow, and check valve

Note: The system is supplied with either a trapped O-ring or a metal seal for the exhaust connection, depending

on pump type and anticipated exhaust temperatures. Ensure that you always replace seals with the same type.

5.5 Inspect the connections, pipelines, cables and fittings

Electrical, nitrogen and water supplies are all potentially hazardous energy sources. Before carrying out any maintenance the supply of these sources should be locked and tagged out.

If the system is not relocated for maintenance, ensure all supplies are locked out and tagged out before starting the following procedure.

1. Remove the enclosure side and top panels.

2. Check that all the connections are secure; tighten any loose connections. Inspect all cables, pipelines, hoses and

connections and check that they are not corroded or damaged and do not leak; repair or replace any pipelines, hoses and connections that are corroded or damaged, or which leak.

3. Refit the enclosure side and top panels.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

5.6 Gas module configuration

The gas module configuration may be adjusted to suit process demands.

5.6.1 iXH single mode and single mode+

The iXH Single Mode gas module has 2 manually-adjustable operational modes:

 Medium  Harsh

In addition to this, the Single Mode + gas module has a further operational mode:

 Harsh + Inlet

The factory default setting for all gas modules is Harsh, except for the iXH1220H and iXH1820H models which contain the SM+96 gas module set to Medium.

Contact Edwards service personnel for instructions on how to access the configuration menu (via the PDT) and for process-specific recommendations.

Use the following procedure to change the gas module mode:

Maintenance

1. Remove the left hand side panel of the pumping system.

2. Identify the gas module (Contact Edwards for guidance).

3. Use a short flat-blade screwdriver to turn the adjustment screw on the front of the gas module by 1/4 turn.

4. If adjustment screw slot is vertical then turn clockwise for medium mode.

5. If adjustment screw slot is horizontal then turn anticlockwise for harsh mode.

6. Refit side panel.

7. Access the Config menu on the PDT (requires an access code, contact Edwards).

8. Scroll down to Gas Process - press ENTER.

9. Scroll through options Harsh / Med / Harsh + Inlet - use ENTER to select desired option.

10.Scroll down to Default N

11. PDT displays: Set Default Yes (Press Enter) - confirm default - Press ENTER.

Setup - press ENTER.

5.6.2 Multi mode

The iXH and iXL Multi Mode gas modules have a number of electronically-adjustable operational modes:

 Medium  Harsh  +Inlet purge  +Exhaust purge

Contact Edwards service personnel for instructions on how to access the configuration menu (via the PDT) and for process-specific recommendations.

M561-00-880 Issue C

Maintenance

Use the following procedure to change the gas module mode:

1. Access the Config menu on the PDT (contact Edwards for advice).

2. Scroll down to Gas Process - press ENTER.

3. Scroll through options to choose gas process - use ENTER to select desired option.

4. Scroll down to Default N2 Setup - press ENTER.

5. PDT displays: Set Default Yes (Press Enter) - confirm default - Press ENTER.

5.6.3 iXL variants

iXL variants are not fitted with gas modules.

5.7 System operating temperature configuration

The system operating temperature configuration may be adjusted to su it process demands. Co ntact Edwards service personnel for instructions on how to access the configuration menu (via the PDT) and for process-specific recommendations.

Use the following procedure:

1. Access the Config menu on the PDT (requires an access code, contact Edwards).

2. Scroll to Temp Setpoints – press ENTER.

3. Scroll to Set DP Temp or Set MB Temp – press ENTER.

4. Scroll to desired temperature – Press ENTER.

Notes: 1 The Dry Pump set point is the desired surface temperature of the internal low vacuum stage.

2 The Booster set point is the temperature of the booster stator at which additional cooling is deployed

to control booster temperatures. The booster will not necessarily reach the set point temperature at ultimate conditions.

Refer to Table 21 for default temperature settings and ranges.

Table 21 - Dry pump and booster temperature settings

Temperature Setting

Standard iXH dry pump 70 - 135 110 iXH T variants containing 450H and 500H dry pump 110 - 150 140 iXH3030T 110 - 160 160 All other iXH T variants 110 - 150 150 iXL250Q dry pumps - 105 iXL 500 dry pumps 126 - 136 131 iXL750Q dry pumps - 120 Booster (except iXH610) 60 - 100 100 Booster (iXH610 only) 0 - 55 55

Range in which temperature

can be set (°C)

Default value (°C)

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M561-00-880 Issue C

WARNING

6 Transportation, storage and disposal

6.1 Transportation

Do not drain the oil from the pump(s) whether dangerous substances have been pumped or not. You must fit blanking plates to seal all vacuum inlet and outlet ports (to prevent possible oil leakage). You must ensure that the system is correctly labelled, if in doubt contact Edwards.

Follow the procedure laid out in Section 6.2 and then read form HS1 and fill out form HS2, which can be found at the back of this manual.

6.2 Storage

Drain the cooling-water from the system if you will transport or store it in conditions where the cooling-water could freeze (refer to Section 5.3). If you do not, the cooling-water may freeze in the system and damage the pump(s) and/ or the cooling-water pipelines.

Transportation, storage and disposal

Store the system as follows:

1. Follow the procedure set out in Section 5.2.

2. Store the system in clean dry conditions until required.

3. When required for use, prepare and install the system as described in Section 3 of this manual.

6.3 Disposal

Dispose of the system and any components safely and in accordance with all local and national safety and environmental requirements.

This equipment may contain a lithium manganese dioxide battery which, under California law, requires notification for the presence of perchlorate: Perchlorate Material - special handling may apply, refer to www.dtsc.ca.gov/hazardouswaste/perchlorate/

Edwards products are supported by a world-wide network of Edwards Service Centres. Each Service Centre offers a wide range of options including disposal. Refer to Section 7.2 for more information.

Pump system materials suitable for recycling include cast iron, steel, PTFE, stainless steel, brass, aluminium, zinc alloy, nickel, mild steel, ABS, polyamide.

Take particular care with the following:

 Fluoroelastomers which may have decomposed as the result of being subjected to high temperatures.  Components which have been contaminated with dangerous process substances.  Lithium battery.

M561-00-880 Issue C

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Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

WARNING

7 Service, spares and accessories

7.1 Introduction

Whenever you return the system to an Edwards Service Centre or other Edwards company, you must comply with the requirements of Section 7 and with the requirements of the Return of Edwards Equipment Procedure (refer to forms HS1 and HS2 at the rear of this manual).

Note: You must not drain the oil from the pumping system. You must clearly state the pump is full of oil when

you complete form HS2.

Edwards products, spares and accessories are available from Edwards companies and distributors world-wide. These centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required:

1. Model and Item Number of your equipment

2. Serial number (if any)

Service, spares and accessories

3. Item Number and description of the part.

7.2 Service

Edwards products are supported by a world-wide network of Edwards Service Centres. Each Service Centre offers a wide range of options including: equipment decontamination; service exchange; repair; rebuild and testing to factory specifications. Equipment that has been serviced, repaired or rebuilt is returned with a full warranty. Your local Service Centre can also provide Edwards engineers to support on-site maintenance, service or repair of your equipment. For more information about service options, contact your nearest Service Centre or other Edwards company.

M561-00-880 Issue C

Service, spares and accessories

7.3 Ordering accessories

Table 22 - Accessories

Description Item Number

Seismic bracket kits (refer to Table 23): A50767000 or A50768000 Retrofit kit to enable installation of iXH in pla ce of iH1000: For iXH1210 and iXH1210H A50769000 For iXH1220H A50770000 Exhaust extraction cover kit: For NW40 exhaust A50780000 For NW50 exhaust A50791000 Exhaust Check Valve Kits: NW40 (refer to Table 24) A50782000 or A50787000 NW50, PTFE Disc type (for iXL systems) A50790000 Nitrogen flow switches: Suitable for 0 - 60 slm A50784000 Suitable for 0 - 204 slm A50785000 Utilities kit (contains mating half quick connectors for cooling water and

electrical connector mating parts): Kit suitable for 380 - 460V systems using the Harting Han® 100A axial screw

module mains connector Kit suitable for 200 - 230V systems using the Harting Han® 100A axial screw

module mains connector Kit suitable for all systems using the Harting Han® K4/4 mains connector A50795000 Photohelic switch and gauge kit A50803000 Disconnect box (used with photohelic): 200 – 230 V 60 A max (suitable for systems with the Harting Han® K4/4 mains

connector) 200 – 230 V 100 A max (suitable for systems wi th the Harting Han® 100A axial

screw module mains connector) pXH drip tray (used to fully satisfy SEMI S2 requirements) Contact Edwards Accessory modules: Active Accessory Module (AAM)* D37480500 Passive Accessory Module (PAM)* D37480550 PDT D37280700

A50788000

A50789000

A50802000

A50804000

* AAM includes a PAM

If you wish to restrain your system using seismic brackets you will need to order the correct brackets for your particular system, refer to Table 23.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Table 23 - Seismic bracket kits

M561-00-880 Issue C

Service, spares and accessories

Seismic bracket kit A50767000

Pumping system models iXH100 iXH450H iXL250Q

iXH200H iXH500H iXL750Q

iXH610 iXH3030/T iXL750R

iXH1210/H iXH3045H

iXH1220H/T iXH3050H

iXH1820/H /T iXH4545HT

The systems that use the seismic bracket kit A507-67-000 may be rest rained using only 2 seismic brackets if desired, as described in Section 3.1.

Note: If you wish to use an exhaust check valve on a system with an NW40 exhaust, you will need to order the

correct kit for your particular system, refer to Table 24.

Table 24 - Exhaust check valve kits

A50768000 M56930012

iXH4550HT iXH6045H/T iXH6050H/T

pXH4500 pXH6000

iXL500Q iXL500R

Exhaust Check Valve Kit A50782000 A50787000

Pumping system models iXH100 iXH450H

iXH200H iXH500H

iXH610 iXH3045H

iXH1210 /H iXH3050H

iXH1220H /T iXH4545HT

iXH1820 /H /T iXH4550HT

iXH3030 /T iXH6045H /T

iXH6050H /T

M561-00-880 Issue C

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Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

Appendix A1 Pump display terminal

The PDT accessory provides pump on/off and status reporting. Warnings and alarms are also indicated to the user. Up to two PDTs may be fitted to iXH and iXL systems, up to one PDT may be fitted to pXH systems.

Figure A1 - Pump display terminal

Appendix A1

A1.1 LEDs

Local Control Green illuminates continuously when this PDT has control of the pump. Pump ON Green (within the Pump Start button) illuminates to indicate that the pump is running. Warning Yellow illuminates to indicate that a pump warning is present. It flashes when a new warning

occurs until it is acknowledged by pressing 'ENTER' when it goes continuous until the warning clears. Alarm Red illuminates to indicate that a pump alarm is present. It flashes when a new alarm occurs

until it is acknowledged by pressing 'ENTER' when it goes continuous until the alarm clears.

A1.2 Pump start / stop and control

To Start or Stop the pump the PDT must be in control, indicated by the Local Control LED being illuminated. To take or release control briefly press Control. If something else is in control, error message 'Control locked' appears, refer to 'Control Holder' in the Status menu. Press Start button PDT displays:

Table A1 - Pump start control

Pump State Local Control LED PDT display Operator Pump response

Stopped On START MENU Start

Pump

Running On Pump Running Press

CANCEL

Stopped or Running Off No PDT Control Press

CANCEL

Press ENTER to confirm

Press CANCEL No change (running)

Press CANCEL No change

Pump Starts

M561-00-880 Issue C

Appendix A1

Press Stop button PDT displays:

Table A2 - Pump stop and control

Pump State Local Control LED PDT display Operator Pump response

Stopped On PUMP Stopped Press

CANCEL

Running On STOP MENU Fast

Shutdown

Stopped or Running Off No PDT Control Press

CANCEL

A1.3 Warning / Alarm display and acknowledgement

Each new warning / alarm is displayed when it occurs, overwriting any text already present unless another unacknowledged warning / alarm is currently being displayed. The corresponding Warning / Alarm LED flashes to indicate a new warning / alarm.

Pressing ENTER acknowledges the warning / a larm currently dis played and th e Warning / Alarm LED stops flashing. If available the display will show the suggested action, press ENTER again to clear.

Press CANCEL No change (stopped)

If Auto Shutdown is required press down arrow. Press ENTER to confirm

Press CANCEL No change

Pump Stops

If there is another new warning or alarm the Warning / Alarm LED will continue to flash and this is then displayed, otherwise the display will revert to the original text from before the alarm(s) / warning(s) occurred.

If there are warnings / alarms still present, but they are all acknowledged, then the corresponding LED remains continuously illuminated. The text indicating acknowledged warning / alarm conditions still present may be viewed in the Status menu, see below. Some Alarms such as 1.01 STOP ACTIVATED remain present until the pump is manually started from the PDT or front panel controls.

Once all warning/alarm conditions have gone away, then the corresponding LED is extinguished. To avoid a build up of out of date Warnings they are automatically acknowledged after 36 hours.

A1.4 Menus

There are three menu buttons Normal, Status and Setup described below. NR in the data part of a parameter indicates No Reading. NP in the data part of a parameter indicates a parameter that is Not Present.

A1.4.1 Normal menu

This menu is displayed when the PD T is first p lugge d in to the pum p, or a cce sse d by pressin g th e Normal button. Up to 4 parameters are displayed, scroll by pressing up/down keys.

Table A3 - Normal menu

Description Typical Display

Serial Number S/N 1234567 Control Holder NONE IN CONTROL Dry Pump current DP CURRENT 1.1A Booster current MB CURRENT 1.1A

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M561-00-880 Issue C

By default the 4 parameters displayed in the Normal menu are as shown above for the iXH, these may be changed via the Edit Display attributes menu, accessed from the SETUP menu. For the pXH, the default Normal menu is as shown below.

Table A4 - Normal menu

Description Typical Display

Serial Number S/N 1234567 Control Holder NONE IN CONTROL pXH booster current PB CURRENT 1.1A Dry pump current DP Current NP

A1.4.2 Status menu

Press the Status button to enter. Scroll by pressing up/down keys. Press CANCEL to exit back to Normal menu. If a device is not fitted the associated parameters will not be displayed. Parameters displayed:

Table A5 - Status menu

Description Typical Display

Serial Number Control Holder NONE IN CONTROL Dry Pump current DP CURRENT 1.1A Booster current MB CURRENT 1.1A pXH Booster current PB CURRENT 1.1A Green Mode state GREEN MODE STATE Off Gate valve open/closed state GATE VALVE Open Remote Gate valve open/closed state PB VALVE O pen Dry pump stator reference temperature TCS REF 100C Dry Pump temperature DP TEMP 100C Dry Pump exhaust stage temperature DP EXH STG 100C Dry Pump End Cover temperature DP E/C TEMP 100C Dry Pump temperature 2 DP TEMP 2 100C Booster Temperature MB TEMP 100C Booster MB End Cover temperature MB E/C TEMP 100C pXH Booster Temperature PB TEMP 100C pXH End cover Temperature PB E/C TEMP 100C

Flow Rate N2 FLOW 44 slm

Dry Pump Power DP POWER 1.1 kW Booster Power MB POWER 1.1 kW pXH Booster Power PB POWER 1.1 kW Dry Pump speed in percent DP SPEED 100 % Dry Pump speed in Hz DP SPEED 100 Hz Booster speed in percent MB SPEED 100 % Booster speed in Hz MB SPEED 100 Hz pXH Booster speed in percent PB SPEED 100 %

S/N 1234567

Appendix A1

M561-00-880 Issue C

Appendix A1

Table A5 - Status menu (continued)

Description Typical Display

pXH Booster speed in Hz PB SPEED 100 Hz Dry Pump Inverter Temperature DP INV TEMP 100C Booster Inverter Temperature MB INV TEMP 100C pXH Booster Inverter Temperature PB INV TEMP 100C Dry Pump Exhaust pressure EXHAUST 5 PSI Dry Pump Exhaust Temperature EXH PIPE 100C Dry Pump Exhaust gas temperature EXH TEMP 100C Active gauge pressure AG 1.1E-3 kPa Water Flow Rate WATER 11.1 l/m Run Hours RUN HOURS 1000 pXH Run Hours PB RUN HOURS 1000 Number of Pump Starts PUMP STARTS 100 Time to Stop (seconds) TIME TO STOP 900 Active Alarms and Warnings (if present)

The PDT returns the serial number of the system it is plugged directly into. For example, if an iXH is being used to control a pXH, the PDT can be plugged into either system. If it is plugged into the iXH, it returns the serial number of the iXH and if it is plugged into the pXH it returns the serial number of the pXH. All warning and alarm codes from the iXH dry pump and booster are in the range 101.01 to 799.15. All warning and alarm codes from the pXH booster are in the range 801.01 to 899.15.

A1.4.3 SETUP menu

Press the Setup button to enter. Menu title is shown at th e top of the display. Scroll by pressing up/down keys. Press ENTER to open a sub menu or CANCEL to exit back to Normal menu.

Table A6 - SETUP menu

Description Display

Commands menu Display Inverter Fault History menu Inv Fault Hist… Software Version Display menu S/W Version… Display Serial Number Serial Num… Fit Accessory menu Edit IP configuration menu IP Config… Edit Display attributes menu Display Attr… Set Time and Date Display Pump Type Show Pump type...

This option requires a security code to access it.

†

Time is set automatically when connected to a Fabworks network.

Each sub menu is described below.

†

Command Menu…

Fit Accessory…

Set Clock…

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M561-00-880 Issue C

A1.4.4 COMMANDS menu

Under the Setup menu. Scroll by pressing up/down keys. Press ENTER to open a sub menu or CANCEL to exit back to the SETUP menu.

Table A7 - COMMANDS menu

Appendix A1

Gate Valve (Open/Shut) MB Pump (On/Off) PB Pump (On/Off) Green Mode (On/Off) Green Level (Idle/Sleep/Hibernate/Mode4..8)* Gas Valves

This option requires a security code to access it.

†

The PDT must be in control to perform these functions.

Press the up/down keys to select the new settings and press ENTER to accept or CANCEL to exit back to the COMMANDS menu.

†

A1.4.4.1 GAS VALVES menu

Scroll by pressing up/down keys. Press ENTER to open a sub menu or CANCEL to exit back to the Setup menu. Settings do not appear if they are not fitted.

Table A8 - GAS VALVES menu

Set N

Seal

Set Inlet 1 Set Bypass Set Exhaust 2

Press the up/down keys to select on / off an d press ENTER to accept or CANCEL to exit back to the GAS VALVES menu.

A1.4.5 INV FAULT HIST (Display Inverter Fault History) menu

Under the Setup menu. Scroll by pressing up/down keys. Press ENTER to open a sub menu or CANCEL to exit back to the Setup menu.

Table A9 - INV FAULT HIST (Display Inverter Fault History) menu

DP Inv Fault Hist (Dry Pump Inverter Fault History) DP2 Inv Fault Hist (Dry Pump 2nd Inverter Fault History) MB Inv Fault Hist (Booster Inverter Fault History) PB Inv Fault Hist (pXH Booster Inverter Fault History)

Each inverter fault history contains up to 32 entries, each contains one alarm and one warning, where 1 is the most recent. Scroll by pressing up/down keys. Press CANCEL to exit back to the Inverter Fault History menu.

The inverter fault information is displayed in the following format: DP Inv Fault nn

A:aaaa W:wwww where nn is the number, aaaa is the alarm code, and wwww is the warning code. Refer to Section A2.3 for more information about inverter warnings and alarms.

M561-00-880 Issue C

Appendix A1

A1.4.6 SOFTWARE VERSION Display menu

Under the Setup menu. Scroll through the software version loaded in the processors by pressing up /down keys. Press

CANCEL to exit back to the SETUP menu.

A1.4.7 FIT ACCESSORY menu

Under the Setup menu. Scroll by pressing up/down keys. Press ENTER to open a sub menu or CANCEL to exit back to the Setup menu.

Table A10 - FIT ACCESSORY menu

Gate Valve… Water Sensor… (Analogue water flow) Active Gauge… Exh Gas Temp… (Exhaust Gas Temperature)

For an accessory press the up/down keys to select Fitted or Not Fitted and press ENTER to accept or CANCEL to exit back to the COMMANDS menu.

Note: Gate Valves additionally have an option of Fitted No Feedba ck for use where there are n o position feedback

switches fitted to the gate valve.

To configure an accessory connected to the pXH, please contact Edwards.

A1.4.8 IP Configuration menu

Under the Setup menu. Scroll by pressing up/down keys. Press ENTER to open a sub menu or CANCEL to exit back to the Setup menu.

Table A11 - IP Configuration menu

Host_Name… (display only) DHCP Enable… (Enabled / Disabled) IP Address… (xxx.xxx.xxx.xxx) Address Mask… (xxx.xxx.xxx.xxx) DNS Server… (xxx.xxx.xxx.xxx) Gateway… (xxx.xxx.xxx.xxx) NTP Server… (display only) SMTP Server… (display only) MAC Address… (display only) Domain Name… (display only)

Press the up/down keys to select Enabled or Disabled and press ENTER to accept or CANCEL to exit back to the IP Configuration menu.

†

For each address setting press the up/down keys to set the digit, press ENTER to accept and move to the next digit or CANCEL to move back to the previous digit. Pressing ENTER at the end of the line will accept the new setting and exit back to the Edit IP menu. Pressing CANCEL at the start of the line will cancel and exit back to the IP Configuration menu.

* † † † †

Display only items press CANCEL to exit back to the IP Configuration menu.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

For systems which contain an iXH or iXL connected to a pXH, it is important to connect the PDT to the iXH or iXL if you wish to configure the iXH or iXL IP settings and to connect the PDT to the pXH if you wish to configure the pXH IP settings.

A1.4.9 Display attributes menu

Under the Setup menu. Scroll by pressing up/down keys. Press ENTER to open a sub menu or CANCEL to exit back to the Setup menu.

Table A12 - Display attributes menu

Normal display (Selects the parameters displayed in Normal) Units…

SELECT LINE (Normal display selection menu)

Scroll by pressing up/down keys. Press ENTER to open a sub menu or CANCEL to exit back to the Display Attributes menu.

Table A13 - SELECT LINE (Normal display selection menu)

Top Page 1… Bottom Page 1… Top Page 2… Bottom Page 2…

Appendix A1

In each option the SELECT PARAMETER menu is opened, scroll through the parameters by pressing up/ down keys. Press ENTER to sele ct the para meter for disp lay or CANCEL to exit back to the SELECT LINE menu.

UNITS (Units to display)

Scroll by pressing up/down keys. Press ENTER to open a sub menu or CANCEL to exit back to the Display Attributes menu.

Table A14 - UNITS (Units to display)

Pressure... (PSI/kPa) Temperature... (Centigrade/Farenheit) Speed... (RPM/Hz) Active Gauge... (mBar/Torr/kPA)

In each option scroll through the units available by pressing up/down keys. Press ENTER to select t he displayed units or CANCEL to exit back to the UNITS menu.

Note: The configuration options for the PDT are stored in the PDT itself and are not associated with the pump

that the PDT is connected to. This means a user can transfer a PDT between pumps and keep the same settings. It also means that different units could be displayed on two PDTs connected to the same pump.

M561-00-880 Issue C

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Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

Appendix A2 Troubleshooting

A2.1 Warnings

The pump controller generates a warning when a problem is encountered. Once the problem that caused a warning has been resolved, the warning is cleared by the pump controller.

A2.1.1 LED warning indicators

If the pump encounters a problem, warnings are indicated on the LEDs on the front con trol panel, the rear panel and on the PDT if fitted.

The warning LEDs on the front control panel and rear panel illuminate continuously when a warning is generated. If a PDT is fitted, the warning LED flashes to indicate a new warning. Refer to Appendix A1.3 for more information

on how warnings are indicated and how they can be acknowledged using the PDT. Once all the warnings are cleared, the warning LEDs extinguish.

A2.1.2 PDT warnings

Appendix A2

If a PDT is fitted, each warning triggers a warning message to be displayed. Refer to Appendix A1.3 for more information on how warnings are handled by the PDT.

Table A15 lists the warning messages that might be displayed on the PDT with possible causes an d actions you should

take.

Table A15 - Warnings

Warning Message on PDT

Warning 1.01 Power interrupt

Warning 31.13 Gas missing

Warning 31.01 SYS CONFIG FAULT

Warning 35.10 N2 Purge Low

Warning 35.11 N2 Purge High

Warning 35.13 Sensor missing

'Action' Message on PDT

Check pwr supply There has been a brownout of the

See manual The gas module is not communicating with

See manual The wrong type of gas module has been

Check N2 supply The Nitrogen supply flow rate is too low

Check Gas Module The Nitrogen supply flow rate is too high

- The transducer is disconnected or has

Possible Cause Action

electrical supply to the pump lasting more than 1 second.

the pump controller.

fitted.

- the supply might not be connected or switched on

- the supply line or filter may be blocked

- the gas module and PDT settings do not match (for iXH Single Mode or Single Mode+)

- the gas module may be faulty Contact Edwards.

failed.

Check the electrical supply

Contact Edwards.

Check the Nitrogen supply is connected and switched on and that pipelines and filters are not blocked.

Check the gas module and PDT settings, refer to

Section 5.6.

Contact Edwards.

M561-00-880 Issue C

Appendix A2

Table A15 - Warnings (continued)

Warning Message on PDT

Warning 39.11 Exh Press High

Warning 39.13 Sensor missing

Warning 51.13 Sup Missing

Warning 54.11 MB Temp High

Warning 54.13 Sensor missing

Warning 55.13 Sensor missing

Warning 57.11 DP E/C Temp High

Warning 57.13 Sensor missing

Warning 62.11 MB E/C Temp High

Warning 62.13 Sensor missing

Warning 63.11 DP Temp High

Warning 63.13 Sensor missing

Warning 70.11 DP Temp 2 High

'Action' Message on PDT

Exhaust Blocked Service Pump

- The exhaust pressure transducer is not

See manual There is a communication problem within

See manual The temperature of the booster pump is

- The booster temperature sensor may have

- The dry pump temperature sensor may

See manual The temperature of the dry pump end

- The dry pump end cover temperature

See manual The temperature of the booster end cover

- The booster end cover temperature sensor

See manual The internal temperature of the pump is

- The dry pump temperature sensor may

e manua

l The temperature of the pump is too high. - Check that cooling water is

Possible Cause Action

The pressure in the exhaust pipeline is too high.

- A valve in the pipeline may be shut.

- There may be process debris or condensation in the exhaust pipeline.

-You may have too many pumping systems connected to the exhaust pipeline.

fitted, or is disconnected or has failed.

the pump controller. Refer to

Section A2.4.1 for more information.

too high.

become disconnected or failed.

have become disconnected or failed.

cover is too high.

sensor may have become disconnected or failed.

is too high.

may have become disconnected or failed.

too high.

have become disconnected or failed.

Refer to Section 4.5 to determine the exhaust pressure that triggered the warning.

Check that all valves in the exhaust line are open and consider whether process debris or condensation are likely.

Contact Edwards.

Cycle the power to the pump. If the warning persists, contact Edwards to replace the pump controller.

- Check that cooling water is connected, switched on and is to specification given in

Section 2.6.

- Check that the sensor is fitted and is correctly connected.

- Check that cooling water is connected, switched on and is to specification given in

Section 2.6.

- Check that the sensor is fitted and is correctly connected.

- Check that cooling water is connected, switched on and is to specification given in

Section 2.6.

- Check that the sensor is fitted and is correctly connected.

- Check that cooling water is connected, switched on and is to specification given in

Section 2.6.

Contact Edwards.

connected, switched on and is to specification given in

Section 2.6.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Table A15 - Warnings (continued)

M561-00-880 Issue C

Appendix A2

Warning Message on PDT

Warning 70.13 Sensor missing

Warning 71.13 AC Sup Missing

Warning 84.11 Exh Temp High

Warning 84.13 Sensor missing

Warning 152.01 Valve Not Shut

Warning 153.01 Valve Not Open

'Action' Message on PDT

- The dry pump temperature sensor may

See manual The pump controller cannot communicate

See manual The exhaust pipe temperature is too high Contact Edwards

- The exhaust pipe temperature sensor may

Check Gate Valve The foreline gate valve has failed to close Check the wiring and air

Check Gate Valve The foreline gate valve has failed to open Check the wiring and air

Possible Cause Action

- Check that the sensor is

have become disconnected or failed.

with the accessory module

have become disconnected or failed.

fitted and is correctly connected.

- Check that the accessory module is correctly connected to the pump and then cycle the power to the pump.

- If this warning persists, contact Edwards.

Contact Edwards

supply to the Gate valve.

Note: This warning will

supply to the Gate valve.

only clear when the valve has successfully been opened and closed.

Warning 176.01 MB INV xxxx yyyy

Warning 176.13 No MB Inv Comms

Warning 186.01 DP INV xxxx yyyy

Warning 186.13 No DP Inv Comms

Warning 196.01 DP Inv xxxx yyyy

Warning 196.01 DP Not Running

Warning 196.13 No DP Inv Comms

Warning 314.11 Speed Too Low

xxxx yyyy aaaaaaaaaaaaaaaa

See manual The pump controller cannot communicate

xxxx yyyy aaaaaaaaaaaaaaaa

See manual The pump controller cannot communicate

Diag aaaa bbbb /zzzzzzzzzzzzzzz

See manual DP 2nd Inverter will not start up when

See manual The pump controller cannot communicate

Stop Pump/Contact Service

Booster Inverter has raised a warning code. Refer to A2.3 for more

with the booster inverter.

Dry pump Inverter has raised a warning code.

with the dry pump inverter.

DP 2nd Inverter has raised warning code. Refer to A2.3 for more

requested.

with the dry pump 2nd inverter.

The pump rotational speed is at least 30% less than demand for more than 2 minutes.

Note: This warning will

only clear when the valve has successfully been closed and opened.

information. Check the wiring between

the pump controller and the booster inverter.

Refer to A2.3 for more information.

Check the wiring between the pump controller and the dry pump inverter.

information. Check Inverter Fault History.

Check the wiring between the pump controller and the

y pump inverter.

dr Stop the pump and perform

mechanical check of rotation and beearings.

Notes: 1. Some of these warnings apply to pump sensors that are only present on certain system variants.

2. Some of these warnings apply to accessories and may only be encountered if the particular accessory is fitted.

M561-00-880 Issue C

Appendix A2

A2.2 Alarms

The pump controller generates an alarm when a serious problem is encountered. Depending on the reason for the alarm, the whole system or just the booster (if fitted) will shut down - refer to

Section 4.4 and 4.5 for more information about alarms.

If the system has shut down due to an alarm, you must rectify the problem before you try to re-start the pump. Once the problem that caused the alarm has been resolved, the alarm is cleared by the pump controller.

A2.2.1 LED alarm indicators

Alarms are indicated on the LEDs on the front control panel, the rear panel and on the PDT if fitted. The alarm LEDs on the front control panel and rear panel illuminate continuously when an alarm is generated. If a PDT is fitted, the alarm LED flashes to indicate a new alarm. Refer to Appendix A1.3 for more information on how

alarms are indicated and how they can be acknowledged using the PDT. Once all the alarms are cleared, the alarm LEDs extinguish.

A2.2.2 PDT alarms

If a PDT is fitted, each alarm triggers an alarm message to be displayed. Refer to Appendix A1.3 for more information on how alarms are handled by the PDT.

Table A16 lists the alarm messages that might be displayed on the PDT with possible causes and actions you should

take.

Table A16 - Alarms

Warning Message on PDT

Alarm 1.01 Stop Activated

Alarm 1.01 Sys Config Fault

Alarm 39.12 Exh Press High

Alarm 54.12 MB Temp High

'Action' Message on PDT

- - The emergency stop has been

- The pump system type has not

Exhaust Blocked Service Pump

See manual The booster temperature has

Possible Cause Action

activated.

- There is a fault with the EMS circuit or the EMS link plug has not been fitted or has come disconnected.

been set properly.

The Exhaust pressure has reached maximum allowed.

reached the maximum allowed so the booster has stopped.

If the EMS button has been used on the pump, refer to Section 4.6 to re-set it. Otherwise check and reset the EMS circuit and re-start the pump.

Note: The alarm message will

remain on the display until you restart the pumping system.

Contact Edwards for a service engineer to configure the pump system type correctly or replace the pump controller electronics.

Refer to Section 4.5 to determine the exhaust pressure that triggered the alarm. See Warning 39.11 for causes and actions.

Refer to Section 4.5 to determine the temperature that triggered the alarm. See Warning 54.11 for causes and actions.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Table A16 - Alarms (continued)

M561-00-880 Issue C

Appendix A2

Warning Message on PDT

Alarm 57.12 DP E/C Temp High

Alarm 62.12 MB E/C Temp High

Alarm 63.12 DP Temp High

Alarm 70.12 DP Temp 2 High

Alarm 84.12 Exh Temp High

Alarm 174.10 Booster Stopped

Alarm 176.01 MB INV xxxx yyyy

Alarm 176.01 MB Not Running

Alarm 176.13 No MB Inv Comms

Alarm 184.10 Dry Pump Stopped

Alarm 186.01 DP INV xxxx yyyy

Alarm 186.01 DP Not Running

Alarm 186.13 No DP Inv Comms

Alarm 196.01 DP Inv xxxx yyyy

Alarm 196.13 No DP Inv Comms

Alarm 314.12 Speed Too Low

'Action' Message on PDT

See manual The dry pump end cover

See manual The booster end cover

See manual The dry pump internal

See manual The dry pump temperature has

See manual The exhaust pipe temperature has

See manual Booster speed too low - rotor is

xxxx yyyy aaaaaaaaaaaaaaaa

See manual Booster Inverter will not start up

See manual The pump controller cannot

See manual The dry pump speed is very low.

xxxx yyyy aaaaaaaaaaaaaaaa

See manual Dry Pump Inverter will not start up

See manual The pump controller cannot

ag aaa

Di /zzzzzzzzzzzzzzz

See manual The pump controller cannot

Do Not Restart / Contact Service

a bbbb

Possible Cause Action

temperature has reached the maximum allowed so the system has stopped.

temperature has reached the maximum allowed so the booster has stopped.

temperature has reached the maximum allowed so the system has stopped.

reached the maximum allowed so the system has stopped.

probably locked. Booster Inverter has raised an

alarm and stopped the system.

when requested.

communicate with the booster inverter during start-up checks.

The rotor might be locked.

Dry Pump Inverter has raised an alarm and stopped the system.

when requested.

communicate with the dry pump inverter during startup checks

DP 2nd Dry Pump Inverter has raised an alarm and stopped the system.

communicate with the dry pump 2nd inverter.

The pump rotational speed is at least 30% less than demand for more than 3 minutes.

See Warning 57.11 for causes and actions.

Refer to Section 4.5 to determine the temperature that triggered the alarm. See Warning 62.11 for causes and actions.

See Warning 63.11 for causes and actions.

Refer to Section 4.5 to determine the temperature that triggered the alarm. See Warning 70.11 for causes and actions.

See Warning 84.11 for causes and actions.

Contact Edwards

Refer to A2.3 for more information.

Check inverter fault history.

Check the wiring between the pump controller and the booster inverter.

Cycle the power to the pump and attempt to re-start. If this fails, contact Edwards.

Refer to A2.3 for more information.

Check inverter fault history.

Check the wiring between the pump controller and the dry pump inverter

Refer to A2.3 for more information.

Check the wiring between the pump controller and the dry pump inverter.

Perform mechanical check of rotation and bearings before attempting to restart.

M561-00-880 Issue C

Appendix A2

A2.3 Inverter warnings and alarms

The inverters used to drive the dry pump and booster can also generate warnings and alarms if problems are encountered. Inverter warning and alarm codes are displayed by the PDT if fitted.

The alarm and warning codes are each reported as a 16-bit word encoded as 4 hexadecimal numbers. The codes are displayed as follows:

1234 5678 Where: The first 4 digits signify an Alarm code and, The second 4 digits signify a Warning code, Digits 1 – 8 are reported as hexadecimal digits from 0 to F. To determine the cause of a warning or alarm you must first decode each hexadecimal number. 0 indicates that there

is no alert for that bit. Normally you will only see codes of 1, 2, 4 or 8 for each bit but if two or more events occur in the same bit then these will be added together.

For example: 5 = 1 + 4 so if code 5 is displayed it means that alerts 1 AND 4 are active B = 1 + 2 + 8 so if code B is displayed it means that alerts 1, 2 AND 8 are active. To decode inverter warning and alarm codes, refer to Table A17 to convert the hexadecimal digits into alert

combinations and then refer to Table A18 and A19).

Table A17 - Hexadecimal to digital conversion

BIT SET COMBINATIONS

HEXADECIMAL DECIMAL Combination

F 15 8+4+2+1 E 14 8+4+2 D 13 8+4+1 C12 8+4 B 11 8+2+1 A10 8+2 99 8+1 88 8 7 7 4+2+1 66 4+2 55 4+1 44 4 33 2 + 1 22 2 11 1

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M561-00-880 Issue C

Table A18 - Inverter alarm codes

INVERTER ALARMS

BIT

SET

1 8 ACCELERATION_ TO If motor has not accelerated to a minimum speed of 10Hz

2 8 SELF_TEST_FAULT Inverter diagnostic registers also checked, as per

3 8 MISSING_PHASE_ TIMEOUT Indicates a missing input phase - check power connections

4 8 OVERT Motor/Drive system over temperature - refer to warning

Fault Code

Combination

4 OVERLOAD_TO Alarm given when dry pump speed is below 7Hz for 3

2SC_MODE_INTERLOCK Internal fault contact Edwards 1 FLASH_DOWNLOAD_ FAULT Internal fault contact Edwards

4 OSTEST _FAULT Internal fault contact Edwards 2 EEPROM_FAULT Inverter diagnostic registers also checked, as per

1 PWM_TRIP Inverter output switched off, active when drive not

4 EMS EMS has been activated.

2 DESAT_FAULT Internal fault contact Edwards 1 UNDERT Inverter is too cold. See warning register to determine

4 OVERI Motor overcurrent 2 OVERV Inverter overvoltage 1 Reserved Reserved

PDT reported fault name Description

within 60 secs then drive will try to restart 3 time s before giving alarm

minutes or 30 minutes for a booster

Table A20, and text output as per that table.

Self test fault can be because of invalid data value read for address, data rate, un-initialised analogue input channel.

Table A20, and text output as per that table.

EEPROM Parameter Upload Incomplete or subse quent EEPROM communication failure.

running. Restart pump or cycle power to reset.

to pump and fuses in supply. Warning should appear first and then pump trips after 10 minutes.

Check EMS button at front and EMS plug in the back of pump controller.

source of problem.

code to determine source. Check cooling.

Appendix A2

M561-00-880 Issue C

Appendix A2

BIT

5 8 SELFTEST_WARNING Inverter diagnostic registers also checked, as per

6 8 HIGHTC Controller temperature above upper limit / Controller

7 8 UTCREG Upper controller temperature regulator active - current

8 8 LOWVCC Internal power supply fault - contact Edwards

Fault Code

Combination

4 Reserved Reserved 2 LOWTW Condensation warning, indicates that the inverter (water)

1 HIGHTW Indicates that the inverter temperature is higher than

4 HIGHTS Inverter heat-sink temperature above upper limit /

2 HIGHTM Motor temperature above upper limit / Motor temperature

1 MISSING_PHASE The loss of one of the three input phases has been

4 UTSREG Upper heat sink temperature regulator active - current

2 Reserved Reserved 1 LVREG Lower voltage regulator active - check mains voltage

4 LOWTC Low controller temperature - contact Edwards 2 LOWTS Low heatsink temperature - contact Edwards 1 CAN LOSS Normally due to loss of can bus communication on dual

Table A19 - Inverter warnings codes

Inverter warnings

Name Description

Table A20, and text output as per that table.

temperature is lower than expected – possible causes include inverter water valve stuck open.

expected – possible causes include no or low cooling water flow, inverter water valve stuck closed or water pipe to inverter blocked.

temperature sensor open circuit - check water supply

Inverter heat-sink temperature sensor open circuit - check water supply

sensor open circuit - check water supply

detected - check mains supply to drive or blown fuses

limit reduced - check cooling

drive system, check usb lead is connected between master

and slave drives. Example: PDT shows the following:

0108 0200 This translates to: alarm 1 in bit 2 – PWM_TRIP alarm 8 in bit 4 – OVERT warning 2 in bit 6 - HIGHTM. This means the motor overheated and switched the output off.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

The following text will be displayed if the condition is SELFTEST_WARNING, SELF_TEST_FAULT_, or EEPROM_FAULT____.

Table A20 - Inverter diagnostic display text

Appendix A2

Inverter diagnostic Register 1

0x8000 0x0000 INTERNAL_COMMS__ 0x4000 0x0000 P_CHARGE_WARNING 0x2000 0x0000 WATCHDOG_TIMEOUT 0x1000 0x0000 OSTEST_FAULT____ 0x0800 0x0000 EEPROM_LOW_VCC__ 0x0400 0x0000 EEPROM_WRITEFAIL 0x0200 0x0000 EEPROM_TIMEOUT__ 0x0100 0x0000 EEPROM_BYTECOUNT 0x0080 0x0000 FLASH_BOOT_CRC__ 0x0040 0x0000 FLASH_WRITE_FAIL 0x0020 0x0000 FLASH_BLOCK_CRC_ 0x0010 0x0000 EXTERNAL_RESET__ 0x0008 0x0000 SINK_TEMP_FAULT_ 0x0004 0x0000 CAL_DATA_INVALID 0x0002 0x0000 EEPROM_BLOCK_CRC 0x0001 0x0000 EEPROM_MAP_ID___ 0x0000 0x0200 IGBT_OPEN_CCT___ 0x0000 0x0100 MOTOR_OPEN_CCT__ 0x0000 0x0010 MOTOR_SHORT_CCT_ 0x0000 0x0008 VOLTAGE_SENSOR__ 0x0000 0x0004 CURRENT_SENSOR__ 0x0000 0x0002 IGBT_OPEN_CCT___ 0x0000 0x0001 IGBT_SHORT_CCT__ 0x8000 0x0000 INTERNAL_COMMS__ 0x4000 0x0000 P_CHARGE_WARNING 0x2000 0x0000 WATCHDOG_TIMEOUT 0x1000 0x0000 OSTEST_FAULT____ 0x0800 0x0000 EEPROM_LOW_VCC__

Inverter diagnostic Register 2

Text display

M561-00-880 Issue C

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Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

A2.4 Other problems

A2.4.1 Pump controller communications

The pump controller contains two processors that perform separate functions. Under n ormal op eration the two processors communicate with each other internally but under fault conditions it is possible that the two processors will stop communicating. The behaviour of the system will depend on its mode of operation prior to the communication failure. There may be no change in operation initially.

To minimise impact on process, the system will continue to run normally if it was already running when the communication failure occurred. The gas valves and Gate valves remain in the state that they were in prior to the communication failure and outputs to the MicroTIM are unaffected. It is important to note, however, that control might be released from the device that was ‘in control’ (for example PDT) and that stop requests will be ignored from all devices apart from the front panel controls.

To stop a system that has suffered a communication fa ilure either use the EMS or use the front panel controls to ‘take control’ of the system and then stop it. In this situation, the warning LEDs on the pump will flash, the alarm LED will illuminate and the inlet Gate valve will close. It is not possible to use the Auto or Ramped shut-down modes, the pump will stop immediately without any gas purges. Any requests to start the pump will be rejected until the fault has been rectified. Once the pump has stopped, cycle the power to the pump and attempt to re-start it. Refer to Tables A15 and A16 for actions if any warnings or alarms are generated.

Appendix A2

M561-00-880 Issue C

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Edwards and the Edwards logo are trademarks of Edwards Limited.

Edwards iXH, iXL, pXH Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Contents

Illustrations

Tables

Associated publications

Trademark Credits

1Introduction

1.1 Scope and definitions

1.2 Applications

1.3 Description

1.4 Priority of control

1.5 Active utility control

2Technical data

2.1 General technical data

2.2 Performance data

2.3 Loading data

2.4 Nitrogen purge data

2.5 Electrical data

2.6 Cooling-water data

2.7 T variants

2.8 Tracer gas analysis

3 Installation

3.1 Locate the dry pumping system

3.2 Lubrication

3.4 Connect to your factory extraction system (optional)

3.5 Connect the nitrogen supply

3.5.1 Flammable/pyrophoric materials

3.5.2 Gas purges

3.6 Leak-test the system

3.7 Electrical supply

3.7.1 Mains supply cable connection

3.8 Connect an additional RF earth (ground) (optional)

3.9 Connect to your emergency stop circuit

3.10 Connect and set up the cooling-water

3.11 Accessories

3.12 Commission the system

3.13 Install additional safety equipment

4 Operation

4.1 Start-up

4.1.1 MicroTIM operation

4.1.2 PDT operation

4.1.3 Front panel control operation

4.2 Status indicators

4.3 Manual shut-down

4.3.1 Shut-down modes

4.3.2 MicroTIM operation

4.3.3 PDT operation

4.3.4 Front panel control operation

4.4 Automatic shut-down

4.5 Unplanned shut-down and alarms

4.6 Emergency stop

4.8 Advanced control and monitoring

5Maintenance

5.1 Safety and maintenance frequency

5.2 Relocate the system for maintenance

5.3 Draining the cooling water

5.4 General maintenance

5.5 Inspect the connections, pipelines, cables and fittings

5.6 Gas module configuration

5.6.1 iXH single mode and single mode+

5.6.2 Multi mode

5.6.3 iXL variants

5.7 System operating temperature configuration

6 Transportation, storage and disposal

6.1 Transportation

6.2 Storage

6.3 Disposal

7 Service, spares and accessories

7.1 Introduction

7.2 Service

7.3 Ordering accessories

Appendix A1 Pump display terminal

A1.1 LEDs

A1.2 Pump start / stop and control

A1.3 Warning / Alarm display and acknowledgement

A1.4 Menus

A1.4.1 Normal menu