Edwards nXDS15iR, nXDS20i, nXDS15iC, nXDS15i, nXDS6i Instruction Manual

...

Instruction Manual

nXDS Scroll Pump

A735-01-880

Issue F

Description Item Number

nXDS6i A735-01-983

nXDS10i A736-01-983

nXDS15i A737-01-983

nXDS20i A738-01-983

nXDS6iC A735-02-983

nXDS10iC A736-02-983

nXDS15iC A737-02-983

nXDS20iC A738-02-983

nXDS6iR A735-03-983

nXDS10iR A736-03-983

nXDS15iR A737-03-983

nXDS20iR A738-03-983

Original Instructions

This product has been manufactured under a quality management system certified to ISO 9001:2015.

P200-06-720-F

2006/42/EC

Machinery directive

2014/35/EU

Low voltage directive

2014/30/EU

Electromagnetic compatibility (EMC) directive

2014/34/EU

ATEX directive on use in potentially explosive atmospheres

II 3 G Ex h IIB T4 Gc Internal Atmospheres Only, Tech File ref 209

2011/65/EU

Restriction of certain hazardous substances (RoHS) directive

EN 1012-2:1996 +A1:2009

Compressors and vacuum pumps. Safety requirements. Vacuum pumps

BS EN ISO 8007936:2016

Non-electrical equipment for explosive atmospheres. Basic method and requirement

BS EN ISO 8007937:2016

Non-electrical equipment for explosive atmospheres. Non-electrical type of constructional safety ‘c’

EN 61010-1:2010

Safety requirements for electrical equipment for measurement, control and laboratory use. General requirements

EN 61326-1:2013

Electrical equipment for measurement, control and laboratory use. EMC

Class A Emissions, Industrial Immunity

CSA-C22.2 No.61010-1-12

Safety requirements for electrical equipment for measurement, control and laboratory use – Part 1: General requirements

UL61010-1 3rd Edition

Safety requirements for electrical equipment for measurement, control and laboratory use – Part 1: General requirements

Mr Ian Keech

Date and Place

Declaration of Conformity

Edwards Ltd, Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK

The following products:

nXDS6i scroll pump 100-127/200-240V, 50/60Hz A735-01-983 nXDS10i scroll pump 100-127/200-240V, 50/60Hz A736-01-983 nXDS15i scroll pump 100-127/200-240V, 50/60Hz A737-01-983 nXDS20i scroll pump 100-127/200-240V, 50/60Hz A738-01-983 nXDS6iC scroll pump 100-127/200-240V, 50/60Hz A735-02-983 nXDS10iC scroll pump 100-127/200-240V, 50/60Hz A736-02-983 nXDS15iC scroll pump 100-127/200-240V, 50/60Hz A737-02-983 nXDS20iC scroll pump 100-127/200-240V, 50/60Hz A738-02-983 nXDS6iR scroll pump 100-127/200-240V, 50/60Hz A735-03-983 nXDS10iR scroll pump 100-127/200-240V, 50/60Hz A736-03-983 nXDS15iR scroll pump 100-127/200-240V, 50/60Hz A737-03-983 nXDS20iR scroll pump 100-127/200-240V, 50/60Hz A738-03-983

Is in conformity with the relevant requirements of European CE legislation:

Based on the relevant requirements of harmonised standards:

requirements. General requirements

The product also complies with the following:

This covers all product serial numbers from the date of this declaration onwards.

19.10.2018, Burgess Hill

Vice President Engineering, High Vacuum Division

This declaration is based on the requirements of EN ISO 17050-1 and the relevant directives.

P200-10-019 Issue D

Material Declaration

In accordance with the requirements of the Chinese regulatory requirement on the Ma nagement Methods for the Restriction of the Use of Hazardous Substances in Electrical and Electronic Products Order No. 32 (also known as ‘China RoHS2’) and SJ/T 11364 Marking for the Restricted Use of Hazardous Substances in Electronic and Electrical Products:

Product Labels

Product Product Label Meaning

This product contains hazardous substances in at least one of the

All pumps in the

list below

Pump Type Pump Size

RV Pumps RV3,5,8,12, E Lab, nRVi EM Small Pumps E2M0.7, 1.5, E1M18, E2M18, 28, 30, nE2M40i nEXT Pumps nEXT 85, 240, 300, 400, Splitflow nXDS pumps nXDS 6, 10, 15, 20 EXT pumps EXT75DX XDS pumps XDS35, 46, 100 Diaphragm XDD 1, D lab Turbo Pump Carts T station, nEXPT, nEXT station

部件名称

Part name

铸铝

Cast Aluminium

铜管管件

Brass pipe Fittings

铜接头

Brass Connectors

2020

铅

Lead

(Pb)

Mercury

X O O O O O

homogeneous materials used which are above the limit requirement in GB/T 26572 as detailed in the declaration table below. These parts can safely be used for the environmental protection use period as indicated.

材料成分声明

Materials Content Declaration

质

汞

(Hg)

镉

Cadmium

(Cd)

危险物

六价铬

Hexavalent

Chromium

(Cr VI)

多溴联苯

Polybrominated biphenyls (PBB)

Polybrominated diphenyl ethers

多溴二苯醚

(PBDE)

O：表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。 O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit requirement in GB/T 26572. X：表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。 X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is above the limit requirement of GB/T26572.

NOTES: These products are EU RoHS compliant, the following Exemptions apply: 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight. 6(c) Copper alloy containing up to 4% lead by weight

Packaging Information

Pallet Over-shipper Protection Pieces Support Braces

NWNW

Recyclable Natural Wood Recyclable Cardboard Recyclable Polypropylene Recyclable Mild Steel

This page has been intentionally left blank.

A735-01-880 Issue F

Section Page

1 Introduction ........................................................................................ 1

1.1 Scope of this manual .................................................................................................... 1

1.2 ATEX directive implication ............................................................................................. 2

1.3 General description ..................................................................................................... 2

1.4 Pump controller.......................................................................................................... 3

1.5 Logic interface ........................................................................................................... 4

1.6 Gas ballast control ...................................................................................................... 4

2 Technical data ..................................................................................... 7

2.1 Operating and storage conditions ..................................................................................... 7

2.2 Performance.............................................................................................................. 7

2.2.1 General.................................................................................................................... 7

2.2.2 Pumping media........................................................................................................... 8

2.2.3 Performance characteristics ........................................................................................... 8

2.3 Mechanical data ........................................................................................................ 11

2.3.1 General................................................................................................................... 11

2.3.2 Sound and vibration data.............................................................................................. 11

2.3.3 Construction............................................................................................................. 11

2.4 Electrical data .......................................................................................................... 11

2.4.1 Electrical cables ........................................................................................................ 12

2.5 Logic interface data.................................................................................................... 12

2.6 LED indicators ........................................................................................................... 14

Contents

3 Installation ....................................................................................... 15

3.1 Safety..................................................................................................................... 15

3.2 System design considerations......................................................................................... 15

3.3 Unpack and inspect .................................................................................................... 17

3.4 Position the pump ...................................................................................................... 17

3.4.1 Mechanical fixing ....................................................................................................... 17

3.5 Connect to the vacuum system....................................................................................... 17

3.6 Electrical installation .................................................................................................. 18

3.6.1 Fuses and circuit breakers ............................................................................................ 18

3.6.2 Electrical supply connection .......................................................................................... 19

3.6.3 Disconnect the pump from the electrical supply .................................................................. 19

3.7 Connection for remote control and monitoring.................................................................... 19

3.7.1 Connect the logic interface to the control equipment ........................................................... 19

4 Operation ......................................................................................... 21

4.1 Operational modes ..................................................................................................... 21

4.2 Manual operation ....................................................................................................... 21

4.2.1 Start and stop ........................................................................................................... 22

4.2.2 Standby................................................................................................................... 22

4.3 Parallel control and monitoring ...................................................................................... 23

4.4 Analogue speed control................................................................................................ 24

4.4.1 Hardware configuration ............................................................................................... 25

4.4.2 Operation ................................................................................................................ 25

4.5 Auto-run.................................................................................................................. 26

4.6 Use of gas ballast control ............................................................................................. 26

4.6.1 Gas ballast control ..................................................................................................... 26

4.7 Start up procedure ..................................................................................................... 26

4.8 To achieve ultimate vacuum.......................................................................................... 27

gp/0281/01/18

4.9 To pump condensable vapours ....................................................................................... 27

A735-01-880 Issue F

Contents

4.10 Shut down................................................................................................................ 27

5 Maintenance...................................................................................... 29

5.1 Safety information...................................................................................................... 29

5.2 Maintenance plan....................................................................................................... 30

5.3 Inspect and clean the inlet strainer ................................................................................. 30

5.4 Clean the external fan cover ......................................................................................... 30

5.5 Check the pump performance (service indicator) ................................................................. 30

5.6 Replace the tip-seals................................................................................................... 31

5.7 Replace the pump bearings (service indicator) .................................................................... 31

5.8 Replace the pump controller (service indicator) .................................................................. 31

5.9 Electrical safety check................................................................................................. 31

5.10 Service indicator codes ................................................................................................ 32

5.11 Fault finding............................................................................................................. 32

5.11.1 The pump has failed to start or has stopped ....................................................................... 32

5.11.2 The pump has failed to achieve the required performance ..................................................... 32

5.11.3 The pump has poor ultimate vacuum................................................................................ 33

5.11.4 The pump is noisy ...................................................................................................... 33

5.11.5 The pump surface temperature is high ............................................................................. 33

5.11.6 Alarm indicator codes.................................................................................................. 34

6 Storage and disposal ............................................................................ 37

6.1 Storage ................................................................................................................... 37

6.2 Disposal .................................................................................................................. 37

7 Spares and accessories ......................................................................... 39

7.1 Introduction ............................................................................................................. 39

7.2 Accessories .............................................................................................................. 40

7.2.1 Silencer................................................................................................................... 41

7.2.2 Gas ballast adaptor..................................................................................................... 41

7.2.3 Gas ballast adaptor blank ............................................................................................. 41

7.2.4 Vibration isolators ...................................................................................................... 41

7.2.5 Inlet/exhaust filter..................................................................................................... 41

7.2.6 Exhaust nozzle .......................................................................................................... 42

7.2.7 Chemical resistance conversion kit .................................................................................. 42

7.2.8 Electrical cables ........................................................................................................ 42

7.2.9 Pump-to-controller cable ............................................................................................. 42

7.3 Spares .................................................................................................................... 43

7.3.1 Tip-seal kit (Youtube video https://www.youtube.com/watch?v=vKnh9dxOyhE) ........................... 43

7.3.2 Cooling fan............................................................................................................... 43

7.3.3 Gas ballast knob ........................................................................................................ 43

7.3.4 Silencer spares kit ...................................................................................................... 43

7.3.5 Inlet/exhaust filter spares ............................................................................................ 43

7.3.6 Bearing replacement kit (not field serviceable) ................................................................... 44

7.3.7 Exhaust and ballast valve kit ......................................................................................... 44

For return of equipment, complete the HS Forms at the end of this manual.

A735-01-880 Issue F

Illustrations

Figure Page

1 nXDS scroll pump ......................................................................................................... 3

2 Quick start guide (manual control mode)............................................................................. 5

3 nXDS6i Performance characteristics ................................................................................... 9

4 nXDS10i Performance characteristics ................................................................................. 9

5 nXDS15i Performance characteristics ................................................................................ 10

6 nXDS20i Performance characteristics ................................................................................ 10

7 LED indicators ............................................................................................................ 14

8 Installation drawing ..................................................................................................... 16

9 User interface panel ....................................................................................................22

10 Logic interface connections - parallel control ......................................................................23

11 Logic interface connections - analogue speed control............................................................. 24

12 Analogue speed control................................................................................................. 25

13 Poor ultimate vacuum flow chart .....................................................................................33

14 Noisy pump flow chart .................................................................................................. 34

15 nXDS accessories.........................................................................................................40

Contents

Tables

Table Page

1 nXDS Control modes...................................................................................................... 6

2 Operating and storage conditions ...................................................................................... 7

3 Environmental conditions ............................................................................................... 7

4 General characteristics .................................................................................................. 7

5 Performance characteristics ............................................................................................ 8

6 General mechanical data............................................................................................... 11

7 Sound and vibration data...............................................................................................11

8 Electrical ratings for continuous operation.......................................................................... 11

9 Recommended regional supply protection...........................................................................11

10 Recommended cord sets................................................................................................12

11 Logic interface technical data......................................................................................... 12

12 Logic interface connector pins ........................................................................................13

13 LED indicators ............................................................................................................ 14

14 Maintenance plan........................................................................................................30

15 Flashing service codes ..................................................................................................32

16 Flashing error codes..................................................................................................... 35

17 Silencer....................................................................................................................41

18 Gas ballast adaptor...................................................................................................... 41

19 Gas ballast blank adaptor ..............................................................................................41

20 Vibration isolators .......................................................................................................41

21 Inlet/exhaust filter......................................................................................................41

22 Exhaust nozzle ...........................................................................................................42

23 Chemical resistance conversion kit ...................................................................................42

24 Electrical cables .........................................................................................................42

25 Pump-to-controller cables .............................................................................................42

26 Tip-seal kit................................................................................................................43

27 Cooling fan................................................................................................................43

28 Gas ballast knob .........................................................................................................43

A735-01-880 Issue F

Contents

29 Silencer spares kit .......................................................................................................43

30 Inlet/exhaust filter spares .............................................................................................43

31 Bearing replacement kit................................................................................................44

32 Exhaust and ballast valve kit ..........................................................................................44

Associated publications

Publication title Publication number

Vacuum Pump and Vacuum System Safety P400-40-100 nXDS Serial Comms Interface Instruction Manual A735-01-860

Trademark credits

Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK.

A735-01-880 Issue F

CAUTION

WARNING

1Introduction

1.1 Scope of this manual

This manual provides installation, operation and maintenance instructions for the Edwards nXDS series of scroll pump. The pump must be used as specified in this manual or the protection provided by the equipment may be impaired. Read this manual before installing and operating the pump.

Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be obeyed. The use of WARNINGS and CAUTIONS is defined below.

Warnings are given where failure to observe the instruction could result in injury or death to people. The actual symbol shown varies according to the hazard.

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

Introduction

Pressures are stated as absolute pressures unless otherwise stated.

The units used throughout this manual conform to the SI international system of units of measurement. The following warning labels may be present on the pump and used throughout the product documentation.

Warning – an appropriate safety instruction should be followed or a caution to a potential hazard exists.

Warning – dangerous voltage. Indicates hazards arising from dangerous voltages.

Warning – hot surfaces. To indicate that the marked item can be hot and should not be touched without taking precautions.

Warning – risk of explosion. Indicates the potential risk of explosion.

Warning – heavy object. Indicates the potential risk of physical injury and requires suitable lifting equipment to move.

A735-01-880 Issue F

Introduction

1.2 ATEX directive implication

This equipment is designed to meet the requirements of Group II Category 3G in respects to ignition sources internal to the pump. This classification is in accordance with Directive 2014/34/EU.

The pumping mechanism and its mechanical components exposed to the “INTERNAL ATMOSPHERES” within the nXDS pump system is defined as: equipment group II; equipment category 3 – in accordance with the ATEX directive. This designation ONLY applies to the mechanical pumping mechanism, which is hermetically sealed from the external pump system and its operating environment. An ATEX category has not been assigned in respect of potential ignition sources on the outside of the equipment as the equipment has not been designed for use where there is an external potentially explosive atmosphere.

There is no potential source of ignition within the pump during normal operation but there may be potential sources of ignition under conditions of rare or unexpected malfunction as defined in the Directive. As a result of this, it is necessary to consider the potential consequences of ignition sources occurring under rare or expected malfunction. (Ref ATEX137 1992/92/EC).

When flammable materials are present within the equipment you must:

 Not allow air to enter the equipment.

 Ensure the system is leak tight.

 Use an inert gas purge (for example, nitrogen) to dilute any flammable gasses or vapours entering the pump

inlet, and/or use an inert gas purge to reduce the concentration of flammable gases or vapours in the pump and in the exhaust pipeline, to less than one quarter of the gases published Lower Explosion Limits (LEL).

Do not pump pyrophoric materials, process debris could produce an ignition source on the scroll surface.

Do not locate the pump in an ATEX zoned area, the ATEX specification is not applicable for external atmospheres.

When planning to pump hazardous substances with this pump, read the related chapters in the Safety Booklet and in these Operating Instructions first.

Further details can be obtained by contacting Edwards.

1.3 General description

The nXDS pump is shown in Figure 1.

The nXDS pump is a truly dry vacuum pump as all the bearings, with their hydrocarbon lubricant, are isolated from the vacuum space. The nXDS pump is suitable for use on vapour handling processes, and may be used for some pumping applications involving corrosive substances. For information on pumping flammable gases, contact Edwards.

The body of the pump includes a fixed scroll and an orbiting scroll. The orbiting scroll is controlled by an electric motor through an eccentric cam on the motor drive shaft. The movement of the orbiting scroll, meshed with the fixed scroll, forms successive crescent shaped volumes in the pump. Gas that enters the pump through the inlet is compressed by the movement of the orbiting scroll and swept towards the centre of the fixed scroll. The compressed gas enters the exhaust port near the centre of the fixed scroll and is exhausted from the pump through the outlet.

Refer to Section 2.1 for details of operating conditions.

A735-01-880 Issue F

1. Lifting eye

2. NW25 inlet port

3. Gas ballast control

4. Cooling fan

5. NW25 exhaust port

6. Rubber feet

7. 15-way D-type connector

8. USB port (service mode only)

9. User interface panel

10. Mains power connector

11. Secondary earth bond point

1.4 Pump controller

The integral pump controller manages the supply of current to a three-phase electric motor in accordance with operating conditions. The controller monitors power and temperature, and will protect the pump in the event of operation under sustained high load or under fault conditions.

The controller provides the user interface (refer to Figure 1). The pump may be operated in these modes:

 Manually, using the buttons on the interface panel. Refer to Figures 2 and 9.

 Remotely via serial communications or digital and analogue process control (parallel), via the 15-way D-type

logic interface connector. Refer to Section 1.5.

Figure 1 - nXDS scroll pump

Introduction

A735-01-880 Issue F

Introduction

1.5 Logic interface

The pump controller can be operated via the 15-way D-type logic interface connector. The signals on the logic interface are of the following types:

 Control inputs: these are switch-type and analogue signals that are used to control the pump

 Status outputs: these outputs identify the status of the system Tab

The logic interface has been designed to support both serial control, parallel control and monitoring, operating though one connector. For serial control either RS232 or RS485 can be selected.

For Control Modes refer to Table 1.

For Logic interface data refer to Section 2.5.

1.6 Gas ballast control

To pump high vapour loads, gas ballast can be delivered into the pump to prevent condensation of the vapour carried by the pumped gases.

Air can be introduced to the low vacuum stages through the gas ballast control (Figure 1, item 3). Alternatively, an inert gas such as nitrogen can be supplied through a suitable external valve and by using the appropriate adaptor, available as an accessory. Refer to Section 7.

Figure 2 - Quick start guide (manual control mode)

OPERATION SELECT STATUS SECTION

Apply power

MAINS

POWER

The pump will remain off (factory default). The POWER INDICATOR will illuminate.

3.6.2

Start the pump

START

BUTTON

The pump will accelerate up to full running speed.

The RUN INDICATOR will flash while accelerating. The RUN INDICATOR will remain on when the pump reaches full speed.

The pump is set to 30 Hz rotational full speed (factory default)

4.2.1

Stop the pump STOP BUTTON

The pump will decelerate and stop running. The RUN INDICATOR will flash while decelerating. The RUN INDICATOR will go off when the pump has stopped.

4.2.1

Select and deselect the standby speed

STANDBY MODE

SELECT BUTTON

When engaged, the STANDBY INDICATOR will illuminate and the pump will run at the standby speed setting. Factory default is 70% of full speed.

4.2.2

Increase or decrease the pump speed when in standby mode

STANDBY SPEED

INCREASE

BUTTON

The pump speed will increase. The INCREASE STANDBY INDICATOR will remain illuminated when the pump reaches a maximum of 100% of full speed.

4.2.2

STANDBY SPEED

DECREASE

BUTTON

The pump speed will decrease. The DECREASE STANDBY INDICATOR will remain illuminated when the pump reaches a minimum of 67% of full speed.

4.2.2

Select and deselect the Auto-run function

START or STOP

BUTTON (>8 sec)

When engaged, the AUTO-RUN INDI CATOR will illuminate. The pump will re-start automatically after the power has been restored.

4.5

A735-01-880 Issue F

Introduction

A735-01-880 Issue F

Introduction

Table 1 - nXDS Control modes

Configuration Control mode Manual/Section

Manual control

via

nXDS user interface

Serial control

via (TIC)

*Turbo Instrument

Controller or

Tu r b o C o n t r o l l e r

Parallel control

via (TAG)

Turbo & Active Gauge

Controller

Parallel control

via Digital I/O

e.g. PLC control

Section 1

Figure 2

in this manual

Manual

D397-22-880

Manual

D395-92-880

Section 1.4

in this manual

Parallel control

via Digital I/O and

Analogue speed

control source

Serial control

via RS232 or

RS485 Comms

Interface

Note: Table 1 shows additional Edwards products, such as DX / nEXT Turbo pumps and active gauges that can be

controlled at the same time using the various control methods displayed above.

Section 4.4

Figure 11

Manual

A735-01-860

A735-01-880 Issue F

WARNING

2Technical data

If the nXDS pump is operated outside the specified limits, the pump housing may become hot.

2.1 Operating and storage conditions

Table 2 - Operating and storage conditions

Operating and storage conditions nXDS

Ambient temperature range (storage) –30 °C to +70 °C

Ambient temperature range (operation) +5 °C to +40 °C

Maximum humidity (storage in original packaging)  95% RH

Maximum humidity (operation) 90% RH

Table 3 - Environmental conditions

Environmental conditions

Pollution Pollution degree 2

Installation Installation category II

Altitude restriction Max 2000 m

Area of use Indoor

The product can be used up to an altitude of 3000 m. However, the product is only ETL certified for use up to 2000 m.

Technical data

2.2 Performance

2.2.1 General

Tab l e 4 - G en e ra l ch ara c t e ri s t i cs

Description nXDS6i nXDS10i nXDS15i nXDS20i

3h-1

Peak pumping speed (m

Maximum permitted continuous inlet pressure (mbar)

Maximum permitted exhaust pressure (bar gauge)

Maximum permitted gas ballast inlet pressure (bar gauge) 0.5 0.5 0.5 0.5

Maximum recommended chamber volume to pump down from atmospheric pressure (litres)

Maximum pressure rise when stopped, with no inlet or gas ballast flow (mbar)

Leak tightness (mbar ls

These pumps are designed to pump down from atmospheric pressure, but prolonged operation at inlet pressures higher than specified may reduce bearing life.

†

These pumps are intended to exhaust to atmospheric pressure. High exhaust pressure may reduce tip-seal life.

‡

Larger volumes may be pumped, but prolonged operation at inlet pressures higher than specified may reduce bearing life. The nXDS20i is optimised for constant throughput and is not recommended for cyclic duty.

) 6.2 11.4 15.1 22.0

†

‡

-1

)1 x 10

200 200 200 50

1111

25 50 75 75

7777

-6

1 x 10

-6

1 x 10

-6

1 x 10

-6

A735-01-880 Issue F

WARNING

Technical data

Note: If the pump is operated outside the specified limits, then the pump housing may become hot; the controller

may reduce the motor speed; and tip seal wear rate will be increased.

2.2.2 Pumping media

Do not use the nXDS pump to pump pyrophoric materials or dust.

The pump is designed to pump the following gases:

 Air

 Carbon dioxide

 Helium

 Carbon monoxide

 Nitrogen

 Argon

 Oxygen (O

)

The pump can be used to pump water vapour. Caution must be taken to ensure that vapour does not condense inside the pump. Refer to Section 4.6.1 on how to prevent condensation of water vapour in the pump.

If pumping a vapour or gas not in the list above, contact Edwards for advice.

2.2.3 Performance characteristics

The position of the gas ballast control defines the performance characteristics of the pump. These performance characteristics are listed in Table 5.

Table 5 - Performance characteristics

Description nXDS6i nXDS10i nXDS15i nXDS20i

Pump ultimate (mbar)

Gas ballast flow (l min-1)

Gas ballast position 0 2 x10

Gas ballast position 1 5 x 10

-2

Gas ballast position 1 12 16 31 24

7 x 10

4 x 10

-3

-2

7 x 10

4 x 10

-3

-2

3 x 10

6 x 10

-2

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