Edwards EXTPX Series, EXT400/200PX, EXT400/200/30iPX Instruction Manual

Instruction Manual

EXTPX Split Flow

B760-60-880

Issue A Original

Description Item Number

24 Volt EXT400/200PX Split flow compound Turbomolecular Vacuum Pump B760-61-991 24 Volt EXT400/200PX Split flow compound Turbomolecular Vacuum Pump B760-62-991 24 Volt EXT400/200/30iPX Split flow compound Interstage Turbomolecular Vacuum Pump B760-67-991 24 Volt EXT400/200/30iPX Split flow compound Cartridge Interstage Turbomolecular Vacuum Pump B760-53-991

@o*,"Fttrt=.

Declaration

We, Edwards,

l"lanor

Royal, Crawtey, West Sussex RH10 9LW, UK

declare under our sote responsibility

DffPX Compound Turbomotecutar Dfi40020030iPX cartridge interstage 8760-53-991'

Dfi400200PX ECT400200PX Dff40020030iPX short chamber + end

to which normative

this dectardtion retates is in conformity with the fottowing standard(s) or other

document(s)

EN(|5O)12100-2: 2003 Safety of l,lachinery - B6ic Concepts, Generat Principtes for Design. EN1012-2t 1997 Compr6sors and Vacuum

EN610'l0-1: 2001t Safety EN6t326: 1997 Eectrical equipment for measurement, control and laboratory use

(immunity, Cla5s B Emissions) C22.2 No 61010.1-04F

UL6101O-1

pumps

The

manuat supplied

24V Pumps onty compty with the Canadian Standard Authority and UnderwriteB laboratory when used with D(DC 24V famitv of controtlers.

'optiport' 'optiport'

(2'd

Edition;# safety requirements for etectricat equipment for medurement,

compty with EN61010-1 when instatled in accordance with the instruction

Technicat Principats,

laboratory use. E IC requirements, Safety requirements for

Controt and taboratory use, Part 1: General requirements Controt ard taboratory use, Part 1!

with

the

that the

port

end

requirements for

pump.

of Conformity

product(s)

pump:

8760-61-991 8760-62-991

oott 8760-67-991

pumps,

etectricat equipment

electricat

Safety Requirements. Vacuum Pumps.

equipment ior measurement,

Generat

for meaiurement controt and

requirements

following the

2006t95tEC 2@4t't08tEc 98tX7tEC

provisions

Vottage Directive.

Low ElectrorEgnetic ^,lachirErv Directive

e.ca----t^',

B, D, Brewster, &)rge5s Hill

Technical hlanager

PrducE

product

This

has been manufactured

Compatibitity Directive

zL?t<^

9,)d,a\e59

Date and Place

quality

under a

system

O.l€

registered to |SO9W1

>',r

Lr.-

Z'cxlr

l?nwa,FrD=

Declaration

We,

Edwards, Manor Royat, Crdwtey, West Sussex RH10 9LW, UK

declare under our sote rGponsibitity that the madfne(s)

Description EXT40020030iPX Cartridge inGrstage

to which this dectaration relates is intended to be incorporated into other equipment and not function independentty. The machine(s) is in conformity with the fottowing standard(s) normative

document(5)

(l5O)12100-2:

EN EN1012-2: 1997 Compressors and Vacuum

EN61010-l: 2001. EN61326: 1997

(immunity,

2003 Safety of Machinery - Basic Concepts, General Principtes for

Design. Technicat Principals. PumDs.

Safety requirements for electrical equipment for measurement control and laboratory use. EtectricaI equipment for measurement, control and [abordtory use EMC requi rements.

of Incorporation

Item number 8760-53-991

or other

pumps.

safety Requirements. Vacuum

Ctass B Emissions)

C22.2 No 61010.1-04 Safety requirements for electrical equipment for measurement, Ut6101o-1

The manual supptied with the

24V Pumps onty compty with the Canadian Standard Authority and when used

(2"d

Edition)' safety requirements for etectricat equipment for measurement,

pumps

compty with EN61010-1 when instatled in accordance

with

Controt and laboratory Controt and laboratory

pump.

24V famity of controtleB.

ExDc

use, Part 1: General requirements use, Part

General requirements

with tJle instruction

underwriteE Labontory

The machine(s) must not be has been brought into

conformity with the fottowing

2006t95tEC 20ut108tEc 98t17 tEC

Brewster, Technlcat Manager

B. D. Burgess Hitt Product5

This

product

has been monufoctured

put

Etectromagnetic

service untit the equipment into

into

Vottage Directive.

compatibitity Directive

Machinery Directive

under o

provisions

2-t++.'_

quality

|y6tem

which

it is incorporated

c-xG!=-,,- 2-c,-?

rz<<ZS9 At

Dak ahd Place

registered to lSOgNl

rL-

This page has been intentionally left blank.

B760-60-880 Issue A

Section Page

1 Introduction .......................................................................................1

1.1 Scope and definitions ................................................................................................... 1

2 Technical data ....................................................................................3

2.1 General .................................................................................................................... 3

2.2 Pumping media ........................................................................................................... 5

2.3 Vent gas specification and vent control data ....................................................................... 7

2.4 Purge gas specification and data ...................................................................................... 7

2.5 Materials exposed to gases pumped .................................................................................. 7

3 Installation .................................................... ................................... 13

3.1 Unpack and inspect .....................................................................................................13

3.2 Typical installation .....................................................................................................14

3.3 Connection to the vacuum system ...................................................................................16

3.3.1 Mechanical fixing .......................................................................................................16

3.3.2 Inlet screens .............................................................................................................16

3.3.3 Inlet connection and pump orientation .............................................................................17

3.3.4 Backing-port connection ...............................................................................................20

3.3.5 Booster port connection ...............................................................................................20

3.4 Vent options, vent-valve connection and control .................................................................20

3.5 Purge gas connection ...................................................................................................21

3.6 Electrical installation ..................................................................................................21

3.6.1 EXDC drive module .....................................................................................................22

3.6.2 TIC controller ............................................................................................................22

3.7 Cooling ...................................................................................................................22

3.7.1 Introduction .............................................................................................................22

3.7.2 Forced-air cooling ......................................................................................................22

3.7.3 Water-cooling ...........................................................................................................22

3.8 Magnetic fields ..........................................................................................................23

Contents

4 Operation ........................................................................................ 25

4.1 Start-up ..................................................................................................................25

4.2 Shut-down ................................................................................................................26

4.3 Safety interlocks and control system ................................................................................26

4.3.1 EXDC drive module .....................................................................................................26

4.3.2 TIC controller ............................................................................................................26

4.4 Bakeout ...................................................................................................................26

5 Maintenance ..................................................................................... 27

5.1 Introduction .............................................................................................................27

5.2 Bearing maintenance ...................................................................................................27

5.3 Rotor life .................................................................................................................27

5.4 Cleaning the pump ......................................................................................................27

5.5 Fault finding .............................................................................................................28

6 Storage and disposal ...... .... ..... ..... ..... ..... ..... ..... ................................... 31

6.1 Storage ...................................................................................................................31

6.2 Disposal ...................................................................................................................31

7 Service, spares and accessories .............................................................. 33

dcs/7784/01/08

B760-60-880 Issue A

Contents

7.1 Introduction .............................................................................................................33

7.2 Service ....................................................................................................................33

7.3 Spares kits ...............................................................................................................33

7.3.1 Inlet screens .............................................................................................................33

7.3.2 Inlet strainer .............................................................................................................33

7.3.3 Inlet-flange seal .........................................................................................................33

7.4 Accessories ...............................................................................................................34

7.4.1 Installation ...............................................................................................................34

7.4.2 EXDC drive module .....................................................................................................34

7.4.3 TIC controller ............................................................................................................34

7.4.4 TAV vent-valve and vent port adaptor ..............................................................................34

7.4.5 VRX vent-restrictor .....................................................................................................35

7.4.6 PRX purge-restrictor ....................................................................................................35

7.4.7 ACX air-cooler ...........................................................................................................35

7.4.8 WCX water-cooler ......................................................................................................35

Index ................................................................ .............................. 37

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 Booster port performance with lines of constant backing pressure ............................................. 5

2 Dimensions of B76061991 EXT400/200PX split flow pump - large main and side ports (units in mm) ...... 8

3 Dimensions of B76062991 EXT400/200PX split flow pump -

large main and side ports plus end port (units in mm) ............................................................ 9

4 Dimensions of B76067991 EXT400/200/30iPX -

large side port and end port plus interstage port (units in mm) ................................................10

5 Dimensions of B76053991 EXT400/200/30iPX -

interstage cartridge pump with main, side ports plus interstage port (units in mm) ........................11

6 Schematic of a typical EXTPX split flow system ...................................................................15

7 Correct installation of inlet screen ..................................................................................17

8 Correct mounting attitude of the EXTPX split flow pump ........................................................19

9 Installation of optional accessories ..................................................................................36

Edwards and the Edwards logo are trademarks of Edwards Limited.

B760-60-880 Issue A

Tables

Table Page

1 General data .............................................................................................................. 3

2 Technical data ........................................................................................................... 3

3 Vent gas and vent control data ........................................................................................ 7

4 Purge gas specification ................................................................................................. 7

5 List of items supplied ..................................................................................................13

6 Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve) ..............21

7 Water-cooling block supply requirements ..........................................................................23

8 Fault finding .............................................................................................................28

9 Spares kits ...............................................................................................................33

10 EXDC drive module .....................................................................................................34

11 TIC controller ............................................................................................................34

12 TAV vent-valve and vent port adaptor ..............................................................................34

13 VRX vent restrictor .....................................................................................................35

14 PRX purge restrictor ....................................................................................................35

15 ACX air-cooler ...........................................................................................................35

16 WCX water-cooler ......................................................................................................35

Contents

Associated publications

Publication title Publication number

EXDC Turbomolecular pump drive module D396-45-880 TIC (100 W and 200 W) manual D397-22-880 TIC range CD D397-00-879 EXT pump accessories manual B580-65-880

B760-60-880 Issue A

This page has been intentionally left blank.

Edwards and the Edwards logo are trademarks of Edwards Limited.

B760-60-880 Issue A

CAUTION

WARNING

1Introduction

1.1 Scope and definitions

This manual provides installation, operation, maintenance and storage instructions for the range of Edwards EXT400/200PX and EXT400/200/30iPX split f low com pound t urbomo lecular vacuum pu mps, he reaf ter re ferred to as EXTPX split flow pumps. Please read and follow all instructions in this manual.

The EXTPX split flow pump is designed for use with an Edwards 24 V EXDC160 drive module unless using Argon (please refer to Section 2.2) when an EXDC80 drive module may be recommended. Read this manual and the instruction manual supplied with your EXDC before you attempt to install or operate the equipment. The EXDC drive module manual contains details of electrical installation.

Important safety information in this manual is highlighted as WARNING and CAUTION instructions; please obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

Warnings are given where failure to observe the instruction could result in injury to or death of people.

Introduction

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

In accordance with the recommendations of EN61010, the following warning symbols may appear on the p ump or its accessories:

Warning - refer to accompanying documentation.

Warning - risk of electric shock.

Warning - hot surfaces.

The units used throughout this manual conform to the SI international system of units of measurement. Also throughout this manual, wherever flow rates are specified, the abbreviation 'sccm' is used to mean standard

min-1: this is a flow of 1 cm3 min-1 at an ambient temperature of 0 °C and a pressure of 1013 mbar

(1.013 x 10

Pa).

B760-60-880 Issue A

This page has been intentionally left blank.

Edwards and the Edwards logo are trademarks of Edwards Limited.

B760-60-880 Issue A

2Technical data

2.1 General

Table 1 - General data

General items Reference data

Performance Refer to Table 2 Dimensions Refer to Table 2 and Figure 2 to 5 Maximum inlet-flange temperature 70 °C Maximum radial and axial magnetic field 3.5 mT Installation category EN61010 part 1, Category 1 Pollution degree EN61010 part 1, Category 2

Table 2 - Technical data

Parameter EXTPX split flow pump Notes

Mass 12 kg or less Weight dependent on specific

variant. Main inlet port Refer to Figure 2 to 5 Side inlet port Refer to Figure 2 to 5 Interstage port Refer to Figure 2 to 5 Booster port DN 25NW Exhaust port DN 25NW Vent port 1/8 inch BSPP Purge port 1/8 inch BSPP Peak end inlet pumping speed

-1 *

He 320 l s H

Peak main inlet pumping sp eed N

He 310 l s H

Peak side inlet pumping speed N

He 200 l s H

Peak interstage inlet pumping speed N

He 27 l s H

320 l s

-1

280 l s

-1 *

310 l s

-1

270 l s

-1 *

200 l s

-1

150 l s

-1 *

27 l s

-1

27 l s

Technical data

B760-60-880 Issue A

Technical data

Table 2 - Technical data (continued)

Parameter EXTPX split flow pump Notes

Peak booster port pumping speed N using XDS10 24 m3 h-1 (6.7 l s-1) using RV12 26 m3 h-1 (7.2 l s-1) Peak compression ratio from the

backing-port to the main inlet

, He and H

Peak compression ratio from the side inlet to the main inlet

, He and H

Maximum booster port pressure- N

Maximum backing pressure- N

Recommended backing-pump Application dependent Please consult Edwards. Maximum single continuous

inlet pressure Main inlet 1.2 x 10 Side inlet 4.1 x 10 Interstage inlet (where fitted) 2.2 x 10 -1 mbar Operating attitude Refer to Figure 8 Nominal rotational speed 60,000 rpm Starting time to 90% speed

Using an EXDC 160 Cooling method Forced air/ water-cooling Refer to Section 3.7. Ambient air temperature

(forced air-cooling) Water-cooling supply temperature 10- 20°C Noise level at 1 metre < 45 dBA Recommended controller EXDC 160 W 24 V D396-46-000 Recommended controller (Argon) EXDC 80 24 V D396-45-000 also refer to

EXDC160 maximum VA output 250 VA Quiescent power 25-40 W P ower at ultimate pressure with

All pumping speeds are peak valu es for a horizontal envelope pump without inlet screen. Inlet screens may reduce performance by up to 15%. Actual pumpin g speed for different envelope variants will be dependent on inlet geometry and flow distribution between ports.

N2 > 1 x 10 He 1 x 10 H2 2 x 10

N2 1 x 10

8 6

5 4

He 100

H2 35

4.5 mbar Air cooled at 25 °C ambient with RV12 backing-pump (1400 sccm flow) and with no flow through other inlet ports, and no strainer fitted.

17 mbar Air cooled at 25 °C ambient, with no

flow through other inlet ports.

-2

mbar Air at 35 °C ambient- with RV12

-2

mbar

backing-pump.

285 seconds With zero gas load, and XDS10

backing-pump.

0- 35°C

Section 2.2.

-2

mbar backing pressure.

Edwards and the Edwards logo are trademarks of Edwards Limited.

B760-60-880 Issue A

WARNING

Figure 1 - Booster port performance with lines of constant backing pressure

Technical data

Power Limit Zone: The temperatures shown are pump local ambients. The tests were performed with a single

radial fan cooling the pump. If extra cooling is added, extra performance can be obtained. Exact limits will be based on application requirements, cooling metho d and pump configuration; please consult Edwards to ensure suitability. Also refer to Section 3.7 and 7.4 for cooling requirements and accessories.

2.2 Pumping med ia

If pumping hazardous gases or vapours, the customer must observe the safety recommendations of the supplier of the gas or vapour. Vent hazardous gases and gas mixtures safely. Do not expose people to these gases.

Do not pump explosive gas mixtures through the EXTPX split flow pump as the pump is not suitable for this purpose.

If pyrophoric gases are pumped then the customer must supply adequate dilution with an inert gas.

It is the customers' responsibility to leak check their system to ensure that the process gases will not escape to the atmosphere where this would cause a hazard.

B760-60-880 Issue A

CAUTION

WARNING

Technical data

Gases entering from different pump inlets may combine to cause dangerous mixtures.

An EXDC160 drive module is recommended for most applications. However, when pumpi ng high concentrations of Argon (over 50% of gas mixture) an EXDC80 drive module is recommended to protect the pump against overheating. If in any doubt, please contact your local Edwards Vacuum Representative.

Do not use the EXTPX split flow pump to pump particulates or condensable media. Deposition may occur within the pump which will degrade pump performance and reduce the pump life.

Do not use the EXTPX split flow pump to pump gases containing more than 20% oxygen. If you do, the lubricant will polymerise and the pump will fail prematurely.

Note: Concentrations of gases may be modified by the compression of the pump.

The pump is designed to pump the following residual gases normally used in high-vacuum systems:

z Air z Nitrogen z Carbon Dioxide z Carbon Monoxide z Krypton z Helium z Neon z Argon z Hydrogen z Ethane z Propane z Butane z Methane

You can use the pump to pump oxygen and water vapour, subject to the following conditions:

z Oxygen - The oxygen concentration must be less than 20% by volume; also refer to Section 2.4. z Water vapour - You must ensure that vapour does not condense inside the pump.

If you wish to pump a gas not in the list above, co ntact your supplier for advice. If you do not contact your supplier, you may invalidate the warranty on the pump. The pump is not suitable for pumping aggressive or corrosive gases.

Edwards and the Edwards logo are trademarks of Edwards Limited.

+ 32 hidden pages

Edwards EXTPX Series, EXT400/200PX, EXT400/200/30iPX Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Contents

Illustrations

Tables

Associated publications

1Introduction

1.1 Scope and definitions

2Technical data

2.1 General

2.2 Pumping med ia