Instruction Manual
Original Instructions
EXT Compound Turbomolecular Pumps
EXT75DX, EXT75DXi and EXT75iiDX
B722-40-880
Issue H
Description Item Number
EXT75DX ISO63 B722-41-000
EXT75DX CF63 B722-42-000
EXT75DX NW40 B722-43-000
EXT75DX ISO100 B722-45-000
EXT75DX ISO100 (NW25 Backing) B722-46-000
EXT75DX ISO63 Reversed B722-48-000
EXT75DXi NW40 B722-35-000
EXT75DXi ISO63 (NW16 Interstage) B722-37-000
EXT75DXi ISO63 (NW25 Interstage) B722-38-000
EXT75iiDX ISO63 (NW16 Interstage) B722-31-000
EXT75iiDX Cartridge Pump B722-32-000
This product has been manufactured under a quality management system certified to ISO 9001:2015.
P200-01-020-J
2006/42/EC
Machinery directive
2014/35/EU
Low voltage directive (LVD)
2014/30/EU
Electromagnetic compatibility (EMC) directive
2011/65/EU
Restriction of certain hazardous substances (RoHS) directive
EN 1012-2:1996
+A1:2009
Compressors and vacuum pumps. Safety requirements. Vacuum pumps
EN 61010-1:2010
Safety requirements for electrical equipment for measurement, control and laboratory use.
General requirements
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC requirements.
Class B Emissions, Industrial Immunity
CSA-C22.2
No.61010-1-12
Safety requirements for electrical equipment for measurement, control and
laboratory use – Part 1: General requirements
UL61010-1
3rd Edition
Safety requirements for electrical equipment for measurement, control and
laboratory use – Part 1: General requirements
Mr Ian Keech
Date and Place
Declaration of Conformity
Edwards Ltd,
Innovation Drive,
Burgess Hill,
West Sussex,
RH15 9TW, UK
The following product
EXT75DX/DXi/iiDX B722-yy-zzz
Where ‘yy’ and ‘zzz’ are numeric characters
Is in conformity with the relevant requirements of European CE legislation:
Based on the relevant requirements of harmonised standards:
General requirements
The product also complies with the following:
This covers all product serial numbers from the date of this declaration onwards.
29.08.2018, Burgess Hill
Vice President Engineering, High Va c uum Division
This declaration is based on the requirements of EN ISO 17050-1 and the relevant directives.
P200-10-019
Issue D
Material Declaration
In accordance with the requirements of the Chinese regulatory requirement on the Ma nagement Methods for the
Restriction of the Use of Hazardous Substances in Electrical and Electronic Products Order No. 32 (also known as
‘China RoHS2’) and SJ/T 11364 Marking for the Restricted Use of Hazardous Substances in Electronic and Electrical
Products:
Product Labels
Product Product Label Meaning
This product contains hazardous substances in at least one of the
All pumps in the
list below
Pump Type Pump Size
RV Pumps RV3,5,8,12, E Lab, nRVi
EM Small Pumps E2M0.7, 1.5, E1M18, E2M18, 28, 30, nE2M40i
nEXT Pumps nEXT 85, 240, 300, 400, Splitflow
nXDS pumps nXDS 6, 10, 15, 20
EXT pumps EXT75DX
XDS pumps XDS35, 46, 100
Diaphragm XDD 1, D lab
Turbo Pump Carts T station, nEXPT, nEXT station
部件名称
Part name
铸铝
Cast Aluminium
铜管管件
Brass pipe Fittings
铜接头
Brass Connectors
2020
铅
Lead
(Pb)
Mercury
X O O O O O
X O O O O O
X O O O O O
homogeneous materials used which are above the limit requirement
in GB/T 26572 as detailed in the declaration table below.
These parts can safely be used for the environmental protection use
period as indicated.
材料成分声明
Materials Content Declaration
质
汞
(Hg)
镉
Cadmium
(Cd)
危险物
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls (PBB)
Polybrominated
diphenyl ethers
多溴二苯醚
(PBDE)
O： 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below
the limit requirement in GB/T 26572.
X： 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for
this part is above the limit requirement of GB/T26572.
NOTES: These products are EU RoHS compliant, the following Exemptions apply:
6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight.
6(c) Copper alloy containing up to 4% lead by weight
Packaging Information
Pallet Over-shipper Protection Pieces Support Braces
NWNW
Recyclable Natural Wood Recyclable Cardboard Recyclable Polypropylene Recyclable Mild Steel
This page has been intentionally left blank.
B722-40-880 Issue H
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 General description ..................................................................................................... 1
1.3 Drive electronics ......................................................................................................... 2
1.4 Operational features .................................................................................................... 3
1.4.1 Power limit setting ...................................................................................................... 3
1.4.2 Standby speed ............................................................................................................ 3
1.4.3 Timer ...................................................................................................................... 3
1.4.4 Analogue output ......................................................................................................... 4
1.4.5 Automatic vent options ................................................................................................. 4
1.4.6 Normal speed setting .................................................................................................... 4
1.4.7 Electronic braking ....................................................................................................... 5
1.5 Logic interface ........................................................................................................... 5
1.5.1 Parallel control and monitoring ....................................................................................... 5
1.5.2 Full serial control ........................................................................................................6
1.5.3 Serial control with parallel monitoring ............................................................................... 6
1.5.4 Parallel control with occasional serial monitoring or serial setup ............................................... 6
1.5.5 Podule configuration (serial setup) ................................................................................... 6
Contents
2 Technical data ....................................................................................7
2.1 General .................................................................................................................... 7
2.2 Pumping media ........................................................................................................... 7
2.3 Vent gas specification and vent control data ......................................................................13
2.4 Purge gas specification ................................................................................................14
2.5 Cooling water ............................................................................................................14
2.6 Materials exposed to gases pumped .................................................................................14
2.7 Electrical data ...........................................................................................................15
2.8 Logic interface connector .............................................................................................15
2.9 Podule connector socket ..............................................................................................16
2.10 Indicator LEDs ...........................................................................................................18
2.11 Operating and storage environment .................................................................................18
3 Installation ............................................... ................................... ..... 19
3.1 Unpack and inspect .....................................................................................................19
3.2 Typical installation .....................................................................................................19
3.3 Connection to the vacuum system ...................................................................................19
3.3.1 Inlet screen (supplied fitted) .........................................................................................21
3.3.2 Mechanical fixing .......................................................................................................22
3.3.3 Inlet connection and orientation .....................................................................................22
3.3.4 Base mounting ...........................................................................................................22
3.3.5 Backing connection .....................................................................................................23
3.3.6 Interstage connection (iDX variants only) ...........................................................................23
3.4 Purge gas connection ...................................................................................................24
3.4.1 Connect the purge gas .................................................................................................24
3.4.2 Recommended purge gas flow ........................................................................................24
3.5 Electrical installation ..................................................................................................24
3.5.1 Introduction .............................................................................................................24
3.5.2 Earth (ground) connections ...........................................................................................24
3.5.3 Connect the logic interface to the TIC ..............................................................................24
3.5.4 Connect the logic interface to the customer control equipment ...............................................24
3.5.5 Connect the electrical supply .........................................................................................25
3.6 Parallel interface mode ................................................................................................26
gp/0275/11/15
© Edwards Limited 2018. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
B722-40-880 Issue H
Contents
3.7 Serial interface mode ..................................................................................................27
3.7.1 Connect the serial interface to the customer control equipment ..............................................27
3.7.2 Serial enable .............................................................................................................28
3.7.3 Serial protocol ...........................................................................................................28
3.7.4 Message structure .......................................................................................................29
3.7.5 Command set ............................................................................................................30
3.7.6 Simultaneous parallel and serial operation .........................................................................30
3.7.7 Multi-drop mode ........................................................................................................33
3.8 Vent options, vent valve connection and control ..................................................................34
3.8.1 Manual vent valve ......................................................................................................34
3.8.2 TAV5 or TAV6 solenoid vent valve ....................................................................................34
3.8.3 Controlled venting ......................................................................................................34
3.8.4 Alternative valve connected to the vacuum system ..............................................................35
3.9 Cooling ...................................................................................................................36
3.9.1 Introduction .............................................................................................................36
3.9.2 Forced air cooling .......................................................................................................36
3.9.3 Water cooling ............................................................................................................36
4 Operation ........................................................................................ 39
4.1 Configuring the DX pump using serial commands ..................................................................39
4.1.1 Power limit setting .....................................................................................................39
4.1.2 Powering a fan from the podule ......................................................................................40
4.1.3 Controlled venting options ............................................................................................40
4.1.4 Standby speed setting ..................................................................................................41
4.1.5 Normal speed setting ...................................................................................................41
4.1.6 Timer setting and options .............................................................................................42
4.1.7 Analogue signal options ................................................................................................43
4.1.8 Electronic braking options .............................................................................................43
4.1.9 Factory settings .........................................................................................................44
4.1.10 Assigning a multi-drop address .......................................................................................44
4.2 Configuring the DX pump using a TIC ................................................................................45
4.3 Start-up ..................................................................................................................45
4.3.1 Close the vent valve ....................................................................................................45
4.3.2 Pre-start checks .........................................................................................................46
4.4 Operation with parallel control and monitoring ...................................................................46
4.4.1 Start the pump ..........................................................................................................46
4.4.2 Running at standby speed .............................................................................................46
4.4.3 Stop the pump ...........................................................................................................46
4.4.4 Parallel monitoring .....................................................................................................47
4.5 Operation with serial control and monitoring ......................................................................47
4.5.1 Delayed start ............................................................................................................47
4.5.2 Start the pump ..........................................................................................................47
4.5.3 Standby speed ...........................................................................................................47
4.5.4 Stop the pump ...........................................................................................................48
4.5.5 Temperature readings .................................................................................................48
4.5.6 Link parameter readings ...............................................................................................48
4.5.7 Measured motor speed .................................................................................................48
4.6 Simultaneous parallel and serial operation .........................................................................49
4.7 Operation with a TIC ...................................................................................................49
4.8 Decelerating and venting ..............................................................................................49
4.9 Operation at extreme conditions .....................................................................................49
4.9.1 Operation with high inlet pressure ...................................................................................49
4.9.2 Operation at high temperatures ......................................................................................50
4.9.3 Operation at over-speed ............................................................................................... 50
4.9.4 Electrical supply failure ...............................................................................................50
4.10 Bakeout ................................................................................................................... 51
5 Maintenance ..................................................................................... 53
5.1 Introduction .............................................................................................................53
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Edwards and the Edwards logo are trademarks of Edwards Limited.
B722-40-880 Issue H
5.2 Bearing maintenance ...................................................................................................53
5.3 Rotor life .................................................................................................................53
5.4 Clean the external surfaces of the pump ...........................................................................53
5.5 Fault finding .............................................................................................................54
5.5.1 Flashing error codes ....................................................................................................56
5.5.2 Decoding system status words ........................................................................................56
5.5.3 Useful service information ............................................................................................59
6 Storage and disposal ....................................................... ..... ..... ..... ..... 61
6.1 Storage ...................................................................................................................61
6.2 Disposal ...................................................................................................................61
7 Service, spares and accessories .............................................................. 63
7.1 Introduction .............................................................................................................63
7.2 Service .................................................................................................................... 63
7.2.1 Returning a pump for service .........................................................................................63
7.3 Spares .....................................................................................................................63
7.3.1 ISX inlet screen ..........................................................................................................63
7.3.2 Inlet strainer .............................................................................................................64
7.3.3 Inlet flange seals ........................................................................................................64
7.4 Accessories ............................................................................................................... 6 4
7.4.1 Installation ...............................................................................................................64
7.4.2 ACX air cooler ...........................................................................................................64
7.4.3 WCX water cooler .......................................................................................................64
7.4.4 BX bakeout band ........................................................................................................65
7.4.5 TAV vent valve and vent port adaptor ...............................................................................65
7.4.6 VRX vent restrictor .....................................................................................................65
7.4.7 Vent port adaptor .......................................................................................................65
7.4.8 PRX purge restrictor ....................................................................................................66
7.4.9 Vibration isolators ......................................................................................................66
7.4.10 FL20K foreline trap .....................................................................................................66
7.4.11 Podule connector plug .................................................................................................66
7.4.12 TIC turbo and instrument controllers ................................................................................66
7.4.13 TIC PC Program ..........................................................................................................67
Contents
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 EXT75DX dimensions (mm) ............................................................................................11
2 EXT255DX dimensions (mm) ...........................................................................................12
3 Maximum allowed rate of pressure rise during venting: pressure against time (with pump initially at full
rotational speed) .......................................................................................................13
4 Podule connector plug .................................................................................................17
5 Typical pumping system with a DX pump ...........................................................................20
6 Correct installation of the inlet screen (EXT75DX) ................................................................21
7 Correct installation of the inlet screen (EXT255DX) ...............................................................21
8 Logic interface connections - parallel mode .......................................................................26
9 Logic interface connections - serial mode ..........................................................................27
10 Conceptual diagram for multi-drop connection ....................................................................29
11 Schematic diagram of the logic interface connections ...........................................................33
12 Installation of optional accessories and spares ....................................................................67
© Edwards Limited 2018. All rights reserved. Page iii
Edwards and the Edwards logo are trademarks of Edwards Limited.
B722-40-880 Issue H
Contents
Tables
Table Page
1 Power limits .............................................................................................................. 3
2 General data .............................................................................................................. 7
3 DX pumps technical data ............................................................................................... 8
4 DX pumps technical data ............................................................................................... 9
5 DX pumps technical data ..............................................................................................10
6 Vent gas specification and vent control .............................................................................13
7 Purge gas specification ................................................................................................14
8 Cooling water specification ...........................................................................................14
9 Logic interface technical data ........................................................................................15
10 Logic interface connector pins .......................................................................................17
11 Podule technical data ..................................................................................................17
12 Indicator LEDs ...........................................................................................................18
13 Operating and storage environment .................................................................................18
14 Checklist of components ...............................................................................................19
15 Summary of commands that can be sent to the DX pump ........................................................30
16 Command abbreviations ...............................................................................................32
17 Error codes ...............................................................................................................32
18 Vent options .............................................................................................................35
19 Vent restrictor orifice diameter (with atmospheric pressure at the inlet of the vent valve) ..............35
20 Power limit setting .....................................................................................................39
21 Analogue signal options ................................................................................................43
22 Behaviour of a pump when the power is re-instated after an electrical supply failure .....................52
23 Fault finding .............................................................................................................54
24 Flashing error codes ....................................................................................................56
25 Hexadecimal conversion table ........................................................................................57
26 Status flags ..............................................................................................................57
27 Example decoding of system status words ..........................................................................58
28 Inlet flange seals ........................................................................................................64
29 Vent restrictors .........................................................................................................65
Trademark credits
Windows™ is trademark of Microsoft Corporation.
Page iv © Edwards Limited 2018. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B722-40-880 Issue H
CAUTION
WARNING
1Introduction
1.1 Scope and definitions
This manual provides installation, operation, maintenance and storage instructions for the Edwards DX Compound
Turbomolecular Pumps. The pumps must be used as specified in this manua l. Read this manua l before installing and
operating the pumps.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be
obeyed. The use of WARNINGS and CAUTIONS is defined below.
Warnings are given where failure to observe the instruction could result in injury or death to
people. The actual symbol shown varies according to the hazard.
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and/or process.
Introduction
The units used throughout this manual conform to the SI international sys tem of units of measurement. When flow
rates are specified, the abbreviation ‘sccm’ is used to mean standa rd cubic centimetr es per minute. This is a flow of
1 cm3 min-1 at an ambient temperature of 0 ºC and a pressure of 1013 mbar (1.013 x 105 Pa).
The following warning labels may be present on the pump and used throughout the product documentation:
Warning
An appropriate safety instruction should be followed.
Warning - Dangerous Voltage
Indicates hazards arising from dangerous voltages.
Warning - hot surfaces
Indicates that the marked item may be hot and should not be touched without taking precautions.
Protective conductor terminal.
Warning - use protective equipment
Indicates that appropriate protective equipment must be used.
The units used throughout this manual conform to the SI international system of units of measurement; where
appropriate US equivalent units of measurement are also given.
© Edwards Limited 2018. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
B722-40-880 Issue H
CAUTION
WARNING
WARNING
Introduction
1.2 Gener al description
Improper use of the equi pment could cause damage to it or injury to people. The user is
responsible for the safe operation, installation and monitoring of the system.
The Podule contains electrolytic capacitors and, under certain fault conditions, may emit
dangerous fumes. Ensure that the Podule is operated in a well-ventilated area.
Do not attempt to separate the Podule from the pump since this will cause damage to the electrical connections.
The DX pumps consist of the compound turbomolecular pump with a permanently attached Podule containing drive
electronics.
The Podule controls the electrical supply to the pump. It has no manual controls and can only be operated through
the logic interface. To operate the DX pump, connect it to the customer control equipment and power supply or use
the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller.
The Podule drives the brush-less d.c. motor in the pump. The pump has three Hall effect devices that operate as
rotor position sensors and ensure that the drive current is correctly commutated around the motor phase windings.
The vacuum pump contains turbomolecular blades and a Holweck drag mechanism on a single shaft; the Holweck
mechanism allows operation at higher backing pressures than pure turbomolecular pumps.
DX pumps are supplied with an inlet screen fitted into the bore of the inlet flange. The EXT75DXi has an NW25
interstage port and is supplied with an inlet strainer that fits into the interstage port. For details on the EXT75iiDX
pumps, contact Edwards. The inlet screen and inlet strainer protect the pump against damage that would be caused
by debris entering the pump. The inlet screen also protects the user against injury from the sharp blades in the pump.
Note: The EXT75DXi with an NW16 interstage port is not supplied with an inlet strainer.
The DX pumps have a vent port for venting the pump and vacuum system to atmospheric pressure. The pump is
supplied with a manual vent valve fitted. This can be re placed with a TAV5 or TAV6 solenoid-operated vent valve
(available as accessories – see Section 7).
The DX pumps have a purge port. An inert purge gas can be introduced through the port to protect the bearing and
motor from corrosion, or the bearing lubricant from oxidisation. An optional vent port adapter and purge restrictor
can be fitted to the purge port to control the flow rate of the purge gas and to filter the gas supply. (Refer to
Section 7).
Air coolers and a water-cooling block are available as optional accessories to cool the DX pumps. (Refer to Section 7).
1.3 Drive electronics
The Podule contains the drive electronics that control the pump operation and accessories such as a TAV vent valve
or air cooler. There is a connector socket on the top of the Podule where the TAV vent valve or air cooler can be
plugged in. (Refer to Section 2.9)
The Podule has two indicator LEDs that signal the status and operation of the pump, th at can also be used for fault
finding if a problem should occur. (Refer to Section 2.10)
The drive electronics system has a number of built-in safety features to protect the DX pumps from damage in the
event of sustained high pressure or temperature:
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Edwards and the Edwards logo are trademarks of Edwards Limited.
B722-40-880 Issue H
The electronics constantly monitor the temperature inside the Podule and the temperature of the motor
within the pump. If either part beco mes too hot, the electronics reduce the power supplied to the pump
motor and the pump speed will drop . If the pump rotational spee d falls below 50% full speed, the electronics
may trip into Fail condition, depending on the system configuration. (Refer to Section 1.4.3).
If the pump inlet pressure increases, the power supplied to the pump motor increases to counteract the gas
frictional load. However, when the built-in maximum power limit is reached, the speed of the pump will start
to drop. If the pump rotational speed falls below 50% full speed, the electronics may trip into Fail condition,
depending on the system configuration. (Refer to Section 1.4.3).
In the event of an electrical supply failure, the drive electronics use the motor within the pump as a
generator. This means the DX pumps have their own regenerative supply and do not require a separate
battery for emergency power backup. The regenerated energy is used to maintain the electrical supply to
the connector socket on the P odule until the p ump speed falls to below 50% of full rotational speed: this will
ensure that the vent valve remains shut until below 50% of full rotational speed and will prevent the pump
from venting at full speed, provided that there is not too much loading on the 24 V supply to the pump.
1.4 Operational features
In addition to the basic start and stop commands, the DX pumps have several other features for improved
functionality. These allow pump operation to be tailored to the particular application. Refer to Table 14 for factory
default settings of the parameters discussed in the following Sections.
Introduction
1.4.1 Power limit setting
Select the maximum power that will be drawn by the pump (refer to Section 4.1.1). The more power supplied, the
quicker the pump will accelerate to reach full speed. If the application requires fast cycling, set the power limit to
the maximum value. If ramp time is not important in the application, use a lower power limit, down to a minimum
value, refer to Table 1.
Table 1 - Power limits
Pump Maximum value setting Minimum value setting
EXT75DX 120 W 50 W
Ensure that the power supply is capa ble of delivering sufficient power to the DX pump. By choosing a lower power
limit setting, a smaller power supply can be used. For more information, refer to Section 2.7.
1.4.2 Standby speed
In Standby mode the pump rotational speed is lower than the full rotational speed.
If the application does not require the pump to be running at maximum speed at all times, use the Standby speed
feature rather than switching the pump off. This can save time since the pump does not have to be stopped or vented
and the wait time for the pump to accelerate back to full speed will be reduced.
The Standby speed is a user-selectable value (refer to Section 4.1.4).
1.4.3 Timer
When the pump is started, an internal timer is automatically started within the drive electronics. If the pump fails
to reach 50% of full rotational speed within the time-out period, the Podule will signal a Fail and will decelerate the
pump to rest. This is a safety feature and prevents the Podule driving the pump at maximum power for a long time,
which could cause damage. The pump may fail to reach 50% speed if the gas load is too high (for example if there is
a leak in the system), if the backing pump fails, or if the pump is too hot.
The time-out period is a user-selectable feature (refer to Section 4.1.6). If the application requires the pump to ramp
up slowly, extend the time-out period. The Timer is permanently enabled for ramp-up.
© Edwards Limited 2018. All rights reserved. Page 3
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B722-40-880 Issue H
Introduction
The Timer has an additional function. If the pump rotational speed drops below 50% full speed for any reason, the
timer can be set to a llo w t he pu mp ti me to recover rather than trigger a Fail condition. The Timer starts as soon as
the speed drops to below 50% full speed. If, during th e time-out period, the pu mp recovers to above 50% full speed
then the Timer will be reset. If the pum p r otational speed fails to recover by the end of the time-out period, the
Podule will trigger a Fail condition and will decelerate the pump to rest. When the pump is shipped, the Timer
function is be enabled, however the Timer can be disabled. With the Timer disabled, the p ump will Fail and
decelerate to rest as soon as pump rotational speed falls below 50%.
1.4.4 Analogue output
The Podule produces an analogue output that allows for monitoring four different system parameters:
Measured pump rotational speed
Measured motor power
Measured motor temperature
Measured controller temperature
The analogue output signal ranges from 0 to 10 V and is directly proportional to the system parameter (refer to
Section 2.8).
Connect the analogue output to a suitable meter or indicator to display the appropriate system parameter or connect
to the customer control equipment (for example, to operate other components in the pumping system at pre-set
values).
Only one system parameter can be monitored at a time using the analogue output. However, it is easy to configure
the Podule to monitor a different system parameter (refer to Section 4.1.7).
1.4.5 Automatic vent options
An Edwards TAV vent valve can be connected directly to the DX pump’s Podule. The Podule is capable of controlling
a number of different venting options.
The drive electronics can control the rate of venting. Using this feature, the pump can be vented from full rotational
speed in a controlled manner that will not damage the pump bearings. Once the pump rotational speed has dropped
to below 50% of maximum speed, it is safe to hard vent (open the vent valve fully.)
There are many venting options available, including:
Hard vent when rotational speed drops below 50%
Controlled vent when above 50% speed and hard vent below 50% speed
Hard vent immediately through a suitable restrictor
A full list of the venting options is given in Section 3.8.
In addition, there is a feature that allows a delayed start of the DX pump. With this feature, the vent valve can be
closed before starting the DX pump. This allows the backing pump to reduce the pressure in the vacuum system
before starting the DX pump.
If the Podule is not used to control a TAV vent valve, it can be used to run a fan instead. Configure the Podule so that
the fan is permanently enabled.
1.4.6 Normal speed setting
The Normal Speed is a user-selectable parameter that can be set anywhere from 50% to 100% of full rotational speed.
When the pump reaches Normal Speed, a signal is available on the Normal pin of the logic interface connector. Use
this signal to control the application since it shows that pump speed, and therefore vacuum performance, has
reached a minimum specific level. The default setting is 80% of full rotational speed. Refer to Section 4.1.5 for
instructions on altering the Normal Speed setting.
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Edwards and the Edwards logo are trademarks of Edwards Limited.
B722-40-880 Issue H
1.4.7 Electronic braking
The pump has a user selectable Electronic Braking option that is disabled by de fau lt. Wi th this opti on d isa bled , th e
pump will draw power from the supply when accelerating and running and will coast down when decelerating.
The Electronic Braking function may be enabled to reduce the pump deceleration time and to recover some energy
from the pump. This is achieved by returning power from the pump to the electrical supply. The rate at which
electrical energy is returned to the supply is regulated so as to limit the supply voltage to 24 V +10%. In order to
achieve the fastest electronic braking times there must be somewhere for the returned power to go such as :
a supply capable of receiving the returned power
other devices sharing the 24 V bus with the pump
a load resistor of approximately 10 Ω switched across the 24 V supply when decelerating the pump
1.5 Logic interface
The Podule can only be operated through the logic interface. The si gnals on the logic interface are of three types:
Control inputs: these are switch-type signals that are used to control the pump
Status outputs: these outputs identify the status of the system
Introduction
Analogue output: this provides a 0 – 10 V output for a number of pump parameters.
The logic interface has been designed to include both serial and parallel modes of control and monitoring, operating
through one connector. The pump can be operated u sing either serial or parallel m ethod or some combinat ion of the
two.
The logic interface can be plugged directly into the Edwards TIC Turbo Controller or TIC Turbo Instrument Controller
and then use the functionality that they provide. Alternatively, the logic interface can be connected to a customers
own control system. The most useful arrangements are described in the sections below.
For more information about the logic interface, refer to Section 2.8.
1.5.1 Parallel control and monitoring
The simple parallel interface is a quick and easy way to control the pump. This is the same interface used on existing
24V Edwards Turbo Pumps. The controls that are available to use are Start and Standby. The system status can be
monitored using the Normal, Fail and Analogue output signals.
Note: The Serial Enable switch MUST be open (no connection).
Refer to Section 3.6 for more detailed instructions of how to use the parallel interface.
A system operating in pure parallel mode has no facility to adjust the configuration settings stored in the Podule (for
example, power limit setting or controlled venting options). This would place a restriction in that all these features
would be at their factory default settings. However, the Podule could be configured separately before fitting the DX
pump to the system. This is covered in more detail in Section 1.5.5.
© Edwards Limited 2018. All rights reserved. Page 5
Edwards and the Edwards logo are trademarks of Edwards Limited.
B722-40-880 Issue H
Introduction
1.5.2 Full serial control
The serial communications link provides complete control and monitoring using just three signal lines. The Serial data
RX and TX use the same connector pins as the parallel signals Standb y and Fail respectively.
The Serial Enable signal MUST be linked to 0 V for the system to accept commands in Serial control mode. This is a
safety feature and acts as an interlock. In addition, the parallel Start signal must be left unconnected for Serial
commands to be accepted in full Serial control mode.
The Podule will still provide the Normal and Analogue signals on the logic interface connector even when operating
in full Serial control mode. The status of the Normal signal can also be obtained by interrogating the system status
via the Serial interface.
For more information about the Serial interface, refer to Section 3.7.
1.5.3 Serial control with parallel monitoring
Since Normal and Analogue signals remain available even using Serial control mode, it is possible to control the pump
via the Serial interface whilst monitoring these signals using a parallel link.
Again, the Serial data RX and TX use the same connector pins as the parallel signals Standby and Fail respective ly so
these parallel control and monitoring signals are not available. The Serial Enable signal MUST be linked to 0 V and
the Start switch must remain open (no connection).
1.5.4 Parallel control with occasional serial monitoring or serial setup
This method of control is best for users who normally wish to operate the pump in parallel mode but occasionally
want to adjust the configuration settings stored in the Podule or to monitor operational status of the pump.
Whilst operating in Parallel mode, the same controls and monitoring signals are available as described in
Section 1.5.1. It must be remembered that the Serial data RX shares the same connector pin as the Standby signal so
the pump cannot be commanded into Standby speed using this line.
The Serial Enable signal must be linked to 0 V for serial communications to take place. Edwards suggests making a
special cable for serial communications that includes a link between Serial Enable and 0 V. This way, Serial Enable
is automatically activated when the cable is connected and then deactivated when the cable is removed.
1.5.5 Podule configuration (serial setup)
All the configuration settings stored within the Podule are retained even when power to the DX pump is removed.
This means that it is possible to use a separate system to configure the Podule before fitting the DX pump to the
application. This gives the benefit of tailoring the pump functionality to a customer application and allows the pump
to be operated using a simple parallel interface system.
To configure the DX pump, either use a customer simple serial syst em or use the Edwards TIC Turbo Controller or
Turbo Instrument Controller. The TICs have a feature which allows storage of a DX pump’s configuration. The
configuration can then be downloaded to another DX pump. This is useful when configuring a number of DX pumps
with the same settings before they are fitted to a system.
The TIC is supplied with a Windows
The program has a simple user interface which means that it is not necessary to use the ASCII message protocol
described in Section 3.7. The TIC PC Program has a facility to save multiple DX pump configurations which can then
be downloaded into other DX pumps.
TM
based PC program which allows the DX pump to be configured from a single PC.
Page 6 © Edwards Limited 2018. All rights reser ved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
2Technical data
WARNING
WARNING
WARNING
WARNING
2.1 General
Table 2 - General data
General items Reference data
Performance Refer to Table 3
Dimensions Refer to Figure 1
Maximum inlet flange temperature
ISO63 / ISO100 / NW40 70 °C with cooling water
DN63CF (EXT75DX) 100 °C bakeout, with cooling water
Maximum permitted external magnetic field
EXT75DX 5 mT
Pollution degree EN61010, Pollution Degree 2
Equipment type Fixed equipment, for indoor use only
Enclosure protection (installed)
EXT75DX and 75DXi/NW25 IP50
EXT75DXi/NW16 IP50
EXT75iiDX Contact Edwards for details
B722-40-880 Issue H
Technical data
2.2 Pumping media
Vent dangerous gases and gas mixtures safely. Do not expose people to these gases. If pumping
hazardous gases or vapours, observe the safety recommendations of the supplier of the gas/
vapour.
Do not use the DX pump to pump pyrophoric or explosive gas mixtures, as it is not suitable for this
purpose. The pump and its connections are not designed to contain an explosion.
In the interstage versions of the DX pumps, g as pu mped th rough the in tersta ge p ort w ill m ix wit h
gas pumped through the pump inlet. Ensure that the gases will not react or combine to form
dangerous gases and substances.
Do not expose any part of the human body to vacuum.
© Edwards Limited 2018. All rights reserved. Page 7
Edwards and the Edwards logo are trademarks of Edwards Limited.
B722-40-880 Issue H
CAUTION
Technical data
Do not use the DX pump to pump gases containing more than 20% oxygen unless the pump is gas purged. If gases
containing more than 20% oxygen are pumped, the lubricant will polymerise and the pum p may fail prematurely.
Note: Concentrations of gases may be modified by the compression of the pump.
The pumps are designed to pump the following residual gases normally used in high-vacuum systems:
Air Carbon dioxide
Methane Neon
Propane Krypton
Butane Helium
Carbon monoxide Ethane
Nitrogen Argon
Hydrogen
The pump can be used to pump oxygen and water vapour, subject to the following conditions:
Oxygen – when the pump is purged by an inert gas, oxygen can be pumped at concentrations above 20% by
volume. Refer to Section 2.4 for Purge gas specification. However, if the pump is not purged, the oxygen
concentration must be less than 20% by volume.
Water vapour - ensure that water vapour does not condense inside the pump; refer to Section 3.9.3.
If pumping a gas not in the list above, contact the supplier for advice. If the supplier is not contacted, the pump
warranty may be invalidated. The pump is not suitable for pumping aggressive or corrosive gases.
Table 3 - DX pumps technical data
Parameter
EXT75DX
ISO63
EXT75DX
63CF
EXT75DX
NW40
EXT75DX
ISO100
Mass 3.0 kg 4.9 kg 2.9 kg 3.2 kg
Inlet flange DN63ISO-K DN63CF DN40NW DN100ISO-K
Outlet flange DN16NW DN16NW DN16NW DN16NW
Vent port 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP
Purge port 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP
Interstage port (optional) DN25NW and
---
DN16NW
Inlet pumping speed
N
2
61 l s
He 57 l s
H
2
53 l s
-1
-1
-1
61 l s
57 l s
53 l s
-1
-1
-1
42 l s
49 l s
48 l s
-1
-1
-1
66 l s
59 l s
54 l s
-1
-1
-1
Inlet compression ratio
N
2
>1 x 10
He 1 x 10
H
2
5 x 10
11
6
4
>1 x 10
1 x 10
5 x 10
11
6
4
>1 x 10
1 x 10
5 x 10
11
6
4
>1 x 10
1 x 10
5 x 10
11
6
4
Interstage pumping speed, for interstage
DX pumps with N
70 sccm flow through interstage port 10 l s
5 sccm flow through interstage port 3 l s
(DN16NW port)
2
-1
-1
---
---
Interstage pumping speed, for
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Table 3 - DX pumps technical data (continued)
B722-40-880 Issue H
Technical data
Parameter
N
2
EXT75DX
ISO63
----
EXT75DX
63CF
EXT75DX
NW40
EXT75DX
ISO100
He ----
Ultimate pressure:
with rotary vane backing pump:
with diaphragm backing pump:
*
Ultimate pressure 48 hours after bakeout with 2-stage rotary vane backing pump.
†
Ultimate pressure 48 hours after bakeout with Pb < 5 mbar (500 Pa).
*
†
<5 x 10-9 mbar <5 x 10
<5 x 10-8mbar <5 x 10-9 mbar <5 x 10-8 mbar <5 x 10-8 mbar
-10
mbar <5 x 10-9 mbar <5 x 10-9 mbar
Note: Contact Edwards for details on the EXT75D Xi and EXT75iiDX variants.
Table 4 - DX pumps technical data
Parameter EXT75DX
Critical backing pressure
N
2
*
8 mbar
He 6.5 mbar
H
2
Minimum backing pump displacement 0.6 m3 h
Maximum Continuous Backing Pressure
†
2.5 mbar
-1
(at Ultimate Inlet Pressure)
Nitrogen:
Water Cooling (40 °C ambient)
‡
4 mbar
Forced Air Cooling (35 °C ambient) 5 mbar
Natural Convection Cooling (30 °C ambient) 2 mbar
Maximum continuous inlet pressure
†
(at Ultimate Backing Pressure)
Nitrogen:
Water cooling (40 ºC ambient)
Forced Air cooling at (35 ºC ambient) 3 x 10
‡
2 x 10-2 mbar
-2
mbar
Natural Convection Cooling (30 °C ambient) 8 x 10-3 mbar
Argon:
Water cooling (40 ºC ambient)
‡
4 x 10-3 mbar
Forced Air cooling at (35 ºC ambient) 4 x 10-3 mbar
Natural Convection Cooling (30 °C ambient) 1 x 10-3 mbar
Recommended backing pump
**
RV3
Operating attitude Vertical and upright through to horizontal ± 2 °
Nominal rotational speed 90,000 revolutions per minute
Starting time to 90% speed
††
110 seconds
Sound power level (1 metre away) < 50 dB(A)
*
Pumping speed is reduced to 90% of its original value.
†
Above this pressure, rotational speed drops below nominal. Values for maximum continuous inlet pressure
obtained using a RV12 backing pump. Refer to Section 3.9 for cooling conditions.
‡
Cooling water temperature at 15 °C. Cooling water flow rate at 30 l hr-1.
© Edwards Limited 2018. All rights reserved. Page 9
Edwards and the Edwards logo are trademarks of Edwards Limited.
B722-40-880 Issue H
WARNING
1. Podule
2. Podule connector socket (for fan/TAV valve)
3. Interstage port (EXT75iDX only)
4. Manual vent valve in ve nt port
5. Logic interface connector
6. Purge port (blanked off)
7. Earth connection
8. Cooling block mounting face
9. Podule indicator LEDs
10.Backing port
Technical data
**
A suitable diaphragm pump with ultimate <5 mbar may also be used.
††
Power limit setting 80 W (EXT75DX).
Note: Contact Edwards for details on the EXT75DXi and EXT75iiDX variants.
Do not exceed the maximum continuous operating pressure. Doing so can result in dangerous rotor
temperatures and will shorten the life of the pump.
Figure 1 - EXT75DX dimensions (mm)
Note: Contact Edwards for details on the EXT75iiDX variants.
Page 10 © Edwards Limited 2018. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B722-40-880 Issue H
2.3 Vent gas specification and vent control data
Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the
subsequent pump-down time. To reduce pump-down times vent with dry, clean gases. Refer to Section 3.8 for a
description of the vent options and the vent valve connection and refer to Section 4.1.3 for configuring the venting
options.
Table 5 - Vent gas specification and vent control
Vent gas specification and control Reference data
Vent gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of particulates 1
Maximum concentration of oil 0.1 parts per million
Recommended time for rotational speed to reach 50% > 15 seconds
Maximum allowed rate of pressure rise Refer to Figure 2
Figure 2 - Maximum allowed rate of pressure rise during venting: pressure against time (with pump initially at
full rotational speed)
µm
Technical data
© Edwards Limited 2018. All rights reserved. Page 11
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B722-40-880 Issue H
Technical data
2.4 Purge gas specification
Table 6 - Purge gas specification
Purge gas specification Reference data
Purge gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of particulates 1
Maximum concentration of oil 0.1 parts per million
Allowable purge gas flow (when required) 20 to 50 sccm (0.33 to 0.84 mbar l s
Recommended purge gas flow 25 sccm (0.42 mbar l s-1, 42 Pa l s-1)
Maximum allowable purge gas supply pressure 2 bar (gauge); 29 psi, 3 x 105 Pa
Table 7 - Cooling water specification
Cooling water specification Reference data
Quality Mechanically clean and optically clear with no deposits
pH value 6.0 to 8.0
Maximum calcium carbonate concentration 75 parts per million
Maximum chloride concentration 100 parts per million
Minimum oxygen concentration 4 parts per million
Minimum cooling water flow rate (at 15 °C) 15 l hr
Water temperature Refer to Table 4
Maximum water pressure 5 bar (gauge), 73.5 psig, 6 x 10
Materials exposed to cooling water Nickel plated brass
µm
or turbidity
-1
or 33 to 84 Pa l s-1)
-1
5
Pa
2.5 Cooling water
The above cooling water specification corresponds to a typical high-quality drinking water specification. Check with
the water supply authority if there is any doubt about the quality of the supply.
2.6 Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped:
Aluminium alloys, stainless steels, fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth
magnets, silicon nitride, phenolic resin, carbon-fibre-reinforced epoxy resin, fire retardant polypropylene,
polyamide and PVC.
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Edwards and the Edwards logo are trademarks of Edwards Limited.
B722-40-880 Issue H
2.7 Electrical data
DX pumps can be driven either by the customer system or b y the Edwards TIC Turbo Instrument Controller or TIC
Turbo Controller.
If using the customer system, the size of the power supply required depends on the app l ication. The power limit
setting determines how quickly the pump ramps up and dictates the size of power supply required. If serial
communications or access to an Edwards TIC is available, p ower limit setting of the DX pump can be selected. Refer
to Table 8 for the maximum and minimum power limit settings for DX pumps and for the associated maximum input
current requirements. If the application requires rapid cycling of the pump, faster ramp times can be achieved if the
power supply delivers higher current, up to a maximum in accordance with Table 8.
If the facility to adjust the power limit setting is not available, use a power supply capable of delivering enough
current to meet the Edwards factory default power limit setting, shown in Table 8. For the EXT75DX this would be
around 4 amps.
If the DX pump is driven using an Edwards TIC, be aware that there are several variants. Contact Edwards to
determine which is most suitable for the application.
2.8 Logic interface connector
DX pumps have a 15-way logic interface connector on the end of the logic interface cable (see Figure 1). The logic
interface connector can be plugged directly into the Edwards TIC Turbo Instrument Controller or TIC Turbo
Controller. Use a suitable connector mating half (not supplied) to connect the DX pump to the customer equipment.
Refer to Table 8 for the connector mating half type and to Table 9 for Logic Interface connector pins for the electrical
connections.
Technical data
Table 8 - Logic interface technical data
Logic interface item EXT75DX
Connector
DX pumps electrical supply:
Hardware control input signal:
*
Allowable voltage range
(including any ripple)
Maximum voltage ripple 0.5 V r.m.s.
Maximum input current w ith maxi mum power lim it
setting
Maximum input current wi th minimum power limit
setting
Fuse (or equivalent current limiting device) rating 6 A type 'T' IEC approved or
Factory default setting 80 W
Maximum power limit 120 W
Minimum power limit 50 W
Enabled control voltage: low (close) 0 to 0.8 V d.c. (I
Disabled control voltage: high (open) 4 to 26.4 V d.c. (Internal pull up to 6.35 V nominal)
15-way D-type male
24 V d.c. +5%, -10%
(21.6 to 25.2 V d.c.)
<6 A at 24 V during ramp
<3 A at 24 V
6 A time delay fuse UL/CSA approved
= 0.55 mA nominal)
out
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B722-40-880 Issue H
Technical data
Logic interface item EXT75DX
Analogue output:
Output voltage 0 to 10 V d.c. (directly proportional to m easured
Output current ≤ 5 mA
NORMAL status output:
Type Open collector transistor
< Normal speed (default 80%) Off (2.2 kΩ pull up to 12 V d.c.)
Normal speed On (<0.8 V d.c. sinking 20 mA)
≥
Rating 20 mA to 0 V
FAIL status output:
Type Open collector transistor
Fail Off (3.3 kΩ pull up to 12 V d.c.)
OK On (<0.1 V d.c. sinking 1.7 mA,
Rating 20 mA to 0 V
*
Mating half of connector not supplied.
Table 8 - Logic interface technical data (continued)
parameter)
Motor speed: 0 - 1500 Hz (0-100%)
Motor power: 0 - 120 W
Motor temperature: 0 - 100 °C
Controller temperature: 0 - 100 °C
<0.8 V d.c. sinking 20 mA)
2.9 Podule connector socket
The DX pump has a 2-way Podule Connector Socket in the top of the Podule. When the pump is shipped, this connector
is concealed by a black protective cover. If the connector will be used, this cover should be removed by levering with
a small screwdriver. The mating plug for this connector is supplied with the pump.
The connector is intended to drive a vent valve or fan connected to the two pins. The connector mating plug is shown
in Figure 3, with the polarity of the pins marked when the vent valve/fan is energised.
The podule connector plug is available as an accessory, see Section 7.4.
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