Edwards EXT70H/ISO63, EXT70H/NW40, EXT70H/ISO100, EXT255H/CF100, EXT255H/ISO100 Instruction Manual

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Instruction Manual

Low Voltage EXT Compound Molecular Pumps:

EXT70H 24V, EXT70Hi 24V

Issue D Original

, EXT255H 24V and EXT255Hi 24 V

B722-20-880

Description Item Number

EXT70H/ISO63 24 V B722-21-991

EXT70H/CF63 24 V B722-22-991

EXT70H/NW40 24 V B722-23-991

EXT70H/ISO100 24 V B722-26-991

EXT255H/ISO100 24 V B753-01-991

EXT255H/CF100 24 V B753-02-991

EXT255Hi/ISO100 24 V B753-03-991

EXT255H/ISO100 24 V (Coarse Inlet Screen) B753-05-991

* The EXT70Hi 24 V pump is an EXT70H/ISO63 24 V pump with an interstage-port accessory fitted. Refer to the text of this

instruction manual for further information.

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Declaration

We, Edwards,

,{anor Royal,

Crawley,

West Sussex RH10 9LW, UK declare under our sote Low vottage EXT Compound A4olecular

EXT/oH /tSO63 24V df70HtcF63 24v Eff/oH/NW4o 24V Eff/0H/t50100 2,{v

8fi255H/lSOi00 Efl-255H/CF100 24V ofi255Hi/150t00 Ef255H/lSO100 24V

to which this de.taration retates i5 in conformity with the fottowing standard(s) or other normative documentls)i

EN ISO12100-2: 2003 Safety of EN61010-1: W1O12-2'. 1997 Compre5sors and vacuum

EN61326: 199y' Etectricat equiprnent for rn€asurernent, conuot and laboratory use. +

Al: 1998 + A2: 2001 Elvlc requlrements. {lndlstriat Location. Ctass B Emissions) C22.2 No 61010. t

Ul-61010-

(2d

responsibitity that the

Pump6i

24V

24v

(Coarse

Inlet Streen)

machlnery. Barlc concepts,

2001 Safety requirements for e{edrical equipment for measurement,

-O/

Edition)

Technica( Contro( and laboratory use. Generat requlrements.'

Safety requirements for etectricat equipmert for measurement,

Controt and laboratory use, Part 1 : General requlrcments

Safety contro[ and tabohtory use, Part l: General requlrerlents

pdncipals.

reqdrements

of Conformity

product(s)

8722-21-991 8722-22-991 tI22-23-991 tI22-26-991

8753-01-991 8753-02-991

8753.03.991 8753-05.991

general

prlnclpats

pump6.

Safety requlrements. Vaclum

for electrlcat equipment for measurement,

for

deslgn,

pumps.

pumps

The

rnanuat supptled with the

EN61 326 lmmunity chssification is dependent for detaits).

Pumps onty compty with the Canadian Standard Authority 2zlv family of controtlers.

following the

2OO6|95/EC Low ZOIJ4IIOaIEC EtedromagneticcompatlbitityDlrective. 98137IEC Machinery Safety Directfve.

compty wlth EN6t0'10-l

proMsions

of:

(200f

pumps.

Vottage Directive.

when insta(ed ln accordance with the instrudion

)

on the controtbr

and'Underwriters Labcratory

2-*l

B, D, Brewster,

Burgel5

TechnicalAanager

Hill ProducE

product

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quality

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the con$oller manual

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B722-20-880 Issue D

Section Page

1 Introduction ....................................................................................... 1

1.1 Scope and definitions ................................................................................................... 1

1.2 General description ..................................................................................................... 2

1.3 Vent options and vent control ......................................................................................... 2

2 Technical data .................................................................................... 5

2.1 General .................................................................................................................... 5

2.2 Pumping media ........................................................................................................... 5

2.2.1 Pumps without gas purge ............................................................................................... 6

2.2.2 Pumps with gas purge (EXT255H 24 V and EXT255Hi 24 V only) .................................................. 6

2.3 Vent gas specification and vent control data ....................................................................... 6

2.4 Purge gas specification (EXT255H 24 V and EXT255Hi 24 V only) ................................................ 9

2.5 Cooling-water ............................................................................................................ 9

2.6 Materials exposed to gases pumped .................................................................................. 9

3 Installation ....................................................................................... 15

Contents

3.1 Unpack and inspect ..................................................................................................... 15

3.2 Typical installation ..................................................................................................... 15

3.3 Connect to the vacuum system ....................................................................................... 18

3.3.1 Inlet-screen ..............................................................................................................18

3.3.2 Mechanical fixing .......................................................................................................18

3.3.3 Base mounting ........................................................................................................... 19

3.3.4 Inlet connection and orientation ..................................................................................... 19

3.3.5 Backing connection ..................................................................................................... 20

3.3.6 Interstage connection ((EXT70Hi 24 V and EXT255Hi 24 V only) ................................................ 20

3.4 Vent-valve connection and control .................................................................................. 20

3.5 Purge gas connection (EXT255H 24 V and EXT255Hi 24 V only) ..................................................21

3.5.1 Connect the purge gas .................................................................................................21

3.5.2 Recommended purge gas flow ........................................................................................ 21

3.6 Electrical installation ..................................................................................................21

3.6.1 EXDC drive module .....................................................................................................21

3.6.2 Earth (ground) connections ...........................................................................................22

3.7 Cooling ...................................................................................................................22

3.7.1 Introduction .............................................................................................................22

3.7.2 Forced-air cooling ......................................................................................................22

3.7.3 Water-cooling ...........................................................................................................23

4 Operation ........................................................................................ 25

4.1 Start-up ..................................................................................................................25

4.2 Shut-down ................................................................................................................25

4.3 Shut-down due to pump under or over-speed ...................................................................... 26

4.4 Bakeout ...................................................................................................................26

5 Maintenance ..................................................................................... 27

5.1 Introduction .............................................................................................................27

5.2 Bearing life ..............................................................................................................27

5.3 Rotor life .................................................................................................................27

5.4 Clean the pump ......................................................................................................... 27

5.5 Fault finding .............................................................................................................28

ITR 22317

B722-20-880 Issue D

Contents

6 Storage and disposal ........................................................................... 31

6.1 Storage ...................................................................................................................31

6.2 Disposal ...................................................................................................................31

7 Service, spares and accessories .............................................................. 33

7.1 Introduction .............................................................................................................33

7.2 Service ....................................................................................................................33

7.3 Spares .....................................................................................................................33

7.3.1 ISX inlet-screen ......................................................................................................... 33

7.3.2 Inlet-strainer (EXT255Hi 24V pump only) ...........................................................................33

7.3.3 WCX water-cooler ......................................................................................................34

7.3.4 Inlet-flange seals ........................................................................................................34

7.4 Accessories ...............................................................................................................34

7.4.1 Installation ...............................................................................................................34

7.4.2 EXDC drive modules .................................................................................................... 34

7.4.3 BX bakeout band ........................................................................................................34

7.4.4 FL20K foreline trap .....................................................................................................35

7.4.5 TAV vent-valve and vent-port adaptor .............................................................................. 35

7.4.6 ACX air-cooler ........................................................................................................... 35

7.4.7 Vibration isolators ...................................................................................................... 35

7.4.8 PRX purge-restrictor ....................................................................................................35

7.4.9 VRX vent-restrictor ..................................................................................................... 36

7.4.10 EXT70H/ISO63 interstage-port accessory kit .......................................................................36

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 Maximum allowed rate of pressure rise during venting: pressure against time

(with the pump initially at full rotational speed) ................................................................... 3

2 EXT70H 24 V dimensions (mm) ......................................................................................... 7

3 EXT255H/Hi 24 V dimensions (mm) ................................................................................... 8

4 Typical pumping system with an EXT70H or EXT255H pump ..................................................... 16

5 Typical pumping system with an EXT70Hi or EXT255Hi pump ................................................... 17

6 Correct installation of the inlet-screen .............................................................................18

7 Installation of optional accessories (and spares): EXT255Hi shown ............................................. 37

Tables

Table Page

1 EXT 70H 24 V / EXT 70Hi 24 V technical data ....................................................................... 9

2 EXT255H 24 V / EXT255Hi 24 V technical data .....................................................................11

3 Checklist of items ....................................................................................................... 15

4 Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve) ..............21

5 Fault finding ............................................................................................................. 28

Edwards and the Edwards logo are trademarks of Edwards Limited.

B722-20-880 Issue D

Associated publications

Publication title Publication number

EXDC Turbomolecular pump drive modules D396-40-880

Contents

B722-20-880 Issue D

This page has been intentionally left blank.

Edwards and the Edwards logo are trademarks of Edwards Limited.

B722-20-880 Issue D

CAUTION

WARNING

1Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards EXT70H 24 V, EXT70Hi 24 V, EXT255H 24 V and EXT255Hi 24 V Compound Molecular Pumps. These pumps must be used as specified in this manual. It is not possible to purchase an EXT70Hi 24 V pump; an EXT70Hi 24 V pump is an EXT70H/ISO63 24 V pump fitted with an interstage-port accessory: see Section 7.

The EXT Compound Molecular Pumps are designed for use with a Edwards Turbomolecular Pump Drive Module (abbreviated to EXDC Drive Module in the remainder of this manual). Read this manual and the instruction manual supp l i ed w i t h you r E XDC D r ive M o dule b e for e y ou at t e mpt t o install or operate the equipment. The instruction manual supplied with your EXDC Drive Module contains details of how to set up the Module and the logic interface.

Important safety information in this manual is highlighted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

Warnings are given where failure to observe the instruction could result in injury or death to people.

Introduction

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

In accordance with the recommendations of EN61010, the following warning symbols may appear on the pump or its accessories:

Warning - refer to accompanying documentation.

Warning - risk of electric shock.

Warning - hot surfaces.

Protective conducter terminal.

The units used throughout this manual conform to the SI international system of units of measurement. Also throughout this manual, wherever flow rates are specified, the abbreviation ‘sccm’ is used to mean ‘standard cm (1.013 x 10

min-1: this is a flow of 1 cm3 min-1 at an ambient temperature of 0 °C and a pressure of 1013 mbar

Pa).

B722-20-880 Issue D

Introduction

1.2 General description

The EXT70H 24 V, EXT70Hi 24 V, EXT255H 24 V and EXT255Hi 24 V pumps are compound vacuum pumps that combine a turbomolecular pump and a drag pump on a single shaft. The turbomolecular pump is made from a multi-stage axialflow turbine which is optimised for operation in molecular flow conditions. The drag pump is designed for operation at higher pressures than conventional turbomolecular pumps.

The angled blades of the turbomolecular pump are machined from a single piece of material. For the blades to be effective, their speed must be close to the thermal velocity of the gas. The rotor of the EXT70H/Hi 24 V therefore rotates at up to 90000 r min

Gas from the inlet is compressed through each of the bladed stages of the turbomolecular pump and transferred to the drag pump. In the drag pump stages the gas is further compressed.

The rotat ing asse mbly is s upporte d at the inlet end by a frictionless magnetic bearing and by a precision ceramic ball bearing at the outlet end. The ball bearing is lubricated from an oil reservoir and wick mechanism.

The EXT pump is supplied with an inlet-screen fitted in the bore of the inlet-flange. The EXT255Hi 24 V pump is also supplied with an inlet-strainer which fits in the interstage-port. The inlet-screen and inlet-strainer protect the pump against damage which would be caused by debris entering the pump. The inlet-screen also serves to protect the user against injury from the sharp blades in the pump.

The EXT pump has a vent-port for venting the pump and vacuum system to atmospheric pressure. The pump is supplied with a manual vent-valve fitted to the vent-port. As described in Section 3.4, the manual vent-valve can be replaced with a TAV5 or TAV6 solenoid-operated vent-valve (available as an accessory: see Section 7).

-1

, and the rotor of the EXT255H/Hi 24 V rotates at up to 60000 r min-1.

The EXT255H 24 V and EXT255Hi 24 V pumps have a purge-port in the motor and bearing housing chamber. An inert purge gas can be introduced through the purge port in order to protect these parts from corrosion or the bearing lubricant from oxidisation. An optional vent-port adaptor and purge restrictor can be fitted to the purge-port to control the flow rate of the purge gas and to filter the gas supply (see Section 7).

The EXT255Hi 24 V pump has an interstage-port between the turbomolecular and drag stages. If required, an interstage-port accessory can be fitted to an EXT70H/ISO63 24 V pump to upgrade it to an EXT70Hi 24 V pump (see

Section 7). The interstage-port on EXT70Hi 24 V and EXT255Hi 24 V pumps can be used to pump a separate chamber

of the vacuum system or to back another turbomolecular pump.

If the EXT70Hi 24 V pump operates with an outlet pressure of less than 5 mbar (500 Pa) and an interstage inlet flow of less than 100 sccm (1.69 mbar l s independent of the interstage operating conditions.

If the EXT255Hi 24 V pump operates with an outlet pressure of less than 5 mbar (500 Pa) and an interstage inlet flow of less than 70 sccm (1.17 mbar l s independent of the interstage operating conditions.

An EXDC 24 V Drive Module is used to control the EXT 24 V pump. The EXDC 24 V Drive Module is fitted directly to the 19-way connector on the pump.

The pump may be cooled using air-cooled or water-cooled optional accessories. Refer to Section 3 for guidance on applications and cooling requirements. Pumps with a Conflat flange are supplied with a water-cooler.

All EXT pumps have thermal sensors to monitor the motor and pump-body temperature.

-1

, 169 Pa l s-1) the vacuum performance at the turbomolecular pump-inlet is

-1

, 117 Pa l s-1), the vacuum performance at the turbomolecular pump-inlet is

1.3 Vent options and vent control

To maintain the cleanliness of the vacuum system, it is recommended that, whenever the pump is switched off, the pump (or vacuum system) is vented when the speed of the EXT pump is between full rotational speed and 50% of full rotational speed. At and above 50% of full rotational speed, the rotor spins fast enough to suppress any backstreaming of hydrocarbon oil from your backing pump.

However, if the pump is vented when it is at full rotational speed and the rate of pressure rise is too high, the pump life may be reduced. It is therefore recommended that either the rate of pressure rise is limited (see Figure 1), or that the vent-valve is only opened after the EXT pump speed has fallen to 50% of full rotational speed.

Edwards and the Edwards logo are trademarks of Edwards Limited.

B722-20-880 Issue D

The rate of pressure rise cannot be controlled by the manual vent-valve, so if the manual vent-valve is used it must only be opened after the EXT pump speed has fallen to 50% of full rotational speed.

If a TAV vent-valve is used, but the rate of pressure rise cannot be limited, the vent-valve must only be opened after the speed of the EXT pump has fallen to 50% of full rotational speed.

Figure 1 - Maximum allowed rate of pressure rise during venting: pressure against time (with the pump initially

at full rotational speed)

Introduction

B722-20-880 Issue D

This page has been intentionally left blank.

Edwards and the Edwards logo are trademarks of Edwards Limited.

2Technical data

CAUTION

WARNING

2.1 General

Performance See Ta b le 1 and 2 Cooling, noise and electrical data See Ta bl e 1 and 2 Dimensions See Ta bl e 2 and 3 Maximum inlet-flange temperature 100 °C Maximum magnetic field (EXT255H/Hi) 3.5 mT horizontal field; 7 mT vertical field Maximum magnetic field (EXT70H/Hi) 5 mT Installation category EN61010 part 1, Category 1 Pollution degree CAN/CSA, UL, EN61010 part 1 Altitude 2000 m Humidity 10 to 90% non condensing Electrical supply 24 V d.c. Equipment type Fixed equipment, for indoor use only

2.2 Pumping media

B722-20-880 Issue D

Technical data

Vent dangerous gases and gas mixtures safely. Do not expose people to these gases.

Do not use EXT pumps to pump explosive gas mixtures as the pumps are not suitable for this purpose.

On EXT70Hi 24 V and EXT255Hi 24 V pumps, gas pumped through the interstage-port will mix with gas pumped through the pump-inlet. Ensure that the gases will not react or combine to form dangerous gases and substances.

Do not use an EXT to pump gases containing more than 2 0% oxygen unless the pump is gas purged. If you do, the lubricant will polymerise and the pump will fail prematurely.

Do not use an EXT to pump mercury vapour and do not allow mercury (for example, from a McLeod gauge) to come into contact with the pump. If you do, the pump rotor may corrode and fail.

Note: Note that concentrations of gases may be modified by the compression of the pump.

B722-20-880 Issue D

Technical data

2.2.1 Pumps without gas purge

The pumps are designed to pump the following residual gases normally used in high-vacuum systems:

z Air z Carbon monoxide z Neon z Ethane z Methane z Nitrogen z Krypton z Argon z Propane z Carbon dioxide z Helium z Hydrogen z Butane

The pumps may be used to pump oxygen and water vapour, subject to the following conditions:

z Oxygen The oxygen concentration must be less than 20% by volume z Water vapour You must ensure that vapour does not condense inside the pump; refer to Section 3.7.3.

If you wish to pump a gas not in the list above, contact your supplier for advice. If you do not contact your supplier, you may invalidate the warranty on the pump. The pumps are not suitable for pumping aggressive or corrosive gases.

2.2.2 Pumps with gas purge (EXT255H 24 V and EXT255Hi 24 V only)

When purged with an inert gas, the pumps can be used to pump oxygen in concentrations above 20% by volume.

2.3 Vent gas specification and vent control data

Although the pump may be vented to atmospheric air, high relative humidity of the air may greatly increase the subsequent pumping time. To reduce pump-down times, vent the pump with dry, clean gases.

Vent gas Dry air, nitrogen, argon or other inert gases Maximum dew point at atmospheric pressure - 22 °C Maximum size of particulates 1 µm Maximum concentration of oil 0.1 parts per million Time for rotational speed to reach 50% 15 s Maximum allowed rate of pressure rise See Figure 1

Edwards and the Edwards logo are trademarks of Edwards Limited.

Figure 2 - EXT70H 24 V dimensions (mm)

1. Vent-valve

2. Electrical supply connector

3. Cooling-water connectors

4. Backing-port

5. Allowance for right-angle cable connector

6. Position of blanked off interstage port (70H ISO63 only)

B722-20-880 Issue D

Technical data

B722-20-880 Issue D

1. Interstage port (EXT 255Hi 24 V only)

2. Vent-valve

3. Purge-port

4. Electrical supply connector

5. Backing-port

6. Cooling-water connectors

7. Allowance for right-angle cable connector

8. Earth (ground) bonding point

Technical data

Figure 3 - EXT255H/Hi 24 V dimensions (mm)

Edwards and the Edwards logo are trademarks of Edwards Limited.

+ 30 hidden pages

Edwards EXT70H/ISO63, EXT70H/NW40, EXT70H/ISO100, EXT255H/CF100, EXT255H/ISO100 Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Contents

Illustrations

Tables

Associated publications

1Introduction

1.1 Scope and definitions

1.2 General description

1.3 Vent options and vent control

2Technical data

2.1 General

2.2 Pumping media

2.2.1 Pumps without gas purge

2.2.2 Pumps with gas purge (EXT255H 24 V and EXT255Hi 24 V only)

2.3 Vent gas specification and vent control data