Edwards EXT250H, EXT70H, EXT255H, EXT255Hi, EXT255DX Instruction Manual

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B580-65-880

Issue G Original

Instruction Manual

EXT Pump Accessories

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Contents

B580-65-880 Issue G

Contents

Section Page

1 Introduction ....................................................................................... 1

1.1 Scope and definitions ................................................................................................... 1

1.2 Installation and operation safety ...................................................................................... 2

2 BX bakeout band .................................................................................. 7

2.1 Description ................................................................................................................ 7

2.2 Technical data ........................................................................................................... 7

2.3 Installation ................................................................................................................8

2.3.1 Unpack and inspect ...................................................................................................... 8

2.3.2 Fit the BX bakeout band to the pump ................................................................................ 8

2.3.3 Electrical connection to an EXC controller .......................................................................... 8

2.3.4 Electrical connection to a TIC relay box ............................................................................. 8

2.3.5 Electrical connection to an independent electrical supply ....................................................... 8

2.4 Operation ................................................................................................................. 9

3 ACX air-cooler ................................................................................... 11

3.1 Description ...............................................................................................................11

3.2 Technical data .......................................................................................................... 11

3.3 Installation ...............................................................................................................28

3.3.1 Unpack and inspect ..................................................................................................... 28

3.3.2 Side (or radial) mounting ..............................................................................................28

3.3.3 Axial mounting ..........................................................................................................29

3.3.4 Combined radial and axial mounting ................................................................................29

3.3.5 Electrical connection ................................................................................................... 30

3.4 Operation ................................................................................................................30

4 TAV vent-valve .................................................................................. 33

4.1 Description ...............................................................................................................33

4.2 Technical data .......................................................................................................... 33

4.3 Installation ...............................................................................................................34

4.3.1 Unpack and inspect ..................................................................................................... 34

4.3.2 Fit the TAV vent-valve to the pump .................................................................................35

4.3.3 Electrical connection ................................................................................................... 35

4.4 Operation ................................................................................................................35

5 Vibration isolator ............................................................................... 37

5.1 Description ...............................................................................................................37

5.2 Technical data .......................................................................................................... 37

5.3 Installation ...............................................................................................................38

5.3.1 Unpack and inspect ..................................................................................................... 38

5.3.2 Fit the vibration isolator ............................................................................................... 38

6 Inlet screens ..................................................................................... 41

6.1 Description ...............................................................................................................41

6.2 Technical data .......................................................................................................... 41

6.3 Installation ...............................................................................................................41

6.3.1 Unpack and inspect ..................................................................................................... 41

6.3.2 Fit or remove the inlet-screen ........................................................................................ 42

7 PRX10 purge-restrictor ......................................................................... 45

dcs/7908/03/08

B580-65-880 Issue G

Edwards and the Edwards logo are trademarks of Edwards Limited.

Contents

7.1 Description ...............................................................................................................45

7.2 Technical data .......................................................................................................... 45

7.3 Installation ...............................................................................................................45

7.3.1 Unpack and inspect ..................................................................................................... 45

7.3.2 Fit the purge-restrictor ................................................................................................46

7.4 Operation ................................................................................................................46

7.4.1 General ...................................................................................................................46

7.4.2 Calibration of the PRX10 for different purge gases ............................................................... 46

8 Pump-to-controller cable ...................................................................... 49

8.1 Description ...............................................................................................................49

8.2 Technical data .......................................................................................................... 49

8.3 Installation ...............................................................................................................49

8.3.1 Unpack and inspect ..................................................................................................... 49

8.3.2 Connect the pump-to-controller cable ..............................................................................49

9 Vent-port adaptor .............................................................................. 51

9.1 Description ...............................................................................................................51

9.2 Technical data .......................................................................................................... 53

9.3 Installation ...............................................................................................................53

9.3.1 Unpack and inspect ..................................................................................................... 53

9.3.2 Connect the vent-port adaptor ....................................................................................... 53

10 VRX vent - restrictor ........................................................................... 55

10.1 Description ...............................................................................................................55

10.2 Technical data .......................................................................................................... 55

10.3 Installation ...............................................................................................................55

10.3.1 Unpack and inspect ..................................................................................................... 55

10.3.2 VRX vent-restrictor selection .........................................................................................55

10.3.3 Fit the vent-restrictor ..................................................................................................56

11 WCX water-cooler .............................................................................. 57

11.1 Description ...............................................................................................................57

11.2 Technical data .......................................................................................................... 57

11.3 Installation ...............................................................................................................57

11.3.1 Unpack and inspect ..................................................................................................... 57

11.3.2 Fit the water-cooler to the pump .................................................................................... 60

11.4 Operation ................................................................................................................60

12 Maintenance ..................................................................................... 61

13 Storage and disposal ........................................................................... 63

13.1 Storage ................................................................................................................... 63

13.2 Disposal ...................................................................................................................63

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 Accessories for EXT DX pumps (EXT75iDX pump shown) ........................................................... 3

2 Accessories for other EXT pumps (EXT250M pump shown) ........................................................ 4

3 Accessories for EXT406PX pumps ...................................................................................... 5

Contents

B580-65-880 Issue G

4 Accessories for EXTPX split flow pumps .............................................................................. 6

5 ACX75 air-cooler dimensions (mm) ...................................................................................12

6 ACX75 air-cooler installation (shown fitted to EXT75DX pump) .................................................13

7 ACX250 air-cooler dimensions (mm) .................................................................................14

8 ACX250 air-cooler installation (shown fitted to EXT250M pump) ............................................... 15

9 ACX250 air-cooler axial installation (shown fitted to EXT250M pump) ......................................... 16

10 ACX250H air-cooler dimensions (mm) ...............................................................................17

11 ACX250H air-cooler installation (shown fitted to EXT255Hi pump) .............................................18

12 ACX400 radial air-cooler dimensions (mm) .........................................................................19

13 ACX400 radial air-cooler installation ................................................................................20

14 ACX400 axial air-cooler dimensions (mm) .......................................................................... 21

15 ACX400 axial air-cooler installation .................................................................................. 22

16 ACX400 axial and radial air-cooler combination installation ..................................................... 23

17 ACX500 air-cooler dimensions (mm) .................................................................................24

18 ACX500 air-cooler installation (shown fitted to EXT501 pump) ................................................. 25

19 ACX555 air-cooler dimensions (mm) .................................................................................26

20 ACX555 air-cooler installation (shown fitted to EXT555H pump) ................................................ 27

21 EXT DX podule connector plug ........................................................................................31

22 TAV vent-valve dimensions (mm) .................................................................................... 34

23 TAV vent-valve connections ...........................................................................................36

24 Vibration isolator installation .........................................................................................39

25 ISX inlet-screen ......................................................................................................... 43

26 ISDX inlet-screen ........................................................................................................43

27 ISHX inlet-screen ........................................................................................................ 44

28 PRX10 purge-restrictor .................................................................................................47

29 Vent-port adaptor ......................................................................................................51

30 Extended vent-port adaptor .......................................................................................... 52

31 VRX vent-restrictor .....................................................................................................56

32 WCX555 water-cooler dimensions (mm) .............................................................................58

33 WCX555 water-cooler installation ....................................................................................59

Tables

Table Page

1 BX bakeout band technical data ....................................................................................... 7

2 ACX air-cooler technical data ......................................................................................... 11

3 TAV vent-valve technical data ........................................................................................33

4 Vibration isolators technical data ....................................................................................37

5 Inlet-screens technical data .......................................................................................... 41

6 PRX10 purge-restrictor technical data .............................................................................. 45

7 Nitrogen flow rate through the PRX10 purge-restrictor ..........................................................47

8 Pump-to-controller cables technical data ..........................................................................49

9 Vent-port adaptor technical data ....................................................................................53

10 Extended vent-port adaptor technical data ........................................................................53

11 Vent-restrictor technical data ........................................................................................ 55

12 WCX water-cooler technical data ....................................................................................57

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B580-65-880 Issue G

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

B580-65-880 Issue G

1Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards range of accessories for the following EXT pumps:

z EXT70 and EXT70H turbomolecular pumps.

z EXT75DX and EXT75iDX compound molecular pumps.

z EXT250 and EXT250M turbomolecular pumps.

z EXT250H and EXT250Hi compound molecular pumps.

z EXT255H and EXT255Hi compound molecular pumps.

z EXT255DX and EXT255iDX compound molecular pumps.

z EXT351 and EXT501 turbomolecular pumps.

z EXT555H, EXT555HF, EXT555Hi, EXT555H

and EXT556 compound molecular pumps.

z EXT406PX and EXTPX split flow compound turbomolecular pumps.

The accessories are shown in Figure 1 and 2. The Item Numbers for the accessories are listed in the appropriate sections. You must use the accessories as specified in this manual. Read this manual before you install accessories onto your EXT pump.

Important safety information is highlighted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

Throughout this manual, page, figure and table numbers are sequential.

The units used throughout this manual conform to the SI international system of units of measurement. When flow rates are specified, the abbreviation 'sccm' is used to mean 'standard cm

min-1: this is a flow of 1 cm3 min-1 at an

ambient temperature of 0 °C and a pressure of 1013 mbar (1.013 x 105 Pa).

In accordance with the recommendations of EN61010, the following warning labels may appear on the pump or its accessories:

WARNING

Warnings are given where failure to observe the instruction could result in injury or death to people.

Warning - refer to accompanying documentation.

B580-65-880 Issue G

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

1.2 Installation and operation safety

Before you install your accessory, you must:

z Switch off the EXT pump and wait until the pump has stopped rotating.

z Isolate the pump controller

from the electrical supply.

If you have an EXT DX pump: isolate the podule from the electrical supply.

Warning - risk of electric shock.

Warning - hot surfaces.

WARNING

You must use the procedures described in this manual to install your accessory, and you must obey all safety instructions and take note of all appropriate precautions. If you do not, you can damage the accessory or other equipment and can cause injury to people.

WARNING

The user of the EXT pump system is responsible for safe operation and monitoring of the system.

WARNING

Before you install the accessory, ensure that you switch off the pump and isolate the controller/podule as described below.

An EXC Controller or a TIC (Turbo Instrument Controller)

Introduction

B580-65-880 Issue G

Figure 1 - Accessories for EXT DX pumps (EXT75iDX pump shown)

1. Vibration isolator

2. Inlet-flange seal

3. Inlet-screen

4. EXT DX pump

5. Solenoid vent-valve

6. Vent-restrictor

7. Vent-port adaptor

8. Manual vent-valve

Supplied with/fitted to the pump: refer to the instruction manual supplied with your EXT pump.

9. Purge-restrictor

10. Vent-port plug

11. Interstage inlet strainer

†

12. Interstage inlet port

†

13. Podule

14. Water-cooler

15. Air-cooler (design varies with pump)

16. BX bakeout band

17. Podule connector plug (as required)

†

Supplied with/fitted to ‘i’ model pumps only: refer to the instruction manual supplied with your EXT pump.

B580-65-880 Issue G

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

Figure 2 - Accessories for other EXT pumps (EXT250M pump shown)

1. Vibration isolator

2. Inlet-flange seal

3. Inlet-screen

4. Solenoid vent-valve

5. Vent-port adaptor

6. Manual vent-valve

7. Vent-restrictor

†

8. Water-cooler

‡

Supplied with/fitted to the pump: refer to the instruction manual supplied with your EXT pump.

9. Air-cooler (design varies with pump)

10. Purge-restrictor (C-model pumps only)

11. EXT pump

12. Bakeout band position

13. Bakeout band (design varies with pump)

†

VRX10 vent-restrictor: supplied fitted to the vent-port and purge-port of EXT250M pumps only.

‡

Supplied fitted to all pumps, except for EXT555H pumps: refer to the instruction manual supplied with your EXT pump

Introduction

B580-65-880 Issue G

Figure 3 - Accessories for EXT406PX pumps

1. ACX400 axial air cooling accessory

2. ACX400 radial air cooling accessory

3. DN10NW vent port adaptor

4. VRX vent restrictor

5. Manual vent valve (fitted)

6. TAV solenoid valve

7. Inlet-flange O-ring/ gasket

8. Inlet screens (fitted)

9. Purge plug (fitted)

10. PRX purge restrictor

11. DN10W adaptor

12. Booster-port strainer and seal

13. Booster inlet port

14. EXDC controller

15. Bakeout band (BX250 shown)

16. BX250 bakeout band position

17. BX450 bakeout band position

18. WCX water-cooler

B580-65-880 Issue G

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

Figure 4 - Accessories for EXTPX split flow pumps

1. ACX400 axial air cooling accessory

2. ACX400 radial air cooling accessory

3. DN10NW vent port adaptor

4. VRX vent restrictor

5. Manual vent valve (fitted)

6. TAV solenoid valve

7. Inlet-flange O-rings

8. Purge plug (fitted)

9. PRX purge restrictor

10. DN10W adaptor

11. Booster-port strainer and seal

12. Booster inlet port

13. Inlet screens (fitted)

14. WCX water-cooler

15. EXDC controller

BX bakeout band

B580-65-880 Issue G

2 BX bakeout band

2.1 Description

You can fit an Edwards BX bakeout band to an EXT pump to increase the rate of degassing of the pump body, to achieve faster pump down and lower ultimate pressure. You should only fit BX bakeout bands to CF flanged pumps intended for use at ultra high vacuum.

BX bakeout bands are available for use with electrical supplies of 110 or 240 V a.c. and can be powered from a rear panel socket on the EXC Controller, from a rear panel socket on a TIC Relay Box, or from any suitable electrical supply.

2.2 Technical data

Table 1 - BX bakeout band technical data

Electrical supply 110 to 120 V a.c., 50/60 Hz or 200 to 240 V a.c., 50/60 Hz

Cable length 3 m

Termination 3-pin IEC reverse configuration plug

Typ i ca l o p e ra t i ng temperature

80 °C (measured on the pump envelope above the bakeout band)

Pollution degree EN61010 Part 1, Category 2

Equipment type Fixed equipment for indoor use only

BX70 BX250 BX450 BX501

Approximate mass (kg) 0.47 0.55 0.70 0.75

Nominal diameter (mm) 78 119 140 188

Width of band (mm) 25 30 40 40

Input power (W) 306080100

Fuse rating

110 to 120 V 0.5 A 1.0 A 1.0 A 1.0 A

200 to 240 V 0.5 A 0.5 A 0.5 A 0.5 A

Item Numbers

Model To fit pump Item Number

BX70/110 V EXT70/70H/70Hi/75DX/75iDX B580-52-040

BX250/110 V EXT250/250H/250Hi/250M, EXT255H/255Hi/255DX/255iDX B580-52-041

BX450/110 V EXT406PX B580-52-043

BX501/110 V EXT555H/555HF/555Hi/555H

/EXT556 B580-52-044

BX70/240 V EXT70/70H/70Hi/75DX/75iDX B580-52-060

BX250/240 V EXT250/250H/250Hi/250M, EXT255H/255Hi/255DX/255iDX B580-52-061

BX450/240 V EXT406PX B580-52-063

BX501/240 V EXT555H/555HF/555Hi/555H

/EXT556 B580-52-064

B580-65-880 Issue G

Edwards and the Edwards logo are trademarks of Edwards Limited.

BX bakeout band

2.3 Installation

2.3.1 Unpack and inspect

Remove all packing materials and protective covers and check the BX bakeout band.

If the BX bakeout band is damaged, notify your supplier and the carrier in writing within three days; state the Item Number of the BX bakeout band together with your order number and your supplier's invoice number. Retain all packing materials for inspection. Do not use the BX bakeout band if it is damaged.

2.3.2 Fit the BX bakeout band to the pump

1. Switch off the pump, isolate the pump controller from the electrical supply (on an EXT DX pump, isolate the podule from the electrical supply), and wait until the pump has stopped rotating.

2. Fit the BX bakeout band over the pump-body below the inlet-flange at the position shown by Figure 1, item 16 or

Figure 2, item 12.

3. Tighten the clamping-screw.

2.3.3 Electrical connection to an EXC controller

The BX bakeout band is supplied with a 3 metre cable terminated with an IEC connector. The connector fits the rear panel socket on the EXC120, EXC300 and EXC300M Controllers.

If you have an EXDC or EXC100 Controller, or you have an EXT DX pump, you must use either a TIC Relay Box as described in Section 2.3.4, or an independent electrical supply as described in Section 2.3.5.

1. Check that the rating of the fuse fitted in the rear-panel of the EXC Controller corresponds to the fuse rating stamped on the BX bakeout band. (Two spare fuses are supplied with the BX bakeout band).

2. Insert the connector into the socket in the rear of the EXC Controller.

3. Refer to the EXC Controller instruction manual to complete the installation.

2.3.4 Electrical connection to a TIC relay box

Refer to the TIC Relay Box instruction manual for information on how to fit the correct fuse, and how to connect the bakeout band to the TIC Relay Box.

2.3.5 Electrical connection to an independent electrical supply

If necessary, you can connect the BX bakeout band directly to an appropriate electrical supply.

Always ensure that the electrical supply to the BX bakeout band is interlocked so that it is automatically switched off whenever the EXT pump operates below normal speed. Check that the rating of the fuse fitted within your electrical supply corresponds to the fuse rating stamped on the BX bakeout band.

WARNING

Before you install the accessory, ensure that you switch off the pump and isolate the controller/ podule as described below.

BX bakeout band

B580-65-880 Issue G

2.4 Operation

CAUTION

Do not allow the temperature of the EXT pump envelope to rise above 100 °C, whether you use the BX bakeout band on its own or with bakeout heaters on your vacuum system.

When you use the bakeout band, ensure that there is adequate cooling for the pump and adequate ventilation for the bakeout band.

If you use an EXC120, EXC300 or EXC300M Controller to power the BX bakeout band, the operation of the BX bakeout band is controlled from the 'Heater' switch on the front panel of the EXC Controller. The 'Heater' switch is interlocked with the 'Start/Reset' switch and the pump 'Normal' indication; the bakeout band is switched off automatically if the EXT pump is overloaded.

Refer to the EXC Controller instruction manual for additional information.

If you have connected the bakeout band to a TIC Relay Box, refer to the TIC instruction manual for instructions on how to use the TIC to control the operation of the bakeout band.

WARNING

Do not operate the BX bakeout band when it is not installed on a pump. Without the cooling effect of the pump-body, the temperature of the band can rise to 300 °C with the danger of insulation breakdown and fire.

WARNING

Do not touch the BX bakeout band when it is switched on, as it can get very hot during operation.

B580-65-880 Issue G

Edwards and the Edwards logo are trademarks of Edwards Limited.

This page has been intentionally left blank.

ACX air-cooler

B580-65-880 Issue G

3ACX air-cooler

3.1 Description

An ACX air-cooler is used when a suitable cooling-water supply is not available for the pump or for a mobile pumping system. The ACX air-cooler is an enclosed electric fan and fixing bracket assembly which is easily fitted to bolt holes in the base of the pump. The ACX air-cooler has a 24 V d.c. motor which can be powered from a rear panel socket on the EXC Controller, an EXT DX podule, a TIC, or any suitable electrical supply.

All air-coolers are supplied with side-mounting brackets. The ACX250 is also supplied with an axial-mounting bracket for optional use with EXT250M pumps only.

The ACX400 air-coolers are available for both axial and radial mounting. It is possible to use both variants simultaneously if so desired and space allows. TICs can provide power for one fan only.

Refer to the EXT pump instruction manual to check the suitability of air cooling in your particular application.

3.2 Technical data

Table 2 - ACX air-cooler technical data

Electrical supply 20 to 28 V d.c.

Cable type and length 2-core with screen, 3 m long

Cable cores Red (positive), black (negative): unterminated, screen terminated with ring terminal

Pollution degree EN61010 Part 1 Category 2

Equipment type Fixed equipment for indoor use only

ACX75 ACX250 ACX250H

ACX400

Radial

ACX400

AXIAL

ACX500 ACX555

Dimensions: see Figure 5 7 10 12 14 17 19

Approximate mass (kg) 0.38 0.85 0.50 0.70 0.45 0.64 1.28

Rated current (mA) 120 120 100 110 110 100 250

Noise level at 1 m (dBA) < 45 < 45 < 45 < 45 < 45 < 45 < 45

Item Numbers

Model To fit pump Item

Number

ACX75 EXT70/70H/70Hi/75DX/75iDX B580-53-075

ACX250 EXT250M B580-53-150

ACX250H EXT250/250H/250Hi, EXT255H/255Hi/255DX/255iDX B580-53-160

ACX400 radial EXT406PX/EXT400/200/(30i)PX B580-53-455

ACX400 axial EXT406PX/EXT400/200/(30i)PX B580-53-405

ACX500 EXT351/501 B580-53-200

ACX555 EXT555H/555HF/555Hi B580-53-561

B580-65-880 Issue G

Edwards and the Edwards logo are trademarks of Edwards Limited.

ACX air-cooler

Figure 5 - ACX75 air-cooler dimensions (mm)

ACX air-cooler

B580-65-880 Issue G

Figure 6 - ACX75 air-cooler installation (shown fitted to EXT75DX pump)

1. Recommended mounting position

2. Podule

3. EXT75DX pump-base

4. Pump backing-port

5. Fixing screws and washers: M4 x 5 (4 off)

6. Manual vent-valve

7. ACX75 mounting bracket

Shown in alternative mounting position

B580-65-880 Issue G

Edwards and the Edwards logo are trademarks of Edwards Limited.

ACX air-cooler

Figure 7 - ACX250 air-cooler dimensions (mm)

ACX air-cooler

B580-65-880 Issue G

Figure 8 - ACX250 air-cooler installation (shown fitted to EXT250M pump)

1. ACX250 mounting bracket

2. Fixing screws: M5 x 5 (2 off)

3. EXT250M pump-base

4. Pump outlet-port

5. Alternative mounting position

6. Fan/bracket fixing screws: M5 x 5 (2 off)

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Edwards EXT250H, EXT70H, EXT255H, EXT255Hi, EXT255DX Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual