D396-14-880
Issue J Original
Instruction Manual
EXC Turbomolecular Pump Controllers
Description Item Number
EXC120 Controller D396-16-000
EXC120E Controller D396-17-000
EXC300 Controller D396-14-000
EXC300M Controller D396-15-000
Declaration of Conformity
We, Edwards Limited,
Crawley Business Quarter,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
Turbomolecular Pump Controllers
EXC300 D396-14-000
EXC300M D396-15-000
EXC120 D396-16-000
EXC120E D396-17-000
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
and fulfils all the relevant provisions of
2014/35/EU Low Voltage Directive
2014/30/EU Electromagnetic Compatibility (EMC) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
Larry Marini, Senior Technical Manager Date and Place
16.07.2015, Eastbourne
This product has been manufactured under a quality management system certified to ISO 9001:2008
P200-03-100 Issue D
P200-10-033
Turbomolecular pumps:
D39617000 EXC120E
This product cont ain s h azardous substances in at least
protection use pe rio d as indicated.
材料成分声明
Hazardous Substance s
(Cr VI)
(PBDE)
(PCA)
Assembly (PCA)
Cable/wire/connector
Mechanical Components
Lead
lead
Lead
Lead
lead
Lead
Cadmium
Lead
Lead
Issue A
Material Declaration
In accordance with the requirements of the Chinese regulatory requirement on the Management Methods for the
Restriction of the U se of Hazardous Substances in Electric al and Electronic Product s Order N o. 32 (also known as
‘China RoHS2’) and SJ/T 11364 Mar king f or the R estrict ed Use of Hazard ous Subst ance s in Ele ctronic an d Elect rical
Products:
Product Product Label Meaning
D39614000 EXC300
D39615000 EXC300M
D39616000 EC120
Materials Content Declaration
部件名称
Part name
印刷电路组件
Printed Circuit
电缆/电线/连接器
机械部件
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates that the hazardous substance contained in all of the homogene ous materials for this part is
below the limit requirement in GB/T 26572.
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardou s substance cont ained in at least one of th e homogeneou s materials use d for
this part is above th e l imit requirement of GB/T26572.
铅
Lead
(Pb)
X O X
X O
X O
汞
Mercury
(Hg)
Cadmium
镉
(Cd)
O O O O
O O O O
one of the homogeneous materials used wh ich ar e
above the limit requirement in GB/T 26572 as
detailed in the d eclaration table below .
These parts can safe ly b e used for the environmental
有害物质
六价铬
Hexavalent
Chromium
O O O
多溴联苯
Polybrominated
biphenyls (PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
NOTE: These products are EU RoHS compliant, the following Exemptions apply:
6(b)
as an alloying element in aluminium containing up to 0.4% by weight
6(c) Copper alloy containing up to 4%
7(a)
in in high melting temperature type solder (i.e. lead based alloys containing 85% by or more)
7(b)
in solders for servers, storage and storage array systems, network infrastructure equipment for switching, signalling,
transmission, and network management for telecommunications
7(c) I Electrical and electronic components containing
piezoelectronic devices, or in a glass or ceramic matrix compound
7(c) II
in dielectric ceramic in capacitors for a rated voltage of 125 V AC or 250 V DC or higher
8(b)
15
34
and its compounds in electrical contacts
in solders to complete a viable electrical connection between semiconductor die and carrier within integrated circuit flip
chip packages
in cermet-based trimmer potentiometer elements
by weight
in a glass or ceramic other than dielectric ceramic in capacitors, e.g.
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D396-14-880 Issue J
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definit ions .................... ........................... .......................... .......................... 1
1.2 Description .. ............... ............ .............. ............. ............ .............. ............ ............... ... 2
1.3 Controls and indicators (EXC120/300/300M only) .................................................................. 3
1.4 Bakeout band control (EXC120/300/300M only) .................................................................... 6
1.5 Connection of an Active gauge ........................................................................................ 7
1.6 Backing pump control (EXC120/300/300M only) .................................................................... 7
1.7 Logic interface ........................................................................................................... 7
1.7.1 Introduction ..............................................................................................................7
1.7.2 Electrical supplies .......... .......................... ............... .............. ........................... .......... .8
1.7.3 Control inputs ............................................................................................................8
1.7.4 Status outputs ............................................................................................................9
1.7.5 Analogue outputs ........................................................................................................ 9
1.8 Vent-valve con trol .......................................... ........................... ........................... ......10
1.8.1 Vent on Stop .............................................................................................................10
1.8.2 Vent on Fail and Vent on Axial Emergency .........................................................................10
1.9 Controller Fail conditions ..............................................................................................11
1.9.1 General ........ ....................... ........................ ..................................... ...................... .11
1.9.2 Internal Timer ........... .............. ........................... .............. ........................... .............. 11
1.9.3 Axial Emergency (EXC 300M only) .............................................. .............. ............... ..........12
1.10 Electrical conne c tions .................................. ............... .............. .............. .....................12
Contents
2 Technical data .................................................................................. 17
2.1 Operating and storage conditions ....................................................................................17
2.2 Mechanical data .........................................................................................................17
2.3 Electrical dat a ....................... .......................... ........................... ........................... ....17
2.4 Electrical conn e c tors ............. .......................... ............... .......................... ............... ....19
2.5 Factory settings .. ........................... .............. ........................... ........................... ........19
3 Installation ....................................................................................... 23
3.1 Unpack and Inspect .....................................................................................................23
3.2 Fit the Controller .......................................................................................................23
3.3 Introduction to Controller electrical connections ............................ .....................................24
3.4 Connect the electrical supply .........................................................................................27
3.5 Connect additi on al earth (ground) bon d ing (if required) ........................ ........................... ......27
3.6 Connect the EXT pump .................................................................................................27
3.7 Connect the backing pump (EX C120/300/300M only) .............. ............................ ...................28
3.8 Connect the bakeout band (EXC120/300/300M only) .............................................................28
3.9 Connect an Active gauge .............................. ........................... ........................... ..........28
3.10 Connect the logic interface to your equipment ....................................................................30
3.11 Adjust the Normal speed setpoint ...................................................................................30
3.12 Adjust the Internal Timer .............................................................................................30
3.13 Configure the Con troller ....... ................................................... ........................... ..........31
3.13.1 Introduction .............................................................................................................31
3.13.2 Enable/disable the Internal Time r to monitor low pump speed .......... .............. .........................31
3.13.3 Vent options .............................................................................................................32
4 Operation ........................................................................................ 33
4.1 Start-up ..................................................................................................................33
4.2 Standby ...... ................. .................. ................ ................... ................ ................. ...... 33
4.3 Bakeout band control (EXC120/300/300M only) ...................................................................34
Ipsitech 9001(17)-2008
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D396-14-880 Issue J
Contents
4.4 Operation with h igh inlet pressure ..... .............. ........................... ........................... ..........34
4.5 Operation with h igh pump temperature ...... ........................... .......................... .................34
4.6 The hours counter (EXC300 only) .....................................................................................35
4.7 Normal shutdown ............................. ........................... .............. ........................... ......35
4.8 Automatic shutdow n after Fail condition ....... ........................... .............. ............... ............36
4.9 Reset the Controller after Fail condition ...........................................................................36
4.10 Electrical supp l y failure ............. .............. ........................... .............. ............... ............36
5 Maintenance ..................................................................................... 37
5.1 Safety ...... ..................... .................. ................... .................... ................... .............. 37
5.2 Replace a fuse ................................... .............. ........................... ........................... ....37
5.2.1 Introduction .............................................................................................................37
5.2.2 Replace the elec trical supply fus e ............................ .......................... ........................... ..37
5.2.3 Replace the bakeout band fuse (EXC120/300/300M only) . .. .................... .................................37
5.3 Fault finding .............................................................................................................38
5.4 Clean the Controller ....................................................................................................38
6 Storage and disposal ................................................ ........................... 39
6.1 Storage ...................................................................................................................39
6.2 Disposal ...... ...... ......... ...... ........ ...... ........ ...... ......... ...... ...... ........ ...... ........ ....... ........ ..39
7 Spares and accessories ......................................................................... 41
7.1 Introduction .............................................................................................................41
7.2 Spares ...... ...... .... ....... .... ...... .... .... ...... .... ...... ..... .... ...... .... ...... .... ...... .... .... ....... .... ......41
7.3 Accessories .... ...... ......... ...... ........ ...... ...... ........ ....... ........ ...... ........ ...... ...... ......... ...... ..4 1
7.3.1 Pump-to-contr ol l e r c able .......................... ............... .......................... ............... ............41
7.3.2 BX bakeout band (EXC120/300/300M only) .........................................................................42
7.3.3 TAV vent-valve ........................ ........................... .............. ........................... ..............42
7.3.4 ACX air-cooler .... ............... .......................... ............... .......................... .....................42
7.3.5 Active vacuum gau ges .............................. ........................... .............. ...........................43
8 Engineering diagrams .......................................................................... 45
Page ii © Edwards Limited 2008. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
D396-14-880 Issue J
Illustrations
Figure Page
1 EXC120 Controller front panel ......................................................................................... 4
2 EXC300/300M Controller front panel ................................................................................. 5
3 Rear panel of the EXC120 Controller ............................................................... ............... ..13
4 Rear panel of the EXC120E Controller ........... ............... .............. .......................................14
5 Rear panel of the EXC300/300M Controller .........................................................................15
6 EXC120, EXC300 and EXC300M Controller dimensions (mm) .....................................................20
7 EXC120E Control l er dimensions (mm) ........................ .............. .............. ...........................21
8 Schematic diagr am of EXC120 & EXC120E Controller electrical co nnections ............ ............... ......25
9 Schematic diag ra m of EXC 300 & EXC300M Controll er electrical connec t ions ................ ............... ..26
10 Direct operation of the backing pump ...............................................................................29
11 Operation of the backing pump through a contactor .............................................................29
12 Top cover of the Contro ller ..... .......................... ........................... ........................... ......31
13 Hours counter (EXC300 only) ................................... .............. ........................... ..............35
14 EXC120/120E/300 Controller to EXT pump conne ctions ....................... ............................... ....45
15 EXC300M Controller to EXT pump connection s ........................................ ............... ..............46
16 Active Gauge connector ..... .............. .............. ........................... .............. ............... ......46
Contents
Tables
Table Page
1 Operating and storage conditions ....................................................................................17
2 Mechanical data .........................................................................................................17
3 Logic interface electrical data ......................... . .......................... ...................................17
4 Fuse ratings .............. .......................... ............... .......................... ........................... ..17
5 Controllers el e c trical and other te c h nical data .. ........................... .............. .........................18
6 Electrical conn ectors data ........ .......................... ........................... .............. .................19
7 Factory settings .. ........................... .............. ........................... ........................... ........19
8 Checklist of items ........... .......................... ........................... .............. .........................23
9 Logic interface pins ....................................................................................................24
10 Selection of vent-valve control options .............................................................................32
11 Active Gauge connec tor pins .......................... ........................... .............. .......................46
Associated publications
Publication title Publication number
EXT Pump Accessories B580-66-880
EXT70 and EXT250 Turbomolecular pumps B722-01-880
EXT351 and EXT501 Turbomolecular Pumps B727-20-880
EXT250M Turbomolecular Pump B735-01-880
© Edwards Limited 2008. All rights reserved. Page iii
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D396-14-880 Issue J
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D396-14-880 Issue J
CAUTION
WARNING
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards EXC120, EXC120E, EXC300
and EXC300M Turbomolecular Pump Controllers (abbreviated to Controller in the remainder of this manual). You must
use the Controller as specified in this manual.
Read this manual before you install and operate the Controller. I mportant safety informat ion is h ighlighted as
WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined
below.
Warnings are given where failure to observe the instruction could re su l t in injury or death to
people.
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
Introduction
The following IEC warning labels appear on the pump:
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Protective conductor terminal.
The units used throughout this manual conform to the SI international system of units of measurement.
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D396-14-880 Issue J
Introduction
1.2 Description
The EXC Controller generates the electrical supply and the control signals necessary to operate an EXT pump and its
accessories.
The Controller has a high-efficiency, auto-ranging power supply which adjusts itself to any external electrical supply
in the specified voltage range (refer to Section 2). The power supply converts the single-phase electrical supply into
a regulated d.c. elec tric al sup ply to co ntrol the op erat ion of the EXT pump. The pump has three Hall effect devices
which operate as rotor position sensors. These sensors ensure that the drive current is correctly commutated to the
pump-motor phase-windings. The Hall effect devices also generate a speed signal which the Controller uses to
regulate the rotational speed of the pu mp .
The Controller has a secondary regenerative supply which uses the d.c. motor of the EXT pump as a generator. If the
electrical supply fails, the regenerative supply provides the Controller with a back-up source of power witho ut the
need for batteries. All Controllers use the regenerative supply to maintain the electrical supply to the vent-valve
until the pump speed falls to below 50% of full rotational speed (see Section 1.8). The EXC300M Controller also uses
the regenerative supply to provi de suff icient power to the elect romagne tic bear ing s of the EXT2 50M pump until the
rotational speed of the pump is low enough for the pump rotor to drop onto the safety bearings.
The Controllers have a number of safety features which limit the power supplied to the EXT pump in the event of
sustained high pressure o r tem perature:
z If the EXT pump inlet pressure rises, the power supplied to the pump-motor increases to counteract the gas
frictional load. The pump rotational speed remains constant until the Controller peak power level is reached;
beyond this power level, the speed of the pump starts to reduce. If the pump speed falls to below 50% of its
full rotational spee d, t h e Co ntro l le r may tr ip into Fail condition, depending on how you have configured the
Controller (see Section 1.9.2).
z If the Controller detects that its temperature or the pump temperature is too high, it reduces the power
supplied to the pump -motor; t he pump m ay not theref ore be able t o mainta in full rota tional speed if i t is too
hot. If the pump speed falls to below 50% of it s full rota ti o na l sp eed , the Co ntr o lle r may trip into Fail
condition, depending on how you have configured the Controller (see Section 1.9.2).
You can use the EXC120, EXC300 and EXC300M Controllers as stand-alone controllers. Alternatively, you can connect
the Controller to your own equipment; you can then use either the Controller or your own equipment to control the
system.
The EXC120E Controller has no front-panel controls and can only be operated through the logic int erface. Y ou must
therefore connect an EXC120E Controller to your own control equipment.
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Edwards and the Edwards logo are trademarks of Edwards Limited.
D396-14-880 Issue J
1.3 Controls and indicators (EXC120/300/ 300M only)
Note: In addition to the controls and indicators on the front panel, the EXC120, EXC300 and EXC300M Controllers
have an electrical supply isolator on the rear panel (s ee Fig ures 3 to 5).
The controls and indicators on the front panel of the EXC120, EXC300 and EXC300M Controllers are shown in Figures
1 and 2 and are described b el ow.
Start/Stop
Use this latching butt o n to a lter na te ly Sta r t or Stop the EXT pump. A LED on the button goes on whe n EXT Start has
been selected. Note that:
z The button is wired in series with the Start/Stop input on the logic interface (see Section 1.7.3). The EXT
pump will not start unt il Start i s sel ected from t his front panel butt on and the Start/Sto p input is c losed. T he
Controller is supplied with a wire link to close the Start/Stop input.
z If the LED on the button is on, it only means that Start has been selected; it does not necessarily mean that
the pump has successfully started.
z The Controller delays the Start operation until the Inte rlocks are closed (refer to Section 1.7.3) ; therefor e,
the EXT pump will not necessarily start to operate when you select Start. If you select Start and the
Interlocks are not closed, the LED on the button will flash.
Introduction
This button is also used to reset the Controller after Fail or Axial Emergency condition (see Section 4.9).
Standby
Use this latching button to select pu mp Standby mode a t any time. In Standb y, the rotational speed of the EXT pump
is reduced to 70% of its full rotational speed. Selection of Standby prolongs the li fe of the pump bearings. No te that:
z The button is wired in parallel with the Sta n dby input on the logic interface (see Section 1.7.3) and you can
use either the button or the input to select Standby.
z The LED on the button is on when Standby is selected (either by the button or by the Standby input).
Heater
Use this switch to s witch o n the electr ical su pply to the bakeout band. Note that the Controller only switches on the
electrical supply to the bakeout band when the EXT pump speed reaches the Normal speed setpoint (see
Section 1.7.4).
The LED on the switch is on when the electrical supply to the bakeout band is switched on; t his LED can therefore be
used as an indication that the pump has reached Normal speed.
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D396-14-880 Issue J
1. Speed indicator
2. Heater (bakeout band ) switch
3. Standby button
4. Start/Stop button
5. Electrical supply LED
6. Fail LED
7. Not used
8. Pump rotating LED (amber)
9. Pump speed >25% LED (amber)
10.Pump speed >50% LED (green)
11.Pump speed >75% LED (green)
Introduction
Figure 1 - EXC120 Controller front panel
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Figure 2 - EXC300/300M Controller front panel
1. Speed indicator
2. Heater (bakeout band) switch
3. Standby button
4. Start/Stop button
5. Electrical supply LED
6. Fail LED
7. Emergency LED (EXC300M only)
8. Pump rotating LED (amber)
9. Pump speed >25% LED (amber)
10.Pump speed >50% LED (green)
11.Pump speed >75% LED (green)
12.Hours counter (EXC300 only)
D396-14-880 Issue J
Introduction
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D396-14-880 Issue J
Introduction
Speed
The speed indicator has 4 LEDs which go on to indicate the rotational speed of the EXT pump. Each LED goes on when
the speed of the pump is above a certa in value, represented as a percentage of the fu ll operating speed of the pump.
Refer to Figures 1 and 2: the bottom LED (8) goes on as soon as the pum p rotor starts to rotate; the ne xt LED (9) goes
on when the rotational speed is > 25% of full rotational s peed . The first green LED (10) goes on when the speed is >
50% of full rotational speed; the top LED (11) goes on when the speed is > 75% of full rotational speed. Note that:
z When the pump starts, the botto m LED goes on as soon a s the pump r ot o r sta rt s to rota te.
z When the pump decelerates, the bottom LED goe s off as soon as the pump speed falls to below 10% of full
rotational speed.
z When only the bottom two LEDs are on, the pump speed i s belo w 50% of its full ro ta ti onal spe ed and the
Controller may trip into Fail condition, depending on how you have configured the Controller (see
Section 1.9.2).
z When the pump is at Standby rotational speed, the top LED is off.
Emergency
This LED is only available on the EXC300M Controller. When the LED is on, this indicates an Axial Emergency condition
(refer to Section 1.9.3).
Fail
This LED is on when the Controller has tripped into Fail condition (refer to Section 1.9).
~
This LED is on when the Controller is connected to the electrical supply and the electrical supply isolator on the rear
of the Controller (see Figures 3 and 5) is switched on.
Hours counter
This counter is only available on the EXC300 Controlle r. The counter show s t h e tota l ela ps e d time that the EXC300
Controller has operated an EXT pump.
1.4 Bakeout band control (EXC120/300/300M only)
The EXC120, 300 and 300M Controllers can be used to operate a bakeout band.
The Controller will switch on the electrical supply to the bakeout band when the Heater switch on the front panel is
switched on and the EXT pump is at Normal speed (refer to Sections 1.3 and 1.7.4).
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D396-14-880 Issue J
1.5 Connection of an Active gauge
Note: If you connect a n Edwar ds Acti ve gauge to oper ate the TM PI con trol i nput si gnal to the logic inter face, y ou
cannot also use another sign al to operate the TMPI control i n pu t.
You can directly connect an Edwards Active gauge to the Controller (refer to Section 7.3.5 for suitable gauges). For
example:
z You can use the set-point facility of an APG Active Pirani Gauge or an AT C Active Thermocouple Gauge
(which is used to measure system or backing pressure) to operate the TMPI control input signal to the logic
interface.
z You can connect an AIM Active Inverted Magnetron Gauge and use the Controller TMP Normal signal to switch
the gauge on. This allows you to control the AIM Gauge without the need to use an additional high pressure
gauge (and its associated control equipment) to interlock the operation of the AIM Gaug e to system pressure.
Refer to Section 3.9 for details of the connection of an Active ga uge to the Cont rolle r.
If you want to use any alternative gauges, you must connect the gauge to its associated control equipment and then
connect the set-point output of the control equipment to the logic interface.
1.6 Backing pump control (EXC120/300/300M only)
Introduction
The EXC120, EXC300 and EXC300M Controllers can be used to control the operation of a backing pump through a
backing pump relay. The operation of this relay depends on how you have configured the Controller to operate the
vent-valve: refer to Sections 1.8 and 3.13.
1.7 Logic interface
1.7.1 Introduction
The rear panel of the Controller has a logic interface connector (see F igures 3 to 5) which you can use to connect the
Controller to your own equipment. The EXC120 and EXC120E Controllers have a 17-way connector and the EXC300
and EXC300M Controllers have an 18-way connector.
Signals on the logic interface are of four types:
z Electrical supplies These are electrical supplies for accessories connected to your pump; that is,
the vent-valve and the air-coo ler.
z Control inputs These are switch-type input signals which are used to control the operation of
the pumping system.
z Status outputs These outputs identify the status of the pump and the Controller.
z Analogue output The speed output provides an indication of the EXT pump speed.
Refer to Table 3 and to Figures 8 and 9 for detailed information about the logic interface pins and their uses. A
general description of the logic interface connections follows.
© Edwards Limited 2008. All rights reserved. Page 7
Edwards and the Edwards logo are trademarks of Edwards Limited.
D396-14-880 Issue J
Introduction
1.7.2 Electrical supplies
Two 24 V supplies are provided, as described below
Vent-valve supply
This electrical supply is provided to operate a vent-valve fitted to your EXT pump or va cuum system. The Controller
automatically opens the valve when the speed of the pump falls to below 50% of full rotational speed (see
Section 1.8). You can also configure the Controller to operate the valve in other specific conditions: refer to Sections
1.8 and 3.13.
Air-cooler supply
This electrical suppl y is prov ided to operate an ACX air-cooler fitted to your EXT pump. The electrical supply is on
whenever the Controller is on. If your pump is water-cooled, you can use this supply to operate a solenoid-valve to
control the flow of water through the water-cooler.
1.7.3 Control inputs
Note: The Controller is supplied with wire links fitted to close the TMP and SYS Interlocks and to close the Start/
Stop input. Th e C ontroller cann o t start the EXT pump if an y of these three inputs are open.
You can use these signals to control the operation of the EXT pump. The signa ls are switch-type inputs in w hich two
pins on the logic interface are linked (closed) when you want to set the required s ignal and are unconnecte d (open )
when you do not wish to set the signal.
Two of the inp uts (Start/Stop and Standby ) have the same functions as the buttons of the sam e name on the
Controller front panel (on EXC120, EXC300 and EXC300M Controllers). The other two inputs are Interlocks and the
Controller will only operate the EXT pump if both Interlocks are closed (and if no Fail condition is present).
Start/Stop
Use the Start/Stop input to Start and Stop the EXT pump. Note that on the EXC120, EXC300 and EXC300M Controllers,
the signal is wired in s eries with th e Start/Stop b utton on the fr ont panel, so yo u must close the St art/Stop i nput and
press the Start/Stop button o n the fr o nt panel to Start the pump. To stop the pump, either open the input (that i s ,
open the link between the appropriate logic interface pins), or press the Start/Stop button again.
Standby
Close the Standby input to select pump Standb y (refer to Section 1.3). Note that on the EXC120, EXC300 and EXC300M
Controllers, the Standby input is wired in parallel with the Stan dby button on the front pa nel and you can use either
the button or the input to select Standby at any time.
TMP Interlock (TMPI)
Use the TMP Interlock to de lay the start of the EXT p ump until the backing pump has suff iciently reduced the pressure
in the vacuum system . You can therefore control the TMP Interlock either by a timer or by a pressure switch in the
backing pipeline of yo ur system. Note that:
z If the TMP Interlock is open when Start i s selected, the Start LED on the Start/Stop butto n will fl as h.
z If the TMP Interlock is opened after Start is selected, but with the SYS Interlock open, the Sta rt LED will
continue to flash.
z If the TMP Interlock is opened after the EXT pump has started, the Controller will trip into Fail condition.
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D396-14-880 Issue J
SYS Interlock (SYSI)
Note: The EXC120E Controller does not have a backing pump relay.
Use the SYS Interlock to interlock the Con troller to a sys tem fail or control signal, for example, a position switch on
a door of the vacuum chamber or a start contactor for a backing pump.
When the SYS Interlock opens:
z the backing pump relay opens (see Section 1.8)
z the electrical supply to the vent-valve is switched off (see Section 1.8).
Note that:
z If the SYS Interlock is open when Start is selected, the Start LED on the Start/Stop button will flash.
z If the SYS Interlock is opened after Start has been selected, but wi th the TM P Interl oc k op en, the Start LE D
will continue to flash.
z If the SYS Inter l o ck is opened afte r the EXT pump has star ted, the Contr o ller will trip into Fail conditio n . If
the SYS Interlock then closes again, the vent option you have selected (refer to Sections 1.8 and 3.13) will
determine the operation of the backing pump relay and the electrical supply to the vent-valve.
1.7.4 Status outputs
Introduction
The Controller provides Normal and Fail status output signals (TMP Normal and TMP Fail) through volt-free contacts
on the logic interface connector. The EXC300M Controller also provides a n Ax ial Em erg ency cond itio n sig nal ( als o on
a volt-free contact). These signals can be used to control devices in the pumping system or provide remote status
output signals.
The signals operate as described below.
z TMP Normal TMP Normal is normally open and closes when the EXT pump speed reaches the
Normal speed setpoint. The Normal speed setpoint is determined by a
potentiometer on the top of the Controller. The Controller is supplied with the
potentiometer adjusted s o that the No rm al speed setpoint is 80% of full rotationa l
speed. You can adjust the Norm al sp e ed setpoint as described in Section 3.11.
z TMP Fail TMP Fail is normally closed and opens when the Controller trips into Fail condition
(see Section 1.9).
z Axial Emergency
(EXC300M only)
Axial Emergency is normally closed and opens when an Axial Emergency is detected
(see Section 1.9.3).
1.7.5 Analogue outputs
The Pump Speed analogue output signal is proportional to EXT pump speed. Connect the ou tput to a suitab l e m eter
or indicator to display the pump speed or connect the output to your control equipment (for example, to operate
other components in the pumping system at preset EXT pump speeds).
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Edwards and the Edwards logo are trademarks of Edwards Limited.
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