Edwards EXC 100E, EXC 100L Instruction Manual

D396-20-880

Issue H

Instruction Manual

EXC100E and EXC100L Turbomolecular

Pump Controllers

Description Item Number

EXC100E Turbomolecular Pump Controller D396-20-000
EXC100L Turbomolecular Pump Controller D396-22-000

Original Instructions

Declaration of Conformity

We, Edwards Limited,

Crawley Business Quarter,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)

Turbomolecular Pump Controllers
EXC100L D396-22-000
EXC100E D396-20-000

to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)

EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement,

Control and Laboratory Use. General Requirements
EN61326-1:2013 Electrical equipment for measurement, control and laboratory
(Class B Emissions, Use. EMC requirements. General requirements
Basic Immunity)

and fulfils all the relevant provisions of
2014/35/EU Low Voltage Directive

2014/30/EU Electromagnetic Compatibility (EMC) Directive

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

Larry Marini, Senior Technical Manager Date and Place

19.08.2015, Eastbourne

This product has been manufactured under a quality management system certified to ISO 9001:2008

P200-02-380 Issue E

D396-20-880 Issue H

Contents

Section Page

1 Introduction .......................................................................................1

1.1 Scope and definitions ................................................................................................... 1

1.2 Description ................................................................................................................ 2

1.3 Connection of an Active Gauge ........................................................................................ 2

1.4 Logic interface ........................................................................................................... 3

1.4.1 Introduction ..............................................................................................................3

1.4.2 Electrical supplies .......................................................................................................3

1.4.3 Control inputs ............................................................................................................3

1.4.4 Status outputs ............................................................................................................4

1.4.5 Analogue output ......................................................................................................... 4

1.5 Vent-valve control ....................................................................................................... 4

1.5.1 Introduction ..............................................................................................................4

1.5.2 Vent on Stop ..............................................................................................................5

1.5.3 Vent on Fail ............................................................................................................... 5

1.6 Controller Fail conditions ............................................................................................... 5

1.6.1 General .................................................................................................................... 5

1.6.2 Internal Timer ............................................................................................................6

Contents

2 Technical data ....................................................................................9

2.1 Operating and storage conditions ..................................................................................... 9

2.2 Mechanical data .......................................................................................................... 9

2.3 Electrical data ............................................................................................................ 9

2.4 EXT pump electrical output data .....................................................................................10

2.5 Logic interface ..........................................................................................................10

2.6 Factory settings .........................................................................................................11

2.7 Electrical connectors ...................................................................................................11

3 Installation ............................................... ................................... ..... 13

3.1 Unpack and inspect .....................................................................................................13

3.2 Configure the Controller ...............................................................................................13

3.2.1 Introduction .............................................................................................................13

3.2.2 Select speed or power analogue output .............................................................................13

3.2.3 Enable/disable the Internal Timer to monitor low pump speed .................................................14

3.2.4 Vent options .............................................................................................................14

3.3 Fit the Controller .......................................................................................................16

3.4 Introduction to Controller electrical connections .................................................................16

3.5 Connect the electrical supply .........................................................................................18

3.6 Connect additional earth (ground) bonding (if required) .........................................................18

3.7 Connect the EXT pump .................................................................................................18

3.8 Connect an AIM Active Inverted Magnetron gauge (optional) ....................................................19

3.9 Connect the logic interface to your equipment ....................................................................19

3.9.1 Introduction .............................................................................................................19

3.9.2 Connect a vacuum gauge to the logic interface ...................................................................19

3.10 Adjust the Normal speed ..............................................................................................20

3.11 Adjust the Internal Timer .............................................................................................20

4 Operation ........................................................................................ 23

4.1 Start-up ..................................................................................................................23

4.2 Standby ................................................................................................................... 23

4.3 Operation with high inlet pressure ...................................................................................23

4.4 Operation with high pump temperature ............................................................................23

dcs/7692/07/15

© Edwards Limited 2015. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.

D396-20-880 Issue H

Contents

4.5 Normal shutdown .......................................................................................................24

4.6 Automatic shutdown after Fail condition ...........................................................................24

4.7 Reset the Controller after Fail condition ...........................................................................24

4.8 Electrical supply failure ...............................................................................................24

5 Maintenance ..................................................................................... 25

5.1 Safety ..................................................................................................................... 25

5.2 Replace a fuse ...........................................................................................................25

5.2.1 Introduction .............................................................................................................25

5.2.2 Replace the electrical supply fuse ...................................................................................25

5.3 Clean the Controller ....................................................................................................25

5.4 Fault finding .............................................................................................................25

6 Storage and disposal ....................................................... .................... 27

6.1 Storage ...................................................................................................................27

6.2 Disposal ...................................................................................................................27

7 Service and accessories ........................................................................ 29

7.1 Introduction .............................................................................................................29

7.2 Service .................................................................................................................... 29

7.3 Accessories ............................................................................................................... 2 9

7.3.1 Electrical supply cable .................................................................................................29

7.3.2 Pump-to-controller cable ..............................................................................................30

7.3.3 BX bakeout band ........................................................................................................30

7.3.4 TAV vent-valve ..........................................................................................................30

7.3.5 ACX air-cooler ...........................................................................................................31

7.3.6 Active vacuum gauges ..................................................................................................31

8 Engineering diagrams .......................................................................... 33

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 Rear panel of the Controller (EXC100E shown) ..................................................................... 7

2 Dimensions (mm): EXC100E shown ...................................................................................12

3 Reconfigure the Controller (EXC100L shown) ......................................................................15

4 Schematic diagram of Controller electrical connections .........................................................17

5 Reconfigure the Controller (EXC100L shown) ......................................................................21

6 EXC Controller to EXT pump connections ...........................................................................34

7 Active gauge connector pins ..........................................................................................35

Page ii © Edwards Limited 2015. All rights reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

D396-20-880 Issue H

Tables

Table Page

1 Operating and storage conditions ..................................................................................... 9

2 Mechanical data .......................................................................................................... 9

3 Electrical data ............................................................................................................ 9

4 EXT pump electrical output data .....................................................................................10

5 Logic interface data ....................................................................................................10

6 Factory settings .........................................................................................................11

7 Electrical connectors ...................................................................................................11

8 Configuration links ......................................................................................................13

9 Selection of vent-valve control options .............................................................................14

10 Logic interface pins ....................................................................................................16

11 Electrical supply cable wires ..........................................................................................18

12 APG to logic interface connections ..................................................................................19

Associated publications

Contents

Publication title Publication number

EXT Pump Accessories B580-66-880
EXT70 and EXT250 Turbomolecular Pumps B722-01-880
EXT351 and EXT501 Turbomolecular Pumps B727-20-880

© Edwards Limited 2015. All rights reserved. Page iii
Edwards and the Edwards logo are trademarks of Edwards Limited.

D396-20-880 Issue H

This page has been intentionally left blank.

Page iv © Edwards Limited 2015. All rights reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

D396-20-880 Issue H

CAUTION

WARNING

1Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the EXC100E and EXC100L
Turbomolecular Pump Controllers. You must use the Controller as specified in this manual.

Read this manual before you install and operate the Controller. Important safety information is highlighted as
WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined
below.

Warnings are given where failure to observe the instruction could result in injury or death to
people.

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process

Introduction

The units used throughout this manual conform to the SI international system of units of measurement.
The following warning symbols appear on the Controller:

Warning - refer to accompanying documentation.

Warning - risk of electric shock.

Protective conductor terminal.

Direct current only.

© Edwards Limited 2015. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.

D396-20-880 Issue H

Introduction

1.2 Description

The EXC Controller generates the electrical supply and the contro l signals necessary to operate an EXT pump and its
accessories. Refer to Section 2.4 for compatible EXT pumps.

The Controller has a high-efficiency, auto-ranging power supply which adjusts i tself to any external electrical supply
in the specified voltage range (refer to Section 2). The power supply converts the single-phase electrical supply into
a regulated d.c. electrical supply to control the operation of the EXT pump. The pump has three Hall effect devices
which operate as rotor position sensors. These sensors ensure that the drive current is correctly switched to the
phase-windings of the pump-motor . The Hall effect devices also generate a speed signal which the Controller uses
to regulate the rotational speed of the pump.

The Controller has a secondary regenerative supply which uses the d.c. motor of the EXT pump as a generator. If the
electrical supply fails, the regenerative supply provides the Controller with a back-up source of power without the
need for batteries. The Controller uses the regenerative supply to maintain the electrical supplies to th e vent-valve,
air-cooler and AIM gauge (if connected) until the pump speed falls to below 50% of full rotational speed (see

Section 1.5.2).

The Controllers have a number of control features which limit the power supplied to the EXT pump in the event of
sustained high pressure or temperature:

 If the EXT pump inlet pressure rises, the power supplied to the pump-motor increases to counteract the gas

frictional load. The pump rotational speed remains constant until the Controller peak power level is reached;
beyond this power level, the speed of the pump starts to reduce. If the pump speed falls to below 50% of its
full rotational speed, the Controller may trip into Fail condition; this depends on how you have configured
the Controller (see Section 1.6.2).

 If the Controller detects that its temperature or the pump temperature is too high, it reduces the power

supplied to the pump-motor; the pump may not therefore be able to maintain full rotational speed if it is too
hot. If the pump speed falls to below 50% of its full rotational speed, the Controller may trip into Fail
condition; this depends on how you have configured the Controller (seeSection 1.6.2).

The Controller has no front-panel controls and can only be operated through the logic interface. To operate the EXT
pump, you must therefore connect the Controller to your own control equipment. Alternatively, you can configure
the mating-plug for the logic interface connector so that the EXT pump starts to operate as soon as the electrical
supply to the Controller is switched on: refer to Section 3.9.

The rear-panel of the Controller has a Normal LED (Figure 1, item 6). The LED is on whenever the TMP Normal status
output signal is low: refer to Section 1.4.4.

The EXC100L Controller has an integral pump-to-controller cable. The EXC100E Controller has a mating connector
suitable for a pump-to-controller cable accessory (not supplied): refer to Section 7.3.2.

1.3 Connection of an Active Gauge

Note: The Controller contains a regenerative pow er supply which maintains the electrical supply to the AIM gauge

in the event of a failure of the external electrical supply to the Controller (see Section 1.2).

You can connect an Edwards AIM Active Inverted Magnetron Gauge directly to the active gauge connector on the
Controller and use the Controller TMP Normal signal to switch the gauge on. This allows you to control the AIM Gauge
without the need to use an additional high pressure gauge (and its associated control equipment) to interlock the
operation of the AIM Gauge to system pressure. Refer to Section 3.8 for details about how to connect an AIM gauge
to the Controller.

If you want to use another type of gauge, you must connect the gauge to the Controller through the logic interface:
refer to Section 3.9.

Page 2 © Edwards Limited 2015. All rights reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

D396-20-880 Issue H

1.4 Logic interface

1.4.1 Introduction

The rear panel of the Controller has a 15-way logic interface connector (Figure 1, item 4) which you can use to
connect the Controller to your own equipment.

Signals on the logic interface are of four types:

 Electrical supplies These are electrical supplies for optional accessories connected to your pump,

such as the vent-valve and the air-cooler.

 Control inputs These are switch-type input signals which are used to control the operation of the

EXT pump.

 Status outputs These output signals identify the status of the pump and the Controller.

 Analogue output The Controller can be configured to provide a speed output or a power output.

This output gives an indication of the EXT pump spee d or power consumption.

Introduction

Refer to Table 10 and to Figure 4 for detailed information about the logic interface pins and their uses. A general
description of the logic interface connections follows.

1.4.2 Electrical supplies

Two nominal 24 V supplies are provided, as described below:

 Vent-valve supply

This electrical supply is provided to operate a vent-valve fitted to your EXT pump or vacuum system. The
Controller automatically opens the valve when the speed of the pump falls to below 50% of full rotational
speed. You can also configure the Controller to operate the valve in other specific conditions: refer to
Sections 1.5 and 3.2.

 Air-cooler supply

This electrical supply is provided to operate an ACX air-cooler fitted to your EXT pump . The electrical supply
is on whenever the Controller is on. Alternatively, if your pump is water-cooled, you can use this supply to
operate a solenoid-valve to control the flow of water through the water-cooler.

1.4.3 Control inputs

You can use these inputs to control the operation of the EXT pump. The input signals are switch-type sign als; you link
(close) two pins on the logic interface when you want to set the required signal and you do not link (open) the pins
when you do not want to set the signal. The input signals are as follows:

Start/Stop Use the Start/Stop input to Start and Stop the EXT pump. To Start the pump, you must close the

Start/Stop input. To Stop the pump, you must open the input (refer to Sections 4.1 and 4.5).

Standby Close the Standby input to select pump Standby (refer to Section 4.2).

© Edwards Limited 2015. All rights reserved. Page 3
Edwards and the Edwards logo are trademarks of Edwards Limited.

D396-20-880 Issue H

Introduction

1.4.4 Status outputs

The Controller provides Normal, Fail and Pump On status output signals (TMP Normal, TMP Fail and TMP On) through
open collector transistor outputs on the logic interface connector. These signals can be used to control devices in
the pumping system or to provide remote status output signals. The signals operate as described below.

TMP Normal TMP Normal is normally high and goes low when the EXT pump reaches its ‘Normal’ speed.

The Normal speed is determined by a potentiometer on the side of the Controller. The
Controller is supplied with the potentiometer adjusted so that Normal speed is 80% of full
rotational speed. You can adjust the Normal speed as describe d in Section 3.10. The Normal
LED on the rear panel of the Controller (Figure 1, item 6) is on when the TMP Normal signal
is low.

TMP Fail TMP Fail is normally low and goes high when the Controller trips into a Fail condition (see

Section 1.6).

TMP On The TMP On signal mimics the operation of the vent-valve. If you select Vent On Stop (see

Section 1.5.2), TMP On is normally high and goes low when the electrical supply to the EXT

pump is switched on by the Controller.

1.4.5 Analogue output

The Controller has a single analogue output signal, which can be configured to indicate either Pump Speed or Pump
Power consumption.

The Controller is supplied configured so that the analogue output signal is proportional to EXT pump speed. Connect
the output to a suitable meter or indicator to display the pump speed or connect the output to your control
equipment (for example, to operate other components in the pumping system at a preset EXT pump speed).

If required, you can configure the Controller so that the analogue output signal is proportional to the electrical power
drawn by the EXT pump (see Sections 2.5 and 3.2.2). Connect the output to a suitable meter or indicator to display
the pump power or connect the output to your control equipment.

1.5 Vent-valve control

1.5.1 Introduction

Note: The factory settings for vent options are shown in Table 9.

If the Controller electrical supply fails, the Controller maintains the electrical supply to the vent-valve until the pum p
speed falls to below 50% of full rotational speed, then the Controller switches off the vent-valve electrical supply.
This feature of the Controller cannot be reconfigured.

However, you can use the configuration links in the Controller (refer to Section 3.2.4) to select a combination of vent
options in response to the Stop input signal and the TMP Fail output signal.

When a selected vent option condition is detected, the Controller:

 waits approximately two seconds, to allow a vacuum system isolation-valve (if fitted) to close,
 then switches off the electrical supply to the vent-valve.

Page 4 © Edwards Limited 2015. All rights reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

D396-20-880 Issue H

1.5.2 Vent on Stop

If Vent on Stop is selected when you switch the Controller on, the vent-valve electrical supply remains off until Start
is selected. When Start is selected, the Controller switches the vent-valve electrical supply on. If Stop is then
selected, the Controller switches the vent-valve electrical supply off again.

If Vent on Stop is not selected when you switch the Controller on, the vent-valve electrical supply remains off until
Start is selected. When Start is selected, the Controller switches the vent-valve electrical supply on. If Stop is then
selected, the EXT pump will decelerate and the vent-valve electrical supply will remain on until the pump speed falls
to below 50% of full rotational speed; the vent-valve electrical supply will then be switched off.

1.5.3 Vent on Fail

If Vent on Fail is selected, then the setting of the Vent on Stop option determines how the vent-valve is controlled
in response to a Fail condition, as follows:

 If you have selected Vent on Stop and a failure occurs, the Controller switches the vent-valve electrical

supply off approximately two seconds after the Fail condition is detected.

 If you have not selected Vent on Stop, the EXT pump will decelerate and the vent-valve electrical supply will

remain on until the pump speed falls to below 50% of full rotational speed; the vent-valve electrical supply
will then be switched off.

Introduction

If you have not selected Vent on Fail, the electrical supply to the vent-valve will not be switched off when a Fail
condition is detected.

1.6 Controller Fail conditions

1.6.1 General

Note: If you enable the Internal Timer (see Sections 1.6.2 and 3.2.3), the Controller will trip into Fail condition

only after the preset time has elapsed.

The Controller will trip into Fail condition if either of the following occurs:

 The EXT pump does not reach 50% of full rotational speed within a preset time after it starts (the time set by

the adjustable Internal Timer: see Sections 1.6.2 and 3.2.3).

 The EXT pump speed falls to below 50% of its full rotational speed.

When the Controller trips into Fail condition, the electrical supply to the EXT pump-motor is switched off and the
TMP Fail status output signal on the logic interface goes high. The operation of the vent-valve depends on how you
have configured the Controller (refer to Sections 1.5 and 3.2). To reset the Controller after a Fail condition has
occurred, refer to Section 4.7.

© Edwards Limited 2015. All rights reserved. Page 5
Edwards and the Edwards logo are trademarks of Edwards Limited.

D396-20-880 Issue H

Introduction

1.6.2 Internal Timer

The Internal Timer has two functions:
Firstly, when the EXT pump is started by the Controller, the Internal Timer in the Controller also starts. If the EXT

pump does not reach 50% of full rotational speed within the preset time measured by the ti me r, the Controller will
trip into Fail condition. This function cannot be disabled.

Secondly, you can configure the Controller to enable or disable the Internal Timer if the pump speed falls during
pump operation:

 If you disable the Internal Timer, the Controller will trip into Fail condition as soon as the pump speed falls to

below 50% of full rotational speed.

 If you enable the Internal Timer, the Internal Timer will start as soon as th e pump speed falls to below 50% of

full rotational speed; the Controller will trip into Fail condition if the pump speed is still below 50% of full
rotational speed at the end of the preset time.

The Controller is supplied with the Internal Timer enabled and adjusted for a preset time of eight minutes. You can
adjust the timer for your application: refer to Section 3.11.

Page 6 © Edwards Limited 2015. All rights reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Figure 1 - Rear panel of the Controller (EXC100E shown)

1. Electrical supply connector

2. Earth (ground) stud

3. EXT pump connector

1

1

EXC100E only; the EXC100L has an

integral pump-to-controller cable

4. Logic interface connector

5. Active gauge connector

6. Normal LED

D396-20-880 Issue H

Introduction

© Edwards Limited 2015. All rights reserved. Page 7
Edwards and the Edwards logo are trademarks of Edwards Limited.