A352-03-880
Issue B
Instruction Manual
ES65 / ES100 / ES200 / ES300 and ES630
Single Stage Rotary Vane Pumps
Description Item Number
ES65 - ASIA 200 V (50/60 Hz) and 380 V (60 Hz) IE3 A352-47-934
ES65 - EU/USA/CHINA 380-400 V (50 Hz) and 230/460 V (60 Hz) IE3 A352-47-940
ES100 - ASIA 200 V (50/60 Hz) and 380 V (60 Hz) IE3 A352-52-934
ES100 - EU/USA/CHINA 380-400 V (50 Hz) and 230/460 V (60 Hz) IE3 A352-52-940
ES200 - ASIA 200 V (50/60 Hz) and 380 V (60 Hz) IE3 A352-57-934
ES200 - EU/USA/CHINA 380-400 V (50 Hz) and 230/460 V (60 Hz) IE3 A352-57-940
ES300 - ASIA 200 V (50/60 Hz) and 380 V (60 Hz) IE3 A352-62-934
ES300 - EU/USA/CHINA 380-400 V (50 Hz) and 230/460 V (60 Hz) IE3 A352-62-940
ES630 - ASIA 200 V (50/60 Hz) and 380 V (60 Hz) IE3 A352-67-934
ES630 - EU/USA/CHINA 380-400 V (50 Hz) and 230/460 V (60 Hz) IE3 A352-67-940
Original Instructions
Declaration of Conformity
We, Edwards Limited,
Crawley Business Quarter,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
ES Single Stage Rotary Vane Pumps:
ES65 – ASIA 200 V (50/60 Hz) & 380 V (60 Hz) IE3 A352-47-934
ES65 – EU/USA/CHINA 380-400 V (50 Hz) & 230/460 V (6 0Hz) IE3 A352-47-940
ES100 – ASIA 200 V (50/60 Hz) & 380 V (60 Hz) IE3 A352-52-934
ES100 – EU/USA/CHINA 380-400 V (50 Hz) & 230/460 V (60 Hz) IE3 A352-52-940
ES200 – ASIA 200 V (50/60 Hz) & 380 V (60 Hz) IE3 A352-57-934
ES200 – EU/USA/CHINA 380-400 V (50 Hz) & 230/460 V (60 Hz) IE3 A352-57-940
ES300 – ASIA 200 V (50/60 Hz) & 380 V (60 Hz) IE3 A352-62-934
ES300 – EU/USA/CHINA 380-400 V (50 Hz) & 230/460 V (60 Hz) IE3 A352-62-940
ES630 – ASIA 200 V (50/60 Hz) & 380 V (60 Hz) IE3 A352-67-934
ES630 – EU/USA/CHINA 380-400 V (50 Hz) & 230/460 V (60 Hz) IE3 A352-67-940
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN1012-2:1996+A1:2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum
Pumps
EN60034-1:2010 Rotating electrical machines. Rating and performance
EN50581:2012 Technical Documentation for the Assessment of Electrical and
Electronic Products with respect to the Restriction of Hazardous
Substances
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive
2014/35/EU Low Voltage Directive
2011/65/EU Restriction of Certain Hazardous Substances (RoHS) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
19.03.2015, Burgess Hill
Mr Peter Meares
Senior Technical Support Manager, General Vacuum
Date and Place
P200-09-140 Issue A
This product has been manufactured under a quality management system certified t o ISO 9001:2008
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Contents
A352-03-880 Issue B
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Description ................................................................................................................ 4
1.3 Gas ballast ................................................................................................................ 4
2 Technical data ....................................................................................5
2.1 Operating and storage conditions ..................................................................................... 5
2.2 Performance .............................................................................................................. 5
2.3 Mechanical data .......................................................................................................... 8
2.4 Electrical data: three-phase motors .................................................................................. 9
2.5 Lubrication data ......................................................................................................... 9
3 Installation .................................................... ................................... 11
3.1 Safety ..................................................................................................................... 11
3.2 System design considerations .........................................................................................11
3.3 Unpack and inspect .....................................................................................................11
3.4 Locate the pump ........................................................................................................12
3.5 Fill the pump with oil ..................................................................................................12
3.5.1 Recommended pump oil ...............................................................................................12
3.5.2 ES65, ES100 and ES630 oil filling procedure ........................................................................12
3.5.3 ES200 and ES300 oil filling procedure ...............................................................................13
3.6 Electrical installation ..................................................................................................13
3.6.1 Connect the pump to the electrical supply .........................................................................13
3.6.2 Check the direction of rotation ......................................................................................14
3.7 Connect the pump inlet to the vacuum system ....................................................................14
3.8 Connect the pump outlet to the vacuum system ..................................................................15
3.9 Gas ballast inlet connection ..........................................................................................15
3.10 Leak test the system ...................................................................................................15
4 Operation ........................................................................................ 17
4.1 Gas ballast control ......................................................................................................17
4.2 Start up procedure .....................................................................................................17
4.3 To achieve ultimate vacuum ..........................................................................................17
4.4 To pump condensable vapours ........................................................................................18
4.5 To decontaminate the oil ..............................................................................................18
4.6 Unattended operation ..................................................................................................18
4.7 Shut down ................................................................................................................18
4.8 Long-term shut down ...................................................................................................18
5 Maintenance ..................................................................................... 19
5.1 Safety ..................................................................................................................... 19
5.2 Maintenance plan .......................................................................................................19
5.3 Check the oil level ......................................................................................................24
5.4 Replace the oil ..........................................................................................................25
5.5 Changing the oil filter - (part of minor service) ...................................................................25
5.6 Oil separating mist filters (cartridge) - (part of minor service) .................................................25
5.7 Replace the gas ballast filter - (part of minor service) ...........................................................26
5.8 Clean the motor fan cover ............................................................................................27
5.9 Clean and overhaul the pump - (part of major service) ..........................................................27
5.10 Test the motor condition ..............................................................................................27
gp/0270/03/15
A352-03-880 Issue B
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Contents
5.11 Fit new blades - (part of major service) ............................................................................27
5.12 Basic fault finding ......................................................................................................27
5.12.1 The pump has failed to start ..........................................................................................27
5.12.2 The pump fails to achieve its specified performance (failure to reach ultimate vacuum) ..................28
5.12.3 The pump is noisy .......................................................................................................28
5.12.4 The pump is too hot ....................................................................................................28
5.12.5 The vacuum is not fully maintained after the pump is switched off ...........................................28
5.12.6 The pumping speed is poor ............................................................................................29
5.12.7 There is an external oil leak ..........................................................................................29
5.12.8 The motor cuts out .....................................................................................................29
5.12.9 Pump emits fumes at exhaust or oil consumption is high ........................................................29
5.12.10 Oil back-streams to vacuum chamber ...............................................................................29
6 Storage and disposal ........................................................................... 31
6.1 Storage ...................................................................................................................31
6.2 Disposal ...................................................................................................................31
7 Service, spares and accessories .............................................................. 33
7.1 Introduction .............................................................................................................33
7.2 Service .................................................................................................................... 33
7.3 Spares .....................................................................................................................33
7.4 Accessories ............................................................................................................... 3 4
7.4.1 Oil level sensor (ES65/ES100) .........................................................................................35
7.4.2 Oil level sensor and 120 ºC sensor (ES65/ES100) ...................................................................36
7.4.3 Oil level sensor and PT100 (ES65/ES100) ...........................................................................37
7.4.4 PT100 temperature sensor (ES65/ES100) ...........................................................................38
7.4.5 Oil level sensor (ES200/ES300) .......................................................................................39
7.4.6 Oil level sensor and 120 ºC sensor (ES200/ES300) .................................................................40
7.4.7 Oil level sensor and PT100 (ES200 / ES300) ........................................................................41
7.4.8 PT100 temperature sensor (ES200/ES300) ..........................................................................42
7.4.9 Oil level sensor (ES630) ................................................................................................43
7.4.10 Oil level sensor and120 ºC sensor (ES630) ..........................................................................44
7.4.11 Oil level sensor and PT100 (ES630) ..................................................................................45
7.4.12 PT100 temperature sensor (ES630) ..................................................................................46
7.4.13 ITO100 Inlet Catchpot ..................................................................................................46
7.4.14 ITO300 Inlet Catchpot ..................................................................................................46
7.4.15 ITO800 inlet catchpot ..................................................................................................48
7.4.16 ITM 100 high-capacity inlet dust filter ..............................................................................48
7.4.17 ITM 300 high-capacity inlet dust filter ..............................................................................48
7.4.18 ITM 800 high-capacity inlet dust filter ..............................................................................48
7.4.19 Inlet and exhaust connectors - available to fit to existing systems .............................................48
For return of equipment, complete the HS Forms at the end of this manual.
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Contents
A352-03-880 Issue B
Illustrations
Figure Page
1 ES65 and ES100 pumps ..................................................................................................2
2 ES200 and ES300 pumps ................................................................................................. 2
3 ES630 pump ............................................................................................................... 3
4 Oil filter ................................................................................................................... 4
5 ES65 dimensions (mm) .................................................................................................. 6
6 ES100 dimensions (mm) ................................................................................................. 6
7 ES200 dimensions (mm) ................................................................................................. 7
8 ES300 dimensions (mm) ................................................................................................. 7
9 ES630 dimensions (mm) ................................................................................................. 8
10 Oil sight glass ............................................................................................................13
11 Gas ballast filter, ES65/ES100/ES630 ................................................................................26
12 Gas ballast filter, ES200/ES300 ....................................................................................... 26
13 ES65/ES100 oil level sensor ...........................................................................................35
14 ES65/ES100 oil level sensor and 120 ºC sensor .....................................................................36
15 ES65/ES100 oil level sensor and PT100 ..............................................................................37
16 ES65 / ES100 PT100 temperature sensor ............................................................................38
17 ES200/ S300 oil level sensor ..........................................................................................39
18 ES200/ES300 oil level and 120 ºC sensor ............................................................................40
19 ES200/ES300 oil level sensor and PT100 ............................................................................41
20 ES200/ES300 PT100 temperature sensor ............................................................................42
21 ES630 oil level sensor ..................................................................................................43
22 ES630 oil level sensor and120 ºC sensor .............................................................................44
23 ES630 oil level sensor and PT100 .....................................................................................45
24 ES630 PT100 temperature sensor ....................................................................................46
25 ITO inlet catchpot ......................................................................................................47
26 ITM inlet dust filters ....................................................................................................49
Tables
Table Page
1 Maintenance plan .......................................................................................................20
2 ES65 minor service kit (A35245990) ..................................................................................20
3 ES65 major service kit (A35245995) .................................................................................20
4 ES100 minor service kit (A35245990) ................................................................................21
5 ES100 major service kit (A35250995) ................................................................................21
6 ES200 minor service kit (A35255990) ................................................................................22
7 ES200 major service kit (A35255995) ................................................................................22
8 ES300 minor service kit (A35260990) ................................................................................23
9 ES300 major service kit (A35260995) ................................................................................23
10 ES630 minor service kit (A35265990) ................................................................................24
11 ES630 major service kit (A35265995) ................................................................................24
12 Maintenance kits ........................................................................................................33
13 Accessories function ....................................................................................................34
14 Oil level and temperature sensors ...................................................................................34
A352-03-880 Issue B
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
Associated publications
Publication title Publication number
Vacuum Pump and Vacuum Systems Safety Manual P400-40-100
Ultragrade 15, 19 and 20 oils P110-10-010
IT20K, IT100, IT300 and IT800 inlet traps and filters A441-01-880
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Introduction
A352-03-880 Issue B
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwa rds ES65, ES100, ES200, ES300
and ES630 Single Stage Rotary Vane Pumps. The pumps must be used as specified in this manual. Read this manual
before installing and operating the pumps.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be
obeyed. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
The units used throughout this manual conform to the SI international system of units of measurement.
The following warning labels are on the pump:
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Warning - hot surfaces.
A352-03-880 Issue B
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Introduction
Figure 1 - ES65 and ES100 pumps
Figure 2 - ES200 and ES300 pumps
1. Motor terminal box
2. Oil filler plug
3.
Lifting bracket
4. Inlet and integral non-return valve
5. Exhaust
6. Gas ballast control
7. Oil level sight glass
8. Oil drain tap
Space needed:
A. 200 mm (Cooling)
B. 400 mm (Maintenance access)
C. 500 mm (Maintenance access
and cooling)
Space needed:
A. 200 mm (Cooling)
B. 400 mm (Maintenance access)
C. 500 mm (Maintenance access
and cooling)
1. Motor terminal box
2. Oil filler plug
3. Lifting bracket
4. Inlet and integral non-return valve
5. Exhaust
6. Gas ballast control
7. Oil level sight glass
8. Oil drain tap
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Introduction
A352-03-880 Issue B
Figure 3 - ES630 pump
Space needed:
A. 200 mm (Cooling)
B. 400 mm (Maintenance access)
C. 500 mm (Maintenance access
and cooling)
1.
Motor terminal box
2. Oil filler plug
3.
Lifting bracket
4. Inlet and integral non-return valve
5. Exhaust
6. Gas ballast control
7. Oil level sight glass
8. Oil drain tap
9. Accessory plate
A352-03-880 Issue B
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Introduction
Figure 4 - Oil filter
1.2 Description
The ES range of pumps are rotary vane, oil-sealed vacuum pumps designed for reliable, long-term operation in both
laboratory and industrial environments.
The pump operating range extends from atmospheric pressure to the maximum continuous vacuum rating of the
pump.
1.3 Gas ballast
To pump high-vapour loads, gas ballast is delivered into the pump to prevent condensation of the vapour carried by
the pumped gases. This system reduces oil contamination and pump corrosion caused by condensed vapour from the
pumped gases.
Air or an inert gas can be introduced into the low-vacuum stage of the pump through the gas ballast inlet. A filter is
fitted in the gas ballast system to prevent the entry of dust into the pump.
For manual control, use the gas ballast control (Figures 1, 2, and 3, item 6). If this inlet is open to the atmosphere,
then:
With the gas ballast control open, when the pump is switched off, the pressure inside the pump will rise to
atmospheric pressure.
With the gas ballast control closed, when the pump is switched off, vacuum will slowly rise inside the pump.
WARNING
These vacuum pumps are to be used for pumping non-aggressive gases containing no more than
25% oxygen. The gases must not be toxic or explosive. If the pump is to be used in an oxygen-rich
environment, it must be degreased in accordance with a specific procedure and must operate with
hydrocarbon-free oil.
WARNING
The surface temperature of some parts of the pump can exceed 70 ºC under the covers.
1. Oil filter
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Technical data
A352-03-880 Issue B
2Technical data
2.1 Operating and storage conditions
2.2 Performance
Ambient temperature range (operation) 12 ºC to 40 ºC
Normal surface temperature of the pump Can exceed 70 ºC under covers
Maximum humidity (operation) 90%
Ambient temperature range (storage) -30 ºC to 70 ºC
ES65 ES100 ES200 ES300 ES630
Maximum displacement
50 Hz electrical supply m
3
h 64.3 96 198 293 635
60 Hz electrical supply m3h 77.2 115 240 354 769
Maximum speed – Pneurop
50 Hz electrical supply m
3
h 59 90 190 275 575
60 Hz electrical supply m3h 70 105 225 320 674
At 1mb inlet pressure (50 Hz) m
3
h 40 52 134 171 308
At 1mb inlet pressure (60 Hz) m3h 48 62 161 205 370
Motor rotational speed
Refer to
rating
label
Refer to
rating
label
Refer to
rating
label
Refer to
rating
label
Refer to
rating
label
50 Hz electrical supply r.min
-1
60 Hz electrical supply r.min
-1
Ultimate vacuum
Without gas ballast
(Total pressure)
mbar
kPa
0.15
0.015
0.15
0.015
0.08
0.008
0.08
0.008
0.1
0.01
With full gas ballast mbar
kPa
1
0.1
2
0.2
1
0.1
2
0.2
1
0.1
Maximum outlet pressure
(At full pump throughput)
bar gauge
Pa
0.5
1.5x10
5
0.5
1.5x10
5
0.5
1.5x10
5
0.5
1.5x10
5
0.5
1.5x10
5
Maximum water vapour pumping
rate
50 Hz electrical supply kgh
-1
1.3 2.6 2.2 2.3 5.6
60 Hz electrical supply kgh
-1
1.6 4.3 2.8 3.0 8.1
Maximum gas ballast flow
(Purge) regulated supply
pressure 0.5 bar (7 PSI)
l/min 55 56 124 126 136
A352-03-880 Issue B
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Technical data
Figure 5 - ES65 dimensions (mm)
Figure 6 - ES100 dimensions (mm)
1. Cooling air
2. Oil filler plug
3. Inlet
4. Exhaust
5. ISO F DN40 (exhaust)
6. G1" (inlet)
7. ISO F DN40 (inlet)
A. Gas ballast inlet
B. Cable gland
1. Cooling air
2. Oil filler plug
3. Inlet
4. Exhaust
5. ISO F DN40 (exhaust)
6. G2" (inlet)
7. ISO F DN40 (inlet)
A. Gas ballast inlet
B. Cable gland
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Technical data
A352-03-880 Issue B
Figure 7 - ES200 dimensions (mm)
Figure 8 - ES300 dimensions (mm)
1. Cooling air
2. Oil filler plug
3. Inlet
4. Exhaust
5. ISO F DN40 (exhaust)
6. G2" (inlet)
7. ISO F DN63 (inlet)
A. Gas ballast inlet
B. Cable gland
1. Cooling air
2. Oil filler plug
3. Inlet
4. Exhaust
5. ISO F DN40 (exhaust)
6. G2" (inlet)
7. ISO F DN63 (inlet)
A. Gas ballast inlet
B. Cable gland
A352-03-880 Issue B
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Technical data
Figure 9 - ES630 dimensions (mm)
2.3 Mechanical data
ES65 ES100 ES200 ES300 ES630
Pump inlet port
Inlet flange ISO40 ISO63 ISO63 ISO63 ISO100
Inlet thread 1” BSP2” BSP2” BSP2” BSP3” BSP
Exhaust port
Exhaust flange ISO40 ISO40 ISO40 ISO40 ISO100
Exhaust thread (flange removed) 1.5” BSP 1.5” BSP 2” BSP 2” BSP 3” BSP
Noise level at 1 metre (dB(A))
50 Hz electrical supply 64 65 67 69 75
60 Hz electrical supply 66 67 69 71 77
Maximum mass (kg) 77 94 163 185 516
Vibration Severity
(Measured at the inlet port to ISO 2372)
Class 1C for ES pumps (measured at ultimate pressure)
1. Cooling air
2. Oil filler plug
3. Inlet
4. Exhaust
5. ISO F DN100 (exhaust)
6. G3" (inlet)
7. ISO F DN100 (inlet)
A. Gas ballast inlet
B. Cable gland
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Technical data
A352-03-880 Issue B
2.4 Electrical data: three-phase motors
For motor wiring information, refer to the wiring diagram supplied in the motor terminal box. Dual-voltage motors
can be configured to operate with either the high-range or low-range electrical supply.
Edwards supplies dual-voltage motors pre-set to the highest of the selectable voltages.
For motor current information, refer to the motor rating plate.
2.5 Lubrication data
Note: A Safety Data Sheet is available on request for the recommended oil.
Refer also to Section 3.5.2 and 3.5.3.
Nominal supply (V) Frequency (Hz) Power (kW)
ES65 200 50/60 1.5/1.8
380 60 1.8
380-400 50 1.5
230/460 60 1.8
ES100 200 50/60 2.3/3.0
380 60 3.0
380-400 50 2.3
230/460 60 3.0
ES200 200 50/60 4.5/5.6
380 60 5.6
380-400 50 4.5
230/460 60 5.6
ES300 200 50/60 6.0/7.5
380 60 7.5
380-400 50 6.0
230/460 60 7.5
ES630 200 50/60 12.5/15.0
380 60 15.0
380-400 50 12.5
230/460 60 15.0
Recommended oil Edwards Ultragrade 20
ES65 ES100 ES200 ES300 ES630
Oil operating level, after draining (litres) 445514
A352-03-880 Issue B
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Installation
A352-03-880 Issue B
3 Installation
3.1 Safety
Ensure that the pump is suitable for the application. If there is any doubt, refer to the Edwards guidelines in the
Vacuum Pump and Vacuum Systems Safety manual. (See Associated Publications at the end of the contents list).
Obey the safety instructions listed below when installing the pump, especially when connecting the pump into an
existing system. Details of specific safety precautions are given at the appropriate point in the instructions.
The installation of the pump must be performed by a suitably trained and supervised technician.
Wear a ppropriate safety clothing when coming into contact with contaminated components.
Vent and purge the vacuum system before starting installation work.
Ensure that the installation technician is familiar with the safety procedures which relate to the pump oil
and the products handled by the pumping system. Take suitable precautions to avoid the inhalation of oil
mist and excessive skin contact with pump oil as prolonged exposure can be harmful.
It is recommended to protect the pump motor with a magneto-thermal circuit breaker. Select the rating of
the circuit breaker with respect to the current indicated on the motor.
Disconnect other components in the pumping system from the electrical supply so that they cannot be
operated accidentally.
3.2 System design considerations
Consider the following points when designing the pumping system.
Use a suitable valve to isolate the pump from the vacuum system to allow the pump to warm up before
pumping condensable vapours or to maintain vacuum when the pump is switched off.
A void high levels of heat input to the pump from the proce ss gases, otherwise the pump may overheat and
seize.
If the pump is used in a high ambient temperature environment and has a high gas throughput, the
temperature of the pump body may exceed 70 ºC. Fit suitable guards to prevent contact with hot surfaces.
Make sure that the exhaust pipeline cannot become blocked. If the system has an exhaust isolation valve,
make sure that the pump cannot operate with the valve closed.
3.3 Unpack and inspect
Remove all packing materials, remove the pump from its packing box, remove the protective covers from the inlet
and outlet ports and inspect the pump. If the pump is damaged, notify the supplier and the carrier in writing within
WARNING
Edwards recommends that the pumps are not used to pump hazardous substances.
WARNING
Prevent any part of the human body coming into contact with the vacuum.
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