Edwards EPX HiVac Series, EPX180L, EPX180N, EPX500L, EPX500N Instruction Manual

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Instruction Manual

EPX HiVac Series Dry Vacuum Pumps

A419-00-880

Issue F Original

Description EPX EPX TWIN

Item Number Item Number

EPX180L A419-41-xxx A419-61-xxx

EPX180N A419-42-xxx A419-62-xxx

EPX180LE A419-43-xxx A419-63-xxx

EPX180NE A419-44-xxx A419-64-xxx

EPX500L A419-51-xxx A419-71-xxx

EPX500N A419-52-xxx A419-72-xxx

EPX500LE A419-53-xxx A419-73-xxx

EPX500NE A419-54-xxx A419-74-xxx

Declaration of Conformity

We, Edwards, Manor Royal, Crawley, West Sussex RH10 9LW, UK

declare under our sole responsibility that the product(s) EPX High Vacuum Dry Pump EPX EPX Twin

EPX180L A419-41-xxx A419-61-xxx EPX180N A419-42-xxx A419-62-xxx EPX180LE A419-43-xxx A419-63-xxx EPX180NE A419-44-xxx A419-64-xxx

EPX500L A419-51-xxx A419-71-xxx EPX500N A419-52-xxx A419-72-xxx EPX500LE A419-53-xxx A419-73-xxx EPX500NE A419-54-xxx A419-74-xxx

in combination with the following TIM units: C3, E73, SPI, TEL, LAM, HIT, MCM and also pumps with no TIM unit fitted

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN1012-2 (1997) Safety Requirements, Vacuum Pumps. EN61010-1 (2001) Safety Requirements for Electrical Equipment for Measurement,

Control and Laboratory Use. EN61326 (1998) Electrical Equipment for Measurement, Control and Laboratory (Industrial location, Use – EMC Requirements Class A Emissions) UL61010A-1 Electrical Equipment for Laboratory Use; Part 1 – General (First edition) Requirements SEMI S2-0302 Product Safety Assessment SEMI S8-0701 Ergonomic Assessment SEMI F47-0200 Voltage Sag Immunity

following the provisions of

2006/95/EC Low Voltage Directive. 2004/108/EC Electromagnetic Compatibility Directive. 98/37/EC Machinery Safety Directive.

19 January 2009, Burgess Hill

Barrie Brewster, Technical Manager – Burgess Hill Products

This product has been manufactured under a quality system registered to ISO9001

Date and Place

P200-00-060 Issue C

A419-00-880 Issue F

Section Page

1 Introduction ....................................................................................... 1

1.1 Scope and definitions ................................................................................................... 1

1.2 Description ................................................................................................................ 2

1.2.1 The EPX L .................................................................................................................3

1.2.2 The EPX LE ................................................................................................................3

1.2.3 The EPX N .................................................................................................................3

1.2.4 The EPX NE ................................................................................................................3

1.3 Pump protection sensors ............................................................................................... 4

1.4 LED status indicators .................................................................................................... 4

1.5 Connections ..............................................................................................................12

1.6 Control and monitoring ................................................................................................12

1.7 EPX pump labels ........................................................................................................ 12

1.8 End user controller .....................................................................................................13

2 Technical data .................................................................................. 15

Contents

2.1 General ...................................................................................................................15

2.2 Performance .............................................................................................................15

2.3 Electrical data ........................................................................................................... 16

2.4 Cooling-water supply ................................................................................................... 17

2.5 Nitrogen purge system (EPX N series pumps) ....................................................................... 17

2.6 Materials in contact with process gases ............................................................................. 17

3 Installation ....................................................................................... 27

3.1 Safety ..................................................................................................................... 27

3.2 Unpack and inspect .....................................................................................................27

3.3 Securing the EPX pump ................................................................................................28

3.4 Connect the inlet to your process system ...........................................................................28

3.5 Connect the outlet to your exhaust extraction system ...........................................................29

3.6 Nitrogen purge (EPX N series pumps) ................................................................................ 30

3.7 Leak test the system ...................................................................................................31

3.8 Connect the cooling-water supply ................................................................................... 31

3.9 Connect to your emergency stop circuit ............................................................................32

3.10 Connect the EPX pump to the electrical supply ................................................................... 33

3.11 Connect to your control equipment ................................................................................. 34

3.11.1 Inputs .....................................................................................................................34

3.11.2 Outputs ...................................................................................................................35

4 End User Controller (EUC) and Pump Display Terminal (PDT) menus ................... 37

4.1 Introduction .............................................................................................................37

4.2 General operation ......................................................................................................38

4.3 The CANCEL button .....................................................................................................38

4.4 Display text and variable text ........................................................................................38

4.5 Wrap-around .............................................................................................................39

4.6 Timeout ..................................................................................................................39

4.7 Menu structure ..........................................................................................................39

4.8 Example ..................................................................................................................40

5 Operation ........................................................................................ 51

5.1 Introduction .............................................................................................................51

5.2 Flammable and toxic gases (EPX N series pumps) .................................................................52

dcs/8031/08/08

A419-00-880 Issue F

Contents

5.3 Start-up ..................................................................................................................52

5.4 Manual shut-down ...................................................................................................... 53

5.5 Status and fault indications ...........................................................................................53

5.6 Unplanned shutdown and alarms ..................................................................................... 53

6 Maintenance ..................................................................................... 55

6.1 Safety ..................................................................................................................... 56

6.2 Maintenance plan .......................................................................................................56

6.3 Inspect the pipelines and connections .............................................................................. 57

6.4 Cleaning the pump ......................................................................................................57

6.5 Service the EPX pump .................................................................................................. 58

6.6 Fault finding .............................................................................................................59

7 Storage and disposal ........................................................................... 61

7.1 Storage ...................................................................................................................61

7.2 Disposal ................................................................................................................... 62

8 Service, spares and accessories .............................................................. 63

8.1 Introduction .............................................................................................................63

8.2 Service .................................................................................................................... 63

Index .............................................................................................. 65

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 Process compatibility chart ............................................................................................ 2

2 The EPX L dry vacuum pump ........................................................................................... 5

3 EPX twin 180L installation details - position of additional exhaust port for EPX twin variants ............. 6

4 EPX L labels (refer to Table 3) ......................................................................................... 8

5 EPX E dry pump .........................................................................................................10

6 EPX N series dry pump .................................................................................................11

7 End User Controller (EUC) display .................................................................................... 12

8 Speed curve (mbar - Pa) ...............................................................................................18

9 Speed curve (Torr) ...................................................................................................... 18

10 Speed curve (mbar - Pa) EPX and EPX Twin ........................................................................19

11 Speed curve (Torr) EPX and EPX Twin ...............................................................................19

12 EPX L installation dimensions (EPX500L shown) .................................................................... 20

13 EPX LE installation dimensions (EPX500LE shown) ................................................................. 21

14 EPX N installation dimensions (EPX500N shown) ................................................................... 22

15 EPX NE installation dimensions (EPX500NE shown) ................................................................ 23

16 Location of the pump centre of gravity from centre of the top of the inlet flange .......................... 24

17 Gas module schematic .................................................................................................25

18 Schematic diagram of emergency stop facility .................................................................... 32

19 EUC and PDT menu logic ............................................................................................... 41

20 Switch on menu .........................................................................................................42

21 Switch off menu .........................................................................................................42

22 Normal menu ............................................................................................................43

23 Status menu ............................................................................................................. 44

24 Control menu ............................................................................................................45

25 Setup menu (sheet 1 of 2) .............................................................................................46

26 Software version ........................................................................................................48

27 Select units menu .......................................................................................................49

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A419-00-880 Issue F

28 Select line menu ........................................................................................................50

Tables

Table Page

1 LEDs on the EPX pumps ................................................................................................. 7

2 Connections ............................................................................................................... 7

3 EPX L pump labelling information (Refer to Figure 4) ............................................................. 9

4 EPX E (Refer to Figure 5) ..............................................................................................10

5 EPX N (Refer to Figure 6) .............................................................................................. 11

6 General ...................................................................................................................15

7 Performance .............................................................................................................15

8 Electrical data ...........................................................................................................16

9 Cooling water supply ...................................................................................................17

10 Nitrogen supply .........................................................................................................17

11 Materials in contact with process gas ...............................................................................17

12 Tool connectors and mating tool connector kits ...................................................................34

13 Tool input signals to the pump system ..............................................................................34

14 Output signals from the pump system ............................................................................... 35

15 EUC and PDT menu structure .........................................................................................39

16 Maintenance plan .......................................................................................................58

17 Fault finding .............................................................................................................59

18 EPX EUC alarms and warnings .........................................................................................60

19 Accessory kits ........................................................................................................... 63

Contents

A419-00-880 Issue F

This page has been intentionally left blank.

Edwards and the Edwards logo are trademarks of Edwards Limited.

A419-00-880 Issue F

CAUTION

WARNING

1Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards EPX HiVac Series of dry vacuum pumps (these are abbreviated to ‘EPX pump’ for the remainder of this manual). You must use the EPX pump as specified in this manual.

Read this manual before you install, operate, and maintain the EPX pump. Important safety information is highlighted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

Statements and instructions in the following manual that refer to the EPX variant pump are equally applicable to the EPX Twin pump unless stated otherwise. Differences between the two pump variants are restricted to power characteristics, external connections to the exhaust extraction system and external dimensions/appearance.

Warnings are given where failure to observe the instruction could result in injury or death to people.

Introduction

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.

Throughout this manual, page, figure and table numbers are sequential.

The units used throughout this manual conform to the SI international system of units of measurement; US equivalent units of measurement are also given.

The following IEC warning labels appear on the pump or in the manual:

Warning - refer to accompanying documentation.

Warning - risk of electric shock.

Warning - hot surfaces.

Warning - danger of injury from rotating parts.

A419-00-880 Issue F

CAUTION

WARNING

Introduction

Warning - heavy object.

Warning - corrosive material.

Warning - toxic material.

Warning - flammable material.

Figure 1 - Process compatibility chart

1.2 Description

Edwards take no responsibility for damage or injury caused by improper use of the equipment.

The EPX Dry Vacuum Pump must only be used for the applications depicted in Figure 1. Incorrect use of the EPX system could invalidate your warranty. Contact your local Edwards representative if you are unsure whether the EPX system is appropriate for your application.

The EPX pump should not be used to pump explosive mixtures or pyrophoric gases.

The EPX series of pumps are not suitable for pumping Xenon.

Edwards and the Edwards logo are trademarks of Edwards Limited.

A419-00-880 Issue F

The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated.

Between 1 bar and 0.2 mbar, the EPX Twin pump offers a significant pumping performance advantage over the standard EPX pump. As such, the EPX Twin pump is ideal for use on load lock applications, rapid cycling applications etc.

The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified) (Figure 2, items 4 and 9). Cooling water must be provided commensurate with environmental conditions (humidity and temperature) such that the dewpoint is not reached. Refer to Table 9 for the water supply specifications.

Refer to Figure 2 and 4. The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump: (refer to Figure 4, items 2, 3, 4, and 5 and Table 1). Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again.

The EPX pump is supported by four vibration isolators (Figure 2, item 7).

Introduction

Pump protection sensors automatically shut down the pump if a fault condition arises: refer to Section 1.3.

The EPX pump is available in a number of different variants. The nomenclature is arranged to help identify which variants are suitable for which applications, and which method of control is required for the pump. The four base variants are described in more detail below:

1.2.1 The EPX L

This pump is for use on clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface. (Refer to Figure 2).

1.2.2 The EPX LE

This pump is for use on clean duty applications such as loadlock, and is augmented with an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring. A Pump Display Terminal (PDT) may also be used with the End User Controller to facilitate local control. (Refer to Figure 5).

1.2.3 The EPX N

This is fitted with a gas module that supplies nitrogen purge gas to the shaft seal and pump mechanism areas to provide dilution of process gases for the light duty applications specified in Figure 1. (Refer to Figure 5, Table 5 and

Section 3.6 for further information).

1.2.4 The EPX NE

This system is a light process application pump with network and local control capability through the EUC as described in Section 1.2.2. (Refer to Figure 5).

The four base variants, the L, LE, N and NE are also available in two capacities, 180 m with 180 for example EPX180LE) and 500 m3/hr (letter designation prefixed with 500 for example EPX500N).

The EPX pump can also be specified as either 200/208 V or 400 V compatible and a choice of either 1/4 inch BSP, 3/8 inch BSP, 9/16 inch BSP quick connect water fittings or no quick connects.

/hr (letter designation prefixed

A419-00-880 Issue F

WARNING

Introduction

The EPX pump is fitted with a Tool Interface Module (TIM), which allows ‘plug and play’ connection with all major process tools. This communication includes control and monitoring of the EPX by the tool for example Run, Stop, Alarm.

A number of different tool interface options (TIMs) can be specified when the pump is first ordered: SPI, C3, TEL, E73, MCM or HIT.

Note: The LE and NE versions of the EPX pump can be operated via the end user controller and so do not require

a TIM for operation.

The illustrations throughout this manual show the E73 variant of the TIM.

1.3 Pump protection sensors

For EPX N-series pumps, if the pump has been fitted with a C3 or E73 tool interface, there is no provision for warnings, generated by the pump, to be passed onto the tool. The installer must fit suitable monitoring equipment to check the nitrogen purge flow, as detailed in Section 3.

For EPX N-series pumps, the nitrogen purge flow switch in the Gas Module is set to 12 slm. The flow switch provides an indication that a flow in excess of 12 slm is present, but gives no guarantee that there is sufficient flow to meet the process requirements. The flow switch is not a guaranteed safety interlock.

When the pump protection sensor operates, only the electrical supply of the pump-motor is switched off; the EPX is not isolated from the electrical supply.

A thermal snap-switch located within the pump, monitors the temperature of the body of the EPX pump. When the temperature of the body exceeds a preset limit, the snap-switch operates, generating an alarm and causing the pump to stop.

When the EPX pump is automatically shut down by a pump protection sensor, the Alarm LED is lit (Figure 4, item 5).

On the EPX N series of pumps, a nitrogen purge flow switch is fitted to the Gas Module to monitor the total purge flow to the pump. If the purge flow drops below 12 slm, the warning LED on the front panel (or EUC if fitted), will light (Figure 4, item 4). The pump will continue to run.

1.4 LED status indicators

Refer to Table 1 and Figure 4.

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Figure 2 - The EPX L dry vacuum pump

1. Pump inlet

2. Lifting eyebolt (two positions)

3. Protective earth stud (M8)

4. Cooling water inlet

5. TIM

6. Mains supply cable

7. Vibration isolator (four positions)

8. Exhaust

9. Cooling water outlet

A419-00-880 Issue F

Introduction

A419-00-880 Issue F

Introduction

Figure 3 - EPX twin 180L installation details - position of additional exhaust port for EPX twin variants

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A419-00-880 Issue F

Table 1 - LEDs on the EPX pumps

LEDs/button items Reference data

Power LED (Figure 4, item 2) This green LED indicates that mains power is supplied to the EPX pump.

Run LED (Figure 4, item 3) This green LED is lit when the EPX pump has started and is operating.

This LED will flash when the pump is operating in idle mode.

Warning LED (Figure 4, item 4) Operational with EPX-N series of pumps only. Amber LED will illuminate

in a ‘Low Flow’ condition.

Alarm LED (Figure 4, item 5) This red LED is lit when the EPX pump has been automatically shut

down because a pump protection sensor has operated (Refer to

Section 1.3), or because the inverter drive has failed.

Table 2 - Connections

Connection items Reference data

Cooling-water inlet and outlet (Figure 2, items 4 and 9)

Electrical supply cable (Figure 2, item 6)

TIM (Figure 2, item 5) Use this to connect your control equipment to the EPX pump, to allow

Protective Earth (ground) stud (Figure 2, item 3)

Use these to connect your cooling-water supply and return pipelines to the EPX pump: refer to Section 3.8.

Use this to connect your external electrical supply to the EPX pump: refer to Section 3.9 and 3.10.

you to control the operation of the pump: refer to Section 3.11.

Use this to earth (ground) the EPX pump: refer to Section 3.10.

Introduction

A419-00-880 Issue F

Introduction

Figure 4 - EPX L labels (refer to Table 3)

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A419-00-880 Issue F

Table 3 - EPX L pump labelling information (Refer to Figure 4)

Number Label Name Description

1 Pump details This provides specific information about the pump including: pump

type; code number; serial number; pump weight; year of manufacture; and name and address of the manufacturer. It also includes electrical supply requirements, and compliance marks.

2 Power The power LED. See Ta bl e 1 for details.

3 Run The run LED. See Ta bl e 1 for details.

4 Warning The warning LED. See Ta bl e 1 for details.

5 Alarm The alarm LED. See Ta bl e 1 for details.

6 Warning - risk of electric

shock

7 Warning - risk of electric

shock

8 Status LED label Status LED label.

9 and 10 Lifting point The pump must be lifted using the eyebolts on the pump and

11 Warning - risk of high

temperature

12 Direction of rotation Arrow shows the correct direction of rotation of the rotor.

13 Warning - danger of injury

from rotating parts

14 Water in The cooling water supply pipeline connects to the pump at this

15 Protective earth stud This equipment must have a second protective earth. See

16 Pump interface Tool Interface Module (TIM) fits in this position. The pump may be

17 Warning - risk of electric

shock

18 Warning - risk of electric

shock

19 Warning - thermal shock If the pump has overheated or the cooling water has failed,

20 Water out The cooling water return pipeline connects to the pump at this

21 Product label Product name.

Do not remove cover until 4 minutes after disconnection of the power.

suitable lifting equipment.

Surface temperatures can exceed 65

Turn off and lock-out all power prior to servicing.

location.

Section 3.10.

controlled through this. See Section 3.11.

Do not remove cover until 4 minutes after disconnection of the power.

connecting cooling water to a hot pump will cause severe damage to the pump. Always allow the pump to cool for at least 20 minutes before connecting cooling water.

location.

C during pump operation.

Introduction

A419-00-880 Issue F

Introduction

Figure 5 - EPX E dry pump

Table 4 - EPX E (Refer to Figure 5)

Number Description

1 Label - Product name.

2 XLR Connector - This may be used to connect a fab-wide network to allow remote monitoring

and control of the EPX Dry Pump.

3 Label - Warning do not remove cover until 4 minutes after disconnecting power from the

pump.

4 RJ12 Connector - This is used to connect the optional, external, PDT to the EPX Dry Pump.

5 End User Controller accessory - The End User Controller has an on-board display and keypad

that allows local control of the EPX Dry Pump. Refer to Section 1.8 and 4 for the operation of this.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Figure 6 - EPX N series dry pump

A419-00-880 Issue F

Introduction

Table 5 - EPX N (Refer to Figure 6)

Number Description

1 Pipe fitting - Nitrogen supply to the seal purge.

2 Label - Warning; If the pump has overheated or the cooling water has failed, connecting

cooling water to a hot pump will cause severe damage to the pump. Always allow the pump to cool for at least 20 minutes before connecting the cooling water.

3 Label - Warning; do not remove cover until 4 minutes after disconnecting power from the

pump.

4 Gas supply fitting - Connect the gas supply to this connection. This compression fitting accepts

1/4 inch (6.35 mm) diameter tube. Ensure that the tube used is suitable for your application.

5 Label - Gas Module identifier.

6 Pipe fitting - Nitrogen supply to the gas ballast.

A419-00-880 Issue F

1. Run button

2. Display

3. Down button

4. CANCEL button

5. Up button

6. ENTER button

7. Menu buttons Status, Normal, Control, Setup

8. Menu selected LEDs

9. Status LEDs Local Control, Warning, Alarm

10. Stop button

Introduction

Figure 7 - End User Controller (EUC) display

1.5 Connections

Refer to Table 2 and Figure 4.

1.6 Control and monitoring

The EPX L and N series of pumps cannot be manually operated; they must be controlled and monitored by external control equipment, which must be connected to the EPX pump through the TIM (Figure 2, item 5).

The EPX E series of pumps can be manually operated using the EUC local display and keypad, or remotely using a PDT, if fitted; it can also be controlled and monitored over the network, which connects to the EPX pump through the Network connector (Figure 5, item 2). When the EPX ‘E’ series of pumps is controlled via the TIM, the EUC simply monitors the status of the pump.

The EPX pump is compatible with Fabworks 32.

1.7 EPX pump labels

Refer to Table 3 and Figure 4.

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A419-00-880 Issue F

1.8 End user controller

The End User Controller (EUC) allows manual control of the EPX pump and also displays the pump status. Refer to

Figure 7 which shows the front panel of the EUC display.

Use the run button (Figure 7, item 1) to start the EPX pump. The run button has an LED which is on when the EPX pump is running. Use the stop button (Figure 7, item 10) to stop the pump.

The display (Figure 7, item 2) shows two l i n e s o f t e x t ; e a c h l ine is 16 characters long. In normal operation, the Normal display is shown; the Normal display has two pages, and each has two lines. Each page of the Normal display shows the status of one or more EPX EUC sensors or internal clocks and counters. As supplied, the first page of Normal display shows the pump serial number and pump current. It is possible to change the information shown on the Normal display.

At any time, press one of the four menu buttons (Figure 7, item 7) to select a new menu. Then use the up (Figure 7, item 5), down (Figure 7, item 3), ENTER (Figure 7, item 6) and CANCEL (Figure 7, item 4) buttons to move through the menu. The appropriate menu selected LED (Figure 7, item 8) is on when the corresponding menu is in use.

Use the menu (Figure 7, item 7), up (Figure 7, item 5), down (Figure 7, item 3), CANCEL (Figure 7, item 4) and ENTER (Figure 7, item 6) buttons as described below. Refer to Section 4 for a full definition of the menu structures and the display formats.

Status: Press this button to select the Status menu. This menu displays the current pump status.

Introduction

Normal: Press this button to select the Normal display.

Control: Press this button to select the Control menu, then take control or release control of the pumping system

(refer to Section 4).

Setup: Press this button to select the Setup menu. In this menu it is possible to display parameters (such as the pressure units used when pressures are displayed).

Enter (6): Use this button to select a currently displayed menu option or to enter a currently displayed parameter.

Cancel (4): Use this button to cancel the currently displayed menu or option and return to the previous menu or

option.

Up (5)/Down (3): Use these buttons to move up or down menu options or to increase or decrease a displayed parameter.

The status LEDs (Figure 7, item 9) show the current status of the EPX system.

Alarm: This LED shows when an alarm condition exists.

Warning: This LED shows when a warning condition exists.

Local control: This LED is on when the EUC has control of the EPX system.

The ALARM and WARNING LEDs flash when the corresponding alarm or warning condition first occurs. When acknowledging the condition, the corresponding LED goes on permanently. For most alarms and warnings, if the condition clears (that is, the fault which caused the condition is no longer present), the corresponding LED goes off once the condition has been acknowledged.

A419-00-880 Issue F

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Edwards and the Edwards logo are trademarks of Edwards Limited.

A419-00-880 Issue F

2Technical data

2.1 General

Tab l e 6 - G en eral

EPX180 EPX500

Dimensions Refer to Figure 12, 13, 14, and 15

Mass:

EPX L EPX N EPX LE EPX NE

Inlet ISO63 ISO160

Inlet fittings (not supplied) One ISO63 centring ring.

Outlet NW25

Ambient operating temperature range 5 to 40

Maximum ambient operating humidity 90% RH non-condensing

Noise level <59 dB(A)

Vibration <0.25 g

Maximum operating tilt angle 5

Handling The pump must not be laid on its side or inverted

Maximum exhaust pressure <1200 mbar absolute

Lubricating oil The EPX pump has a sealed lubricating oil system. For health and

safety information, refer to the Material Safety Data Sheet for Fomblin

Ingress protection IP44 (with inlet and exhaust connected)

43.5 kg

45.5 kg

44.6 kg

46.6 kg

4 Claw clamps

6/6: MSDS No. P120-01-015.

(E-series pumps are rated to IP40)

One ISO160 centring ring.

C, 41 to 104 oF

Topple angle >15°

45.2 kg

47.2 kg

46.3 kg

48.3 kg

8 Claw clamps

Technical data

2.2 Performance

Table 7 - Performance

EPX180 EPX500

Warm- up time (to nominal performance)

3 hr-1

Peak pumping speed 170 m

Ultimate vacuum

Maximum leak rate 1 x 10

The time taken to reach ultimate vacuum is dependent upon vacuum system cleanliness and foreline conductance.

<1 x 10

<7.5 x 10

103.0 cfm 500 m3 hr-1 294.3 cfm

-4

mbar,

-2

<1 x 10

Pa,

-5

To rr

-5

mbar l s-1, 1 x 10-3 Pa l s-1, 2.1 x 10-8 atm ft3 min

30 minutes

<1 x 10

<7.5 x 10

-6

-4

mbar,

Pa,

-7

To rr

-1

A419-00-880 Issue F

Technical data

2.3 Electrical data

Electrical items Reference data

Electrical supply 200/208 V, 50/60 Hz, 400 V 50/60 Hz 3-phase

Voltage tolerance ±10%

Electrical power

Maximum Power 3.0 kW

Nominal Power at Ultimate (EPX)

L-variant 1.4 kW

N-variant 1.6 kW

Nominal Power at Ultimate (EPX twin)

L-variant 2.30 kW

N-variant 2.55 kW

Fuse/ isolator rating

200 V 17.5 A current limiting time delay Class CC fuse, rated 600 V

400 V 10 A current limiting time delay Class CC fuse, rated 600 V

Installation (overvoltage) category Class II

Pollution degree 2

Minimum protective earth (ground) cable rating 32 A

Electrical supply interface Per customer specification

Power cable 4 core terminated with 2.5 mm

TIM

Parallel pump interface As per TIM interface supplied (refer to Section 3.11)

Nominal voltage rating 24 V

Shut-down thermal snap-switch

Opening temperature 70

Closing temperature 59 oC, 138 oF

Maximum recommended fuse rating; requires a multipole isolator with a minimum contact gap of 3 mm. The mains disconnect device AIC (Amperes Interrupting Capacity) must be rated to at least 10 000 A. See clause 13 of SEMI S2 - 0200 and SEMI S8 for further details.

Table 8 - Electrical data

C, 158 oF

bootlace ferrules

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+ 50 hidden pages

Edwards EPX HiVac Series, EPX180L, EPX180N, EPX500L, EPX500N Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Contents

Illustrations

Tables

1Introduction

1.1 Scope and definitions

1.2 Description

1.2.1 The EPX L

1.2.2 The EPX LE

1.2.3 The EPX N

1.2.4 The EPX NE

1.3 Pump protection sensors

1.4 LED status indicators

1.5 Connections

1.6 Control and monitoring

1.7 EPX pump labels

1.8 End user controller

2Technical data

2.1 General

2.2 Performance

2.3 Electrical data