Instruction Manual
Active Inverted Magnetron Gauge
Description Item Number
AIM-S-NW25 D146-41-000
AIM-SL-NW25 D146-44-000
AIM-X-NW25 D146-42-000
AIM-XL-NW25 D146-45-000
D146-41-880
Issue J
Original instructions
Declaration of Conformity
We, Edwards Limited,
Crawley Business Quarter,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
x AIM-S-NW25 D146-41-000
x AIM-X-NW25 D146-42-000
x AIM-SL-NW25 D146-44-000
x AIM-XL-NW25 D146-45-000
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
EN61326-2-3: 2013 Electrical equipment for measurement, control and laboratory
(Class B Emissions Use. EMC requirements. Particular requirements. Test
Industrial Immunity) configuration, operational conditions and performance criteria
for transducers with integrated or remote signal conditioning
CAN/CSA-C22.2 Safety requirements for electrical equipment for measurement,
No.61010-1-04 Control and laboratory use – Part 1: General requirements
UL61010-1, 2
nd
Edition Safety requirements for electrical equipment for measurement,
Control and laboratory use – Part 1: General requirements
EN50581: 2012 Technical Documentation for the Assessment of Electrical and
Electronic Products with respect to the Restriction of Hazardous
Substances
and fulfils all the relevant provisions of
2014/35/EU Low Voltage Directive
2014/30/EU Electromagnetic Compatibility (EMC) Directive
2012/19/EU Waste Electrical and Electronic Equipment (WEEE) Directive
2011/65/EU Restriction of Certain Hazardous Substances (RoHS) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
Larry Marini, Senior Technical Manager
Date and Place
P200-02-600 Issue F
This product has been manufactured under a quality management system certified to ISO 9001:2008
19.08.2015, Eastbourne
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D146-41-880 Issue J
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Description ................................................................................................................ 1
1.3 Gas dependency .......................................................................................................... 2
2 Technical data ....................................................................................5
2.1 Mechanical data .......................................................................................................... 5
2.2 Performance, operating and storage conditions .................................................................... 5
2.3 Electrical data ............................................................................................................ 7
2.4 Error monitoring ......................................................................................................... 7
2.5 Materials exposed to vacuum .......................................................................................... 8
3 Ins tallation ........................... ................................... ...........................9
3.1 Unpack and inspect ...................................................................................................... 9
3.2 Fit the AIM Gauge to the vacuum system ............................................................................ 9
3.3 Electrical connections ................................................................................................... 9
3.3.1 Connect to Edwards controllers or AGD display ..................................................................... 9
3.3.2 Connect to your own supply and control equipment ............................................................... 9
Contents
4 Operation ........................................................................................ 13
4.1 Safety ..................................................................................................................... 13
4.2 Enable and disable the AIM Gauge ...................................................................................13
4.3 Pressure measurement .................................................................................................13
4.4 Set-point .................................................................................................................14
5 Maintenance ..................................................................................... 15
5.1 Introduction .............................................................................................................15
5.2 Replace the body tube .................................................................................................15
5.2.1 Remove the AIM Gauge from the vacuum system ..................................................................15
5.2.2 Fit the new body tube .................................................................................................15
5.2.3 Refit the AIM Gauge to the vacuum system ........................................................................15
5.3 Replace the electrode assembly ......................................................................................17
5.4 Replace the electronics and magnet housing ......................................................................17
5.5 Clean the internal components .......................................................................................17
5.6 Fault finding .............................................................................................................18
6 S torage and disposal .......... ..... ..... ..... ..... ..... ........................................ 19
6.1 Storage ...................................................................................................................19
6.2 Disposal ...................................................................................................................19
7 Spares and accessories ......................................................................... 21
7.1 Introduction .............................................................................................................21
7.2 Spares .....................................................................................................................21
7.3 Accessories ...............................................................................................................21
For return of equipment, complete the HS Forms at the end of this manual.
Xplanation 5717 03/2016
© Edwards Limited 2015. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
D146-41-880 Issue J
Contents
Illustrations
Figure Page
1 General view of the AIM Gauge (showing the NW25 flange) ...................................................... 3
2 Dimensions (mm) ........................................................................................................ 6
3 Schematic diagram of typical electrical connections .............................................................10
4 Exploded view of the AIM Gauge .....................................................................................16
Tables
Table Page
1 Pins on the AIM Gauge electrical connector socket ...............................................................11
2 Pressure and voltage characteristics for nitrogen and dry air: AIM-S and AIM-SL Gauges ...................14
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Edwards and the Edwards logo are trademarks of Edwards Limited.
D146-41-880 Issue J
CAUTION
WARNING
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards AIM Gauge (Active
Inverted Magnetron Gauge). You must use the AIM Gauge as specified in this manual.
Read this manual before you install and operate the AIM Gauge. Important safety information is highlighted as
WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS a n d CAUTIONS is
defined below.
Warnings are given where failure to observe the instruction could result in injury or death
to people.
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment or process.
Introduction
The units used throughout this manual conform to the SI international system of units of measurement.
The following warning symbol also appears on the product:
Edwards will offer European customers a recycling service.
1.2 Description
The AIM Gauge, shown in Figure 1, is an inverted magnetron gauge head and gauge controller in a single compact
unit. The gauge operates as a cold cathode ionisation gauge, in which the pressure is measured indirectly as a
function of the current which flows in a Townsend discharge maintained in the body tube.
Four versions of AIM Gauge are available; the ‘S’, ‘SL’, ‘X’ and ‘XL’ gauges. The ‘X’ and ‘XL’ gauges have an extended
measurement range (see below) and a linear output characteristic. The ‘SL’ and ‘XL’ gauges have a very low external
magnetic field and are suitable for use with sensitive analytical instrumentation.
-8
The measurement range of the AIM-S and AIM-SL gauges is 1 x 10
AIM-X and AIM-XL gauges is 1 x 10-9 to 1 x 10-2 mbar. The AIM gauge vacuum connection is an NW25 flange.
The AIM Gauge requires a 13.5 to 36 V d.c. power supply: it has a 2 to 10 V d.c. analogue output which is related to
pressure. The AIM Gauge is compatible with all of the Edwards AGCs (Active Gauge Controllers) and with the
appropriate versions of the Edwards AGDs (Active Gauge Displays).
to 1 x 10-2 mbar. The measurement range of the
Alternatively, you can use an independent power supply for the AIM Gauge and you can read the AIM Gauge output
signal with a voltmeter or an analogue-to-digital converter.
We recommend that you do not operate the AIM Gauge unless the pressure in the vacuum system is 1 x 10
lower. A gauge enable signal is used to control the operation of the AIM Gauge; refer to Section 4.2 for more
information.
An 8-way electrical connector socket on the AIM Gauge (Figure 1, item 6) is used to connect the AIM Gauge to your
AGC, AGD or electrical supply and voltmeter. Electrical cables fitted with suitable connector plugs are available
as accessories.
© Edwards Limited 2015. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
-2
mbar or
D146-41-880 Issue J
Introduction
A gauge identification signal is available on the electrical connector: this signal is used by Edwards AGCs to identify
which type of Active Gauge is connected.
The AIM Gauge has a set-point facility; the set-point signal is an open-drain transistor (FET) ou tput, which is on when
the pressure measured by the Gauge is below a preset pressure. You can adjust the pressure at whi ch th e se t-poi nt
output goes on: refer to Section 4.4. Note that, if you use a Edwards AGC Controller or AGD Display, the AIM Gauge
set-point output signal is not used.
1.3 Gas dependency
The ionisation of the gas in the vacuum system is dependent on both the pressure and the physical properties of the
gas. Therefore, the output signal of the AIM Gauge is gas dependent.
The output signal voltage to pressure conversions in Table 2 apply for nitrogen and dry air.
Calibration graphs for use with argon, neon, krypton, helium and carbon dioxide are available on request; contact
your supplier or Edwards.
Page 2 © Edwards Limited 2015. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Figure 1 - General view of the AIM Gauge (showing the NW25 flange)
1. End-cap
2. Vacuum flange
3. Body tube
4. Magnet housing
5. Cable connector plug
6. Set-point potentiometer (on end of item 1)
7. AIM Gauge connector socket
D146-41-880 Issue J
Introduction
© Edwards Limited 2015. All rights reserved. Page 3
Edwards and the Edwards logo are trademarks of Edwards Limited.
D146-41-880 Issue J
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