EBARA A70W-C, A30W, A30W-S, A30W-C, A25S Instruction Manual

Doc. No. 7313-L4602B Rev. 3B

INSTRUCTION MANUAL

MULTI-STAGE DRY VACUUM PUMP

A70W (A70W-S, A70W-C)
A30W (A30W-S, A30W-C)
A25S (A25S-S)
A10S (A10S-S)
A07V (A07V-S)

Distribute this Instruction Manual to all end user
personnel operating the equipment.

ISSUED BY PRECISION MACHINERY GROUP

Do not reproduce or reprint any portion of this manual without permission.
Manufacturer reserves the right to discontinue or change any specifications or designs
without notice and without incurring obligations.

All rights reserved, copyright EBARA Corporation.

Record of Changes

Rev. Date Page Position Contents Reason

0 2-Jun-94 Newly issued
1 13-Jul-94 5

6-10

14
17
21
22

2 14-Nov-96

ⅲ ,ⅳ

ⅴ ,ⅵ ,ⅶ

4

21
25
26
33

35,36

37

A07V Spec.
Outline Drawing
Fig. 3.4
Fig. 4.2
Fig. 4.6
Table 4.5

Fig. 1,2,3,4,5

Drawing

3.3 List

Dig. 4.4
Table 4.6
Fig. 4.7
Table 6.1

6.3
7 (8)
9

Pumping Speed
Water Sup./Rtn
Sys. Flow
Coupler
Ctrl. Wiring
Pin Assign.

Safety warning
labels
Warning label
Location
Detailed
specifications
Power Sup. Rec
Dipswitch
S.W setting
Typical check
items
Spare Parts
Pump Lifting
Service Net.

44,45

A 12-Dec-97 New release

3 20-May-99 21

44,45

5,6,18,

27,28,

32

Tab. 4.2

9. Service Network

-----

Suitable wire
Japan, Taiwan
(Add., Phone, Fax)
The Unit was
changed in terms
of Domestic
regulation for
Measurement low.

3A 27-Apr-01 ETI release of

3B June 2002 20

iv

Thruout

Add UL grounding

note
Add LCD “hot
surface” note
Add appendices
Language Edit

Correction

Add NPT
Add Note

Add Drawing

Correction

Add note

Add

Add

Add List

Correction
Design Change
Design Change

Add Table

Add List

Add Note

Add List

per ECO 2905

Correction

Change

-----

EC Rev 3 per

ECO 5394.
Third-party

marking

Third-party

marking

SEMI S2

ECO 5771

(i)

EBARA Corporation

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Safety Information

Anyone operating this pump must have the knowledge to identify and avoid hazardous
conditions associated with the pump.

Rash actions or improper operation may cause dangerous accidents and serious injuries.

Before installation and operation, the operator first should have a thorough knowledge of the
pump’s construction, operating procedures, and hazards.
The operator should read this instruction manual and other documents issued by EBARA.

If you have any questions on pump operation, safety, or maintenance, please do not hesitate
to contact EBARA directly.

Three terms in this manual designate different levels of hazard:

DANGER

WARNING

CAUTION

indicates an imminently hazardous situation that, if not avoided, will
result in death or serious injury.

indicates a potentially hazardous situation that, if not avoided, could
result in death or serious injury.

indicates an imminently hazardous situation that, if not avoided, may
result in minor or moderate injury.

This term may also indicate situations that might damage
equipment.

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Important Precautions

DANGER

WARNING

WARNING

WARNING

WARNING

WARNING

Keep out from under the pump when it is elevated.

Only qualified personnel should unload and lift the pump.

Be careful not to overturn the pump when pushing or pulling it
sideways. The pump is narrow in comparison to its height.

Only a qualified electrician, observing all national and local
regulations, should perform electrical work.

Cut and lock out electrical power before beginning wiring or
maintenance work.

Do not switch on the power supply to the pump until work is
completed and pump and piping are back in safe operating
condition.

Supply N2 gas to the exhaust piping when necessary to dilute
flammable or toxic gases down to a safe concentration.

Purge system with sufficient N2 gas before removing and cleaning
the vacuum lines and exhaust piping.

Prevent dispersal of flammable, toxic or dangerous materials and
guard against their contact with the human body.

Work only in locations with an emergency escape route.

WARNING

WARNING

WARNING

WARNING

WARNING

Do not convert the pump from one process to another without an
intervening overhaul. Gases or reaction products remaining in
the pump may react and lead to accidents or to the formation of
large amounts of byproduct.

Check Safety Interlock functions periodically (every 6 months) to
confirm correct operation. See Appendix 2 for a description of
these interlocks.

Connect exhaust from pumps handling process gases to an
appropriate exhaust abatement system that is equipped with
discharge quality monitors to provide warnings and to shut down
the process gas flow if concentrations exceed allowable limits.

Check for gas leaks after initial installation of the piping and after
reassembly following maintenance or, at least, annually. Gas
leaks can result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air
into the pump. Replace o-rings as required to correct leaks.
See Appendix 4.

Do not modify the pump or any of its parts without EBARA's
approval.

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WARNING

Do not place the LCD controller on or near a surface with a
temperature exceeding 65ºC.

WARNING

The pump casing and exhaust piping become extremely hot
during operation and remain hot for some time after stopping.

Keep pump and exhaust piping away from contact with personnel
and flammable substances.

Do not remove pump enclosure panels during operation.

CAUTION

Disposal of process byproducts must be in strict accord with all
local and national environmental and safety regulations.

CAUTION

Dispose of printed circuit boards containing lithium batteries in
strict accord with all applicable local and national environmental
regulations.

CAUTION

The height of EBARA dry pumps may place the EMO button and
the LCD controller below the heights recommended in SEMI
S8-95. See Appendix 3.

The following safety warning labels appear on the pump covers:
High temperature warning
Hazardous voltage warning
Hazardous materials warning
Electric charge mark
Hazardous weight danger

High temperature warning

Hot surface may burn or cause injury.
Allow the piping and casing to cool before servicing.

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Hazardous voltage warning

Hazardous Voltage may shock, burn, or cause death.
Turn power off and lockout before servicing.

Hazardous materials warning

(Applies only when pumping hazardous materials)
Run the pump only with N
Take adequate measures against dangerous reaction and contact with human body.

Electric charge mark

gas purge before servicing.

2

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Hazardous weight danger

Heavy weight may cause severe injury or death due to overturning or falling pump.
Keep out from under the lifted pump.
Raise all adjuster feet fully when moving.

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Contents

Record of Changes......................................................................................................... i

Safety Information ......................................................................................................... ii

Important Precautions..................................................................................................iii

Contents .........................................................................................................................x

1 Foreword..................................................................................................................1

2 Introduction .............................................................................................................1

3 Product Description................................................................................................2

3.1 Summary ........................................................................................................ 2

3.1.1 Pump Module.................................................................................... 2

3.1.2 N2 Gas ...............................................................................................2

3.1.3 Cooling Water...................................................................................2

3.1.4 Exhaust .............................................................................................2

3.2 Control System .............................................................................................. 2

3.2.1 Warning.............................................................................................3

3.2.2 Operation Status Control................................................................. 3

3.3 Moving the Pump........................................................................................... 3

3.3.1 Preparation .......................................................................................3

3.3.2 Moving Method.................................................................................4

3.4 Detailed Specifications .................................................................................4

4 Installation .............................................................................................................16

4.1 Location .......................................................................................................16

4.2 Piping ...........................................................................................................17

4.2.1 Vacuum and Exhaust Piping ......................................................... 17

4.2.2 Cooling Water Piping ..................................................................... 17

4.2.3 N2 Gas Piping.................................................................................. 19

4.2.4 Ventilation Duct..............................................................................19

4.3 Electrical Wiring ..........................................................................................20

4.3.1 Power Supply Wiring .....................................................................20

4.3.2 Control Signal Wiring..................................................................... 21

4.4 Operation Mode ...........................................................................................24

5 Operation ...............................................................................................................26

5.1 Before Starting............................................................................................. 26

5.2 Operation .....................................................................................................30

5.2.1 Local (Pump side) Operation ........................................................31

5.2.2 Remote (Distant) Operation........................................................... 31

6 Maintenance and Overhaul................................................................................... 32

6.1 Routine Inspection ......................................................................................32

6.2 Piping Maintenance.....................................................................................33

6.3 Lubricant Oil ................................................................................................33

6.4 Spare (Maintenance) Parts List ..................................................................34

6.5 Overhaul.......................................................................................................35

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7 Removal and Transportation................................................................................36

8 Troubleshooting ....................................................................................................38

8.1 Troubleshooting (1) Basic Trouble ............................................................38

8.2 Troubleshooting (2) ALARM .......................................................................39

8.3 Troubleshooting (3) TRIP............................................................................41

8.4 Troubleshooting (4) TRIP [Options] ...........................................................42

9 Inquiries .................................................................................................................43

9.1 North America ..............................................................................................43

9.2 Asia ...............................................................................................................44

9.3 Europe ..........................................................................................................45

Appendices

1. Material Safety Data Sheet – Vacuum Pump Oil.................................................I

(xi)

2. Safety Interlocks ..............................................................................................III

3. Ebara Dry Pumps and SEMI S2-93A (S2-0200)................................................ V

4. Leak Check Procedure..................................................................................... VI

5. Returning pumps for Rebuild in U.S. ............................................................... VII

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[Blank page]

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1 Foreword

We appreciate your selection of an EBARA A Series dry vacuum pump. EBARA has
manufactured this pump with much care and attention to permit safe and satisfactory
operation.
Incorrect operation will result in lack of performance and may cause accidents and injuries to
personnel.

[NOTE] This instruction manual contains necessary information on operation and

maintenance of the pump.

Operate the pump correctly in accordance with these instructions to ensure a long

service life.

Keep this instruction manual in a suitable place for immediate reference whenever

needed.

2 Introduction

Check the following items on receipt of the pump package.

Check the nameplate affixed to the outer cover of the pump to confirm that the pump
supplied agrees with your order.
Check the accessories against the packing list and the previously submitted drawings and
documents to confirm that the all ordered accessories have arrived.
Check for damage and for screws/bolts that have worked loose in transit.

CAUTION

Notify EBARA without delay when there is damage or when
components are missing.

Do not use when a leak is present as this may result in an accident.

Store the pump in a dry and clean place until installation.

Temperature

: 5 – 40 °C

Humidity : 80 % or less

Do not stack the pump. Place it in an upright position.

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3 Product Description

3.1 Summary

The A Series dry vacuum pump has a compact design and includes various sensors and
controls to enhance reliability and operation.

3.1.1 Pump Module

The pump is a roots-type vacuum pump that rotates a pair of non-contact, multi-stage rotors
synchronized by timing gears. High-capacity units have a Booster Pump (BP) connected in
series with the Main Pump (MP).
A compartment, isolated from the pump casing, encloses the timing gears and bearings,
which require lubrication with Perfluoro-Polyether (PFPE) oil and grease.
The pumps of this series are factory-filled with lubricating oil. Replenish or replace only with
the recommended oil grades shown in Specification Tables 3.1 and 3.2.

3.1.2 N2 Gas

Pressurized nitrogen, supplied to the labyrinth seal section, isolates the vapor stream from
the lubricated components, enabling the pump to draw a clean vacuum without admitting
lubricant oil to the pump casing.
Additional N
and retards the accumulation of reaction byproducts. For processes that do not produce
corrosion or reaction byproducts, the selector valve can stop completely the dilution N2 flow.
Adjusting the regulation pressure to the specified value supplies the correct amount of N2
gas for these two types of purge operation.
The pumps of this series are equipped with a dilution N2 gas control valve. Consult EBARA
before adjusting the N2 gas supply to the appropriate level for specific conditions of use.
(Maximum dilution N2 flow rate: 76 Pam3/s.)

3.1.3 Cooling Water

Compressing gas from vacuum to atmospheric pressure generates heat. Therefore, cool
motors and casings with cooling water.
Quick-connect cooling water couplers make connection and disconnection easy.

3.1.4 Exhaust

The exhaust check valve, a standard accessory, prevents reverse flow of gas from the
exhaust back through the pump to the vacuum chamber when pump stops. A silencer
(optional) reduces exhaust noise.

3.2 Control System

gas, injected in various pump stages, reduces corrosion due to process gas

2

A Series dry vacuum pumps have a built-in sensing unit consisting of an Earth Leakage
Breaker (ELB), an electro-magnetic switch and a control circuit or an overcurrent circuit
breaker (CB). To improve reliability and safety, sensors monitor the condition of each utility

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and pump section.
During pump operation the central processing unit monitors all operating conditions, including
power supply, cooling water flow, N

gas flow, lubrication oil level, casing and motor coil

2

temperature, motor current and suction pressure.

Pump operation “rides through” a transient power outage up to 500 milliseconds long.
(Two-second ride through is available as an option.)

3.2.1 Warning

To improve the reliability of the vacuum exhaust system, the pump control scheme generates
two levels of trouble warning: ALARM and TRIP.
An ALARM signal draws attention to an operating parameter value that has exceeded the
normal operating range; it does not signify that danger is imminent. The pump will continue to
operate in this condition, which enables the operator to complete the wafer cycle before
checking the pump.
The pump will stop automatically and generate a TRIP signal output if a parameter
approaches a mechanical safety limit.
Contact EBARA Corporation for details on checking the ALARM and TRIP setting conditions.

3.2.2 Operation Status Control

To facilitate operation status control and daily inspection, the LCD controller displays the
sensor data.
The LCD controller displays all ALARM and TRIP signals. For remote operation and
monitoring, the signals are available individually and as collective outputs.

3.3 Moving the Pump

3.3.1 Preparation

Raise all four adjuster feet fully before moving the pump; otherwise, an obstacle on the floor
may cause the moving pump to tip over.

Caster

fully
raised

Adjuster
f

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3.3.2 Moving Method

Move pump slowly by pushing eyebolt along the long axis of the pump (Direction A). Keep
toes and fingers away from moving wheels. If placing the pump in a corner or narrow space
requires moving it along the short axis (Direction B), two persons should “walk” the pump
over by alternately pushing the ends as shown below.

B

A

To move the pump across cracks or joints in the floor, spread a steel plate or similar device,
which can sustain the pump’s weight, over the discontinuity. At least two persons, using
great caution, should move the pump.

Steel Plate

DANGER

If, when moving a pump, it loses balance and starts to tip over, do
not attempt to stop it. Get away from the pump immediately and
let it fall.

3.4 Detailed Specifications

Refer to the following tables and figures for detailed specifications, size, and pump
performance.

List of Tables and Figures

Category Contents Page

Table 3.1, 3.2 Specification 5,6
Outline Drawing 1 A70W 7
Outline Drawing 2 A30W 8
Outline Drawing 3 A25S 9
Outline Drawing 4 A10S 10
Outline Drawing 5 A07V 11
Figure 3.1 Performance Curve (A70W, A30W) 12
Figure 3.2 Performance Curve (A25S, A10S) 13
Figure 3.3 Performance Curve (A07V) 14
Figure 3.4 System Flow 15

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A

A

[

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Table 3.1 Specification (A70W, A30W)

Model

70W

30W

Pumping Speed (50 / 60Hz) 7000 / 8400 L/min 3000 / 3600 L/min

Ultimate Pressure (50 / 60Hz) 0.27 / 0.13 Pa 0.4 / 0.27 Pa

Connection

Gas Inlet NW50

Gas Outlet NW40

Motor 2P 2.2 kW + 3.7 kW 2P 1.5 kW + 2.2 kW

Cooling

Water

Connection

Pressure

[Gauge Press.]

Differential Press. ： 0.1 MPa

Coupler (Ｒc 3/8)

Supply ： Max 0.4 MPa

Flow Rate Min. 3.5 L/min

Temperature Max. 30 deg C

Connection 1/4” Tube Fitting (Same as Swagelok®)

Pressure

Supply ： 0.1-0.7 MPa

[Gauge Press.]

N2 Gas

Approx. Flow

Rate

Dilution 0 Mode]

24-27 Pa m3/s

[3.4 Pa m

Setting ： 0.04-0.07 MPa

17-22 Pa m

3

/s]

[3.4 Pa m

3

3

/s

/s]

Duct

Ventilation

Connection

Pressure -196 Pa

Approx. Flow

d50 mm×L50 mm

3

0.5 m

/min

Rate

FOMBLIN Y-L VAC 25/6

Lubrication

Oil

Brand

BARRIERTA J100

DEMNUM S-65

KRYTOX VPF 1525

Quantity 0.8 L

Approximate Weight 380 kg 330 kg

Phase/Volt/Freq. 3 Phase, 200V (50 Hz), 200-220 V (60Hz)

Power

Current Rating

(50 / 60 Hz)

29.5 / 28.1 A 19.7 / 18.5 A

Supply

Connection

(Japan Aviation Electronics Industry)

MS Series 22-22

Control Signal 57 Series 50 (DDK. Ltd)

[Note] Approximate flow rate of N

gas shows a necessary total amount for seal N2 and

2

dilution N2.

LCD controller displays only the flow rate of dilution N2.

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A

A

A

[

/s]

[

/s]

[

/s]

y

(

(Jap

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Table 3.2 Specification (A25S, A10S, A07V)

Model

25S

10S

07V

Pumping Speed (50 / 60 Hz) 2500 / 3000 L/min 1000 / 1200 L/min 700 / 840 L/min

Ultimate Pressure (50 / 60 Hz) 5.3 / 4.0Pa 5.3 / 4.0Pa 1.1 / 1.0 Pa

Connection

Gas Inlet NW50 NW40 NW40

Gas Outlet NW40

Motor 2P 3.7 kW 2P 2.2 kW 2P 1.5 kW

Cooling

Water

Connection

Pressure

[Gauge Press.]

Coupler (Ｒc 3/8)

Supply ：Ｍax． 0.4MPa

Differential Press.：Min． 0.1MPa

Flow Rate Min. 3.5 L/min

Temperature Max. 30 deg C

Connection 1/4” Tube Fitting (Same as Swagelok®)

N

Gas

2

Duct

Ventilation

Pressure

[Gauge Press.]

Approx.

Flow Rate**

Connection

17-20 Pa m

3.4 Pa m

d50 mm×L50 mm d50 mm×L60 mm

3

Pressure -196 Pa

Approx. Flow

Rate

Supply：0.1-0.7 MPa

［Setting：0.04-0.07 MPa］

3

/s

17-20 Pa m3/s

3

/min

3

3.4 Pa m

0.5 m

15-19 Pa m3/s

3.4 Pa m

FOMBLIN Y-L VAC 25/6

Lubrication

Oil

Brand

Quantit

0.4 L 0.4 L 0.5 L

BARRIERTA J100

DEMNUM S-65

KRYTOX VPF 1525

Approx. Weight 240 kg 220 kg 150 kg

Phase/Volt/Freq. 3 Phase, 200V (50 Hz), 200-220 V (60Hz)

Power

Supply

Current Rating

50 / 60 Hz)

Connection

18.3 / 17.5 A 11.7 / 11.1 A 8.4 / 8.6 A

MS Series 22-22 MS Series 20-4

an Aviation Electronics Industry)

Control Signal 57 Series 50 (DDK. Ltd)

3

** Numerals in brackets [ ] are flow rate in dilution-0 mode.

[Note] Approximate flow rate of N2 gas shows a necessary total amount for seal N2 and

dilution N2.

LCD controller displays only the flow rate of dilution N2.

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Outline Drawing A70W

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Outline Drawing A30W

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Outline Drawing A25S

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Outline Drawing A10S

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Outline Drawing A07V

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100000

[50Hz]

10000

1000

[l/min]

100

10

1

-2

10

10

-1

10

A70W

A30W

0

101 102 103 104 10

A70W

A30W

5

[Pa]

100000

10000

1000

[l/min]

100

10

1

-2

10

10

-1

10

A70W

A30W

0

101 102 103 104 10

[60Hz]

A70W

A30W

5

[Pa]

Figure 3.1 Performance Curve (A70W, A30W)

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100000

10000

1000

[l/min]

100

10

1

10

-2

10

-1

10

A25S

A10S

0

101 102 103 104 10

[50Hz]

5

[Pa]

100000

10000

1000

[l/min]

100

10

1

-2

10

10

-1

10

A25S

A10S

0

101 102 103 104 10

[60Hz]

5

[Pa]

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Figure 3.2 Performance Curve (A25S, A10S)

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100000

10000

1000

[l/min]

100

10

1

-2

10

10

-1

10

A07V

0

101 102 103 104 10

[50Hz]

5

[Pa]

100000

10000

1000

[l/min]

100

10

1

10

-2

10

-1

10

A07V

0

101 102 103 104 10

[60Hz]

5

[Pa]

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Figure 3.3 Performance Curve (A07V)

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Power

N2 Gas

Water

Regulator

LCD Controller

Circuit Breaker

(ELB)

Pressure Gauge

P

Seal N2 Gas Flow Sensor

FT1

FT2

Dilluting N2 Gas Flow Sensor

FT3

Cooling Water Flow Sensor

Control Circuit

Motor Starter 1

Motor Starter 2

Selector Valve

Gas Inlet

Connector

Booster Pump

(BP)

Main Pump

(MP)

Motor 2

Gas Outlet

Motor 1

[NOTE] A25S, A10S and A07V do not have a booster pump.

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Check
Valve

Figure 3.4 System Flow

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4 Installation

Observe the following precautions and instructions when installing the pump.

4.1 Location

This pump is suitable for indoor installation. To install the pump, select a place not exposed
to dust or humidity and not subject to dew condensation. Also, allow sufficient space to
ensure easy pump installation and disassembly for maintenance. If the pump has an
interface box, locate it within 3m of the pump.

CAUTION

Install pump in a location where ambient temperature does not exceed
30℃. Exercise extra caution when operating the pump in an enclosed
room.

CAUTION

Leave a gap of at least 50mm between the pump cover and adjacent
equipment for ventilation.

Four integral mobile support units, each consisting of a caster and a height-adjustment foot,
support the pump base. To move the pump, raise the four adjustment feet by turning the
holding nuts in the counterclockwise direction.

Figure 4.1 Caster

Be careful not to overturn the pump when pushing or pulling it

WARNING

CAUTION

sideways. The pump is narrow in comparison to its height.

The neck portion of the casters will vibrate when the caster is moving.
Keep fingers and feet away.

CAUTION

Do not step on the pump or place objects upon it.

Turn the holding nuts in the clockwise direction to lower the height-adjustment feet and
secure the pump.
Adjust the height of the feet evenly to level the pump base.

The difference in height between the two sides of the pump base shall not exceed
1mm. The adjustment allowance is approximately 15 mm.

[NOTE]

[NOTE]

An unleveled pump may generate an OIL LEVEL LOW ALARM.

Failure to use adjustment feet will increase floor vibrations.

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4.2 Piping

4.2.1 Vacuum and Exhaust Piping

Connect the vacuum and exhaust pipes to the suction and exhaust flanges respectively.
Because of the narrow clearance between pump rotors, ingested foreign objects will prevent
the pump from operating. Observe the following cautions when making the flange
connections:

a) Remove all foreign matter from inside the piping.
b) When connecting flanges, ensure that no dirt or dust particles adhere to the flange

surfaces and that the flange surfaces are undamaged.

c) Prevent the ingestion of wafer fragments and of reaction byproducts that may adhere to

the APC valve. For this purpose, a filter or screen may be advisable.

d) The weight of the pipes attached to the pump can cause misalignment and leaks from

the flange connections. Support the piping properly and do not apply excessive force to
align flange faces.

e) EBARA recommends the insertion of a flexible bellows between the piping and the

suction and exhaust flanges of the pump.

f) Length of the flexible bellows on the suction side will vary according to the vacuum

drawn. Connect without applying undue force to the flexible bellows.

DANGER

Check for leaks after installing the pump. A leak may lead to the
dangerous discharge of hazardous substances or to unpredictable
reactions with air admitted into the pump.

4.2.2 Cooling Water Piping

Connect the cooling water pipes to the correct inlet and outlet ports.
The water ports are quick-connect couplers. Seat the plug firmly in the socket. The socket
sleeve will return to the front (Figure 4.2).
Do not connect the supply/return plugs in reverse. The diameters are slightly different, and
there are In/Out markings on the plugs.
Disconnection automatically blocks water flow.
Use cooling water corresponding to the specifications of Table 4.1.

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Table 4.1 Industrial Water Supply Quality Specifications

(Japan Industrial Water Association, Industrial Water Quality Standards Committee)

Turbidity
pH
Alkalinity(CaCO3)
Hardness(CaCO3)
Evaporation residue
Chlorine ion
Iron
Manganese

(ppm)

(ppm)
(ppm)
(ppm)
(ppm)
(ppm)
(ppm)

20

6.5-8.0
75
120
250
80

0.3

0.2

Correct

Wrong

Socket

Sleeve

Figure 4.2 Coupler

In / Out
Marki ng

Plug

DANGER

CAUTION

CAUTION

CAUTION

When disconnecting water, first close the supply valve and then
remove the supply coupler.

When connecting, insert the return coupler first.

Connecting or disconnecting in the wrong order may cause a
rapid pressure rise—leading to a water leak.

Even if the cooling water flow rate drops, the pump will continue
to operate until the casing temperature reaches the TRIP limit.

Select facility water piping rated for at least 70 ℃ at the
operating pressure.

Do not connect pump cooling water loops in series. Select
piping to ensure sufficient flow through each pump.

Connect supply and return couplers correctly to avoid reverse
flow. Reverse flow will read incorrectly on the LCD, will not
cool the pump properly, and may lead to an accident.

CAUTION

In humid locations, allowing the cooling water to run when the
pump is stopped will lead to condensation on parts of the
pump. If droplets appear on the outside of the water tubes
when the pump is not running, cut off water flow.

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4.2.3 N

Gas Piping

2

Cut tube at right angles and make the end-face perfectly smooth. Then connect the tube to
the tube fitting assembly of the N

gas purge port. The tube will push fit onto the shoulder of

2

the tube fitting assembly.
Secure the tube fitting assembly properly and tighten the retaining nut by hand. Then use a
tool to tighten the nut an additional 1¼ turns.
To reconnect the tube again after subsequent removal, install the tube already fitted to the
ferrule and retighten the retaining nut slightly (about ¼ turn) beyond hand tight.

Body

Front
Ferrule

Back
Ferrule

Nut

1 + 1/4
R o ta tion

Figure 4.3 Tube Fitting Assembly

4.2.4 Ventilation Duct

Exhaust hot air from the pump enclosure through the ventilating duct port in the top cover.
Without proper ventilation, the temperature inside the cover may rise, causing an ALARM.
The pump does not have a gas leak detector. For hazardous gases, EBARA recommends
installing a gas leak detector, interlocked to gas flow, in the ventilation duct piping.
Use an exhaust duct material that resists corrosion from the gas(es) pumped.

CAUTION

For safety, ventilate through the enclosure exhaust duct when the
pump application is toxic and/or flammable gases. Do not
combine the ventilation duct with the pump exhaust piping.

[NOTE]

Even when pumping process gases that are not toxic or
flammable, do not combine the ventilation duct with the pump
exhaust piping. The exhaust noise of the pump may cause
acoustic resonance inside the pump unit and result in abnormal
noise.

EBARA Corporation

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4.3 Electrical Wiring

WARNING

Keep the power supply to the pump turned off and locked out until
you have finished the wiring and connecting work. Interrupt the
Earth Leakage Breaker (ELB) or circuit breaker (CB).

4.3.1 Power Supply Wiring

CAUTION

Ensure that the grounding wire is connected. Connect this
product to a grounded, metallic, permanent wiring system.

CAUTION

Match the wiring size and material to the power consumption and
ambient air temperature of the pump.

CAUTION

Use the threaded-coupling power connector provided with the
pump. At the power source size connect direct to distribution
panel wiring terminals or use a twist-lock, Hubbel-type connector.

Wire the connector for the main power supply (200V AC at 3-phase and 50Hz, 200-220V AC
at 3-phase and 60Hz). See figure and tables below for connector pin assignments and
specifications.

Table 4.2 Pin Assignments

Power Supply Receptacle

No. Phase

Ｄ A

A R

Ｃ Ｂ

Figure 4.4 Power Supply Receptacle

(As seen from connecting side)

B S

C T

D Ground

Table 4.3 Receptacle Specifications

Pump Model A70W A30W A25S A10S A07V
Receptacle

Japan Aviation Electronics Industry Co., Ltd.

manufacturer
Receptacle type MS3102A 22-22P MS3102A 20-4P
Current A (50/60 Hz) 29.5 / 28.1 19.7 / 18.5 18.3 / 17.5 11.7 / 18.5 8.4 / 8.6
Adapted plug type MS3106B 22-22S MS3106B 20-4S
Suitable wire AWG #8 - #10 AWG #12 - #14

EBARA Corporation

4.3.2 Control Signal Wiring

Connect wires to the control connector for remote operation and remote monitoring.
Tables 4.4 and 4.5 and Figures 4.5 and 4.6 show the pin assignments.

Table 4.4 Receptacle Specifications

(Identical for all types)

Receptacle type 57FE-40500
Receptacle manufacturer DDK. Ltd.
Adapted plug type 57-30500
Suitable wire size AWG #24
Applied voltage for input *1 12V DC 20 mA
Contact capacity of output *2 50V DC/Maximum. 50 mA

*1. Apply voltage through pump.
*2. Apply voltage through equipment.

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1

26

5025

Figure 4.5 Control Signal Receptacle

(As seen from connecting side)

CAUTION

CAUTION

Do not wire vacant pins.

Apply 12V DC power for input signals on the pump side. Do
not apply this voltage on the equipment side.

The output signals are generated from an open collector
output. Apply a voltage not exceeding 50V DC on the
equipment side.

CAUTION

Wire all signals with the correct polarity
(SIGNAL/COMMON).

CAUTION

EBARA Corporation

When output signals energize an inductive load, such as a
relay, insert a diode (100V. 1A class) to absorb the back
electromotive force from surge currents.

(22)

1. Input signal

MP Start

BP Start

Reset

MP Stop

BP Stop

Connector

1 kOHM

Control

(+)

1

(+)

2

3

(+)

4

(+)

(+)

5

Dry

contact

Open

collector

2. Output Signal

MP Run

BP Run

Remote / Local

Casing Temp. (TRIP)

+

DC12V

11

12

14

26

27

50

6

(-)

Resistance

load

+
DC50V

Max. 50mA

+

DC50V

Max. 50mA

Inductive

load

+
DC50V

Max. 50mA

+
DC50V

Max. 50mA

Emergency Stop

Switch [ OPTION ]

EBARA Corporation

8

[ NOTE ]

1. Insert a diode (100V / 1A class) when

9

connecting inductive load by output signal.

2. Do not connect wiring to opened pins.
It may cause malfunction.

Figure 4.6 Control Signal Wiring

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Table 4.5 Pin Assignment (Do not connect wires to unassigned pins.)

No Signal name I/O Signal type No Signal name I/O Signal type

1 MP start IN N.O., Alternate *1 26 REMOTE/LOCAL OUT N.O., Alternate
2 BP start *6 IN N.O., Alternate *1 27 Casing Temp. (TRIP) OUT N.O., Alternate
3 ALARM/TRIP Reset IN N.O., Momentary *2 28 MP Motor Temp. (TRIP) OUT N.O., Alternate
4 MP Stop IN N.O., Momentary *1 29 BP Motor Temp. (TRIP) *6 OUT N.O., Alternate
5 BP Stop *6 IN N.O., Momentary *1 30 MP Overload (TRIP) OUT N.O., Alternate
6 COM of 1-5 IN 31 BP Overload (TIRP) *6 OUT N.O., Alternate
7 32 Phase Error (TRIP) OUT N.O., Alternate
8 Emergency Stop *3 OUT N.C., Alternate 33

9 COM of 8 OUT 34 Water Leak (TRIP) *3 OUT N.O., Alternate
10 35 Exhaust Press. (TRIP) *3 OUT N.O., Alternate
11 MP Operation OUT N.O., Alternate 36
12 BP Operation *6 OUT N.O., Alternate 37 Water Flow (ALARM) *4 OUT N.O., Alternate
13 38 Sealing N2 Flow (ALARM) *4 OUT N.O., Alternate
14 COM of 11-12 OUT 39
15 40 Casing Temp. (ALARM) OUT N.O., Alternate
16 41 MP Current (ALARM) OUT N.O., Alternate
17 42 BP Current (ALARM) *6 OUT N.O., Alternate
18 43 Oil Level (ALARM) OUT N.O., Alternate
19 TRIP/Collective OUT N.C., Alternate 44
20 COM of 19 OUT 45 Bearing Temp. (ALARM) *6 OUT N.O., Alternate
21 46
22 ALARM/Collective OUT N.C., Alternate 47
23 COM of 22 OUT 48
24 49
25 50 COM of 26-45 OUT

Dilut. N

Flow (ALARM) *4 *5

2

OUT N.O., Alternate

MP = Main Pump, BP = Booster Pump.

Models A25S, A10S, A07V do not have a BP.

[NOTE]

*1 Dipswitch No. 5 selects external start / stop signal type.
Off : Alternate signal (Use only Pins 1 and 2.)
On : Pulse signal (Use Pins 1 and 2 for start and Pins 4 and 5 for stop,
Change Pins 1 and 2 to momentary signals with Dipswitch No. 5.)
In remote mode, select pump operation “according to signal” or “automatically stop” with

Dipswitch No.4.

Use Dipswitch No.8 to configure remote BP operation as “automatic” or “according to

signal.”

*2 Input signal duration for Pin No. 3 (ALARM / TRIP Reset) and Pins No. 1, 2, 4, and 5

(Momentary Start / Stop) is 200ms.

*3 Pins No. 8 (Emergency Stop Switch), 34 (Water Leakage), and 35 (Exhaust Pressure)

are for options. Pin No. 8 (Emergency Stop Switch) output remains OFF until the switch
is closed and a RESET signal is entered.

*4 Dipswitch No.2 selects observation of cooling water and N

“operating period only.”

EBARA Corporation

gas flow as “always” or

2

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*5 When Dipswitch No. 7 is OFF (Normal Mode), a decrease in dilution N

flow will cause

2

an output on Pin No. 39. When Dipswitch No. 7 is ON (Dilution 0 Mode), this same
output on Pin 39 indicates that the dilution N

selector valve is open.

2

*6 Pins No. 2 (BP Start), 5 (BP Stop), 12 (BP Operation), 29 (BP Motor Temp.),
31 (BP Overload), 42 (BP Current) apply to Models A70W and A30W.
Only Model A07V uses Pin No. 45 (Bearing Temperature).

CAUTION

CAUTION

Do not wire vacant pins.

Apply 12V DC power for input signals on the pump side. Do
not apply this voltage on the equipment side.

The output signals are generated from an open collector
output. Apply a voltage not exceeding 50V DC on the
equipment side.

CAUTION

Wire all signals with the correct polarity
(SIGNAL/COMMON).

CAUTION

When output signals energize an inductive load, such as a
relay, insert a diode (100V. 1A class) to absorb the back
electromotive force from surge currents.

4.4 Operation Mode

Set the dipswitches on the control panel in accordance with the conditions (Table 4.6).

Table 4.6 Dipswitch Settings

No. Mode Off On

1 RS232C Data Length 7bit 8bit
2 Service observation Always Operating period only
3 Buzzer Not used Used
4 Operation switched to remote According to signal Automatically stop
5 Remote start signal Alternating Momentary (Pulse)
6 ----- ----- ----­7 Dilution N2 With dilution Without dilution
8 BP operation Automatic According to signal

When using the RS232C communication port to monitor pump status, select a Data Length
of either 7 bits or 8 bits.
Dipswitch No. 2 configures observation of cooling water and N2 gas flow as either "always" or
"operating period only." Even when "operating period only" is selected, observation of
cooling water flow continues for 15 minutes after pump stops.
Dipswitch No. 3 selects Buzzer usage in ALARM / TRIP condition.
In remote mode, select pump operation “according to signal” or “automatically stop” with
Dipswitch No.4.

EBARA Corporation

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Dipswitch No. 5 sets configuration for remote START / STOP signals as either "alternate
(maintained) signal" or "pulse (momentary) signal."
Pins 1, 2, 4, and 5 pins become momentary signal ports when Dipswitch No. 5 is ON.
Dipswitch No. 7 sets dilution N2 usage.

For applications that neither deposit byproducts nor corrode the pump (e.g. load lock,
sputtering, SEM) the user may reduce nitrogen consumption by closing the dilution N

2

selector valve located on the side of the pump and turning on Dipswitch No. 7,
In dilution mode, the pump outputs a Dilution N2 Flow ALARM when dilution N2 flow
decreases; in zero dilution mode, the pump outputs a Dilution N2 Flow ALARM when
dilution N2 selector valve is open.

[NOTE] Select compatible settings for the dilution N2 selector valve and Dipswitch No. 7

together.

Set Dipswitch No. 8 ON to start and stop BP automatically based on inlet vacuum; set
Dipswitch No. 8 OFF to start and stop BP with a remote signal.

[NOTE] The user may toggle remote / local switch and use of the buzzer at any time. The

pump stores the setting of other switches at start up. Turn power OFF to change
the settings.

Default factory settings at time of shipment are: Data Length = 8 bits, always observation,
buzzer in use, according to signal, alternating signal, with dilution mode, BP automatic
operation, and Local operation. Refer to Figure 4.7.

Figure 4.7 Switch Settings

1

ON

EBARA Corporation

Dip
Switch

8

Rotary
Switch

Toggle

LOCAL

Switch

REMOTE

Power
LED

RS232C
Port

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5 Operation

WARNING

Following an Emergency Stop or TRIP (auto shut down), troubleshoot
the pump as described in Section 8 before restarting.

[NOTE]

These pumps are factory filled with lubrication oil.

5.1 Before Starting

Turn on the cooling water flow and check piping for water leaks.

CAUTION

Without sufficient cooling water, the pump temperature will rise,
which may cause rotor contact or other problems.

[NOTE] The pump unit has no cooling water valve.

Turn on the N

gas supply.

2

Check that the regulator attached to the pump is closed, i.e. the pressure adjustment knob is
fully counterclockwise. Open the main valve and check that there are no N2 gas leaks from
the pipe connections.
Slowly turn the pressure adjustment knob clockwise to set the pressure (gauge pressure) to

0.05 MPa. Then press the red stopper to lock the knob in position.

WARNING

Supply N2 gas to the exhaust piping when it is necessary to dilute
flammable or toxic gases down to safe concentration.

Set N2 flow rate appropriately to avoid problems such as oil

CAUTION

carryover, corrosion inside the pump and deposition of byproducts.

Operate dilution N2 selector valve, located on the side face of pump cover, in accord with the
dilution N2 mode setting of dipswitch.

Dipswitch No. 7
Selector Valve

[NOTE]

[NOTE]

N2 gas flow requires several seconds to stabilize after opening valve.

During regular operation, open dilution N2 gas selector valve except

ON OFF

CLOSED OPEN

for processes that are non-corrosive and do not produce reaction
byproducts.

EBARA Corporation

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Turn on power.
Turn on the ELB and ensure that the yellow LED (beside the dipswitches) lights. The LCD
controller counts down 10 seconds. Refer to Table 5.2 and Figure 5.1.

[NOTE] After turning on power, the instruments warm up for 10 seconds before the pump

will start.

Ensure cooling water flow is 3.5 L/min or more.
Readjust regulator so that dilution N

gas is within the range described below.

2

Table 5.1 Dilution N2 gas flow

A70W 20-24 Pa m3/s
A30W 15-19 Pa m3/s

A25S 14-17 Pa m3/s
A10S 14-17 Pa m3/s
A07V 12-15 Pa m3/s

Then ensure that pressure gauge indicates 0.04-0.07 MPa.
After setting, push the red stopper of knob to lock.
Under this condition, shaft seal N2 flow rate is 2.7-3.4 Pa m3/s. (Shaft seal N2 flow rate is
not shown on LCD.)
Check that LCD displays no ALARM/TRIP signal.
The motor current is indicated as "00.0 A" on LCD.
When LCD indicates an ALARM/TRIP signal or an abnormal symptom appears, take
necessary measures in accordance with Section 8.

[NOTE] ALARM/TRIP signal persists until entry of a RESET signal even if the causes are

remedied.
After taking necessary measures, either press the RESET switch on the LCD
controller or input RESET signal through the control connector.
When buzzer is in use, pressing BUZZER OFF mutes the buzzer despite an
ALARM/TRIP condition.

Open the valve on the exhaust piping before starting the pump.

If the system has an exhaust gas scrubber, open its inlet and outlet valves.

CAUTION

Operating pump with these valves closed will pressurize the
exhaust and overload the pump.

EBARA Corporation

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LED ( Green )

LED ( Red )

LED ( Orange )

Buzzer

B.P.RUN

M.P.RUN

LOCAL

( Liquid Crystal Display )

STOPSTART

LCD

DISP.

SELECT

RESET

Figure 5.1 LCD Controller

[Buttons] START： Start MP and BP

STOP： Start of MP and BP

DISP. SELECT： Change LCD indication

RESET： Reset ALARM and TRIP

BUZZER OFF： Mute buzzer in ALARM / TRIP

ALARM

TRIP

ERROR

BUZZER

OFF

Push Button

[LED] B.P. RUN： BP running

M.P. RUN： MP running

LOCAL： LOCAL mode

ALARM： ALARM condition

TRIP： TRIP condition

ERROR： Microprocessor malfunction

EBARA Corporation

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Table 5.2 LCD Controller Indication

Ｎo

ITEM INDICATION

1.1 Operating mode selection 1
(10 second count down)

1.2 Operating mode selection 2
(10 sec count down)

2 Motor current

& & & & & & &
U T Y : S T D R E M : S I G

& & & & & & & R U N : A L T
D I L : S T D B P : A T ＠

B P : # # . # A

％

＠

％

％

M P : # # . # A

3 Cooling water flow W A T E R F L O

W ％

ｉ n

％

％

4 Dilution N2 gas flow

(with dilution mode)

5 Dilution N2 gas flow

(without dilution mode)

6 Pump casing temperature

# # . # L / m
D I L . N 2 F L O W

# # . # P a m 3 / s

W / O D I L . N 2 M O D E
P U M P C A S I N G ％

# # # * C

7 Total operation time

O P E . T I M E ％
# # # # # h

8 ALARM / TRIP

$ $ $ $ $ : $ $ $ $ $ $ $ ％
$ $ $ $ $ $ $ $ $ $ $ $ $ $

" &&&&&&& " shows pump serial number.
" % " shows present number of ALARM / TRIP.
" @ " shows 10 second countdown after turning on power.
Mode selection contains items below.

UTY : Service observation REM : Operation switched to remote
RUN : Remote start signal DIL : Dilution N

2

BP : BP operation
Dilution N2 gas flow displays the amount of N2 gas excluding seal N2; therefore, it differs
from the N2 approximate flow rate in Table 3.1.
Total operation time displays the hours of operation after initialization at factory.
Upper row " $$$$$$ " describes cause of ALARM / TRIP.
Lower row " $$$$$$ " shows value of parameter that caused ALARM / TRIP.
Display defaults to No. 2 (Motor Current) when buttons on LCD controller are not operated
for one minute.
"DISP. SELECT" scrolls the display in order. It will display progressively all present
ALARM/TRIP’s.

EBARA Corporation

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5.2 Operation

REMOTE / LOCAL and USE OF BUZZER can be toggled at any time. Select properly
according to the working conditions.
If Dipswitch No. 4 is ON, pump automatically stops when changed to remote mode.

WARNING

CAUTION

WARNING

CAUTION

[NOTE]

The pump casing and exhaust piping become extremely hot during
operation and for some time after stopping.

Keep pump and exhaust piping away from contact with personnel and
flammable substances.

Do not remove the pump cover during operation.

When the production process leads to reaction byproducts in the
pump or when the process handles corrosive gases, do not stop the
pump until after at least 30 minutes after stopping the flow of process
gases.

Purge with N2 gas for one (1) hour or more after the pump stops to
remove the residual process gas inside the pump.

The pump will remain at a very high temperature even after it has
stopped. Leave the cooling water running for about one (1) hour after
shutdown.

Shutting off cooling water immediately after the pump stops causes a
pressure rise in the cooling water piping, which may cause a water
leak.

Do not pump process gases until the pump has run at least one hour.
If possible, wait four hours for the pump casing temperature to
stabilize before pumping process gases.

[NOTE]

In service observation mode “Always,” cooling water and dilution N2
ALARMs can occur when the pump is stopped.

[NOTE]

The pump will not start while an ALARM/TRIP signal remains active.
Pressing START button will bring STARTFAIL to the display.

EBARA Corporation

5.2.1 Local (Pump side) Operation

Start

Press controller START button.

MP (Main Pump) starts and MP RUN LED lights.

BP (Booster Pump) starts automatically, and BP RUN LED lights.

While pump is running, the default LCD display is motor current(s).

For other indications of pump condition, refer to Table 5.2.

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[NOTE]

The pump will not start while an ALARM/TRIP signal remains active.
Pressing START button will bring STARTFAIL to the display.

Stop

Press controller STOP button.

Both MP and BP stop and both RUN LED go out.

Motor current is indicated as "00.0 A.”

5.2.2 Remote (Distant) Operation

Start

[NOTE] External signal type must comply with dipswitch settings.

Input external MP START signal from control connector.

MP starts.

In BP automatic operation mode, BP starts and stops automatically based on the

pump inlet vacuum.

When operating BP by remote signal, input external BP START signal from control

connector only when inlet pressure is less than or equal to 4000 Pa.

Stop

[Alternating signal mode]

Turn MP START signal off, both MP and BP stop.

[Momentary (Pulse) signal mode]

Input external MP STOP signal, both MP and BP stop.

EBARA Corporation

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6 Maintenance and Overhaul

6.1 Routine Inspection

Check periodically that there is no ALARM signal on the LCD controller or remote output.
Any ALARM indicates that the pump is operating in abnormal condition.

Table 6.1 Typical Check Items

No. Item Sensor Interval(recommended)

１

Motor Current CT

2 N2 Gas Flow Flow sensor
3 Vibration / Noise -----

1 time/week

4 Lubrication oil Quantity Level switch
5 Cooling water flow Flow sensor
6 Pump casing Temp. T/C
7 Color of lubrication oil ----- 1 time/month

If any ALARM/TRIP occurs, take necessary measures according to Section 8.

WARNING

Switch off the power supply to the pump; interrupt the ELB or CB
and lockout power before you start maintenance.

WARNING

The pump and exhaust piping will remain at a high temperature
during operation and for a short time after the pump has stopped.

Avoid contact and keep flammable substances out of reach.

Do not remove the outer cover during operation.

[NOTE]

Even after clearing the cause of the ALARM/TRIP signal, the
display will persist until the RESET signal is entered. After you
have taken the remedial action, press the RESET button on the
controller or enter the RESET signal from the control signal
connector to reset the ALARM/TRIP status.

CAUTION

An ALARM signal will not stop the pump.
However, continuing pump operation in this condition may lead to a
TRIP signal or a serious breakdown. After completion of the next
wafer cycle, check the pump in accordance with the instructions of
Section 8.

CAUTION

In the REMOTE operating mode, when a TRIP signal has occurred,
interrupt the external start signal before beginning maintenance. If
the external ALTERNATE start signal is present, the pump will start
as soon as the TRIP is RESET.

EBARA Corporation

6.2 Piping Maintenance

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WARNING

Purge system with sufficient N2 gas before removing and cleaning the
vacuum lines and exhaust piping.

Prevent dispersal of flammable, toxic or dangerous materials and
guard against their contact with the human body.

Work only in locations with an emergency escape route.

WARNING

Check for gas leaks after installing and maintaining the piping.

Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air into
the pump

CAUTION

Dispose of process byproducts in strict accord with all local and
national environmental and safety regulations.

Follow the instructions below when carrying out maintenance work on the vacuum and
exhaust piping of the pump.

Before you remove and wash the piping, purge with a sufficient volume of N

gas.

2

On systems with an exhaust gas scrubber, interrupt N2 purge and close the inlet valve of the
scrubber before removing the piping.
Switch off the power supply.
After cleaning the piping, do not reconnect until it has dried completely.

6.3 Lubricant Oil

CAUTION

Do not start filling oil until the pump interior reaches atmospheric
pressure. During pump operation, the chamber containing the oil is
under vacuum. Removing the oil fill plug while the pump is running
will cause oil carryover and damage the pump.

CAUTION

A licensed industrial waste disposal dealer should dispose of waste
oil in accordance with Material Safety Data Sheet (Appendix 1).

Upon an OIL LEVEL LOW ALARM or whenever the lubricant oil needs replenishing, fill the oil
chamber and drain the oil that has collected in the secondary reservoir.

EBARA Corporation

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6.4 Spare (Maintenance) Parts List

Pump maintenance requires the following parts at customer site.

Table 6.2

1. Standard Consumable

Item Type EC Part No. ETI Part

FOMBLIN Y-L VAC 25/6

No.

BARRIERTA J100

PFPE oil

CER01-4002 927009

DEMNUM S-65
KRYTOX VPF 1525

2. Parts Recommended for Safe Operation

Item Type EC Part No. ETI Part

NW25 CER01-4746 980928

O-ring (Viton A)

NW40 CER01-4747 980927

G55 (For exhaust check

CER01-4402-2 923111

valve)

3. Parts Recommended for Quick Maintenance

Item Type EC Part No. ETI Part

No.

Exhaust check valve 32X80L CER01-4402 980083

4. Recommended Spare Parts (not needed for each pump)

No.

Item Type EC Part No. ETI Part

Oil level switch NOR. CLOSE CER90-6515 -----

Water flow sensor 20 L/min CER90-6018 942020

Pump gas flow sensor (seal) 3.4 Pam3/s CER90-6012

N2 flow sensor 84.4 Pam3/s CER90-6017 -----

T/C bolt T TYPE, M8 CER90-6035 913046

N2 gas pressure regulator R31-200-C121 CER01-4420 980086

(EC: EBARA CORPORATION; ETI: EBARA TECHNOLOGIES INCORPORATED)

EBARA Corporation

No.

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The pump enclosure panels carry the following labels. If a label should peel off or become
illegible, replace it as directed in the Warning Label Drawings.

Table 6.3 Labels

Label Name EC Part No. ETI Part No.

[DANGER] HAZARDOUS WEIGHT DANGER CER90-9193 322237

[WARNING] HAZARDOUS VOLTAGE WARNING CER90-9115 321868

[WARNING] HIGH TEMPERATURE WARNING CER90-9113 321866

[WARNING] HAZARDOUS MATERIAL WARNING CER90-9116 321869

[CAUTION] CHARGE MARK CER90-9112 321865

6.5 Overhaul

Properly trained personnel should perform overhaul work. Contact EBARA sales office or
overhaul service center.

EBARA Corporation

(36)

7 Removal and Transportation

WARNING

When a pump exhausts highly toxic gases such as arsenic and
mercury compounds, contact EBARA Corporation before you return
the pump.

CAUTION

In the interest of safety during the transportation, disassembly and
cleaning of the pump, take note of the gases that it has pumped.

[NOTE]

In the U.S., Department of Transportation regulations may apply to
the shipment of your pump. See Appendix 5.

To disconnect and transport the pump, proceed as follows.

Stop the pump and replace all gases inside the pump by purging them with N

gas.

2

Switch off the power supply to the pump; remove the power and signal wires.
After fully closing the N2 regulator and removing the N2 pipe, seal off the N2 purge port with a
sealing flange.
Remove the cooling water pipes.
Remove the vacuum and exhaust pipes and completely seal off the suction and exhaust
ports of the pump with a blind flange or similar seal. Seal off other process gas connection
points, such as the differential port, with a blind flange.
Tape the LCD controller, face down, to the pump‘s top cover.
Wrap the pump in a vinyl sheet.
Use the eyebolts provided on the pump for slinging the pump to load and unload. Fasten
eyebolts completely; turn in until flush with the seating surface. For sling, use a wire with a
length so that the slinging angle (that is, the angled subtended by the two wires) is 60° or
less.

[NOTE]: A07V has only one eyebolt.

DANGER

WARNING

Do not enter the zone underneath the suspended pump.

Only qualified personnel should lift the pump.

Ensure that the wire rope and crane used for lifting the pump are in
proper order and match the weight of the pump.

To prevent unequal weight distribution, suspend the pump with
symmetrically centered slinging angle.

CAUTION

To avoid oil leaks when lifting or transporting the pump, do not keep
it more than 10° off the horizontal longer than five minutes.

EBARA Corporation

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60° or less

LCD Controller

Figure 7.1

Route the sling to avoid damaging any options, such as an interface box, mounted on the
pump.
To transport an uncrated pump, lower the adjustment feet. Place a protective cloth around
the pump and use protective members between the outer cover and the tie down straps to
distribute the strap load.

EBARA Corporation

(38)

8 Troubleshooting

8.1 Troubleshooting (1) Basic Trouble

Abnormal symptom Check Item Corrective Action

Circuit breaker is activated.
(Leakage detector is on.)

Power LED does not come
on.

Display is abnormal.
MP does not start when

pressing START button.

MP does not start when
applying START signal.

BP does not start.

Abnormal noise.
Excessive vibration.

Vacuum pressure increase.

Interrupt Earth Leakage Breaker (ELB) or CB and lock out power

WARNING

before starting on wiring and maintenance work.
Do not switch on the power supply to the pump until work is

completed.

The pump casing and exhaust piping become extremely hot during

WARNING

operation and for some time after stopping.
Keep pump and exhaust piping away from contact with personnel and

flammable substances.
Do not remove the pump cover during operation.

Incorrect wiring Check wiring
Ground fault Replace or overhaul pump
Short circuit Replace or overhaul pump
No power supply to pump Check power supply
Connector is not connected Connect power connector
ELB is not mode ON Switch ELB ON
ELB is not mode ON Switch ELB ON Nothing appears on LCD.
Instruments are in failure Replace instruments
Mode is set in “Remote” Set switch to “Local” mode
Start-up conditions are not satisfied

(“STARTFAIL” is displayed)
Instruments are in failure Replace instruments
Mode is set in “Local” Set switch to “Remote” mode
Mode is set in “Alternate”

(Pump jogs)
Instruments are in failure Replace instruments
Leakage on vacuum piping Check piping
MP insufficient vacuum Replace or overhaul
BP start signal is not applied Apply BP start signal
Instrument failure Replace instruments
Adjuster foot is not lowered Properly set all adjuster feet
Cover is in contact with other items Remove objects from cover
Cover screws loose Tighten mounting screws
Pump part is damaged Replace or overhaul pump
Byproducts settled in piping Clean up piping
N2 pressure setting is high Set pressure for correct value
Leakage from vacuum piping Check piping
Byproducts settled in pump Replace or overhaul pump

Satisfy all start-up conditions

Apply “Alternate” start signal
Set to “Momentary” mode

WARNING

Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air into
the pump

EBARA Corporation

Check for gas leaks after installing and maintaining the piping.

8.2 Troubleshooting (2) ALARM

Display Symptom Check Item Corrective Action

ALARM: WATER
FLOW LOW ##.#

ALARM: SEAL N2
FLOW LOW

ALARM: DIL. N2
FLOW LOW ##.#
[w/ dilution mode]

ALARM: DIL. N2.
VALVE OPEN
[w/o dilution mode]

ALARM: BP MOTOR
CURRENT HIGH##.#

ALARM: MP MOTOR
CURRENT HIGH##.#

ALARM: CASING
TEMP HIGH ##.#

ALARM: BP-GEAR
OIL LEVEL LOW

ALARM: BP-MOTOR

Water flow
decreases.

Shaft seal. N

flow

2

decreases.

Dilution N

. flow

2

decreases.
*1
[w/ dilution mode]

Dilution N

valve

2

open.
*2
[w/o dilution mode]

BP motor current
rises.

MP motor current
rises.

Casing temperature
rises.

BP gear side oil level
low

BP motor side oil

Coupler is disconnected Connect coupler
Pressure is not sufficient Apply sufficient pressure
Source valve is closed Open valve
Water piping is clogged Clean or replace piping
Water piping leaks Check the fittings
Instruments are in failure Replace instruments
Inlet/Outlet is reverse

Connect correctly

(Flow rate 0L/min)
N2 port is not connected Connect N2 pipe fitting
Primary pressure is

Apply sufficient pressure

insufficient
Regulator setting low Increase pressure setting
N2 piping is clogged Replace N2 piping
N2 piping leaks Check the fittings
Instruments are in failure Replace instruments
Selector valve is closed *1 Open the valve

Set to zero dilution mode”

Selector valve is open *2 Close the valve

Set to “standard mode”

Exhaust pressure rises Check exhaust piping
Rotor is in contact

(Byproducts)
(Substance plunge)
(Cooling water decrease)
(Gear or bearing damage)

Replace or overhaul pump
Replace or overhaul pump
Increase water slowly

Replace or overhaul pump
Instruments are in failure Replace instruments
Power supply failure Check power supply
Exhaust pressure rise Check exhaust piping
Duct ventilation is

Ventilate sufficiently
insufficient

Byproduct is clogged Replace or overhaul pump
Cooling water decrease Increase water slowly
Decrease of oil Fill the lubricating oil
Insufficient sealing N2 Check sealing N2 ALARM
Pump is inclined Level the pump with

adjuster feet

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EBARA Corporation

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Display Symptom Check Item Corrective Action

OIL LEVEL LOW

ALARM: MP-GEAR
OIL LEVEL LOW

ALARM: MP-MOTOR
OIL LEVEL LOW

ALARM: OIL LEVEL
LOW

ALARM: DRV BRG
TEMP HIGH
ALARM: DRVN BRG
TEMP HIGH

TEMP HIGH

level low

MP gear side oil
level low

MP motor side oil
level low

Oil level low in oil
pan.
[A07V only]

Driving shaft brg
temp. rises. [A07V]
Driven shaft brg
temp. rises. [A07V]

Temperature in
pump cover rises.

Instruments are in failure Replace instruments

Cooling water decrease Increase water slowly
Decrease of grease Change the grease
Bearing is damaged Replace or overhaul pump

Duct ventilation not sufficient Ventilate sufficiently ALARM: PUMP BOX
Cooling water decrease Increase water

After taking corrective action, input RESET signal or push RESET button. The pump will
not RESET while the cause of the ALARM remains.

WARNING

Interrupt Earth Leakage Breaker (ELB) or CB and lock out power
before starting on wiring and maintenance work.

Do not switch on the power supply to the pump until work is
completed.

WARNING

The pump casing and exhaust piping become extremely hot during
operation and for some time after stopping.

Keep pump and exhaust piping away from contact with personnel and
flammable substances.

Do not remove the pump cover during operation.

WARNING

Check for gas leaks after installing and maintaining the piping.

Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air into
the pump

EBARA Corporation

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8.3 Troubleshooting (3) TRIP

Display Symptom Check Item Corrective Action

TRIP: CASING
TEMP H.HIGH

TEMP HIGH
TRIP: MP MOTOR
TEMP HIGH

TRIP: BP MOTOR
OVERLOAD

TRIP: MP MOTOR
OVERLOAD

TRIP:
PHASE ERROR

TRIP: BP MOTOR
NO CURRENT
TRIP: MP MOTOR
NO CURRENT

TRIP: STARTFAIL
ALARM/TRIP EXIST

Pump casing temp.
rises.

BP motor temp.
rises.
MP motor temp.
rises.

BP current rises.
(thermal relay trip)

MP current rises.
(thermal relay trip)

Open phase Incorrect wiring Check power supply
BP motor current value

is 0.
MP motor current value
is 0.

Start fault

Exhaust pressure rise Check exhaust piping
Cooling water decrease Increase water slowly
Byproduct clog Replace or overhaul pump
Duct ventilation insufficient Ventilate sufficiently
Cooling water decrease Increase water slowly TRIP: BP MOTOR
Motor is in failure Replace or overhaul pump

Exhaust pressure rise Check exhaust piping
Byproduct clog Replace or overhaul pump
Object ingestion Replace or overhaul pump
Instruments are in failure Replace instruments
Power supply failure Check power supply
Incorrect wiring Wire R/S/T/E correctly Negative phase
Instruments are in failure Replace instruments

Instruments are in failure Replace instruments

Starting in ALARM / TRIP
condition

Instruments are in failure Replace instruments

Satisfy all starting
conditions

After taking corrective action, input RESET signal or push RESET button. The pump will
not RESET while the cause of the TRIP remains. In remote operation mode, interrupt
external START signal before resetting.

WARNING

Interrupt Earth Leakage Breaker (ELB) or CB and lock out power
before starting on wiring and maintenance work.

Do not switch on the power supply to the pump until work is
completed.

WARNING

The pump casing and exhaust piping become extremely hot during
operation and for some time after stopping.

Keep pump and exhaust piping away from contact with personnel and
flammable substances.

Do not remove the pump cover during operation.

WARNING

Check for gas leaks after installing and maintaining the piping.

Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air into
the pump.

EBARA Corporation

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8.4 Troubleshooting (4) TRIP [Options]

Display Symptom Check Item Corrective Action

Tube fitting loose Tighten fittings TRIP:
Instruments are in failure Replace instruments
Exhaust valve is closed Check exhaust piping TRIP:
Instruments are in failure Replace instruments

Stop by emergency stop
button

Check that pump can be
operated and turn the
button head to reset

WATER LEAKAGE

BACK PRESS. HIGH

TRIP:
EMG. STOP SWITCH

Water leakage

Exhaust pressure
rises.
(0.1 MPa)

Emergency stop
switch

After taking corrective action, input RESET signal or push RESET button. The pump will
not RESET while the cause of the TRIP remains. In remote operation mode, interrupt
external START signal before resetting.

WARNING

WARNING

WARNING

Interrupt Earth Leakage Breaker (ELB) or CB and lock out power
before starting on wiring and maintenance work.

Do not switch on the power supply to the pump until work is
completed.

The pump casing and exhaust piping become extremely hot during
operation and for some time after stopping.

Keep pump and exhaust piping away from contact with personnel and
flammable substances.

Do not remove the pump cover during operation.

Check for gas leaks after installing and maintaining the piping.

Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air into
the pump

EBARA Corporation

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9 Inquiries

For all inquiries and queries in connections with any of the details given in this Operating
Instruction Manual or the pump in general, please contact EBARA Corporation directly with
pump model and serial number.

9.1 North America

EBARA TECHNOLOGIES, INC.

(1) Western Region CALIFORNIA

Headquarters
51 Main Avenue
Sacramento, CA 95838, U.S.A.
Phone: [phone] Fax: [phone]

Silicon Valley Operations
45 Plumeria
San Jose, CA 95134-2103, U.S.A.
Phone: [phone] Fax: [phone]

(2) Eastern Region CONNECTICUT

1 Parklawn Drive
Bethel, CT, 06801, U.S.A.
Phone: [phone] Fax: [phone]

(3) Southwest Region TEXAS

8201-6 E. Riverside Drive, Suite 600
Austin, TX 78744, U.S.A.
Phone: [phone] Fax: [phone]

EBARA Corporation

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9.2 Asia

EBARA Corporation

(1) Japan Precision Machinery Group

Nissay Aroma Square 5-37-1 Kamata
Ohta-Ku, Tokyo 144-8721 Japan
Phone: [phone]
Fax: [phone]

(2) Korea EBARA Precision Machinery Korea, Inc.

15 FL, Kangnam Bldg.
1321 Seocho-Dong, Seocho-Ku, Seoul, Korea
Phone: [phone]
Fax: [phone]

(3) Taiwan EBARA Densan (TED)

No. 7 Nan Yuen 2nd Road
Chung Li City, Tao Yuen Hsien, Taiwan
Phone: [phone]
Fax: [phone]

EBARA Precision Machinery Taiwan, Inc.
EBARA Corporation, Taipei Office
Room 1402 Chia Hsin Bldg., No. 96, Sec. 2
Chung Shan N. RD., Taipei Taiwan
Phone: [phone]
Fax: [phone]

(4) Singapore EBARA Engineering Singapore (E.E.S.)

No. 1 Tuas Link #2
Singapore, 638550
Phone: [phone]
Fax: [phone]

EBARA Corporation

9.3 Europe

(1) United Kingdom EBARA Corporation Scotland Branch

3 & 4 Adam Square-Brucefield Industrial Estate
Livingston, G-8West Lothian, EH54 9DE U.K.
Phone: [phone]
Fax: [phone]

(2) Germany EBARA Germany GmbH

Donaustabe 7, D-63452
Hanau, Germany
Phone: [phone]
Fax: 49-1618¥1-1876-40

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EBARA Corporation

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EBARA Corporation

Appendix 1

Material Safety Data Sheet Vacuum Pump Oil

INLAND VACUUM INDUSTRIES -- FOMBLIN Y-LVAC 25-6
MATERIAL SAFETY DATA SHEET
NSN: 915000F045542
Manufacturer's CAGE: 59149
Part No. Indicator: A
Part Number/Trade Name: FOMBLIN Y-LVAC 25/6
===========================================================================
General Information
===========================================================================
Company's Name: INLAND VACUUM INDUSTRIES INC
Company's Street: 35 HOWARD AVE
Company's P. O. Box: 373
Company's City: CHURCHVILLE
Company's State: NY
Company's Country: US
Company's Zip Code: 14428
Company's Emerg Ph #: 716-293-3330
Company's Info Ph #: 716-293-3330
Record No. For Safety Entry: 001
Tot Safety Entries This Stk#: 001
Status: SE
Date MSDS Prepared: 01OCT92
Safety Data Review Date: 08DEC95
Preparer's Company: INLAND VACUUM INDUSTRIES INC
Preparer's St Or P. O. Box: 35 HOWARD AVE
Preparer's City: CHURCHVILLE
Preparer's State: NY
Preparer's Zip Code: 14428
MSDS Serial Number: BYQMW
===========================================================================
Ingredients/Identity Information
===========================================================================
Proprietary: NO
Ingredient: 1-PROPENE 1,1,2,3,3,3-HEXAFLUORO-OXIDIZED, POLYMD. FOMBLIN Y
*95-4*
Ingredient Sequence Number: 01
NIOSH (RTECS) Number: 1008240PH
CAS Number: 69991-67-9
===========================================================================
Physical/Chemical Characteristics
===========================================================================
Appearance And Odor: CLEAR COLORLESS LIQUID W/NO ODOR
Boiling Point: >518F
Vapor Pressure (MM Hg/70 F): <0.01
Specific Gravity: 1.9
Solubility In Water: INSOLUBLE
Percent Volatiles By Volume: 0
===========================================================================
Fire and Explosion Hazard Data
===========================================================================
Flash Point: NONE
Special Fire Fighting Proc: KEEP CONTAINERS COOL BY SPRAYING W/WATER WHEN
EXPOSED TO FIRE, IF FLAMES HAVE REACHED THE PRODUCT CAUSING A POSSIBLE
DECOMPOSITON YIELDING, USE SCBA.
Unusual Fire And Expl Hazrds: NONE
===========================================================================

(I)

EBARA Corporation

(II)

Reactivity Data
===========================================================================
Stability: YES
Cond To Avoid (Stability): HEATING >554F, FIRE, HEAT SOURCES/HOT SURFACES
& OTHER IGNITION SOURCES
Materials To Avoid: STRONG/NON-AQUEOUS ALKALI & LEWIS ACIDS >212F.
Hazardous Decomp Products: FROM THERMAL DECOMPOSITION IN AIR: HYDROGEN
FLUORIDE, CARBONYL FLUORIDE
Hazardous Poly Occur: NO
===========================================================================
Health Hazard Data
===========================================================================
Route Of Entry - Inhalation: NO
Route Of Entry - Skin: NO
Route Of Entry - Ingestion: NO
Carcinogenicity - NTP: NO
Carcinogenicity - IARC: NO
Carcinogenicity - OSHA: NO
Explanation Carcinogenicity: NONE
Emergency/First Aid Proc: EYES: CLEAN & WASH W/WATER. SKIN: CLEAN & WASH
W/WATER & SOAP. INGESTION: INDUCE VOMITING. OBTAIN MEDICAL ATTENTION IN ALL
CASES.
===========================================================================
Precautions for Safe Handling and Use
===========================================================================
Steps If Matl Released/Spill: ELIMINATE FREE FLAMES FROM THE AREA. STOP
LEAK & ABSORB THE LIQUID W/SAND/OTHER ABSORBENTS & SEND TO DISPOSAL.
Waste Disposal Method: LANDFILL/DISPOSE OF IN ACCORDANCE W/LOCAL, STATE &
FEDERAL REGULATIONS/DESTROY BY USING HIGH TEMPERATURE INCINEATOR DESIGNED
TO BURN FLUORINE CONTAINING MATERIALS.
Precautions-Handling/Storing: FOR PACKAGING & TRANSPORT, USE EITHER
BOTTLES/DRUMS OF GLASS/POLYETHYLENE. DON'T STORE NEAR FLAMMABLE/EXPLOSIVE
MATERIALS.
Other Precautions: KEEP AWAY FROM FIRE, HEAT SOURCES/HOT SURFACES. DON'T
SMOKE IN WORKING AREAS. AVOID CONTAMINATION OF SMOKING PRODUCTS.
===========================================================================
Control Measures
===========================================================================
Respiratory Protection: UNNECESSARY
Protective Gloves: NOT REQUIRED
Eye Protection: NOT REQUIRED
Other Protective Equipment: NOT REQUIRED, FOLLOW INTERNAL AREA
REQUIREMENTS.
===========================================================================
Transportation Data
===========================================================================
Disposal Data
===========================================================================
Label Data
===========================================================================
Label Required: YES
Label Status: G
Common Name: FOMBLIN Y-LVAC 25/6
Special Hazard Precautions: N/K N/K
Label Name: INLAND VACUUM INDUSTRIES INC
Label Street: 35 HOWARD AVE
Label P.O. Box: 373
Label City: CHURCHVILLE
Label State: NY
Label Zip Code: 14428

EBARA Corporation

Label Country: US
Label Emergency Number: 716-293-3330

(III)

EBARA Corporation

(IV)

Appendix 2

Safety Interlocks

In compliance with SEMI S2, Safety Guidelines for Semiconductor Manufacturing Equipment,
EBARA A Dry Vacuum pumps include a set of safety interlocks, which shut down the pump
upon detecting a violation of "safe" condition.

The following interlocks are standard equipment on all A Series Pumps:
Emergency Off (EMO): A manually activated button breaks a low-voltage control circuit that,
in turn, interrupts line power. Restarting the pump(s) requires a manual reset of the
twist-lock button. Design implementation of this important interlock can take diverse forms
based on process tool specifications and fab electrical distribution. Typical variations
include:
Pump-only EMO: A button, mounted on or near the pump, controls activating power to the
pump motor starter relay(s). Activation interrupts all electrical energy beyond the pump
control panel.
Tool EMO: A button, included in an interface panel, connects in series (“daisy chain”) with a
set of EMO buttons. Activating any of the buttons de-energizes contactor coils in the tool
distribution panel and interrupts power to the process tool and its ancillary equipment,
including the pump(s).
Gang EMO: A button, mounted near a set of pumps, controls power to the coil of a contactor
feeding a distribution panel. Activation cuts power to the entire panel.

Nitrogen Flow Low

A flow sensor trips when nitrogen supply to the pump (oil bearing(s) and inter-stage injection)
drops below its factory set point, opening the motor starter relay(s) and shutting down the
pump. Restoration of sufficient nitrogen flow permits restarting the pump.

Motor Overload

Motor overload relays protect the pump motor(s) from overheating due to extended current
draws in excess of the motor rating without tripping due to current transients such as start up
inrush current. Current (for each phase of line power) passing through a coil heats a
bimetallic element simulating motor heating under load. Under a persistent overload
condition, differential expansion of the bimetallic element opens a contact, which interrupts
the motor run circuit. A brief cool down interval permits restarting the pump.

Overcurrent Protection

The nearly instantaneous current rise from a line-to-line or line-to-ground short very rapidly
heats a thermal element in the circuit breaker, opening of a snap action switch and
interrupting all power to the electrical panel. Manual reset, which requires clearing the fault
condition, is necessary before restarting the pump. The circuit breaker also serves as a
lockable interrupt device for servicing the pump system.

EBARA Corporation

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The following interlocks are available as customer-specified options on A Series pumps for
toxic/flammable/pyrophoric applications:

Exhaust Purge (Dilution) Nitrogen Flow Low

A flow switch trips when nitrogen supply to the exhaust line drops below the field-adjustable
set point, opening the motor starter relay(s) and shutting down the pump. Restoration of
sufficient nitrogen flow permits restarting the pump. Users must determine appropriate flow
setting based on process gas types and amounts found in the pump exhaust stream.

Cabinet Exhaust Pressure High (Cabinet Exhaust Flow Low)

A "spool piece" mounted on the cabinet exhaust port and connected to the user's exhaust
system provides a mounting point and sense tap for a differential pressure switch, which
detects vacuum level in the exhaust line. If the pressure differential between the exhaust
vacuum and atmosphere (inside the pump enclosure) drops below the level required to
maintain sufficient exhaust flow, the normally-closed contacts in the pressure switch break,
opening the motor starter relay(s) and shutting down the pump. Because vacuum pumps
typically operate unattended, the interlock does not provide visual and audible alarms.
Restoration of differential pressure, and thereby cabinet exhaust flow, permits restarting the
pump. The spool also provides an auxiliary port (¼" tube) for connection of a vacuum
gauge/manometer or insertion of a hot-wire anemometer to measure exhaust parameters.

Additional Sensor (Optional)

Liquid Leak Detector: While not a safety interlock, a leak detector installed in the pump
serves the function of providing protection for personnel and equipment. A controller
senses resistance between two conductive elements in the base of the pump. The
presence of moisture reduces this resistance below a set point, and the controller ports a
signal to the pump CPU, stopping the pump.

Optional Features Note

Cabinet Exhaust Flow Sensor and Liquid Leak Sensor: Strict compliance with SEMI S2-93A
(and S2-0200) requires a cabinet exhaust flow interlock and a leak detector. Most
customers find incorporating these features, as needed, into facilities sensors is more
economical than including the capability with each individual pump. See Appendix 3.

EBARA Corporation

(VI)

Appendix 3

EBARA Dry Pumps and SEMI S2-93A (S2-0200)

In many cases, strict compliance with all aspects of the SEMI health and safety guidelines is
not the most desirable or economical way to meet the customer’s actual needs. ETI
technical staff can assist the user’s equipment engineers and safety professionals in
selecting the best practices for a specific installation. An appropriate guideline is evaluation
of the intended installed configuration of the system, including the pump, process tool,
power distribution and facilities. Items in question include:

Circuit Breaker

As a general practice equipment manufactured in the U.S. employs thermal-magnetic circuit
breakers for overcurrent protection. SEMI S2 further requires that these circuit breakers
have a minimum of 10,000 AIC (amp interrupt capacity). Many EBARA pumps, following
the common Japanese practice, employ an earth leakage breaker. Connecting the pump to
an appropriately rated circuit breaker in a distribution panel creates a system that meets the
SEMI requirements.

Lockout – Tagout

A nearby distribution panel may also be an appropriate location for the lockout-tagout
bracket.

Exhaust Dilution Flow Sensor

For pumps requiring auxiliary nitrogen in the exhaust, ETI offers a hardware-only, normally
open flow switch. However, the standard configuration is a firmware-driven shutdown,
executing through the pump processor and preserving an explanation of the trip.

Cabinet Exhaust Flow

Most customers prefer to monitor the condition of exhaust systems at the facility level rather
than the pump level.

Liquid Leak Detector

Because cooling water leaks inside a pump enclosure are extremely rare, most users find
that a liquid leak detector in each pump represents an unnecessary expense. Moisture
sensors on the subfab floor can detect a leak either from within a pump or from the utility
piping.

EBARA Dry Pumps and Ergonomics

SEMI S8-95, Safety Guidelines for Ergonomic/Human Factors Engineering of Semiconductor
Manufacturing Equipment, which is referenced in SEMI S2, specifies height ranges for

location of equipment controls and emergency off (EMO) buttons. The minimum height
exceeds the overall height of some EBARA A Series dry pumps.
Because vacuum pumps run unattended for long periods of time, EBARA's technical staff
believes that relocating the infrequently used controls is unwarranted. Should your vacuum
pump application require frequent manual operation of the controls, you may contact your
sales representative or the nearest EBARA office for assistance in mounting the controls at a
convenient height.

EBARA Corporation

(VII)

Appendix 4

Leak Check Procedure
NOTE: This general procedure is not a substitute for user's work instructions or leak detector

operations manual. Read and follow the instructions for your leak detection apparatus.

Perform leak check after initial system assembly and after any breach of the system for
maintenance.
Check pump down time (that is time to go from atmosphere to target pressure) of foreline to
confirm the absence of gross leaks.
For vacuum systems and process pump exhaust lines, pressurize the system with helium
and run the probe (“sniffer”) of a mass spectrometer leak detector around all joints, seals and
fittings.
Realign joints, tighten fittings, replace seals, etc.
Repeat as necessary to eliminate all leaks.
Disconnect helium supply and place system in operating condition.

EBARA Corporation

(VIII)

Appendix 5

Returning Pumps for Rebuild in U.S.

In the United States, returned pump shipments must conform to Department of
Transportation regulations:

• Hermetically seal contaminated equipment in two (2) heavy gauge polyethylene bags
or equivalent.

• Tag or label equipment stating the possible hazardous material and/or the
environment in which it was used.

• Obtain an RMA number from the EBARA Service department and post on all bags,
containers, and packing list along with a copy of the Environmental Health & Safety
Clearance Form.

Failure to observe these procedures may delay the processing and rebuilding of your pump.

EBARA Corporation

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EBARA Corporation