EBARA 80?25 Installation Operation & Maintenance

Global Innovators in Technology

Multi-Stage Dry Vacuum Pumps

Installation — Operation — Maintenance

Manual

Pump Model 80x25

EBARA Technologies, Incorporated
51 Main Avenue
Sacramento, CA 95838
[phone]; Fax: [phone]

Copyright @ 1993 by EBARA Technologies, Inc.

To Our Customers

Ebara Technologies, Inc., and its employees appreciate that you have selected an
Ebara Vacuum Pump for your needs. Our pump is manufactured with a great deal of
care and attention. This is to ensure the best performance, as well as safe and
satisfactorily operation; however, improper handling or operation could affect
performance, and could result in accidents, causing injury to personnel.

This manual has been prepared to illustrate how to properly install, operate, and
maintain the pump. A step-by-step guide is provided to make sure that the vacuum
pump system is put into place in accordance with manufacturer's recommendations.

We take this opportunity to thank you for the purchase of this dry vacuum pump, which
has been build and factory tested to meet the stringent Ebara quality and reliability
standards.

P/N 935003 Rev A

WARRANTY

EBARA Technologies, Incorporated

Products manufactured by Supplier are warranted against defects in materials and
workmanship for 12 months from date of initial operation or 15 months from date of
shipment by Supplier, whichever occur first. Supplier's liability under valid warranty
claims is limited, at the option of Supplier, to repair, replacement, or refund of an
equitable portion of the purchase price of the Product. Items expendable in normal use
are not covered by this warranty. All warranty replacement or repair of parts shall be
limited to equipment malfunctions which, in the sole opinion of Supplier, are due or
traceable to defects in original materials or workmanship. All obligations of Supplier
under this warranty shall cease in the event of abuse or accident. Parts are warranted
only for the remaining unexpected portion of the original warranty period applicable to
the parts repaired or replaced. After expiration of the applicable warranty period,
Customer shall be charged at the then current prices for parts, labor and transportation.

Supplier assumes no responsibilities for damages caused by improper installation or by
operation in violation of the equipment's rated operation condition, internal or otherwise,
or by improper handling or maintenance.

The Supplier is not liable for any special, indirect, incidental, or consequential damage.
Warranties given by vendors of equipment or proprietary components not manufactured

by Supplier but incorporated by Supplier into its Products shall be passed on to
Customer; provided that in no event shall Supplier have any liability for failure of such
vendor to perform on its warranty.

Except as stated herein, Supplier makes no warranty of merchantability or fitness

for purpose, express or implied (either in fact or be operation of law), statutory or
otherwise; and, except as stated herein, Supplier shall have no liability under any

warranty, express or implied (either in fact or by operation of law), statutory or
otherwise. Statements made by any person, including representatives of Supplier,
which are inconsistent or in conflict with the terms of this warranty shall not be binding
upon Supplier unless specified in writing and approved by an officer of Supplier.

WARRANTY (con't)

All claims under warranty must be made promptly after occurrence of circumstances
giving rise thereto, and must be received within the applicable warranty period by
Supplier or its authorized representative. Such claims should include Product serial
number, the date of shipment, and a full description of the circumstances giving rise to
the claim. Before any Products are returned for repair and /or adjustment, written
authorization from Supplier or its authorized representative for the return and
instructions as to how and where these Products should be returned must be obtained.
Any Product returned to Supplier for examination shall be sent prepaid via the
recommended means of transportation. Claims may be denied on items not promptly
reported and on any warranty claim on any item that has been altered or has been
returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in
transit, notwithstanding any defect or nonconformity in the Product. In all cases
Supplier has responsibility for determining the cause and nature of failure, and
Supplier's determination with regard thereto shall be final.

If it is found that Supplier's Product has been returned without cause and is still
serviceable, Customer will be notified and the Product returned at Customer's expense;
in addition, a charge for testing and examination may be made on Products so
returned.

No allowance shall be made for repairs or alterations made by others without the
Supplier's written consent or approval. If repairs or alterations are attempted without
the Supplier's consent, the Supplier's warranty is void.

If in the Supplier's opinion, repairs have to be effected at the Customer's plant site, local
labor shall be placed at the disposal of the Supplier's representative by the Customer,
free of charge to the Supplier. It may also be necessary to supply lifting and hoisting
equipment of sufficient capacity upon request of the Supplier's representative, at no
cost to Supplier.

Defective parts replaced by the Supplier become the property of the Supplier.
Preventive maintenance shall be performed by Customer at regular intervals dependent

on process severity and hours of operation.

Record of changes

Rev. Date Pag

e

A 12/12/97 New Release per

Position Contents Reason

ECO 2905

EBARA Multi-Stage Dry Vacuum Pumps Table of Contents

1.0 Safety...................................................................................................................1

1.1 User Obligations to Safety.........................................................................1

1.1.1 Electrical Grounding........................................................................ 1

1.1.2 Exhaust Venting..............................................................................1

1.2 Safety Labels.............................................................................................1

1.3 Hazard Icons..............................................................................................2

2.0 Product Overview................................................................................................. 4

2.1 Summary of Requirements........................................................................4

2.1.1 Nitrogen Flow..................................................................................4

2.1.2 Cooling Water.................................................................................4

2.1.3 Lubricating Fluid.............................................................................. 4

2.1.4 Pump Overhaul...............................................................................5

2.2 80X25 ........................................................................................................ 7

2.2.1 80x25 Specifications....................................................................... 7

2.2.2 80x25, Side View............................................................................8

2.2.3 80x25, Gear End.............................................................................9

2.2.4 80x25, Motor End.......................................................................... 10

2.2.5 80x25, Top View...........................................................................11

3.0 Installation.......................................................................................................... 12

3.1 Unpacking and Initial Positioning ............................................................. 12

3.1.1 Pump Location..............................................................................12

3.1.2 Leveling Pads ...............................................................................12

3.1.3 Shipping Hardware........................................................................12

3.1.4 Lubricating Fluid Reservoirs.......................................................... 12

3.2 Vacuum Piping.........................................................................................13

3.3 Water Piping............................................................................................ 13

3.3.1 Cooling Water Requirements:....................................................... 14

3.4 Nitrogen Purge Piping.............................................................................. 14

3.4.1 Nitrogen Supply Requirements.....................................................14

3.5 Electrical Connections............................................................................. 15

3.5.1 Control Panel................................................................................ 15

3.6 Initial Check............................................................................................. 16

4.0 Operation............................................................................................................ 17

4.1 Safety Issues........................................................................................... 17

4.2 Pre-Start Check....................................................................................... 17

4.2.1 Initial Positioning........................................................................... 17

4.2.2 Lubricating Fluid Reservoirs.......................................................... 17

4.2.3 Vacuum Piping..............................................................................17

4.2.4 Cooling Water...............................................................................18

4.2.5 Nitrogen Purge..............................................................................18

4.3 Start-Up & Trial Run ................................................................................ 18

4.4 Auto Mode ............................................................................................... 19

4.5 Manual Operation.................................................................................... 19

5.0 Pump Maintenance ............................................................................................20

5.1 Safety Issues........................................................................................... 20

930601-P

i

EBARA Multi-Stage Dry Vacuum Pumps Table of Contents

5.2 Weekly Maintenance ............................................................................... 20

5.3 Other Periodic Maintenance.................................................................... 21

5.3.1 Lubricating Fluid Change..............................................................21

5.3.2 Complete Pump Overhaul............................................................. 21

5.4 Lubricating Fluid Level............................................................................. 21

5.4.1 Checking the Lubricating Fluid Level............................................ 22

5.4.2 Sight Glass Locations................................................................... 22

5.4.3 Checking for Discoloration............................................................ 22

5.4.4 Refilling or Replacing the Lubricating Fluid................................... 23

5.4.5 Changing the Lubricating Fluid .....................................................23

5.4.6 Replenishing the Lubricating Fluid................................................24

5.4.7 Cleaning the Sight Glass...............................................................25

5.5 Vibrations and Noise................................................................................26

5.6 Motor Current...........................................................................................26

5.7 Nitrogen Purge Flow................................................................................27

5.7.1 Nitrogen Supply Requirements.....................................................27

5.8 Cooling Water Flow Rate.........................................................................27

5.8.1 Cooling Water Requirements........................................................ 27

5.9 Ultimate Pressure.................................................................................... 28

5.10 Cooler Inspection and Cleaning...............................................................28

5.10.1Overview....................................................................................... 29

5.10.2Single Pass Cooler Inspection Procedure..................................... 31

5.10.3Single Pass Cooler Cleaning Procedure....................................... 32

5.10.4U-Tube Cooler Cleaning Procedure.............................................. 35

5.10.5Cooler Cleaning and Inspection Form...........................................39

5.11 Leak-Checking the Pump ........................................................................ 39

5.12 Sublimator Cleaning ................................................................................ 40

5.12.1Removing the Sublimator.............................................................. 40

5.12.2Reinstalling the Sublimator ........................................................... 40

5.13 Consumables and Spares List.................................................................41

6.0 Troubleshooting.................................................................................................. 42

6.1 Possible Problems / Suggested Solutions............................................... 42

6.2 Service Centers....................................................................................... 45

6.2.1 USA 45

6.2.2 EUROPE....................................................................................... 46

6.2.3 ASIA/PACIFIC RIM....................................................................... 46

7.0 Attachments .......................................................................................................48

ii

930601-P

EBARA Multi-Stage Dry Vacuum Pumps Safety

1.0 Safety

General safety guidelines:

• Always comply with all safety labels and hazard icons.

• Never disable any interlocks.

• Never take short-cuts.

• Only qualified personnel should be allowed to operate or perform maintenance

on this equipment.

1.1 User Obligations to Safety

This equipment is designed with safety features to protect operators and service
personnel from harm and to protect the equipment from damage. It is important that
the customer ensure that all safety procedures are followed and that all safety features
are maintained in proper operating condition. It is the user’s responsibility to operate all
equipment according to the recommended procedures, and to maintain safe operating
conditions at all times. Ebara Technologies, Inc., assumes no liability for personal
injury or for damage to equipment resulting from the improper operation or service of
the equipment.

1.1.1 Electrical Grounding

All electrical connections must be properly grounded in accordance with equipment
specifications and in compliance with all applicable codes and ordinances.

1.1.2 Exhaust Venting

The customer is responsible for the proper venting of equipment exhaust systems in
compliance with all applicable codes and ordinances.

1.2 Safety Labels

Safety labels and hazard icons appear throughout this manual and on the equipment
itself. Their purpose is to alert personnel to areas requiring specific attention. The
information contained in the following sections is a summary of the related safety labels
and hazard icons.

Personnel should be alert to four safety labels. They are identified by the following
symbols:

Danger Label

!

DANGER

Danger labels signify potentially lethal situations. They are generally used when failure
to observe instructions or precautions could result in death. Potential exposure to high
electrical current or to poisonous gases are examples of where a Danger label would
appear.

Warning Label

930601-P 1

EBARA Multi-Stage Dry Vacuum Pumps Safety

!

WARNING

Warning notices signify situations involving potential bodily injury. They are generally
used when failure to observe instructions or precautions could result in severe injury or,
possibly, death. Potential exposure to extreme heat or cold, or mechanical dangers are
examples of where a Warning label would appear.

Caution Label

!

CAUTION

Caution notices signify situations where failure to observe instructions or precautions
could result in significant damage to equipment or facilities. Potential damage due to
failure to maintain proper oil level is an example of where a Caution label would appear.

Safety Instructions

SAFETY
INST RU CT IONS

Safety Instruction notices provide specific instructions about avoiding or preventing a
hazardous situation. They give information about safety precautions to be taken, or
special equipment needed, to accomplish the task safely. Safety Instructions are
normally preceded with a Danger, Warning, or Caution label.

1.3 Hazard Icons

The following are examples of the hazard icons used throughout this manual.
Electric Shock

!

DANGER

This icon indicates potential electrical shock. Danger indicates that potential loss of life
could occur.

High Pressure

!

WARNING

This icon indicates potential harm from a release of high pressure. Warning indicates
that severe injury could occur.

930601-P 2

EBARA Multi-Stage Dry Vacuum Pumps Safety

Toxic Fumes

!

DANGER

This icon indicates the possible presence of toxic fumes, gasses, or particles. Danger
indicates that potential loss of life could occur.

Explosion

!

WARNING

This icon indicates potential harm from explosion. Warning indicates that severe injury
could occur.

Extreme Heat

!

WARNING

This icon indicates potential harm due to extreme heat. Warning indicates that severe
injury could occur.

Mechanical Damage

!

CAUTION

This icon indicates potential mechanical damage. Caution indicates that damage to
equipment or facilities cou ld occur.

Flying Particles

!

WARNING

This icon indicates potential hazard from flying particles and that safety glasses should
be worn. Warning indicates that severe injury could occur.

Caustic Chemicals

!

WARNING

This icon indicates potential hazard caustic chemicals. Warning indicates that severe
injury could occur.

930601-P 3

EBARA Multi-Stage Dry Vacuum Pumps Overview

2.0 Product Overview

!

NOTICE

The descriptions and instructions included in this manual are for a typical pump
installation. Documentation specific to this pump installation has been included
in the Attachments section. This section is located at the back of the manual.
Please refer to the Attachments section for installation-specific information
before attempting to operate this system.

!

NOTICE

The entire manual should be reviewed thoroughly before operating the pump.
This section is presented as an overview only. This section is not meant as a
substitute for the other sections of this manual.

2.1 Summary of Requirements

2.1.1 Nitrogen Flow

Nitrogen flow serves two purposes: (1) sealing and (2) dilution. Needle valves are
preset at the factory and should not be adjusted.

General Settings: Flow meter wide open. Flow will stabilize around 5-8 lpm.

2.1.2 Cooling Water

The purpose of the cooling water is to cool motors, gears, and gas coolers (interstage
coolers). Pressure must be less than 4 kgf/cm2 (60 psi). The required differential
pressure across the cooling water inlet-to-outlet is 1-2 kgf/cm2 (14-28 psi). The required
flow rate is 5-8 lpm. Only 1 lpm of the total 5-8 lpm flow is diverted to the intercoolers.
The reason for this is to prevent chemical build-up in the coolers due to excessive
cooling.

If the cooling water is restricted for any length of time with the pump(s) running, the rear
pumps could overheat and seize. All pumps are designed to shut down if the cooling
water flow drops below 3-4 lpm (after a 3-minute time delay). Normal operating
temperature is process and pump condition dependent.

2.1.3 Lubricating Fluid

Ebara dry pumps use only perfluorinated polyether (PFPE) fluid to lubricate the pump's
bearings and gears. This fluid is non-flammable and inert. This is the lubricating fluid
referred to throughout the manual.

930601-P 4

EBARA Multi-Stage Dry Vacuum Pumps Overview

!

CAUTION

It is very important that the lubricating fluid is maintained at the proper level.
Failure to do so could result in severe damage to the pump.

!

CAUTION

When changing or replenishing lubricating fluid, be sure to stop the pump and
allow the pump to return to atmospheric pressure. Because the lubricating fluid
reservoir is under vacuum, the pump can be severely damaged if the lubricating
fluid port is removed while the pump is in operation, or not at atmosphere.

!

CAUTION

Before attempting to add any lubricating fluid into the pump, it is imperative that
the secondary reservoirs are drained first. Failure to do so could result in
lubricating fluid being forced into the vacuum area of the pump.

NOTICE

!

Use Krytox 1525, Fomblin Y-LVAC 25/6, Barrierta J100.
Previously specified Krytox 1514, Fomblin Y-LVAC 16/6, Barrierta J60 may be
used if supplied with pump.

There are four lubricating fluid reservoirs on each pump module: Two primary, and two
secondary reservoirs. A secondary lubricating fluid reservoir is provided for each pump
for each primary lubricating fluid reservoir. Over a period of time, a small amount of
lubricating fluid may migrate from the primary to the secondary reservoirs.

All primary reservoirs must be filled to the upper limit line in the sight glass. Do not
overfill. All secondary reservoirs should always be drained before lubricating fluid is
added or changed in the primary reservoirs. The pump must be off and at
atmosphere before lubricating fluid can be added or changed. If lubricating fluid is
not drained from the secondary reservoirs, lubricating fluid could eventually be forced
into the vacuum chamber of the pump.

Occasionally process gasses may discolor the lubricating fluid sight glass, making it
difficult to read lubricating fluid levels. The sight glass can be removed and cleaned
whenever the lubricating fluid is being changed.

2.1.4 Pump Overhaul

930601-P 5

EBARA Multi-Stage Dry Vacuum Pumps Overview

Depending on the process, a complete pump overhaul is recommended every 1-2 years
as a means of ensuring trouble-free performance. During overhaul service, all
bearings, labyrinth seal rings, and O-rings are replaced; coolers are cleaned or
exchanged, and the pump internals area cleaned, wet bead finished and vacuum
baked. The overhaul requires 1-2 weeks to complete, not including shipping to and
from the service center. Exchange pumps are available upon request. Contact your
Ebara representative for further details.

930601-P 6

EBARA Multi-Stage Dry Vacuum Pumps Overview

2.2 80X25

This pump consists of two pump modules. Process Flow: Three stages in the fore
pump, and three stages, with intercoolers, in the rear pump.
Ultimate pressure: 4x10

2.2.1 80x25 Specifications

Typical Configuration –Refer to Attachments for Specific Information

-3

Torr.

MODEL: 80X25

PUMPS:

ULTIMATE PRESSURE:

PUMP SPEED:

M
O

T
O
R

Flanging

C

W

O

A

O

T

L

E

I

R

N
G

N

2

P
U
R
G

E

POWER:

CURRENT

FULL LOAD:

VOLTAGE:

RPM:

INLET:

EXHAUST:

INLET:

OUTLET:

PRESSURE:

QUANTITY:

INLET:

PRESSURE

PRIMARY:

SECONDARY:

QUANTITY:

60 Hz

FOREPUMP

-3

3 X10

8,400 lpm / 297 cfm

2.2 kW

11.0 Amps.

3460

< 4 kgf/cm

5 to 8 slpm (0.2 - 0.3 cfm) W/O Exhaust Gas Dilution

Torr

17.7 Amps.

208 VAC

3430

3/8” NPT Female
3/8” NPT Female

2

(60 psi) Differential: 1-2 kgf/cm2 (14-28 psi)

5 to 8 lpm (1.3 - 2.1 gpm)

1/4" Tube Connection

1-7 kgf/cm

1 kgf/cm

FOREPUMPREARPUMP

3 X10

7,000 lpm / 247 cfm

2.2 kW

12.2 Amps. 19.4 Amps.
200 VAC

2880

ISO 80
NW 40

2

(14-100 psi)

2

(14 psi)

50 Hz

REARPUMP

-3

Torr

3.7 kW3.7 kW

2880

LUBRICATING FLUID:

WEIGHT (APPROX.):

REMARKS:

EBARA

930601-P 7

0.4 L (13.5 oz.)

450 kg (990 lbs)

TECHNO LOGIES, INC.

EBARA Multi-Stage Dry Vacuum Pumps Overview

2.2.2 80x25, Side View

Typical Configuration – Refer to Attachments for Specific Information.

930601-P 8

EBARA Multi-Stage Dry Vacuum Pumps Overview

2.2.3 80x25, Gear End

Typical Configuration – Refer to Attachments for Specific Information.

930601-P 9

EBARA Multi-Stage Dry Vacuum Pumps Overview

2.2.4 80x25, Motor End

Typical Configuration – Refer to Attachments for Specific Information.

930601-P 10

EBARA Multi-Stage Dry Vacuum Pumps Overview

2.2.5 80x25, Top View

Typical Configuration – Refer to Attachments for Specific Information.

930601-P 11

EBARA Multi-Stage Dry Vacuum Pumps Installation

3.0 Installation

!

NOTICE

The descriptions and instructions included in this manual are for a typical pump
installation. Documentation specific to this pump installation has been included
in the Attachments section. This section is located at the back of this manual.
Please refer to the Attachments section for installation-specific information.

3.1 Unpacking and Initial Positioning

• Carefully unpack the pump.

• Check for signs of possible damage in shipment.

• Notify the Ebara representative immediately if there are any signs of damage.

3.1.1 Pump Location

Locate the pump in an area that is:

• Free from excessive dust and moisture.

• Easily accessible to allow the pump to be serviced.

• Less than 40°C/104°F ambient temperature

3.1.2 Leveling Pads

• Extend the leveling pads and level the pump.
Each castor includes an adjustable pad that extends, making the pump immobile.
Adjust the pads to level the pump.
The pump must level. The castor provides an adjustment range of about 15 mm.

3.1.3 Shipping Hardware

On 6-stage pump packages, the upper pump (fore pump) is secured with four yellow
shipping brackets. These are used to prevent the rubber cushions from tearing away
during shipment. The brackets need to be disconnected from the pump and rotated
away from the pump.

For each bracket:

1. Remove the bolt securing the bracket to the pump (upper bolt).

2. Loosen the bolt securing the bracket to the frame.

3. Rotate the bracket away from the pump.

4. Tighten the bolt securing the bracket to the frame.

5. Reinstall the upper bolt into the pump housing.
If the pump is to be shipped for any reason, these brackets should be reconnected
before moving the pump.

3.1.4 Lubricating Fluid Reservoirs

930601-P 12

EBARA Multi-Stage Dry Vacuum Pumps Installation

!

CAUTION

Be sure to use the outer most fill plugs. On all pump models, a second plug is
located on the inner flange. This is not a fill plug and should not be removed to
add lubricating fluid to the pump.

• Fill the lubricating fluid re servoirs to the upper line on the mo tor sight glass

(approximately .2 liters per reservoir). Do not overfill.
The lubricating fluid reservoirs are located at both ends of each pump. The lubricating
fluid fill plugs are located on the top of the gear case and on the motor mounting flange.

!

NOTICE

Recommended lubricating fluids for Ebara pumps are Krytox 1525, Fomblin
Y-LVAC 25/6, Barrierta J100, or equivalent fluids.

3.2 Vacuum Piping

!

CAUTION

Because of the pump’s tight internal running clearances, care must be taken to
prevent any foreign particles from entering the pump.

• Always cover the inlet of the pump when it is not connected to the vacuum
piping. This is to prevent the entry of any foreign materials.

• Completely remove any welding scale or rust from the inside of all vacuum
piping.

• Make sure that no particulate matter is present inside the vacuum vessel.

• Properly support all vacuum piping. This minimizes loads on the pump inlet and

outlet flanges.

• Use of flexible bellows between the pump and the tool pump line will further
minimize the transmission of vibrations.

• Use of a screen filter before the pump inlet is recommended. Contact your
Ebara representative for more information.

3.3 Water Piping

A constant supply of water is required to cool the motors and pump module. If the
cooling water is restricted for any length of time with the pump running, the pump could
overheat and seize. All pumps are designed to shut down if the cooling water flow
drops below 3-4 lpm (after a 3-minute time delay).

To confirm the water flow shut-off setting:

930601-P 13

EBARA Multi-Stage Dry Vacuum Pumps Installation

1. Open the control panel.

2. Gradually reducing the flow of cooling water until the LED on the delay timer
comes on.

3. When the light comes on, stop reducing the flow and check the flow meter for
the actual flow.

4. Check this value against the setting. Adjust the as needed, and recheck again
by reducing the flow until the LED comes on.

!

CAUTION

Use industrial water for cooling. The use of de-ionized water may cause
corrosion of the pump internal parts. If de-ionized water is used, stainless steel
plumbing is required. Use of a filter before the pump inlet is recommended. If
the ambient temperature is expected to drop below freezing, and the pumps are
not expected to be run, blow out all water from the pumps with compressed air.

3.3.1 Cooling Water Requirements:

Flow: Motor and module: 5.0-8.0 lpm 1.3-2.1 gpm

Gas coolers: 0.8-1.2 lpm 0.21-0.32 gpm
Water flow less than 1 liter per minute to coolers will cause cooler corrosion.
Pressure (Operating) <4 kgf/cm2 60 psi
Inlet - Outlet Differential 1.0-2.0 kgf/cm2 14-28 psi

Temperature (max) 30°C 86°F
Connections: 3/8: NPT Female

(See “50x20 Specifications”.)

3.4 Nitrogen Purge Piping

A Nitrogen gas purge is used for labyrinth seal purge and gas dilution. The flow rates to
the individual stages have been preset at Ebara by factory personnel and should not be
adjusted in the field.

3.4.1 Nitrogen Supply Requirements

Supply Pressure: 1.0-7.0 kgf/cm2 14-100 psi
Regulated Pressure: .9-1.1 kgf/cm2 14-21 psi
Connections: 1/4 inch tube
Flow: 5.0 - 8.0 lpm .2 - .3 cfm
Excluding exhaust gas dilution, if applicable. (Process & Pump Specific. See
Attachments in the back of the book.)

930601-P 14

EBARA Multi-Stage Dry Vacuum Pumps Installation

3.5 Electrical Connections

!

DANGER

All Equipment must be properly grounded.
Before attempting any repairs or adjustments to this equipment, be sure that the
power to the unit is disconnected.
The electrical installation should only be undertaken by properly trained
personnel.

• All electrical installations should be in accordance with local regulations, the
National Electric Code, and all other applicable codes and ordinances.

• All connections to and from the electrical supply must be with suitable
connectors.

3.5.1 Control Panel

Typical Description – varies with each pump installation.

The control panel is the main interface between the pump modules and in-house
system and electrical connections. The control panel contains relays and controls that
monitor the cooling water and nitrogen purge flow. Also available are outputs signals
from each of these controls for remote monitoring.

The standard Ebara control panels are for 208 volt, 3-phase, 4-wire service. A main
circuit breaker receives the incoming power conductors and provides over current
protection. The power to each motor is controlled by a contactor. An overload relay,
mounted to the contactor, senses when the motor is overloaded or when there is a
motor phase imbalance. When the rear pump overload relay (OL1) trips, the pump
stops. An ammeter for each motor is mounted on the cabinet door. This allows the
user to monitor the motor current.

Overload contactors–relays: MS1–OL1.
When cooling water flow is not sufficient, the water flow switch opens, dropping out
relay 69X1. A NC 69X1 contact closes, which energizes 69T, a 3-minute timer. If the
water flow is still not restored in this time, 69T times out. This stops the pump motor.
There are indicator lights on the control panel for the following conditions:
AC power supplied to the unit
Pump running
Pump overload
Fore pump overload
Low cooling water
There are two signals available that can be used on the customer’s control system.
These are relay contacts and are connected to the following terminals:
C1-C-2 Fore Pump Running (Closed when running)
C1-C3 Cooling Water Failure (Open when water failure)

930601-P 15

EBARA Multi-Stage Dry Vacuum Pumps Installation

The pump may be started either locally (Manual) or remotely (Auto). The Auto/Manual
switch is located inside the control panel. In Manual mode, the pump is started and
stopped by pressing the ON or OFF buttons on the front of the control panel. In the
auto mode, power from a remote source is supplied to terminals B1 and B2. This
energizes the 1X relay, which allows the pump to run. Or, a relay contact can be
connected to terminals D1 and D2. When the relay contact is crossed, the pump will
run; when the relay contact is open, the pump will stop.

3.6 Initial Check

• Check the cooling water and nitrogen flows for correct settings.

• Check that the primary lubricating fluid reservoirs have been filled with lubricating

fluid (to the upper limit line).

• Blank off the inlet.

• Turn the power to the system on.

• Momentarily start each pump to verify correct direction of rotation (counter-

clockwise when viewed from the motor end).

If the direction of rotation is incorrect, the position of any two of the three power supply
conductors must be reversed.

930601-P 16

EBARA Multi-Stage Dry Vacuum Pumps Operation

4.0 Operation

4.1 Safety Issues

!

DANGER

!

WARNING

If any toxic and pyrophoric gasses are used, it is necessary to maintain a flow of
dilution Nitrogen to the dry pump. Failure to do so could result in fire or
explosion. Ebara dry pumps are equipped with provisions for diluting exhaust
gasses, and for purging seals and gear chambers with Nitrogen.

4.2 Pre-Start Check

!

NOTICE

The descriptions and instructions included in this manual are for a typical pump
installation. Documentation specific to this pump installation has been included
in the Attachments section. This section is located at the back of this manual.
Please refer to the Attachments section for installation-specific information.

4.2.1 Initial Positioning

• Shipping hardware repositioned.

• Suitable location for the pump.

• The pump is secure, level; the leveling pads are properly adjusted.

See "Pump Location".

4.2.2 Lubricating Fluid Reservoirs

• Ensure that all primary lubricating fluid reservoirs are filled to the upper limit line.

See " Lubricating Fluid Reservoirs".

4.2.3 Vacuum Piping

• Ensure that all vacuum fittings are tight and that the piping is supported properly,

930601-P 17

EBARA Multi-Stage Dry Vacuum Pumps Operation

where necessary.

See "Vacuum Piping".

4.2.4 Cooling Water

Turn on the water flow and check for proper flow and pressure.

• Check for any leaks.

• If equipped, set cooling flow through the coolers at 1 lpm.***

• Set total cooling water flow through the pump at 5-8 lpm.***

***These are interactive adjustments: adjusting one will affect the other. Be sure to
recheck both settings when making adjustments.
See "Cooling Water Requirements:".

4.2.5 Nitrogen Purge

Turn on the Nitrogen flow and check for proper flow and pressure.

• Set the pressure regulators on the pump to 1 kg/cm2 (14.2 psi).

• Open the flow meter control valve to wide open. Check for proper flow. Some

pumps are equipped with two Nitrogen flow meters. One meter is for the pump
module. The other meter is for exhaust gas dilution and is process dependent.

See "Nitrogen Supply Requirements".

4.3 Start-Up & Trial Run

!

NOTICE

It is preferred that the initial startup be performed by Ebara service personnel or
their authorized representative.

Proceed with the following only after having completed the Prestart Check.

1. Open all exhaust valves.

2. Close all inlet valves.

3. Energize the control panel: turn on the power at the main breaker.

4. Set the Auto/Manual switch to Manual to control the pump from the control
panel.

5. Momentarily "bump" the pump to check for proper motor rotation.

See "Initial Check"

6. Turn the pump on.

After 30 minutes of operation:

7. Record the base pressure.

This is the initial operating base pressure. Compare this with the pump specification (See

"80x25 Specifications".) If the pump fails to reach the spec. In the 30 minutes of
operation, allow another 30 minutes and recheck the pressure. Of the pump still fails to
reach the spec., contact your Ebara Service Center. (See "Service Centers".)

8. Record the running motor current for the pump.

930601-P 18

EBARA Multi-Stage Dry Vacuum Pumps Operation

This is the initial operation running motor current. Compare this with the following chart to

ensure that the pump is performing to specification. If the pump fails to reach the
spec., contact your Ebara Service Center. (See "Service Centers".)

!

CAUTION

Always set the overload to the rated motor current. The overload circuits allow for a

25% overcurrent.

Motor Current Specifications Chart (Amps)

Volts: 190 200 208 210 215 380 400 415 420

8.8 8.8 8.8 8.8 9.0 4.4 4.4 4.4 4.4

12.2 12.2 12.2 12.4 12.4 6.1 6.1 6.1 6.2

19.4 19.4 19.6 19.6 20.0 9.7 9.7 9.8 9.8

8.2 8.2 8.1 8.0 8.0 8.0 8.0 4.1 4.1 4.2 4.0 4.0 4.0 4.0

11.2 11.2 11.0 11.0 11.0 10.8 11.0 5.6 5.6 5.5 5.5 5.4 5.5 5.5

18.4 17.9 17.7 17.6 17.4 17.4 17.4 9.2 9.0 8.9 8.8 8.7 8.7 8.7

50Hz

60Hz

1.5kW

2.2kW

3.7kW

Volts: 190 200 208 210 215 220 230 380 400 415 420 440 460 480

1.5kW

2.2kW

3.7kW

9. Turn the pump off.

10. Open the inlet valve.

11. Set the Auto/Manual switch to Auto (when applicable).

The pump is ready for regular operation.

4.4 Auto Mode

The pump operates in Auto Mode when the Auto/Manual switch is set to Auto. This
gives control to an external source.

4.5 Manual Operation

The pump operates in Manual Mode when the Auto/Manual switch is set to Manual.
This allows the operator to operate the pump form the control panel.

930601-P 19

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

5.0 Pump Maintenance

5.1 Safety Issues

!

DANGER

Thoroughly purge the pump for at least 15 minutes to remove all toxic gases
before opening the pump for any reason.

!

WARNING

Allow the pump to cool before attempting any maintenance.

!

CAUTION

When changing or replenishing lubricating fluid, be sure to stop the pump and
allow the pump to return to atmospheric pressure. Because the lubricating fluid
reservoir is under vacuum, the pump can be severely damaged if the lubricating
fluid port plug is removed while the pump is in operation, or not at atmosphere.

!

NOTICE

The descriptions and instructions included in this manual are for a typical pump
installation. Documentation specific to this pump installation has been included
in the Attachments section. This section is located at the back of this manual.
Please refer to the Attachments section for installation-specific information.

5.2 Weekly Maintenance

It is important to check the following points at least once a week:

a. Lubricating Fluid Level (between upper and lower lines on lubricating fluid sight
glass).
b. Lubricating Fluid Color.

c. Excessive or Unusual Noise.
d. Motor Running Current.

e. Cooling Water Flow (pump modules and gas coolers).

930601-P 20

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

f. Nitrogen Flow.
g. Nitrogen Pressure.
h. Temperature Monitor (if equipped)

5.3 Other Periodic Ma i ntenance

5.3.1 Lubricating Fluid Change

The lubricating fluid should be changed every six months or when discoloration is
noticed, whichever occurs first. See “Refilling or Replacing the Lubricating Fluid” on
page30.

5.3.2 Complete Pump Overhaul

Depending on the process, a complete pump overhaul is recommended every 1-2 years
as a means of ensuring trouble-free performance. During overhaul service, all
bearings, labyrinth seal rings, and O-rings are replaced; coolers are cleaned or
exchanged, and the pump internals are cleaned, wet bead finished and vacuum baked.
The overhaul requires 1-2 weeks to complete, not including shipping to and from the
service center. Exchange pumps are available upon request. Contact your Ebara
representative for further details.

5.4 Lubricating Fluid Level

!

CAUTION

It is very important that the lubricating fluid is maintained at the proper level.
Failure to do so could result in severe damage to the pump.

!

CAUTION

When changing or replenishing lubricating fluid, be sure to stop the pump and
allow the pump to return to atmospheric pressure. Because the lubricating fluid
reservoir is under vacuum, the pump can be severely damaged if the lubricating
fluid port plug is removed while the pump is in operation, or not at atmosphere.

!

CAUTION

930601-P 21

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

Before attempting to add any lubricating fluid into the pump, it is imperative that
the secondary reservoirs are drained first. Failure to do so could result in
lubricating fluid being forced into the vacuum area of the pump.

!

NOTICE

Recommended lubricating fluids for pumps are Krytox 1525, FOMBLIN Y-LVAC
25/6, Barrierta J100, or equivalent.

5.4.1 Checking the Lubricating Fluid Level

With the pump operating, the lubricating fluid level in all sight glasses should be at or
above the lower limit line and, no higher than the upper limit line.
With the pump off, the lubricating fluid level should be at or just above the upper limit
line.

5.4.2 Sight Glass Locations

Lubrica ting Flu i d Level

Sight Glasses

Gearbox Motor

Inlet

(Top View)

5.4.3 Checking for Discoloration

If the color of the lubricating fluid is opaque or white, it has become contaminated with
moisture. If the color of the lubricating fluid is brown or black, it may have become
oxidized. If the color of the lubricating fluid has changed significantly from new, the
lubricating fluid should be replaced.

930601-P 22

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

5.4.4 Refilling or Replacing the Lubricating Fluid

!

DANGER

Thoroughly purge the pump for at least 15 minutes to remove all toxic gases
before opening the pump for any reason.

!

CAUTION

Before attempting to add any lubricating fluid into the pump, it is imperative that
the secondary reservoirs are drained first. Failure to do so could result in
lubricating fluid being forced into the vacuum area of the pump.

!

CAUTION

When changing or replenishing lubricating fluid, be sure to stop the pump and
allow the pump to return to atmospheric pressure. Because the lubricating fluid
reservoir is under vacuum, the pump can be severely damaged if the lubricating
fluid port plug is removed while the pump is in operation, or not at atmosphere.

5.4.5 Changing the Lubricating Fluid

Lubricating Fluid Reservoir Fill / Drain Plugs

Primary Reservoir Fill Plugs

Gearbox Motor

Inlet

(Top View)

Gearbox Motor

Secondary Reservoir Drain Plugs

(Bottom View)

Primary Reservoir Drain Plugs

1. Stop the pump and allow the pressure in the pump to return to atmosphere.

2. Remove the lubricating fluid fill plug and place it on top of the pump.

930601-P 23

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

!

CAUTION

Be sure to use the outer most plugs. On all pump models, a second plug is

located on the inner flange. This is not a fill plug and should not be removed
to add lubricating fluid to the pump.

3. Place at least a 1 liter or 1quart capacity container below the drain plug for

the secondary reservoir.

4. Remove the drain plug from the secondary reservoir. Allow the lubricating

fluid to drain for several minutes to ensure sufficient drainage.

5. Check and clean the O-ring on the drain plug. Replace the O-ring if it is worn

or damaged.

6. Replace and tighten the drain plug for the secondary reservoir.

7. Place the container for the used lubricating fluid under the drain plug for the

primary reservoir.

8. Remove the drain plug from the primary reservoir. Allow the lubricating fluid

to drain for several minutes to ensure sufficient drainage.

9. Check and clean the O-ring on the drain plug. Replace the O-ring if it is worn

or damaged.

10. Replace and tighten the drain plug.

11. Remove the used lubricating fluid. Be sure to dispose of this lubricating fluid

properly.
The pump is now ready for fresh lubricating fluid. At this point the sight glasses can
removed and cleaned if necessary. (See “Cleaning the Sight Glass”.)

12. Pour th e lubricating fluid into the fill port while viewing the level on the sight
glass. Add lubricating fluid to slightly above the upper limit line.

13. Check and clean the O-ring on the fill plug. Replace the O-ring if it is worn or
damaged.

14. Replace and tighten the lubricating fluid fill plug.

5.4.6 Replenishing the Lubricating Fluid

!

CAUTION

Before adding any additional lubricating fluid to the primary reservoirs, the
secondary reservoirs must also be drained.

1. Stop the pump and allow the pressure in the pump to return to atmosphere.

2. Remove the lubricating fluid fill plug and place it on top of the pump.

!

CAUTION

930601-P 24

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

Be sure to use the outer most plugs. On all pump models, a second plug is
located on the inner flange. This is not a fill plug and should not be removed to
add lubricating fluid to the pump.

3. Place at least a 1 liter or 1quart capacity container below the drain plug for the
secondary reservoir.

4. Remove the drain plug from the secondary reservoir. Allow the lubricating fluid
to drain for several minutes to ensure sufficient drainage.

5. Check and clean the O-ring on the drain plug. Replace the O-ring if it is worn or
damaged.

6. Replace and tighten the drain plug for the secondary reservoir.

7. Remove the used lubricating fluid. Be sure to dispose of this lubricating fluid
properly.

The pump is now ready for fresh lubricating fluid.

8. Pour the lubricatin g fluid into the fill port while viewing the level o n the sight
glass. Add lubricating fluid to slightly above the upper limit line.

9. Check and clean the O-ring on the fill plug. Replace the O-ring if it is worn or
damaged.

10. Replace and tighten the lubricating fluid fill plug.

5.4.7 Cleaning the Sight Glass

Should the sight glass become dirty, making it difficult to view the lubricating fluid level,
the glass can be removed, cleaned, and reinstalled.

Upper Limit Line
Lower Limit Line

Sight Glass

!

CAUTION

Before cleaning the sight glass, the pump must be at atmosphere, and the
lubricating fluid must be drained. Failure to do so could cause severe damage to
the pump.

1. Remove the four screws securing the sight glass.

930601-P 25

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

2. Remove the sight glass.

The sight glass can be cleaned with a clean lint-free wipe and alcohol.

3. Clean the O-ring and check for any damage. Replace the O-ring if it is worn or
damaged.

4. Reposition the sight glass. Be sure the limit lines are on the out-facing surface
and positioned properly (see the preceding diagram).

5. Reinstall the four screws. Be sure to tighten them evenly.

5.5 Vibrations and Noise

Early detection of unusual vibrations or noise reduces the possibility of serious damage.
Careful observation on a regular basis will help to ensure long pump life. Initial
operating levels serve as the basis for comparison.
Check for any unusual or excessive vibration or noise. If any abnormality is found:

1. Check that the pump is level.

2. Check the piping: fittings and support.

3. Check the lubricating fluid level of all gearboxes.

4. Check the motor current for proper operating level.

5. Check the exhaust check valve for proper operation.

5.6 Motor Curre nt

With the pump running, check that the motor current is less than the rated value.

!

CAUTION

Always set the overload to the rated motor current. The overload circuits allow
for a 25% over current.

Rated Motor Current (Amps)

Volts: 190 200 208 210 215 380 400 415 420

1.5kW

50Hz

2.2kW

3.7kW

Volts: 190 200 208 210 215 220 230 380 400 415 420 440 460 480

1.5kW

8.2 8.2 8.1 8.0 8.0 8.0 8.0 4.1 4.1 4.2 4.0 4.0 4.0 4.0

8.8 8.8 8.8 8.8 9.0 4.4 4.4 4.4 4.4

12.2 12.2 12.2 12.4 12.4 6.1 6.1 6.1 6.2

19.4 19.4 19.6 19.6 20.0 9.7 9.7 9.8 9.8

930601-P 26

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

60Hz

2.2kW

3.7kW

11.2 11.2 11.0 11.0 11.0 10.8 11.0 5.6 5.6 5.5 5.5 5.4 5.4 5.5

18.4 17.9 17.7 17.6 17.4 17.4 17.4 9.2 9.0 8.9 8.8 8.7 8.7 8.7

When the motor current goes above the rated value, or if the current is more than 10%
above the value that was recorded at the start-up operation, it is possible that by­products are building up inside on one or all of the following: the pump casing, the gas
coolers (if equipped), or the connecting pipe. It is also possible that the foreign
substances have entered the pump. (For initial values, See “Start-Up & Trial Run”.)

The pump can run continuously until it reaches the rated current, even if the motor
current is rising. Rising current usually indicates that the coolers (if equipped) or the
exhaust line are becoming blocked and need to be cleaned.

5.7 Nitrogen Purge Flow

Check the purge meter and confirm that the flow is within ±10% of the specified
value.(See “50x20 Specifications”.)

!

NOTICE

The nitrogen purge rate has been adjusted at the factory to the required level, do
not adjust the needle valves located at the purge ports.

5.7.1 Nitrogen Supply Requirements

(See “50x20 Specifications”.)
If the nitrogen purge rate is out of spec., check the following:

• The secondary pressure regulator. This may not be adjusted to the setting
value: 1 kgf/cm2.

• The nitrogen flow meter valve. This must be fully open.

• Inlet tubing connections for the nitrogen purge are not securely tightened.

5.8 Cooling Water Flow Rate

Check the cooling water flow rate.
Flow meter location: The forward meter is for the pump and motor; the rear meter is for
the gas coolers (if applicable). (See “80x25, Gear End”.)
If the flow rate is less than the spec., check the following:

1. Check the water valve(s) for adequate opening.

2. Check the inlet pressure; it may be low. Maximum and required differential
pressure between inlet and outlet is 1.0-2.0 kgf/cm2 (14 - 28 psi).

3. Cooling water piping may be clogged.

4. Check for water leaks.

5. Check the flow meter screen for obstruction.

5.8.1 Cooling Water Requirements

930601-P 27

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

Flow: Motor and module: 5.0-8.0 lpm 1.3-2.1 gpm.

Gas coolers: 0.8-1.2 lpm 0.21-0.32 gpm.

Pressure (Operating) 1.0-2.0 kgf/cm

Max: 2.0 kgf/cm

Temperature (max) 30°C 86°F

2

2

14-28 psi.
28 psi.

5.9 Ultimate Pressure

The rated ultimate pressure is measured at the pump inlet with the Nitrogen purge on
(at factory specifications).

Confirm that the ultimate pressure is not above the rated value, or the value obtained at
initial start-up. (For initial values, See “Start-Up & Trial Run”. For pump specifications,
See “80x25 Specifications”.)
If the ultimate pressure is above the rated value, or above the value obtained at start­up, check for the following.

1. Leakage in the vacuum chamber or the connecting piping between the chamber
and the pump, or both.

2. Improper adjustment of the Nitrogen flow needle valves.

5.10 Cooler Inspection and Cleaning

!

DANGER

Respirators may be required when inspecting or cleaning coolers (Process
dependent).

!

WARNING

Wear protective gloves when performing maintenance on the coolers.

!

WARNING

Protective eyeware should be worn when inspecting or cleaning coolers.

!

WARNING

930601-P 28

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

Allow the pump package to cool before attempting any maintenance. Wear
protective gloves when performing maintenance on the coolers.

5.10.1 Overview

The following information is provided to help the end user become familiar with the
coolers and to assist in making the required maintenance as easy and trouble-free as
possible.

The Ebara multi-stage dry pump is equipped with "heat exchangers", or "inter-coolers"
designed to keep the pump clean and to improve its performance.
These coolers are a maintenance item and must be cleaned periodically in order to
provide a long life of clean, dry vacuum pumping.

The coolers have been designed to be removed, cleaned, and replaced with minimum
downtime. They are made of high quality stainless steel to provide long life and to
resist the harshest of processes. To minimize down time, maintaining a second set of
coolers is advisable.

The coolers are designated by the stage of the pump that is entering the cooler.
Coolers are designated as 3rd, 4th, and 5th stage.
On Single Pass coolers, the gas flow passes through tubes surrounded by a water
jacket.

Inspection

Solid matter gradually builds up on the inside of the gas coolers when the pump is run
with process gases. The rate of build-up is dependent on the process and wafer
throughput. Therefore, part of the maintenance of the pump includes periodically
inspecting and cleaning the gas coolers.

Ebara recommends that all coolers used on process equipment be inspected after two
to three months of use to determine the amount of process build-up. (See 'Cooler
Inspection Procedure'). Since most processes are not identical, the time intervals and
the amount of build-up between cooler cleanings will vary. Process build-up depends
mostly upon process chemical content and the amount of usage. Once a rate of
buildup is determined, subsequent cooler cleaning can be scheduled a convenient time
so as not to interfere with production.

All coolers should be cleaned when process build-up in the coolers reaches 50%-60%
full. If the cooler maintenance is ignored, the process build-up will clog the coolers,
causing the pump to overheat, or causing process build-up inside the pump chambers.
These factors will require premature pump overhaul or possibly replacement of the
pump.

The following list summarizes the typical intervals between cooler cleanings for several
common semiconductor processes. If not listed below, please contact the local Ebara

930601-P 29

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

service representative for assistance in determining the appropriate inspection and
cleaning interval.

Process Recommended Interval
Metal Etch 3 - 6 Months (a function of chemistry)
SiN (PECVD) 2 - 3 Months
SiN (LPCVD) 2 Months
TEOS /SiO2 Cooler Cleaning normally not required
Asher Cooler Cleaning normally not Required.

Cleaning

Cooler cleaning involves removing the coolers from the pump and soaking the coolers
in water or weak acid solutions (depending on the process) to dissolve away any
chemical deposits. Down-time can be minimized by having a set of exchange coolers
available. Coolers can be removed and reinstalled in about 2-3 hours.

After soaking, the coolers need to be leak-checked using either a Helium leak test,
Hydrostatic leak test using 10.5 kgf/cm2 (150 psi pressure), or immersion in water with
compressed air to the cooler tubes. After the soundness of the cooler tubes is
confirmed, the coolers should be dried in an oven.

The following list summarizes the recommended cooler cleaning procedures for several
common semiconductor processes. If not listed below, please contact the local Ebara
service representative for assistance in determining the appropriate cleaning procedure.

Aluminum Etch Processes: Clean the coolers by soaking them in water for 2-3 hours.
PECVD Processes: Cooler cleaning can be accomplished without removing the coolers

form the pump. Remove both end caps from each cooler and remove the loose
powdery chemical build-up using a vacuum cleaner.

!

WARNING

Wear protective gloves when performing maintenance on the coolers. Review
safety precautions to be taken when using HF Acid before attempting to clean the
coolers.

Nitride LPCVD: For Nitride LPCVD service, the coolers should be examined after two
months of service. Clean the coolers by dipping them briefly in a 5-10% solution of HF
acid and then rinsing them in water. Continue this process until the process chemicals
have been completely removed.

The coolers can be damaged if they are left in the solution for any extended
length of time.

930601-P 30

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

5.10.2 Single Pass Cooler Inspection Procedure

!

DANGER

Respirators may be required when inspecting or cleaning coolers (Process
dependent).

!

WARNING

Wear protective gloves when performing maintenance on the coolers.

!

WARNING

Protective eyeware should be worn when inspecting or cleaning coolers.

!

WARNING

Allow the pump package to cool before attempting any maintenance. Wear
protective gloves when performing maintenance on the coolers.

Inspect the hot, or inlet side of cooler #3. This is the area that plugs first, and it can be
used to determine the amount of deposits in the other coolers. If the #3 cooler shows
heavy deposits, the other coolers should be inspected (and cleaned if necessary). If the
#3 cooler shows little deposits, the others need not be inspected.

To determine the approximate amount of process build-up in the cooler tubes, use the
following steps. This procedure takes approximately 2-3 hours to complete.

1. Shut off the pump and the Nitrogen flow; allow the pump to cool.

!

DANGER

Failure to shut off the Nitrogen flow could result in process gasses venting into
the work area and causing injury to personnel. (It is NOT necessary to shut off
the cooling water).

930601-P 31

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

2. Remove the clamps from NW 40 and NW 25 connections on the end caps.

3. One at a time, remove each end cap by removing 8 mm bolts (8 stainless steel
bolts) with a 6 mm hex wrench.

!

CAUTION

If any of the bolts are seized, apply WD-40, Liquid Wrench, LPS, or other
penetrating product in liberal amounts while torquing the bolt back and forth.
This will usually loosen the bolt and prevent twisting off the bolt head.

4. Examine the cooler tubes to determine the approximate build-up by the amount
of process adhering to the walls of the tubes.

5. Write down the % amount of build-up in the coolers. (Photocopy and use the
Cooler Cleaning and Inspection Form).

Example: 30 - 40% build-up in the tube.

6. Examine the O-ring and replace it if necessary. (Ebara Part Description: G-90).

7. Replace the end cap being careful not to pinch or damage the O-ring. Replace
the centering O-ring if necessary.

8. Apply graphite anti-seize (Permatex 133A) to each of the bolts to prevent galling
or the transfer of metal.

9. Replace the stainless steel 8 mm bolts and tighten the bolts in an even criss­cross pattern or until the end cap is seated firmly against the cooler body.

10. Replace the end caps, one at a time, before proceeding to the next one to
minimize the fumes and moist air from getting in and out of the pump.

Repeat the steps on each cooler for both sides. Document each side separately. (Each

cooler has a hot gas side, which is gas exiting the pump, and a cold gas side, where
gas exits the cooler).
Include all piping between the pump and coolers and exhaust piping from coolers,
including the check valve in the inspection.

11. Test the pump for leaks. (See “Leak-Checking the Pump”.)

5.10.3 Single Pass Cooler Cleaning Procedure

!

DANGER

Respirators may be required when inspecting or cleaning coolers (Process
dependent).

!

WARNING

930601-P 32

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

Wear protective gloves when performing maintenance on the coolers.

!

WARNING

Protective eyeware should be worn when inspecting or cleaning coolers.

!

WARNING

Allow the pump package to cool before attempting any maintenance. Wear
protective gloves when performing maintenance on the coolers.

This cooler cleaning procedure requires at least 6 hours of down-time to complete. If a
spare set of coolers is available, the required down-time is reduced to 2-3 hours.

1. Turn off the pump and allow cooling water and Nitrogen to run approximately 15
minutes. This is to cool down the coolers, and to dilute any process gas that
may still be trapped in the pump.

2. Mark the cooler bodies and end caps designating third, fourth, or fifth with an
indelible ink pen.

3. After 15 minutes, turn off the Nitrogen. If removing the plumbing, disconnect the
Nitrogen (swage lock) lines. (You will need a 9/16" wrench).

4. Remove the clamps on all NW 40 and NW 25 connections.

5. Remove U-bolts around the cooler bodies. (You will need a 13 mm wrench).

6. Shut off the cooling water supply. Open the two swage lock connections using a
11/16" wrench and drain the water out of the pump and coolers. Nitrogen can be
used to aide in draining the water. (You will need a large, flat tray or pan).

7. Disconnect the remaining water lines and remove the coolers.

!

CAUTION

If possible, cap all disconnected lines to help prevent any contamination.

!

DANGER

Do not remove the end caps. The remaining water inside the coolers will cause
fumes if it comes in contact with process build-up.

930601-P 33

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

Prior to removing the piping, it is helpful to mark which side it was removed from, i.e.,
exhaust piping and inter-cooler piping in between the pump and coolers, check, valve,
etc.

1. Remove all piping.

2. Seal off the openings in the bottom of the pump with duct tape to prevent moist
air from getting inside the pump.

3. Transfer all parts to be cleaned to a sink with a vented hood; have the sink filled
with water.

4. Check the end caps and bodies of coolers to determine if alignment markings
are stamped on them, i.e.; U1, U2, or U3. If they are not marked, mark or
scratch both bodies and end caps to ensure correct alignment during re­assembly of coolers.

5. Remove the end caps by removing eight - 8 mm bolts using a 6 mm hex wrench.

!

CAUTION

If any of the bolts are seized, apply WD-40, Liquid Wrench, LPS, or other
penetrating product in liberal amounts while torquing the bolt back and forth.
This will usually loosen the bolt and prevent twisting off the bolt head.

6. Remove the O-ring and set it aside.

7. Write down the % amount of build-up in the coolers. (Photocopy and use the
Cooler Cleaning and Inspection Form).

8. Soak the coolers, or rinse them off if necessary, until all process build-up is
dissolved from the coolers.

!

NOTICE

If a helium leak detector is not available, proceed to #9. If a helium leak detector
is available, skip to #10 and continue through #15. After #15 perform a helium
leak check.

9. Check all coolers for leaks by blanking or plugging off one water connection.
Apply Nitrogen or compressed air at 5.3-7.0 kgf/cm2 (75-100 psi) to the other
water connection. Submerge cooler body under water and look for bubbles
escaping. Repeat the rest on all cooler bodies. If the cooler leaks, DO NOT
USE! Replace cooler.

10. Place all clean parts in an oven and bake at 190°C (375°F) for one half hour, or
at 150°C for one hour, to get out all of the moisture. A vacuum is desirable, if
equipment is available.

!

WARNING

Wait until all of the parts are cool and dry before starting to reassemble them.

930601-P 34

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

11. After the parts are dry and cool, locate and organize all parts. Look for matching
marks on end caps and coolers.

12. Check all O-rings and replace them if necessary. (Ebara Part Number: G-90).

13. Reinstall end caps to cooler bodies ensuring that the markings line up. Be
careful not to pinch the O-rings.

14. Use graphite anti-seize (Permatex 133-A) on stainless steel bolts before bolting
the end cap to the cooler body.

15. Tighten the bolts evenly in a criss-cross pattern until the end cap is seated tightly
against the cooler body.

! NOTICE

Perform a helium leak check at this point. When finished continue to the next step.

16. Use two 36” bungie cord tie-downs to support the coolers on the pump.

17. Connect all vacuum lines and reinstall all NW 40 and NW 25 connections and
piping between the pump coolers.

18. Re-install the u-bolts.

19. Re-install all water line connections.

20. Re-install all Nitrogen connections.

!

CAUTION

Be careful to make a tight seal on the flanges. Replace worn or damaged O-rings.

21. Reinstall piping for exhaust to 6th stage cooler.

!

CAUTION

When installing the exhaust piping, be sure that the check valve is facing
correctly. If installed incorrectly, dry pump will fail due to exhaust back pressure.

22. Once the piping is reinstalled, turn on the cooling wa ter f low and examine for
leaks.

23. Test the pump for leaks. (See “Leak-Checking the Pump.”)

5.10.4 U-Tube Cooler Cleaning Procedure

Safety Precautions

!

DANGER

930601-P 35

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

Respirators may be required when inspecting or cleaning coolers (Process
dependent).

!

WARNING

Wear protective gloves when performing maintenance on the coolers.

!

WARNING

Protective eyeware should be worn when inspecting or cleaning coolers.

!

WARNING

Allow the pump package to cool before attempting any maintenance. Wear
protective gloves when performing maintenance on the coolers.

Due to the different processes to which the pumps are connected, it is advisable to
check with your Safety Representative regarding the potential dangers of by-products
that may be present upon separating the gas coolers from the pump module. The
Safety Representative can guide you as to the necessary safety precautions that you
should take.

Always obtain a copy of the Health & Safety Procedures, and Controlled Disposal of
Contaminated Waste for the factory at which you are working.

If this information is not available, always use the following equipment:
Positive-Pressure breathing Apparatus
Nitrile Gloves

As soon as the coolers have been removed, seal off the KF ports and any other ports
that have been in contact with the positive gas.

Place the coolers in polyethylene bags and seal the bags.
Place all contaminated wipes and soiled protective clothing in the proper waste bins.

Tool List:

13 mm Socket
11 mm Deep Socket
2 - 13 mm Combination Box Wrench

930601-P 36

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

Small, Flat Tray ( to place under the pump frame)
Small pan or tray of 15 - 20 liter capacity
Medium ScotchBrite Pad
Polyethylene Bags (4 - 5)
Clean Room Wipes
Nitrile Gloves
Inspection Mirror

Small Pen Flashlight
PTFE Thread Tape
Pen Knife
Face Mask
Channel Locks

Pump Shut-Down

Before attempting to remove the coolers, perform the following shut-down procedure.

1. Turn off the pump.

2. Leave the N2 purge on for a minimum of 15 minutes after turning off the pump.
This is to dilute any gasses that could be trapped within the pump.

3. Leave the cooling water flow on for 15 minutes after turning off the pump. This is
to cool both the pump and the coolers.

4. Close the inlet valve (if fitted), or close the gate valve to the process chamber.

5. After 15 minutes, turn off the Nitrogen supply and the cooling water supply.

!

WARNING

The coolers will still be warm, and the pump’s exhaust manifold will be very hot.
Use caution when removing the coolers. If possible, use heat-resistant gloves.

Pan or tray should have a 15 to 20 liter capacity.

Removing and Replacing the Cooler Tubes

1. Remove the side panels (if fitted) to expose the coolers.

2. Disconnect the water lines.

3. Place a shallow tray on the bottom of the frame beneath the quick-release
valves. This will catch any loose particles of process chemicals that may emerge
when removing coolers.

4. For each cooler:

5. Loosen the collar clamp using an 11 mm deep socket.

6. Pull the flange towards you. If the flange does not separate, use a plastic mallet
to tap around the flange to separate it from the body of the cooler (canister). If
this fails to separate the flange, then tap a nylon wedge between the flange and
the canister.

930601-P 37

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

!

CAUTION

On no account should any metal wedges, screwdrivers, or other steel materials be

used to pry apart or tap the coolers, as this could damage the components.

7. Once loosened, Slide the tube section of the cooler towards you.

8. Place the tube section on a plastic sheet.

9. Remove each of the tube sections in the same manner.

10. Transfer all of the water connections to the new coolers. (Time can be saved if a
second set of these fittings are already fitted to your replacement coolers.)
Before transferring the fittings, pay particular attention to the position of the
fittings.

11. Once all of the tube sections have been removed, inspect the canisters (still in
the frame) using the inspection mirror and flashlight.

12. Examine the manifold pipes to ensure that they are not more than 30% blocked.
If they are more than 30% blocked, remove the manifold pipes and clean them.
If it is necessary to remove and clean the manifold pipes, be sure to replace the
centering rings and O-rings. Use ScotchBrite if the canisters need cleaning.

13. Vacuum out any particulate, and wipe off any residual using I.P.A. or an
equivalent solvent.

14. Remove the replacement tube sections from their canisters and place the used
tube sections into the replacement canisters

15. Tighten th e collar clamp. This will help to contain any fu mes to the canisters.

16. Remove the old O-ring and position the new O-ring.

17. Ensure that the sealing faces on the replacement tube section and on the
canister are completely free of particles and deep scratches.

18. Slide the replacement tube sections into the canisters on the pump frame. Pay
close attention the orientation of the cooling water ports. They should be aligned
in a vertical position.

19. Replace and tighten the collar clamp.

20. Re-connect the water lines.

21. Place all soiled wipes and process media into the waste bins (as instructed to by
the local Safety Officer).

The pump must now be leak-checked before being put back into service.

930601-P 38

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

5.10.5 Cooler Cleaning and Inspection Form

Company Name: ____________________ Location: ____________________
Pump Model: ____________________ ____________________
Serial Number: ____________________
Configuration: ____________________
Process Type: ____________________
Services: ____________________
Inlet Gases: ____________________
Cooler Type ­Check (X) One: Single Pass: _____ U-Tube: _____

PROCESS BUILD-UP RECORD

Hot (Inlet) Side Cold (Outlet) Side

3rd Stage (#1): _____% 3rd Stage (#1): ______%
4th Stage (#2): _____% 4th Stage (#2): ______%
5th Stage (#3)): _____% 5th Stage (#3): ______%

5.11 Leak-Checking the Pump

Whenever any internal connections of the pump package are broken, it is important to
minimize the potential for gross leaks. A leak into the pump package could allow
moisture to react with process gasses. This could cause severe damage to the pump.
A leak out of the pump could allow process gasses to escape into the fab, leading to
potentially hazardous conditions. The following are only initial checks. Further
checking may be necessary with a helium leak detector.

5.11.1 Leak Testing the Pump

When examination or cleaning of the coolers is complete, test the pump for leaks by
following the listed steps.
Test No. 1

1. Turn off the Nitrogen.

2. Blank off the inlet of the pump with the appropriate blank flange with a vacuum
gauge attached.

3. Start the pump and run it until the base pressure is reached.

4. With the pump running, place a collapsed latex glove tightly around the exhaust
and watch for the glove to inflate. If the glove inflates, there is a leak. Find and fix
the leak.

930601-P 39

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

Test No. 2

1. With the pump off, blank of f the inlet.

2. Attach a blank flange to the exhaust with a pressure gauge on it.

3. Allow a small amount of Nitrogen gas into the pump, approximately 1.1-1.4
kgf/cm2 (15 - 20 psi).

4. Watch for the needle on the pressure gauge to go down. If it does, there is a
leak. Find and fix the leak.

These simple leak tests are designed to identify leaks that are sometimes present after
cleaning the coolers. These tests do not take the place of the standard leak against
time test, or of a quality test, done with a Helium leak detector.

5.12 Sublimator Cleaning

Sublimators are provided as an optional for Aluminum Etch processes. The sublimator
should be examined after months of service to gauge the level of chemical build-up. A
pressure gauge is provided to monitor increases in the exhaust line pressure--the
section of pipe between the final cooler and the sublimator. A pressure increase of as
little as 0.2 kg/cm2 (3 psi) from the initial operation pressure is an indication of chemical
build-up.

If the sublimator is equipped with a by-pass valve, the sublimator can be removed while
the pump is running.

5.12.1 Removing the Sublimator

1. Open the bypass valve

2. Close and disconnect both the inlet and outlet valves to the sublimator.

3. Disconnect the water lines

4. Remove the sublimator.

5. Clean the sublimator by soaking it is water for 2-3 hours under a hood. Thoroughly
dry the cleaned sublimator in an over before reinstallation.

5.12.2 Reinstalling the Sublimator

6. Reconnect the water lines

7. Reconnect and open both the inlet and outlet valves to the sublimator.

8. Open the bypass valve.

930601-P 40

EBARA Multi-Stage Dry Vacuum Pumps Pump Maintenance

5.13 Consumables and Spares List

This is a general recommended Spares List for the UERR series Ebara Dry Pumps.

Exhaust

Check
Valve*

980083

40x20

40x20 w/clrs

65x40 U-Tube

65x40 3" clrs

50x20

80x25 U-Tube

80x25 3" clrs

*Not needed for each pump. Keeping 1 in stock for every 10 pumps is recommended.

1
1
1
1
1 1 1

1
1

Motor

Contactor*

2hp/208V

916031

−

−

− −

−

−

−

Motor

Contactor

3hp/208V

980754

1
1

1

1121
1 1 2 1 6

Motor

Contactor*

5hp/308V

989079

−

−

1 2 1

−

−

Lubricant

980595

1 1
11 6

21 6
2 1 6

Water

Flow

Switch*

980085

Cooler

G-90
O-Ring
989169

− −

−

−

Cooler

G-140
O-Ring
923043

−

6

−

−

6

−

930601-P 41

EBARA Multi-Stage Dry Vacuum Pumps Troubleshooting

6.0 Troubleshooting

6.1 Possible Problems / Suggested Solutions

Table 1:

Trouble Possible Causes Solutions

Pump has shut
down, and the water
failure light is on.

Coolers are clean,
but the pump will not
restart, or starts and
then stops due to
overcurrent.

Cooling water flow rate
is below 3-4 lpm.
Possible blockage.

Exhaust valve stuck. Examine the exhaust check valve and

Pump tolerances
clogged with
particulate.

Check the inlet flow and pressure for
proper settings. If necessary,
increase cooling water flow rate to 5-8
lpm. Check the inlet screen at the
bottom of the flow meter for blockage.
Restart the pump.

clean if necessary, or replace the
exhaust valve.

Remove material by vacuuming out
the pump while manually rotating the
rotor in reverse at the end cap.

Gear lubricating fluid
is cloudy or opaque.

Gear lubricating fluid
darkens the sight
glass.

Exhaust is clogged. Clean the exhaust line.

Reset the over-current switch and

restart the pump.
Lubricating fluid has
become contaminated
with water.
Nitrogen flow across
the labyrinth seal is
blocked.

Nitrogen flow is too high
(>18 lpm) across the
labyrinth seals, causing
a venturi effect.

Change the lubricating fluid.

Check the Nitrogen pressure and flow

across the seals.

Reduce the flow to <18 lpm.

930601-P 42

EBARA Multi-Stage Dry Vacuum Pumps Troubleshooting

Table 1:

Trouble Possible Causes Solutions

Lubricating fluid is
found in the
secondary reservoir.

Nitrogen flow across
the labyrinth seal is
blocked.
Pump was not turned

Check the Nitrogen pressure and flow

across the seals.

Drain the secondary reservoir.
off and vented to
atmosphere before
removing the lubricating
fluid fill plug.

Lubricating fluid is
found in the dry
pump swept volume.

The lubricating fluid fill
plug was opened while
the pump was running.

Depending on the amount of

lubricating fluid, the pump may have

to be torn down and cleaned. Contact

your Ebara representative.

Pump is causing

Pump is not level. Level the pump.

excessive vibration.

Pump package has
shut down, and the

Pump is not on rubber
cushions.
Lubricating fluid level
low.

Ensure that the pump is on the rubber

cushions provided.

Check lubricating fluid levels in each

reservoir: refill if nece ssary.

trouble light is on.

Cooler tubes restricted
due to inadequate P/M,
or MFC failure in the
tool.

Open cooler bonnets and examine

cooler tubes for flow restrictions and

clear any restrictions; reset current

trip switches inside the control panel;

restart the pump.
Restricted exhaust

possibly due to
moisture in the house
exhaust, or metal etch
deposit.

Check the exhaust line for flow

restrictions; reset current trip switches

inside the control panel; restart the

pump.

If the pump fails to restart after

completing the above, contact the

Ebara Service Center.

930601-P 43

EBARA Multi-Stage Dry Vacuum Pumps Troubleshooting

Table 1:

Trouble Possible Causes Solutions

Pump rotates in the
wrong direction.

Motor amperage is
rising.

Pump wiring to the
main connection is
backwards.
Particulate or other
foreign matter is closing
tolerances.

Reverse any two of the three power

input wires from the main power

supply on the terminal switch.

Inspect pump for particulate buildup or

other blockage. If there is heavy

particulate build. The pump should be

rebuilt.

Water found in the
coolers.

Coolers and/or an
exhaust line is blocked.
Water leak in the
coolers.

Water entering from the
fab exhaust line.

Clean out the coolers or the exhaust

line or both.

Change the defective cooler.

Redesign the dry pump exhaust into

the fab exhaust so that water is not

sucked back into the dry pump

exhaust.

Slight increase (0.2
kg/cm2) in inlet

Chamber cleaning
water dumped into the
pump.
Chemical buildup in the
sublimator.

Evacuate the chamber with the load

lock, or use a more complete wipe-

down procedure.

Remove and clean the sublimator.

pressure to the
sublimator.

Contact the local Ebara service representative if any of the following problems arise:
a. Pump shutdown due to motor overload.
b. Extremely high motor running current.
c. Excessive or unusual noise.
d. Lubricating Fluid leakage.
e. Loss of pump performance.

930601-P 44

EBARA Multi-Stage Dry Vacuum Pumps Troubleshooting

6.2 Service Centers

6.2.1 USA

EASTERN REGION:
EBARA Technologies, Inc.

One Parklawn Drive
Bethel, CT 06801
Phone: [phone]
Fax: [phone]

CENTRAL REGION:
Ebara Technologies, Inc.

3019 Alvin DeVane Boulevard, Bldg. 3, Suite 350
Austin, TX 78741
Phone: [phone]
Fax: [phone]

WESTERN REGION:
EBARA Technologies, Inc.
Silicon Valley Operations

323 Sinclair Frontage Road
Milpitas, CA 95035
Phone: [phone]
Fax: [phone]

EBARA Technologies, Inc.
Sacramento, CA

51 Main Avenue
Sacramento, CA 95838
Phone: [phone]
Fax: [phone]

930601-P 45

EBARA Multi-Stage Dry Vacuum Pumps Troubleshooting

6.2.2 EUROPE

DEUTSCHLAND
EBARA Germany GmbH
PRECISION MACHINERY GROUP

DonaustraBe 7
D-63452 Hanau
Phone: [phone]
Fax: [phone]

HOLLAND:
EBARA Technologies, Incorporated

Jarmuiden 44
D1046 AC
Amsterdam, The Netherlands
Phone: [phone]
Fax: [phone]

SCOTLAND:
EBARA Technologies, Incorporated

3 Adam Square
Brucefield Industrial
Estate Livingston, West Lothian
EH 54 9DE United Kingdom
Phone: [phone]
Fax: [phone]

6.2.3 ASIA/PACIFIC RIM

JAPAN:

Ebara Corporation
Nissei-Aroma Square bldg., 37-1 Kamata
5-Chome, Ota-Ku, Tokyo 144-8721 Japan
Phone: [phone]
Fax: [phone]

TAIWAN:
Taiwan EBARA Densani (TED)

No. 7 Nan-Yuen 2nd Road,
Chungli Tao Yuen, Taiwan ROC
Phone: [phone]
Fax: [phone]

EBARA Corporation Taipei Office

Rm 1406A, Chia Hsin Bldg # 96, Sec 2, Chung Shang N. Road

930601-P 46

EBARA Multi-Stage Dry Vacuum Pumps Troubleshooting

Taipei, 10499 Taiwan ROC
Phone: 886+02-2560-1166
Fax: 886+02-2560-1177

SINGAPORE:
EBARA Engineering Singapore (EES)

No 1 Tuas Link2
Singapore 639550
Phone: 65+862-3536
Fax: 65+861-0589

KOREA:
EBARA Precision Machinery Korea Inc.

15 FL, Kangnam Bldg. 1321 Seocho-Dong
Seocho-Ku, Seoul, Korea
Phone: [phone]~5
Fax [phone]

930601-P 47

EBARA Multi-Stage Dry Vacuum Pumps Attachments

7.0 Attachments

One or more of the following items are included to cove r areas specific to your pump.
Please refer to these attachments for further, pump-specific information.

930601-P 48

EBARA Multi-Stage Dry Vacuum Pumps Attachments

930601-P 49