Despatch MT-300 User Manual
INSPIRED INNOVATION
u Magnetic Annealing Tool
Industry Leading Throughput
Featuring High Field Strength Magnet
Despatch’s Magnetic Annealing Tool provides process exibility and
improved yield, enabling recording head manufacturers to make signicant
advances in product performance. e product features a wide range of eld
strength options, including electromagnets up to 1.0 Tesla. Tight temperature uniformity of +/- 0.5°C across each wafer and within the wafer stack
maximize product yield. An aluminum brazed chamber provides even wafer
heating which is critical to the success of the magnetic annealing process.
Industry Leading Throughput
Despatch’s Magnetic Annealing Tool provides recording head manufacturers
with the best overall throughput in the industry, by combining large load
capability with uniform temperature ramp-up and cooldown rates. Standard
load size is up to 22 wafers per batch for the MT-300. Temperature ramp-up
and cool rates of over 5°C per minute allow for shortened cycle times and
increased throughput. Despatch Magnetic Annealing Tools maintain their
excellent temperature uniformity during the ramp phase of the process cycle.
Increased Yield
Despatch’s patented Magnetic Annealing Tool helps increase recording head
yield by maintaining tight tolerances throughout each batch. Temperature
tolerance within each wafer, and between wafers in a batch, is better than
±0.5% of soak temperature. e MT-300 maintains temperature uniformity of
±0.5°C. Precise magnetic eld uniformity is also maintained. Field uniformity
is better than ±2% throughout the work area. e maximum divergence angle
is 2 degrees in the plane of the wafers. ese tight tolerances lead to excellent
lot-to-lot consistency and superior product quality.
Greater Process Flexibility
Despatch’s Magnetic Annealing Tool oers exibility to recording head process
designers. With a wide range of temperatures, magnetic eld strengths, wafer
rotation, and a variety of material handling options, Despatch’s tools enable
head manufacturers to keep pace with rapidly changing technology.
FEATURES AT A GLANCE
u
Electro-magnet: Field strength
1.0 Tesla standard. Field uniformity ±2%
Divergence angle <1.5°
u
22 wafer levels per batch, plus 1 control
u
300°C maximum temperature
u
Automatic mass flow controlled backfill/
inert gas capability
u
Temperature uniformity: ±0.5°C
u
Standard vacuum system: 10-3 Torr
u
Ramp Rate: 5°C per minute
u
User friendly graphical interface,
featuring real time graphing, alarm
monitoring, and SECS/GEM compatibility
Minneapolis • shanghai • Berlin • singapore • hsinchu
MODELS MT-300
TEMPERATURES
Maximum Temperature 300°C
Temperature Uniformity ±0.5°C
Ramp-Up Rate 5°C/Minute
Ramp-Down Rate 5°C/Minute
MAGNETIC OPTIONS
Permanent Magnet to 0.2 Tesla
Electro-Magnet to 1.0 Tesla
Maximum Divergence Angle 2°
Field Uniformity ±2%
VACUUM
Vacuum Base Pressure (Standard) 10
WAFERS
Wafer Size 200mm
Wafers Per Batch 22
other
Tool Overall Dimensions (WxDxH) 51 x 63 x 88 in
Control Cabinet Dimensions (WxDxH) 72.1 x 34.3 x 18.1 in
Electrical 208-3-50/60 65FLA 15KW
Tool Weight
Control Cabinet Weight
-3
Torr
129.5 x 160 x 223.5 cm
183.1 x 87.1 x 46 cm
(Other Options Available)
1,150 lbs (521.63 kg)
600 lbs (272.15 kg)
serVice anD technical support
Service Parts: 1-800-473-7373
International Service/Main: 1-952-469-8230
Service Fax: 1-952-469-8193
service@despatch.com
gloBal heaDQuarters
Phone: 1-888-DESPATCH (1-888-337-7282)
International Service/Main: 1-952-469-5424
Fax: 1-952-469-4513
sales@despatch.com
8860 207th Street West
Minneapolis, MN 55044 USA
www.despatch.com
© 2012 Despatch Industries. All rights reserved. Despatch is a registered trademark of Despatch Industries in the U.S. and other countries. Magnetic Annealing Tool 5-12
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