Delta HPP-1K5A01KAT User Manual

User Manual

PULSED DC Power Supply

Continuous 325 – 1000VDC

Model: HPP-1K5A01KAT A

Version: Rev.S.00

I.

Copyright

may not be reproduced or used in any manner whatsoever without admittance by

Delta Electronics Inc.

Warranty

This product Delta “HPP-1K5A01KAT” Model is been warranted against defect in material and workmanship for a period of “1” year after date of shipment. Delta agrees to repair or replace the fault unit free-of-charge which fails to perform with specification

and under normal use during this period.

This warranty shall not apply to the following items and will be billed of cost:

1. To exceed the warranty period.

2. Subject to misuse, negligence, accident or natural disaster.

3. Used in a hazardous or dangerous manner either alone or in conjunction with other equipment.

4. Repaired or altered by person who was not authorized by Delta.

5. Appearance change with environment factor

Delta will be the sole arbiter for those circumstances

To make a warranty claim please contact Delta at telephone number in the table

or support at delta.com, the fault unit transportation to Delta to be prepaid and

responsibility by purchaser, and Delta will take responsibility for ship it back.

Delta Electronics, Inc.

3 Tungyuan Road, Chungli Industrial Zone Taoyuan County 32063, Taiwan, ROC Tel: 886-3-4526107 Fax: 886-3-4331706 Web Site: www.deltaww.com

II.

INDEX ...............................................................

Chapter 1: Safety and Standard ································································· 1

1.1. Important Safety Information ··········································································· 1

1.2. Safety and Warning Symbols ·········································································· 1

1.3. Electromagnetic Compatibility Directives and Standard ········································· 2

1.4. Industry Guideline ························································································ 2

Chapter 2: Introduction ············································································· 3

2.1. Brief Statement ···························································································· 3

2.2. Key Feature ································································································ 4

Chapter 3: Specification ··········································································· 4

3.1. System Block Diagram ·················································································· 4

3.2. Electrical Specification ··················································································· 6

3.3. Ignition Capability ························································································· 7

3.4. Arc Suppression Specification ········································································14

3.5. Ignition Profile ····························································································15

3.6. Process and Monitor Function ········································································15

3.6. Mechanical Specification ···············································································16

3.6. Environment Specification ·············································································18

Chapter 4: System Protection Mechanism ················································ 19

4.1. Input Breaker ·····························································································19

4.2. Protection by MCU ······················································································19

Chapter 5: Installation ············································································ 20

5.1. Cooling Requirements ··················································································21

5.2. Cabinet Design ···························································································21

5.3. Grounding ·································································································22

Chapter 6: Interface ················································································ 23

6.1. Front Panel ································································································23

6.2. Rear Panel ································································································25

6.3. Main Menu Map……………………………………………………………………………….. 26

6.4. Digital Communication Port (Host) ···································································28

6.5. Analog Communication Port (User) ··································································32

Chapter 7: Operation ·············································································· 34

7.1. Panel Operating Steps··················································································34

7.2. D-SUB Operating Steps ················································································35

7.3. RS232 Operating Steps ················································································35

7.4. RS485 Operating Steps ················································································36

Chapter 8: Maintenance ·········································································· 37

1.

Chapter1: Safety and Standard

1.1. Important Safety Information

To keep your safety from hazardous and fatal circumstance, please read and realize the content

of this manual before installing and operating Delta “HPP-series” power supply.

1.2. Safety and Warning Symbols

The following advisory symbols as shown in Table 1.1 will be used in the manual for different

level of warning. The meanings of the advisory symbols are explained below.

Table 1.1 Safety and Warning Symbols (1)

This danger symbol advises that improper operation will cause

serious personal injury or death.

This warning symbol advises that improper operation will cause serious personal injury, or catastrophic damage the generator or any electronic devices connected to the

generator, or lose important data.

This caution symbol advises that improper operation will cause personal injury, or damage the power supply or any electronic

devices connected to the power supply, or lose data.

The following advisory symbols as shown in Table 1.2 are used on safety warning labels, and/or

on printed circuit board (only provided with white paint), and/or other part of the generator. The

meanings of these symbols are explained as below.

Table 1.2 Safety and Warning Symbols (2)

Dangerous voltage symbol indicates the presence of high voltage. Access the high voltage will cause serious personal

injury or death.

To protect against electrical shock in case of a fault. This symbol indicates that the terminal must be connected to

ground before operation of equipment.

Residual voltage:

Wait 8 minutes at least for capacitor discharge after power cord is removed and before servicing.

2.

Heavy object:

Two persons lifting are recommended to avoid muscle strain or

back injuries.

1.3. Electromagnetic Compatibility Directives and Standard

 Disturbance Characteristic: EN55011 - CRSP11 Class A, Group 1 (>20kVA)  General Immunity Standard for Industry: EN 61000-6-2  Safety Requirement: IEC-61010-1 (CE and UL certification)

1.4. Industry Guideline

 Guideline for Semiconductor manufacturing equipment: SEMI S2 and F47

3.

Chapter 2: Introduction

2.1. Brief Statement

Delta “HPP-1K5A01KAT” is a high voltage pulsed DC generator that meets the exciting

requirement in physical vapor deposition technique with a wide range of applications in the

semiconductor, optical and industrial coating, particularly for Reactive Sputtering, like Alumina,

Titania and Silica with high deposition rates.

The reverse voltage here is adjustable from 50V to 100V, which is dependent from the applied

negative voltage and could be adjustable for different targets. Maximum 1.9KV adjustable ignition

voltage could help users to ignite plasma successfully every time for some specific targets, for

example, copper target.

Asymmetric pulsing output makes the arc happening reduced dramatically. With High-speed

MCU based arc detection, Delta power could achieve 1 micro-sec arc detection time. As soon as

the arc is detected, the output will be reversed to positive to reduce arc energy approximately 5

microseconds. When the micro ARC is cleared, normal pulsing resumes.

With Delta’s mutual power supply design technology, efficiency at rated load is higher than

competing products. High efficiency, less temperature stress and highly integrated circuit make it

more stable, reliable and longer product lifetime. DSP-based digital control provides user an

accurate, repeatable and quick pulsed output response. Active front panel, multiple serial and analog

interfaces facilitate user to get an easy and flexible control over power supply.

Figure 2.1 Delta “HPP-1K5A01KAT” Sputtering Power Supply

4.

2.2. Key Feature

 Advanced SiC mosfets module implement:

 The highest power level of pulse DC generator.  The widest frequency adjustment.

 Lossless Snubber circuit.

 Clamp voltage stress of pulse switch.

 Less oscillation.  Ultra low arc energy (< 200uJ/KW)  Configurable reverse voltage (50V~100V)

Chapter 3: Specification

3.1. System Block Diagram

Taipei rectifier PFC ModuleBreaker

Three phase

AC Input

Full Bridge

module

Output

Measurement

Pulsed DC

module

Pulsed DC

Output

Housekeeping

Supplies

Control Circuit

Front Panel Display Isolated Remote InterfacesAdaptable Fan

Configurable power supply

Figure 3.1 System Block Diagram of Delta “HPP-1K5A01KAT”

Table 3.1 Detail Description for Block Diagram

Taipei rectifier PFC Module

Three phase main voltage is applied while breaker is closed. After Taipei rectifier PFC, soft start mechanism suppresses inrush current to prevent any damage. A good power factor condition back to the mains then is modified through Taipei rectifier PFC and AC voltage

is rectified to DC bus for DC-DC Section.

Full Bridge Module

The converter section converts DC voltage stored in the bulk capacitors to high-frequency voltage by alternating the current through switching power components. In the output side, an isolation transformer steps up the high-frequency voltage from the converter section and delivers it to a full-wave rectifier bridge. The rectified DC power is then passed through a measurement section to the output

connector.

Pulse DC Module

In the pulse section, an inductor and a controlled switch are

responsible for generating pulse output from straight DC.

Output Measurement and

Feedback

The output measurement section measures current and voltage, and feedback the voltage and current information to MCU for voltage,

current and power control and related protection.

5.

Housekeeping supplies

The AUX power provides low voltage source to supply the Vcc of

analog OPA, main controller, MCU, fan and LCD display.

Control Circuit

The MCU is responsible for controlling the power supply status and

providing status information to the operator through all interfaces.

Front Panel Display

Control panel shows operating mode, command level, feedback values, set up Arc processing, process control, interface setup,

communication set and system status during power supply working.

Remote Control Interface

The power supply supports three types of interfaces: a User port (analog), a Host port (RS-232, RS-485) and an active front panel. All three interfaces communicate operator-supplied inputs to MCU and

provide the operator with status information.

Configurable power supply

The power supply provide configurable reverse voltage to the output

side in pulse mode and the voltage range is 50V to 100V.

6.

3.2. Electrical Specification

Table 3.2 Electrical Specification

Item

Specification

Condition

Input Voltage

208V

AC

± 10% (Three Phase)

50 to 60Hz

Input Current (Per Phase)

5.5A

RMS

nominal per phase

Rated output power

Maximum Output Power

1.5kW

Measured at the DC output

Output Voltage Range

131VDC to 1000V

DC

Measured at the DC output

Output Current Range

0.01A to 4.62A

Measured at the DC output

Power Supply Efficiency

> 90%

Rated output power at DC 1000V

Power Factor

> 0.95

Rated output power

Output Voltage Ripple

< 2% (V

RMS

)

At DC Mode

Output Voltage Accuracy

1% of command setting or 0.25% of full scale voltage between

output and command

Within operation range at 25 ˚C At DC Mode

Output Current Accuracy

1% of command setting or 0.25% of full scale current between

output and command

Within operation range at 25 ˚C At DC Mode

D-sub Monitor/Command

(Analog Interface) Accuracy

1% of full scale rating between

output and D-sub

Operation range

Ignition Capability

1000Vdc to 1900Vdc 100Vdc increments

Temperature Coefficient

< 50ppm/˚C

20˚C to 40˚C Variation in regulated output

Operation Mode

CV, CC, and CP Mode

-

Operation Temperature

0˚C to 40˚C

-

Arc Energy

< 200uJ per 1kW

-

Main Protection

OVP, OCP, OTP, SCP, ARC

Output Frequency

5K~400KHz, 5KHz increments

Reverse Time

0.4us to 10us, 0.1us increments

Allowable reverse time is limited

for a given frequency

Reverse Voltage

50V~100V, 10V increments

Repeatability

Output power repeatability of the DC inverter from run to run at a constant set-point is 0.1% from

10% to 100% of rated power.

7.

3.3. Reverse Time as a Function of Voltage Limit (V-Limit)

V-Limit(in Volts)

Corresponding Reverse Time

0-325

10

μs

330

9.8

μs

335

9.7

μs

340

9.5

μs

345

9.4

μs

350

9.2

μs

355

9.1

μs

360

9

μs

365

8.9

μs

370

8.7

μs

375

8.6

μs

380

8.5

μs

385

8.4

μs

390

8.3

μs

395

8.2

μs

400

8.1

μs

405

8

μs

410

7.9

μs

415

7.8

μs

420

7.7

μs

425

7.6

μs

430

7.5

μs

435

7.4

μs

440

7.3

μs

445

7.3

μs

450

7.2

μs

455

7.1

μs

460

7

μs

465

6.9

μs

470

6.9

μs

475

6.8

μs

480

6.7

μs

485

6.7

μs

490

6.6

μs

495

6.5

μs

500

6.5

μs

505

6.4

μs

510

6.3

μs

515

6.3

μs

520

6.2

μs

525

6.1

μs

8.

530

6.1

μs

535

6

μs

540

6

μs

545

5.9

μs

550

5.9

μs

555

5.8

μs

560

5.8

μs

565

5.7

μs

570

5.7

μs

575

5.6

μs

580

5.6

μs

585

5.5

μs

590

5.5

μs

595

5.4

μs

600

5.4

μs

605

5.3

μs

610

5.3

μs

615

5.2

μs

620

5.2

μs

625

5.2

μs

630

5.1

μs

635

5.1

μs

640

5

μs

645

5

μs

650

5

μs

655

4.9

μs

660

4.9

μs

665

4.8

μs

670

4.8

μs

675

4.8

μs

680

4.7

μs

685

4.7

μs

690

4.7

μs

695

4.6

μs

700

4.6

μs

705

4.6

μs

710

4.5

μs

715

4.5

μs

720

4.5

μs

725

4.4

μs

730

4.4

μs

735

4.4

μs

740

4.3

μs

745

4.3

μs

9.

750

4.3

μs

755

4.3

μs

760

4.2

μs

765

4.2

μs

770

4.2

μs

775

4.1

μs

780

4.1

μs

785

4.1

μs

790

4.1

μs

795

4.0

μs

800

4.0

μs

805

4.0

μs

810

4.0

μs

815

3.9

μs

820

3.9

μs

825

3.9

μs

830

3.9

μs

835

3.8

μs

840

3.8

μs

845

3.8

μs

850

3.8

μs

855

3.7

μs

860

3.7

μs

865

3.7

μs

870

3.7

μs

875

3.7

μs

880

3.6

μs

885

3.6

μs

890

3.6

μs

895

3.6

μs

900

3.6

μs

905

3.5

μs

910

3.5

μs

915

3.5

μs

920

3.5

μs

925

3.5

μs

930

3.4

μs

935

3.4

μs

940

3.4

μs

945

3.4

μs

950

3.4

μs

955

3.3

μs

960

3.3

μs

965

3.3

μs

970

3.3

μs

10.

975

3.3

μs

980

3.3

μs

985

3.2

μs

990

3.2

μs

995

3.2

μs

1000

3.2

μs

Reverse Time Given a Self-Run Frequency

Requested Frequency (kHz)

Actual Frequency (kHz)

Pulse Reversal Time Maximum (μs)

Duty Cycle (min%) Reverse/ Period

Duty Cycle (max%) Reverse/ Period

5

10

0.2

5

10

0.4

10

15

15.004

10

0.6

15

20

10

0.8

20

25

10 1 25

30

29.985

10

1.2

30

35

35.026

10

1.4

35

40

10

1.6

40

45

45.045

9.9

1.8

44.6

50

50 9 2

45

55

54.945

8.1

2.2

44.5

60

60.06

7.4

2.4

44.4

65

64.935

6.9

2.6

44.8

11.

70

69.93

6.4

2.8

44.8

75

74.906 6 3

44.9

80

5.6

3.2

44.8

85

85.106

5.2

3.4

44.3

90

90.09

4.9

3.6

44.1

95

94.787

4.7

3.79

44.5

100

4.5 4 45

105

105.263

4.2

4.21

44.2

110

109.89 4 4.4

44

115

114.943

3.9

4.6

44.8

120

119.76

3.7

4.79

44.3

125

3.6 5 45

130

129.87

3.4

5.19

44.2

135

135.135

3.3

5.41

44.6

140

139.86

3.2

5.59

44.8

145

144.928

3.1

5.8

44.9

150

150.376

2.9

6.02

43.6

155

155.039

2.9

6.2

45

160

2.8

6.4

44.8

165

165.289

2.7

6.61

44.6

170

169.492

2.6

6.78

44.1

175

175.439

2.5

7.02

43.9

180

180.18

2.4

7.21

43.2

185

183.486

2.4

7.41

44

190

190.476

2.3

7.62

43.8

195

194.175

2.3

7.77

44.7

200

2.2 8 44

205

204.082

2.2

8.16

44.9

210

210.526

2.1

8.42

44.2

215

215.054 2 8.6

43

220

219.78 2 8.79

44

225

224.719 2 8.99

44.9

230

229.885

1.9

9.2

43.7

235

235.294

1.9

9.41

44.7

240

240.964

1.8

9.64

43.4

245

243.902

1.8

9.76

43.9

250

1.6

10

40

255

256.41

1.5

10.26

38.5

260

259.74

1.5

10.39

39

265

266.667

1.5

10.67

40

270

270.27

1.4

10.81

37.8

275

273.973

1.4

10.96

38.4

280

281.69

1.4

11.27

39.4

285

285.714

1.4

11.43

40

12.

290

289.855

1.3

11.59

37.7

295

294.118

1.3

11.76

38.2

300

298.507

1.3

11.94

38.8

305

303.03

1.3

12.12

39.4

310

307.692

1.3

12.31

40

315

312.5

1.2

12.5

37.5

320

317.46

1.2

12.7

38.1

325

322.581

1.2

12.9

38.7

330

327.869

1.2

13.11

39.3

335

333.333

1.2

13.33

40

340

338.983

1.1

13.56

37.3

345

344.828

1.1

13.79

37.9

350

350.877

1.1

14.04

38.6

355

355.877 1 14.2

35.5

360

360.878 1 14.4

36

365

365.788 1 14.6

36.5

370

370.787

0.9

14.8

33.3

375

375.877

0.9

15

33.75

380

380.788

0.9

15.2

34.2

385

385.877

0.9

15.4

34.7

390

390.878

0.9

15.6

35.1

395

395.787

0.9

15.8

35.6

400

400.788

0.9

16

36.0

13.

1000V

200V

325V

4.62A

600V

1.2A 1.5A

Power Limit

Current Limit

Voltage Limit

1900V

Operation Range

V

out

I

out

131V

Figure 3.2 Curve of Output V-I Characteristic

1500W

750W

70Ω

Power Limit

Current Limit

Operation Range

Z

out

666Ω 1333Ω

P

out

Voltage Limit

Figure 3.3 Curve of Output Impedance Characteristic

For Delta “HPP-1K5A01KAT” power supply, the maximum output voltage and current level are

1000 V and 4.62 A (Measured at the DC output). The output characteristic is as the figures above.

If the operation point is below 325V, the power supply can provide at most 4.62 A, if the operation

is more than 325V, the maximum output current will decrease to 1.5 A within the output voltage

reaching 1000V.

14.

3.4. Arc Suppression Specification

Figure 3.4 shows the waveforms and key parameters under arc condition, and Table 3.3

indicates the arc energy and adjustable parameters for user. As soon as the arc is detected by arc

voltage detection within 1 micro sec, power ON delay after a micro ARC will be approximately 5

microseconds. When the micro ARC is cleared normal pulsing resumes.

Hard Arcs (defined as those micro Arcs which cannot be extinguished with the standard micro

ARC algorithm of a 5 microsecond shutdown) will be detected within low impedance after the initial

micro ARC started. Number of detected arcs is displayed by the front panel display or from

communication interface. If hard arc inside vacuum chamber occur, the hard arc flag will be raised

and the power will shut down for a predetermined time.

Figure 3.4 Arc Suppression Mechanisms

Table 3.3 Arc Energy Specification and Adjustable Parameters for User

Item

Specification

Condition

Reverse Time

5u sec

Voltage Level Recognizing as

Arc

10V to 250V, adjustable

10V Step, 100V Default

Hard Arc Shutdown time

200us to 10000us

After Low Z output, power will

shutdown

Arc Energy

< 200uJ per 1kW

With System

0V

0A

Arc Occurs

Detection Circuit Activated

Arc Detected

Switching on

Detection

Time

Reverse

Time

Arc Voltage

Trip Level

t

1

t

2

Voltage

Current

signal of

switching

t

3

t4t5t

6

Recovery

Time

10~250V

-1~-2A

15.

3.5. Ignition Profile

Figure 3.5 shows the waveform of output voltage under Ignition condition. When power ON

with ignition function enabled, the output voltage will rise from 0V to ignition voltage within 10ms.

Then the voltage will stay on ignition voltage for 100ms and fall to 1000V for 900ms. This profile

will repeat every 1s. If the chamber is ignited within 10s, the output voltage will change to the set-

point directly. If not, the generator will latch. The Ignition voltage can be set from 1000V to 1900V, 100V increment.

0V

t

Output

Voltage

-1900V

-1000V

10ms 100ms 900ms 900ms 900ms 900ms100ms 100ms 100ms

Figure 3.5 Ignition Profile

3.6. Process and Monitor Function

Table 3.4 Adjustable function parameters for User

Item

Specification

Description

Max. Power

20 to 1.5 kW

Power will be constrained within the value of setting prior to the

set point of regulation.

Max. Current

0.01 to 4.62 A

Current will be constrained within the value of setting prior

to the set point of regulation.

Max. Voltage

500 to 1000 V

Voltage will be constrained within the value of setting prior

to the set point of regulation.

Ignition Mechanism

1000 to 1900 V

A voltage up to 1900 V is adjustable for igniting the

system.

Ramp Time

50 to 2000 ms

A ramp up to set point is adjustable for a soft start

mechanism.

Set Point

1 to 10 s

Monitoring if the output reaches the setting of regulation within

the setting of period.

Energy Mode

1 to 99999 kJ

Monitoring if the output energy

reaches the setting of energy.

16.

Target Life Mode

1 to 15000 kWh

Monitoring if the output energy

reaches the setting of kWh.

3.7. Mechanical Specification

The outward appearance, cooling specification for minimum CFM Requirement, and I/O ports

of Delta “HPP-1K5A01KAT” sputtering power supply are described as below:

Table 3.4 Mechanical Specification

Item

Description

Physical Dimension

482.6(W)x132.5(H)x560(L)mm 19"(W)x5.2"(H)x23.6"(L) (19" 3U)

Weight

32kg

Cooling

Fan Cooling

AC Input Connector

Harting Han Q/5 series p/n 09120052633

DC Output Connector

7/16 Connector, Female

User Port

Analog I/O: 15-pin female D-sub

Host Port

Digital I/O: 9-pin female RS232 and RS485 and RJ45

Mechanical Drawing

Unit: mm (inch)

Figure 3.6 Mechanical Drawing of Delta “HPP-1K5A01KAT” sputtering power supply

17.

Air cooling

Figure 3.7 Air Flow Schematic Diagram

Delta “HPP-1K5A01KAT” sputtering power supply is the forced air cooling type. Please keep enough

space for air flow cooling capability when it is installing to the cabinet. Air inlet on the front panel and

air outlet on the rear panel is shown in figure 3.7. Air outlet of rear panel is responsible for dissipating

the heat from inside of power supply to outside by internal two fans. The temperature of air inlet

should not exceed 40degree C.

18.

3.8. Environment Specification

Table 3.6 Climatic Specification

Item

Temperature

Relative Humidity

Air Pressure

Operating

0˚C to 40˚C (32˚F to 104˚F)

10% to 90% RH (Non-

condensing)

80kPa to 106kPa

(approximately 2000m

above sea level)

Storage

-25˚C to 55˚C (-13˚F to 131˚F)

10% to 95% RH

80kPa to 106kPa

(approximately 2000m

above sea level)

Transportation

-25˚C to 70˚C (-13˚F to 158˚F)

95% RH (Maximum)

66kPa to 106kPa

(approximately 2000m

above sea level)

Table 3.7 Environment Specification

Item

Description

Operating

Category II

Pollution Degree

Pollution Degree 2

19.

Chapter 4: System Protection Mechanism

4.1. Input Breaker

The function of this switch is to prevent over current at input side from any malfunction

happening and simultaneously provide a manual switch for user to turn off the power supply.

4.2. Protection by MCU (A: Auto Recovery, L: Latch)

Table 4.1 Definition and description of MCU protection

Alarm Condition

Code

Description

Mode

HW Fault M1

M1F

Hardware error from the left module

A

SW OVP

OV

Output over voltage

A

SW OCP

OC

Output over current

A

SW OPP

OP

Output over power

A

Target Life Monitor

09

Power off while output reaches setting Energy

L

Output Interlock

11

Uninstallation of output cover

L

Contactor Interlock

12

Uninstallation of contactor pin in D-sub connector

L

Communication Loss

15

Error from internal communication

L

Fan1 Error

17

Error from the left fan

L

Fan2 Error

18

Error from the right fan

L

Bus UVP

20

Input voltage is under operation range

L

Bus OVP

21

Input voltage is over operation range

L

Set Point Monitor

23

Error while output fails to reach setting parameter

within setting time

L

Energy Mode Monitor

24

Power off while output reaches setting energy

L

Warning Condition

Code

Description

Mode

Output Limit

limit

Output is over setting parameters of setting

A

20.

Chapter 5: Installation

Delta “HPP-1K5A01KAT” power supply is a high voltage power supply. Please read this manual

carefully and follow the instruction before installation and operation, otherwise an electric shock or

a fatal accident might be caused.

Shielding

PE

Chamber

Figure 5.1 Installation diagram

 This power supply could only be placed horizontally and connect the protective grounding

to prevent an electric shock before use.

 Consideration must be taken not to impede the supply or flow of air to the unit.  Please switch off the power supply before touching the case.  Before applying power, please verify that the product is set to match with the line voltage.  The circumstance temperature should be managed under 40˚C  The installation and operation should be only in pollution degree 2 or better environment.

Do not operate this device in a dusty area or in corrosive gas environment.  Proper grounding: For safe use, must connect ground cable (Yellow / Green wire) from

ground stud on the power supply rear panel to the pure earth ground. Poor grounding may

cause an electric shock or fatal accident.  Output connector must be connected with the attached output cable. (3KV/6AWG/200°C,

with shielding). Do not use other output cables.  Before applying power, please verify that the product is set to match with the line voltage.

When emergency, cut-off the circuit breaker, and then removing mains supply cord.  Operating personnel must not remove the cover of the instrument. Component

replacement and internal adjustment can be done only by qualified service personnel.

 Remove mains cord and output cable before exterior maintenance and service.  Use the carrying handle when dismantling it. Avoid drop resulting in hurt.

21.

5.1. Cooling Requirements

For the HPP-1K5A01KAT A supply to be sufficiently cooled, the cabinet must be set up to:.

1. Bring in coolant air of the correct temperature(40 ˚C maximum)

2. Distribute coolant air to the power supplies

3. Prevent air exhausted from the cabinet from circulating back and becoming input air

4. Exhaust the hot air from the cabinet with minimal airflow restriction.

5.2. Cabinet Design

The following is a synopsis of the HPP-1K5A01KAT A to follow when designing a cabinet

containing a stack of HPP-1K5A01KAT A power supplies.

Coolant air must be drawn easily into the cabinet; exhaust air must be able to pass

unrestricted out of the cabinet. If some physical constriant restricts the flow of exhaust air out of

the cabinet, we recommend that fans or blowers be mounted so that the hot air is removed from

the cabinet as quickly as possible.

Each HPP-1K5A01KAT A power supply dissipates up to 10% of its maximum power at full

rated output. The minimum air flows in cubic feet per minute(CFM) required by individual HPP-

1K5A01KAT A supplies are shown in table 5.1. The static pressure(inches of water) of the empty

cabinet should not exceed 0.1 inches of water at the CFM level obtained by adding together the

minimum CFM values for all the power supplies that will be placed in the cabinet. For example, if

three HPP-1K5A01KAT A supplies are mounted in a cabinet, the minimum CFM requirement

would be three times the CFM of cabinet air volume compared to an individual supply.

Approximations of this figure, the total power dissipation, and the temperature difference between

coolant air and exhaust air are shown as an example in table 5.2.

Table 5.1 Minimum CFM requirement for HPP-1K5A01KAT unit

Type of PSU

CFM Required

1.5KW

260 CFM (122.7 liters/second)

22.

5.3. Grounding

For your convenience, the rear panel of the HPP-1K5A01KAT supply features three

equipotential ground screw: three M6 screw. These are indicated on the rear panel by a ground

symbol.See figure 6.2 for more information.

23.

Chapter 6: Interface

6.1. Front Panel

The functions for several buttons on the front panel are described on Table 6.1

Table 6.1 Function description of front panel

“Enter” Button

1. Press the button to change all of adaptive parameters.

2. Press the button to enter the next layer while in menu screen.

“Menu” Button

1. Press the button to menu screen from home screen.

2. Press the button to return to the previous layer while in menu screen.

“P” Button

Press the button to set the output condition in constant power mode. In constant power mode user could adjust output power regulation level by

“enter button” and “knob”.

“I” Button

Press the button to set the output condition in constant current mode. In constant current mode user could adjust output current regulation level by

“enter button” and “knob”.

“V” Button

Press the button to set the output condition in constant voltage mode. In constant voltage mode user could adjust output voltage regulation level by

“enter button” and “knob”.

“ON” Button

Press the button to turn on the output power. While power on, user could

adjust output regulation level by “enter button” and “knob”.

“OFF” Button

Press the button to turn on the output power.

“LOCK” Button

Press the button to lock “Enter”, “Menu”, “P”, “I”, “V”, “ON”, “OFF” button. This function could prevent any unexpected change from panel while PSU

in operation.

Regulation Knob

Rotate the knob to adjust the regulation level.

LCD Display

The display shows command of output regulation level according to control modes of Power/Current/Voltage. It also indicates feedback values of Power/Current/Voltage and system status, such as error conditions for all

protect signals.

24.

Display Panel LEDs

POWER ON

Lights green when input power is on

OUTPUT

Lights green if output power is on

SETPOINT

Lights green if the Pulsed DC power supply is operating within set point; accuracy is within 0.4% of full scale or 2% of set point, whichever is greater

INTERLOCK

Lights green if all interlock conditions have been met

BUS FAULT

Lights green when a bus fault occurs

OVERTEMP

Lights green if the Pulsed DC power supply has exceeded the maximum operating temperature

ARC

After the output has been turned off, this LED lights green for a predetermined time if the hard arc count limit was reached during the previous run. You define this limit. The ARC LED will be activated under two different conditions:

1. If the hard arc count limit is non-zero and the number of hard arcs seen exceeded this limit during the last run, the pulse will occur when the output is turned off.

2. If the hard arc count limit is set to zero, this signal will pulse for a predetermined time for every hard arc seen by the unit. If another hard arc is seen before the last pulse is complete, the pulse width will be refreshed to the full width.

Figure 6.1 Front Panel

25.

6.2. Rear Panel

1. GND terminal is for chamber grounding, and earth grounding should be performed for safety.

2. Connect output terminal to target and connect UHF to the chamber

3. Your pulsed DC power supply features a host port with a 9-pin, female, RS-232/RS-485 connector for interfacing with a host computer.

4. Your pulsed DC power supply features a user port with a 15-pin, female, D-sub connector for interfacing with a computer.

5. The Contactor Intlk port, located on the rear panel of the pulsed DC power supply, is a 9- pin, male, subminiature-D connector. To enable the pulsed DC power supply to function, pins 3 and 4 of this connector must be shorted together (through a cheater plug, external switch, or relay).

Figure 6.2 Rear Panel

26.

6.3. Main Menu Map

Port Selection

Home Screen

Fault Screen

First Layer Second Layer Third Layer

Process Control

Interface Setup

System Information

Delta Service

Limit Setup

Monitor Setup

Arc Setup

Default

Max. Power

Default

1500W

Max. Voltage 1000V

Max. Current 4.62A

Ignition OFF

Ramp Time OFF

Set Point OFF

Energy Mode OFF

Target Life Cnt 1

Default

Arc Function ON

Arc Trip Level 100V

Delay Time OFF Pause Time 250us Arc Density OFF

Arc Number OFF

Communication Setup

Local

Host: RS-485

User : D-sub

User Port Regulation

A / Ri Offset

Local

A / Vo Offset

A / Io Offset

+0.0% +0.0% +0.0%

Default

Parallel Mode Setup Unit State

Master

Parallel Number 01

Termination RES. OFF

Unit Address Depend on 8-Pin Switch

Function Screen

Host : R-S232

Master

Slave

Operation Data

Integral Power Run

Integral Time Run

Power On Count

Output Power Count

After Initializing System

Power On Count

After Initializing System

Output Time Count

After Initializing System

System Life

Total Power Run

Output Power Count

Since Factory

Total Time Run

Output Time Count

After Manufacture

Total On Count

Power On Count

After Manufacture

Software Ver. Panel MCU

System MCU

Arc MCU

S.00 (Depend on Update) S.00 (Depend on Update) S.00 (Depend on Update)

E r r o r O c c u r s

E - 0 0 0

1 OFF

Third Layer Fourth Layer

REG : 1 5.0 W OU T : ON

1 0 0 0 V 4 6. 2 A 1 5 0 W

F : 4 0

M L T : 0 : 0 0 : 0 0S E 0 0sR

0 01uT :

0>

0

zHk

REG : 1 0.0 V O U T : O N

1 0 0 0 V 4 6. 2 A 1 5 0 W

F : 4 0

M L T : 0 : 0 0 : 0 0S E 0 0sR

0 01uT :

0>

0

zHk

REG : 4 ..6 A O U T : O N

1 0 0 0 V 4 6. 2 A 1 5 0 W

F : 4 0

M L T : 0 : 0 0 : 0 0S E 0 0sR

0 01uT :

2>

0

zHk

Reverse Voltage 100V

27.

REG : 1 5.0 W OU T : ON

1 0 0 0 V 4 6. 2 A 1 5 0 W

F : 4 0

M L T : 0 : 0 0 : 0 0S E 0 0

s

R

Command Power On/Off

Voltage/Current/Power Reader

Arc Number、Arc Density

Set Point、Energy、Target Life Mode

Run Time Hr/Min/SecMaster/Slave

0 01

u

T :

Lock

0>

0

zHk

D : 9 9A

9 99AN :

Arc Density Arc Number

Fig 6.3 Front Panel

28.

6.4. Digital Communication Port (Host)

The 9-pin female RS232 connector labeled “Host Port” on the rear of the power supply lets user

connect with computer to control the power supply. Definition of RS232 connector is as follows:

Figure 6.3 Host Port: 9-pin female RS232/RS485 connector

Table6.2 Definition of RS232 RS485 Connector

Pin 1

N/A

Pin 2

RS-232(Tx)

Pin 3

RS-232(Rx)

Pin 4

N/A

Pin 5

GND

Pin 6

RS-485 (+)

Pin 7

RS-485 (-)

Pin 8

N/A

Pin 9

N/A

29.

Table 6.3 Protocol of RS232 Definition (1)

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10

IP

Command

Data1

Data2

Check Sum

Termination

Byte

H-Byte

L-Byte

H-Byte

L-Byte

H-Byte

L-Byte

0x00

Byte

0x00

0x0D

CV Mode

IP

0x11

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

CC Mode

IP

0x12

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

CP Mode

IP

0x13

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

A/Ri Offset

IP

0x15

0x00/01

0x00

00/01

Value

0x00

Value

0x00

0x0D

A/Vo Offset

IP

0x16

0x00/01

0x00

00/01

Value

0x00

Value

0x00

0x0D

A/Io Offset

IP

0x17

0x00/01

0x00

00/01

Value

0x00

Value

0x00

0x0D

Set Point

IP

0x1A

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

Pause Time

IP

0x1C

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

Energy Mode

IP

0x1D

0x00/01/02

Value

0x00

Value

0x00

0x0D

Arc Function

IP

0x1E

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

Max Power

IP

0x22

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

Max Current

IP

0x23

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

Max Voltage

IP

0x24

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

Ramp Time

IP

0x25

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

Target Life

IP

0x26

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

Pulse

reverse time

IP

0x29

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

Pulse

frequency

IP

0x2A

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

Arc Voltage

IP

0x30

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

ARC Density

IP

0x31

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

ARC Number

IP

0x32

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

Ignition

IP

0x33

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

External On

IP

0x41

0x00/01/02

0x00

Value

0x00

0x0D

External Off

IP

0x42

0x00/01/02

0x00

Value

0x00

0x0D

Reset

IP

0x45

0x00

Value

0x00

0x0D

Default 1

IP

0x60

0x00

Value

0x00

0x0D

Limit setup

Default

IP

0x61

0x00

Value

0x00

0x0D

Monitor setup

Default

IP

0x62

0x00

Value

0x00

0x0D

ARC setup

Default

IP

0x63

0x00

Value

0x00

0x0D

User

Regulation

Default

IP

0x70

0x02

0x00

Value

0x00

0x0D

Error IP and

Alarm Code

Return

IP

0x71

0x02

0x00

Value

0x00

0x0D

PSU State

Return

IP

0x80

0x02

0x00

Value

0x00

0x0D

30.

Table 6.4 Protocol of RS232 Definition (2)

PSU to Remote

Byte

0 1 2 3 4 5 6 7 8 9 10

IP

Command

Data1

Data2

Check Sum

Termination

Byte

H-Byte

L-Byte

H-Byte

L-Byte

H-Byte

L-Byte

0x00

Byte

0x00

0x0D

CV Mode

IP

0x11

0x0A

0x00

Value

0x00

Value

0x00

0x0D

CC Mode

IP

0x12

0x0A

0x00

Value

0x00

Value

0x00

0x0D

CP Mode

IP

0x13

0x0A

0x00

Value

0x00

Value

0x00

0x0D

A/Ri Offset

IP

0x15

0x0A

0x00

00/01

Value

0x00

Value

0x00

0x0D

A/Vo Offset

IP

0x16

0x0A

0x00

00/01

Value

0x00

Value

0x00

0x0D

A/Io Offset

IP

0x17

0x0A

0x00

00/01

Value

0x00

Value

0x00

0x0D

Set Point

IP

0x1A

0x0A

0x00

Value

0x00

Value

0x00

0x0D

Pause Time

IP

0x1C

0x0A

0x00

Value

0x00

Value

0x00

0x0D

Energy Mode

IP

0x1D

0x0A

Value

0x00

Value

0x00

0x0D

Arc Function

IP

0x1E

0x0A

0x00

Value

0x00

Value

0x00

0x0D

Max Power

IP

0x22

0x0A

0x00

Value

0x00

Value

0x00

0x0D

Max Current

IP

0x23

0x0A

0x00

Value

0x00

Value

0x00

0x0D

Max Voltage

IP

0x24

0x0A

0x00

Value

0x00

Value

0x00

0x0D

Ramp Time

IP

0x25

0x0A

0x00

Value

0x00

Value

0x00

0x0D

Target Life

IP

0x26

0x0A

0x00

Value

0x00

Value

0x00

0x0D

Pulse

reverse time

IP

0x29

0x0A

0x00

Value

0x00

Value

0x00

0x0D

Pulse

frequency

IP

0x2A

0x0A

0x00

Value

0x00

Value

0x00

0x0D

Arc Voltage

IP

0x30

0x0A

0x00

Value

0x00

Value

0x00

0x0D

ARC Density

IP

0x31

0x0A

0x00

Value

0x00

Value

0x00

0x0D

ARC Number

IP

0x32

0x0A

0x00

Value

0x00

Value

0x00

0x0D

Ignition

IP

0x33

0x0A

0x00

Value

0x00

Value

0x00

0x0D

External On

IP

0x41

0x0A

0x00

Value

0x00

0x0D

External Off

IP

0x42

0x0A

0x00

Value

0x00

0x0D

Reset

IP

0x45

0x0A

0x00

Value

0x00

0x0D

Limit setup

Default

IP

0x60

0x0A

0x00

Value

0x00

0x0D

Monitor setup

Default

IP

0x61

0x0A

0x00

Value

0x00

0x0D

ARC setup

Default

IP

0x62

0x0A

0x00

Value

0x00

0x0D

User

Regulation

Default

IP

0x63

0x0A

0x00

Value

0x00

0x0D

Version

Return

IP

0x70

0x0A

0x00

Value

0x00

0x0D

Error IP and

Alarm Code

Return

IP

0x71

0x0A

0x00

Value

0x00

0x0D

31.

Byte

0 1 2 3 4 5 6 7 8 9 10

11 IP

0x90

Status1

Status2

Warning

Alarm

Voltage(V)

Current(.0A)

Power(.0Kw)

Byte

12

13

14

15

16

17

18

19

20

21

22

23

User

Command

Arc Counter(/s)

Arc Counter 0x00

Check

Sum

0x00

0x0D

Note: Check Sum Value is the summation of “1” signal calculated by byte 0 to 6.

Note: Use 9600bps, 8 data bits, no parity, 1 stop bit (9600 8-N-1)

Bit 0 1 2 3 4 5 6 7

Status1

CV MODE

CC MODE

CP MODE

HV ON

Setpoint MODE

Ignition MODE

System Warning

System

Shutdown

Bit 0 1 2 3 4 5 6 7

Status2

System Ready

OVP

OCP

OTP

OPP

Interlock

Arc Protect

AC Bus

Protect

Table 6.5 Value definition (Translate decimal to hexadecimal for utilizing)

Command

Byte3

Byte4

Byte5

Byte6

CV Mode

0 to 1000 for 0 to 1000V

CC Mode

0 to 462 for 0~4.62A

CP Mode

20 to 1500 for 10w to 1500W

A/Ri Offset

Plus: 00, Minus: 01

0 to 99 for 0 to 9.9%

A/Vo Offset

Plus: 00, Minus: 01

0 to 99 for 0 to 9.9%

A/Io Offset

Plus: 00, Minus: 01

0 to 99 for 0 to 9.9%

Set Point

1 to 10 for 1 to 10s

pause Time

2 to 100 for 200 to 10000us, Scale: 100us

Pulse frequency

0 to 80 for DC to 400k Scale:5kHz

Pulse reverse time

4 to 100 for 0.4us to 10us Scale:0.1us

Energy Mode

1 to 99999 for 1 to 99999kJ, 0: OFF

Arc Function

OFF: 0, ON: 1

Max Power

20 to 1500 for 20 to 1500W

Max Current

10 to 462 for 0.01 to 4.62A

Max Voltage

325 to 1000 for 325 to 1000V

Ramp Time

5 to 200 for 50 to 2000ms

Target Life

0 to 9999kWh for OFF to 9999kWh, 0: OFF

Arc Voltage

10 to 250 for 10 to 250

Arc Density

0 to 99 for 0 to 99 times/s

Arc Number

0 to 999 for 0 to 999 times

Ignition

10 to 19 for 1000V to 1900V

Note: Please use hexadecimal

32.

6.5. Analog Communication Port (User)

The 15-pin female subminiature-D connector labeled “User Port” on the rear of the power supply

lets you connect with control box to control the power supply in analog signal. Definition of 15-pin

female subminiature-D connector is as follows:

Figure 6.4 Connector of user port, 15pin female subminiature-D

Table 6.6 Definition of subminiature-D connector

Pin Define

I/O

Description

1

+24V

I

External 24V is connected to the collector of photo

coupler

2

VOUT_A

O

Pin 2 shows the reader of output voltage 0 to 10 V for V = 0 to 1000 V

3

POUT_A

O

Pin 3 shows the reader of output Power 0 to 10 V for P = 0 to 1.5 kW

4

OUTPUT_ENABLE_D

I

Turn on the output power by pulling the pin low

5

XPROG_A

I

User could adjust regulation by Pin 5 0 to 10 V for P = 0 to 1.5 kW

6

COM_A

-

The return pin for VOUT_A, POUT_A, XPROG_A

7

PWRON_D

O

Pin 7 shows the on/off state of output

8

PWRON COM_D

-

The return pin for PWRON_D

9

OUTPUT_ENABLE_COM_D

-

The return pin for OUTPUT_ENABLE_D

PSU

Digital Signal Output

Digital Signal Input

Vcc

+15V_ISO

Analog Signal Input

Vcc

+15V_ISO

Analog Signal Output

15-pin D-sub

+15V_ISO

33.

10

MOD GREEN

O

Pin 10 is connected to the emitter of photo coupler

for MOD GREEN function

11

INTERLOCK_D

I

Pin 11 indicates the disconnection of interlock

12

INTLK COM_D

-

The return pin for INTERLOCK_D

13

NET GREEN

O

Pin 13 is connected to the emitter of photo coupler

for NET GREEN function

14

MOD AMBER

O

Pin 14 is connected to the emitter of photo coupler

for MOD AMBER function

15

NET AMBER

O

Pin 15 is connected to the emitter of photo coupler

for NET AMBER function

Note 6.5: Precaution for external connection

 Port of Digital Signal Input

To control the input signal, a switch is utilized between the ports and isolated ground. Open → Floating Close → Grounding

 Port of digital Signal output

The internal resistance of the ports is 5.1 kohm, and a pull-up power supply V

pull-up

is

required with a 5.1 kohm resistor. Initial → > 0.9 * V

pull-up

Trigger → < 0.5 * V

pull-up

+ 1 V

If V

pull-up

is connected to “+15V_ISO” supplied by pin18 with a 5.1 kohm resistor, initial state

would be high than 13.5 V and trigger state would be lower than 8.5 V.

 Analog Signal Input Port

An isolated amplifier is utilized in the ports. The voltage level is 0 to 10 V for user to enter

the command and shall not greater than 12 V.

 Analog Signal output Port

An isolated amplifier is utilized in the ports. The voltage level is 0 to 10 V for users to read

out the output values of voltage, current, and power.

34.

Chapter 7: Operation

7.1. Local Operating Steps

Step A

Import AC voltage to input connector on rear panel. The mains voltage level should be 208±

10% V

AC

.

Step B

Turn on the breaker to start the power supply. Now, you can see “LCD Display” is working and

shows the default setting of the power supply.

Step C

Choose one operating mode from “P”, “I”, “V” button, and “LCD Display” will show the mode

you selected and change the command unit mode by mode.

Operating mode cannot be changed during power on period. It only can select while power off.

Step D

Rotate the knob to adjust the regulation level. The command (P, I or V) will change by different

mode selection in step B. The reverse time can be adjusted from 0.4us to 10.0us. The frequency

can be adjusted from 5kHz to 400kHz. When in Power mode, the command can be adjusted from 0

to 1.5 kW; when in Current mode, command can be adjusted from 0.01 to 4.62 A; when in Voltage

mode, and command can be adjusted from 131 to 1000 V

Step E

Press the “On” button to turn on the output power. While power on, user could adjust output

regulation level by “Enter” button and “knob”. “LCD Display” will show the feedback values once the

output is on.

After power on, the electric shock may lead to death or serious injury. Please read this manual

carefully and follow the instruction steps before installation and operation, otherwise an electric

shock or a fatal accident might be caused.

Step F

Press the “Off” button to turn off the output power.

35.

Step G

If the power supply is kept off for a while, please remove AC power cord.

Don’t touch the load before grounding it. And make sure the electricity is fully discharged by meter.

7.2. D-sub Operating Steps

Example : CP mode 1.5 kW output

Operating steps:

1. Set the front panel => Interface Setup => Communnication Setup => D-sub.

2. Command Level: Set +10 V input to pin 5 for 1.5 kW Command.

3. Enable On: Connect pin 4 to pin 9

4. Enable Off: Remove pin4 from pin 9.

7.3. RS-232 Operating Steps

1. Set the front panel => Interface Setup => Communnication Setup => RS-232.

2. Follow the protocol defined in chapter 6.4 to operating.

3. Set Pulse reverse time and Pulse frequency

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10

IP

Command

Data1

Data2

Check Sum

Termination

Byte

H-Byte

L-Byte

H-Byte

L-Byte

H-Byte

L-Byte

0x00

Byte

0x00

0x0D

Pulse

reverse time

IP

0x29

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

Pulse

frequency

IP

0x2A

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

4. Set Operating mode

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10

IP

Command

Data1

Data2

Check Sum

Termination

Byte

H-Byte

L-Byte

H-Byte

L-Byte

H-Byte

L-Byte

0x00

Byte

0x00

0x0D

CV Mode

IP

0x11

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

CC Mode

IP

0x12

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

CP Mode

IP

0x13

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

5. Power on and power off

36.

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10

IP

Command

Data1

Data2

Check Sum

Termination

Byte

H-Byte

L-Byte

H-Byte

L-Byte

H-Byte

L-Byte

0x00

Byte

0x00

0x0D

External On

IP

0x41

0x00/01/02

0x00

Value

0x00

0x0D

External Off

IP

0x42

0x00/01/02

0x00

Value

0x00

0x0D

7.4. RS-485 Operating Steps

1. Set the front panel => Interface Setup => Communnication Setup => RS-485.

2. Follow the protocol defined in chapter 6.4 to operating.

3. Set Pulse reverse time and Pulse frequency

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10

IP

Command

Data1

Data2

Check Sum

Termination

Byte

H-Byte

L-Byte

H-Byte

L-Byte

H-Byte

L-Byte

0x00

Byte

0x00

0x0D

Pulse

reverse time

IP

0x29

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

Pulse

frequency

IP

0x2A

0x00/01

0x00

Value

0x00

Value

0x00

0x0D

4. Set Operating mode

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10

IP

Command

Data1

Data2

Check Sum

Termination

Byte

H-Byte

L-Byte

H-Byte

L-Byte

H-Byte

L-Byte

0x00

Byte

0x00

0x0D

CV Mode

IP

0x11

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

CC Mode

IP

0x12

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

CP Mode

IP

0x13

0x00/01/02

0x00

Value

0x00

Value

0x00

0x0D

5. Power on and power off

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10

IP

Command

Data1

Data2

Check Sum

Termination

Byte

H-Byte

L-Byte

H-Byte

L-Byte

H-Byte

L-Byte

0x00

Byte

0x00

0x0D

External On

IP

0x41

0x00/01/02

0x00

Value

0x00

0x0D

External Off

IP

0x42

0x00/01/02

0x00

Value

0x00

0x0D

37.

Chapter 8: Maintenance

Alarm Condition

Code

Description

Suggested Action

HW Fault M1

M1F

Hardware error from the left module