Delta HPP-1K5A01KAT User Manual

User Manual

PULSED DC Power Supply

Continuous 325 – 1000VDC

Model: HPP-1K5A01KAT A

Version: Rev.S.00

I.

Copyright

All rights reserved. The contents either of manual and design of power supply

may not be reproduced or used in any manner whatsoever without admittance by

Delta Electronics Inc.

Warranty

This product Delta “HPP-1K5A01KAT” Model is been warranted against defect in
material and workmanship for a period of “1” year after date of shipment. Delta agrees
to repair or replace the fault unit free-of-charge which fails to perform with specification

and under normal use during this period.

This warranty shall not apply to the following items and will be billed of cost:

1. To exceed the warranty period.

2. Subject to misuse, negligence, accident or natural disaster.

3. Used in a hazardous or dangerous manner either alone or in conjunction
with other equipment.

4. Repaired or altered by person who was not authorized by Delta.

5. Appearance change with environment factor

Delta will be the sole arbiter for those circumstances

To make a warranty claim please contact Delta at telephone number in the table

or support at delta.com, the fault unit transportation to Delta to be prepaid and

responsibility by purchaser, and Delta will take responsibility for ship it back.

Delta Electronics, Inc.

3 Tungyuan Road, Chungli Industrial Zone
Taoyuan County 32063, Taiwan, ROC
Tel: [phone]
Fax: [phone]
Web Site: www.deltaww.com

II.

INDEX ...............................................................

Chapter 1: Safety and Standard ································································· 1

1.1. Important Safety Information ··········································································· 1

1.2. Safety and Warning Symbols ·········································································· 1

1.3. Electromagnetic Compatibility Directives and Standard ········································· 2

1.4. Industry Guideline ························································································ 2

Chapter 2: Introduction ············································································· 3

2.1. Brief Statement ···························································································· 3

2.2. Key Feature ································································································ 4

Chapter 3: Specification ··········································································· 4

3.1. System Block Diagram ·················································································· 4

3.2. Electrical Specification ··················································································· 6

3.3. Ignition Capability ························································································· 7

3.4. Arc Suppression Specification ········································································14

3.5. Ignition Profile ····························································································15

3.6. Process and Monitor Function ········································································15

3.6. Mechanical Specification ···············································································16

3.6. Environment Specification ·············································································18

Chapter 4: System Protection Mechanism ················································ 19

4.1. Input Breaker ·····························································································19

4.2. Protection by MCU ······················································································19

Chapter 5: Installation ············································································ 20

5.1. Cooling Requirements ··················································································21

5.2. Cabinet Design ···························································································21

5.3. Grounding ·································································································22

Chapter 6: Interface ················································································ 23

6.1. Front Panel ································································································23

6.2. Rear Panel ································································································25

6.3. Main Menu Map……………………………………………………………………………….. 26

6.4. Digital Communication Port (Host) ···································································28

6.5. Analog Communication Port (User) ··································································32

Chapter 7: Operation ·············································································· 34

7.1. Panel Operating Steps··················································································34

7.2. D-SUB Operating Steps ················································································35

7.3. RS232 Operating Steps ················································································35

7.4. RS485 Operating Steps ················································································36

Chapter 8: Maintenance ·········································································· 37

1.

Chapter1: Safety and Standard

1.1. Important Safety Information

To keep your safety from hazardous and fatal circumstance, please read and realize the content

of this manual before installing and operating Delta “HPP-series” power supply.

1.2. Safety and Warning Symbols

The following advisory symbols as shown in Table 1.1 will be used in the manual for different

level of warning. The meanings of the advisory symbols are explained below.

Table 1.1 Safety and Warning Symbols (1)

This danger symbol advises that improper operation will cause

serious personal injury or death.

This warning symbol advises that improper operation will
cause serious personal injury, or catastrophic damage the
generator or any electronic devices connected to the

generator, or lose important data.

This caution symbol advises that improper operation will cause
personal injury, or damage the power supply or any electronic

devices connected to the power supply, or lose data.

The following advisory symbols as shown in Table 1.2 are used on safety warning labels, and/or

on printed circuit board (only provided with white paint), and/or other part of the generator. The

meanings of these symbols are explained as below.

Table 1.2 Safety and Warning Symbols (2)

Dangerous voltage symbol indicates the presence of high
voltage. Access the high voltage will cause serious personal

injury or death.

To protect against electrical shock in case of a fault. This
symbol indicates that the terminal must be connected to

ground before operation of equipment.

Residual voltage:

Wait 8 minutes at least for capacitor discharge after power cord
is removed and before servicing.

2.

Heavy object:

Two persons lifting are recommended to avoid muscle strain or

back injuries.

1.3. Electromagnetic Compatibility Directives and Standard

 Disturbance Characteristic: EN55011 - CRSP11 Class A, Group 1 (>20kVA)
 General Immunity Standard for Industry: EN 61000-6-2
 Safety Requirement: IEC-61010-1 (CE and UL certification)

1.4. Industry Guideline

 Guideline for Semiconductor manufacturing equipment: SEMI S2 and F47

3.

Chapter 2: Introduction

2.1. Brief Statement

Delta “HPP-1K5A01KAT” is a high voltage pulsed DC generator that meets the exciting

requirement in physical vapor deposition technique with a wide range of applications in the

semiconductor, optical and industrial coating, particularly for Reactive Sputtering, like Alumina,

Titania and Silica with high deposition rates.

The reverse voltage here is adjustable from 50V to 100V, which is dependent from the applied

negative voltage and could be adjustable for different targets. Maximum 1.9KV adjustable ignition

voltage could help users to ignite plasma successfully every time for some specific targets, for

example, copper target.

Asymmetric pulsing output makes the arc happening reduced dramatically. With High-speed

MCU based arc detection, Delta power could achieve 1 micro-sec arc detection time. As soon as

the arc is detected, the output will be reversed to positive to reduce arc energy approximately 5

microseconds. When the micro ARC is cleared, normal pulsing resumes.

With Delta’s mutual power supply design technology, efficiency at rated load is higher than

competing products. High efficiency, less temperature stress and highly integrated circuit make it

more stable, reliable and longer product lifetime. DSP-based digital control provides user an

accurate, repeatable and quick pulsed output response. Active front panel, multiple serial and analog

interfaces facilitate user to get an easy and flexible control over power supply.

Figure 2.1 Delta “HPP-1K5A01KAT” Sputtering Power Supply

4.

2.2. Key Feature

 Advanced SiC mosfets module implement:

 The highest power level of pulse DC generator.
 The widest frequency adjustment.

 Lossless Snubber circuit.

 Clamp voltage stress of pulse switch.

 Less oscillation.
 Ultra low arc energy (< 200uJ/KW)
 Configurable reverse voltage (50V~100V)

Chapter 3: Specification

3.1. System Block Diagram

Taipei rectifier PFC ModuleBreaker

Three phase

AC Input

Full Bridge

module

Output

Measurement

Pulsed DC

module

Pulsed DC

Output

Housekeeping

Supplies

Control Circuit

Front Panel Display Isolated Remote InterfacesAdaptable Fan

Configurable
power supply

Figure 3.1 System Block Diagram of Delta “HPP-1K5A01KAT”

Table 3.1 Detail Description for Block Diagram

Taipei rectifier PFC Module

Three phase main voltage is applied while breaker is closed. After
Taipei rectifier PFC, soft start mechanism suppresses inrush current
to prevent any damage. A good power factor condition back to the
mains then is modified through Taipei rectifier PFC and AC voltage

is rectified to DC bus for DC-DC Section.

Full Bridge Module

The converter section converts DC voltage stored in the bulk
capacitors to high-frequency voltage by alternating the current
through switching power components. In the output side, an isolation
transformer steps up the high-frequency voltage from the converter
section and delivers it to a full-wave rectifier bridge. The rectified DC
power is then passed through a measurement section to the output

connector.

Pulse DC Module

In the pulse section, an inductor and a controlled switch are

responsible for generating pulse output from straight DC.

Output Measurement and

Feedback

The output measurement section measures current and voltage, and
feedback the voltage and current information to MCU for voltage,

current and power control and related protection.

5.

Housekeeping supplies

The AUX power provides low voltage source to supply the Vcc of

analog OPA, main controller, MCU, fan and LCD display.

Control Circuit

The MCU is responsible for controlling the power supply status and

providing status information to the operator through all interfaces.

Front Panel Display

Control panel shows operating mode, command level, feedback
values, set up Arc processing, process control, interface setup,

communication set and system status during power supply working.

Remote Control Interface

The power supply supports three types of interfaces: a User port
(analog), a Host port (RS-232, RS-485) and an active front panel. All
three interfaces communicate operator-supplied inputs to MCU and

provide the operator with status information.

Configurable power supply

The power supply provide configurable reverse voltage to the output

side in pulse mode and the voltage range is 50V to 100V.

6.

3.2. Electrical Specification

Table 3.2 Electrical Specification

Item

Specification

Condition

Input Voltage

208V

AC

± 10% (Three Phase)

50 to 60Hz

Input Current (Per Phase)

5.5A

RMS

nominal per phase

Rated output power

Maximum Output Power

1.5kW

Measured at the DC output

Output Voltage Range

131VDC to 1000V

DC

Measured at the DC output

Output Current Range

0.01A to 4.62A

Measured at the DC output

Power Supply Efficiency

> 90%

Rated output power at DC 1000V

Power Factor

> 0.95

Rated output power

Output Voltage Ripple

< 2% (V

RMS

)

At DC Mode

Output Voltage Accuracy

1% of command setting or 0.25%
of full scale voltage between

output and command

Within operation range at 25 ˚C
At DC Mode

Output Current Accuracy

1% of command setting or 0.25%
of full scale current between

output and command

Within operation range at 25 ˚C
At DC Mode

D-sub Monitor/Command

(Analog Interface) Accuracy

1% of full scale rating between

output and D-sub

Operation range

Ignition Capability

1000Vdc to 1900Vdc
100Vdc increments

Temperature Coefficient

< 50ppm/˚C

20˚C to 40˚C
Variation in regulated output

Operation Mode

CV, CC, and CP Mode

-

Operation Temperature

0˚C to 40˚C

-

Arc Energy

< 200uJ per 1kW

-

Main Protection

OVP, OCP, OTP, SCP, ARC

Output Frequency

5K~400KHz, 5KHz increments

Reverse Time

0.4us to 10us, 0.1us increments

Allowable reverse time is limited

for a given frequency

Reverse Voltage

50V~100V, 10V increments

Repeatability

Output power repeatability of the
DC inverter from run to run at a
constant set-point is 0.1% from

10% to 100% of rated power.

7.

3.3. Reverse Time as a Function of Voltage Limit (V-Limit)

V-Limit(in Volts)

Corresponding Reverse
Time

0-325

10

μs

330

9.8

μs

335

9.7

μs

340

9.5

μs

345

9.4

μs

350

9.2

μs

355

9.1

μs

360

9

μs

365

8.9

μs

370

8.7

μs

375

8.6

μs

380

8.5

μs

385

8.4

μs

390

8.3

μs

395

8.2

μs

400

8.1

μs

405

8

μs

410

7.9

μs

415

7.8

μs

420

7.7

μs

425

7.6

μs

430

7.5

μs

435

7.4

μs

440

7.3

μs

445

7.3

μs

450

7.2

μs

455

7.1

μs

460

7

μs

465

6.9

μs

470

6.9

μs

475

6.8

μs

480

6.7

μs

485

6.7

μs

490

6.6

μs

495

6.5

μs

500

6.5

μs

505

6.4

μs

510

6.3

μs

515

6.3

μs

520

6.2

μs

525

6.1

μs

8.

530

6.1

μs

535

6

μs

540

6

μs

545

5.9

μs

550

5.9

μs

555

5.8

μs

560

5.8

μs

565

5.7

μs

570

5.7

μs

575

5.6

μs

580

5.6

μs

585

5.5

μs

590

5.5

μs

595

5.4

μs

600

5.4

μs

605

5.3

μs

610

5.3

μs

615

5.2

μs

620

5.2

μs

625

5.2

μs

630

5.1

μs

635

5.1

μs

640

5

μs

645

5

μs

650

5

μs

655

4.9

μs

660

4.9

μs

665

4.8

μs

670

4.8

μs

675

4.8

μs

680

4.7

μs

685

4.7

μs

690

4.7

μs

695

4.6

μs

700

4.6

μs

705

4.6

μs

710

4.5

μs

715

4.5

μs

720

4.5

μs

725

4.4

μs

730

4.4

μs

735

4.4

μs

740

4.3

μs

745

4.3

μs

9.

750

4.3

μs

755

4.3

μs

760

4.2

μs

765

4.2

μs

770

4.2

μs

775

4.1

μs

780

4.1

μs

785

4.1

μs

790

4.1

μs

795

4.0

μs

800

4.0

μs

805

4.0

μs

810

4.0

μs

815

3.9

μs

820

3.9

μs

825

3.9

μs

830

3.9

μs

835

3.8

μs

840

3.8

μs

845

3.8

μs

850

3.8

μs

855

3.7

μs

860

3.7

μs

865

3.7

μs

870

3.7

μs

875

3.7

μs

880

3.6

μs

885

3.6

μs

890

3.6

μs

895

3.6

μs

900

3.6

μs

905

3.5

μs

910

3.5

μs

915

3.5

μs

920

3.5

μs

925

3.5

μs

930

3.4

μs

935

3.4

μs

940

3.4

μs

945

3.4

μs

950

3.4

μs

955

3.3

μs

960

3.3

μs

965

3.3

μs

970

3.3

μs

10.

975

3.3

μs

980

3.3

μs

985

3.2

μs

990

3.2

μs

995

3.2

μs

1000

3.2

μs

Reverse Time Given a Self-Run Frequency

Requested
Frequency
(kHz)

Actual
Frequency
(kHz)

Pulse
Reversal
Time
Maximum
(μs)

Duty Cycle
(min%)
Reverse/
Period

Duty Cycle
(max%)
Reverse/
Period

5

5

10

0.2

5

10

10

10

0.4

10

15

15.004

10

0.6

15

20

20

10

0.8

20

25

25

10 1 25

30

29.985

10

1.2

30

35

35.026

10

1.4

35

40

40

10

1.6

40

45

45.045

9.9

1.8

44.6

50

50 9 2

45

55

54.945

8.1

2.2

44.5

60

60.06

7.4

2.4

44.4

65

64.935

6.9

2.6

44.8