Delta HPH-20KA01KAT User Manual

User Manual

DC Power Supply

Continuous 400 – 1000 VDC

Model: HPH-20KA01KAT

Version: Rev. S.00

Delta Electronics. Inc. HPH- 20KA01KAT

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Copyright

All rights reserved. The contents either of manual and design of power supply

may not be reproduced or used in any manner whatsoever without admittance by

Delta Electronics Inc.

Warranty

This product Delta “HPH-20KA01KAT” Model is been warranted against defect in
material and workmanship for a period of “1” year after date of shipment. Delta agrees
to repair or replace the fault unit free-of-charge which fails to perform with specification

and under normal use during this period.

This warranty shall not apply to the following items and will be billed of cost:

1. To exceed the warranty period.

2. Subject to misuse, negligence, accident or natural disaster.

3. Used in a hazardous or dangerous manner either alone or in conjunction
with other equipment.

4. Repaired or altered by person who was not authorized by Delta.

5. Appearance change with environment factor

Delta will be the sole arbiter for those circumstances

To make a warranty claim please contact Delta at telephone number in the table

or support at delta.com, the fault unit transportation to Delta to be prepaid and

responsibility by purchaser, and Delta will take responsibility for ship it back.

Delta Electronics, Inc.

3 Tungyuan Road, Chungli Industrial Zone
Taoyuan County 32063, Taiwan, ROC
Tel: [phone]
Fax: [phone]
Web Site: www.deltaww.com

Delta Electronics. Inc. HPH- 20KA01KAT

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INDEX

Chapter 1: Safety and Standard ······························································· 1

1.1. Important Safety Information ············································································· 1

1.2. Safety and Warning Symbols ············································································· 1

1.3. Electromagnetic Compatibility Directives and Standard ·········································· 2

1.4. Industry Guideline ··························································································· 2

Chapter 2: Introduction ··········································································· 3

2.1. Brief Statement ······························································································· 3

2.2. Key Feature ··································································································· 3

Chapter 3: Specification ·········································································· 4

3.1. System Block Diagram ····················································································· 4

3.2. Electrical Specification ····················································································· 5

3.3. Arc Suppression Specification ············································································ 7

3.4. Process and Monitor Function…………………………………………………………………8

3.5. Mechanical Specification ·················································································· 9

3.6. Environment Specification ··············································································· 10

Chapter 4: System Protection Mechanism ··············································· 11

4.1. Input Breaker ································································································ 11

4.2. Protection by MCU ························································································· 11

Chapter 5: Installation ··········································································· 14

5.1. Cooling Requirements ···················································································· 15

5.2. Cabinet Design ····························································································· 15

5.3. Grounding ··································································································· 16

5.4. Connecting For Master/Slave ·········································································· 16

5.5. Configuring Your Master Unit ··········································································· 16

5.6. Configuring Your Slave Units ··········································································· 17

5.7. Monitoring Your Master/Slave System ······························································· 19

5.8. Clearing Faults in a Master/Slave System ·························································· 19

Chapter 6: Interface ·············································································· 20

6.1. Front Panel ·································································································· 20

6.2. Rear Panel ·································································································· 21

6.3. Main Menu Map……………………………………………………………………………….. 22

6.4. Digital Communication Port (Host) ···································································· 23

6.5. Analog Communication Port (User) ··································································· 27

Delta Electronics. Inc. HPH- 20KA01KAT

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Chapter 7: Operation ············································································ 30

7.1. Panel Operating Steps ··················································································· 30

7.2. D-SUB Operating Steps ················································································· 31

7.3. RS232 Operating Steps ·················································································· 31

7.4. RS485 Operating Steps ·················································································· 31

7.5. Parallel Operating Steps ················································································· 32

Chapter 8: Maintenance ········································································ 33

Delta Electronics. Inc. HPH- 20KA01KAT

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Chapter1: Safety and Standard

1.1. Important Safety Information

To keep your safety from hazardous and fatal circumstance, please read and realize the content

of this manual before installing and operating Delta “HPH-series” power supply.

1.2. Safety and Warning Symbols

The following advisory symbols as shown in Table 1.1 will be used in the manual for different

level of warning. The meanings of the advisory symbols are explained below.

Table 1.1 Safety and warning symbols (1)

This danger symbol advises that improper operation will

cause serious personal injury or death.

This warning symbol advises that improper operation will
cause serious personal injury, or catastrophic damage the
generator or any electronic devices connected to the

generator, or lose important data.

This caution symbol advises that improper operation will
cause personal injury, damage the power supply or any

electronic devices connected to the power supply, lose data.

The following advisory symbols as shown in Table 1.2 are used on safety warning labels, and/or

on printed circuit board (only provided with white paint), and/or other part of the generator. The

meanings of these symbols are explained as below.

Table 1.2 Safety and warning symbols (2)

Dangerous voltage symbol indicates the presence of high
voltage. Access the high voltage will cause serious personal

injury or death.

To protect against electrical shock in case of a fault. This
symbol indicates that the terminal must be connected to

ground before operation of equipment.

Residual voltage:

Wait 8 minutes at least for capacitor discharge after power
cord is removed and before servicing.

Heavy object:

Two persons lifting are recommended to avoid muscle strain

or back injuries.

Delta Electronics. Inc. HPH- 20KA01KAT

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1.3. Electromagnetic Compatibility Directives and Standard

 Disturbance Characteristic: EN55011 - CRSP11 Class A, Group 1 (>20 kVA)
 General Immunity Standard for Industry: EN 61000-6-2
 Safety Requirement: IEC-61010-1 (CE and UL certification)

1.4. Industry Guideline

 Guideline for Semiconductor manufacturing equipment: SEMI S2 and F47

Delta Electronics. Inc. HPH- 20KA01KAT

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Chapter 2: Introduction

2.1. Brief Statement

Delta “HPH-20KA01KAT” is a high voltage DC generator that meets the exciting requirement in

sputtering system. Tight regulation, small output ripple and superior arc quenching make it very

suitable to be applied in most of plasma-based sputtering application.

Figure 2.1 Delta “HPH-20KA01KAT” power supply

2.2. Key Feature

 Excellent Accuracy, Load Regulation, and Stability
 Ultrafast Arc Suppression Detect Time
 Very Low Arc Energy (< 1 mJ per kW)
 Adjustable Ramp and Delay Time
 Convenience for Multi-parallel Application
 Remote Control Signals, User Port Analog I/O (D-sub), Host Port Digital I/O (RS-

232 and RS-485)

Delta Electronics. Inc. HPH- 20KA01KAT

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Chapter 3: Specification

3.1. System Block Diagram

Figure 3.1 System block diagram of Delta “HPH-20KA01KAT”

Table 3.1 Detail description for block diagram

Soft Start and PFC Section

AC line voltage is applied through the circuit breaker. The contactor,
when closed, delivers the line voltage to a rectifier bridge, where it is

converted to DC bus.

Converter Section

The converter section converts DC voltage stored in the bulk
capacitors to high-frequency voltage by alternating the current

through switching power components.

Output Section

In the output section, an isolation transformer steps up the high­frequency voltage from the converter section and delivers it to a full­wave rectifier bridge. The rectified DC power is then passed through

a measurement section to the output connector.

Output Measurement and

Feedback

The output measurement section measures current and voltage, and
feedback the voltage and current information to MCU for voltage,

current and power control and related protection.

Auxiliary Power

The AUX power provides low voltage source to supply the Vcc of

analog OPA, main controller, MCU, fan and LCD display.

MCU.FPGA

The MCU is responsible for controlling the power supply status and
providing status information to the operator through all interfaces.

The FPGA dominates the arc suppression mechanism.

Control Panel Display

Control panel shows operating mode, command level, feedback
values, set up Arc processing, process control, interface setup,

communication set and system status during power supply working.

Remote Control Interface

The power supply supports three types of interfaces: a User port
(analog), a Host port (RS-232, RS-485) and an active front panel. All
three interfaces communicate operator-supplied inputs to MCU and

provide the operator with status information.

EMI Filter

Three-phase
Power Input

PFC DC Bus

DC-DC

Converter

Arc Suppressor

Soft Start

Mechanism

Wide Range

Power Output

System Controller Interface

Sensor & Driver

Auxiliary

Power

Adaptable Fan Isolation

Delta Electronics. Inc. HPH- 20KA01KAT

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3.2. Electrical Specification

Table 3.2 Electrical specification

Item

Specification

Condition

Input Voltage

208 V

AC

± 10% (Three Phase)

50 / 60 Hz

Input Current (Per Phase)

< 80 A

RMS

208V

AC

Input voltage

Maximum Output Power

20 kW

-

Output Voltage Range

0 to 1000 V

Output accuracy specification

guaranteed from 131 to 1000 V

Output Current Range

0 to 50 A

Output accuracy specification

guaranteed from 5 to 50 A

Power Supply Efficiency

> 90%

Rated output power at 1000 V

Power Factor

> 0.9

Rated output power

Output Voltage Ripple

< 2% (V

RM

S), line frequency

20% to 100% output power

within operation range

Output Voltage Accuracy

1% of command setting or 0.5%
of full scale voltage between

output and command

Within operation range at 25 ˚C

Output Current Accuracy

1% of command setting or 0.5%
of full scale current between

output and command

Within operation range at 25 ˚C

Output Voltage Reader (Digital

Interface) Accuracy

1% of command setting or 0.5%
of full scale voltage between

output and command

Within operation range at 25 ˚C

Output Current Reader

(Digital Interface) Accuracy

1% of command setting or 0.5%
of full scale current between

output and command

Within operation range at 25 ˚C

D-sub Reader/Command

(Analog Interface) Accuracy

1% of full scale rating P/I/V

between output and D-sub

Within operation range at 25 ˚C

Parallel Reader (Digital

Interface) Accuracy

20% of full scale rating P/I/V

between output and D-sub

Within operation range at 25˚C

Parallel D-sub Reader (Analog

Interface) Accuracy

20% of full scale rating P/I/V

between output and D-sub

Within operation range at 25˚C

Load Regulation

1% of command setting or 0.5%
of full scale voltage between

output and command

10% to 100% Output Power

Delta Electronics. Inc. HPH- 20KA01KAT

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Temperature Coefficient

< 50 ppm/˚C

20 to 40 ˚C
Variation in regulated output

Regulation Mode

Constant voltage, current, and power mode

Figure 3.2 Operation curve of output V-I characteristic

Figure 3.3 Operation curve of output impedance characteristic

1000V

200V

400V

50A

600V

5A 20A

Power Limit

Current Limit

Voltage Limit

1900V

Operation Range

V

out

I

out

131V

20kW

10kW

8Ω

Power Limit

Current Limit

Operation Range

Z

out

50Ω 100Ω

P

out

Voltage Limit

Delta Electronics. Inc. HPH- 20KA01KAT

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For Delta “HPH-20KA01KAT” power supply, the maximum output voltage and current level are
1000 V and 50 A. The output characteristic is as the figures above. If the operation point is below
400 V, the power supply can provide at most 50 A, if the operation is more than 400 V, the maximum

output current will decrease to 20 A within the output voltage reaching 1000 V.

Delta Electronics. Inc. HPH- 20KA01KAT

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3.3. Arc Suppression Specification

Figure 3.4 shows the waveforms and key parameters under arc condition, and Table 3.3

indicates the arc energy and adjustable parameters for user.

Figure 3.4 Arc Suppression mechanisms

Table 3.3 Arc Energy specification and adjustable parameters for User

Item

Specification

Description

Delay Time

1 to 5 µs

Adjustable delay until cutoff

output after detecting arc

Pause Time

40 to 250 µs

Adjustable time between output

cutoff and recovery

Arc Trip Voltage Level

25 to 200 V

The level to determine if arc

occurs from output

Over Arc Density Protection

1 to 99

Adjustable counter to alarm if
the a frequent arc condition

occurs within 1 second

Over Arc Number Protection

1 to 999

Adjustable counter to alarm if
the arc number is over the

setting.

Arc Energy

< 1 mJ per kW

0V

0A

Arc Occurs

Detection Circuit Activated

Arc Detected

Switching off

Detection

Time

Delay

Time

Pause

Time

Arc Voltage

Trip Level

t

1

t

2

Voltage

Current

Signal of

Switching

t

t

3

t

4

t5t6t

7

Recovery

Time

Delta Electronics. Inc. HPH- 20KA01KAT

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