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JEOL JSM-6060LV SCANNING ELECTRON MICROSCOPE

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Operating

Instructions

JEOL JSM-6060LV SCANNING ELECTRON MICROSCOPE

Table of Contents

1 INTRODUCTION

Safety 3

2 BACKGROUND

Background Information 4

References 4

3 SAMPLES

Sample Holders 7

Sample Preparation 7

5 PHOTOGRAPHY

Image Options 11

Lower Resolution (but quick) Photos 11

Higher Resolution (slower) Photos 12

4 OPERATION

Instrument Startup 8

Sample Loading 8

Getting an Image 9

Moving Around 9

Image Scanning 10

Zooming In (or Out) 10

Other Toolbar Buttons 10

System Shutdown 10

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JEOL JSM-6060LV SCANNING ELECTRON MICROSCOPE

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Introduction

he JEOL JSM-6060LV is a state-of-the-art scanning electron microscope that features
a low vacuum for observation of non-conductive specimens, a fully automated electron
gun, a backscattered electron detector for atomic number contrast imaging, fully

integrated digital control, motorized x-y stage, and a NORAN System 6 elemental
analysis system (see separate operating instructions for the NORAN system). Best of all, the
JEOL JSM-6060LV scanning electron microscope is user-friendly and easy to operate.

Safety

The scanning electron microscope is a relatively safe instrument.. You can do much more
damage to it than it can do to you. When the electron beam is turned on, some x-rays are
produced as a result of electron beam interaction with the sample, but these x-rays are of relatively
low energy and do not escape the sample chamber. The instrument also produces some radio
frequency energy.

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JEOL JSM-6060LV SCANNING ELECTRON MICROSCOPE

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Background

The scanning electron microscope (SEM) is one of the most versatile instruments for the
examination and analysis of the microstructural characteristics of solids. Although the SEM and
optical microscope share the same primary function – making microstructural features and objects
visible to the human eye – the scanning electron microscope offers some distinct advantages over
the optical microscope. The SEM uses electrons rather than visible light waves (200 – 750 nm
wavelength) for imaging, which allows for observation of relatively large sample features at low
magnifications or very fine details (high resolution) at high magnifications. The SEM also offers a
large depth of field that provides good focus over rough specimen surfaces. The large depth of
focus provides a three-dimensional appearance of the specimen in a SEM compared to the nearly
planar or two-dimensional imaging found in optical microscopes. In addition, many attachments
are available for scanning electron microscopes, including x-ray spectrometers for chemical
composition analysis, backscattered electron detectors for atomic number contrast, transmitted
electron detectors, hot and cold stages for microscopic observation of high or low temperature
phenomena, tensile testing stages for observation of deformation and fracture, and special stages
for analysis of semiconductor devices.

Disadvantages of the
scanning electron
microscope include
relatively high initial,
operational, and
maintenance costs, a high
vacuum operating
atmosphere that is
unsuitable for some
specimens, and difficulty in
preparing certain types of
specimens. Figure 1
schematically illustrates
image formation in the
optical microscope and the
scanning electron
microscope.

Figure 1. Basic image formation in an optical microscope and a
scannin

electron microscope.

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