Page 1
MLX902xx Name of Sensor Rev Y.X 22/Aug/98 Page 1
MLX90210
Pressure Sensor IC
MLX90210 Pressure Sensor IC Page 1 Rev 1.0 12/January/01
Features and Benefits
0 -1.0 Bar Range
Compact Design
High Long Term Stability
Low Cost
Applications
Medical Instrumentation (Blood Pressure)
Consumer Appliances
Sports Equipment
Pressure Difference and Flow monitoring
Ordering Information
Part No. Temperature Suffix Package Temperature Range
MLX90210 C CA -0C to 70C Commercial
MLX90210 C UD -0C to 70C Commercial
Description
The MLX90210 is a discrete micromachined
pressure sensor IC suitable for pressure ranges
between 0 to 1.0 Bar. The pressure medium must be
dry and non-corrosive, such as air.
The 90210 is packaged in a plastic/ceramic package,
(CA) or can be ordered as unpackaged die (UD)
The principal of the circuit is a piezoresistive bridge
which is realized in silicon through a special
micromachine process. As pressure is applied to the
bridge, a differential voltage change is seen across
the V
OUT
pins, while a bias voltage is applied to the
V
EXC
pins.
The MLX90210 is a versatile pressure sensor
solution which can be directly interfaced with other
Melexis ICs such as the MLX90308, which provides
amplification, signal conditioning as well as the bias
current to supply the sensor itself.
Functional Diagram
1
2
15
16
V
EXC+
V
OUT+
V
EXC-
V
OUT-
Page 2
MLX90210
Pressure Sensor IC
MLX90210 Pressure Sensor IC Page 2 Rev 1.0 12/January/01
MLX90210 Electrical Specifications
DC Operating Parameters TA = 25C, VDD = 5V (note 3), Pressure = 1.0 Bar full scale.
Parameter Min Typ Max Units
Excitation voltage
0 5 12 V
Zero Pressure Offset
V
OFF
-30 0 +30 mV
Sensitivity
S
14 22 30 mV/V/bar
TC of the Sensitivity (1)
TCS
-0.17 -0.001 -0.26 °C-1
Bridge Resistance
RBR
12 14 16 kOhm
Burst pressure
2 Bar
Operating Temp
0
70 °C
Storage Temp (2)
-55 150 °C
Notes:
1) Temperature range refers to operation and deposit in an inert environment
2) Temperature range refers to operation and deposit in an inert environment
3) To prevent measurement errors, measure above 3V VDD in impulse mode
4) Tolerance of 10% unless otherwise specified.
MLX90210 Mechanical Dimensions (4)
Membrane Size
0.81mm X 0.81mm
Chip Thickness 0.61mm
Chip Size 1.90mm X 1.90mm
Page 3
MLX902xx Name of Sensor Rev Y.X 22/Aug/98 Page 3
MLX90210
Pressure Sensor IC
MLX90210 Pressure Sensor IC Page 3 Rev 1.0 12/January/01
“CA” Package Dimensions
For the latest version of this document,
Go to our website at:
www.melexis.com
Or for additional information
contact Melexis Direct:
USA
Melexis Inc.
41 Locke Road, Concord, NH 03301
Phone: +1 603 223 2362 Fax: +1 603 223 9614
E-mail: sales_usa@melexis.com
United Kingdom
Silicon Concepts
PCB Lynchborough Road, Hampshire GU30 7SB, United Kingdom
Phone: +44 1428 751 617 Fax: +44 1428 751 603
E-mail: sales_uk@melexis.com
Germany
Am Seestern 8, 40547 Düsseldorf, Germany
Phone: +49 211 5360212 Fax: +49 211 5360250
E-mail: sales_de@melexis.com
France
Melexis France
Tour Arago, 5 rue Bellini, 92806 Puteaux-La-Défense, France.
Phone: +33 1 47 78 11 34 Fax: +33 1 47 78 06 35
E-mail: sales_france@melexis.com
Italy
Dimacred IRL
Via Papa Giovanni XXIII no. 25, 20046 Biassono, Italy
Phone: +39 039 249 4856 Fax: +39 039 491773
E-mail: sales_italy@melexis.com
Japan
Satori Electric Co., LTD
1-14-10 Shiba, Minato -Ku, Tokyo, Japan
Phone: +81 3 3452 7171 Fax: +81 3 3769 2197
E-mail: sales_japan@melexis.com
Taiwan
Beechwood Int’l Taiwan Co.
Room 8, 17F, No. 189, Taipei, Taiwan
Phone: +886 2 2739 3322 Fax: +886 2 2739 3090
E-mail: sales_taiwan@melexis.com
Bottom view
Top view
1
2
16
15
8
9
0.300
0.300
0.250 sq
diam 0.08
diam 0.028
0.075 0.050
0.030
0.060
0.085
0.170
diam 0.030
0.340
0.025 0.122
Cross section
Note:
1) All dimensions in inches.
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