Datasheet KPY68AK, KPY67AK, KPY66AK, KPY64AK, KPY63AK Datasheet (Siemens)

Silicon Piezoresistive
Absolute Pressure Sensor

Preliminary Data

Features

• Low pressure and temperature hysteresis

• Fast response

• High sensitivity and linearity

• Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability

• High long term stability

• Built in silicon temperature sensor

• Provided for further fabrication, protection cap

KPY 62-AK

KPY 69-AK

Similar to TO-39-2

Type and

Symbol Pressure Range Unit Ordering Code

Marking

KPY 62 AK

P

… P

0

0 … 0.6 bar Q62705-K275

N

KPY 63 AK 0 … 1.6 Q62705-K276
KPY 64 AK 0 … 4 Q62705-K277
KPY 65 AK

0

… 10 Q62705-K278
KPY 66 AK 0 … 25 Q62705-K279
KPY 67 AK 0 … 60 Q62705-K280
KPY 68 AK 0 … 160 Q62705-K281
KPY 69 AK 0 … 400 Q62705-K282

Pin Configuration

1 Temperature sensor

(typ.

R

= 2 kΩ)

25

2 Not connected
3+
4 −

V

; Temperature sensor

IN

V

OUT

5 Capillary tube
6 Shielding, to be connected

to +

V

IN

7 − V
8+V

Semiconductor Group 1 1998-05-08

IN

OUT

KPY 62-AK
KPY 69-AK

Absolute Maximum Ratings
Parameter Symbol Limit Values Unit

Pressure overload

Operating temperature range
Storage temperature range
Supply voltage

KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK

P

T
T
V

MAX

A

stg

IN

4
8
12
20
50
70
200
500

− 40 …+ 125 ˚C

− 50 …+ 125 ˚C

12 V

bar

Electrical Characteristics

at

T

= 25 ˚C and VIN = 5 V, unless otherwise specified.

A

Parameter Symbol Limit Values Unit

min. typ. max.

Bridge resistance
Sensitivity

Output voltage

KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK

KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK

R
s

V

B

fin

4 − 8kΩ

mV/

23.3

11.3

6.5

3.6

1.1

0.63

0.38

0.16

43.0

20.0

11.0

5.2

2.1

1.0

0.53

0.22

73.3

30.0

15.5

8.0

3.0

1.4

0.66

0.27

Vbar

mV
70
90
130
180
150
190
310
330

130
160
220
260
260
300
420
440

220
240
310
400
370
410
530
550

Semiconductor Group 2 1998-05-08

KPY 62-AK
KPY 69-AK

Electrical Characteristics (cont’d)

at

T

= 25 ˚C and VIN = 5 V, unless otherwise specified.

A

Parameter Symbol Limit Values Unit

min. typ. max.

Offset voltage

P = P

0

Linearity error (Best fit straight line)

P

= P0… P

0

N

KPY 62 … 65 AK
KPY 66 … 69 AK

Pressure hysteresis

P

= P0,P2 = PN,P3 = P0KPY 62 … 69 AK

1

V

F

P

0

mV

− 25 −+ 25

L

−

−

H

± 0.3
± 0.3

± 0.5

−

% V

V

%

−± 0.1 −

Electrical Characteristics

at

T

= 25 ˚C, T2 = 125 ˚C, T3 = 25 ˚C and VIN = 5 V, unless otherwise specified.

1

Parameter Symbol Limit Values Unit

min. typ. max.

Temperature coefficient of

V

fin

TC

Vfin

%/K

KPY 62 … 69 AK − 0.22 − 0.18 − 0.15

Temperature coefficient of

V

0

TC

V0

%/K

fin

fin

KPY 62 AK
KPY 63 AK
KPY 64 AK
KPY 65 AK
KPY 66 AK
KPY 67 AK
KPY 68 AK
KPY 69 AK

Temperature coefficient of

KPY 62 … 69 AK −+ 0.23 −

Temperature hysteresis of

KPY 62 …66 AK
KPY 67 …69 AK

R

V

B

0

; V

fin

TC

TH

RB

− 0.04

− 0.04

− 0.02

− 0.02

− 0.02

− 0.01

− 0.01

− 0.01

−

−

−

−

−

−

−

−

−

−

± 0.2

− 0.1

+ 0.04
+ 0.04
+ 0.02
+ 0.02
+ 0.02
+ 0.01
+ 0.01
+ 0.01

−

−

%/K

% v. V

fin

Semiconductor Group 3 1998-05-08

Package Outline

Similar to TO-39-2

Basic Component

±0.1

12

±0.5

8

View on Chip

9.3

-0.2

KPY 62-AK
KPY 69-AK

±0.1

ø1.05

±0.1

7.6

-0.1

ø0.65

2.6 max

Bond Wire
Loop

Component Delivery Form

±0.6

18.2

±0.6

14.2

-0.5

ø11.5

±0.6

5

6.2

±0.6

8

±0.6

3.59

6

8

5.08

5

1

4

37

2

3.59

5.08

45˚

GMT05959

Weight approx. 1.5 g

Dimensions in mm

Exterior Packaging

I.e. tubes, trays, boxes are shown in our Data Book “Package Information”.
Semiconductor Group 4 1998-05-08