Cee 300X User Manual

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Cee

®

300X

Precision Spin Coater

Operator/User Manual

New users: Read this manual in its entirety before operating the equipment.

© 2017 Cost Effective Equipment LLC

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1. Machines Covered

This manual covers the CeeTM Model 300X series machines. It is to be used to install,
operate, and troubleshoot this model Spin Coater.

2. Table of Contents

1. Machines Covered .............................................................................................. 2

2. Table of Contents ............................................................................................... 2

3. Introduction to the Model 300X ......................................................................... 4

3.1 Dimensions ....................................................................................................... 4

3.2 Programmability ................................................................................................ 4

3.3 Precision ........................................................................................................... 4

3.4 Reliability........................................................................................................... 4

3.5 Bowl Design ...................................................................................................... 5

3.6 Utilities ................................ ................................ ................................ .............. 5

4. Equipment Description ...................................................................................... 6

4.1 System Specifications ....................................................................................... 6

4.2 Model and Revisions ......................................................................................... 7

4.3 Safety Hazards/Precautions.............................................................................. 7

4.3.1 Overview of Equipment-Specific Hazards .................................................. 7

4.3.2 Electrical .................................................................................................... 7

4.3.3 Mechanical ................................................................................................. 7

4.3.4 Chemical .................................................................................................... 8

4.3.5 Lockout/Tagout Procedures and Information ............................................. 8

4.3.6 Intended Use of Machine ........................................................................... 8

4.4 Installation ......................................................................................................... 9

4.4.1 Facilities Requirements .............................................................................. 9

4.4.2 Environment ............................................................................................... 9

4.4.3 Unpacking/Inspection................................................................................. 9

4.4.4 System Installation and Setup ................................................................... 9

5 Software .................................................................................................................... 10

5.1 Run Screen ..................................................................................................... 10

5.1.1 Startup with Passwords Enabled ............................................................. 10

5.1 Run Screen ..................................................................................................... 11

5.2 Spin process Page .......................................................................................... 12

5.2.1 Field definitions: ....................................................................................... 12

5.4 Centering a Substrate ..................................................................................... 15

5.5 Starting the Process ........................................................................................ 16

5.6 Aborting a Process .......................................................................................... 16

5.7 Process Complete ........................................................................................... 17

5.8 Running Multiple Iterations.............................................................................. 17

5.9 Edit Screen ..................................................................................................... 18

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5.10 Writing a Spin Recipe ..................................................................................... 20

5.10.1 Entering data ........................................................................................... 20

5.10.2 Recipe Management ................................................................................ 22

5.10.3 Recipe Backup ......................................................................................... 22

5.10.4 Desktop Recipe Editing............................................................................ 23

5.11 DiagScreen ..................................................................................................... 24

5.11.1 Spin Diagnostics Screen .......................................................................... 25

5.11.2 Configuration Screen ............................................................................... 27

5.11.3 Spin Configuration Screen ....................................................................... 28

5.11.4 Naming Dispenses on the Spin Config Screen ........................................ 29

5.11.5 Selecting Empty Sensors on the Spin Config Screen .............................. 30

5.11.6 Password Configuration Screen .............................................................. 30

5.11.6 Password Configuration Screen .............................................................. 31

6 Navigation Bar ...................................................................................................... 32

6.1 Run ................................................................................................................. 32

6.2 Edit .................................................................................................................. 32

6.3 Diag ................................................................................................................ 32

6.4 Config ............................................................................................................. 32

6.5 Help ................................................................................................................ 32

6.6 Back ................................................................................................................ 32

7 LIVE Update feature .............................................................................................. 33

7.1 Limitations of LIVE Update Mode .................................................................... 35

8. Service & Maintenance .................................................................................... 36

8.1 Maintenance – Vacuum Liquid Trap ............................................................... 37

8.2 Spin Chuck Replacement................................................................................ 37

8.3 Troubleshooting Chart .................................................................................... 38

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3. Introduction to the Model 300X

3.1 Dimensions

• 27.75” (70.5 cm) W x 34.75” (88.3 cm) L × 20.25” (51.5 cm) H

• Machine weight: 115 lb (52.2 kg)

• Shipping weight: 250 lb (113.4 kg)

3.2 Programmability

• PC-controlled

• PC-based touch screen interface and display

• Full-color alphanumeric-capable graphical user interface (GUI)

• 250,000 process recipe programs on board

• A virtually unlimited number of user-defined recipe program steps

• 0.1-second resolution for step times (9,999.9 seconds max step time)

• Spin speed: 0 to 6,000 rpm (3,000 rpm option/no charge)

• Spin speed acceleration:

o 0 to 30,000 rpm/s unloaded
o 0 to 23,000 rpm/s 200-mm substrate
o 0 to 3,000 rpm/s 6” × 6” × 0.250” photomask recessed chuck

• Connectivity: USB/ethernet port for communications for uploading/downloading
process parameters with offline firmware standard (offline recipe number and
steps unlimited)

• System capable of controlling third-party host software of high-end IDI / Cybor /
Mykrolis positive displacement pumps

• Simultaneous dual automated dispense capability

• Bi-directional speed control/oscillating chuck

• Iteration software (recipe looping)

• Dispense or component outputs: 50

• Security: Password protection option available at no charge

• In process/dynamic speed/acceleration control

3.3 Precision

• Spin speed repeatability: < 0.2 rpm

• Spin speed resolution: < 0.2 rpm

• Substrate sizes: < 1 cm to 450 mm round; 14” x 14” square

3.4 Reliability

• Indirect drive system protects the spin motor from contact with process chemicals
and solvents

• Vacuum and lid interlock standard

• Industry-leading reliability and uptime

• 1-year full warranty on parts and labor

• Free remote technical support (phone, email, fax) for the life of the product

• Application process assistance for life of the product

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3.5 Bowl Design

• Stainless steel bowl (for all stainless steel construction)

• Optional polyethylene splash ring

• Closed and optional open lid designs for process flexibility

• Drain and exhaust ports located in the bottom of bowl

• Optional nitrogen purge for an inert spin environment

3.6 Utilities

• Voltage ranges: 208-240 VAC, 50/60 Hz

• Power requirements: 655 watts

• Drain port: 3⁄4” OD

• Exhaust port: 1” OD

• Vacuum: 25” Hg

• Exhaust: 50 cfm at 0.2” water

• Nitrogen or CDA (for automated dispenses): 70 psi

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4. Equipment Description

The Cee® 300X precision spin coater delivers track-quality performance, with
revolutionary interface capabilities and the utmost in chemical compatibility, in an
efficient, space-saving design.

Fully programmable and user-friendly, the Cee® 300X precision spin coater features the
accuracy and repeatability needed to eliminate processing variability from critical
experiments. With its convenient compact footprint, wide array of chemical compatibility,
and durability, this easy-to-use benchtop system will provide years of high-performance
operation, making the Cee® 300X purchase a smart and cost-effective decision.

4.1 System Specifications

Maximum Spin Speed

(3000)(4000)(6000)

RPM/s

Maximum Ramp

30000

RPM/s

Speed Accuracy

<0.2 RPM

RPM/s

Maximum Substrate that will

fit in the bowl

450

mm
Recipe Storage

Virtually Unlimited

Recipes

Power

220

Volts AC- Single Phase

Weight

115

Pounds

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4.2 Model and Revisions

The model and serial number information for the Cee

TM

300X are located on the rear

panel near the power inlet. Software version information can be found on the Main
screen. See Software for screen shots and a detailed explanation of the system
software.

4.3 Safety Hazards/Precautions

Read this manual in its entirety before operating the machine.

4.3.1 Overview of Equipment-Specific Hazards

The unit is very heavy and proper precautions should be taken when handling the
machine to minimize risk of injury. Labels are placed on the machine to identify areas
where caution is needed during operation.

4.3.2 Electrical

General Hazard

Pinch Point Warning

Notes

High voltage is present in the machine. Disconnect the power before

servicing.

Stored electrical energy is present in the machine. Before servicing allow

sufficient time for discharge. The servo amp has a charge light; do not service
the machine until this light has gone out.

4.3.3 Mechanical

This machine uses compressed gasses, which can provide motive force for
components and can expand violently upon decompression. Disconnect N2 or CDA
before removing any panels.

The machine is capable of very high-speed rotation. Ensure all lids and panels
are in place before rotating these devices.

Ensure that all panels are on and in their correct locations before powering up or
operating.

When opening the lid be aware of the pinch point at the hinge cover. Open the lid

only by using the handle on the lid.

The unit is very heavy and proper precautions should be taken when handling or
moving the machine to minimize risk of injury.

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4.3.4 Chemical

Ensure chemical compatibility of all chemicals and materials being used inside
the machine. This includes all wetted parts of the storage, supply, dispense, and waste
systems.

Ensure chemical compatibility of all chemicals with each other. All dispensed
materials are held in one common waste storage tank. Check for reactions between
chemicals before use.

Flammable Chemicals. No open flames/sparks.

Relieve pressure before opening canisters, tanks, cartridges, or syringes to refill.

Relieve pressure and shut off chemical valves before servicing supply lines,
dispense valves or other components.

Relieve pressure and shut off chemical valves before removing spin lid or
changing BSR tubes, EBR tubes, or any other dispense nozzle or spray tip.

Flush tubing and valves with an appropriate solvent and drain system before
servicing.

When draining waste tank, use appropriate containers and connection methods.

Ensure proper ventilation/exhaust is used at all times.

Always wear the proper Personal Protective Equipment for the job. This includes
safety glasses, gloves and other equipment as needed to protect from mechanical and
chemical hazards.

4.3.5 Lockout/Tagout Procedures and Information

Before servicing, turn off the machine and remove the power inlet cord by disconnecting
the plug where it enters the machine.

4.3.6 Intended Use of Machine

The CeeTM Model 300X is intended for use as a Semiconductor/Optical application spin
coating machine. It is primarily intended for substrates up to the maximum size.
The Model 300X is not intended for use in food or medical applications or for use in
hazardous locations.
The CeeTM Model 300X is intended for use only by properly trained personnel wearing
the proper personal protective equipment. Anyone not trained in the proper use of the
Model 300X and have not fully read this manual should not operate the equipment. The
CeeTM Model 300X is intended for use in a cleanroom environment to provide the proper
processing conditions for the substrates. If it is used outside of a cleanroom
environment, the substrate cleanliness may be compromised.
The CeeTM Model 300X is not intended for use in a hazardous or explosive
environment.

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4.4 Installation

4.4.1 Facilities Requirements

The Cee

TM

300X requires the following utilities for operation.

• Single Phase 208-240V AC at 15 Amps

• Vacuum Supply at 20 in Hg

• Nitrogen Supply at 45psi to 55psi (Auto Dispense and Bake Proximity)

• Exhaust Port 1 Inch OD

• Drain Port 3⁄4 Inch OD

4.4.2 Environment

The Cee

TM

300X should be operated in a clean, low humidity environment.

4.4.3 Unpacking/Inspection

Thoroughly check machine for shipping damage. If physical damage is seen, DO NOT
APPLY POWER! Contact Cee

TM

immediately.

The following items should be included with the shipment.

(1) Cee

TM

300X

(1) Power Cord with female power connector
(1) Anodized Aluminum Stylus
(1) User & Installation Manual

Optionally included items:

Spin Chucks with Screws
Dispense Controllers
Dispense Valves
Dispense Nozzles
Dispense Hubs

4.4.4 System Installation and Setup

(1) Lift the unit out of the packing crate by grasping the bottom only. Do

not lift the by any of the top covers or protrusions. Do not roll or turn

the unit on its side or ends.
(2) Remove plastic wrap and packing foam.
(3) Place CeeTM Model 300X on a table of proper height and strength so

that the controls and spin chuck are at the proper ergonomic height.
(4) Level the machine using the feet so that the spin chuck is level front-to-

back and side-to-side.
(5) Thoroughly clean the spin bowl and spin chuck.
(6) Connect vacuum, N2, drain, and exhaust lines.
(7) Plug in the machine.
(8) Once plugged in, only the cooling fan should be powered, not the

display or bake plate.
(9) Switch ON the ON/OFF Power Switch.
(10) Display should momentarily show boot screen and then show main

screen. Please be patient for booting process to complete.

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5 Software

5.1 Run Screen

5.1.1 Startup with Passwords Enabled

The Run Screen is the first screen that you will see when you start the software. If the
300X unit has passwords enabled, the beginning screen will be blank with login and
logout buttons.
To login, press the Login button in the upper right of the touch-screen and this will bring
up the keyboard to enter your password. By default, the passwords for a 300X are:

Super User Level: CEE
User Level: 200X
Maintenance: DIAG

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5.1 Run Screen

Once logged in, or if passwords are not enabled, this is how the Run Screen looks.

From here you can get the Spin Processing Screen by pressing the large buttons in the
left-center of the screen. It is also possible to navigate to other windows by using the
navigation Bar.

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5.2 Spin process Page

This is the page where Spin processes are run and monitored on the 300X Model
software.

The controls and indicators from the Spin Process page are listed here, for instructions
on how to run a spin process go to the next page.

5.2.1 Field definitions:

1. Recipe Name: The name of the currently loaded recipe.

2. Live Update: This button allows the user to update the process currently
running. The button is only active during an active process. More info on Live
Update is available on the ToDo LIVE Update section. (Live update is not
available on all models.)

3. Load: This button brings up the TODO Recipe Select Screen to select for
processing.

4. Edit Recipe: This button will navigate to the Spin Process Editor if a recipe is
loaded. If a recipe is not loaded, it will go to the TODO Recipe Select Screen.

5. Lid Closed; A lamp showing the state of the Lid Closed sensor.

6. Substrate Present Indicator: A lamp showing the state of the Spin Chuck
Vacuum sensor.

7. Step Indicator: Shows the current step of the process.

8. Time Indicator: Shows the time remaining on the current step.

9. Speed indicator: Shows the current speed of the spindle

10. Exhaust Indicator: Shows the current setting of the programmable exhaust.
(Programmable Exhaust not available on all models)

11. Dispense indicators: Illuminated button shows which dispenses are currently
activated.

12. Iteration Setting: This setting allows the currently selected process to run
consecutively the entered number of time without stopping. (Iteration processing
not available on all models)