X-pro II
Owner’s Manual
X-PRO II Workstation
www.costeffectiveequipment.com
+1-573-466-4300
Cee® X-Pro II Workstation Manual
Contents'
1. X-Pro II Workstation Introduction............................................................................................................ 3
1.1. Confidentiality Statement ........................................................................................................................... 3
1.2. Warranty ........................................................................................................................................................ 3
1.3. Returned Materials....................................................................................................................................... 3
1.4. Model and Revisions ................................................................................................................................... 4
1.5. Safety Hazards/Precautions ....................................................................................................................... 4
1.6. Overview of Equipment-Specific Hazards ............................................................................................... 4
1.7. Electrical ........................................................................................................................................................ 4
1.8. Thermal .......................................................................................................................................................... 4
1.9. Mechanical .................................................................................................................................................... 4
1.10. Chemical .................................................................................................................................................... 5
1.11. Lockout/Tagout Procedures and Information..................................................................................... 5
1.12. Intended Use of Machine ........................................................................................................................ 5
2. Equipment Description ............................................................................................................................... 6
2.1. Dimensions ................................................................................................................................................... 6
2.2. Programmability/ Features ......................................................................................................................... 6
2.4. Precision ........................................................................................................................................................ 7
2.5. Reliability ....................................................................................................................................................... 7
2.6. Utilities ........................................................................................................................................................... 7
3. Installation ................................................................................................................................................ 7
3.1. Floor Space Requirements......................................................................................................................... 7
3.2. Facilities Requirements .............................................................................................................................. 8
3.3. Environment ................................................................................................................................................ 10
3.4. Unpacking/Inspection ............................................................................................................................... 11
3.5. System Installation and Setup ................................................................................................................. 11
3.6. Start Up ........................................................................................................................................................ 12
4. Preventative Maintenance ..................................................................................................................... 13
4.1. Safety Checks ............................................................................................................................................. 13
4.2. Mechanical Checklist ................................................................................................................................ 13
4.3. Utility Checks .............................................................................................................................................. 13
4.4. Cleaning ....................................................................................................................................................... 13
4.5. Service Access ........................................................................................................................................... 14
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Cee® X-Pro II Workstation Manual
1. X-Pro II Workstation Introduction
1.1. Confidentiality Statement
Information supplied is for the use in the operation and/or maintenance of Cee equipment.
Neither this document nor the information it contains shall be disclosed to others for manufacturing or any
other purpose without written authorization from, Cost Effective Equipment, LLC.
1.2. Warranty
Cost Effective Equipment, LLC warrants to the original purchaser (Buyer) that equipment is free from
defects in material and workmanship under normal use and service in accordance with Cee instructions
and specifications. Buyer Shall promptly notify Cee of any claim against this warranty, and any item to be
returned to Cee shall be sent with transportation charges prepaid by Buyer, clearly marked with a Return
Authorization (RMA) number obtained from Cee Customer Support. Cee’s obligation under this warranty is
limited to the repair or replacement, at Cee option, of any equipment, component or part which is
determined by Cee to be defective in material or workmanship. This obligation shall expire one (1) year
after the initial shipment of the equipment from Cee.
This warranty shall be void if:
(a) Any failure is due to the misuse, neglect, improper installation of, or accident to the equipment.
(b) Any major repairs or alterations are made to equipment by anyone other than a duly authorized
representative of Cee. Representatives of Buyer will be authorized to make repairs to the equipment
without voiding warranty, on completion of the Cee training program.
(c) Replacement parts are used other than those made or recommended by Cee.
CEE MAKES NO OTHER WARRANTIES, EXPRESSED OR IMPLIED, WITH RESPECT TO EQUIPMENT.
NO WARRANTY IS MADE AS TO THE MERCHANTABILITY OF THE EQUIPMENT NOR ITS FITNESS
FOR ANY PARTICULAR PURPOSE. In no event shall Cee be liable for consequential loss or damages,
however caused. No person or representative of Cee is authorized to assume for Cee any liability in
connection with Equipment nor to make any change to this warranty unless such change or modification is
put in writing and approved by an authorized representative of Cee in writing.
This warranty shall be governed by the laws of the state of Missouri U.S.A.
1.3. Returned Materials
Any materials, parts, or equipment returned Cost Effective Equipment, LLC must be clearly labeled with a
Return Material Authorization (RMA) number.
To obtain a RMA number, contact:
Cee Customer Support
Telephone: (573) 466-4300
E-Mail: support@costeffectiveequipment.com
Web Address: http://www.costeffectiveequipment.com
Shipping information with RMA number:
Attn: Cee Customer Support
Cost Effective Equipment
3703 HyPoint Blvd
Rolla, Missouri 65401
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Cee® X-Pro II Workstation Manual
1.4. Model and Revisions
The model and serial number information for the Cee® X-Pro II Workstation are located on the
rear panel.
1.5. Safety Hazards/Precautions
Read this manual in its entirety before operating the machine.
1.6. Overview of Equipment-Specific Hazards
The unit is very heavy and proper precautions should be taken when handling the machine to
minimize risk of injury. Labels are placed on the machine to identify areas where caution is
needed during operation.
1.7. Electrical
High voltage is present in the machine. Disconnect the power before servicing.
Stored electrical energy is present in the machine. Before servicing allow sufficient time for
discharge. Spin coater modules (if equipped) contain a servo amp which has a charge light; do
not service the machine until this light has gone out.
1.8. Thermal
Bake plate process modules (if equipped) can reach temperatures sufficient to cause severe
burns and may remain hot for a very long time following operation. Do not service the machine
until all surfaces have cooled to a safe (room-temperature) thermal condition
1.9. Mechanical
This machine may contain compressed gasses, which can provide motive force for
components and can expand violently upon decompression. Disconnect N2 or CDA before
removing any panels.
Ensure that all panels are on and in their correct locations before powering up or operating.
For Bake plate process modules (if equipped), when opening the lid be aware of the pinch
point at the hinge cover. Open the lid only by using the handle on the lid.
The unit is very heavy and proper precautions should be taken when handling or moving the
machine to minimize risk of injury.
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Cee® X-Pro II Workstation Manual
1.10. Chemical
Ensure chemical compatibility of all chemicals and materials being used inside the machine. This
includes all wetted parts of the storage, supply, dispense, and waste systems.
Ensure chemical compatibility of all chemicals with each other. All dispensed materials are held in one
common waste storage tank. Check for reactions between chemicals before use.
Flammable Chemicals. No open flames/sparks.
Relieve pressure before opening canisters, tanks, cartridges, or syringes to refill.
Relieve pressure and shut off chemical valves before servicing supply lines, dispense valves or other
components.
Ensure proper ventilation/exhaust is used at all times.
Always wear the proper Personal Protective Equipment for the job. This includes safety glasses,
gloves and other equipment as needed to protect from mechanical and chemical hazards.
1.11. Lockout/Tagout Procedures and Information
Before servicing, turn off the machine and remove the power inlet cord by disconnecting the plug where it
enters the machine.
NOTE: There are no LOTO (Lock Out / Tag Out) facilities supplied with the Cee® X-Pro II Workstation. It
is the responsibility of the customer / installer / end user to ensure that the suitable LOTO devices are
provided on the utilities being supplied to the X-Pro II workstation, in accordance with all applicable laws,
regulations, or company policies.
For more information, please contact Cee® customer support at the address / phone number / e-mail
shown on page 3 of this document.
1.12. Intended Use of Machine
The Cee® X-Pro II Workstation is intended for use as a Semiconductor/Optical application machine.
The Cee® X-Pro II Workstation is not intended for use in food or medical applications or for use in
hazardous locations.
The Cee® X-Pro II Workstation is intended for use only by properly trained personnel wearing the proper
personal protective equipment. Anyone not trained in the proper use of the X-Pro II Workstation &
associated process modules and have not fully read this manual and the supplied manuals /
documentation regarding the process modules fitted to the Cee® X-Pro II Workstation should not operate
the equipment.
The Cee® X-Pro II Workstation is intended for use in a cleanroom environment to provide the
proper processing conditions for the substrates. If it is used outside of a cleanroom environment,
the substrate cleanliness may be compromised.
The Cee® X-Pro II Workstation is not intended for use in a hazardous or explosive environment.
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