Brooks On-Board Maintenance Manual

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Page 1

On-Board® Cryopump

Installation and Maintenance Manual

8040491 Revision AB

Page 2

On-Board® Cryopump

Installation and Maintenance Manual

Information provided within this document is subject to change without notice, and although believed to be accurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.

AcuLigner™, Align™, AquaTran™, AutoTeach™, ATR™, AXM™, Basic Blue™, BiSymmetrik™, CenterSmart™, Cool Solutions™, Crate to Operate™, e-RMA™, e-Spares™, e-Volution™, FastRegen™, FIXLOAD™, FrogLeg™, InLigner™, InCooler™, Interface™, Jet Engine™, LowProfile™, M2 Nano™, Mini-Ion™, PASIV™, PowerPak™, PerformanceBlue™, PowerPak™, PowerTools™, QuadraFly™, Radius™, Radient™, Radient Express™, Reliance™, Reliance ATR™, RetroEase™, SCARA™, SmartPM™, SPOTLevel™, Synetics™, The New Pathway to Productivity™, Time Optimized Trajectory™, Time Optimal Trajectory™, Time Optimized Path™, TopCooler™, TopLigner™, Ultimate Blue™, VAC-407™, VacuTran™, Vacuum Quality Monitor™, VQM™, Vacuum Quality Index™, VQI™, and the Brooks logo are trademarks of Brooks Automation, Inc.

AcuTran Cryo-Torr MagnaTran On-Board TurboPlus

, AquaTrap®, Conductron®, Convectron®, the Cool Solutions logo, Cryodyne®, Cryotiger®,

, Fusion®, GOLDLink®, Granville-Phillips®, Guardian®, GUTS®, Helix®, Jet®, Leapfrog®,

, MapTrak®, Marathon®, Marathon 2®, Marathon Express®, Micro-Ion®, MiniConvectron®,

, Polycold®, Razor®, Simplicity Solutions®, the Simplicity Solutions logo, Stabil-Ion®, TrueBlue®,

, Vision®, Zaris®, and the Brooks Automation logo are registered U.S. trademarks of Brooks

Automation, Inc. All other trademarks are properties of their respective owners.

© 2013 Brooks Automation, Inc. All Rights Reserved. The information included in this manual is Proprietary Information of Brooks Automation and is provided for th e use of Broo ks Automation customer s only and cann ot be used for distribution, reproduction, or sale without the express written permission of Brooks Automation. This information may be incorporated into the user’s documentation, however any changes made by the user to this information is the responsibility of the user.

For Technical Support:

Location North America

GUTS

Contact Number

+1-800-FOR-GUTS (1-800-367-4887)

+1-978-262-2900 Europe +49-1804-CALL-GUTS (+49-1804-2255-4887) Japan +81-45-477-5980 China +86-21-5131-7066 Taiwan +886-3-5525225 Korea +82-31-288-2500 Singapore +65-6464-1481

Visit us online: www.brooks.com

January 11, 2013 Part Num 8040491 Revision AB

This technology is subject to United St ates export Administra tion Regu lations and aut horized to the d estination only; diversion contrary to U.S. law is prohibited.

Printed in the U.S.A.

Brooks Automation

8040491 Revision AB

Page 3

List of Figures

List of Tables

Cryopump Safety

Hazard Alerts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-1

Safety Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-2

Signal Words . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-2

Safety Text . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-3

References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-3

Cryopump Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-4

Toxic, Corrosive, Dangerous Gases, or Liquids . . . . . . . . . . . . . . . . . . . . . . . . S-4

Flammable or Explosive Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-5

Electric Shock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-5

High Gas Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-6

Regen Control Users Only . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-7

Cryopump Oxygen Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-8

Lifting Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-9

Section 1 - On-Board Cryopump Description

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

Installation, Operation, Troubleshooting, and Maintenance Procedures . . . . . . . . . 1-1

Microprocessor-Based Control System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

Remote Operation Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19

Cold Head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19

Vacuum Vessel and Arrays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19

Compressor Gas and Oil Flows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19

Section 2 - Installation

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

Keypad/Display Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Position A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

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Position B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Position C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

Position D . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

On-Board Cryopump Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

On-Board 500 Cryopump Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

Vent Pipe Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

Roughing Pump Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

Rough Valve Gas Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

Purge Gas Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

Helium Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

Auxiliary (AUX) TC Gauge Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Setpoint Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

Remote Keypad/Display Installation (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

Section 3 - Troubleshooting

Technical Inquiries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

Section 4 - Maintenance

Helium Circuit Decontamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

Background . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Equipment/Tools Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Method # 1 - Decontaminate all On-Board Cryopumps . . . . . . . . . . . . . . . . . . 4-6

Decontamination Alternatives . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

Method # 2 Decontamination of Only Cold Cryopumps . . . . . . . . . . . . . . . . 4-11

Step 1 - Method # 2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11

Step 17 - Method # 2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11

Method # 3 Grouped Decontamination Using Manifold . . . . . . . . . . . . . . . . . 4-11

Step 5 - Method # 3. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12

Step 6 - Method # 3. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12

Step 10- Method # 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12

Steps 11 - 16 - Method # 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12

On-Board Cryopump Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15

Index

List of Figures

List of Tables

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List of Figures

Figure 1-1: On-Board Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Figure 1-2: On-Board Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Figure 1-3: On-Board Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

Figure 1-4: Typical On-Board Cryopump System . . . . . . . . . . . . . . . . . . . . . . . . . 1-20

Figure 1-5: Cutaway View of a Typical Flat On-Board Cryopump Vessel . . . . . . 1-21

Figure 1-6: Cutaway View of a Typical Straight On-Board Cryopump Vessel. . . 1-22

Figure 1-7: Typical Flat On-Board Cryopump Component Identification. . . . . . . 1-23

Figure 1-8: Typical Straight On-Board Cryopump Component Identification . . . 1-24

Figure 2-1: Block Diagram for On-Board Cryopump Installation. . . . . . . . . . . . . . 2-1

Figure 2-2: Keypad/Display Mounting Position A. . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Figure 2-3: Keypad/Display Mounting Position B. . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Figure 2-4: Keypad/Display Mounting Position C. . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

Figure 2-5: Keypad/Display Mounting Position D. . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

Figure 2-6: Lifting Bars . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

Figure 2-7: Setpoint Relays Connection and Pin Identification . . . . . . . . . . . . . . . 2-12

Figure 4-1: Decontamination Flowchart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Figure 4-2: On-Board Cryopump Helium Supply and Return Lines . . . . . . . . . . . . 4-8

Figure 4-3: Maintenance Manifold Part Number 8032051G001 . . . . . . . . . . . . . . 4-13

Figure 4-4: Proper Helium Line Coupling Disconnection/Connection . . . . . . . . . 4-14

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List of Tables

Table 1-1: On-Board 4 Cryopump Specifications ..................................................................... 1-6

Table 1-2: On-Board 4F Cryopump Specifications ................................................................... 1-7

Table 1-3: On-Board 6 Cryopump Specifications ..................................................................... 1-8

Table 1-4: On-Board 8 Cryopump Specifications ..................................................................... 1-9

Table 1-5: On-Board 8F Cryopump Specifications ................................................................. 1-10

Table 1-6: On-Board Enchanced 8F Cryopump Specifications .............................................. 1-11

Table 1-7: On-Board 10 Cryopump Specifications ................................................................. 1-12

Table 1-8: On-Board 10F Cryopump Specifications ............................................................... 1-13

Table 1-9: On-Board 250F Cryopump Specifications .............................................................1-14

Table 1-10: On-Board 250FH Cryopump Specifications ........................................................ 1-15

Table 1-11: On-Board 400 Standard Capacity Cryopump Specifications ............................... 1-16

Table 1-12: On-Board 400 High Capacity Cryopump Specifications ..................................... 1-17

Table 1-13: On-Board 500 ISO-K Cryopump Specifications ................................................. 1-18

Table 3-1: Cryopump Troubleshooting Procedures ................................................................... 3-2

Table 3-1: Troubleshooting Procedures (continued) ................................................................. 3-3

Table 4-1: Methods of Decontamination ................................................................................... 4-1

Table 4-2: Decontamination Tools and Equipment ................................................................... 4-3

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Introduction

All On-Board®, On-Board® IS, and Cryo-Torr® products are designed to provide extremely safe and dependable operation when properly used. This chapter describes safety hazard alerts used throughout this manual for the Brooks Automation cryopumps.

All personnel involved in the installation, operation, or maintenance of OnBoard

ments presented in this manual, along with all safety requirements for the facility where the pump is installed, and all applicable national and international safety requirements.

Refer to Contacting Brooks’ Technical Support at the front of this manual, or call your local Customer Support Center, for further assistance.

Hazard Alerts

The On-Board Cryopump Installation and Maintenance Instructions use industry standard hazard alerts to make you aware of hazardous conditions. Alerts are composed of three elements:

Cryopump Safety

, On-Board® IS, and Cryo-Torr® products must follow the safety require-

• Safety Icon(s)

•Signal Word

• Safety Text

Following is an example of a typical hazard alert, with safety icons, signal word, and text.

Two-Person Lift Required

This pump weighs ____kilos/lbs. Lifting heavy loads can result in serious injury. Use a 2-person lift or a lifting aid when attempting to lift this pump.

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Safety Icons

Hazard alerts indicating a caution, warning, or danger to personnel contain Safety Icons that graphically identify the hazard involved.

Table S-1 illustrates the meaning of a typical safety icon.

Table S-1: Safety Icons

Associated Signal

Caution, Warning or Danger

The safety icons in this manual conform to ISO 3864 and ANSI Z535 standards.

Signal Words

All hazard alerts contain signal words that call attention to safety messages and designate the degree of hazard seriousness. The signal words used in this manual are Notice, Caution, Warning, and Danger. The meaning and formatting of each of these signal words follows.

Notice indicates a situation or unsafe practice which, if not avoided, may result in

equipment damage. The Notice signal word is highlighted in blue.

Word

Icon Indication

Indicates an electric shock hazard.

Caution indicates a potentially hazardous situation or unsafe practice which, if not avoided, may result in minor or moderate personal injury. The Caution signal word is preceded by an iconic exclamation point, indicating additional information is in the manual, and it is highlighted in yellow.

Warning indicates a potentially hazardous situation which, if not avoided, could result in serious injury or death. The Warning signal word is preceded by an iconic exclamation point, indicating additional information is in the manual, and it is highlighted in orange.

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Danger indicates a potentially hazardous situation which, if not avoided, will result in serious injury or death. The Danger signal word is preceded by an iconic exclamation point, indicating additional information is in the manual, and it is highlighted in red.

Safety Text

Hazard alert text follows a standard three-part format:

The order of hazard alert text is fixed.

The example below illustrates typical hazard alert text, presented in the correct order.

• identify the hazard,

• state the consequences if the hazard is not avoided,

• state how to avoid the hazard.

References

Two-Person Lift Required

This cryopump is heavy. Refer to the specifications of your pump for the weight. Lifting heavy loads can result in serious injury. Use a 2-person lift or a lifting aid when attempting to lift this pump.

For more information about safety standards, refer to the following documents.

• ISO 3864-2: 2004 Graphical Symbols - Safety Colors and Safety Signs - Part 2: Design principles for product safety labels.

• ANSI Z535.4 Standard for Product Safety Signs and Labels

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Cryopump Hazards

Observe the following safety precautions when installing, operating, troubleshooting, and maintaining the On-Board

ment. If you have any doubts on using this equipment, refer to Contacting Brooks’ Technical Support at the beginning of this manual.

Always follow all local, state, and national codes, as well as site-specific codes, when working with toxic/corrosive gases or liquids, flammable or explosive gases, and/or high voltage.

The following hazard alerts appear on the pump, in this manual, or both.

Toxic, Corrosive, Dangerous Gases, or Liquids

, On-Board IS and Cryo-Torr® equip-

Toxic/Corrosive Gases

Toxic and/or corrosive process gases or liquids pumped or captured by an On-Board, On-Board IS, or Cryo-Torr product could cause severe injury on contact.

Always vent toxic/corrosive gases or liquids to a safe location using an inert purge gas. The customer is responsible for safely exhausting these gases. Clearly identify on the cryopump which toxic/corrosive gas or liquid is contained in the pump before storing or shipping it to Brooks Automation.

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Flammable or Explosive Gases

Flammable or explosive gases captured by an OnBoard, On-Board IS, or Cryo-Torr pump can cause severe injury if ignited. Always purge the cryopump with an inert gas during regeneration. Always vent flammable or explosive gases to a safe location using an inert purge gas. Purging the cryopump’s exhaust line might also be necessary. The customer is responsible for safely exhausting these gases. Do not install a hot filament type vacuum gauge on the high vacuum side of the isolation valve. This could be an ignition source for flammable gases in the product.

Flammable/Explosive Gases

Electric Shock

Electric shock can cause severe injury or death. Disconnect the high vacuum pump system from all

power sources before making electrical connections between system components or before performing troubleshooting and maintenance procedures. Perform Lockout/Tagout as required by the facility where the equipment is installed.

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High Gas Pressure

Take the following precautions when working with high gas pressure:

1. Normal making and breaking of the quick disconnect couplings can be done routinely. However, when a quick disconnect coupling needs to be replaced and separated from the helium flex or solid line, always bleed the helium charge down to atmospheric pressure before any disassembly.

2. During regeneration, a rapid expansion of the cryopumped species occurs within the cryopump. Restricting the flow through the exhaust port and exhaust line rapidly increases the pressure in the cryopump. This high internal pressure can cause severe injury from propelled particles or parts.

High Gas Pressure

High helium gas pressure is present in the cryogenic system and high pressure gas can be present within the cryopump. These high pressure gases can cause severe injury from propelled particles or parts.

Do not modify or remove any pressure relief valve on the cryopump. Ensure that the path for the regenerated gas is unobstructed.

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Regen Control Users Only

During regeneration, cold gases vent through the roughing valve and roughing line and into the roughing pump. These gases can cause severe injury.

Avoid contact with liquid nitrogen to exposed skin. Ensure the roughing systems are compatible with

these gases.

Take the following precautions when installing the gas handling system, including roughing pump for toxic, corrosive, or dangerous gases.

• The roughing pump must be compatible with these gases

Dangerous Gases

• The discharge from the roughing pump may include these

gases and should be vented in a safe manner

1. Use appropriately sized roughing lines to prevent over pressurization of the roughing line during the expansion of such gases

2. Be sure that the roughing line is compatible with low temperatures

3. Use roughing lines of sufficient length to allow the gases to warm adequately before entering the roughing pump

4. Do not use fast regeneration after pumping large amounts of oxygen unless the roughing system is compatible with oxygen duty

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Cryopump Oxygen Procedures

Combustion resulting from oxygen used as a process gas can cause severe injury.

1. Ensure that there are no sources of ignition, such as hot filament vacuum gauges, on the cryopump side of the high vacuum valve operating during the warming or venting of the cryopump.

2. Perform inert gas purge regeneration cycles at flow rates recommended for cryopumps.

3. Regenerate as frequently as practical to minimize the amount of oxidizer present in the cryopump.

Standard practice in the vacuum industry is that any system exposed to richerthan-air oxygen levels should be prepared for oxygen service per the manufacturer’s recommendations. This includes the use of oxygen service lubrication oils in roughing pumps or dry roughing pumps.

Oxygen Combustion Hazard

Explosion Hazard

Explosion occurring from ozone in the cryopump can cause severe injury. Ozone can be an unforesen byproduct of oxygen processes.

1. Reduce the oxygen flow rate to the lowest level that the process allows.

2. Shorten the time between regenerations. Daily regenerations may be required. Contact Brooks Automation Technical Support for assistance.

3. Ensure that there are no sources of ignition (for example, hot filament vacuum gauges) on the cryopump side of the high vacuum valve operating during the warming or venting of the cryopump

4. Perform inert gas purge regenerations at flow rates recommended for cryopumps.

Page 17

Signs of ozone presence are the following:

1. Crackling, popping sounds, as in electrical arcing, occurring within the first few minutes of a regeneration cycle;

2. Gas venting from the cryopump during regeneration that has a pungent smell similar to that present in an arc welding operation or after an elec trical storm.

NOTE: A change in process can increase the amount of ozone present.

Lifting Requirements

Two-Person Lift Required

Lifting Aid Required

This cryopump is heavy. Refer to the specifications of your pump for the weight. Lifting heavy loads can result in serious injury. Always use a lifting aid when attempting to lift this pump.

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Section 1 - On-Board Cryopump Descrip-

tion

Introduction

This product is intended for use by industrial customers and should be serviced only by Brooks or Brooks trained representatives. The service manuals and related materials are provided in English at no charge and are intended for use by experienced technicans. It is the responsibility of the user to obtain and assure the accuracy of any needed translations of manuals. If you require assistance please contact Brooks service department. Contact information can be found at www.brooks.com.

On-Board Cryopumps provide fast, clean pumping of all gases in the 10 Torr range. An On-Board Cryopump operates on the principle that gases can be condensed and held at extremely low vapor pressures, achieving high speeds and throughputs as described in Table 1-1 through Table 1-13.

The On-Board Cryopump is a highly-reliable and rugged unit that requires little maintenance. Since the On-Board Cryopump exposes no moving parts, operating fluids, or backing pumps to the vacuum, the possibility of system or process contamination from the On-Board Cryopump is eliminated.

-3

to 10-9

Installation, Operation, Troubleshooting, and Maintenance Procedures

All personnel responsible for installing, operating, troubleshooting, or maintaining an On-Board Crypump should become familiar with these procedures before attempting to perform them.

Refer to the Installation/Interface drawing for the cryopump being installed for specific pump layout and component information.

Microprocessor-Based Control System

The On-Board Cryopump is equipped with a microprocessor-based control system that allows you to monitor and control a wide range of vacuum system functions, such as cooldown, warm-up, and regeneration. Operations are performed on a keypad control/display panel mounted on the cryopump.

Refer to the On-Board Cryopump Module Programming and Operation Instruc- tions (8040410) that came with your On-Board Cryopump for a complete description of the operational functions available.

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Remote Operation Options

A remote keypad/display that provides the same functions as the basic On-Board keypad/display is available.

On-Board Cryopumps can be controlled remotely using either a BITBUS™ or RS232 protocol. The most common implementation, used in multiple On-Board Cryopump process tools, is to network the On-Board Cryopumps using the BITBUS™ protocol. In this configuration, the networked On-Board Cryopumps are managed as a group by the On-Board Network Terminal, which coordinates group regeneration cycles and provides a standardized communication link to the process tool host controller. Using this approach, control of the networked OnBoard Cryopumps is fully integrated with process tool control.

On-Board Cryopumps are available in the range of sizes and configurations shown in Figure 1-1, Figure 1-2, and Figure 1-3. The specifications for each OnBoard Cryopump are provided in Table 1-1 through Table 1-13.

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On-Board 8

On-Board 8F

On-Board 4

On-Board 6

Figure 1-1: On-Board Cryopumps

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On-Board 4F

On-Board 250F

On-Board 10F

On-Board 10

Figure 1-2: On-Board Cryopumps

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On-Board 500

On-Board 400

Figure 1-3: On-Board Cryopumps

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Specifications

Parameter Specifications

Table 1-1: On-Board 4 Cryopump Specifications

Rough Pump Connec-

NW 25 ISO KF

tion

Integrated Hardware Keypad/Display (Optional)

Roughing Valve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 1st Stage Heater 2nd Stage Heater 2 Setpoint Relays RS-232 Interface

Pumping Speeds:

Water Air Hydrogen Argon

1100 liters/sec 500 liters/sec 500 liters/sec 420 liters/sec

Argon Throughput 700 scc (9 Torr-liters/sec)

Capacity: Argon

Hydrogen

210 std. liters (no recovery metric)

-7

100 std. liters (recovery to 10

in 30 sec. or

less) 3 std. liters @ 5 x 10

-6

Torr

Crossover 100 Torr-liters

Regeneration Time Full (Typical) Fast (Typical)

Less than 84 minutes Less than 42 minutes

Dimensions Refer to Installation/Interface Drawing

Weight 45 lbs. (20 kg)

Page 25

Table 1-2: On-Board 4F Cryopump Specifications

Parameter Specifications

Rough Pump Connec-

NW 25 ISO KF

tion

Integrated Hardware Keypad/Display (Optional)

Roughing Valve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 1st Stage Heater 2nd Stage Heater 2 Setpoint Relays RS-232 Interface

Pumping Speeds: Water Air Hydrogen Argon

1100 liters/sec 370 liters/sec 370 liters/sec 310 liters/sec

Argon Throughput 700 scc (9 Torr-liters/sec)

Capacity: Argon

210 std. liters (no recovery metric) 100 std. liters (recovery to 10-7 @ 30 sec. or

Hydrogen

less) 3 std. liters @ 5 x 10-6 Torr

Crossover 100 Torr-liters

Regeneration Time Full (Typical) Fast (Typical)

Less than 84 minutes Less than 42 minutes

Dimensions Refer to Installation/Interface Drawing

Weight 47 lbs. (21 kg)

Page 26

Table 1-3: On-Board 6 Cryopump Specifications

Parameter Specifications

Rough Pump Connec-

NW 25 ISO KF

tion

Purge Gas Connection VCR-4 Female Nut

Integrated Hardware Keypad/Display (Optional)

Roughing Valve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 1st Stage Heater 2nd Stage Heater 2 Setpoint Relays RS-232 Interface

Pumping Speeds: Water Air Hydrogen Argon

2,500 liters/sec 800 liters/sec 1,200 liters/sec 650 liters/sec

Argon Throughput 700 sccm (9 Torr-liters/sec)

Capacity: Argon Hydrogen

500 std. liters 9 std. liters @ 5 x 10

-6

Torr

Crossover 100 Torr-liters

Regeneration Time Full (Typical) Fast (Typical)

Less than 162 minutes Less than 60 minutes

Dimensions Refer to Installation/Interface Drawing

Weight 55 lbs. (25 kg)

Page 27

Table 1-4: On-Board 8 Cryopump Specifications

Parameter Specifications

Rough Pump Connec-

NW 25 ISO KF

tion

Integrated Hardware Keypad/Display (optional)

Roughing Valve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 1st Stage Heater 2nd Stage Heater 2 Setpoint Relays RS-232 Interface

Pumping Speeds: Water Air Hydrogen Argon

4000 liters/sec 1500 liters/sec 2500 liters/sec 1200 liters/sec

Argon Throughput 700 sccm (9 Torr-liters/sec)

Capacity: Argon Hydrogen

1000 std. liters 17 std. liters @ 5 x 10

-6

Torr

Crossover 150 Torr-liters

Regeneration Time Full (Typical) Fast (Typical)

Less than 162 minutes Less than 60 minutes

Dimensions Refer to Installation/Interface Drawing

Weight 55 lbs. (25 kg)

Page 28

Table 1-5: On-Board 8F Cryopump Specifications

Parameter Specifications

Rough Pump Connec-

NW 25 ISO KF

tion

Integrated Hardware Keypad/Display (optional)

Roughing Valve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 1st Stage Heater 2nd Stage Heater 2 Setpoint Relays RS-232 Interface

Pumping Speeds: Water Air Hydrogen Argon

4000 liters/sec 1500 liters/sec 2200 liters/sec 1200 liters/sec

Argon Throughput 700 sccm (9 Torr-liters/sec)

Capacity: Argon

1000 std. liters (no recovery metric) 450 std. liters (recovery to 10

Hydrogen

12 std. liters @ 5 x 10

-6

Torr

-7

in 30 seconds or less)

Crossover 150 Torr-liters

Regeneration Time Full (Typical) Fast (Typical)

Less than 162 minutes Less than 60 minutes

Dimensions Refer to Installation/Interface Drawing

Weight 52 lbs. (24 kg)

Page 29

Table 1-6: On-Board Enchanced 8F Cryopump Specifications

Parameter Specifications

Rough Pump Connec-

NW 25 ISO KF

tion

Integrated Hardware Keypad/Display (optional)

Roughing Valve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 1st Stage Heater 2nd Stage Heater 2 Setpoint Relays RS-232 Interface

Pumping Speeds: Water Air Hydrogen Argon

4000 liters/sec 1500 liters/sec 2200 liters/sec 1200 liters/sec

Argon Throughput 700 sccm (9 Torr-liters/sec)

Capacity: Argon

1000 std. liters (no recovery metric) 750 std. liters (recovery to 10

Hydrogen

12 std. liters @ 5 x 10

-6

Torr

-7

in 30 seconds or less)

Crossover 150 Torr-liters

Regeneration Time Full (Typical) Fast (Typical)

Less than 162 minutes Less than 60 minutes

Dimensions Refer to Installation/Interface Drawing

Weight 52 lbs. (24 kg)

Page 30

Table 1-7: On-Board 10 Cryopump Specifications

Parameter Specifications

Rough Pump Connec-

NW 25 ISO KF

tion

Integrated Hardware Keypad/Display (optional)

Roughing Valve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 1st Stage Heater 2nd Stage Heater 2 Setpoint Relays RS-232 Interface

Pumping Speeds: Water Air Hydrogen Argon

9000 liters/sec 3000 liters/sec 5000 liters/sec 2500 liters/sec

Argon Throughput 1500 scc/min. (19 Torr-liters/sec)

Capacity: Argon Hydrogen

2000 std. liters 24 std. liters @ 5 x 10-6 Torr

Crossover 300 Torr-liters

Regeneration Time Full (Typical) Fast (Typical)

Less than 132 minutes Less than 60 minutes

Dimensions Refer to Installation/Interface Drawing

Weight 95 lbs. (43 kg)

Page 31

Table 1-8: On-Board 10F Cryopump Specifications

Parameter Specifications

Rough Pump Connec-

NW 25 ISO KF

tion

Integrated Hardware Keypad/Display (optional)

Roughing Valve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 1st Stage Heater 2nd Stage Heater 2 Setpoint Relays RS-232 Interface

Pumping Speeds: Water Air Hydrogen Argon

9500 liters/sec 3600 liters/sec 6000 liters/sec 3000 liters/sec

Argon Throughput 1500 scc/min. (19 Torr-liters/sec)

Capacity: Argon Hydrogen

2000 std. liters 24 std. liters @ 5 x 10-6 Torr

Crossover 300 Torr-liters

Regeneration Time Full (Typical) Fast (Typical)

Less than 132 minutes Less than 60 minutes

Dimensions Refer to Installation/Interface Drawing

Weight 100 lbs. (45 kg)

Page 32

Table 1-9: On-Board 250F Cryopump Specifications

Parameter Specifications

Rough Pump Connec-

NW 25 ISO KF

tion

Integrated Hardware Keypad/Display (optional)

Roughing Valve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 1st Stage Heater 2nd Stage Heater 2 Setpoint Relays RS-232 Interface

Pumping Speeds: Water Air Hydrogen Argon

6500 liters/sec 2200 liters/sec 3200 liters/sec 1800 liters/sec

Argon Throughput 700 sccm (9 Torr-liters/sec)

Capacity: Argon Hydrogen

1000 std. liters 16 std. liters @ 5 x 10

-6

Torr

Crossover 150 Torr-liters

Regeneration Time Full (Typical) Fast (Typical)

Less than 198 minutes Less than 90 minutes

Dimensions Refer to Installation/Interface Drawing

Weight 58 lbs. (26 kg)

Page 33

Table 1-10: On-Board 250FH Cryopump Specifications

Parameter Specifications

Rough Pump Connec-

NW 25 ISO KF

tion

Integrated Hardware Keypad/Display (optional)

Roughing Valve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 1st Stage Heater 2nd Stage Heater 2 Setpoint Relays RS-232 Interface

Pumping Speeds: Water Air Hydrogen Argon

6500 liters/sec 2200 liters/sec 4500 liters/sec 1800 liters/sec

Argon Throughput 700 sccm (9 Torr-liters/sec)

Capacity: Argon Hydrogen

1000 std. liters 24 std. liters @ 5 x 10

-6

Torr

Crossover 150 Torr-liters

Regeneration Time Full (Typical) Fast (Typical)

Less than 198 minutes Less than 90 minutes

Dimensions Refer to Installation/Interface Drawing

Weight 58 lbs. (26 kg)

Page 34

Table 1-11: On-Board 400 Standard Capacity Cryopump Specifications

Parameter Specifications

Rough Pump Connection NW 25 ISO KF

Integrated Hardware Keypad/Display (optional)

Roughing Valve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 2nd Stage Heater 2 Setpoint Relays RS-232 Interface

Pumping Speeds: Water Air Hydrogen Argon

16,000 liters/sec 6,000 liters/sec 5,000 liters/sec 5,000 liters/sec

Argon Throughput 500 scc/min (6 Torr-liters/sec)

Capacity Argon Hydrogen

2500 std. liters 15 std. liters @ 5 x 10

-6

Torr

Crossover 300 Torr-liters

Regeneration Time Full (Typical) Fast (Typical)

Less than 228 minutes Less than 96 minutes

Dimensions Refer to Installation/Interface Drawing

Weight 170 lbs. (77 kg)

Page 35

Table 1-12: On-Board 400 High Capacity Cryopump Specifications

Parameter Specifications

Rough Pump Connection NW 25 ISO KF

Integrated Hardware Keypad/Display (optional)

Roughing Valve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 2nd Stage Heater 2 Setpoint Relays RS-232 Interface

Pumping Speeds: Water Air Hydrogen Argon

16,000 liters/sec 6,000 liters/sec 12,000 liters/sec 5,000 liters/sec

Argon Throughput 500 scc/min (6 Torr-liters/sec)

Capacity Argon Hydrogen

2500 std. liters 42 std. liters @ 5 x 10

-6

Torr

Crossover 300 Torr-liters

Regeneration Time Full (Typical) Fast (Typical)

Less than 228 minutes Less than 96 minutes

Dimensions Refer to Installation/Interface Drawing

Weight 170 lbs. (77 kg)

Page 36

Table 1-13: On-Board 500 ISO-K Cryopump Specifications

Parameter Chevron Array Specifications

Rough Pump Connection NW 25 ISO KF

Integrated Hardware Keypad/Display (optional)

Roughing Valve

Purge Valve

Cryopump TC Gauge

1st Stage Diode

2nd Stage Diode 2nd Stage Heater 2 Setpoint Relays

RS-232 Interface

Weight 118.2 kg/260 lbs.

Dimensions Refer to Installation/Interface Drawing

Vacuum Requirements

Crossover torr-liters 600

Ultimate Pressure

torr 7.5E-9

Pumping Speed

Water liters/sec 30000

Nitrogen

Hydrogen

Argon

2,3

Argon Throughput

2,3

liters/sec 10000

liters/sec 12000

liters/sec 8400

SCCM 1000

Pumping Capacity

Argon std.liters 6000

Hydrogen std.liters 45 (@5E-6 Torr)

Regen/Cool down Time

Full (Typical) Minutes 225

1. At 38 C ambient radiation

2. At 20 C ambient radiation

3. At 20K Second Stage temperature

Page 37

Theory of Operation

Each On-Board Cryopump consists of a cold head and a vacuum vessel as shown in Figure 1-5 and Figure 1-6. An 80K condensing array, a 15K array, cold head station heaters, and an 80K radiation shield are located in the vacuum vessel. The cold station heaters and 15K array are secured to the cold head, which is welded to the vacuum vessel. The cold head provides cooling to the three arrays. Gases are removed from your vacuum chamber, thereby creating a vacuum when they are condensed or adsorbed on the cryogenically-cooled arrays.

Cold Head

The cold head consists of a two-stage cold head cylinder, which is part of the vacuum vessel, and the drive unit displacer assembly that together produce closedcycle refrigeration at temperatures ranging from 60 to 120K for the first-stage cold station and 10 to 20K for the second-stage cold station, depending on operating conditions. Within the drive unit displacer assembly, the drive unit actuates the displacer-regenerator assembly located in the cold head cylinder and thereby controls the flow of helium into the cold head. Within the drive unit are located the crankcase and drive motor, which is a direct-drive constant-speed motor, operating at 72 rpm on 60 Hz power and 60 rpm on 50 Hz power.

During operation, high pressure helium from the compressor enters the cold head at the helium supply connector, and flows through the displacer-regenerator assembly, crankcase, and motor housing before exiting through the helium gas return connector and returning to the compressor. Helium expansion in the displacer-regenerator assembly provides cooling at the first and second stage cold stations.

Vacuum Vessel and Arrays

The 80K array, as shown in Figure 1-5 and Figure 1-6, condenses water and hydrocarbon vapors. The 15K array condenses nitrogen, oxygen, and argon while the specially processed charcoal of this array traps helium, hydrogen, and neon. The temperature of the cold head stations, to which the 15K array and 80K radiation shield are attached, is measured by temperature sensors and transmitted to the On-Board controller for display.

Compressor Gas and Oil Flows

Helium returning from the cryopump cold head enters the compressor and a small quantity of oil is injected into the gas stream, thereby overcoming helium's low specific heat and inability to carry heat produced during compression. Helium is then compressed and passed through a heat exchanger for removal of compression-caused heat.

Page 38

The helium continues its flow through an oil-mist separator and a charcoal filter

9600 COMPRESSOR

ON-BOARD 8F

HIGH-VACUUM

CRYOPUMP

VACUUM

CHAMBER

ON-BOARD POWER

HELIUM SUPPLY

HELIUM RETURN

POWER

WATER

adsorber (cartridge), within the compressor, where oil and contaminants are removed. A differential pressure relief valve in the compressor limits the operating pressure differential between the helium supply and return lines, thereby allowing compressor operation without cold head operation. When cold head operation reaches a steady-state condition, further pressure regulation is unnecessary.

A typical On-Board Cryopump system is shown in Figure 1-4.

The location of helium and electrical components of typical flat and straight OnBoard Cryopumps are shown in Figure 1-7 and Figure 1-8 respectively.

Figure 1-4: Typical On-Board Cryopump System

Page 39

80K Array

Mounting

Radiation Shield

Second Stage

15K Array

Vacuum Vessel

First Stage Heater

Heater

Flange

Cup Shield

Figure 1-5: Cutaway View of a Typical Flat On-Board Cryopump Vessel

Page 40

80K Array

Mounting

Radiation Shield

Second Stage

15K Array

Vacuum Vessel

First Stage Heater

Heater

Flange

Standpipe Filter

First Stage Diode

Figure 1-6: Cutaway View of a Typical Straight On-Board Cryopump Vessel

Page 41

LEGEND

1. Auxiliary Thermocouple Gauge Connector

2. Network Connectors

3. Network Pump Identification Switch

4. Power Indicator Lamp

5. RS-232 Computer Interface Connector

6. Setpoint Relay Connector

7. Remote Keypad Connector

8. Safety Interlock Screw

9. Input Power Connector

10. Helium Return Connector

11. Helium Supply Connector

12. Pressure Relief Valve

13. Purge Gas Connection (10 - 25 psig or 40 - 80 psig) 1/8 NPT

14. Rough Pump Connection

15. Air Supply Connection (60 - 80 psi, 1/8 NPT)

ON-BOARD

FastRegen™ Control

Sputtering

Figure 1-7: Typical Flat On-Board Cryopump Component Identification

Page 42

ON-BOARD

FastRegen™ Control Sputtering

6 7 6

LEGEND

1. Thermocouple Gauge

2. Rough Pump Connection

3. Air Supply Connection (60 - 80 psig 1/8 NPT)

4. Purge Gas Connection (10 - 25 psig or 40 - 80 psig 1/8 NPT)

5. Auxiliary Thermocouple Gauge Connector

6. Network Connectors

7. Network Pump Identification Switch

8. Power Indicator Lamp

9. RS-232 Computer Interface Connector

10. Keypad/Display 1 1. Setpoint Relay Connector

12. Remote Keypad Connector

13. Safety Interlock Screw

14. Input Power Connector

15. Pressure Relief Valve

16. Helium Return Connector

17. Helium Supply Connector

Figure 1-8: Typical Straight On-Board Cryopump Component Identification

Page 43

Introduction

Keypad/Display Installation (Refer to Page 2-2)

On-Board Cryopump Installation (Refer to Page 2-6)

Roughing Pump Connection (Refer to Page 2-10)

Purge Gas Connection (Refer to Page 2-10)

AUX TC Gauge Installation (Refer to Page 2-11)

Setpoint Relays (Refer to Page 2-11)

Remote Keypad/Display Installation (optional) (Refer to Page 2-12)

Vent Pipe Connection (Refer to Page 2-9)

Helium Line Connections (Refer to Page 2-10)

Rough Valve Gas Connection (Refer to Page 2-10)

Section 2 - Installation

Installation information is presented for experienced and inexperienced OnBoard Cryopump system technicians. The flowchart in Figure 2-1 highlights the major tasks of On-Board Cryopump installation. Refer to Figure 2-1 and the appropriate installation procedure within this section for the type of On-Board Cryopump being installed.

Figure 2-1: Block Diagram for On-Board Cryopump Installation

Page 44

Keypad/Display Installation

Back Plate Mounting Screws (Keypad Removed)

Keypad/Display Handle

Backplate

Keypad/Display Mounting Screws

The keypad/display can be installed on the On-Board Cryopump in four different positions, identified as positions A, B, C, and D. Typically, the On-Board Cryopump is shipped with the keypad/display mounted in position A, as shown in Figure 2-2. This is the orientation most likely to be used for the majority of installations. Installing the keypad/display in position B, C, or D is easy.

Position A

Figure 2-2: Keypad/Display Mounting Position A

Page 45

Position B

Back Plate Mounting Screws (Keypad Removed)

Keypad/Display Handle

Backplate

Keypad/Display Mounting Screws

Refer to Figure 2-3 and the following procedure to install the keypad/display in position B.

1. Remove the 2 screws, washers, and nuts holding the keypad/ display to the back plate.

2. Remove the 2 screws and washers holding the back plate.

3. Rotate the back plate, being careful not to strain the cable, so the keypad/display mounting screw holes are oriented as shown in

Figure 2-3.

4. Mount the back plate using the 2 screws and washers removed during step 2.

5. Remount the keypad/display using the 2 screws, washers, and nuts removed in step 1 as shown in

Figure 2-3.

Figure 2-3: Keypad/Display Mounting Position B

Page 46

Position C

Back Plate Mounting Screws (Keypad Removed)

Keypad/Display Handle

Backplate

Keypad/Display Mounting Screws

Refer to Figure 2-4 and the following procedure to install the keypad/display in position C.

1. Remove the 2 screws, washers, and nuts holding the keypad/ display to the back plate.

2. Turn the keypad/display over.

3. Remount the keypad/display as shown in Figure 2-4 using the 2 screws, washers, and nuts removed in step 1.

Figure 2-4: Keypad/Display Mounting Position C

Page 47

Position D

Back Plate Mounting Screws (Keypad Removed)

Keypad/Display Handle

Backplate

Keypad/Display Mounting Screws

Refer to Figure 2-5 and the following procedure to install the keypad/display in position D.

1. Remove the 2 screws, washers, and nuts holding the keypad/ display to the back plate.

2. Remove the 2 screws and washers holding the back plate.

3. Rotate the back plate, being careful not to strain the cable, so the keypad/display mounting screw holes are oriented as shown in

Figure 2-5.

4. Remount the back plate using the 2 screws and washers removed during step 2.

5. Remount the keypad/display using the 2 screws, washers, and nuts removed in step 1 as shown in

Figure 2-5.

Figure 2-5: Keypad/Display Mounting Position D

Page 48

On-Board Cryopump Installation

The following procedure does not apply to the On-Board 500 Cryopump. Refer to the On-Board 500 Cryopump Installation procedure to install these pumps. The On-Board Cryopump may be installed in any orientation without affecting its performance. Before mounting the On-Board Cryopump to the vacuum system, ensure that a high-vacuum isolation valve (Hi-Vac valve) is installed between the On-Board Cryopump and the vacuum chamber.

This valve isolates the On-Board Cryopump from the chamber during rough pumping, cooldown, and regeneration.

Install the On-Board Cryopump on the vacuum system as follows:

1. Remove the protective cover from the main flange of the OnBoard Cryopump.

2. Clean all sealing surfaces and install the O-ring or metal seal gasket as appropriate.

Check with the OEM for proper cleaning materials.

Two-Person Lift Required

Certain model pumps weigh in excess of 24 kg/52 lbs. Lifting heavy loads can result in serious injury. Use a 2-person lift or a lifting aid when attempting to lift these pumps.

3. Mount the On-Board Cryopump to the Hi-Vac valve or vacuum chamber mounting flange. Be sure all mounting bolts are secure.

Page 49

On-Board 500 Cryopump Installation

Lifting bar detail

1/4-inch thickness

1-inch clearance

1-inch diameter

SHCS

hole

Figure 2-6: Lifting Bars

x 2

Also refer to the On-Board 500 Cryopump Quick Installation Guide (174166).

Tip Over/Heavy Object Hazard

The On-Board 500 Cryopump weighs 118.2 kg/260 lbs. Lifting the On-Board 500 Cryopump by fewer than all 3

lift points can result in instability of the pump, leading to personnel injury.

Always use a lifting aid when attempting to lift or move this pump.

1. When lifting the On-Board 500 Cryopump from the packaging container, always attach cables to each of the 3 lifting bars pro vided for the purpose.

Note: Each lifting bar is 1/4-inch thick with a 1-inch diameter hole and 1-inch clearance. Refer to

Figure 2-6.

Page 50

2. Transport the pump to the tool where it will be installed.

3. Before installing the cryopump on the tool, first remove the lifting bars from the support legs. Use a 3/8-inch Allen wrench to remove the 2 SHCSs, with washer and lock washer, that secure each of the 3 lifting bars. Refer to

Figure 2-6.

NOTICE

Cryopumps can be damaged by the use of a hoisting strap. When a hoisting strap is used, remove interference between the strap and the keypad and cables.

4. When installing the pump in a horizontal orientation, leave the support legs attached, cradle the vessel at the Center of Gravity, attach a separate cable to one support leg to maintain horizontal orientation, and use an overhead lifting device.

5. When installing the pump in a vertical orientation, use the support legs.

6. Remove the protective cover from the main flange of the On-Board Cryopump.

7. Clean all sealing surfaces and install the O-ring or metal seal gasket as appropriate.

Check with the OEM for proper cleaning materials.

8. Mount the On-Board Cryopump to the Hi-Vac valve or vacuum chamber mounting flange. Be sure all mounting bolts are secure.

Page 51

Vent Pipe Connection

The On-Board Cryopump pressure relief valve can be vented directly into the room or can be connected to an exhaust system.

Toxic, flammable, and/or corrosive process gases or liquids pumped or captured by an On-Board, On-Board IS, or Cryo-Torr product could cause severe injury on contact.

Always vent toxic, flammable, and/or corrosive gases or liquids to a safe location using an inert purge gas. The customer is responsible for safely exhausting these gases.

Clearly identify on the cryopump which toxic/corrosive gas or liquid is contained in the pump before storing or shipping it to Brooks Automation.

Toxic, Flammable, Corrosive Gases

When toxic, corrosive, or flammable gases are pumped, a vent pipe must be connected to the On-Board Cryopump relief valve and directed to a safe location. When connecting a vent pipe to your On-Board Cryopump, the 1.30-inch diameter x 1.38-inch length volume of clearance around the relief valve must remain open for proper relief valve operation.

A Relief Valve Adapter Exhaust Kit (BROOKS- CRYOGENICS P/N 8080250K008) is available. Call you local customer support center for more infor mation.

Note: The On-Board 500 Cryopump ships with an exhaust cap that provides the specified volume. The cap requires a 1/2-inch FMPT connection.

The enhanced On-Board 8F Cryopump installation kit includes a 6 foot (1.83 m) length of 1/2 inch ID (12.7 mm) polytube with associated fittings to allow venting of the cold exhaust as desired in cases where a hard plumbed manifold is not used.

NOTICE

For the enhanced On-Board 8F Cryopump, if an exhaust manifold is used, it must have a minimum ID of a 1/2 inch (12.7 mm).

Page 52

Roughing Pump Connection

The roughing system must provide 10 cfm (measured at atmosphere and at each On-Board Cryopump) to successfully utilize On-Board FastRegen capability.

Connect your On-Board Cryopump to a roughing pump system using a roughing line with the largest inside diameter possible to minimize the roughing time required during start-up procedures prior to normal operation. The roughing pump should have a blank-off pressure of less than 20 microns.

The roughing pump connects to the On-Board Cryopump roughing valve as shown in Figure 1-7 at Rough Pump Connection #14 or Figure 1-8 at Rough Pump Connection #2. The valve will accept an ISO NW-25 flange.

1. Install the roughing pump line to the On-Board Cryopump roughing valve port using the clamp provided.

2. Ensure the clamp is tightened securely.

Rough Valve Gas Connection

Attach the gas supply line from a 60-80 psig gas supply to the 1/8 NPTF roughing valve fitting. Make sure to attach the gas supply line to the valve fitting that has a filter screen at the attachment connection.

Purge Gas Connection

Connect your purge gas supply line to the purge valve 1/8 NPTF fitting. Adjust the supply pressure to 10 - 25 psig or 40 - 80 psig, depending upon the label on the purge valve, yielding 1-2 cfm.

Helium Line Connections

Make the connections between the On-Board Cryopump and compressor. Refer to Figure 1-7 or Figure 1-8 while making the component interconnections.

1. Remove all dust plugs and caps from the supply and return lines, compressor, and On-Board Cryopump. Check all fittings.

2. Connect the helium-return line from the gas-return connector on the rear of the compressor to the gas-return connector on the OnBoard Cryopump.

3. Connect the helium supply line from the supply connector on the cartridge to the gas-supply connector on the On-Board Cryopump.

4. Attach the supply and return line identification decals (BROOKS-CRYOGENICS supplied) to their respective connectors.

Verify proper helium supply static pressure as described in the Installation Section of the appropriate Compressor Manual.

Page 53

Auxiliary (AUX) TC Gauge Installation

An auxiliary TC gauge tube, P/N 8112096, and an auxiliary TC gauge cable assembly, P/N 8112098G001, are available for purchase. The auxiliary TC gauge reads vacuum between 1 and 1000 microns. The gauge comes with a 1/8 NPT pipe thread.

Setpoint Relays

The setpoint relays are two mechanical relays that are incorporated into the OnBoard Cryopump for the User's application. The relays are rated at 1 amp at 25V AC/DC. The relays have both normally-open and normally-closed contacts. Connection to the relays is made through the 9-pin D connector labeled (Relays) on the connector plate on the On-Board Cryopump. Refer to Figure 2-7 for pin identification.

Refer to On-Board Cryopump Module Programming and Operation Instructions (8040410) for instructions on programming the setpoint relays. When the setpoint relays are used, connection to the relays (R1 and R2) is made via the setpoint relay connector located at the rear of the On-Board controller. If your On-Board Cryopump configuration requires use of the setpoint relays, refer to Figure 2-7 and proceed as follows:

1. Screw the TC tube into a 1/8 NPT fitting.

2. Attach the auxiliary TC cable to the tube and to the connector on the On-Board module. Refer to

Note: It may be necessary to zero the auxiliary TC gauge. Refer to the On-Board Cryopump Module Programming and Operation Instructions (8040410) for

more information.

1. Determine whether your On-Board equipment requires setpoint relay contacts to be either in a normally-open or normally-closed position for your application.

Figure 2-7.

2. Referring to Figure 2-7, prepare a 9-pin DSub mating connector, meeting MIL DTL 24308/1-1 and equipment requirements.

3. Connect the setpoint relay receptacle to its connector located on the On-Board controller.

4. Program the relays as described in the appropriate On-Board

Cryopump Module Programming and Operation Instructions (8040410).

Page 54

Remote Keypad/Display Installation (Optional)

Normally Open (NO)

Normally Closed (NC)

Common

Normally Closed (NC)

Normally Open (NO)

12 345

RELAY 2

RELAY 1

Figure 2-7: Setpoint Relays Connection and Pin Identification

The On-Board Cryopump can be operated both from a remote and from an attached keypad/display. The remote keypad/display is a 19-inch rack-mountable unit.

1. Mount the unit to a rack.

2. Connect the unit to the REMOTE connector on the On-Board Cryopump Module using the cable supplied with the remote key pad.

NOTICE

When installing remote keypad cable, care should be taken to route the cable away from power cables and any equipment that may generate excessive EMI conditions

Page 55

Introduction

The primary indication of trouble in a vacuum pumping system is a rise in base pressure of your vacuum chamber. A rise in the base pressure may be caused by a leak in the vacuum system, a fault in the On-Board Cryopump, or by saturation of the 15K cryo-adsorbing charcoal array within the On-Board Cryopump (regeneration may be necessary). If the On-Board Cryopump temperature is below 20K it should pump at rated capacity; a high base pressure is usually caused by an air-to-vacuum leak in the system.

If you suspect a leak in your vacuum system, isolate the On-Board Cryopump by closing the Hi-Vac valve and leak check your vacuum chamber. If no leaks are found, a leak may be present below the Hi-Vac valve (cryopump). Leak checking below the Hi-Vac valve should be performed with the On-Board Cryopump shut off and at room temperature. Leak checking while the On-Board Cryopump is operating may mask leaks that are present (due to the ability of the cryopump to pump helium). If no leak is found, refer to the cryopump troubleshooting procedures summarized in Table 3-1.

Section 3 - Troubleshooting

The problems presented in Table 3-1 are followed by possible causes and corrective actions. The causes and corresponding actions are listed in their order of probability of occurrence.

Maintaining a log of certain parameters during normal operation is a valuable tool for troubleshooting the cryopump. The log may contain many parameters; however, the following minimum parameters should be included: the cooldown time to 20K, the roughing time to 50μ, the time to base pressure at crossover, the time between regeneration cycles, and the compressor pressure reading.

Page 56

Technical Inquiries

Please refer to Contacting Brooks’ Technical Support in the front of this manual.

Table 3-1: Cryopump Troubleshooting Procedures

Problem Possible Cause Corrective Action

High base pressure of vacuum system, and a cryopump temperature below 20K.

High base pressure of vacuum system, and a cryopump temperature above 20K.

Air-to-vacuum leak in vacuum system or in cryopump.

High partial pressure of noncondensables (helium, hydrogen, or neon) within the cryopump because the 15K array has reached full capacity.

One of the arrays is loose, thereby preventing good thermal contact with its cold station on the cold head.

Decrease in cryopump cold head performance.

High partial pressure of non-condensables (helium, hydrogen, or neon) within the cryopump because the 15K array has reached full capacity.

Check cryopump relief valve for proper seating.

Check cryopump for leaks.

Check vacuum chamber and HiVac valve for leaks.

Regenerate the cryopump as described in the appropriate On-

Board Cryopump Module Programming and Operation Instructions (8040410).

Warm the cryopump to ambient temperature, and retighten the arrays to 15-20 inch/pounds.

If the helium return pressure gauge reads below the normal operating return pressure 100-120 psig (690827 kPa), add gas as described in the appropriate compressor manual.

Regenerate the cryopump as described in the appropriate On-

Board Cryopump Module Programming and Operation Instructions (8040410).

Excessive thermal load on frontal array.

Reduce the thermal radiation load by 1) shielding the cryopump or 2) lowering the temperature of the radiating surface.

Page 57

Table 3-1: Troubleshooting Procedures (continued)

Problem Possible Cause Corrective Action

Cryopump fails to cool down to the required operating temperature or takes too long to reach that temperature (20K).

No display. No power to On-Board cryopump. Check electrical connections; be

Display does not update, and/or keys do not function.

Low helium supply pressure. Add gas as described in the appro-

priate compressor manual.

Compressor problems. Refer to the appropriate compres-

sor manual.

Leak in vacuum system or cryopump.

Incomplete regeneration may not have fully cleaned the adsorbing array. Partial pressures of non-condensables (hydrogen, neon or helium) may remain.

Electronics has locked up. Try to reboot the system by turning

Check the cryopump relief valve for proper seating.

Check cryopump for leaks.

Check vacuum system for leaks.

Regenerate the cryopump as described in the appropriate On-

Board Cryopump Module Programming and Operation Instructions (8040410).

sure the power switch at the compressor controller is turned on. Check fuses. If power is turned on, try turning it off and on to reboot the electronics. Change electronics module.

the On-Board power switch located at the compressor controller off and on. Replace the On-Board electronic module.

Rough valve clicks but does not open and close.

Too little or no air pressure to drive valve.

Increase air pressure to 60 psig minimum, 80 psig maximum.

Page 58

This Page Intentionally Left Blank

Page 59

Section 4 - Maintenance

Helium Circuit Decontamination

The information in Section 4 - Maintenance will guide you through the process of removing gaseous contamination from an On-Board Cryopump helium circuit by freezing the contaminant in the coldhead of the On-Board Cryopump. A contaminated helium circuit will cause the On-Board Cryopump to operate in a noisy manner, typically referred to as ratcheting, which degrades On-Board Cryopump performance.

Separate decontamination of the compressor is only required if the compressor has been opened to atmosphere or the helium pressure in the compressor has dropped to zero.

Three methods of decontamination are described in Table 4-1 and on the following pages. These methods all have isolating gaseous contamination in common by freezing them in one or more cold On-Board Cryopumps. The method to be used will most likely be determined by the amount of time available for the decontamination.

Method

1. Cooldown and Sequential decontamination of all On-Board Cryopumps

2. Decontamination of only cold On-Board Cryopumps

3. Simultaneous decontamination of all OnBoard Cryopumps using helium manifold

Table 4-1: Methods of Decontamination

Starting

Condition

Requires all OnBoard Cryopumps to be cold.

Only one On-Board Cryopump needs to be cold.

After all On-Board Cryopumps are cold, 45 minutes to decontaminate the first On-Board Cryopump. 30 minutes for each additional On-Board Cryopump.

45 minutes to decontaminate the first cold On-Board Cryopump. 30 minutes for each additional cold On-Board Cryopump.

45 minutes Acceptable

Estimated Time

If the On-Board Cryopump does not reach its normal operating temperature (below 20K), then that performance degradation may be caused by any of the fol lowing:

Effectiveness of

Decontamination

Maximum

Acceptable

(may need to be repeated in several months).

a. Helium gas contamination

b. Poor vacuum

Page 60

Performing a Fast or Full regeneration cycle will not remove gaseous contamination from an On-Board helium circuit. Unless the decontamination procedure is performed, the noisy On-Board Cryopump condition will repeat itself within one - four weeks.

Background

The On-Board Cryopump contains a cryogenic refrigerator assembly called a coldhead. There is no way to visually inspect the internal components, so it is best to detect problems by listening for unusual sounds. If the coldhead runs quietly at start up, but begins to make a ratcheting noise after the On-Board Cryopump is cooled down, then contaminated helium is the most probable cause.

All gases other than helium can freeze in the coldhead. During manufacturing of On-Board Cryopump systems, gaseous impurities are removed using stringent manufacturing control. The delivered system contains sufficiently low concentrations of gaseous impurities so they are not of concern.

It is possible, over long periods of operation, that additional gaseous contaminants can be released. These gases, along with any air that is added accidentally during installation, will collect in the coldhead as frozen gas. The frozen gas may partially block the regenerator. This increases the amount of torque required to drive the displacer mechanism to the point that the motor noise, that is, the ratcheting, may increase and result in coldhead motor stalling.

c. Thermal load on the On-Board Cryopump arrays

These gaseous contaminants can be removed by first freezing them in the coldhead, then disconnecting the helium supply and return lines, warming the coldhead followed by de-pressurizing and pressurizing the helium gas in the coldhead to remove them. The use of this decontamination procedure will return most On-Board Cryopumps to proper operation without the need for removal of the On-Board Cryopump from the tool.

It is strongly recommended that this procedure be performed as soon as possible after the ratcheting noise appears to minimize mechanical loading on the OnBoard Cryopump drive mechanism.

If any additional help is needed, refer to Contacting Brooks’ Technical Support in the front of this manual.

Page 61

Equipment/Tools Requirements

Read this procedure before attempting to perform the steps. The following tools and equipment must be available to perform this decontamination procedure. If you do not have this equipment, refer to Con- tacting Brooks’ Technical Support in the front of this manual to order the equipment needed.

Table 4-2: Decontamination Tools and Equipment

BROOKS-

CRYOGENICS Part

Number

8080250K003 Maintenance Manifold Kit 1

7021002P001 Charging Hose 1

Description Quantity

8043079G060 Flexline, 5-foot

(acceptable to use longer lines)

- Ultra Pure Helium (99.999%) -

571716 1-inch Open End Wrench 1

571717 1 1/8-inch Open End Wrench 1

571718 1 3/16-inch Open End Wrench 1

8080015K001 Keypad/display 1

8031403 0-400/0-3000 psig Regulator 1

For best results, BROOKS-CRYOGENICS suggests the use of a dedicated helium bottle, regulator and charge line which are never separated.

Page 62

Cool On-Board

Cryopump(s) until

temperature is stable for a

minimum of 30 minutes.

Purge regulator, helium

charging line, and

maintenance manifold

with 99.999% pure helium.

Disconnect helium

SUPPL Y line at coldheads

on same manifold.

Immediately

disconnect helium RETURN

line at coldheads on same

manifold.

Immediately

shut down the On-Board

Cryopump(s).

Warm the

On-Board Cryopump(s) to

300K.

Shut down

compressor

Slowly open ball valve on maintenance manifold and depressurize the coldhead

to 30 - 50 psig.

Back-fill coldhead to the

correct static helium

pressure and close Hoke

valve.

Have you

pressurized and

depressurized

5 times?

Yes

Go to Page 4-5

Slowly open ball valve on maintenance manifold and depressurize the coldhead

to 30 - 50 psig.

Back-fill coldhead to the

correct static helium

pressure.

Step

Steps

2,3,4

Step

12a

Step

12b

Step

12c

Step

12d

Connect two 5 foot

flexlines to the

maintenance manifold and

the first On-Board

Cryopump to be

decontaminated.

Step

Figure 4-1: Decontamination Flowchart

Page 63

Run coldhead motor for

10 - 30 seconds and

turn motor OFF.

Have you

performed 5

motor drive

cycles?

Yes

Verify that the coldhead

has the correct helium

static charge.

Disconnect 5 foot flexlines

from the decontaminated

coldhead.

Connect helium SUPPLY

line at coldheads on same

manifold.

Connect helium RETURN

line at coldheads on same

manifold.

Adjust compressor helium

static pressure to the

correct value.

Restart a Full

regeneration cycle.

Cool On-Board Cryopump

to below 17K.

Repeat Steps 10 - 16 for

each coldhead being

contaminated

Step

12d

Step

From Page 4-4

Restart Compressor

Step

Figure 4-1: Decontamination Flowchart (continued)

Page 64

Method # 1 - Decontaminate all On-Board Cryopumps

Use this procedure to remove gaseous contamination from the helium circuit by cooling each On-Board Cryopump so that the gaseous contamination is frozen in the coldhead. Each On-Board Cryopump is then decontaminated in sequence. Method 1 is flowcharted in Figure 4-1.

High Gas Pressure

High helium gas pressure is present in high vacuum pump systems and can cause severe injury from propelled particles or parts.

Do not modify or remove any pressure relief valve on the cryopump. Make sure that the path for the regenerated gas is unobstructed.

1. Ensure that all On-Board Cryopumps on the same manifold have been running with second stage below 25K for at least 30 minutes. If not, then cool down the remaining On-Board Cryopumps and run them for 30 minutes minimum after reaching 25K to trap contaminants in the coldhead.

a. Continue with Step 2 even if any pump does not cool

below 25K, because its performance may already be affected by

contamination.

b. Close the high vacuum valves to isolate the On-Board

Cryopumps from the vacuum chamber.

When Step 1 is complete, all of the coldheads are cool and the contaminant gases are frozen in the coldhead.

Steps 2 - 4 are required to ensure that the regulator, charging line and the maintenance manifold will be purged of air and that the air trapped in the regulator will not diffuse back into the helium bottle. For best results, BROOKS-CRYOGENICS suggests the use of a dedicated helium bottle, regulator and charge line which are never separated.

2. Attach a regulator (0-400/0-3000 psig) and charging line to a helium bottle (99.999% pure). DO NOT OPEN THE BOTTLE VALVE AT THIS TIME.

Page 65

3. Purge the regulator and charging line as described in Steps a through d below. Use only 99.999% helium gas.

a. Open the regulator a small amount by turning the adjust-

ing knob clockwise until it contacts the diaphragm, turn the

adjusting knob so that the regulator is barely open.

b. Slowly open the bottle valve, and purge the regulator and

line for 10 to 15 seconds. Keep the helium flowing to prevent

re-contamination.

c. Loosely connect the charge line to the closed Hoke valve on

the maintenance manifold. Refer to

d. Continue to purge the charge line for 30 seconds, and

tighten the charge line flare fitting onto the Hoke valve while

the helium is flowing.

4. Open the ball valve using the extended handle. Open the Hoke valve. Purge the manifold for 30 seconds, close the ball valve, then close the Hoke valve.

Once Step 4 has been completed, all of the coldheads are cold, the gaseous contaminant is frozen in the coldhead, the maintenance manifold is filled with clean helium and connected to the helium bottle.

The helium SUPPLY line should be disconnected first to prevent the crosshead relief valve from opening.

5. While each On-Board Cryopump is still operating, disconnect the helium SUPPLY line at all of the coldheads on the same manifold. The On-Board Cryopump helium supply line is shown in

Figure 4-3.

Figure 4-

NOTICE

Be sure to use two wrenches to ensure that the self sealing coupling adapter does not back out during disassembly. Refer to

Figure 4-4.

6. Immediately after Step 5, and while each On-Board Cryopump is still operating, disconnect the helium RETURN line at all of the coldheads on the same manifold. The On-Board Cryopump helium return line is shown in

Figure 4-2.

Page 66

Figure 4-2: On-Board Cryopump Helium Supply and Return Lines

Helium Supply Line Helium Return Line

7. Immediately after Step 6, shut down all of the On-Board Cryopumps as described in the appropriate On-Board Module Programming and Operation Instructions manual.

8. Warm the On-Board Cryopumps to 300K as follows:

a. Regenerate each On-Board Cryopump to be decontami-

nated by pressing the REGEN button, followed by 1 then 2 on

the Network Terminal keypad.

b. When the pumps reach 300K, discontinue the regeneration

cycle by pressing REGEN and 0. Repeat this process on each

pump.

After Step 8 has been completed, all of the coldheads have been cooled and the contaminant gases frozen in the coldhead. Helium gas lines have been disconnected at the coldheads, and the coldheads warmed up to 300K. The next step is to remove the contaminant from each coldhead in sequence.

9. Shut down the compressor.

10. Connect the two helium flexlines to the maintenance manifold and the coldhead of the first On-Board Cryopump to be decontaminated

NOTICE

Be sure to use two wrenches to ensure that the self sealing coupling adapter does not back out during disassembly. Refer to

Figure 4-4.

Page 67

11. De-pressurize the coldhead to between 30 and 50 psig (200 and 330 kPa) by slowly opening the ball valve and allowing the helium to bleed out slowly.

NOTICE

Reducing the coldhead pressure below 30 psig (200 kPa) may introduce more contaminants into the helium circuit.

12. Perform the following Steps in sequence:

Refer to appropriate Compressor Installation, Operation, and Maintenance Instructions for the correct static helium charge pressure.

a. Back-fill the coldhead with helium to the correct static

charge pressure by adjusting the regulator to the required pres

sure, and opening the Hoke valve on the manifold. Close the

Hoke valve when the pressure is correct.

b. De-pressurize the coldhead to between 30 and 50 psig (200

and 330 kPa) by slowly opening the ball valve and allowing the

helium to bleed out slowly. Do not reduce the pressure to less

than 30 psig or the coldhead may be further contaminated.

c. Perform the flushing Steps 12a and 12b four more times.

d. Again back-fill the coldhead to the correct static charge

pressure and run the coldhead drive motor for 10 to 30 seconds

by using the remote keypad. Ensure the network cable is

removed and press CONTROL and 1 to turn the motor on.

Press 0 to turn the motor off.

e. Repeat Steps b - d four times. There are a total of 5 drive

motor runs with five flushes each for a total of 25 flushes.

Refer to appropriate Compressor Installation, Operation, and Maintenance Instructions for the correct static helium charge pressure.

13. Verify that the coldhead has the correct helium static charge pressure.

14. Disconnect the 5-foot flexlines from the decontaminated coldhead supply and return connectors.

15. Reconnect the system helium RETURN line to the return connector

Page 68

on the coldhead as shown in Figure 4-2.

16. Reconnect the system helium SUPPLY line to the supply connector on the coldhead as shown in Figure 4-2.

Once Step 16 has been completed, the decontamination of the first On-Board Cryopump is completed and charged to the correct pressure with clean helium. The remaining coldheads need to be decontaminated.

17. Repeat Steps 10 - 16 for each coldhead being decontaminated.

18. Once Step 17 has been completed, the On-Board Cryopumps are ready to be cooled down. Adjust the compressor pressure to the correct charge pressure.

Refer to the appropriate Compressor Installation, Operation, and Maintenance Instructions for the correct static helium charge pressure value and adjustment procedure.

The charging adapter can be inserted into any helium line at the tool to simplify the final adjustment of system pressure. It should be removed after final pressure adjustment.

19. Restart the compressor.

20. Start a Full Regeneration cycle on all the On-Board Cryopumps to prepare the vacuum side of the On-Board Cryopump.

21. Allow the On-Board Cryopumps cryopumps to cool to below 17K.

If ratcheting in the On-Board Cryopump reappears, refer to Contacting Brooks’

Technical Support in the front of this manual for additional technical assistance.

Decontamination Alternatives

Method # 1 is the most effective procedure for removing gaseous contaminants from the helium circuit. By this method, all On-Board Cryopumps are first cooled down and the contaminant frozen. Each On-Board Cryopump is decontaminated in sequence.

If time is critical, then Method # 2 is an alternate procedure for decontamination. This procedure will also remove gaseous contaminant in the system.

Page 69

Method # 2 Decontamination of Only Cold Cryopumps

Method # 2 is based on Method # 1.

If certain On-Board Cryopumps are warm in Step 1 then they can remain at room temperature (i.e. over 290K). With the compressor on and cold On-Board Cryopumps left on, run these “warm” On-Board Cryopumps for 5 minutes. Running these “warm” On-Board Cryopumps for a short time will move any concentrated contaminant out of these coldheads into the compressor. The contaminants will then be carried to the cold On-Board Cryopumps where they will be frozen.

In Method # 2, the following Steps replace the corresponding Steps in Method # 1:

Step 1 - Method # 2

Any On-Board Cryopumps on the same manifold which are running should have been running below 25K for at least 30 minutes. Any pumps warmer than 290K should be kept warm.

a. Continue with Step 2 even if any pump does not cool

below 25K (its performance may already be affected by con

tamination).

b. Close the high vacuum valves to isolate the On-Board

Cryopumps from the vacuum chamber.

Step 17 - Method # 2

Repeat Steps 10 - 16 for each On-Board Cryopump which is not above 290K.

Method # 3 Grouped Decontamination Using Manifold

Method # 3 is based on Method # 1.

The time required to decontaminate each On-Board Cryopump in Method #1 after it is cooled and warmed up is about 30 minutes. If time is not available to decontaminate each On-Board Cryopump in sequence, then the alternate is to decontaminate all On-Board Cryopumps together; in other words, Grouped Decon- tamination. At least one of the On-Board Cryopumps must be cold. The decontamination is performed from the compressor side of the common supply and return manifolds.

In Method # 3 the following Steps replace the corresponding Steps in Method # 1.

Page 70

Step 5 - Method # 3

While each On-Board Cryopump is still operating, disconnect the helium SUPPLY line at the compressor side of the common supply manifold at the tool.

Step 6 - Method # 3

While each On-Board Cryopump is still operating, disconnect the helium RETURN line at the compressor side of the common supply manifold at the tool.

Step 10- Method # 3

Verify that the compressor is off. Connect the two 5-foot helium flexlines to the maintenance manifold and the compressor side of the common supply and return manifold.

NOTICE

Be sure to use two wrenches to ensure that the self sealing coupling adapter does not back out during disassembly. Refer to

Figure 4-4.

Steps 11 - 16 - Method # 3

All connections are to the manifold, not the individual coldheads. All coldhead drive motors are to be run for 10 to 30 seconds using the remote keypads per Step 12d. At the end of Step 16, all of the On-Board Cryopumps are decontaminated.

Page 71

Helium Flex Line Connection

Helium Pressure Gauge

Ball Valve

99.999% Helium Connection

Helium ON/OFF (Hoke) Valve

Relief Valve

Helium Flex Line Connection

Figure 4-3: Maintenance Manifold Part Number 8032051G001

Page 72

TO CONNECT

Hold here using 1-inch wrench

Turn here using 1 3/16-inch wrench

Hold here using 1 1/8-inch wrench

Turn here using 1 3/16-inch wrench

COUPLING HALVES

TO DISCONNECT

COUPLING HALVES

Figure 4-4: Proper Helium Line Coupling Disconnection/Connection

Page 73

On-Board Cryopump Cleaning

Toxic and/or corrosive process gases or liquids pumped or captured by an On-Board, On-Board IS, or Cryo-Torr product could cause severe injury on contact.

Always vent toxic/corrosive gases or liquids to a safe location using an inert purge gas. The customer is responsible for safely exhausting these gases.

Clearly identify on the cryopump which toxic/corrosive gas or liquid is contained in the pump before storing or shipping it to Brooks Automation.

Cleaning the arrays or other interior surfaces of the On-Board Cryopump vacuum vessel is seldom required because dust buildup does not affect performance, and the special copper alloy cryo-condensing arrays are nickel plated for corrosion resistance.

Toxic/Corrosive Gases

When cleaning the arrays and other interior surfaces, do the following:

1. Confirm that an adequate supply of indium gasket material, P/ N 7100001G006, is available to replace gaskets inadvertently damaged during disassembly.

2. Carefully disassemble the components in the vacuum vessel, including the arrays and radiation shield, to avoid damage to the indium gaskets.

3. Clean the interior surface of the vacuum vessel, the 80K condensing array, and the 80K radiation shield as follows:

a. Wash each item in strong soap or detergent solution and

hot water.

b. Rinse the items in clean hot water.

c. Air or oven dry all items at 150° F (66° C) maximum before

reinstalling into the On-Board Cryopump

Page 74

NOTICE

Do not clean the 15K cryo-adsorbing array because you may severely contaminate the adsorbent in the cleaning process.

4. Wearing lint-free gloves, reassemble the On-Board Cryopump.

5. Replace any indium gasket damaged during disassembly.

Page 75

Index

Auxiliary TC gauge installation, 2-11

Cold head, 1-19 Coldhead, 4-2 Compressor gas and oil flows, 1-19

Decontaminating

alternatives, 4-10 cold cryopumps, 4-11 tools required, 4-3 using manifold, 4-11

Decontaminating the circuit, 4-1

Helium circuit decontamination, 4-1 Helium line connections, 2-10

Installation

introduction, 2-1

Keypad

remote operations, 1-2

Keypad and display

installation, 2-2

Keypad and display installation

position A, 2-2 position B, 2-3 position C, 2-4 position D, 2-5

Maintenance, 4-1 Microprocessor control

On-Board Cryopump, 1-1

Page 76

On-Board 10 Cryopump

specifications, 1-12

On-Board 10F Cryopump

specifications, 1-13

On-Board 250F Cryopump

specifications, 1-14

On-Board 250FH Cryopump

specifications, 1-15

On-Board 4 Cryopump

specifications, 1-6, 1-7

On-Board 400 Cryopump

standard capacity specifications, 1-16

On-Board 400 High Capacity Cryopump

specifications, 1-17 On-Board 500 Cryopump Installation, 2-7 On-Board 6 Cryopump

specifications, 1-8 On-Board 8 Cryopump

specifications, 1-9 On-Board 8F Cryopump

enhanced specifications, 1-11

specifications, 1-10 On-Board Cryopump

microprocessor control, 1-1 On-Board cryopump

cold head, 1-19

compressor gas and oil flows, 1-19

theory of operation, 1-19

vacuum vessel and arrays, 1-19 On-board cryopump

description, 1-1

installation, 2-6 On-board cryopump installation

auxiliary TC gauge installation, 2-11

helium line connections, 2-10

purge gas connection, 2-10

rough valve gas connection, 2-10

roughing pump connection, 2-10

vent pipe connection, 2-9 On-board cryopumps

decontaminating, 4-6

Purge gas connection, 2-10

Remote keypad and display installation, 2-12 Remote operations, 1-2 Rough valve gas connection, 2-10 Roughing pump connection, 2-10

Safety precautions, S-1 Setpoint relays

connecting, 2-11

Specifications

On-Board Cryopump, 1-6, 1-7, 1-8, 1-9,

1-10, 1-11, 1-12, 1-13, 1-14, 1-15, 1-16, 1-17

Troubleshooting, 3-1

Vacuum vessel and arrays, 1-19 Vent pipe connection, 2-9

Brooks On-Board Maintenance Manual

Table of Contents

Table of Contents

List of Figures

List of Tables

Cryopump Safety

Section 1 - On-Board Cryopump Description

Section 2 - Installation

Section 3 - Troubleshooting

Section 4 - Maintenance

Index

List of Figures

List of Tables

Hazard Alerts

Cryopump Safety

References

Cryopump Hazards

Introduction

Installation, Operation, Troubleshooting, and Maintenance Procedures

Microprocessor-Based Control System

Specifications

Theory of Operation

Introduction

Section 2 - Installation

Keypad/Display Installation

On-Board Cryopump Installation

On-Board 500 Cryopump Installation

Setpoint Relays

Remote Keypad/Display Installation (Optional)

Section 3 - Troubleshooting

Technical Inquiries

Section 4 - Maintenance

Helium Circuit Decontamination

Decontamination Alternatives

On-Board Cryopump Cleaning

Index