This page intentionally left blankiSafety Precautions
The following are general safety precautions that are not necessarily
related to any specific part or procedure and do not necessarily appear
elsewhere in this publication. These precautions must be thoroughly
understood and apply to all phases of operation and maintenance.
Keep Away From Live Circuits
Operating personnel must at all times observe normal safety regulations.
Do not replace components or make adjustments inside the equipment
with high voltage turned on. To avoid casualties, always remove power.
Shock Hazard
Do not attempt to remove the RF transmission line while RF power is
present.
Do Not Service or Adjust Alone
Under no circumstances should any person reach into an enclosure for the
purpose of service or adjustment of equipment except in the presence of
someone who is capable of rendering aid.
Safety Earth Ground
An uninterruptible earth safety ground must be supplied from the main
power source to test instruments. Grounding one conductor of a two
conductor power cable is not sufficient protection. Serious injury or death
can occur if this grounding is not properly supplied.
Chemical Hazard
Dry cleaning solvents for cleaning parts may be potentially dangerous.
Avoid inhalation of fumes or prolonged contact with skin.
Resuscitation
Personnel working with or near high voltages should be familiar with
modern methods of resuscitation.
Bird 4421 RF Power Meter
Safety Symbols
WARNING
Warning notes call attention to a procedure which, if not correctly
performed, could result in personal injury.
CAUTION
Caution notes call attention to a procedure which, if not correctly
performed, could result in damage to the instrument.
The caution symbol appears on the equipment indicating there
is important information in the instruction manual regarding
that particular area.
NOTE: Calls attention to supplemental information.
Warning Statements
The following safety warnings appear in the text where there is danger to
operating and maintenance personnel and are repeated here for emphasis.
WARNING
Never attempt to connect or disconnect RF equipment from the
transmission line while RF power is being applied.
Leaking RF energy is a potential health hazard.
WARNING
Heavy load. Do not attempt to lift unaided.
WARNING
To avoid personal injury, disconnect the power cord from the ac line before
performing any maintenance, including fuse replacement or changing the
line voltage setting.
WARNING
Exposed ac line voltage (115 VAC or 230 VAC). Disconnect the
power cord from the ac line before replacing the batteries. Failure
to comply may result in severe electrical shock or death.
ii
WARNING
To avoid personal injury, disconnect the power cord from the ac line before
performing any maintenance, including fuse replacement or changing the
line voltage setting.
CAUTION
During remote operation, periodically monitor the bus
service request line. Failure to detect a service request
could result in equipment damage.
Caution Statements
The following equipment cautions appear in the text whenever the
equipment is in danger of damage and are repeated here for emphasis.
CAUTION
The interface module contains electrostatic discharge (ESD)
sensitive components. Failure to observe ESD precautions can
cause permanent damage.
CAUTION
Changing the sensor’s connectors will invalidate calibration data,
and may reduce the maximum power rating of the unit.
CAUTION
The Bird 4421 must be powered off when connecting or
disconnecting the power sensor from the power meter.
CAUTION
Do not use the power sensor with a load VSWR greater then 2:1.
Damage to the power meter, power sensor, or the
RF power source could occur.
CAUTION
During remote operation, periodically monitor the bus
service request line. Failure to detect a service request
could result in equipment damage.
iii
Bird 4421 RF Power Meter
CAUTION
Due to the complexity of the Bird Power Sensor, field repairs
beyond general maintenance should not be attempted.
Removal or disturbance of the power sensor cover can result in
cancellation of lifetime warranty.
CAUTION
Failure to install the properly rated fuse may result in equipment
damage or nuisance failures.
Safety Statements
USAGE
ANY USE OF THIS INSTRUMENT IN A MANNER NOT
SPECIFIED BY THE MANUFACTURER MAY IMPAIR THE
INSTRUMENT’S SAFETY PROTECTION.
USO
EL USO DE ESTE INSTRUMENTO DE MANERA NO ESPECIFICADA
POR EL FABRICANTE, PUEDE ANULAR LA PROTECCIÓN DE
SEGURIDAD DEL INSTRUMENTO.
iv
BENUTZUNG
WIRD DAS GERÄT AUF ANDERE WEISE VERWENDET ALS VOM
HERSTELLER BESCHRIEBEN, KANN DIE GERÄTESICHERHEIT
BEEINTRÄCHTIGT WERDEN.
UTILISATION
TOUTE UTILISATION DE CET INSTRUMENT QUI N’EST PAS
EXPLICITEMENT PRÉVUE PAR LE FABRICANT PEUT
ENDOMMAGER LE DISPOSITIF DE PROTECTION DE
L’INSTRUMENT.
IMPRIEGO
QUALORA QUESTO STRUMENTO VENISSE UTILIZZATO IN MODO
DIVERSO DA COME SPECIFICATO DAL PRODUTTORE LA
PROZIONE DI SICUREZZA POTREBBE VENIRNE COMPROMESSA.
SERVICE
SERVICING INSTRUCTIONS ARE FOR USE BY SERVICE-
TRAINED PERSONNEL ONLY. TO AVOID DANGEROUS
ELECTRIC SHOCK, DO NOT PERFORM ANY SERVICING UNLESS
QUALIFIED TO DO SO.
SERVICIO
LAS INSTRUCCIONES DE SERVICIO SON PARA USO EXCLUSIVO
DEL PERSONAL DE SERVICIO CAPACITADO. PARA EVITAR EL
PELIGRO DE DESCARGAS ELÉCTRICAS, NO REALICE NINGÚN
SERVICIO A MENOS QUE ESTÉ CAPACITADO PARA HACERIO.
WARTUNG
ANWEISUNGEN FÜR DIE WARTUNG DES GERÄTES GELTEN NUR
FÜR GESCHULTES FACHPERSONAL.
ZUR VERMEIDUNG GEFÄHRLICHE, ELEKTRISCHE SCHOCKS, SID
WARTUNGSARBEITEN AUSSCHLIEßLICH VON QUALIFIZIERTEM
SERVICEPERSONAL DURCHZUFÜHREN.
ENTRENTIEN
L’EMPLOI DES INSTRUCTIONS D’ENTRETIEN DOIT ÊTRE
RÉSERVÉ AU PERSONNEL FORMÉ AUX OPÉRATIONS
D’ENTRETIEN. POUR PRÉVENIR UN CHOC ÉLECTRIQUE
DANGEREUX, NE PAS EFFECTUER D’ENTRETIEN SI L’ON N’A PAS
ÉTÉ QUALIFIÉ POUR CE FAIRE.
ASSISTENZA TECNICA
LE ISTRUZIONI RELATIVE ALL’ASSISTENZA SONO PREVISTE
ESCLUSIVAMENTE PER IL PERSONALE OPPORTUNAMENTE
ADDESTRATO. PER EVITARE PERICOLOSE SCOSSE ELETTRICHE
NON EFFETTUARRE ALCUNA RIPARAZIONE A MENO CHE
QUALIFICATI A FARLA.
v
Bird 4421 RF Power Meter
UNITS ARE EQUIPPED WITH RECHAREABLE BATTERIES.
THESE ARE TO BE REPLACED BY AUTHORIZED SERVICE
PERSONNEL ONLY!!!
LAS UNIDADES VIENEN EQUIPADAS CON BATERIAS
RECARGABLES. ¡¡¡Y SOLAMENTE EL PERSONAL DE SERVICIO
AUTORIZADO PUEDE REEMPLAZARLAS!!!
GERÄTE SIND MIT WIEDER AUFLADBAREN BATTERIEN
BESTÜCKT. BATTERIEN SIND NUR VON QUALIFIZIERTEM
SERICE PERSONAL AUSZUWECHSELN!!!
CES DISPOSITIFS SONT ÉQUIPÉS DE BATTERIES
RECHARGEABLES. SEUL LE PERSONNEL D’ENTRETIEN
AUTORISÉ EST HABILITÉ À LES REMPLACER !
LE UNITÀ SONO DOTATE DI BATTERIE RICARICABILI, CHE
DEVONO DA COME SPECIFICATO DAL PRODUTTORE LA
PROTEZIONE DI SICUREZZA POTREBBE VENIRNE
COMPROMESSA.
BE SURE THE 115/230V AC VOLTAGE SELECTOR IS SET
TO THE PROPER LINE VOLTAGE, AND THE CORRECT AC
LINE FUSE IS INSTALLED BEFORE AC POWER IS
APPLIED.
S’ASSURER QUE LE SÉLECTEUR DE TENSION 115/230V C.A. EST
BIEN RÉGLÉ POUR LA TENSION DU RÉSEAU ET QUE LE FUSIBLE
DE LIGNE C.A. CORRECT EST EN PLACE AVANT DE METTRE SOUS
TENSION C.A.
CERCIORESE QUE EL SELECTOR DE VOLTAJE DE 115/230V CA
ESTE COLOCADO A LA LINEA DE VOLTAJE APROPIADA Y QUE EL
FUSIBLE ESTE INSTALADO A LA LINEA CA ANTES DE APLICAR
LA CORRIENTE ALTERNA.
VOR EINSCHALTEN DER WECHSELSTROMZUFUHR
SICHERSTELLEN, DASS DER 115/230V WECHSELSPANNUNGSSELEKTOR AUF DIE VORSCHRIFTSMÄSSIGE
LEITUNGSSPANNUNG EINGESTELLT UND DIE RICHTIGE
WECHSELSTROM-HAUPTSICHERUNG EINGESETZT IST.
PRIMA DI EROGARE CORRENTE, ASSICURARSI CHE IL
SELETTORE DI VOLTAGGIO 115/230 V.C.A. SIA REGOLATO
CORRETTAMENTE E CHE IL FUSIBLE ADATTO ALLA LINEA DI
ALIMENTAZIONE C.A. SIA INSTALLATO.
vi
About This Manual
This manual covers the Bird 4421 RF Power Meter and the sensors it
works with. Specific models include:
Power Meter4421
4020 Series
Sensors
4027A Series
Sensors
4027F Series
Sensors
4028A Series
Sensors
4028B Series
Sensors
4028C Series
Sensors
4021402240244025
4027A250K4027A400K4027A800K4027A2M
4027A4M4027A10M4027A12M4027A25M
4027A35M4027A60M4027A100M4027A150M
4027F2M4027F10M4027F60M
4028A250K4028A400K4028A2M4028A3M
4028A4M4028A10M4028A25M
4028B10M4028B3M
4028C10M
This instruction book is arranged so that essential safety information
appears in the front of the book. Reading the Safety Precautions before
operating the equipment is strongly advised.
The remainder of this manual is divided into Chapters and Sections. At
the start of each chapter, a general overview describes its contents.
Operation
First time users should read Chapter 1 – Introduction and Chapter 2 –
Installation to get an overview of equipment capabilities and installation.
Experienced operators can refer to Chapter 3 – Operating Instructions.
All instructions necessary to manually operate the equipment appear in
this chapter. If the power meter is equipped with a IEEE-488 GPIB
Interface refer to Chapter 4 – IEEE-488 GPIB Interface. For the RS-232
Interface refer to Chapter 5 – RS-232 Interface.
Maintenance
You should be familiar with preventative maintenance found in Chapter
6 – Maintenance. If a failure should occur, the troubleshooting section
will aid in isolating and repairing the failure. A list of replacement parts
with part numbers is also in this chapter.
vii
Bird 4421 RF Power Meter
Changes To This Manual
We have made every effort to ensure this manual is accurate. If you
should discover any errors, or if you have suggestions for improving this
manual, please send your comments to our factory. This manual may be
periodically updated. When inquiring about updates to this manual refer
to the part number and revision level on the title page.
The Bird 4421 RF Power Meter is one component of a complete RF power measurement system. An RF power sensor such as a Bird 4021 is also required.
The system can be controlled with the front panel buttons, or remotely
through an RS-232 connection or a GPIB-488 connection.
Items Supplied
yBird 4421 RF Power Meter
yAC Power Cord
ySensor Cable
yInstruction Manual
Optional Accessories
Panel Mount Kit (P/N 4421-250): Allows the Bird 4421 to be installed in a
standard 19" panel for rack mount applications.
Null Modem Kit (P/N 4380-250): Contains the hardware necessary to allow
the 4421 to be remotely controlled by controllers with different wiring
arrangements. Requires an RS-232 interface module.
1
Bird 4421 RF Power Meter
Figure 1
Bird 4421 Meter
Outline Drawing
4-1/4”
(108 mm)
6
10-1/8” (257 mm)
MODEL 4421 RF POWER METER
SWRRFLFWDMIN MAX dBm LIGHTON / OFF
12
FRONT
12-1/4” (312 mm)
4
SIDE
7
AC SUPPLY
REMOVE AC POWER BEFORE
ATTEMPTING TO SERVICE THIS
INSTRUMENT
VOLTAGE 115/230 V
FUSE RATING T630mA/T315mA
FREQUENCY 50/60 Hz
MAXIMUM POWER 60W
RANGE
AUTO
UP
DOWN
1. Operating Push Buttons
2. LCD
3. ON/OFF Push Button
4. Handle
3
5. Central Button
6. Fuse Access Door
7. AC Line Module
8. Master ON/OFF Switch
9. GPIB connector
10. GPIB DIP switches
11. RS-232 connector
5
12. RS-232 DIP switches
13. Power Sensor Socket
8
9
10
ON
I
O OFF
POWER
SENSOR
Power Sensors
4020 Series
13
12
11
REAR
Power sensors are available with a variety of connectors; see Chapter 6 "Available Connectors", page 59 for a complete list. Since the accuracy is critically
dependent on the connectors used at calibration, do not remove or change the
connectors.
CAUTION
Changing the sensor’s connectors will invalidate calibration data, and may
reduce the maximum power rating of the unit.
Bird 4020 Series Power Sensors are designed for lab or field use and are accurate to within ±3%(1σ) of reading.
2
Introduction
(
)
4027A Series
4027F Series
Bird 4027A Series Power Sensors are designed for use in semiconductor processing and calibration applications. Stringent calibration provides long-term
unit-to-unit repeatability, allowing consistent amounts of RF energy to be
applied to the etch process over many etch cycles. 4027A Sensors are accurate
to ±1%(1σ) at specified calibration frequencies and power levels.
Bird 4027F Series Power Sensors are similar to the 4027A series. However,
additional filtering allows the 4027F to ignore harmonics of the signal being
measured. The 4027F is also less sensitive to AM components of the signal.
4027F Sensors are accurate to ±1%(2σ) at specified calibration frequencies
and power levels.
Figure 2
Power Sensor
Outline Drawing,
4020, 4027A, 4027F,
and 4028A Series
4028 Series
Figure 3
Power Sensor
Outline Drawing
4028B Series only
3/4”
3-3/4”
(95 mm)
DIRECTIONAL POWER SENSOR
MODEL 4022
0.3 - 1000 WATTS
25 - 1000 MHz
(19 mm)
2-1/2”
(64 mm)
3-1/4”
(83 mm)
1-3/8”
SENSOR PLUG
SOCKET
-CAUTION-
SOURCELOAD
(35 mm)
Bird 4028 Series Power Sensors are high power sensors otherwise similar to
the 4027A series. 4028A sensors are based on a 7/8” line, 4028B sensors use a
1-5/8” line, and 4028C sensors use a 3-1/8” line. 4028 Sensors are accurate to
±2% at specified calibration frequencies and power levels.
This chapter provides information about preparing the Bird 4421 for use.
Sensor Connection
Changing the sensor’s connectors will invalidate calibration data, and may
The Bird 4421 must be powered off when connecting or disconnecting the
1. Turn OFF the ON/OFF rocker switch on the meter’s rear panel.
2. Align the latch on the cable with the notch of the “Power Sensor” socket on
3. Insert the cable until it clicks into place.
4. Connect the other end of the sensor cable to the sensor.
CAUTION
reduce the maximum power rating of the unit.
CAUTION
power sensor from the power meter.
the power meter’s rear panel.
RF Line Connection
Do not use the power sensor with a load VSWR greater then 2:1. Damage to
Connect the end of the power sensor labeled “SOURCE” to the RF source. Connect the end labeled “LOAD” to the load or antenna. Reversing these connections will cause measurement errors.
WARNING
Never attempt to connect or disconnect RF equipment from the
transmission line while RF power is being applied.
Leaking RF energy is a potential health hazard.
CAUTION
the power meter, power sensor, or the
RF power source could occur.
7
Bird 4421 RF Power Meter
Panel Mounting the 4421 Power Meter
You can install the 4421 Power Meter in an equipment rack if you have the
optional panel mount kit (refer to Optional Accessories, page 1). The panel
mount kit includes complete installation instructions. Figure 5 shows the
overall dimensions and mounting points for a 4421 Power Meter installed in a
panel mount kit.
Note: The power supply interrupt switch for the 4421 Power Meter is
located on the rear panel. When you install a unit in a panel mount kit, you
need to provide a means to interrupt the power supply that is easily accessible
to the user (such as a switch mounted in the panel).
Figure 5 Panel Mounting Dimensions
POWER
SENSOR
FUSE
AC SUPPLY
RF POWER METER
4421
FWD
I ON
O OFF
REMOVE AC POWER BEFORE ATTEMPTING
dBmMAX LIGHTSWRMINRFL
W A R N I N G
TO SERVICE THIS INSTRUMENT.
FUSE
VOLTAGE
100 - 132 VAC
T .250A, 250V
178 - 264 VAC
T .125A, 250V
AT 47.5 - 66 Hz
MAXIMUM POWER 15W
POWER
SENSOR
8
Installation
Handle Operation
The handle on the Bird 4421 can be set to four different positions (see
Figure 6). To adjust the handle, press the center buttons on both sides.
Releasing the buttons will lock the handle into position.
Figure 6
Handle Positions
115/230V AC Input Power
The internal power supply can operate at 115 VAC or 230 VAC. There is no
user setting to select the input voltage because the power supply automatically senses the input voltage. However, you must make sure that you have
the correct power cord plug and fuses installed for the line voltage you are
using (refer to Replacing Fuses, page 46).
AC Line Connectors
To make the ac line cord compatible with non-U.S. voltages, users must install
the appropriate connector on the power cord.
9
Bird 4421 RF Power Meter
10
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