Atec MS-50 User Manual
M
M
Automated High Speed Production Console Helium
Leak Detector
Quickly and accurately detects
leaks for a broad range of
applications
Dual pump system –
dedicated Dry Foreline and
Dry Roughing Pumps
Built-in diagnostics for troublefree maintenance
Simple one-button power up
has system ready to test in
less than 3-minutes
Fully automatic startup, tuning
and calibration
High inlet pressure of 7.5 Torr
provides fast time to test
Three flow modes provide
flexibility and maximum
productivity for applicationspecific leak testing
Resolution of 14 at
mass 4 is twice the
industry average
The only production
leak detector with a full screen
interactive flat panel LCD
display
www.vicleakdetection.com
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The MS-50 is available in various
configurations designed to meet
your specific leak testing
requirements.
Vacuum Instrument Corporation
2099 Ninth Avenue • Ronkonkoma, NY 11779 • T 631 737 0900 • F 631 737 1541 • sales@vicleakdetection.com
VIC Leak Detection is a registered trademark and the VIC Symbol and the MS-(series) are trademarks of Vacuum Instrument Corporation. © 2008 Vacuum Instrument Corporation.
MS•50 PERFORMANCE SPECIFICATIONS
Characteristics
Sensitivity, vacuum *
Sensitivity, sniffing
Leak Measurement Range
Leak Ranging
Start-up Time
Response Time *
Resolution *
Gross Test, Time
(with UFT Option)
Fine Test, Time
(with UFT Option)
Mass Spectrometer Tube
Auto-tuning
Auto-calibration
Auto-zeroing
Reject Set-point
Built-in Calibrated Leak
NIST Traceable
Temperature Compensated
Scan / Descan
Filaments
Max Operating Pressure
Display
Units
I/O
Printer Port
RS-232C
Software
Vacuum System
Vacuum Mode
Roughing Pump
Foreline Pump
High Vacuum Pump
Vacuum Gauging
Cold Trap
Physical
Dimensions (W x H x D)
Test Cup, UFT Option (∅ x D)
Test Port Connection
Weight
Electrical
Power
Units
atm cc/sec
-
minutes
seconds
-
seconds
seconds
-
-
-
-
-
-
-
-
-
-
Torr
inches (cm)
-
-
-
-
-
-
cfm
-
liters/second
-
-
inches (cm)
inches (cm)
inches
lbs. (kg)
V/Hz/A
MS-50 MS-50 Dry MS-50 Dry HS
-11
3.0 x 10
3.0 x 10
3.0 x 10
-08
1.0 x 10
-11
to 10 3.0 x 10
Auto/Manual
<3
<2 direct, <2.5 reverse <2
14 at mass 4
3 (100 mTorr)
-10
10 (25 mTorr, 10
atm-cc/sec)
180° deflection, dual magnetic sector
Yes
Internal: Yes / External: Manual
Yes
Yes
-08
Yes; 10
range Yes; 10
Yes
Yes
Yes
2 Tungsten
7.5 fine; 100 gross 0.200
15 (38.1) LCD flat panel display
cc/second, mbar*l/second, Pa*M3/second
0~5V chart, parallel printer
Yes
Yes
50 programmable test recipes
Direct, reverse or combination Direct
16 direct drive 10 scroll pump
7 direct drive 5 dual stage diaphragm/molecular drag
61 turbo
Pirani: Test Port and Foreline / Ion: High Vacuum
N/A N/A Optional
25.75 x 30.625 x 35.25 (65.40 x 77.79 x 89.54)
4.5 x 1.0 (11.4 x 2.5)
1.125
475 (215.45)
115/50-60/30; 230-240/50-60/15; 100/50-60/30
-12
-12
to 1.0 x 10-5
-09
range
Vacuum Instrument Corporation
2099 Ninth Avenue • Ronkonkoma NY 11779 • Tel 631 737 0900 • Fax 631 737 1541
www.vicleakdetection.com • email sales@vicleakdetection.com
* Performance determined in accordance with American Vacuum Society Standards; Specifications subject to change without notice.
©2008 Vacuum Instrument Corporation; ®VIC Leak Detection is a registered trademark and the VIC symbol and the MS-(series) are trademarks of Vacuum Instrument Corporation.
REVF090211
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