Manuale di Istruzioni
Bedienungshandbuch
Notice de Mode D’Emploi
VacIon Plus 300 pumps
Models
9191610/1620/1640
9191611/1621/1641
9191612/1622/1642
9191650/1660/1680
9191651/1661/1681
9191652/1662/1682
User Manual
87-900-103-01 (H)
02/2016
Notices
WARNING
CAUTION
© Agilent Technologies, Inc. 2016
No part of this manual may be
reproduced in any form or by any
means (including electronic storage
and retrieval or translation into a
foreign language) without prior
agreement and written consent from
Agilent Technologies, Inc. as governed
by United States and international
copyright laws.
Manual Part Number
Publication Number: 87-900-103-01 (H)
Edition
Edition 02/2016
Printed in ITALY
Agilent Technologies Italia S.p.A.
Vacuum Products Division
Via F.lli Varian, 54
10040 Leinì (TO)
ITALY
Warranty
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subject to being changed, without
notice, in future editions. Further, to
the maximum extent permitted by
applicable law, Agilent disclaims all
warranties, either express or implied,
with regard to this manual and any
information contained herein,
including but not limited to the
implied warranties of merchantability
and fitness for a particular purpose.
Agilent shall not be liable for errors
or for incidental or consequential
damages in connection with the
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contained herein. Should Agilent and
the user have a separate written
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The hardware and/or software
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(November 1995), as applicable in any
technical data.
Trademarks
Windows and MS Windows are U.S.
registered trademarks of Microsoft
Corporation.
Safety Notices
A CAUTION notice denotes a hazard.
It calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in damage to the product
or loss of important data. Do not
proceed beyond a CAUTION notice
until the indicated conditions are fully
understood and met.
A WARNING notice denotes a
hazard. It calls attention to an
operating procedure, practice, or the
like that, if not correctly performed
or adhered to, could result in
personal injury or death. Do not
proceed beyond a WARNING notice
indicated conditions are
until the
fully understood and met.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
VacIon Plus 300
VacIon Plus 300
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 3/98
VacIon Plus 300
4/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Contents
1
2
3
Contents
Procedura per l’installazione 9
Informazioni Generali 10
Preparazione per l’installazione 11
Installazione 13
Uso 15
Procedure di uso 16
Manutenzione 18
Smaltimento 19
Anleitung zur Installation 21
Allgemeine Hinweise 22
Vor der Installation 23
Installation 25
Gebrauch 27
Bedienungsschritte 28
Wartung 30
Entsorgung 31
Procédure pour l’installation 33
Indications Générales 34
Préparation de l'installation 35
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 5/98
Contents
4
5
Installation 37
Utilisation 39
Procédure d’utilisation 40
Maintenance 42
Mise au rebut 43
Installation Procedure 45
General Information 46
Preparation for Installation 47
Installation 49
Use 51
Operating Procedure 52
Maintenance 54
Disposal 55
Technical Information 57
Vaclon Plus Pump Replacement Parts and Accessories 58
Description of the VacIon Pump 59
Technical Specification 61
Vaclon Plus 300 Starcell 63
Vaclon Plus 300 Diode 65
Vaclon Plus 300 Noble Diode 66
Outline Drawing 68
Stray Magnetic Field 69
6/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Contents
VacIon Plus Pump Installation 72
Typical Installation 75
Inlet Flange Connection 76
Control Unit Connection 79
Safety Interlock 80
Heater Installation 80
Heater Replacement 82
Bakeout Operation 82
Operating Procedure 84
Maintenance 85
Exchange of the High Voltage Feedthrough 87
Pump Troubleshooting 90
Vaclon Plus Pump Replacement Parts and Accessories 91
Vaclon Plus Pump Controllers 92
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 7/98
Contents
8/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
1
VacIon Plus 300 pumps User Manual
Procedura per l’installazione
Informazioni Generali 10
Preparazione per l’installazione 11
Installazione 13
Uso 15
Procedure di uso 16
Manutenzione 18
Smaltimento 19
Traduzione delle istruzioni originali
9/98
1 Procedura per l’installazione
Informazioni Generali
Informazioni Generali
Questa apparecchiatura è destinata ad uso professionale.
L'utilizzatore deve leggere attentamente il presente manuale di
istruzioni ed ogni altra informazione addizionale fornita dalla Agilent
prima dell'utilizzo dell'apparecchiatura. La Agilent si ritiene sollevata
da eventuali responsabilità dovute all'inosservanza totale o parziale
delle istruzioni, ad uso improprio da parte di personale non
addestrato, ad interventi non autorizzati o ad uso contrario alle
normative nazionali specifiche.
Le pompe della serie VacIon Plus sono pompe ioniche utilizzate
comunemente per applicazioni di ultra alto vuoto, grazie alla loro
pulizia, capacità di pompare qualsiasi tipo di gas, e del loro
funzionamento senza vibrazioni e necessità di manutenzione.
Nei paragrafi seguenti sono riportate tutte le informazioni necessarie
a garantire la sicurezza dell'operatore durante l'utilizzo
dell'apparecchiatura. Informazioni dettagliate sono fornite
nell'appendice “Technical Information”.
Questo manuale utilizza le seguenti convenzioni:
AVVERTENZA!
ATTENZIONE!
NOTA
10/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
I messaggi di avvertenza attirano l'attenzione dell'operatore su una procedura
o una pratica specifica che, se non eseguita in modo corretto, potrebbe
provocare gravi lesioni personali.
I messaggi di attenzione sono visualizzati prima di procedure che, se non
osservate, potrebbero causare danni all'apparecchiatura.
Le note contengono informazioni importanti estrapolate dal testo.
Preparazione per l’installazione
1
Preparazione per l’installazione
La pompa viene fornita in un imballo protettivo speciale; se si
presentano segni di danni, che potrebbero essersi verificati durante il
trasporto, contattare l'ufficio vendite locale.
Durante l'operazione di disimballaggio, prestare particolare
attenzione a non lasciar cadere la pompa e a non sottoporla ad urti o
vibrazioni.
Non disperdere l'imballo nell'ambiente. Il materiale è completamente
riciclabile e risponde alla direttiva CEE 85/399 per la tutela
dell'ambiente.
Procedura per l’installazione
ATTENZIONE!
NOTA
Onde evitare problemi di degassamento, non toccare con le mani nude i
componenti destinati ad essere esposti al vuoto. Utilizzare sempre i guanti o
altra protezione adeguata.
La pompa non può essere danneggiata rimanendo semplicemente esposta
all'atmosfera. Si consiglia comunque di mantenerla chiusa fino al momento
dell'installazione sul sistema onde evitare eventuale inquinamento da polvere.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 11/98
1 Procedura per l’installazione
Preparazione per l’installazione
Figura 1
12/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Installazione
1
AVVERTENZA!
Installazione
La pompa, a causa del suo peso, deve essere maneggiata tramite appositi
attrezzi di sollevamento e spostamento.
Non installare e/o utilizzare la pompa in ambienti esposti ad agenti
atmosferici (pioggia, gelo, neve), polveri, gas aggressivi, in ambienti
esplosivi o con elevato rischio di incendio. Durante il funzionamento,
per ottenere le specifiche tecniche dichiarate, la temperatura
ambiente deve essere compresa tra 0 °C e +85 °C.
Procedura per l’installazione
ATTENZIONE!
La pompa deve essere tenuta sigillata con il suo tubo di ingresso schiacciato
finchè non è pronta per essere collegata al sistema.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 13/98
1 Procedura per l’installazione
Installazione
NO!
AVVERTENZA!
Per evitare lesioni alla persona, non collegare l’alta tensione alla pompa
ATTENZIONE!
14/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
prima che sia installata nel sistema e che tutte le flange di ingresso siano
adeguatamente collegate o chiuse.
Il funzionamento delle pompe è ottimizzato solo con l’uso delle
apposite unità di controllo Agilent.
Il rispetto delle normative di sicurezza nell’uso delle pompe è garantito solo con
l’uso delle unità di controllo Agilent.
Uso
1
Uso
Procedura per l’installazione
La pompa VacIon Plus può essere installata in qualsiasi posizione.
Per convenienza normalmente viene montata in posizione verticale
con la flangia di ingresso in alto.
Per installazioni con posizione diversa dalla verticale, la pompa deve
essere sostenuta tramite i piedini di montaggio posti sul suo fondo.
Per informazioni dettagliate sull’installazione della pompa, vedere
l’appendice "Technical Information".
Tutte le istruzioni per il corretto funzionamento delle pompe VacIon
Plus sono contenute nel manuale dell'unità di controllo.
Leggere attentamente tale manuale prima dell'utilizzo.
-4
Si raccomanda di portare la pompa ad una pressione di 1x10
(mbar) in modo da ottenere un avvio più rapido. A questo scopo è
meglio non utilizzare una pompa meccanica sigillata con olio, ma se
deve essere utilizzata una tale pompa, si raccomanda di inserire una
trappola lungo la linea di vuoto per ridurre la pressione causata dai
vapori di acqua e di olio provenienti dalla pompa meccanica. Cercare
di ridurre al minimo il tempo in cui la pompa meccanica è aperta
verso il sistema e verso la pompa ionica, poiché i suoi vapori si
diffondono nel sistema a pressioni inferiori a 1x10
causando una contaminazione dello stesso. Nei sistemi in cui l’olio
deve essere completamente assente, è meglio utilizzare pompe Turbo
per la suddetta operazione.
-1
Torr (mbar)
Torr
Depositi igroscopici e l’assorbimento dell’idrogeno all’interno del
composto di titanio possono provocare l’allungamento del tempo di
avvio con l’invecchiamento della pompa. Durante l’esposizione
all’aria, il deposito del composto di titanio assorbe vapore acqueo; in
conseguenza di ciò, al successivo avvio, il riscaldamento della pompa
provoca il rilascio del vapore e di parte dell’idrogeno pompato
precedentemente, con l’effetto dell’allungamento del tempo di avvio.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 15/98
1 Procedura per l’installazione
Procedure di uso
Procedure di uso
Controllare che la polarità dell’unità di controllo sia corretta per la
pompa: polarità positiva per le pompe Diode e negativa per le
StarCell e le Triode. Fare riferimento al relativo manuale ed
osservare la seguente procedura per l’uso della pompa:
1 Tramite una pompa di pre-vuoto portare il sistema da vuoto ad
una pressione minima di avvio in accordo alla tabella di pagina 9
ed a seconda del tipo di pompa ionica.
2 Collegare l’unità di controllo ad una apposita fonte di
alimentazione ed accenderla.
3 Osservare la tensione, la corrente e la pressione. Se l’avvio è
avvenuto ad una pressione di 5x10
tensione di circa 300 - 400 V. Un valore di corrente prossimo alla
corrente di corto circuito dell’unità di controllo è indice
dell’esistenza di una perdita nella pompa e nel sistema. Un
temporaneo incremento della pressione di pre-vuoto è normale
durante la fase di avvio.
4 Lasciare la valvola di pre-vuoto aperta durante l’avvio della
pompa ionica finchè non si raggiunge una adeguata pressione di
avvio. Se la tensione della pompa ionica scende dopo la chiusura
della valvola, riaprirla per un pre-pompaggio aggiuntivo. Appena
la pressione diminuisce, la tensione cresce nuovamente e la
valvola di pre-vuoto può essere chiusa.
5 Quando la tensione ha raggiunto i 2 – 3 kV, mettere l’unità di
controllo nello stato PROTECT. Il sistema sarà così autoprotetto
dall’incremento della pressione oltre 1x10
la pompa non è controllata. Nel caso in cui ci fosse un tale
incremento, l’unità di controllo viene spenta automaticamente.
6 La pressione nella pompa può anche essere calcolata leggendo la
corrente e convertendo la lettura in pressione tramite l’apposito
diagramma pressione-corrente illustrato nell’appendice
“Technical Information” di questo manuale.
-2
Torr (mbar), è tipica una
-4
Torr (mbar) quando
16/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Procedura per l’installazione
Procedure di uso
1
AVVERTENZA!
AVVERTENZA!
Non avvicinare dispositivi elettronici alla pompa. Il campo magnetico attorno ad
NOTA
I gradini nei diagrammi pressione - corrente sono una caratteristica del modo di
funzionamento dei controller Agilent con funzione “step mode”. Quando la
corrente assorbita dalla pompa raggiunge determinati valori, l'unità di controllo
cambia il valore dell'alta tensione in uscita ad un valore più basso.
7 Quando si porta la pompa alla pressione atmosferica, usare azoto
secco in modo da evitare l’assorbimento di vapore acqueo da
parte delle pareti della pompa.
Quando la pompa viene utilizzata per il pompaggio di gas tossici,
infiammabili o radioattivi, seguire le appropriate procedure tipiche di
ciascun gas. Non usare la pompa in presenza di gas esplosivi.
Quando è installato il riscaldatore, non toccare la pompa durante le
operazioni di riscaldamento e di raffreddamento. L'elevata temperatura può
causare lesioni alle persone.
ATTENZIONE!
essa può provocare dei malfunzionamenti dei dispositivi stessi.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 17/98
1 Procedura per l’installazione
Manutenzione
Manutenzione
Le pompe della serie VacIon Plus non richiedono alcuna
manutenzione. Qualsiasi intervento deve essere eseguito da
personale autorizzato.
AVVERTENZA!
Prima di effettuare qualsiasi intervento sulla pompa scollegarla dall’alta
tensione.
Qualora una pompa dovesse essere rottamata, procedere alla sua
eliminazione nel rispetto delle normative nazionali specifiche.
18/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Smaltimento
1
Smaltimento
Significato del logo "WEEE" presente sulle etichette.
Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva
CE denominata "WEEE".
Questo simbolo (valido solo per i paesi della Comunità Europea)
indica che il prodotto sul quale è applicato, NON deve essere smaltito
insieme ai comuni rifiuti domestici o industriali, ma deve essere
avviato ad un sistema di raccolta differenziata.
Si invita pertanto l'utente finale a contattare il fornitore del
dispositivo, sia esso la casa madre o un rivenditore, per avviare il
processo di raccolta e smaltimento, dopo opportuna verifica dei
termini e condizioni contrattuali di vendita.
Procedura per l’installazione
Per maggiori informazioni riferirsi a:
http://www.agilent.com/environment/product/index.shtml
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 19/98
1 Procedura per l’installazione
Smaltimento
20/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
2
VacIon Plus 300 pumps User Manual
Anleitung zur Installation
Allgemeine Hinweise 22
Vor der Installation 23
Installation 25
Gebrauch 27
Bedienungsschritte 28
Wartung 30
Entsorgung 31
Übersetzung der Originalanleitungen
21/98
2 Anleitung zur Installation
Allgemeine Hinweise
Allgemeine Hinweise
Dieses Gerät ist für den professionellen Gebrauch bestimmt. Vor dem
Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von
Agilent mitgelieferten Zusatzdokumentationen genau lesen. Bei
vollständiger bzw. teilweiser Nichtbeachtung der enthaltenen
Hinweise, unsachgemäßem Gebrauch durch ungeschultes Personal,
nicht autorisierten Eingriffen und Mißachtung der nationalen
Bestimmungen übernimmt Firma Agilent keinerlei Haftung.
Die Pumpen der Serie VacIon Plus sind Ionenpumpen, die aufgrund
ihrer Reinheit, ihrer Fähigkeit, alle Arten von Gas zu pumpen, und
ihres vibrations- und wartungsfreien Betriebes, allgemein für
Ultrahochvakuumanwendungen zum Einsatz kommen.
In den folgenden Abschnitten sind alle erforderlichen Informationen
für die Sicherheit des Bedieners bei der Anwendung des Geräts
aufgeführt. Detaillierte technische Informationen sind im Anhang
"Technical Information" enthalten.
In dieser Gebrauchsanleitung werden Sicherheitshinweise
folgendermaßen hervorgehoben:
WARNUNG!
VORSICHT!
HINWEIS
22/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf eine
spezielle Prozedur oder Praktik, die bei unkorrekter Ausführung schwere
Verletzungen hervorrufen könnte.
Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf
aufmerksam, daß bei Nichteinhaltung Schäden am Gerät entstehen können.
Die Hinweise enthalten wichtige Informationen, die aus dem Text hervorgehoben
werden.
Vor der Installation
2
Vor der Installation
Die Pumpe wird in einer speziellen Schutzverpackung geliefert.
Eventuelle Transportschäden sind der zuständigen örtlichen
Verkaufsstelle zu melden. Beim Auspacken vorsichtig vorgehen,
damit die Pumpe nicht fällt oder Stößen oder Vibrationen ausgesetzt
wird. Das Verpackungsmaterial ist ordnungsgemäß zu entsorgen. Es
ist vollständig recyclebar und entspricht der EG-Richtlinie 85/399 für
den Umweltschutz.
Anleitung zur Installation
VORSICHT!
HINWEIS
Um Entgasungsprobleme zu vermeiden, dürfen die Komponenten, die mit dem
Vakuum in Kontakt kommen, nicht mit bloßen Händen berührt werden. Stets
Handschuhe oder einen anderen geeigneten Schutz tragen.
Die Pumpe kann, wenn sie einfach der Atmosphäre ausgesetzt ist, nicht
beschädigt werden. Sie sollte jedoch bis zur Installation an der Anlage
geschlossen bleiben, um Verunreinigungen durch Staub zu vermeiden.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 23/98
2 Anleitung zur Installation
Vor der Installation
Abbildung 1
24/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Installation
2
Installation
Anleitung zur Installation
WARNUNG!
VORSICHT!
Die Pumpe kann aufgrund ihres Gewichtes mittels geeigneter Hebe- und
Förderzeuge gehandhabt werden.
Die Pumpe darf nicht in Umgebungen installiert und/oder benutzt
werden, die ungeschützt vor Witterungsbedingungen (Regen, Frost,
Schnee), Staub und aggressiven Gasen sind, und in denen
Explosions- und erhöhte Brandgefahr besteht.
Während des Betriebes soll die Umgebungstemperatur zwischen 0 °C
und +85 °C betragen, um die angegebenen technischen Merkmale zu
gewährleisten.
Die Pumpe soll versiegelt und mit flachgedrücktem Eintrittsschlauch gehalten
werden, bis sie für den Anschluß an das System bereit ist.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 25/98
2 Anleitung zur Installation
Installation
FALSCH!
WARNUNG!
Um Personenschäden zu vermeiden, darf die Hochspannungsleitung der
Pumpe erst angeschlossen werden, wenn die Pumpe im System installiert ist
und alle Eintrittsflansche entsprechend angeschlossen oder geschlossen sind.
Der Pumpenbetrieb wird nur durch den Einsatz speziell dafür
vorgesehener Agilent Steuereinheiten optimiert.
VORSICHT!
26/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Die Einhaltung der Sicherheitsvorschriften beim Gebrauch der Pumpen ist nur
bei Verwendung von Agilent Steuereinheiten gewährleistet.
Gebrauch
2
Gebrauch
Anleitung zur Installation
Die Pumpe Vaclon Plus kann in einer beliebigen Position installiert
werden. Aus praktischen Gründen wird sie in der Regel senkrecht
mit nach oben gerichtetem Eintrittsflansch montiert. Bei nicht
senkrechten Einbaulagen soll die Pumpe auf Montagefüßen aufliegen,
die an ihrer Unterseite angebracht werden.
Detaillierte Informationen zur Installation der Pumpe sind dem
Anhang “Technical Information” zu entnehmen.
Sämtliche Hinweise für den korrekten Betrieb der Pumpen VacIon
Plus sind im Handbuch der Steuereinheit enthalten.
Dieses Handbuch ist vor der Inbetriebnahme genau durchzulesen. Es
wird empfohlen, die Pumpe auf einen Druck von 1x10
zu bringen, um einen rascheren Anlauf zu gewährleisten. Zu diesem
Zweck empfiehlt es sich, keine ölversiegelte mechanische Pumpe zu
verwenden. Falls hingegen eine derartige Pumpe benutzt werden
muß, soll an der Vakuumleitung eine Falle eingesetzt werden, um den
durch die Wasser- und Öldämpfe aus der mechanischen Pumpe
erzeugten Druck zu verringern. Es ist zu versuchen, die Zeit auf ein
Mindestmaß zu reduzieren, während der die mechanische Pumpe
zum System und zur Ionenpumpe geöffnet ist, da sich ihre Dämpfe
bei Drücken unter 1x10
dessen Verunreinigung verursachen. Bei Systemen, die vollkommen
ölfrei sein müssen, erweisen sich für den obengenannten Vorgang
Turbopumpen als geeigneter. Hygroskopische Ablage-rungen und die
Absorption von Wasserstoff in der Titanverbindung können die
Anlaufzeit verlängern und eine kürzere Standzeit der Pumpe
verursachen. Die Ablagerungen der Titanverbindungen absorbieren
Wasserdampf, wenn sie der Luft ausgesetzt werden. Dadurch bewirkt
beim anschließenden Anlaufvorgang die Aufheizung der Pumpe die
Abgabe des Dampfes und eines Teils des zuvor gepumpten
Wasserstoffs, so daß sich die Anlaufzeit verlängert.
-1
Torr (mbar) im System verbreiten und
-4
Torr (mbar)
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 27/98
2 Anleitung zur Installation
Bedienungsschritte
Bedienungsschritte
Es ist zu kontrollieren, daß die Steuereinheit in bezug auf die Pumpe
richtig gepolt ist: positive Polarität für Dioden Pumpen und negative
für StarCell oder Triode Pumpen. Es ist nach dem diesbezüglichen
Handbuch vorzugehen, für den Gebrauch der Pumpe sind die
folgenden Bedienungsschritte zu beachten:
1 Mit einer Vorvakuumpumpe das System auf einen
Mindestanlaufdruck gemäß Tabelle 9 in Abhängigkeit vom
Ionenpumpentyp bringen.
2 Die Steuereinheit an eine entsprechende Versorgungsquelle
anschließen und einschalten.
3 Die Spannung, die Stromstärke und den Druck beobachten. Wenn
der Anlauf bei einem Druck von 5x10
eine Spannung von ca. 300 – 400 V typisch. Ein Stromwert, der
sich dem Kurzschlußstromwert der Steuereinheit annähert, weist
auf eine Leckstelle an der Pumpe und am System hin. Ein
zeitweiliger Anstieg des Vorvakuumdruckes ist während der
Anlaufphase normal.
4 Während des Anlaufes der Ionenpumpe soll das Vorvakuumventil
geöffnet bleiben, bis ein angemessener Anlaufdruck erreicht ist.
Wenn die Spannung der Ionenpumpe nach Schließung des
Ventils abfällt, ist das Ventil für eine zusätzliche
Vorvakuumpumpung zu öffnen. Sobald der Druck sinkt, steigt die
Spannung erneut an und kann das Vorvakuumventil geschlossen
werden.
5 Wenn die Spannung 2 – 3 kV erreicht hat, ist die Steuereinheit
auf den Status PROTECT zu schalten. Das System verfügt auf
diese Weise über einen Selbstschutz vor einem Druckanstieg über
-4
Torr (mbar), wenn die Pumpe nicht kontrolliert ist. Falls
1x10
ein solcher Anstieg stattfindet, wird die Steuereinheit
automatisch ausgeschaltet.
6 Der Pumpendruck kann auch berechnet werden, indem die
Stromstärke abgelesen wird und der abgelesene Wert mittels des
Druck-Stromstärke-Diagramms im Anhang “Technical
Information” des vorliegenden Handbuches in einen Druckwert
umgerechnet wird.
-2
Torr (mbar) erfolgt ist, ist
28/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Anleitung zur Installation
Bedienungsschritte
2
HINWEIS
WARNUNG!
WARNUNG!
Die Stufen im Druck-Stromstärke-Diagramm sind charakteristisch für die
Funktionsweise des Agilent Controller mit Funktion “Step mode”. Wenn die
Stromaufnahme der Pumpe ein bestimmtes Ausmaß erreicht, ändert die
Steuereinheit die ausgangsseitige Hochspannung auf einen niedrigeren Wert ab.
7 Wenn die Pumpe auf den atmosphärischen Druck gebracht wird,
ist trockener Stickstoff zu verwenden, um die Aufnahme von
Wasserdampf durch die Pumpenwände zu verhindern.
Wenn die Pumpe zur Förderung von giftigen, leicht entflammbaren oder
radioaktiven Gasen benutzt wird, sind die für das jeweilige Gas
vorgeschriebenen Vorgänge zu befolgen. Die Pumpe nie bei Vorhandensein
von explosivem Gas benutzen.
Wenn die Heizung installiert ist, darf die Pumpe während der Aufheizung und
Abkühlung nicht berührt werden. Die hohe Temperatur kann zu
Personenschäden führen.
VORSICHT!
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 29/98
Keine elektronischen Geräte in die Nähe der Pumpe bringen. Das darum
befindliche Magnetfeld kann zu Funktionsstörungen der Geräte führen.
2 Anleitung zur Installation
Wartung
Wartung
Die Pumpen der Serie VacIon Plus erfordern keine Wartung.
Sämtliche Eingriffe dürfen nur von autorisiertem Personal
vorgenommen werden.
WARNUNG!
Vor Eingriffen an der Pumpe ist diese von der Hochspannungsquelle zu
trennen.
Bei eventueller Verschrottung einer Pumpe ist diese entsprechend
der einschlägigen nationalen Vorschriften zu entsorgen.
30/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Entsorgung
2
Entsorgung
Bedeutung des "WEEE" Logos auf den Etiketten.
Das folgende Symbol ist in Übereinstimmung mit der EU-Richtlinie
WEEE (Waste Electrical and Electronic Equipment) angebracht.
Dieses Symbol (nur in den EU-Ländern gültig) zeigt an, dass das
betreffende Produkt nicht zusammen mit Haushaltsmüll entsorgt
werden darf sondern einem speziellen Sammelsystem zugeführt
werden muss.
Der Endabnehmer sollte daher den Lieferanten des Geräts - d.h. die
Muttergesellschaft oder den Wiederverkäufer - kontaktieren, um den
Entsorgungsprozess zu starten, nachdem er die Verkaufsbedingungen
geprüft hat.
Anleitung zur Installation
Für weitere Informationen:
http://www.agilent.com/environment/product/index.shtml
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 31/98
2 Anleitung zur Installation
Entsorgung
32/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
3
VacIon Plus 300 pumps User Manual
Procédure pour l’installation
Indications Générales 34
Préparation de l'installation 35
Installation 37
Utilisation 39
Procédure d’utilisation 40
Maintenance 42
Mise au rebut 43
Traduction de la mode d’emploi originale
33/98
3 Procédure pour l’installation
Indications Générales
Indications Générales
Cet appareillage a été conçu en vue d’une utilisation professionnelle.
Il est conseillé à l’utilisateur de lire attentivement cette notice
d’instructions ainsi que toute autre indication supplémentaire
fournie par Agilent avant d’utiliser l’appareil. Agilent décline toute
responsabilité en cas de non respect total ou partiel des instructions
fournies, d’opérations non autorisées, d’utilisation impropre par du
personnel non formé ou contraires aux réglementations nationales
spécifiques.
Grâce à leur propreté, à leur capacité de pomper tous les types de
gaz, à leur fonctionnement sans vibrations et à l’absence d’entretien,
les pompes de la série VacIon Plus sont des pompes ioniques
généralement utilisées pour des applications de vide ultra poussé.
Les paragraphes suivants fournissent toutes les indications
nécessaires à garantir la sécurité de l'opérateur pendant l'utilisation
de l'appareillage. Des renseignements plus détaillés se trouvent dans
l'appendice "Technical Information".
Cette notice utilise les signes conventionnels suivants:
AVERTISSEMENT!
ATTENTION!
NOTE
34/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Les messages d’avertissement attirent l'attention de l'opérateur sur une
procédure ou une manœuvre spéciale dont la mauvaise exécution risque de
provoquer de graves lésions.
Les messages d'attention apparaissent avant certaines procédures dont le nonrespect peut endommager sérieusement l'appareillage.
Les notes contiennent des renseignements importants, extrapolés du texte.
Préparation de l'installation
3
ion, afin d'éviter toute pollution due à la
Préparation de l'installation
La pompe est fournie dans un emballage de protection spécial; si l'on
constate des signes d’endommagement imputables au transport,
contacter aussitôt le revendeur local. Pendant l'opération de
déballage, veiller tout particulièrement à ne pas laisser tomber la
pompe et à ne lui faire subir aucun choc ni aucune vibration. Ne pas
abandonner l'emballage dans la nature. Le matériel est entièrement
recyclable et il est conforme à la directive CEE 85/399 en matière de
protection de l'environnement.
Procédure pour l’installation
ATTENTION!
NOTE
En vue d'éviter tout problème de dégazage, ne pas toucher à mains nues les
éléments devant être exposés au vide. Mettre toujours des gants ou toute autre
protection appropriée.
La pompe ne peut être endommagée si elle reste simplement exposée à
l'atmosphère. Il est quoi qu’il en soit conseillé de ne pas la retirer de son
emballage avant le moment de l'installat
poussière.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 35/98
3 Procédure pour l’installation
Préparation de l'installation
Figure 1
36/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Installation
3
AVERTISSEMENT!
Installation
À cause de son poids, il est indispensable de se servir des équipements de
levage et de manutention pour déplacer la pompe.
Ne pas installer et/ou utiliser la pompe dans des milieux exposés à
des agents atmosphériques (pluie, gel, neige), à des poussières, à des
gaz de combat ainsi que dans des milieux explosifs ou à fort risque
d'incendie. Pendant le fonctionnement, pour respecter les
spécifications techniques déclarées la température ambiante doit être
comprise entre 0 °C et +85 °C;
Procédure pour l’installation
ATTENTION!
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 37/98
La pompe doit être conservée scellée avec son tuyan d’entrée aplati jusqu’à ce
qu’elle soit prête à être branchée au système.
3 Procédure pour l’installation
Installation
NON!
AVERTISSEMENT!
Pour éviter toute lésion aux personnes, ne pas brancher la haute tension à la
ATTENTION!
38/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
pompe avant que celle-ci soit installée dans le système et avant que toutes
les brides d’entrées soient correctement assemblées ou fermées.
Le fonctionnement de la pompe n'est optimisé que si celle-ci est
utilisée avec l'une des unités de contrôle Agilent spécifiques.
Lors de l'utilisation des pompes, le respect des normes de sécurité est
impérativement subordonné à l'emploi des unités de contrôle Agilent.
Utilisation
3
Utilisation
Procédure pour l’installation
La pompe VacIon Plus peut être installée dans toutes les positions.
Par facilité elle est généralement montée en position verticale avec la
bride d'entrée en partie haute. Pour toute installation différente de la
position verticale, la pompe doit reposer sur ses pieds de montage
placé sur le fond. Pour plus de détails sur l’installation de la pompe,
consulter l’appendice “Technical information”.
Toutes les instructions pour le fonctionnement correct de la pompe
VacIon Plus sont fournies dans la notice de l'unité de contrôle. Il est
conseillé de lire attentivement cette notice avant d'utiliser la pompe.
Il est recommandé de porter la pompe à une pression de 1x10
(mbars) de façon à obtenir un démarrage plus rapide. Pour ce faire il
est préférable de ne pas utiliser une pompe mécanique scellée à
l’huile mais au cas où il serait nécessaire d’utiliser une telle pompe, il
est recommandé d’introduire un dispositif de retenue le long de la
ligne de vide afin de réduire la pression due aux vapeurs d’eau et
d’huile engendrées par la pompe mécanique. Essayer de réduire au
minimum le temps où la pompe mécanique est ouverte vers le
système et vers la pompe ionique car ses vapeurs se répandent dans
le système à des pressions inférieures à 1x10
une contamination de celui-ci. Dans les systèmes où l’huile doit être
complètement absente, il est préférable d’effectuer ladite opération à
l’aide d’une pompe Turbo. Des dépôts hygroscopiques et l’absorption
d’hydrogène dans le composé de titane peuvent provoquer, par effet
du vieillissement de la pompe, l’allongement du temps de démarrage.
Pendant l’exposition à l’air, le dépôt du composé de titane absorbe de
la vapeur d’eau et cette action a pour conséquence qu’au démarrage
suivant le chauffage de la pompe entraînera la dispersion de la
vapeur et d’une partie de l’hydrogène pompée précédemment ce qui
aura pour effet d’allonger le temps de démarrage.
-1
Torrs (mbars) causant
-4
Torrs
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 39/98
3 Procédure pour l’installation
Procédure d’utilisation
Procédure d’utilisation
Contrôler que la polarité de l’unité de contrôle soit correcte pour la
pompe: polarité positive pour les pompes Diode et négative pour les
pompes StarCell et Triode. Se reporter au manuel correspondant et
observer la procédure suivante pour l’utilisation de la pompe:
1 A l'aide d'une pompe de pré-vide, porter le système à une
pression minimale de démarrage en suivant le tableau de la page
9 et en fonction du type de pompe ionique.
2 Brancher l’unité de contrôle à une source d’alimentation
appropriée et l’allumer.
3 Contrôler la tension, le courant et la pression. Lorsque la mise en
route est effectuée à une pression de 5x10
tension est généralement d’environ 300 - 400 V. Une valeur de
courant proche du courant de court-circuit de l’unité de contrôle
révèle l’existence d’une fuite dans la pompe et dans le système.
Au cours de la phase de démarrage, un accroissement
momentané de la pression de pré-vide est normal.
4 Laisser la soupape de pré-vide ouverte pendant le démarrage de
la pompe ionique tant qu’une pression de démarrage appropriée
n’a pas été atteinte. Si la tension de la pompe ionique descend
après la fermeture de la soupape, la rouvrir pour un pré-pompage
supplémentaire. Dès que la pression commence à diminuer, la
tension augmente à nouveau et la valve de pré-vide peut être
fermée.
5 Lorsque la tension a atteint 2 - 3 kV, mettre l’unité de contrôle en
état de PROTECT. Le système sera ainsi protégé contre toute
augmentation de pression au-delà de 1x10
la pompe n’est pas contrôlée. Si une telle augmentation devait
être enregistrée, l’unité de contrôle s’éteindrait
automatiquement.
6 La pression de la pompe peut également être calculée en relevant
le courant et en convertissant la lecture en pression à l’aide du
diagramme pression-courant illustré dans l’appendice “Technical
Information” de ce manuel.
-2
Torrs (mbars) la
-4
Torrs (mbars) lorsque
40/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Procédure pour l’installation
Procédure d’utilisation
3
Lorsque le courant absorbé par la pompe atteint des valeurs déterminées, l'unité
AVERTISSEMENT!
AVERTISSEMENT!
NOTE
Les paliers du diagramme de pression – courant sont une caractéristique du
mode de fonctionnement du contrôleur Agilent avec fonction «step mode».
de contrôle porte la valeur de haute tension en sortie à une valeur inférieure.
7 Lorsque l’on porte la pompe à la pression atmosphérique ,
utiliser de l’azote sec de façon à éviter que les parois de la pompe
n’absorbent de la vapeur aqueuse.
Lorsque la pompe est utilisée pour le pompage de gaz toxiques,
inflammables ou radioactifs, suivre les procédures appropriées à chaque
gaz. Ne pas utiliser la pompe en présence de gaz explosifs.
Lorsque le réchauffeur est installé, éviter de toucher la pompe pendant les
opérations de chauffage et de refroidissement. La température élevée peut
provoquer des brûlures.
ATTENTION!
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 41/98
Ne pas approcher de dispositifs électroniques de la pompe. Le champ
magnétique environnant cette dernière peut entraîner des dysfonctionnements
desdits dispositifs.
3 Procédure pour l’installation
Maintenance
Maintenance
Les pompes de la série VacIon Plus ne demandent aucun entretien.
Toute intervention doit être exécutée par un personnel agréé.
AVERTISSEMENT!
Avant toute intervention sur la pompe, la débrancher de la haute tension.
En cas de mise au rebut d’une pompe, procéder à son élimination
dans le respect des normes nationales en vigueur.
42/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Mise au rebut
3
Mise au rebut
Signification du logo "WEEE" imprimé sur les étiquettes.
Le symbole ci-dessous est appliqué conformément à la directive CE
nommée "WEEE".
Ce symbole (uniquement valide pour les pays de la Communauté
européenne) indique que le produit sur lequel il est appliqué NE doit
PAS être mis au rebut avec les ordures ménagères ou les déchets
industriels ordinaires, mais passer par un système de collecte
sélective.
Après avoir vérifié les termes et conditions du contrat de vente,
l’utilisateur final est donc prié de contacter le fournisseur du
dispositif, maison mère ou revendeur, pour mettre en œuvre le
processus de collecte et mise au rebut.
Procédure pour l’installation
Pour plus d’informations, rendez-vous à l’adresse:
http://www.agilent.com/environment/product/index.shtml
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 43/98
3 Procédure pour l’installation
Mise au rebut
44/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
4
VacIon Plus 300 pumps User Manual
Installation Procedure
General Information 46
Preparation for Installation 47
Installation 49
Use 51
Operating Procedure 52
Maintenance 54
Disposal 55
Original Instructions
45/98
4 Installation Procedure
General Information
General Information
This equipment is destined for use by professionals. The user should
read this instruction manual and any other additional information
supplied by Agilent before operating the equipment. Agilent will not
be held responsible for any events occurring due to non-compliance,
even partial, with these instructions, improper use by untrained
persons, non-authorized interference with the equipment or any
action contrary to that provided for by specific national standards.
The VacIon Plus series pumps are ion pumps commonly used to
create ultra-high vacuum, due to their cleanliness, ability to pump
different gases, and maintenance- and vibration-free operation.
The following paragraphs contain all the information necessary to
guarantee the safety of the operator when using the equipment.
Detailed information is supplied in the appendix "Technical
Information".
This manual uses the following standard protocol:
WARNING!
CAUTION!
NOTE
46/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
The warning messages are for attracting the attention of the operator to a
particular procedure or practice which, if not followed correctly, could lead to
serious injury.
The caution messages are displayed before procedures which, if not followed,
could cause damage to the equipment.
The notes contain important information taken from the text.
Preparation for Installation
4
Preparation for Installation
The pump is supplied in a special protective packing. If this shows
signs of damage which may have occurred during transport, contact
your local sales office. When unpacking the pump, be sure not to
drop it and avoid any kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized manner.
The material is 100 % recyclable and complies with EEC Directive
85/399.
Installation Procedure
CAUTION!
NOTE
In order to prevent outgassing problems, do not use bare hands to handle
components which will be exposed to vacuum. Always use gloves or other
appropriate protection.
Normal exposure to the environment cannot damage the pump. Nevertheless, it
is advisable to keep it closed until it is installed in the system, thus preventing
any form of pollution by dust.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 47/98
4 Installation Procedure
Preparation for Installation
Figure 1
48/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Installation
4
Installation
Installation Procedure
WARNING!
CAUTION!
The pump is heavy and must be handled by means of suitable moving and
handling tools.
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases, or in
explosive environments or those with a high fire risk. During
operation, to obtain the specified operation, the ambient temperature
must be between 0 °C and +85 °C.
The pump should be kept sealed with its pinch-off tubulation until it is ready for
attachment to the vacuum system.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 49/98
4 Installation Procedure
Installation
NO!
WARNING!
To avoid injury, never connect the high voltage to the pump before it is
installed into the system and all the inlet flanges are properly connected or
blanked off.
The pump operation is optimized using one of the special Agilent
controllers only.
CAUTION!
50/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
The safety specifications agreement using the pump is guaranteed using the
Agilent controller only.
Use
4
Use
Installation Procedure
The VacIon Plus pump can be installed in any position. For
convenience, a pump is usually mounted vertically with the inlet up.
For mounting other than vertical, the pump should be supported
using the mounting feet at the bottom of the pump.
For detailed information about the pump installation, see the
appendix “Technical Information”.
All the instructions for the correct use of the VacIon Plus pumps are
contained in the control unit manual. Read the manual carefully
before using the pump. Rough pumping down to 1x10
recommended for the most rapid starting. Roughing with an oilsealed mechanical pump is not desirable, but when used, a trap in
the roughing line is recommended to reduce pressure due to water
vapor and oils from the mechanical pump. Be careful to minimize the
time that this pump is open to the system and ion pump, since
mechanical pump vapors will start diffusing into the system at
pressures below 1x10
systems where oils must be completely eliminated, turbopump
roughing pumps should be used. Hygroscopic deposits and hydrogen
absorption into titanium may cause starting times to increase with
age. During exposure to air, the deposits of titanium compound
absorb water vapor. In subsequent start ups, pump heating causes
release of the water vapor and some previously pumped hydrogen;
thus, the starting time may be lengthened.
-1
Torr (mbar) and cause contamination. In
-4
Torr (mbar) is
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 51/98
4 Installation Procedure
Operating Procedure
Operating Procedure
Check that the controller HV polarity is correct for the pump:
positive polarity for Diode pumps and negative for StarCell or Triode
pumps. Refer to the relevant pump control unit instruction manual
and follow the procedure below when operating the pump:
1 With a clean roughing pump, establish a minimum starting
pressure in the vacuum system per the table on page 9 for the
type of ion pump.
2 Plug the control unit into a suitable power source and switch the
power ON.
3 Observe the voltage, current, and roughing pressure. If started at
4 Allow the roughing valve to remain open after turning on the ion
5 When the voltage has increased to 2-3 kV, place the control unit
6 The pressure in the pump can also be determined by reading the
-2
5x10
Torr (mbar), a controller voltage of approximately 300 to
400 volts is typical. A current value near the short-circuit current
of the control unit could indicate that an unconfined flow
discharge exists in the pump and system. A temporary rise in
roughing pressure will usually be noticed during any starting
procedure.
pump until an adequate starting pressure is reached. If the ion
pump voltage drops after closing the roughing valves, reopen the
valve for additional rough pumping. As the pressure decreases,
the voltage again will rise, and the roughing valve may be closed.
in the PROTECT condition. The system is now automatically
protected against pressure increases to 10
pump is left unattended. If such an increase should occur, the
control unit will be turned off automatically.
current and converting this reading to pressure with the
appropriate pressure versus current graph shown in the
appendix “Technical Information” of this manual.
-4
Torr (mbar) when the
52/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Installation Procedure
Operating Procedure
4
NOTE
WARNING!
WARNING!
The steps on the pressure – current charts are a characteristic of the Agilent
controller with “step mode” operation. When the current drawn by the VacIon
pump reaches the specified values, the controller will change the high voltage
output to a lower applied voltage.
7 When venting the pump, use dry nitrogen. This will avoid water
vapor absorption on the pump walls.
When employing the pump for pumping toxic, flammable, or radioactive
gases, please follow the required procedures for each gas disposal. Do not
use the pump in presence of explosive gases.
When the heating element is installed, do not touch the pump during the
heating and cooling phases. The high temperature may cause a serious
damage.
CAUTION!
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 53/98
Do not put any electronic device near the pump otherwise the magnetic field
around it may cause a device malfunctioning.
4 Installation Procedure
Maintenance
Maintenance
The VacIon Plus series pump does not require any maintenance. Any
work performed on the pump must be carried out by authorized
personnel.
WARNING!
Before carrying out any work on the pump, disconnect it from the High
Voltage supply.
If a pump is to be scrapped, it must be disposed of in accordance
with the specific national standards.
54/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Disposal
4
Disposal
Installation Procedure
Meaning of the "WEEE" logo found in labels.
The following symbol is applied in accordance with the EC WEEE
(Waste Electrical and Electronic Equipment)
Directive. This symbol (valid only in countries of the European
Community) indicates that the product it applies to must NOT be
disposed of together with ordinary domestic or industrial waste but
must be sent to a differentiated waste collection system.
The end user is therefore invited to contact the supplier of the device,
whether the Parent Company or a retailer, to initiate the collection
and disposal process after checking the contractual terms and
conditions of sale.
For more information refer to:
http://www.agilent.com/environment/product/index.shtml
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 55/98
4 Installation Procedure
Disposal
56/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
5
VacIon Plus 300 pumps User Manual
Technical Information
Description of the VacIon Pump 59
Technical Specification 61
Vaclon Plus 300 Starcell 63
Vaclon Plus 300 Diode 65
Vaclon Plus 300 Noble Diode 66
Outline Drawing 68
Stray Magnetic Field 69
VacIon Plus Pump Installation 72
Inspection Procedure 72
Visual Inspection 72
Vacuum Evaluation 73
Short Circuits 74
Typical Installation 75
Inlet Flange Connection 76
Control Unit Connection 79
Safety Interlock 80
Heater Installation 80
Heater Replacement 82
Original Instructions
57/98
5 Technical Information
Disposal
Bakeout Operation 82
Bakeout of Vaclon Pump with the Integral Heaters 83
Operating Procedure 84
Maintenance 85
Exchange of Pumping Element 86
Exchange of the High Voltage Feedthrough 87
Leakage Current Check 88
High-potting 89
Pump Troubleshooting 90
Vaclon Plus Pump Replacement Parts and Accessories 91
Vaclon Plus Pump Controllers 92
58/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Description of the VacIon Pump
5
Description of the VacIon Pump
The Agilent VacIon Plus 300 pumps are ion pumps and are available
in three types:
StarCell
Noble Diode
Diode
They operate in the pressure range from 10
Virtually all gases and vapors can be pumped successfully with the
ion pump. The pumping speed will vary depending on the system
pressure, the gas type, and the applied operating voltage. The latter
can be optimized using Agilent controllers to achieve the lowest
possible operating pressure.
The VacIon Plus StarCell pump allows starting from as high as
-2
mbar, because ions are prevented from bombarding the system
5x10
and pump walls at starting pressures, and have high speed for inert
gases. The VacIon Plus Diode and Noble Diode pumps require a lower
starting pressure (i.e. 10
-4
mbar).
Technical Information
-2
to below 10
-11
mbar.
The tantalum in the Noble Diode pump enhances the noble gas
pumping capacity, although it somewhat reduces the high getterable
gas pumping speed that the standard diode pump provides.
The VacIon Plus StarCell is the latest variation of the Triode
configuration. Its patented design makes this ion pump the only one
that can handle a high amount of Noble Gases (better than Noble
Diode and Triode) and Hydrogen (comparable to the Diode).
A positive polarity, high voltage supply is required to operate Diode
and Noble Diode pumps. A negative polarity high voltage supply is
required to operate StarCell pumps since the anode is grounded and
the cathode is held at negative potential.
The inlet ConFlat flange is a 8” (NW 150).
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 59/98
5 Technical Information
Description of the VacIon Pump
Figure 2
Figure 3
Fig. 2 shows the VacIon Plus 300 pump, Fig. 3 shows the main
assemblies of the pump.
VacIon Plus 300 pump
Inlet flange
Element
Magnet
Pump main assemblies
Cover
High voltage
connector
60/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Technical Specification
5
Tab. 1
Technical Specification
The following table details the main technical specifications of the
VacIon Plus 300 pumps.
Technical Information
Specification
Nominal pumping speed for Nitrogen
(*) (l/s)
Operating life at 1 x 10-6 mbar (hours) 80,000 50,000 50,000
Max starting current 400 mA
Max baking current 50 mA
Protect current 100 mA
Operating voltage (max) -7000 Vdc
Maximum starting pressure (mbar) ≤1x10-2 ≤1x10-3
Ultimate pressure Below 10
Inlet flange 8” CFF (NW 150) AISI 304 ESR
Internal volume (litres) 18.6
Maximum baking temperature (°C) 350
Temperature limits (°C):
Pump
Magnet
Flange
Material: Body
Cathode
Anode
Magnet
Weight, lbs (kg) 149 (69)
StarCell Noble Diode Diode
240 260 300
+/- 10 %
Titanium Titanium/
Model
+7000 Vdc
+/- 10 %
-11
mbar
400
350
500
AISI 304 SST
Tantalum
AISI 304 SST
Ferrite
Titanium
(*) Tested according to ISO/DIS 3556-1-1992
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 61/98
5 Technical Information
Technical Specification
Figures 4 to 11 show the pumping speed vs. pressure diagrams for
saturated and unsaturated pumps and the pressure vs. current
diagrams for the same pump.
The pumping speed of a newly regenerated (i.e. baked) sputter ion
pump decreases during operation until it reaches a stabilized level
known as "saturation" (nominal pumping speed). To saturate the
VacIon Plus 300 pumps, it normally requires an amount of gas equal
to 10 mbar-liters. Consequently, pumps can operate for extended
periods of time at low pressures in the non-saturated state, if they
are properly conditioned.
62/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Vaclon Plus 300 Starcell
5
Figure 4
Figure 5
Vaclon Plus 300 Starcell
Technical Information
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 63/98
Pumping speed vs pressure for Nitrogen
Pumping speed vs pressure for Argon
5 Technical Information
Vaclon Plus 300 Starcell
Figure 6
Pressure vs current diagram
64/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Vaclon Plus 300 Diode
5
Figure 7
Figure 8
Vaclon Plus 300 Diode
Technical Information
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 65/98
Pumping speed vs pressure for Nitrogen
Pressure vs current diagram
5 Technical Information
Vaclon Plus 300 Noble Diode
Figure 9
Figure 10
Vaclon Plus 300 Noble Diode
Pumping speed vs pressure for Nitrogen
Pumping speed vs pressure for Argon
66/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Technical Information
Vaclon Plus 300 Noble Diode
5
Figure 11
Pressure vs current diagram
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 67/98
5 Technical Information
Outline Drawing
Figure 12
Outline Drawing
The following figure shows the outline drawing for the VacIon Plus
pump.
68/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
VacIon Plus pump outline drawing
Stray Magnetic Field
5
Figure 13
Figure 14
Stray Magnetic Field
Curves of stray magnetic field strength along the centre line of the
pump and in the plane of the flange as a function of distance from
the pump are shown in Figs. 14, 15, 16, 17 and 18, where Bx is the
magnetic field along X axis, By is along Y axis and Bz is along Z axis.
Technical Information
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 69/98
VacIon Plus pump axis identification
Stray magnetic field from flange along X axis (z = 0 mm)
5 Technical Information
Stray Magnetic Field
Figure 15
Figure 16
Stray magnetic field from flange along Y axis (z = 0 mm)
Stray magnetic field from flange along X axis (z = 100 mm)
70/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Technical Information
Stray Magnetic Field
5
Figure 17
Figure 18
Stray magnetic field from flange along Y axis (z = 100 mm)
Stray magnetic field from flange along Z axis
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 71/98
5 Technical Information
VacIon Plus Pump Installation
VacIon Plus Pump Installation
Inspection Procedure
Visual Inspection
WARNING!
VacIon Plus pumps are evacuated, baked out, sealed and leakchecked at below 1x10
information and procedures can be used to optimize the vacuum
integrity of a VacIon Plus pump before installation.
Inspect the pump and magnet for physical damage which may have
occurred during shipment. Inspect the pinch-off seal. If it is open, the
pump is at atmospheric pressure.
The pinch-off seal is extremely sharp. Be careful.
A VacIon Plus pump that has been exposed to atmosphere during
shipment, or while in storage, will operate properly if it has not been
damaged.
-10
mbar prior shipping. The following
72/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
The pump is not harmed by such exposure, although it is good
practice to keep it under vacuum when not in use to exclude dust
and the accumulation of water vapor from the environment.
Technical Information
VacIon Plus Pump Installation
5
Vacuum Evaluation
The ion pump is shipped in an evacuated condition. Before removing
the shipping flange for installation on a vacuum system, it is
recommended that the pump be started briefly to verify vacuum
integrity and proper operation.
To verify the vacuum integrity of the new pump before venting:
1 Connect the pump to the control unit as directed in the
instruction manual of the control unit.
WARNING!
The high voltage which is present in the ion pump from the control unit can
cause severe injury or death.
Be sure that the high voltage cable is proper connected to the ion pump and
its power unit. Make sure that the pump is well grounded.
2 With the main power switch in the OFF position, plug the control
unit into a suitable power source.
3 Turn the power to ON.
4 Observe the reading for an indication of one of the following
conditions:
a If the pump is free of leaks and is at a low pressure, the
pressure indication shall within 10 minutes fall to or below
-8
the 10
b If the pressure inside the pump is at or near atmospheric
level, an arc may strike inside the high voltage feedthrough
giving a popping sound and the pump current will fluctuate.
If this occurs, turn the power OFF immediately.
5 If the vacuum integrity has been lost, the pump should be leak-
checked with a mass spectrometer leak detector before
installation on the system.
mbar range as the volume of gas is pumped.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 73/98
5 Technical Information
VacIon Plus Pump Installation
Short Circuits
If there is a short circuit between the anode and cathodes in the
pump (or cathode to pump body), the short-circuit current of the
control unit will be drawn and low voltage will be indicated. If a
short circuit exists in the control unit or high voltage cable and
connector, low voltage will also be observed when the high voltage
connector is disconnected from the pump (refer to the control unit
manuals). An ohm meter reading on the pump feedthrough may not
be effective in finding a short. Short circuits may be caused by
mechanical shock to the pump. If the pump is shorted, contact
Agilent.
74/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Typical Installation
5
Figure 19
Typical Installation
A typical installation is shown in figure 19 and consists of:
1. VacIon Plus pump.
2. A Valve to seal off the pump from the rest of the system (if
required).
3. The control unit.
4. A clean roughing pump (i.e. turbo or sorption).
Technical Information
5. A thermocouple gauge capable of indicating pressure from
atmosphere to 10
6. A valve to seal off the roughing pump from the vacuum chamber.
Roughing lines are usually made of stainless steel or copper
tubing, or other low vapor pressure material.
7. High voltage cable.
8. Backing pump (diaphragm or scroll).
-3
mbar range.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 75/98
Typical installation
5 Technical Information
Inlet Flange Connection
Inlet Flange Connection
The pump should be mounted allowing a sufficient clearance for
installation and removal of the high voltage connector.
The pump should be kept sealed with its pinch-off tubulation until it
is ready for attachment to the vacuum system. This avoids
accumulation of dust and other undesirable materials. Before
breaking the pinch-off seal, consult the inspection procedure (see
preceding paragraph).
Vent the ion pump by opening the pinch-off tubulation in a clean area
free from smog, dust, pollen, etc. Venting with dry nitrogen gas is
further recommended. This can be done by placing a clean
polyethylene bag over the ion pump flange. Small pumps can be
placed inside of the bag. Purge the bag with clean, dry nitrogen for
several minutes, then reach into the bag and release the internal
vacuum using pliers to open the copper tube pinch-off.
CAUTION!
WARNING!
76/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Do not open the pinch off-seal with a saw or grinder. These methods will cause
metal particles to be drawn into the pump by the inrushing air as the pump is
opened.
The pinch-off seal is extremely sharp. Be careful when opening. Watch your
fingers.
Use appropriate procedures to maintain the clean condition of the
pump and vacuum system.
Unscrew the main flange bolts and lift the blank flange with the help
of a bolt screwed into the available threaded hole. Remove the
ConFlat flange and the copper gasket plate. Some particles of copper
oxide may adhere to the outer edge of the flange gasket. Be careful
not to allow them or any other foreign materials to fall into the pump.
Technical Information
Inlet Flange Connection
5
Connect the ion pump to the vacuum chamber with a short length
and large diameter tubulation in order to retain as much pumping
speed as possible. Proceed as follows:
1 Inspect the mating flanges for cleanliness and absence of
scratches on the knife edge.
2 Place a new copper gasket between pump flange and vacuum
chamber flange.
3 Bolt mating flanges of the pump to the chamber with the screws
provided with the ion pump. For flanges over NW 35 (2.75" o.d.)
also mount washers below the nuts and screw heads.
4 Use silver-plated screws or apply high temperature lubricant to
the screw threads. Lubrication simplifies sealing and
disassembly. A recommended lubricant is Fel-Pro C-100.
NOTE
Lubrication is essential to prevent galling of the nut and screw after bakeout.
5 Attach the nuts and tighten each one to 6 – 11 Nm (4.5 - 8 ft.-lbs)
of torque. After tightening a nut, always tighten the opposite nut
with respect to the center of the flange. This will partially close
the gap between the flange faces.
6 Repeat the sequential tightening for two more cycles.
7 Continue tightening the bolts until the flange faces meet and a
pronounced increase in torque is felt.
Note that it’s not possible to install the screws from the lower side,
but only from the upper side of the flange. To allow complete
flexibility in the installation, a stud mounting kit is available
(see Fig. 20). For ordering information refer to the “VacIon Plus
Pump Replacement Parts and Accessories” paragraph.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 77/98
5 Technical Information
Inlet Flange Connection
Figure 20
Stud mounting kit
78/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Control Unit Connection
5
Control Unit Connection
Technical Information
WARNING!
WARNING!
WARNING!
The high voltage present in the high voltage cable which connects the control
unit to the ion pump, can cause severe injury or death. Before mounting the
high voltage connector of the cable on the pump high voltage feedthrough, or
before removing it, be sure the main power is removed from the control unit.
To avoid injury, never connect the high voltage to the pump before it is
installed into the system and all the inlet flanges are properly connected or
blanked off. Make sure that the pump is well connected to the grounded
vacuum system.
Before removing the high voltage connector of the cable from the control unit,
be sure the main power is removed from the control unit. Wait at least 10
seconds after removing the main power from the control unit, to allow
capacitors to discharge completely.
To disconnect the coaxial high voltage cable from the controller, slide
the safety locking sleeve (very little sleeve travel is required) from the
control unit and at the same time pull on the male end of the cable
connector to remove it from the socket on the control unit.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 79/98
5 Technical Information
Safety Interlock
Safety Interlock
The VacIon Plus pump feedthrough in conjunction with the cable P/N
929-0705, -0707, 0708 and -0709, when used with the Agilent control
units, allows the operation of the “High Voltage Cable Safety
Interlock” feature.
When the high voltage cable connector is disconnected from the
VacIon Plus pump feedthrough, the high voltage is automatically
switched off by the control unit.
Heater Installation
The heating element (Fig. 21) is composed of two plates to be fixed to
the pump case.
NOTE
80/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
It is advisable to make a 10 – 15 minutes initial operation of the heater in a
ventilated room to allow the evaporation of residual internal alloying elements.
To install the element proceed as follows (Fig. 22):
1 Before removing the pole pieces, mark their position and
orientation for an easier assembly later on.
2 Position the heating plate (1) inserting the threaded pins
positioned on the pump jacket into the holes of the plate. Be sure
that the written heating plate side is towards you;
3 Position the other heating plate (2) in the same way as the
heating plate (1);
4 Reinstall the pole pieces;
5 Position the connection box (3) on the upper side of the pump in
an oppose position of the HV feedthrough with respect to the
flange, and fix it to the pump case.
Technical Information
Heater Installation
5
Figure 21
Figure 22
Heating element
Heating element installation
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 81/98
5 Technical Information
Heater Replacement
Heater Replacement
To replace the heater element proceed as follows:
1 Disconnect the pump from the high voltage;
2 Disconnect the heater element from the main supply;
3 Disconnect the heater plates from the pump case;
4 Disconnect the heater connection box from the upper side of the
pump;
5 Install the new heater elements as described in the paragraph
“HEATER INSTALLATION”.
Bakeout Operation
When a VacIon pump does not reach the desired base pressure, and
there are no leaks, it is necessary to bake the system. This is done by
heating the pump and all the components in the system, and is
generally required to achieve base pressure less than 10
1 Heat the pump body and the system with a bakeout oven unit or
heating strips to temperatures between 150 °C and 220 °C
(220 °C is the maximum allowable for most bakeable high voltage
cables). This temperature is high enough to degas the pump
surfaces of water vapor without damaging the magnet and high
voltage connector. Note that the system components must be
compatible with the bakeout temperature. The heating must be
approximately even on all surfaces or evaporated water will
condence on the colder surfaces resulting in an incomplete bake
and preventing achievement of UHV vacuum pressure.
2 Leave the pump control unit on and monitor the pressure.
Agilent recommends that current during bake not exceed 50 mA;
if this value is exceeded, turn the bakeout off and then on again
when low pressure is restored.
To control the heaters and to monitor the high pressure limit
during bakeout, an automatically controlled relay may be used.
3 Bake the VacIon Plus pump for at least 24 hours. Longer bakeout
periods are recommended when the pump has been used with
heavy gas loads or when UHV pressure, 10
desired.
-8
mbar.
-9
mbar or less is
82/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Technical Information
Bakeout Operation
5
4 As the pump and system cool down to room temperature, a drop
in pressure should be observed.
Note that the ion pump can be also baked when switched off, into an
external turbo pump through a bakeable isolation valve.
Bakeout of Vaclon Pump with the Integral Heaters
1 The integral heaters are to be powered with the appropriate
voltage. (Please refer to the inscription on the heaters to apply
correct voltage).
2 The integral heaters are designed to provide a temperature of
250 °C to 300 °C when the pump is wrapped in a 3-fold
aluminium foil.
NOTE
WARNING!
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 83/98
A three-layer foil wrapping is advisable and sufficient to achieve full
bakeout/regeneration if the standard European heaters (230 Vac) are operated
at 240 Vac, thus preventing overheating.
3 Bakeout the VacIon pump for 24 hours. If the pump is used in
heavy gas load applications, it is recommended to bakeout the
pump for a longer period.
4 Wait until the pump cools down to room temperature and
recovers its base pressure before using it in the application.
Do not touch the pump during the heating and cooling phases. The high
temperature may cause serious damage.
5 Technical Information
Operating Procedure
Operating Procedure
1 Using a clean roughing pump, evacuate the system to a minimum
starting pressure as stated by the technical specification.
-6
mbar or less is recommended. To reach this pressure the use
10
of an oil free turbo-molecular roughing pump is recommended.
2 When starting an ion pump, a slight increase in vacuum pressure
is normal as the internal components are heated and outgassed.
If possible leave the roughing pump connected to the system
while starting the ion pump. This will make the startup faster
and easier.
3 Connect the control unit to a suitable power source and switch
the power on.
4 Switch on high voltage to the pump and observe the current and
voltage. Fastest starting is obtained using a high applied voltage,
7 kilovolts for example. The applied voltage may be reduced later
to optimize pumping and achieve the lowest vacuum pressure.
5 If started at 10
800 volts and increase to full voltage as the pump starts
operating. The current will start at several milliamps and slowly
decrease to microamps or nanoamps as low vacuum pressure is
achieved.
6 When first starting the pump, if the voltage decreases instead of
increasing, reduce the vacuum pressure then start the ion pump
again.
7 When the pump reaches its full operating voltage, you may close
the roughing valve.
8 If the pump does not start after 30 minutes of pumping, see the
section PUMP TROUBLESHOOTING.
9 Once the pump reaches its base pressure with stable voltage and
current, the ion pump may be baked at high temperature if
required per the section titled BAKEOUT OPERATION.
10 To stop the ion pump, simply switch off the high voltage. The
pump surfaces will continue to pump for a few minutes
depending on the system pressure.
-4
mbar, the voltage will start at approximately
84/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Maintenance
5
11 When venting the pump use clean, dry nitrogen. This will avoid
Maintenance
Technical Information
water absorption on the pump surfaces and make subsequent
pump downs easier.
WARNING!
The high voltage present in the high voltage cable which connects the control
unit to the ion pump, can cause severe injury or death. Before mounting the
high voltage connector of the cable on the pump high voltage feedthrough, or
before removing it, be sure the main power is removed from the control unit.
Before removing the high voltage connector of the cable from the control unit,
be sure the main power is removed from the control unit. Wait at least 10
seconds after removing the main power from the control unit, to allow
capacitors to discharge completely.
VacIon Plus pumps are maintenance free. In case of life time expiry
or premature failure of the pump, please contact your nearest Agilent
sales/service office for repair.
The VacIon Plus 300 pumps are designed with exchangeable highvoltage feedthrough and pump elements.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 85/98
5 Technical Information
Maintenance
Exchange of Pumping Element
Remove the internal high-voltage connections.
1 Remove the internal high-voltage connections.
2 Remove the element holding brackets.
3 Pull the element out of the pocket and remove it through the inlet
flange.
4 Clean the internal part of the pump with the appropriate solvent.
5 Put in the new element through the inlet flange. Make sure that
the element is fixed at its rear by the two press-formed buttons of
the element pocket, and at its front by the element holding clamp.
6 Reattach the high-voltage connections and test for continuity
from the feedthrough.
7 Place a blank flange over the pump inlet and leak-check it with a
leak detector.
8 Bake out the blanked off pump while it is operating, and leave it
to cool down; then verify that the base pressure is below
-9
10
mbar.
86/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Technical Information
Exchange of the High Voltage Feedthrough
5
Figure 23
Exchange of the High Voltage Feedthrough
CAUTION!
The high voltage feedthrough contains a ceramic insulator that can be damaged
if excessive force is applied in torque, in bending, or in tension. When installing
or removing the feedthrough, the applied torque should not exceed 2 Nm. Rotate
the feedthrough gently when making the threaded connection to avoid excessive
force.
1 Remove the 6 bolts of the Mini-ConFlat flange connection
(see Fig. 23).
2 Remove the cable connection disc.
3 Gently relieve the feedthrough from the metal gasket connection
and turn the feedthrough counterclockwise until it is completely
detached from the internal high voltage threaded connection.
4 Replace the feedthrough and the copper gasket, making sure that
the feedthrough is connected to the pumps internal connector.
Check that the feedthrough is not shorted.
5 Bake out the pump while it is operating, and leave it to cool
down; then verify that the base pressure is below 10
-9
mbar.
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 87/98
High voltage feedthrough connection
5 Technical Information
Exchange of the High Voltage Feedthrough
Leakage Current Check
If the pump current reading is to be used as pressure measurement,
check the pump leakage currents as follows:
1 Turn off the pump control unit.
2 Remove the pump magnet.
3 Turn on the pump control unit and wait for current stabilization.
The current reading should not be higher than 300 nA. Make sure
that the control unit and the high voltage cable leakage current is
negligible.
4 If leakage current comes from the pump, perform "high-potting"
per the following procedure; then recheck the pump and install
the magnet.
5 If it is not possible to "high-pot" the pump, the pressure reading is
based by the leakage current value.
88/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Technical Information
Exchange of the High Voltage Feedthrough
5
High-potting
A constant pump current when no vacuum leak exists is often caused
by field emission currents which prevent the use of the pump current
as a UHV pressure indicator. To reduce this field emission current,
"high-potting" should be performed. "High-potting" is the term used to
describe the application of higher than normal operating voltage
(8 kV AC, max. 50 mA) for the purpose of burning off "whiskers"
(sharp edges) on the pump cathode.
High-potting should be done under vacuum and preferably without
pump magnets installed (to reduce the drawn current).
High-potting must be done carefully and in voltage steps since
uncontrolled arcing inside the pump can cause permanent damage.
Therefore slowly increase the applied voltage and watch the current
meter for indication of arcing inside the pump as whiskers are
burned away. If arcing occurs wait at this voltage until the current is
stable again. Then slowly increase voltage again in steps up to a
maximum voltage. The maximum voltage may be applied to the pump
for a period of about 15 seconds. This should effectively remove any
"whiskers" or sharp edges on the pump cathode.
WARNING!
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 89/98
Voltages developed in the High Potter power supply are potentially lethal. Use
caution during operation and ensure correct grounding connection.
5 Technical Information
Pump Troubleshooting
Tab. 2
Pump Troubleshooting
Symptom Possible cause Correction procedure
1) – Slow starting Starting vacuum pressure too high. Reduce pressure to
2) – Slow starting (more than 30
minutes).
Air leaks which limit pressure to
-6
above 10
mbar and cause longer
starting time.
3) – Slow pump-down due to long
exposure of viton parts to air.
Viton releases considerable gas
after long exposure to air.
(A bell-jar system which reached
-8
mbar in 24 hours after 30
2 x 10
minutes air exposure, will only
-7
reach 1 x 10
mbar in 24 hours
after 20 hours air exposure).
4) – Slow pump-down due to
absorption of vapours on pump and
system walls.
Vapours and gases admitted to a
system are absorbed on the walls
of the system and pump.
Subsequent reduction in pressure
depends on the rate of depletion of
this vapour. Heavy hydrocarbons
are most troublesome because of
their relative low vapour pressure
and they are very difficult to
remove, even by baking.
5) – Slow starting or slow pumpdown.
6) – Current higher than expected
at any given pressure.
High voltage feedthrough is
leaking.
Ion pump leakage current causing
higher pressure reading.
-5
mbar recommended
10
-4
mbar minimum.
10
Leak check the vacuum
system with a helium leak
detector.
With the system under
vacuum, pump for several
days, or heat to 100-150 °C
for up to 15 hours.
Bake the system walls,
thereby accelerating the
desorption process. Baking
mobilizes the vapours so
they can be cracked and
pumped by discharge (see
section “BAKEOUT
OPERATION”).
Replace the feedthrough.
Highpot the pump.
90/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
Technical Information
Vaclon Plus Pump Replacement Parts and Accessories
5
Tab. 3
Symptom Possible cause Correction procedure
7) – System fails to achieve desired
UHV vacuum pressure.
8) – System fails to achieve desired
UHV vacuum pressure.
System not fully baked. Water
vapor limits base pressure.
System not appropriately cleaned
for UHV. Excessive outgassing from
walls limits base pressure.
Bake the system walls,
thereby accelerating the
desorption process. Baking
mobilizes the vapours so
they can be cracked and
pumped by discharge (see
section “BAKEOUT
OPERATION”).
Clean all components for
UHV and bake the system
again.
Vaclon Plus Pump Replacement Parts and Accessories
Part Number
Diode Noble Diode Starcell
Basic pump 919-1610 919-1620 919-1640
Pump with options
With heaters installed
(120 V)
(220 V)
Double-ended 919-1650 919-1660 919-1680
Double-ended with
heaters (120 V)
installed (220 V)
HV rad. Resist. cable,
with interlock
919-1611
919-1612
919-1651
919-1652
Cables and accessories
929-0705
919-1621
919-1622
919-1661
919-1662
919-1641
919-1642
919-1681
919-1682
VacIon Plus 300 pumps User Manual / 87-900-103-01 (H) 91/98
5 Technical Information
Vaclon Plus Pump Controllers
HV Feedthrough 959-5125
Pumping elements
(q.ty 4 needed)
Heaters (power: 480 W)
(120V)
(220V)
Copper gasket for 6” inlet
flange (10-pack,
individually sealed)
Nut and bolt set for 6”
inlet flange
Copper gasket for 1 1/3"
CF feedthrough flange
(10-pack, individually
sealed)
Nut and bolt set for 1
1/3" CF feedthrough
flange, 8-32x3/4 (25pack)
Replacement parts
919-9040 919-9045 919-9030
919-0075
919-0074
FG-0600-CI
FB-0450-C12
FG-0133-CI
FB-0133-C
Vaclon Plus Pump Controllers
92/98 VacIon Plus 300 pumps User Manual / 87-900-103-01 (H)
For a complete overview of Agilent's extensive vacuum product line,
please refer to the Agilent Vacuum Catalogue.
Please refer to the Agilent Vacuum Catalogue to choose the correct
controller for each pump.
12/13
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