Introduction
The Agilent B1500A Semiconductor
Device Analyzer, with EasyEXPERT
software, makes every user a para-
metric test expert. The MS Windows-
based EasyEXPERT interface is
familiar, even to new engineers who
are inexperienced with parametric
measurement instruments. Its unique
task- based approach enables the user
to focus on their real task- at-hand
(device characterization), without
having to become a specialist at using
the instrument hardware. This new
approach is enhanced via a touch
screen interface, which makes the
instrument as easy to use when
racked as when on a benchtop.
The modular 10- slot configuration
helps reduce the cost of test by
ensuring that you purchase only what
you need up- front, leaving room to
grow as your needs change. This
flexibility is advantageous for those
needing capacitance measurement, as
this function is available via a
single- slot capacitance measurement
unit (CMU). An innovative SMU CMU
unify unit (SCUU) is available to
eliminate cabling confusion when
connecting the SMUs and CMU to
your positioner- based wafer probing
environment. This greatly improves
efficiency and accuracy by resolving
cable swapping and measurement
compensation issues.
Agilent B1500A
Semiconductor Device Analyzer
Technical Overview
April 2006
Agilent B1500A Semiconductor Device Analyzer
The B1500A also possesses impresssive measurement performance, with
available low- current measurement
of 0.1 femtoamp and low-voltage
measurement resolution of 0.5
microvolts.
Basic Features
Y EasyEXPERT software resident on
instrument
Y Performs IV and CV measurements
Y Ten module slots
Y Multiple SMU types available:
MPSMU, HPSMU, and HRSMU
Y Multi-frequency capacitance
measurement unit (1 kHz to
5 MHz) available
Y High- resolution, analog- to- digital
converter (ADC) available to all
installed modules
Y High- speed ADC present on each
installed SMU
Y 4.2-Amp ground unit
Y SMU/AUX path switching available
on the Atto Sense and Switch Unit
(ASU)
Y Supported CMU accessories
include SMU CMU unify unit
(SCUU) and guard switch unit
(GSWU)
Y Automatic identification of
capacitance measurement
accessories (MFCMU)
Y GPIB port for instrument control
Y Self- test, self- calibration,
diagnostics
Specification Conditions
The measurement and output
accuracies are specified under the
following conditions. And the SMU
measurement and output accuracies
are specified at the SMU connector
terminals when referenced to the
Zero Check terminal:
Temperature: 23°C ± 5°C
1.
2. Humidity: 20% to 60%
3. After 40 minutes warm- up
Ambient temperature change less
4.
than ±1°C after self- calibration
execution, not applicable for
MFCMU
Measurement made within one
5.
hour after self-calibration
execution, not applicable for
MFCMU
6. Calibration period: 1 year
SMU integration time setting
7.
(high- resolution ADC must be
used):
1 PLC (1 nA to 1A range, voltage
range)
20 PLC (100 pA range)
50 PLC (1 pA to 10 pA range)
SMU Filter: ON (for SMUs)
8.
SMU measurement terminal
9.
connection: Kelvin connection
Note: This document lists specifications
and supplemental information for the
B1500A and its associated modules. The
specifications are the standards against
which the B1500A and its associated
modules are tested. When the B1500A or
any of its associated modules are shipped
from the factory, they meet the
specifications. The “supplemental”
information and “typical” entries in the
following specifications are not warranted,
but provide useful information about the
functions and performance of the
instrument.
Note: When you install or exchange
modules into the B1500A mainframes,
Agilent can guarantee that the modules
will function and that the module
performance is designed to meet its
specifications. However, if you require
that the modules be guaranteed to their
specifications, then you must perform a
calibration on the instrument.
B1500A Specification
Supported Plug-In Modules
The B1500A supports ten slots for plug-in modules.
Part Number Description
B1510A
B1511A
B1517A
High Power Source/Monitor Unit
(HPSMU)
Medium Power Source/Monitor Unit
(MPSMU)
High Resolution Source/Monitor Unit
(HRSMU)
Slots
Occupied
Range of Operation
2 -200 V to 200 V, -1 A to 1 A
1 -100 V to 100 V, -100 mA to 100 mA
1 -100 V to 100 V, -100 mA to 100 mA
E5288A1 Atto Sense and Switch Unit (ASU) - -100 V to 100 V, -100 mA to 100 mA
B1520A
1. This is connected with the B1517A high resolution SMU.
2.
Dispersion of measurement values when connecting a DUT 10 pF to the measurement terminals under the measurement condition of frequency 1 MHz, signal
level 250 mVac, and measurement time 1 PLC. The display resolution is 0.000001 fF at 1 fF order by 6 digits display.
Maximum Output Power
The total power consumption of all
modules cannot exceed 82 W. Under
this rule, the B1500A can contain up
to 4 dual- slot SMUs (HPSMUs) and 2
single- slot SMUs (MPSMUs and/or
HRSMUs); it can contain up to 10
single- slot SMUs (MPSMUs and/or
HRSMUs); and it can contain any
combination of dual- slot and
single-slot SMUs between these two
extremes. One single- slot MFCMU
may take the place of a single- slot
SMU in any of these configurations.
Maximum Voltage between Common
and Ground
Multi Frequency Capacitance
Measurement Unit (MFCMU)
1 1 kHz to 5 MHz 0.035 fFrms2
Pulse Measurement
Pulse width: 500 3sec to 2 s
Pulse period: 5 ms to 5 s
Period ¡ Width + 2 ms
(when Width ~ 100 ms)
Period ¡ Width + 10 ms
(when Width > 100 ms)
Pulse resolution: 100 3s
Ground Unit (GNDU) Specification
The GNDU is furnished with the
B1500A mainframe.
Output Voltage: 0 V ± 100 3V
Maximum sink current: ± 4.2 A
Output terminal/connection:
Triaxial connector, Kelvin (remote
sensing)
GNDU Supplemental Information
Load capacitance:
Cable resistance: innocent
For IS ~1.6 A:
Force Line R <1 W
For 1.6 A < I
Force Line R <0.7 W
For 2.0 A < I
Force Line R <0.35 W
For all cases:
Sense Line R ~10 W
Where I
the GNDU.
is the current being sunk by
S
~ ± 42 V.
Measure
Resolution
2 3V, 10 fA
0.5 3V, 10 fA
0.5 3V, 1 fA
0.5 3V, 100 aA
1 3F
~2.0 A:
S
~4.2 A:
S
2
MPSMU and HRSMU Module Specifications
Voltage Range, Resolution, and Accuracy (High Resolution ADC)
Voltage
Range
±0.5 V
±2 V
±5 V
±20 V 1 mV
±40 V 2 mV
±100 V 5 mV
1. ±(% of output/measured value + offset voltage V)
2. 100 mA (Vo ~ 20 V), 50 mA (20 V < Vo ~ 40 V), 20 mA (40 V < Vo ~ 100 V), Vo is the output voltage in Volts.
Force
Resolution
Measure
Resolution
Force Accuracy
1
Measure Accuracy1
25 3V 0.5 3V ±(0.018 % + 150 3V) ±(0.01 % + 120 3V)
100 3V 2 3V ±(0.018 % + 400 3V) ±(0.01 % + 140 3V)
250 3V 5 3V ±(0.018 % + 750 3V) ±(0.009 % + 250 3V)
20 3V
40 3V
100 3V
±(0.018 % + 3 mV)
±(0.018 % + 6 mV) ±(0.01 % + 1 mV)
±(0.018 % + 15 mV) ±(0.012 % + 2.5 mV)
±(0.009 % + 900 3V)
Maximum
Current
100 mA
100 mA
100 mA
100 mA
2
Current Range, Resolution, and Accuracy (High Resolution ADC)
SMU Type
Current
Range
HRSMU w/ ASU ±1 pA 1 fA 100 aA ±(0.9 %+15 fA) ±(0.9 %+12 fA) 100 V
±10 pA 5 fA 400 aA (with ASU)
±100 pA 5 fA 500 aA (with ASU)
±1 nA 50 fA 10 fA ±(0.1 %+300 fA+1 fA x Vo) ±(0.1 %+200 fA+1 fA x Vo) 100 V
±10 nA 500 fA 10 fA ±(0.1 %+3 pA+10 fA x Vo) ±(0.1 %+1 pA+10 fA x Vo) 100 V
±100 nA 5 pA 100 fA ±(0.05 %+30 pA+100 fA x Vo) ±(0.05 %+20 pA+100 fA x Vo) 100 V
±1 3A
MPSMU
±10 3A
±100 3A
±1 mA 50 nA 1 nA ±(0.04 %+150 nA+1 nA x Vo) ±(0.03 %+60 nA+1 nA x Vo) 100 V
±10 mA 500 nA 10 nA
±100 mA
1. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.
2. Measurements at lower range are affected strongly by vibrations and shocks. Do not place the environment of vibrations and shocks during measurements.
3. ±(% of output/measured value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo)
4. 100 V (Io ~ 20 mA), 40 V (20 mA < Io ~ 50 mA), 20 V (50 mA < Io ~ 100 mA), Io is the output current in Amps.
Force
Resolution
Measure
Resolution
1, 2
Force Accuracy3 Measure Accuracy3
Maximum
Voltage
±(0.46 %+30 fA+10 aA x Vo) ±(0.46 %+15 fA+10 aA x Vo) 100 V HRSMU
1 fA (HRSMU)
±(0.3 %+100 fA+100 aA x Vo) ±(0.3 %+30 fA+100 aA x Vo) 100 V
2 fA (HRSMU)
50 pA 1 pA ±(0.05 %+300 pA+1 pA x Vo) ±(0.05 %+100 pA+1 pA x Vo) 100 V
500 pA 10 pA ±(0.05 %+3 nA+10 pA x Vo) ±(0.04 %+2 nA+10 pA x Vo) 100 V
5 nA 100 pA ±(0.035 %+15 nA+100 pA x Vo) ±(0.03 %+3 nA+100 pA x Vo) 100 V
5 3A
100 nA
±(0.04 %+1.5 3A+10 nA x Vo)
±(0.045 %+15 3A+100 nA x Vo) ±(0.04 %+6 3A+100 nA x Vo)
±(0.03 %+200 nA+10 nA x Vo) 100 V
Current (mA)
4
Power Consumption
Voltage source mode:
Voltage Range Power
0.5 V 20 x Ic (W)
2 V 20 x Ic (W)
5 V 20 x Ic (W)
20 V 20 x Ic (W)
40 V 40 x Ic (W)
100 V 100 x Ic (W)
Where Ic is the current compliance setting.
100
50
20
-20
-50
20
40
-100
-20-40
100
Voltage (V)
Current source mode:
Voltage Compliance Power
Vc ~ 20
20 < Vc ~ 40
40 < Vc ~ 100
Where Vc is the voltage compliance setting and Io is output current.
20 x Io (W)
40 x Io (W)
100 x Io (W)
MPSMU and HRSMU
Measurement and Output Range
-100
3
HPSMU Module Specifications
Voltage Range, Resolution, and Accuracy (High Resolution ADC)
Voltage
Range
±2 V
±20 V 1 mV
±40 V 2 mV
±100 V 5 mV
±200 V 10 mV
1. ±(% of output/measured value + offset voltage V)
Current Range, Resolution, and Accuracy (High Resolution ADC)
Current
Range
±1 nA 50 fA 10 fA ±(0.1 %+300 fA+1 fA x Vo) ±(0.1 %+300 fA+1 fA x Vo) 200 V
±10 nA 500 fA 10 fA ±(0.1 %+3 pA+10 fA x Vo) ±(0.1 %+2.5 pA+10 fA x Vo) 200 V
±100 nA 5 pA 100 fA ±(0.05 %+30 pA+100 fA x Vo) ±(0.05 %+25 pA+100 fA x Vo) 200 V
±1 3A
±10 3A
±100 3A
±1 mA 50 nA 1 nA ±(0.04 %+150 nA+1 nA x Vo) ±(0.03 %+60 nA+1 nA x Vo) 200 V
±10 mA 500 nA 10 nA
±100 mA
±1 A
1. Specified measurement resolution is limited by fundamental noise limits.
2. ±(% of output/measured value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo)
3. 200 V (Io ~ 50 mA), 100 V (50 mA < Io ~ 125 mA), 40 V (125 mA < Io ~ 500 mA), 20 V (500 mA < Io ~ 1 A), Io is th e output current in Amps.
Power Consumption
Voltage source mode:
Voltage Range Power
Where Ic is the current compliance setting.
Current source mode:
Voltage Compliance Power
Vc ~ 20
20 < Vc ~ 40
40 < Vc ~ 100
100 < Vc ~ 200
Where Vc is the voltage compliance setting and Io is output current.
Force
Resolution
Measure
Resolution
Force Accuracy1 Measure Accuracy1
100 3V 2 3V ±(0.018 % + 400 3V) ±(0.01 % + 140 3V)
Force
Resolution
20 3V
40 3V
100 3V
200 3V
Measure
Resolution1
±(0.018 % + 3 mV)
±(0.018 % + 6 mV) ±(0.01 % + 1 mV) 500 mA
±(0.018 % + 15 mV) ±(0.012 % + 2.5 mV) 125 mA
±(0.018 % + 30 mV) ±(0.014 % + 2.8 mV) 50 mA
Force Accuracy2 Measure Accuracy2
±(0.009 % + 900 3V)
50 pA 1 pA ±(0.05 %+300 pA+1 pA x Vo) ±(0.05 %+100 pA+1 pA x Vo) 200 V
500 pA 10 pA ±(0.05 %+3 nA+10 pA x Vo) ±(0.04 %+2 nA+10 pA x Vo) 200 V
5 nA 100 pA ±(0.035 %+15 nA+100 pA x Vo) ±(0.03 %+3 nA+100 pA x Vo) 200 V
5 3A
100 nA
±(0.04 %+1.5 3A+10 nA x Vo)
±(0.045 %+15 3A+100 nA x Vo) ±(0.04 %+6 3A+100 nA x Vo)
±(0.03 %+200 nA+10 nA x Vo) 200 V
50 3A 1 3A ±(0.4 %+300 3A+1 3A x Vo) ±(0.4 %+150 3A+1 3A x Vo)
Current (mA)
1000
2 V 20 x Ic (W)
20 V 20 x Ic (W)
40 V 40 x Ic (W)
100 V 100 x Ic (W)
500
200 V 200 x Ic (W)
125
50
-50
20 x Io (W)
-200
-100
-40 -20
40 x Io (W)
100 x Io (W)
-125
200 x Io (W)
-500
40
20
Maximum
Current
1 A
1 A
Maximum
Voltage
100
3
200
Volt age ( V)
HPSMU Measurement
and Output Range
-1000
4
Output terminal/connection:
Dual triaxial connector, Kelvin
(remote sensing)
Voltage/Current Compliance(Limiting)
The SMU can limit output voltage or
current to prevent damaging the
device under test.
Voltage:
0 V to ±100 V (MPSMU, HRSMU)
0 V to ±200 V (HPSMU)
Current:
±10 fA to ±100 mA (HRSMU with
ASU)
±100 fA to ±100 mA (HRSMU)
±1 pA to ±100 mA (MPSMU)
±1 pA to ±1 A (HPSMU)
Compliance Accuracy:
Same as the current or voltage set
accuracy.
About Measurement Accuracy:
RF electromagnetic field and SMU
measurement accuracy:
Voltage and Current measurement
accuracy of SMUs may be affected by RF
electromagnetic field of strength over 3
V/m at frequencies from 80 MHz to 1 GHz.
The frequency and degree of affection may
vary with the installation condition of the
instrument.
Conducted RF field noise and SMU
measurement accuracy:
Voltage and Current measurement
accuracy of SMUs may be affected by
conducted RF field noise of strength over
3Vrms at frequencies from 150 kHz to 80
MHz. The frequency and degree of affection
may vary with the installation condition of
the instrument.
Supplemental Information
Maximum allowable cable resistance
(Kelvin connection):
Sense: 10 W
Force: 10 W (
1.5 W (>100 mA)
Voltage source output resistance:
(Force line, Non- Kelvin connection)
0.2 W (HPSMU)
0.3 W (MPSMU, HRSMU)
Voltage measurement input
resistance:
¡ 1013 W
Current source output resistance:
¡ 1013 W
Current compliance setting accuracy
(for opposite polarity):
For 1 pA to 10 nA ranges:
V/I setting accuracy ±12% of range
For 100 nA to 1 A ranges:
V/I setting accuracy ±2.5% of range
Maximum capacitive load:
1 pA to 10 nA ranges: 1000 pF
100 nA to 10 mA ranges: 10 nF
100 mA and 1 A ranges: 100 3F
Maximum guard capacitance:
900 pF (HPSMU, MPSMU, HRSMU)
660 pF (HRSMU with ASU)
Voltage Range, Resolution, and Accuracy (High Speed ADC)
Voltage
Range
±0.5 V3
±2 V
±5 V3
±20 V 1 mV ±(0.01 % + 4 mV)
±40 V 2 mV ±(0.015 % + 8 mV)
±100 V 5 mV ±(0.02 % + 20 mV)
±200 V4 10 mV ±(0.035 % + 40 mV)
1. ±(% of output/measured value + offset voltage V)
2. Averaging is 128 samples in 1 PLC
3. Only for MPSMU and HRSMU.
4. Only for HPSMU.
Measure
Resolution
Measure Accuracy
25 3V ±(0.01 % + 250 3V)
100 3V ±(0.01 % + 700 3V)
250 3V
±(0.01 % + 2 mV)
1, 2
Maximum shield capacitance:
5000 pF (HPSMU, MPSMU, HRSMU)
3500 pF (HRSMU with ASU)
Maximum guard offset voltage:
±1 mV (HPSMU)
±3 mV (MPSMU, HRSMU)
±4.2 mV (HRSMU with ASU,
~100 3A)
~ 100 mA),
Iout
Noise characteristics (filter ON):
Voltage source:
0.01% of V range (rms.)
Current source:
0.1% of I range (rms.)
Overshoot (typical, filter ON):
Voltage source: 0.03% of V range
Current source: 1% of I range
Range switching transient noise (filter
ON):
Voltage ranging: 250 mV
Current ranging: 70 mV
Slew rate: 0.2 V/3s
SMU pulse setting accuracy (fixed
measurement range):
Width: 0.5 % + 50 3s
Period: 0.5 % + 100 3s
Trigger out delay (pulsed
measurements):
0 to 32.7 ms with 100 3s resolution
(<pulse width)
Current Range, Resolution, and Accuracy (High Speed ADC)
Current
Range
±1 pA4 100 aA ±(1.8 %+12 fA)
±10 pA5 1 fA ±(0.5 %+15 fA+10 aA x Vo)
±100 pA5 5 fA ±(0.3 %+30 fA+100 aA x Vo)
±1 nA 50 fA ±(0.1 %+300 fA+1 fA x Vo)
±10 nA 500 fA ±(0.1 %+2 pA+10 fA x Vo)
±100 nA 5 pA ±(0.05 %+20 pA+100 fA x Vo)
±1 3A
±10 3A
±100 3A
±1 mA 50 nA ±(0.03 %+200 nA+1 nA x Vo)
±10 mA 500 nA
±100 mA
±1 A6
1. Specified measurement resolution is limited by fundamental noise limits. Minimum
displayed resolution is 1 aA at 1 pA range by 6 digits.
2.
Measurements at lower range are affected strongly by vibrations and shocks. Do not
place the instrument in the environment of vibrations and shocks during
measurements.
±(% of output/measur ed value + offset current (fixed part determined by the
3.
output/measurement range + proportional part that is multiplied by Vo)
1 pA range is for HRSMU with ASU.
4.
5.
10 pA range and 100 pA range is for HRSMU with or without ASU.
Only for HPSMU.
6.
Measure
Resolution
1, 2
50 pA ±(0.05 %+200 pA+1 pA x Vo)
500 pA ±(0.04 %+2 nA+10 pA x Vo)
5 nA ±(0.03 %+20 nA+100 pA x Vo)
5 3A ±(0.04 %+20 3A+100 nA x Vo)
50 3A ±(0.4 %+300 3A+1 3A x Vo)
Measure Accuracy3
±(0.03 %+2 3A+10 nA x Vo)
5
MFCMU (Multi Frequency Capacitance Measurement Unit) Module Specifications
Measurement Functions
Measurement parameters:
Cp-G, Cp-D, Cp-Q, Cp-Rs, Cs-Rs,
Cs-D, Cs-Q, Lp-G, Lp-D, Lp-Q,
Lp- Rs, Ls- Rs, Ls- D, Ls- Q, R- X, G- B,
Z- q, Y- q
Ranging:
Auto and fixed
Measurement terminal:
Four- terminal pair configuration,
four BNC (female) connectors
Cable length:
1.5 m or 3 m, automatic
identification of accessories
Test Signal
Frequency:
Range: 1 kHz to 5 MHz
Minimum resolution: 1 mHz
Accuracy: ±0.008 %
Signal output level:
Range: 10 mVrms to 250 mVrms
Resolution: 1 mVrms
Accuracy:
±(10.0 % + 1 mVrms)
at four- terminal pair port of
MFCMU
±(15.0 % + 1 mVrms)
at measurement port of
MFCMU cable (1.5 m or 3.0 m)
Output impedance: 50 W, typical
Signal level monitor:
Voltage range: Same as the voltage
signal level setting range
Voltage monitor accuracy (open
load):
±(10.0 % of reading + 1 mVrms)
at four- terminal pair port of
MFCMU
±(15.0 % of reading + 1 mVrms)
at measurement port of
MFCMU cable (1.5 m or 3 m)
DC Bias Function
DC voltage bias:
Range:
0 to ±25 V
Resolution:
1 mV
Accuracy:
±(0.5 % + 5.0 mV)
at the High and Low terminals
of the MFCMU measurement
port or the MFCMU 1.5 m/3 m
cable end
Maximum DC bias current
(supplemental information):
Impedance
measurement range
50 W
100 W
300 W
1 kW
3 kW
10 kW
30 kW
100 kW
300 kW
Maximum
DC bias current
10 mA
10 mA
10 mA
1 mA
1 mA
100 3A
100 3A
10 3A
10 3A
Output impedance: 50 W, typical
DC bias monitor:
Range: Same as the dc voltage bias
setting range
Accuracy (open load):
±(0.2 % of reading + 10.0 mV)
at the High and Low terminals
of the MFCMU measurement
port or the MFCMU 1.5 m/3 m
cable end
Sweep Characteristics
Available sweep parameters:
Oscillator level, DC bias voltage,
frequency (list sweep only)
Sweep type: Linear, Log
Sweep mode: Single, Double
Sweep direction: Up, Down
Number of measurement points:
Maximum 1001 points
Measurement Accuracy
The following parameters are used to
express the impedance measurement
accuracy at four- terminal pair port of
MFCMU and measurement port of
MFCMU cable.
: Impedance measurement value (W)
Z
X
DX: Measurement value of D
’ + (ZS’/|ZX| + YO'’|ZX|) x 100 (%)
E = E
P
EP’ = EPL + E
’ = YOL + Y
Y
O
ZS’ = ZSL + Z
+ EP (%)
POSC
+ YO (S)
OSC
+ ZS (W)
OSC
|Z| accuracy
±E (%)
q accuracy
±E/100 (rad)
C accuracy
at DX ~ 0.1
±E (%)
> 0.1
at D
X
±E x `b(1 + D
2
) (%)
X
D accuracy
~ 0.1
at D
X
±E/100
at 0.1 < D
~ 1
X
±E x (1 + DX)/100
G accuracy
~ 0.1
at D
X
±E/ D
(%)
at DX > 0.1
X
±E x `b(1 + D
2
)/DX (%)
X
Note: measurement accuracy is
specified under the following
conditions:
Temperature: 23°C ± 5°C
Integration time: 1 PLC or 16 PLC
6
Parameters E
Oscillator level E
125 mV < V
64 mV < V
32 mV < V
V
OSC
V
is oscillator level in mV.
OSC
POSC
~ 250 mV
OSC
~ 125 mV
OSC
~ 64 mV
OSC
~ 32 mV
, Z
OSC
,
(%)
POSC
0.03 x (250/ V
0.03 x (125/ V
0.03 x (64/ V
0.03 x (32/ V
- 1) 5 x (250/V
OSC
- 1) 5 x (125/V
OSC
- 1) 5 x (64/V
OSC
- 1) 5 x (64/V
OSC
Z
OSC
(mW)
OSC
OSC
OSC
OSC
- 1)
- 1)
- 1)
- 1)
Parameters E
Cable Length EPL (%) YOL (nS)
f is frequency in MHz. If measurement cable is extended, open compensation, short compensation, and load compensation must be performed.
, YOL, ZSL,
PL
ZSL (mW)
1.5 m 0.02 + 3 x f/100 750 x f/100 5.0
3 m 0.02 + 5 x f/100 1500 x f/100 5.0
Parameters Y
Frequency Y
1 kHz ~ f ~ 200 kHz
200 kHz < f ~ 1 MHz
1 MHz < f ~ 2 MHz
f is frequency in Hz.
V
2 MHz < f 20 x (125/ V
is oscillator level in mV.
OSC
, YO, EP, ZS,
OSC
(nS) YO (nS) EP (%)
OSC
1 x (125/ V
2 x (125/ V
2 x (125/ V
– 0.5) 1.5 0.095 5.0
OSC
– 0.5) 3.0 0.095 5.0
OSC
– 0.5) 3.0 0.28 5.0
OSC
– 0.5) 30.0 0.28 5.0
OSC
ZS (mW)
Example of Calculated C/G Measurement Accuracy
Frequency Measured Capacitance C Accuracy1 Measured Conductance G Accuracy1
5 MHz
1 MHz
100 kHz
10 kHz
1 kHz
1 pF ± 0.61 %
10 pF ± 0.32 %
100 pF ± 0.29 % 3 mS
1 nF ± 0.32 % 31 mS
1 pF ± 0.20 %
10 pF ± 0.11 %
100 pF ± 0.10 %
1 nF ± 0.10 % 6 mS
10 pF ± 0.18 % 628 nS ± 11 nS
100 pF ± 0.11 %
1 nF ± 0.10 %
10 nF ± 0.10 %
100 pF ± 0.18 % 628 nS ± 11 nS
1 nF ± 0.11 %
10 nF ± 0.10 %
100 nF ± 0.10 %
100 pF ± 0.92 % 63 nS ± 6 nS
31 3S
314 3S
± 192 nS
± 990 nS
± 9 3S
± 99 3S
6 3S
63 3S
628 3S
± 13 nS
± 68 nS
± 620 nS
± 7 3S
6 3S
63 3S
± 66 nS
± 619 nS
628 3S ± 7 3S
6 3S
63 3S
± 66 nS
± 619 nS
628 3S ± 7 3S
1 nF ± 0.18 % 628 nS ± 11 nS
10 nF ± 0.11 %
100 nF ± 0.10 %
1. The capacitance and conductance measurement accuracy is specified under the following conditions:
D
~ 0.1
X
Integration time: 1 PLC
Test signal level: 30 mVrms
At four-terminal pair port of MFCMU
6 3S
63 3S
± 66 nS
± 619 nS
7
Atto Sense and Switch Unit
(ASU) Specifications
AUX Path Specification
Maximum Voltage
100 V (AUX input to AUX common)
100 V (AUX input to circuit
common)
42 V (AUX common to circuit
common)
Maximum Current
0.5 A (AUX input to Force output)
ASU Supplemental Information
Band width (at - 3 dB)
< 30 MHz (AUX port)
SMU CMU Unify Unit (SCUU)
and Guard Switch Unit (GSWU)
Specifications
The SCUU switches either two SMUs
or CMU to the output port. The
MPSMU and HRSMU are supported as
a module. The SCUU has dc bias
adapter function by the SMU as dc
bias source. Also error compensation
function is supported. To connect the
SCUU, the dedicated cable assembly is
supplied. It can help to connect
correctly and easily, and it eliminates
cabling mistake.
The GSWU switches open when using
SMUs and close when using CMU for
the guard return path automatically
depending on which the SCUU output
is used for the capacitance
measurement or not.
Supported SMU
MPSMU and HRSMU
For SCUU
Inputs:
Four triaxial ports: for Force1,
Sense1, Force2, and Sense2
Four BNC ports: for MFCMU
One SCUU control port
Outputs:
Four triaxial ports: for
Force1/CMUH, Sense1,
Force2/CMUL, and Sense2
One GSWU control port
Three LEDs, SMU/CMU
output status indicator
Docking Mode
Direct and indirect mode
For GSWU
Input:
One control port from SCUU
Mini pin plug port: 2 ports (to
Guard1, to Guard2
Output:
One LED, connection status
indicator
SCUU Supplemental Information
SMU Path:
Offset current: < 20 fA
Offset voltage: < 100 3V at 300 sec
Closed channel residual resistance:
< 200 mW
Channel isolation resistance:
> 1015 W
CMU Path:
Test Signal
Signal output level additional errors
(CMU bias, open load):
±2 % (direct docking)
±7 % (indirect docking)
Signal output level additional errors
(SMU bias, open load):
±5 % (direct docking, ¡ 10 kHz)
±10 % (indirect docking, ¡ 10 kHz)
Output impedance: 50 W, typical
Signal level monitor additional errors
(open load):
±2 % (CMU bias), direct docking
±5 % (SMU bias), direct docking
±7 % (CMU bias), indirect docking
±10 % (SMU bias), indirect docking
DC Bias Function
DC voltage bias (CMU bias):
Range:
0 to ±25 V
Resolution:
1 mV
Additional errors (for CMU bias):
±100 3V (open load)
DC voltage bias (SMU bias):
Range:
0 to ±100 V
Resolution:
5 mV
Additional errors (for SMU voltage
output accuracy):
±100 3V (open load)
DC bias monitor additional errors
(open load):
±20 mV, direct docking
±30 mV, indirect docking
Output impedance:
50 W, (typical)
DC output resistance: 50 W (CMU
bias), 130 W (SMU bias)
Measurement Accuracy
Impedance measurement error is
given by adding the following
additional error E
measurement error.
= ±(A + ZS/|ZX| + YO|ZX|) x 100 (%)
E
e
ZX: Impedance measurement value (W)
A:
0.05 % (direct docking) or
0.1 % (indirect docking)
ZS:
500 + 500 x f (mW)
YO:
1 + 1000 x f/100 (nS)
(direct docking, x2 for indirect
docking)
Note: f is frequency in MHz.
When the measurement terminals are
extended by using the measurement
cable, the measurement accuracy is
applied to the data measured after
performing the open/short/load
correction at the DUT side cable end.
Note: The error is specified under the
following conditions:
Temperature: 23°C ± 5°C
Integration time: 1 PLC or 16 PLC
Measurement additional errors:
to the MFCMU
e
8
Agilent EasyEXPERT Software
Functions
Operation mode:
Application test mode, Classic test
mode, Quick test mode
Key Functions:
Y Categorized and predefined
application library
Y Device definition
Y Measurement parameter settings
Y Save/Recall My Favorite Setups
Y Define/customize application
library
Y Execute measurement
(Single/Repeat/Append)
Y Quick test execution
Y Save/Recall measurement data and
settings
Y Test result data management
Y Import/Export device definition,
measurement settings, my favorite
setup, measurement data, and
application library
Y Graph plot
display/analysis/printing
Y Switching matrix control
Y Workspace management
Y Self- test, self calibration,
diagnostics
Application Library
Category:
Sample test definitions for the
following applications. They subject to
change without notice.
Structure, CMOS, Bipolar (BJT),
Memory, Mixed Signal Device, TFT,
Discrete, Reliability, Power Device,
Nanotechnology, Utility
Measurement Mode Details
The Agilent B1500A supports the
following measurement modes:
Y Staircase Sweep
Y Multi- Channel Sweep*
Y Pulsed Sweep
Y Staircase Sweep with Pulsed Bias
Y IV Sampling
Y High Speed IV Sampling
Y CV Sweep
Y Linear Search**
Y Binary Search**
* EasyEXPERT supports VAR1 and VAR1’.
**They are supported by FLEX command only.
Each SMU can sweep using VAR1
(primary sweep), VAR2 (secondary
sweep), or VAR1’ (synchronous
sweep).
VAR1
Primary sweep controls the staircase
(dc or pulsed) voltage or current
sweep.
VAR2
Subordinate linear staircase or linear
pulsed sweep. After primary sweep is
completed, the VAR2 unit output is
incremented.
Maximum number of steps: 128
VAR1’
Staircase or pulse sweep synchronized
with the VAR1 sweep. Sweep is made
with a user specified ratio and offset
value. VAR1’ output is calculated as
VAR1’ = a x VAR1 + b, where “a” is the
user specified ratio and “b” is the user
specified offset value.
CONST
A source unit can be set as a constant
voltage or current source depending
on the unit.
Staircase Sweep Measurement Mode:
Forces swept voltage or current, and
measures DC voltage or current. One
channel can sweep current or voltage
while up to ten channels can measure
current or voltage. A second channel
can be synchronized with the primary
sweep channel as an additional
voltage or current sweep source.
Number of Steps: 1 to 1001
Sweep type: linear or logarithmic
Sweep direction:
Single or double sweep
Hold Time:
0 to 655.35 s, 10 ms resolution
Delay Time:
0 to 65.5350 s, 100 3s resolution
Pulsed Sweep Measurement Mode:
Forces pulsed swept voltage or
current, and measures DC voltage or
current. A second channel can be
programmed to output a staircase
sweep voltage or current
synchronized with the pulsed sweep
output.
Staircase Sweep with Pulsed Bias
Measurement Mode:
Forces swept voltage or current, and
measures DC voltage or current. A
second channel can be programmed to
output a pulsed bias voltage or
current. A third channel can be
synchronized with the primary sweep
channel as an additional voltage or
current sweep source.
Sampling (Time Domain)
Measurement Mode
Displays the time sampled
voltage/current data (by SMU) versus
time.
Sampling channels: up to 10
Sampling points:
For linear sampling:
1 to 100,001/(number of channels)
For log sampling:
1 to 1+(
number of data for 11 decades)
Sampling mode: linear, log
Sampling interval range:
100 3s to 2 ms, 10 3s resolution
2 ms to 65.535 s, 1
ms resolution
For < 2 ms, the interval is
¡ 100 3s +20 3s x(num. of channels - 1)
Hold time, initial wait time:
- 90 ms to - 100 3s,
100 3s resolution
0 to 655.35 s, 10 ms resolution
Measurement time resolution:
100 3s
Search Measurement Mode:
Forces and measures voltage or
current by using linear search method
or binary search method.
Bias Hold Function
This function is used to keep source
output after measurement. Source
modules apply the specified bias
between measurements in a quick test
or application test that defines some
classic test setups, or a repeat
measurement. And the source
modules change the output value and
the unused modules are disconnected
when the next measurement is
started.
Current Offset Cancel
This function subtracts the offset
current from the current
measurement raw data, and returns
the result as the measurement data.
This function is used to compensate
the error factor (offset current)
caused by the measurement path such
as the measurement cables,
manipulators, or probe card.
Time Stamp
The B1500A supports a time stamp
function utilizing an internal quartz
clock.
Resolution: 100 3s
Other Measurement
Characteristics
Measurement Control:
Single, Repeat, Append, and Stop
9
SMU Setting Capabilities:
Limited auto ranging,
voltage/current compliance, power
compliance, automatic sweep abort
functions, self- test, and
self- calibration
Arithmetic and Analysis Functions
User Functions
Up to 20 user- defined functions can
be defined using arithmetic
expressions.
Measured data and pre- defined
variables can be used in the
computation. The results can be
displayed on the LCD.
Arithmetic Operators
+, - , *, /, ^, abs (absolute value), at
(arc tangent), avg (averaging), cond
(conditional evaluation), delta, diff
(differential), exp (exponent), integ
(integration), lgt (logarithm, base 10),
log (logarithm, base e), mavg (moving
average), max, min, sqrt,
trigonometric function, inverse
trigonometric function, and so on
Physical Constants
Keyboard constants are stored in
memory as follows:
q: Electron Charge,
1.602177 E-19 C
k: Boltzman’s Constant,
1.380658 E-23
e (e): Dielectric Constant of
Vacuum,
8.854188 E-12
Engineering Units
The following unit symbols are also
available on the keyboard:
-18
a (10
u or 3 (10-6), m (10-3),
3
k (10
), M (106), G (109), T (1012) ,
15
P (10
), f (10
)
-15
), p (10
-12
), n (10-9),
Analysis Capabilities
Overlay Graph Comparison
A graphics plot can be stored and
overlaid.
Scale
Auto scale and zoom
Marker
Marker to min/max, interpolation,
direct marker, and marker skip
Cursor
Direct cursor
Line
Two lines, normal mode, grad mode,
tangent mode, and regression mode
Automatic Analysis Function
On a graphics plot, the markers and
lines can be automatically located
using the auto analysis setup.
Parameters can be automatically
determined using automatic analysis,
user function, and read out functions.
Data Variable Display
Up to 20 user- defined parameters can
be displayed on the graphics screen.
Analysis Functions
Up to 20 user- defined analysis
functions can be defined using
arithmetic expressions.
Measured data, pre- defined variables,
and read out functions can be used in
the computation. The results can be
displayed on the LCD.
Read Out Functions
The read out functions are built-in
functions for reading various values
related to the marker, cursor, or line.
Graph Plot
Display Mode
Data display window can be printed.
Only X- Y graph can be printed.
Graph Plot File
Graph plot can be stored as image
data to clip board or mass storage
device.
File type: bmp, gif, png, emf
Output
Display Modes
X- Y graph, list display, and parameter
display
X-Y Graph Display
X- axis and up to eight Y-axis
Linear and log scale
Real time graph plotting
List Display
Measurement data and calculated user
function data are listed in conjunction
with VAR1 step number or time
domain sampling step number. Up to
20 data sets can be displayed.
Other Functions
Import/Export files.
File type:
Agilent EasyEXPERT format,
XML- SS format, CSV format
Data Storage
Hard disk drive
DVD- ROM/CD- R/CD- RW drive
Interfaces
GPIB port for instrument control
Interlock port
USB port (USB 2.0, front 2, rear 2)
LAN interface
100BASE-TX/10BASE-T
Trigger in/out
Generic purpose digital I/O
Trigger I/O
Only for GPIB remote mode.
Trigger in/out synchronization pulses
before and after setting and
measuring dc voltage and current.
Arbitrary trigger events can be
masked or activated independently.
Attached Software
Prober Control execution files
Desktop EasyEXPERT software (free
version)
4155/56 setup file converter tool
Supported operating systems:
Microsoft Windows 2000
Professional and XP Home or
Professional
A VXI plug&play driver for the
B1500A is supplied.
Supported operating systems:
Microsoft Windows 2000
Professional and XP Professional
10
General Specifications
Temperature Range
Operating: +5°C to +40°C
Storage: -20°C to +60°C
Humidity range
Operating: 20% to 70% RH,
non- condensing
Storage: 10% to 90% RH,
non- condensing
Altitude
Operating: 0 m to 2,000 m (6,561 ft)
Storage: 0 m to 4,600 m (15,092 ft)
Power requirement
ac Voltage: 90 V to 264 V
Line Frequency: 47 Hz to 63 Hz
Maximum Volt-Amps (VA)
B1500A: 900 VA
Regulatory Compliance
EMC:
IEC61326-1:+A1/EN61326- 1:+A1
AS/NZS 2064.1
Safety:
CSA C22.2 No.1010.1- 1992
IEC61010-1:+A2/EN61010- 1:+A2
UL3111- 1:1994
Certification
CE, CSA, NRTL/C, C- Tick
Dimensions
B1500A:
420 mm W x 330 mm H x 575 mm D
N1301A- 100 SMU CMU unify unit:
148 mm W x 75 mm H x 70 mm D
N1301A- 200 Guard switch unit:
33.2 mm W x 41.5 mm H x 32.8 mm D
Weight
B1500A (empty): 20 kg
B1510A: 2.0 kg
B1511A: 1.0 kg
B1517A: 1.2 kg
B1520A: 1.5 kg
E5288A: 0.5 kg
N1301A- 100: 0.8 kg
N1301A- 200: 0.1 kg
Furnished Accessories
Power cable
Manual CD-ROM
Desktop EasyEXPERT CD- ROM
Software CD-ROM (including
VXIplug&play driver and utility tools)
Order Information
Mainframe and Modules
B1500A
Semiconductor device analyzer
mainframe
Configure the following modules:
High power SMU (HPSMU)
Medium power SMU (MPSMU)
High resolution SMU (HRSMU)
Atto- sense switch unit (ASU)
Multi frequency CMU (MFCMU)
B1500A-050
50 Hz line frequency
B1500A-060
60 Hz line frequency
B1500A-UK6
Commercial calibration certificate
with test data
B1500A-ABA
English documentation
B1500A-ABJ
Japanese documentation
B1500 Accessories
16444A-001 Keyboard
16444A-002 Mouse
16444A-003 Stylus pen
N1253A- 100 Digital I/O cable
N1253A- 200 Digital I/O BNC box
N1254A- 100 GNDU to Kelvin adapter
N1254A- 108 ASU magnetic stand
SMU Cables
16494A-001 Triaxial cable (1.5 m)
16494A-002 Triaxial cable (3 m)
16493K- 001 Kelvin triax. cable (1.5 m)
16493K-002 Kelvin triax. cable (3 m)
B1500A CMU Accessories
N1300A- 001 CMU cable (1.5 m)
N1300A- 002 CMU cable (3 m)
N1301A- 100
SMU CMU unify unit (SCUU)
N1301A- 102
SMU CMU unify unit cable (3 m)
N1301A- 110
SMU CMU unify unit magnetic
stand
N1301A- 200
Guard switch unit (GSWU)
N1301A- 201
Guard switch unit cable (1 m)
N1301A- 202
Guard switch unit cable (3 m)
Other Accessories
16442A Test fixture
16493G Digital I/O cable
16493J-001 interlock cable (1.5 m)
16493J-002 interlock cable (3 m)
16493L- 001 GNDU cable (1.5 m)
16493L- 002 GNDU cable (3 m)
Additional Modules
B1510A
High power source/monitor unit
module
B1511A
Medium power source/monitor unit
module
B1517A
High resolution source/monitor unit
module
E5288A
Atto- sense and switch unit
B1520A
Multi frequency capacitance
measurement unit module
11
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Technical data subject to change without notice.
Microsoft and Windows are U.S. registered
trademarks of Microsoft Corporation.
EasyEXPERT is U.S. registered trademarks of
Agilent Technoglogies.
© Copyright 2005, 2006 Agilent Technologies
Printed in USA April 1, 2006
5989-2785EN
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