Agilent B1500A Users Guide

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Agilent B1500A

Semiconductor Device Analyzer

User’s Guide

Agilent Technologies

Page 2

Notices

No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws.

Manual Part Number

B1500-90004

Edition

Edition 1, July 2005 Edition 2, December 2005 Edition 3, April 2006 Edition 4, January 2007 Edition 5, June 2007

Agilent Technologies, Inc. 5301 Stevens Creek Blvd Santa Clara, CA 95051 USA

Warranty

The material contained in this document is provided “as is,” and is subject to being changed, without notice, in future editions. Further, to the maximum extent permitted by applicable law, Agilent disclaims all warranties, either express or implied, with regard to this manual and any information contained herein, including but not limited to the implied warranties of merchantability and fitness for a particular purpose. Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing, use, or performance of this document or of any information contained herein. Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms, the warranty terms in the separate agreement shall control.

Tec hn ol og y L i c e ns es

The hardware and/or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license.

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will receive no greater than Limited Rights as defined in FAR 52.227-14 (June 1987) or DFAR

252.227-7015 (b)(2) (November 1995), as applicable in any technical data.

Restricted Rights Legend

If software is for use in the performance of a U.S. Government prime contract or subcontract, Software is delivered and licensed as “Commercial computer software” as defined in DFAR 252.227-7014 (June 1995), or as a “commercial item” as defined in FAR

2.101(a) or as “Restricted computer software” as defined in FAR 52.227-19 (June

1987) or any equivalent agency regulation or contract clause. Use, duplication or disclosure of Software is subject to Agilent Technologies’ standard commercial license terms, and non-DOD Departments and Agencies of the U.S. Government will receive no greater than Restricted Rights as

Page 3

DECLARATION OF CONFORMITY

According to ISO/IEC Guide 22 and CEN/CENELEC EN 45014

Manufacturer’s Name:

Agilent Technologies International sarl

Manufacturer’s Address: Supplier’s Address:

Rue de la Gare 29 CH - 1110 Morges Switzerland

Declares under sole responsibility that the product as originally delivered Product Name:

Semiconductor Device Analyzer

High Power Source/Monitor Unit Mo du le Medium Power Source/Monitor Unit Module High Resolution Source/Monitor Unit Module Multi Frequency Capacitance Measurement Unit Module

Model Number:

Agilent B1500A

Agilent B1510A Agilent B1511A Agilent B1517A Agilent B1520A

Product Options:

This declaration covers all options of the above product(s)

complies with the essential requirements of the following applicable European Directives, and carries the CE marking accordingly:

Low Voltage Directive (73/23/EEC, amended by 93/68/EEC) EMC Directive (89/336/EEC, amended by 93/68/EEC)

and conforms with the following product standards EMC Standard

IEC 61326:2002 / EN 61326:02 CISPR 11:1999+A2 / EN 55011:1998+A1

IEC 61000-4-2:2001 / EN 61000-4-2:1995+A1+A2 IEC 61000-4-3:2002 / EN 61000-4-3:1996+A1+A2 IEC 61000-4-4:1995+A1+A2 / EN 61000-4-4:1995+A1 IEC 61000-4-5:2001 / EN 61000-4-5:1995+A1 IEC 61000-4-6:2001 / EN 61000-4-6:1996+A1 IEC 61000-4-11:2001 / EN 61000-4-11:1994+A1

Canada: ICES-001:1998 Australia/New Zealand: AS/NZS 2064.1

Limit

Group 1 Class A 4 kV CD, 8 kV AD 3 V/m, 80-1000 MHz

0.5 kV signal lines, 1 kV power lines

0.5 kV line-line, 1 kV line-ground 3 V, 0.15-80 MHz 1 cycle, 100%

The product was tested in a typical configuration with Agilent Technologies test systems.

Safety

IEC 61010-1:2001 / EN 61010-1:2001 Canada: CSA C22.2 No. 1010.1:1992, NRTL/C

Supplementary Information: This DoC applies to above-listed products placed on the EU market after:

Jun 14, 2005

Date

Toshiyuki Kawaji

QA Manager Agilent Technologies

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• Herstellerbescheinigung

GEÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T. 19

• M

anufacturer’s Declaration

ACO

USTIC NOISE EMISSION Lpa < 70dB operator position normal operation per ISO 7779

NOTE This ISM device complies with Canadian ICES-001.

Cet appareil ISM est conforme ?Hla norme NMB-001 du Canada.

This product complies with the WEEE Directive (2002/96/EC) marking requirements. The affixed label indicates that you must not discard this electrical/ electronic product in d

omestic household waste.

Product Category: With reference to the equipment types in the WEEE Directive Ann

ex I, this product is classed as a “Monitoring and Control instrumentation”

product.

Do not dispose in domestic household waste.

To return unwanted products, contact your local Agilent office, or see www

.agilent.com/environment/product/ for more information.

Microsoft and Windows are registered trademarks of Microsoft Corporation. All other trademarks are the property of their respective owners. EasyEXPERT is a trademark of Agilent Technologies.

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Safety Summary

The following general safety precautions must be observed during all phases of operation, service, and repair of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the equipment. In addition, it violates safety standards of design, manufacture, and intended use of the instrument. Agilent Technologies, Inc. assumes no liability for customer’s failure to comply with these requirements.

NOTE Agilent B1500 complies with INSTALLATION CATEGORY II for mains input and

INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2 defined in IEC 1010-1.

Agilent B1500 is an INDOOR USE product.

NOTE LED in Agilent B1500 is Class 1 in accordance with IEC 825-1. CLASS 1 LED PRODUCT.

• GROUND THE INSTRUMENT

his is Safety Class I instrument. To minimize shock hazard, the instrument chassis

and c

abinet must be connected to an electrical ground. The power terminal and the power cable must meet International Electrotechnical Commission (IEC) safety standards.

• DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE

o not operate the instrument in the presence of flammable gases or fumes.

D Ope

ration of any electrical instrument in such an environment constitutes a

definite safety hazard.

• KEEP AWAY FROM LIVE CIRCUITS

eration personnel must not remove instrument covers. Component replacement

Op and in

ternal adjustments must be made by qualified maintenance personnel. Do not replace components with power cable connected. Under certain conditions, dangerous voltages may exist even with the power cable removed. To avoid injuries, always disconnect power and discharge circuits before touching them.

• DO NOT SERVICE OR ADJUST ALONE

not attempt internal service or adjustment unless another person, capable of

Do ren

dering first aid and resuscitation, is present.

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• DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT

Because of the danger of introducing additional hazards, do not install substitute pa

rts or perform any unauthorized modification to the instrument. Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained.

• DANGEROUS PROCEDURE WARNINGS

arnings, such as example below, precede potentially dangerous procedures

W th

roughout this manual. Instructions contained in the warnings must be followed.

WARNING Dangerous Voltage, capable of causing death, are present in this instrument. Use

extreme caution when handling, testing, and adjusting.

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Safety Symbols

The general definitions of safety symbols used on equipment or in manuals are listed below.

Instruction manual symbol: the product will be ma



necessary for the user to refer to the instruction manual in order to protect against

mage to the instrument.

Indicates dangerous voltage and potential for electrical shock. Do not touch terminals that have this symbol when instrument is on.

Protective conductor terminal. For protection against electrical shock in case of a fault. Used with field wiring terminals to indicate the terminal which must be connected to

d before operating equipment.

groun

Frame or chassis terminal. A connection to the frame (chassis) of the equipment which normally includes all exposed metal structures.

Indicates earth (ground) terminal.

Alternating current.

Direct current.

STANDBY (Supply).

Means INSTALLATION CATEGORY I. Measurement terminals on the rear panel comply

&$7,

with INSTALLATION CATEGORY I.

WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice, condition

or the like, which, if not correctly performed or adhered to, could result in injury or death to personal.

rked with this symbol when it is

CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,

practice, condition or the like, which, if not correctly performed or adhered to, could result in damage to or destruction of part or all of the product.

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HIGH VOLTAGE SHOCK HAZARD

Agilent B1500 can force dangerous voltages (200 V for HPSMU, and 100 V for MPSMU/HR

SMU) at the force, guard, and sense terminals. To prevent electric shock hazard, the following safety precautions must be observed during the use of Agilent B1500.

• Use a three-conductor AC power cable to connect cab

inet (if used) and Agilent

B1500 to an electric ground (safety ground).

• If you do not use Agilent 16442 Test Fixture, make sure to connect the Interlock

termi

nal to a switch that turns off when the shielding box access door is opened.

• Confirm periodically that interlock function works normally.

• Before touching the connections of the force, guard, and sense terminals, turn

ilent B1500 off and discharge any capacitors whenever possible. If you do not turn Agilent B1500 off, complete “all” of the following items, regardless of any Agilent B1500 settings.

• T erminate measurem ent by pressing Stop k ey, confirm that the Measurement

s indicator is not lit.

statu

• Confirm that the

High Voltage indicator is not lit.

• Open the shielding box access door (open the Interlock terminal).

• Discharge any capacitors if the capacitance is connected to an SMU.

• Warn workers in the vicinity of Agilent B1500 about dangerous conditions.

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高電圧感電注意

Agilent B1500のフォース、ガード、センス端子には、危険電圧が出力されることがあります（HPSMU の場合は最大± 200 Vdc、MPSMU

Vdc）。感電事故防止のため、必ず以下の事柄を守ってください。

/HRSMU の場合は最大± 100

•3極電源ケーブルを使用して Agilent

• Agilent 16442 テスト・フィクスチャ以外のフィクスチャ、あるいはプローバを

使用する場合には、シールド・ボックスにインターロック回路を接続すること。インターロック回路とは、シールド・ボックスの蓋を開けた時に Agilent の Interlock 端子を開放にすることができる回路のことをいいます。

• インターロック機能が正常であることを定期的に確認すること。

• フォース、ガード、センス端子に繋がる接続部に触れる前には、測定器の電源

を切ること。また、測定系にキャパシタが接続されている場合は、キャパシタを放電すること。電源を切らない場合は、以下の事項を全て実施すること。

• Stopキーを押して Measurementインジケータが消灯したことを確認すること。

• 高電圧警告（High Voltage）インジケータが消灯していることを確認するこ

と。

• シールド・ボックスの蓋を開ける（Interlock 端子を開放する）こと。

• キャパシタが SMU に接続されているならば、キャパシタを放電すること。

• 周囲のほかの作業者に対しても、高電圧危険に対する注意を徹底すること。

B1500 を設置すること。

B1500

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PRECAUTIONS POUR COMMOTION A HAUTE TENSION

Une tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/ HRSM

U; 100 Vdc) émanant du dispositif Agilent B1500 peut être sortie aux bornes de force, d'appareil de protection ou de détection. Les précautions suivantes doivent être obserées contre commotion électrique accidentelle:

• Mettre à la terre le dispositif Agilent B1500 au moyen du câble d'alimentation

tripo

lair.

• En cas de hors service du disp ositif d'e ssai, FIXTUR E Agilent 1 6442, connecter

les bo

rnes de verrouillage (Interlock) de façon à ce que soit ouverte lorsque le

cle de la boîte de blindage est ouvert.

couver

• Essayer périodiquement le fonctionnement normal de verrouillage.

• Avant de toucher la partie connexion à partir des bornes de force, d'appareil de

otection et de détection, mettre hor s tension le di spositif A gilent B1500 . Et, en cas de condensateurs connectés au circuit de mesure, décharger ces condensateurs. Lorsque l'alimentation n'est pas mise hors tension , les 4

ructions suivantes doivent être exécutées:

ins

• Finir la mésure en appuyant sur la touche “Stop”; verifier que l'indicateur

“Measurem

•S'assurer que soit allumé l'indicateur d'alarme de la haute tension.

• Ouvrir le convercle de la boîte de blindage (Ouvrir les bornes de

ver

rouillage).

ent” n'est pas allumé.

• En cas de condensateurs connectés à SMU, décharger les condensateurs.

•Alerter d'autres personnes autour de vous contre le danger de haute tension.

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Achtung! Gefährliche Spannung

Von den Geräten Agilent B1500 können Spannungen an den Anschlüssen “Force,

ard und Sense” von bis zu 200 V ausgehen. Um elektrischem Schlag vorzubeu-

gen, ist bei der Benützung der Geräte Agilent B1500 folgendes zu beachten:

• Erden Sie das Kabinett (falls verwendet) sowie die Geräte Agilent B1500 mittels dre

iadriger Netzleitungen.

• Wenn die Meßfassung, Agilent 16442, zwar angeschlossen, jedoch nicht ve

rwendet wird, schließen Sie die Verriegelungsklemme (Interlock) so an, daß

geöffnetem Deckel die Stromzuführung zu Agilent 16442 auf jeden Fall

bei

terbrochen wird.

• Vergewissern Sie sich regelmäßig daß die Verriegelungsfunktion korrekt arbe

itet.

• Schalten Sie die Geräte Agilent B1500 aus, und entladen Sie alle Kapazitäten be

vor Sie die Anschlüsse “Force, Guard und Sense” berühren. Falls Sie die Geräte Agilent B1500 nicht ausschalten, führen Sie unabhängig von den Geräteeinstellungen folgende Schritt durch:

• Beenden Sie die gegenwärtige Messung durch Drücken der Stop Taste (die

urem

Meas

• Vergewissern Sie sich daß die Hochspannungswarnlampe erloschen ist.

• Öffnen Sie den Deckel der Meßfassung Agilent 16442 (die

rriegelungsklemme (Interlock) öffnen).

ent Leuchtdiode erlischt).

• Entladen Sie alle an SMUs angeschlossenen Kondensatoren (falls

vor

handen).

• Informieren Sie Personen in unmittelbarer Nähe d er Geräte Ag ilent B1500 über die

Gefährlichkeit der bestehenden Hochspannung, und sichern Sie den Zugang

zum Prüf

platz zum Schutz Dritter.

Page 12

Precautionary Statement

Agilent B1500 Semiconductor Device Analyzer operates in the Microsoft Windows XP Professional environment. Agilent B1500 requires Agilent EasyEXPERT software, a specially-designed Windows XP application program.

• About guarantee and support for Agilent B1500

ilent Technologies guarantees and supports the performance of Agilent B1500

Ag for

the same condition as the preload condition when shipped from the factory.

• About updating Agilent EasyEXPERT and the Windows Update

Agilent Technologies confirms the operation of Agilent EasyEXPERT patch prog

rams and important Windows security patches, and provides recommended update information. Visit Agilent B1500 support site, download the patches, and perform the software update.

• About Windows XP application programs and peripherals (including driver)

Using commercial products on Agilent B1500 is your responsibility. Agilent

chnologies cannot provide compatibility information for commercial products. If

Te problems arise, perform Agilent B1500 system recovery.

•About servicing

Bench repair service is available at your center. Be aware that the B1500 configuration might be updated to the latest one without notice because of support issues.

The internal hard disk drive (HDD) might be initialized during servicing. If

ripherals are connected, they will be removed.

When Agilent B1500 is returned, the internal HDD might be initialized. Peripherals will

be returned separately.

•Other notes

• Back up the internal HDD to prevent loss of data by accident or failure.

• Protect Agilent B1500 from computer viruses.

• I

f you connect Agilent B1500 to the network, take care to protect it from

uter virus.

comp

nearest Agilent Technologies service

Page 13

Working in Comfort

To optimize your comfort and productivity, it is important that you set up your work area correctly and use your instrument properly. With that in mind, we have developed some set-up and use recommendations for you to follow based on established ergonomic principles. Improper and prolonged use of keyboards and input devices are among those tasks that have been associated with repetitive strain injury (RSI) to soft tissues in the hands and arms. If you experience discomfort or pain while using the instrument, discontinue use immediately and consult your physician as soon as possible. For more information on RSI you may wish to consult the About Repetitive Strain Injury section. Please study the recommendations described below. Included there are references to relevant parts of international standards, regulations and guidelines, such as ISO 9241 and the European Community Display Screen Equipment directive. You may also wish to consult your employer’s human resources department or other relevant departments for guidance specific to your company.

About Repetitive Strain Injury

Because your comfort and safety are our primary concern, we strongly recommend

at you use the instrument in accordance with established ergonomic principles and

t recommendations. Scientific literature suggests that there may be a relationship between injury to soft tissues -especially in the hands and arms- and prolonged improper use of keyboards or other equipment requiring repeated motions of the hands and forearms. This literature also suggests that there are many other risk factors that may increase the chance of such injury, commonly called Repetitive Strain Injury.

What is RSI?

Repetitive Strain Injury (RSI -also known as cumulative trauma disorder or repetitive

tio

n injury) is a type of injury where soft tissues in the body, such as muscles,

mo nerves, or tendons, become irritated or inflamed. RSI has been a reported problem for those who perform repetitive tasks such as assembly line work, meatpacking, sewing, playing musical instruments, and computer work. RSI also has been observed in those who frequently engage in activities such as carpentry, knitting, housework, gardening, tennis, windsurfing and lifting children.

What causes RSI?

The specific causes of RSI have not been established. Nevertheless, the incidence of

I h

as been associated with a variety of risk factors, including:

• Too many uninterrupted repetitions of an activity or motion.

Page 14

• Performing an activity in an awkward or unnatural posture.

• Maintaining static posture for prolonged periods.

• Failing to take frequent short breaks.

• Other environmental and psychosocial factors.

In addition, there have been reports associating the occurrence of RSI with the use of ke

boards, mice, and other input devices. Also, certain medical conditions, such as

y rheumatoid arthritis, obesity and diabetes, may predispose some people to this type of injury.

What if I experience discomfort?

If you are experiencing any discomfort, seek professional medical advice immediately.

pically, the earlier a problem is diagnosed and treated, the easier it is to resolve.

Mice and Other Input Devices

Various aspects of using mice and other inpu discomfort or injury. Observing the following recommendations may reduce that risk.

• Try to keep your hand, wrist, and forearm in a neutral position while using your

e or other input device.

mous

• If you use your thumb to rotate the ball on a trackball or spaceball, keep it in a

relaxe

d, natural shape, and maintain a neutral posture in your hand, wrist, and

forearm.

• Hold the mouse gently by draping your fingers over it. Keep your hand relaxed and

ers loose. Do not grip the mouse tightly.

fing

• It takes very little pressure or force from your fingers to activate the buttons or

roll wheel on your mouse, scrolling mouse, trackball, or other input device. Using too much force can place unnecessary stress on the tendons and muscles in your hands, wrists, and forearms.

• If you are using a scrolling mouse, be sure to keep your fingers and hand in a xed, neutral position when activating the scroll wheel. Also, this type of mouse

rela features software that can minimize the number of mouse movements or button clicks.

• When using a mouse, trackball, or other input device, position it as close to the

yboard as possible, and keep it at the same level as you do not have to stretch

ke while using it.

• Be sure to keep your mouse and trackball clean. Regular removal of accumulated

ust and dirt helps ensure proper tracking and reduces unnecessary hand and

d wrist motions.

t devices may increase your risk of

Page 15

In This Manual

This manual describes the front panel operation, installation, and functions of Agilent Technologies B1500. This manual consists of the following chapters:

• Chapter 1, “Getting Started”

This chapter describes the basic operations of Agilent B1500.

• Chapter 2, “Introduction”

This chapter describes overview, specifications, accessories and options of Ag

nt B1500.

ile

• Chapter 3, “Installation”

This chapter explains how to install Agilent B1500, and how to connect the device un

der test to a test fixture.

• Chapter 4, “Using EasyEXPERT”

This chapter provides the reference inform

• Chapter 5, “Classic Test Definition”

This chapter provides the reference inform

• Chapter 6, “Application Test Definition”

This chapter provides the reference information of the application test definition.

• Chapter 7, “Function Details”

This chapter explains the several functions and initial settings of Agilent B1500.

• Chapter 8, “Built-in Programming Tool”

This chapter provides information about the built-in mathematical functions and r

ad out functions.

• Chapter 9, “If You Have a Problem”

This chapter explains how to solve a problem if you encounter any problem, and de

scribes error codes. This chapter also describes how to perform the system

recovery and the data backup/recovery.

ation of Agilent EasyEXPERT software.

ation of the classic test definition.

Page 16

NOTE To get the latest firmware/software/electronic manuals/support information, visit

Agilent Technologies support site (http://www.home.agilent.com), and click Additional Test & Measurement Products > Parametric Test, click Semiconductor Parameter/Device Analyzer Series, and click B1500A Semiconductor Device Analyzer. You can reach Agilent B1500A support site.

Page 17

Online Documents

The following electronic documentation files are stored in Agilent B1500’s internal hard disk drive. The files provide the information of how to use Agilent B1500 and Agilent EasyEXPERT software.

Folder: C:\Program Files\Agilent\B1500\Documents

• B1500_help.chm

A part of Agilent B1500A User’s Guide. from the Help menu on the EasyEXPERT main screen.

• B1500_Self_Trng.mht

Agilent B1500A Self-paced Training Manual that

This is the online help that can be opened

can be opened by a browser

Page 18

Utilities

The following Windows execution files are stored in Agilent B1500’s internal hard disk drive. For more information, see Chapter 7, “Function Details”.

Folder: C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities

•ProberControl folder

This folder stores the execution files that can be used to control the chuck mo

ement of a prober. See the readme file in this folder.

• SetupFileConverter.exe

This execution file is used to convert Agilent 4155/4156 setup file (.MES file) to Agile

nt B1500A/EasyEXPERT setup file (.XTS file).

•sleep.exe

This execution file is used to put a wait time in the test execution flow of an appli

cation test.

•XSLT folder

This folder stores the XSLT filters that can be used to export test record.

NOTE These execution files are just sample. If the samples damage your devices, Agilent

Technologies is NOT LIABLE for the damage. And the operation is not guaranteed.

Page 19

Contents

1. Getting Started

2. Introduction

Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Agilent EasyEXPERT Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

Front View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Rear View. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Measurement Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12

GNDU - Ground Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

About SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13

B1510A HPSMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14

B1511A MPSMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

B1517A HRSMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

B1520A MFCMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-24

Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26

Hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-28

Agilent EasyEXPERT Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-49

General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-55

Accessories and Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-56

3. Installation

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2

Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-3

Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Agilent B1500 User’s Guide, Edition 5

Page 20

Contents

Storaging/Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Ventilation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Inspection and Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

To Inspect B1500 and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

To Perform Initial Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

To Change GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

To Enable System Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

Installing Plug-in Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Module Type and Locations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

Installing Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

To Connect 16442B Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16

To Connect Connector Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18

Connecting the interlock terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20

To Connect ASU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21

To Connect SCUU/GSWU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25

To Connect GNDU Adapter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29

Mounting Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30

To Make an Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32

To Connect GNDU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35

To Connect SMU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36

To Connect MFCMU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-42

Connecting Measurement Devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-43

Using Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-44

Using Connector Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-46

0A/B2201A . . . . . . . . . 3-50

Capacitance Compensation When Using Agilent B2

Required Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-51

To Create Compensation Data File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-53

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Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-56

Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-56

Self-test and Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-56

Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-56

4. Using EasyEXPERT

Start EasyEXPERT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Workspace Configurator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

If there is no workspace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5

If there is one workspace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

If there are Workspace more than two . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

Main Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

Main Screen GUI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11

Test Result Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17

Test Results Data Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17

Export in My Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

Test Results Data Folder Export. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

Test Results Data Auto Export . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

Test Results Data Properties. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21

Data Display Manager . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22

Data Display Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23

Application Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24

Quick Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26

Repeat Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28

Organize Preset Group. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31

Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33

SMU Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33

SMU Zero Cancel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-34

CMU Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-35

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Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-39

Main Frame . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-39

Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-40

Switching Matrix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-41

Event Log. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-42

ASU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-42

Extended Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-43

Switching Matrix Operation Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-44

Standby Channel Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-46

Data Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-47

Data Display GUI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-48

Display Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-58

Graph Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-59

List Display Properties. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-60

Tool Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-60

Data Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-63

Miscellaneous Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-64

Preview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-70

Preview Window GUI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-70

Preview Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-72

5. Classic Test Definition

I/V Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

Channel Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

Multi Channel I/V Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

Channel Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

I-V List Sweep. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

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Channel Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-13

Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14

To Define Vector Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16

I/V-t Sampling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19

Channel Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-20

Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21

C-V Sweep. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23

Channel Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-24

Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25

Switching Matrix Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27

Direct Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29

Channel Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-30

Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32

Advanced Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33

Command Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-35

compenReZ. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37

compenImZ. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-38

compenReY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39

compenImY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-40

Function Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-41

Auto Analysis Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-42

Display Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-45

SMU Range Setup Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-47

ADC and Integration Time Setup Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-49

Advanced Setup Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 -50

CMU Range Setup Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-51

Advanced Setup Window for C-V Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-52

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6. Application Test Definition

Test Definition Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

Test Specification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

Define vector data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

Define Layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

Test Output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16

Analysis Parameter Definition. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

Test Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

Defining/Editing Test Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

Debugging Test Contents. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

Variable Inspector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24

External Variable Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-25

Local Variable Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26

Program Component . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28

Auto Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29

Data Display Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32

Display Data Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-33

GPIB I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-35

Message. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40

Data Store Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-41

Command Execution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-42

Using Command Execution. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-44

Command Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-44

Defining Numeric/Vector Input Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-45

Defining String/Numeric Input Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . 6-45

Defining Numeric Output Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-46

Defining Vector Output Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-46

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Defining String Output Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-46

Defining Format Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-47

Setup Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-48

7. Function Details

I/V Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

Available Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

Output Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

Basic Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

Subordinate Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6

Synchronous Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8

Pulsed Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9

Multi Channel I/V Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12

I/V-t Sampling Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13

Available Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13

Operation Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13

Setup Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15

Time Data and Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-17

Source Output Sequence and Time Origin. . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-18

Sampling Completion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-18

C-V Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 -19

Available Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-19

Setup Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-19

Measurement Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-21

Four-Terminal Pair Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-23

Error Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-24

Sweep Abort Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-26

When abort occurs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-26

Standby Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27

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Contents

Standby Channels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27

Standby State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27

Output Sequence of Standby Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-28

To Use Standby Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-29

Bias Hold Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-30

Current Offset Cancel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-31

SMU CMU Unify Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-33

Atto Sense and Switch Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-35

SMU Ranging Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-37

To Set Ranging Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-37

Auto Ranging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38

Limited Auto Ranging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39

Fixed Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39

Compliance Range. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39

Enhanced Auto Ranging for Current Measurement. . . . . . . . . . . . . . . . . . . . . 7-40

SMU Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-41

Polarity and Output Area. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-41

Power Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42

To Set Compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-43

SMU Pulse. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44

To Set Pulse Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44

SMU Measurement Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45

Integration Time. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45

Overhead Time. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-47

To Specify Source Output Time. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-47

Wait Time. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48

Multiple Measurement Channels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-49

SMU Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-50

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Contents

SMU Series Resistor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-51

Interlock Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-52

Auto Power Off Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-53

Initial Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-54

Utility Programs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-56

Prober Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-56

SetupFileConverter.exe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-57

sleep.exe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-59

XSLT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-60

Desktop EasyEXPERT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-70

About Desktop EasyEXPERT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-71

System Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-72

To Install Desktop EasyEXPERT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-73

Before Starting Desktop EasyEXPERT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-73

To Start Desktop EasyEXPERT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-74

Execution Mode dialog box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-74

Start EasyEXPERT window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-75

To Change Execution Mode and GPIB Settings . . . . . . . . . . . . . . . . . . . . . . . 7-76

To Move the EasyEXPERT Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-76

To Update Desktop EasyEXPERT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-77

Using 4155B/4156B/4155C/4156C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-78

8. Built-in Programming Tool

Variables and Expressions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3

Expressions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-4

Built-in Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7

Read Out Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

Functions for Marker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

Functions for Cursor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

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Contents

Functions for Line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16

Functions for Two Line Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17

Script Program Statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-19

9. If You Have a Problem

When You Operate B1500A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

Power On Trouble . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

SCUU is not Detected . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

ASU is not Detected. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4

External GPIB Devices are not Detected. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4

To Simplify the Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5

When You Perform Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-6

Measurement Takes More Time than Specified. . . . . . . . . . . . . . . . . . . . . . . . . 9-6

Noise Affects the Measured Values. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-7

Voltage Measurement Error is Large . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-8

SMU Oscillates for High-Frequency Device Measurements. . . . . . . . . . . . . . . 9-8

SMU Oscillates for Negative Resistance Measurements. . . . . . . . . . . . . . . . . . 9-9

Large Current Causes High Temperature (Thermal Drift). . . . . . . . . . . . . . . . 9-10

Measurement Damages the Device under Test . . . . . . . . . . . . . . . . . . . . . . . . 9-10

Leaving Connections Damages Devices after Measurement. . . . . . . . . . . . . . 9-10

Unexpected Sampling Measurement Data is Returned . . . . . . . . . . . . . . . . . . 9-11

MFCMU Causes Unbalance Condition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 - 11

Before Shipping to Service Center . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-12

To Check Module Slots . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-12

To Check ASU/HRSMU Combination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-12

To Make Backup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-12

B1500A System Recovery. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-13

To Initialize Database. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-13

To Update EasyEXPERT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-14

To Restore Database. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-14

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Contents

Data Backup and Recovery . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-15

Folders to Backup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-15

To Make Database Backup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-16

To Restore Database Backup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 -16

To Make Backup of Other Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17

To Restore Backup of Other Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-18

Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-19

Agilent EasyEXPERT Operation Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-19

Agilent FLEX Execution Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-44

Agilent B1500A Self-test/Calibration Error. . . . . . . . . . . . . . . . . . . . . . . . . . . 9-56

Setup File Converter Execution Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-63

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Contents

Agilent B1500 User’s Guide, Edition 5

Page 31

1 Getting Started

Page 32

Getting Started

This chapter describes the basic operations of Agilent B1500. Before learning the product details, let’s try to use Agilent B1500 briefly. The operations need Agilent B1500, power cable, and USB keyboard (USB mouse and stylus pen are optional). During the operations, open the measurement terminals.

Basic Operations:

1. T o turn on Agilent B1500

2. To use Agilent EasyEXPERT

3. To create a workspace

4. To specify your workspace

5. To select a test definition (pre-defined test setup)

6. To change the test conditions

7. T o start measurement

8. To set flag/string to the test result record

9. To use the analysis tools

10. To turn off Agilent B1500A

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Getting Started

Agilent B1500 has the following front panel keys.

•Stop

Stops the present measurement or source output immediately.

• Rotary knob

Rotating the knob moves the marker on the graph window, or increases/decreases/changes the value in the active entry field.

Pressing the knob sets or enters the value.

•Softkeys

Seven softkeys are available. Used to select one for the entry field specified or the dialog box. They are also used to recall the test definitions (pre-defined test setups).

• Touch Panel Off

Enables or disables the touch screen operation.

• Standby switch (lower right corner of the front panel)

Turns the B1500A on. Pressing the button in the ON state makes the B1500A in the standby state.

•LCD Off

Enables or disables the LCD panel. LED lights when the LCD is disabled.

•Auto, -, +, Menu

Four keys are available for the display adjustment. Press Auto to perform adjustment automatically. Use -, +, and Menu to adjust manually.

Agilent B1500 also requires Agilent EasyEXPERT software as its graphical user interface. You can operate Agilent EasyEXPERT by using the touch panel. Use your fingers, stylus pen, and so on for the touch panel operation. The USB keyboard and the USB mouse are also available for operating the EasyEXPERT.

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Getting Started

NOTE When turning the B1500A on

Open the measurement terminals at the device side when turning the B1500A on. Also disconnect the device from the measurement terminals and open the measurement terminals after the test. If you leave the connection with the device, the device may be damaged by unexpected operations or char ge-u p of measuremen t cables.

NOTE If you use the B1500A at the first time

If this is the first time to turn Agilent B1500 on after the delivery, you need to perform the initial setup of the B1500. See “Inspection and Installation” on page 3-6. After the initial setup and if no users are added, you can automatically logon as “Agilent B1500 User” account without passw ord .

NOTE If Start EasyEXPERT button is not displayed

Select All Programs > Start EasyEXPERT from the Start menu. The Start EasyEXPERT button will be displayed.

Step 1. T o turn on Agilent B1500

1. Connect the power cable from Agilent B1500 to an AC power outlet.

2. Connect the USB keyboard to the B1500. Optionally , conn ect the USB mouse to the B1500.

3. Press the Standby switch (lower right corner of the front panel). Windows, measurement module initialization, and self-calibration will start. For the Windows logon screen, log on Windows.

After logging on, click the Start EasyEXPERT button.

And wait until the EasyEXPERT is activated.

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Step 2. To use Agilent EasyEXPERT

1. If this is the first time to start the EasyEXPERT, or if there is no workspace, the B1500 displays the screen as shown in Step 5. Go to Step 5. The B1500 will create a workspace automatically.

Workspace means the space created in Agilent B1500A’s internal hard disk drive, and is used to store the test setup, test result data, and so on. The workspace can be created and allocated for each user.

2. If there is two or more workspaces, the B1500 displays the screen as shown in Step 4. Go to Step 4.

3. If there is one workspace only, the following screen appears.

Getting Started

a. If you do not want to create a workspace, select the Yes radio button and

click OK. Then go to Step 5.

b. If you want to create a workspace, select the No radio button and click Next.

Then go to Step 3.

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Getting Started

Step 3. To create a workspace

1. Enter the name of the new workspace into the above-entry field. Check Allow other users to access this workspace box if you want to create a

public workspace that is opened for all users.

2. If you are the owner of the existing workspace, you can change the name of the existing workspace.

If you want to rename the existing workspace, enter the name into the below-ent ry field.

Check Allow other users to access this workspace box if you want to set it to a public workspace that is opened for all users.

3. Click OK. Then go to Step 5.

To cancel creating workspace, click Prev.

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Step 4. To specify your workspace

Getting Started

For the screen as shown above, perform the following steps. This example selects the workspace named as Demo Workspace that is a public workspace that is opened for all users.

1. Select Public Workspaces owned by other users radio button.

2. Click Demo Workspace to select it.

3. Click Continue.

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Getting Started

Step 5. To select a test definition (pre-defined test setup)

For the screen as shown above, perform the following steps.

1. Set the Category area to change the test definitions listed in the Library area. For example, check the CMOS only.

2. Select a test definition from the Library area. For example, click Id-Vg. Display will be changed as shown in Step 6.

NOTE Test Definitions

Test definitions are the built-in test s etups that h a ve been defined and stor ed in th e EasyEXPERT as the application library. The EasyEXPERT contains more than one hundred test definitions. You can execute the test without modifications. Also you can create your own test setup/definition by making any changes.

All furnished test definitions are just sample. If the samples damage your devices, Agilent Technologies is NOT LIABLE for the damage.

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Step 6. To change the test conditions

Getting Started

Use the entry fields in the Test Parameters area to change the test conditions. For example, the following steps change the sweep range of voltage output.

1. Set VgStart to 0 V and VgStep to 0.2 V.

2. VsubsStep to -1.0 V. T o enter the value, us e the USB keyboard, or the scr een keyboard/num eric keyboard

opened by clicking the button to the right of the entry field.

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Getting Started

Step 7. T o start measurement

1. Click the Single button (upper right on the screen) to start a single sweep measurement.

This opens the Data Display window as shown below, and starts the single measurement. The window updates the display and shows the measurement data in real time.

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Step 8. To set flag/string to the test result record

After the measurement, the measurement data is displayed on the Data Display window. For the measurement after doing the changes as shown in Step 6, you will have the test result as sh own i n Step 7. And the following dialog box appears on t he lower left area of the B1500 screen. This dialog box is called as Test Result Editor.

The Test Result Editor provides the following GUI to set a flag and remarks to the test result record.

• Save button and Delete button Divides test records into groups, Save and Delete. Test records in Save-group are always listed in the lower area of the

EasyEXPERT main screen. Test records in Delete-group can be listed when Results > Filter >

Show Deleted Data is checked.

Getting Started

• Flags buttons The following buttons are available. You can set one of the following flags.

• Important ! button

Sets the important flag (!) to the test result record.

• Valid # button

Sets the valid flag (#) to the test result record.

• Questionable ? button

Sets the questionable flag (?) to the test result record.

• Remarks field You can enter characters into this field. The characters will be recorded as the

Remarks value of the test result record.

• OK button Applies the setup on the Test Result Editor, and closes this dialog box.

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Getting Started

Step 9. To use the analysis tools

Measurement result graph is displayed on the Graph Plot area. This area also displays parameters for the marker, cursor, and lines when they are effective.

• View menu: used to adjust the graph scale.

• Marker menu: used to display and control the marker.

• Cursor menu: used to display and control the cursor.

• Line menu: used to display and control the lines. The List Display area lists the measurement data.

Step 10. To turn off Agilent B1500A

1. Perform W i nd ow s s hut do w n p roces s us i ng t he Start menu. Or press the Standby switch (lower right corner of the front panel).

Windows will be shutdown and Agilent B1500A will become the standby state.

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2 Introduction

Page 44

Introduction

This chapter describes the basic functions and features of Agilent B1500A Semiconductor Device Analyzer, and consists of the following sections:

• “Overview”

• “Front View”

• “Rear View”

• “Measurement Units”

• “Specifications”

• “Accessories and Options”

NOTE Application Library

Agilent B1500A has installed Agilent EasyEXPERT software as the user interface. The EasyEXPERT contains an application library that is a set of test definitions. The application test can be performed by selecting a test definition and setting the test condition for the actual DUT (device under test).

All test definitions are just sample. If the samples damage your devices, Agilent Technologies is NOT LIABLE for the damage.

NOTE Utility

The folder C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities stores the following sample programs.

• Prober control programs

• 4155/4156 setup file converter

• sleep.exe program

For more details, see Chapter 7, “Function Details.”

2- 2 Agilent B1500 User’s Guide, Edition 5

Page 45

Introduction

Overview

Agilent B1500A Semiconductor Device Analyzer is the new generation one box solution for the semiconductor device DC/AC parametric measurement and analysis application. You can perform measurement and analysis easily and effectively on the Microsoft Windows environment with intuitive graphical user interface, touch screen LCD panel, keyboard, and mouse by using Agilent B1500A.

Agilent B1500A provides the DC voltage/current output capability, the DC

ltage/current measurement capability, and the AC signal output and impedance

vo measurement capability. So you can perform the current-voltage sweep measurement and the capacitance-voltage sweep measurement for example by one instrument. You can also analyze the measurement result characteristics graph by using several tools such as markers, cursors, and lines.

Also, in the GPIB remote control mode, you can control the B1500A from an

ernal computer by using Agilent FLEX command set that is the common

ex language for Agilent semi conductor DC measurement instruments. So you can reuse the measurement program created for Agilent 4155/4156/E5 260 / E527 0.

Agilent B1500 User’s Guide, Edition 5 2- 3

Page 46

Introduction Overview

• Agilent B1500A Semiconductor Device Analyzer Mainframe that provides the ground unit (GNDU) and ten empty slots for the

measu

rement facilities, and Agilent EasyEXPERT software for the operating environment. The EasyEXPERT is the GUI based measurement control and analysis software runs on the Microsoft Windows XP Professional.

The B1500A is equipped with the 15 inch LCD with touch panel, hard disk

ive, DVD-ROM/CD-ROM/CD-RW drive, and USB/LAN/GP-IB interfaces.

dr The USB keyboard, the USB mouse, and the stylus pen are available as option.

• Agilent B1510A HPSMU mod ul e High power source/monitor unit module for the B1500A. Occupies two slots.

• Agilent B1511A MPSMU module Medium power source/monitor unit module for the B1500A. Occupies one slot.

• Agilent B1517A HRSMU module High resolution source/ mo nit or uni t mo dul e f or the B1500A. Occupies one slot.

Need

s Ag

ilent E5288A ASU to perform atto level current measurement.

• Agilent B1520A MFCMU module Multi frequency capacitance measurement unit module for the B1500A.

Occupi

es one slot. Needs Agilent N1301A-100 SCUU to switch the CMU/SMU

connection automatically or to use Agilent N1301A-100 GSWU.

• Agilent N1301A-10 0 SCUU SMU CMU unify unit (SCUU). Used to switch the CMU/SMU connection to

the D

UT interface. Attach or connect to the CMU and two SMUs, MPSMU

and/or HRSMU).

• Agilent N1301A-20 0 GS WU Guard switch unit (GSWU). Used to connect th

and low near the DUT. The GSWU must be connected to the SCUU and the guard lines of the DUT interface. Effective for the accurate impedance measurements.

• Agilent E5288A ASU Atto sense and switch unit (ASU). Used to enable the 1

level current measurement, also switch the SMU/AUX connection to the DUT interface. Available for the HRSMU.

2- 4 Agilent B1500 User’s Guide, Edition 5

e guard lines between CMU high

pA range for the atto

Page 47

Introduction

Overview

Agilent EasyEXPERT Software

Agilent EasyEXPERT software is a specially-designed Windows XP application program for controlling Agilent B1500A. The EasyEXPERT provides the easy and effective measurement and analysis environment with intuitive graphical user interface (GUI), touch screen LCD panel, keyboard, and mouse. Some of the functions are listed below.

• Single measurement, repeat measurement, and append measurement

• Switching matrix control (Agilent B2200A/B2201A)

• Measurement/setup data management by workspace

• Graph display and anal ysis with markers,

• Data import/export capability, data output by CSV/XML format, and graph outp

ut by EMF/BMP/GIF/PNG format

• Maintenance; self-test and self-calibration

The EasyEXPERT has the following measurement execution environments.

• Application test The EasyEXPERT contains an applicati

measurements for CMOS devices, TFT, B JT, memory, nanotechnology devices such as CNT FET, and so on. The application library includes more than one hundred test definitions.

You can perform measurements by choosing the best one for your device under

(DUT) from the application libraries, and modifying and executing it.

test Modification is really simple. For example, it will be completed by changing the output voltage only to DUT terminals. And the setup with your modifications can be saved and recalled as your setup (My Favorite Setup).

• Classic test You can perform measurements by using the u

semiconductor parameter analyzers such as Agilent 4156C. The setup can be made by entering values into the setup tables used for the measurement module control. And it can be saved an d recalled as your setup (My Favorite Setup). The I-V, C-V, and sampling measurement modes are supported.

cursors, and lines; and auto analysis

on library that supports typical

ser interface similar to the

•Quick test You can execute the test setups saved in a preset group (My Favo

sequentially.

Agilent B1500 User’s Guide, Edition 5 2- 5

rite Setup)

Page 48

Introduction Front View

Front View

This section describes the front view of Agilent B1500A.

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

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



1. Standby switch Turns the B1500A on. Pressing the button in the ON state makes the B1500A in

the s

tandby state. The green LED lights when the B1500A is in the ON state.

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

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NOTE When turning the B1500A on

Open the measurement terminals at the device side when turning the B1500A on. Also disconnect the device from the measurement terminals and open the measurement terminals after the measurement. If you leave the connection with the device, the device may be damaged by unexpected operations or charge-up of measurement cables.

2- 6 Agilent B1500 User’s Guide, Edition 5

Page 49

2. LCD panel

Introduction

Front View

15 inch TFT XGA display, 1024 × 768 r screen, Agilent EasyEXPERT software window, and so on. Touch screen operation is available when the Touch Pane l Off indicator does not light.

NOTE About screen adjustment

If you find swinging or flickering in screen while you use this instrument, perform the screen adjustment. In most cases, the symptoms can be resolved by pressing the Auto button below the LCD panel. The Auto button is used to start the automatic screen adjustment. Also the manual screen adjustment is available by using the adjustment menu displayed by pressing the Menu button.

3. Touch Panel Off key Works on Agilent EasyEXPERT environment. Enables or disables the touch

reen operation. The green LED lights when the touch screen is disabled.

NOTE To disable the touch panel

Use T ouch Panel Device Properties, and remo ve the check from the Enabled box on the Advanced tab screen. The Touch Panel Device Properties dialog box can be opened by selecting Gunze TPDD > Adjust Settings from Windows program menu.

4. Stop key Stops the present measurement or source output immediately.

esolution. Displays the Windows

5. High vol t age status indicator This red LED lights when a source channel applies more than ± 42

6. Measurement status indicator This green LED lights when a measurement chan

7. Rotary knob Works on Agilent EasyEXPERT environment. Rotating the knob moves the

mark

er on the graph window, or increases/decreases/changes the value in the

active entry field. Pressing the knob sets or enters the value.

8. Softkeys Seven softkeys are available for Agilent EasyEXPERT environment. Used to

select an altern

Agilent B1500 User’s Guide, Edition 5 2- 7

ative for the entry field specified or the dialog box.

nel performs measurement.

Page 50

Introduction Front View

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9. DVD-ROM/CD-ROM/CD-RW drive For data backup, B1500A update, or data transfer.

10. USB interfaces USB, 2 ports. For keyboard, mouse, and so on. USB keyboard and USB mouse

are

available as

option.

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11. OSD butto ns LCD Off enables or disables the LCD pane

l. The green LED lights when the

LCD is disabled. Four keys are available for the display adju

stment. Press Auto to perform

adjustment automatically. Use -, +, and Menu to adjust manually.

12. HDD access indicator This green LED lights in the access status of HDD or DVD-ROM/CD-ROM/

CD-RW

drive. Do not turn the B1500A off during this LED lights.

2- 8 Agilent B1500 User’s Guide, Edition 5

Page 51

Rear View

This section describes the rear view of Agilent B1500A.

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Introduction

Rear View

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1. Serial number You need this se

assistance program.

2. GNDU terminal 0 V constant voltage source. Used for the reference of measurement ground.

iaxial connector .

3. Zero Check terminal Ground reference point of the B1500A.

CAUTION The Zero Check terminal can be used for the service purpose only. For the B1500

normal operation, leave this terminal open and do not connect anything to this terminal. Connecting anything can damage the B1500.

ial number when using Agilent Technologies telephone

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4. Circuit Common ( ) and Frame ground ( ) terminals For floating measurement, remove the shorting bar (Agilent part number

5000

-4206).

Agilent B1500 User’s Guide, Edition 5 2- 9

Page 52

Introduction Rear View

CAUTION Do not float the Circuit Common terminal at voltages more than ±42 V referenced

to frame ground. Failure to heed this caution may result in damage to Agilent B1500A.

WARNING If the Circuit Common terminal is not connected to the frame ground terminal

(for floating measurement), a potentia l shock hazard may present. Do not touch any of measurement circuit at any time while a floating measurement is in progress.

5. SMU terminals The source/monitor unit (SMU) has two triaxial connecto

the Kelvin connections. The high power source/monitor unit (HPSMU) occupies two slots. And the

HPSM

Us are allowed to be installed in slots 1 to 2 (one HPSMU), 1 to 4 (two HPSMUs), 1 to 6 (three HPSMUs), or 1 to 8 (four HPSMUs). In the GPIB remote control mode, channel number is always lower slot number.

The medium power source/monitor unit (MPSMU) and the high resolution

urce/monitor unit (HRSMU) occupy one slot. In the GPIB remote control

so mode, channel number is always the slot number that the module is installed. The HRSMUs are installed between HPSMUs and MPSMUs.

In the EasyEXPERT operation mode, the SMUs number. SMU1 is assigned to the SMU installed in the lowest module slot. And the following SMU numbers are assigned to the upper SMUs in sequence.

NOTE The B1500A shown above installs two HPSMUs in slots 1 to 4, two HRSMUs in

slots 5 to 6, two MPSMUs in slots 7 to 8, and one MFCMU in slot 9. The SMU numbers 1 to 6 and the channel numbers 1, 3, and 5 to 8 are assigned to the SMUs.

6. CMU terminals The multi frequency capacitance measurement unit (MFCMU) has four coaxial

connect The Hcur and Hpot have to be connected together at a terminal of the device under test (DUT). Also the Lcur a nd Lpot have to be connected together at the other terminal of the DUT. Then, the guard lines of four-terminal pair must be connected together.

ors, Lcur, Lpot, Hpot, and Hcur, for the four-terminal pair connection.

can be specified by the SMU

rs, force and sense, for

The MFCMU occupies one slot. And the MFCMU have to be installed in the

ot next to the last SMU. In the GPIB remote control mode, channel number is

s always the slot number and the largest number available fo r the chan nel num ber.

2- 10 Agilent B1500 User’s Guide, Edition 5

Page 53

Introduction

7. Blank panel Blank pane ls are fixed to the empty slots.

8. GPIB interface Use an Agilent 82357A USB/GPIB interface or Agilent 10833A/B/C/D GPIB

cab

e to connect to an external computer or equipment.

9. LINE input receptacle AC power cable is connected to this receptacle.

10. LAN interface RJ45 connector.

11. USB interfaces USB, 2 ports. For keyboard, mouse, or peripherals. USB keyboard and USB

e are available as option.

12. Ext Trig terminals Two BNC connectors, one for trigger input, and one for trigger output. For

tails about the trigger function, see Programming Guide.

Rear View

13. Digital I/O terminal DSUB 25 pin connector. Can be used for the trigger input/o utput t erminal s or an

interf

ace to control an external relay circuit and so on. For details, see

Programming Guide.

14. Interlock terminal Used in conjunction with the interlock function of the B1500A. If the Interlock

termi

nal is open, maximum SMU output is limited to ± 42 V. Be sure to connect this terminal to the 16442B test fixture or connector plate before performing measurement. If you use a connector plate, you must install an interlock circuit. For details on how to install the interlock circuit, see “To Make an Interlock Circuit” on page 3-32.

WARNING Dangerous voltage of up to the maximum voltage of SMUs may be present at

force, guard, and sense terminals if the Interlock terminal is closed.

Agilent B1500 User’s Guide, Edition 5 2- 11

Page 54

Introduction Measurement Units

Measurement Units

Agilent B1500A can be equipped with the following measurement modules.

• “GNDU - Ground Unit”

• “B1510A HPSMU”

• “B1511A MPSMU”

• “B1517A HRSMU”

• “B1520A MFCMU” See “Using EasyEXPERT” on page 4-1 for the functions available for Agilent

EasyEXPERT software. See Programming Guide for the functions available for the GPIB remote mode.

GNDU - Ground Unit

Agilent B1500A is equipped with the ground unit (GNDU). The GNDU is a 0 V constant voltage source, and used for the reference of measurement ground. Also the GNDU can sink up to ± 4.2 A, so it is effective for using the HPSMU (high power SMU). Figure 2-1 is a simplified circuit diagram of GNDU.

Figure 2-1 Simplified GNDU Circuit Diagram

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2- 12 Agilent B1500 User’s Guide, Edition 5

*1'8 )RUFH

Page 55

Introduction

Measurement Units

About SMU

Source/monitor unit (SMU) can apply DC voltage or current, and can measure DC current or voltage. Figure 2-2 is a simplified SMU circuit diagram. The SMU can perform the following operations:

• Apply voltage and measures current

• Apply current and measures voltage

• Apply voltage and measures voltage

• Apply current and measures current

NOTE To select the SMU operation mode in the GPIB remote condition , enter the CMM

command.

Figure 2-2 Simplified SMU Circuit Diagram

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Compliance

The SMU has a compliance feature that limits output voltage or current to prevent damage to the device under test. When the SMU applies voltage, you can specify current compliance. When the SMU applies current, you can specify voltage compliance. For details about the compliance, refer to “SMU Compliance” on page 7-41.

Agilent B1500 User’s Guide, Edition 5 2- 13

Page 56

Introduction Measurement Units

B1510A HPSMU

This section describes typical specification of the high power source/monitor unit (HPSMU) for Agilent B1500A.

• Maximum voltage, current, output power: ± 200 V, ± 1 A, 20 W

• Minimum range: 2 V, 1 nA

• Output/measurement value and resolution: see Table 2-1 to Table 2-4.

Figure 2-3 HPSMU Output and Meas u r em ent Ranges

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2- 14 Agilent B1500 User’s Guide, Edition 5

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Page 57

Table 2-1 HPSMU Output Voltage Ranges and Resolu ti on s

Introduction

Measurement Units

Range Output Value

2 V 0 ≤ |V| ≤ 2 V 100 μV ± 1000 mA 20 V 0 ≤ |V| ≤ 20 V 1 mV ± 1000 mA 40 V 0 ≤ |V| ≤ 40 V 2 mV ± 500 mA

100 V 0 ≤ |V| ≤ 100 V 5 mV ± 125 mA 200 V 0 ≤ |V| ≤ 200 V 10 mV ± 50 mA

Table 2-2 HPSMU Output Current Ranges and Resolutions

Range Output Value

1 nA 0 ≤ |I| ≤ 1.15 nA 50 fA ± 200 V

10 nA 0 ≤ |I| ≤ 11.5 nA 500 fA ± 200 V

100 nA 0 ≤ |I| ≤ 115 nA 5 pA ± 200 V

1 μA 0 ≤ |I| ≤

10 μA 0 ≤ |I| ≤ 11.5 μA 500 pA ± 200 V

1.15 μA 50 pA ± 200 V

Setting

Res

Setting

Reso

olution

lution

Maximum

Current

Maximum

Voltage

100 μA 0 ≤ |I| ≤ 115 μA 5 nA ± 200 V

1 mA 0 ≤ |I| ≤ 1.15 mA 50 nA ± 200 V

10 mA 0 ≤ |I| ≤ 11.5 mA 500 nA ± 200 V

100 mA 0 ≤ |I| ≤ 50 mA 5 μA ± 200 V

50 mA < |I| ≤ 115 mA 5 μA ± 100 V

1 A 0 ≤ |I| ≤ 50 mA 50 μA ± 200 V

50 mA < |I| ≤ 125 mA 50 μA ± 100 V

125 mA < |I| ≤ 500 mA 50 μA ± 40 V

500 mA < |I|

Agilent B1500 User’s Guide, Edition 5 2- 15

≤ 1 A 50 μA ± 20 V

Page 58

Introduction Measurement Units

Table 2-3 HPSMU Measurement Voltage Values and Resolutions

Range

Measurement

Value

2 V 0 ≤ |V| ≤ 2.2 V 100 μV 2 μV 20 V 0 ≤ |V| ≤ 22 V 1 mV 20 μV 40 V 0 ≤ |V| ≤ 44 V 2 mV 40 μV

100 V 0 ≤ |V| ≤ 110 V 5 mV 100 μV 200 V 0 ≤ |V| ≤ 200 V 10 mV 200 μV

Table 2-4 HPSMU Measurement Current V

Range

Measurement V alue

1 nA 0 ≤ |I| ≤ 1.15 nA 50 fA 10 fA

10 nA 0 ≤ |I| ≤ 11.5 nA 500 fA 10 fA

100 nA 0 ≤ |I| ≤ 115 nA 5 pA 100 fA

1 μA 0 ≤ |I| ≤ 1.15 μA 50 pA 1 pA

Measurement Resolutions

High Speed ADC High Resolution ADC

alues and Resolutions

Measurement Resolutions

High

Speed ADC High Resolution ADC

10 μA 0 ≤ |I| ≤ 11.5 μA 500 pA 10 pA

100 μA 0 ≤ |I| ≤ 115 μA 5 nA 100 pA

1 mA 0 ≤ |I| ≤ 1.15 mA 50 nA 1 nA

10 mA 0 ≤ |I| ≤ 11.5 mA 500 nA 10 nA

100 mA 0 ≤ |I| ≤ 115 mA 5 μA 100 nA

1 A 0 ≤

|I| ≤ 1 A 50 μA 1 μA

a. This column is applied to the auto ranging or the limited auto ranging. For

fixed ranging, maximum measurement value is Range column value.

2- 16 Agilent B1500 User’s Guide, Edition 5

Page 59

B1511A MPSMU

This section describes typical specification of the medium power source/monitor unit (MPSMU) for Agilent B1500A.

• Maximum voltage, current, output power: ± 100 V, ± 100 mA, 2 W

• Minimum r ange: 0.5 V, 1 n A

• Output/measurement value and resolution: see Table 2-5 to Table 2-8.

Figure 2-4 MPSMU Output and Measurement Ranges

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Measurement Units

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Agilent B1500 User’s Guide, Edition 5 2- 17

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Page 60

Introduction Measurement Units

Table 2-5 MPSMU Output Voltage Ranges and Resolutions

Range Output Value

0.5 V 0 ≤ |V| ≤ 0.5 V 25 μV ± 100 mA 2 V 0 ≤ |V| ≤ 2 V 100 μV ± 100 mA 5 V 0 ≤ |V| ≤ 5 V 250 μV ± 100 mA

20 V 0 ≤ |V| ≤ 20 V 1 mV ± 100 mA 40 V 0 ≤ |V| ≤ 20 V 2 mV ± 100 mA

20 V < |V| ≤ 40 V 2 mV ± 50 mA

100 V 0 ≤ |V| ≤ 20 V 5 mV ± 100 mA

20 V < |V| ≤ 40 V 5 mV ± 50 mA

40 V < |V| ≤ 100 V 5 mV ± 20 mA

Table 2-6 MPSMU Output Current Ranges and Resolutions

Range Output Value

1 nA 0 ≤ |I| ≤ 1.15 nA 50 fA ± 100 V

10 nA 0 ≤ |I| ≤ 11.5 nA 500 fA ± 100 V

Setting

Res

Setting

Res

lution

Maximum

Current

Maximum

Voltage

100 nA 0 ≤ |I| ≤ 115 nA 5 pA ± 100 V

1 μA 0 ≤ |I| ≤ 1.15 μA 50 pA ± 100 V

10 μA 0 ≤ |I| ≤ 11.5 μA 500 pA ± 100 V

100 μA 0 ≤ |I| ≤ 115 μA 5 nA ± 100 V

1 mA 0 ≤ |I| ≤ 1.15 mA 50 nA ± 100 V

10 mA 0 ≤ |I| ≤ 11.5 mA 500 nA ± 100 V

100 mA 0 ≤ |I| ≤ 20 mA 5 μA ± 100 V

20 mA < |I| ≤

50 mA < |I| ≤ 100 mA 5 μA ± 20 V

2- 18 Agilent B1500 User’s Guide, Edition 5

50 mA 5 μA ± 40 V

Page 61

Table 2-7 MPSMU Measurement Voltage Values and Resolutions

Introduction

Measurement Units

Range

Measurement

Val

0.5 V 0 ≤ |V| ≤ 0.55 V 25 μV 0.5 μV 2 V 0 ≤ |V| ≤ 2.2 V 100 μV 2 μV 5 V 0 ≤ |V| ≤ 5.5 V 250 μV 5 μV

20 V 0 ≤ |V| ≤ 22 V 1 mV 20 μV 40 V 0 ≤ |V| ≤ 44 V 2 mV 40 μV

100 V 0 ≤ |V| ≤ 100 V 5 mV 100 μV

Table 2-8 MPSMU Measurement Current V

Range

Measurement

Value

1 nA 0 ≤ |I| ≤ 1.15 nA 50 fA 10 fA

10 nA 0 ≤ |I| ≤ 11.5 nA 500 fA 10 fA

100 nA 0 ≤ |I| ≤ 115 nA 5 pA 100 fA

Measurement Resolutions

High Speed ADC High Resolution ADC

alues and Resolutions

Measurement Resolutions

High

Speed ADC High Resolution ADC

1 μA 0 ≤ |I| ≤ 1.15 μA 50 pA 1 pA

10 μA 0 ≤ |I| ≤ 11.5 μA 500 pA 10 pA

100 μA 0 ≤ |I| ≤ 115 μA 5 nA 100 pA

1 mA 0 ≤ |I| ≤ 1.15 mA 50 nA 1 nA

10 mA 0 ≤ |I| ≤ 11.5 mA 500 nA 10 nA

100 mA 0 ≤ |I| ≤ 100 mA 5 μA 100 nA

a. This column is applied to the auto ranging or the limited auto ranging. For

fixed ranging, maximum measurement value is Range column value.

Agilent B1500 User’s Guide, Edition 5 2- 19

Page 62

Introduction Measurement Units

B1517A HRSMU

This section describes typical specification of the high resolution source/monitor unit (HRSMU) for Agilent B1500A.

• Maximum voltage, current, output power: ± 100 V, ± 100 mA, 2 W

• Minimum range: 0.5 V, 10 pA (1 pA when the E 5288A ASU i s used)

• Output/measurement value and resolution: see Table 2-9 to Table 2-12.

Figure 2-5 HRSMU Output and Measurement Ranges

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2- 20 Agilent B1500 User’s Guide, Edition 5

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Table 2-9 HRSMU Output Vol tage Ranges and Resolutio n s

Introduction

Measurement Units

Range Output Value

0.5 V 0 ≤ |V| ≤ 0.5 V 25 μV ± 100 mA 2 V 0 ≤ |V| ≤ 2 V 100 μV ± 100 mA 5 V 0 ≤ |V| ≤ 5 V 250 μV ± 100 mA

20 V 0 ≤ |V| ≤ 20 V 1 mV ± 100 mA 40 V 0 ≤ |V| ≤ 20 V 2 mV ± 100 mA

20 V < |V| ≤ 40 V 2 mV ± 50 mA

100 V 0 ≤ |V| ≤ 20 V 5 mV ± 100 mA

20 V < |V| ≤ 40 V 5 mV ± 50 mA

40 V < |V| ≤ 100 V 5 mV ± 20 mA

Table 2-10 HRSMU Output Current Ra

Range Output Value

1 pA

0 ≤ |I| ≤ 1.15 pA 1 fA ± 100 V

10 pA 0 ≤ |I| ≤ 11.5 pA 5 fA ± 100 V

100 pA 0 ≤ |I| ≤ 115 pA 5 f A ± 100 V

1 nA 0 ≤ |I| ≤ 1.15 nA 50 fA ± 100 V

10 nA 0 ≤ |I| ≤ 11.5 nA 500 fA ± 100 V

100 nA 0 ≤ |I| ≤ 115 nA 5 pA ± 100 V

1 μA 0 ≤ |I| ≤ 1.15 μA 50 pA ± 100 V

10 μA 0 ≤ |I| ≤ 11.5 μA 500 pA ± 100 V

100 μA 0 ≤ |I| ≤ 115 μA

1 mA 0 ≤ |I| ≤ 1.15 mA 50 nA ± 100 V

10 mA 0 ≤ |I| ≤ 11.5 mA 500 nA ± 100 V

100 mA 0 ≤ |I| ≤ 20 mA 5 μA ± 100 V

20 mA < |I| ≤ 50 mA 5 μA ± 40 V

50 mA < |I| ≤ 100 mA 5 μA ± 20 V

Setting

Reso

nges and Resolutions

Setting

Res

Maximum

lution

Current

Maximum

lution

Voltage

5 nA ± 100 V

a. Available when the E5288A Atto Sense and Switch Unit (ASU) is used.

Agilent B1500 User’s Guide, Edition 5 2- 21

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Introduction Measurement Units

Table 2-11 HRSMU Measurement Voltage Values and Resolutions

Measurement Resolutions

Range

Measurement

Val

High Speed ADC High Resolution ADC

0.5 V 0 ≤ |V| ≤ 0.55 V 25 μV 0.5 μV 2 V 0 ≤ |V| ≤ 2.2 V 100 μV 2 μV 5 V 0 ≤ |V| ≤ 5.5 V 250 μV 5 μV

20 V 0 ≤ |V| ≤ 22 V 1 mV 20 μV 40 V 0 ≤ |V| ≤ 44 V 2 mV 40 μV

100 V 0 ≤ |V| ≤ 100 V 5 mV 100 μV

Table 2-12 HRSMU Measurement Current Values and Resolutions

Measurement Resolutions

Speed ADC High Resolution ADC

Range

1 pA

Measurement

Value

0 ≤ |I| ≤ 1.15 pA 100 aA 100 aA

High

10 pA 0 ≤ |I| ≤ 11.5 pA 1 fA

100 pA 0 ≤ |I| ≤ 115 pA 5 fA

1 nA 0 ≤ |I| ≤ 1.15 nA 50 fA 10 fA

1 fA / 400 aA 2 fA / 500 aA

10 nA 0 ≤ |I| ≤ 11.5 nA 500 fA 10 fA

100 nA 0 ≤ |I| ≤ 115 nA 5 pA 100 fA

1 μA 0 ≤ |I| ≤ 1.15 μA 50 pA 1 pA

10 μA 0 ≤ |I| ≤ 11.5 μA 500 pA 10 pA

100 μA 0 ≤ |I| ≤ 115 μA 5 nA 100 pA

1 mA

0 ≤ |I| ≤ 1.15 mA 50 nA 1 nA

10 mA 0 ≤ |I| ≤ 11.5 mA 500 nA 10 nA

100 mA 0 ≤ |I| ≤ 100 mA 5 μA 100 nA

a. This column is applied to the auto ranging or the limited auto ranging. For

fixed ranging, maximum measurement value is Range column value.

b. Available when the E5288A Atto Sense and

Switch Unit (ASU) is used.

2- 22 Agilent B1500 User’s Guide, Edition 5

Page 65

NOTE To connect ASU

The specifications are satisfied and guaranteed for the exclusive combination of the ASU and the HRSMU. So confirm the serial number of the ASU and connect it to the dedicated HRSMU properly.

To connect the ASU, see “To Connect ASU” on page 3-21. To confirm the serial number, see “ASU” on page 4-42.

NOTE Before using 1 pA range

The measurement channel connected to the ASU suppo rts the 1 pA rang e. To use the 1 pA range, set the 1 pA fixed range or the 1 pA limited auto ranging.

Introduction

Measurement Units

The B1500A automatically performs the compens 1 pA range and returns the compensated data. You can use either the pre-stored offset data or the pre-measured offset data.

To measure the offset data, perform the self-calibration before starting the

ement for a DUT. This offset data is temporarily memorized until the

measur B1500A is turned off. See “SMU Calibration” on page 4-33.

ation of the data measured by the

Agilent B1500 User’s Guide, Edition 5 2- 23

Page 66

Introduction Measurement Units

B1520A MFCMU

This section describes typical specification of the multi frequency capacitance measurement unit (MFCMU) for Agilent B1500A. The MFCMU performs the impedance measurement and returns the specified measurement data such as Cp-G.

• Measurement parameters: See Table 2-14. All measurement parameters are supported by Agilent B1500A in the GPIB

te mode. However, Agilent EasyEXPERT software supports the Cp-G,

remo Cp-D, Cs-Rs, and Z-θ measurements only.

• AC signal, output frequency: 1 kHz to 5 MHz Setting resolution: 1 mHz (1 kHz to), 10 mHz (10 kH z to), 0. 1 H z (100 kH z to),

1 Hz (1 MHz to 5 MHz).

• AC signal, output level: 10 mVrms to 250 mVrms, 1 mV resolution

•DC bias: 0 ≤ DC bias ≤ ± 25 V, 1 mV resolution ± 25 V < DC bias ≤ ± 100 V, 5 mV resolution DC bias more than ± 25 V is available when using the SMU CMU unify unit

UU).

• Measurement ranges: See Table 2-13.

Table 2-13 Available Measurement Range

Frequency Measurement range

≤ 200 kHz 50 Ω, 100 Ω,

≤ 2 MHz 50 Ω, 100 Ω, ≤ 5 MHz 50 Ω, 100 Ω, 300 Ω, 1 kΩ, 3 kΩ

2- 24 Agilent B1500 User’s Guide, Edition 5

300 Ω, 1 kΩ, 3 kΩ, 10 kΩ, 30 kΩ, 100 kΩ, 300 kΩ 300 Ω, 1 kΩ, 3 kΩ, 10 kΩ, 30 kΩ

Page 67

Table 2-14 Measurement Parameters

Primary Parameter Secondary Parameter

R (resistance, Ω) X (reactance, Ω)

G (conductance, S) B (susceptance, S)

Z (impedance, Ω) θ (phase, radian)

edance, Ω) θ (phase, degree)

Z (imp

Y (ad

mittance, S) θ (phase, radian)

Y (ad

mittance, S) θ (phase, degree) Cp (parallel capacitance, F) G (conductance, S) Cp (parallel capacitance, F) D (dissipation factor) Cp (parallel capacitance, F) Q (quality factor) Cp (parallel capacitance, F) Rp (parallel resistance, Ω)

Introduction

Measurement Units

Cs (series capacitance, F) Rs (series resistance, Ω) Cs (series capacitance, F) D (dissipation factor)

Cs (series capacitance, F) Q (quality factor) Lp (parallel inductance, H) G (conductance, S) Lp (parallel inductance, H) D (dissipation factor) Lp (parallel inductance, H) Q (quality factor) Lp (parallel inductance, H) Rp (parallel resistance, Ω)

Ls (series inductance, H) Rs (series resistance, Ω) Ls (series inductance, H) D (dissipation factor) Ls (series inductance, H) Q (quality factor)

Agilent B1500 User’s Guide, Edition 5 2- 25

Page 68

Introduction Specifications

Specifications

This chapter lists specifications and supplemental information for Agilent B1500A and its associated modules. The specifications are the standards against which the B1500A and its associated modules are tested. When the B1500A or any of its associated modules are shipped from the factory, they meet the specifications.

The “supplemental” information and “typical” entries in the following

ecifications are not warranted, but provide useful information about the functions

sp and performance of the instruments.

Introduction

Agilent B1500A Semiconductor Device Analyzer, with EasyEXPERT software, makes every user a parametric test expert. The Microsoft Windows based EasyEXPERT interface is familiar, even to new engineers who are inexperienced with parametric measurement instruments. Its unique task-based approach enables the user to focus on their real task-at-hand (device characterization), without having to become a specialist at using the instrument hardware. This new approach is enhanced via a touch screen interface, which makes the instrument as easy to use when racked as when on a benchtop.

The modular 10-slot con figu rat i on helps reduce the cost of test by ensuring that you

rchase only what you need up-front, leaving room to grow as your needs change.

p This flexibility is advantageous for those needing capacitance measurement, as this function is available via a single-slot capacitance measurement unit (CMU). An innovative SMU CMU unify unit (SCUU) is available to eliminate cabling confusion when connecting the SMUs and CMU to your positioner-based wafer probing environment. This greatly improves efficiency and accuracy by resolving cable swapping and measurement compensation issues.

ent performance, with available

The B1500A also possesses impressive meas low-current measurement of 0.1 femtoamp and low-voltage measurement resolu tion of 0.5 microvolts.

2- 26 Agilent B1500 User’s Guide, Edition 5

urem

Page 69

Basic Features

• EasyEXPERT software resident on instrument

• Performs IV and CV measurements

• Ten module slots

• Multiple SMU types available: MPSMU, HPSMU, and HRSMU

Introduction

Specifications

• Multi-frequency capacitance measurement u

• High-resolution, analog-to-digital converter (ADC) available for all SMUs

• High-speed ADC present on each SMU

• 4.2-Amp ground unit

• SMU/AUX path switching available on the Atto Sense and Switch Unit (ASU)

• Supported CMU accessories include SMU CMU unify unit (SCUU) and guard swit

h unit (GSWU)

• Automatic identification of capacitance measur

• GPIB port for instrument control

• Self-test, self-calibration, diagnostics

it (1 kHz to 5 MHz) available

ement accessories (MFCMU)

Agilent B1500 User’s Guide, Edition 5 2- 27

Page 70

Introduction Specifications

Hardware

• “Mainframe”

• “SMU Common Specifications”

• “MPSMU/HRSMU”

• “HPSMU”

• “SMU Supplemental Information”

• “MFCMU”

• “SCUU/GSWU”

• “ASU” See “Using EasyEXPERT” on page 4-1 for the functions available for Agilent

EasyEXPERT software. See Programming Guide for the functions available for the GP

IB remote mode.

pecification Conditions

The measurement and output accuracies are s conditions. And the SMU measurement and output accuracies are specified at the SMU connector terminals when referenced to the Zero Check terminal.

pecified under the following

1. Temperature: 23 ° C ± 5 ° C

2. Humidity: 20 % to 60 %

3. After 40 minutes warm-up

4. Ambient temperature changes less than ± 1 °C after s not applicable for MFCMU

5. Measurement made within one hour af not applicable for MFCMU

6. Calibration period: 1 year

7. MFCMU measurement time: 1 PLC

8. SMU integration time setting (high-resolution ADC must be u sed): 1 PLC (1 nA to 1 A range, voltage range) 20 PLC (100 pA range) 50 PLC (1 pA to 10 pA range)

9. SMU Filter: ON (for SMUs)

10. SMU measurement terminal connect

2- 28 Agilent B1500 User’s Guide, Edition 5

ter self-calibration execution,

ion: Kelvin connection

elf-calibration execution,

Page 71

Mainframe

The B1500A supports eight slots for plug-in modules.

Introduction

Specifications

Module

Slots

occupi

nge of operation

B1510A HPSMU 2 -200 V to 200 V,

-1A

to 1 A

B1511A MPSMU 1 -100 V to 100 V,

-1

00 mA to 100 mA

B1517A HRSMU 1 -100 V to 100 V,

-1

00 mA to 100 mA

E5288A ASU

- -100

V to 100 V,

-1

00 mA to 100 mA

B1520A MFCMU 1 1 kHz to 5 MHz

Measurement

solution

2 μV, 10 fA

0.5 μV, 10 f A

0.5 μV, 1 fA

0.5 μV, 0. 1 fA

0.035 fFrms

a. The E5288A Atto Sense and Switch Unit (ASU) is connected to the

B1517A High Resolution SMU (HRSMU).

b. Dispers ion of measurement values when connecting a DUT 10 pF to the

measurement terminals under the measurement condition of frequency 1 MHz, signal level 250 mVac, and measurement time 1 PLC.

• Maximum Output Power The total power consumption of all modules

cannot exceed 82 W. Under this rule, the B1500A can contain up to 4 dual-slot SMUs (HPSMUs) and 2 single-slot SMUs (MPSMUs and/or HRSMUs); it can contain up to 10 single-slot SMUs; and it can contain any combination of dual-slot and single-slot SMUs between these two extremes. One single-slot MFCMU may take the place of a single-slot SMU in any of these configurations.

• Maximum Voltage between Common and Ground ≤ ± 42 V

• Pulse Measurement

Width 500 μs to 2 s Perio

d 5 ms to 5 s

Period ≥ Width+2 ms (when Width ≤ 100 ms) Period ≥ Width+10 ms (when Width > 100 ms)

Resolution 100 μs

Agilent B1500 User’s Guide, Edition 5 2- 29

Page 72

Introduction Specifications

• Ground Unit (GNDU) The GNDU is furnished with the mainframe.

Output voltage 0 V ± 100 μV Maximum sink current 4.2 A Output terminal / connection Triaxial connector, Kelvin (remote sensing) Load capacitance 1 μF Cable r

esistance: innocent

Terminal

Sense Force

≤ 10 Ω < 1 Ω (Is ≤ 1.6 A)

< 0.7 Ω ( < 0.35 Ω (2.0 A < Is ≤ 4. Is is the current being sunk by the GNDU.

(supplemental information)

Cable resistance

(

upplemental information)

1.6 A < Is ≤ 2.0

A) 2 A)

2- 30 Agilent B1500 User’s Guide, Edition 5

Page 73

Introduction

Specifications

SMU Common Specifications

• Output terminal/connection: Dual triaxial connector, Kelvin (remote sensing)

• Voltage/Current Compliance (Limiting) The SMU can limit output voltage or current to prevent damaging the device

under

test.

Voltage Compliance 0 V to ± 100 V (MPSMU, HRSMU)

0 V to ± 200 V (HPSMU)

Current Compliance ± 10 fA to ± 100 mA (HRSMU with ASU)

± 100 fA to ± 100 mA (HRSMU) ± 1 pA to ± 100 mA (MPSMU) ± 1 pA to ± 1 A (HPSMU)

Compliance Accuracy Same as the current or voltage set accuracy.

About Measurement Accuracy

• RF electromagnetic field and SMU measurement accuracy Voltage and Current measurement accuracy o

electromagnetic field of strength over 3 V/m at frequencies from 80 MHz to 1 GHz. The frequency and degree of affection may vary with the installation

dition of the instrument.

con

• Conducted RF field noise and SMU measurement accuracy Voltage and Current measurement accuracy of

conducted RF field noi se of streng th over 3 Vrms at frequencies from 1 50 kHz t o 80 MHz. The frequency and degree of affection may vary with the installation condition of the instrument.

Agilent B1500 User’s Guide, Edition 5 2- 31

SMUs may be affected by RF

SMUs may be affected by

Page 74

Introduction Specifications

MPSMU/HRSMU

MPSMU: Medium Power Source/Monitor Unit HRSMU: High Resolution Source/Monitor Unit

• Voltage Range, Resolution, and Accuracy (High resolution ADC) See Table 2-15.

• Current Range, Resolution, and Accuracy (High resolution ADC) See Table 2-16. Specified measurement reso

tion is limited by fundamental

lu noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits. Measurem

ents at lower range are affected strongly by vibrations and s hocks. Do

not place the environment of vibrations and shocks during measurements.

• Power Consumption Voltage source mode:

Voltage Range

Power Consumption

0.5 V Ic × 20 W 2 V Ic × 20 W 5 V Ic × 20 W

V Ic × 20 W

20 40

V Ic × 40 W

100 V Ic × 100 W

a. Ic is the current compliance setting.

Current source mode:

oltage Compliance

Power Consumption

Vc ≤ 20 V Io × 20 W

20 V < Vc ≤ 40 V Io × 40 W

V < Vc ≤ 100 V Io × 100 W

a. Vc is the voltage compliance setting. b. Io is the output current.

2- 32 Agilent B1500 User’s Guide, Edition 5

Page 75

Table 2-15 Voltage Range, Resolution, and Accuracy (High Resolution ADC)

Introduction

Specifications

Range

res

Force

olution

Measurement

resolution

±0.5 V 25 μV 0.5 μV ±(

Force accuracy

±(%+mV)a

0.018 + 0.15) ± ±2 V 100 μV 2 μV ±(0.018 + 0.4) ± ±5 V 250 μV 5 μV ±(0.018 + 0.75) ±

±20 V 1 mV 20 μV ±(0.018 + 3) ± ±40 V 2 mV 40 μV ±(0.018 + 6) ±

±100 V 5 mV 100 μV ±(0.018 + 15) ±

Measurement accuracy

±(%+mV)

(0.01 + 0.12) 100 mA (0.01 + 0.14) 100 mA

(0.009 + 0.25) 100 mA

(0.009 + 0.9) 100 mA

(0.01 + 1)

(0.012 + 2.5)

a. ±(% of output/mea su re d va lu e + offset value in mV) b. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo), Vo is the output voltage.

Table 2-16 Current Range, Resolution, and Accuracy (High Resolution ADC)

Range

±1 pA

±10 pA

±100 pA

Force

olution

res

1 fA 0.1 fA

5 fA

Measurement

resolution

0.4 fAb / 1 fA ±(0.46+3E

/ 2 fA ±(0.3+1E

0.5 fA

±1 nA 50 fA 10 fA

±10 nA 500 fA 10 fA

±100 nA 5 pA 100 fA

±1 μA 50 pA 1 pA

±10 μA 500 pA 10 pA

±100 μA 5 nA 100 pA

±1 mA 50 nA 1 nA

±10 mA 500 nA 10 nA

±100 mA 5 μA 100 nA

Force accuracy ±(%+A

-15

±(0.9+15E

-13

±(0.1+3E ±(0.1+3E

-13

-12

±(0.05+3E ±(0.05+3E

±(0.05+3E

±(0.035+15E

±(0.04+15E ±(0.04+15E

±(0.045+15E

) ±(0.9+12E

-14

+Vo×1E +Vo×1E +Vo× 1E +Vo× 1E

-11

+Vo× 1E

-10

+Vo× 1E

-9

+Vo× 1E

-9

+Vo× 1E

-8

+Vo× 1E-9) ±(0.03+6E-8+Vo× 1E-9)

-7

+Vo× 1E-8) ±(0.03+2E-7+Vo× 1E-8)

-6

+Vo× 1E-7) ±(0.04+6E-6+Vo× 1E-7)

+A)

-17

-16

-15

-14

-13

-12

-11

-10

Measurement accuracy

±(%+A

) ±(0.46+15E ) ±(0.3+3E ) ±(0.1+2E ) ±(0.1+1E

) ±(0.05+2E

) ±(0.05+1E

-15

-14

+Vo× 1E

-13

+Vo× 1E

-12

+Vo× 1E

-11

+Vo× 1E

-10

+Vo× 1E

+A)

-15

)

+Vo× 1E

) ±(0.04+2E-9+Vo× 1E

) ±(0.03+3E-9+Vo× 1E

-16

-15

-14

-13

-12

-11

-10

Maximum

-17

) ) ) )

) )

)

current

Maximum

voltage

100 V 100 V 100 V 100 V 100 V 100 V 100 V 100 V 100 V 100 V 100 V

a. ±(% of output/measured value + fixed offset in A + proportional offset in A), Vo is the output voltage in V. b. Available when Agilent E5288A Atto Sense and Switch Unit (ASU) is used. c. Available for HRSMU. d. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io), Io is the output current.

Agilent B1500 User’s Guide, Edition 5 2- 33

Page 76

Introduction Specifications

HPSMU

HPSMU: High Power Source/Monitor Unit

• Voltage Range, Resolution, and Accuracy See Table 2-17.

• Current Range, Resolution, and Accuracy See Table 2-18.

• Power Consumption Voltage source mode:

Voltage Rang e

Power Consumption

2 V Ic × 20 W

V Ic × 20 W

20 40 V Ic × 40 W

0 V Ic × 100 W

0 V Ic × 200 W

a. Ic is the current compliance setting.

Current source mode:

Voltage Compliance

Power Consumption

Vc ≤ 20 V Io × 20 W

20 V < Vc ≤ 40 V Io × 40 W

V < Vc ≤ 100 V Io × 100 W

00 V < Vc ≤ 200 V Io × 200 W

a. Vc is the voltage compliance setting. b. Io is the output current.

2- 34 Agilent B1500 User’s Guide, Edition 5

Page 77

Table 2-17 Voltage Range, Resolution, and Accuracy (High Resolution ADC)

Introduction

Specifications

Range

Force

resolution

Measurement

resolution

±2 V 100 μV 2 μV ±(

Force accuracy

±(%+m

0.018 + 0.4) ±

Measurement accuracy

±(%+mV)

(0.01 + 0.14) 1 A ±20 V 1 mV 20 μV ±(0.018 + 3) ±(0.009 + 0.9) 1 A ±40 V 2 mV 40 μV ±(0.018 + 6) ±(0.01 + 1) 500 mA

±100 V 5 mV 100 μV ±(0.018 + 15) ±(0.012 + 2.5) 125 mA ±200 V 10 mV 200 μV ±(0.018 + 30) ±(0.014 + 2. 8) 50 mA

a. ±(% of output/mea sured value + offset value in mV)

Table 2-18 Current Range, Resolution, and Accuracy (High Resolution ADC)

Range

res

Force

olution

Measurement

resolution

±1 nA 50 fA 10 fA

±10 nA 500 fA 10 fA

±100 nA 5 pA 100 fA

±1 μA 50 pA 1 pA

±10 μA 500 pA 10 pA

Force accuracy ±(%+A+A

±(0.1+3E

±(0.05+3E

-13

+Vo× 1E

-12

+Vo× 1E

-11

-10

±(0.05+3E-9+Vo× 1E

+Vo×1E

-15

-14

-13

-12

-11

) ±(0.1+3E

) ±(0.1+25E

) ±(0.04+2E-9+Vo× 1E

Measurement accuracy

)

±(%+A+A)

) ±(0.05+25E

) ±(0.05+1E

-13

+Vo× 1E

-13

+Vo× 1E

-12

-10

+Vo× 1E

-15

-11

-14

-12

-13

)

Maximum

current

Maximum

voltage

200 V

±100 μA 5 nA 100 pA

±1 mA 50 nA 1 nA

±10 mA 500 nA 10 nA

±100 mA 5 μA 100 nA

±1 A 50 μA 1 μA

-9

±(0.035+15E

±(0.04+15E

+Vo×1E

-8

+Vo× 1E-9) ±(0.03+6E-8+Vo× 1E-9)

±(0.04+15E-7+Vo×1E-8) ±(0.03+2E-7+Vo× 1E-8)

±(0.045+15E

±(0.4+3E

-6

-4

+Vo×1E-6) ±(0.4+15E-5+Vo× 1E-6)

-10

) ±(0.03+3E-9+Vo× 1E

-10

+Vo×1E-7) ±(0.04+6E-6+Vo× 1E-7)

)

a. ±(% of output/measured value + fixed offset in A + proportional offset in A), Vo is the output

voltage in V.

b. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA),

20 V (500 mA < Io ≤ 1 A), Io is the output current.

Agilent B1500 User’s Guide, Edition 5 2- 35

200 V

Page 78

Introduction Specifications

SMU Supplemental Information

• Maximum allowable cable resistance (Kelvin connection) Sense: 10 Ω Force: 10 Ω ( I ≤ 100 mA), 1.5 Ω (100

mA < I )

• Voltage source output resistance (Force line, Non-Kelvin connection)

0.2 Ω (HP

3 Ω (MPSMU, HRSMU)

•

Voltage measurement input resistance: ≥ 10

• Current source output resistance: ≥ 10

SMU)

• Current compliance setting accuracy (for opposite polarity)

Current range Accuracy

1 pA to 10 nA Setting accuracy ± 12 ≥ 100 nA Setting accuracy ± 2.5

of range

% of range

• Maximum capacitive load

Current range Maximum capacitive load

1 pA to 10 nA 1000 pF 100 nA to 10 mA 10 nF ≥ 100 mA 100 μF

• Maximum guard capacitance: 900 pF (HPSMU/MPSMU/HRSMU) 660 pF (HRSMU with ASU)

• Maximum shield capacitance: 5000 pF (HPSMU/MPSMU/HRSMU) 3500 pF (HRSMU with ASU)

2- 36 Agilent B1500 User’s Guide, Edition 5

Page 79

• Maximum guard offset voltage: ± 1 mV (HPSMU)

Introduction

Specifications

± 3 mV (MPSMU/ ± 4.2 mV (HRSMU with ASU, Iout ≤ 10

• Noise characteristics (filter ON) Voltage source: 0.01 % of V range (rms.) Current source: 0.1 % of I range (rms.)

• Overshoot (filter ON) Voltage source: 0.03 % of V range Current source: 1 % of I range

• Range switching transient noise (filter ON) Voltage ranging: 250 mV Current ranging: 70 mV

• Slew rate: 0.2 V/μs

• SMU pulse setting accuracy (fixed measurement range)

Width 0.5 % + 50 μs Period 0.5 % + 100 μs

• Trigger output d elay (pulsed measureme nts) 0 to 32.7 ms with 100 μs r

HRSMU)

0 μA)

solution

Trigger output delay must be less than pulse width.

• Vo ltage Measurement Range, Resolution, an See Table 2-19.

• Current Measurement Range, Resolution, and Accuracy (High speed ADC) See Table 2-20. Specified measurement resolution is limited by fundamental noise limits.

mum displayed resolution is 1 aA at 1 pA range by 6 digits.

Measurements at lower range are affected stro ngly by vibrations and s hocks. Do no

t place the environment of vibrations and shocks during measurements.

Agilent B1500 User’s Guide, Edition 5 2- 37

d Accuracy (High speed ADC)

Page 80

Introduction Specifications

Table 2-19 Voltage Measurement Range, Resolution, and Accuracy (High Speed ADC),

supplemental information

Range

±0.5 V

Measurement

olution

res

25 μV ±(0. 01 + 0.25) ±40 V 2 mV ±(0.015 + 8)

±2 V 100 μV ±(0.01 + 0.7) ±10

±5 V

0 V 1 mV ±(0.01 + 4)

±2

250 μV ±(0.01 + 2)

Measure m ent a ccu ra cy

±(%+mV)

Range

Meas

0 V 5 mV ±(0.02 + 20)

±200 V

a. ±(% of reading + offset value in mV). Averaging is 128 samples in 1 PLC b. Available for MPSMU/HRSMU. c. Available for HPSMU.

Table 2-20 Current Measurement Range, Resolution, an

supplemental information

nge

±1 pA

±10 pA

±100 pA

Measurement

res

olution

0.1 fA

1 fA

5 fA

Measurement accuracy

-15

+Vo× 1E

-14

+Vo× 1E

-15

)

-17

-16

±(

%+A+A)

±(1.8+12E

±(0.5+15E

±(0.3+3E

Range

±10 μA 500 pA

±100 μA 5 nA

)

±1 mA 50 nA

)

Measu

resolution

urement

resolution

Measurement accuracy

±(%+mV)

10 mV ±(0.035 + 40)

d Accuracy (High Speed ADC),

rement

Measurement accuracy

±(%+A+A)

±(0.04+2E-9+Vo× 1E

±(0.03+2E-8+Vo× 1E

±(0.03+2E-7+Vo× 1E-9)

-11

-10

)

±1 nA 50 fA

±10 nA 500 fA

±100 nA 5 pA

±1 μA 50 pA

.1+3E

±(0

±(0.1+2E

0.05+2E

±(

0.05+2E

±(

-13

+Vo× 1E

-12

+Vo× 1E

-11

-10

+Vo× 1E

-15

)

-14

)

-13

) ±1 A

-12

)

±10 mA 500 nA

±100 mA 5 μA

50 μA

a. ±(% of reading + fixed offset in A + proportional offset in A), Vo is the output volta ge in V. b. Availa bl e when Agil ent E52 88A Atto Sen se and Sw itch Uni t (ASU) is used . c. Available for HRSMU. d. Available for HPSMU.

2- 38 Agilent B1500 User’s Guide, Edition 5

±(0.03+2E-6+Vo× 1E-8)

±(0.04+2E-5+Vo× 1E-7)

±(0.4+3E-4+Vo× 1E-6)

Page 81

Introduction

Specifications

MFCMU

MFCMU: Multi Frequency Capacitance Measurement Unit

Measurement Functions.

• Measurement parameters: Cp-G, Cp-D, Cp-Q, Cp-Rs, Cs-Rs, Cs-D, Cs-Q, Lp-G, Lp-D, Lp-Q, Lp-Rs, Ls-Rs, Ls-D, Ls-Q, R-X, G-B, Z-θ, Y-θ

• Ranging: Auto and fixed

• Measurement terminal: Four-terminal pair configu connectors

• Cable length: 1.5 m or 3 m, automatic identification of accessories Turn the B1500A off before connecting the cable.

ration, four BNC (female)

Test Signal.

• Frequency Range: 1 kHz to 5 MHz Minimum resolution: 1 mHz Accuracy: ± 0.008 %

• Signal output level Range: 10 mVrms to 250 mVrms Resolution: 1 mVrms Accuracy (open load): ±(1

0.0 % + 1 mVrms) at four-terminal pair port of MFCMU

±(15.0 % + 1 mVrms) at measurement port of MFCMU cable (1.5 m or 3.0 m)

•

Output imp edance: 50 Ω, t

• Signal level monitor

ypical

Voltage range: Same as the voltage signal level setting range. Voltage monitor accuracy (open load): ±(1

0.0 % of reading + 1 mVrms) at four-terminal pair port of MFCMU

±(15.0 % of reading + 1 mVrms) at measurement port of MFCMU cable (1.5 m o

r 3.0 m)

Agilent B1500 User’s Guide, Edition 5 2- 39

Page 82

Introduction Specifications

DC Bias Function.

• DC voltage bias Range: 0 to ± 25 V R

esolution: 1 mV

Accuracy (open load): ±(0.5 % MFCMU measurement port or the MFCMU 1.5 m/3 m cable end

Maximum DC bias current (supplemental information):

Impedance measurement range Maximum DC bias current

50 Ω 10 mA 100 Ω 10 mA 300 Ω 10 mA

1 kΩ 1 mA

3 kΩ 1 mA 10 kΩ 100 μA 30 kΩ 100 μA

100 kΩ 10 μA 300 kΩ 10 μA

• Output impedance 50 Ω, typi

•DC bias monitor

+ 5.0 mV) at the High and Low terminals of the

cal

Range: Same as the voltage signal level setting range. Accuracy (open load): ±(0.2

terminals of the MFCMU measurement port or the MFCMU 1.5 m/3 m cable end

reading + 10 mV) at the High and Low

% of

Sweep Characteristics.

• Available sweep parameters: Oscillator level, DC bias voltage, frequency

• Sweep type: Linear, Log

• Sweep mode: Single, Double

2- 40 Agilent B1500 User’s Guide, Edition 5

Page 83

Introduction

Specifications

• Sweep direction: Up, Down

• Number of measurement points: maximum 1001

Measurement Accuracy.

The following parameters are used to express the impedance measur ement accuracy at four-terminal pair port of MFCMU and measurement port of MFCMU cable.

Zx: Impedance measurement value (Ω) Dx: Measurement value of D E = E

’ + (ZS’ / |Zx| + YO’× |Zx| ) × 100 (%)

’ = EPL + E

’ = YOL + Y

’ = ZSL + Z

For the parameter value, see Table 2-21 to Table 2-23. Calculation example of the measurement accuracy is shown in Table 2-24.

POSC

OSC

+ EP (%)

+ YO (S)

+ ZS (Ω)

• |Z| accuracy: ± E (%

• θ accuracy: ± E/

)

100 (radian)

• C accuracy:

± E (%) at Dx ≤ 0.1 ± E

× (1+Dx

2)1/2

(%) at Dx > 0.1

• D accuracy: ± E/100 at Dx ≤ 0.

± E× (1+Dx)/100 at 0.1 < D x ≤ 1

•

G accuracy:

± E/Dx (%) at Dx ≤ 0.1 ± E

× (1+Dx

2)1/2

/Dx (%) at Dx > 0.1

Agilent B1500 User’s Guide, Edition 5 2- 41

Page 84

Introduction Specifications

Table 2-21 Parameters E

Oscillator level

Vosc mV

125 < Vosc ≤ 250 0.03×(250/Vosc-1) 5× (250/Vosc-1)

< Vosc ≤ 125 0.03× (125/Vosc-1) 5× (125/Vosc-1)

< Vosc ≤ 64 0.03× (64/Vosc-1) 5× (64/Vosc-1)

sc ≤ 32 0.03× (32/Vosc-1) 5× (64/Vosc-1)

Vo sc is oscillator level in mV.

Table 2-22 Parameters E

Cable length

1.5 m 0.02+3× f/100 75 3 m 0.02+5×f/100 15

f is frequency in MHz. If measurement cable is extended, open compensation, short compensation, and load compensation must be performed.

Table 2-23 Parameters Y

, Z

POSC

, YOL, Z

, YO, EP, Z

OSC

% Z

POSC

% YOL nS ZSL mΩ

0× f/100 5.0

00× f/100 5.0

OSC

mΩ

nS YO nS EP % ZS mΩ

Frequency f Hz

1k ≤ f ≤ 200k 1×(125/Vosc-0.

200k < f ≤ 1M 2× (125/Vosc-0.

1M < f ≤ 2M 2× (125/Vosc-0.

2M < f 20×(125/Vosc-0.

OSC

5) 1.5 0.095 5.0

5) 3.0 0.095 5.0

5) 3.0 0.28 5.0

5) 30.0 0.28 5.0

Vo sc is oscillator level in mV.

2- 42 Agilent B1500 User’s Guide, Edition 5

Page 85

Table 2-24 Example of Calculated C/G Measurement Accuracy

Introduction

Specifications

Frequency

5 MHz 10 pF ≤ 31 μS ± 0

Hz 10 pF ≤ 6 μS ± 0.11 % ± 68 nS

1 M

100 kHz 10 pF ≤ 628 nS ± 0.18 % ± 11 nS

10 kHz 100 pF ≤ 628 nS ± 0.18 % ± 11 nS

Measured

citance

Capa

0 pF ≤ 314 μS ± 0.29 % ± 9

1 nF ≤ 3 mS ± 0.32 % ± 99 μS

0 pF ≤ 63 μS ± 0.10 % ± 620 nS

F ≤ 628 μS ± 0.10 % ± 7

1 n

0 pF ≤ 6 μS ± 0.11 % ± 66 nS

F ≤ 63 μS ± 0.10 % ± 619 nS

1 n

nF ≤ 628 μS ± 0.10 % ± 7

F ≤ 6 μS ± 0.11 % ± 66 n S

1 n

nF ≤ 63 μS ± 0.10 % ± 619 nS

0 nF ≤ 628 μS

Measured

Conductance

C Accuracy G Accuracy

.32 % ± 990 nS

± 0.10 % ± 7 μS

μS

1 kHz 100 pF ≤ 63 nS ± 0.92 % ± 6 nS

F ≤ 628 nS ± 0.18 % ± 11 nS

1 n

nF ≤ 6 μS ± 0.11 % ± 66 nS

0 nF ≤ 63 μS ± 0.10 % ± 619 nS

The capacitance and conductance measurement accuracy following conditions:

D ≤ 0.1 Test signal level: 3 0 mVrms Cable length: 0 m

Agilent B1500 User’s Guide, Edition 5 2- 43

is specified under the

Page 86

Introduction Specifications

SCUU/GSWU

SCUU: SMU CMU Unify Unit GSWU: Guard Switch Unit The SCUU switches either two SMUs or CMU to the output port. The MPSMU and

SMU are supported as a module. The SCUU has DC bias adapter funct ion by the SMU as DC bias source. Also error compensation function is supported. To connect the SCUU, the dedicated cable assembly is supplied. I t can help to co nnect corr ectly and easily, and it eliminates cabling mistake. Turn the B1500A off before connecting the SCUU.

The GSWU switches open when using SMUs and close when using CMU for the

ard return path automatically depending on which the SCUU output is used for

g the capacitance measurement or not.

SCUU.

• Inputs

Four triaxial ports: for Force1, Sense1, Force2, and Sense2 Four BNC ports: for MFCMU One SCUU control port

•Outputs

Four triaxial ports: for Force1/CMUH One GSWU control port Three LEDs, SMU/CMU output status indicator

• Docking mode

Direct and indirect mode

Sense1, Force2/CMUL, and Sense2

GSWU.

• Input

One control port from SCUU Mini pin plug port: 2 ports (to Guard1, to Guard2)

•Output

One LED, connection status indicator

2- 44 Agilent B1500 User’s Guide, Edition 5

Page 87

SCUU Supplemental Information.

•SMU Path Offset current: < 20 fA

Introduction

Specifications

Offset voltage: < 100 μV at

300 sec Closed channel residual resistance: < 200 mΩ Channel isolation resistance: > 10

•CMU Path

• Test Signal

• Signal output level additional errors (CMU bias, open load): ± 2 % (

direct docking) ± 7 % (indirect docking) Signal output level additional errors (SMU bias, open load):

•

± 5 % (direct do cking, ≥ 10 kHz) ± 10 % (indirect docking, ≥ 10 kHz)

ote: For the signal level output less than 10 kHz, see Figure 2-6.

• Output impedance: 50 Ω, t

ypical

• Signal level monitor additional errors (open load):

± 2 % (when CMU bias), direc t docking ± 5 % (when SMU bias), dire ct docking ± 7 % (when CMU bias), indir ect docking ± 10 % (when SMU bias), indirect docking

•

DC Bias Function For the reference point of DC bias voltage, s

ee the specifications of the bias

source. Zero Check terminal for SMU, CMUL terminal for MFCMU.

• DC voltage bias (when CMU bias) Range: 0 to ± 25 V Res

olution: 1 mV

Additional errors (for CMU bias): ± 100 μV

(open load)

Agilent B1500 User’s Guide, Edition 5 2- 45

Page 88

Introduction Specifications

• DC voltage bias (when SMU bias) Range: 0 to ± 100 Resolution: 5 mV Additional errors (for SMU voltage output accuracy): ± 100 μV (o

load)

• DC bias monitor additional errors (open load):

± 20 mV, direct docking ± 30 mV, indirect docking

•

Output impedance: 50 Ω (typical) D

C output resistance: 50 Ω (when

• Measurement Accuracy Impedance measurement error is given by adding the following additional

erro

r Ee to the B1520A measurement error.

Ee = ± (A + Zs

• Zx: Impedance measurement value (Ω)

• A: 0.05 % (direct docking) or 0.1 % (indirect docking)

• Zs: 500 × (1 + f )

CMU bias), 130 Ω (when SMU bias)

/ |Zx| + Yo× |Zx| ) × 100 (%)

mΩ (f: frequency in MHz)

pen

•Yo: 1 + f × 10 nS When the measurement terminals are

cable, the measurement accuracy is applied to the data measured after performing the open/short/load correction at the DUT side cable end.

2- 46 Agilent B1500 User’s Guide, Edition 5

(direct docking, × 2 for indirect docking)

extended by using the measurement

Page 89

Specifications

























  

㱍

Figure 2-6 Signal level output (SMU bias, < 10 kHz, supplemental information)

6LJQDOOHYHORXWSXW9 6HWWLQJYDOXH9[

Introduction

)UHTXHQF\+]

Agilent B1500 User’s Guide, Edition 5 2- 47

Page 90

Introduction Specifications

ASU

ASU: Atto Sense and Switch Unit

AUX Path Specifications.

• Maximum Voltage 100 V (AUX input to AUX common) 100 V (AUX input to circuit common) 42 V (AUX common to circuit common)

• Maximum Current

0.5 A (AUX input to Force output)

ASU Supplemental Information.

• Band width (at -3 dB): < 30 MHz (AUX port)

NOTE Connect ASU to dedicated HRSMU

The specifications are satisfied and guaranteed for the exclusive combination of the ASU and the HRSMU. So confirm the serial number of the ASU and connect it to the dedicated HRSMU properly.

NOTE Connection path control

Disable source output of the SMU and other instrument connected to the ASU inputs before controlling the ASU connection path.

2- 48 Agilent B1500 User’s Guide, Edition 5

Page 91

Agilent EasyEXPERT Software

Function

• Operation mode

• Application test mode

• Classic test mode

• Key functions

Introduction

Specifications

• Categorized and predefin

• Device definition

• Measurement parameter settings

• Save/recall My Favorite setups

• Define/customize application library

• Execute measurement (single/repeat)

• Save/recall measurement data and settings

• Test result da ta m anagement

• Import/export device definition, measurement settings, my favorite setup, meas

ement data, and application library

• Graph plot display/analysis/printing

• Workspace management

• Self-test, self calibration, diagnostics

application library

Application Library

Sample test definitions for the following applications. They subject to change without notice.

Generic, Structure, CMOS, Bipolar, Memory, Mixed Signal Device, Analog RF, Optical, TFT

, Discrete, Reliability, Nanotechnology

Measurement Mode Details

Agilent B1500A supports the following measurement modes:

• Staircase Sweep

Agilent B1500 User’s Guide, Edition 5 2- 49

Page 92

Introduction Specifications

• Multi-Channel Sweep (EasyEXPERT supports VAR1 and VAR1’)

• Pulsed Sweep

• Staircase Sweep with Pulsed Bias

• Sampling

• C-V Sweep Each SMU can sweep using VAR1 (primary sweep), VAR 2 (secondary sweep), or

R1’ (synchronous sweep).

•VAR1 Primary sweep controls the staircase (DC o

•VAR2 Subordinate linear staircase or linear puls

completed, the VAR2 unit output value is changed. Maximum nu mber of steps: 128

•VAR1’ Staircase or pulse sweep synchronized with the VAR1 sweep. Sweep is made

with a u VAR 1 ’ = a × VAR “a” is the user specified ratio, and “b” i

•CONST A source unit can be set as a constant vo ltage or cu rrent sourc e depend ing on the

er specified ratio and offset values.

1 + b

it.

r pulsed) voltage or current sweep.

ed sweep. After primary sweep is

s the user specified offset value.

Staircase Sweep Measurement Mode.

Forces swept voltage or current, and measures DC voltage or current. One channel can sweep current or voltage while up to ten channels can measure current or voltage. A second channel can be synchronized with the primary sweep channel as an additional voltage or current sweep source.

Number of steps: 1 to 1001 Sweep type: Linear or logarithmic Sweep direction: Single or double sweep Hold time: 0 to 655.35 s, 10 ms resolution

2- 50 Agilent B1500 User’s Guide, Edition 5

Page 93

Introduction

Specifications

Delay time: 0 to 65.535 s, 100 μs resolution

Pulsed Sweep Measurement Mode.

Forces pulsed swept voltage or current, and measures DC voltage or current. A second channel can be programmed to output a staircase sweep voltage or current synchronized with the pulsed sweep output.

Staircase Sweep with Pulsed Bias Measurement Mode.

Forces swept voltage or current, and measures DC voltage or current. A second channel can be programmed to output a pulsed bias voltage or current. A third channel can be synchronized with the primary sweep channel as an additional voltage or current sweep source.

Sampling (Time Domain) Measurement Mode.

Displays the time sampled voltage/current data (by SMU) versus time. Sampling points: 1 to 10,001 Sampling mode: linear Sampling interval range: 2 ms to 65.535 s, 1 ms resolution Hold time, initial wait time: 0 s to 655.35 s, 10 ms resolution Measurement time resolution: 100 μs

Search Measurement Mode.

Forces and measures voltage or current by using linear search method or binary search method.

Timestamp.

The B1500A supports a time stamp function utilizing an internal quartz clock. Resolution: 100 μs

Other Measurement Characteristics.

• Measurement Control: Single, repeat, and stop

• SMU Setting Capabilities: Limited auto ranging, voltage/current compliance, power compliance, automatic

sweep

Agilent B1500 User’s Guide, Edition 5 2- 51

ort functions, self-test, and self-calibration

Page 94

Introduction Specifications

Arithmetic and Analysis Functions

• User Functions Up to 20 user-defined functions can be defined using arithmetic expressions. Measured data and pre-defined variables can be used in the computation. The

results can

• Arithmetic Operators +, -, *, /, ^, ABS (absolute value), AT (arc tangent), AVG (averaging), COND

(con (integration), LGT (logarithm, base 10), LOG (logarithm, base e), MAVG (moving average), MAX, MIN, SQRT, trigonometric function, inverse trigonometric function, and so on

• Physical Constants Keyboard constants are stored in memory as follows:

• q: Electron charge, 1.602177E-1 9 C

• k: Boltzman’s constant, 1.380658E-23

be displayed on the LCD.

ditional evaluation), DELTA, DIFF (differential), EXP (exponent), INTEG

• ε (e): Dielectric constant of vacuum, 8.854188E-12

•

Engineering Units The following unit symbols are also available on the keyboard: a (10

f (10 T (10

-15 12

-12

), p (10 ) , P (1015)

), n (10-9), u or μ (10-6), m (10-3), k (103), M (106), G (109),

-18

Analysis Capabilities

• Overlay Graph Comparison A graphics plot can be stored and overlaid.

• Scale Auto scale and zoom

•Marker Marker to min/max, interpolation, d

•Cursor Direct cursor

•Line

2- 52 Agilent B1500 User’s Guide, Edition 5

rect marker, and marker skip

Page 95

Two lines, normal mode, grad mode, tangent mode, and regression mode

• Auto Analysis Function

Introduction

Specifications

On a graphics plot, the markers and lines can be auto auto analysis setup. Parameters can be automatically determined using automatic analysis, user function, and read out functions.

• Data Variable Display Up to 20 user-defined parameters can be displayed on the graphics screen.

• Analysis Functions Up to 20 user-defined analysis functions can be defined using arithmetic

sions.

pres

Measured data, pre-defined variables, and read out functions can be used in the comput

• Read Out Functions The read out functions are built-in functions for reading various values related to

the marker

ation. The results can be displayed on the LCD.

, cursor, or line.

matically located using the

Graph Plot

• Display Mode Data display window can be printed. Only X-Y graph can be printed.

• Graph Plot File Graph plot can be stored as image data to clip board or mass storage device. File type: bmp, gif, png, emf

Output

• Display Mode Graph display, list display, and parameter display

• X-Y Graph Display X-axis and up to eight Y-axis. Linear an

• List Display Measurement data and calculated user function data are listed in conjunction

with V

AR1 step number or time domain sampling step number. Up to 20 data

sets can be displayed.

Agilent B1500 User’s Guide, Edition 5 2- 53

g scale. Real time graph plotting.

d lo

Page 96

Introduction Specifications

Other Functions

• Import/Export files File type: Agilent EasyEXPERT format, XML-SS format, CSV format

• Data Storage Hard disk drive, DVD-ROM/CD-ROM/CD-RW drive

• Interfaces GPIB port for instrument control, Interlock port, USB port (USB 2.0, front 2,

rea

2), LAN interface (100BASE-TX/10BASE-T), Trigger in/out, Generic

purpose digital I/O

• Trigger I/O Only for GPIB remo te mode. Trigger in/ou t synchronizatio n pulses bef ore and after setting and measuring DC

ltage and current. Arbitrary trigger events can be masked or activated

independently.

Attached Software

A VXIplug&play d river for the B1500A is supplied . Supported operating systems: Microsoft Windows 95/NT/2000 Professional/XP Professional

2- 54 Agilent B1500 User’s Guide, Edition 5

Page 97

General Specifications

• Temperature Range

Operating +5 °C to +40 ° C

Introduction

Specifications

torage -20 ° C to

•Humidity

Operating 20 % to 70 %RH, non-condensing Storage 20 % to 90 %RH, at +40 ° C, n

• Altitude

Operating 0 to 2,000 m (6,561 ft.) Storage 0 to 4,600 m (15,092 ft.)

• Power Requirement: 90 to 264 V, 47 to 63 Hz

• Maximum Volt-Amps (VA): 900 VA

• Regulatory Compliance EMC IEC 61326-1:+A1 / EN 61326-1:+A1

AS/NZS 2064.1

Safety CSA C22.2 No.1010.1-1992

IEC 61010-1:2001 / EN 61010-1:2001 UL 61010B-1

• Certification: CE, CSA, NRTL/C, C-Tick

•Dimensions

+60 ° C

on-

condensing

B1500A: 420 mm (W) × 330 N1301A-100 SMU CMU Unify Unit:

148 mm (W) × 75 mm ( N1301A-200 Guard Switch Unit:

33.2 mm (W) × 41.5

•Weight B1500A (empty) 20 kg, B1510A 2.0 kg, B1511A 1.0 kg, B1517A 1.2 kg,

E1520

A 1.5 kg, E5288A 0.5 kg, N1301A-100 0.8 kg, N1301A-200 0.1 kg

Agilent B1500 User’s Guide, Edition 5 2- 55

mm (H) × 575 mm (D)

H) × 70 mm (D)

mm (H) × 32.8 mm (D)

Page 98

Introduction Accessories and Options

Accessories and Options

Agilent B1500A is furnished with the following accessories.

• Manual CD-ROM, 1 ea.

• Software CD-ROM, 1 ea.

• Desktop EasyEXPERT (CD-ROM), 1 ea.

• Power Cable, 1 ea.

• Label, SMU Number, 1 sheet

Table 2-25 lists the options and the available accessories for Agilent B1500A.

2- 56 Agilent B1500 User’s Guide, Edition 5

Page 99

Table 2-25 Options and Accessories

Introduction

Accessories and Options

Model

Number

B1500A Semiconductor Device Analyzer

B1510A B1511A Medium Power Source/Monitor Unit module (MPSMU) B1517A High Resolution Source/Monitor Unit module (HRSMU) B1520A Multi Frequency Capacitance Measurement Unit module (MFCMU) B1540A Agilent EasyEXPERT software with application libraries

E5288A Atto Sense and Switch Unit (ASU)

tion Item Description

B1500A-050 50 Hz power line frequency B1500A-060 60 Hz power line frequency

B1500A-A6J ANSI Z540 compliant calibration

B1500A-UK6 Commercial cal. certificate w/ test data

B1500A-ABA Paper manual se t, English

B1500A-ABJ Paper manual set, Japanese

High Power Source/Monitor Unit module (HPSMU)

B1540A-001 EasyEXPERT software with general application libraries

E5288A-001 Add triaxial and D-sub cables, 1.5 m E5288A-002 Add triaxial and D-sub cables, 3 m

N1253A Digital I/O accessories

N1253A-100 Digital I/O T- cable N1253A-200 Digital I/O BNC Box

N1254A Accessories

N1254A-100 GNDU to Kelvin Adapter N1254A-107 Triax(m)-Triax(f) Adapter N1254A-108 AS U Magnetic Stand

N1300A CMU cable

N1300A-001 1.5 m length N1300A-002 3 m length

Agilent B1500 User’s Guide, Edition 5 2- 57

Page 100

Introduction Accessories and Options

Model

mber

N1301A CMU accessories

16435A Interlock cable adapter (B1500 type to BNC)

16442B Test fixture

ption Item Description

N1301A-100 S M U CMU Un ify Unit (SCUU) N1301A-102 S CUU cable, 3 m N1301A-110 SCUU magnetic stand N1301A-200 Guard Switch Unit (GSWU) N1301A-201 GSWU cable, 1.5 m N1301A-202 GSWU cable, 3 m

16442B-010 Add triaxial cables, 1.5 m, 4 ea. 16442B-011 Add triaxial cables, 3 m, 4 ea. 16442B-800 Ext ra blank tef l on board 16442B-801 Universal socket module, 0.1 inch pitch, with 10 pins 16442B-802 Universal socket module, 0.075 inch pitch, with 10 pins 16442B-803 Universal socket module, 0.05 inch pitch, with 10 pins 16442B-810 Extra pin set (for universal socket module, 10 pins.) 16442B-811 Extra wire set (mini banana to pin plug, 6 ea.) 16442B-812 Extra wire set (pin plug to pin plug, 6 ea.) 16442B-813 Extra wire set (mini banana to mini clip, 6 ea.) 16442B-814 Extra wire set (mini banana to mini banana, 6 ea.) 16442B-821 Socket module, 4-pin TO package 16442B-822 Socket module, 18-pin DIP package 16442B-823 Extra socket module, 2 16442B-890 Extra accessory case

16444A B1500 accessories

16444A-001 USB keyboard 16444A-002 USB mouse 16444A-003 Stylus pen

2- 58 Agilent B1500 User’s Guide, Edition 5

-pin DIP package

Agilent B1500A Users Guide

Specifications and Main Features

Frequently Asked Questions

User Manual

1 Getting Started

2 Introduction

Overview

Agilent EasyEXPERT Software

Front View

Rear View

Measurement Units

GNDU - Ground Unit

About SMU

B1510A HPSMU

B1511A MPSMU

B1517A HRSMU

B1520A MFCMU

Specifications

Introduction

Hardware

Agilent EasyEXPERT Software

General Specifications

Accessories and Options