Agilent B1500A Programmers Guide

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Agilent B1500A

Semiconductor Device Analyzer

Programming Guide

Agilent Technologies

Notices

No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws.

Manual Part Number

B1500-90012

Edition

Edition 1, August 2005 Edition 2, April 2006 Edition 3, June 2007

Agilent Technologies, Inc. 5301 Stevens Creek Blvd Santa Clara, CA 95051 USA

Warranty

The material contained in this document is provided “as is,” and is subject to being changed, without notice, in future editions. Further, to the maximum extent permitted by applicable law, Agilent disclaims all warranties, either express or implied, with regard to this manual and any information contained herein, including but not limited to the implied warranties of merchantability and fitness for a particular purpose. Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing, use, or performance of this document or of any information contained herein. Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms, the warranty terms in the separate agreement shall control.

Tec hn ol og y L i c e ns es

The hardware and/or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license.

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will receive no greater than Limited Rights as defined in FAR 52.227-14 (June 1987) or DFAR

252.227-7015 (b)(2) (November 1995), as applicable in any technical data.

Restricted Rights Legend

If software is for use in the performance of a U.S. Government prime contract or subcontract, Software is delivered and licensed as “Commercial computer software” as defined in DFAR 252.227-7014 (June 1995), or as a “commercial item” as defined in FAR

2.101(a) or as “Restricted computer software” as defined in FAR 52.227-19 (June

1987) or any equivalent agency regulation or contract clause. Use, duplication or disclosure of Software is subject to Agilent Technologies’ standard commercial license terms, and non-DOD Departments and Agencies of the U.S. Government will receive no greater than Restricted Rights as

In This Manual

This manual provides the information to control the Agilent B1500 via GPIB interface using an external computer, and consists of the following chapters:

•“Programming Basics” This chapter provides basic information to control the Agilent B1500.

• “Remote Mode Functions” This chapter explains the functions of the Agilent B1500 in the remote mode.

• “Programming Examples” This chapter lists the GPIB commands and explains the programming examples

for each measurement mode or function. The examples have been written in the Microsoft Visual Basic .NET or the HP BASIC language.

• “Command Reference” This chapter provides the complete reference of the GPIB commands of the

Agilent B1500.

• “Error Messages” This chapter lists the error codes, and explains them.

Microsoft, Windows, and Visual Basic are registered trademarks of Microsoft Corporation. All other trademarks are the property of their respective owners.

Contents

1. Programming Basics

Before Starting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

About Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Getting Started . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

To Reset the Agilent B1500 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

To Read Query Response . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

To Perform Self-Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

To Perform Self-Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

To Perform Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

To Enable Source/Measurement Channels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

To Select the Measurement Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

To Force Voltage/Current . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

To Set the SMU Integration Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

To Set the Measurement Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12

To Pause Command Execution. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

To Start Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

To Force 0 V. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

To Disable Source/Measurement Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

To Control ASU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14

To Control SCUU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-15

To Read Error Code/Message. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16

To Read Spot Measurement Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16

To Read Sweep Measurement Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17

To Read Time Stamp Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18

To Perform High Speed Spot Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19

Command Input Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20

Header. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20

Numeric Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-21

Terminator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22

Special Terminator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22

Agilent B1500 Programming Guide, Edition 3

Contents

Separator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22

Data Output Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23

Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23

ASCII Data Output Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-24

Binary Data Output Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-34

GPIB Interface Capability . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1- 52

Status Byte . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-53

Programming Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-55

To Confirm the Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-56

To Confirm the Command Completion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-56

To Disable the Auto Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-56

To Optimize the Measurement Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-57

To Optimize the Integration Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-57

To Disable the ADC Zero Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-57

To Optimize the Source/Measurement Wait Time. . . . . . . . . . . . . . . . . . . . . . 1-58

To Use the Internal Program Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-59

To Get Time Data with the Best Resolution . . . . . . . . . . . . . . . . . . . . . . . . . . 1-59

To Use Sweep Source as a Constant Source . . . . . . . . . . . . . . . . . . . . . . . . . . 1-59

To Start Measurements Simultaneously. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-59

To Perform Quasi-Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-60

To Interrupt Command Execution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-60

To Use Programs for Agilent 4142B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-61

To Use Programs for Agilent 4155/4156. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-62

To Use Programs for Agilent E5260/E5270 . . . . . . . . . . . . . . . . . . . . . . . . . . 1-64

2. Remote Mode Functions

Measurement Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

Pulsed Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

Staircase Sweep Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Agilent B1500 Programming Guide, Edition 3

Contents

Multi Channel Sweep Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

Pulsed Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

Staircase Sweep with Pulsed Bias Measurements . . . . . . . . . . . . . . . . . . . . . . 2-12

Quasi-Pulsed Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15

Binary Search Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

Linear Search Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19

Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21

Quasi-static CV Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23

Spot C Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26

Pulsed Spot C Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27

CV (DC bias) Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29

Pulsed Sweep CV Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-31

C-f Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-33

CV (AC level) Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-35

C-t Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-37

Synchronous Output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-39

Automatic Abort Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-41

Parallel Measurement Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-43

To Set Measurement Channels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-43

To Enable Parallel Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-43

Program Memory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-44

Using Program Memory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-44

Digital I/O Port. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-47

Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-48

Digital I/O Internal Circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-49

Trigger Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-50

Trigger Input. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-51

Trigger Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-53

Using Trigger Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-55

Agilent B1500 Programming Guide, Edition 3

Contents

Trig In/Out Internal Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-61

Initial Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-62

3. Programming Examples

Programming Basics for Visual Basic .NET Users. . . . . . . . . . . . . . . . . . . . . . . . 3-4

To Create Your Project Template. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

To Create Measurement Program. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

High-Speed Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

Pulsed Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

Staircase Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18

Pulsed Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28

Staircase Sweep with Pulsed Bias Measurements . . . . . . . . . . . . . . . . . . . . . . . 3-32

Quasi Pulsed Spot Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36

Linear Search Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39

Binary Search Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-42

Multi Channel Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-45

Sampling Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-49

Quasi-static CV Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-54

High-Speed Spot C Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-59

Spot C Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-65

CV (DC Bias) Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-69

Pulsed Spot C Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-74

Pulsed Sweep CV Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-78

Agilent B1500 Programming Guide, Edition 3

Contents

CV (AC Level) Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-83

C-f Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-88

C-t Sampling Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-93

Using Program Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-98

Tips to use program memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-99

Using Trigger Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-104

Reading Time Stamp Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-116

Reading Binary Output Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-117

Using Programs for 4142B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-120

Using Programs for 4155B/4156B/4155C/4156C. . . . . . . . . . . . . . . . . . . . . . . 3-122

4. Command Reference

Command Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Command Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11

Command Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22

AAD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23

AB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24

ACH . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26

ACT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27

ACV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28

ADJ. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-28

ADJ?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-29

AIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30

AV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-32

AZ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-34

BC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-34

BDM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-35

BDT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-35

Agilent B1500 Programming Guide, Edition 3

Contents

BDV. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-36

BGI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-37

BGV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-39

BSI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-41

BSM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-42

BSSI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-45

BSSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-46

BST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-47

BSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-48

BSVM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-49

CA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-50

*CAL? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-51

CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-52

CLCORR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-53

CM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-53

CMM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-54

CN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-55

CORR?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-57

CORRDT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-58

CORRDT? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-59

CORRL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-60

CORRL?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-60

CORRST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-61

CORRST? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-61

DCORR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-62

DCORR? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-63

DCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-64

DI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-65

DIAG? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-66

DO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-67

DV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-68

DZ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-69

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EMG? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-70

END . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-70

ERC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-71

ERM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-72

ERR? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-73

ERS?. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-74

FC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-75

FL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-75

FMT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-76

*IDN? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-78

IMP. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-79

IN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-80

LGI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-81

LGV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-82

LMN. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-83

LOP? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-84

*LRN? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-85

LSI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-91

LSM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-92

LSSI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-93

LSSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-94

LST? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-95

LSTM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-97

LSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-98

LSVM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-99

MCC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-99

MDCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-100

MI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-101

ML . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-102

MM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-103

MSC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-105

MT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-106

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MTDCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-108

MV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-109

NUB? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-110

*OPC? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-110

OS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-111

OSX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-111

PA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-112

PAD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-113

PAX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-114

PDCV. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-115

PI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-116

PT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-117

PTDCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-118

PV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-119

PWDCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-120

PWI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-121

PWV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-122

QSC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-123

QSL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-123

QSM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-124

QSO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-125

QSR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-126

QST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-127

QSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-129

QSZ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-131

RC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-132

RCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-133

RI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-134

RM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-135

*RST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-136

RU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-136

RV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-137

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RZ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-138

SAL. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-138

SAP. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-139

SAR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-140

SCR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-140

*SRE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-141

*SRE? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-142

SSL. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-143

SSP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-144

SSR. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-146

ST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-147

*STB? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-148

TACV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-149

TC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-150

TDCV. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-151

TDI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-152

TDV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-153

TGMO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-154

TGP. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-155

TGPC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-157

TGSI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-158

TGSO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-159

TGXO. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-159

TI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-160

TM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-161

TMACV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-162

TMDCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-163

TSC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-164

TSQ. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-165

TSR. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-165

*TST? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-166

TTC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-168

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TTI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-169

TTV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-171

TV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-172

UNT? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-172

VAR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-173

VAR? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-173

WACV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-174

WAT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-175

WDCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-177

WFC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-178

WI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-179

WM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-181

WMACV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-182

WMDCV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-183

WMFC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-184

WNU? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-185

WNX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-186

WS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-189

WSI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-190

WSV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-192

WSX. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-194

WT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-195

WTACV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-197

WTDCV. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-198

WTFC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-199

WV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-200

WZ? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-202

XE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-203

5. Error Messages

Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

Agilent B1500 Programming Guide, Edition 3

Contents

Operation Error. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

Self-test/Calibration Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15

Agilent B1500 Programming Guide, Edition 3

Contents

Agilent B1500 Programming Guide, Edition 3

1 Programming Basics

Programming Basics

This chapter describes basic information to control the Agilent B1500, and contains the following sections:

• “Before Starting”

• “Getting Started”

• “Command Input Format”

• “Data Output Format”

• “GPIB Interface Capability”

•“Status Byte”

• “Programming Tips”

1-2 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Before Starting

Before sta rting the pr ogramming using the Agilent FLEX command , perform following.

1. If the EasyEXPERT software is running, terminate it as shown b elow:

a. Select the menu function File > Exit on the EasyEXPERT main window. b. Click [x] at the upper right corner of the Start EasyEXPERT button.

2. Select All Programs > Agilent IO Libraries Suite > Agilent Connection Expert

from the Start menu. The Agilent Connection Expert window appears.

3. At the Instrument I/O on this PC area, highlight GPIB0, and click the Change

Properties... button. The Agilent 82350 PCI GPIB Interface - GPIB0 window appears.

4. Set the GPIB Address value to the number (ex: 17) as you want.

5. Remove the check from the System Controller box.

6. Remove the check from the Auto-discover instruments connected to this

interface box.

7. Click the OK button on the Agilent 82350 PCI GPIB Interf ace - GPIB0 windo w.

8. On the Reboot Required dialog box, click the Reboot Now button, and reboot

the B1500A.

NOTE Start EasyEXPERT Button

Leave the Start EasyEXPERT button on the B1500A screen. The button must be displayed on the screen or minimized to the Windows task bar. The Start EasyEXPERT service must be run to control the Agilent B1500A from an external computer.

Agilent B1500 Programming Guide, Edition 3 1-3

Programming Basics Before Starting

About Examples

In this section, command execution examples are written in HP BASIC. See the following instructions for your guidance.

1. Use the ASSIGN statement to assign the I/O path for controlling instruments. In the next example, the select code of the external computer is 7 and the GPIB

address of the B1500 is 17.

10 ASSIGN @B1500 TO 717

2. Use the OUTPUT statement to send commands to instruments, as shown below.

OUTPUT @B1500;"*RST"

It is available to send multiple commands as shown below.

OUTPUT @B1500;"*CN;MM2,1"

3. Use the ENTER statement to get a query response or data from instruments.

1-4 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Getting Started

This section explains the following basic operations. In this section, th e HP BASIC language is used for the examples.

• “To Reset the Ag ilent B1500”

• “To Read Query Response”

• “To Perform Self-Test”

• “To Perform Self-Calibration”

• “To Perform Diagnostics”

• “To Enable Source/Measurement Channels”

• “To Select the Measurement Mode”

• “To Force Voltage/Current”

• “To Set the SMU Integration Time”

• “To Set the Measurement Range”

• “To Pause Command Execution”

• “To Start Measurement”

• “To Force 0 V”

• “To Disable Source/Measurement Channels”

• “To Control ASU”

• “To Control SCUU”

• “To Read Error Code/Message”

• “To Read Spot Measurement Data”

• “To Read Sweep Measurement Data”

• “To Read Time Stamp Data”

• “To Perform High Speed Spot Measurement”

Agilent B1500 Programming Guide, Edition 3 1-5

Programming Basics Getting Started

To Reset the Agilent B1500

The B1500 returns to the initial settings by the *RST command.

Example OUTPUT @B1500;"*RST"

For the initial settings, see “Initial Settings” on page 2-62.

To Read Query Response

If you enter a query command such as the *TST?, ERR? and so on, the B1500 puts an ASCII format response to the query buf fer that can stor e only o ne respon se. Read the response as soon as possible after entering a query command.

Example OUTPUT @B1500;"NUB?"

ENTER @B1500;A

This example returns the number of data stored in the data output buffer.

To Perform Self-Test

The B1500 starts the self-test by the *TST? command. The *TST? command also returns the test result.

Example OUTPUT @B1500;"*TST?"

ENTER @B1500;Code IF Code<>0 THEN DISP "FAIL: SELF-TEST"

This example starts the self-test, and reads the test result code. For the test result code, see “*TST?” on page 4-166.

To Perform Self-Calibration

The B1500 starts the self-calibration by the *CAL? command.

Example OUTPUT @B1500;"*CAL?"

ENTER @B1500;Result IF Result<>0 THEN DISP "FAIL: CALIBRATION"

This example starts the self-calibration, and reads the result, pass or fail. For details, see “*CAL?” on page 4-51.

1-6 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Getting Started

To Perform Diagnostics

The B1500 starts the diagnostics by the DIAG? command, and returns the result. You must specify the diagnostics item by the command parameter. Available parameter values are:

1: Trigger In/Out diagnostics 3: High volt age LED diagnostics 4: Digital I/O diagnostics To perform diagnostics 1, connect a BNC cable between the Ext Trig In terminal

and the Ext Trig Out terminal before starting the diagnostics. To perform diagnostics 4, disconnect any cable from the digital I/O port.

Example OUTPUT @B1500;"DIAG? 1"

ENTER @B1500;Result IF Result<>0 THEN DISP "FAIL: DIAGNOSTICS"

This example starts the Trigger In/Out diagnostics, and reads the result, pass or fail. For details, see “DIAG?” on page 4-66.

To Enable Source/Measurement Channels

The measurement channels or source channels can be enabled by closing the output switch. To close the switch, send the CN command. The B1500 closes the output switch of the specified channels.

Example OUTPUT @B1500;"CN 1"

This example enables channel 1 (the module i nstalled in slot 1 of the B150 0). If you do not specify the channel, the CN command enables all channels.

To Select the Measurement Mode

The B1500 provides the measurement modes listed in Table 1-1. To select the measurement mode, send the MM command. In the table, the Mode No. means a command parameter of the MM command.

Syntax MM Mode#[,Ch#[,Ch#] ... ]

where, Mode# specifies the Mode No., and Ch# specifies the measurement channel. The available number of measuremen t channels depend s on the meas urement m ode. For details, see “MM” on page 4-103.

Agilent B1500 Programming Guide, Edition 3 1-7

Programming Basics Getting Started

Example OUTPUT @B1500;"MM 2,1"

This example sets the staircase sweep measurement, and assigns channel 1 (the module installed in slot 1 of the B1500) as the measurement channel.

NOTE The Mode No. is not assigned for the high speed spot measurement. See “To

Perform High Speed Spot Measurement” on page 1-19. The high speed spot measurement does not need the MM command.

For the source output commands available for each measurement mode, see Table 1-3 on page 1-10.

Table 1-1 Measurement Mode

Measurement Mode (measurement parameter) Mode No.

Spot Measurement (current or voltage) 1 Staircase Sweep Measurement (current or voltage) 2 Pulsed Spot Measurement (current or voltage) 3 Pulsed Sweep Measurement (current or voltage) 4 Staircase Sweep with Pulsed Bias Measurement (current or voltage) 5 Quasi-Pulsed Spot Measurement (current or voltage) 9 Sampling Measurement (current or voltage) 10 Quasi-static CV Measurement (capacitance) 13 Linear Search Measurement (current or voltage) 14 Binary Search Measurement (current or voltage) 15 Multi Channel Sweep Measurement (current or voltage) 16 Spot C Measurement (impedance) 17 CV (DC bias) Sweep Measurement (impedance-DC voltage) 18 Pulsed Spot C Measurement (impedance) 19 Pulsed Sweep CV Measurement (impedance-voltage) 20 Frequency Sweep Measurement (impedance-frequency) 22 CV (AC level) Sweep Measurement (impedance-AC voltage) 23 C-t Sampling Measurement (impedance) 26 High Speed Spot Measurement (current, voltage, or impedance) NA

1-8 Agilent B1500 Programming Guide, Edition 3

To Force Voltage/Current

The commands listed in Table 1-2 is used to force voltage or current. These commands start to force the voltage or current immediately when the command is executed. They can be used regardless of the measurement mode.

See Table 1-3 for the commands available for each measurement mode. The commands just set the source channel condition, and the source channel starts the output by the start trigger, such as the XE command. For more details of the commands, see Chapter 4, “Command Reference.”

Table 1-2 Voltag e /Current Output Commands

Command Description

DV Applies DC voltage from SMU immediately.

DI Applies DC current from SMU immediately.

FC/ACV Applies AC voltage from MFCMU immediately.

DCV Applies DC bias from MFCMU immediately.

Programming Basics

Getting Started

TDV Applies DC voltage from SMU, and returns the time data.

TDI Applies DC current from SMU, and returns the time data.

FC/TACV Applies AC voltage from MFCMU, and returns the time data.

TDCV Applies DC bias from MFCMU, and returns the time data.

Example OUTPUT @B1500;"DV 1,0,5"

This example just forces 5 V using channel 1 (the module installed in slot 1 of the B1500) with auto ranging.

Agilent B1500 Programming Guide, Edition 3 1-9

Programming Basics Getting Started

Table 1-3 Measurement Mode and Available Source Output Commands

Measurement Mode Command

Staircase Sweep Measurement WV(/WSV) or WI(/WSI) Pulsed Spot Measurement PV/PT or PI/PT Pulsed Sweep Measurement PWV/PT(/WSV) or PWI/PT(/WSI) Staircase Sweep with Pulsed Bias

Measurement Quasi-Pulsed Spot Measurement BDV Sampling Measurement MV, MI Quasi-static CV Measurement QSV Linear Search Measurement LSV(/LSSV) or LSI(/LSSI) Binary Search Measurement BSV(/BSSV) or BSI(/BSSI) Multi Channel Sweep Measurement WNX, and WV or WI CV (DC bias) Sweep Measurement WDCV Pulsed Spot C Measurement PDCV/PTDCV Pulsed Sweep CV Measurement PWDCV/PTDCV Frequency Sweep Measurement WFC CV (AC level) Sweep Measurement WACV C-t Sampling Measurement MDCV

WV(/WSV) or WI(/WSI), and PV/PT or PI/PT

1-10 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Getting Started

To Set the SMU Integration Time

To adjust the balance of the SMU’s measurement accuracy and speed, change the integration time or the number of averaging samples of the A/D converter (ADC) by using the AV command. The AV command is compatible with the AV command of the Agilent 4142B.

For accurate and reliable measurement, set the integration time longer or set the number of samples larger. For details about the integration ti me settings, see Chapter 4, “Command Reference.”

The Agilent B1500 has the following two typ es of the A/D converter. Use the AAD command to select the type of ADC, and use the AIT command to set the integration time or the number of samples.

Type of ADC Description

High-speed ADC Effective for the high speed measurement. In the multi

channel sweep measurement mode (MM16), multiple measurement channels can perform synchronous measurements.

The number of averaging samples must be set by the AIT or AV command.

High-resolution ADC Effective for the accurate meas ur ement. Cann ot b e u sed

for the pulsed measurement channel and the simultaneous measurement channel.

The integration time must be set by the AIT command.

Example The following example sets the number of samples to 10 for the high-speed A/D

converter.

OUTPUT @B1500;"AV 10,1"

The following example sets the power line cycle mode (PLC) for both the high-speed ADC and the high-resolution ADC. And channel 1 uses the high-resolution ADC and other channels use the high-speed ADC.

OUTPUT @B1500;"*RST" OUTPUT @B1500;"AIT 0,2" OUTPUT @B1500;"AIT 1,2" OUTPUT @B1500;"AAD 1,1"

Agilent B1500 Programming Guide, Edition 3 1-11

Programming Basics Getting Started

To Set the Measurement Range

To set the measurement range, send the following command:

Command Description

RI Sets the current measurement range. Available for the

current measurements that use the XE command. Not available for the high speed spot measurement.

TI, TTI Sets the current measurement channel/range, and performs

the high speed spot measurement.

RV Sets the voltage measurement range. Available for the

voltage measurements that use the XE command. Not available for the high speed spot measurement.

TV, TTV Sets the voltage measurement channel/range, and performs

the high speed spot measurement.

RC Sets the impedance measurement range. Available for the

CV sweep/spot C measurements.

TC, TTC Sets the impedance measurement channel/range, and

performs the high speed spot measurement.

For the current measurement with the auto ranging mode, you can specify the coverage of each measurement range. To specify the coverage, send the RM command.

For details, see Chapter 4, “Command Reference.”

Example This example sets the voltage measurement ranging mode of channel 1 to auto.

OUTPUT @B1500;"RV 1,0"

This example sets the current measurement ranging mode of channel 1 to auto, and specifies coverage between 9 % and 90 % o f the rang e valu e or between 90 mA and 180 mA for the 200 mA range.

OUTPUT @B1500;"RI 1,0" OUTPUT @B1500;"RM 1,3,90"

NOTE To use 1 pA ra nge of ASU

Set the 1 pA limited auto ranging mode or t he 1 pA fixed ran ge mode. Or enabl e the 1 pA range for the auto ranging mode by using the SAR command. See “SAR” on page 4-140.

1-12 Agilent B1500 Programming Guide, Edition 3

To Pause Command Execution

To pause command execution until the specified wait time elapses, send the PA command.

Example OUTPUT @B1500;"PA 5"

If this command is sent, the B1500 waits 5 seconds before executing the next command.

To Start Measurement

To start measurement other than the high speed spot measurement, send the XE command.

Example OUTPUT @B1500;"XE"

This starts the measurement specified by the MM command. For the high speed spot measurement, see “To Perform High Speed Spot

Measurement” on page 1-19.

Programming Basics

Getting Started

To Force 0 V

To force 0 V immediately, send the DZ command. The B1500 memorizes the present source output settings of the specified channel, and changes the specified channel output to 0 V. If you do not specify the channel, the DZ command function is effective for all channels.

Example OUTPUT @B1500;"DZ 1"

If this command is sent, the B1500 memorizes the current settings of channel 1 (the module installed in slot 1 of the B1500), and changes channel 1 output to 0 V.

To restore the settings stored by the DZ command, send the RZ command. For details, see Chapter 4, “Command Reference.”

Agilent B1500 Programming Guide, Edition 3 1-13

Programming Basics Getting Started

To Disable Source/Measurement Channels

T o dis able the chan nels, s end the C L com mand . Th e B1500 op ens the output switch of the specified channels. Opening the output switch disables the channel.

Example OUTPUT @B1500;"CL 1"

This example disables channel 1 (the modu le install ed in slot 1 of the B1500) . If you do not specify the channel, the CL command disables all channels.

To Control ASU

This function is available for the B1500 that is installed with the high resolution SMU (HRSMU). Atto Sense and Switch Unit (ASU) has two inpu ts, SMU input for the HRSMU and AUX input for the other instrument. And the ASU input to output connection can be controlled by the following commands. When the B1500 is turned on, the SMU input will be connected to the ASU output. However, the SMU output switch will be off at this time.

Table 1-4 ASU Input Output Connection Control

Previous Connection Command Subsequent Connection

SMU side, Output on/off SAP slot, 1 AUX side

SMU side, Output off CN slot SMU side, Output on

SAP slot, 0

AUX side CN slot

SAP slot, 0

CL [slot] SMU side, Output off

SMU side, Output on CL [slot]

where, slot must be the slot number assigned to the slot that installs the HRSMU connected to the ASU. See “SAL”, “SAP”, and “SAR” on page 4-140 for the other function and control commands of the ASU.

When the SMU side is connected to the ASU output, the source output on/off can be controlled by the CN/CL command. And then the SAP slot, 1 command is used to change the output connection to the AUX side. When the AUX side is connected, the output of the instrument connected to the AUX input is appeared to the ASU output immediately.

1-14 Agilent B1500 Programming Guide, Edition 3

To Control SCUU

SCUU (SMU CMU Unify Unit) can be used with one capacitance measurement unit (CMU) and two SMUs (MPSMU or HRSMU). The SCUU cannot be used with the HPSMU or when only one SMU is connected. The SCUU input to output connection can be controlled by the following commands. When the B1500 is turned on, the SCUU input to output connection is not made (open).

Table 1-5 SCUU Input Output Connection Control

SCUU output connection after the command

Command

CMUH/Force1/Sense1 CMUL/Force2/Sense2

SSP slot, 1 Force1/Sense1 Open SSP slot, 2 Open Force2/Sense2 SSP slot, 3 Force1/Sense1 Force2/Sense2 SSP slot, 4 CMUH CMUL

Programming Basics

Getting Started

where, slot means the number assigned to the slot that installs the CMU. Force1/Sense1 is connected to the SMU installed in the slot numbered slot-1. Force2/Sense2 is connected to the SMU installed in the slot numbered slot-2. When the SCUU input to output connection is made, the measurement unit output switch will be automatically set to ON.

When the connection is changed from SMU to CMU, the SMU output will be set as follows. The other setup parameters are not changed.

Output voltage 0 V Output range 100 V Compliance 20 mA Series resistance OFF

When the connection is changed from CMU to SMU, the SMU output will be set as follows. The other setup parameters are not changed.

Output voltage 0 V Output range 20 V Compliance 100 μA Series resistance Condition before the connection i s changed from SMU to CMU

Agilent B1500 Programming Guide, Edition 3 1-15

Programming Basics Getting Started

To Read Error Code/Message

If any error occurs, the B1500 will not put the measurement data into the data output buffer. Hence, confirm that no error has occurred before reading the measurement data. To read the error code, enter the ERR? command, and to read the error message, enter the EMG? command.

Example OUTPUT @B1500;"ERR? 1"

ENTER @B1500;Code IF Code<>0 THEN

OUTPUT @B1500;"EMG? ";Code

ENTER @B1500;Msg$ PRINT "ERROR: ";Msg$ ELSE

This example checks the error buffer, and prints the error message on the computer screen if any error code is stored in the error buffer.

To Read Spot Measurement Data

After the spot measurements, the B1500 puts the measurement data into its output data buffer. You can read the data as shown below. For the data output format, see “Data Output Format” on page 1-23.

Example 1 For the HP BASIC users, use the ENTER statement. The example stores the header

information and the measurement data included in the ASCII data set by the FMT5 command into the Head$ and Mdata variables respectively.

ENTER @B1500 USING "#,3A,12D,X";Head$,Mdata

Example 2 For the Microsoft Visual Basic .NET with Agilent T&M Programmer’s Toolkit

users, use the Read, ReadList, UnbufferedRead methods and so on. The example stores the header information and the measurement data included in the ASCII data set by the FMT5 command into the head and mdata variables respectively.

ret_value = B1500.Read(True) head = Left(ret_val, 3) mdata = Val(Right(ret_val, 12))

1-16 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Getting Started

To Read Sweep Measurement Data

For the sweep measurements, the measurement data will be put into the data output buffer after every step measurement. You can read the data as shown below. For the data output format, see “Data Output Format” on page 1-23.

• To read data after sweep measurement This way waits for the measurement completion by using the *OPC? command

after the XE command, and reads the sweep data (all step measurement data) at once after the sweep measurement is completed.

Example:

B1500.WriteLine("FMT 5,0") ’terminator=comma B1500.WriteLine("XE") B1500.WriteLine("*OPC?") rep = B1500.Read(True) ret_val = B1500.ReadListAsStringArray() ’string array For i = 0 To nop - 1 ’nop=number of sweep steps

head = Left(ret_val(i), 3) mdata = Val(Right(ret_val(i), 12)) ddata = "Data = " & mdata & ", Header = " & head Console.WriteLine(ddata)

Next i

For the specific example, see Table 3-5 on page 3-19.

• To read data after every step measurement This way starts to read the data after the XE command. You do not need to wait

for the sweep measurement completion. So you can check the result data before the sweep measurement is completed.

Example:

B1500.WriteLine("FMT 5,0") ’terminator=comma B1500.TerminationCharacter = Chr(44) ’Chr(44)=comma B1500.TerminationCharacterEnabled = True ’enables comma B1500.WriteLine("XE") For i = 0 To nop - 1 ’nop=number of sweep steps

ret_val = B1500.Read(True) ’string head = Left(ret_val, 3) mdata = Val(Right(ret_val, 12)) ddata = "Data = " & mdata & ", Header = " & head Console.WriteLine(ddata)

Next i

For the specific example, see Table 3-6 on page 3-22.

Agilent B1500 Programming Guide, Edition 3 1-17

Programming Basics Getting Started

To Read Time Stamp Data

NOTE This function is not available for the quasi-pulsed spot measuremen t (MM 9), search

measurement (MM 14 or 15), and the 4 byte binary data output (FMT 3 or 4). T o read the time data with the best resolution (100 μs), clear the timer every 100 s or

less (for FMT 1, 2, or 5), or 1000 s or less (for FMT 11, 12, 15, 21, 22, or 25).

The time stamp function records the time from timer reset (Time=0 s) to the start of measurement. This function is enabled by the TSC command. The timer count is cleared/reset by the TSR command.

For example, the output data in the staircase sweep measurement will be as follows:

Block1 [,Block2] . . . . <terminator>

BlockN (N: integer) = Time1,Data1 [,Time2,Data2] ... [,Source_data] TimeN (N: integer) is the time from timer reset to the start of DataN measurement.

Without the TSC command, you can get the time data by the following commands:

• TDV / TDI (for voltage/current output by using a SMU), TDCV / TACV (for DC voltage/AC voltage output by using the MFCMU):

Starts source output, and returns the time data from timer reset (TSR command) to the start of output.

Example:

OUTPUT @B1500;"TDV 1,0,20" ENTER @B1500 USING "#,5X,13D,X";Time PRINT "Time="; Ti me ;" se c"

• TTV / TTI (for voltage/current measurement by using a SMU), TTC (for impedance measurement by using the MFCMU):

Executes high speed spot measurement, and returns the measurement data and the time data from timer reset (TSR command) to the start of measurement.

Example:

OUTPUT @B1500;"TTV 1,0" ENTER @B1500 USING "#,5X,13D,X";Time ENTER @B1500 USING "#,5X,13D,X";Mdata PRINT "Data="; Md at a; " at ";T im e; "s ec "

• TSQ: Returns the time data from timer reset (TSR command) to this command.

Example:

OUTPUT @B1500;"TSR" !Resets count

: OUTPUT @B1500;"TSQ" !Returns time data ENTER @B1500 USING "#,5X,13D,X";Time PRINT "Time="; Ti me ;" se c"

1-18 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Getting Started

To Perform High Speed Spot Measurement

The high speed spot measurement does not need the MM and XE commands to set the measurement mode and start measurement. To start and perform the high speed spot measurement immediately , send the TI command for current measurement, the TV command for voltage measurement, or the TC command for impedance measurement. The following example program measures current by using the TI command, and displays the measurement result data on the computer screen.

Example

10 ASSIGN @B1500 TO 717 20 OUTPUT @B1500;"*RST" 30 OUTPUT @B1500;"FMT 5" 40 OUTPUT @B1500;"CN 1,2,3,4" 50 OU TP UT @B1 50 0; "D V 1, 0, 0" 60 OUTPUT @B1500;"DV 2,0,0" 70 OU TP UT @B1 50 0; "D V 3, 0, 2" 80 OU TP UT @B1 50 0; "D V 4, 0, 5" 90 OUTPUT @B1500;"TI 4,0" 100 ENTER @B1500 USING "#,3A,12D,X";Head$,Data 110 PRINT Head$,Data 120 OUTPUT @B1500; "D Z" 130 OUTPUT @B1500; "C L" 140 END

Line

Number

Description

10 Assigns the I/O path to control the B1500. 20 Initializes the B1500. 30 Sets the data output format (ASCII with header and <,>). 40 Enables channels 1, 2, 3, and 4. 50 to 80 Forces the DC voltage. Channel 1 and 2 force 0 V, channel 3 forces

2 V, and channel 4 forces 5 V with auto ranging.

90 Performs th e high speed spot measurement using channel 4 with

auto ranging. 100 to 110 Prints the header data and measurement data on the screen. 120 Forces 0 V. All channels force 0 V. 130 Disables all channels.

Agilent B1500 Programming Guide, Edition 3 1-19

Programming Basics

Header

Numeric Data Terminator

SP : Space

;

Separator

Alpha Character (A to Z, a to z)

Command Input Format

Agilent FLEX commands (GPIB commands for the Agilent B1500) are composed of a header, numeric data, an d terminator, as shown in the following synt ax diagra m.

B1500 Control Command Syntax Diagram

NOTE Terminator

Terminator is necessary to enter the command to the Agilent B1500. For the available terminators, see “Terminator” and “Special Terminator” on page 1-22.

Header

The header is the command name, always contains alpha characters, and is not upper or lowercase sensitive. Some command names also contain an asterisk (*) or question mark (?). The following figure shows the syntax diagram for a header.

Header Syntax Diagram

1-20 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Fixed Point Data

Integer Data

Floating Point Data

Digit (0 to 9)

−

SP : Space

Digit (0 to 9)

−

: Space

Digit (0 to 9)

− SP

: Space

Digit (0 to 9)

−

Digit (0 to 9)

*1: Here must be 2 digits or less.

Command Input Format

Numeric Data

Numeric data are the command parameters. You can enter numeric data directly after the header or insert spaces between the header and numeric data. Some parameters require integer data. The following figure shows the syntax diagram for numeric dat a.

Numeric Data Syntax Diagram

The following 3 figures show the syntax diagrams for integer, fixed point, and floating point data, respectively.

Integer Data Syntax Diagram

Fixed Point Data Syntax Diagram

Floating Point Data Syntax Diagram

Agilent B1500 Programming Guide, Edition 3 1-21

Programming Basics

EOI

;

Command Input Format

Terminator

The terminator completes the GPIB command entry and starts command execution. The following figure shows the terminator syntax diagram.

Terminator Syntax Diagram

Special Terminator

If a semicolon (;) is inserted before the terminator, as shown in the following figure, the preceding commands are not executed until the next command line is input and another terminator is input, without a preceding semicolon. The command lines are then executed together.

Special Terminator Syntax Diagram

Separator

If you enter multiple commands, use semicolons (;) to separate the commands. Spaces are allowed before and after the semicolons. Command execution starts when the terminator is received, not when the semicolon is received. You can input multiple commands of up to a total of 256 characters (including the terminator). If you input more than 256 characters, the input buffer overflows, and an error is indicated.

Use commas (,) to separate numeric data entries.

NOTE Do not include the reset command (*RST) or the abort command (AB) in multiple

command strings (examp le: OUTPUT @B1500;”*RST;CN”). If you do, t he other commands in the string (example: CN) are not executed.

1-22 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Data Output Format

Agilent B1500 provides the following data output formats:

• “ASCII Data Output Format” The B1500 supports the ASCII data format that is the common format for the

instruments that support the Agilent FLEX command mode.

• “Binary Data Output Format” The B1500 supports the 4 bytes binary data format that is the common format

for the instruments that support the Agilent FLEX command mode. The B1500 also supports the dedicated 8 bytes binary format. The binary format enables faster data transfer time than ASCII format. You need to calculate the data to get the measurement result.

To select the data output format, use the FMT command. See “FMT” on page 4-76. For the query response, the returned data is always stored in the query buffer in

ASCII format, regardless of the FMT command setting. A minimum of 17×1001×2 (34034) measurement data can be stored in the data

output buffer.

Conventions

The following conventions are used in this section.

Data Output data that the B1500 sends after a measurement. [Data] Optional output data sent when there are multiple output data

items. For example, source data will be sent with measurement data

after the staircase sweep measurements when the source data output is enabled by the FMT command.

<terminator> Terminator.

<CR/LF^EOI> (two bytes) or <,> (one byte) for ASCII data. <CR/LF^EOI> (two bytes) or <^EOI> (0 byte) for binary data. You can select by using the FMT command.

Agilent B1500 Programming Guide, Edition 3 1-23

Programming Basics Data Output Format

ASCII Data Output Format

This section describes the ASCII data output format, and the elements of the data.

•“Time Stamp”

•“Data Format”

• “Data Elements”

Time Stamp

The B1500 can record the time when the measurement is started, and sends the time data (Time). This function is enabled by the TSC command. The time data will be sent just before the measurement data.

For example, in the staircase sweep measurements, the data will be as shown below.

Block1 [,Block2] . . . . <terminator>

where, BlockN (N: integer) = Time1,Data1 [,Time2,Data2] ... [,Source_data], then TimeN (N: integer) is the time from timer reset to the start of DataN measurement.

The timer count is cleared/reset by the TSR command (Time=0). The time stamp function is not available for the following measurements.

• High speed spot measurement

• Quasi-pulsed spot measurement (MM9)

• Linear search measurement (MM14)

• Binary search measurement (MM15)

1-24 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Data Output Format

Data Format

The data output format depends on the measurement mode as shown below.

High Speed Spot Data <terminator> (by TI, TV, TMACV, or TMDCV command)

Time,Data <terminator> (by TTI or TTV command) Para1,Para2 <terminator> (by TC command) Time,Para1,Para2 <terminator> (by TTC command) Data is the value measured by the channel you specify in the command. Time is the

time from timer reset to the start of measurement. Para1 and Para2 are the primary parameter and the secondary parameter (ex: Cp and G) measured b y the CMU. They are selected by the IMP command.

Spot Data1 [,Data2] . . . . <terminator>

DataN (N: integer) is the value measured by a channel. The order of Data is defined

by the MM command.

Spot C, Pulsed Spot, Pulsed Spot C, Quasi-Pulsed Spot

Staircase Sweep, Multi Channel Sweep

Data <terminator> Data is the value measured by the channel you specify by using the MM command. For the pulsed spot C measurement, Data consists of the following data: Para1,Para2 For the spot C measurement, Data consists of the following data: Para1,Para2 [,Osc_level,Dc_bias] Para1 and Para2 are the primary and secondary parameters (ex: Cp and G). They

are selected by the IMP command. See Table 4-8 on page 4-19. And Osc_level and Dc_bias are the monitor values of the oscillator level (AC signal level) and the DC

bias respectively. They are sent if the data output is enabled by the LMN command.

Block1 [,Block2] . . . . <terminator>

Block1 is the block of data measured at the first sweep point. Block2 is the block of data measured at the second sweep point. where Block consists of the following data:

Data1 [,Data2] . . . . [,Source_data]

DataN (

by the MM command. Source_data is the sweep source output value. It is sent if the data output is enabled by the FMT command.

integer) is the value measured by a channel. The order of Data is defined

Agilent B1500 Programming Guide, Edition 3 1-25

Programming Basics Data Output Format

Pulsed Sweep, Pulsed Sweep CV, CV (DC or AC) Sweep, Frequency Sweep, Staircase Sweep with Pulsed Bias

Quasi-static CV Block1 [,Block2] . . . . <terminator>

Block1 [,Block2] . . . . <terminator>

Block1 is the block of data measured at the first sweep point. Block2 is the block of data measured at the second sweep point. where Block consists of the following data:

Data [,Source_data] Data is the value measured by the channel you specify by using the MM command.

Source_data is the sweep source output value. It is sent if the data output is enabled

by the FMT command. For the pulsed sweep CV measurement, Data consists of the following data: Para1,Para2 For the CV (DC bias) sweep, CV (AC level) sweep, and frequency sweep, Data

consists of the following data:

Para1,Para2 [,Osc_level,Dc_bias] Para1 and Para2 are the primary and secondary parameters (ex: Cp and G). They

are selected by the IMP command. See Table 4-8 on page 4-19. And Osc_level and Dc_bias are the monitor values of the oscillator level (AC signal level) and the DC

bias respectively. They are sent if the data output is enabled by the LMN command.

Block1 is the block of the data measured at the first sweep point. Block2 is the block of the data measured at the second sweep point. where Block consists o f the following data:

Linear Search, Binary Search

[DataL,] DataC [,Source_data] DataL is the leakage current measurement data. DataC is the capacitance

measurement data. Source_data is the sweep source output value. DataL and Source_data are sent if the data output is enabled by the QSL or FMT command.

Data_search [,Data_sense]<terminator>

This is the data at the measurement point closest to the search tar get. Data_search is the value forced by the search output channel. Data_sense is the value measured by the search monitor channel. It is sent if data output is enabled by the BSVM command for the binary search, or the LSVM command for the linear search.

1-26 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Data Output Format

Sampling, C-t Sampling

Block1 [,Block2] . . . . <terminator>

Block1 is the block of the data measured at the first sampling point. Block2 is the block of the data measured at the second sampling point.

where Block consists o f the following data:

[Sampling_no,] Data1 [,Data2] . . . .

Sampling_no is the sampling point index, and is returned by entering the FMT command with mode<>0. This value depends on the sampling interval setting and the measurement time. If the measurement time is shorter than the sampling interval, Sampling_no will be N of BlockN (N: 1, 2, 3 . . . ).

DataN (N: integer) is the data measured by one unit. The order of Data is specified by the MM command. Sampling_no and Data values can be discarded when the range changing is occurred while the measurement with auto or limited auto ranging.

If the measurement time is longer than the sampling interval, Sampling_no is not N of BlockN. For example, if the measurement time is longer than the sampling interval and shorter than twice the sampling interval, then the Sampling_no is 2 for Block1, and 4 for Block2. In general, the measurement time depends on the measurement value and the A/D converter settings.

For the C-t sampling, Data consists of the following data:

Para1,Para2 Para1 and Para2 are the primary parameter and the secondary parameter (ex: Cp

and G). They are selected by the IMP command. See Table 4-8 on page 4-19.

TDI, TDV, TSQ, TACV, TDCV command

Time <terminator> Time is the time from timer reset to the start of output.

Agilent B1500 Programming Guide, Edition 3 1-27

Programming Basics Data Output Format

Data Elements

The data (Data, Source_data, Time, Sampling_no, Data_search, Data_sense, Osc_level, and Dc_bias) are the string as shown below.

Data FMT command

ABCDDDDDDDDDDDD

ABCDDDDDDDDDDDDD

EEEFGDDDDDDDDDDDDD DDDDDDDDDDDD

DDDDDDDDDDDDD

FMT1 or FMT5 FMT11 or FMT15 FMT21 or FMT25

FMT2

FMT12 or FMT22

The data elements depends on the FMT command setting. Details of the elements are described on the following pages.

A: Status. One character. B: Channel number. One character. C: Data type. One character. D: Data. Twelve digits or 13 digits. E: Status. Three digits. F: Channel number. One character. G: Data type. One character.

1-28 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Data Output Format

A Status. One character.

• Status for Source_data: Priority of appearance is W<E.

AExplanation

W Data is for the first or intermediate sweep step.

E Data is for the last sweep step.

• Status for measurement data: See Table 1-9 on page 1-33. For SMU, the priority of appearance is as follows:

• For the quasi-pulsed spot measurement: N<T<C<V<X<G or S

• For other measurement: N<G<S<T<C<V<X

B Channel number of the measurement/source channel. One character.

BExplanation BExplanation

A Channel 1 F Channel 6 B Channel 2 G Channel 7 C Channel 3 H Channel 8 D Channel 4 I Channel 9 E Channel 5 J Channel 10

C Data type. One character. See Table 1-6 on page 1-31.

D Measurement data, output data, time data, or sampling index. Twelve or 13 digits

depends on FM T setting, whi ch may be one of the follo wing:

• sn.nnnnnEsnn or sn.nnnnnnEsnn

• snn.nnnnEsnn or snn.nnnnnEsnn

• snnn.nnnEsnn or snnn.nnnnEsnn

where,

s: Sign, + or -. n: Digit, 0 to 9.

E: Exponent symbol.

Agilent B1500 Programming Guide, Edition 3 1-29

Programming Basics Data Output Format

E Status. Three digits. Ignore status for the Time value.

• Status for Source_data: Priority of appearance is W<E.

EEE Explanation

W Data is for the first or intermediate sweep step.

E Data is for the last sweep step.

• Status for measurement data: For SMU status, see Table 1-7 on page 1-32. For CMU status, see Table 1-8 on page 1-32. If multiple status conditions are found, the sum of the EEE values is returned.

For example, if an A/D converter overflow occurred, and an SMU was oscillating during the measurements, the returned EEE value is 3 (=1+2).

F Channel number of the source/measurement module. One character.

F Explanation F Explanation

A Channel 1 F Channel 6 B Channel 2 G Channel 7 C Channel 3 H Channel 8 D Channel 4 I Channel 9 E Channel 5 J Channel 10 V Ground unit (GNDU) Z Status code for extraneous data in the channel.

TSQ command response or invalid data is returned.

1-30 Agilent B1500 Programming Guide, Edition 3

G Data type. One character. Also see Table 1-6 on page 1-31.

GExplanation

V Voltage measurement value (V)

I Current measurement value (A)

v Voltage output value (V)

i Current ou tput value (A) f Frequency (Hz)

z invalid data

Table 1-6 Data Type

CExplanation

V Voltage (V)

I Current (A)

Programming Basics

Data Output Format

F Frequency (Hz)

C or G Explanation

Z Impedance, resistance, or reactance (Ω) Y Admittance, conductance, or susceptance (S) C Capacitance (F) L Inductance (H) R Phase (radian)

P Phase (degree) D Dissipation factor Q Quality factor X Sampling index T Time (second)

Agilent B1500 Programming Guide, Edition 3 1-31

Programming Basics Data Output Format

Table 1-7 SMU Status

EEE Explanation

128 E OD (End of Data).

Table 1-8 CMU Status

EEE Explanation

1 A/D converter overflowed. 2 One or more units are oscillating. 4 Another unit reached its compliance setting.

8 This unit reached its compliance setting. 16 Target value was not found within the search range. 32 Search measurement was automatically stopped. 64 Invalid data is returned. D is not used.

1 A/D converter overflowed.

2 CMU is in the NULL loop unbalance condition.

4 CMU is in the IV amplifier saturation condition.

8 Not assigned. 16 Not assigned. 32 Not assigned. 64 Invalid data is returned. D is not used.

128 E OD (End of Data).

1-32 Agilent B1500 Programming Guide, Edition 3

Table 1-9 Status for Measurement Data

AExplanation

N No status error occurred.

T Another channel reached its compliance setting. C This channel reached its compliance setting.

V M easurement data is over the measurement range. Or the sweep

measurement was aborted by the automatic stop function or power compliance. D will be 199.999E+99 (no meaning).

X O ne or more chan nels are oscillating. Or source output did not sett le

before measurement.

G For linear or binary search measurement, the target value was not found

within the search range. Returns the source output value. For quasi-pulsed spot meas urement, th e detection t ime was over the limit

(3 s for Short mode, 12 s for Long mode).

Programming Basics

Data Output Format

S For linear or binary search measurement, the search measurement was

stopped. Returns the source output value. See status of Data_sense. For quasi-pulsed spot measurement, output slew rate was too slow to

perform the settling detection.

Or quasi-pulsed source channel reached

the current compliance before the source output voltage changed 10 V from the start voltage.

U CMU is in the NULL loop unbalance condition. D CMU is in the IV amplifier saturation condition.

a. Make the wait time or delay time longer. Or make the current compli-

ance larger. For pulsed measurement, make the pulse width longer, or make the pulse base value closer to the pulse peak value. For current output by limited auto ranging, make the output range lower.

b. Mak e the current compliance or start voltage larger. Or set the detection

interval to Long. If this status occurs with the Long mode, perform the spot measurement.

c. Make the current compliance larger. Or set the detection interval to

Long. If this status occurs with the Long mode, perform the spot measurement or pulsed spot measurement.

d. Perform the pulsed spot measurement or spot measurement.

Agilent B1500 Programming Guide, Edition 3 1-33

Programming Basics Data Output Format

Binary Data Output Format

This section describes the binary data output format, and the elements of the data.

•“Time Stamp”

• “Data Resolution”

•“Data Format”

• “4 Bytes Data Elements”

• “8 Bytes Data Elements”

Time Stamp

For example, in the staircase sweep measurements, the data will be as shown below.

Block1 [Block2] . . . . <terminator>

where, BlockN (N: integer) = Time1 Data1 [Time2 Data2] ... [Source_data], then TimeN (N: integer) is the time from timer reset to the start of DataN measurement.

The timer count is cleared/reset by the TSR command (Time=0). The time stamp function is not available for the following measurements.

• 4 bytes binary data format (FMT3 or FMT4)

• High speed spot measurement

• Quasi-pulsed spot measurement (MM9)

• Linear search measurement (MM14)

• Binary search measurement (MM15)

1-34 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Data Output Format

Data Resolution

The 4 bytes binary data format provides the following data resolution. To use this data format, enter the FMT3 or FMT4 command. The resolution of the SMU measurement value will be larger than the measurement resolution of the B1500’s high resol ution A/D converter. For Range value, see “4 Bytes Data Elements” on page 1-39.

• SMU measurement value (voltage or current): Range / 50000

• SMU output value (voltage or current): Range / 20000

• CMU measurement value (resistance or reactance): Range / 2

• CMU measurement value (conductance or susceptance): 1 / (Range × 212)

• CMU oscillator level monitor value (Vac), DC bias monitor value (Vdc), frequency (Hz): Range / 50000

• CMU DC bias output value: 2 mV

The 8 bytes binary data format provides the following data resolution. To use this data format, enter the FMT13 or FMT14 command. For Range value, see “8 Bytes Data Elements” on page 1-45.

• SMU measurement/output value (voltage or current): Range / 1000000

• CMU measurement value (resistance or reactance): Range / 2

• CMU measurement value (conductance or susceptance): 1 / (Range × 224)

• CMU oscillator level monitor value (Vac), DC bias monitor value (Vdc), frequency (Hz): Range / 1000000

• CMU DC bias output value: 1 mV

Agilent B1500 Programming Guide, Edition 3 1-35

Programming Basics Data Output Format

Data Format

The data output format depends on the measurement mode as shown below.

High Speed Spot Data <terminator> (by TI, TV, TMACV, or TMDCV command)

Time Data <terminator> (by TTI or TTV command) Para1 Para2 <terminator> (by TC command) Time Para1 Para2 <terminator> (by TTC command) Data is the value measured by the channel you specify in the command. Time is the

time from timer reset to the start of measuremen t. Para1 and Para2 are R (Ω) and X (Ω), or G (S) and B (S) respectively measured by the CMU. They will be automatically selected by the B1500, and will be a couple without data overflow.

Time is available for the 8 bytes binary data format (FMT13 or FMT14) and not available for the 4 bytes binary data format (FMT3 or FMT4)

Spot Data1 [Data2] . . . . <terminator>

DataN (N: integer) is the value measured by a channel. The order of Data is defined

by the MM command.

Spot C, Pulsed Spot, Pulsed Spot C, Quasi-Pulsed Spot

Data <terminator> Data is the value measured by the channel you specify by using the MM command. For the pulsed spot C, Data consists of the following data: Para1 Para2 For the spot C, Data consists of the following data: Para1 Para2 [Osc_level Dc_bias] Para1 and Para2 are R (Ω) and X (Ω), or G (S) and B (S) respectively. They will be

automatically selected by the B1500, and will be a couple without data overflow. And Osc_level and Dc_bias are the monitor values of the oscillator level (AC signal level) and the DC bias respectively . They are sent if the data out put is enabled by t he LMN command.

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Programming Basics

Data Output Format

Staircase Sweep, Multi Channel Sweep

Pulsed Sweep, Pulsed Sweep CV, CV (DC or AC) Sweep, Frequency Sweep, Staircase Sweep with Pulsed Bias

Block1 [Block2] . . . . <terminator>

Block1 is the block of data measured at the first sweep point. Block2 is the block of

data measured at the second sweep point. where Block consists of the following data:

Data1 [Data2] . . . . [Source_data]

DataN (N: integer) is the value measured by a channel. The order of Data is defined

by the MM command. Source_data is the sweep source output value. It is sent if the data output is enabled by the FMT command.

Block1 [Block2] . . . . <terminator>

Block1 is the block of data measured at the first sweep point. Block2 is the block of data measured at the second sweep point. Block consists of the following data:

Data [Source_data] Data is the value measured by the channel you specify by using the MM command.

Source_data is the sweep source output value. It is sent if the data output is enabled

by the FMT command. For the pulsed sweep CV measurement, Data consists of the following data:

Para1 Para2

For the CV (DC bias) sweep, CV (AC level) sweep, and frequency sweep, Data consists of the following data:

Para1 Para2 [Osc_level Dc_bias] Para1 and Para2 are R (Ω) and X (Ω), or G (S) and B (S) respectively. They will be

automatically selected by the B1500, and will be a couple without data overflow. And Osc_level and Dc_bias are the monitor values of the oscillator level (AC signal level) and the DC bias respectively. They are sent if the data out put is enabled by t he LMN command.

Quasi-static CV Block1 [Block2] . . . . <terminator>

Block1 is the block of the data measured at the first sweep point. Block2 is the block of the data measured at the second sweep point.

where Block consists o f the following data: [DataL

] Da

taC [Source_data]

DataL is the leakage current measurement data. DataC is the capacitance measurement data. Source_data is the sweep source output value. DataL and Source_data are sent if the data output is enabled by the QSL or FMT command.

Agilent B1500 Programming Guide, Edition 3 1-37

Programming Basics Data Output Format

Linear Search, Binary Search

Sampling, C-t Sampling

Data_search [Data_sense]<terminator> This is the data at the measurement point closest to the search tar get. Data_search is

the value forced by the search output channel. Data_sense is the value measured by the search monitor channel. It is sent if data output is enabled by the BSVM command for the binary search, or the LSVM command for the linear search.

Available for the 8 bytes binary data format (FMT13 or FMT14).

Block1 [Block2] . . . . <terminator>

Block1 is the block of the data measured at the first sampling point. Block2 is the block of the data measured at the second sampling point.

where Block consists o f the following data:

[Sampling_no] Data1 [Data2] . . . .

TDI, TDV, TSQ, TACV, TDCV command

For the C-t sampling, Data consists of the following data: Para1 Para2 Para1 and Para2 are R (Ω) and X (Ω), or G (S) and B (S) respectively. They will be

automatically selected by the B1500, and will be a couple without data overflow.

Available for the 8 bytes binary data format (FMT13 or FMT14).

Time <terminator> Time is th

1-38 Agilent B1500 Programming Guide, Edition 3

e time from timer reset to the start of output.

4 Bytes Data Elements

65432107 65432107 65432107 65432107

Byte 1 Byte 2 Byte 3 Byte 4

AB C D E F

To use the 4 bytes binary data format, enter the FMT3 or FMT4 command. The data (Data, Source_data, Sampling_no, Data_search, Data_sense, Osc_level,

and Dc_bias) will be sent as the binary value shown in Figure 1-1.

Figure 1-1 4 Bytes Binary Data Output Format

A: Type. One bit. B: Parameter. One bit. C: Range. Five bits. Range value used to calculate the data. D: Data count. 17 bits. E: Status. Three bits. F: Channel number. Five bits.

Programming Basics

Data Output Format

These data elements are described in the following pages.

Agilent B1500 Programming Guide, Edition 3 1-39

Programming Basics Data Output Format

A Type. One bit.

AExplanation

0 Data other than measurement data. 1 Measurement data.

B Parameter. One bit.

B for SMU data for CMU data

0 Voltage Resistance or reactance 1 Current or Capacitance Conductance or susceptance

C Range. Five bits. Range value used to calculate the data.

for SMU data

V I C Z AC DC F

01000 (8) 0.5 V 1 pA 1 pF 00000 (0) 1 Ω 01001 (9) 5 V 10 pA 10 pF 00001 (1) 10 Ω 01010 (10) 100 pA 100 pF 00010 (2) 100 Ω 01011 (11) 2 V 1 nA 1 nF 00011 (3) 1 kΩ 8 V 1 kHz 01100 (12) 20 V 10 nA 10 nF 00100 (4) 10 kΩ 16 mV 12 V 10 kHz 01101 (13) 40 V 100 nA 100 nF 00101 (5) 100 kΩ 32 mV 25 V 100 kHz 01110 (14) 100 V 1 μA1 μF00110 (6) 1 MΩ 64 mV 1 MHz 01111 (15) 200 V 10 μA10 μF00111 (7) 10 MΩ 125 mV 100 V 10000 (16) 100 μA100 μF 01000 (8) 100 MΩ 250 mV 10001 (17) 1 mA 1 mF 01001 (9) 1 GΩ 10010 (18) 10 mA 10 mF 01010 (10) 10 GΩ 10011 (19) 100 mA 100 mF 01011 (11) 100 GΩ 10100 (20) 1 A 1 F 11111 (31) Invalid data is returned.

for CMU data

1-40 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Data Output Format

D (SMU data) Data coun t. This value is expr essed in 17 -bit binary data . The measurement data and

the source data can be calculated by the following formula. Measurement data = Count × Range / 50000 Source data = Count × Range / 20000 where, Count is the D value, and Range is the measurement range or output range

given by C. For the decimal value of C, the Range value of current and capacitance data will be

10^(C-20). If the top bit of D is 0, Count is posit ive and equal to the value given by the

following 16 bits. If the top bit of D is 1, Count is negative. Calculate Count by subtracting 65536

(10000000000000000 in binary) from the value given by the following 16 bits.

Example:

If the output binary data is: 11010110000100111000100000000001 then,

Type: Measurement data (A=1) Parameter: Current (B=1)

Range: 1 nA=10^(11-20) A (C=01011 in bin ary, C=11 in decimal) Count: 5000 (D=00001001110001000)

Status: Normal condition (E=000) Channel: SMU1 (channel number 1) (F=00001)

Measurement data = 5000 × 1E–9 / 5E+4 = 100 pA

NOTE B=1 and C=10100 means that HPSMU used 1 A range or MPSMU used 200 mA

range. Then use Range=1 to calculate the data for both HPSMU and MPSMU. Range=0.2 is not available even if the range value is 200 mA.

Agilent B1500 Programming Guide, Edition 3 1-41

Programming Basics Data Output Format

D (CMU data) Data count. This value is expressed in 17-bit binary data. The measurem ent data and

the output data can be calculated by the following formula. Resistance or reactance = Count × Range / 2

Conductance or susceptance = Count / (212 × Range) OSC level monitor value = Count × Range / 50000 DC bias monitor value = Count × Range / 50000 DC bias output value = Count / 500 Output signal frequency = Count × Range / 50000 where, Count is the D value, and Range is the measurement range or output range

given by C. For the decimal value of C, the Range value of resistance, reactance, conductance,

and susceptance data will be 10^C Ω. If the top bit of D is 0, Count is posit ive and equal to the value given by the

following 16 bits. If the top bit of D is 1, Count is negative. Calculate Count by subtracting 65536

(10000000000000000 in binary) from the value given by the following 16 bits.

Example:

If the output binary data is: 10001000000011111010000000001000 then,

Type: Measurement data (A=1) Parameter: Resistance (or reactance) (B=0)

Range: 10 kΩ =10^4 (C=00100 in binary, C=4 in decimal) Count: 4000 (D=00000111110100000)

Status: Normal condition (E=000) Channel: 8 (F=01000)

Measurement data = 4000 × 10000 / 2

= 9.76 kΩ

1-42 Agilent B1500 Programming Guide, Edition 3

Programming Basics

E Status. Three bits.

• Status for Source_data: Priority of appearance is 001<010.

EExplanation

001 Data is for the first or intermediate sweep step. 010 Data is for the last sweep step.

• Status for measurement data. See Table 1-10. For SMU, the priority of appearance is as follows:

• For the quasi-pulsed spot measurement: 0<1<2<3<4<6 or 7

• For other measurement: 0<6<7<1<2<3<4

F Channel number of the measurement/source channel. Five bits.

FExplanation

Data Output Format

00001 (1) Channel 1. 00010 (2) Channel 2. 00011 (3) Channel 3. 00100 (4) Channel 4. 00101 (5) Channel 5. 00110 (6) Channel 6. 00111 (7) Channel 7. 01000 (8) Channel 8. 01001 (9) Channel 9. 01010 (10) Channel 10. 11111 (31) Invalid data is returned.

Agilent B1500 Programming Guide, Edition 3 1-43

Programming Basics Data Output Format

Table 1-10 Status for Measurement Data

EExplanation

000 (0) No status error occurred. 001 (1) For SMU: Another channel reached its compliance setting.

For CMU: CMU is in the NULL loop unbalance condition.

010 (2) For SMU: This channel reached its compliance setting.

For CMU: CMU is in the IV amplifier saturation condition.

011 (3) Measurement data is over the measurement range. Or the sweep

measurement was aborted by the automatic stop function or power compliance. Meaningless value will be returned to D.

100 (4) For SMU: One or more channels are oscillating. Or source output did

not settle before measurement.

110 (6) F or linear or binary search measurement, the target value was not

found within the search range. Returns the source output value.

For quasi-pulsed spot measurement, the detection time was over the limit (3 s for Short mode, 12 s for Long mode).

111 (7) For linear or binary search measurement, the search measurement was

stopped. Returns the source output value. See status of Data_sense. For quasi-pulsed spot measurement, output slew rate was too slow to

perform the settling detection.

Or quasi-pulsed source channel

reached the current compliance before the source output voltage changed 10 V from the start voltage.

a. Make the wait time or delay time longer. Or make the current compli-

ance larger. For pulsed measurement, make the pulse width longer, or make the pulse base value closer to the pulse peak value. For current output by limited auto ranging, make the output range lower.

b. Make the current compliance or start voltage larger . Or set the detection

interval to Long. If this status occurs with the Long mode, perform the spot measurement.

c. Make the current compliance larger. Or set the detection interval to

Long. If this status occurs with the Long mode, perform the spot measurement or pulsed spot measurement.

d. Perform the pulsed spot measurement or spot measurement.

1-44 Agilent B1500 Programming Guide, Edition 3

8 Bytes Data Elements

65432107 65432107 65432107 65432107

Byte 5

Byte 6

Byte 7

Byte 8

65432107 65432107 65432107 65432107

Byte 1

Byte 2

Byte 3

Byte 4

65432107 65432107 65432107 65432107

Byte 5 Byte 6 Byte 7 Byte 8

65432107 65432107 65432107 65432107

Byte 1 Byte 2 Byte 3 Byte 4

For time data:

For measurement data and source data:

To use the 8 bytes binary data format, enter the FMT13 or FMT14 command. The data (Data, Source_data, Sampling_no, Data_search, Data_sense, Osc_level,

and Dc_bias) will be sent as the binary val ue shown in Fig ure 1-2. The format of the time data (Time) will be different from the others.

Figure 1-2 8 Bytes Binary Data Output Format

A: Type. One bit. B: Parameter. Seven bits. C: Range. One byte. Range value used to calculate the data.

Programming Basics

Data Output Format

D: Data count. Fo ur bytes. E: Status. One byte. F: Channel number. Five bits. G: A/D converter. Three bits. H: Time data count. Six bytes.

These data elements are described in the following pages.

Agilent B1500 Programming Guide, Edition 3 1-45

Programming Basics Data Output Format

A Type. One bit.

AExplanation

0 Data other than measurement data. 1 Measurement data.

B Parameter. Seven bits.

BExplanation

0000000 (0) SMU voltage measurement or output data (V) 0000001 (1) SMU current measurement or output data (A) 0000010 (2) SMU QSCV capacitance measurement data (F) 0000011 (3) Time data (second) 0000110 (6) Sampling index 0000111 (7) CMU output signal frequency data (Hz) 0001000 (8) CMU oscillator level output data (Vac) 0001001 (9) CMU DC bias output data (Vdc) 0001010 (10) CMU oscillator level monitor data (Vac) 0001011 (11) CMU DC bias monitor data (Vdc) 0001100 (12) CMU resistance measurement data (Ω) 0001101 (13) CMU reactance measurement data (Ω) 0001110 (14) C MU conductance measurement data (S) 0001111 (15) CMU susceptance measurement data (S) 0010000 (16) SMU QSCV leakage current averaging value (A), in transition 0010001 (17) SMU QSCV voltage V

(V), before voltage transition

0010010 (18) SMU QSCV voltage V (V), after voltage transition 0010011 (19) SMU QSCV leakage current IL

(A), before voltage transition

0010100 (20) SMU QSCV leakage current IL (A), after voltage transition 0010101 (21) SMU QSCV charge current I (A), in transition 0010110 (22) SMU QSCV voltage averaging value (V), in transition 0010111 (23) SMU QSCV sink SMU current setup value (A)

1-46 Agilent B1500 Programming Guide, Edition 3

C Range. One byte. Range value used to calculate the data.

for SMU data for CMU data

V I C Z AC DC F

00000000 (0) 1 Ω 00000001 (1) 10 Ω 00000010 (2) 100 Ω 00000011 (3) 1 kΩ 8 V 1 kHz 00000100 (4) 10 kΩ 16 mV 12 V 10 kHz 00000101 (5) 100 kΩ 32 mV 25 V 100 kHz 00000110 (6) 1 MΩ 64 mV 1 MHz 00000111 (7) 10 MΩ 125 mV 100 V 00001000 (8) 0.5 V 1 pA 1 pF 100 MΩ 250 mV

Programming Basics

Data Output Format

00001001 (9) 5 V 10 pA 10 pF 1 GΩ 00001010 (10) 100 pA 100 pF 10 GΩ 00001011 (11) 2 V 1 nA 1 nF 100 GΩ 00001100 (12) 20 V 10 nA 10 nF 00001101 (13) 40 V 100 nA 100 nF 00001110 (14) 100 V 1 μA1 μF 00001111 (15) 200 V 10 μA10 μF 00010000 (16) 100 μA 100 μF 00010001 (17) 1 mA 1 mF 00010010 (18) 10 mA 10 mF 00010011 (19) 100 mA 100 mF 00010100 (20) 1 A 1 F 00011111 (31) Invalid data is returned.

Agilent B1500 Programming Guide, Edition 3 1-47

Programming Basics Data Output Format

D Data count. This value is expressed in 4 bytes binary data. The measurement data

and the output data can be calculated by the following formula. Resistance or reactance = Count × Range / 2

Conductance or susceptance = Count / (224 × Range) DC bias output value = Count / 10 00 Data other than the above parameters = Count × Range / 1000000 where, Count is the D value, and Range is the measurement range or output range

given by C. For the decimal value of C, the Range value of current and capacitance data will be

10^(C-20), and the Range value of resistance, reactance, conductance, and susceptance data will be 10^C Ω.

If the top bit of D is 0, Count is posit ive and equal to the value given by the following 31 bits.

If the top bit of D is 1, Count is negative. Calculate Count by subtracting 2147483648 (10000000000000000000000000000000 in binary) from the value given by the following 31 bits.

Example:

If the output binary data is: 1000000100001011000000000000000110000110101000000000000000000001 then,

Type: Measurement data (A=1) Parameter: Current (B=0000001)

Range: 1 nA=10^(11-20) A (C=01011 in bin ary, C=11 in decimal) Count: 100000 (D=00000000000000011000011010100000)

Status: Normal condition (E=00000000) ADC: High speed ADC (G=000) Channel: SMU1 (channel number 1) (F=00001)

Measurement data = 100000 × 1E–9/1E+6 = 100 pA

NOTE B=0000001 and C=00010100 means that HPSMU used 1 A range or MPSMU used

200 mA range. Then use Range=1 to calculate the data for both HPSMU and MPSMU. Range=0.2 is not available even if the range value is 200 mA.

1-48 Agilent B1500 Programming Guide, Edition 3

Programming Basics

E Status. One byte. Meaningless for the Time data.

• Status for Source_data: Priority of appearance is 001<010.

EExplanation

00000001 Data is for the first or intermediate sweep step. 00000010 Data is for the last sweep step.

• Status for measurement data. See Table 1-11. For SMU, the priority of appearance is as follows:

• For the quasi-pulsed spot measurement: 0<1<2<4<8<16 or 32

• For other measurement: 0<16<32<1<2<4 <8

F Channel number of the measurement/source channel. Five bits.

FExplanation

Data Output Format

response or invalid data is returned.

11111 (31) Invalid data is returne d.

Agilent B1500 Programming Guide, Edition 3 1-49

Programming Basics Data Output Format

Table 1-11 Status for Measurement Data

EExplanation

00000000 (0) No status error occurred. 00000001 (1) Measurement data is over the measurement range. Or the sweep

measurement was aborted by the automatic stop function or power compliance. Meaningless value will be returned to D.

00000010 (2) For SMU: One or more channels are oscillating. Or source output did

not settle before measurement. For CMU: CMU is in the NULL loop unbalance condition.

00000100 (4) For SMU: Another channel reached its compliance setting.

For CMU: CMU is in the IV amplifier saturation condition. 00001000 (8) For SMU: This channel reached its compliance setting. 00010000 (16) For linear or binary search measurement, the target value was not

found within the search range. Returns the source output value.

For quasi-pulsed spot measurement, the detection time was over the

limit (3 s for Short mode, 12 s for Long mode).

00100000 (32) For linear or binary search measurement, the search measurement was

stopped. Returns the source output value. See status of Data_sense.

For quasi-pulsed spot measurement, output slew rate was too slow to

perform the settling detection.

Or quasi-pulsed source channel

reached the current compliance before the source output voltage

changed 10 V from the start voltage.

a. Make the wait time or delay time longer. Or make the current compliance

larger . For pulsed meas urement, make the pu lse width l onger , or make the pul se base value closer to the pulse peak value. For current output by limited auto ranging, make the output range lower.

b. Make the current compliance or start voltage larger. Or set the detection inter-

val to Long. If this status occurs with the Long mode, perform the spot measurement.

c. Make the current compliance larger. Or set the detection interval to Long. If

this status occurs with the Long mode, perform the spot measurement or p ulsed spot measurement.

d. Perform the pulsed spot measurement or spot measurement.

1-50 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Data Output Format

G A/D converter. Three bits. For the source data and time data, G=000.

GExplanation

000 (0) SMU High Speed ADC 001 (1) SMU High Reso lut i on ADC 010 (2) CMU ADC

H Data count for the time data. This value is expressed in 6 bytes binary data. The time

data can be calculated by the following formula. Time = Count / 1000000 where, Count is the decimal value of H. If the top bit of H is 0, Count is posit ive and equal to the value given by the

following 47 bits. If the top bit of H is 1, Count is negative. Calculate Count by subtracting

140737488355328 (100000000000000000000000000000000000000000000000 in binary) fr om the value given by the following 47 bits.

H=100000000000000000000000000000000000000000000000 means invalid data.

Example:

If the output binary data is: 0000001100000000000000000000000000000001100001101010000000000001 then,

Type: Data other than the measurement data (A=0) Parameter: Time (B=0000011)

Count: 100000 (H=

000000000000000000000000000000011000011010100000)

Channel: SMU1 (channel number 1) (F=00001) Time data = 100000 / 1000000 = 0.1 second

Agilent B1500 Programming Guide, Edition 3 1-51

Programming Basics GPIB Interface Capability

GPIB Interface Capability

The following table lists the GPIB capabilities and functions of the Agilent B1500. These functions provide the means for an instrument to receive, process, and transmit, commands, data, and status over the GPIB bus.

Interface Function Code Description

Source Handshake SH1 Complete capability Acceptor Handshake AH1 Complete capability Talker T6 Basic Talker: YES

Serial Poll: YES Talk Only Mode: NO Unaddress if MLA (my listen address): YES

Listener L4 Basic Listener: YES

Unaddress if MTA (my talk address): YES

Listen Only Mode: NO Service Request SR1 Complete capability Remote/Local RL1 Complete capability (with local lockout) Parallel Poll PP0 No capability Device Clear DC1 Complete capability Device Trigger DT1 Complete capability Controller Function C0 No capability Driver Electronics E1 Open Collector

The B1500 responds to the following HP BASIC statements:

•ABORT (IFC)

• CLEAR (DCL or SDC. same as AB command)

• LOCAL (GTL)

• LOCAL LOCKOUT (LL0)

•REMOTE

• SPOLL (Serial Poll)

• TRIGGER (GET. same as XE command)

1-52 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Status Byte

Status byte bits are turned off or on (0 or 1) to represent the instrument operation status. When you execute a serial poll, an external computer (controller) reads the contents of the status byte, and responds accordingly. When an unmasked status bit is set to “1”, the instrument sends an SRQ to the controller, causin g the con t roller to perform an interrupt service routine.

Bit

Decimal

Value

0 1 Data ready

Indicates whether the output buffer is empty. If an unread data or query response exists, this bit is set to “1”. It is set to “0” when all the stored data has been transferred to the controller, or when the B1500 receives a *RST, BC, FMT, or device clear command.

12Wait

Indicates whether the instrument is in the wait status. This bit is set to “1” when the B1500 has been set to the wait state by the PA, WS, PAX, or WSX command. It is set to “0” when the waiting condition is complete, or when the

B1500 receives a *RST or device clear command. 2 4 Not applicable. This bit is always set to “0”. 3 8 Interlock open

If the interlock circuit is open, and a voltage output or

voltage compliance setup value exceeds ±42 V, this bit is

set to “1” . It is set to “0” when the B1500 receives a s erial

poll, *RST, or device clear command.

Description

4 16 Set ready

If the B1500 receives a GPIB command or a trigger signal,

this bit is set to “0”. It is set to “1” when its operation is

completed. This bit is also set to “0” when the self-test or

calibration is started by front panel operation, and set to

“1” when it is completed.

Agilent B1500 Programming Guide, Edition 3 1-53

Programming Basics Status Byte

Bit

The status byte register can be read with either a serial poll or the *STB? query command. Serial poll is a low-level GPIB command that can be executed by the SPOLL command in HP BASIC, for example Status=SPOLL(@B1500).

In general, use serial polling (no t *STB?) inside interrupt service routines. Use *STB? in other cases (not in interrupt service routine) when you want to know the value of the Status Byte.

Decimal

Value

532Error

Indicates whether any error has occurred. If an error occurred, this bit is set to “1”. It is set to “0” when the B1500 receives a serial poll, *RST, ERR?, CA, *TST?, *CAL?, DIAG? or device clear command.

6 64 RQS (You cannot mask this bit.)

Indicates whether an SRQ (Service Request) has occurred. This bit is set to “1” whenever any other unmasked bit is set to “1”. This causes the B1500 to send an SRQ to the controller. It is set to “0” when the B1500 receives a serial poll, *RST, or device clear command.

7 128 Not applicable. This bit is always set to “0”.

Description

NOTE If Bit 3 and Bit 5 are masked, they are not set to “0” by a serial poll. Also, if these

bits are masked, set to “1”, and then un masked, a serial poll does no t set them to “0”. After a masked bit is set to “1”, removing the mask does not set Bit 6 to “1”. That is,

the B1500 does not send an SRQ to the controller. Therefore, if you remove a mask from a bit, it is usually best to do it at the beginning of the program.

1-54 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Programming Tips

This section provides the following additional information on creating measurement programs. It is useful for check ing th e operation status, improving the measurement speed, and so on.

• “To Confirm the Operation”

• “To Confirm the Command Completion”

• “To Disable the Auto Calibration”

• “To Optimize the Measurement Range”

• “To Optimize the Integratio n Time”

• “To Disable the ADC Zero Function”

• “To Optimize the Source/Measurement Wait T ime”

• “To Use the Internal Program Memory”

• “To Get Time Data with the Best Resolution”

• “To Use Sweep Source as a Constant Source”

• “To Start Measurements Simultaneously”

• “To Interrupt Command Execution”

• “To Use Programs for Agilent 4142B”

• “To Use Programs for Agilent 4155/4156”

• “To Use Programs for Agilent E5260/E 5270”

Agilent B1500 Programming Guide, Edition 3 1-55

Programming Basics Programming Tips

To Confirm the Operation

To complete the measurement program, you can insert statements to check the B1500 operation status as shown below. This example starts the measurement, checks the status caused by the statements before the ERR? command, reads and displays the measurement data without errors, or displays an error message when an error occurs.

OUTPUT @B1500;"XE" OUTPUT @B1500;"ERR? 1" ENTER @B1500;C od e IF Code=0 THEN

ENTER @B1500 USING "#,3X,12D,X";Mdata PRINT "I(A)=";Md at a ELSE OUTPUT @B1500;"EMG? ";Code

ENTER @B1500;M sg $ PRINT "ERROR: ";Ms g$ END IF

To Confirm the Command Completion

To check the completion of the previous command execution, use the *OPC? query command. Entering the *OPC command before sending a command to other equipment serves to delay its operation until the B1500 has completed its operation. The *OPC? command is useful to control equipments sequentially.

For example, the following program segment waits until the B1500 completes the DI command execution, and sends the XYZ command to equipmen t identified by @Address.

OUTPUT @B1500;"DI";1,0,1.0E-10,1 OUTPUT @B1500;"*OPC?" ENTER @B1500; A$ OUTPUT @Address;"XYZ"

To Disable the Auto Calibration

The auto calibration function triggers self-calibration automatically every 30 minutes after measurement. When the function is enabled, open the measurement terminals frequently because calibration requires open terminals.

If you execute automatic measurements as a batch job that might leave the device connected for over 30 minutes after the measurements, disable auto calibration. Otherwise, the calibration might not be performed properly, or unexpected output might appear at the measurement terminals, and it could even damage the dev ice. To disable auto calibration, send the CM 0 command.

1-56 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Programming Tips

To Optimize the Measurement Range

The most effective way to improve measurement speed is to reduce the number of range changes. The limited auto ranging mode is more effective than the auto ranging mode. The fixed range mode is the most effecti ve.

Check the typical value of the measurement data, select the optimum range, and perform measurement using the fixed range mode.

To Optimize the Integration Time

For best reliability and repeatability of the measurement data, the integration time or the number of averaging samples of the A/D converter must be increased. This increases the measurement time.

A long integration time and numerous samples are required for low current/ voltage measurements. However, the values can be decreased for medium or high current/voltage measurements. Enter the following commands:

AV Sets the number of averaging samples of the A/D converter. This

command is compatible with the AV command of the Agilent 4142B.

AAD Selects the type of the A/D converter (high-speed ADC or

high-resolution ADC) .

AIT Sets the integration time of the high-resolution ADC or the number of

averaging samples of the high-speed ADC. The AIT command covers the function of the AV command. The last command setting is available for the measurement.

For more information regarding these commands, see Chapter 4, “Command Reference.”

To Disable the ADC Zero Function

This information is effective only when the high resolution A/D converter is used for the measurement. If measurement speed is given top priority or is more important than reliability, disable the ADC zero function by sending the AZ 0 command. This roughly halves integration time.

NOTE The ADC zero function is the function to cancel offset of the high resolution ADC.

This function is especially effective for low voltage measurements.

Agilent B1500 Programming Guide, Edition 3 1-57

Programming Basics

Measurement wait time

Time

: Measurement

Hold time

Delay time

Source wait time

Step delay time

Programming Tips

To Optimize the Source/Measurement Wait Time

If measurement speed is given top priority or is more important than reliability, set the wait time shorter by using the WAT command. The source wait time is the time the source channel always waits before changing the source output value. The measurement wait time is the time the measurement channel always waits before starting measurement. The time is given by the following formula:

wait time = initial wait time × A+B where, initial wait time is the time the B1500 automatically sets and you cannot

change. The initial source wait time is not the same as the initial measurement wait time. A and B are the command parameters of the WAT command.

The wait time settings are effective for all modules.

Figure 1-3 Source/Measurement Wait Time

NOTE The wait time can be ignored if it is shorter than the delay time.

It is not easy to determine the best wait time. If you specify it too short, the measurement may start before device characteristics stable. If too long, time will be wasted.

The initial wait time may be too short for measurements of high capacitance or slow response devices. Then set the wait time longer.

For measurements of low capacitance or fast response devices, if measurement speed has top priority or is more important than reliability and accuracy, set the wait time shorter.

1-58 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Programming Tips

To Use the Internal Program Memory

If your program repeats the setup and measurement for a number of devices, use the internal program memory. For these measurements, using the internal program memory reduces the command transfer time, and improves the program execution speed.

You can enter a maximum of 2,000 programs (total 40,000 commands) into the internal program memory. See Chapter 2, “Remote Mode Functions.”

To Get Time Data with the Best Resolution

To read the time data with the best resolu tion (100 μs), the timer must be cleared within the following interval:

• 100 sec or less (for FMT1, 2, or 5 data output format)

• 1000 sec or less (for FMT 11, 12, 15, 21, 22, or 25 data output format) Send the TSR command to clear the timer.

To Use Sweep Source as a Constant Source

The following setup enables sweep source to force a constant current or voltage.

• Sweep start value = Sweep stop value (for WI, WV, or WNX). Also, setting number of sweep steps to 1 enables to perform a spot measurement.

To Start Measurements Simultaneously

Spot measurement, staircase sweep measurement, and multi channel sweep measurement enable to use multiple measurement channels. Then the measurement channels perform measurement in the order defined in the MM command. However , the measurement channels with the following setup start measurements simultaneously.

• To set the multi channel sweep m easu remen t mode (MM 16).

• To set the measurement ranging mode to fixed (for RI or RV).

• To use the high-speed ADC (use AV).

NOTE Measurement setup is independent from source output setup. So, this simultaneous

measurement cannot be brok en by the source o utput setup. A ny set ting of t he outp ut ranging mode is effective for the simultaneous measurement.

Agilent B1500 Programming Guide, Edition 3 1-59

Programming Basics

Voltage or current

Measurement trigger (e.g. XE)

Hold

Start value, Stop value

Previous value

: Measurement

Delay Step delay

Sampling interval = Delay + Step delay

Programming Tips

To Perform Quasi-Sampling Measurement

The following setup enables to perform a quasi-sampling measurement. Then the sampling interval will be sum of delay time and step delay time.

• Sets the sweep measurement mode (MM 2 or MM 16).

• Sweep start value = Sweep stop value (for WI, WV, or WNX).

• Sets hold time, delay time, and step delay time (WT).

To Interrupt Command Execution

The B1500 executes commands in the received order. However, only the following commands can interrupt the command execution.

Table 1-12 Interrupt Commands

Command Description

AV Changes the number of averaging samples during the

measurement.

AIT Changes the A/D converter setting of the SMU during the

measurement.

ACT Changes the A/D converter setting of the MFCMU during the

measurement. AB Aborts the command execution. *RST Resets the B1500 during the command execution. XE If the B1500 has been set to the wait status by the PA or PAX

command, the XE command can be used to release the wait

status. For details, see Chapter 4, “Command Reference.”

1-60 Agilent B1500 Programming Guide, Edition 3

Programming Basics

Programming Tips

To Use Programs for Agilent 4142B

Agilent B1500 s upports m ost of t he commands and the d ata out put for mat support ed by the Agilent 4142B Modular DC Source/Monitor. To reuse the programs created for the Agilent 4142B, confirm the following and modify the programs if necessary.

• To remove all unsupported commands Some commands are not supported owing to differences in the modules

supported by each instrument. See Table 1-13 that shows the commands not supported by the B1500. Do not use these commands.

Perform the linear search or binary search measurement as a substitute for the analog search measurement that needs the analog feedback unit (AFU).

Use a source/monitor unit (SMU) instead of the voltage source/voltage monitor unit (VS/VMU). Note that the SMU cannot perform the differential voltage measurements.

• FL command The initial setting of the FL command is different. It is ON for the Agilent

4142B, and OFF for the B1500. Add the FL1 command to use the filter.

• AV command This command is used to set the A/D converter of the B1500. To set the high resolution ADC installed in the B1500, use the AAD and AIT

commands.

• *TST? command Use 11 to specify the B1500 mainframe instead of 9 that indicates the 4142B

mainframe.

Table 1-13 Modules and Comman ds Unsupported

Plug-in Module Commands

Analog Feedback Unit ASM, AT, ASV, AIV, AVI High Current Unit PDM, PDI, PDV High Voltage Unit POL Voltage Source/Voltage Monitor Unit VM

Agilent B1500 Programming Guide, Edition 3 1-61

Programming Basics Programming Tips

To Use Programs for Agilent 4155/4156

Agilent B1500 supports commands similar to the FLEX command of the Agilent 4155B/4156B/4155C/4156C Parameter Analyzer. However, not all command sets are fully compatible. To reuse the programs created for the Agilent 4155/4156, the following modifications are required.

• To remove all unsupported commands Table 1-14 shows the commands not supported by the B1500. You cannot use

these commands. The SCPI commands and 4145 syntax commands are not supported neither.

The B1500 does not need the US and :PAGE commands that are necessary to change the control mode of the Agilent 4155/4156.

• To check and correct the command syntax Even if the command name is the same, the available parameters and values may

be different. Check and correct the command parameters.

• To change the FMT command parameter Use the FMT 21, FMT 22, or F MT 25 command that sets the data output format

compatible with the 4155/4156 ASCII format.

• To delete RMD? The B1500 does not need the RMD? command that is necessary to put the

measurement data into the output data buffer of the Agilent 4155/4156.

• FL command The initial setting of the FL command is different. It is ON for the Agilent

4155/4156, and OFF for the B1500. Add the FL1 command to use the filter.

• AV command This command is used to set the A/D converter of the B1500. To set the high resolution ADC installed in the B1500, use the AAD and AIT

commands.

• To replace TI?/TV?/TTI?/TTV? with TI/TV/TTI/TTV respectively

• To replace WM with LSM for the linear search measurement

• To replace TSQ? with TSQ

1-62 Agilent B1500 Programming Guide, Edition 3

• If you reuse the built-in IBASIC programs:

• Change the GPIB address.

• Remove the statements to use the built-in flexible disk drive.

Table 1-14 4155/4156 FLEX Commands Unsupported

Category Command

Control mode :PAGE, US, US42 Measurement mode VM, VMD Staircase/pulsed sweep source setup ESC Sampling source setup MP Quasi-static CV measurement setup QSZ? PGU control POR, SPG, SPP, SRP Stress source setup STC, STI, STM, STP, STT, STV Integration time SIT, SLI

Programming Basics

Programming Tips

Measurement execution TI?, TTI?, TTV?, TV? Time stamp TS Q? Output data RMD? Abort/pause/wait *WAI Zero offset cancel GOC, SOC SMU/PGU selector SSP R-box RBC External trigger STG Network operation CLOSE, OPEN, PRN, RD?, SDSK, SPL,

SPR, WR Status byte *CLS, *ESE(?), *ESR? Query CMD?, *OPT?, :SYST:ERR?

Agilent B1500 Programming Guide, Edition 3 1-63

Programming Basics Programming Tips

To Use Programs for Agilent E5260/E5270

Agilent B1500 s upports m ost of t he commands and the d ata out put for mat support ed by the Agilent E5260/E5270 Series of Parametric Measurement Solutions. To reuse the programs created for the Agilent E5 260/E5270, confirm the following and modify the programs if necessary.

• To remove all unsupported commands Some commands are not supported owing to differences in the mainframe. See

Table 1-15 that shows the commands not supported by the B1500. The commands will not cause errors because the B1500 will ignore these commands. However remove these commands to reduce the load.

• *CAL?, RCV, *TST? command Use 11 to specify the B1500 mainframe instead of 9 that indicates the

E5260/E5270 mainframe.

• DIAG? command The B1500 does not support the front panel key test and the beeper test. So, do

not use the parameter item=2 and 5.

Table 1-15 E5260/E5270 FLEX Commands Unsupported

Category Command

Display Control RED, DFM, SPA, MPA, SCH, MCH Keyboard Control KLC

1-64 Agilent B1500 Programming Guide, Edition 3

2 Remote Mode Functions

Remote Mode Functions

This chapter describes the functions of the Agilent B1500 in the remote mode, and the initial settings.

• “Measurement Modes”

• “Synchronous Output”

• “Automatic Abort Function”

• “Parallel Measurement Function”

• “Program Memory”

• “Digital I/O Port”

• “Trig ger Fu nct i on”

• “Initial Settings”

NOTE Synchronous Output

You can use synchronous output that will be synchronized to the output of the primary sweep or search source. The output is available for the following measurement modes:

• “Staircase Sweep Measurements”

• “Pulsed Sweep Measurements”

• “Staircase Sweep with Pulsed Bias Measurements”

• “Binary Search Measurements”

• “Linear Search Measurements”

The synchronous source supports the output mode (voltage or current) same as the primary source, and does not support the pulsed output.

2-2 Agilent B1500 Programming Guide, Edition 3

Remote Mode Functions

Measurement Modes

The Agilent B1500 provides the following measurement modes.

• “Spot Measurements”

• “Pulsed Spot Measurements”

• “Staircase Sweep Measurements”

• “Multi Channel Sweep Measurements”

• “Pulsed Sweep Measurements”

• “Staircase Sweep with Pulsed Bias Measurements”

• “Quasi-Pulsed Spot Measurements”

• “Binary Search Measurements”

• “Linear Search Measurements”

• “Sampling Measurement”

• “Quasi-static CV Measurement”

• “Spot C Measurement”

• “Pulsed Spot C Measurement”

• “CV (DC bias) Sweep Measurement”

• “Pulsed Sweep CV Measurement”

• “C-f Sweep Measurement”

• “CV (AC level) Sweep Measurement”

• “C-t Sampling Measurement”

NOTE About Search Measurements

The B1500 supports search measurement to find a point on an I-V curve where a specified condition is satisfied. For example, it searches for a breakdown voltage or threshold voltage at a specified current.

Search measurements are performed by one or two SMUs. For two SMUs, one is the search channel, and the other is a sense channel. When one SMU is used, it serves as both search and sense channel. Basically, the search channel forces voltage or current until the search stop condition is satisfied.

Agilent B1500 Programming Guide, Edition 3 2-3

Remote Mode Functions

Voltage or cu rrent

DV/DI DV/DI Measurement trigger (e.g. XE)

Measurement time

Channel 1 output

Channel 2 output

Setup value

Previous value

Setup value

Previous value

Voltage or cu rrent

Time

: Measurement

Measurement Modes

Spot Measurements

Spot measurement is performed as shown below. The measurement channel performs one point measurement.

Figure 2-1 Spot Measurements

1. The source channel starts output by the DV or DI command. Multiple channels can be set.

2. The measurement channel starts measurement by a trigger, such as the XE command. If the trigger is received during the settling time of the source channels, measurement starts after the settling time.

If you use multiple measurement channels, the channels perform measurement in the order defined in the MM command.

3. After measurement, the source channels continue the source output. For 0 V output, enter the DZ command that is used to memorize the present

settings of the channel and change the output to 0 V.

NOTE The DV command is used to force voltage, and the DI command is used to force

current.

2-4 Agilent B1500 Programming Guide, Edition 3

Pulsed Spot Measurements

Voltage or current

Pulse value

Base value

Previous value

Time

: Measurement

Hold time

Pulse width

Pulse period

Hold time

TriggerTrigger (e.g. XE)

Pulse period

PT/PV/PI

Pulsed spot measurement is performed as shown below. The measurement channel performs one point measurement while the source channel is forcing a pulse.

Figure 2-2 Pulsed Spot Measurements

Remote Mode Functions

Measurement Modes

1. The pulse source channel sets output by the PT command and the PV or PI command. Only one channel can be used for the pulse source.

2. The pulse source channel starts output by a trigger, such as the XE command.

3. The measurement channel starts measurement as shown i n Figure 2-2. The channel performs measurement so that the pulse width and pulse period are kept (the integration time setting is ignored). Only one channel can be used for measurement.

4. After measurement, the pulse source forces the pulse base value, and keeps it. If the next trigger occurs within the pulse period, pulse output is as follows.

• If the rest of the pulse period is longer than the hold time as shown in Figure

2-2, the pulse source waits for the rest, then starts the pulse output.

• If the rest of the pulse period is shorter than the hold time, the pulse source

waits for the hold time since the last trigger, then starts the pulse output.

For 0 V output, enter the DZ command that is used to memorize the present settings of the channel and change the output to 0 V.

NOTE The PT command sets the pulse timing parameters, such as pulse width and pulse

period. The PV command sets voltage pulse, and the PI command sets current pu lse.

Agilent B1500 Programming Guide, Edition 3 2-5

Remote Mode Functions

Voltage or current

Stop value

Start value

Previous value

Time

: Measurement

Hold time

Step delay time

Trigger (e.g. XE)

WT/WM/WV/WI

Delay time

Step delay time

Delay time

Measurement Modes

Staircase Sweep Measurements

Staircase sweep measurement is performed as shown below. The source channel forces staircase sweep voltage or current, and the measurement channel performs one point measurement at each sweep step.

Figure 2-3 Staircase Sweep Measurements

1. The staircase sweep source sets output by the WT, WM, and WV or WI commands. Only one channel can be used for the sweep source.

2. The sweep source starts output by a trigger, such as the XE command.

3. After the hold time, the sweep source waits for the delay time.

4. After the delay time, the measurement channel starts measurement. If you use multiple measurement channels, the channels perform measurement

in the order defined in the MM command.

5. After measurement, the sweep source waits for the rest of the step delay time if it is set, and the sweep source changes the output value.

6. The B1500 repeats 4 and 5 for all sweep steps.

7. After the sweep measurement, the sweep source forces the start or stop value, as specified by the WM command, and keeps it.

For 0 V output, enter the DZ command that is used to memorize the present settings of the channel and change the output to 0 V.

2-6 Agilent B1500 Programming Guide, Edition 3

Remote Mode Functions

Voltage or cu rrent

Start value

Time

Stop value

Primary sweep

Synchronous sweep

Previous value

Trigger (e.g. XE)

WT/WM/WV/WI

WSV/WSI

Voltage or cu rrent

Start value

Stop value

Previous value

Measurement Modes

NOTE The WT command sets the hold time, delay time, and step delay time. The WM

command sets the automatic abort function and the output after measurement. The WV command sets the sweep voltage, and the WI command sets the sweep current. The start and stop values must have the same polarity for log sweep.

To Use Synchronous Sweep Source

One more channel can be set up as a sweep source that has the output synchronized with the staircase sweep. Refer to “Synchronous Output” on page 2-39. After the measurement, the synchronous sweep source forces the start or stop value, as specified by the WM command, and keeps it.

Figure 2-4 Synchronous Sweep

NOTE The WSV command sets the sweep voltage, and the WSI command sets the sweep

current. You can use the same output mode (voltage or current) as the primary sweep. The start and stop values must have the same polarity for log sweep.

To Stop Sweep Output

An automatic abort function is available. Refer to “Automatic Abort Function” on page 2-41.

Even if the automatic abort function is disabled, the B1500 automatically stops measurement if power compliance is enabled for the sweep source and the power compliance or an automatic abort condition is detected.

Agilent B1500 Programming Guide, Edition 3 2-7

Remote Mode Functions

Trigger (e.g. XE)

WT/WM/WV/WI

Voltage or current

Stop value

Start value

Previous value

Time

: Measurement

Hold time

Delay time

Stop value

Start value

Previous value

Voltage or current

Stop value

Start value

Previous value

Voltage or current

WNX

Primary sweep source

Second sweep source

Tenth sweep source

Step delay time

Delay time

Measurement Modes

Multi Channel Sweep Measurements

Multi channel sweep measurement is performed as shown below. The source channel forces staircase sweep voltage or current, and the measurement channel performs one point measuremen t at each sweep step . Up to ten ch annels can be used for both sweep output and measurement. Both voltage output mode and current output mode are available for the sweep s ources regardless o f the output mode of the primary sweep source.

Figure 2-5 Multi Channel Sweep Measurements using High-Resolution A/D Converter

1. The primary sweep source sets output by the WV or WI comman ds. And the nth (n=2 to 10) sweep source sets output by the WNX command.

2. The sweep sources simultaneously start output by a trigger, such as the XE command. However, if a sweep source sets power compliance or forces logarithmic sweep current, the sweep sources start output in the order specified by the n value. Then the first output is forced by the channel set by the WI or WV command.

3. After the hold time, the sweep sources wait for the delay time.

4. After the delay time, the measurement channel starts measurement. If you use multiple measurement channels, the channels that use the high speed ADC with the fixed ranging mode start measurement simultaneously, then other channels perform measurement in the order defined in the MM command.

5. After measurement, the sweep source waits for the rest of the step delay time if it is set, and the sweep source changes the output value.

2-8 Agilent B1500 Programming Guide, Edition 3

Remote Mode Functions

Measurement Modes

6. The B1500 repeats 4 and 5 for all sweep steps.

7. After the sweep measurement, the sweep sources force the start or stop value, as specified by the WM command, and keep it.

For 0 V output, enter the DZ command that is used to memorize the present settings of the channel and change the output to 0 V.

NOTE The WT command sets the hold time, delay time, and step delay time. The WM

command sets the automatic abort function and the output after measurement. The WV/WI command sets the output of the f irst sweep sou rce, and the WNX command sets the output of the nth (n=2 to 10) sweep source. The start and stop values must have the same polarity for log sweep.

To Stop Sweep Output

An automatic abort function is available. Refer to “Automatic Abort Function” on page 2-41.

Agilent B1500 Programming Guide, Edition 3 2-9

Remote Mode Functions

Voltage or current

Stop value

Start value

Previous value

Time

: Measurement

Hold time

Pulse period

Trigger (e.g. XE)

PT/WM/PWV/PWI

Pulse base value

Pulse width

Pulse period Pulse period

Measurement Modes

Pulsed Sweep Measurements

Pulsed sweep measurement is performed as shown below . The s ource channel forces pulsed sweep voltage or current, and the measurement channel performs one point measurement at each sweep step.

Figure 2-6 Pulsed Sweep Measurements

1. The pulsed sweep source sets output by the PT, WM, and PWV or PWI commands. Only one channel can be used for the pulsed sweep source.

2. The pulsed sweep source starts output by a trigger, such as the XE command.

3. After the hold time, the measurement channel starts measurement as shown in Figure 2-6. The channel performs measur ement so that the puls e width and pulse period are kept (the integration time set ting is ignored) . Only one channel can be used for measurement.

4. After measurement, the pulsed sweep source forces the pulse base value, and waits for the rest of the pulse period. Then the pulsed sweep source changes the output value.

5. The B1500 repeats measurement and 4 for all sweep steps.

6. After the pulsed sweep measurement, the pulsed sweep source forces the pulse base value, and keeps it.

For 0 V output, enter the DZ command that is used to memorize the present settings of the channel and change the output to 0 V.

2-10 Agilent B1500 Programming Guide, Edition 3

Remote Mode Functions

Voltage or current

Start value

Time

Stop value

Pulse base value

Stop value

Synchronous sweep

Pulsed sweep

Previous value

Trigger (e.g. XE)

PT/WM/PWV/PWI

WSV/WSI

Start value

Previous value

Voltage or current

Measurement Modes

NOTE The PT command sets the hold time, pulse width, and pulse period. The WM

command sets the automatic abort function. The PWV sets the pulsed sweep voltage, and the PWI sets the pulsed sweep current.

To Use Synchronous Sweep Source

One more channel can be set up as a staircase sweep source that has the output synchronized with the pulsed sweep. Refer to “Syn chronou s Outpu t” on page 2-39. After the measurement, the synchronous sweep source forces the start value, and keeps it.

Figure 2-7 Synchronous Sweep

NOTE The WSV command sets the sweep voltage, and the WSI command sets the sweep

current. You can use the same output mode (voltage or current) as the pulsed sweep.

To Stop Sweep Output

An automatic abort function is available. Refer to “Automatic Abort Function” on page 2-41.

Agilent B1500 Programming Guide, Edition 3 2-11

Remote Mode Functions

Voltage or current

Start value

Time

Stop value

Pulse base value

Pulse peak value

Pulsed bias

Staircase sweep

Previous value

Trigger (e.g. XE)

WM/WV/WI

PT/PV/PI

Previous value

Voltage or current

: Measurement

Hold time

Pulse width

Pulse period

Measurement Modes

Staircase Sweep with Pulsed Bias Measurements

Staircase sweep with pulsed bias measurement is performed as shown below. The source channel forces staircase sweep voltage or current, the pulse channel forces pulsed bias, and the measurement channel performs one point measurement at each sweep step.

Figure 2-8 Staircase Sweep with Pulsed Bias Measurements

1. The staircase sweep source sets output by the WM, and WV or WI commands. Only one channel can be used for the sweep source.

2. The pulsed source sets output by the PT, and PV or PI commands. Only one channel can be used for the pulsed source.

3. The source channels start output by a trigger, such as the XE command.

4. After the hold time, the measurement channel starts measurement as shown in Figure 2-8. The channel performs measur ement so that the puls e width and pulse period are kept (the integration time set ting is ignored) . Only one channel can be used for measurement.

5. After the measurement, the sweep source changes the output value. Then the pulsed source forces the pulse base value, and waits for the rest of the pulse period until the next pulse output.

6. The B1500 repeats measurement and 5 for all sweep steps.

2-12 Agilent B1500 Programming Guide, Edition 3

Remote Mode Functions

Voltage or cu rrent

Start value

Time

Stop value

Primary sweep

Synchronous sweep

Previous value

Trigger (e.g. XE)

WT/WM/WV/WI

WSV/WSI

Voltage or cu rrent

Start value

Stop value

Previous value

Measurement Modes

7. After the sweep measurement, the pulsed source forces the pulse base value, and the sweep source forces the start or stop value, as specified by the WM command, and keeps it.

For 0 V output, enter the DZ command that is used to memorize the present settings of the channel and change the output to 0 V.

NOTE The WM command sets the automatic abort function and the output after

measurement. The WV command sets the sweep vo ltage, an d th e WI comm and sets the sweep current. The start and stop values must have the same polarity for log sweep.

The PT command sets the pulse timing parameters, such as pulse width and pulse period. The PV command sets the voltage pulse, and the PI command sets current pulse.

To Use Synchronous

One more channel can be set up as a sweep source that has the output synchronized with the staircase sweep. Refer to “Synchronous Output” on page 2-39.

Sweep Source

After the measurement, the synchronous sweep source forces the start or stop value, as specified by the WM command, and keeps it.

Figure 2-9 Synchronous Sweep

Agilent B1500 Programming Guide, Edition 3 2-13

Remote Mode Functions Measurement Modes

NOTE The WSV command sets the sweep voltage, and the WSI command sets the sweep

current. You can use the same output mode (voltage or current) as the primary sweep. The start and stop values must have the same polarity for log sweep.

To Stop Sweep Output

An automatic abort function is available. Refer to “Automatic Abort Function” on page 2-41.

2-14 Agilent B1500 Programming Guide, Edition 3

Quasi-Pulsed Spot Measurements

Voltage

Measurement time

X value

Start value

Previous value

Time

: Measurement

Hold time

Delay time

Trigger (e.g. XE)

BDT/BDM/BDV

Settling detectio n time

The X value is the voltage whe n the settling detection is stopped.

Quasi-pulsed spot measurement is performed as shown below. The measurement channel performs one point measurement while the source channel forces a quasi-pulse voltage. This measurement mode can minimize the output time of the measurement voltage. So it is effective for the breakdown voltage meas urement and the reliability test.

Figure 2-10 Quasi-Pulsed Spot Measurements

Remote Mode Functions

Measurement Modes

1. The quasi-pulse source channel sets output by the BDT, BDM, and BDV commands. Only one channel can be used for the quasi-pulse source.

2. The quasi-pulse source starts output by a trigger, such as the XE command.

3. After the hold time, the quasi-pulse source starts the voltage transition to the stop value (settling detection time). Also, it performs voltage measurement (settling detection) in the interval set by the BDM command. The voltage transition and settling detection continue until the output voltage slew rate becomes half of the rate when settling detection started. The slew rate depends on the cabling and the characteristics of the device. You cannot define it directly . In normal operation, the slew rate will be slower in the following conditions:

• When the quasi-pulse source applies voltage close to the stop value.

• When the quasi-pulse source reaches its current compliance due to the

breakdown condition of the device under test.

NOTE If the slew rate was too slow when settling detection started or if the settling

detection time was too long, an error occurs and the source returns its output to the start value immediately. See “BDM” on page 4-35.

Agilent B1500 Programming Guide, Edition 3 2-15

Remote Mode Functions Measurement Modes

4. After the settling detection stops, the quasi-pulse source keeps the output.

5. After the delay time, the measurement channel starts measurement. Only one channel can be used for measurement.

6. After measurement, the quasi-pulse source immed iately returns the output to the start value and keeps it.

For 0 V output, enter the DZ command that is used to memorize the present settings of the channel and change the output to 0 V.

NOTE If there is noise or skew on the output voltage, settling detection might stop at an

unexpected voltage.

NOTE The BDT command sets the hold time and delay time, and the BDM command sets

the settling detection interval and measurement mode (voltage or current); the BDV command sets the output. Also |start-stop| must be 10 V or more.

2-16 Agilent B1500 Programming Guide, Edition 3

Binary Search Measurements

Start

Stop

D = | Stop - Start |

+D/4

-D/2

-D/8

-D/16

(1) Normal output

Search stopped

+D/32

+D/64

: Measurement

Start

Stop

+D/4

+D/2

-D/8

-D/16

(2) Cautious output

Search stopped

+D/32

+D/64

Time

Voltage or cu rrent

Hold time

Delay time

Hold time

Delay time

Trigger

BSM, BST, and BSV or BSI

Binary search measurement is performed as shown below. The source channel forces voltage or current, and the measurement channel performs one point measurement. The B1500 repeats this until the search s top condition is satisfied, an d returns the source’s last output value. The last measurement data is also returned if it is set by the BSVM command.

Figure 2-11 Binary Search Measurements

Remote Mode Functions

Measurement Modes

1. The search source sets output by the BSM, BST, and BSV or BSI commands. Only one channel can be used for the search source.

2. The search source starts output by a trigger, such as the XE command.

3. After the hold time, the measurement channel waits for the delay time, and starts measurement as shown in Figure 2-11. The measurement channel can be set by the BGI or BGV command. Only one channel can be used for measurement.

4. After measurement, the search source changes the output value. The output value depends on the ou tput contro l mode, normal or cauti ous, selected by the BSM command. See Figure 2-11.

Agilent B1500 Programming Guide, Edition 3 2-17

Remote Mode Functions

Voltage or current

Start value

Time

Stop value

Primary searc h so ur c e

Synchronous search so urce

Previous value

Trigger (e.g. XE)

BSM, BST, and BSV/BSSV or BSI/BSSI

Offset

Measurement Modes

5. The B1500 repeats measurement and 4 until the search stop condition is satisfied. The search stop condition is one of the following conditions selected by the BGI or BGV command .

• Measured value = Search target value ± limit

• Number of measurement points > limit

6. After the search measurement, the search source forces the start value, the stop value, or the last output value, as specified by the BSM command, and keeps it.

For 0 V output, enter the DZ command that is used to memorize the present settings of the channel and change the output to 0 V.

NOTE The BSM command sets the search control mode, the automatic abort function, and

the output after search. The BST command sets the hold time and delay time. The BSV/BSI command sets the search output, and the BGI/BGV command sets the measurement channel.

To Use Synchronous Output Channel

Figure 2-12 Synchronous Output

NOTE The BSSV/BSSI command sets the synchronous output. You can use the same

You can use the synchronous output channel that provides the output synchronized with the search source. Refer to “Synchronous Output” on page 2-39. After measurement, the synchronous channel forces the start+offset, stop+offset, or the last output value, as specified by the BSM command, and keeps it.

output mode (voltage or current) as the search source. All output values must be covered by the output range of the search source.

2-18 Agilent B1500 Programming Guide, Edition 3

Linear Search Measurements

Voltage or cu rrent

Start value

Time

Stop value

Previous value

Trigger (e.g. XE)

LSM, LSTM, and LSV or LSI

: Measurement

Hold time

Delay time

Search stopped

Delay time

Linear search measurement is performed as shown below. The source channel sweeps voltage or current, and the measurement channel performs one point measurement at each sweep step. The B1500 stops sweep and measurement when the search stop condition is satisfied, and returns the source’s last output value. The last measurement data is also returned if it is set by the LSVM command.

Figure 2-13 Linear Search Measurements

Remote Mode Functions

Measurement Modes

1. The search source sets output by the LSM, LSTM, and LSV or LSI commands. Only one channel can be used for the search source.

2. The search source starts output by a trigger, such as the XE command.

3. After the hold time, the measurement channel waits for the delay time, and starts measurement as shown in Figure 2-13. The measurement channel can be set by the LGI or LGV command. Only one channel can be used for the measurement.

4. After measurement, the search source changes the output value.

5. The B1500 repeats measurement and 4 until the search stop condition is satisfied. The search stop condition is one of the following conditions selected by the LGV or LGI command.

• Measured value is over the search target value.

• Measured value breaks the search target value.

6. After the search measurement, the search source forces the start value, the stop value, or the last output value, as specified by the LSM command, and keeps it.

For 0 V output, enter the DZ command that is used to memorize the present settings of the channel and change the output to 0 V.

Agilent B1500 Programming Guide, Edition 3 2-19

Remote Mode Functions

Voltage or current

Start value

Time

Stop value

Primary search source

Synchronous search source

Previous value

Trigger (e.g. XE)

LSM, LSTM, and LSV/LSSV or LSI/LSSI

Offset

Measurement Modes

NOTE The LSM command sets the automatic abort function and the output after search.

The LSTM command sets the hold time and delay time. The LSV/LSI command sets the search output, and the LGI/LGV command sets the measurement channel.

To Use Synchronous

You can use the synchronous output ch annel th at pro vides outp ut synch ronized w ith the search source. Refer to “Synchronous Output” on page 2-39.

Output Channel

After measurement, the synchronous channel forces the start+offset, stop+offset, or the last output value, as specified by the LSM command, and keeps it.

Figure 2-14 Synchronous Output

NOTE The LSSV/LSSI command sets the synchronous output. You can use the same

output mode (voltage or current) as the search source. All output values must be covered by the output range of the search source.

2-20 Agilent B1500 Programming Guide, Edition 3

Agilent B1500A Programmers Guide

Specifications and Main Features

Frequently Asked Questions

User Manual

1 Programming Basics

Before Starting

About Examples

Getting Started

To Reset the Agilent B1500

To Read Query Response

To Perform Self-Test

To Perform Self-Calibration

To Perform Diagnostics

To Enable Source/Measurement Channels

To Select the Measurement Mode

To Force Voltage/Current

To Set the SMU Integration Time

To Set the Measurement Range

To Pause Command Execution

To Start Measurement

To Force 0 V

To Disable Source/Measurement Channels

To Control ASU

To Control SCUU

To Read Error Code/Message

To Read Spot Measurement Data

To Read Sweep Measurement Data

To Read Time Stamp Data

To Perform High Speed Spot Measurement

Header

Command Input Format

Numeric Data

Terminator

Special Terminator

Separator

Data Output Format

Conventions

ASCII Data Output Format

Binary Data Output Format

GPIB Interface Capability

Status Byte

Programming Tips

To Confirm the Operation

To Confirm the Command Completion

To Disable the Auto Calibration

To Optimize the Measurement Range

To Optimize the Integration Time

To Disable the ADC Zero Function

To Optimize the Source/Measurement Wait Time

To Use the Internal Program Memory

To Get Time Data with the Best Resolution

To Use Sweep Source as a Constant Source

To Start Measurements Simultaneously

To Perform Quasi-Sampling Measurement

To Interrupt Command Execution

To Use Programs for Agilent 4142B

To Use Programs for Agilent 4155/4156

To Use Programs for Agilent E5260/E5270

2 Remote Mode Functions

Measurement Modes

Spot Measurements

Pulsed Spot Measurements

Staircase Sweep Measurements

Multi Channel Sweep Measurements

Pulsed Sweep Measurements

Staircase Sweep with Pulsed Bias Measurements

Quasi-Pulsed Spot Measurements

Binary Search Measurements

Linear Search Measurements