Watlow Electric WR200-1B, WR200-1A User Manual

STANDARD ALUMINUM PEDESTAL HEATERS

Standard Aluminum
Pedestal Heaters
Provide a Quick,
Cost-Effective
Cast-in Solution

Watlow now has 200 mm aluminum pedestal heaters in stock
to quickly solve wafer fabrication needs. Customers can now
save thousands of dollars with off-the-shelf designs since
there are no additional costs for engineering, tooling or mold
creation.Watlow’s pedestal heater design is ideal for
prototype machine trials or engineering experiments as well
as temporary repairs until custom heaters can be
manufactured.

Watlow’s pedestal heaters provide a complete turnkey
solution available in anodized or bare 356 aluminum with
optional add-on features.

The stock anodized cast aluminum pedestal heaters are
complete, ready-to-install parts and are available for same
day shipment.The bare special configured model can be
customized from a list of options and is available with one to
two week delivery depending on options selected.

Stock and configured pedestal heaters are manufactured by
Watlow’s ISO 9001 registered facility in Batavia, Illinois.

Features and Benefits

Overnight delivery from stock

• Ready-to-install heated part

• Cost-effective, no tooling or engineering costs

• Reduces downtime

• Supports 200 mm wafer processing

Operating temperatures up to 400°C

• World class performance

Temperature uniformity

• ±1.0°C at 150°C

1310 Kingsland Drive
Batavia, Illinois 60510 USA
Phone: [phone]
FAX: [phone]
Internet: www.watlow.com
e-mail: [e-mail]

© 2000 Watlow Electric Manufacturing Company Printed in the USA on Recycled Paper, 15% Postconsumer Waste

BAT-STA-60

Specifications

Model WR200-1A (Anodized)

• Material: A356 aluminum alloy

• Diameter: 8.93 in (226.8 mm)

• Thickness: 1.25 in (31.75 mm)

• Surface flatness: <.0005 in (0.0127 mm)

• 3 lift pin holes .125 in (31.75 mm) dia. @ 120° on

3.25 in (82.55 mm) dia. bolt circle

• 1 thermocouple hole .063 in (1.6002 mm) dia.

• 1285W, 208V center exit (1711W/ 240V max.)

• Temperature uniformity:±1° @ 150°C

• Hard anodize thickness: .0015 in (0.0381 mm) per

MIL-A-8625, Type III, Class 1

• Cleaning: IPA wipe down

Standard Design

Model WR200-1B (Bare)

• Material: A356 aluminum alloy

• Diameter: 8.93 in (226.8 mm)

• Thickness: 1.25 in (31.75 mm)

• Surface flatness: <.0005 in (0.0127 mm)

• 1285W, 208V center exit (1711W/ 240V max.)

• Temperature uniformity:±1° @ 150°C

• Cleaning: IPA wipe down

Options (available for model WR200-1B)

• 3 proximity pins .006 in (0.1524 mm) high

• 3 lift pin holes .125 in (31.75 mm) dia. @ 120°

• 1 thermocouple hole .063 in (1.6002 mm) dia.

• Hard anodize thickness: .0015 in (0.0381 mm) per

MIL-A-8625, Type III, Class 1

• Precision cleaning: backfill N

• Contact your local Watlow sales engineer or the factory to

discuss any special options that may be required.

2

3 x .125" equally spaced on

8.93"
dia.

.063" X 1.15" deep
for thermocouple
(from far side)

3.25" dia. bolt circle

8.25"
dia.

1.25"

1.13"

6"

.625"
vacuum seal

surface

24"

Note: Specifications and prices are subject to change

without notice.

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