Versum Materials GASGUARD AP11 BSGS eV Asia, BULKGUARD eV, GASGUARD AP11 BSGS eV, BULKGUARD eV NA/EU Installation, Operation & Maintenance Manual

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Installation / Operation / Maintenance

Manual

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GASGUARD®

AP11 BSGS eV (Asia) /

BULKGUARD® eV (NA/EU)

Manual Part Number: 481319

Edition: Rev-1

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Confidential and Proprietary Data

The information and data contained herein are proprietary to Versum Materials, Inc. and are not to be copied, reproduced, duplicated, or disclosed to others, in whole or in part, without prior written consent of Versum Materials, Inc. The information and data should be available only to those with a need to know. Versum Materials, Inc. makes no representation that the information and data is appropriate for the recipient, and each recipient needs to independently evaluate the appropriateness of the information and data for its use. This Installation and Operation Manual is subject to change without notification. For current technical information please call Product Support at (866)624-7677 from continental U.S., or write Versum Materials, Inc., 1919 Vultee Street, Allentown, PA 18103, Attention: Product Support.

Printed in the U.S.A.

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WARRANTY

Versum Materials, Inc. (hereinafter referred to as "Versum Materials") warrants that: (A) Each new Versum Materials Delivery System is free from defects in material and workmanship under normal use and service for a period of one year from the date of delivery by Versum Materials to the first purchaser. (B) Each new accessory is free from defects in material and workmanship under normal use and service for a period of one (1) year from the date of delivery by Versum Materials to the first purchaser. If any product requires service during the applicable warranty period, the purchaser should communicate directly with Versum Materials to determine appropriate repair. Repair or replacement will be carried out at Versum Materials expense subject to the terms of this warranty. It is the responsibility of the customer to perform routine maintenance and periodic calibration.

In no event shall Versum Materials be liable for any incidental, indirect or consequential damages in connection with the purchase or use of any Versum Materials product. This warranty shall not apply to, and Versum Materials shall not be responsible for, any loss arising in connection with the purchase or use of any Versum Materials product which has been repaired by anyone other than an authorized Versum Materials service representative or altered in any way so as, in Versum Materials judgment, to affect its stability or reliability, or which has been subject to misuse or negligence or accident, or which has the unit or lot number altered, effaced or removed, or which has been used otherwise than in accordance with the instructions furnished by Versum Materials. This warranty is in lieu of all other warranties, express or implied, and all other obligations or liabilities on Versum Materials part, and Versum Materials neither assumes nor authorizes any representative or other person to assume for it any other liability in connection with the sale of Versum Materials equipment.

VERSUM MATERIALS DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR IMPLIED, INCLUDING ANY WARRANTY OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR APPLICATION.

Address: Versum Materials, Inc. 1919 Vultee Street

Allentown, PA 18103, U.S.A

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Revision Control Summary

Chapter Revision File Name

Chapter 1 – Safety Warnings

Rev-7 MNL000127.doc

 Label updates

Chapter 2 – Installation

Rev-1 MNL000530.doc

 Adding in Process Outlet C and D

Chapter 3 – Module Specifications

Rev-1 MNL000531.doc

 Adding in Process Outlet C and D

Chapter 4 – Intentionally Left Blank

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 Initial Release

Chapter 5 – Intentionally Left Blank

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 Initial Release

Chapter 6 – Intentionally Left Blank

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 Initial Release

Chapter 7 – System Description

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 Adding new optional components

Chapter 8 – Operating Procedures

Rev-1 MNL000536.doc

 Software procedure updates

Chapter 9 – Troubleshooting

Rev-0 MNL000537.doc

 Initial Release

Chapter 10 – Maintenance

Rev-1 MNL000538.doc

 Adding EFS

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Appendix A – Installation Drawing Package

Rev-1 MNL000539.doc

 Updates for Cyl Flag, alarm matrix, PFD’s

Appendix B – Spare Parts List

Rev-1 MNL000540.doc

 Updated Electrical Spares

Appendix C – PED Assessment

Rev-2 MNL000140.doc

 Updated Company Name and Logo

Appendix D – Pre-Facilitation Checklist

Rev-0 MNL000541.doc

 Initial Release

Appendix E – Startup and Commissioning Checklist

Rev-1 MNL000542.doc

 Add EFS

Appendix F – ORI Checklist

Rev-0 MNL000543.doc

 Initial Release

Appendix G – UV/IR Detector

Rev-0 MNL000544.doc

 Initial Release

Appendix H – USB Barcode Reader

Rev-0 MNL000545.doc

 Initial Release

Appendix I – Y-Cylinder Heaters Description

Rev-0 MNL000546.doc

 Initial Release

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TABLE OF CONTENTS

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Chapter 1 Safety Warnings

Section 1 Introduction .................................................................... 1-2

Section 2 Important Safety Warnings ............................................ 1-5

Section 3 Inert Gas Hazards ........................................................... 1-6

Section 4 Pressurized Fluids/Gases ................................................ 1-7

Section 5 Electrical Hazard ............................................................ 1-7

Section 6 Falling Equipment Hazard ............................................. 1-8

Section 7 Gas Cylinder Handling Hazard ...................................... 1-8

Section 8 Pinch Hazard .................................................................. 1-9

Section 9 Personal Protective Equipment ...................................... 1-9

Section 10 Hazard Warnings ............................................................ 1-12

Section 11 Typical Minimal Lockout or Tagout System Procedures 1-22

Section 12 Safety Signs and Labels ................................................. 1-27

Section 13 Equipment Safety Features ............................................ 1-36

Section 14 Safety Literature for Handling and Use of Gas Cylinders 1-38

Section 15 Safety Literature for Handling of Nitrogen Supply ....... 1-38

Chapter 2 Installation

Section 1 Receiving Inspection ...................................................... 2-2

Section 2 Unpacking and Handling ................................................ 2-2

Section 3 Module Installation ........................................................ 2-3

Section 4 Piping Connections ........................................................ 2-8

Section 5 Electrical and Pneumatic Connections ........................... 2-17

Section 6 Explosive Atmosphere (ATEX) Installations… ............. 2-46

Chapter 3 Module Specifications

Chapter 4 Intentionally Left Blank

Chapter 5 Intentionally Left Blank

Chapter 6 Intentionally Left Blank

Chapter 7 System Description

Section 1 System and Components ................................................ 7-2

Section 2 AP11 Controller ............................................................. 7-24

Section 3 Power I/O Enclosures ..................................................... 7-34

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Chapter 8 Operating Procedures

Section 1 Emergency Stop ............................................................. 8-2

Section 2 Starting a New System ................................................... 8-3

Section 3 System Shutdown and Startup ....................................... 8-11

Section 4 AP11 Controller Operations ........................................... 8-13

Section 4A Pre-Purge ........................................................................ 8-15

Section 4B Change Source Container ............................................... 8-20

Section 4C Post-Purge ...................................................................... 8-28

Section 4D Process Gas Conditioning .............................................. 8-33

Section 4E Process Gas Flow ........................................................... 8-36

Section 4F Stop and Restart Process Gas Flow ................................ 8-39

Section 4G Idle Mode ....................................................................... 8-45

Section 4H Manual Mode ................................................................. 8-46

Section 4I Tube Switching .............................................................. 8-51

Section 4J Change Y-Container or Drum Source ............................ 8-56

Section 4K Change ISO Container or Tube Trailer Source .............. 8-61

Section 5 AP11 Configuration Menu .............................................. 8-64

Chapter 9 Troubleshooting

Section 1 System Errors ................................................................. 9-2

Section 2 Typical Alarms ............................................................... 9-8

Section 3 J-T Process Heater Reset Procedure .............................. 9-15

Chapter 10 Maintenance

Section 1 Routine Maintenance ..................................................... 10-2

Section 2 Mechanical Integrity ...................................................... 10-8

Section 3 Electrical Maintenance and Test Procedures .................. 10-13

Section 4 Electrical Components Life Expectancy ......................... 10-15

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Appendix A Installation Drawing Package

Appendix B Spare Parts List

Section 1 Mechanical Spares ......................................................... APP B-2

Section 2 Electrical Spares ............................................................. APP B-3

Appendix C PED Assessment

Appendix D Pre-Facilitation Checklist

Appendix E Startup and Commissioning Checklist

Appendix F Operational Readiness Inspection Checklist

Appendix G UVIR Detector

Appendix H USB Barcode Reader

Appendix I Y-Cylinder Heaters Description

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Chapter 1

Safety Warnings

Section 1 Introduction

Section 2 Important Safety Warnings

Section 3 Inert Gas Hazards

Section 4 Pressurized Fluids / Gases

Section 5 Electrical Hazard

Section 6 Falling Equipment Hazard

Section 7 Gas Cylinder Handling Hazard

Section 8 Pinch Hazard

Section 9 Personal Protective Equipment

Section 10 Hazard Warnings

Section 11 Typical Minimal Lockout or Tagout System

Procedures

Section 12 Safety Signs and Labels

Section 13 Equipment Safety Features

Section 14 Safety Literature for Handling and Use of Gas

Cylinders

Section 15 Safety Literature for Handling and Use of Instrument

Nitrogen Supply

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Chapter 1 - Safety Warnings

Please read the following safety warnings carefully before installing the equipment.

1.1 Introduction

This section is meant to communicate to the user any hazards involved with the equipment.

The following paragraphs will define the hazard warnings used and describe the icons found in various sections of the manual and on the equipment. The hazard warning labels used in the manual will correlate with those used on the equipment.

1.1.1 Level or Intensity of Hazard

Indicates an immediate hazard, which if not avoided, will result in death or serious injury.

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Indicates a potentially hazardous situation, which if not avoided, could result in death or serious injury.

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1.1.2 Hazard Types (Symbols)

This symbol is a safety alert symbol.

This symbol represents asphyxiant, toxic or corrosive gases. Gases used with the GASGUARD® can cause personal injury or death.

Indicates a potentially hazardous situation, which if not avoided, may result in a minor or moderate injury. It may also be use to alert against unsafe practices.

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This symbol can represent one or more of the following conditions:

Explosive gases! Gases used with the GASGUARD® can cause an explosion when combined with air.

The formation for explosive gas mixtures of flammable gas and air when exposed to an ignition source.

Pyrophoric gases which will ignite spontaneously without the presence of an ignition source when exposed to air.

Energy release which may result from pneumatic or hydraulic pressure rapidly escaping from a portion of the equipment.

This symbol represents flammable gases. Gases used with the GASGUARD® can cause flammable atmospheres.

This symbol represents PPE (Personal Protective Equipment). Proper PPE shall be worn when working with this system.

This symbol represents electrical shock hazard.

This symbol warns of potential strain or injury when lifting cylinders.

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This symbol warns of a pinch hazard. This hazard exists on cabinet doors equipped with automatic closers.

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This symbol warns of the possibility of the source system tipping over if it is not installed properly. Personal injury could result.

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This symbol indicates the need for head protection.

This symbol cautions against the improper anchoring of cabinets.

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1.2 Important Safety Warnings

Failure to read, understand and follow the safety information found in this section could result in personal injury and death.

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The operator must read and understand this safety section before operating the system. All operating and maintenance personnel must receive training and instruction by Versum Materials, Inc.

All cylinder storage areas must be continually monitored with an air quality monitor to prevent the danger of a hazardous atmosphere.

Before using the system, review your company's requirements for use of toxic, corrosive, flammable, pyrophoric, oxidizers and inert gas cylinders and electrically powered equipment. You must be thoroughly trained in your company's safety procedures and safety equipment (self-contained breathing apparatus, emergency shutdown systems, plant alarm locations, etc.)

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1.3 Inert Gas Hazards

Do not use this device in any manner other than specified in this manual.

Do not make any changes to the equipment independently. INJURY or DEATH may result from unauthorized modifications. All modifications to equipment MUST be approved in writing by an Versum Materials, Inc.' Representative.

High concentrations of nitrogen, helium, or other inert gases can cause an oxygen deficient atmosphere in a confined area which can cause DEATH. All personnel must read and understand the material safety data sheet(s) (MSDS) for the specific gas(es) being used.

Oxygen concentrations of 19.5% or less can greatly increase the hazard of asphyxiation to personnel. Before working in an area where nitrogen, helium or other inert gases could be present, check the area with an oxygen monitor to be sure the oxygen concentration is between 19.5% and 23%. While working in the area, the oxygen concentration needs to be monitored with a continuous oxygen monitor. Always provide adequate ventilation in the work area to decrease the risk of an oxygen deficient atmosphere.

Personnel in an oxygen deficient atmosphere will not realize they are being asphyxiated. Breathing of pure inert gases will cause immediate unconsciousness. Symptoms of asphyxia include:

 Rapid breathing

 Nausea

 Vomiting

 Inability to move

 Convulsive movements

 Collapse

 Abnormal pulse

 Rapid fatigue

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 Faulty judgment

 Insensitivity to pain

 Abnormal emotions

Remove any personnel in an oxygen deficient atmosphere to fresh air. Get medical attention immediately. Positive pressure breathing apparatus must be worn by any rescuers entering a suspected oxygen deficient atmosphere.

Nitrogen gas may accumulate in low or confined areas. All requirements of OSHA 1910.146 (Confined Space Guidelines) must be met when inert gases may be present in confined spaces. Self contained breathing apparatus is required (cartridge or filter type gas masks cannot be used). See the information on personal protective equipment in this section for details.

When entering a confined area or area which may contain high inert gas concentrations, a "Buddy System" must be used. One person should remain outside the suspect area, but within view of the other person. This method ensures that the other person can respond in the event of an emergency.

1.4 Pressurized Fluids / Gases

Pressurized gas and water sprinkler lines can injure personnel and damage equipment. Never tighten or loosen a fitting when it is under pressure.

The house nitrogen supply lines can contain pressures of 100+ psig (6.9+ barg). The water sprinkler lines contain pressures of 30 psig (2.1 barg). Exercise care when working around these lines. Ensure that pressure has been vented before breaking any connection. Tag out and lock out the line before

doing any work. Follow Typical Minimal Lockout or Tagout System Procedures described by

Occupational Safety and Health Admin., Labor Para. 1910.147.

1.5 Electrical Hazard

Electric shock can cause personal injury or death.

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The control circuits for the system use 115/220 VAC, 50/60 Hz. Do not attempt to work on the system without first turning the power off and tagging out and locking out the electrical supply disconnect

switch per plant lock out procedures. Follow the Typical Minimal Lockout or Tagout System

Procedures described by Occupational Safety and Health Admin., Labor Para. 1910.147.

1.6 Falling Equipment Hazard

This system is a top heavy device. If it is not properly installed, it could fall and injure, crush or kill personnel working in the area.

When moving and installing the system, extreme care needs to be taken to support it properly. Due to the top heavy nature of the system, when moving or if not installed properly, it could tip over, injuring, crushing or possibly killing personnel in the area. Moving and setting equipment shall be done only by those persons having proper training and qualification in lifting and rigging.

1.7 Gas Cylinder Handling Hazard

Improper handling and storage of compressed and liquefied gas cylinders could cause injury or death.

Restrain gas cylinders during storage and use. Keep protective cap on cylinder when not dispensing gas. Lifting gas cylinders could cause strain or injury. See Safetygrams found in the Safety section of the Operation Manual.

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1.8 Pinch Hazard

A pinch hazard exists on cabinet doors equipped with automatic closers.

1.9 Personal Protective Equipment

Personal protective equipment, as defined in this section, must be worn when working with this system.

Personal protective equipment is designed to protect personnel from inadvertent risk. The listed personal protective equipment must be worn regardless of operator or technician level of training and qualifications.

The minimum personal protective equipment required for operating and maintaining the GASGUARD® system is dependent on the hazard category of the gas(es) being used. When a gas

meets more than one hazard category, the PPE for the most hazardous category must be used. Refer to

the hazard warnings in Section 1.10 for the hazards of the gas(es) being used.

In addition to the personal protective equipment, the following safety equipment is highly recommended and is required when VERSUM MATERIALS, INC. personnel operate this equipment. This equipment should be supplied by the customer prior to operating the GASGUARD® system.

 Safety shower

 Emergency phones

 Eye wash

 Gas leak detection system for gases to be used (ex: MDA)

The gas leak detection system must warn personnel (through visible and audible alarms located near the gas cabinet) of a hazardous atmosphere. The gas sensor(s) need to be set up to alarm

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at the lowest level of hazard of exposure. Upon activation of an alarm, follow the established shutdown procedures for your system.

 Scrubber with a pollution abatement system sized for maximum potential upset flow of

hazardous gas.

 Adequate ventilation as described in section 3.7.

If you are unsure what personal protective equipment list to follow for the gases being used, DO NOT continue. Failure to understand the hazards and use the proper personal protective equipment may cause INJURY or DEATH. Contact Versum Materials, Inc. for the gas category.

Personal Protective Equipment for the gas categories follows:

Personal Protective Equipment for Toxics

 Toxic gas leak detection (ex. MDA)

 Self contained positive pressure breathing apparatus

 Long sleeved Nomex suit

 Safety glasses with side shields

 Leather gloves

 Safety shoes

NOTE: Most highly toxics (diborane, germane phosphine) are also flammable. Nomex suit is not required for non-flammable toxics (ex: nitrogen dioxide, boron trifluoride). All gases in Chapter 1 Section 12 using the warning sign with POISON GAS on the left and FLAMMABLE GAS on the right REQUIRE the Nomex suit.

Personal Protective Equipment for Corrosives

 Corrosive gas leak detector (ex. MDA)

 Self contained positive pressure breathing apparatus

 Level C acid suit (jacket with bib overalls)

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 Safety glasses with side shields

 Leather gloves

 Safety shoes

NOTE: Either air quality monitoring or self contained breathing apparatus is required for corrosive gases. Versum Materials, Inc. recommends the use of both. It is not required to use both, however at least one MUST be used at all times.

Personal Protective Equipment for Pyrophorics

 Pyrophoric gas leak detection (ex: MDA)

 Hard hat (fire hat with brim recommended)

 Long sleeved Nomex suit

 Face shield

 Safety glasses with side shields

 Leather gloves

 Safety shoes

Personal Protective Equipment for Flammables

 Hard hat (fire hat with brim recommended)

 Long sleeved Nomex suit

 Face shield

 Safety glasses with side shields

 Leather gloves

 Safety shoes

Personal Protective Equipment for Inerts

 Oxygen depletion monitor

 Safety glasses with side shields

 Leather gloves

 Safety shoes

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1.10 Hazard Warnings

The following hazard warnings detail system hazards. Follow the warnings to avoid personal injury or death. Do not work on the system before reading and understanding the following warnings. The

hazard warnings include:

 Toxic Gases Hazards

 Corrosive Gases Hazards

 Flammable and Pyrophoric Gases Hazards

 Oxidizer Hazards

 Inert Gas Hazards

 Pressurized Gases

 Cylinder Handling Hazards

 Electrical Hazards

Not all of the gas related hazards may apply to your system. For example, you may not be using any gases in the oxidizer class.

Some gases have more than one hazard. For example, fluorine is toxic, corrosive and also an oxidizer.

The Pressurized Gases Cylinder Handling Hazards and Electrical Hazard warnings apply to all GASGUARD® systems.

The following is general information on typical gas hazards. It is not a substitute for training and use of Material Safety Data Sheets by all operators.

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1.10.1 Toxic Gas Hazards

Many of the gases used in the GASGUARD® system could cause personal INJURY OR DEATH at very low concentrations.

Many of these gases provide no physical warning signs (i.e. coughing, throat irritation, burning sensations, and shortness of breath) to alert personnel of exposure to toxic levels.

Personal protective equipment required for use with toxic gases is detailed in Chapter 1 Section 9 of this manual.

A list of most of the toxic gases used in the GASGUARD® system follows:

Ammonia Hydrogen fluoride

Arsine Hydrogen sulfide

Boron trichloride Methyl chloride

Boron trifluoride Nitrogen dioxide

Carbon monoxide Nitrogen trifluoride

Chlorine Phosphine

Chlorine trifluoride Phosphine mixtures

Diborane Phosphorous pentafluoride

Diborane mixtures Silane

Dichlorosilane Silicon tetrachloride

Disilane Silicon tetrafluoride

Fluorine Sulfur tetrafluoride

Germane Trichlorosilane

Hydrogen bromide Tungsten hexafluoride

Hydrogen chloride

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1.10.2 Corrosive Gas Hazards

Corrosives such as chlorine, fluorine and ammonia will irritate and burn human tissue. They can cause personal INJURY and DEATH.

Exposure to very small concentrations of corrosive gases can cause severe irritation of the eyes and

respiratory system. At higher concentrations, they can cause severe personal injury or death.

Chapter 1 Section 9 of this manual lists the personal protective equipment required for use with corrosive gases.

A list of most of the corrosive gases used in the GASGUARD® system follows:

Ammonia Hydrogen chloride

Boron trichloride Hydrogen fluoride

Boron trifluoride Hydrogen sulfide

Chlorine Nitrogen dioxide

Chlorine trifluoride Phosphorous pentafluoride

Dichlorosilane Silicon tetrachloride

Fluorine Silicon tetrafluoride

Hydrogen bromide Tungsten hexafluoride

1.10.3 Flammable and Pyrophoric Gas Hazards

Flammable and pyrophoric gases could cause fire, explosions, personal injury or death.

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Pyrophoric gases will spontaneously ignite in air

Pyrophoric gases do not need a source of ignition to burn. However, low concentrations may accumulate without pyrophoric ignition (i.e. silane can accumulate up to a concentration of 2 molar percent [number of moles of silane per fixed volume of air] before spontaneous ignition occurs). Pyrophoric gases will ignite in the presence of oxygen.

Flammable mixtures can burn or explode

Fire and explosion hazards can be controlled by preventing the formation of combustible fuel-oxidant mixtures and by eliminating sources of ignition such as sparks, open flames or other heat sources.

Flammable mixtures will burn when ignited and can explode when the concentration is above the lower explosive limit (LEL) and below the upper explosive limit (UEL) for that specific gas. Some flammable gases may accumulate as pockets in enclosed areas and subsequently explode if an ignition source is present. A flammable gas also presents an asphyxiating hazard in sufficient quantities to reduce oxygen concentration below 19.5%, however fire/explosion is typically the primary hazard.

Adequate ventilation is necessary

Adequate ventilation helps reduce the possible formation of flammable mixtures in the event of a flammable gas leak. See tables in Chapter 3 Section 7 which list the exhaust requirements per enclosure size for all gases.

NOTE: To avoid any possible hazardous reactions (i.e. fire, explosion, extremely corrosive or toxic mixtures) never vent incompatible gases out the same duct!

Continually monitor the atmosphere

Continually monitoring the atmosphere with a gas leak detector will alert the operator to a flammable or explosive atmosphere in the area.

NOTE: The installation of a hydride detector is strongly recommended for silane and other pyrophoric gases to detect leaks or pockets of gas that may not spontaneously ignite!

Versum Materials, Inc. strongly recommend installation of a hydride detector to detect gas pocketing of pyrophoric gases.

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Guidelines to avoid forming combustible mixtures

Avoid forming combustible mixtures by adhering to the following:

 Do not admit flammable gases into an area that contains oxygen/air. Do not admit

oxygen/air into an area that contains flammable gases.

 Maintain a small positive pressure in systems to prevent air from leaking into them when

the equipment is shut down.

 Avoid venting of flammable gases through vents that do not contain an inert atmosphere.

Personal protective equipment required for use with pyrophoric and flammable gases is listed in

Chapter 1 Section 9. Note that the personal protective equipment (PPE) for pyrophorics differs from

the flammables. Be sure to use the proper PPE.

A list of most of the pyrophoric gases used in the GASGUARD® system follows:

Diborane Phosphine

Disilane Silane

A list of most of the flammable gases used in the GASGUARD® system follows:

Acetylene Germane

Ammonia Hydrogen

Arsine Hydrogen mixtures

Carbon monoxide Hydrogen sulfide

Diborane Methane

Diborane mixtures Methyl chloride

Dichlorosilane Methyl fluoride

Disilane Trichlorosilane

1.10.4 Oxygen and Other Oxidizer Hazards

Systems using oxygen or other oxidizers (i.e. nitrous oxide, fluorine) have specific guidelines for specifying equipment, materials of construction and system cleanliness. Failure to comply with materials of construction and system cleanliness could result in injury or death.

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Follow safe practices when using oxygen or oxidizers (chlorine and fluorine)

Oxygen concentrations in excess of 23% significantly increase the hazard exposure to personnel and equipment. Those materials which burn in air will burn more violently and explosively in oxygen/oxidizer enriched atmospheres. Guidelines for oxygen systems are found in CGA Pamphlet G-

4.4. (Contact your gas supplier or the Compressed Gas Association to order CGA Pamphlets.) Only those personnel who have read and understand the hazards of oxygen or oxidizers and safe practices for these systems should be permitted to operate and maintain the system.

Use only equipment specifically designed for oxygen or oxidizer service.

Inappropriate materials of construction increase the danger of ignition of pipelines and controls. Pipe sizing is just as important to ensure all velocity restrictions for oxygen or oxidizers are met. Do not substitute components or equipment without considering these hazards. Refer to CGA Pamphlet G-4.4 for guidelines and specifications of oxygen systems. (Contact your gas supplier or the Compressed Gas Association to order CGA Pamphlets.)

Maintain oxygen cleanliness at all times.

All equipment and piping in contact with oxygen or oxidizers must be cleaned to specifications outlined in CGA Pamphlet G-4.1. (Contact your gas supplier or the Compressed Gas Association to order CGA Pamphlets.) Failure to clean components and piping increases the danger of ignition and fire. Note that the cleaning solvent must be thoroughly removed before the equipment can be placed into service. Maintain cleanliness during assembly, installation, and repair.

No open flames, smoking, or sparks permitted near oxygen equipment.

Since many materials will burn in oxygen/oxidizer enriched atmospheres, the best method in preventing fires is to eliminate sources of ignition. Where this control equipment is being used or where concentrations of oxygen are greater than 23%, avoid open flames, sparks, or sources of heat. Never weld on a pressurized line flowing oxygen or an oxidizer. Make sure signs are posted warning personnel that oxygen or oxidizers are in use.

Do not substitute oxygen for compressed air.

Substituting oxygen for compressed air is dangerous. Explosions can occur when oxygen is substituted for air. Chances are the instrument air equipment is not compatible or cleaned for oxygen

service. Oxygen used to clean off equipment or clothing could come in contact with a source of ignition (spark, flame, or other) and ignite. In some cases, the elevated oxygen levels could linger even after the source has been shut off. Never tie into an oxygen system for personal breathing purposes.

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A list of most of the oxidizers used in the GASGUARD® system follows:

Chlorine Nitrogen trifluoride

Chlorine trifluoride Nitrous oxide

Fluorine Oxygen

1.10.5 Inert Gas Hazards

High concentrations of nitrogen, helium, or other inert gases will cause an oxygen deficient atmosphere in a confined area which can cause DEATH. All personnel must read and understand the Material Safety Data Sheet(s)

Oxygen concentrations of 19.5% or less can greatly increase the hazard of asphyxiation to personnel. Before working in an area where nitrogen, helium or other inert gases could be present, check the area with an oxygen monitor to be sure the oxygen concentration is between 19.5% and 23%. While working in the area, the oxygen concentration needs to be monitored with a continuous oxygen monitor. Always provide adequate ventilation in the work area to decrease the risk of an oxygen deficient atmosphere. Read VERSUM MATERIALS, INC. Safetygram 17 "Dangers of Oxygen

Deficient Atmospheres" included in the safety literature in Section 1.14 of this manual.

(MSDS) for the specific gas(es) being used.

Any time an oxygen deficient atmosphere is suspected, the proper personal protective equipment must be used. See the information on personal protective equipment in Chapter 1 Section 9 for details.

Personnel in an oxygen deficient atmosphere will not realize they are being asphyxiated. Breathing of pure inert gases will cause immediate unconsciousness.

Symptoms of asphyxia include:

 Rapid breathing

 Nausea

 Vomiting

 Inability to move

 Convulsive movements

 Collapse

 Abnormal pulse

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 Rapid fatigue

 Faulty judgment

 Insensitivity to pain

 Abnormal emotions

Remove any personnel in an oxygen deficient atmosphere to fresh air. Get medical attention immediately. Use cardiopulmonary resuscitation if the victim is not breathing. Positive pressure breathing apparatus must be worn by any rescuers entering a suspected oxygen deficient atmosphere.

Nitrogen gas may accumulate in low or confined areas. All requirements of OSHA 1910.146 (Confined Space Guidelines. ) must be met when working with inert gases in confined spaces. Self contained breathing apparatus is required (cartridge or filter type gas masks cannot be used). See the information on personal protective equipment in this section for details.

When entering a confined area or area which may contain high inert gas concentrations, a "Buddy System" must be used. One person should remain outside the suspect area, but within view of the other person. This method ensures that the other person can respond in the event of an emergency.

Personal protective equipment required for use with inerts is listed in Chapter 1 Section 9.

A list of inert gases used in the GASGUARD® system follows:

Argon Halocarbon 115

Carbon Dioxide Halocarbon 116

Halocarbon 11 Helium

Halocarbon 12 Krypton

Halocarbon 13 Neon

Halocarbon 14 Nitrogen

Halocarbon 22 Perfluoropropane

Halocarbon 23 Sulfur Hexafluoride

Halocarbon 113 Xenon

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1.10.6 Pressurized Gases

Any gas, in addition to those listed above, used in the GASGUARD® system could potentially displace the oxygen in the air and cause asphyxiation.

Pressurized gas lines could injure personnel and damage equipment. Never tighten or loosen a fitting when it is under pressure.

The process and purge gas cylinders can contain pressures up to 2650 psig in the USA. In Europe, cylinders can contain pressures up to 200 barg. A leak from a loose mechanical fitting, component or a

ruptured/failed component can expose the operator to a high pressure gas stream or projectile. Read

the cylinder handling warnings in Chapter 1 Section 1.10.7 and the safety literature on cylinder handling in Chapter 1 Section 13.

The house nitrogen supply lines can contain pressures of 100+ psig (7+ barg). Exercise care when working around these lines. Insure that pressure has been vented before breaking any connection. Tag

out and lock out the line before doing any work. Follow Typical Minimal Lockout or Tagout System

Procedures described by Occupational Safety and Health Admin., Labor Para. 1910.147 found in Section 1.11.

1.10.7 Cylinder Handling Hazards

High pressure gas cylinders could be extremely hazardous when not handled properly.

Proper training, maintenance, leak testing and mechanical connection procedures can prevent operators

from being exposed to high pressure gas streams. Use the cylinder change out procedures in Chapter

8 Section 8.3.2, "Process Cylinder Procedures."

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 Do not use a wrench or other device to close diaphragm type cylinder valves. This could

cause diaphragm rupture and valve failure which could result in personal injury or death.

Contact your gas supplier for the maximum torque (ft./lbs. or N/m) allowed on diaphragm type cylinder valves. Certain gases are supplied with cylinder valves without handwheels.

Use only the tool specified by your gas supplier to open and close diaphragm type cylinder valves to avoid over torquing these valves.

 If a cylinder valve protection cap is extremely difficult to remove, do not apply excessive

force or pry the cap loose. Attach a label to the cylinder identifying the problem and notify the personnel responsible for returning cylinders about the defective cylinder. Obtain another cylinder. Do not attempt to open a frozen cap as this would damage the cylinder

valve and could result in personal injury or death.

 Do not rotate the cylinder using the cylinder valve handle. This may open the cylinder valve

and cause a high pressure gas leak.

 NEVER replace the gas specified for use in the source system with another type of gas

cylinder. Incompatible gases could cause fires, explosions or extremely corrosive or toxic

mixtures which can cause personal injury or death. If another type of gas is required for

use in the gas source system, contact Versum Materials, Inc. immediately.

 A valve outlet sealing cap must be supplied on all toxic, corrosive and pyrophoric gases.

Consult your gas supplier if there is no sealing cap on any of the above types of gas cylinders.

 Cylinder valves are available with removable flow restrictor orifices in the valve outlet for

use with gas cylinders. This flow restrictor orifice significantly limits the rate of release of gas from the valve outlet during transportation, storage and use, due to a valve or system failure. Verify that your gases are supplied in cylinders with valves that have the appropriate flow restrictor orifice. Note that there are different size flow restrictor orifices available. Verify that the correct size is being used for your specific situation. A quality control program should be established to assure that your supplier has installed the correct flow restrictor orifice in the valve outlet after the filling operation has been completed.

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1.10.8 Electrical Hazards

Electric shock could cause personal injury or death.

The control circuits for the system use 115/220 VAC, 50/60 Hz. Do not attempt to work on the system without first turning the power off and tagging out and locking out the electrical supply disconnect

switch per plant lock out procedures. Follow the Typical Minimal Lockout or Tagout System

Procedures described by Occupational Safety and Health Admin., Labor Para. 1910.147 found in Chapter 1 Section 11 of this manual.

1.10.9 Purge Gas Backstream Hazard

Avoid low pressure condition in purge gas cylinder to prevent a backstream hazard.

The purge gas system incorporates a pressure indicating gage which will provide the means of displaying a low purge gas cylinder pressure condition (usually 200 psig [14 barg] minimum). The cylinder should be changed out at this point to prevent process gas from backstreaming into the purge gas cylinder.

1.11 Typical Minimal Lockout or Tagout System Procedures

NOTE: The following OSHA document is included to help you develop a lockout/tagout procedure for the GASGUARD® System. A written procedure is required for any work performed under lockout/tagout. It must be reviewed, approved and understood by all participants who are trained to perform the work. (Occupational Safety and Health Admin., Labor Para. 1910.147)

Although OSHA does not have jurisdiction outside the United States of America, it is Versum Materials, Inc. recommendation that Lockout, or Tagout procedures be followed, except where local laws are more stringent.

General

Lockout is the preferred method of isolating machines or equipment from energy sources. To assist employers in developing a procedure which meets the requirements of the standard, the following

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simple procedure is provided for use in both lockout and tagout programs. This procedure may be used when there are a limited number of types of machines or equipment or there is a single power source. For a more complex system, a more comprehensive procedure will need to be developed, documented and utilized.

Lockout (or Tagout) Procedure for (Name of Company)

Purpose

This procedure establishes the minimum requirements for the lockout or tagout of energy isolating devices. It shall be used to ensure that the machine or equipment is isolated from all potentially dangerous energy, and locked out or tagged out before employees perform any servicing or maintenance activities where the unexpected energization, start-up or release of stored energy could cause injury (Type(s) and Magnitude(s) of Energy Hazards).

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Responsibility

Appropriate employees shall be instructed in the safety significance of the lockout (or tagout) procedure (Name(s)/Job title(s) of employees authorized to lockout or tagout). Each new or transferred affected employee and other employees whose work operations are or may be in the area shall be instructed in the purpose and use of the lockout or tagout procedure (Name(s)/Job title(s) of affected employees and how to notify).

Preparation for Lockout or Tagout

Make a survey to locate and identify all isolating devices to be certain which switch(s), valve(s) or other energy isolating devices apply to the equipment to be locked or tagged out. More than one energy source (electrical, mechanical, or others) may be involved. (Type(s) of energy isolating means).

Sequence of Lockout or Tagout System Procedure

1. Notify all affected employees that a lockout or tagout system is going to be utilized and the reason therefore. The authorized employee shall know the type and magnitude of energy that the machine or equipment utilizes and shall understand the hazards thereof.

2. If the machine or equipment is operating, shut it down by the normal stopping procedure (depress stop button, open toggle switch, etc.).

3. Operate the switch, valve, or other energy isolating device(s) so that the equipment is isolated from its energy source(s). Stored energy (such as that in springs, elevated machine members, rotating flywheels, hydraulic systems, and air, gas, steam or water pressure, etc.) must be dissipated or restrained by methods such as repositioning, blocking, bleeding down, etc. (Type(s) of stored energy methods to dissipate or restrain).

4. Lockout and/or tagout the energy isolating devices with assigned individual lock(s) or tag(s) (Method(s) selected, i.e., locks, tags, additional safety measures, etc.)

5. After ensuring that no personnel are exposed, and as a check on having disconnected the energy sources, operate the push button or other normal operating controls to make certain the equipment will not operate (Type(s) of equipment checked to ensure disconnections).

Return operating control(s) to neutral or off position after the test.

6. The equipment is now locked or tagged out.

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Restoring Machines or Equipment to Normal Production Operations

1. After the servicing and/or maintenance are complete and equipment is ready for normal production operations, check the area around the machines or equipment to ensure that no one is exposed.

2. After all tools have been removed from the machine or equipment, guards have been reinstalled and employees are in the clear, remove all lockout or tagout devices. Operate the energy isolating devices to restore energy to the machine or equipment.

Procedure Involving More Than One Person

In the preceding steps, if more than one individual is required to lockout or tagout equipment, each shall place his/her own personal lockout device on the energy isolating devices(s). When an energy isolating device cannot accept multiple locks or tags, a multiple lockout or tagout device (HASP) may be used. If lockout is used, a single lock may be used to lockout the machine or equipment with the key being placed in a lockout box or cabinet which allows the use of multiple locks to secure it. Each employee will then use his/her own lock to secure the box or cabinet. As each person no longer needs to maintain his/her lockout protection, that person will remove his/her lock from the box or cabinet (Name(s)/Job title(s) of employees authorized for group lockout or tagout).

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Basic Rules for Using Lockout or Tagout System Procedure

All equipment shall be locked or tagged out to protect against accidental or inadvertent operating when such operation could cause injury to personnel. Do not attempt to operate any switch, valve or other energy isolating device where it is locked or tagged.

Entry No. Description

1. Name of Company

2. Type(s) and Magnitude(s) of energy and hazards

3. Name(s)/Job title(s) of employees authorized to lockout or

tagout

4. Name(s)/Job title(s) of affected employees and how to

notify

5. Type(s) and Location of energy isolating means

6. Type(s) of stored energy

7. Method(s) selected, i.e. locks, tags, additional safety

measure, etc.

8. Type(s) of equipment checked to ensure disconnections

9. Name(s)/Job title(s) of employees authorized for group

lockout or tagout

1910.147 29 CFR Ch.XVII (7-1-90)

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1.12 Safety Signs and Labels

The following sign is located on the exterior door of the GASGUARD® cabinet.

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The following sign is located on the GASGUARD® controller. This label is required if the GASGUARD® Source System is located in a Class I, Division II rated area (United States) or in a Group 2, Category 3 ATEX rated area (Europe). Acetylene systems will have the same label as shown below, but they will be approved for NEC Class I, Division 2, Groups A, B, C, and D Locations.

The following label appears inside cabinets containing cylinders. It is located on the inside door, approximately at eye level. It is also located on the cylinder strap on both cabinets and racks.

The following label appears inside doors of cabinets.

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The following label appears on cabinets. It is located on the back of the cabinet, approximately 12” (305 mm) from the top.



The following eleven labels are specific to the gases being used. They are located on the door of the GASGUARD® cabinet. They are identical to the labels on the process gas cylinder in the GASGUARD® cabinet to provide verification that the correct process gas is being installed and used.

NOTE: The signs shown below are United States DOT classifications. They are not to be used to classify gas hazards. Refer to the appropriate MSDS provided with the system documentation.

The following label would be used with the gases listed below it:

Boron trifluoride Phosphorous pentafluoride

Chlorine Sulfur dioxide

Carbon tetrachloride Sulfur tetrafluoride

Nitrogen dioxide Tungsten hexafluoride

Nitric oxide



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The following label would be used with the gases listed below it:

Boron trichloride Hydrogen fluoride

Hydrogen bromide Silicon tetrafluoride

Hydrogen chloride



The following label would be used with the gases listed below it:

Fluorine Fluorine mixtures



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The following label would be used with the gases listed below it:

Acetylene Hydrogen mixtures

Butane Isobutane

Disilane Isobutylene

Deuterium Methane

Ethane Methyl chloride



Ethanol mixtures Methyl silane

Ethylene Propane

Halocarbon 32 Silane

Halocarbon 41 Silane mixtures

Hydrogen

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The following label would be used with the gases listed below it:

 

Arsine mixtures Germane

Carbon monoxide Hydrogen selenide

Diborane mixtures Hydrogen sulfide

Dichlorosilane Phosphine mixtures

Diethyl telluride

The following label would be used with the gases listed below it:

Silicon tetrachloride



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The following label would be used with the gases listed below it:

Chlorine trifluoride

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The following label would be used with the gases listed below it:

Ammonia Halocarbon 125

Argon Halocarbon 128

Carbon dioxide Halocarbon C141B

Halocarbon 11 Halocarbon C318



Halocarbon 12 Helium

Halocarbon 13 Krypton

Halocarbon 13B1 Neon

Halocarbon 14 Nitrogen

Halocarbon 21 Nitrous oxide

Halocarbon 22 Perfluoropropane

Halocarbon 23 Sulfur hexafluoride

Halocarbon 113 Teteafluoroethane

Halocarbon 115 Xenon

Halocarbon 116

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The following label would be used with the gases listed below it:

Oxygen Nitrogen trifluoride

Oxygen mixtures Nitrogen trifluoride mixtures



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1.13 Equipment Safety Features

Dependent on the design of your specific system, the following safety features may be incorporated into the GASGUARD® system:

 Warning labels and gas identification labels are placed on the outside door of each cabinet (see

Chapter 1 Section 12).

 The gas cabinet has a self-closing cabinet door with locking mechanism.

 A sprinkler head is installed in HPM gas cabinets, unless water reactivity is a superseding hazard

for the specific gas.

 Cabinet doors have self-closing 1/4" thick wire reinforced safety glass windows.

 Fault and Shutdown alarms notify the operator through the alarm horn, light and alarm label on the

controller of a problem with the system. In addition, the Shutdown alarms close all pneumatic valves and abort the controller program.

 Excess flow sensors are installed, when required, to shut off the flow of gas in the event of

downstream equipment failure.

 An exhaust monitor verifies ventilation through the cabinet.

 The system may utilize a positive shutoff regulator. This type of regulator is designed to close

tightly if the pressure builds above the setpoint because the diaphragm is mechanically connected to the valve poppet. Be aware that the regulator may leak if the regulator seat is damaged, corroded or soiled.

 A flow restricting orifice may be installed in the cylinder valve. This flow restricting orifice

significantly reduces the flow of gas in the event of a failure in the downstream equipment.

 An ultraviolet infrared (UV/IR) detector or temperature switch installed for pyrophoric gas

systems.

 A UV/IR detector and delayed start feature is provided on source systems for SiH4 and certain

SiH4 mixes.

 A temperature switch is recommended for flammable and strong oxidizer gas systems.

 Pressure relief valves may be incorporated into the design to prevent overpressurization of the

process line and downstream equipment and to protect the inert purge system.

 Manual operation access is denied during the presence of a shutdown alarm.

 An "EMERGENCY STOP" pushbutton is located on the controller panel.

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 A password security system prevents unauthorized personnel to operate or modify the

GASGUARD® controller menu.

 Customer I/O capability to accept a remote shutdown or gas detection signal.

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1.14 Safety Literature for Handling and Use of Gas Cylinders

The following safety literature must be read and understood.

VERSUM MATERIALS, INC. Safetygram 10

VERSUM MATERIALS, INC. Safetygram 11

VERSUM MATERIALS, INC.

Handling, Storage and Use of Compressed Gas

Cylinders

Emergency Action in Handling Leaking Compressed

Gas Cylinders

Don't Turn a Cylinder into a Rocket

Safetygram 14

VERSUM MATERIALS, INC.

Cylinder Safety Devices

Safetygram 15

VERSUM MATERIALS, INC. Safetygram 23

Cylinder Valves

Material Safety Data Sheets for all gases used in system (Please contact your gas supplier to obtain the appropriate MSDS documents).

1.15 Safety Literature for Handling and Use of Instrument Nitrogen Supply

The safety literature listed below must be read and understood.

VERSUM MATERIALS, INC. Safetygram 2

VERSUM MATERIALS, INC. Safetygram 17

Nitrogen Material Safety Data Sheet (Included as Appendix B)

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Dangers of Oxygen Deficient Atmospheres

Confidential and Proprietary Data

Chapter 2

Installation

Section 1 Receiving Inspection

Section 2 Unpacking and Handling

Section 3 Module Installation

Section 4 Piping Connections

Section 5 Electrical and Pneumatic Connections

Section 6 Explosive Atmosphere (ATEX) Installations

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1.0 Receiving Inspection

The BSGS eV / BULKGUARD eV module is shipped in a large wooden crate. When the crate

is delivered to the site, ensure that the shipping manifest properly documents the shipment. Verify that the delivery date, time, and the item delivered are accurately shown on the shipping manifest. Look for signs of any damage that may have occurred during shipment. Note on the bill of lading any manifest discrepancies and any significant crate damage found. Alert your Versum Materials, Inc. representative of any damage that has occurred.

2.0 Unpacking and Handling

The BSGS eV / BULKGUARD eV module is shipped inside a large box designed to protect the unit from minor shipping damage. Extreme care should be taken in handling the large crate since the equipment can be damaged if it is tipped on its side or dropped. The equipment should not be removed from its crate until it has been moved by forklift to a location near its final installation area. Approximate weight of the crated module is 700 lbs (320 kg).

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1. Once the module is moved to near its final location, remove the walls and roof of the box.

 Inspect the equipment for shipping damage.

 The outside of the equipment cabinet should be checked for scratches, dents, or

damaged external piping.

 The door of the module should be opened and the piping system should be carefully

inspected for damage.

 The front door of the AP11 controller and eV ECC should be opened to check for

damaged electrical components.

NOTE: Any damage observed on the equipment must be immediately reported to the shipping company and to the Versum Materials, Inc. factory.

2. Using a forklift, lift the equipment off the crate and carefully set it on the floor.

3. Move the unit to its final location.

3.0 Module Installation

All equipment must be installed in accordance with the following drawings and codes.

 BSGS eV / BULKGUARD eV module drawings included in Appendix A – Installation Drawing

Package.

 Seismic Codes per ASME, UBC, or applicable local codes.

NOTE: It is the responsibility of the owner to ensure that all equipment modules are mounted in accordance with all applicable civil and seismic codes.

Additional considerations and notes:

1. BSGS eV / BULKGUARD eV modules and source containers (Y containers, Drums, Trailers,

etc.) must be sited per Code requirements and Versum Materials, Inc. criteria away from fire and combustible sources. Contact your Versum Materials, Inc. representative for assistance

with siting criteria.

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2. An overhead roof or canopy is recommended for source vessels and BSGS eV / BULKGUARD

eV equipment. Although the equipment is designed to NEMA 3R, it is recommended that it is protected against direct rain. It should also be noted that snow and ice accumulation could make weight scale readings inaccurate. A roof overhead will also protect operators and the

container process connection during container changes in inclement weather.

3. The eV ECC located on top of the module should not be installed in direct sunlight. Heat from

solar gain is the primary reason for increased electrical enclosure temperature. Overexposure

to high temperature over time will reduce component longevity.

4. The mounting location for all equipment modules should be clean and level. It is recommended

that the equipment modules be placed on concrete pads prepared per applicable local codes.

5. The floor outline dimensions and mounting hole locations are shown in Figure 2-1 below:

Figure 2-1. Rack Mounting Hole Locations in Floor

6. There shall be no obstructions in front of any access covers, including controller, electrical

enclosures, or piping cabinet.

7. Final equipment layout and mounting locations are the responsibility of the owner. It is

recommended that the process gas container be located to the back of the module to allow easy access to the display and piping system components. See Appendix A – Installation Drawing Package, BSGS eV / BULKGUARD eV Pigtail assembly installation drawings.

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8. If the painted surfaces of the enclosure cabinets are nicked or scratched during handling and

installation, they must be painted to prevent rust from forming. Touch up paint is not provided with the equipment. Touch up paint must be purchased from a local paint supplier. The Paint Specification is included in Chapter 3 - Module Specifications.

9. Supporting the source container piping and source container ventilation duct is the

responsibility of the owner. The piping should be supported to prevent the accidental opening of the face seal connection. See Appendix A – Installation Drawing Package, BSGS eV / BULKGUARD eV pigtail installation drawings for general routing and support information.

10. ½” process gas flex hoses supplied by Versum Materials, Inc. for approved gases, provide a

more forgiving means of connecting process gas piping to a source container with respect to container location, but do have limitations. The following 2 pages are a list of those limitations and recommendations for proper installation.

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FlexHoseSpecifications

Nominal

Diameter

(inches)

1/2 12 1 0.79 1.34 2973 6104 0.24

Actual

I.D.

(mm)

Number

of

Braids

Nominal

O.D.

(inches)

Minimum

Bend

Radius

(inches)

Maximum

Working

Pressure@

70degF

(psig)

Burst

Pressure@

70degF

(psig)

Weightper

foot

(lbs.)

4.0 Piping Connections

All tubing connections to the module should be designed and installed following all local piping codes and should comply with the intent of ASME B31.3 "Chemical Plant and Petroleum Refinery Piping." Tubing must be sized to flow the maximum amount of gas required by the process system. Tubing is normally constructed of 316L stainless steel, but is Hastelloy C-22 on Hydrogen Chloride (HCl) modules.

All piping must be installed in accordance with the installation drawings located in Appendix A of this manual.

Connection Points

All tubing connections are made at either the top rear of the module or within the source inlet cutouts located on the lower sidewalls of the module. All tube ends have been faced and are ready for welding to facility piping. Welding should be performed using established high purity welding techniques. Verify all tubing connections with the flow schematic, or installation drawing prior to welding.

Piping connection points for each piece of equipment can be found in the drawings located in Appendix A of this manual.

Process piping connections are double bagged and taped at the factory prior to shipment. Vent piping connections are single bagged and taped. Tube ends have been faced and are ready for welding.

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N

Depending on the configuration, the following facility tubing connections may be supplied with a module:

Process outlet A: 1/2" (12.7 mm) diameter, 0.049" (1.2 mm) wall thickness Optional coax 3/4" (19 mm) diameter, 0.065” (1.6 mm) wall thickness

Process outlet B/C/D (opt): 1/2" (12.7 mm) diameter, 0.049" (1.2 mm) wall thickness Optional coax 3/4" (19 mm) diameter, 0.065” (1.6 mm) wall thickness

NOTE – Optional process C and D are shipped with external open-ended piping spools installed to provide stability during shipment. These process lines must be capped if they are not facilitated at the customer site.

Purge and High Pressure Leak Check (HPLT) Gas Inlet: 1/4" (6.4 mm) diameter, 0.035" (0.9 mm) wall thickness

Venturi inlet: 1/4" (6.4 mm) diameter, 0.035" (0.9 mm) wall thickness Vent outlet: 3/8" (9.5 mm) diameter, 0.035" (0.9 mm) wall thickness

Bonnet Vent outlet (up to four lines):

1/4" (6.4 mm) diameter, 0.035" (0.9 mm) wall thickness

Enclosure Exhaust: 6" (152.4 mm) outside diameter duct

Pneumatics and Z-Purge: ¼” (6.3 mm) outside diameter compression fitting.

The process line connections can be furnished in one of two configurations: Standard Bulkhead or Coaxial Bulkhead. All other connections, such as purge, Venturi inlet, and vent, will be furnished with standard bulkheads.

The standard bulkhead permits a single process out line to penetrate the enclosure, while providing an acceptable seal for enclosure ventilation purposes. Figure 2-2 shows a standard bulkhead.

Compression Fitting Grips OD of Tube

ut

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1/2 TOD Gas Line Continuous (Passes Through Bulkhead)

Cabinet Top



Figure 2-2. Standard Bulkhead

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The optional coaxial bulkhead permits a single process out line to penetrate the enclosure, while providing an acceptable seal for enclosure ventilation purposes. In addition, the coaxial bulkhead provides a termination point for an outer secondary containment tube. The outer secondary containment tube, or jacket, is connected directly to the coaxial bulkhead. The outer secondary containment continues through the coaxial bulkhead and terminates as a branch on the coaxial bulkhead inside the enclosure.

On the branch of the coaxial bulkhead inside the enclosure, a pressure switch and manual isolation valve is installed to facilitate the fill and monitoring of the coaxial annular space. The pressure decay technique is used for coaxial annular space monitoring and requires the annular space to be pressurized with inert gas (typically nitrogen) above the pressure switch setpoint, in this case, 120 psig. If a leak develops to atmosphere from the coaxial jacket, an alarm displays on the controller, identifying the coaxial jacket that is leaking. Similarly, if a leak develops from the process pipe into the coax annular space, the same alarm displays on the controller identifying the coaxial jacket that is leaking. Figure 23 shows a coaxial bulkhead.

For coax tubing on silane lines, the pressure decay method with an inert gas (NOT AIR) must be used.

Figure 2-3. Coaxial Bulkhead (optional)

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Vent Lines

Vent lines must be piped to a safe location away from personnel exposure per owner site requirements. The vent discharge opening should be constructed to prevent blockage from weather and animals. Vent gases will be introduced into the vent line during routine purging cycles.

If treatment is required in order to abate the process gas, the vent line must be piped directly to an acceptable pollution abatement system designed for the specific gas being vented. Process gas will be introduced into the vent line during the "Pre-Purge" and “Post-Purge” sequences, when the process gas pigtail is being purged prior to process gas cylinder removal and following gas removal, respectively. At this time, 106-127 CFH (50-60 LPM) of nitrogen is also being sent into the line through the vacuum Venturi loop. The purging sequences typically run approximately 30-45 minutes. Process gas is also introduced during the following the post-purge sequence and prior to on-line mode.

During a container change, it can be expected that the following masses of gas will be vented from a BSGS eV / BULKGUARD eV module:

 Pre-purge operating sequence: Total process gas mass vented:

 Pre-purge operating sequence. Total mass of N2 vented:

 Cylinder change sequence HPLT. Total mass of 10% He/N2 mix vented = 0.2 lb.

 Post purge operating sequence. Total mass of N

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“Conditioning” sequence where process gas is cycled through the pigtail,

 0.1 lb. SiH  0.1 lb. NH3  0.2 lb. NF3  0.1 lb. N2O  0.1 lb. HCl  0.1 lb. CO2

 SiH4 requires 120 purge cycles, 2.4 lb.  NH3 requires 90 purge cycles, 1.8 lb.  NF3 requires 75 purge cycles, 1.5 lb.  N2O requires 75 purge cycles, 1.5 lb.  HCl requires 90 purge cycles, 1.8 lb.  CO

requires 75 purges cycles, 1.5 lb.

2

 SiH

requires 120 purge cycles, 2.4 lb.

4

 NH3 requires 90 purge cycles, 1.8 lb.  NF

requires 75 purge cycles, 1.5 lb.

3

 N2O requires 75 purge cycles, 1.5 lb.  HCl requires 90 purge cycles, 1.8 lb.  CO2 requires 75 purges cycles, 1.5 lb.

4

vented.

2

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 Condition operating sequence. Total mass vented during 5 conditioning cycles is:

 4 lb. SiH4  0.2 lb. NH3

2

3

O

 6 lb. NF  8 lb. N  7 lb. HCl  8 lb. CO2

A nitrogen trickle purge is constantly bled into the vent line to maintain an inert atmosphere when hazardous gases are being used. For this reason, a trickle purge valve is furnished with a trickle purge orifice. The flow rate of this trickle purge is approximately 4-10 CFH (2-5 LPM). The module employs a vacuum Venturi module that integrates a vacuum Venturi, check valve, and trickle purge valve into a single unit. Figure 2-4 depicts a typical trickle purge assembly that isn’t integrated into a module for clarity.

Figure 2-4. Typical Trickle Purge Assembly

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Versum Materials, Inc. strongly recommends a separate Venturi supply source rather than a houseline source. Most process cylinder pressures are significantly higher than houseline operating

pressures. If multiple failures of certain process panel components occur, there is a remote possibility of back contamination of the houseline source connected to the vacuum Venturi.

When multiple gases are to be vented, ensure compatibility before plumbing vents together. Contact your Versum Materials, Inc. representative for this information.

The Venturi line requires 80-90 psig (5.5-6.2 barg) of nitrogen to adequately produce the vacuum needed during purge cycles. The supply is usually taken from a bulk liquid source, but it can also originate from a cylinder manifold system. The vacuum generator will demand a flow of 106-127 CFH (50-60 LPM) of nitrogen during purge cycles.

Vacuum Venturi Vent Line Sizing

The vacuum Venturi is extremely susceptible to vent line back pressure and cannot tolerate more than 0.5 psi back pressure. If back pressure exceeds 0.5 psi, the AP11 controller will fail and abort

the purge sequence on insufficient vacuum. It will be impossible to continue until the restriction is eliminated. The recommended vent line sizes below should be used when installing the vacuum Venturi vent line. Transitions to larger tubing should be made within 1 ft. of the piping enclosure.

Recommended Vent Line Sizes:

Line Length Minimum Recommended Tube Diameter

1 ft. through 5 ft. 1/2" tube

5 ft. through 100 ft. 3/4" tube

100 ft. through 400 ft. 1" tube

Over 400 ft. 1-1/2" tube

The Venturi vent line must be piped to a safe location away from personnel exposure. It is recommended that the customer consult and design the vent system to all applicable codes. The emergency vent discharge opening should be constructed to prevent blockage from weather and animals. Vent gases will be introduced into the emergency vent lines whenever a purge or conditioning sequence is run. Do not combine vent lines, instead, route individual vent lines to an appropriately sized vent header.

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Bonnet Vent Line

The Bonnet Vent must be kept open to allow gas to escape. It must not be sealed or routed into other vent lines. The bonnet vent discharge opening should be constructed to prevent blockage from weather, animals, and insects, but not prevent gas from escaping. If the standard outlet location is directed in an unsafe manner (i.e. towards flammable construction materials, personnel walkways, etc.) or presents another potentially unsafe situation the outlet must be rerouted to a safe location during installation. Gas detectors and/or UV/IR detectors should be used in the surrounding area to monitor for a potential leak.

Purge and High Pressure Leak Check (HPLT) Supply Line

The purge and HPLT supply line must be connected to a dedicated purge source, and leak check source. The pressure required during cylinder purging is 80-90 psig (5.5-6.2 barg). An HPLT pressure of 950-965 psig (65.5-66.5 barg) is required for silane (SiH4), nitrous oxide (N2O), nitrogen trifluoride (NF3), hydrogen chloride (HCl), and carbon dioxide (CO2) process gases. For ammonia (NH3) process gas, an HPLT pressure of 190-205 psig (13.1-14.1 barg) is required. Sufficient over pressure protection must be provided. Versum Materials, Inc. recommends a safety relief valve set at a maximum of 200 psig (13.8 barg) for the purge supply, and safety relief valve set at a maximum of 1200 psig (82.7 barg) for silane (SiH4), nitrous oxide (N2O), nitrogen trifluoride (NF3), hydrogen chloride (HCl), and carbon dioxide (CO2) HPLT supply. For ammonia (NH3) process gas, a safety relief valve set at a maximum of 250 psig (82.7 barg) is required. If a purge module has been purchased from Versum Materials, Inc., relief devices will be included.

Purge and High Pressure Leak Check (HPLT) Backflow Prevention

All Purge and High Pressure Leak Check (HPLT) system must include backflow prevention in the form of a check valve. This will prevent process gas from migrating back into the purge panels and piping.

Enclosure Exhaust

Many BSGS eV / BULKGUARD eV modules are supplied with process piping inside an exhausted enclosure. Modules that have been configured with a ventilation flow switch (a pitot tube will be located inside the 6” vent stack), will require 200 CFM (5663 LPM) exhaust ventilation and -0.1” (-.25 mm) water column static pressure by the customer, whether located indoors or outdoors.

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Purge gas sources used for the BSGS eV / Bulkguard eV must not be shared with other BSGS eV / Bulkguard eV modules if the gas types are incompatible. Purge gas must not be supplied from a low pressure bulk gas source.

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With the exception of nitrous oxide (N2O), modules with exhausted enclosures that haven’t been configured with a ventilation flow switch are for inert gases, and don’t require exhaust ventilation if located outdoors. In this case, the 6” (152.4 mm) diameter duct at the top of the piping enclosure may be capped. If, however, the enclosure will be located indoors, it is recommended that the enclosure be ventilated at 75 CFM (2124 LPM) minimum. Ifexhaust ventilation is not provided for indoor inert modules (enclosure or open-air rack), then Versum Materials, Inc. recommends that forced mechanical ventilation be provided for the room per local code or regulatory requirements. A typical room ventilation requirement for indoor inert gas systems is to provide room ventilation at 6 air changes per hour, or 1 CFM/ft.2 (2.6 LPM/meter2) of floor space, whichever is smaller. Also, customers should determine if additional safeguards are warranted, such as room O2 monitoring with local and remote alarms on low O

concentration (i.e. less than 19.5% O2 detected in the room).

2

Nitrous oxide (N

O) modules equipped with exhausted enclosures must be ventilated to 75 CFM (2124

2

LPM) minimum whether located indoors or outdoors to extract excess heat generated by the JT heater.

Silane (SiH4) modules are supplied without an exhausted enclosure and must be located outdoors.

Heat Trace and Insulation

All source containers that are heated (including Y containers, drums, tonners, and ISO containers) must have heat trace and insulated piping at least from the source container to the process regulators. If the source container is heated and the piping isn’t maintained at the same temperature, liquefaction can occur and create operational problems up to and including a module shutdown. Heat trace and insulation may also be required for the houseline, from the process regulator to the facility entrance, depending on ambient temperature. If in doubt, consult your Versum Materials, Inc. representative.

If the BSGS eV / BULKGUARD eV module has been ordered with source heater capability, panel heat trace and insulation will have been partially installed at the factory. The module is shipped with a bag of pre-cut, short black insulating material. This insulation is to be field installed over the piping VCR joints AFTER the joints are field pressure and leak tested.

Depending upon the module configuration, inlet flex hoses may also be factory heat traced and insulated. If the pigtail is field piped, then the customer is responsible for installing heat trace and insulation from the DISS connection to the module. The heat trace will be supplied by the factory, coiled at the pigtail inlet to the piping cabinet but acquiring and installing the insulation (as per the installation drawings in Appendix A) will be customer scope.

Heat trace installation details are called out in the electrical installation drawing, located in Appendix A of this manual. Versum Materials, Inc. recommends ½” Buna-N/PVC rubber insulation for all field installed insulation.

NOTE: Field-installed heat trace and insulation should be installed after the pipeline has been pressure and leak tested.

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If additional heat trace is required in the field, the recommended material is Delta-Therm PT3SB Heat Trace Cable. This cable is constant-Watt (12 watts /ft at 240 VAC), so a controller will need to be installed to regulate heat trace temperature. Versum Materials, Inc. does not recommend selfregulating heat trace because heat trace temperature cannot be changed if process conditions change.

Piping System Testing

Prior to the electrical start-up of the system, all field installed process piping should be tested. Factory installed piping has been tested prior to shipment and is shipped under positive Argon pressure. Verify that the Argon pressure has been maintained at greater than or equal to 15 psig (1 bar g). If positive pressure has not been maintained, contact the Versum Materials, Inc. representative.

It is also recommended that the module be pressure and leak tested before process gas is introduced. VCR joins may have loosened during shipment. MAWP of the piping systems within the module are as follows:

 High pressure process piping, from PT-1 to PCV-1, purge inlet CV-9/CV4 to V-13, and

V-13 to MV29.

o Process gases: Silane (SiH

), nitrous oxide (N2O), nitrogen trifluoride (NF3), and

4

carbon dioxide (CO2): 3000 psig MAWP.

o Process gases: Hydrogen chloride (HCl): 1300 psig MAWP.

o Process gases: Ammonia (NH

): 250 psig MAWP.

3

o Other gases: contact your Versum Materials, Inc. representative

 Low pressure process piping from PCV-1 to MV-38.

o Process gases: All: 250 psig MAWP.

After all the piping joints have passed the pressure and leak tests, install the factory supplied pre-cut, short black insulating material over the VCR joints. If the bag has been misplaced, ½” thick flexible Buna-N/PCV clamshell foam rubber insulation can be purchased by the installer locally.

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5.0 Elecrical and Pneumatic Connections

All electrical connections must comply with Article 300 - Wiring Methods and Article 500 Hazardous (Classified) Locations of the National Electric Code (NEC), and NFPA 70 if installed in the United States. Reference to the use of this equipment in Hazardous Locations only applies to installations located within the United States of America. BSGS eV / BULKGUARD eV modules are designed for use in Explosive Atmosphere Directive (ATEX) locations.

All electrical and pneumatic connections and lines must be installed in accordance with the following drawings.

 “Electrical Details for Typical Installation” located in Appendix A.  “Installation, BSGS eV / BULKGUARD eV Rack” located in Appendix A.

Sealing hubs and low point drains and other means of providing a watertight seal shall be utilized for outdoor installations. It is also recommended to use poured seals and nitrogen purge for outdoor applications to minimize effects of moisture on the controller. Additional specifications will have to be followed for installation within electrically classified areas.

Grounding Method

The equipment must be grounded in accordance with Article 250 - Grounding in the National Electrical Code, if installed in the United States. The customer is responsible for connections to earth ground. A ground connection is supplied in the controller for this purpose.

On the plenum of the gas cabinet there is an additional split bolt terminal for connection hookup to the facilities grounding network. Figure 2.5 shows a suggested grounding method for a typical system. This drawing may not be applicable to your specific system.

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p

NOTE 1: USE #4 AWG (25 mm) WIRE FOR NON-EMI/RFI SYSTEMS. USE ALPHA #1239, 1-3/8” (35 mm) FLAT BRAID OR EQUIVALENT FOR EMI/RFI PROTECTED SYSTEMS. TOTAL LENGTH NOT TO EXCEED 10’ –0” (3 M).

eVECC

tional)

(o

AP11

Figure 2.5: Suggested Grounding Method

Use of #4 AWG ground wire will not maintain CE marking. Use Alpha #1239, 1-3/8” flat braid or equivalent for CE marked systems (total length not to exceed 10 feet or 3 meters).

After grounding the overall resistance must be measured. This resistance for the equipment ground to the grounding electrode should not exceed one ohm (1). Check the effectiveness of grounding by using a ground resistance meter (i.e., an AEMC clamp on ground resistance tester or equivalent).

Power Supply Connection – AP11 with eV ECC

BSGS eV / BULKGUARD eV modules are normally equipped with an eV ECC located on top of the AP11 controller. When equipped with an eV ECC, the BSGS eV / Bulkguard eV has two power feed options: single feed (both AP11 and eV ECC powered by a single feed) and dual feed (AP11 and eV ECC powered by separate feeds). Details of the termination points are shown in the electrical installation drawing, Appendix A of this manual.

Each BSGS eV / BULKGUARD® eV system should be installed with an independent external circuit interrupting device to remove power from the unit when maintenance on the controller is required and should be Lockout/Tagout capable. This device should be rated as a minimum at 240 volts, 40 amps, 50/60 Hz and 10,000 rms symmetrical ampere interrupting capacity. The device should be accessible to the operators, marked as the disconnecting device for the gas cabinet, and must have the on/off position clearly marked for the operator, and should be near the gas cabinet.

Disconnect switches shall meet the requirements of IEC 60947-1 and IEC 60947-3 and the disconnect switch must not interrupt the protective earth conductor.

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Power Requirements: Single Power Feed – JT heater with heat trace

208-240 VAC, 32A, 50/60Hz, 3 wire

Power Requirements: Single Power Feed – Heat trace with no JT heater

208-240 VAC, 7A, 50/60Hz, 3 wire

Power Requirements: Controller Powered Separate – JT heater with heat trace

Heaters: 208-240 VAC, 32A, 50/60Hz, 3 wire Controller: 100-240 VAC @ 150 VA maximum, 50/60Hz, 3 wire

Power Requirements: Controller Powered Separate – Heat trace with no JT heater

Heaters: 208-240 VAC, 7A, 50/60Hz, 3 wire Controller: 100-240 VAC @ 150 VA maximum, 50/60Hz, 3 wire

Acceptable wire gauge:

Single power feed: 14-4 AWG OR Heater Power: 14-4 AWG Controller Power: 14-10 AWG

Use at least 75C rated wiring for the mains supply.

Replaceable fuses:

F1, F2, F3, and F4, located on the power board in the top of the AP11 controller, are 4A super quick acting fuses. FS-405, located in the eV ECC adjacent the DC power supply, is a 2A medium time delay fuse. FS-406, FS-407, and FS-408 are 500 mA medium time delay fuses. See the Spare Parts List in Appendix B for Manufacturer and part numbers and specifications.

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Figure 2-6: Power Connections

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Dual Power Supply Connection:

 To supply power for the AP11 controller separate from the heaters complete the following

steps: Remove wires between terminal blocks 1031-1121 and 1021-1111 (Figure 2-8).

 Wire heater power feed into the normal connection points (CB-102 and adjacent ground block).  Wire controller power feed into terminal blocks 1092 (L1), 1102 (L2/N), and adjacent ground

block.

 Apply “Danger – Hazardous Voltage Fed by Two Sources” label to controller door as shown

(Figure 2-7).

Figure 2-7: Label Placement

Figure 2-8: Wire Removal

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Power Supply Connection – AP11 controller only

There are some cases where the eV ECC will not be installed on the BSGS eV / BULKGUARD eV, such as when neither a JT heater not heat trace are specified. In those cases, there will only be an AP11 controller that requires power.

Each BSGS eV / BULKGUARD® eV system should be installed with an independent external circuit interrupting device to remove power from the unit when maintenance on the controller is required and should be Lockout/Tagout capable. This device should be rated as a minimum at 240 volts, 4 amps, 50/60 Hz and 10,000 rms symmetrical ampere interrupting capacity. The device should be accessible to the operators, marked as the disconnecting device for the gas cabinet, and must have the on/off position clearly marked for the operator, and should be near the gas cabinet.

Disconnect switches shall meet the requirements of IEC 60947-1 and IEC 60947-3 and the disconnect switch must not interrupt the protective earth conductor.

The power input must be wired to the terminals shown below in Figure 2-9.

Figure 2-9: Dual Power Supply Terminal Connection

The power requirements are as follows:

100-240 VAC @ 150 VA maximum, 3 wire

Full load current - 4 amps

The controller power is the same for idle, average, and peak and is less than 0.125 KW.

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NOTE: Power wiring must be sized to deliver the required voltage at the rated current. Voltages should be checked at each cabinet after installation to ensure proper levels. Wire size should not exceed 12AWG (3.3 mm2). An optional kit is available to allow use of 10AWG (5.26 mm2) wire.

Replaceable fuses - F1, F2, F3, and F4 located on the power board are 4A super quick acting fuses. See the Spare Parts List in Appendix B for Manufacturer and part number specifications.

Use at least 75C rated wiring for the mains supply.

Field Connections

In NEC Class I, Division 2 areas (only in the U.S.A.), a conduit seal ("pour fitting") or equivalent must be installed between each electrical connection point on the cabinet and the electrical source. Liquid tight flexible conduit can be installed between the GASGUARD® AP11 connectors and the conduit seals to facilitate these connections. A maximum length of 18" (457 mm) is allowed between the last pour fitting and the cabinet connector. All conduits shall be sealed in accordance to Sections 501-5, 502-5 or 50470 of the National Electric Code. See Figures 2-10, 211, 2-12, and 2-13 for details.

NOTE: For Systems approved for installation and use in Explosive Atmospheres (Europe), refer to section 4.8 for additional instructions.

In classified hazardous areas – Do not separate electrical terminations or connectors while energized due to risk of electrical arc or spark which can ignite potentially flammable atmospheres.

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Systems which have been equipped with the eV ECC have conduit holes in the back of the sheet metal. These conduit locations are shown in Figure 2-10 and Figure 2-11.

All conduit holes are 1-1/8" (28.6 mm) in diameter for 3/4" conduit.

Power Conduit

Customer I/O and Ethernet

Figure 2-10: Rear View of GASGUARD® eV AP11 Controller

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Figure 2-11: BSGS eV / BULKGUARD® eV Conduit and Conduit Seals (with eV ECC)

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Systems which do not have the eV ECC installed with have conduit holes located on top of the AP11 controller. These holes would be covered up when the eV ECC is installed. A 1-1/8" (28.6 mm) diameter hole for 3/4" conduit is supplied for connecting the 120/240 VAC power supply to the system. Two additional holes are supplied for customer I/O and/or Ethernet Cable. Figure 2-12 and Figure 2-13.

Figure 2-12: Top View of GASGUARD® AP11 Controller

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Figure 2-13: Conduit and Conduit Seals (no eV ECC installed)

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Field Signal Connections

In the AP11 BSGS eV / BULKGUARD eV module, all field I/O wiring connections are made to the AP1563 customer I/O board located inside the left wall of the AP11 enclosure, and the AP1571 bulk interface board located in the right bulk interface box located on the right side of the piping cabinet.

There are three types of I/O identified for the field connections: discrete (digital) inputs, discrete (digital) outputs, and analog inputs. All the field and customer I/O signal connections to the AP11 Controller have been pre-assigned a specific location, although not all I/O connections or functions are required on all systems. Figure 2-14 and Figure 2-15 show the general locations of these connections. Details of these terminal blocks and termination points are shown in the electrical installation drawing, Appendix A of this manual.

Figure 2-14: AP1563 Customer I/O Terminal Blocks

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Power(5total)

DigitalInputs

(12total)

AnalogInputs

(8total)

Figure 2-15: Terminal block layout of I/O interface box

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CGA G-13 code, specifically section 12.2.1.5, states that an activation of the deluge sprinkler system should result in a shutdown of the silane (SiH4) source. The customer should include this signal as part of the Life Safety System input to the module, shown on the electrical installation drawing, Appendix A of this manual.

Supervised Inputs

The system supports two supervised inputs from the customer interface. Supervised inputs are digital inputs, which are monitored via a window comparator. These inputs are monitored for normal operation, alarm type, and fault conditions.

A normally open switch is to be used as an input device. This switch must have a 10 kilo-ohm resistor in parallel with the contacts. When the switch contacts are open the circuit will provide a signal, which represents a normal operating condition. When the switch contacts are closed, the circuit will provide a signal which indicates an alarm condition. An open wire in this circuit, or a short circuit, will produce an out of range signal, which indicates a circuit fault.

Switch contacts must be rated for 20ma @ 24VDC. Switch contacts must be dry contact and external wiring should not have any form of power applied to them.

Typically, supervised inputs are used with the life safety system. Figure 2-16 shows the supervisor input wiring for use with the life safety system.

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Figure 2-16: Supervisory Input Wiring

Available External I/O Communications

The BSGS eV / BULKGUARD® eV System is equipped with a "vent unavailable" feature which prevents process gas from being vented from the panel if the scrubber system is not operating. Use of this feature requires the installation of a hardwire between the controller and the scrubber. Failure to utilize this feature may result in the discharge of process gas to a non-functioning vent system.

For a list of alarms and shutdowns specific to your system, see the Alarm Matrix included in the drawings section of the operational manual.

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Digital Outputs Dry - Customer I/O board AP1563

24 VDC @ 1 Amp maximum

Relay Output #

1 T4-1 T4-2 T4-3

2 T4-4 T4-5 T4-6

3 T4-7 T4-8 T4-9

4 T4-10 T4-11 T4-12

5 T5-1 T5-2 T5-3

6 T5-4 T5-5 T5-6

7 T5-7 T5-8 T5-9

8 T5-10 T5-11 T5-12

9 T6-1 T6-2 T6-3

NO

Customer Brd

COMMON

NC

10 Factory use only Factory use only Factory use only

11 Factory use only Factory use only Factory use only

12 T6-10 T6-11 T6-12

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Digital Inputs (Customer)

(Customer I/O board AP1563)

Digital Input #

Customer Brd

Signal

Customer Brd

Return

Hardwire Switch

5 / 6* T9-LEFT (+) T9-LEFT (-) SW2-5

7 / 8* T9-RIGHT (+) T9-RIGHT (-) SW2-6

33* T7-1 T7-2 SW1-1

34* T7-3 T7-4 SW1-2

35* T7-5 T7-6 SW1-3

36* T7-7 T7-8 SW1-4

37* T7-9 T7-10 SW1-5

38* T7-11 T7-12 SW1-6

39* T8-1 T8-2 SW1-7

40* T8-3 T8-4 SW1-8

Position

41* T8-5 T8-6 SW2-1

42* T8-7 T8-8 SW2-2

43* T8-9 T8-10 SW2-3

44* T8-11 T8-12 SW2-4

* Each digital-input can be individually configured to provide a hardwire shutdown alarm function. Figure 2.6 shows the location of SW1 & SW2 hardwire switches.

To configure an input as a hardwire, the corresponding switch shown in the above table must be set to the ON position.

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SW2-8 Parity Switch setting:

- "On" if total number of active hardwire circuits is 0, 2, 4, 6, 8, 10, or 12.

- "Off" if total number of active hardwire circuits is 1, 3, 5, 7, 9, or 11. Customer Board parity LED will be green when switches are configured correctly.

A digital-input that is in the OPEN state and configured as a hardwire will have the same functional effect as pressing the EMO (Emergency Stop) switch.

Analog Inputs (Customer)

(AP1563 Customer I/O board)

Analog inputs supplied power at 24VDC fused @ 100 mA each w/ 100 Ω series resistor.

Analog Input #

Customer Brd

Signal

Customer Brd

24 VDC+

Customer Brd

GND

17 T1 - 5 T1 - 6 T1 - 4

18 T1 - 2 T1 - 3 T1 - 1

19 T2 - 5 T2 - 6 T2 - 4

20 T2 - 2 T2 - 3 T2 - 1

21 T3 - 5 T3 - 6 T3 - 4

22 T3 - 2 T3 - 3 T3 - 1

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User Power (Customer) (AP1563 Customer I/O board)

The AP11 customer board supports six Analog-Input (AI) channels, each of which can be independently configured for 0-5V or 4-20mA inputs. Three user-connections (per channel) are provided: +24V-power, +24V-gnd, and signal. A common isolated power-supply is used for all channels, however each channel’s power is individually fused/current-limited. The combined powersupply loading of all channels must be less than 200mA. In some configurations, it may be possible to exceed this limit. It is the user’s responsibility to ensure this constraint is not violated. The following sections provide detailed guidelines on how to connect and use the customer board.

There are 3 types of devices as shown in Figure 2-17 below. (AP11 connections are shown on the left)

+24

Signal

+

Externalpower

Signal

Gnd

(noAP11connection)

‐

2‐Wire

3‐Wire

Externally‐Powered

Figure 2-17

2-Wire (4-20mA) Device: Device has 2 wires: power and signal. The device draws up to 20 mA.

3-Wire Device (Powered from AP11): Device has 3 wires: power, signal, and ground. The current

draw should be included on the manufacturer’s data sheet and should be plugged into the table below.

Externally-Powered: These devices receive power for their operation from another source and interface with the AP11 using 2 wires: signal and ground.

There are two calculations that must be performed when connecting Analog devices to an AP11.

1. The total current-consumption calculation of AP11-powered devices

2. The cable-resistance calculation for each device connection

The following sections provide detailed examples on how to perform these calculations.

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Current-Consumption Calculations for AP11-powered devices:

The current-consumption calculation is necessary to ensure the total draw of all connected devices is less than the 200mA capacity of the Customer Board. If using all 2-wire devices, no calculation is required as the AP11’s capacity is sufficient for this configuration. For all other cases, use the following table to determine the current-consumption.

Type

Number of Devices

Multiply by current draw per device

Total

2-Wire (4-20mA) Device X 20 mA = mA

3-Wire Device X mA = mA

Externally-Powered Device X 0 mA = 0 mA

TOTAL

(Sum of Above)

mA

Can NOT exceed 200 mA

Note: If the manufacturer specifies power consumption in watts instead of current in milliamps, assume that the device is receiving 15V and approximate the current draw as follows:

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EXAMPLE:

An AP11 needs to connect to three 2-wire devices and two 3-wire devices and one externally-powered device. The manufacturer of the 3-wire device specifies that it will draw no more than 50 mA.

Type

Number of Devices

Multiply by current draw per device

Total

2-Wire (4-20mA) Device 3 X 20 mA = 60 mA 3-Wire Device 2 X 50 mA = 100 mA Externally-Powered Device 1 X 0 mA = 0 mA

TOTAL

(Sum of Above)

160 mA

Can NOT exceed 200 mA

In this example, the calculated current draw (160mA) is below the AP11’s capacity (200mA) so the configuration is valid.

Cable-Resistance Calculation:

Resistance in the cables used to connect field-devices to an AP11 results in voltage-drops that must be considered. These voltage-drops directly subtract from the power-supply’s output used to power a device. The resultant voltage (as seen by the device) must be sufficient to satisfy the minimum excitation voltage specification for a given device to operate properly. This specification is available from the manufacturer of the device.

To satisfy a devices excitation spec, the “actual” cable-resistance must be less than the “maximum” cable-resistance that can be supported. Example calculations are shown below. It should be noted that calculations differ for each of the device types.

2-Wire (4-20mA) Device: Device has 2 wires: power and signal. The device draws up to 20 mA.

The maximum cable resistance is equal to the minimum voltage seen at the power pin on the AP11 minus the minimum excitation voltage of the device (as provided by manufacturer) minus the voltage caused by the input resistance of the AP11 all divided by the maximum current of the device.

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Cable resistance is calculated as the resistance per meter times the number of meters that the signal travels. IMPORTANT: Both the wire going to and returning from the sensor must be included.

Cable resistance = Ohms per meter * meters of cable * 2 (this is for wire to and from sensor)

EXAMPLE:

A sensor with an excitation spec of 10v is at the end of a 100 meter 22/2 cable. The manufacturer specifies that the 22 AWG wire has a resistance of 0.0527 ohms/meter.

Cable resistance = 0.0527 ohms/meter * 100 meters * 2

(actual) = 10.54 ohms

The calculations confirm that the “actual” cable resistance (10.54 ohms) is less than the Max cable resistance (290 ohms) so the excitation specification is satisfied.

3-Wire Device (Powered from AP11): Device has 3 wires: power, signal, and ground.

The current draw and minimum operating voltage of the device should be included on the manufacturer’s data sheet. The voltage seen by the device is reduced by the resistance of the cable going to the device and by a 100-ohm resistor within the AP11. Calculations to determine the maximum cable resistance are shown in Figure 2-18 below:

AP11

Excitation Voltage (V

+22.8V

): Minimum operating voltage of the device as specified by the manufacturer

E



100Ω

Gnd



Signal(20mA)

Figure2‐18

R

wire

Current Draw (IL): The amount of current the sensor draws as specified by the manufacturer. This is measured in Amps.

Note: If the manufacturer specifies power consumption in watts instead of current in milliamps, assume that the device is receiving it’s minimum voltage and approximate the current draw as follows:

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Max Cable Resistance: The maximum resistance of the wiring to and from the sensor.

Cable resistance is calculated as the resistance per meter times the number of meters that the signal travels. IMPORTANT: Both the wire going to and returning from the sensor must be included.

Cable resistance = Ohms per meter * meters of cable * 2 (this is for wire to and from sensor)

EXAMPLE:

A sensor that draws 50 mA and has a minimum excitation voltage of 15V is at the end of 100 meters of 22/3 cable. The manufacturer specifies that the 22 AWG wire has a resistance of

0.0527 ohms/meter.

Cable resistance = 0.0527 ohms/meter * 100 meters * 2

(actual) = 10.54 ohms

The calculations confirm that the “actual” wire resistance (10.54 ohms) is less than the max wire resistance (70 ohms) so the excitation specification is satisfied.

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On BSGS eV / BULKGUARD eV modules, jumper J7 is factory set as shown in Figure 2-19 for the Customer I/O board.

Figure 2-19: GASGUARD® AP11 Customer board "J7" jumper configuration.

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USB Connection Port

The AP11 controller USB port is located on the face of the controller. The USB port allows a USB connection to be made without having to open the controller door. Electrical devices should never be operated, connected to, or disconnected from the USB port unless the area surrounding the equipment is known to be free of flammable material. The USB port on the face of the controller will also have a warning label (Figure 2-20) for operation in a flammable area.

Each USB connector type is 2.0 format. 4ea USB ports available inside the controller, with one of the ports extended externally to the AP11 controller door as shown in Figure 2-21



Figure 2-20: USB Port Warning Label





Figure 2-21: AP11 Controller USB Port on the Face of the Controller

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The USB parameters for the port that is extended to the door of the AP11 controller, are listed below.

 Voltage: 5V +/- 10%

 Current: 2A maximum

 Capacitance: 100.01uF +/- 20%



Pneumatic Connections

The AP11 controller requires a pneumatic supply for Z-purge and pneumatic valve operation. A pneumatic supply of inert gas without oxygen, such as nitrogen, is recommended. It is strongly advised to not use clean dry air for pneumatic supply unless there is a high degree of confidence that it will maintain purity as per ISO 8573-1 Class 2. Moisture in clean dry air will promote

corrosion of electrical components and reduce controller performance and reliability.

The pneumatic supply must be regulated to 85-95 psig (5.9-6.6 barg). Maximum allowable working pressure is 100 psig (6.9 barg). Over-pressurization protection, such as a safety relief valve, must be provided to protect the internal solenoids. The flow rate required for pneumatic valve operation is 2 CFH (1 LPM). A 1/4" compression fitting at the back of the controller is provided for the pneumatic supply inlet connection as shown in Figure 2-22. Piping for the pneumatic supply must be protected from mechanical damage.

This supply is also used for Type Z purge of the electrical enclosure. Z-purge is enabled on all BSGS eV / BULKGUARD eV module controllers because a clean, dry nitrogen purge will promote controller longevity and guard against water intrusion when installed outdoors. In certain areas, the Type Z purge is required to maintain a positive pressure at or above 0.1" water column (24.9 Pa). This is in accordance with Article 496 of the National Fire Protection Agency (NFPA) regulations. In applications where Type Z purge is required, the controller will be equipped with a pressure switch to monitor the pressure. The Type Z purge will require a purging flow rate of 7 lpm/15 CFH for 30 minutes before applying power to the controller, each time any of the three electrical enclosure doors are opened. Do not exceed 7 lpm (15 CFH) during purge of the BSGS eV / BULKGUARD eV.

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

Z-Purge Procedure

The Z purge pressure is controlled by a needle valve at rear of controller. After opening the controller in a suspected hazardous area it is necessary to use the following procedure to re-establish the Z-purge before operating the controller:

1. Close the controller front and tighten both latches completely.

2. Open the needle valve 4 to 5 turns (counter-clockwise). Allow the controller to purge for 30

minutes.

3. Adjust needle valve to satisfy the “Z-Purge” alarm (approximately 2 total turns open).

Flow requirements to operate the solenoid valves are very small, less than 1 LPM (2 CFH). If Type Z purge is required, a flow rate of 7 LPM (15 CFH) will be needed, depending on the tightness of the individual controller and the installation. BSGS eV / BULKGUARD eV will require 7 LPM (15CFH). Flowrates should be monitored during Type Z purge. Do not exceed 7 LPM (15 CFH) during purge of

BSGS eV / BULKGUARD eV.

Instrument N2 connection ¼” compression fitting

Chapter 2 - Installation

Ground Lug

Alarm Horn

Pneumatic Connections (typical)

Source Container Pneumatic Connections

Depending on the BSGS eV / BULKGUARD eV module configuration, the AP11 controller may be configured to supply a single pneumatic signal to the source A1/A2 and B1/B2 container valve, or multiple pneumatic signals to source A container valves and perform tube switching.

If the module was configured with a pneumatic signal for the source container, a single pneumatic tube or tube bundle will be supplied by Versum Materials, Inc. A single pneumatic tube is typically supplied for Y containers, drums, and NH3 ISO containers. A pneumatic tube bundle is typically supplied for tube trailers and multi-tube ISO containers. Installation details can be found in the mechanical installation drawings located in Appendix A of this manual.



Figure 2-22. Rear View of GASGUARD® AP11 Controller

Mounting Stud (4)

Z-Purge Valve

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GASGUARD® Networking

General Description

Remote monitoring of GASGUARD® systems such as the BSGS eV / BULKGUARD® eV can be attained using the GASGUARD GCS (Global Communications System). Either method can provide continuous on-line 24 hour per day monitoring of the status of all connected GASGUARD® Cabinets, VMBs and BSGS systems. The GASGUARD® AP11 communicates to GCS or OPC via Ethernet. Figure 2-23 shows the location of the Ethernet connection on the AP11 carrier board.

®

OPC Server software or Versum Materials, Inc.’s SCADA system;

Figure 2-23: AP11 carrier board Ethernet connection

GCS Ethernet Network Wiring Configuration

A GCS is typically integrated into the site’s Ethernet network. Figure 2-24 depicts the typical network architecture of a GCS. In most instances, the GCS is connected to two separate networks. One subnet will interconnect only the gas controller equipment, while the other subnet will be the connectivity to the overall site Local Area Network. Using this architecture, the gas controller network traffic will not be adversely affected by other nodes on the site LAN; furthermore, if the site needs to disconnect the GCS from their network -- for instance when a remote support person accesses the system – the ability to monitor the gas controller network will not be affected. The connection to the site LAN allows for connectivity from office PC’s to the GCS for Global View sessions as well as ODBC data downloads. The GCS may also be equipped with additional options which will require its connectivity to additional LAN’s. Such will be the case if the GCS will need to supply gas availability data to a site’s tool annunciation system. GCS uses standard TCP/IP network protocol to communicate over all networks.

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Customer's Entire

Network

10/100 BASE-T Subnet

Gateway, Router and/or

Bridge

10/100 BASE-T Switch/

Hub

10/100 BASE-T Ethernet Network (Star Topology)

Gasguard AP Ethernet Network OPC Server

Other Networked Customer

Computers or Equipment

Residing on this Network Subnet

HMI or SCADA Computer

Windows NT or Windows 2000

Gasguard AP Controller

(Ethernet)

Gasguard AP Controller

(Ethernet)

Gasguard AP Controller

(Ethernet)

Figure 2-24 Typical GCS Network Architecture

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Installation and Pre-Facilitation Checklist

A GASGUARD® BSGS eV / BULKGUARD® eV Installation and Pre-Facilitation Checklist is provided in an appendix of this manual. This checklist will assist the owner/installer with items to be completed prior to startup. The Installation and Pre-Facilitation Checklist is included in Appendix D of this manual.

Startup and Commissioning Checklist

A GASGUARD® BSGS eV / BULKGUARD® eV Startup and Commissioning Checklist is provided in an appendix of this manual. This checklist is used to verify that the system is connected properly and

is ready for the Operational Readiness Inspection, commissioning, and start up. The Startup and

Commissioning Checklist is included in Appendix E of this manual.

Operational Readiness Inspection

Before a BSGS eV / BULKGUARD eV module or system can be started up, an Operational Readiness Inspection (ORI) must be completed. The ORI is a checklist that assures equipment placement, connection to all required utilities, verification of operability, startup and eventual commissioning prior to the introduction of process gas into the module or system. The ORI checklist is included in Appendix F of this manual.

OSHA Process Safety Management (PSM)

The United States Government, through OSHA, has established threshold quantities of hazardous gases. When exceeded, OSHA requires the system owner to establish a PSM program to inform employees of the operational characteristics and hazards of system operation. Contact OSHA, or ask your Versum Materials, Inc. representative for information on PSM threshold quantities and if establishing a PSM program applies to your facility.

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6.0 Explosive Atmosphere (ATEX) Installations

BSGS eV / BULKGUARD eV controllers that have the label shown in Figure 2-25 has been certified to comply with European Union ATEX Directive 2014/34/EU of the European Parliament and Council when properly installed in accordance with the guidelines and

instructions referenced in this section.

BSGS eV / BULKGUARD eV controllers with the following label attached for explosion protection are of Group II, Category 3; intended for use only in areas where explosive atmospheres of gas are unlikely to occur, or if they do occur are likely to do so infrequently or for a short period.

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6.1 Label Markings

The ATEX label placed on the AP11 controller includes the following information (symbols follow in order starting at the upper left corner):

 The CE Symbol which reflects conformity with the European Directives  The Hexagonal “Ex” Symbol for Explosive Atmosphere  The equipment group symbol for the electrical apparatus which is II. All industry gases are

classified as Group II gases.

 The equipment category number 3. The equipment category number 3 means the equipment

is suitable for an environment where an explosive atmosphere is unlikely to occur, occurs infrequently, or occurs for only a short period of time.

 The atmosphere symbol “G”. “G” means that product is safe in an explosive GAS

atmosphere.

 Symbol “Ex”. This symbol stands for the equipment has been tested under the latest

European Harmonized Standard for use in Explosive Atmospheres.

 Symbol “ic” for intrinsic safety.  Symbol “pz” for pressurization. Pressurization prevents the ingress of an explosive

atmosphere to a space that may contain a source of ignition. This is used for the controller.

 Symbol “IIC’ for the apparatus gas group.  The symbol indicating the maximum surface temperature, T4. T4 indicates that the

maximum surface temperature does not exceed 135°C.

 The symbol “X” for special conditions of installation and relevant use for safety. The

normal ambient temperature range in the ATEX standard is considered to be -20°C to 60°C. Since the temperature range for the AP11 varies from the normal range, an X is included on the label markings.

 The ambient temperature range, Ta.

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6.2 Special Conditions for Safe Use (X)

 Environmental Limits

 BSGS eV / BULKGUARD eV controllers are intended for indoor installation. They

have been evaluated for installation in locations providing adequate protection against the entry of water.

 AP11 controllers are intended for use in ambient temperatures in the range of -20C to

+60C and should not be used outside this range.

 DO NOT rub the surface of the touch screen with a dry cloth. Electrostatic charge

generated by the friction may result. When cleaning the face with a damp cloth, take the measures of an electrostatic discharge such as earth band, ionic shower, etc.

 Installation Conditions

 When installing the equipment, appropriate precautions must be taken to ensure that the

equipment has been connected to earth. Refer to Section 5 of this manual for more information.

 Installation of this equipment shall be carried out in accordance with the installation

 Power Supply

 Input power supply specs must not exceed the maximum values as listed in Section 5 of

 Maintenance

 Before opening the controller enclosure ensure that there is no danger of explosion in

 Before turning the power supply ON, be sure to close the enclosure cover tightly and

 Only qualified Versum Materials personnel should service the controller. Substitution

standards for potentially explosive atmospheres. Installation, startup and maintenance must be carried out only by personnel trained in explosion protection.

this manual.

the atmosphere and wait at least 10 minutes after the power has been removed.

securely fasten the latch. Ensure that z purge is operating and functional for at least 30 minutes prior to turning the power on.

of components (other than those recommended by Versum Materials) may impair its suitability for use in hazardous locations.

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Chapter 3

Module Specifications

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

System Specifications

Range of Environmental Conditions

 -20 to 60° C Operating Temperature Range

 95% Maximum Relative Humidity

 2000 Meters Above Sea Level, Maximum

Paint Specification

The paint specification for touch up painting of all enclosure cabinets:

Touch-up paint for the cabinet can be purchased from Sherwin Williams. The paint is from Sherwin Williams Polane S Plus White textured blending FG3W25.

Pressure

MAWP of the piping systems within the module are as follows:

 High pressure process piping, from PT-1 to PCV-1, purge inlet CV-9/CV4 to V-13, and

V-13 to MV29.

o Process gases: Silane (SiH

carbon dioxide (CO

o Process gases: Hydrogen chloride (HCl): 1300 psig MAWP.

o Process gases: Ammonia (NH

o Other gases: contact your Versum Materials, Inc. representative

 Low pressure process piping from PCV-1 to MV-38.

o Process gases: All: 250 psig MAWP.

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), nitrous oxide (N2O), nitrogen trifluoride (NF3), and

4

): 3000 psig MAWP.

2

): 250 psig MAWP.

3

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Chapter 3 - Module Specifications

Filtration

High pressure filter (F-1A/B): 5.0 micron

Outlet filter (F-2A/B): 0.003 micron – option (recommended)

Physical Characteristics

Module Weight (estimated): 600 lbs. (270 kg)

Footprint: 2’-10” wide x 3’-2” deep* x 7’-4 1/4” tall

(864 mm x 966 mm x 2242 mm)

AP11 controller door fully open

Clearance: Front: 48 in (1220 mm)

Anchoring: (Qty 4) 9/16” (14.3 mm) mounting holes

Process Connections

Depending on the configuration, the following facility tubing connections may be supplied with a BSGS eV / Bulkguard eV module:

Process outlet A: 1/2" (12.7 mm) diameter, 0.049" (1.2 mm) wall thickness Optional coax 3/4" (19 mm) diameter, 0.065” (1.6 mm) wall thickness

Process outlet B/C/D (opt): 1/2" (12.7 mm) diameter, 0.049" (1.2 mm) wall thickness

Optional coax 3/4" (19 mm) diameter, 0.065” (1.6 mm) wall thickness

Purge and High Pressure Leak Check (HPLT) Gas Inlet: 1/4" (6.4 mm) diameter, 0.035" (0.9 mm) wall thickness

Venturi inlet: 1/4" (6.4 mm) diameter, 0.035" (0.9 mm) wall thickness

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Back: distance to install the source container

Sides: 18 in (457 mm)

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Confidential and Proprietary Data

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Chapter 3 - Module Specifications

Vent outlet: 3/8" (9.5 mm) diameter, 0.035" (0.9 mm) wall thickness

Bonnet Vent outlet (up to three lines):

1/4" (6.4 mm) diameter, 0.035" (0.9 mm) wall thickness

Enclosure Exhaust: 6" (152.4 mm) outside diameter duct

Pneumatics and Z-Purge: ¼” (6.3 mm) outside diameter compression fitting.

Miscellaneous Connections

Exhaust Duct: 6 in (152 mm) diameter

Tubing connections are made at the top rear of the enclosure. The GASGUARD® BSGS eV / BULKGUARD® eV module is designed for indoor or protected outdoor installation. Outdoors, the system must be installed under a roof that extends 40 in (1000 mm) beyond the equipment footprint. The roof height above the equipment should be minimized to protect the equipment against winddriven rain.

Exhaust Flow All Hatches Closed Condition: 200 CFM @ 0.1 inch water column

(5664 LPM @ 0.19 mm Hg)

Material of Construction

Piping and Valves: Stainless Steel or Hastelloy C-22

Wetted components: PCTFE or Vespel

Flow Capacities

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A BSGS eV / Bulkguard eV module can be ordered with different options that may impact the flow capacity of the system. Please contact your Versum Materials, Inc. representative for information regarding your specific system.

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Confidential and Proprietary Data

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Chapter 3 - Module Specifications

Venting Criteria

During a container change, it can be expected that the following volumes of gas will be vented from a BSGS eV / Bulkguard eV module.

 Pre-purge operating sequence: Total process gas mass vented:

 0.1 lb. SiH4  0.1 lb. NH  0.2 lb. NF  0.1 lb. N2O  0.1 lb. HCl  0.1 lb. CO2

 Pre-purge operating sequence. Total mass of N2 vented:

 SiH4 requires 120 purge cycles, 2.4 lb.  NH3 requires 90 purge cycles, 1.8 lb.  NF3 requires 75 purge cycles, 1.5 lb.  N2O requires 75 purge cycles, 1.5 lb.  HCl requires 90 purge cycles, 1.8 lb.  CO2 requires 75 purges cycles, 1.5 lb.

 Cylinder change sequence HPLT. Total mass of 10% He/N2 mix vented = 0.2 lb.

 Post purge operating sequence. Total mass of N2 vented.

 SiH4 requires 120 purge cycles, 2.4 lb.  NH3 requires 90 purge cycles, 1.8 lb.  NF3 requires 75 purge cycles, 1.5 lb.  N2O requires 75 purge cycles, 1.5 lb.  HCl requires 90 purge cycles, 1.8 lb.  CO

requires 75 purges cycles, 1.5 lb.

2

 Condition operating sequence. Total mass vented during 5 conditioning cycles is:

 4 lb. SiH  0.2 lb. NH  6 lb. NF3  8 lb. N2O  7 lb. HCl  8 lb. CO

3

4

3

2

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Chapter 3 - Module Specifications

Electrical Requirements

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 ± 10% Fluctuation of Nominal Voltage Range

 Short Circuit Current Rating (SCCR) is 10 kA for controller power feed, 5 kA for single power

feed or heater power feed

Single Power Feed for Module – with JT Heater:

 208 – 240 VAC - 50/60 HZ  Full load current - 32 amps  5 kAIC @ 240 VAC, 75 deg. C terminal rating

Single Power Feed for Module – with Heat Trace, no JT Heater:

 208 – 240 VAC - 50/60 HZ  Full load current - 7 amps  5 kAIC @ 240 VAC, 75 deg. C terminal rating

Single Power Feed for Module – AP11 only, no Heaters:

 100 – 240 VAC - 50/60 HZ  Full load current - 4 amps  10 kAIC @ 240 VAC, 75 deg. C terminal rating

Dual Power Feed – Critical Power to AP11 Controller, Normal Power to JT Heater/Heat Trace

AP11 Controller:

 100-240 VAC - 50/60 HZ  Full load current - 4 A  10 KAIC @ 240 VAC, 75 deg. C terminal rating

JT Heater (with or without Heat Trace):

 208-240 VAC - 50/60 HZ  Full load current - 32 A  5 kAIC @ 240 VAC, 75 deg. C terminal rating

Heat Trace only (no JT Heater):

 208-240 VAC - Single phase, 50/60 HZ  Full load current - 7 A  5 kAIC @ 240 VAC, 75 deg. C terminal rating

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Confidential and Proprietary Data

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