Veeco MS40 Operation And Maintenance Manual

Table Of Contents

Section 1: General Information

1.1 Introduction 1-1

1.2 Unpacking & Inspection 1-3

1.3 Installation 1-7

1.4 Features & Specifications 1-8

1.5 General Description 1-11

Section 2: Operating the MS-40

2.1 Introduction 2-1

2.2 Operator Controls & Indicators 2-3

2.3 Starting the MS-40 Leak Detector 2-19

2.4 Leak Testing 2-20

2.5 Operation With an External Pump 2-22

2.6 Shut Down Procedure 2-25

2.7 Setting Test Parameters 2-25

2.8 Setting Additional Parameters 2-31

2.9 Test Aids & Procedures 2-32

Section 3: Theory of Operation

3.1 Introduction 3-1

3.2 Direct Flow & Reverse Flow Modes. 3-4

3.3 Functional Description of Operation 3-6

3.4 Description of Major Components 3-11

Section 4: Service & Maintenance

4.1 Introduction 4-1

4.2 Service Mode 4-1

4.3

4.4 Periodic Service 4-4

Calibration & Tuning 4-2

VIC Leak Detectio

2099 Ninth Avenue

Ronkonkoma, NY 11779

631.737.0900

1109-186-00 Rev. C toc-i

VIC Leak Detectio

2099 Ninth Avenue

Ronkonkoma, NY 11779

631.737.0900

4.5 Contamination of the Vacuum System 4-8

4.6 Venting the Vacuum System 4-11

4.7 Cleaning Requirements 4-12

4.8 Calibration Requirements 4-19

4.9 General Service & Repair 4-21

4.10 Troubleshooting Aids 4-32

Section 5: Parts List

5.1 Introduction 5-1

5.2 Recommended Spare Parts for the MS-40 5-2

5.3 Other Components 5-5

Appendix A:

Glossary of Terms Used in Leak Detection

Appendix B:

A.V.S. Standards for Testing of Mass Spectrometer Leak Detectors

Appendix C:

Leakage Conversion Factors

Appendix D:

Remote Port Specifications

Appendix E:

Profile and Revision Switch Positions

Appendix F:

MS-40 Quick Reference

1109-186-00 Rev. A toc-ii

General Information

1.1 Introduction

This Operations & Maintenance Manual describes in detail the information needed to understand the operation and functions of the VIC MS-40 Fully Automatic Portable Leak Detector (illustrated in Figure 1-1), and provides the information needed to service and maintain the unit in optimal working condition. This manual has been divided into five chapters:

• Chapter 1 General Information

• Chapter 2 Operating the MS-40

• Chapter 3 Theory of Operation

• Chapter 4 Service & Maintenance

• Chapter 5 Parts Lists

Chapter 1, General Information, describes the features of the MS-40 Leak Detector, its basic operation, unpacking and inspection of the unit, installation requirements as well as specifications for the unit.

Chapter 2, Operating the MS-40, details the controls necessary to operate the MS-40, both during normal operation of the unit as well as when placed in Service Mode. All external connectors and their applicability to the unit and its functions are also discussed. This chapter also includes an explanation of what occurs during the unit’s start-up procedure, a description of the leak test modes, an explanation of sniff testing procedures, a step-by-step description of how to perform actual leak testing, operations involving the optional external pump, an explanation of what occurs during the unit’s shutdown procedure, the setting of the unit’s testing parameters, and MS-40 self-testing procedures.

Chapter 3, Theory of Operation, has been included in order to give the MS-40 user information on how the unit functions. Maintenance personnel servicing the unit will find this most useful, since a thorough technical understanding of how the unit operates is critical when performing the repairs and service discussed in the following chapter.

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1109-186-00 Rev. C 1-1

VIC Model MS-40 Portable Automatic Leak Detector

1109-186-00 Rev. C 1-2

Figure 1-1

Vacuum Instrument Corp.

2099 Ninth Avenue

Ronkonkoma, NY 11779

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Chapter 4, Service & Maintenance, describes in further detail the unit’s Service Mode, the necessary tuning/calibration procedures for the MS-40, required periodic service procedures and recommended service intervals, detection and correction of contamination within the vacuum system, procedures for venting the vacuum system, cleaning requirements and procedures, calibration of measurement components, valve block service and repair, repair/replacement of the unit’s electronics and a full listing of front panel error codes, their probable causes and our recommended corrective actions.

Chapter 5, MS-40 Parts Lists, contains a full list of recommended spare parts and a complete listing of the spare parts available from VIC.

This manual provides the specific documentation needed to operate and service the MS-40 Leak Detector. The MS-40 System is a highly technical system that incorporates many sophisticated technologies. In view of this, every effort has been made to automate both the unit’s operation and maintenance procedures. It is imperative, however, that operations and service personnel familiarize themselves with the operations and maintenance procedures in this manual in order to maximize the efficiency of the unit, as well as minimize downtime caused by improper service and repair.

1.2 Unpacking & Inspection

The MS-40 is shipped in a specially constructed package that minimizes the possibility of damage during transit. The shipping carton and packing materials should be saved for future use. Note that a Bill of Material is packed within the carton indicating all of the items shipped with the unit.

Prior to unpacking the unit, inspect the exterior carton for any signs of damage. After unpacking the unit, inspect the leak detector itself for any obvious damage. If damage to the unit is found, a claim should be filed immediately with the shipping carrier and a copy of that claim must also be forwarded to Vacuum Instrument. Should the MS-40 fail to function as required, or fail to meet its specifications, contact the Customer Service Department at VIC (Vacuum Instrument, 2099 Ninth Avenue Ronkonkoma, NY 11779, 631-737-0900) or your local representative. Please note that Vacuum Instrument must be contacted prior to the return of any damaged equipment.

Once the leak detector has been removed from its package, the MS-40 must be opened and all shipping material removed from the unit’s internal roughing and turbo-molecular pumps. To access the internal roughing pump, the front panel must be opened to access the turbo-molecular pump,

1109-186-00 Rev. C 1-3

the back panel must be opened. Both panels are hinged at the bottom and held with a single screw at the top of each panel. To open a panel, loosen the captive screw at the top of the panel (a 1/4 turn is sufficient to unloosen the screw) and gently lower the door. Make sure that the surface the unit is placed on a flat surface (VIC Cart, P/N 0137-705-00, recommended). Remove all shipping materials and tie-down wraps from the internal pumps.

The MS-40 is shipped without oil in the internal roughing pump, which must be filled prior to use. In addition, to protect the pump during shipment, it is fitted with two blanks that cover its intake and filter connections. Remove these blanks and attach the flex hosing and filter (refer to Figure 1-2 for a diagram illustrating the proper installation for the hose and filter connections) with the provided centering rings and clamps. Also, the unit’s purge tubing (refer to Figure 1-2) is fitted with a 1/4” ferrule blank. Unscrew the blank and reattach the tubing as indicated in Figure 1-2.

Parts List for Figure 1-2:

ILLUSTRATION # PART NUMBER DESCRIPTION

1 1660-362-00 110/120v (60Hz) 1660-362-01 220/240v (50 Hz) Pump

2 1621-183-00 Ferrule Nut

3 1750-046-00 Poly-flo Tubing, Purge Line

4 1620-726-00 Elbow / with ferrule nut

5 1621-231-12 KF16 Centering Ring

6 1621-239-02 KF16 Clamp

7 0137-205-00 Manifold, Roughing Pump

8 1680-055-00 Exhaust Filter KF16 to 1/4 NPT Adapter

9 1620-743-00 3/8 MPT x ¼ Bushing

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1109-186-00 Rev. C 1-4

To fill the pump with oil, unscrew the black cap to the right of the exhaust filter. Using the oil (1990-924-00) and the funnel (1331-191-00) provided in the installation kit, slowly fill the pump until the level in the sight glass is approximately 1/4” below the fill line. Replace the black oil fill cap.

When all shipping material has been removed, all pump connections have been made and the pump has been filled with oil, replace the right side panel and close the front and rear doors.

NOTE:

The MS-40 Leak Detector is factory tested and calibrated prior to shipment and once installed, is ready for use.

An Installation Kit (VIC P/N 0137-800-00) is included with the unit when it is shipped. The kit contains:

Part Number Description

1680-055-00 Exhaust Filter

0103-141-01 Filament Kit (box of 5)

1331-191-00 Funnel

1330-391-00 7/64 Allen Wrench

1990-924-00 VMP-19 Oil (1 liter)

0137-807-00 Kit, Cart Mounting

0137-804-00 N2 Kit

1621-224-02 Adapter, KF16 to 1/4” NPT

1621-227-05 QC Adapter, KF25 to 1 1/8”

0126-284-00 Blank Plug, 1/18

1620-731-00 Elbow, 1/4 NPT to 3/8 Tube

1750-054-00 Tubing, Tygon, 1/4”

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1109-186-00 Rev. C 1-5

INTERNAL ROTARY VANE MECHANICAL PUMP

FIGURE 1 - 2

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1.3 Installation

The MS-40 has been designed as a completely self-contained portable leak detector and therefore has the capability to work in a wide range of environments. However, before installation in a work area, certain requirements must be met.

• A properly grounded electrical supply (115V/60Hz/10A, 230-240V/50Hz/5A, 100V/50Hz/10A, or 100V/60Hz/10A as labeled on rear of unit) must be available for the unit.

• A user supplied helium supply is usually necessary for the unit (but not for all testing, e.g., sealed parts should already be pre bombed with helium). The MS-40 can use either a Mass 3 or Mass 4 helium supply. Virtually any standard purity helium may be used during leak testing. Depending on the type of leak testing that will be performed, a spray probe (for vacuum testing), a sniffer assembly (for sniff testing) or a test cup (for pressure bombing testing) will be necessary. All of these items are available directly from Vacuum Instrument.

• The recommended ambient temperature range for the unit is from 10°C to 40°C. Also, excessively humid environments should be avoided.

• Depending upon the immediate environment, an external exhaust facility may be necessary. A bulkhead is installed on the rear of the MS-40 that is intended for user-provided 3/8” polyflow tubing. Note that the bulkhead is not connected to the internal exhaust filter of the unit but must be connected by the User. The tubing is then attached to a functional exhaust system.

WARNING!

Only qualified service personnel should operate the unit when either the front or rear panels are open. Potentially lethal high voltages are

continually applied to the circuit boards and other areas within the unit during its operation. Although these areas are shielded and well marked, failure to follow this precaution may possibly lead to severe injury or death.

1109-186-00 Rev. C 1-7

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1.4 Features & Specifications

FEATURES

Sensitivity: 4 x 10

-11

std cc/sec air equivalent

Leak Rate Range: 10 to 4 x 10

-11

std cc/sec air equivalent

(with optional external pump)

10 x 10

-4

to 4 x 10

-11

std cc/sec air equivalent

(without external pump)

Start-Up: Fully functional in less than 3 minutes. Consists of:

Turbo-molecular pump acceleration, a complete set of self-diagnostics, turning on filament, checking and assuring Hi-Vac status, measuring system offsets and measuring background helium

Internal Calibrator: Helium 4, 1 x 10

-8

to 3 x 10-8 std cc/sec air

equivalent with integral solenoid valve

Testable Masses: Helium Mass 3 or 4

Tuning: Automatic

Calibration: Automatic for Helium 4 using an internal calibrator

of 1 x 10

-8

to 3 x 10-8 std cc/sec air equivalent

Auto Zero: Automatic zeroing of leak rate while in test mode initiated by pressing the ZERO pushbutton

Background Continuous automatic compensation for system back Compensation: ground

Remote Control Molded A.B.S. plastic laminate over tactile Unit: membrane switch array Controls similar to User

Panel

RS-232C Port: Two standard bi-directional ports. One port

dedicated to the remote control unit. The second port is dedicated to data transfer to an external computer or control module.

1109-186-00 Rev. C 1-8

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Ranging: Without an external roughing pump, begins at the [Automatic/Standard least sensitive gross range (10

-4

). The unit ranges

Mode] downward until a leak is detected or until it reaches

its most sensitive range (10

-10

). With the optional external pump, if a gross leak is detected, the unit ranges up to the appropriate decade. If a gross leak is not detected the unit ranges downward until a leak is detected or until it reaches its most sensitive range.

Ranging: May operate at any range, selectable by the operator. [Manual Mode] The 10

to 10-3 range is only available when the

optional external pump has been installed.

Measurement Units: Pressure: millitorr or millibar (selectable with a switch located underneath the Service Panel accessible when the unit’s front panel has been opened)

Leak Rate: std cc/sec (standard cubic centimeters/ second) or mbar l/sec (millibar liters/second)

PUMPS

Mechanical Pump: Internal 1.5 CFM dual stage rotary vane pump

Turbo Pump: 60 liter/second turbo-molecular pump

External Pump: Optional 7 or 16 CFM dual stage rotary vane

(Mechanical pump)

PERFORMANCE SPECIFICATIONS

Sensitivity: 4 x 10 4 x 10

-11

Std cc/sec air equivalent (direct mode)

-10

Std cc/sec air equivalent (reverse mode)

Resolution: 14 at Mass 4

Response Time: Reverse Mode < 3 seconds

Fine Mode < 2 seconds

Test Time: <2.5 seconds on a blank port to a pre-selected range in the reverse flow test mode

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Noise & Drift: <4% on 10

-10

range

Testable Masses: 3 and 4

Maximum 10 x 10

-4

std cc/sec air equivalent (without external Measurable Leak: pump) 10 std cc/sec air equivalent (with optional external pump)

Maximum Inlet Gross Mode: Atm (with optional external pump) Pressure: Reverse Mode: 7.5 Torr

Direct Mode: 100 mTorr

Test Mode Leak Gross: 10 to 1 x 10 Reverse: 10 x 10 Direct: 10 x 10

-3

std cc/sec helium

-4

to 6 x 10

-5

to 6 x 10

-11

-10

ELECTRONICS & USER INTERFACE

System Controller: Microprocessor based; four integrated boards used:

A controls the unit’s computer, logic and sensors

controls the unit’s mass spectrometer voltage supplies

C controls the unit’s displays and controls D controls the unit’s handheld remote

Display: Green LED alphanumeric and bar graph displays

Data Input: Through dedicated function keys

MISCELLANEOUS

Power Requirements: 115V, 60Hz, 10 Amp 230-240V, 50Hz, 5 Amp 100V, 50Hz, 10 Amp 100V, 60Hz, 10 Amp

Dimensions: 15.5”H x 20.5”W x 14.25”D

Weight: 84.5 lbs.

1109-186-00 Rev. C 1-10

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1.5 General Description

The MS-40 is a fully automatic, dual mode, turbo-molecular pumped portable leak detector. Each of its two modes (Reverse Flow or Direct Flow) is automatically selected by the leak detector based on the currently selected leak rate range.

Reverse Flow Mode permits rapid testing for leaks in test objects that are characterized by a high degree of out-gassing. Testing can start at test port pressures of Atm for leaks from 10 to 1 x 10

-3

std cc/sec (Gross Mode testing) when using the optional external pump or pressures of 7.5 Torr for leaks between 10 x 10

-4

and 6 x 10

-10

std cc/sec (Intermediate Mode

testing) for units not equipped with an external pump.

Direct Flow Mode is most useful for testing objects that demand clean testing and higher sensitivity. In this mode, the leak detector measures leaks from 10 x 10

-9

to 6 x 10

-11

std cc/sec, at a test port pressure of 100 millitorr or less. However, this mode is also capable of determining larger leaks. Once the unit is in this mode and a larger leak has been detected, the unit will range back to the appropriate decade.

The MS-40 uses two types of automatic testing: an automatic test mode with automatic ranging and an automatic test mode with manual ranging. In automatic ranging mode, the leak detector automatically ranges downward (to more sensitive leak rate ranges) until a leak is found. When using manual ranging, the operator of the leak detector controls the range in which a particular test object is tested.

In the Automatic Test Mode, when using Automatic Ranging, all the functions of the leak detector, including the evacuation (pump down) of the test object and the functions of all pumps and valves are controlled by the MS-40 computer. Additionally, all measurements and display information about the leak rate and system performance are under the control of the computer.

The Automatic Test Mode, when using Manual Ranging, is identical to the Automatic Testing/Automatic Ranging mode except that the User pre-selects the range (e.g., 10

-5

std cc/sec) for testing. If a measured leak is either above or below the pre-selected decade, the leak detector operator can manually range the unit either up or down. The remainder of the testing procedure is handled by the MS-40 computer in exactly the same manner as with the Automatic Ranging Mode.

1109-186-00 Rev. C 1-11

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1.5.1 Standard Operation

This is the normal operating mode for the MS-40. During operation, the User need only use the right (uncovered) portion of the display panel (the User Panel is illustrated in Figure 2-1). All functions to be accessed and display information needed to leak test an object are found on this panel. The panel displays bar graphs indicating test port pressure and leak rate values. Additionally, the panel indicates the current leak range mode, an accept/reject indicator that indicates if the leak being tested is above or below the test set point, and whether the unit is in test or standby mode. The user panel also has toggles for automatic or manual ranging (including greater/lesser pushbuttons), audio volume pushbuttons, an auto- zero pushbutton, a sniff mode indicator and START and VENT pushbuttons (START is used to commence the testing cycle as well as to interrupt the testing cycle without the chance of accidentally venting the system, while VENT is used to interrupt testing and/or to vent the test port).

1.5.2 Service Mode

WARNING!

The Service Mode of the MS-40 is intended for use by qualified Vacuum Instrument personnel or Users specifically trained by Vacuum Instrument. Under no circumstances should any individual be assigned access to this mode without a complete knowledge of vacuum systems as well as the MS-40 System. Use by an unqualified operator may result in damage to the unit and/or personal injury.

Service Mode is initiated by first opening the rear panel of the unit (loosen the 1/4-turn screw at the top of the panel, then gently lower the door), and then pressing the black toggle button at the top right hand side of the circuit board that is attached to the panel. Once the toggle has been pressed, the unit is placed in Service Mode and the Service Mode indicator is illuminated.

Service Mode disables the automatic valve controls and allows the User to manually control all of the valves within the vacuum system. The valves are controlled by a cluster of labeled momentary switches located on the left of the User Panel. The LED indicator on each switch is lit when the valve is open. Included within the vacuum system are: the auto-calibrator valve, external rough valve, fine (direct) valve, fore-line (reverse) valve, gross testing valve, purge valve, roughing valve, sniffer valve and the vent valve.

1109-186-00 Rev. C 1-12

Grouped to the right of the Service Mode Indicator are a series of LED indicators. The Service Mode allows the setting of the unit’s Amplifier Gain, Anode Voltage, Calibration Temperature and Internal Calibration Value in conjunction with the arrow buttons and LED alphanumeric display to the right of the indicators. Additionally, the user may view the unit’s calibration temperature, the emission current of the filament within the unit’s spectrometer, the error code present (indicating a possible fault within the unit), the current supplied to the filament in the mass spectrometer, the calibration standard (e.g., 2 x 10

-8

std cc/sec @ 24°C) of the internal calibrator, the leak rate of the test object (a numeric value - the same leak rate as displayed by the bar graph on the User Panel), the pressure measured at the test port and the total number of hours the unit has been in operation.

Below the indicators and to the right of the valve controls are two sets of momentary switches. In either Standard or Service Modes, they allow the User to turn on/off the filament within the mass spectrometer, choose between two different filaments within the spectrometer, and perform an actual test on the calibrator or optimize the mass spectrometer. When strictly in Service Mode, the User is also able to choose between either a helium or air standard for leak rate measurement or choose whether the MS-40 will measure either with Mass 3 or 4 helium.

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1109-186-00 Rev. C 1-13

Operating The MS-40

2.1 Introduction

This chapter contains the information needed by the user to operate the MS-40 Leak Detector and perform leak checks on a test object. This chapter is grouped into three general sections:

1 Operator Controls & Indicators 2 Starting & Operating the Leak Detector 3 Testing Aids & Procedures

While this chapter contains sufficient information to operate the MS-40 leak detector, we suggest that you read Chapter 3, Theory of Operation, prior to any actual testing. An overall understanding of the various phases of a test cycle will help the operator use the leak detector more effectively and efficiently.

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1109-186-00 Rev. C 2-1

FIGURE 2 – 1

MS-40 USER PANEL

1109-186-00 Rev. C 2-2

2.2 Operator Controls & Indicators

The following Controls & Indicators are located on the User Panel at the top right front of the unit. Items are listed from left to right, top to bottom (see Figure 2-1 for an illustration of the User Panel).

LEAK RATE BAR GRAPH

An LED bar graph indicating the mantissa of the measured leak rate of the test object. For a full leak rate reading, this meter is used in conjunction with the Numeric Display. The bar graph display is in standard cubic centimeters per second or in millibar liters per second.

NUMERIC DISPLAY

A two-digit alphanumeric display with two separate functions. During testing, the display will normally indicate the exponent of the current leak rate. For example, if the leak rate is 3 x 10

-7

std cc/sec, the Leak Rate Bar Graph will indicate 3 while the Numeric Display will indicate the number 7. The second function of the display has been programmed to provide error codes when a system fault has occurred (see Section 4.10 for a list of error codes, their description and corrective action). The display will indicate code EE while at the same time on the Service Panel the Error Code indicator will be lit and the Service Panel alphanumeric display will indicate the error code.

TEST PORT

A bar graph that displays the pressure at the test port. Scaled for either millitorr or millibar. The test port pressure is also displayed in digital format on the Service Panel Alphanumeric Display.

During leak testing, this indicator will illuminate when the leak measured is less than the programmed reject rate (or maximum acceptable leak rate) and the unit is also in or below the range of the reject value. The reject rate is set by the user from the Service Panel (see Section 2.7).

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1109-186-00 Rev. C 2-3

REJECT

During leak testing, this indicator will illuminate when the leak measured is greater than or equal to the programmed reject rate (or maximum acceptable leak rate). The reject rate is set by the user from the Service Panel (see Section 2.7).

READY

When lit, the unit is in standby mode (all valves except the Fore-line valve are closed). Pressing the START pushbutton commences a test cycle.

AUTO/MANUAL

Automatic/Manual Ranging. Prior to and during leak testing, this momentary switch allows the user to toggle between Automatic and Manual Ranging modes.

RANGING

While leak testing in Manual Ranging mode, each press of either the up or down arrow buttons will cause the unit to leak test in the decade (or range) above or below the current decade being tested (pressing and holding either arrow button will cause the unit to sequentially pass through one or more decades). The numeric display (the exponent of the leak rate) will indicate the change. Also, when leak testing in the automatic ranging mode, pressing either arrow button will force the unit to test in manual ranging mode, at a decade higher or lower than the decade previously being tested (corresponding to the arrow key pressed).

AUDIO

During actual testing and while in service mode, the audio signal of the unit is always turned on. The arrow keys dedicated to the Audio section of the panel control the volume. Pressing the down arrow key several times (or pressing and holding the down arrow key) reduces the volume to an inaudible level. Note that this function is also available when using the optional headphones. A connector for a set of headphones is located under the bottom rear panel of the unit.

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C Leak Detectio

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ZERO

In Standard Mode, The ZERO momentary switch is active only during actual leak testing. When pressed, this unit’s computer reduces the measured leak rate displayed by the unit.

To zero within the decade being measured (e.g., a 4 x 10 cc/sec leak rate would now be displayed as a 0 x 10

-6

std

-6

std

cc/sec leak rate). This function is usually used when background helium causes measurement problems during testing. Note that this function also limits the maximum sensitivity of testing to two decades (or ranges) below the zeroed decade.

When the unit is in Service Mode, pressing the ZERO momentary switch will toggle the turbo-molecular pump on or off. When the ZERO LED indicator is lit, the turbo-molecular pump is on.

SNIFF MODE INDICATOR

When lit, the unit has been placed in the Sniff Mode. When in Standard Mode, the unit is placed in the Sniff Mode by pressing the SNIFF valve momentary switch located on the left of the Service Panel. When the unit has been placed in Service Mode, pressing the SNIFF valve momentary switch opens the Sniffer Valve.

WARNING Never operate the MS-40 in Sniff Mode without the optional Sniffer Assembly or without the standard plug in place on the Sniffer Quick Connect Fitting (QCF). Running the unit without covering the Sniffer QCF will cause a dramatic increase in fore-line pressure within the unit, and will thereby cause the unit’s turbo molecular pump to rapidly shut down.

START

Pressing this pushbutton begins a test cycle. During testing, pressing the START pushbutton again will halt all testing by closing all vacuum system valves (except the fore-line valve). This also places the unit into its standby (wait) mode. Pressing the START pushbutton instead of the VENT pushbutton eliminates the chance of the user inadvertently venting the system (refer to the VENT function, below).

The START pushbutton lights when a test cycle has been initiated.

1109-186-00 Rev. C 2-5

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VENT

Dual function pushbutton. When pressed momentarily, the MS-40 is interrupted from its current testing cycle and placed in standby (wait) mode. The green READY indicator will light. When pressed and held for a preprogrammed time (as programmed by the user; factory default is 0.5 second) the pushbutton initiates an AUTO-VENT cycle and returns the test port to atmospheric pressure. The delay may be programmed for up to 999.9 seconds.

ON/OFF

Turns the MS-40 ON or OFF.

The following Controls & Indicators are accessible from the Service Panel (the left half of the panel at the top front of the unit). Items are listed from left to right, top to bottom (see Figure 2-1 for an illustration of the Service Panel).

SERVICE MODE INDICATOR

When lit, the MS-40 has been placed in Service Mode. The unit is placed in Service Mode by pressing the Service Mode Interlock button located on the upper right side of the “A” circuit board, mounted on the inside of the unit’s rear door.

AMP GAIN

Amplifier Gain. When this function is selected, the alphanumeric display indicates the setting of the leak rate amplifier (1.0 to 10.0).

Five different gains are used on the unit. The first, G1, is used for the unit’s gross flow mode; the second, G2, is used for the unit’s reverse flow mode and the third G3, is used for the unit’s direct flow mode. G4 and G5 are used for sniff mode.

The five different gain settings can be displayed using the SELECT momentary switches when the AMP GAIN function has been selected. Gain (calibration) of the MS-40 is changed by the SET momentary switches. Normally G2 and G3 are set automatically by the MS-40 during a Tune and Calibration cycle, however the G2 and G3 settings can be manually altered in Service Mode. The actual setting may be viewed in either

1109-186-00 Rev. C 2-6

Service or Standard Modes. Note that G1, G4 and G5 are not controlled by the MS-40 and must be set by the user. G1 may be set by the user when the MS-40 is leak testing in the Gross Mode, or when the unit is in the service mode. G4 and G5 can be set when the unit is in sniff testing mode.

ANODE VOLT

Anode Voltage. When this function is selected, the alphanumeric display indicates the anode voltage of the unit. In Service Mode, the anode voltage may be altered incrementally by pressing either of the SET momentary switches. Note that the other peak voltages associated with the mass spectrometer follow the anode voltage setting; therefore the MS-40 can be manually tuned by changing the peak voltage.

CAUTION Only qualified personnel should attempt to alter the anode voltage setting while the unit is in Service Mode. As stated above, altering

the peak tuning voltages will retune the mass spectrometer. Improper tuning will greatly effect the accuracy and reliability of the leak

detector. While the unit is in Standard Mode, pressing either the left or right SET momentary switches adjusts the unit’s peak tuning voltages either -30 or +30V. This function, unique to VIC’s MS series of leak detectors, is referred to as peak scan and is used to quickly verify if the mass spectrometer is properly tuned (refer to Section 2.9 for further information on the Peak Scan function). Releasing either momentary switch returns the anode voltage of the unit to its original value.

CAL TEMP

Calibrator Temperature. When selected in Standard Mode, the alphanumeric display will indicate the current temperature of the calibrator. When selected in Service Mode, the alphanumeric display will indicate the temperature at which the internal helium reference standard was originally calibrated. This parameter may be altered in Service Mode (using the SET pushbuttons), however, this setting should not be altered unless a new calibrator is installed in the unit.

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CROSSOVER 1

The alphanumeric display indicates the programmed test port pressure needed to crossover from the unit’s gross testing mode to reverse testing mode (when using the optional external pump). If an external pump is not connected to the unit, the crossover set point is the pressure needed to crossover from the unit’s roughing mode to the reverse testing mode. This parameter may be altered while the unit is in either Standard or Service Mode, by using the SET momentary switches.

CROSSOVER 2

The alphanumeric display indicates the programmed test port pressure needed to crossover from the unit’s reverse testing mode to its direct testing mode. This parameter may be altered while the unit is in either Standard or Service Mode, by using the SET momentary switches.

DELAY

Seven delay settings are available and may be set while the unit is in

Standard mode:

D1/Fine (Direct) Crossover Delay: The time delay after

Crossover 2 has been reached and the onset of Direct testing.

The MS-40 stays in Reverse Flow during this time. The

factory default is 1.0 second; the parameter may be set between

0.1 to 999.9 seconds. Note that if the MS-40 is set for Manual

ranging in the 10

-10

range, the unit will remain in the roughing state for the time set in D1 after Crossover 2 has been reached.

D2/Direct Rough Valve Close Delay: When Crossover 2 has been reached, the Rough valve will remain open for this value and will then close. The factory default is 0.1 second; the parameter may be set between 0.1 to 999.9 seconds. If D2 is set to 999.9 seconds, the Rough valve will remain open for the entire length of the test cycle.

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D3/Vent Delay: The amount of time needed to hold the VENT pushbutton before the venting cycle begins. The factory default is 1.0 seconds; the parameter may be set between 0.1 to 999.9 seconds.

D4/Vent Duration: The amount of time the vent valve will stay open after the unit’s Pirani gauge indicates atmosphere has been reached. The factory default is 1.0 second; the parameter may be set between 0.1 to 999.9 seconds. If D4 is set to 999.9 seconds, the Vent valve will remain open until next test cycle is started.

D5/Minimum Gross Testing Time: May be set from 1.0 to 999.9 seconds; the factory default is 1.0 second. Sets the minimum amount of time that the MS-40 will remain in the Gross test mode. Prevents unit from auto ranging and crossing over into Reverse flow mode before a gross leak is detected. Useful when testing large parts that may have a long helium response time.

D6/Minimum Rough Time: May be set from 1.0 to 999.9 seconds; the factory default is 1.0 second. Specifies minimum amount of time that MS-40 will remain in Roughing state before crossing over into a testing state. Useful for testing parts with high gas load which require extended pumping.

D7/Reverse Rough Close Delay: May be set from 0.1 to

999.9 seconds; the factory default is 0.1 second. If set to 999.9 seconds, external Rough valve will remain open for entire duration of reverse flow testing. Keeps external Rough valve open for specified amount of time after reverse flow valve has opened. Only active on units equipped with external Rough valve option.

NOTE:

In Service mode, the delay function displays:

D1: the current software version stored in flash memory (e.g.,

FLASH 4.3).

D2: the current software version stored in ROM (e.g., EPROM 1.5).

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D3: 10

-7

range electrical offset; expressed as a fraction of a

volt (e.g., 0.00xx).

D4: 10

-10

range electrical offset; expressed as a fraction of a

volt (e.g., 0.00xx).

D5: Same as in Standard mode

D6: Same as in Standard mode

D7: Same as in Standard mode

EMISSION

Emission Current. Indicates the filament emission current. The alphanumeric display will indicate the current in mA. A normally operating filament will have an emission current of 5mA, as regulated by the filament control circuit.

ERROR CODE

This function automatically appears after an error has occurred

with the unit. When an error occurs, the alphanumeric display automatically switches to this function and displays the error code. The unit will display the code until the problem is resolved. This Function is also selectable when using the SELECT momentary

switches on the Service Panel. If in Standard Mode, and this function is selected when a system error has not occurred, the word “NONE” will appear on the alphanumeric display. In Service Mode, selecting this function will display the current date.

FIL CURRENT

Filament Current. The alphanumeric display indicates the filament supply current, in D.C. Amps. The maximum current is 6.3 amps.

FORE-LINE

Fore-line Pressure. The alphanumeric display indicates fore-line pressure. May be displayed in millitorr or millibar. The selection of units to be displayed is made by a blue toggle switch located underneath the Service Panel. The switch is accessed by opening the front panel and is mounted on the circuit board located directly under the Service Panel.

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HIGH VACUUM

The alphanumeric display indicates pressure in the high vacuum section (the area surrounding the filament within the spectrometer housing). If the unit’s filament has been turned off, the display will state OFF, otherwise the display indicates the high vacuum pressure in either Torr or bar. The selection of units to be displayed is made by a blue toggle switch located underneath the Service Panel. The switch is accessed by opening the front panel and is mounted on the

circuit board located directly under the Service Panel. If the unit is in Standby mode, the alphanumeric display will occasionally display “MS-40”. When this occurs, the unit is checking system offsets and not measuring Hi-Vac pressure.

INT CALIBRATOR

Internal Calibrator. In Service Mode the alphanumeric display indicates the leak rate value stored in the unit’s computer for the internal calibrator. This parameter may be altered only in Service Mode, by using the SET momentary switches. This parameter should only be changed when the internal calibrator has been replaced. Note that when the unit is in Standard Mode, this function will display the current temperature compensated value of the internal calibrator. This parameter may not be changed, since this value is derived from the leak rate value of the internal calibrator.

LEAK RATE

The alphanumeric display indicates the actual current leak rate. Measurement is in either std cc/sec or millibar liter/sec.

REJECT POINT

The alphanumeric display indicates the programmed leak rate value for the Reject/Accept indicator (the set point that indicates if the test object is below the maximum acceptable leak rate). This parameter may be altered only in Standard Mode, by using the SET pushbuttons. In Service Mode, this function is used to indicate the speed of the turbo-molecular pump (the alphanumeric display indicates the percentage of the pump’s rated speed).

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TEST PORT

Test Port Pressure. The alphanumeric display indicates the pressure of the test port. May be displayed in millitorr or millibar. The selection of units to be displayed is made by a blue toggle switch located underneath the Service Panel. The switch is accessed by opening the front panel and is mounted on the circuit board located directly under the Service Panel.

TOTAL HRS

Total Hours. In Standard Mode, the alphanumeric display indicates the total number of hours the unit has been in operation. In Service Mode, the display indicates the time of day. The time (a 24 hour clock) can be altered by using the SET arrow keys (to select hrs, min. and sec.) and the AUDIO arrow keys to set the new time for the unit.

SELECT

Up/Down Arrow Keys. Momentary switches that allow the user to scroll through the sixteen functions located on the Service Panel. The LED next to each function indicates the function that has been selected. The selected function’s readout is displayed on the alphanumeric display.

ALPHANUMERIC DISPLAY

Eight character display. Used to indicate messages as well as the status of the sixteen selectable functions on the Service Panel (from AMP GAIN to TOTAL HRS). An LED next to the function indicates that the function has been selected, while this display indicates its current status or measurement. The display also indicates Error Message Codes (see Section

4.x for a list of Error Codes).

SET

Up/Down Arrow Keys. Momentary switches that allow the user to increase or decrease the value of the settable functions (AMP GAIN, ANODE VOLTAGE, CAL TEMP, CROSSOVER 1, CROSSOVER 2, DELAY, INT CALIBRATOR and REJECT POINT).

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FIL ON/OFF

Filament ON/OFF. Momentary switch. When the unit is in Service Mode, pressing this switch will toggle the active filament on or off.

When the unit is in Standard Mode, this switch also toggles the active filament on or off. However, whenever the unit is in Standard Mode, the filament may be turned on only when the high-vacuum section has been sufficiently evacuated (as determined by the MS-40’s computer).

CAUTION

As described above, in Service Mode, the spectrometer’s filament may be turned on or off at any time. In this mode, care should be taken to make sure that the high-vacuum section has been pumped down. If the filament is turned on when the highvacuum section is at or near atmosphere, the filament will quickly burn out.

FIL 1/2

Filament 1 or 2.Momentary Switch. By pressing this switch,

the user can toggle between Filament 1 and 2. A green indicator next to the 1 or 2 on this switch indicates that the respective filament is working properly. If a red LED appears next to the 1 or 2 on the switch, the filament is malfunctioning.

HELIUM/AIR

Momentary Switch. Not active in Standard Mode. By pressing this switch in Service Mode, the user can toggle between air-equivalent and helium leak rate readings. The LED next to the HELIUM or AIR labels indicates which standard is active.

MASS 3/4

Momentary Switch. Not active in Standard Mode. By pressing this switch in Service Mode, the user can toggle between Mass 3 or Mass 4 helium tuning voltages. The LED next to the 3 or 4 indicates whether Mass 3 or Mass 4 is selected.

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+ 139 hidden pages

Veeco MS40 Operation And Maintenance Manual

Specifications and Main Features

Frequently Asked Questions

User Manual