Varian XGS-600 Instruction Manual

XGS-600™ Gauge

vacuum technologies

INSTRUCTION MANUAL

Controller

/22/08

DRAFT 9

Manual No. 699908400

Revision A

September 2008

XGS-600 Gauge Controller

Copyright 2008

Varian, Inc.

XGS-600 Gauge Controller

Warranty

Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller , a re due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war­ranty , express or implied (ei ther in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.

22/08

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust­ment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith­standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at Customer’s expense; in addition, a charge for testing and exam­ination may be made on Products so returned.

3/1/00

DRAFT 9/

XGS-600 Gauge Controller

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XGS-600 Gauge Controller

Contents

Preface .............................................................................................................................................. v

Hazard and Safety Information ................................................................................................v

EMC Warnings ....................................................................................................................... vi

Introduction ...................................................................................................................................1-1

Backwards Compatibility ......................................................................................................1-1

Part Number Scheme............................................................................................................1-1

XGS-600 Front and Back Description....................................................................................1-2

Unit Dimensions...................................................................................................................1-3

Installation .....................................................................................................................................2-1

Connect the Unit...................................................................................................................2-1

Operating Instructions ................................................................................................................. 3-1

Operational Screens..............................................................................................................3-1

Service and Troubleshooting ...................................................................................................... 4-1

Troubleshooting....................................................................................................................4-5

Appendix A. XGS-600 Gauge Specifications ............................................................................. A-1

Instrument Specifications ......................................................................................................A-1

Board Specifications/Descriptions.........................................................................................A-3

I/O Pin Assignments..............................................................................................................A-6

XGS-600 vs MultiGauge and SenTorr Backwards Compatibility Detail..................................A-8

Appendix B. Serial Commands ................................................................................................... B-1

Appendix C. Gas Correction Factor Table ................................................................................. C-1

DRAFT 9/22/08

i

XGS-600 Gauge Controller

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Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità

We
Wir
Nous
Nosotros

Varian, Inc.
121 Hartwell A venue

Lexington, MA, 02421-3133 USA

Wij
Noi

declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Pr odukt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,

XGS-600 Gauge Controller

to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequen te /I no rm a/ o do cu mento/I normativo/i.

EN 55011 (1991) . . . . . . . . . . . . . . . . . . . . . . . Group 1 Class A ISM emission requirements

EN 61010-1 (1993) . . . . . . . . . . . . . . . . . . . . . Safety requirements for electrical equipment for measurement, control,

and laboratory use incorporating Amendments Nos 1 and 2.

EN 61000-3-2 (2006) . . . . . . . . . . . . . . . . . . . . Limits for harmonic current emissions

(equipment input current up to and including 16A per phase).

EN 610000-3-3 (2005) . . . . . . . . . . . . . . . . . . . Limitation of voltage fluctuations and flicker in low-voltage supply

systems for equipment with rated current up to and including 16A.

EN 61326 (1997/A1; 1998/A2; 2001/A3) . . . . . EMC requirements for Electrical equipment for measurement, control and

laboratory use — General Use.

EN 61326 (1997/A1; 1998/A2; 2001/A3) . . . . . EMC requirements for Electrical equipment for measurement, control and

laboratory use — General use for the following tsts with a deviation of

performance criteria to Criteria “C” instead of “B”

EN 61000 - 4-2 (2001) . . . . . . . . . . . . . . . . . . . Electrostatic Discharge Immunity

EN 61000 - 4-4 (2004) . . . . . . . . . . . . . . . . . . . Electrical Fast Transient Immunity

EN 61000 - 4-5 (2005) . . . . . . . . . . . . . . . . . . . AC Lightning Surge Immunity

Frederick C. Campbell
Operations Manager

Varian, Inc.
Lexington, Massachusetts, USA

August 27, 2008

XGS-600 Gauge Controller

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XGS-600 Gauge Controller

Preface

Hazard and Safety Information

This manual uses the following standard safety protocols:

WARNING The warning messages are for attracting the attention of the

operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.

CAUTION The caution messages are displayed before procedures, which

if not followed, could cause damage to the equipment.

NOTE The notes contain important information.

This product must only be operated and maintained by trained personnel. Board
installation/replacement requires a properly trained service technician.

Before operating or servicing equipment, read and thoroughly understand all operation/
maintenance manuals provided by Varian. Be aware of the hazards associated with this
equipment, know how to recognize potentially hazardous conditions, and how to avoid
them. Read carefully and strictly observe all cautions and warnings. The consequences of
unskilled, improper, or careless operation of the equipment can be serious.

In addition, consult local, state, and national agencies regarding specific requirements and
regulations. Address any safety, operation, and/or maintenance questions to your nearest
Varian office.

DRAFT 9/22/08

v

EMC Warnings

EN 55011 Class A Warning

This is a Class A product. In a domestic environment this product may cause radio
interference in which case the user may be required to take adequate measures.

The XGS-600 was tested with Varian manufactured gauge cables whose pigtails are
connected to the XGS-600 ground stud, and with I/O cables (for remote control, serial
communications and set points) employing combined foil-braid shields and metal shell
connectors with the shields connected to the XGS-600 chassis. Compliance with FCC Part
15 rules and the European Union's EMI requirements cannot be assured unless Varian
supplied gauge cables and foil-braid shielded I/O cables with metal shell connectors are
used. Failure to install the unit in this way may result in the failure to meet the requirements
for radiated emissions and susceptibility.

FCC

This device complies with Part 15 of the FCC rules. Operation is subject to the following
two conditions: (1) This device may not cause harmful interference, and (2) this device must
accept any interference received, including interference that may cause undesirable
operation.

XGS-600 Gauge Controller

NOTE The equipment has been tested and found to comply with the

limits for a Class A digital device, pursuant to Part 15 of the FCC
rules. These limits are designed to provide reasonable
protection against harmful interference when the equipment is
operated in a commercial environment. This equipment
generated, uses, and can radiate radio frequency energy and, if
not installed and used in accordance with the instruction
manual, may cause harmful interference to radio
communications. Operation of this equipment in a residential
area is also likely to cause harmful radio communications
interference in which case the user will be required to correct
the interference at his own expense.

NOTE It has been observed that transient electromagnetic pheno mena

(electrostatic discharges and power line voltage spikes and/or
surges) can cause the XGS-600 to interrupt a measurement
cycle with an error or a blank screen. If this occurs, power
cycle the XGS-600 in order to repeat the measurement.

DRAFT 9/22/08

vi

XGS-600 Gauge Controller

Chapter 1: Introduction

Congratulations on your purchase of the XGS-600. This product represents a major advance
in the simplicity, functionality and performance of vacuum gauge controllers. It was
conceived after extensive interviews with end users in a variety of applications. Its design
incorporates the latest in electronics and is CE and CSA certified and RoHS compliant. It is
compact, taking only ½ rack and it is simply without peer in terms of its capacity, usability
and capability.

You can view up to 8 gauges on one screen and can employ as many as 5 ion gauges or
12 convection gauges in one unit. With its simple user interface (designed to be operated
without a manual) and its many standard features (8 set points, serial communication,
universal voltage and pressure units), vacuum measurement is simplified. And where speed
is necessary for certain critical applications it was designed to process a signal in less than
20 milliseconds. These are just some of the many features that make the XGS-600, a u nique
and powerful device. Once you have used the XGS-600, we trust that you, too will find that
it is not only a convenient and economical tool in your vacuum system but an
indispensable one as well.

Read this manual carefully to discover all the capability of this device, but if you don't have
time, simply turn it on and navigate through the screens to get started.

Backwards Compatibility

The XGS-600 is designed to be backward compatible with the SenTorr and MultiGauge
instruments. Refer to page A-8 for a full description.

Part Number Scheme

Description Part Number

XGS-600 Vacuum Controller, without cards XGS600H0M0C0

Configure your XGS-600 Controller with cards – constructing your part number: X G S 60 0

1 Refer to the Gauge Selection Chart to help determine the gauge you need
2 Choose the number of HFIG** cards you want; place after the ”H”; will be 0 to 4

3

Choose the number of IMG* cold cathode cards you want; place after the “M”; will be 0 to 5

4

Choose the number of Dual Convection Gauge Cards; place after the “C”; each card
runs two convection type gauges, will be 0 to 6

Note:

• The XGS-600 has 6 gauge card slots permitting a total of 6 cards.

• Up to four slots can be used for HFIG** cards. If four of these are chosen, one IMG* card or up to two

Dual Convection Gauge Cards may be selected also.

• Up to five slots can be used for IMG* cards. If five of these are chosen, no additional gauge cards may be selected.

• All six slots may be used for Dual Convection Gauge Cards.

** HFIG = Hot Filament Ion Gauge * IMG = Inverted Magnetron Gauge

DRAFT 9/22/08

H X M X C X

1-1

XGS-600 Gauge Controller

5

XGS-600 Front and Back Description

The display is biased so as to be best viewed from directly in front or slightly above.

1 2

Figure 1-1 XGS-600 Front Panel

22/08

3

4

Figure 1-2 Backplate Connections

DRAFT 9/

Front/Rear Panel Components

Item Description Page

1

Display See “Screen Flow” on page 3-1.

2

Keypad/Navigation Keys See“General Navigation and Data Entry” on page 3-2.

3

Set Point Outputs See “Set-Point Connector Pin Assignments” on page A-7.
Serial Communication Connector

4

5

Gauge Board Slots (6) See “Board Specifications/Descriptions” on page A-3.

Appendix A-9 “Serial Connector Pin Assignments” on page

A-7.

7

6

On/Off Power Switch and

6

AC Power Plug Receptacle

7

Ground Connection See “Connect the Unit” on page 2-1.

1-2

See “Connect the Unit” on page 2-1.

Unit Dimensions

Figure 1-3 shows the unit dimensions with mm in brackets.

XGS-600 Gauge Controller

Figure 1-3 XGS - 600 Dimensions

DRAFT 9/22/08

1-3

XGS-600 Gauge Controller

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XGS-600 Gauge Controller

Chapter 2: Installation

Each XGS-600 unit is inspected and carefully packed prior to shipment. If the unit arrives
damaged, save the packing materials and immediately notify the carrier. Because the
packing materials are designed specifically for this instrument, always use them when
transporting the unit. The shipping container is packed with the following contents:

❑ XGS-600 gauge controller
❑ AC line cord
❑ Operating manual
❑ Rubber feet, adhesive

Connect the Unit

The unit comes shipped with sensor boards configured according to customer requirements.

CAUTION Do not block air vents. Allow approximately 3/4" clearance at

each side of the enclosure for proper air flow.

1. Plug the AC line cord into the receptacle on the rear panel of the unit and into the
power source. Keep power off while connecting the remaining cables.

2. Connect gauge and I/O cables depending on controller configuration according to
Figure 2-1:

I/O Connector

BA Gauge
Power Connector

I/O Connector

Gauge Connection

Hot Filament Board Convection Board IMG Board

Gauge Connection
CNV1, 3, 5, 7, 9, B

Gauge Connection
CNV2, 4, 6, 8, A, C

Gauge Connection

I/O Connector

DRAFT 9/22/08

Figure 2-1 Gauge Board Rear Connections

NOTE When installing and HFIG cable, make sure to connect the pig

tails from the ground cable to the ground stud. See item 7 in
Figure 1-2.

2-1

XGS-600 Gauge Controller

3. Turn on the unit using the rear panel power switch.

NOTE Gauges and accessories are available for the XGS-600

controller such as rack mount hardware, gauge and I/O
cables, and a tilt stand. See Table 2-1 and Table 2-2.

Table 2-1 XGS-600 Accessories

Cables Part Number

Cable Description 10 ft

UHV-24/UHV-24p Teflon UHV,
bakeable to 250° C

UHV-24/UHV-24p Standard,
non-bakeable

Glass BA Gauge Standard,
non-bakeable

Ion Gauge Extension R32473065 R32473090
MBA-l00 Gauge R32483010 R32483025 R32483050
IMG-100 Gauge R03113010 R03113025 R03113050 R03113075 R03113100

22/08

IMG-UHV Gauge R03413010 R03413025 R03413065 R03413100
Thermocouple Gauge L91313010 L91313025 L91313050 L91313075 L91313100
ConvecTorr Gauge, Non-Bakeable L91223010 L91223025 L91223050 L91223100

' 25 ft. 50 ft. 65 ft 75 ft 90 ft 100 ft

R32463010 R32463025 R32463050

R32453010 R32453025 R32453050

R32443010 R32443025 R32443050

Other Accessories Part No. Power Cord Selection Part No.

HFIG** PCB, Field Install R3075301 Europe, 1OA /220-230 VAC, 2.5 Meter 656494220
IMG* PCB, Field Install R3080301 Denmark, 10A/220-230 VAC, 2.5 Meter 656494225

DRAFT 9/

Thermocouple/Convector Gauge card
PCB, Field Install

R3084301 Switzerland, 10A/230 VAC, 2.5 Meter 56494235

Tilt Stand Accessory R3124301 UK/Ireland, 13A/230 VAC, 2.5 Meter 656494250
Center Rack Mount Kit L6423301 India, 10A/220-250 VAC, 2.5 Meter 656494245
Off-Center Rack Mount Kit L6422301 Israel, 10A/230 VAC, 2.5 Meter 656494230
Dual Mount Rack Mount Kit L6426301 Japan, 12A/100 VAC, 2.3 Meter 656494240

2-2

North America, 15A/125 VAC, 2.0 Meter 656458203
North America, 10A/230 VAC, 2.5 Meter 656494255

Controller Gauge Card

Convection

Hot Filament

CHM

Vacuum Regime

-3

✔

XGS-600 Gauge Controller

Table 2-2 Gauge Selection Chart

Cold Cathode

Gauge

Type Recommendation Gauge Characteristics

ConvecTorr Best overall convection gauge

for accuracy repeatability,
secure connection

• Stainless steel

• Pipe thread, KF and CFF

• Locking bayonet connector

Rough ATM to 10

-9

10
to

-3

High 10

✔

✔

✔

✔

✔

✔

536 Same vacuum performance

531 Most economical rough

572 (glass) Most popular general purpose

563 (glass) Best general purpose HV

571 (glass) Same as 563 without

MBA-100
(one
filament,

metal case)
MBA-200

(two
filaments,
metal case)

as the ConvecTorr but
without bayonet connector

gauge

HV gauge (hot filament)

gauge (hot filament) for
overall performance and
reliability

platinum coating
Break resistant HV gauge

(hot filament)

• Stainless steel

• Pipe thread, KF and CFF

• Lowest cost

• Mild steel

• Pipe thread

• Measures to 1 x 10-9 Torr

• Tungsten filaments - More accurate and repeatable

• Glass - Can see when it is on

• Measures to 1 x 10-9 Torr

• Thoriated iridium filament ­More robust with better burnout resistance

• Glass - Can see when it is on

• Platinum coating - Provides higher performance in the

-4

range and a measure of EMI shielding

10

• Less expensive than the 563

• Measures to 10-9 Torr

• General purpose hot filament with metal housing (not
glass) , so it will not break

• Uses less power than glass gauges.

• Well shielded

• Available in tungsten and thoriated iridium filament
(see 572 and 563 above)

DRAFT 9/22/08

IMG-100

✔

Inverted
Magnetron

Continued on next page

Most durable and fastest
responding HV gauge (cold
cathode)

• General purpose-measures to 2 x 10-9 Torr

• Small, reliable, extremely rugged - Will not burn out

• Very fast response - < 20 milliseconds

• Less accurate and repeatable than hot filament

• Longer starting in high vacuum than a hot filament

• Can be cleaned

2-3

Controller Gauge Card

Convection

Hot Filament

CHM

Vacuum Regime

✔

✔

Ultra High 10-9 to 10-12

✔

XGS-600 Gauge Controller

Table 2-2 Gauge Selection Chart (Continued)

Cold Cathode

Gauge

Type Recommendation Gauge Characteristics

IMG-300
Inverted
Magnetron

UHV-24
(nude)

UHV-24p
(nude)

Most durable and fastest
responding UHV gauge
(cold cathode)

Most popular UHV gauge
(hot filament)

UHV gauge providing the
highest vacuum reading

• Measures to 1 x 10

• B akeable with magnet to 250 °C

• Bakeable without magnet to 450 °C

• Reliable, rugged, will not burn out

• Can be cleaned

• Measures to 1 x 10

• B akeable with magnet to 250 °C

• Thoriated iridium filaments run cooler - less outgassing

• Dual tungsten filaments run hotter ­More outgassing but measurements are more accurate
and repeatable

• Same as UHV-24 except it measures to 2 x 10

-11

-10

Torr

Torr

-11

Torr

22/08

BA Cross Reference

The XGS-600 controller is compatible with many competitor gauges. Table 2-3 indicates
which Varian gauge setting should be used for each of these gauges. See “Sensor Setup
Screen” on page 3-9.

Table 2-3 BA Cross Reference

DRAFT 9/

GP ETI MDC Huntington Kurt Lesker Duniway

Select Sensor model 572 for the following:

274012 4336-TP/1 TP-100 G100TF T-075-N
274013 4336-TP TK-100 G075TK T-075-P
274015 4336-TK TK-100-F T-075-K
274016 4336-TK/1 T-100-N
274017 T-100-K
274018 T-100-P
274021 T-CFF-133

T-CFF-275

2-4

T-KF25
T-KF40

XGS-600 Gauge Controller

Table 2-3 BA Cross Reference (Continued)

GP ETI MDC Huntington Kurt Lesker Duniway

Select Sensor model 571 for the following:

274002 4336-P IGT-075 IP-100 G075F I-075-N
274003 4336-K IGT-100 IK-100 G100F I-075-P
274005 4336-F IK-100-F G100KQF25 I-075-K
274006 4336-P/1 IP-150 G100KQF40 I-100-N
274008 4336-F/1 IK-150 G075N I-100-K
274020 4336-K/1 IK-150-F G100K I-100-P
274032 8140 I-CFF-133
274028 I-CFF-275
274043 I-KF25

I-KF40

Select Sensor model UHV24 for the following:

274022 8130 UHTT IGT-T G8130 T-NUDE-F
274023 8130T UHIR IGT-TI G8130T I-NUDE-F
274041 BATT
274042 BAIR

Select Sensor model 563 for the following:

G8140 I-075-NC
G8120 I-075-KC
G8140-DI I-100-NC
G100K-PT I-100-KC
G100F-PT IC=CFF-275

I-NUDE-BAC

Select Sensor model 564 for the following:

GX100-564F I-164-K
GX100-564K I-164-N
GX100-564N I-164-275

I-164-KF25
I-164-KF40

DRAFT 9/22/08

2-5

XGS-600 Gauge Controller

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XGS-600 Gauge Controller

Chapter 3: Operating Instructions

Operational Screens

Screen Flow

Figure 3-1 shows the screen flow.

Main

See page 3-3

Press EXIT

Press SETPTS Press LARGER

Press EXIT

Setpoints

See page 3-7

Press Exit

Press EXIT

Press SETUP

Sensor Setup

See page 3-9

Press SYSTEM SETUP

System Setup

See page 3-14

Press RESET SCREEN

Large Font

See page 3-16

DRAFT 9/22/08

Press EXIT

Reset

See page 3-15

Figure 3-1 Screen Flow

3-1

XGS-600 Gauge Controller

General Navigation and Data Entry

Use navigation keys to locate cursor on an area of interest (ex. data entry,
gauge control or screen navigation soft key). Only fields that are user-variable
are accessible by the cursor. Hold the key pressed for faster cursor movement.

+

-

OK

Examples:

22/08

DRAFT 9/

Turning a gauge on:

a. Cursor over to the control field for a gauge.
b. Press + or - keys to view control options (ON, OFF, etc).
c. Press OK.

Modifying a number:

a. Cursor over to the number.
b. Press + or - keys to increment/decrement number.

Press the + or - keys to increment/decrement the field value through all
options. Hold the key pressed for fast increments/decrements.

Use the OK key to accept the selected option or data.

c. Press OK.

Navigating to another screen:

a. Cursor over to the screen navigation soft key (usually lower right corner of

screen).

b. Press OK.

NOTE Escape keys: While scrolling through options or data using the

3-2

+/- keys, you can escape without accepting new data by
pressing any cursor navigation key. The original data is kept
and displayed.

Main Screen

Figure 3-2 shows the main screen, which appears at power up.

Use this screen to:

XGS-600 Gauge Controller

NOTE The sequence of gauge rows follows the board installation

sequence from left to right (when viewed from the front).

❑ View a list of installed sensors.
❑ View real-time pressure readings and status by sensor.
❑ Turn an ion gauge on/off or calibrate a Convection gauge.
❑ View the setpoint status.

Auto-On Indicator

Pressure ReadingsSensor ID’s

Soft Keys

Soft keys

DRAFT 9/22/08

Figure 3-2 Main Screen

SETPTS Select to open the Set Point screen (page 3-7).
SETUP Select to open the Sensor Setup screen (page 3-9) and other setup

screens.

LARGER Select to open the Large Font screen (page 3-16).

NOTE The NEXT key appears if there are more than eight gauges. Use this

key to move to the next Main screen with the additional gauges.

3-3

XGS-600 Gauge Controller

Sensor ID’s Lists the five-character User Label configured on the “Sensor Setup

Screen” on page 3-9.

Auto-On Indicator Indicates Auto-On has been set up, using the Sensor Setup screen,

between a convection and an ion gauge(s). The same symbol
appears next to both the convection and the ion gauge showing the
link between the two.

In the screen shown, convection gauge CNV2 has been set up to
trigger both ion gauges HFIG1 and HFIG2.

Multiple Auto-ON setups are possible, with a different symbol
shape for each Convection gauge.

See “Sensor Setup Screen” on page 3-9 for Auto-ON details.

Pressure Reading Displays the gauge pressure reading. The pressure units, as selected

in the System Setup screen, appear at the top of the column:

❑ Convection gauge readings always appear, as they are

always on.

❑ For ion gauges, - - - appears when a gauge is first turned

on, until the software determines a valid reading.

22/08

DRAFT 9/

See Table 4-1 on page 4-5 for error messages displayed in this
column.

If an ion gauge error message appears in the pressure reading
column and the control column indicates OFF, clear the error as
follows:

1. Press OK or reselect OFF in the control column.

2. Scroll to ON option to turn the gauge on.

3-4

XGS-600 Gauge Controller

Control U se this column to input operational commands to the system. Th e

options available are:
Hot Filament Gauges:

❑ OFF
❑ FIL1 ON
❑ FIL2 ON
❑ DEGAS 1 ON (See section below)
❑ DEGAS 2 ON
❑ DEGAS OFF

Convection Gauges:

❑ CAL

Inverted Magnetron Gauges:

❑ OFF
❑ ON

Degas (HFIG only):
To activate the DEGAS function, select DEGAS1 ON or

DEGAS2 ON depending on which filament is currently on.

Emission has to be on before Degas starts, and the pressure reading
must be below 1E-5T (or equivalent in other units). When Degas
times out (approximately 25 minutes), the field reverts to FIL1 or
FIL2, whichever filament is in use.

NOTE Degas Limitations: All gauges operate simultaneously, but only

two hot filament gauges can degas at the same time. Additional
degasses are not allowed by the system.

To terminate degas manually, select De gas OFF. The field reverts to
Fil1 or Fil2. Turning off degas momentarily turns off emission.

CAL (CNV only):

Convection TC gauges are calibrated using this control. The
XGS-600 uses Varian's Smart Cal, which automatically determines
whether to perform a vacuum calibration or atmosphere calibration
based on the pressure presented to the sensor.

DRAFT 9/22/08

3-5

XGS-600 Gauge Controller

NOTE Convection gauge calibration at atmosphere depends on

orientation. Be sure to install the gauge sensor in final
orientation before calibrating.

To calibrate:

1. Cursor down to the CAL control for the required gauge.

2. Present either vacuum or atmospheric pressure to the gauge.
(Allow the gauge to stabilize for 15 minutes after first power up.)

3. Press OK.
Vacuum calibration defaults to 1E-4T and atmosphere calibration

defaults to 760T (or equivalents in mbar and Pa). See “System Setup
Screen” on page 3-14 for modifying atmospheric pressure to your
regional value. See “Sensor Setup Screen” on page 3-9 for selecting
gas type. See “Convection Gauge Board” on page A-4 for activating
the same calibration using rear-panel I/O controls, and
Appendix Appendix B. “Serial Commands” on page B-1.

SET -P TS (Set Points) Displays the setpoints activated. The setpoints are numbered on the

Set Point screen (page 3-7).

22/08

DRAFT 9/

The setpoint number appears if all following conditions met:

❑ The setpoint is assigned to the sensor,
❑ The setpoint screen is set to AUTO for that setpoint,
❑ And the setpoint has been activated.

3-6

Set Point Screen

To open this screen select SETPTS on the Main screen.

Set Point # This number corresponds to the sequence of eight rear panel Set

XGS-600 Gauge Controller

Figure 3-3 Set Point Screen

Point outputs. This is also the number that appears on the Main
screen if the setpoint is activated. These are fixed numbers and not
user changeable.

SETPT Select an available gauge in this list to assign to a Setpoint #. Only

two set points are allowed per sensor. If two setpoints are already
assigned to a sensor, that sensor does not appear in the list of
options for this field.

NONE is available as a choice. If selected, all pressures and delays
are set to zero and OFF.

ON Select a Setpoint On pressure value. If the sensor pressure falls

below this value, the rear panel output activates (voltage low) and
the Setpoint # appears on the Main screen next to that sensor. The
ON reading must be a lower pressure than the OFF reading or an
error (ERR) warning appears in the rightmost column. Once valid
settings are entered, ERR changes to AUTO.

See Appendix Appendix A. “XGS-600 Gauge Specifications” on
page A-1 for setpoint output specifications and setpoint connector
pin-outs.

ON DELAY If a delay is required between the time the sensor detects the

Setpoint ON pressure value and the outputs activates (rear panel,
Main screen indicator and serial communication), select a delay
time in seconds. Example: A setting of 1.2 results in a delay of
approximately 1.2 seconds.

DRAFT 9/22/08

3-7

XGS-600 Gauge Controller

OFF Select a Setpoint OFF pressure value. If the sensor pressure rises

above this value, the rear panel output de-activates (voltage high)
and the Setpoint # clears from the Main screen. The OFF reading
must be a higher pressure than the ON reading or an error (ERR)
warning appears in the rightmost column. Once valid settings are
entered, ERR changes to AUTO.

OFF DELAY If a delay is required between the time the sensor detects the

Setpoint OFF pressure value and the output, de-activates (rear
panel, Main screen indicator and serial communication), select a
delay time in seconds. Example: A setting of 1.2 results in a delay
of approximately 1.2 seconds.

AUTO/ON/OFF Options include:

❑ AUTO indicates the setpoint state is determined by

comparing the pressure to the setpoint limits. This is the
default setting and is used to enable the setpoint.

❑ OFF and ON are override values, which can also be used for

manual testing. Selecting OFF or ON does not clear
pressure/time settings.

22/08

EXIT SOFT KEY Select to return to the main screen (page 3-3).

DRAFT 9/

3-8

Sensor Setup Screen

To open this screen select SETUP on the Main screen.

Figure 3-4 Sensor Setup Screen: HFIG and IMG Sensors

XGS-600 Gauge Controller

Figure 3-5 Sensor Setup Screen: CNV (Convection) Sensors

See Table 3-1 on page 3-11 for default values. Fields that are unavailable have

DRAFT 9/22/08

- - -.

3-9

22/08

XGS-600 Gauge Controller

Sensor ID Use this field to select the sensor to view its setup parameters.

Displays the unique system-assigned gauge identification. Scroll
through this list to select a sensor and the remainder of fields on the
screen populate with its present settings.

Possible sensor ID’s are:

❑ HFIGx for Hot Cathode Ion Gauge boards using BA or UHV

sensors.

❑ CNVx for Convection boards (TC/ConvecTorr)
❑ IMGx for IMG Gauge boards

where x indicates the number of the transducer attached. The
number is system-assigned based on the sequence of board
installation, left to right (when viewed from the front). Convection
boards have two sensors per board. When more than 4 convection
boards are installed, the 10, 11, and 12 channels are designated
CNVA, CNVB, and CNVC, respectively.

User Label Use this field to enter your label for this sensor that appears on all

other screens and serial communication. This field has a maximum
of five (5) characters and any alphanumeric character is available
for use.

User Labels that begin with HFIG, CNV or IMG are not allowed to
avoid confusion with Sensor ID’s.

Sensor Model Use this field to configure the particular model of sensor attached

DRAFT 9/

If no User Label is selected, the default is the Sensor ID. When a
System Reset is initiated, this label is reset to the sensor ID.

to a board.

NOTE If Sensor Model is changed, all fields resort to default values.

3-10

XGS-600 Gauge Controller

Table 3-1 Default Setup Values by Ion Gauge Type

HFIG

Sensor Model

Default Emis
Current (ma)

Default

Sensitivity

Over-

pressure

limit (mT)+

Default

Degas Power

(mA)

Number of

Filaments

MBA100 0.1 25 1-10 mT* 1 1
MBA200 0.1 25 1-10 mT* 1 2
571 4 10 1-10 mT* 10 1
572 4101102
563 4 10 1-10 mT* 10 1
564 0.1 6 1-10 mT* 10 1
UHV24 (default) 4251102
UHV24p 4201102
IMG 100 (default) N/A 1 10 mT N/A N/A
IMG 300 N/A 2.5 2 N/A N/A

+ Not a user-variable setup parameter
* If Emission Current is set:

❑ Less than 0.7 mA, overpressure is 10 mT (or equivalent in mbar or Pascal).
❑ Greater than 0.7 mA, overpressure is 1 mT (or equivalent in mbar or Pascal).

AUTO-ON IF GAUGE This field is active for HFIG and IMG gauges only. Use this field

along with IS LESS THAN to select a Convection gauge and assign
a pressure level below which AUTO-ON engages.

When Auto-On is activated, you cannot manually turn on or off the
ion gauge; it is controlled by the assigned convection gauge.
Select

- - - to deactivate Auto On.

IS LESS THAN Use this field with Auto-ON to enter pressure (max allowed 1T) at

which to trigger the ion gauge. There is a hysteresis of 5mT built in
to the software to prevent fluctuating ion gauge emission from
triggering on/off. For example, if this field is set to 3E-3T, Auto-ON
will turn on the ion gauge at 3E-3T and off at 8E-3T.

SENSITIVITY This field is active for HFIG and IMG gauges only. Use this field to

raise or lower the sensitivity.

EMIS CURRENT (mA) This field is active for HFIG gauges only. Use this field to configure

the EMIS Current. See Table 3-1 on page 3-11 for sensor default
values.

DRAFT 9/22/08

3-11

XGS-600 Gauge Controller

NOTE Changing the Sensor Model, defaults Sensitivity and Emission

Current settings.

GAS CORRECTION Use this field to enter a correction for various gas types. For an ion

gauge (HFIG and IMG), enter a nominal value from the Gas
Correction Factor Table in Appendix C. For Convection gauges,

select Air or Argon.
SYSTEM SETUP Select to open the System Setup screen (page 3-14).
EXIT Select to return to the Main Screen (page 3-3).

Selecting Emission Current for Hot Filament Ion Gauges

When the gauge model number is selected, the XGS-600 automatically selects a default
emission current value that works for most applications. However there are reasons why
you may want to select another value based upon your application.

❑ If you are using a gauge at pressures higher than 1.0E-4 Torr, the gauge performs

better and lasts longer at low values of emission current. In general, for this pressure
range, use 0.1ma.

22/08

❑ If you are using the gauge in the UHV range, the default emission setting may not

result in a large enough ion current to measure reliably. In this case, increase the
emission current to the maximum setting of 10 ma. However, there will be more
out-gassing which could adversely affect the system pressure. So, a compromise
between the emission current setting and filament out-gassing must be made. Try to
use the lowest emission current setting that provides good measurement results.

❑ If you have had your gauge calibrated, it would have been done at a specific

DRAFT 9/

3-12

emission current. You should enter that value into the emission current setting of the
XGS-600.

❑ The XGS-600 employs a feature that automatically changes the emission current

based on the pressure that is measured. If the emission current is set to values greater
than or equal to 1.1 ma, the controller applies the full value when the measured
pressure is below 1.0E-5 Torr, and 1/10
that level. There is an algorithm to minimize hunting. However , depending upon the
vacuum system, it may still be possible for the gauge to hunt for the proper emission
current setting when at or near 1E-5T. This is caused by the fact that when the
emission current is raised as the pressure goes down, the filament outgases at a
higher rate, causing the pressure to increase a bit. Sometimes it is possible for the
pressure to increase enough that the controller reduces the emission current, which
eliminates the source of gas. This causes the pressure to decrease to where the
controller again raises the current, and the system can get stuck in this cycle. Y ou can
defeat this by setting the emission current to 1.0 ma or less, so the XGS-600
maintains that constant emission current at all pressures.

th

of that value when the pressure is above

XGS-600 Gauge Controller

HFIG Smart Overpressure Protection

Hot filament ion gauges all exhibit non-linearity at high pressure such that they give
readings lower than the actual pressure. For gauges that are rated up to 10 mTorr or higher,
operating the BA gauge at low emission current can minimize this measurement error.
Unfortunately, many applications require operating the gauge at emission currents that
would result in poor measurement accuracy at high pressure, thereby compromising the
ability to provide effective overpressure protection.

XGS-600 adjusts the overpressure limit based upon the emission current. When the
emission current is 0.7ma or less, the gauge's full high pressure range can be used. If,
however , the emission current is set to higher values, XGS-600 protects the gauge by turning
off the filament at 1 mTorr. Overpressure Protection uses the same fast pressure signal that is
used for fast set points, and is displayed by the P>MAX error message.

Setting the Auto-ON pressure level

When enabling the Auto-ON feature, the XGS-600 defaults the threshold pressure to
5 mTorr. If the convection gauge is installed so that it is measuring the same high vacuum
chamber as the ion gauge, this is a good value to use. However, in many applications users
may want to monitor the high vacuum pump's fore-line pressure instead. In this application,
the foreline may never get down as low as 5 mTorr, especially if a large volume of gas is
being pumped. The XGS-600 allows you to program a threshold pressure as high as 1 Torr.
When Auto-ON is being used, the gauge overprotection feature is still active to protect the
high vacuum gauge.

3-13

DRAFT 9/22/08

System Setup Screen

Use this screen to set values for overall system operation.
To open this screen select SYSTEM SETUP on the Sensor Setup screen.

XGS-600 Gauge Controller

Figure 3-6 System Setup Screen

UNITS Select: Torr (default), Pascal or mbar. Once the units are changed,

22/08

SETUP LOCKOUT Toggle this to ON to make all fields on the SYSTEM SETUP and

AUTO FILAMENT
ADVANCE (HFIG
Boards)

DRAFT 9/

the values throughout the system are updated to the new units.

SENSOR SETUP screen display-only (except for this field). This

provides a layer of security to prevent inadvertent changes.

For two-filament HFIG sensors, if Auto Filament Advance is

selected, Filament 2 is automatically engaged if Filament 1 has an

open filament error (NO FIL1). FIL2 ON then appears on the main

screen. Auto filament advance can occur when emission is first

turned on or during gauge operation. Auto advance does not

advance from Filament 2 to Filament 1. If an open filament error

occurs on Filament 2, instead the NO FIL2 error appears and

emission is turned off.

3-14

XGS-600 Gauge Controller

A TMOSPHERE V ALUE
(Convection Boards)

SERIAL MODE Select between RS232 or RS485 serial transceivers. RS232 and

SERIAL BAUD RATE Selects between baud rate options: 9600 (default) and 19200.
RS485 ADDRESS Set the RS485 address (default 00) as used in the first two

RESET SCREEN Select to open the Software Versions screen which incudes the

EXIT Select to return to the Main Screen (page 3-3).

Software Versions Screen

This screen shows the software versions on a board-by-board basis.
To open this screen select RESET SCREEN on the System Setup screen.

Sets the Atmosphere value to be used in Convection gauge
calibration. See “Main Screen” on page 3-3 for the calibration
procedure.

RS485 have separate outputs on the rear panel Serial connector
(see Appendix Appendix A. “XGS-600 Gauge Specifications” on
page A-1).

characters of all serial protocol commands (see
Appendix Appendix B. “Serial Commands” on page B-1).

system reset function (page 3-15).

Figure 3-7 Software Versions Screen

SYSTEM RESET Use this to perform a full reset of user-defined variables, reverting

the system to as-shipped (factory-set) state.

EXIT Select to return to the Main Screen (page 3-3).

3-15

DRAFT 9/22/08

Large Font Screen

To open this screen select LARGER on the Main screen.

The leftmost column shows the User Label as configured on the Sensor Setup screen. You
can select which transducers appear on this screen by moving the cursor to the User Label
and using the +/- modify keys.

XGS-600 Gauge Controller

Figure 3-8 Large Font Screen

22/08

EXIT Select to return to the Main Screen (page 3-3).

DRAFT 9/

3-16

XGS-600 Gauge Controller

Chapter 4: Service and Troubleshooting

It is possible to replace sensor boards in the field for repair or to change the unit's
configuration to meet new application requirements. Because the slot spacing is different for
slots 5 & 6, you must follow the instructions below when installing the sensor boards.

Board Configuration Rules

6
5

4

FRONTREAR

3

2

1

Figure 4-1 XGS-600 Slot Numbers

❑ Slots are numbered from left to right as viewed from the front of the XGS-600.
❑ Option slots 1 though 4 are “Long, High Profile Slots” and can accommodate any

board. HFIG boards are “Long, High Profile” boards and can only be installed in slots
1 through 4.

❑ Option slots 5 and 6 are “Short, Low Profile” slots and can accommodate only

convection or IMG boards, with the following restrictions:

❍ An IMG board may NOT be installed in slot 5 if any other board is installed in

slot 4.

DRAFT 9/22/08

❍ An IMG board may NOT be installed in slot 6 if any other board is installed in

slot 5.

4-1

XGS-600 Gauge Controller

Examples:

❑ You want to install 5 IMG boards:

❍ IMG boards are installed into slots 1, 2, 3, 4, and 6. Slot 5 remains empty. Do not

install any board into slot 5.

❑ You want to install 4 IMG and 2 CNV boards:

❍ IMG boards are installed in slots 1, 2, 3, and 4; CNV boards are installed in slots 5

and 6.

Sensor Board Replacement Procedure

WARNING Only trained service personnel should attempt this work.

Disconnect the XGS-600 mains connection by unplugging the
IEC power cord from the back of the unit before removing the
unit's cover.

CAUTION Wear an ESD bracelet and observe all appropriate precautions

to avoid damage to PCBs.

22/08

1. Turn off and unplug the line cord (AC mains).

DRAFT 9/

2. Remove the cover by unscrewing the two Philips head screws.

3. If removing an HFIG board, unplug the yellow connector near the front panel. It may

require some effort to unplug. Do not pull on the wires, pry the yellow plastic connector
instead.

CAUTION When these boards are assembled certain components are bent

over intentionally. Do not straighten them.

4-2

XGS-600 Gauge Controller

le

Board Connector (female)

4. Lift the sensor board by the tab at the rear panel (Figure 4-2). Once the board is
disengaged from the board connector, pull the board out of the end guide.

Board

Connector

(male)

Tab

Figure 4-2 Tab and Main Board Connector

WARNING To ensure safety and proper operation, no slot opening can be

left unfilled. Install a filler plate by installing the two hooks into
the case bottom and snapping in the foot.
Contact Varian if additional fillers are needed.

5. Install the replacement board:

a. Place the end of the board into the end guide (Figure 4-3).

End Guide

HFIG Plug

HFIG Power Cab

Figure 4-3 End Guide and HFIG Connector

b. Guide the board down as straight as possible onto the connector on the main

board. Figure 4-4 shows the connector on the base of all three board types.

DRAFT 9/22/08

Figure 4-4 Sensor Board Connector: Bottom View

4-3

c. Locate the rear panel portion of the board into its slot, press down the tab and

exert gentle pressure until it clicks into place.

CAUTION Do not force the board down. If too much pressure is required

d. Insert the yellow HFIG plug into the connector (HFIG boards only). See

Figure 4-3. This connector is keyed.

e. Inspect the installation to ensure the board is seated properly and not touching

any adjacent boards.

6. Replace the covers:
a. Push the cover straight in under the lip at the XGS front bezel.
b. Replace the two Philips head screws.
c. The cover must be flat and fully seated. It may be necessary to adjust the boards

and filler plates slightly for the cover to fully engage. The cover should drop on
front of the filler plate.

XGS-600 Gauge Controller

the connector pins are not aligned.

22/08

7. Plug the unit back in and turn on the power switch.

DRAFT 9/

NOTE Any board-specific settings must be reprogrammed.

Most Sensor setup and Set point user settings stay with the
board. This means if the removed board is used elsewhere,
most settings will be saved. However, if a new board is
installed, you will have to reprogram the settings.

4-4

XGS-600 Gauge Controller

Troubleshooting

Error Codes

Table 4-1 General Error Code

Error Message Meaning Cause Action

BD COM Board Comm:

Internal
communication
error

GRIDLO
(HFIG bds only)

HITEMP

(HFIG and IMG bds

Grid voltage is too
low

Internal temperature
is above 75° C

only)

NOFIL1
(HFIG bds only)

NOFIL2
(HFIG bds only)

Filament is open or
cable disconnected

Second filament is
open or cable
disconnected

Open

(CNV bds only)

P>MAX

(HFIG and IMG bds)

No Convection
sensor detected

Pressure is above
the maximum
operating point for
the gauge

Motherboard and sensor
board stopped
communicating

❑ Pressure is too high

causing a glow dis­charge

❑ HFIG board failure
❑ Fan failure

❑ XGS ventilation

openings blocked

❑ Internal temperature

above 75° C

❑ Filament failure
❑ Ion gauge cable not

connected

❑ Filament failure
❑ Ion gauge cable not

connected

❑ Cable not

connected

❑ Sensor failure
❑ System vented from

vacuum with gauges
on

❑ Attempted to turn

gauges on with vac­uum near overpres­sure limit

1. Cycle power to unit

2. Return unit for repair

1. Check BA gauge for grid
to filament short or grid to
housing short

2. Replace gauge

1. Allow unit to cool

2. Check that fan is
operating

3. Ensure that there is
adequate ventilation around
the unit

1. Use second filament

2. Replace BA gauge

3. Check that cable is
installed

1. Replace BA gauge

2. Check internal sensor
board connections

3. Check that cable is
plugged in

1. Check cable

2. Replace sensor

1. Turn gauges off before
venting system or use
AUTO-ON

2. Wait for vacuum to
improve before turning on
ion gauges

DRAFT 9/22/08

4-5

Tips

Varian offers reference ionization B/A gauges, which are sealed off at approximately 5E–6
Torr/6.6E–4 Pa, as well as a Convection gauge simulator which can switch between
atmosphere and vacuum simulation. These devices are extremely helpful in troubleshooting
a vacuum system problem by isolating the defective component.

NOTE These reference gauges and stimulators are not NIST traceable

Troubleshooting Table

Problem Cause Action

XGS-600 Gauge Controller

calibrated gauges, and should not be used for calibration.

Table 4-2 Troubleshooting

Hot filament gauge hunts or
cycles around 1E-5Torr (1E-3Pa)

22/08

IMG displays readings in the
–11 Torr range when the
pressure is known to be higher

Sometimes after a long time
period the reading becomes
correct

DRAFT 9/

HFIG bd reads UHV when
pressure is know to be higher

ERR appears in rightmost
column of setpoint screen

Duplicate message appears
when trying to enter a User
Label

User Label not accepted

Auto emission adjustment
occurs at this pressure.
Increased filament power causes
a rise in pressure. Condition will
clear as system pressure
decreases.

❑ IMG cable not plugged in
❑ IMG has not started
❑ IMG took a long time to start

❑ Emission current not estab-

lished due to worn out Th-Ir
filament

❑ Collector cable unplugged
❑ HFIG board failure

Setpoint OFF pressure is < than
ON pressure

❑ Label is the same as another

User Label

❑ User input violates User

Label rules

If taking pressure measurements
in this range, reduce emission
current setting for the gauge to

1.0 mA or less to turn off feature

1. Check that cable is attached

2. Sometimes IMG’s are hard to
start when turned on at high
vacuum

3. Raise pressure

4. Clean or replace IMG

1. Check collector connection at
gauge (glass BA) and at XGS-600

2. Replace gauge or filament

3. Return unit for repair/replace
HFIG bd

Correct pressure entries so the
setpoint ON pressure is less than
the OFF pressure

Create a different entry

See “Sensor Setup Screen” on
page 3-9 for User Label rules

4-6

XGS-600 Gauge Controller

Table 4-2 Troubleshooting (Continued)

Problem Cause Action

Cannot turn HFIG or IMG on
using the keypad

Cannot turn on Degas 1. Pressure is above 1E-5T

The front panel display indicates
the setpoint triggers/releases at a
slightly different pressure than
what is programmed

Changes to baud rate, comm.
mode, units, keypad lockout, or
ATM value do not take effect

❑ Auto-ON programmed for

that gauge

❑ The keypad is locked out

2. Attempted to turn on Degas2
while running Fil1

3. Attempted to degas third
gauge

Time delay = 0.0, 0.1 XGS-600 uses a less accurate

Did not exit System Setup screen
after making changes

1. This is the correct response

2. If manual control is desired,
turn off AUTO-ON

3. Unlock keypad

1. Pump down before degas

2. Change operation to Fil2
before attempting to degas that
filament

3. XGS-600 will only degas two
gauges at a time

4. Finish a degas before
attempting to start a third

pressure measurement for
setpoint delays of <= 0.1 secs to
obtain fastest responsiveness

After making changes, exit the
screen for the changes to take
effect

Unit does not respond to RS232
or RS485 commands

Display goes blank followed by
a refill of the screen. Operation
is otherwise normal.

One or more ion gauge
channels (HFIG and IMG)
appear to restart, sometimes a
BDCOMM message appears first

1. XGS600 in wrong serial mode
or incorrect baud rate

2. Incorrect wiring

3. Incorrect terminal settings

Screen refreshes approximately
every 20 minutes

A major EMI disturbance or
other anomaly has caused a
sensor board watchdog timeout

1. Change serial comm to RS232
or RS485, select proper baud
rate, set RS485 address in
General Setup screen

2. Check wiring

3. Check that terminal has
correct # of data, start/stop bits,
etc.

XGS-600 refreshes the entire
screen periodically to update.

No action required.
This is how the XGS-600

recovers from hard and soft
errors. No action required.

DRAFT 9/22/08

4-7

XGS-600 Gauge Controller

Table 4-2 Troubleshooting (Continued)

Problem Cause Action

BDCOMM message appears on
one or more channels and stays

Display goes blank A major EMI has caused a

A major EMI disturbance or
other anomaly has caused a
non-recoverable software error

display or software error

22/08

Cycle AC (mains) power to the
unit OFF and ON again to
recover

Cycle AC (mains) power to
the unit OFF and ON again
to recover, or wait for the
automatic screen refresh
(every 20 minutes)

DRAFT 9/

4-8

XGS-600 Gauge Controller

Appendix A. XGS-600 Gauge Specifications

Instrument Specifications

Table A-1 provides the XGS-600 instrument specifications.

Table A-1 General XGS-600 Gauge Specifications

Specification Description

Display Type: Backlit dot matrix monochrome LCD

Backlight: White LED
Small Font mode: Up to 8 channels displayed simultaneously

Large Font mode:Up to 2 channels displayed, readable from 15 feet
Keypad 5 button membrane with positive tactile feedback
Serial Communication Type: RS232 or RS485

Baud Rate: 9600 or 19600
Set-Point Outputs Type: 8 open collector type, ground referenced outputs

Voltage Rating: 32 VDC max

Current Rating: 50 mA max

Output Voltage:

V

50 Gnd

out

V

@ 5 mA = 0.6 V

on

Von @ 25 mA = 0.75 V

Von @ 50 mA = 0.90 V

Programming capability:

Can assign up to 2 outputs per gauge channel

Separate "make" and "break" pressure levels

Independent time delays on "make" and "break" of 0.0 to 9.9 seconds

Manual override capability of each set point output

Response Time: 20 msec max (when delay = 0.0)
Chassis Dimensions: ½ rack, 2U high, 11" deep

Material: Grey Polycarbonate

max

max

DRAFT 9/22/08

Fuse Rating 5A Fast Blow

Ventilation:Internal fan with plenum and over-temperature sensing

A-1

XGS-600 Gauge Controller

Table A-1 General XGS-600 Gauge Specifications (Continued)

Specification Description

Mains Power and Cordage Voltage: 100-120, 200-240 VAC ±10% 50/60 HZ, 2A

Available worldwide IEC cords

Environmental/Installation Storage Temperature: -15 to 70° C

Operating Temperature: CSA certified 5 to 40° C, at 5 to 95% RH,
non-condensing

Installation Category: 2
Pollution Degree: 2
Indoor use
Altitude: Up to 2000 m

Regulatory Approval CE Certified:

Safety:

EN61010

22/08

DRAFT 9/

Emissions:

EN6100-3-2 : 2006
EN6100-3-2 : 2005
EN61326: 1997/A1: 1998/A2: 2001/A3: 2003

ESD, EFT, AC surge tested to criteria C

EN55011
FCC Part 15 subpart J
Certified to CSA1010 for US and Canada
RoHS Compliant
WEEE labeled

A-2

XGS-600 Gauge Controller

Board Specifications/Descriptions

HFIG Board

The HFIG board operates all Varian hot filament gauges and most other available
Bayard-Alpert type hot filament ionization gauges including nude UHV types. The board
can be set up for all Varian hot filament gauges and allows you to set gauge emission
current, sensitivity value, and gas correction factor. The UHV range and E-Beam degas are
standard, as is dual filament control, remote I/O control of emission and filament selection,
and 0 to 10 V analog output.

Table A-2 HFIG Gauge Specifications

Item Description

Supported Gauge Heads

Displayed Measurement Range*

❑ Varian 563, 564, 571, 572, UHV24, UHV24p, MBA-100,

MBA-200

❑ 5.0E-12 Torr to 1 mTorr (UHV24, UHV24p, 572)
❑ 5.0E-11 Torr to 10 mTorr (563, 571, MBA100, MBA200)

* This represents the ability of the controller to display pressure
values and not the capability of the gauge heads to accurately

measure pressure.
Emission Current 0.1 to 10.0 mA
Sensitivity Input Range 00.1 to 99.9/Torr
Gas Correction Factor Range 0.01 to 9.99
Degas E-Beam type, 600 V at 10 mA, enabled only when pressure is

below 1.0E-05 Torr
Analog Output

Error Detection

❑ Range: 0-10 VDC

❑ Slope: 1 V per decade log

❑ Characteristic: output voltage = Log (Pressure) + 11

❑ Output when gauge OFF or Error = 10V

❑ Load Impedance: >10 kOhms

❑ Open Filament

❑ Shorted Grid

❑ Over Temperature

❑ Over Pressure (1mT or 10mT dependant on tube type selected)

DRAFT 9/22/08

Gauge Connector

❑ Collector: SMB coax

❑ Fil and Grid:AMP 5 pos Univ Mate-N-Lok

A-3

XGS-600 Gauge Controller

Table A-2 HFIG Gauge Specifications

Item Description

Remote I/O

Allowable Cable Length

Convection Gauge Board

The Convection card operates two Thermocouple/Convection gauges and allows you to
calibrate:

❑ To the actual atmospheric pressure value,
❑ To vacuum pressure,
❑ and select calibration for air or argon.

22/08

E

Calibration is Varian's Smart Cal that determines whether a CAL command is for vacuum or
atmosphere. Remote control of calibration and analog output is standard. Each channel has
its own 9-pin Dsub connector.

❑ Connector: 6 pin IEEE 1394

Grounding the input pin activates that function; leaving pin 1
open selects filament 1

The Status Output goes HI during an error

❑ up to 50’ using Varian standard cable
❑ up to 300’ using under 10’ Varian standard cable + Varian exten-

sion cable

Table A-3 Convection Board Specifications

Item Description

Supported Gauge Heads Varian Model, 536, 531, and ConvecTorr

DRAFT 9/

Displayed Measurement Range 1.0E-4 Torr to 1000 Torr
Gas Types Air or Argon
Atmosphere Value Range 500 to 1000 Torr
Analog Output

❑ Range: 0-10 VDC
❑ Slope: 1 V per decade log
❑ Characteristic: output voltage = Log (Pressure) + 5
❑ Output when gauge OFF or Error = 10 V
❑ Load Impedance: >10 kOhms

Error Detection Open cable/sensor
Gauge Connector Dsub9

A-4

XGS-600 Gauge Controller

Table A-3 Convection Board Specifications

Item Description

Remote I/O Connector 6 pin Firewire type

Grounding the input pin activates that function
The Status Output goes hi during an error.
Note: the analog outputs for CNV1 and CNV2 are also

available at pin 7 of their respective Dsub connectors.

Allowable Cable Length up to 300’ using Varian TC or ConvecTorr cable

IMG Board

The IMG board operates Varian IMG-100 and IMG-300 gauges and allows you to set gauge
sensitivity value, and gas correction factor. The UHV range is standard, as is remote I/O
control of emission and 0 to 10 V analog output.

Table A-4 IMG Board Specifications

Item Description

Supported Gauge Heads
Displayed Measurement Range*

❑ Varian IMG-100, IMG-300
❑ 5.0E-12 Torr to 2 mTor r (IMG-300)

❑ 5.0E-12 Torr to 5 mTor r (IMG-100)

* This represents the ability of the controller to display pressure
values and not the capability of the gauge heads to accurately

measure pressure.
Sensitivity Input Range 00.1 to 99.9
Gas Correction Factor Range 0.1 to 9.9
Analog Output

Error Detection

Gauge Connector
Remote I/O Connector

❑ Range: 0-10 VDC

❑ Slope: 1 V per decade log

❑ Characteristic: output voltage = Log (Pressure) + 11

❑ Output when gauge OFF or Error = 10 V

❑ Load Impedance: >10 kOhms

❑ Over Temperature

❑ Over Pressure (2 mT or 5 mT dependent on tube type selected)

❑ SHV

❑ 6 pin Firewire type

Grounding the input pin activates that function

The Status Output goes HI during an error.

DRAFT 9/22/08

Allowable Cable Length

❑ up to 300’ using RG59U

A-5

I/O Pin Assignments

Table A-5 through Table A-9 give the I/O pin assignments for the various boards and
connectors.

Table A-5 IMG Board I/O Pin Assignments

ANALOG OUT 5

STATUS OUT 4

XGS-600 Gauge Controller

Function Pin # (J26)

EMIS ON 6

GND 2 + Shield

-1

-3

22/08

DRAFT 9/

Table A-6 HFIG Board I/O Pin Assignments

Function Pin # (J26)

EMIS ON 6

ANALOG OUT 5

STATUS OUT 4

GND 2 + Shield

FIL 2 SELECT INPUT 1

DEGAS ON INPUT 3

Table A-7 Convection Board I/O Pin Assignments

Function Pin # (J1)

TC1 ANALOG OUT 5
TC2 ANALOG OUT 3

EXT TC1 CAL IN 1
EXT TC2 CAL IN 6

STATUS OUT 4

A-6

GND 2 + Shield

XGS-600 Gauge Controller

Table A-8 Set-Point Connector Pin Assignments

Function Pin #

GND 1
SET POINT 1 OUTPUT 2
SET POINT 2 OUTPUT 3
SET POINT 3 OUTPUT 4
SET POINT 4 OUTPUT 5
SET POINT 5 OUTPUT 6
SET POINT 6 OUTPUT 7
SET POINT 7 OUTPUT 8
SET POINT 8 OUTPUT 9

Table A-9 Serial Connector Pin Assignments

Function Pin #

+RS485 XFD (DIFF INPUT/OUTPUT) 1

TXD OUTPUT RS232 2

RXD INPUT RS232 3

NOT USED 4

GND 5

NOT USED 6
NOT USED 7

RTS OUTPUT RS232 8

-RS485 XFD (DIFF INPUT/OUTPUT) 9

DRAFT 9/22/08

A-7

XGS-600 Gauge Controller

XGS-600 vs MultiGauge and SenTorr Backwards Compatibility
Detail

XGS-600 replaces both MultiGauge and SenTorr rack mount controllers. While the
XGS-600 was designed to be substantially backwards compatible, there are some design
features that prevent the new product from being 100% backwards compatible.

Backwards Compatible Features

There are three board options, they are:

❑ Hot Filament Ion Gauge Board (HFIG)
❑ Inverted Magnetron Board (IMG)
❑ Two channel Convection Board (CONV)

The Hot Filament board replaces both the UHV and BA MultiGauge boards and implements
the SenTorr BA and UHV models. You select the type of sensor being employed and
software takes care of the settings. The ion gauge cable connectors are identical to the
older products.

The Inverted Magnetron board employs the same SHV connector as MultiGauge and

22/08

DRAFT 9/

operates both of the IMG100 and the IMG300 (UHV-IMG) as does the current MultiGauge
board.

The Two Channel Convection board has the same gauge cable connectors as the current
MultiGauge Convection card, and the SenTorr xxTC and xx2C models. MultiGauge uses
the Dsub connector for the analog output, as well as for the sensor connections, and this is
supported in XGS-600.

The RS232 serial communications connector and protocol is supported in XGS-600, as
well. However, the RS485 connection is now housed in the same Dsub-9 connector as for
the RS232, and is not backwards compatible with the MultiGauge and SenTorr Mini-DIN
connectors.

Non-Backwards Compatible Features

The significant changes with the XGS-600 vs MultiGauge and SenTorr are the following:

❑ XGS-600 does not have a 4 channel TC card (MG)
❑ The analog outputs are housed in a firewire type connector (as menti oned above, the

two channel Convection board has its analog outputs in the Dsub's as well)

❑ Remote I/O signals are also housed in the same fire-wire connector. There is no I/O

board option as in MultiGauge

❑ The standard non-isolated open-collector set-point outputs are housed in a

9-position Dsub connector and only provide C and NC contacts. MultiGauge and

A-8

XGS-600 Gauge Controller

SenTorr provide true isolated relay outputs with access to C, NC and NO contacts.
SenTorr uses terminal block connectors while MultiGauge uses a 25-position Dsub.

❑ XGS-600 is not available in a Black Box version with a remote mountable display.

Table A-10 list the features compatible for the MultiGauge and SenTorr units.

Table A-10 Feature Compatibility Table

SenTorr BA or

Feature XGS-600 MultiGauge

UHV SenTorr CC

Hot Filament

All All All n/a

Gauges
Cold Cathode

Gauges

Convection
Gauges

IMG100
IMG300

(UHV-IMG)
2 ch Convection

Bd using (2)

IMG100
UHV-IMG
525CCG

4 ch TC Bd using
DsuB37

Dsub9

2 ch ConvecTorr
Bd using (2) Dsub9

CDG’s Not supported (2) Dual Ch CDG

Bds

Rem I/O Uses Fire-wire

conn on each
board

All control
inputs are active

Needs optional
Remote I/O Bd
using Dsub37

Uses opto-isolated
active HI inputs

LO, no isolation

n/a 525CCG

2 ch ConvecTorr
using (2) Dsub9

2 ch TC

2 ch ConvecTorr
using (2) Dsub9

2 ch TC

n/a n/a

Micro phone jack
for IG control

Uses opto-isolated
active HI inputs

Micro phone jack
for IG control

Uses opto-isolated
active HI inputs

DRAFT 9/22/08

Analog Output In Fire-wire

conn of each Bd

Conv Bd also
provides access
pin in Dsub9

Set Points Std 8 setpoints,

2 per ch using
open collector
drivers in Dsub9

Micro phone jack
on each Bd

2ch and 4ch Conv
bds provide access
in Dsub conn

Optional 8
setpoints using
relays using
Dsub25, access to
C,NO,NC contacts

Micro phone jack Micro phone jack

Optional 4
setpoints using
relays using term
block type conn,
access to
C,NO,NC contacts

Optional 4
setpoints using
relays using term
block type conn,
access to
C,NO,NC contacts

A-9

XGS-600 Gauge Controller

Table A-10 Feature Compatibility Table (Continued)

Feature XGS-600 MultiGauge

SenTorr BA or

UHV SenTorr CC

RS232 Std Dsub9 IBM

pinout,
supports MG

protocol

RS485 Std in Dsub9,

supports MG
protocol

Black Box and
Remote Display
option

Table A-11 list the cable compatibility for the MultiGauge and SenTorr units.

22/08

UHV Bakeable L6440 Yes Yes Yes N/A
UHV non-bakeable L6441 Yes Yes Yes N/A

No No Yes Yes

Table A-11 Cable Compatibility Table

Cable XGS-600 MultiGauge SenTorr BA or UHV SenTorr CC

Opt Dsub9, IBM
pinout

Opt with choice of
daisy chain using
MiniDIN or Dsub9

Opt Dsub9, IBM
pinout

Opt with choice of
daisy chain using
MiniDIN or Dsub9

Opt Dsub9, IBM
pinout

Opt with choice of
daisy chain using
MiniDIN or Dsub9

Glass BA L6455 Yes Yes Yes N/A
Ion Gauge Extension L6456 Yes Yes Yes N/A
525 CCG L5671 No Yes n/a Yes

DRAFT 9/

IMG R0341, R0311 Yes Yes n/a No
MBA R1172 Yes Yes Yes n/a
Quad/Dual TC L6475 No Yes No No
Single TC L9131 Yes Yes Yes Yes
Single Conv L9122 Yes Yes Yes Yes
CDG L9153 No Yes No No

A-10

XGS-600 Gauge Controller

Appendix B. Serial Commands

Response to serial command inquiries approximately 10 ms, response time defined as time
between receipt of last query character to transmission of first response character. Serial
queries more frequent than 10 per second will compromise system responsiveness.

Command Syntax and Definitions

The command format is:
# {XGS-600 address} {command number} {optional data} {carriage return}

The response format is:
> {optional data} {carriage return}

The following characters are used in Table B-1:

Command Description Notes

# All commands to the XGS-600 must begin with the character "#".

aa RS485 Address =00 for RS232 (system default). Max allowable: 20hex

01

c Sensor Code =U, signifies User Label is to follow.

n

Note: Alternatively, "cn" can be used to designate a short code instead of User Label, backward

compatible to Multi-Gauge/SenTorr protocol; see separate instructions below (Table B-1 on page B-2)

h Hex Digit Used to identify setpoint number or to list status of 8 bits.

Command
Number

User Labels As found on Sensor Setup screen.

Each command is identified by a unique command number, 2
hex digits, 01-FF.

Examples:
#00B0UION4UGATE3.2E-03 sets AUTO-ON for ion gauge

"ION4" using CNV gauge "GATE".
#0030UGATE1 turns on emissions of sensor User Label Gate1.
#0055UTOP26.00 sets sensitivity for ion gauge with User Label

Top.
Note: If User Label is not defined by user, default User Label is

Sensor ID.

DRAFT 9/22/08

B-1

XGS-600 Gauge Controller

Command Description Notes

x Data Digit

Termination All commands sent to the XGS-600 require < CR > termination.

< LF > is ignored so it is possible to use < CR/LF > with RS232 but

< CR >

The XGS-600 sends ?FF as a response if the command or data is invalid, or if the command
length is incorrect. There is no response to a wrong address, or lack of termination
character.

Description Command

not with RS485 as it would cause a collision with the response.
Please note that time to response is extremely quick (10 to 20 ms)
so be ready! Responses are also terminated with < CR >.

Table B-1 Serial Command Set

Response from

XGS-600 Notes

Read XGS contents #aa01 >hhhhhhhhhhhh

where “hh” sensor

22/08

DRAFT 9/

Read pressure #aa02cn >x.xxxE-xx
Read

software revision

System Reset #aa06 >

#aa05 >hhhh,hhhh . . .

board codes are:
10 = Hot Filament Ion

Gauge board (HFIG)
3A = Inverted

Magnetron board (IMG)
40 = convection board

(CNV)
FE = Empty slot

where hhhh represents
revision hh.hh

Lists two-character
codes identifying the 6
board slots in the
system, following board
installation sequence
from left to right (front
view).

Revisions shown for
main board, then each
sensor board following
board installation
sequence from left to
right (front view).

Read Pressure Dump #aa0F >x.xxxE-xx,x.xxxE-xx, .

B-2

. .

All sensor readings in
one command.
Readings follow board
installation sequence
from left to right (front
view).

XGS-600 Gauge Controller

Table B-1 Serial Command Set (Continued)

Description Command

Response from

XGS-600 Notes

Set pressure units to
Torr

Set pressure units to
mBar

Set pressure units to
Pascal

Read pressure units #aa13 >xx

Assign User Label to
Sensor

Read User Label of
Sensor

#aa10 >

#aa11 >

#aa12 >

where:
xx = 00 is Torr
xx = 01 is mBar
xx = 02 is Pascal

#aa14cnLABEL
where c sensor code
=I for ion gauges HFIG
and IMG
=T for CNV's
n = Sensor Count
counting TC's or ion
gauges from left to right
from the front panel
view.
LABEL= user-defined
1-5 characters.

#aa15cn >LABEL

> Label can be any 5 or

where LABEL is
user-defined 1-5
characters.

fewer characters
(AHZ, 0-9, or space),
except for IMGxx,
HFIGx and CNVxxx,
(where x is any
character) which are
reserved.

DRAFT 9/22/08

If no User Label is
assigned, defaults to
system-assigned Sensor

ID.
Setup Lockout OFF #aa20 >
Setup Lockout ON #aa21 >
Read Setup Lockout

status

Set Auto-On #aaB0cn1cn2x.xE-xx

#aa22 >xx

where cn1 is the Ion
Gauge and cn2 is the
TC.

where:
xx = 00 is OFF
xx = 01 is ON

>

B-3

XGS-600 Gauge Controller

Table B-1 Serial Command Set (Continued)

Description Command

Response from

XGS-600 Notes

Read Auto-On #aaB1cn

where cn is Ion Gauge.

>cnx.xExx
where cn is the TC.

Ion Gauge Commands (HFIG and IMG gauges)

Assign Tube Type to
Sensor

22/08

Read Sensor Tube Type #aa17cn >xx where xx =

#aa16cnxx
where xx =
11 for IMG100 (default)
13 for IMG300
51 for MBA100
52 for MBA200
63 for 563
64 for 564
71 for 571
72 for 572
80 for UHV24 (default)
81 for UHV24p

DRAFT 9/

>

11 for IMG100 (default)
13 for IMG300
51 for MBA100
52 for MBA200
63 for 563
64 for 564
71 for 571
72 for 572
80 for UHV24 (default)

81 for UHV24p
Set Emission OFF #aa30cn >
Set Emission ON (Fil 1) #aa31cn > Also used for

Read Emission status #aa32cn >xx

Set Emission ON (Fil2) #aa33cn >

B-4

single-filament gauges.

where:

xx = 00 is OFF

xx = 01 is ON

XGS-600 Gauge Controller

Table B-1 Serial Command Set (Continued)

Description Command

Read Filament Lit #aa34cn >xx

where:
xx = 01 is Filament 1
xx = 02 is Filament 2

Response from

XGS-600 Notes

Set Auto Fil Advance
Off

Set Auto Fil Advance
On

Read Auto Fil Advance
State

Set degas OFF #aa40cn >
Set degas ON #aa41cn >
Read degas status #aa42cn >xx

Read ion gauge gas
correction

Set ion gauge gas
correction

#aa35 >

#aa36 >

#aa37 >xx

where:
xx = 00 is OFF
xx = 01 is ON

where:
xx = 00 is OFF
xx = 01 is ON

#aa50cn >x.xxx

#aa51cnx.xxx >

DRAFT 9/22/08

Read Emission current #aa52cn >x.xxx Least significant two

Set Emission current #aa53cnx.xxx > Least significant two

Read Sensitivity #aa54cn >xx.xx Always reads in Torr.

digits always zero.

digits will be ignored.

Least significant digit is
always zero.

B-5

XGS-600 Gauge Controller

Table B-1 Serial Command Set (Continued)

Response from

Description Command

Set Sensitivity #aa55cnxx.xx > This sensitivity value

XGS-600 Notes

must always be in Torr
due to xx.xx format
restriction. Note
however the value
displayed on front
panel is in Torr,
mbar, or Pascal.

Least significant digit
will be ignored.

Note: Will overwrite
any factory setting.

Setpoint Commands

Read Setpoint States #aa03 >00hh

22/08

Read assigned setpoints #aa04cn >00hh

DRAFT 9/

Set Setpoint
OFF/ON/Auto

#aa5Ehx
where h is setpoint
number 1-8 and x is
state:
0 = OFF (manual
override)
1 = ON (manual
override)
3 = Auto
(based on pressure)
Example: #005E83 sets
setpoint #8 to Auto.

where hh is a hex value

where each bit

represents

setpoints 1 - 8 and

value 0=Off, 1=On

where hh is a hex value

where each bit

represents

setpoints 1 - 8 and

value 0=Not assigned,

1=Assigned

>

Setpoint numbers
correspond to the
numbers on the
Setpoint screen.

B-6

XGS-600 Gauge Controller

Table B-1 Serial Command Set (Continued)

Description Command

Response from

XGS-600 Notes

Read Setpoint
OFF/ON/Auto

Set Setpoint On
pressure level

Set Setpoint ON Delay
time

#aa5Fh
where h is setpoint
number 1-8

#aa6hcnx.xxxE-xx
where h is setpoint
number 1-8

#aaChx.x
where h is setpoint
number 1-8 and x.x is
delay in seconds.

C is part of the hex
command number.
Example: #00C31.2 sets
on delay to 1.2 seconds
for setpoint # 3

>x
where x is state:
0 = OFF (manual
override)
1 = ON (manual
override)
3 = Auto (based on
pressure)

>

> Setpoint must first be

assigned to a sensor
using setpoint screen or
command 6h.

Set Setpoint Off
pressure
level

Set Setpoint Off Delay
time

Read Setpoint On
pressure level

Read Setpoint ON
Delay time

Read Setpoint Off
pressure level

#aa7hcnx.xxxE-xx
where h is setpoint
number 1 - 8

#aaDhx.x
where h is setpoint
number 1-8 and x.x is
delay in seconds

#aa8h
where h is setpoint
number 1 - 8

#aaEh
where h is setpoint
number 1-8

#aa9h
where h is setpoint
number 1 - 8

> Setpoint ON level must

be set before OFF level.

> Setpoint must be

assigned to a sensor.

>x.xxxE-xx

>x.x
where x.x is delay in
seconds

>x.xxxE-xx

DRAFT 9/22/08

B-7

XGS-600 Gauge Controller

Table B-1 Serial Command Set (Continued)

Description Command

Response from

XGS-600 Notes

Read Setpoint Off
Delay time

#aaFh
where h is setpoint
number 1 - 8

CNV Commands

Calibrate CNV #aaA1cn

where cn is a CNV

Set Atmosphere Value #aaA3x.xxxE+xx

where pressure is local
atmospheric value.

Read CNV gas type #aa4Ecn >x

22/08

Set CNV gas type #aa4Fcnx

where:
x=0 for Nitrogen/Air
x=1 for Argon

>xx

where x.x is delay in

seconds

> This command has the

same function as CAL
on the main screen, i.e.
used for both
atmosphere and
vacuum calibrations.

> Same as System Setup

screen Atmosphere
Value.

where:

x=0 for Nitrogen/Air

x=1 for Argon

>

DRAFT 9/

Notes to owners of Multi-Gauge and SenTorr:

❑ Most commands used by Multi-Gauge and SenTorr are still found in this protocol.
❑ Commands which apply to Multi-Gauge/SenTorr but do not apply to the XGS are

ignored by the XGS-600. There is no response and no error message.

❑ Any commands (ex. # 56-59) referring to a gauge or sensor type that is not supp orted

by the XGS-600 result in ?FF error message.

B-8

NOTE All alpha characters must be upper case.

XGS-600 Gauge Controller

Backward-compatible sensor code can still be used in XGS-600 as with Multi-Gauge/
SenTorr protocol:

Command

Entry Description Notes

c Sensor Code =T for TC/CNV

= I for ion gauge (HFIG or IMG)
Case sensitive.

n Sensor Count Counting TC's or ion gauges from left to right from the front

panel view.
Example: #0030I3 turns on the third ion gauge.

Using HyperTerminal

To see if communication has been established use a terminal emulator program like
ProComm or Windows 3.xx Terminal or Hyperterminal.

❑ Use the recommended pre-made cinch cable type MDC-6 Pxx w/mini-Din

connector.

Windows HyperTerminal Set-Up Instructions

1. Click Start.

2. Select Programs > Accessories > Communications > HyperTerminal.

3. Double-click Hypertrm.exe. The Connection Description dialog box appears.

4. Enter a name and choose an icon for the connection, for example: XGS-600 RS-232.

5. Click OK. The Connect To dialog box appears.

6. Select a COM port from the Connect Using: the pull-down list. The Com Properties/Port
Setting dialog box appears.

7. Configure the following settings:

❑ Bits per second (baud rate) – 9600 or 19200, whichever is set on XGS-600.
❑ Data bits: – 8
❑ Parity: – None
❑ Stop bits: – 1

DRAFT 9/22/08

❑ Flow Control: – None

8. Click OK.

9. Select Properties from the File menu. The Properties window appears.

10. Configure the following settings on the Connect To tab:

❑ Connect using – Verify the COM port is correct.

B-9

XGS-600 Gauge Controller

❑ Click Configure and verify the port settings are correct.

11. Ensure that the Settings tab is configured as follows:

❑ Terminal keys radio button selected.
❑ Ctrl+H radio button selected.
❑ Auto detect selected from the Emulation pull-down list.
❑ ANSI entered in the Telnet terminal ID.
❑ 500 set in the Background buffer lines field.

12. Click ASCII Set-Up. The ASCII Set-Up dialog box appears.

13. Ensure that the settings are as follows:

❑ Line delay – 0 milliseconds
❑ Character delay – 0 milliseconds
❑ ASCII Receiving – Wrap lines that exceed terminal width

The cursor begins blinking.

14. Type some simple commands and see if there is a response:

❑ #0001

22/08

❑ #0005
❑ #000F

DRAFT 9/

B-10

XGS-600 Gauge Controller

Appendix C. Gas Correction Factor Table

Table C-1 on page C-2 lists relative gauge gas correction factors for various gases. The table
is reproduced for convenience only.

WARNING The XGS-6000 used with any ion or convection gauge is NOT

considered intrinsically safe, and should not be used with potentially
flammable or explosive gas mixtures.

The values are derived by empirical methods substantiated by measurements reported in
literature. This table was compiled and published by Robert L. Summers of Lewis Research
Center, NASA Technical Note TND-5285, National Aeronautics and Space Administration,
Washington, DC, June 1969.

To automatically convert readings of the XGS-600 Controller, normally calibrated for
nitrogen, to read pressures of the other gasses:

1. Use Sensor Setup to access the GAS CORRECTION function.

2. Enter the relative gas correction constant.
The gauge divides the result by the gas correction constant and displays the correct

adjusted value. The default for Gas Correction is 1.

The correction for different gas species is purely arithmetic. The sensitivity of the tube is
affected by different gases which, in turn, are responsible for the tube output being
manipulated by the pressure equation. There is some loss in resolution of the instrument
when gas correction constants are used. The loss in resolution becomes more apparent as
the correction constants approach 0.5 from either direction.

When the correction constants are 0.1 or 10, the tube output is 1/10 or 10 times normal.
This causes the instrument to lose the high vacuu m dec ade or the ne ar atmo sphere deca de,
respectively.

DRAFT 9/22/08

C-1

XGS-600 Gauge Controller

Table C-1 Gas Correction Factor Table

22/08

DRAFT 9/

C-2

XGS-600 Gauge Controller

Table C-1 Gas Correction Factor Table (Continued)

C-3

DRAFT 9/22/08

XGS-600 Gauge Controller

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Sales and Service Offices

Canada
Central coordination through:
Vari a n , Inc.

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel.: [phone]
Toll-Free: [phone]
Fax: [phone]

China
Varian Technologies China, Ltd.

Room 1648
Central Tower South Wing
Beijing Junefield Plaza
No. 10 XuanWuMenWai Street
Beijing 100052
P. R. China
Tel.: [phone]
Toll-Free: 800 820 6556
Fax: [phone]

France
Varian s.a.

7 avenue des Tropiques
Z.A. de Courtaboeuf - B.P. 12
91941 Les Ulis cedex
France
Tel.: [phone]
Fax: [phone]

Benelux
Varian Vacuum Technologies

Herculesweg 8
4338 PL Middelburg
The Netherlands
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Fax: [phone]

Germany & Austria
Varian Deutschland GmbH

Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
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Fax: [phone]

Italy
Vari a n , Inc.

via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel.: [phone]
Toll-Free: 00 800 234 234 00
Fax: [phone]

Japan
Varian Technologies Japan, Ltd.

8th Floor
Sumitomo Shibaura Building
4-16-36 Shibaura Minato-ku
Tokyo 108
Japan
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Toll-Free: 0120 655 040
Fax: [phone]

Korea
Varian Technologies Korea, Ltd.

Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
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Toll-Free: 080 222 2452
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Mexico
Varian, S. de R.L. de C.V.

Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
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Ta i w a n
Varian Technologies Asia, Ltd.

14F-6, No. 77, Hsin Tai Wu Road, Sec. 1
Hsi chih, Taipei Hsien
Taiwan, R.O.C.
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Toll Free: 0800 051 342
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United States
Vari a n , Inc

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel.: [phone]
Toll-Free: [phone]
Fax: [phone]

Other Countries
Varian Vacuum Technologies

via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: [phone]
Fax: [phone]

Customer Support and Service:

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[e-mail]

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Worl d w ide Web Site ,
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www.varianinc.com

Representatives in most countries

India
Varian India Pvt. Ltd.

205-A, "A" wing of Galleria
2nd floor, Hiranandani Gardens
Powai, Mumbai-400 076
India
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Mobile: [phone]

04/08

UK & Ireland
Vari a n L td.

6 Mead Road
Oxford Industrial Park
Yarnton, Oxford OX5 1QU
UK
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