Page 1
VacIon Plus 150
pumps
919-1510/1520/1530/1540
919-1511/1521/1531/1541
919-1512/1522/1532/1542
919-1550/1560/1570/1580
919-1551/1561/1571/1581
919-1552/1562/1572/1582
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D’EMPLOI
INSTRUCTION MANUAL
87-900-102-01(A)
APRIL 2002
Page 2
VacIon Plus 150
Page 3
Page 4
Page 5
ISTRUZIONI PER L’USO ....................................................................................................1
GEBRAUCHSANLEITUNG .................................................................................................3
MODE D’EMPLOI................................................................................................................ 5
INSTRUCTIONS FOR USE................................................................................................. 7
TECHNICAL INFORMATION .............................................................................................. 9
DESCRIPTION OF THE VACION PUMP ......................................................................................9
TECHNICAL SPECIFICATION ......................................................................................................9
OUTLINE DRAWING ...................................................................................................................12
STRAY MAGNETIC FIELD ..........................................................................................................12
VACION PLUS PUMP INSTALLATION .......................................................................................13
Inspection procedure .........................................................................................................13
Visual inspection ................................................................................................................13
Vacuum evaluation.............................................................................................................13
Short circuits ......................................................................................................................14
TYPICAL INSTALLATION............................................................................................................14
INLET FLANGE CONNECTION ..................................................................................................15
CONTROL UNIT CONNECTION.................................................................................................15
SAFETY INTERLOCK..................................................................................................................16
HEATER INSTALLATION ............................................................................................................16
HEATER REPLACEMENT...........................................................................................................16
BAKEOUT OPERATION ..............................................................................................................16
Bakeout of VacIon pump with the integral heaters ............................................................17
OPERATING PROCEDURE ........................................................................................................17
MAINTENANCE ...........................................................................................................................18
Exchange of pumping element ..........................................................................................18
Exchange of the high voltage feedthrough. .......................................................................18
Leakage current check.......................................................................................................18
High-potting........................................................................................................................18
PUMP TROUBLESHOOTING......................................................................................................19
VACION PLUS PUMP REPLACEMENT PARTS AND ACCESSORIES .....................................20
VACION PLUS PUMP CONTROLLERS......................................................................................20
Page 6
INFORMAZIONI GENERALI
Questa apparecchiatura è destinata ad uso professionale.
L'utilizzatore deve leggere attentamente il presente manuale di
istruzioni ed ogni altra informazione addizionale fornita dalla
Varian prima dell'utilizzo dell'apparecchiatura. La Varian si
ritiene sollevata da eventuali responsabilità dovute
all'inosservanza totale o parziale delle istruzioni, ad uso
improprio da parte di personale non addestrato, ad interventi
non autorizzati o ad uso contrario alle normative nazionali
specifiche.
Le pompe della serie VacIon Plus sono pompe ioniche
utilizzate comunemente per applicazioni di ultra alto vuoto,
grazie alla loro pulizia, capacità di pompare qualsiasi tipo di
gas, e del loro funzionamento senza vibrazioni e necessità di
manutenzione.
Nei paragrafi seguenti sono riportate tutte le informazioni
necessarie a garantire la sicurezza dell'operatore durante
l'utilizzo dell'apparecchiatura. Informazioni dettagliate sono
fornite nell'appendice “Technical information”.
Questo manuale utilizza le seguenti convenzioni:
ISTRUZIONI PER L'USO
PERICOLO!
!
!
!!
I messaggi di pericolo attirano l'attenzione dell'operatore su una
procedura o una pratica specifica che, se non eseguita in modo
corretto, potrebbe provocare gravi lesioni personali.
!
!
ATTENZIONE!
!!
I messaggi di attenzione sono visualizzati prima di procedure
che, se non osservate, potrebbero causare danni all'apparecchiatura.
NOTA
Le note contengono informazioni importanti estrapolate dal
testo.
PREPARAZIONE PER L'INSTALLAZIONE
La pompa viene fornita in un imballo protettivo speciale; se si
presentano segni di danni, che potrebbero essersi verificati
durante il trasporto, contattare l'ufficio vendite locale. Durante
l'operazione di disimballaggio, prestare particolare attenzione a
non lasciar cadere la pompa e a non sottoporla ad urti o
vibrazioni. Non disperdere l'imballo nell'ambiente. Il materiale è
completamente riciclabile e risponde alla direttiva CEE 85/399
per la tutela dell'ambiente.
!
!
ATTENZIONE!
!!
Onde evitare problemi di degassamento, non toccare con le
mani nude i componenti destinati ad essere esposti al vuoto.
Utilizzare sempre i guanti o altra protezione adeguata.
INSTALLAZIONE
PERICOLO!
!
!
!!
La pompa, a causa del suo peso, deve essere maneggiata
tramite appositi attrezzi di sollevamento e spostamento.
Non installare e/o utilizzare la pompa in ambienti esposti ad
agenti atmosferici (pioggia, gelo, neve), polveri, gas aggressivi,
in ambienti esplosivi o con elevato rischio di incendio. Durante
il funzionamento, per ottenere le specifiche tecniche dichiarate,
la temperatura ambiente deve essere compresa tra 0 °C e +85
°C.
!
!
ATTENZIONE!
!!
La pompa deve essere tenuta sigillata con il suo tubo di
ingresso schiacciato finché non è pronta per essere collegata al
sistema.
NO!
NOTA
La pompa non può essere danneggiata rimanendo
semplicemente esposta all'atmosfera. Si consiglia comunque di
mantenerla chiusa fino al momento dell'installazione sul
sistema onde evitare eventuale inquinamento da polvere.
PERICOLO!
!
!
!!
Per evitare lesioni alla persona, non collegare l’alta
tensione alla pompa prima che sia installata nel sistema e
che tutte le flange di ingresso siano adeguatamente
collegate o chiuse.
1 87-900-102-01(A)
Page 7
ISTRUZIONI PER L'USO
Il funzionamento delle pompe è ottimizzato solo con l’uso delle
apposite unità di controllo Varian (Dual, MidiVac o MiniVac).
!
!
ATTENZIONE!
!!
Il rispetto delle normative di sicurezza nell’uso delle pompe è
garantito solo con l’uso delle unità di controllo Varian.
La pompa VacIon Plus può essere installata in qualsiasi
posizione. Per convenienza normalmente viene montata in
posizione verticale con la flangia di ingresso in alto. Per
installazioni con posizione diversa dalla verticale, la pompa
deve essere sostenuta tramite i piedini di montaggio posti sul
suo fondo.
Per informazioni dettagliate sull’installazione della pompa,
vedere l’appendice "Technical Information".
USO
Tutte le istruzioni per il corretto funzionamento delle pompe
VacIon Plus sono contenute nel manuale dell'unità di controllo.
Leggere attentamente tale manuale prima dell'utilizzo. Si
raccomanda di portare la pompa ad una pressione di 1x10
Torr (mbar) in modo da ottenere un avvio più rapido. A questo
scopo è meglio non utilizzare una pompa meccanica sigillata
con olio, ma se deve essere utilizzata una tale pompa, si
raccomanda di inserire una trappola lungo la linea di vuoto per
ridurre la pressione causata dai vapori di acqua e di olio
provenienti dalla pompa meccanica. Cercare di ridurre al
minimo il tempo in cui la pompa meccanica è aperta verso il
sistema e verso la pompa ionica, poiché i suoi vapori si
diffondono nel sistema a pressioni inferiori a 1x10
causando una contaminazione dello stesso. Nei sistemi in cui
l’olio deve essere completamente assente, è meglio utilizzare
pompe Turbo per la suddetta operazione. Depositi igroscopici e
l’assorbimento dell’idrogeno all’interno del composto di titanio
possono provocare l’allungamento del tempo di avvio con
l’invecchiamento della pompa. Durante l’esposizione all’aria, il
deposito del composto di titanio assorbe vapore acqueo; in
conseguenza di ciò, al successivo avvio, il riscaldamento della
pompa provoca il rilascio del vapore e di parte dell’idrogeno
pompato precedentemente, con l’effetto dell’allungamento del
tempo di avvio.
-1
Torr (mbar)
-4
Procedure di uso
Controllare che la polarità dell’unità di controllo sia corretta per
la pompa: polarità positiva per le pompe Diode e negativa per
le StarCell e le Triode. Fare riferimento al relativo manuale ed
osservare la seguente procedura per l’uso della pompa:
1. Tramite una pompa di pre-vuoto portare il sistema da vuoto
ad una pressione minima di avvio in accordo alla tabella di
pagina 9 ed a seconda del tipo di pompa ionica.
2. Collegare l’unità di controllo ad una apposita fonte di
alimentazione ed accenderla.
3. Osservare la tensione, la corrente e la pressione. Se l’avvio
è avvenuto ad una pressione di 5x10
una tensione di circa 300 - 400 V. Un valore di corrente
prossimo alla corrente di corto circuito dell’unità di controllo
è indice dell’esistenza di una perdita nella pompa e nel
sistema. Un temporaneo incremento della pressione di prevuoto è normale durante la fase di avvio.
4. Lasciare la valvola di pre-vuoto aperta durante l’avvio della
pompa ionica finchè non si raggiunge una adeguata
pressione di avvio. Se la tensione della pompa ionica
scende dopo la chiusura della valvola, riaprirla per un prepompaggio aggiuntivo. Appena la pressione diminuisce, la
tensione cresce nuovamente e la valvola di pre-vuoto può
essere chiusa.
5. Quando la tensione ha raggiunto i 2 - 3kV, mettere l’unità di
controllo nello stato PROTECT. Il sistema sarà così
autoprotetto dall’incremento della pressione oltre 1x10
Torr (mbar) quando la pompa non è controllata. Nel caso in
cui ci fosse un tale incremento, l’unità di controllo viene
spenta automaticamente.
-2
Torr (mbar), è tipica
-4
6. La pressione nella pompa può anche essere calcolata
leggendo la corrente e convertendo la lettura in pressione
tramite l’apposito diagramma pressione-corrente illustrato
nell’appendice “Technical Information” di questo manuale.
NOTA
I gradini nei diagrammi pressione - corrente sono una
caratteristica del modo di funzionamento del Dual. Quando la
corrente assorbita dalla pompa raggiunge determinati valori,
l'unità di controllo cambia il valore dell'alta tensione in uscita ad
un valore più basso.
7. Quando si porta la pompa alla pressione atmosferica,
usare azoto secco in modo da evitare l’assorbimento di
vapore acqueo da parte delle pareti della pompa.
PERICOLO!
!
!
!!
Quando la pompa viene utilizzata per il pompaggio di gas
tossici, infiammabili o radioattivi, seguire le appropriate
procedure tipiche di ciascun gas. Non usare la pompa in
presenza di gas esplosivi.
PERICOLO!
!
!
!!
Quando è installato il riscaldatore, non toccare la pompa
durante le operazioni di riscaldamento e di raffreddamento.
L'elevata temperatura può causare lesioni alle persone.
!
!
ATTENZIONE!
!!
Non avvicinare dispositivi elettronici alla pompa. Il campo
magnetico attorno ad essa può provocare dei malfunzionamenti
dei dispositivi stessi.
MANUTENZIONE
Le pompe della serie VacIon Plus non richiedono alcuna
manutenzione. Qualsiasi intervento deve essere eseguito da
personale autorizzato.
!
!
!!
Prima di effettuare qualsiasi intervento sulla pompa scollegarla
dall’alta tensione.
Qualora una pompa dovesse essere rottamata, procedere alla
sua eliminazione nel rispetto delle normative nazionali
specifiche.
PERICOLO!
2 87-900-102-01(A)
Page 8
ALLGEMEINE HINWEISE
Dieses Gerät ist für den professionellen Gebrauch bestimmt.
Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie
alle weiteren von Varian mitgelieferten Zusatzdokumentationen
genau lesen. Bei vollständiger bzw. teilweiser Nichtbeachtung
der enthaltenen Hinweise, unsachgemäßem Gebrauch durch
ungeschultes Personal, nicht autorisierten Eingriffen und
Mißachtung der nationalen Bestimmungen übernimmt Firma
Varian keinerlei Haftung.
Die Pumpen der Serie VacIon Plus sind Ionenpumpen, die
aufgrund ihrer Reinheit, ihrer Fähigkeit, alle Arten von Gas zu
pumpen, und ihres vibrations- und wartungsfreien Betriebes,
allgemein für Ultrahochvakuumanwendungen zum Einsatz
kommen.
In den folgenden Abschnitten sind alle erforderlichen
Informationen für die Sicherheit des Bedieners bei der
Anwendung des Geräts aufgeführt. Detaillierte technische
Informationen sind im Anhang "Technical Information"
enthalten.
In dieser Gebrauchsanleitung werden Sicherheitshinweise
folgendermaßen hervorgehoben:
GEBRAUCHSANWEISUNGEN
!
!
!!
Die Gefahrenhinweise lenken die Aufmerksamkeit des
Bedieners auf eine spezielle Prozedur oder Praktik, die bei
unkorrekter Ausführung schwere Verletzungen hervorrufen
könnte.
Die Warnhinweise vor bestimmten Prozeduren machen den
Bediener darauf aufmerksam, daß bei Nichteinhaltung
Schäden am Gerät entstehen können.
Die Anmerkungen enthalten wichtige Informationen, die aus
dem Text hervorgehoben werden.
VOR DER INSTALLATION
Die Pumpe wird in einer speziellen Schutzverpackung geliefert.
Eventuelle Transportschäden sind der zuständigen örtlichen
Verkaufsstelle zu melden. Beim Auspacken vorsichtig
vorgehen, damit die Pumpe nicht fällt oder Stößen oder
Vibrationen ausgesetzt wird. Das Verpackungsmaterial ist
ordnungsgemäß zu entsorgen. Es ist vollständig recyclebar
und entspricht der EG-Richtlinie 85/399 für den Umweltschutz.
Um Entgasungsprobleme zu vermeiden, dürfen die
Komponenten, die mit dem Vakuum in Kontakt kommen, nicht
mit bloßen Händen berührt werden. Stets Handschuhe oder
einen anderen geeigneten Schutz tragen.
GEFAHR!
!
!
ACHTUNG!
!!
ANMERKUNG
!
!
ACHTUNG!
!!
INSTALLATION
!
!
!!
Die Pumpe kann aufgrund ihres Gewichtes mittels geeigneter
Hebe- und Förderzeuge gehandhabt werden.
Die Pumpe darf nicht in Umgebungen installiert und/oder
benutzt werden, die ungeschützt vor Witterungsbedingungen
(Regen, Frost, Schnee), Staub und aggressiven Gasen sind,
und in denen Explosions- und erhöhte Brandgefahr besteht.
Während des Betriebes soll die Umgebungstemperatur
zwischen 0°C und +85°C betragen, um die angegebenen
technischen Merkmale zu gewährleisten.
Die Pumpe soll versiegelt und mit flachgedrücktem
Eintrittsschlauch gehalten werden, bis sie für den Anschluß an
das System bereit ist.
GEFAHR!
!
!
ACHTUNG!
!!
FALSCH!
ANMERKUNG
Die Pumpe kann, wenn sie einfach der Atmosphäre ausgesetzt
ist, nicht beschädigt werden. Sie sollte jedoch bis zur
Installation an der Anlage geschlossen bleiben, um
Verunreinigungen durch Staub zu vermeiden.
!
!
Um Personenschäden zu vermeiden, darf die
Hochspannungsleitung der Pumpe erst angeschlossen
werden, wenn die Pumpe im System installiert ist und alle
Eintrittsflansche entsprechend angeschlossen oder
geschlossen sind.
3 87-900-102-01(A)
!!
GEFAHR!
Page 9
GEBRAUCHSANWEISUNGEN
Der Pumpenbetrieb wird nur durch den Einsatz speziell dafür
vorgesehener Varian Steuereinheiten (Dual, MidiVac oder
MiniVac) optimiert.
!
!
ACHTUNG!
!!
Die Einhaltung der Sicherheitsvorschriften beim Gebrauch der
Pumpen ist nur bei Verwendung von Varian Steuereinheiten
gewährleistet.
Die Pumpe Vaclon Plus kann in einer beliebigen Position
installiert werden. Aus praktischen Gründen wird sie in der
Regel senkrecht mit nach oben gerichtetem Eintrittsflansch
montiert. Bei nicht senkrechten Einbaulagen soll die Pumpe
auf Montagefüßen aufliegen, die an ihrer Unterseite angebracht
werden.
Detaillierte Informationen zur Installation der Pumpe sind dem
Anhang “Technical Information” zu entnehmen.
GEBRAUCH
Sämtliche Hinweise für den korrekten Betrieb der Pumpen
VacIon Plus sind im Handbuch der Steuereinheit enthalten.
Dieses Handbuch ist vor der Inbetriebnahme genau
durchzulesen. Es wird empfohlen, die Pumpe auf einen Druck
von 1x10
zu gewährleisten. Zu diesem Zweck empfiehlt es sich, keine
ölversiegelte mechanische Pumpe zu verwenden. Falls
hingegen eine derartige Pumpe benutzt werden muß, soll an
der Vakuumleitung eine Falle eingesetzt werden, um den durch
die Wasser- und Öldämpfe aus der mechanischen Pumpe
erzeugten Druck zu verringern. Es ist zu versuchen, die Zeit
auf ein Mindestmaß zu reduzieren, während der die
mechanische Pumpe zum System und zur Ionenpumpe
geöffnet ist, da sich ihre Dämpfe bei Drücken unter 1x10
(mbar) im System verbreiten und dessen Verunreinigung
verursachen. Bei Systemen, die vollkommen ölfrei sein
müssen, erweisen sich für den obengenannten Vorgang
Turbopumpen als geeigneter.
Hygroskopische Ablagerungen und die Absorption von
Wasserstoff in der Titanverbindung können die Anlaufzeit
verlängern und eine kürzere Standzeit der Pumpe verursachen.
Die Ablagerungen der Titanverbindungen absorbieren
Wasserdampf, wenn sie der Luft ausgesetzt werden. Dadurch
bewirkt beim anschließenden Anlaufvorgang die Aufheizung
der Pumpe die Abgabe des Dampfes und eines Teils des zuvor
gepumpten Wasserstoffs, so daß sich die Anlaufzeit
verlängert.
-4
Torr (mbar) zu bringen, um einen rascheren Anlauf
-1
Torr
5. Wenn die Spannung 2 – 3 kV erreicht hat, ist die
Steuereinheit auf den Status PROTECT zu schalten. Das
System verfügt auf diese Weise über einen Selbstschutz
vor einem Druckanstieg über 1x10
Pumpe nicht kontrolliert ist. Falls ein solcher Anstieg
stattfindet, wird die Steuereinheit automatisch
ausgeschaltet.
6. Der Pumpendruck kann auch berechnet werden, indem
die Stromstärke abgelesen wird und der abgelesene Wert
mittels des Druck-Stromstärke-Diagramms im Anhang
“Technical Information” des vorliegenden Handbuches in
einen Druckwert umgerechnet wird.
ANMERKUNG
Die Stufen im Druck-Stromstärke-Diagramm sind
charakteristisch für die Funktionsweise des Dual. Wenn die
Stromaufnahme der Pumpe ein bestimmtes Ausmaß erreicht,
ändert die Steuereinheit die ausgangsseitige Hochspannung
auf einen niedrigeren Wert ab.
7. Wenn die Pumpe auf den atmosphärischen Druck
gebracht wird, ist trockener Stickstoff zu verwenden, um
die Aufnahme von Wasserdampf durch die
Pumpenwände zu verhindern.
!
!
!!
Wenn die Pumpe zur Förderung von giftigen, leicht
entflammbaren oder radioaktiven Gasen benutzt wird, sind die
für das jeweilige Gas vorgeschriebenen Vorgänge zu befolgen.
Die Pumpe nie bei Vorhandensein von explosivem Gas
benutzen.
!
!
!!
Wenn die Heizung installiert ist, darf die Pumpe während der
Aufheizung und Abkühlung nicht berührt werden. Die hohe
Temperatur kann zu Personenschäden führen.
Keine elektronischen Geräte in die Nähe der Pumpe bringen.
Das darum befindliche Magnetfeld kann zu Funktionsstörungen
der Geräte führen.
GEFAHR!
GEFAHR!
!
!
ACHTUNG!
!!
-4
Torr (mbar), wenn die
Bedienungsschritte
Es ist zu kontrollieren, daß die Steuereinheit in bezug auf die
Pumpe richtig gepolt ist: positive Polarität für Dioden Pumpen
und negative für StarCell oder Triode Pumpen.
Es ist nach dem diesbezüglichen Handbuch vorzugehen, für
den Gebrauch der Pumpe sind die folgenden
Bedienungsschritte zu beachten:
1. Mit einer Vorvakuumpumpe das System auf einen
Mindestanlaufdruck gemäß Tabelle 9 in Abhängigkeit vom
Ionenpumpentyp bringen.
2. Die Steuereinheit an eine entsprechende
Versorgungsquelle anschließen und einschalten.
3. Die Spannung, die Stromstärke und den Druck
beobachten. Wenn der Anlauf bei einem Druck von 5x10
Torr (mbar) erfolgt ist, ist eine Spannung von ca. 300 –
400 V typisch. Ein Stromwert, der sich dem
Kurzschlußstromwert der Steuereinheit annähert, weist
auf eine Leckstelle an der Pumpe und am System hin. Ein
zeitweiliger Anstieg des Vorvakuumdruckes ist während
der Anlaufphase normal.
4. Während des Anlaufes der Ionenpumpe soll das
Vorvakuumventil geöffnet bleiben, bis ein angemessener
Anlaufdruck erreicht ist. Wenn die Spannung der
Ionenpumpe nach Schließung des Ventils abfällt, ist das
Ventil für eine zusätzliche Vorvakuumpumpung zu öffnen.
Sobald der Druck sinkt, steigt die Spannung erneut an
und kann das Vorvakuumventil geschlossen werden.
-2
WARTUNG
Die Pumpen der Serie VacIon Plus erfordern keine Wartung.
Sämtliche Eingriffe dürfen nur von autorisiertem Personal
vorgenommen werden.
!
!
!!
Vor Eingriffen an der Pumpe ist diese von der
Hochspannungsquelle zu trennen.
Bei eventueller Verschrottung einer Pumpe ist diese
entsprechend der einschlägigen nationalen Vorschriften zu
entsorgen.
GEFAHR!
4 87-900-102-01(A)
Page 10
INDICATIONS GÉNÉRALES
Cet appareillage a été conçu en vue d’une utilisation
professionnelle. Il est conseillé à l’utilisateur de lire
attentivement cette notice d’instructions ainsi que toute autre
indication supplémentaire fournie par Varian avant d’utiliser
l’appareil. Varian décline toute responsabilité en cas de non
respect total ou partiel des instructions fournies, d’opérations
non autorisées, d’utilisation impropre par du personnel non
formé ou contraires aux réglementations nationales
spécifiques.
Grâce à leur propreté, à leur capacité de pomper tous les types
de gaz, à leur fonctionnement sans vibrations et à l’absence
d’entretien, les pompes de la série Vacion Plus sont des
pompes ioniques généralement utilisées pour des applications
de vide ultra poussé.
Les paragraphes suivants fournissent toutes les indications
nécessaires à garantir la sécurité de l'opérateur pendant
l'utilisation de l'appareillage. Des renseignements plus détaillés
se trouvent dans l'appendice "Technical Information".
Cette notice utilise les signes conventionnels suivants:
INSTRUCTIONS D’UTILISATION
!
!
!!
Les messages de danger attirent l'attention de l'opérateur sur
une procédure ou une manoeuvre spéciale dont la mauvaise
exécution peut provoquer de graves lésions.
Les messages d'attention apparaissent avant certaines
procédures dont le non respect peut provoquer des dommages
irréversibles à l'appareillage.
Les notes contiennent des renseignements importants,
extrapolés du texte.
PRÉPARATION DE L'INSTALLATION
La pompe est fournie dans un emballage de protection spécial;
si l'on constate des signes d’endommagement imputables au
transport, contacter aussitôt le revendeur local. Pendant
l'opération de déballage, veiller tout particulièrement à ne pas
laisser tomber la pompe et à ne lui faire subir aucun choc ni
aucune vibration. Ne pas abandonner l'emballage dans la
nature. Le matériel est entièrement recyclable et il est
conforme à la directive CEE 85/399 en matière de protection
de l'environnement.
En vue d'éviter tout problème de dégazage, ne pas toucher à
mains nues les éléments devant être exposés au vide. Mettre
toujours des gants ou toute autre protection appropriée.
DANGER!
!
!
ATTENTION!
!!
NOTE
!
!
ATTENTION!
!!
INSTALLATION
!
!
!!
À cause de son poids, il est indispensable de se servir des
équipements de levage et de manutention pour déplacer la
pompe.
Ne pas installer et/ou utiliser la pompe dans des milieux
exposés à des agents atmosphériques (pluie, gel, neige), à des
poussières, à des gaz de combat ainsi que dans des milieux
explosifs ou à fort risque d'incendie. Pendant le
fonctionnement, pour respecter les spécifications techniques
déclarées la température ambiante doit être comprise entre
0°C et +85°C;
La pompe doit être conservée scellée avec son tuyan d’entrée
aplati jusqu’à ce qu’elle soit prête à être branchée au système.
DANGER!
!
!
ATTENTION!
!!
NON!
NOTE
La pompe ne peut être endommagée si elle reste simplement
exposée à l'atmosphère. Il est quoi qu’il en soit conseillé de ne
pas la retirer de son emballage avant le moment de
l'installation, afin d'éviter toute pollution due à la poussière.
!
!
!!
Pour éviter toute lésion aux personnes, ne pas brancher la
haute tension à la pompe avant que celle-ci soit installée
dans le système et avant que toutes les brides d’entrées
soient correctement assemblées ou fermées.
5 87-900-102-01(A)
DANGER!
Page 11
INSTRUCTIONS D’UTILISATION
Le fonctionnement de la pompe n'est optimisé que si celle-ci
est utilisée avec l'une des unités de contrôle Varian spécifiques
(Dual, MidiVac ou MiniVac).
!
!
ATTENTION!
!!
Lors de l'utilisation des pompes, le respect des normes de
sécurité est impérativement subordonné à l'emploi des unités
de contrôle Varian.
La pompe VacIon Plus peut être installée dans toutes les
positions. Par facilité elle est généralement montée en position
verticale avec la bride d'entrée en partie haute. Pour toute
installation différente de la position verticale, la pompe doit
reposer sur ses pieds de montage placé sur le fond.
Pour plus de détails sur l’installation de la pompe, consulter
l’appendice “Technical information”.
UTILISATION
Toutes les instructions pour le fonctionnement correct de la
pompe Vacion Plus sont fournies dans la notice de l'unité de
contrôle. Il est conseillé de lire attentivement cette notice avant
d'utiliser la pompe. Il est recommandé de porter la pompe à
une pression de 1x10
démarrage plus rapide. Pour ce faire il est préférable de ne pas
utiliser une pompe mécanique scellée à l’huile mais au cas où
il serait nécessaire d’utiliser une telle pompe, il est
recommandé d’introduire un dispositif de retenue le long de la
ligne de vide afin de réduire la pression due aux vapeurs d’eau
et d’huile engendrées par la pompe mécanique. Essayer de
réduire au minimum le temps où la pompe mécanique est
ouverte vers le système et vers la pompe ionique car ses
vapeurs se répandent dans le système à des pressions
inférieures à 1x10
de celui-ci. Dans les systèmes où l’huile doit être
complètement absente, il est préférable d’effectuer ladite
opération à l’aide d’une pompe Turbo. Des dépôts
hygroscopiques et l’absorption d’hydrogène dans le composé
de titane peuvent provoquer, par effet du vieillissement de la
pompe, l’allongement du temps de démarrage. Pendant
l’exposition à l’air, le dépôt du composé de titane absorbe de la
vapeur d’eau et cette action a pour conséquence qu’au
démarrage suivant le chauffage de la pompe entraînera la
dispersion de la vapeur et d’une partie de l’hydrogène pompée
précédemment ce qui aura pour effet d’allonger le temps de
démarrage.
-4
Torrs (mbars) de façon à obtenir un
-1
Torrs (mbars) causant une contamination
Procédure d’utilisation
Contrôler que la polarité de l’unité de contrôle soit correcte
pour la pompe: polarité positive pour les pompes Diode et
négative pour les pompes StarCell et Triode. Se reporter au
manuel correspondant et observer la procédure suivante pour
l’utilisation de la pompe:
1. A l'aide d'une pompe de pré-vide, porter le système à une
pression minimale de démarrage en suivant le tableau de
la page 9 et en fonction du type de pompe ionique.
2. Brancher l’unité de contrôle à une source d’alimentation
appropriée et l’allumer.
3. Contrôler la tension, le courant et la pression. Lorsque la
mise en route est effectuée à une pression de 5x10
Torrs (mbars) la tension est généralement d’environ 300 400 V. Une valeur de courant proche du courant de courtcircuit de l’unité de contrôle révèle l’existence d’une fuite
dans la pompe et dans le système. Au cours de la phase
de démarrage, un accroissement momentané de la
pression de pré-vide est normal.
-2
4. Laisser la soupape de pré-vide ouverte pendant le
démarrage de la pompe ionique tant qu’une pression de
démarrage appropriée n’a pas été atteinte. Si la tension
de la pompe ionique descend après la fermeture de la
soupape, la rouvrir pour un pré-pompage supplémentaire.
Dès que la pression commence à diminuer, la tension
augmente à nouveau et la valve de pré-vide peut être
fermée.
5. Lorsque la tension a atteint 2 - 3 kV, mettre l’unité de
contrôle en état de PROTECT. Le système sera ainsi
protégé contre toute augmentation de pression au-delà de
-4
Torrs (mbars) lorsque la pompe n’est pas
1x10
contrôlée. Si une telle augmentation devait être
enregistrée, l’unité de contrôle s’éteindrait
automatiquement.
6. La pression de la pompe peut également être calculée en
relevant le courant et en convertissant la lecture en
pression à l’aide du diagramme pression-courant illustré
dans l’appendice “Technical Information” de ce manuel.
NOTE
Les paliers du diagramme de pression – courant sont une
caractéristique du mode de fonctionnement du Dual. Lorsque le
courant absorbé par la pompe atteint des valeurs déterminées,
l'unité de contrôle porte la valeur de haute tension en sortie à
une valeur inférieure.
7. Lorsque l’on porte la pompe à la pression atmosphérique ,
utiliser de l’azote sec de façon à éviter que les parois de
la pompe n’absorbent de la vapeur aqueuse.
!
!
!!
Lorsque la pompe est utilisée pour le pompage de gaz
toxiques, inflammables ou radioactifs, suivre les procédures
appropriées à chaque gaz. Ne pas utiliser la pompe en
présence de gaz explosifs.
!
!
!!
Lorsque le réchauffeur est installé, éviter de toucher la pompe
pendant les opérations de chauffage et de refroidissement. La
température élevée peut provoquer des brûlures.
Ne pas approcher de dispositifs électroniques de la pompe. Le
champ magnétique environnant cette dernière peut entraîner
des dysfonctionnements desdits dispositifs.
DANGER!
DANGER!
!
!
ATTENTION!
!!
MAINTENANCE
Les pompes de la série Vacion Plus ne demandent aucun
entretien. Toute intervention doit être exécutée par un
personnel agréé.
!
!
!!
Avant toute intervention sur la pompe, la débrancher de la
haute tension.
En cas de mise au rebut d’une pompe, procéder à son
élimination dans le respect des normes nationales en vigueur.
DANGER!
6 87-900-102-01(A)
Page 12
GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional
information supplied by Varian before operating the equipment.
Varian will not be held responsible for any events occurring due
to non-compliance, even partial, with these instructions,
improper use by untrained persons, non-authorized
interference with the equipment or any action contrary to that
provided for by specific national standards.
The VacIon Plus series pumps are ion pumps commonly used
to create ultra-high vacuum, due to their cleanliness, ability to
pump different gases, and maintenance- and vibration-free
operation.
The following paragraphs contain all the information necessary
to guarantee the safety of the operator when using the
equipment. Detailed information is supplied in the appendix
"Technical Information".
This manual uses the following standard protocol:
INSTRUCTIONS FOR USE
WARNING!
!
!
!!
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
!
!
CAUTION
!!
The caution messages are displayed before procedures which,
if not followed, could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.
PREPARATION FOR INSTALLATION
The pump is supplied in a special protective packing. If this
shows signs of damage which may have occurred during
transport, contact your local sales office. When unpacking the
pump, be sure not to drop it and avoid any kind of sudden
impact or shock vibration to it. Do not dispose of the packing
materials in an unauthorized manner. The material is 100%
recyclable and complies with EEC Directive 85/399.
!
!
CAUTION
!!
In order to prevent outgassing problems, do not use bare hands
to handle components which will be exposed to vacuum.
Always use gloves or other appropriate protection.
NOTE
Normal exposure to the environment cannot damage the pump.
Nevertheless, it is advisable to keep it closed until it is installed
in the system, thus preventing any form of pollution by dust.
INSTALLATION
WARNING!
!
!
!!
The pump is heavy and must be handled by means of suitable
moving and handling tools.
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases,
or in explosive environments or those with a high fire risk.
During operation, to obtain the specified operation, the ambient
temperature must be between 0 °C and +85 °C.
!
!
CAUTION
!!
The pump should be kept sealed with its pinch-off tubulation
until it is ready for attachment to the vacuum system.
NO!
WARNING!
!
!
!!
To avoid injury, never connect the high voltage to the pump
before it is installed into the system and all the inlet flanges
are properly connected or blanked off.
7 87-900-102-01(A)
Page 13
INSTRUCTIONS FOR USE
The pump operation is optimized using one of the special
Varian controllers (Dual, MidiVac or MiniVac) only.
!
!
CAUTION
!!
The safety specifications agreement using the pump is
guaranteed using the Varian controller only.
The VacIon Plus pump can be installed in any position. For
convenience, a pump is usually mounted vertically with the inlet
up. For mounting other than vertical, the pump should be
supported using the mounting feet at the bottom of the pump.
For detailed information about the pump installation, see the
appendix “Technical Information”.
USE
All the instructions for the correct use of the VacIon Plus pumps
are contained in the control unit manual. Read the manual
carefully before using the pump. Rough pumping down to 1x10
Torr (mbar) is recommended for the most rapid starting.
Roughing with an oil-sealed mechanical pump is not desirable,
but when used, a trap in the roughing line is recommended to
reduce pressure due to water vapor and oils from the mechanical
pump. Be careful to minimize the time that the mechanical pump
is open to the system and ion pump, since mechanical pump
vapors will start diffusing into the system at pressures below
-1
Torr (mbar) and cause contamination. In systems where
1x10
oils must be completely eliminated, turbopump roughing pumps
should be used. Hygroscopic deposits and hydrogen absorption
into titanium may cause starting times to increase with age.
During exposure to air, the deposits of titanium compound absorb
water vapor. In subsequent start ups, pump heating causes
release of the water vapor and some previously pumped
hydrogen; thus, the starting time may be lengthened.
-4
Operating procedure
Check that the controller HV polarity is correct for the pump:
positive polarity for Diode pumps and negative for StarCell or
Triode pumps. Refer to the relevant pump control unit
instruction manual and follow the procedure below when
operating the pump:
1. With a clean roughing pump, establish a minimum starting
pressure in the vacuum system per the table on page 9 for
the type of ion pump.
2. Plug the control unit into a suitable power source and
switch the power ON.
3. Observe the voltage, current, and roughing pressure. If
started at 5x10
approximately 300 to 400 volts is typical. A current value
near the short-circuit current of the control unit could
indicate that an unconfined flow discharge exists in the
pump and system. A temporary rise in roughing pressure
will usually be noticed during any starting procedure.
4. Allow the roughing valve to remain open after turning on
the ion pump until an adequate starting pressure is
reached. If the ion pump voltage drops after closing the
roughing valves, reopen the valve for additional rough
pumping. As the pressure decreases, the voltage again will
rise, and the roughing valve may be closed.
5. When the voltage has increased to 2-3 kV, place the
control unit in the PROTECT condition. The system is now
automatically protected against pressure increases to 10
Torr (mbar) when the pump is left unattended. If such an
increase should occur, the control unit will be turned off
automatically.
-2
Torr (mbar), a controller voltage of
-4
6. The pressure in the pump can also be determined by
reading the current and converting this reading to pressure
with the appropriate pressure versus current graph shown
in the appendix “Technical Information” of this manual.
NOTE
The steps on the pressure – current charts are a characteristic
of the Dual step voltage operation. When the current drawn by
the VacIon pump reaches the specified values, the controller
will change the high voltage output to a lower applied voltage.
7. When venting the pump, use dry nitrogen. This will avoid
water vapor absorption on the pump walls.
WARNING!
!
!
!!
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal. Do not use the pump in presence of
explosive gases.
WARNING!
!
!
!!
When the heating element is installed, do not touch the pump
during the heating and cooling phases. The high temperature
may cause a serious damage.
!
!
CAUTION
!!
Do not put any electronic device near the pump otherwise the
magnetic field around it may cause a device malfunctioning.
MAINTENANCE
The VacIon Plus series pump does not require any
maintenance. Any work performed on the pump must be
carried out by authorized personnel.
WARNING!
!
!
!!
Before carrying out any work on the pump, disconnect it from
the High Voltage supply.
If a pump is to be scrapped, it must be disposed of in
accordance with the specific national standards.
8 87-900-102-01(A)
Page 14
TECHNICAL INFORMATION
DESCRIPTION OF THE VACION PUMP
The Varian VacIon Plus 150 pumps are ion pumps
and are available in four types:
• StarCell
• Triode
• Noble Diode
• Diode
-2
They operate in the pressure range from 10
below 10
-11
Torr (mbar). Virtually all gases and va-
to
pors can be pumped successfully with the ion
pump. The pumping speed will vary depending on
the system pressure, the gas type, and the applied
operating voltage. The latter can be optimized using Varian controllers to achieve the lowest possible operating pressure.
The VacIon Plus Triode and StarCell pumps allow
starting from as high as 5x10
-2
Torr (6.6x10-2
mbar), because ions are prevented from bombarding the system and pump walls at starting pressures, and have high speed for inert gases. The
VacIon Plus Diode and Noble Diode pumps require
a lower starting pressure (i.e. 10
-3
Torr (mbar)).
The Diode contains more titanium than triode
pumps, and thus has a higher hydrogen capacity
and longer life.
The tantalum in the Noble Diode pump enhances
the noble gas pumping capacity, although it somewhat reduces the high getterable gas pumping
speed that the standard diode pump provides.
The VacIon Plus StarCell is the latest variation of the
Triode configuration. Its patented design makes this
ion pump the only one that can handle a high amount
of Noble Gases (better than Noble Diode and Triode)
and Hydrogen (comparable to the Diode).
A positive polarity, high voltage supply is required to
operate Diode and Noble Diode pumps. A negative
polarity high voltage supply is required to operate Triode and StarCell pumps since the anode is grounded
and the cathode is held at negative potential.
The inlet ConFlat flange is a 6” (NW 100).
Fig. 1 shows the VacIon Plus 150 pump, Fig. 2
shows the main assemblies of the pump.
Inlet flange
Cover
Element
Magnet
High voltage
connector
Fig. 2 - Pump main assemblies
TECHNICAL SPECIFICATION
The following table details the main technical
specifications of the VacIon Plus 150 pumps.
MODEL
SPECIFICATION
Nominal pumping
speed for Nitrogen
(*) (l/s)
Operating life at
-6
mbar (hours)
1x10
Max starting current 300 mA
Max baking current 25 mA
Protect current 50 mA
Operating voltage
(max)
Maximum starting
pressure (mbar)
Ultimate pressure Below 10
Inlet flange 6” CFF (NW 100) AISI 304 ESR
Internal volume
(litres)
Maximum baking
temperature (°C)
Temperature limits
(°C): Pump
Magnet
Flange
Material: Body AISI 304 SST
Cathode Titanium Titanium/
Anode AISI 304 SST
Magnet Ferrite
Weight, lbs (kg) 94 (43)
STARCELL TRIODE
125 120 135 150
80,000 35,000 50,000 50,000
-7000 Vdc
+/- 10%
-2
≤1x10-3
≤1x10
12.1
350
400
350
500
NOBLE
DIODE
+7000 Vdc
+/- 10%
-11
Tantalum
DIODE
Titanium
Fig. 1 - VacIon Plus 150 pump
(*) Tested according to ISO/DIS 3556-1-1992
9 87-900-102-01(A)
Page 15
TECHNICAL INFORMATION
Figures 3 to 13 show the pumping speed vs pressure diagrams for saturated and unsaturated
pumps and the pressure vs current diagrams for
the same pump. The diagrams are for pumps controlled by means of a Dual controller.
VACION PLUS 150 STARCELL
The pumping speed of a newly regenerated (i.e.
baked) sputter ion pump decreases during operation until it reaches a stabilized level known as
"saturation" (nominal pumping speed). To saturate
the VacIon Plus 150 pumps, it normally requires an
amount of gas equal to 4.5 Torr-litres (mbar-litres).
Consequently, pumps can operate for extended
periods of time at low pressures in the nonsaturated state, if they are properly conditioned.
Fig. 3 - Pumping speed vs pressure for Nitrogen
Fig. 5 - Pressure vs current diagram
VACION PLUS 150 DIODE
Fig. 4 - Pumping speed vs pressure for Argon
Fig. 6 - Pumping speed vs pressure for Nitrogen
10 87-900-102-01(A)
Fig. 7 - Pressure vs current diagram
Page 16
VACION PLUS 150 TRIODE
Fig. 8 - Pumping speed vs pressure for Nitrogen
TECHNICAL INFORMATION
Fig. 9 - Pumping speed vs pressure for Argon
Fig. 10 - Pressure vs current diagram
VACION PLUS 150 NOBLE DIODE
Fig. 11 - Pumping speed vs pressure for Nitrogen
Fig. 12 - Pumping speed vs pressure for Argon
Fig. 13 - Pressure vs current diagram
11 87-900-102-01(A)
Page 17
TECHNICAL INFORMATION
OUTLINE DRAWING
The following figure shows the outline drawing for
the VacIon Plus pump.
Fig. 14 - VacIon Plus pump outline drawing
STRAY MAGNETIC FIELD
Curves of stray magnetic field strength along the
centre line of the pump and in the plane of the
flange as a function of distance from the pump are
shown in Figs. 16, 17, 18, 19 and 20, where Bx is
the magnetic field along X axis, By is along Y axis
and Bz is along Z axis.
Fig. 15 - VacIon Plus pump axis identification
Fig. 16 - Stray magnetic field from flange along X
axis (z = 0 mm)
12 87-900-102-01(A)
Page 18
Fig. 17 - Stray magnetic field from flange along Y
axis (z = 0 mm)
TECHNICAL INFORMATION
Fig. 20 - Stray magnetic field from flange along Z
axis
Fig. 18 - Stray magnetic field from flange along X
axis (z = 100 mm)
VACION PLUS PUMP INSTALLATION
Inspection procedure
VacIon Plus pumps are evacuated, baked out,
sealed and leak-checked at below 1x10
(mbar) prior to shipping. The following information
and procedures can be used to evaluate the vacuum integrity of a VacIon Plus pump before installation.
Visual inspection
Inspect the pump and magnet for physical damage
which may have occurred during shipment. Inspect
the pinch-off seal. If it is open, the pump is at atmospheric pressure.
WARNING!
!
!
!!
The pinch-off seal is extremely sharp. Be careful.
A VacIon Plus pump that has been exposed to atmosphere during shipment, or while in storage, will
operate properly if it has not been damaged.
-10
Torr
The pump is not harmed by such exposure, although it is good practice to keep it under vacuum
when not in use to exclude dust and the accumulation of water vapor from the environment.
Fig. 19 - Stray magnetic field from flange along Y
axis (z = 100 mm)
13 87-900-102-01(A)
Vacuum evaluation
The ion pump is shipped in an evacuated condition. Before removing the shipping flange for installation on a vacuum system, it is recommended that
the pump be started briefly to verify vacuum integrity and proper operation.
Page 19
TECHNICAL INFORMATION
To verify the vacuum integrity of the new pump before venting:
1. Connect the pump to the control unit as directed in the instruction manual of the control
unit.
WARNING!
!
!
!!
The high voltage which is present in the ion pump
from the control unit can cause severe injury or
death.
2. With the main power switch in the OFF position,
plug the control unit into a suitable power
source.
3. Turn the power to ON.
4. Observe the reading for an indication of one of
the following conditions:
− If the pump is free of leaks and is at a low
pressure, the pressure indication shall within
10 minutes fall to or below the 10
(mbar) range as the volume of gas is
pumped.
− If the pressure inside the pump is at or near
atmospheric level, an arc may strike inside
the high voltage feedthrough giving a popping sound and the pump current will fluctuate. If this occurs, turn the power OFF
immediately.
5. If the vacuum integrity has been lost, the pump
should be leak-checked with a mass spectrometer leak detector before installation on the
system.
-8
Torr
Short circuits
If there is a short circuit between the anode and
cathodes in the pump (or cathode to pump body),
the short-circuit current of the control unit will be
drawn and low voltage will be indicated. If a short
circuit exists in the control unit or high voltage cable and connector, low voltage will also be observed when the high voltage connector is
disconnected from the pump (refer to the control
unit manuals). An ohm meter reading on the pump
feedthrough may not be effective in finding a short.
Short circuits may be caused by mechanical shock
to the pump. If the pump is shorted, contact Varian.
TYPICAL INSTALLATION
A typical installation is shown in Fig. 21 and consists of:
1. VacIon Plus pump.
2. A Valve to seal off the pump from the rest of the
system (if required).
3. The control unit.
4. A clean roughing pump (i.e. turbo).
5. A thermocouple gauge capable of indicating
pressure from atmosphere to 10
range.
6. A valve to seal off the roughing pump from the
vacuum chamber. Roughing lines, are usually
made of stainless steel or copper tubing, or
other low vapour pressure material.
7. High voltage cable.
8. Backing pump (diaphragm or scroll).
-3
Torr/mbar
Fig. 21 - Typical installation
14 87-900-102-01(A)
Page 20
TECHNICAL INFORMATION
INLET FLANGE CONNECTION
The pump should be mounted allowing a sufficient
clearance for installation and removal of the high
voltage connector.
To achieve good performance of the ion pump at
low vacuum pressure, it is critical that atmospheric
pollution and dust must not enter the pump during
venting. This type of contamination will not be removed by the standard high temperature bake procedure and may degrade ion pump performance.
The pump should be kept sealed with its pinch-off
tubulation until it is ready for attachment to the
vacuum system. Before venting the pump, consult
the inspection procedure (see preceding paragraph).
Vent the ion pump by opening the pinch-off tubulation in a clean area free from smog, dust, pollen,
etc. Venting with dry nitrogen gas is further recommended. This can be done by placing a clean
polyethylene bag over the ion pump flange. Small
pumps can be placed inside of the bag. Purge the
bag with clean, dry nitrogen for several minutes,
then reach into the bag and release the internal
vacuum using pliers to open the copper tube pinchoff.
!
! CAUTION
!!
Do not open the pinch off-seal with a saw or
grinder. These methods will cause metal particles
to be drawn into the pump by the inrushing air as
the pump is opened.
flanges over NW 35 (2.75" o.d.) also mount
washers below the nuts and screw heads.
NOTE
Lubrication is essential to prevent galling of the nut
and screw after bakeout.
4. Use silver-plated screws or apply high temperature lubricant to the screw threads. Lubrication
simplifies sealing and disassembly. A recommended lubricant is Fel-Pro C-100.
5. Attach the nuts and tighten each one to 4.5 - 8
ft.-lbs (0.6 - 1.1 Kgm) of torque. After tightening
a nut, always tighten the opposite nut with respect to the center of the flange. This will partially close the gap between the flange faces.
6. Repeat the sequential tightening for two more
cycles.
7. Continue tightening the bolts until the flange
faces meet and a pronounced increase in
torque is felt.
Note that it’s not possible to install the screws from
the lower side, but only from the upper side of the
flange. To allow complete flexibility in the installation, a stud mounting kit is available (see Fig. 22).
For ordering information refer to the “VacIon Plus
pump replacement parts and accessories” paragraph.
WARNING!
!
!
!!
The pinch-off seal is extremely sharp. Be careful
when opening. Watch your fingers.
Use appropriate procedures to maintain the clean
condition of the pump and vacuum system.
Unscrew the main flange bolts. Remove the ConFlat flange and the copper gasket plate. Some particles of copper oxide may adhere to the outer
edge of the flange gasket. Be careful not to allow
them or any other foreign materials to fall into the
pump.
Connect the ion pump to the vacuum chamber with
a short length and large diameter tubulation in order to retain as much pumping speed as possible.
Proceed as follows:
1. Inspect the mating flanges for cleanliness and
absence of scratches on the knife edge.
2. Place a new copper gasket between pump
flange and vacuum chamber flange.
3. Bolt mating flanges of the pump to the chamber
with the screws provided with the ion pump. For
Fig. 22 - Stud mounting kit
CONTROL UNIT CONNECTION
WARNING!
!
!
The high voltage present in the high voltage cable
which connects the control unit to the ion pump,
can cause severe injury or death. Before mounting
the high voltage connector of the cable on the
pump high voltage feedthrough, or before removing it, be sure the main power is removed from the
control unit.
!!
15 87-900-102-01(A)
Page 21
TECHNICAL INFORMATION
WARNING!
!
!
To avoid injury, never connect the high voltage to
the pump before it is installed into the system and
all the inlet flanges are properly connected or
blanked off.
Before removing the high voltage connector of the
cable from the control unit, be sure the main power
is removed from the control unit. Wait at least 10
seconds after removing the main power from the
control unit, to allow capacitors to discharge completely.
To disconnect the coaxial high voltage cable from
the controller, slide the safety locking sleeve (very
little sleeve travel is required) from the control unit
and at the same time pull on the male end of the
cable connector to remove it from the socket on
the control unit.
SAFETY INTERLOCK
The VacIon Plus pump feedthrough in conjunction
with the cable P/N 929-0705, when used with the
Varian MidiVac and DUAL control units, allows the
operation of the “High Voltage Cable Safety Interlock” feature.
!!
!
!
!!
WARNING!
5. Position the connection box (3) on the upper
side of the pump in an oppose position of the
HV feedthrough with respect to the flange, and
fix it to the pump case.
Fig. 23 - Heating element
When the high voltage cable connector is disconnected from the VacIon Plus pump feedthrough,
the high voltage is automatically switched off by the
control unit
HEATER INSTALLATION
The heating element (Fig. 23) is composed of two
plates to be fixed to the pump case.
NOTE
It is advisable to make a 10 - 15 minutes initial operation of the heater in a ventilated room to allow
the evaporation of residual internal alloying elements.
To install the element proceed as follows (Fig. 24):
1. Remove the pole piece;
2. Position the smaller heating plate (1) into the
guides on the pump side. Be sure that the written heating plate side is towards you;
3. Position the other heating plate (2) inserting the
threaded pins positioned on the pump jacket
into the holes of the plate. Be sure that the written heating plate side is towards you;
Fig. 24 - Heating element installation
HEATER REPLACEMENT
To replace the heater element proceed as follows:
1. Disconnect the pump from the high voltage;
2. Disconnect the heater element from the main
supply;
3. Disconnect the heater plates from the pump
case;
4. Disconnect the heater connection box from
the upper side of the pump;
5. Install the new heater elements as described
in the paragraph “HEATER INSTALLATION”.
BAKEOUT OPERATION
When a VacIon pump does not reach the desired
base pressure, and there are no leaks, it is necessary to bake the system. This is done by heating
the pump and all the components in the system,
and is generally required to achieve base pressure
less than 10
-8
Torr (mbar).
4. Reinstall the pole piece;
16 87-900-102-01(A)
Page 22
TECHNICAL INFORMATION
1. Heat the pump body and the system with a
bakeout oven unit or heating strips to temperatures between 150 °C and 250 °C (250 °C is the
maximum allowable for most bakeable high
voltage cables). This temperature is high
enough to degas the pump surfaces of water
vapor without damaging the magnet and high
voltage connector. Note that the system components must be compatible with the bakeout
temperature. The heating must be approximately even on all surfaces or evaporated water
will condence on the colder surfaces resulting in
an incomplete bake and preventing achievement of UHV vacuum pressure.
2. Leave the pump control unit on and monitor the
pressure. Varian recommends that current during bake not exceed 25 mA; if this value is exceeded, turn the bakeout off and then on again
when low pressure is restored. To control the
heaters and to monitor the high pressure limit
during bakeout in automatic mode, an automatically controlled relay may be used.
3. Bake the VacIon Plus pump for at least 24
hours. Longer bakeout periods are recommended when the pump has been used with
heavy gas loads or when UHV pressure, 10
Torr (mbar) or less is desired.
4. As the pump and system cool down to room
temperature, a drop in pressure should be observed.
Note that the ion pump can be also baked when
switched off, into an external turbo pump through a
bakeable isolation valve. This method gives the
best vacuum performance.
-9
WARNING!
!
!
!!
Do not touch the pump during the heating and
cooling phases. The high temperature may cause
serious damage.
OPERATING PROCEDURE
1. Using a clean roughing pump, evacuate the
system to a minimum starting pressure per the
chart on pages 10 and 11 for the type of ion
pump. 10
mended. A turbo-molecular roughing pump is
recommended.
2. When starting an ion pump, a slight increase in
vacuum pressure is normal as the internal
components are heated and outgassed. If possible leave the roughing pump connected to
the system while starting the ion pump. This
will make the startup faster and easier.
3. Connect the control unit to a suitable power
source and switch the power on.
4. Switch on high voltage to the pump and observe the current and voltage. Fastest starting
is obtained using a high applied voltage, 7 kilovolts for example. The applied voltage may be
reduced later to optimize pumping and achieve
the lowest vacuum pressure.
5. If started at 10
start at approximately 800 volts and increase to
full voltage as the pump starts operating. The
current will start at several milliamps and slowly
decrease to microamps or nanoamps as low
vacuum pressure is achieved.
-4
Torr (mbar) or less is recom-
-4
Torr (mbar), the voltage will
Bakeout of VacIon pump with the integral heaters
1. The integral heaters are to be powered with the
appropriate voltage. (Please refer to the inscription on the heaters to apply correct voltage).
2. The integral heaters are designed to provide a
temperature of 250 °C to 300 °C when the
pump is wrapped in a 3-fold aluminum foil.
NOTE
A three-layer foil wrapping is advisable and sufficient to achieve full bakeout/regeneration if the
standard European heaters (220 Vac) are operated
at 240 Vac, thus preventing overheating.
3. Bakeout the VacIon pump for 24 hours. If the
pump is used in heavy gas load applications, it
is recommended to bakeout the pump for a
longer period.
4. Wait until the pump cools down to room temperature and recovers its base pressure before
using it in the application.
6. When first starting the pump, if the voltage decreases instead of increasing, reduce the vacuum pressure then start the ion pump again.
7. When the pump reaches its full operating voltage, you may close the roughing valve.
8. If the pump does not start after 30 minutes of
pumping, see the section PUMP
TROUBLESHOOTING.
9. Once the pump reaches its base pressure with
stable voltage and current, the ion pump may
be baked at high temperature if required per
the section titled BAKEOUT OPERATION.
10. To stop the ion pump, simply switch off the
high voltage. The pump surfaces will continue
to pump for a few minutes de
system pressure.
11. When venting the pump use clean,
gen. This will avoid water absorption on the
pump surfaces and make subsequent pump
wns easier.
do
pending on the
dry nitro-
17 87-900-102-01(A)
Page 23
TECHNICAL INFORMATION
MAINTENANCE
WARNING!
!
!
!!
The high voltage present in the high voltage cable
which connects the control unit to the ion pump,
can cause severe injury or death. Before mounting
the high voltage connector of the cable on the
pump high voltage feedthrough, or before removing it, be sure the main power is removed from the
control unit.
Before removing the high voltage connector of the
cable from the control unit, be sure the main power
is removed from the control unit. Wait at least 10
seconds after removing the main power from the
control unit, to allow capacitors to discharge completely.
VacIon Plus pumps are maintenance free. In case
of life time expiry or premature failure of the pump,
please contact your nearest Varian sales/service
office for repair.
The VacIon Plus 150 pumps are designed with exchangeable high-voltage feedthrough and pump
elements.
Exchange of the high voltage feedthrough.
1. Remove the 6 bolts of the Mini-ConFlat flange
connection (see Fig. 25).
2. Remove the cable connection disc.
3. Gently relieve the feedthrough from the metal
gasket connection and turn the feedthrough
counterclockwise until it is completely detached
from the internal high voltage threaded connection.
4. Replace the feedthrough and the copper gas-
ket, making sure that the feedthrough is connected to the pumps internal connector. Check
that the feedthrough is not shorted.
5. Bake out the pump while it is operating, and
leave it to cool down; then verify that the base
pressure is below 10
-9
Torr (mbar).
Exchange of pumping element
!
! CAUTION
!!
The high voltage feedthrough contains a ceramic
insulator that can be damaged if excessive force is
applied in torque, in bending, or in tension. When
installing or removing the feedthrough, the applied
torque should not exceed 2 Nm. Rotate the
feedthrough gently when making the threaded
connection to avoid excessive force.
1. Remove the internal high-voltage connections.
2. Remove the element holding brackets.
3. Pull the element out of the pocket and remove it
through the inlet flange.
4. Clean the internal part of the pump with the appropriate solvent.
5. Put in the new element through the inlet flange.
Make sure that the element is fixed at its rear
by the two press-formed buttons of the element
pocket, and at its front by the element holding
clamp.
6. Reattach the high-voltage connections and test
for continuity from the feedthrough.
Fig. 25 - High voltage feedthrough connection
Leakage current check
If the pump current reading is to be used as pressure measurement, check the pump leakage currents as follows:
1. Turn off the pump control unit.
2. Remove the pump magnet.
3. Turn on the pump control unit and wait for current stabilization. The current reading should
not be higher than 10 nA at 3 kV. Make sure
that the control unit and the high voltage cable
leakage current is negligible.
4. If leakage current comes from the pump, perform "high-potting" per the following procedure;
then recheck the pump and install the magnet.
5. If it is not possible to "high-pot" the pump, the
pressure reading is biased by the leakage current value.
7. Place a blank flange over the pump inlet and
leak-check it with a leak detector.
8. Bake out the blanked off pump while it is
operating, and leave it to cool down; then verify
that the base pressure is below 10
(mbar).
18 87-900-102-01(A)
-9
Torr
High-potting
A constant pump current when no vacuum leak exists is often caused by field emission currents
which prevent the use of the pump current as a
UHV pressure indicator. To reduce this field emission current, "high potting" should be performed.
"High potting" is the term used to describe the ap-
Page 24
TECHNICAL INFORMATION
plication of higher than normal operating voltage
(10-12 KV, 20-50 mA) for the purpose of burning
off "whiskers" (sharp edges) on the pump cathode.
High potting should be done under vacuum and
preferably without pump magnets installed (to reduce the drawn current).
The output of an appropriately sized AC transformer (i.e. neon sign type) may be applied to the
pump. High-potting should be done carefully and in
voltage steps since uncontrolled arcing inside the
pump can cause permanent damage. Slowly
increase the applied voltage and watch the current
PUMP TROUBLESHOOTING
SYMPTOM POSSIBLE CAUSE CORRECTION PROCEDURE
1) – Slow starting Starting vacuum pressure too high. Reduce pressure to 10-5 Torr rec-
2) – Slow starting (more than 30
minutes).
Air leaks which limit pressure to
above 10
longer starting time.
-6
Torr (mbar) and cause
meter for indication of arcing inside the pump as
whiskers are burned away. If arcing occurs wait at
this voltage until the current is stable again. Then
slowly increase voltage again in steps up to a
maximum of 12 kV. The current should never exceed 50 mA.
WARNING!
!
!
!!
Voltages developed in the High Potter power supply are potentially lethal. Use caution during operation and ensure correct grounding connection.
-4
ommended 10
Leak check the vacuum system
with a helium leak detector.
Torr minimum.
3) – Slow pump-down due to long
exposure of viton parts to air.
4) – Slow pump-down due to ab-
sorption of vapours on pump and
system walls.
5) – Slow starting or slow pump-
down.
6) – Current higher than expected
at any given pressure.
7) – System fails to achieve de-
sired UHV vacuum pressure.
Viton releases considerable gas
after long exposure to air.
(A bell-jar system which reached
1.5 x 10
hours after 30 minutes air exposure, will only reach 7.5 x 10
(1 x 10
hours air exposure).
Vapours and gases admitted to a
system are absorbed on the walls
of the system and pump. Subsequent reduction in pressure depends on the rate of depletion of
this vapour. Heavy hydrocarbons
are most troublesome because of
their relative low vapour pressure
and they are very difficult to remove, even by baking.
High voltage feedthrough is leaking.
Ion pump leakage current causing
higher pressure reading.
System not fully baked. Water vapour limits base pressure.
-8
Torr (2 x 10-8 mbar) in 24
-8
-7
mbar) in 24 hours after 20
Torr
With the system under vacuum,
pump for several days, or heat to
100-150°C for up to 15 hours.
Bake the system walls, thereby accelerating the desorption process.
Baking mobilizes the vapours so
they can be cracked and pumped
by discharge (see para.
“BAKEOUT OPERATION”).
Replace the feedthrough.
Highpot the pump.
Bake the system walls, thereby accelerating the desorption process.
Baking mobilizes the vapours so
they can be cracked and pumped
by discharge (see para.
“BAKEOUT OPERATION”).
8) – System fails to achieve de-
sired UHV vacuum pressure.
19 87-900-102-01(A)
System not appropriately cleaned
for UHV. Excessive outgassing
from walls limits base pressure.
Clean all components for UHV and
bake the system again.
Page 25
VACION PLUS PUMP REPLACEMENT PARTS AND ACCESSORIES
PART NUMBER
TECHNICAL INFORMATION
DIODE NOBLE
DIODE
Basic pump 919-1510 919-1520 919-1530 919-1540
Pump with options
With heaters installed (120 V)
(220 V)
Double-ended 919-1550 919-1560 919-1570 919-1580
Double-ended with heaters (120 V)
installed (220 V)
HV rad. Resist. cable, with interlock 929-0705
HV Feedthrough 959-5125
Pumping elements (q.ty 2 needed) 919-9040 919-9045 919-9035 919-9030
Heaters (power: 480 W) (120V)
(220V)
Copper gasket for 6” inlet flange (10-pack,
individually sealed)
919-1511
919-1512
919-1551
919-1552
Cables and accessories
Replacement parts
919-1521
919-1522
919-1561
919-1562
919-0073
919-0072
FG-0600-CI
TRIODE STARCELL
919-1531
919-1532
919-1571
919-1572
919-1541
919-1542
919-1581
919-1582
Nut and bolt set for 6” inlet flange FB-0450-C12
Copper gasket for 1 1/3" CF feedthrough
flange (10-pack, individually sealed)
Nut and bolt set for 1 1/3" CF feedthrough
flange, 8-32x3/4 (25-pack)
For a complete overview of Varian's extensive vacuum product line, please refer to the Varian Vacuum Catalogue.
VACION PLUS PUMP CONTROLLERS
The following controller series are available to supply the VacIon Plus pumps:
• MiniVac
• MidiVac
• Dual
Please refer to the Varian Vacuum Catalogue to choose the correct controller for each pump.
FG-0133-CI
FB-0133-C
20 87-900-102-01(A)
Page 26
Request for Return
1. A Return Authorization Number (RA#) WILL NOT be issued until this Request for Return is completely filled out,
signed and returned to Varian Customer Service.
2. Return shipments shall be made in compliance with local and international Shipping Regulations (IATA, DOT, UN).
3. The customer is expected to take the following actions to ensure the
of workers at Varian: (a) Drain any oils or
Safety
other liquids, (b) Purge or flush all gasses, (c) Wipe off any excess residues in or on the equipment, (d) Package the
equipment to prevent shipping damage, (for Advance Exchanges please use packing material from replacement unit).
4. Make sure the shipping documents clearly show the RA# and then return the package to the Varian location nearest you.
North and South America
Varian Vacuum Technologies
121 Hartwell Ave
Lexington, MA 02421
Phone : +1 781 8617200
Fax: +1 781 8609252
Europe and Middle East
Varian SpA
Via Flli Varian 54
Asia and ROW
Varian Vacuum Technologies
Local Office
10040 Leini (TO) – ITALY
Phone: +39 011 9979111
Fax: +39 011 9979330
CUSTOMER INFORMATION
Company name: ..………………….……..……………….………………………………..……………………...…………..….
Contact person: Name: ……………………………………..… Tel: ……………………….…...…………….….…....
Fax: …………………………….…...…..…… E-Mail: ..……………………..…………..…..…..…..
Ship Method: …………….……....…… Shipping Collect #: ………….…..………… P.O.#: ………………….…......………..
Europe only: VAT reg. Number: ………………..……………... USA only: Taxable Non-taxable
Customer Ship To: ………………………….……… Customer Bill To: …………………..……………...
……………..…………………... ..………………………………...
………………..………………... ..………………………………...
PRODUCT IDENTIFICATION
Product Description Varian P/N Varian S/N Purchase Reference
TYPE OF RETURN (check appropriate box)
Paid Exchange Paid Repair
Credit Shipping Error
Warranty Exchange
Evaluation Return
Warranty Repair
Calibration
Loaner Return
Other ……………….
HEALTH and SAFETY CERTIFICATION
Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or
RADIOACTIVITY. Call Varian Customer Service to discuss alternatives if this requirement presents a problem.
The equipment listed above (check one):
HAS NOT
been exposed to any toxic or hazardous materials
OR
been exposed to any toxic or hazardous materials. In case of this selection, check boxes for any materials that
HAS
equipment was exposed to, check all categories that apply:
Toxic Corrosive Reactive Flammable Explosive Biological Radioactive
List all toxic or hazardous materials. Include product name, chemical name and chemical symbol or formula.
.……………………………………………………………………………………………………………………..
Print Name: …………………………………. Customer Authorized Signature: ……………...…………………….
Print Title: …………………………………... Date: ..…../..…../……
If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed,
NOTE:
will be held responsible
employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
for all costs incurred to ensure the safe handling of the product, and
for any harm or injury to Varian
is liable
the customer
Do not write below this line
Notification (RA)#: ……………………….……….. Customer ID#: ……….…………. Equipment #: ……………………..
Page 27
Request for Return
FAILURE REPORT
TURBO PUMPS and TURBOCONTROLLERS
POSITION PARAMETERS
Does not start
Does not spin freely
Does not reach full speed
Mechanical Contact
Cooling defective …………………. OPERATION TIME:
Noise
Vibrations
Leak
Overtemperature
Vertical
Horizontal
Upside-down
Other: Temp 2: Purge flow:
TURBOCONTROLLER ERROR MESSAGE:
ION PUMPS/CONTROLLERS VALVES/COMPONENTS
Bad feedthrough
Vacuum leak
Error code on display
Customer application:
Poor vacuum
High voltage problem
Other
Customer application:
LEAK DETECTORS INSTRUMENTS
Cannot calibrate
Vacuum system unstable
Failed to start
Customer application:
No zero/high backround
Cannot reach test mode
Other
Customer application:
PRIMARY PUMPS DIFFUSION PUMPS
Pump doesn’t start
Doesn’t reach vacuum
Pump seized
Customer application:
Noisy pump (describe)
Over temperature
Other
Customer application:
FAILURE DESCRIPTION
(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
Power: Rotational Speed:
Current: Inlet Pressure:
Temp 1: Foreline Pressure:
Main seal leak
Solenoid failure
Damaged sealing area
Gauge tube not working
Communication failure
Error code on display
Heater failure
Doesn’t reach vacuum
Vacuum leak
Bellows leak
Damaged flange
Other
Display problem
Degas not working
Other
Electrical problem
Cooling coil damage
Other
NOTA: Su richiesta questo documento è disponibile anche in Tedesco, Italiano e Francese.
REMARQUE : Sur demande ce document est également disponible en allemand, italien et français.
HINWEIS: Auf Aufrage ist diese Unterlage auch auf Deutsch, Italienisch und Französisch erhältlich.
Page 28
Sales and Service Offices
Argentina
Varian Argentina Ltd.
Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel: (54) 1 783 5306
Fax: (54) 1 786 5172
Australia
Varian Australia Pty Ltd.
679-701 Springvale Road
Mulgrave, Victoria ZZ 3170
Australia
Tel: (61) 395607133
Fax: (61) 395607950
Benelux
Varian Vacuum Technologies
Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel: (31) 343 469910
Fax: (31) 343 469961
Brazil
Varian Industria e Comercio Ltda.
Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel: (55) 11 3845 0444
Fax: (55) 11 3845 9350
Canada
Central coordination through:
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426
China
Varian Technologies - Beijing
Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 1000031 P.R. China
Tel: (86) 10 6608 1530
Fax: (86) 10 6608 1534
France and Wallonie
Varian s.a.
7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: (33) 1 69 86 38 13
Fax: (33) 1 69 28 23 08
Germany and Austria
Varian Deutschland GmbH
Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: (49) 6151 703 353
Fax: (49) 6151 703 302
India
Varian India PVT LTD
101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: (91) 11 5548444
Fax: (91) 11 5548445
Italy
Varian Vacuum Technologies
Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350
Japan
Varian Vacuum Technologies
Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: (81) 3 5232 1253
Fax: (81) 3 5232 1263
Korea
Varian Technologies Korea, Ltd.
Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: (82) 2 3452 2452
Fax: (82) 2 3452 2451
Mexico
Vari a n S.A.
Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: (52) 5 523 9465
Fax: (52) 5 523 9472
Ta i w a n
Varian Technologies Asia Ltd.
18F-13 No.79, Hsin Tai Wu Road
Sec. 1, Hsi Chih
Taipei Hsien
Taiwa n, R .O.C.
Tel: (886) 2 2698 9555
Fax: (886) 2 2698 9678
UK and Ireland
Vari a n Ltd.
28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel: (44) 1932 89 8000
Fax: (44) 1932 22 8769
United States
Vari a n Vacuu m Technol o gies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426
Other Countries
Vari a n Vacuu m Technol o gies
Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350
Internet Users:
Customer Service & Technical Support:
vtt.customer.service@varianinc.com
Wor ldwi de Web Site :
www.varianinc.com/vacuum
Order On-line:
www.evarian.com
Representatives in most countries
11/01
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