Varian Turbo-V 300 SQ 275 Instruction Manual

87-900-944-01 (C)
JULY 2006

(GB) INSTRUCTION MANUAL

Turbo-V 300

75 Vdc

Box Controller

Model SQ 275

vacuum techno lo gie s

Turbo-V 300 75 Vdc Box Controller

SAFETY SUMMARY ……............................................................................……………. 1

INTRODUCTION ...................................................................………………………………………... 1

TECHNICAL INFORMATION .....................................................................…………… .. 2

DESCRIPTION ...................................................................…………………………………………... 2

TURBO-V 300 75 VDC BOX CONTROLLER DESCRIPTION ........……………………………….. 2

CONTROLLER SPECIFICATIONS ..........................................………………………………………. 2

CONTROLLER OUTLINE ………............................................……………………………………….. 3

INSTALLATION .........….....................................................…………………………………………… 4

Pump Connector

.........….....................................................…………………………………...

4

I/O Specifications

.........…........….........................................…………………………………..

4

9-pin “D” Type Connector Pin Assignement

.........…........….....……………………………….

4

Serial Communication Port …………………..

.........…........….....………………………………

5

RS 232 Communication Descriptions

.………….....…........….....………………………………

5

Transmission Channel Characteristics

.…………....…........….....……………………………...

5

Message Structure

.………………………………......…........….....……………………………..

5

Examples

..…………..……………………………......…........….....……………………………..

6

Serial Communication Windows

.………………......…........….....……………………………..

7

OPERATION .……………..……………………………......…........….....………………………………. 8

Switching on/off the Pump

.………...………………..…........….....……………………………..

8

Low Speed Activation/Deac tiv at ion

.………...………………..…....…………………………….

8

MAINTENANCE .……………..……………………………......…........….....…………………………… 8

Error Messages

.………...……………..…........….....…………………………………………….

8

Error Code Table

.………………………………...………………..…....………………………….

8

PCB JUMPERS .……………..……………………………......…........….....…………………………… 9

SAFETY SUMMARY

1 87-900-944-01 (C)

INTRODUCTION

Operators and service personnel must be aware of all
hazards associated with this equipment. They must
know how to recognize hazardous and potentially
hazardous conditions, and know how to avoid them.
The consequences of unskilled, improper, or careless
operation of the equipment can be serious.

This product must only be operated and maintained by
trained personnel. Every operator or service person
must read and thoroughly understand
operation/maintenance manuals and any additional
information provided by Varian.

All warnings and cautions should be read carefully and
strictly observed. Address any safety, operation, and/or
maintenance questions to your nearest Varian office.

The following format is used in this manual to call
attention to hazards:

!

Warning are used when failure to observe instructions
or precautions could result in injury or death.

CAUTION!

Cautions are used when failure to observe instructions
could result in damage to equipment, whether Varian
supplied or other associated equipment.

NOTE

Infomation to aid the operator in obtaining the best
performance from the equipment.

DISPOSAL

Meaning of the "WEEE" logo found in labels

The following symbol is applied in accordance with the
EC WEEE (Waste Electrical and Electronic Equipment)
Directive.
This symbol (valid only in countries of the European
Community) indicates that the product it applies to
must NOT be disposed of together with ordinary
domestic or industrial waste but must be sent to a
differentiated waste collection system.
The end user is therefore invited to contact the supplier
of the device, whether the Parent Company or a
retailer, to initiate the collection and disposal process
after checking the contractual terms and conditions of
sale.

WARNING!

TECHNICAL INFORMATION

2 87-900-944-01 (C)

DESCRIPTION

The Turbo-V 300 box controller is a microprocessor­controlled, solid-state, frequency converter with self­diagnosis and protection features.

The controller drives the Turbo-V 300 pump series by
controllling the voltage and current respect to the speed
reached by pump.

It incorporates all the facilities required for the operation
of the Turbo-V 300 pump series: pump start/stop, digital
current and speed control, analog signals for external
indicators.

The power is externally supplied.
All the input/output connections are performed on:

• 9 pin “D” type male connector attached to a cable
400 mm long for I/O and Electrical DC supply.

• Pump connection with 400 mm long cable.

• 9 pin “D” type connector for RS232 connection.

TURBO-V 300 75 VDC BOX CONTROLLER
DESCRIPTION

The controller is a solid-state frequency converter which
is driven by a single chip microcomputer and is
composed of a PCB which includes all the circuitry
necessary for its operation.

The microcomputer generates the variable output
voltage according to the software and the gas load
condition of the pump.

Moreover, it manages signals from sensors,
input/output connection information, and gives output
for a fully automatic operation.

The controller can be operated via remote signals
through an RS-232 connection.

The controller can be operated in local mode through
suitable switches connected between the input pins of
the TV300 connector.

CONTROLLER SPECIFICATIONS

Input:

- Voltage

- Current

75 Vdc
with 2 Vpp max ripple

3.0 A max.
Fuse T 3 A
Output:

- Voltage

- Frequency

- Power

80 Vac nominal ±10%,
3-phase

933 Hz, ±2%
165 W maximum

Compliance to Norms:

- Radio interferences

- ESD

- BURST

- Radiated RF
immunity

- Safety

EN 55011 Class Group 1
EN 61000/4/2
EN 61000/4/4
EN 61000/4/3

EN 61010/1
Installation category II
Operating temperature 0°C to + 40 °C
Storage temperature -20°C to + 70°C
Cooling Internal fan
Weight 0.5 Kg (1.1 Ibs)

!

There can be 75 Vdc voltage referred to ground on the
pump cable or on the serial connector.

WARNING!

TECHNICAL INFORMATION

3 87-900-944-01 (C)

CONTROLLER OUTLINE

The outline dimension for the controller are shown in
the following figure:

Controller outline

TECHNICAL INFORMATION

4 87-900-944-01 (C)

INSTALLATION

Inspect the controller for any shipping damage.
Should the controller be connected to a host computer

via the-RS-232 interface, a suitable cable must be
prepared.

In the following paragraphs are detailed the input/output
signals.

NOTE

The box installed into the customer system must be
positioned so that cold air (forced or natural convection)
can flow around.

Pump Connector

The signals of J3 connector are the following:

• Pin C 80 Vac 3-phase output to pump motor stator
(phase T).

• Pin D 80 Vac 3-phase output to. pump motor
stator (phase S).

• Pin B 80 Vac 3-phase output to pump motor stator
(phase R).

• Pins A/F Pump temperature sensor.

• Pin E Ground

I/O Specifications

START/STOP:

- START command

- STOP command

Low <0.8 Vdc
High 4 to 15 Vdc

Analog output:

- Output impedence

- Minimum load:

0 to 10 Vdc (proportional to
speed)

*

(0 to 10 V ≡ 0 to 100% speed)

0.1 Ω

2 KΩ (5 mA)

Normal operation signal:

- Open Collector Speed <80%: OFF (pull-up
to 15 Vdc)

Speed >80%: ON (<0.8 Vdc)

Current rating 60 mA max
Low speed command: Low (<0.8 Vdc)

9-pin “D” Type Connector Pin Assignement

Pin
number

Description

1 Start/Stop input: close to pin 5/6 to start the

pump

2 Pump in Normal output: closed to pin 5/6 when

pump speed is higher than 80% of full speed
3 Earth (Ground)
4 Analog output proportional to pump speed

(positive)
5-6 Electrical supply (0 V)
9 Low speed input: close to pin 5/6 to select Low

Speed mode
7-8 Electrical supply (75 V) (positive)

* Minimum speed reading

in STOP condition = 100 Hz (6 KRPM)

TECHNICAL INFORMATION

5 87-900-944-01 (C)

Serial Communication Port

Communication serial port connections and mini- mum
connection configuration are shown in the following
figures. The communication port mating connector is
supplied with the RS 232 PCB (AMP/Cannon or
equivalent 9-pin "D" type male connector). The external
cable (not supplied) between the host computer and the
controller does not require crossed wires so that signals
are connected correctly .
For example, the Transmit data signal from controller
(pin 2) must be connected to the host computer's
Receive data line (pin 2) and vice versa. Consult the
host computer's instruction manual for its serial port
connections

NOTE

Varian cannot guarantee compliance with FCC
regulations for radiated emissions unless all external
wiring is shielded, with the shield being terminated to
the metal shroud on the O-subconnector. The cable
should be secured to the connector with screws.

!

In order to avoid possible conflicts on the Serial Line, it
is advisable to use a 3 wire shielded cable for the TxD,
RxD and GND connections and to leave all the other
pins unconnected.

RS 232 Communication Descriptions

Communication RS 232 serial port connections

Transmission Channel Characteristics

levels: RS 232/RS 422
baud rate: 9600/4800

programmable by a jumper on the

board
character length: 8 bits
parity: none
stop bit: 1 bit
protocoll: master (PC) / slave (converter)

In this case the value to be assigned to the ADDRESS
field must be 80 hex (for RS 232).

Message Structure

(request and answer have the same format)
The master system (PC) starts every session sending

the following message to the slave units connected:
<STX> / <ADDR> + <WINDOW> + <COMMAND> +

<DATA> + <ETX> + <CRC>
where:
<STX>= 0x02

<ADDR> = 0x80 (for RS 232 and

RS 422 only)

<ADDR> = 0x80 + device number (0...31)

0xFF: brodcasting command
(recognized by all the devices, it
doesn’t implicate any answer)
(for RS 485 only)

<WINDOWS>= '000'...' 999' window number

the meaning of the window
depends to the device type

<COMMAND>= 0x30 :window value reading

0x31 :window writing

<DATA> = alphanumeric ASCII string

containing, in the case of writing
operation, the parameter to input
into the window addressed by
the field <WINDOW>This field
may have variable length
according to the data type
contained in the window where
you are working in. In the case of
reading request of a window, the

data field doesn’t exist.
<ETX>= 0x03
<CRC>= XOR among all the characters

following <STX>=(with exception of

<STX>), including the end

character <ETX> hexadecimally

encoded by two ASCII characters.

WARNING!

TECHNICAL INFORMATION

6 87-900-944-01 (C)

When a slave device is addressed by the master:

1) In case of reading request of the value contained in
a window, the slave answers a string equal to the
one sent by the master but in addition there is the
field <DATA> containing the value of the window.
The format of the field <DATA> depends to the
window type.

The different types are:

Length Characters

Permitted

Logic (L) 1 ‘0’=OFF

‘1’=ON

Numeric (N) 6 ‘0’...’9’

(Justifield to the right
with ‘0’)

Alphanumeric (A) max 10 ‘ ‘...’_’

Examples

Command : START
Source : PC
Destination : Inverter

02 80 30 30 30 31 31

03 42 33

STX ADDR WINDOW WR ON ETX CRC

Source : Inverter
Destination : PC

02 80 06

03 38 35

STX ADDR ACK ETX CRC

Command : STOP
Source : PC
Destination : Inverter

02 80 30 30 30 31 30

03 42 32

STX ADDR WINDOW WR

OF

F

ETX CRC

Source : Inverter
Destination : PC

02 80 06

03 38 35

STX ADDR ACK ETX CRC

Command : SOFT-START (ON)
Source : PC
Destination : Inverter

02 80 31 30 30 31 31 03 42 32

STX ADDR WINDOW WR ON ETX CRC

Source : Inverter
Destination : PC

02 80 06

03 38 35

STX ADDR ACK ETX CRC

Command : SOFT-START (OFF)
Source : PC
Destination : Inverter

02 80 31 30 30 31 30 03 42 33

STX ADDR WINDOW WR

OF

F

ETX CRC

Source : Inverter
Destination : PC

02 80 06

03 38 35

STX ADDR ACK ETX CRC

Command : CURRENT
Source : PC
Destination : Inverter

02 80 32 30 30 30 03 38 31

STX ADDR WINDOW RD ETX CRC

Source : Inverter
Destination : PC

02 80 32 30 30 30 30 30 30 2E 30 30 03 39 44

STX ADD WINDOW RD 000.00 ETX CRC

Command : FREQUENCY
Source : PC
Destination : Inverter

02 80 32 30 33 30 03 38 32

STX ADDR WINDOW RD ETX CRC

Source : Inverter
Destination : PC

02 80 32 30 33 30 30 30 30 30 34 32 03 38 34

STX ADD WINDOW RD 000042 ETX CRC

Command : ERR-CODE
Source : PC
Destination : Inverter

02 80 32 30 36 30 03 38 37

STX ADDR WINDOW RD ETX CRC

Source : Inverter
Destination : PC

02 80 32 30 36 30 30 30 30 30 30 30 03 38 37

STX ADD WINDOW RD 000000 ETX CRC

TECHNICAL INFORMATION

7 87-900-944-01 (C)

Serial Communication Windows

WIN TYPE R W Description

000 L X X START/STOP (1= START ; 0= STOP)
008 L X X REMOTE/SERIAL Configuration (1= Remote ; 0= Serial)

100 L X X SOFT START YES/NO (1= YES ; 0= NO) Default= 0
107 L X X ACTIVE STOP (0=NO; 1=YES) Default= 1
108 N X X BAUD RATE (3-4) [4800-9600] Default= 4
109 L X PUMP LIFE RESET [Write “1” to Reset]
120 N X X SET ROTATIONAL FREQUENCY [Hz] 150 Hz < = F_imp < = FMAX
121 N X X MAX SETTABLE ROTATIONAL FREQUENCY [Hz] F<=F_MAX_ABS
130 N X RAMP CURRENT [mA]

200 N X CURRENT [mA]
201 N X VOLTAGE[V]
202 N X POWER [W]
203 N X DRIVING FREQUENCY [Hz]
204 N X PUMP TEMPERATURE [°C]
205 N X STATUS [0=stop; 1=interlock; 2=ramp; 3=regulation; 4=brake; 5=normal; 6=failure]
206 N X ERROR CODE:

Too high load No connection
Short circuit Pump overtemp
SoftStart Not Ended Controller overtemp
RunUpTime Not Reached Power fail

211 N X PUMP SENSOR TEMPERATURE READING [208= 25°C - 128= 60°C]
216 N X AMBIENT SENSOR TEMPERATURE READING

300 N X CYCLE TIME [min]
301 N X CYCLE NUMBER
302 N X PUMP LIFE [h]
319 A X Controller Model
320 A X Base Pump Model Number (8 characters)
321 A X Modified Standard Model Number (4 characters)
323 A X Controller Serial Number (5 characters)
325 A X Electrical Modification Level (10 characters)
400 A X CRC PROGRAM LISTING [QE7xxxx]

401 A X CRC BOOTLOADER [BL1xxxx]
402 A X CRC PARAMETER LISTIN G [PA7xxxx]
404 A X CRC FILE PARAMETER STRUCTURE
406 A X PROGRAM LISTING CODE & REVISION
407 A X PARAMETER LISTING CODE & REVISION

500 L X MONITOR MODE

WIN = Window L = Logical
R = Read N = Numeric
W = Write A = Alphanumeric

7 0

TECHNICAL INFORMATION

8 87-900-944-01 (C)

OPERATION

Make all vacuum manifold and electrical connections
and refer to Turbo-V pump instruction manual prior to
operating the Turbo-V controller.

!

To avoid injury to personnel and damage to the
equipment, if the pump is laying on a table make sure it
is steady.
Never operate the Turbo-V pump if the pump inlet is not
connected to the system or blanked off.

The controller operates completely automatically after
the remote start command is given.

Switching on/off the Pump

To switch on the pump it is necessary to short circuit pin
1 and pins 5-6 (ground) of the 9 pin “D” type connector.

To switch off the pump it is necessary to remove the
short circuit between pins 1 and 5-6.

Analog output: 0 to 10 Vdc proportional to speed (0

to 10 V ≡ 0 to 100% speed).
This output is active also during the
pump “slow down” phase after a Stop
command.

Low Speed Activation/Deactivation

To activate the Low Speed status it is necessary to
connect pin 9 of the 9-pin connector to pin 5-6 (ground)
of the 9-pin “D” type connector.

To deactivate the Low Speed status it is necessary to
disconnect pin 9 from pin 15 (ground) of the same
connector.

The low speed frequency is equal to 622 Hz.

MAINTENANCE

Replacement controllers are available on an advance
exchange basis through Varian. If necessary,
information is provided to aid the operator in
determining malfunctions and corrective steps to be
taken.

!

In order Voltages developed in the unit are dangerous
and may be fatal. Service must be performed by
authorized personnel only.

Error Messages

For a certain type of failure, the controller will self­diagnose the error and the following messages will be
displayed.

The controller signals the error occurred by means of a
diagnostic LED located on the box (FAULT), and on the
RS 232 port.

The LED blinks in a coded mode:
it flashes a number of time equal to the error
code (see the following table) and then stays off, and so
on.

“Status” LED (on the box)

OFF in STOP
Blinking in STARTING
ON in NORMAL

Error Code Table

LED

BLINKING

NUMBER

DESCRIPTION

0 No error
1 Output overcurrent
2 Not connected pump
3 Pump overtemperature
4 Controller overtemperature
5 Run-up overtime
6 Soft start overtime
7 Too High Load
8 Power Failure

WARNING!

WARNING!

TECHNICAL INFORMATION

9 87-900-944-01 (C)

PCB JUMPERS

Request for Return

1. A Return Authorization Number (RA#) WILL NOT be issued until this Request for Return is completely filled out,
signed and returned to Varian Customer Service.

2. Return shipments shall be made in compliance with local and international Shipping Regulations (IATA, DOT, UN).

3. The customer is expected to take the following actions to ensure the

Safety

of workers at Varian: (a) Drain any oils or
other liquids, (b) Purge or flush all gasses, (c) Wipe off any excess residues in or on the equipment, (d) Package the
equipment to prevent shipping damage, (for Advance Exchanges please use packing material from replacement unit).

4. Make sure the shipping documents clearly show the RA# and then return the package to the Varian location nearest you.

North and South America

Varian Vacuum Technologies

121 Hartwell Ave

Lexington, MA 02421

Phone : [phone]

Fax: [phone]

Europe and Middle East

Varian SpA

Via Flli Varian 54

10040 Leini (TO) – ITALY

Phone: [phone]

Fax: [phone]

Asia and ROW

Varian Vacuum Technologies

Local Office

CUSTOMER INFORMATION

Company name: ..………………….……..……………….………………………………..……………………...…………..….

Contact person: Name: ……………………………………..… Tel: ……………………….…...…………….….…....

Fax: …………………………….…...…..…… E-Mail: ..……………………..…………..…..…..…..

Ship Method: …………….……....…… Shipping Collect #: ………….…..………… P.O.#: ………………….…......………..

Europe only: VAT reg. Number: ………………..……………... USA only: Taxable Non-taxable

Customer Ship To: ………………………….……… Customer Bill To: …………………..……………...

……………..…………………... ..………………………………...

………………..………………... ..………………………………...

PRODUCT IDENTIFICATION

Product Description Varian P/N Varian S/N Purchase Reference

TYPE OF RETURN (check appropriate box)

Paid Exchange Paid Repair

Warranty Exchange

Warranty Repair

Loaner Return

Credit Shipping Error

Evaluation Return

Calibration

Other ……………….

HEALTH and SAFETY CERTIFICATION

Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or
RADIOACTIVITY. Call Varian Customer Service to discuss alternatives if this requirement presents a problem.

The equipment listed above (check one):

HAS NOT

been exposed to any toxic or hazardous materials

OR

HAS

been exposed to any toxic or hazardous materials. In case of this selection, check boxes for any materials that

equipment was exposed to, check all categories that apply:

Toxic Corrosive Reactive Flammable Explosive Biological Radioactive

List all toxic or hazardous materials. Include product name, chemical name and chemical symbol or formula.

.……………………………………………………………………………………………………………………..

Print Name: …………………………………. Customer Authorized Signature: ……………...…………………….

Print Title: …………………………………... Date: ..…../..…../……

NOTE:

If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed,

the customer

will be held responsible

for all costs incurred to ensure the safe handling of the product, and

is liable

for any harm or injury to Varian

employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.

Do not write below this line

Notification (RA)#: ……………………….……….. Customer ID#: ……….…………. Equipment #: ……………………..

Request for Return

FAILURE REPORT

TURBO PUMPS and TURBOCONTROLLERS

POSITION PARAMETERS

Does not start

Noise

Vertical

Power: Rotational Speed:

Does not spin freely

Vibrations

Horizontal

Current: Inlet Pressure:

Does not reach full speed

Leak

Upside-down

Temp 1: Foreline Pressure:

Mechanical Contact

Overtemperature Other: Temp 2: Purge flow:

Cooling defective …………………. OPERATION TIME:

TURBOCONTROLLER ERROR MESSAGE:

ION PUMPS/CONTROLLERS VALVES/COMPONENTS

Bad feedthrough

Poor vacuum

Main seal leak

Bellows leak

Vacuum leak

High voltage problem

Solenoid failure

Damaged flange

Error code on display

Other

Damaged sealing area

Other

Customer application:

Customer application:

LEAK DETECTORS INSTRUMENTS

Cannot calibrate

No zero/high backround

Gauge tube not working Display problem

Vacuum system unstable

Cannot reach test mode

Communication failure

Degas not working

Failed to start

Other

Error code on display

Other

Customer application:

Customer application:

PRIMARY PUMPS DIFFUSION PUMPS

Pump doesn’t start

Noisy pump (describe)

Heater failure

Electrical problem

Doesn’t reach vacuum

Over temperature

Doesn’t reach vacuum

Cooling coil damage

Pump seized

Other

Vacuum leak

Other

Customer application:

Customer application:

FAILURE DESCRIPTION

(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):

NOTA: Su richiesta questo documento è disponibile anche in Tedesco, Italiano e Francese.
REMARQUE : Sur demande ce document est également disponible en allemand, italien et français.
HINWEIS: Auf Aufrage ist diese Unterlage auch auf Deutsch, Italienisch und Französisch erhältlich.

Sales and Service Offices

France and Benelux
Varian s.a.

7 Avenue des Tropiques
Z.A. de Courtaboeuf - B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: [phone]
Fax: [phone]
From Benelux Tel: [phone]
From Benelux Fax: [phone]

Canada
Central coordination through:

Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: [phone]
Fax: [phone]
Toll Free # 1 [phone]

China
Varian Technologies - Beijing

Rm 1648 Central Tower South Wing
Beijing Junefield Plaza
No. 10 XuanWuMenWai Street
Beijing 100052
P.R. China
Tel: [phone]
Fax: [phone]
Toll Free: 800 820 6556

Germany and Austria
Varian Deutschland GmbH

Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: [phone]
Fax: [phone]

India
Varian India PVT LTD

101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: [phone]
Fax: [phone]

Italy
Varian Inc.
Vacuum Technologies

Via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: [phone]
Fax: [phone]

03/06

Japan
Varian Vacuum Technologies

Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: [phone]
Fax: [phone]
Toll Free: 0120 655 040

Korea
Varian Technologies Korea, Ltd

Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: [phone]
Fax: [phone]
Toll Free: 080 222 2452

Mexico
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Concepcion Beistegui No 109
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C.P. 03100
Mexico, D.F.
Tel: [phone]
Fax: [phone]

Taiwan
Varian Technologies Asia Ltd.

14F-6, No.77, Hsin Tai Wu Rd., Sec. 1
Hsi chih, Taipei Hsien
Taiwan, R.O.C.
Tel: [phone]
Fax: [phone]
Toll Free: 0800 051342

UK and Ireland
Varian Ltd.

6 Mead Road
Oxford Industrial Park - Yarnton
Oxford OX5 1QU - England
Tel: [phone]
Fax: [phone]

United States
Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: [phone]
Fax: [phone]

Other Countries
Varian Inc.
Vacuum Technologies

Via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: [phone]
Fax: [phone]

Customer Support & Service:

North America

Toll-Free: 1 800 882 7426
[e-mail]

Europe

Tel: [phone]
[e-mail]

China

Toll-Free: 800 820 8266
[e-mail]

Japan

Toll-Free: 0120 655 040
[e-mail]

Korea

Toll-Free: 080 222 2452
[e-mail]

Taiwan

Toll-Free: 0 800 051 342
[e-mail]

Worldwide Web Site, Catalog
and Order On-line:

www.varianinc.com

Representative in most countries