Varian TriScroll 600 series User Manual

vacuum technologies

TriScroll

TM

600

Series

Dry Scroll

Vacuum Pump

TIP SEAL REPLACEMENT
MANUAL

DRAFT 2/10/05

Manual No. 699904310
Revision G
December 2004

TriScroll

600 Series

Dry Scroll Vacuum Pump

™

DRAFT 2/10/05

TriS c rol l i s a tra dem ark of Vac uu m Te ch nol ogi es.

Loctite and PST are registered trademarks of Loctite Corporation.

Krytox, Teflon and Viton are registered trademarks of E. I. du Pont de Nemours and Company.

Copyright 2004

Vacuum Tech nologi es

TriScroll 600 Dry Scroll Vacuum Pump

Table of Contents

Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi

Safety Considerations . . . . . . . . . . . . . . . . . . . . . vi

Related TriScroll Manuals . . . . . . . . . . . . . . . . . viii

Maintenance and Tool Kits . . . . . . . . . . . . . . . . viii

Factory Service Options . . . . . . . . . . . . . . . . . . . ix

Contacting Vacuum Technologies . . . . . . . . . . . . ix

Tip Seal Replacement . . . . . . . . . . . . . . . . . . . . . . . 1

General Information . . . . . . . . . . . . . . . . . . . . . . 1

Required Equipment . . . . . . . . . . . . . . . . . . . . 1

TriScroll 600 Disassembly . . . . . . . . . . . . . . . . . . 4

Remove the Intake Fitting . . . . . . . . . . . . . . . . 4

Remove the Outboard Housing . . . . . . . . . . . . 5

Remove the Inboard Housing and Orbiting

Plate Assembly . . . . . . . . . . . . . . . . . . . . . . . . 7

Disassemble the Inboard Housing and the Orbiting

Plate Assembly . . . . . . . . . . . . . . . . . . . . . . . . 8

Scroll Cleaning . . . . . . . . . . . . . . . . . . . . . . . 10

TriScroll 600 Reassembly . . . . . . . . . . . . . . . . . . . 11

Put the Pump Back into Service . . . . . . . . . . . . 19

DRAFT 2/10/05

iii

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

This page intentionally left blank.

Declaration of Conformity

Declaration of ConformityDeclaration of

Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità

We
Wir
Nous
Nosotros
Wij
Noi

declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,

Vari a n , Inc.
Vacu um Technologies
121 Hartwell Avenue
Lexington, MA, 02421-3133 USA

Tri S croll Series Vacuum Pump

to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.

98/37/EEC, Machinery Directive

EN 1012-2:1996 Compressors and Vacuum Pumps Safety Requirements; Part 2 Vacuum Pumps
EN 1050:1996 Safety of machinery - principles for risk assessment
EN 60204-1 Electrical equipment of industrial machines; general requirements

73/023/EEC, Low Voltage Directive

EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance

89/336/EEC, Electromagnetic Compatibility Directive

EN 61000-4-2 Testing and Measurement Techniques - Electrostatic Discharge Immunity Test

Frederick C. Campbell
Operations Manager
Vac u um Technologies
Var ian, Inc.
Lexington, Massachusetts, USA

March 2003

Preface

TriScroll 600 Dry Scroll Vacuum Pump

This manual provides the information you need to successfully perform tip seal replacement on your
Vacuum Tech nologi es TriScro ll
recommended when the pump base pressure has risen to an unacceptably high level for your
application. If you have questions that are not addressed in this manual, please contact the nearest
Vacuum Tech nologi es service facil ity l ist ed on the re ar co ver of t his m anua l.

TM

Dry Vacuum Pump. Tip seal replacement is generally is

Safety Considerations

READ THE FOLLOWING INSTRUCTIONS. TAKE ALL NECESSARY PRECAUTIONS.

The following format is used in this manual to call attention to hazards:

WARNING The warning messages are for attracting

the attention of the operator to a partic­ular procedure or practice which, if not
followed correctly, could lead to serious
injury.

CAUTION The caution messages are displayed

before procedures, which if not fol­lowed, could cause damage to the
equipment.

NOTE The notes contain important informa-

tion taken from the text.

DRAFT 2/10/05

Maintenance personnel must be aware of all hazards associated with this equipment. They must
know how to recognize hazardous and potentially hazardous conditions, and know how to avoid
them. The consequences of work performed by unskilled or improperly trained maintenance personnel,
or careless operation of the equipment employed in the specified maintenance procedures can be
serious. Every maintenance person must read and thoroughly understand the materials discussed and
the instructions provided in this manual, as well as any additional information provided by Vacuum
Te ch no lo gi e s.

vi

TriScroll 600 Dry Scroll Vacuum Pump

All warnings and cautions must be read carefully, fully understood, and strictly observed. Consult local,
state/province, and national agencies regarding specific requirements and regulations. Address any
safety, operation, and/or maintenance questions to the nearest Vacuum Technologies location.

WARNING Disconnect power from the

Tri S croll 600 befo re performing any
maintenance procedure.

Allow the pump to cool before perform­ing any maintenance procedure.
Approximate cool-down time is one to
two hours.

CAUTION Wipe all O-rings clean with a lint-free

cloth before installation to ensure that
no foreign matter is present to impair
the seal.

Do not use alcohol, methanol or other
solvents on O-rings. To do so causes
deterioration and reduces their ability to
hold a vacuum.

If applicable, apply a small amount of

®

Krytox
O-rings “shiny” dry.

NOTE Vacuum Technologies recommends

replacing all O-rings during routine
maintenance or during any mainte­nance procedure requiring that O-rings
be removed.

WARNING The TriScroll 600 weighs 32 kg (70 lbs).

To a voi d in ju ry, use pr oper li ftin g
techniques when moving the pump.

GPL 224 grease and wipe the

DRAFT 2/10/05

vii

TriScroll 600 Dry Scroll Vacuum Pump

Related TriScroll Manuals

Manuals related to the installation and operation, pump module replacement, and major maintenance
for the TriScroll 600 series pumps are listed in the following table:

Title Applicable TriScroll Model Part Number

Major Maintenance Manual All TriScroll 600 Series Models 699904300

Pump Module Replacement All TriScroll 600 Series Models 699904305

Installation and Operation Manual All TriScroll 600 Series Models 699904290

Maintenance and Tool Kits

Material and tooling required to perform maintenance on TriScroll pumps is provided in kit form. A
description of each kit and ordering information is provided in the following table:

Description Contents Applicable TriScroll

Major Maintenance Tool Kit All bearings, bearing seals,

bearing lubricant, O-rings, and
tip seals required to rebuild
Tri Scr oll 6 00 S er ies p um ps .

Maintenance Tool Kit All fixtures and tools required

to perform any maintenance on
Tri Scr oll 6 00 S eri es p um p s.

Tip Seal Tool Kit All tools required to change the

tip seals on any TriScroll Series
pump.

DRAFT 2/10/05

Replacement Tip Seal Set Replacement tip seals and

static O-rings for TriScroll 600
Series pumps.

Model

All TriScroll 600 Series
models

All TriScroll 600 Series
models

All TriScroll Series
pumps

All TriScroll 600 Series
models

Part Number

PTSS0600MK

PTSS0600TK

PTSTSTKIT

PTSS0600TS

viii

TriScroll 600 Dry Scroll Vacuum Pump

Factory Service Options

Vacuum Tech nologi es offers factory- re build se rvice or advance exc ha ng e of co mplet e TriSc ro ll Pu mps
or TriScroll Pump Modules. Contact your nearest Vacuum Technologies sales office for price and
availability information. Select your preferred service option from the table below.

Factory Service Options Part Number

Advance Exchange TriScroll 600 Single Phase EXPPTS06001

Advance Exchange TriScroll 600 Three Phase EXPPTS06003

Advance Exchange TriScroll 610 Single Phase EXPPTS06101

Advance Exchange TriScroll 610 Three Phase EXPPTS06103

Advance Exchange TriScroll 600 Pump Module Only EXPTS0600SC

Advance Exchange TriScroll 610 Pump Module Only EXPTS0610SC

Service/Rebuild TriScroll 600 Pump (Single or Three Phase) PTS0600KMA

Service/Rebuild TriScroll 610 Pump (Single or Three Phase) PTS0610KMA

Service/Rebuild TriScroll 600 Pump Module Only PTS0600SCRP

Service/Rebuild TriScroll 610 Pump Module Only PTS0610SCRP

Contacting Vacuum Technologies

In the United States, you can contact Vacuum Technologies Customer Service at 1-800-8VARIAN.
See the back cover of this manual for a listing of our sales and service offices.

Internet users:

❑ Send email to Customer Service & Technical Support at [e-mail]
❑ Visit our web site at www.varianinc.com/vacuum
❑ Order on line at www.evarian.com

DRAFT 2/10/05

ix

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

This page intentionally left blank.

TriScroll 600 Dry Scroll Vacuum Pump

Tip Seal Replacement

General Information

Vacuum Tech nologi es TriScro ll 600 serie s pumps wi ll pr ov id e years of tro uble-fr ee ser vi ce if
maintenance procedures and intervals are observed. Bearing grease replenishment and tip seal
replacement is recommended when the pump base pressure rises to an unacceptably high level for
your application. Replace bearings, rotary seals and O-rings if the pump bearings exhibit humming or
grinding noises. Main bearing life may be shortened if your application requires the pumping of high
quantities of water vapor. Use bearing purge to keep this water from impacting bearing life.

Required Equipment

❑ Tip Seal Replacement Kit: PTSS0600TS (“Tip Seal Replacement Kit” on page 2)
❑ Tip Seal Tool Kit: PTSTSTKIT (“Tip Seal Tool Kit” on page 3; customer can supply metric Allen

wrench set and chisel).

❑ Vacuum Measu ri ng Gauge : Capable of measuring pressures of 5 to 20 mTorr with an accuracy

of ± 1 mTorr. A capacitance manometer or Pirani gauge is recommended.

DRAFT 2/10/05

1

Tip Seal Replacement Kit

Tip Seal

K

GPL

TriScroll 600 Dry Scroll Vacuum Pump

2-273

2-127

DRAFT 2/10/05

rytox

Grease

224

2

Tip Seal Tool Kit

TriScroll 600 Dry Scroll Vacuum Pump

Chisel

Metric Hex Key
Set

DRAFT 2/10/05

3

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Disassembly

Remove the Intake Fitting

1. Remove the two M5x16 screws from the
intake assembly.

2. Remove the intake assembly from the top of
the pump.

DRAFT 2/10/05

3. Remove and discard the O-ring from the
groove on the underside of the intake fitting.

4

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Disassembly (Continued)

Remove the Outboard Housing

1. Remove the three M5x16 screws that attach
the cowling to the module.

2. Remove the cowling.

3. Remove the six M6x55 screws that attach
the outboard housing to inboard housing.

4. Remove the outboard housing.

DRAFT 2/10/05

5

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Disassembly (Continued)

5. Remove and discard the O-ring.

6. Remove and discard the tip seals from the
outboard housing.

DRAFT 2/10/05

6

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Disassembly (Continued)

Remove the Inboard Housing and
Orbiting Plate Assembly

1. Remove the four M5x15 screws that attach
the inboard housing to the frame.

2. Remove the inboard housing from the
frame.

Locate the rubber spider that mounts
between the motor shaft coupling and the
inboard housing assembly.

CAUTION The inboard housing assembly

weighs 22 lbs.

DRAFT 2/10/05

7

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Disassembly (Continued)

Disassemble the Inboard Housing and
the Orbiting Plate Assembly

1. Remove the M8x12 screw and washer that
attaches the counterweight to the inboard
housing.

Counterweight

DRAFT 2/10/05

2. Lift the counterweight off of the inboard
housing.

The counterweight is keyed to the
crankshaft. Locate the key after removal of
the counterweight from the inboard housing

Key

8

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Disassembly (Continued)

3. Remove the inboard housing from the
crankshaft and orbiting plate.

4. Remove and discard the tip seals from the
inboard housing.

DRAFT 2/10/05

9

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Disassembly (Continued)

5. Remove and discard the tip seals from both
sides of the orbiting plate.

DRAFT 2/10/05

10

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Disassembly (Continued)

Scroll Cleaning

1. Carefully scrape with a chisel to loosen the
tip seal dust from the:

❑ Orbiting plate
❑ Inboard housing
❑ Outboard housing

CAUTION Do not scratch or gouge any

If seal debris is attached to the sides of the
scroll walls, use a razor blade or Exacto
knife to scrape this debris off.

2. Use dry compressed air to remove the tip
seal debris from the scroll parts.

surface.

CAUTION Do not blow compressed air

or debris into exposed
bearings.

3. Wipe the scroll parts with isopropyl alcohol
and a clean lint free cloth to remove any
remaining tip seal debris.

DRAFT 2/10/05

11

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Reassembly

1

1. Insert the new tip seal into the scroll tip
grooves on the inboard housing side of the
orbiting plate.

2. Cut the seal to the correct length at the end
of each groove. Leave a gap of 1/4" (6 mm)
from the outer end to allow for thermal
growth.

DRAFT 2/10/05

3. Insert the new tip seal into the scroll tip
grooves on the inboard housing.

2

7

3

4

6

5

4. Cut the seal to the correct length at the end
of each groove. Leave a gap of 1/4" (6 mm)
from the outer end to allow for thermal
growth.

12

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Reassembly (Continued)

5. Place the scroll in the vertical position and
reinstall the inboard housing onto the
crankshaft.

Placing the scroll in the vertical position
keeps the tip seals from falling out of the
grooves during reassembly.

6. Ensure that the scroll walls are properly
aligned to allow full engagement of the two
parts.

Screw
and
washer
installed

7. Reinstall the counterweight onto the
crankshaft.

8. Align the keyways in the counterweight and
crankshaft and install the key.

9. Secure the counterweight to the crankshaft
using the M8x12 screw and washer.

DRAFT 2/10/05

13

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Reassembly (Continued)

10. Install the rubber spider into motor shaft
coupling.

Rubber
spider
installed

DRAFT 2/10/05

11. Alig n the mot or cou pling to p rope rly m ate
with the fan hub coupling.

12. Install the inboard housing onto the frame.

14

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Reassembly (Continued)

13. Secure the inboard housing assembly to the
frame using the four M5x15 screws.

14. Insert the tip seal into the scroll tip grooves
on the orbiting plate.

15. Cut the seal to the correct length at the end
of each groove. Leave a gap of 1/8" (3mm)
from the outer end to allow for thermal
growth.

DRAFT 2/10/05

15

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Reassembly (Continued)

16. Squeeze a dot of Krytox GPL 224 grease
into each of the three needle bearings.

17. Smear grease over the needles.

18. Coat the lips of all three seals with grease.

DRAFT 2/10/05

O-ring

19. Lightly grease the new 2-273 O-ring (large)
and install it around the lip on the inboard
housing.

16

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Reassembly (Continued)

20. Insert the tip seals into the grooves on the
outboard housing.

21. Cut the seal to the correct length at the end
of each groove. Leave a gap of 1/8" (3mm)
from the outer end to allow for thermal
growth.

22. Install the outboard housing over the
orbiting plate and against the inboard
housing, engaging the dowel pins and all
the sync cranks.

NOTE Orient the sync cranks and

the orbiting plate in the
downward position before
installing the outboard
housing.

23. Secure the outboard housing to the inboard
housing with the six M6x55 screws.

DRAFT 2/10/05

17

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Reassembly (Continued)

24. Install the cowling over the pump module.

25. Secure with the three M5x16 screws.

DRAFT 2/10/05

18

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Reassembly (Continued)

26. Lightly grease the new 2-127 O-ring and
insert it into the groove on the intake fitting.

27. Place the intake fitting assembly into the
outboard housing.

28. Secure the fitting with the two M5x16
screws.

DRAFT 2/10/05

19

TriScroll 600 Dry Scroll Vacuum Pump

TriScroll 600 Reassembly (Continued)

This figure illustrates a fully reassembled
Tr iS cr ol l 60 0 Se ri es P um p.

Put the Pump Back into Service

The TriScroll 600 pump can be placed into service immediately after maintenance is complete.
However, 24 hours of run time is required before base pressure of 7 mTorr can be achieved.

NOTE The 24 hour run time does not have to

be continuous. If your application
requires a low base pressure, it is wise
to run the pump for the 24-hour period
for optimum performance.

DRAFT 2/10/05

20

Declaration of ConformityRequest

Request for Return

ISO

REGISTERED

9001

Health and Safety Certification

1. Return authorization numbers (RA#) will not be issued for any product until this Certificate is completed and returned to a

Varian, Inc. Customer Service Representative.

2. Pack goods appropriately and drain all oil from rotary vane and diffusion pumps (for exchanges please use the packing
material from the replacement unit), making sure shipment documentation and package label clearly shows assigned
Return Authorization Number (RA#) VVT cannot accept any return without such reference.

3. Return product(s) to the nearest location:

North and South America Europe and Middle East Asia and ROW

Varian, Inc.

Vac uum Technolog i es

121 Hartwell Ave.

Lexington, MA 02421

Fax: [phone]

For a complete list of phone/fax numbers see www.varianinc.com/vacuum

4. If a product is received at Varian, Inc. in a contaminated condition, the customer is held responsible for all costs incurred to
ensure the safe handling of the product, and is liable for any harm or injury to Varian, Inc. employees occurring as a result of
exposure to toxic or hazardous materials present in the product.

CUSTOMER INFORMATION

Company name: ......................................................................................................................................................................

Contact person: Name: ...................................................................................... Tel:............................................................

Fax: .......................................................................................... E-mail: .....................................................

Ship method: Shipping Collect #: .................................. P.O.#: .......................................................

Europe only: VAT Reg Number: ........... USA only: ❒Ta xa bl e ❒Non-taxable

Customer ship to: .................................................................... Customer bill to: .................................................................

.................................................................... .................................................................

.................................................................... .................................................................

Varian S.p.A.

Via F.lli Varian, 54

10040 Leini (TO) – ITALY

Fax: [phone]

Varian Vacuum Technologies

Local Office

PRODUCT IDENTIFICATION

Product Description Varian, Inc. Part Number Varian, Inc. Serial Number

TYPE OF RETURN (check appropriate box)

❒ Paid Exchange ❒ Paid Repair ❒ Warranty Exchange ❒ Warranty Repair ❒ Loaner Return
❒ Credit ❒ Shipping Error ❒ Evaluation Return ❒ Calibration ❒ Other

HEALTH and SAFETY CERTIFICATION

ACUUM TECHNOLOGIES CANNOT ACCEPT ANY BIOLOGICAL HAZARDS, RADIOACTIVE MATERIAL, ORGANIC METALS, OR

V

MERCURY AT ITS FACILITY. CHECK ONE OF THE FOLLOWING:

❒ I confirm that the above product(s) has (have) NOT pumped or been exposed to any toxic or dangerous materials in a

quantity harmful for human contact.

❒ I declare that the above product(s) has (have) pumped or been exposed to the following toxic or dangerous materials in a

quantity harmful for human contact (Must be filled in):

Print Name................................................ Signature................................................... Date ...............................

PLEASE FILL IN THE FAILURE REPORT SECTION ON THE NEXT PAGE

Do not write below this line

Notification (RA) #:...................................

Customer ID #: ........................................ Equipment #:............................................

August 2003 — Page 1 of 2

Request for Return

ISO

REGISTERED

9001

Health and Safety Certification

FAILURE R EPORT

(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):

TURBO PUMPS AND TURBOCONTROLLERS

Claimed Defect Position Parameters

❒ Does not start ❒ Noise ❒ Vertical Power: Rotational Speed:
❒ Does not spin freely ❒ Vibrations ❒ Horizontal Current: Inlet Pressure:
❒ Does not reach full speed ❒ Leak ❒ Upside-down Temp 1: Foreline Pressure:
❒ Mechanical Contact ❒ Overtemperature ❒ Other
❒ Cooling defective ❒ Clogging Operation Time:

Describe Failure:

Turbocontroller Error Message:

ION PUMPS/CONTROLLERS VALVES/COMPONENTS

❒ Bad feedthrough ❒ Poor vacuum ❒ Main seal leak ❒ Bellows leak
❒ Vacuum leak ❒ High voltage problem ❒ Solenoid failure ❒ Damaged flange

❒ Error code on display ❒ Other .............................. ❒ Damaged sealing area ❒ Other ...............................

Describe failure: Describe failure:

................................

Temp 2: Purge flow:

Customer application: Customer application:

LEAK DETECTORS INSTRUMENTS

❒ Cannot calibrate ❒ No zero/high background ❒ Gauge tube not working ❒ Display problem
❒ Vacuum system unstable ❒ Cannot reach test mode ❒ Communication failure ❒ Degas not working

❒ Failed to start ❒ Other ............................... ❒ Error code on display ❒ Other ...............................

Describe failure: Describe failure:

Customer application: Customer application:

ALL OTHER VARIAN, INC. DIFFUSION PUMPS

❒ Pump doesn’t start ❒ Noisy pump (describe) ❒ Heater failure ❒ Electrical problem
❒ Doesn’t reach vacuum ❒ Overtemperature ❒ Doesn’t reach vacuum ❒ Cooling coil damage

❒ Pump seized ❒ Other ............................... ❒ Vacuum leak ❒ Other ...............................

Describe failure: Describe failure:

Customer application: Customer application:

August 2003 — Page 2 of 2

Sales and Service Offices

Sales and Service Offices

Canada
Central coordination through:

Var i an, Inc .
121 Hartwell Avenue
Lexington, MA 02421
USA
Te l: (7 8 1) 8 61 72 00
Fax:[phone]
To ll Fr ee : ( 8 00 ) 8 82 7 4 26

China
Varia n Tec h nol o gies - Be ijing

Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 1000031
P. R . C h i n a
Te l: (8 6 ) 10 6 6 08 1 0 31
Fax:[phone]

France and Benelux
Varia n s. a .

7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Te l: (3 3 ) 1 69 86 38 1 3
Fax:[phone]

Germany and Austria
Varia n Deu tsc h l and Gm b H

Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Te l: (4 9 ) 61 51 70 3 3 53
Fax:[phone]

India
Varian In d ia P V T LTD

101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Te l: (9 1 ) 11 5 54 8 44 4
Fax:[phone]

Italy
Varia n , I n c.

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Te l ( 3 9) 01 1 9 97 9 111
Fax [phone]

Japan
Varian, Inc.

Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel : ( 81 ) 3 52 32 1 253
Fax:[phone]

Korea
Varian Techno l ogies Kore a , Ltd.

Shinsa 2nd Building 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel : ( 82 ) 2 34 52 2 452
Fax:[phone]

Mexico
Varian S.A.

Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel : ( 52 ) 5 52 3 94 65
Fax:[phone]

Russia
Central coordination through:

Vari a n , Inc.
via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel : [phone]
Fax: [phone]

Ta i w a n
Varian Techno l ogies Asia L t d .

18F-13 No.79, Hsin Tai Wu Road
Sec. 1, Hsi Chih, Taipei Hsien
Tai wa n, R .O .C .
Tel : ( 88 6) 2 2 69 8 9 55 5
Fax:[phone]

UK and Ireland
Varian Ltd.

28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel : ( 44 ) 19 32 8 9 8 00 0
Fax:[phone]

United States
Varian, Inc.

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel : ( 78 1) 8 61 7 200
Fax:[phone]

Other Countries
Va ri an , In c.

Via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: ( 39 ) 011 99 7 9 111
Fax:[phone]

Customer Support and Service:

North America

Tel: 1 ( 80 0) 8 82 -7 42 6 (tol l- fr ee )
[e-mail]

Europe

Tel: 0 0 (8 00 ) 23 4 23 4 00 (to ll -f re e)
[e-mail]

Japan

Tel: ( 81 ) 3 52 32 1 25 3 (d ed ica te d li ne )
[e-mail]

Korea

Tel [phone] ( de di ca ted l in e)
[e-mail]

Ta i w a n

Tel: 0 ( 80 0) 0 51 3 42 ( to ll -fre e)
[e-mail]

Worldwide We b S ite,
Catalog and On-line Orders:

www.varianinc.com

Representatives in most countries

12/04