Varian MiniVac 929-0190, MiniVac 929-0290, MiniVac 929-0291, MiniVac 929-0191 Instruction Manual

87-900-049-01 (E)
APRIL 2006

(I) MANUALE DI ISTRUZIONI

(D) BEDIENUNGSHANDBUCH

(F) NOTICE DE MODE D’EMPLOI

(GB) INSTRUCTION MANUAL

MiniVac Controller

Model 929-0190
Model 929-0290
Model 929-0191
Model 929-0291

vacuum technologies

MiniVac Controller

ISTRUZIONI PER L’USO ...................................................................................................1

GEBRAUCHSANLEITUNG ................................................................................................4

MODE D’EMPLOI ...............................................................................................................7

INSTRUCTIONS FOR USE............................................................................................... 10

TECHNICAL INFORMATION ............................................................................................13

MINIVAC DESCRIPTION .......................................................................................................................13

CONTROLLER SPECIFICATIONS ........................................................................................................15

CONTROLLER OUTLINE ......................................................................................................................16

INSTALLATION ......................................................................................................................................17

Line Voltage Change Over ................................................................................................................17

Output Polarity Selection ...................................................................................................................17

Input/Output Interconnections ...........................................................................................................18

Pump Connection..............................................................................................................................18

OPERATION ..........................................................................................................................................19

Pressure Determination.....................................................................................................................19

Power Failure ....................................................................................................................................19

Remote Control Mode Operation ......................................................................................................19

MAINTENANCE .....................................................................................................................................20

Troubleshooting.................................................................................................................................20

Controller Spares and Accessories ...................................................................................................20

Controller to Vacion Pump Cables ....................................................................................................20

ISTRUZIONI PER L’USO

1 87-900-049-01 (E)

INFORMAZIONI GENERALI

Questa apparecchiatura è destinata ad uso
professionale. L'utilizzatore deve leggere attentamente
il presente manuale di istruzioni ed ogni altra
informazione addizionale fornita dalla Varian prima
dell'utilizzo dell'apparecchiatura. La Varian si ritiene
sollevata da eventuali responsabilità dovute
all'inosservanza totale o parziale delle istruzioni, ad uso
improprio da parte di personale non addestrato, ad
interventi non autorizzati o ad uso contrario alle
normative nazionali specifiche. Il MiniVac è un
alimentatore ad alta tensione e bassa potenza,
utilizzato per alimentare le pompe Ioniche.

Nei paragrafi seguenti sono riportate tutte le
informazioni necessarie a garantire la sicurezza
dell'operatore durante l'utilizzo dell'apparecchiatura.
Informazioni dettagliate sono fornite nella sezione
"Technical Information".

Questo manuale utilizza le seguenti convenzioni:

!

I messaggi di pericolo attirano l'attenzione
dell'operatore su una procedura o una pratica specifica
che, se non eseguita in modo corretto, potrebbe
provocare gravi lesioni personali.

ATTENZIONE!

I messaggi di attenzione sono visualizzati prima di
procedure che, se non osservate, potrebbero causare
danni all'apparecchiatura.

NOTA

Le note contengono informazioni importanti estrapolate
dal testo.

IMMAGAZZINAMENTO

Durante il trasporto e l'immagazzinamento dei MiniVac
devono essere soddisfatte le seguenti condizioni
ambientali:

• temperatura: da -20 °C a +70 °C

• umidità relativa: 0 - 95% (non condensante)

PREPARAZIONE PER L'INSTALLAZIONE

Il controller viene fornito in un imballo protettivo
speciale; se si presentano segni di danni, che
potrebbero essersi verificati durante il trasporto,
contattare l'ufficio vendite locale.
Durante l'operazione di disimballo, prestare particolare
attenzione a non lasciar cadere il modulo e a non
sottoporlo ad urti.
Non disperdere l'imballo nell'ambiente. Il materiale è
completamente riciclabile e risponde alla direttiva CEE
85/399 per la tutela dell'ambiente.

Imballo dei controller

Ogni controller giunge dalla Varian predisposto per una
certa tensione di alimentazione:

• il modello 929-0190 KINGS type High voltage
connector (120 Vac, 50 – 60 Hz)

• il modello 929-0191 FISCHER type High voltage
connector (120 Vac, 50 – 60 Hz)

• il modello 929-0290 FISCHER type High voltage
connector (220 Vac, 50 – 60 Hz)

• il modello 929-0291 KINGS type High voltage
connector (220 Vac, 50 – 60 Hz)

PERICOLO!

ISTRUZIONI PER L’USO

2 87-900-049-01 (E)

INSTALLAZIONE

!

Il controller è fornito di un cavo di alimentazione a tre
fili con una spina di tipo approvato a livello
internazionale. Utilizzare sempre questo cavo di
alimentazione ed inserire la spina in una presa con un
adeguato collegamento di massa onde evitare scariche
elettriche.
All'interno del controller si sviluppano alte tensioni che
possono recare gravi danni o la morte. Prima di
eseguire qualsiasi operazione di installazione o
manutenzione del controller scollegarlo dalla presa di
alimentazione.

NOTA

Il controller deve essere installato all'interno di un
apposito rack. In ogni caso occorre che l'aria di
raffreddamento possa circolare liberamente intorno
all'apparato. Non installare e/o utilizzare il controller in
ambienti esposti ad agenti atmosferici (pioggia, gelo,
neve), polveri, gas aggressivi, in ambienti esplosivi o
con elevato rischio di incendio.

Durante il funzionamento è necessario che siano
rispettate le seguenti condizioni ambientali:

• temperatura: da 0 °C a +45 °C

• umidità relativa: 0 - 95% (non condensante).

Per il collegamento del controller con la relativa pompa
utilizzare il cavo specifico del controller stesso.

Per gli altri collegamenti e l'installazione degli accessori
opzionali, vedere la sezione "Technical Information".

USO

In questo paragrafo sono riportate le principali
procedure operative. Per ulteriori dettagli e per
procedure che coinvolgono collegamenti o particolari
opzionali, fare riferimento al paragrafo "Use" della
sezione "Technical Information".

Prima di usare il controller effettuare tutti i collegamenti
elettrici e pneumatici e fare riferimento al manuale della
pompa collegata.

Comandi, Indicatori e Connettori del Controller

Di seguito sono illustrati sia il pannello frontale che
quello posteriore con le interconnessioni.

Per maggiori dettagli fare riferimento alla sezione
"Technical Information".

Mini Vac

1. Led High Load, si accende quando la corrente assorbita dalla
pompa raggiunge il valore di 12 mA

2. LED polarità selezionata in uscita

3. Scala tensione in uscita (KV)

4. Interruttore ON/OFF principale

5. Scala grafica a LED Tensione/Corrente

6. LED H. V. ON

7. Connettore di uscita segnale proporzionale alla corrente
1 V= 1 mA log

8. Scala in corrente (mA)

Pannello frontale del Controller

PERICOLO!

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ISTRUZIONI PER L’USO

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Pannello posteriore dei Controller

NOTA

L'unità è provvista di un selettore per la Tensione di
Linea. Fare riferimento al paragrafo "INSTALLATION"
della sezione "TECHNICAL INFORMATION" per i
dettagli dell'operazione di selezione della Tensione di
Linea.

PROCEDURE DI USO

Accensione del Controller

Per accendere il controller portare l’interruttore
principale in posizione ON dopo aver inserito il cavo di
alimentazione nella presa di rete.

Avvio della Pompa

La pompa si avvia solo se il controller è acceso e la
pompa è connessa al connettore di uscita. Per ulteriori
informazioni fare riferimento alla sezione “Technical
Information”.

Arresto della Pompa

Per arrestare la pompa portare in posizione OFF
l’interruttore principale posizionato sul pannello
frontale.

MANUTENZIONE

I controller della serie MiniVac non richiedono alcuna
manutenzione. Qualsiasi intervento deve essere
eseguito da personale autorizzato.
In caso di guasto è possibile usufruire del servizio di
riparazione Varian o del "Varian advance exchange
service", che permette di ottenere un controller
rigenerato in sostituzione di quello guasto.

!

Prima di effettuare qualsiasi intervento sul controller
scollegare il cavo di alimentazione.

NOTA

Il connettore di richiusura fornito con l’unità, ha i pin 3 e
7 cortocircuitati (Remote ON/OFF).
Per poter accendere l’HV è necessario montare questo
connettore se non è connesso un contatto di Remote
Interlock.

NOTA

L’unità è settata in fabbrica con polarità di uscita
negativa. Per un eventuale cambio far riferimento al
paragrafo “Output Polarity Selection”.

Qualora un controller dovesse essere rottamato,
procedere alla sua eliminazione nel rispetto delle
normative nazionali specifiche.

SMALTIMENTO

Significato del logo "WEEE" presente sulle
etichette.

Il simbolo qui sotto riportato è applicato in
ottemperanza alla direttiva CE denominata "WEEE".
Questo simbolo (valido solo per i paesi della
Comunità Europea) indica che il prodotto sul quale è
applicato, NON deve essere smaltito insieme ai comuni
rifiuti domestici o industriali, ma deve essere avviato ad
un sistema di raccolta differenziata. Si invita pertanto
l'utente finale a contattare il fornitore del dispositivo, sia
esso la casa madre o un rivenditore, per avviare il
processo di raccolta e smaltimento, dopo opportuna
verifica dei termini e condizioni contrattuali di vendita.

PERICOLO!

1. Modulo di ingresso dell’alimentazione per il Controller.
Comprende il fusibile di protezione, il cambia-tensione, la
presa di alimentazione di potenza ed il filtro EMC (non
compreso nel blocco presa/cambia-tensione).

2. Connettore di uscita alta tensione per alimentazione
pompa (tipo KINGS O FISCHER).

3. Connettore di ingresso/uscita segnali per accessori

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GEBRAUCHSANLEITUNG

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ALLGEMEINES

Dieser Apparat ist für Fachbetriebe bestimmt. Vor
Gebrauch sollte der Benutzer dieses Handbuch sowie
alle weiteren mitgelieferten Zusatzdokumentationen
genau lesen. Bei - auch nur teilweiser - Nichtbeachtung
der enthaltenen Hinweise, unsachgemäßem Gebrauch
durch ungeschultes Personal, nicht autorisierten
Eingriffen und Mißachtung der einheimischen, hier zur
Geltung kommenden Bestimmungen übernimmt die
Firma Varian keinerlei Haftung. Der MiniVac ist ein
Hochspannungsnetzgerät niedriger Leistung, das zur
Versorgung von Ionenpumpen verwendet wird.

In den folgenden Abschnitten sind alle erforderlichen
Informationen für die Sicherheit des Bedieners bei der
Anwendung des Geräts aufgeführt. Detaillierte
technische Informationen sind im Anhang "Technical
Information" enthalten.

In dieser Gebrauchsanleitung werden Sicherheits­hinweise folgendermaßen hervorgehoben:

!

Die Gefahrenhinweise lenken die Aufmerksamkeit des
Bedieners auf eine bestimmte Prozedur oder Praktik,
die bei unkorrekter Ausführung schwere Verletzungen
hervorrufen können.

ACHTUNG!

Die Die Warnhinweise vor bestimmten Prozeduren
machen den Bediener darauf aufmerksam, daß bei
Nichteinhaltung Schäden an der Anlage entstehen
können.

ANMERKUNG

Die Anmerkungen enthalten wichtige Informationen, die
aus dem Text hervorgehoben werden.

LAGERUNG

Beim Transport und bei der Lagerung der Controller
müssen folgende klimatische Verhältnisse eingehalten
werden:

• Temperatur: von -20 °C bis +70 °C

• Relative Luftfeuchtigkeit: 0-95 %

(nicht kondensierend)

VOR DER INSTALLATION

Der Controller wird mit einer speziellen
Schutzverpackung geliefert.
Eventuelle Transportschäden müssen der zuständigen
örtlichen Verkaufsstelle gemeldet werden.
Beim Auspacken vorsichtig vorgehen, damit der
Controller nicht fällt oder Stößen ausgesetzt wird.
Das Verpackungsmaterial muß korrekt entsorgt
werden. Es ist vollständig recyclebar und entspricht der
EG-Richtlinie 85/399 für Umweltschutz.

Verpackung der Controller

Alle Varian-Controller sind für eine bestimmte
Anschlußspannung ausgelegt:

• das Modell 929-0190 KINGS type High voltage
connector (120 Vac, 50 – 60 Hz)

• das Modell 929-0191 FISCHER type High voltage
connector (120 Vac, 50 – 60 Hz)

• das Modell 929-0290 FISCHER type High voltage
connector (220 Vac, 50 – 60 Hz)

• das Modell 929-0291 KINGS type High voltage
connector (220 Vac, 50 – 60 Hz)

GEFAHR!

GEBRAUCHSANLEITUNG

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INSTALLATION

!

Der Controller wird mit einem 3-adrigen Netzkabel
geliefert, das mit einem den internationalen Normen
entsprechenden Stecker ausgerüstet ist. Es sollte
immer dieses Netzkabel benutzt werden, das an eine
korrekt geerdete Steckdose anzuschließen ist, um
Stromentladungen zu vermeiden.
Im Inneren des Controllers entstehen hohe
Spannungen, die schwere Schäden verursachen und
lebensgefährlich sein können. Vor jedem Montage­bzw. Wartungseingriff muß deshalb der Netzstecker
gezogen werden.

ANMERKUNG

Der Controller kann auf einen Tisch oder ein Gestell
montiert werden. In beiden Fällen muß auf die
ungehinderte Zirkulation der Kühlluft im Bereich des
Geräts geachtet werden.
Der Controller darf nicht in Umgebungen installiert u/o
benutzt werden, die Witterungseinflüssen (Regen,
Frost, Schnee), Staub und aggressiven Gasen
ausgesetzt sind und in denen Explosions- und erhöhte
Brandgefahr besteht.

Beim Betrieb müssen folgende Umgebungs­bedingungen eingehalten werden:

− Temperatur: von +0 °C bis +45 °C

− Relative Luftfeuchtigkeit: 0 - 95 %

(nicht kondensierend).

Für den Anschluß des Controllers an die Pumpe muß das
zum Controller gehörende Kabel benutzt werden.

Andere Anschlüsse und die Installation optionalen
Zubehörs ist im Abschnitt “Technical Information”
beschrieben.

GEBRAUCH

In diesem Kapitel sind die wichtigsten
Betriebsvorgänge aufgeführt. Für weitere Hinweise
bezüglich Anschlüsse und Montage des bestellbaren
Zubehörs siehe Kapitel "Use" im Anhang zu "Technical
Information".

Vor Benutzung des Controllers sämtliche elektrischen
und pneumatischen Anschlüsse ausführen, und die
Betriebsanleitung der angeschlossenen Pumpe
durchlesen.

Steuerungen, Anzeigen und Anschlüsse des
Controllers

Nachstehend werden dass Bedienfeld des Controllers
sowie die Anschlußfelder beschrieben.

Für weitere Einzelheiten siehe "Technical Information".

Mini Vac

1. LED Hochlast: geht an, wenn der von der Pumpe absorbierte
Strom 12 mA erreicht

2. LED: im Ausgang gewählte Polung

3. Skala Ausgangsspannung (kV)

4. Hauptschalter ON/OFF

5. grafische Skala zur LED Spannung/Strom

6. LED H. V. AN

7. Ausgangsstecker für Strom-proportionales Signal
1 V = 1 mA log

8. Stromskala (mA)

Bedienfeld der Controller

GEFAHR!

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Rücktafel der Controller

ANMERKUNG

Die Einheit ist mit einem Wählschalter für die
Leitungsspannung versehen. Für ausführliche
Informationen zur Auswahl der Leitungsspannung
siehe Abschnitt "INSTALLATION" im Teil "TECHNICAL
INFORMATION".

BEDIENUNG

Einschalten des Controllers

Zum Einschalten des Controllers genügt es, das
Netzkabel an die Steckdose anzuschließen.

Pumpenstart

Die Pumpe startet nur, wenn der Controller
eingeschaltet und die Pumpe am Ausgangsstecker
angeschlossen ist. Weitere Informationen finden sich
im Abschnitt “Technical Information”.

Pumpenstopp

Zum Stoppen der Pumpe muß der Hauptschalter auf
dem Bedienfeld auf OFF gesetzt werden.

WARTUNG

Die Controller der MiniVac Serie brauchen keinerlei
Wartung. Alle Eingriffe dürfen nur von autorisiertem
Personal vorgenommen werden.
Bei Defekten kann der Reparatur Service von Varian
oder der "Varian Advance Exchange Service" in
Anspruch genommen werden, der den defekten
Controller durch ein Austauschgerät ersetzt.

!

Vor jedem Eingriff am Controller muß der Netzstecker
gezogen werden.

ANMERKUNG

Bei dem mit der Einheit gelieferte Abschluss-Stecker
sind die Stifte 3 und 7 kurzgeschlossen (Remote
ON/OFF).
Falls kein Remote Interlock Kontakt angeschlossen ist,
kann die Hochspannung nur angeschaltet werden,
wenn dieser Stecker montiert ist.

ANMERKUNG

Fabrikseitig ist die Einheit mit negativer
Ausgangspolung eingestellt. Soll das geändert werden,
den Absatz “Output Polarity Selection” zu Rate ziehen.

Eine eventuelle Verschrottung muß unter Einhaltung
der einschlägigen landesüblichen Vorschriften erfolgen.

ENTSORGUNG

Bedeutung des "WEEE" Logos auf den Etiketten.

Das folgende Symbol ist in Übereinstimmung mit der
EU-Richtlinie WEEE (Waste Electrical and Electronic
Equipment) angebracht.
Dieses Symbol (nur in den EU-Ländern gültig) zeigt
an, dass das betreffende Produkt nicht zusammen mit
Haushaltsmüll entsorgt werden darf sondern einem
speziellen Sammelsystem zugeführt werden muss.
Der Endabnehmer sollte daher den Lieferanten des
Geräts - d.h. die Muttergesellschaft oder den
Wiederverkäufer - kontaktieren, um den
Entsorgungsprozess zu starten, nachdem er die
Verkaufsbedingungen geprüft hat.

GEFAHR!

1. Eingangsmodul der Controller-Stromversorgung mit
Sicherung, Spannungswahlschalter, Leistungsstecker
und EMC-Filter (nicht im Block Stecker/
Spannungswahlschalter eingeschlossen).

2. Hochspannungs-Ausgangsstecker zur Pumpen
versorgung (Typ KINGS oder FISCHER).

3. Eingangs-/Ausgangsstecker für Signale für Zubehör.

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INDICATIONS GENERALES

Cet appareillage a été conçu en vue d'une utilisation
professionnelle. L'utilisateur doit lire attentivement cette
notice d'instructions ainsi que toute autre indication
supplémentaire fournie par Varian, avant l'utilisation de
l'appareil. Varian décline toute responsabilité quant au:
non-respect total ou partiel des instructions pour
l’utilisation, mauvais usage par du personnel non
formé, opérations non autorisées usage contraire aux
réglementations nationales spécifiques.
MiniVac est un alimentateur à haute tension, faible
puissance, conçu pour alimenter les pompes ioniques.

Les paragraphes suivants donnent toutes les
indications nécessaires pour garantir la sécurité de
l'opérateur pendant l'utilisation de l'appareillage. Des
renseignements plus détaillés se trouvent dans la
section "Technical Information".

Cette notice utilise les signes conventionnels suivants:

!

Les messages de danger attirent l'attention de
l'opérateur sur une procédure ou une manoeuvre
spéciale qui, si elle n'est pas effectuée correctement,
risque de provoquer de graves lésions.

ATTENTION!

Les messages d'attention apparaissent avant certaines
procédures qui, si elles ne sont pas observées,
pourraient endommager sérieusement l'appareillage.

NOTE

Les notes contiennent des renseignements importants,
isolés du texte.

EMMAGASINAGE

Pendant le transport et l'emmagasinage des Mini Vac
contrôleurs, il faudra veiller à respecter les conditions
environnementales suivantes:

• Température: de - 20 °C à + 70 °C

• Humidité relative: 0 - 95% (non condensante).

PREPARATION POUR L'INSTALLATION

Le contrôleur est fourni dans un emballage de
protection spécial; si vous constatez des marques de
dommages pouvant s'être produits pendant le
transport, adressez-vous aussitôt au bureau de vente
local. Pendant l'opération d'ouverture de l'emballage,
veiller tout particulièrement à ne pas laisser tomber le
contrôleur et à ne lui faire subir aucun choc. Ne pas
jeter l'emballage dans la nature. Le matériel est
entièrement recyclable et il est conforme à la directive
CEE 83/399 en matière de protection de
l'environnement.

Emballage des Contrôleurs

Chaque contrôleur est fourni par Varian prééquipé pour
une certaine tension d'alimentation:

• Modèle 929-0190 KINGS type High voltage
connector (120 Vac, 50 – 60 Hz)

• Modèle 929-0191 FISCHER type High voltage
connector (120 Vac, 50 – 60 Hz)

• Modèle 929-0290 FISCHER type High voltage
connector (220 Vac, 50 – 60 Hz)

• Modèle 929-0291 KINGS type High voltage
connector (220 Vac, 50 – 60 Hz)

DANGER!

MODE D'EMPLOI

8 87-900-049-01 (E)

INSTALLATION

!

Le contrôleur est doté d'un câble d'alimentation à trois
fils avec une fiche du type approuvé au niveau
international. Utiliser toujours ce câble d'alimentation et
introduire la fiche dans une prise pourvue d'un
branchement approprié à la masse, afin d'éviter toute
décharge électrique. A l'intérieur du contrôleur se
développent de hautes tensions qui peuvent provoquer
de graves dommages et même la mort. Avant
d'effectuer toute opération d'installation ou d'entretien
du contrôleur, le débrancher de la prise d'alimentation.

NOTE

Le contrôleur doit être installé dans une baie prévue à
cet effet. Il est en tout cas nécessaire que l'air de
refroidissement puisse circuler librement à l'intérieur de
l'appareil. Ne pas installer et/ou utiliser le contrôleur
dans des milieux exposés aux agents atmosphériques
(pluie, gel, neige), aux poussières, aux gaz de combat
ni dans des milieux explosifs ou à risque élevé
d'incendie.

Pendant le fonctionnement, il est nécessaire de
respecter les conditions environnementales suivantes:

• Température: 0 °C à + 45 °C

• Humidité relative: 0 - 95% (non condensante).

Pour la connexion du contrôleur à la pompe
correspondante, utiliser le câble du contrôleur prévu à
cet effet.

Pour les autres connexions et pour l'installation des
accessoires en option, voir la section "Technical
Information".

UTILISATION

Ce paragraphe décrit les principales procédures de
fonctionnement. Pour tout autre complément
d’information et pour les procédures concernant des
connexions ou des éléments en option, se reporter au
paragraphe "Use" de la section "Technical
Information".

Avant d'utiliser le contrôleur, effectuer toutes les
connexions électriques et pneumatiques et se référer à
la notice de la pompe connectée.

Commandes, Indicateurs et Connecteurs du
Contrôleur

La figure ci-après représente le tableau de commande
du Contrôleur et les tableaux d'interconnexion.

Pour de plus amples détails, se reporter à la section
"Technical Information".

Mini Vac

1. Led High Load, (charge élevée) il clignote quand le
courant consommé par la pompe atteint la valeur
de 12 mA

2. LED polarité sélectionnée à la sortie

3. Echelle de courant à la sortie (KV)

4. Interrupteur ON/OFF principal

5. Échelle graphique à LED Tension/Courant

6. LED H. V. ON

7. Connecteur de sortie signal proportionné au courant
1 V= 1 mA log

8. Echelle de courant (mA)

Tableau avant du Contrôleur

DANGER!

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Tableau arrière des Contrôleurs

NOTE

L’unité est dotée d’un sélecteur de tension de ligne.
Pour tout détail concernant l’opération de sélection de
la tension de ligne, se reporter au paragraphe
« INSTALLATION » de la section TECHNICAL
INFORMATION.

PROCEDURES D'UTILISATION

Mise sous tension du Contrôleur

Pour mettre le contrôleur sous tension, il suffit de
mettre l’interrupteur principal sur ON après avoir
branché le câble d'alimentation sur la prise du réseau.

Mise en marche de la Pompe

La pompe démarre uniquement si le contrôleur est
allumé et la pompe est reliée au connecteur de sortie.
Pour d’ultérieurs renseignements se référer à la section
“Technical Information”.

Arrêt de la Pompe

Pour arrêter la pompe, mettre l’interrupteur principal
situé sur le tableau avant sur OFF.

ENTRETIEN

Les contrôleurs de la série MiniVac ne requièrent
aucun entretien. Toute intervention doit être effectuée
par du personnel autorisé.
En cas de panne, il est possible de faire appel au
service de réparation Varian ou au "Varian advance
exchange service", qui permet d’obtenir un contrôler
régénéré à la place de celui en panne.

!

Avant d'effectuer toute intervention sur le contrôleur,
débrancher le câble d'alimentation.

NOTE

Le connecteur de fermeture fourni avec l’unité a les
pins 3 et 7 en court circuit (Remote ON/OFF).
Pour pouvoir allumer l’HV il faut monter ce connecteur
si un contact de Remote Interlock n’est pas branché.

NOTE

L’unité est assignée à l’usine avec polarité de sortie
négative. Pour un changement éventuel, se référer au
paragraphe “Output Polarity Selection”.

Si un contrôleur doit être mis au rebut l’éliminer
conformément aux réglementations nationales en la
matière.

MISE AU REBUT

Signification du logo "WEEE" figurant sur les
étiquettes.

Le symbole ci-dessous est appliqué conformément à la
directive CE nommée "WEEE".
Ce symbole (uniquement valide pour les pays de la
Communauté européenne) indique que le produit sur
lequel il est appliqué NE doit PAS être mis au rebut
avec les ordures ménagères ou les déchets industriels
ordinaires, mais passer par un système de collecte
sélective.
Après avoir vérifié les termes et conditions du contrat
de vente, l’utilisateur final est donc prié de contacter le
fournisseur du dispositif, maison mère ou revendeur,
pour mettre en œuvre le processus de collecte et mise
au rebut.

DANGER!

1. Module d’entrée de l’alimentation du Contrôleur. Il est
doté du fusible de protection, du dispositif de
changement de tension, de la prise d’alimentation en
puissance et du filtre EMC (qui n’est pas compris dans
le bloc prise/dispositif de changement de tension).

2. Connecteur de sortie haute tension pour l’alimentation
de la pompe (type KINGS O FISCHER).

3. Connecteur d’entrée/sortie des signaux pour les
accessoires.

1

3

2

INSTRUCTIONS FOR USE

10 87-900-049-01 (E)

GENERAL INFORMATION

This equipment is destined for use by professionals.
The user should read this instruction manual and any
other additional information supplied by Varian before
operating the equipment. Varian will not be held
responsible for any events occurring due to non­compliance, even partial, with these instructions,
improper use by untrained persons, non-authorised
interference with the equipment or any action contrary
to that provided for by specific national standards. The
MiniVac is a high voltage and low power feeder used to
feed the ionic pumps.

The following paragraphs contain all the information
necessary to guarantee the safety of the operator when
using the equipment. Detailed information is supplied in
the section "Technical Information".

This manual uses the following standard protocol:

!

The warning messages are for attracting the attention
of the operator to a particular procedure or practice
which, if not followed correctly, could lead to serious
injury.

CAUTION!

The caution messages are displayed before
procedures which, if not followed, could cause damage
to the equipment.

NOTE

The notes contain important information taken from the
text.

STORAGE

When transporting and storing the MiniVacs, the
following environmental requirements should be
satisfied:

• temperature: from -20 °C to + 70 °C

• relative humidity: 0 - 95%

(without condensation)

PREPARATION FOR INSTALLATION

The controller is supplied in a special protective
packing. If this shows signs of damage which may have
occurred during transport, contact your local sales
office. When unpacking, ensure that the module is not
dropped or subjected to any form of impact. Do not
dispose of the packing materials in an unauthorised
manner. The material is 100% recyclable and complies
with EEC Directive 85/399.

Controller Packing

Each controller is factory set for a specific power
supply:

• Model 929-0190 KINGS type High voltage
connector (120 Vac, 50 – 60 Hz)

• Model 929-0191 FISCHER type High voltage
connector (120 Vac, 50 – 60 Hz)

• Model 929-0290 FISCHER type High voltage
connector (220 Vac, 50 – 60 Hz)

• Model 929-0291 KINGS type High voltage
connector (220 Vac, 50 – 60 Hz)

WARNING!

INSTRUCTIONS FOR USE

11 87-900-049-01 (E)

INSTALLATION

!

The controller is equipped with a 3-wire power cord and
plug (internationally approved) for user's safety. Use
this power cord and plug in conjunction with a properly
grounded power socket to avoid electrical shock.
High voltage developed in the controller can cause
severe injury or death. Before servicing the unit,
disconnect the input power cable.

NOTE

The controller must be installed inside a rack module,
but it must be positioned so that free air can flow
through the holes. Do not install or use the controller in
an environment exposed to atmospheric agents (rain,
snow, ice), dust, aggressive gases, or in explosive
environments or those with a high fire risk.

During operation, the following environmental
conditions must be respected:

• temperature: from 0 °C to +45 °C

• relative humidity: 0 - 95%

(without condensation)

To connect the controller to the pump use the specific
cable supplied with the controller.

See the section "Technical Information" for detailed
information about the above mentioned and the other
connections, and about the options installation.

USE

This paragraph describes the fundamental operating
procedures. Detailed information and operating
procedures that involve optional connections or options
are supplied in the paragraph "USE" of the section
"Technical Information".

Make all vacuum manifold and electrical connections
and refer to the pump instruction manual prior to
operating the controller.

Controller Controls, Indicators and
Connectors

The following paragraph illustrates either the front and
rear panel with its interconnections.

More details are contained in the appendix "Technical
Information".

Mini Vac

1. High Load LED, comes on when the current absorbed by the
pump reaches 12 mA

2. Output selected polarity LED

3. Output voltage scale (KV)

4. Main ON/OFF switch

5. Voltage/current LED scale

6. H.V. LED ON

7. Output connector of the sSignal proportional to the current
1 V= 1 mA log

8. Current scale (mA)

Controller Front Panel

WARNING!

1

2

3

4

5

6

7

8

INSTRUCTIONS FOR USE

12 87-900-049-01 (E)

Controller Rear Panel

NOTE

The unit is provided with a Line Voltage selector. Refer
to the "INSTALLATION" paragraph of "TECHNICAL
INFORMATION" section for details about the Line
Voltage selection operation.

USE PROCEDURE

Controller Start-up

To start-up the controller, turn the main switch to ON,
after plugging the power cable into a suitable power
source.

Starting the Pump

The pump is activated only if the controller is powered
on and the pump itself is connected to the output
connector. For further information refer to the
“Technical Information” section.

Pump Shutdown

To shutdown the pump, turn the main switch placed on
the front panel to OFF.

MAINTENANCE

The MiniVac series controllers do not require any
maintenance interventions. Any intervention must be
performed by authorised personnel only.
When a fault has occurred it is possible to use the
Varian repair service or the “Varian advance exchange
service”, that allows to obtain a regenerated controller
replacing the faulty one.

!

Before carrying out any work on the controller,
disconnect it from the supply.

NOTE

Pins 3 and 7 on the loopback plug provided with the
unit are short circuited (Remote ON/OFF). This
loopback plug must be fitted to power on the HV unless
a Remote/Interlock contact is connected.

NOTE

The unit is factory set with a negative output polarity.
Refer to the section “Output Polarity Selection” for
instructions on how to change the output polarity.

If a pump is to be scrapped, it must be disposed of in
accordance with the specific national standards.

DISPOSAL

Meaning of the "WEEE" logo found in labels

The following symbol is applied in accordance with the
EC WEEE (Waste Electrical and Electronic Equipment)
Directive.
This symbol (valid only in countries of the European
Community) indicates that the product it applies to
must NOT be disposed of together with ordinary
domestic or industrial waste but must be sent to a
differentiated waste collection system.
The end user is therefore invited to contact the supplier
of the device, whether the Parent Company or a
retailer, to initiate the collection and disposal process
after checking the contractual terms and conditions of
sale.

WARNING!

1. Input module for the controller power supply. It
includes the protection fuse, the voltage changer, the
power supply plug, and the EMC filter (not included
into the plug/voltage switch assembly).

2. High voltage output connector for the pump (KINGS
or FISCHER type) power supply.

3. Input/output signal connector for fittings

1

3

2

TECHNICAL INFORMATION

13 87-900-049-01 (E)

MINIVAC DESCRIPTION

The MiniVac controller is a quarter rack solid state
power supply with self protection features, which
generates high voltage using high frequency switching
technology.

The MiniVac ion pump controller is designed to operate
any type of ion pumps: Diode, Differential Diode,
Triode and StarCell.

The MiniVac controller is a very compact and light unit
capable of powering any size of pump at different
operating pressure.

Small pumps (up to 8 l/s) can be operated at any
pressure up to 1 x 10

-3

mbar.

Medium pumps (20 l/s to 60 l/s) can be operated at any
pressure up to 1 x 10

-5

mbar/Torr (continuous

operation).

Large pumps (120 l/s to 400 l/s) can be operated at any
pressure up to 2 x 10

-6

mbar/Torr (continuous

operation).

Medium/larger ion pumps must first be started with an
appropriate control unit and pumped to a sufficiently
low pressure where the current demand is below 8 mA.

The MiniVac controller is designed to withstand
continuous operation at short circuit condition, without
any damage to the ion pump or to the controller itself.

The MiniVac controller is available in four versions,
which differ in the factory-set input voltage and in the
high voltage output connector type.

• Model 929-0190 KINGS type High voltage
connector (120 Vac, 50/60 Hz)

• Model 929-0191 FISCHER type High voltage
connector (120 Vac, 50/60 Hz)

• Model 929-0290 FISCHER type High voltage
connector (220 Vac, 50/60 Hz)

• Model 929-0291 KINGS type High voltage
connector (220 Vac, 50/60 Hz)

A voltage change over allows to select different
operating voltages.

MiniVac Controllers

TECHNICAL INFORMATION

14 87-900-049-01 (E)

The MiniVac controller front panel controls are shown
in the following figure.

Mini Vac

MiniVac Front Panel Controls

1. High Load LED lights up when the pump current is
higher than 12 mA.

2. Output polarity LEDs selection indicators.

3. Voltage output scale (kV).

4. Controller power ON/OFF switch.

5. Current/voltage LED's bar graph
indicator.

6. H. V. ON LED.

7. Recorder output connector.

8. Pump current scale (mA).

The MiniVac controller rear panel controls are shown in
the following figure.

MiniVac Controller Rear Panel Controls

1. Controller power entry module consisting of mains
fuses, voltage change over, mains socket.

2. High voltage output connector (KINGS or
FISCHER type).

3. Accessory connector for input/output signals.

1

2

3

4

5

6

7

8

1

2

3

TECHNICAL INFORMATION

15 87-900-049-01 (E)

CONTROLLER SPECIFICATIONS

Operation All type and size of

VacIon pump

Input:

- Voltage
(4 ranges)

- Frequency

- Power

- Fuse

100 Vac
120 Vac
220 Vac
240 Vac
50 to 60 Hz
50 VA
2 x T 2A
(disregarding the mains)

Output:

- Voltage

- Current

- Power

±5000 Vdc ±10% (refer to
the following figure) (polarity
through internal card)

15 mA (short circuit) (refer to
the following figure)

21 W

Dual Current
Recorder
Output:

- Rec Out1

- Rec Out2

0 to 10 Vdc (10 V correspond
to 10 mA);
resolution of 10 mV minimum
(corresponding to 10 µA)
Available on front panel BNC
connector and at pins 1 and 6
of rear panel Accessory
connector.

0 to 10 Vdc (10 V correspond
to 1 mA);
resolution of 10 mV
minimum (corresponding
to 1 µA)
Available at pins 2 and 6 of
rear panel Accessory
connector.

Voltage
Recorder
Output:

- Rec Out

0 to 5 V (corresponding to
0 to 5 kV with 1 V
corresponding to 1 kV in
linear mode)
Available at pins 4 and 8 of
rear panel Accessory
connector.

Operating
temperature

0 °C to 45 °C

Storage
temperature

-20 °C to +70 °C

Radio interference
suppression

EN 55011 class A Group 1
EN 61000-4-2
EN 61000-4-4
EN 61000-4-3

Safety EN 61010-1

Installation category II

Pollution degree 2

Output connector:

- High voltage

- Accessory

FISCHER type:
part number 105 A049
for model 929-0290 and
929-0191
KINGS type:
part number 1064-1
for model 929-0190 and 929­0291
J 001 input/output
signal (9-pin "D" type socket)

Cable Mains, 3 meters long

Weight 2.3 Kg 5.06 lbs

TECHNICAL INFORMATION

16 87-900-049-01 (E)

Voltage Vs Current Diagram

CONTROLLER OUTLINE

The outline dimensions of the MiniVac controller are shown in the following figure.

MiniVac Outline Dimensions

TECHNICAL INFORMATION

17 87-900-049-01 (E)

INSTALLATION

Inspect the controller for any shipping damage.

• Models 929-0190 and 929-0191 are factory set for
120 Vac operation

• Models 929-0290 and 929-0291 are factory set for
220 Vac operation.

WARNING

The MiniVac controller is equipped with a 3-wire power
cord and plug (internationally approved) for user's
safety. Use this power cord and plug in conjunction with
a properly grounded power socket to avoid electrical
shock.
High voltage developed in the controller can cause
severe injury or death. Before servicing the unit,
disconnect the input power cable.

NOTE

The MiniVac controller can be used as a bench unit or
as a rack module, but it must be positioned so that free
air can flow through the holes.

Line Voltage Change Over

If a change in line voltage operation is desired, proceed
as follows:

• Unplug the power cord from the controller rear
panel socket.

• On the power entry module (rear panel), check back
door for voltage selector set.

• Using a small screwdriver, pull out the voltage
selector and fuses.

• Select the operating voltage, then firmly insert the
voltage selector and fuses in place.

• Check voltage selector window for correct set and
connect the power cord.

• For Line Voltage between 200 and 230 Vac set the
voltage selector to 220 Vac; for Line Voltage higher
than 230 Vac set the voltage selector to 240 Vac.

Output Polarity Selection

The output polarity is selected by the high voltage
multiplier card, and is factory set for negative output
voltage polarity. If a change in output polarity is
desired, proceed as follows:

• Switch off the power and unplug the power cord
from the controller rear panel socket.

• Undo the 9 screws and then remove the cover.

• Disconnect the H.V. white wire (1) from the

multiplier board (see the following figure), remove
the board (2) and rotate it 180° horizontally; reinstall
the board into the socket and reconnect the H.V.
white wire.

• Install the cover and screws.

• Connect the power cord then switch on the unit and

check on the front panel the output polarity
indication.

Output Polarity Selection

1

2

TECHNICAL INFORMATION

18 87-900-049-01 (E)

Input/Output Interconnections

All input/output signals are accessible at J001
accessory connector. With the provided P001 mating
connector make the connections with
AWG 24 (0.2 mm

2

) - or smaller wire - to the pins
indicated in the following figure to obtain the desired
capability.

Input signals

Pin 3-7 Remote high voltage ON/OFF or high

voltage interlock; requires a permanent
closed pin contact.

NOTE

Pin 3-7 must be shorted to allow the high voltage
output if no remote/interlock contact is connected.

Output signals

Pin 1-6 Current recorder output 1 (pin 1 signal out,

pin 6 ground). The output voltage 0 to + 10
Vdc is proportional to the pump current 0 to
10 mA (e.g. 10 Vdc correspond to 10 mA).
The resolution is 10 mV minimum
(corresponding to 10 µA).

The front panel REC.OUT connector is a duplicate of
this signal on a BNC connector.

Pin 2-6 Current recorder output 2 (pin 2 signal out,

pin 6 ground). The output voltage 0 to + 10
Vdc is proportional to the pump current 0 to
1 mA (e.g. 10 Vdc correspond to 1 mA). The
resolution is 10 mV minimum (corresponding
to 1

µA).

Pin 4-8 Voltage recorder output (pin 4 signal out, pin

8 ground). The output voltage 0 to 5 V is
proportional to the controller high voltage
output 0 to 5 kV (e.g. 1 V corresponds to 1
kV in linear mode).

Pin 5-9 High voltage indication contact. This pure

contact (which carries 1 A at 250 Vac and

0.2 A at 30 Vdc) is open when the high
voltage is off and closes when the high
voltage in on.

P001 Mating Connector and J001 Accessory Connector

Pump Connection

The pump is connected to the controller rear panel via
the high voltage connector by a coaxial high voltage
cable assembly.

WARNING

High voltage can cause severe injury or death.
Before installing or removing the connector:

- Turn the power off.

- When connecting the cable to 2 l/s pumps, or
larger, be sure that the ground spring is in place on
the high voltage connection of the pump.

- Install the pump connector and secure
it with screws.

- Plug the controller connector.

TECHNICAL INFORMATION

19 87-900-049-01 (E)

OPERATION

Make all vacuum manifold and electrical connections
and refer to the ion pump instruction manual prior to
operating the MiniVac controller.

NOTE

The accessory P001 connector should be left in
position including the jumper between pin 3 and 7 if no
external connection has been made.

For small ion pumps, up to 8 l/s:

with a roughing pump, establish a rough pressure
suitable to start the ion pump.

For medium ion pump (20 l/s to 60 l/s):

establish a pressure lower than 10

-5

mbar/ Torr.

For large ion pumps (120 l/s to 400 l/s):

establish a pressure lower than 2 x 10

-6

mbar/Torr.

CAUTION

Before plugging in the controller power cable, be sure
that the selected operating voltage matches the power
source to avoid equipment damage.

• Plug the controller power cable into a suitable

power source.

• Place the ON/OFF switch in the ON position.

• Monitor the VacIon pump current and the controller

high voltage output by watching the LED lit, then
read the corresponding current/voltage value (e.g.:
if the third LED is increasing its brightness it
means that the pump current is between 2 and 3
mA and the high voltage output is between 5 and 4
kV).

• If only the first LED of the bar graph is lit, the

current drawn by the pump is less than 1 mA and
the voltage output is 5 kV.

• If ten LEDs are lit, the current drawn by the pump

is 10 mA and the voltage output is 2 kV.

• For the correct determination of the voltage value,

use the voltage vs current diagram shown in the
figure “MiniVac Controller Rear Panel Controls”.

Pressure Determination

Pressure at the inlet flange of a VacIon pump is
proportional to the current drawn by the pump.

To determine the pressure of the inlet flange of the
VacIon pump, determine the pump current displayed
on the front panel or read the recorder output
(especially for current lower than 1 mA), and find the
corresponding pressure value from the current vs
pressure curve of the relevant VacIon pump.

Power Failure

In the event of a power failure (momentary or long
period) the controller is switched off. When power is
restored, the controller will automatically restart.

Remote Control Mode Operation

It is possible to remotely switch onb and off the high
voltage using a permanent contact connected to pins 3
and 7 of J001 accessory connector with the mains
power ON/OFF switch to ON.

TECHNICAL INFORMATION

20 87-900-049-01 (E)

MAINTENANCE

Replacement controllers are available on advance
exchange basis through Varian service/sales
organization.

WARNING

High voltage in the controller can cause severe injury
or death. Before servicing, turn power off and remove
the power cable.

Troubleshooting

a. No current/voltage LED bar graph lit with mains

power ON.

− Verify mains connections and power fuses

− Verify on P001 that pins 3-7 are shorted.

b. VacIon pump is operating at pressures higher than

1x10

-5

mbar/Torr and only the first LED

is lit.

− No high voltage output. Replace the unit.

c. VacIon pump operating at pressure below

1x10

-7

mbar/Ton and all LED are lit.

− Switch power off and disconnect the high
voltage cable.

− Switch power on and verify that only one LED is
lit. If this happens the high voltage cable or the
pump are shorted.

− If not, replace the unit.

Controller Spares and Accessories

Description Part number

Mating accessory connector
P001

03-648487

Fuse T 2A (5x20 mm)

Rack adapter 969-9191

Mains cable 120 Vac
USA plug

03-660441-02

Mains cable 220 Vac
European plug

03-660441-01

Controller to Vacion Pump Cables

Description Part number

H.V. bakeable cable,
4 m long to connect
929-0191 or 929-0290
to Star Cell and new VacIon
pump series 919

929-0770

H.V. cable, 3.5 m long
to connect 929-0190 or
929-0291 to Appendage
pumps and conventional
VacIon pump series
911 and 912

924-0741

H.V. bakeable cable,
4 m long to connect
929-0191 or 929-0290 to
Appendage and conven­tional VacIon pump series
911 and 912

929-0780

Request for Return

1. A Return Authorization Number (RA#) WILL NOT be issued until this Request for Return is completely filled out,
signed and returned to Varian Customer Service.

2. Return shipments shall be made in compliance with local and international Shipping Regulations (IATA, DOT, UN).

3. The customer is expected to take the following actions to ensure the

Safety

of workers at Varian: (a) Drain any oils or
other liquids, (b) Purge or flush all gasses, (c) Wipe off any excess residues in or on the equipment, (d) Package the
equipment to prevent shipping damage, (for Advance Exchanges please use packing material from replacement unit).

4. Make sure the shipping documents clearly show the RA# and then return the package to the Varian location nearest you.

North and South America

Varian Vacuum Technologies

121 Hartwell Ave

Lexington, MA 02421

Phone : [phone]

Fax: [phone]

Europe and Middle East

Varian SpA

Via Flli Varian 54

10040 Leini (TO) – ITALY

Phone: [phone]

Fax: [phone]

Asia and ROW

Varian Vacuum Technologies

Local Office

CUSTOMER INFORMATION

Company name: ..………………….……..……………….………………………………..……………………...…………..….

Contact person: Name: ……………………………………..… Tel: ……………………….…...…………….….…....

Fax: …………………………….…...…..…… E-Mail: ..……………………..…………..…..…..…..

Ship Method: …………….……....…… Shipping Collect #: ………….…..………… P.O.#: ………………….…......………..

Europe only: VAT reg. Number: ………………..……………... USA only: Taxable Non-taxable

Customer Ship To: ………………………….……… Customer Bill To: …………………..……………...

……………..…………………... ..………………………………...

………………..………………... ..………………………………...

PRODUCT IDENTIFICATION

Product Description Varian P/N Varian S/N Purchase Reference

TYPE OF RETURN (check appropriate box)

Paid Exchange Paid Repair

Warranty Exchange

Warranty Repair

Loaner Return

Credit Shipping Error

Evaluation Return

Calibration

Other ……………….

HEALTH and SAFETY CERTIFICATION

Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or
RADIOACTIVITY. Call Varian Customer Service to discuss alternatives if this requirement presents a problem.

The equipment listed above (check one):

HAS NOT

been exposed to any toxic or hazardous materials

OR

HAS

been exposed to any toxic or hazardous materials. In case of this selection, check boxes for any materials that

equipment was exposed to, check all categories that apply:

Toxic Corrosive Reactive Flammable Explosive Biological Radioactive

List all toxic or hazardous materials. Include product name, chemical name and chemical symbol or formula.

.……………………………………………………………………………………………………………………..

Print Name: …………………………………. Customer Authorized Signature: ……………...…………………….

Print Title: …………………………………... Date: ..…../..…../……

NOTE:

If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed,

the customer

will be held responsible

for all costs incurred to ensure the safe handling of the product, and

is liable

for any harm or injury to Varian

employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.

Do not write below this line

Notification (RA)#: ……………………….……….. Customer ID#: ……….…………. Equipment #: ……………………..

Request for Return

FAILURE REPORT

TURBO PUMPS and TURBOCONTROLLERS

POSITION PARAMETERS

Does not start

Noise

Vertical

Power: Rotational Speed:

Does not spin freely

Vibrations

Horizontal

Current: Inlet Pressure:

Does not reach full speed

Leak

Upside-down

Temp 1: Foreline Pressure:

Mechanical Contact

Overtemperature

Other: Temp 2: Purge flow:

Cooling defective …………………. OPERATION TIME:

TURBOCONTROLLER ERROR MESSAGE:

ION PUMPS/CONTROLLERS VALVES/COMPONENTS

Bad feedthrough

Poor vacuum

Main seal leak

Bellows leak

Vacuum leak

High voltage problem

Solenoid failure

Damaged flange

Error code on display

Other

Damaged sealing area

Other

Customer application:

Customer application:

LEAK DETECTORS INSTRUMENTS

Cannot calibrate

No zero/high backround

Gauge tube not working Display problem

Vacuum system unstable

Cannot reach test mode

Communication failure

Degas not working

Failed to start

Other

Error code on display

Other

Customer application:

Customer application:

PRIMARY PUMPS DIFFUSION PUMPS

Pump doesn’t start

Noisy pump (describe)

Heater failure

Electrical problem

Doesn’t reach vacuum

Over temperature

Doesn’t reach vacuum

Cooling coil damage

Pump seized

Other

Vacuum leak

Other

Customer application:

Customer application:

FAILURE DESCRIPTION

(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):

NOTA: Su richiesta questo documento è disponibile anche in Tedesco, Italiano e Francese.
REMARQUE : Sur demande ce document est également disponible en allemand, italien et français.
HINWEIS: Auf Aufrage ist diese Unterlage auch auf Deutsch, Italienisch und Französisch erhältlich.

Sales and Service Offices

France and Benelux
Varian s.a.

7 Avenue des Tropiques
Z.A. de Courtaboeuf - B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: [phone]
Fax: [phone]
From Benelux Tel: [phone]
From Benelux Fax: [phone]

Canada
Central coordination through:

Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: [phone]
Fax: [phone]
Toll Free # 1 [phone]

China
Varian Technologies - Beijing

Rm 1648 Central Tower South Wing
Beijing Junefield Plaza
No. 10 XuanWuMenWai Street
Beijing 100052
P.R. China
Tel: [phone]
Fax: [phone]
Toll Free: 800 820 6556

Germany and Austria
Varian Deutschland GmbH

Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: [phone]
Fax: [phone]

India
Varian India PVT LTD

101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: [phone]
Fax: [phone]

Italy
Varian Inc.
Vacuum Technologies

Via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: [phone]
Fax: [phone]

03/06

Japan
Varian Vacuum Technologies

Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: [phone]
Fax: [phone]
Toll Free: 0120 655 040

Korea
Varian Technologies Korea, Ltd

Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: [phone]
Fax: [phone]
Toll Free: 080 222 2452

Mexico
Varian, S. de R.L. de C.V.

Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: [phone]
Fax: [phone]

Taiwan
Varian Technologies Asia Ltd.

14F-6, No.77, Hsin Tai Wu Rd., Sec. 1
Hsi chih, Taipei Hsien
Taiwan, R.O.C.
Tel: [phone]
Fax: [phone]
Toll Free: 0800 051342

UK and Ireland
Varian Ltd.

6 Mead Road
Oxford Industrial Park - Yarnton
Oxford OX5 1QU - England
Tel: [phone]
Fax: [phone]

United States
Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: [phone]
Fax: [phone]

Other Countries
Varian Inc.
Vacuum Technologies

Via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: [phone]
Fax: [phone]

Customer Support & Service:

North America

Toll-Free: 1 800 882 7426
[e-mail]

Europe

Tel: [phone]
[e-mail]

China

Toll-Free: 800 820 8266
[e-mail]

Japan

Toll-Free: 0120 655 040
[e-mail]

Korea

Toll-Free: 080 222 2452
[e-mail]

Taiwan

Toll-Free: 0 800 051 342
[e-mail]

Worldwide Web Site, Catalog
and Order On-line:

www.varianinc.com

Representative in most countries