Varian HS-16, HS-20, HS-32, NHS-35 Instruction Manual

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DRAFT 8/22/0

INSTRUCTION MANUAL

vacuum technologies

High Throughput

Diffusion Pumps

HS-16 HS-20 HS-32 NHS-35

Part No. 699901140

Rev. A

August 2003

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Varian Vacuum Technologies

High Throughput Diffusion Pumps

Santovac® 5 Diffusion Pump Fluid of SANTOVAC FLUIDS, INC. Viton

is a registered trademark of E. I du Pont de Nemours and Company.

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High Throughput Diffusion Pumps

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Contents

Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v

Declaration of Conformity. . . . . . . . . . . . . . . . . . . . . vii

Diffusion Pump Hazards . . . . . . . . . . . . . . . . . . . . . . . 1

Explosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

Pressurization Hazards . . . . . . . . . . . . . . . . . . . . 3

Dangerous Substances . . . . . . . . . . . . . . . . . . . . . 3

High Temperatures . . . . . . . . . . . . . . . . . . . . . . . 4

High Voltages . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

Large Equipment and Heavy Weights . . . . . . . . . 4

Diffusion Pump Basics . . . . . . . . . . . . . . . . . . . . . . . . . 5

Pump Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

Operating Characteristics . . . . . . . . . . . . . . . . . . . . 5

Pump Air Speed and Throughput . . . . . . . . . . . . . . . 8

Physical Specifications . . . . . . . . . . . . . . . . . . . . . . 9

Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Cleaning a New Pump . . . . . . . . . . . . . . . . . . . . . 14

Cleaning Safety . . . . . . . . . . . . . . . . . . . . . . . . . 14

Disassembly for Initial Cleaning . . . . . . . . . . . . 14

Reassembly After Initial Cleaning . . . . . . . . . . . 14

System and Utility Connections. . . . . . . . . . . . . . . . . 15

Vacuum Connections . . . . . . . . . . . . . . . . . . . . . . 15

Cooling Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Electrical Connections . . . . . . . . . . . . . . . . . . . . . . 17

Overheating: Detection by Thermal Switches . . . . 18

Initial Vacuum Test . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Adding or Changing Pump Fluid . . . . . . . . . . . . . . 32

Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

Startup Procedure . . . . . . . . . . . . . . . . . . . . . . . . . 35

Shutdown Procedure . . . . . . . . . . . . . . . . . . . . . . . 35

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

Periodic Inspections . . . . . . . . . . . . . . . . . . . . . . . 36

Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

Cleaning Safety . . . . . . . . . . . . . . . . . . . . . . . . . 37

Disassembly and Reassembly Procedures . . . . . . . 38

Cold Cap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

Jet Assemblies . . . . . . . . . . . . . . . . . . . . . . . . . . 39

Heater Replacement Procedure . . . . . . . . . . . . . 45

Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46

Leakage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46

Outgassing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46

Poor Pump or System Performance . . . . . . . . . . . . 47

Replacement Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . 48

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List of Figures

Figure Caption Page

1 HS-20 Diffusion Pump . . . . . . . . . . . . . . . . . . 5

2 HS-16 Speed and Throughput Curves, 8.1 kW8

3 HS-20 Speed and Throughput Curves . . . . . . 8

4 HS-32 Speed and Throughput Curves . . . . . . 8

5 NHS-35 Speed and Throughput Curves . . . . . 8

6 HS-16 Outline with ASA Flanges . . . . . . . . . 9

7 HS-20 Outline with ASA Flanges . . . . . . . . 10

8 HS-32 Outline with ASA Flanges . . . . . . . . 11

9 NHS-35 Outline with ASA Flanges. . . . . . . 12

10 Cooling Water Connections. . . . . . . . . . . . . 15

11 HS-16 200/240/400/430/440/480 V Wiring 19

12 HS-16 380/415 V Wiring . . . . . . . . . . . . . . 20

13 HS-20 200/240/400/430/480 V Wiring . . . 21

14 HS-20 380/415 V Wiring . . . . . . . . . . . . . . 22

15 HS-32 200 V Wiring . . . . . . . . . . . . . . . . . 23

16 HS-32 240 V Wiring . . . . . . . . . . . . . . . . . 24

17 HS-32 460 V Wiring . . . . . . . . . . . . . . . . . 25

18 HS-32 380/415 V Wiring . . . . . . . . . . . . . . 26

19 HS-32 480 V Wiring . . . . . . . . . . . . . . . . . 27

20 NHS-35 240/400/440 V Wiring . . . . . . . . . 28

21 NHS-35 380/415 V Wiring . . . . . . . . . . . . 29

22 NHS-35 480 V Wiring . . . . . . . . . . . . . . . . 30

23 Sight Glass Assembly . . . . . . . . . . . . . . . . . . 33

24 Cold Cap Assembly . . . . . . . . . . . . . . . . . . 38

25 HS-16 Jet Assembly . . . . . . . . . . . . . . . . . . . 39

26 HS-20 Jet Assembly . . . . . . . . . . . . . . . . . . . 40

27 Jet Coupling Detail. . . . . . . . . . . . . . . . . . . 41

28 HS-32 Jet Assembly . . . . . . . . . . . . . . . . . . . 42

29 NHS-35 Jet Assembly . . . . . . . . . . . . . . . . . . 44

30 Heater Element Assembly . . . . . . . . . . . . . . 45

List of Tables

Table Title Page

1 General Hazards . . . . . . . . . . . . . . . . . . . . . . 1

2 Explosive Conditions . . . . . . . . . . . . . . . . . . . 2

3 Pressurization Hazards . . . . . . . . . . . . . . . . . 3

4 Operating Specifications . . . . . . . . . . . . . . . . 6

5 HS-16: Dimensions and Weights. . . . . . . . . . 9

6 HS-16 Flange Dimensions . . . . . . . . . . . . . . . 9

7 HS-20: Dimensions and Weights. . . . . . . . . 10

8 HS-20 Flange Dimensions . . . . . . . . . . . . . . 10

9 HS-32: Dimensions and Weights. . . . . . . . . 11

10 HS-32 Flange Dimensions . . . . . . . . . . . . . . 11

11 NHS-35: Dimensions and Weights . . . . . . . 12

12 NHS-35 Flange Dimensions . . . . . . . . . . . . 12

13 Wiring Diagram Locations . . . . . . . . . . . . . 17

14 Thermal Cutout Temperatures. . . . . . . . . . . 18

15 Troubleshooting Guide . . . . . . . . . . . . . . . . 47

16 HS-16 Replacement Parts . . . . . . . . . . . . . . 48

17 HS-20 Replacement Parts . . . . . . . . . . . . . . 49

18 HS-32 Replacement Parts . . . . . . . . . . . . . . 50

19 NHS-35 Replacement Parts . . . . . . . . . . . . . 51

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Preface

Warranty

Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, replacement, or refund an equitable portion of the purchase price of the Product. Items expendable in normal use are not covered by this warranty. All warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired portion of the original warranty period applicable to the repaired or replaced parts. After expiration of the applicable warranty period, Customer shall be charged at the then current prices for parts, labor, and transportation.

When products are used with toxic chemicals, or in an atmosphere that is dangerous to the health of humans, or is environmentally unsafe, it will be the responsibility of the Customer to have the product cleaned by an independent agency skilled and approved in handling and cleaning contaminated materials before the product will be accepted by Varian Associates for repair and/or replacement.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller.

Disclaimer

Operation and maintenance of this equipment involves serious risk. It is the responsibility of the user to maintain safe operating conditions at all times. Varian assumes no liability for personal injury or damage resulting from operation or service of the equipment.

Varian has no control over the use of this equipment and is not responsible for personal injury or damage resulting from its use. The safe use and disposal of hazardous or potentially hazardous materials of any kind is the sole responsibility of the user. Observe all WARNINGS and CAUTIONS to minimize the serious hazards involved.

It is the sole responsibility of the users of Varian equipment to comply with all local, state and federal safety requirements (laws and regulations) applicable to their system. Employ the services of an industrial hygienist and/or a qualified chemical safety engineer in order to ensure safe installation and use.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto, and must be received within the applicable warranty period by Seller or its authorized representative. Such claims should include the Product serial number, the date of shipment, and a full description of the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjustment, written authorization from Seller or its authorized representative for the return and instructions as to how and where these Products should be returned must be obtained. Any Product returned to Seller for examination shall be prepaid via the means of transportation indicated as acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on any item that has been altered or has been returned by non-acceptable means of transportation. When any Product is returned for examination and inspection, or for any other reason, Customer shall be responsible for all damage resulting from improper packing or handling, and for loss in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for determining the cause and nature of failure, and Seller’s determination with regard thereto shall be final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will be notified and the Product returned at its expense; in addition, a charge for testing and examination may be made on Products so returned.

3/1/00

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Instructions for Use

This equipment is designed for use by professionals. The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment. Varian will not be held responsible for any events that occur due to non-compliance with these instructions, improper use by untrained persons, non-authorized interference with the equipment, or any action contrary to that proved for by specific national standards.

This manual uses the following standard safety protocol:

WARNING The warnings are for attracting the

attention of the operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury.

CAUTION The cautions are displayed before

procedures, which if not followed, could cause damage to the equipment.

NOTE The notes contain important

information taken from the text.

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Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA, 02421-3133 USA

declare under our sole responsibility that the product, erklären, in alleniniger Verantwortung, daß dieses Produkt, déclarons sous notre seule responsabilité que le produit, declaramos, bajo nuestra sola responsabilidad, que el producto, verklaren onder onze verantwoordelijkheid, dat het product, dichiariamo sotto nostra unica responsabilità, che il prodotto,

Declaration of Conformity Konformitätserklärung Déclaration de Conformité Declaración de Conformidad Verklaring de Overeenstemming Dichiarazione di Conformità

to which this declaration relates is in conformity with the following standard(s) or other normative documents. auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt. auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s). al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s). waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt. a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.

Frederick C. Campbell Operations Manager Varian Vacuum Technologies Lexington, Massachusetts, USA

We Wir Nous Nosotros Wij Noi

March 2003

High Throughput Diffusion Pumps

Low Voltage Directive

73/023/EEC

EN 61010-1 . . . . . . . . . . . . . . . . . . . . . “Safety requirements for electrical equipment for measurement, control and

laboratory use”, incorporating amendments, numbers 1 and 2.

VMF-11 M-2 VHS-6 HS-16

AX-65 M-4 VHS-250 HS-20

AX-150 VHS-4 VHS-10 HS-32

HS-2 M-6 VHS-400 NHS-35

eclaration of Conform

ity

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High Throughput Diffusion Pumps

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High Throughput Diffusion Pumps

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Diffusion Pump Hazards

Designers of systems utilizing diffusion pumps must design out hazards wherever possible. For hazards that cannot be designed out, warnings, procedures, and instructions on proper use and servicing are provided. Please use guards, safety features, and interlocks as recommended.

Refer to Table 1 for a list of general hazards and recommended actions, Table 2 on page 2 for a list of prohibited actions that can result in explosions, and Table 3 on page 3 for a list of pressurization hazards that can result in damage to equipment.

THE INSTALLATION, OPERATION, AND SERVICING OF DIFFUSION PUMPS INVOLVES ONE OR MORE OF THE FOLLOWING HAZARDS, ANY ONE OF WHICH IN THE ABSENCE OF SAFE OPERATING PRACTICES AND PRECAUTIONS, COULD POTENTIALLY RESULT IN DEATH OR SERIOUS HARM TO PERSONNEL.

Table 1 General Hazards

Hazard Suggested Corrective Action

Loss of utility: water and/or electricity Provide sufficient backup water and power supply as

necessary to effect a safe shutdown under worst case conditions

Overpressure in foreline Provide an interlock to ensure that the power supply to the

pump heater cannot be activated if the foreline pump is not running and/or the pressure in foreline is above 0.5 Torr (0.38 mbar)

Overtemperature Fit temperature sensors and pump fluid level sensors with

feedback to an interlock on the heater power supply

Insufficient water flow through the main cooling coils Use water flow sensor and feedback to interlock the heater

power supply

Water trapped between inlet and outlet of Quick Cool coil, or liquid nitrogen trapped between inlet and outlet of liquid nitrogen trap

Provide vent or pressure relief valves for both Quick Cool coil and liquid nitrogen trap

Loss of electrical ground integrity Incorporate ground fault interrupt circuit into heater power

supply

Positive pressure in pumping system Integrate pressure relief valve in vacuum system to ensure

system pressure does not exceed 1 atmosphere

High voltage Prevent personnel contact with high voltages; design and

attach warnings

Toxicity and Corrosivity Vent toxic and/or corrosive gases to a safe location; ensure

adequate dilution or scrubbing to safe levels; take all action required to meet air quality standards

Explosion Integrate pressure relief valves

Do not use hydrocarbon-based pumping fluids

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High Throughput Diffusion Pumps

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Explosion

❑ Operation of the diffusion pump without continuous

evacuation below 0.5 Torr (0.67 mbar), or without coolant and introducing a strong oxidizer (such as air) or explosive vapors or powders or materials which may react with pumping fluids in a hot pump (above 300 °F or 150 °C) can cause an explosion. Such an explosion can violently expel valves and other hardware, slam open doors that are not designed for appropriate pressure relief, or burst other components of the vacuum system. Serious injury or death may result from expelled parts, doors, shrapnel, and shock waves.

❑ Three elements are required for explosion: fuel, oxi-

dizer, and an ignition. A combination of temperature and pressure can be a source of ignition. Most diffusion pump fluids are fuels. Hydrocarbon fluids are more prone to oxidize and explode than synthetic silicone-based fluid. The oxidizer can be air, which can be introduced by a leak, deliberately brought in via a process, or inadvertently admitted by operator error. Oxygen and other strong oxidizers are even more dangerous than air. Certain conditions of temperature and pressure can cause a combustible mixture to explode. The larger the diffusion pump, the greater the risk of explosion and the greater the risk of damage and injury. Never operate large diffusion pumps utilizing hydrocarbon oils without a complete safety analysis for the entire system and for the application.

❑ Explosion and Fire from Acetone and Alcohol: Diffu-

sion pumps are typically cleaned with acetone and alcohol. When combined with air, oxygen, and other oxides, alcohol and most other solvents are very flammable and explosive. Never permit any trace of these cleaners to remain in or on the pump. Always remove all traces of alcohol and acetone and other cleaners with clean, dry, oil-free compressed air.

Never operate a large diffusion pump under the conditions listed in Table 2. Any of these situations increases the probability of an explosion.

Table 2 Explosive Conditions

Prohibited Action

Explosion-Causing

Condition

Do not run pump without cooling water

Overtemperature

Do not run pump with low level of pump fluid

Overtemperature

Do not run pump without proper backing or holding pump

Overpressure

Do not run pump when not evacuated below 0.5 Torr (0.38 mbar)

Overpressure

Do not admit air to, or rough through, a pump with hot boiler

Overpressure plus strong oxidizer

Do not open drain or fill plug while pump is under vacuum, especially when it is hot

Overpressure plus strong oxidizer

Do not contaminate pump with explosive vapors

Lower explosive threshold of gas mixtures

Do not remove, defeat, or override safety counter-measures such as pressure and thermal switches and valve sequencer interlocks

Overtemperature, overpressure, more combustible mixtures

Do not machine or weld any part of the pump without removing all fluid or solvent residue in pump

Source of ignition

Do not use unsuitable pumping fluid

Lower explosive threshold of gas mixture

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High Throughput Diffusion Pumps

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Pressurization Hazards

❑ Large vacuum pumps and their components are

designed for vacuum service; they are not designed to be pressurized which could cause them to burst possibly expelling shrapnel at lethal velocities. Serious accidents have been caused by intentional pressurization of vacuum systems and their components.

❑ Never pressurize any part of a vacuum system for

test or any other purpose.

❑ Always provide pressure relief when designing

diffusion pumps into systems and ensure that pressure relief motion is limited to safe envelopes.

❑ Never permit the hazards in Table 3 to develop.

❑ Pressure Relief Devices: Systems must be designed

with pressure relief devices to provide safe pressure relief from internal explosions. Always recognize that safety devices can fail or malfunction; provide redundant protection by installing devices having different failure modes, failure mechanisms, and failure causes. Be certain that exhaust duct materials are capable of withstanding the corrosivity, temperature, and pressure of exhausted products.

Dangerous Substances

❑ Chemical Dangers of Acetone and Alcohol: Diffusion

pumps are typically cleaned with acetone or alcohol. Acetone, alcohol, and most other solvents are irritants, narcotics, and depressants, and/or carcinogenic. Their inhalation and ingestion may produce serious effects. Even absorption through the skin can result in moderate toxicity. Always ensure that cleaning operations are performed in large, well-ventilated rooms. Use of self-contained breathing apparatus may be necessary depending upon the solvent type and vapor concentration in surrounding air.

❑ Poisonous and Corrosive Compounds: When pump-

ing poisonous, reactive, and/or corrosive gas, vapors, or chemicals, proper operation and regeneration do not always ensure that all hazardous materials have been totally removed. If hazardous gas, vapors, chemicals, or combustible mixtures are pumped, sufficient quantities may exist during operation or remain after regeneration to cause severe injury or death.

❑ Pump Fluids: Overheating the pump fluid, exposing it

to air or reactive materials, or overpressurizing it above the normal operating range, approximately 1x10

−

Torr (1.3x10

−

mbar) decomposes the fluid and possibly makes it toxic. This is especially true of backstreamed mechanical pump fluids which are more volatile (unstable). Overheating of accidentally introduced or backstreamed mechanical pump fluids cannot be protected against by thermal switches which are set for diffusion pump fluid.

❑ Process Gasses: Process gasses are frequently toxic,

flammable, corrosive, explosive, or otherwise reactive. Varian has no control over the types of gasses passing through the user’s diffusion pump as these are entirely under the control of the process user and/or the hardware systems integrator. Since these gasses can cause serious injury or death, it is very important to plumb the exhaust of the pump to the facility’s hazardous gas exhaust system which incorporates appropriate filters, scrubbers and similar components to ensure that the exhaust meets all air and water pollution control regulations.

Table 3 Pressurization Hazards

Prohibited Action Result

Do not block inlet or vent of liquid nitrogen trap and lines

LN2 trap and/or lines burst

Do not close isolation valves at inlet and discharge of main water cooling coils when pump is heated

Water turns to steam and bursts coils

Do not pressurize the pump body (above 1 atm.)

Body of pump bursts

Do not make a hole through the vacuum wall

Loss of structural integrity of wall

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High Throughput Diffusion Pumps

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High Temperatures

❑ Hot Surfaces: Boiler temperatures reach 530 °F

(275 °C) which can cause serious burns. Always ensure that surfaces have cooled to near room temperature before touching them.

❑ Hot Cooling Water and Steam: The water used to

cool the pump can reach scalding temperatures. Touching or rupture of the cooling surface can cause serious burns. Water left inside Quick Cool coils from previous use turns to steam when the pump is reheated. This steam must be allowed to escape without contacting personnel. Whenever possible, design the water system with interlock valves so that power cannot be applied to the pump unless water is flowing in the main cooling coils (not Quick Cool coils).

High Voltages

❑ Diffusion pump heaters operate at voltages high

enough to kill. Design systems to prevent personnel contact with high voltages. Securely attach prominent hazard warnings. Personnel should always break the primary circuit to the power supply when direct access to the heater or wiring is required.

Large Equipment and Heavy Weights

❑ The lifting and moving of large diffusion pumps

requires power-assisted equipment and the use of trained moving and installation personnel to avoid dropping, slipping, and overturning the pump. Pumps weigh in excess of 500 lbs (225 kg) and are 3 to 6 feet in their largest dimension (1 to 2 meters). Their mishandling can cause severe injury. Check the weight of the equipment before lifting and assure that the power-assist device is adequate for the task. Do not stand under the equipment being lifted and moved.

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High Throughput Diffusion Pumps

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Diffusion Pump Basics

Diffusion pumps are used where throughput for heavy gas loads is important. The diffusion pumps begin to work at approximately 10

−

Torr after a mechanical backing

pump has exhausted most of the air in the system.

Figure 1 HS-20 Diffusion Pump

There are no moving parts in a diffusion pump, the heart of which is the multistage jet assembly, a group of concentric cylinders that are capped to leave small openings through which vapor can be deflected down and out toward the pump walls. A cold cap, mounted on top of the jet assembly helps keep pump fluid vapor out of the evacuation chamber. The pumps are water-cooled.

The vacuum fluid heater is mounted at the bottom of the pump body. The pumps also have a fill and drain assembly, and thermal protection switches. The inlet is at the top, and the exhaust is through the foreline.

Pump Operation

The diffusion pump works by heating the pump fluid to its boiling point. The vapors travel upward inside the jet assembly and are accelerated out and downward through the jet nozzles toward the cool outer walls of the pump, where the vapor condenses back into a fluid. As the vapor passes the inlet, it picks up elements of the gas to be exhausted and carries them to the ejector and out of the pump via the foreline. The pump’s ability to reach low pressures is governed in part by the inlet size. The gas migrates by thermal motion and is captured and expelled, thus lowering the pressure in the evacuation vessel.

Large diffusion pumps achieve a vacuum using a five-stage jet assembly consisting of four diffusion stages and one ejector stage. The cold cap and body are water cooled. Optional stainless steel Quick Cool coils quickly suppress boiling by cooling the heater; they require an independently valved water supply.

Operating Characteristics

The Operating Characteristics of the large diffusion pumps are given in Table 4 on page 6. The graphs in Figure 2 through Figure 5 on page 8 show air speed and throughput as a function of inlet pressure. The dimensions of the inlet flange that connects to the system to be evacuated are given in Table 6 on page 9 through Table 12 on page 12

NOTE The data in Table 4 on page 6 refers to

pumps charged with DC-704 diffusion pump f lui d.

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High Throughput Diffusion Pumps

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Table 4 Operating Specifications

Specification Units HS-16, 8.1 kW HS-16, 9.6 kW HS-20 HS-32 NHS-35

Operating Range Torr

mbar

7x10

−

to <5x10

−

9.1x10

−

to <7x10

−

1x10

−

to <5x10

−

1.3x10

−

to <7x10

−

8x10

−

to <5x10

−

1x10

−

to <6.7x10

−

8x10

−

to <5x10

−

1.0x10

−

to <7x10

−

5x10

−

to <5x10

−

6.5x10

−

to <7x10

−

Pumping Speed,

Maximum

l/s, Air

l/s, Helium

10,000

12,500

17,500

22,000

32,000

40,000

50,000

62,500

Throughput (Air), Max.

Optimum Range

Overload Range

(@ 1x10

−

Torr)

Torr-l/s

mbar-l/s

Torr-l/s

mbar-l/s

8.5

11.3

12.5

16.6

10.0

13.3

13.5

18.0

141918

233135

253335

CAUTION

Extended operation of pumps in the Overload condition may result in breakdown of the top jet and

resultant fluid loss through the foreline.

Forepressure, Max.

No Load

Full Load

To rr

mbar

To rr

mbar

0.65

0.86

0.55

0.73

0.65

0.86

0.55

0.73

0.50

0.66

0.35

0.46

0.55

0.73

0.40

0.53

Backstreaming Rate

at Pump Inlet

(within Optimum

Operating Range)

mg/cm

/min

<0.0015 <0.0015 <0.0007 <0.0005

Electrical Power

AC, 50/60 Hz, 3 phase

8.1 9.6 12 24 24

Cooling Water

Flowrate @ Inlet

Temperature of

60 to 80

gpm (US)

1.5 1.5 4.0 4.0

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High Throughput Diffusion Pumps

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Warmup Time minutes

30 45 60 60

Cooldown Time

Without Quick Cool

With Quick Cool

minutes

180

Fluid Charge qt (US) liters

2.8

4.7

11.4

Recommended

backing pump

capacity*

cfm

80 100 300 300

*Recommended sizes when operating at maximum throughput.

Weight lbs (kg)

500 (227) 600 (272) 1500 (682) 1500 (682)

Table 4 Operating Specifications (Continued)

Specification Units HS-16, 8.1 kW HS-16, 9.6 kW HS-20 HS-32 NHS-35

Page 16

High Throughput Diffusion Pumps

DRAFT 8/22/03

Pump Air Speed and Throughput

The pumping function is graphically described by relating i nl et press ure to both air speed and throughput. This relation-

ship is shown for the large vacuum pumps in the set of graphs shown in Figure 2 through Figure 5.

Figure 2 HS-16 Speed and Throughput Curves, 8.1 kW

Figure 3 HS-20 Speed and Throughput Curves

Figure 4 HS-32 Speed and Throughput Curves

Figure 5 NHS-35 Speed and Throughput Curves

Page 17

High Throughput Diffusion Pumps

DRAFT 8/22/03

Physical Specifications

Figure 6 HS-16 Outline with ASA Flanges

Table 5: HS-16: Dimensions and Weights

Units HS-16

Height, minimum including clearance for heater access

in (mm) 51 (1142)

Weight lbs (kg) 500 (227)

Connections: Body and Foreline Quick Cool coils

in in

1/4 FPT 1/4 FPT

FORELINE COOLING COIL

Table 6 HS-16 Flange Dimensions

ASA ISO

Units Inlet Foreline Inlet, 500 K Foreline, 100 K

OD in (mm) 23.50 (526.4) 7.50 (168.0) 21.65 (485.0) 5.12 (114.7)

ID in (mm) 18.00 (403.2) 3.58 (80.2) 18.00 (403.2) 3.58 (80.2)

Thickness in (mm) 1.00 (22.4) 0.50 (11.2) 0.67 (15.0) 0.47 (10.5)

Bolt Circle in (mm) 21.25 (476.0) 6.00 (34.4)

No. of Holes 16 4

Size of Holes in (mm) 1.13 (25.2) 0.75 (16.8)

Orientation

Holes straddle center line of foreline

Gasket Groove ID

Width Depth

in (mm) in (mm) in (mm)

18.69 (418.7)

0.37 (8.2)

0.18 (4.6)

4.31 (96.5)

0.30 (6.7)

0.14 (3.8)

Requires NW-500 Centering Ring (not included with pump)

Requires NW-100 Centering Ring (not included with pump)

Page 18

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 7 HS-20 Outline with ASA Flanges

Table 7 HS-20: Dimensions and Weights

Units HS-20

Height, minimum including clearance for heater access

in (mm) 56 (1254)

Weight lbs (kg) 600 (272)

Connections: Body and Foreline Quick Cool coils

in in

1/4 FPT 3/8 FPT

Table 8 HS-20 Flange Dimensions

ASA ISO

Units Inlet Foreline Inlet, 630 K Foreline, 160 K

OD in (mm) 27.50 (616.0) 9.00 (201.6) 27.17 (541.4) 7.09 (158.8)

ID in (mm) 21.25 (476.0) 5.06 (113.3) 21.25 (476.0) 5.06 (125.4)

Thickness in (mm) 1.12 (250.9) 0.75 (16.8) 0.78 (17.5) 0.47 (10.5)

Bolt Circle in (mm) 25.00 (550.0) 7.50 (168.0)

No. of Holes 20 8

Size of Holes in (mm) 1.25 (28.0) 0.75 (16.8)

Orientation

Holes straddle center line of foreline

Gasket Groove ID

Width Depth

in (mm) in (mm) in (mm)

21.63 (484.4)

0.48 (10.8)

0.25 (5.6)

5.31 (1189.4)

0.38 (8.4)

0.09 (1.9)

Requires NW-630 Centering Ring (not included with pump)

Requires NW-160 Centering Ring (not included with pump)

Page 19

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 8 HS-32 Outline with ASA Flanges

Table 9 HS-32: Dimensions and Weights

Units HS-32

Height, minimum including clearance for heater access

in (mm) 74 (1658)

Weight lbs (kg) 1500 (682)

Connections: Body and Foreline Quick Cool coils

in in

3/8 FPT 3/8 FPT

Table 10 HS-32 Flange Dimensions

ASA ISO

Units Inlet Foreline Inlet, 800 F Forline, 200 K

OD in (mm) 38.12 (853.9) 11.00 (246.4) 36.22 (811.4) 9.45 (211.7)

ID in (mm) 32.06 (718.1) 6.73 (150.8) 32.06 (705.2) 6.73 (150.8)

Thickness in (mm) 1.12 (24.6) 0.75 (16.8) 1.12 (25.1) 0.47 (10.5)

Bolt Circle in (mm) 36.25 (812.0) 9.50 (212.8) 35.04 (784.9)

No. of Holes 16 8 24

Size of Holes in (mm) 0.87 (19.5) 0.88 (19.6) 0.55 (12.3)

Orientation

Holes straddle center line of foreline

Gasket Groove ID

Width Depth

in (mm) in (mm) in (mm)

32.5 (728.0)

0.56 (12.5)

0.25 (5.6)

7.44 (166.7)

0.38 (8.4)

0.18 (17.9)

32.75 (733.6)

0.56 (12.5)

0.25 (5.6)

Requires NW-200 Centering Ring (not included with pump)

Page 20

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 9 NHS-35 Outline with ASA Flanges

Table 11 NHS-35: Dimensions and Weights

Units NHS-35

Height, minimum including clearance for heater access

in (mm) 80 (1795)

Weight lbs (kg) 1500 (682)

Connections: Body and Foreline Quick Cool coils

in in

3/8 FPT 3/8 FPT

Foreline Cooling Coil

Table 12 NHS-35 Flange Dimensions

ASA ISO

Units Inlet Foreline Inlet, 1000 F Foreline, 200 K

OD in (mm) 41.75 (835.2) 11.00 (246.4) 44.09 (987.6) 9.45 (211.7)

ID in (mm) 35.00 (784.0) 7.72 (172.9) 35.00 (784.0) 7.72 (172.9)

Thickness in (mm) 1.12 (25.1) 0.75 (16.8) 1.12 (25.1) 0.47 (10.5)

Bolt Circle in (mm) 38.50 (190.4) 9.50 (212.8) 42.90 (961.3)

No. of Holes 28 8 32

Size of Holes in (mm) 0.87 (19.5) 0.81 (18.1) 0.55 (1.2)

Orientation

Holes straddles center line of foreline

Gasket Groove ID

Width Depth

in (mm) in (mm) in (mm)

35.37 (792.3)

0.56 (12.5)

0.25 (5.6)

8.20 (183.7)

0.17 (156.8)

0.09 (2.0)

40.75 (912.8)

0.56 (12.6)

0.25

Requires NW-200 Centering Ring (not included with pump)

Page 21

High Throughput Diffusion Pumps

DRAFT 8/22/03

Unpacking

Varian large diffusion pumps are shipped in sturdy containers that permit prolonged storage in suitably protected areas without special precautions, however, care must be taken when moving the crated pump with a fork lift to avoid excessive shock.

Carefully remove the outer shipping container. Visually inspect the pump for damage that may have occurred during shipping and notify the carrier immediately if damage is suspected. If damage is noticed, save the crate and the internal packing for inspection.

Setup

Assembly

1. Remove flange covers, blank plugs and protective plugs from water connections. Do not to scratch or otherwise damage the sealing surface (the O-ring groove on top of the inlet flange).

2. Check the internal jet assembly. It should be concentric and firmly seated on the bottom of the pump. Use a flashlight to verify that the ejector nozzle is opposite the foreline (the pump outlet connection). The jet assembly should not rotate; it is held by an indexing pin at the bottom of the assembly.

3. If the expected vacuum level is below 10

−

Torr, clean the pump using the procedure outlined in the next section. Otherwise make sure that there are no foreign materials inside the pump, and proceed with attaching the pump to the system as instructed in “System and Utility Connections” on page 15.

WARNINGS ❑ Before lifting a pump, check the

weight of the equipment in Tab le 4 on page 6.

❑ Use power-assisted equipment,

and trained moving and installation personnel to avoid dropping, slipping, and overturning the pump and sever ely injuring personnel.

❑ Do not stand under equipment

being moved.

Page 22

High Throughput Diffusion Pumps

DRAFT 8/22/03

Cleaning a New Pump

Cleaning Safety

Cleaning a diffusion pump involves the use of acetone and alcohol, both of which are toxic and explosive. Take careful note of the following information and warnings before starting a cleaning process.

When heated, sprayed or exposed to high temperature equipment, these solvents become flammable and explosive, causing serious injury or death.

When heated or sprayed, acetone or alcohol also becomes 4 to 5 times heavier than air and flows down, settling in tanks, pits, and low areas, displacing air, and thus, can kill by asphyxiation.

Acetone, alcohol, and other solvents are irritants, narcotics, depressants, and carcinogenic. Their inhalation and ingestion may produce serious effects. Prolonged or continued contact with the skin will result in absorption through the skin and moderate toxicity.

Disassembly for Initial Cleaning

This procedure involves the cleaning of the following elements:

❑ Jet assembly

❑ Drain plugs

❑ Sight glass

❑ Pump interior

To disassemble the pump:

1. Remove the cold cap as described in “Cold Cap” on page 38.

2. Disassemble the internal jet system from the body of the pump in accordance with the appropriate procedure within “Jet Assemblies” on page 39.

3. Remove fill and drain plugs and the sight glass with its O-ring and graphite gasket.

Set the O-ring aside as it must not be cleaned with a strong solvent. Alcohol, acetone, and other solvents degrade O-ring materials reducing their ability to hold a vacuum. If it is necessary to clean any O-rings, wipe with lint-free, clean cloth, wash in detergent and water, or use a small amount of pump fluid.

4. Thoroughly clean all components of the jet assembly and pump casing interior (but not O-rings) with acetone followed by an alcohol rinse.

5. Remove all traces of cleaning fluid by carefully drying all components with clean, dry, oil-free compressed air.

Reassembly After Initial Cleaning

To reassemble the pump:

1. Perform disassembly steps 1 to 3 in reverse order, then continue with the following steps on a cleaned, reassembled p ump.

2. Clean the interface and inlet flanges and O-ring

grooves thoroughly with acetone or alcohol, using

clean, lint free rags.

3. Remove all traces of acetone and alcohol by carefully drying all components, particularly the O-ring grooves, with clean, dry, oil-free compressed air.

4. Re-install the O-ring gasket.

NOTE A new pump requires cleaning only

if the desired vacuum is below 1x10

−

Torr.

WARNINGS ❑ Do not use near a high temperature

source.

❑ Always use in a large, well-ventilated

room and ventilate the working area with a blower.

❑ Wear eyeshields, gloves, and other

protective clothing. The use of a self-contained breathing apparatus may also be necessary.

CAUTION Do not use any solvents on O-rings.

Page 23

High Throughput Diffusion Pumps

DRAFT 8/22/03

System and Utility Connections

Vacuum Connections

The pump body must be installed vertical and plumb. Check that the mating flange on the system is horizontal ±1

. If this condition is not met, correct the system mount

before installing the pump.

To make the vacuum system connection:

1. Wipe the O-ring seals with a clean cloth lightly moistened with diffusion pump fluid. Do not use solvents.

2. Install the O-ring in its groove. Be careful not to damage the sealing surface with cuts, nicks, or scratches.

3. Raise the pump using a lifting apparatus with sufficient capacity. Pump weights are given in Table 4 on page 6.

4. Align the bolt holes of the flanges and assemble the bolts.

5. Tighten the bolts evenly and compress the O-ring seal until light contact is achieved between the metal flanges.

6. Make a tightness check of the fill and drain plugs and the sight glass assembly. Refer to the appropriate outline drawings, Figure 6 on page 9 through Figure 9 on page 12. Apply light to medium torque, just enough to visually compress the gaskets.

Cooling Water

To connect cooling water:

1. Connect the cold cap cooling coil and all body and

foreline cooling in series except the Quick Cool coil (see the following paragraph) as shown in Figure 10.

Refer to Table 4 on page 6 for the cooling water flowrate for your pump type. Higher flows will not harm the pump.

2. Connect the cooling water discharge to an open drain. This permits the water temperature flow to be easily checked. The temperature of discharged cooling water should not exceed 130 °F.

Parallel connections should be employed when the water pressure is low or if the discharge temperature routinely exceeds 130

Figure 10 Cooling Water Connections

WARNING Utility failure can cause overheating, damage to the equipment and explosion. Design your system to

protect personnel and property from these hazards.

NOTE Over time, minute leaks may develop

through the gaskets. These leaks may only be detectable with extremely sensitive mass spectrometer leak detectors.

Page 24

High Throughput Diffusion Pumps

DRAFT 8/22/03

Quick Cool Coil Connection

The Quick Cool coil at the boiler plate must be connected to an open drain and the feed line must be controlled by a separate water 3-way valve: open, closed, and vented to the atmosphere. The drain must be below the boiler level so that it is drained completely when the Quick Cool coil water supply is shut off and the pump is operating.

Obtaining High Vacuum on the HS-16 and NHS-35

When operating at low pressures (below 1x10

−

Torr), the ultimate pressure can be lowered by bypassing the portion of the cooling coils located at the bend of the foreline as shown in Figure 6 on page 9 and Figure 9 on page 12. This procedure raises the temperature of the foreline and provides additional degassing of the fluid returning to the boiler, thus making lower pressures possible.

NOTE This configuration decreases the

maximum throughput capacity of the pump. Use this cooling configuration only if the pump is not meant to operate near the high pressure end of its operating range.

Page 25

High Throughput Diffusion Pumps

DRAFT 8/22/03

Electrical Connections

Terminal connections for each pump are different depending on the source voltage available, the principle difference being a Y or

∆ connection of the heaters. Table 13 provides the figure number and page of the wiring diagrams in this

manual. The specific wiring diagrams for each pump shows both Y and

∆ connections and the source voltages for each

connection.

To wire the pump:

1. Check the heater for correct supply voltage and find the appropriate wiring diagram. The correct voltage is shown.

2. Check load balance by measuring the resistance of each branch. The heater resistances are given on their respective wiring diagrams.

3. Make the connections to the terminals in the electrical main junction box at the foreline shown in the appropriate outline drawing. Use flexible conduit to make it easier to remove the pump for service.

4. Wire the thermal switches to a control mechanism to ensure that power to the pump is shut off if one of the switches opens. The thermal switch wires can be found in the electrical box.

5. Complete the wiring of the pump and double-check that the proper terminal arrangement has been used for the source voltage at the site.

NOTE Pumps operated at 380 V work at 84%

of full power, and therefore maintain roughly 84% of maximum throughput capacity.

WARNING High voltages (up to 480 V) can kill.

Always break the primary circuit to the pump before starting work on the heater or its wiring.

Table 13 Wiring Diagram Locations

Source Voltage HS-16 Wiring HS-20 Wiring HS-32 Wiring NHS-35 Wiring

200 Figure 13 on page 21 Figure 15 on page 23

240 Figure 11 on page 19 Figure 13 on page 21 Figure 16 on page 24 Figure 20 on page 28

280 Figure 11 on page 19

380 Figure 12 on page 20 Figure 14 on page 22 Figure 18 on page 26 Figure 21 on page 29

400 Figure 13 on page 21 Figure 20 on page 28

415 Figure 12 on page 20 Figure 14 on page 22 Figure 18 on page 26 Figure 21 on page 29

430 Figure 13 on page 21

440 Figure 20 on page 28

460 Figure 17 on page 25

480 Figure 13 on page 21 Figure 19 on page 27 Figure 22 on page 30

CAUTION Do not operate the pump at more than

5% over its rated voltage.

WARNING Improper operation, severe heater

dama ge, and danger to pe rsonnel can result from an improperly wired diffusion pump system.

Page 26

High Throughput Diffusion Pumps

DRAFT 8/22/03

Overheating: Detection by Thermal Switches

An overheat condition is detected by two normally closed thermal cutout switches, one of which monitors the boiler temperature while the other monitors the water tempera-

ture. These switches are set at the factory and do not

require adjustment. The cutout temperatures for the water and boiler switches are given in Table 14.

Wire the pump such that if the contacts open on either the boiler or the water switch, power to the pump shuts off. If this happens during operation, check for one of the failure conditions listed below. When the problem has been corrected and the temperature lowered, the thermal switch automatically resets.

A rise in pump temperature can be caused by:

❑ Failure of cooling water flow

❑ High inlet pressure

❑ Low fluid level in the boiler

If you determine that the pump has not overheated and that the thermal switch has failed or drifted out of calibration, replace the switch with the device listed for your pump type in the appropriate Replacement Parts table, page 48 through page 51.

Table 14 Thermal Cutout Temperatures

Units HS-16 HS-20 HS-32 NHS-35

Water Switch °F 185 185 220 200

Boiler Switch °F 390 390 550 600

CAUTION Thermal switches set to measure the

temperature in the diffusion pump fluid are not designed to protect against overheating or backstreamed mechanical pump fluids.

Page 27

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 11 HS-16 200/240/400/430/440/480 V Wiring

RTOTL1-L2/L2-L3/L3-L1

Element Resistance

(+10%, -5%)

RTOT,

8100 W

RTOT

9600 W 2700 W 3200 W

200 V > 10 W 200 V > 9 W 200 V > 15 W 200 V > 13 W

240 V > 14 W 240 V > 12 W 240 V > 21 W 240 V > 18 W

400 V > 40 W 400 V > 33 W 400 V > 59 W 400 V > 50 W

430 V > 46 W 430 V > 39 W 430 V > 69 W 430 V > 58 W

440 V > 48 W 440 V > 41 W 440 V > 72 W 440 V > 61 W

480 V > 55 W 480 V > 46 W 480 V > 85 W 480 V > 72 W

Page 28

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 12 HS-16 380/415 V Wiring

Page 29

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 13 HS-20 200/240/400/430/480 V Wiring

Page 30

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 14 HS-20 380/415 V Wiring

Page 31

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 15 HS-32 200 V Wiring

Page 32

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 16 HS-32 240 V Wiring

Page 33

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 17 HS-32 460 V Wiring

Page 34

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 18 HS-32 380/415 V Wiring

Page 35

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 19 HS-32 480 V Wiring

Page 36

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 20 NHS-35 240/400/440 V Wiring

2 A

IL = 67.8A @ 240V I

= 34.6A @ 400V

= 31.5A @ 410V

Page 37

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 21 NHS-35 380/415 V Wiring

Note: Pumps operated with 380 volts line

voltage operate at 84% of their full power.

Page 38

High Throughput Diffusion Pumps

DRAFT 8/22/03

Figure 22 NHS-35 480 V Wiring

Page 39

High Throughput Diffusion Pumps

DRAFT 8/22/03

Initial Vacuum Test

Before charging the pump with fluid, carry out this initial

vacuum test to establish the tightness of the system and its vacuum connections.

Pumps and their components are designed for vacuum service; they are not designed to be pressurized which could cause them to burst possibly expelling shrapnel at lethal velocities. Serious accidents have been caused by intentional pressurization of vacuum systems and their components.

To perform the initial vacuum test:

1. Confirm the vacuum ultimate pressure characteristics of the fore pump. This should closely approximate the value quoted in the manufacturer's data, if the mechanical pump is correctly installed, adjusted, and filled with clean fluid.

2. Measure pressure with a continuously indicating total pressure gauge, such as a capacitance manometer, or thermocouple gauge.

3. Connect the outlet (or foreline) of the diffusion pump to the inlet of the fore pump using vacuum-tight connections.

4. The procedure varies for valved and unvalved systems.

❑ For valved system: Close the roughing valve

and main isolation valve ahead of the diffusion pump.

❑ For unvalved systems: Include the entire work

chamber volume in the test.

5. Evacuate the system using only the fore pump. Let the pump reach an ultimate pressure in the system. This reading should approximate the value obtained in step 2 above (usually 10 to 50 microns, 0.013 mbar to 0.067 mbar).

6. If the pump does not reach this level, examine the system for leakage following standard procedures for leak testing. These procedures depend on the type of vacuum gauges and leak detection equipment available.

WARNINGS ❑ Never pressu rize any part of a

vacuum system for test or any other purpose.

❑ Always provide pressure relief

when designing diffusion pumps into systems and ensure that pressure relief motion is limited to safe en ve lopes.

NOTE Consult with your Varian Vacuum

Technologies representative for informa tion on Varian’s extensi ve lineof heliu m leak detectors.

Page 40

High Throughput Diffusion Pumps

DRAFT 8/22/03

Adding or Changing Pump Fluid

The recommended fluid charge for each pump is given in Table 4 on page 6.

Fluids must be stored in clean, tightly closed containers and should be clearly identified in accordance with their type. Do not mix pumping fluids of different types and origins. Generally, it is not a good idea to mix used and new fluid for a pump charge.

WARNINGS The risk of explosion on large vacuum

diffusion pumps is increased by these factors:

❑ Use of a hydrocarbon fluid as

the pumping fluid. Hydrocarbon fluid is more prone to explosion than syntheticsilicone-based fluid. If a hydrocarbon fluid is being used, check the entire system under vacuum before operating the pump.

❑ Low fluid levels in the pump which

can lead to overheating. Low fluid levels develop because the charge grad ually depletes during use. The pump, however, continues to operate normally and when the charge drops to 60% of initial level, the boiler temp erature may begin to rise. If this takes place, the thermal switches open the heater circuits. For details, refer to “Overheating: Detection by Thermal Switches” on page 18.

❑ Overheated pump fluid that

decomposes and becomes toxic. The toxic fluid residue may be on t he dipstick used to check fluid level, so care must always be taken to assure personnel do not contact or ingest the fluid.

❑ Admission of atmospheric air

during pump operation. Leakage of air into the system allows oxygen into the fluid vapor and increases the risk of explosion. If holding a vacuum is difficult, perform a leak test. Do not use the pump until the leak s ource is locat ed and repaired.

CAUTION The use of Santovac® 5 Diffusion Pump

Fluid is not recommended in these pumps, nor is the use of any hydrocarbon fluid.

Page 41

High Throughput Diffusion Pumps

DRAFT 8/22/03

To add or change pump fluid:

1. Locate the fill and drain fittings in the appropriate outline drawing. Refer to Figure 6 on page 9 through Figure 9 on page 12. The fittings have special Viton

elastomer sealed plugs.

2. Assure that the power to the heaters is off.

3. Remove the drain plug and drain fluid into a suitable sized container.

4. Remove the plug from the filling port of the pump

and pour the fluid in up to the FULL COLD level on the sight glass as shown in Figure 23. The fluid can also be poured in from the pump inlet or foreline.

Figure 23 Sight Glass Assembly

5. Replace the fill plug with a new Viton gasket. Lubricate the O-ring with pump fluid, put the O-ring in place, and reassemble the system.

6. Tighten the fill plug using maximum torque of 75 inches-pounds.

Once the pump is running, check that the fluid level is at the FULL HOT level in the sight glass.

CAUTION Wait until the pump has cooled then

vent it to the atmosphere.

NOTE Dispose of fluids in accordance with all

appropriate regulations.

Page 42

High Throughput Diffusion Pumps

DRAFT 8/22/03

Operation

During initial installation, the newly installed pump fluid may be subjected to degassing. This may result in foreline pressure fluctuations that are considered normal.

WARNINGS The following conditions increase the

risk of explosion:

❑ Air leaks into the system ❑ Roughing through a hot

diffusion pump, which can cause hot hydrocarbon fluids to ignite or explode wh en exposed to air

❑ Air release or the admission of

air to a pump with a hot boiler (permitting a strong oxidizer to contact the hot pump fluid)

❑ Pressure above 1 milliTorr

(1.3X10

−

mbar)

❑ Insufficient (or low level of)

pump fluid

❑ Operating a pump without

circulating cool water to the main body cooling coils

❑ Operating pump with water

trapped in Quick Cool coil

❑ Foreign matter in the pumping

fluid, which changes its viscosity and obstructs flow passages

CAUTIONS ❑ Do not turn on the heater without

fluid in the pump. This may ruin the heaters and damage the pump.

❑ Do not air-release the pump while

the boiler is hot. Most diffusion pump fluids break down under these conditions.

❑ Do not operate the pump heater

unless cooling water is circulating. Doing so causes the pump and fluid to overheat.

❑ Do not operate without a foreline

baffle. This can cause a greater than normal fluid loss. *The HS-32 does not have a foreline baffle.

Page 43

High Throughput Diffusion Pumps

DRAFT 8/22/03

Startup Procedure

T o start the pump:

1. Evacuate the diffusion pump using a mechanical roughing pump to below 0.5 Torr (0.67 mbar). The diffusion pump will not function unless the discharge pressure is less than the tolerable forepressure.

2. Turn on the cooling water supply to the pump body and check that adequate flow is provided by examining the amount of water discharged at the visual drain points.

3. Switch on the power to the diffusion pump heater.

4. Check inlet and forepressure performance by means of the system instrumentation.

Shutdown Procedure

To shut down the pump:

1. Close the inlet valve on the system, if equipped.

2. Turn off the power to the heaters.

3. For pumps equipped with the optional Quick Cool Coil, admit water into the coil.

4. Continue to flow cooling water through the pump (and Quick Cool Coil, if equipped) for at least the time period listed under “Cooldown Time Without Quick Cool With Quick Cool” in Table 4 on page 7.

5. Once the pump is cooled, shut off the mechanical backing pump.

6. Air release the pump.

7. Continue cooling water flow until the pump is at room temperature, then shut off the water supply.

CAUTION To prevent harmful collection of

condensate on the boiler plate, heater, and heat er term inals, do not opera te t he Quick Co o l c oil whe n the pump is co ld or out of service.

WARNING 1. Releasing or admitting air to a

pump with a hot boiler, especially when it is under vacuum, permits a strong oxidizer to contact the hot pump fluid and greatly increases the risk of an explosion.

2. Boiler temperatures reach 530° F (275 °C) which can cause serious burns. Always check that surfaces have cooled to near room temperature before touching them.

Page 44

High Throughput Diffusion Pumps

DRAFT 8/22/03

Maintenance

Perform these periodic checks to assure trouble-free operation. This maintenance prevents costly down-time and cleaning procedures. Maintain a day-to-day log of pump and system performance to identify marked variations that require corrective action.

Periodic Inspections

The maximum interval between inspection of the pump is established on the basis of experience.

To perform general maintenance, do the following:

1. Check the condition and level of fluid when the pump is cold. Withdraw a sample through the drain and visually check the level of fluid through the sight glass. Slight discoloration of the fluid does not affect pump performance. Use new O-ring gaskets when replacing fill and drain plugs.

Loss of the fluid can be caused by:

❑ Admittance of excessive air or other gas to a hot

pump

❑ Inadequate water cooling

❑ Continuous operation in the overload range as

given in Table 4 on page 6

❑ Failure to reinsert the foreline baffle in the pump

assembly

2. When the pump is cold, check that the heaters are bolted snugly to the boiler plate and that all heater terminal connections are fastened tightly inside the junction box.

3. Check the total heater power input and balance of the load.

4. Ensure that cooling water flow is unobstructed and that the flow rate does not fall not below quantities specified in Table 4 on page 6.

WARNINGS ❑ High voltages (up to 480 V) can kill.

Always break the primary circuit to the power supply before starting work on the heater or its wiring.

❑ Avoid the possibility of serious burns

by making sure that the pump is at room temperature before attempting service.

❑ Always wear appropriate gloves and

clothing and use a self-contained breat hing apparatus. Poisonous or corrosive compound s may b e presen t when opening the fill o r drain.

❑ Explosion risk is high if the fill or

drain is opened when the pump is running or when it is hot.

NOTE The HS-32 does not have a

foreline baffle.

Page 45

High Throughput Diffusion Pumps

DRAFT 8/22/03

Cleaning

Cleaning Safety

Cleaning a diffusion pump involves the use of acetone and alcohol, both of which are toxic and explosive. Take careful note of the following warnings before starting a cleaning process.

When heated, sprayed or exposed to high temperature equipment, these solvents become flammable and explosive, causing serious injury or death.

When heated or sprayed, acetone or alcohol also becomes 4 to 5 times heavier than air and will flow down, settling in tanks, pits, and low areas, thus displacing air which can kill by asphyxiation.

Complete cleaning of the pump may be required due to gradual deterioration of pump fluids. Removal of the pump from the system is then necessary.

To clean an installed pump:

1. Disconnect all water cooling lines and break the primary circuit supplying power to the pump heaters.

2. Unbolt the inlet and foreline connections and remove the pump from the system.

3. Drain the pump of all fluid.

4. Remove the cold cap as described in “Cold Cap” on page 38.

5. Remove the jet assembly as described for the specific pump model in “Jet Assemblies” on page 39.

6. Thoroughly clean the pump body interior using acetone followed by an isopropyl alcohol rinse and then dry the pump with clean, dry, oil-free compressed air.

7. Thoroughly clean the jet assembly using acetone. Wipe all surfaces with isopropyl alcohol, and dry with clean, dry, oil-free compressed air.

8. Reinstall the jet and cold cap in the pump body. Be sure that the ejector is properly aligned with the foreline.

9. Check the condition of the O-rings. Replace O-rings that show any sign of wear or compression.

10. Attach the pump in the system.

WARNINGS ❑ Do not use near a high

temperature source. Ventilate the working area with a blower and use in a large, well-ventilated room. The use of a self-contained breathing apparatus may also be necessary.

❑ Always ensure that cleaning

operations are carried out in large, well-ventilated rooms. Wear eyeshields, gloves, and protective cl o thing.

Page 46

High Throughput Diffusion Pumps

DRAFT 8/22/03

Disassembly and Reassembly Procedures

Cold Cap

To disassemble the cold cap, refer to Figure 24 and take the following steps.

1. Remove the female coupling, nut, follower, and gasket located at the end of the cold cap water line on the outside of the pump.

2. Remove the cold cap securing screw which secures the cold cap to the jet assembly.

3. Lift out the cold cap.

To reassemble the cold cap:

1. Insert the end of the cold cap water line into the cold cap port opening at the side of the pump before setting the cold cap on top of the jet assembly. Be careful not to damage the sealing surfaces.

2. Replace the cold cap securing screw which secures the cold cap to the jet assembly. Do not overtighten the screw.

3. Replace the gasket, the follower, the nut, and the female coupling to the side of the pump.

Figure 24 Cold Cap Assembly

NOTE The halo baffle is disassembled in the

same manner.

NOTE Supply water tubing must be connected

to the cold cap coupling with F PT threads.

COLD CAP ASSEMBLY

Page 47

High Throughput Diffusion Pumps

DRAFT 8/22/03

Jet Assemblies

The jet assemblies of each of the pumps are discussed and shown in the following subsections. Procedures and drawings are specific to each pump model.

HS-16 Jet Assembly

Figure 25 HS-16 Jet Assembly

To disassemble the jet assembly:

1. Remove the cold cap or halo baffle as described in “Cold Cap” on page 38.

2. Unscrew the top cap from its coupling and remove it.

3. Remove the top plug.

4. Remove the drip shield that sits loosely on the 2nd stage.

5. Lift and remove the entire 2nd stage.

6. Lift and individually remove the 3rd stage, the 4th stage, and the jet base.

7. Remove the two nuts securing the splash baffle, then lift and remove the splash baffle.

8. Remove the jam nut located at the center-bottom of the pump in order to remove the jet rod.

To assemble the jet assembly:

❑ Reverse the disassembly steps above.

NOTE When the jet assembly is installed in

the pump body, be sure that the slot in the jet base is engaged in t he locating pin o f t h e b oile r. Un le ss t h is is d o n e, t h e pump will not function properly.

NOTE If the jet coupling loosens from the jet

rod during disassembly, position it so that the top of the jet coupling is flush with the bottom orifice plug as can be seen in Figure 27.

Page 48

High Throughput Diffusion Pumps

DRAFT 8/22/03

HS-20 Jet Assembly

Figure 26 HS-20 Jet Assembly

To disassemble the jet assembly:

1. Remove the cold cap or halo baffle as described in “Cold Cap” on page 38.

2. Unscrew the jet cap from the coupling assembly.

3. Remove the orifice plug.

4. Withdraw the central tube complete with the second stage jet and jet shield.

5. Remove the lower jet assembly from the pump, which consists of the third stage jet, the jet shield, the fourth stage jet, and the jet base.

6. Remove the third stage shield from the lower jet assembly.

7. Remove the securing screws between the third and fourth stage jets. Carefully preserve the screws. Be sure that the jet spacers are not damaged in handling.

8. Remove the fourth stage jet from the jet base.

9. Clean all parts thoroughly.

NOTE Before removing the securing screws

in the following step, scribe a reference mark at the interface to assure that original holes are mated when reassembled.

Page 49

High Throughput Diffusion Pumps

DRAFT 8/22/03

To reassemble the jet assembly:

1. Replace the fourth stage jet on the jet base.

2. Replace and tighten the securing screws between the fourth stage and the jet base uniformly and in a cyclical pattern.

3. Replace the third stage jet on the fourth stage.

4. Replace and tighten the securing screws between the third stage and fourth stage uniformly and in a cyclical pattern.

5. Replace the third stage jet shield.

6. Install the lower jet assembly in the pump.

7. Check that the lower jet assembly is firmly seated on the pump with the ejector correctly positioned. For proper alignment, a pin is provided in the base of the pump; the large slot in the jet base must register on this pin.

8. Follow steps 1 through 5 in reverse order.

Figure 27 Jet Coupling Detail

NOTE Jet sp acings are p reset at t he fact ory and

controlled by the spacers secured to the respective stages.

NOTE If the jet coupling loosens from the jet

rod during disassembly, position it so that the top of the jet coupling is flush with the bottom orifice plug (Figure 27) .

Jam Nut

Jet Rod

Jet Coupling

Cold Cap

Top Jet

Orifice Plug

Cold Cap

Detail A

Securing Screw

Assembly

Location of Jet Coupling prior to assembling Jet Cap.

Page 50

High Throughput Diffusion Pumps

DRAFT 8/22/03

HS-32 Jet Assembly

Figure 28 HS-32 Jet Assembly

To disassemble the jet:

1. Unscrew and remove the hex nut holding the cold cap in place. Note its orientation prior to removal

2. Remove the cold cap (or halo baffle) as described in “Cold Cap” on page 38.

3. Remove the nut, washer, and the top jet cap from the center jet rod.

4. Using the now-exposed cross member and the appropriate lifting equipment, lift the entire jet assembly out of the pump body, leaving the jet rod in place.

5. Remove the second stage jet shield.

6. Remove the two nuts on the cross member and lift out the second stage and fractionating tub, leaving the two rods in place.

7. Unscrew and remove the two tie rods.

8. Disassemble the remaining jet stages.

Cold Cap

Tie Rods

Jet Rod

Cross Member

NOTE Do not remove the three screws holding

the fractionating tube to the top stage.

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High Throughput Diffusion Pumps

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To reassemble the jet:

1. If the center jet rod was removed or loosened during disassembly, thread the rod back into the boilerplate. The top of the rod should be roughly 1/16" to 1/8" below the top surface of the inlet flange (inlet plane of the pump). Once properly located, use the nut near the boilerplate to lock the rod in place.

2. Reassemble the lower stages by stacking them (outside the pump body).

3. Lower the second stage and fractionating tube into the lower jet assembly, aligning the two slots on the tube with the frame of the jet base. Ensure that the slots are engaged by attempting to rotate it.

4. Install the second stage jet shield.

5. Install the tie rods through the two holes in the cross member and thread them into the frame on the jet base.

6. Thread the two nuts on the tie rods. The height of the tie rods should be adjusted as needed by threading them into the frame of the jet base such that the rods extend above the nuts by roughly 1/8".

7. Using the cross member and the appropriate lifting equipment, lower the entire jet assembly into the pump body, over the center jet rod.

8. Reverse steps 1 through 3 above to reassemble the upper jet components.

CAUTION Do not over tighten the nuts on the tie

rods. Doing so will distort the cross member,. The rods are meant to hold the assembly together during installation in the pump.

CAUTION If the pump has been equipped with a

thermowell near the bottom of the pump body, there is a corresponding slot in the jet base for clearanc e ar ou nd the thermowell. Ensure that the slot engages the thermowell to avoid damage to the thermowell and jet.

NOTE The hex nut is installed such that the

small diameter acts to cent er the cold cap or halo baffle. Ensure that the hex nut is not installed upside down.

Page 52

High Throughput Diffusion Pumps

DRAFT 8/22/03

NHS-35 Jet Assembly

Figure 29 NHS-35 Jet Assembly

To disassemble the jet:

1. Unscrew and remove the hex nut holding the cold cap in place. Note its orientation prior to removal

2. Remove the cold cap (or halo baffle) as described in “Cold Cap” on page 38.

3. Unscrew the top jet cap and remove.

4. Remove the spacer and top jet orifice plug.

5. Lift the second stage and jet shield over the center threaded jet rod.

6. Using the two eyebolts now accessible and appropriate lifting equipment, lift the entire lower jet assembly out of the pump body, leaving the jet rod in place.

7. Remove the third stage jet shield.

8. Remove the securing nuts and lift the third stage and fractionating tube off the fourth stage.

9. Remove the fourth state jet shield.

10. Remove the securing nuts and separate the fourth stage from the jet base.

11. Clean and service as needed.

To reassemble the jet:

2. Reverse steps 7 through 10 above to reassemble the lower jet assembly.

3. Using the two eyebolts and the appropriate lifting equipment, lower the lower jet assembly into the pump body over the jet rod. The ejector should be aligned directly across from the foreline. A locating slot on the jet base engages a block in the pump body to ensure the ejector is properly aligned with the foreline.

4. Reverse steps 1 through 5 above to reassemble the upper jet components.

Water-Cooled

Shields

Lugs to Lift Main Jet Assembly

Cold Cap

CAUTION The jet will not seat properly and the

pump will not function unless the slot is engaged on the locator block. Check the engagement by attempting to rotate the jet once in place.

NOTE The top jet orifice plug must be seated

in the tube with the machined relief down into the tube. Ensure that the plug is not installed upside down.

NOTE The hex nut is installed such that the

small diameter acts to cent er the cold cap or halo baffle. Ensure that the hex nut is not installed upside down.

Page 53

High Throughput Diffusion Pumps

DRAFT 8/22/03

Heater Replacement Procedure

Figure 30 shows the components of the heater element assembly. The heater replacement procedure is the same for all large diffusion pumps*.

Figure 30 Heater Element Assembly

To replace a heater:

1. Use an ohmmeter at the electrical box to determine which heater element has failed.

2. Disconnect its leads from the terminal strip.

3. Pull the leads out of the terminal box and then out of the elbow cover plate.

4. Remove the heater cover from the bottom of the diffusion pump. Move the insulation to expose the faulty heaters.

5. Remove the nuts holding down the clamping plate.

6. Lower the entire heating unit (heater element, clamping plate and crush plate (except for the NHS-35 which does not have a crush plate) until it is off the mounting studs.

Installing the new heater:

1. Apply an anti-seize compound such as Loctite C5-A or FEL-PRO lubricant to the studs. Common mild of magnesia also can be used as a lubricant.

2. Assemble the new unit consisting of the heater element, clamping plate, and crush plate (except for the NHS-35).

3. Support the heating unit by the clamping plate, line up the holes with the boiler studs, and push the unit up against the boiler plate. Use two nuts finger-tight to hold it in place.

4. Screw on the remaining nut(s) finger-tight, then tighten all nuts evenly to 250 inches-pounds of torque.

5. Label the heater leads according to the schematic diagram.

6. Run the wires around the periphery of the pump, under the wire retaining clips, into the conduit, and up into the junction box.

7. Connect the leads to the terminal strip then replace the elbow cover plate.

8. Replace the insulation and heater cover.

NOTE During heater replacement, the crush

plate* must be replaced if the heaters are removed for inspection or maintenance. * The NHS-35 does not use a crush plate. Additional studs are used to assure adequate contact between the heater and the boiler plate.

WARNING High voltage (up to 480 V) can kill.

Always break the primary circuit to the power supply before starting to work on the heater or its wiring.

CAUTION Poor clamping resulting in inadequate

thermal contact may result in reduced heater life and po o r p u m p performance.

Tighten nuts finger-tight on clamping plate, then gradually and evenly tighten them to 250 inches-pounds of torque.

CAUTION Heater wiring and terminal lugs must

not use copper or copper-plated wire which could oxidize rapidly and fail due to the high temperatures near the heaters. Use #10 strand nickel wire with high temperature insulation.

Page 54

High Throughput Diffusion Pumps

DRAFT 8/22/03

Troubleshooting

Leakage

If leakage is the suspected cause of poor system performance, first check the following items:

❑ Inlet and foreline connections

❑ Drain and fill plugs

❑ Other compression fittings, such as high-vacuum

gauges in the system

❑ Threaded connections, such as a foreline gauge

Before proceeding with a program of step-by-step troubleshooting, check the performance and accuracy of the vacuum gauges used on the system.

Outgassing

High-vacuum systems, even without external leakage, can have high gas loads due to outgassing from internal surfaces or processes. The pressure in the system is a result of gas load divided by pumping speed (p = Q/S). If the gas load Q exceeds the maximum throughput capability of the diffusion pump, the diffusion pump will not function and the pumping action will essentially be due to the mechanical backing pump.

To estimate the gas load, isolate the system from all pumps after evacuation and measure the rate of pressure increase.

The gas load can be estimated from the following relationship:

where V is the isolated volume,

∆P is the pressure

rise, and

∆t is the time period of measurement.

V ∆ P×

∆t

------------------=

Page 55

High Throughput Diffusion Pumps

DRAFT 8/22/03

Poor Pump or System Performance

Table 15 lists the faults, the probable causes and corrective actions to take if you have a problem with a large diffusion pump.

Table 15 Troubleshooting Guide

Fault Probable Cause

Corrective

Action

Poor system pressure Leaks in system, virtual or real Locate and repair

High process gas load Measure gas load, eliminate cause

System dirty Clean system to reduce outgassing

Poor ultimate pressure Contaminated pump fluid Examine and clean pump; replace fluid

Low heat input Check voltage. Check for continuity, burned-out

element, poor thermal contact

Inadequate cooling water flow Check water pressure. Check tubing for obstructions

and backpressure

Cooling water is too cold Check temperature

Cooling water flow is too high Adjust water flow

High forepressure Check for leak in foreline, poor mechanical pump

performance, breakdown of mechanical pump fluid

Water in Quick Cool coil Check and remove cause

Slow pumpdown Low heat input Check heaters

Low fluid level Add fluid

Malfunctioning pump assembly Check and repair or replace

Improperly located jets

Damaged jet system

Inlet pressure surges Incorrect heater input Check and correct

Fluid outgassing Condition fluid by operating the pump for a few hours

Leak in system ahead of pump inlet Check and correct

High chamber contamination of the pump fluid

Forepressure too high Check for leak in foreline, poor mechanical pump

performance, breakdown of pump fluid, and incorrect valve operation

Prolonged operation in overload range Adhere to operating procedures

Cutting over from the backing pump too early in the pump down cycle

Cut over at a lower chamber pressure

Improper system operation and air release procedures

Adhere to operating procedures

Pump will not start Safety circuits or protective devices

prevent contactor from staying closed

Check utilities, flow devices switches, interlocks. Check thermostat operation

Page 56

High Throughput Diffusion Pumps

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Replacement Parts

Table 16 HS-16 Replacement Parts

Part Number Description

79299301 Cold cap assembly, includes No.10-32 SST Rd Hd screw and No. 10-32 SST hex nut)

L8839301 Cold cap gasket set

L8840301 Cold cap nut and follower set

83612401 Jet assembly

80798301 Foreline baffle assembly

77261001 Fill and drain plug

L8841301 Thermoswitch kit

647316025 Heater element with leads (2700 W, 200 V)

647316027 Heater element with leads (3200 W, 200 V)

647316037 Heater element with leads (2700 W, 400 V)

647316038 Heater element with leads (3200 W, 400 V)

647316039 Heater element with leads (2700 W, 430 V)

647316040 Heater element with leads (3200 W, 430 V)

647316041 Heater element with leads (2700 W, 440 V)

647316042 Heater element with leads (3200 W, 440 V)

647316020 Heater element with leads (2700 W, 240/380/415 V)

647316030 Heater element with leads (2700 W, 480 V)

647316023 Heater element with leads (3200 W, 240/380/415 V)

647316033 Heater element with leads (3200 W, 480 V)

K4919001 Heater crush plate, required with heater replacement

K4917001 Heater clamping plate

79309001 Heater insulating blanket

79308001 Heater cover plate

K0377164 O-ring kit; includes:

1 Butyl ASA inlet O-ring (48214001) 1 Buna-N ASA foreline O-ring (660890348) 8 Viton fill and drain O-rings (660892213) 1 Sight glass O-ring (660892232) 1 Graphite sight glass gasket (K8478001)

695472008 DC-702 diffusion pump fluid, one-gallon

695474008 DC-704 diffusion pump fluid, one-gallon

695475008 DC-705 diffusion pump fluid, one-gallon

Commercial Item Cold cap fitting, Imperial flex fitting #66-FL, 1/2" OD tube x 3/8" FPT

K8475001 Sight glass

L6367301 Jet coupling

656118114 Nickel wire No. 14 AWG

648056329 Nickel lug for No. 14 AWG

Page 57

High Throughput Diffusion Pumps

DRAFT 8/22/03

Table 17 HS-20 Replacement Parts

Part Number Description

84358301 Cold cap assembly, includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut SST

660811494 Cold cap gasket

F2622001 Cold cap follower, brass

75786001 Cold cap nut

622445026 Cold cap female coupling, 1/2" OD tube x 3/8" FPT, Imperial Flexfitting No. 66-FL

L6367301 Sprint coupling

84350301 Jet coupling assembly

84889301 Foreline baffle assembly

F6097301 Sight glass service kit, includes glass tube, O-rings, and fittings

Valves not included for pumps built prior to October 1994

F1755301 Sight glass assembly, includes seal valve, glass tube, removable bracket, cover for sight glass

assembly, and fittings for pumps built prior to October 1994

77261001 Threaded plug, fill and drain

K9050001 Upper thermal switch, Temperature setting: 185 °F

K9050002 Lower thermal switch, Temperature setting: 390 °F

656118114 Nickel wire, No. 14 AWG

648056329 Nickel lug for No. 14 AWG

647320025 Heater element with leads (2,000 W, 200 V)

647320020 Heater element with leads (2,000 W, 240 V or 380 V)

647320035 Heater element with leads (2,000 W, 400 V)

647320040 Heater element with leads (2,000 W, 430 V)

647320045 Heater element with leads (2,000 W, 440 V)

647320030 Heater element with leads (2,000 W, 480 V)

K7108001 Crush plate, replace with each heater

K7107001 Clamping plate

L6514001 Insulation for heaters, Cerablanket 0.50" thick

84497001 Heater cover plate

L9223001 Sight glass (for pumps built after October 1994)

K0377165 O-ring kit; includes:

1 butyl O-ring for ASA inlet flange (84349002) 1 butyl foreline flange O-ring (660893432) 8 Viton fill and drain O-rings (660892213) 1 Sight glass O-ring (660892240) 1 Graphite sight glass gasket (L9228001)

695472008 DC-702 diffusion pump fluid, one gallon

695474008 DC-704 diffusion pump fluid, one gallon

695475008 DC-705 diffusion pump fluid, one gallon

Page 58

High Throughput Diffusion Pumps

DRAFT 8/22/03

Table 18 HS-32 Replacement Parts

Part Number Description

77252801 Cold cap assembly, includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut SST

660811494 Cold cap grommet

F2622001 Cold cap follower (brass)

75786001 Cold cap nut

622445026 Cold cap female coupling, 1/2" OD tube x 3/8" FPT, Imperial Flexfitting No. 66-FL

76511301 Jet assembly, includes cold cap assembly

F6097301 Sight glass service kit (includes glass tube, O-rings, and fittings; valves not included)

F1755301 Sight glass assembly (includes seal valve, glass tube, removable bracket, cover for sight glass

assembly, and fittings)

84347003 Threaded plug, fill and drain

K9050003 Upper thermal switch, Temperature setting: 220 °F

K9050004 Lower thermal switch, Temperature setting: 550 °F

656118114 Nickel wire (by the foot), No. 14 AWG

648056329 Nickel lug for No. 14 AWG

F6253001 Thermal switch block, brass

647332010 Heater element with leads, No. 10 AWG (4000 W, 240 V, 380/415 V, 480 V)

647332020 Heater element with leads, No. 10 AWG (4000 W, 200 V)

K7246001 Heater crush plate, replace with each new heater

K7247001 Clamping plate

75792001 Insulation for heaters – Cerablanket 0.50" thick

75791001 Heater cover

670099910 Insulation for conduit

L9223001 Sight glass (for pumps built after October 1995)

K0377167 O-ring kit; includes:

1 butyl O-ring for ASA inlet flange (45390001) 1 butyl O-ring foreline flange (2-443) 8 Viton fill and drain O-rings (2-213) 1 Sight glass O-ring (2-240) 1 Graphite sight glass O-ring (L9228001) 4 Viton O-rings (2-221)

695472008 DC-702 diffusion pump fluid, one-gallon

695474008 DC-704 diffusion pump fluid, one-gallon

695475008 DC-705 diffusion pump fluid, one-gallon

Page 59

High Throughput Diffusion Pumps

DRAFT 8/22/03

Table 19 NHS-35 Replacement Parts

Part Number Description

81437301 Cold cap assembly (includes No.10-32 SST Rd Hd screw and No. 10-32 hex nut) SST

660811494 Cold cap gasket

F2622001 Cold cap follower (brass)

75786001 Cold cap nut

622445026 Cold cap female coupling, 1/2" OD tube x 3/8" FPT, Imperial Flexfitting No. 66-FL

F1971302 Jet assembly

F1744301 Foreline baffle assembly

F6097301 Sight glass service kit (includes glass tube, O-rings, and fittings; valves not included)

For pumps built prior to October 1995)

77261001 Threaded plug, fill and drain

K9050005 Upper thermal switch, Temperature setting: 200 °F

K9050006 Lower thermal switch, Temperature setting: 600 °F

647335010 Heater element with leads (4000 W, 240 V, 380 V, 480 V)

L6383010 Heater element with leads (4000 W, 400 V)

L6383011 Heater element with leads (4000 W, 440 V)

F1749001 Clamping plate (no crushplate in NHS-35)

L6514001 Insulation for heaters – Cerablanket 0.50" thick

L9223001 Sight glass (for pumps built after October 1995)

K0377169 O-ring kit; includes: 1 Butyl O-ring for ASA inlet flange (78536001)

1 Butyl O-ring foreline flange (2-267) 8 Viton O-rings fill and drain (2-213) 1 Sight glass O-ring (2-240) 1 Graphite sight glass gasket (L9228001) 4 Viton O-rings (2-221)

695472008 DC-702 diffusion pump fluid, one-gallon

695474008 DC-704 diffusion pump fluid, one-gallon

695475008 DC-705 diffusion pump fluid, one-gallon

78536002 O-ring for ISO inlet flange

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Page 61

Page 62

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07/03

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Varian HS-16, HS-20, HS-32, NHS-35 Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual