Varian HeliTest, 969-3501 Instruction Manual

Page 1
87-900-067-01 (B) APRIL 2002
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D’EMPLOI
INSTRUCTION MANUAL
HeliTest
Interface
Model 969-3501
vacuum technologies
Page 2
HeliTest with RS-232 Interface
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Page 4
Page 5
INSTRUCTION FOR USE................................................................................................... 1
GEBRAUCHSANLEITUNG ................................................................................................. 2
MODE D’EMPLOI................................................................................................................ 3
INSTRUCTIONS FOR USE................................................................................................. 4
TECHNICAL INFORMATION .............................................................................................. 5
OVERVIEW ............................................................................................................................................. 5
COMMUNICATION CABLE ASSEMBLY ................................................................................................ 6
RS-232 COMMUNICATION DESCRIPTION........................................................................................... 7
Communication Format .................................................................................................................
7
Communication Protocol ...............................................................................................................
7
COMMANDS............................................................................................................................................ 7
LOCAL/REMOTE Selection...........................................................................................................
7
CALIBRATION COEFFICIENT Writing .........................................................................................
7
LIGHT ON/OFF .............................................................................................................................
7
Configuration Parameters Writing .................................................................................................
8
ZERO Function..............................................................................................................................
8
SENSITIVITY Selection .................................................................................................................
8
MODE Selection ............................................................................................................................
8
PROBE Function ...........................................................................................................................
8
AUDIO ON/OFF.............................................................................................................................
8
CLEANUP Function.......................................................................................................................
9
REQUEST OF INFORMATION ............................................................................................................... 9
Operating Status Request .............................................................................................................
9
Operating Phase Request .............................................................................................................
9
Self Test Phase Request.............................................................................................................
10
Filament Voltage Request ...........................................................................................................
10
Filament Current Request ...........................................................................................................
10
Sensor Current Request ..............................................................................................................
10
Calibration Coefficient Request...................................................................................................
10
Measurement Request ................................................................................................................
10
Fine Measurement Request ........................................................................................................
11
Set Point Request........................................................................................................................
11
Language/Measurement Unit Request........................................................................................
11
Set Point Status Request ............................................................................................................
11
Duty Cycle Request .....................................................................................................................
11
TEST PROGRAM .................................................................................................................................. 11
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ISTRUZIONI PER L’USO
1
87-900-067-01 (B)
INFORMAZIONI GENERALI
Il presente manuale si riferisce all'HeliTest con interfaccia RS-232 e deve essere utilizzato in abbina­mento al manuale base HeliTest n. 87-900-045-01 del quale è parte integrante.
Questa apparecchiatura è destinata ad uso professionale. L’utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell’utilizzo dell’apparecchiatura. La Varian si ritiene sollevata da eventuali responsabilità dovute all’inosservanza totale o parziale delle istruzioni, ad uso improprio da parte di personale non addestrato, ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche.
Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell’operatore durante L’utilizzo dell’apparecchiatura. Informazioni dettagliate sono fornite nell’appendice "Technical Information".
Questo manuale utilizza le seguenti convenzioni:
!
I messaggi di pericolo attirano l’attenzione dell’operatore su una procedura o una pratica specifica che, se non eseguita in modo corretto, potrebbe provocare gravi lesioni personali.
ATTENZIONE!
I messaggi di attenzione sono visualizzati prima di procedure che, se non osservate, potrebbero causare danni all’apparecchiatura.
NOTA
Le note contengono informazioni importanti estrapolate dal testo.
IMMAGAZZINAMENTO
Durante il trasporto e l’immagazzinamento degli strumenti, devono essere soddisfatte le seguenti condizioni ambientali:
temperatura: da -20 °C a +70 °C
umidità relativa: 0 - 95% (non condensante)
PREPARAZIONE PER L’INSTALLAZIONE
Durante l’operazione di disimballaggio, prestare particolare attenzione a non lasciar cedere gli strumenti e a non sottoporli ad urti. Non disperdere l’imballo nell’ambiente. II materiale è completamente riciclabile e risponde alla direttiva CEE 85/399 per la tutela dell’ambiente.
INSTALLAZIONE ED USO
!
II Kit è fornito di caricabatterie e cavi di alimentazione a tre fili con una spina di tipo approvato a livello internazionale. Utilizzare sempre questi cavi di alimentazione ed inserire la spina in una presa con un adeguato collegamento di massa onde evitare scariche elettriche. All'interno degli strumenti si sviluppano alte tensioni che possono recare gravi danni o la morte.
Durante il funzionamento è necessario che siano rispettate le seguenti condizioni ambientali:
temperatura: da -5 °C a +40 °C;
umidità relativa: 0 - 95% (non condensante).
MANUTENZIONE
L’HeliTest con interfaccia RS-232 richiede solo la manutenzione dei filtri dei probe. Qualsiasi altro intervento deve essere eseguito da personale autorizzato.
!
Ogni intervento non autorizzato sul dispositivo potrebbe recare gravi danni a persone o cose.
In caso di guasto è possibile usufruire del servizio di riparazione Varian o del "Varian advanced exchange service", che permette di ottenere un dispositivo rigenerato in sostituzione di quello guasto.
Qualora un dispositivo, o parte di esso, dovesse essere rottamato, procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche.
PERICOLO!
PERICOLO!
PERICOLO!
Page 7
GEBRAUCHSANLEITUNG
2
87-900-067-01 (B)
ALLGEMEINE INFORMATIONEN
Die Handbuch behandelt den HeliTest mit RS-232 Schnittstelle und sollte in Verbindung mit den Basishandbuch Nr. 87-900-045-01 benutzt werden, dessen integrierender Bestandteil es ist.
Die Geräte sind für Verwendung durch Experten vorgesehen. Der Anwender ist gehalten, diese Anweisungen und alle sonstigen von Varian gelieferten Informationen zu lesen, bevor er die Apparatur in Betrieb nimmt. Varian übernimmt keine Verantwortung für irgendwelche Folgen, die sich aus - auch nur teilweiser - Mißachtung dieser Anweisungen, falscher Benutzung durch Personen ohne entsprechende Ausbildung, unerlaubtes Manipulieren an der Apparatur oder irgendwelcher anderer Verletzungen der besonderen nationalen Vorschriften ergeben.
Die folgenden Abschnitte enthalten alle Informationen, die für die Sicherheit des Anwenders beim Betrieb von Bedeutung sind. Die darauf folgenden Kapitel liefern detaillierte Informationen.
In diesem Handbuch werden die folgenden Konventionen verwendet:
!
Die Gefahr-Meldungen haben den Zweck, die Aufmerksamkeit des Anwenders auf Verfahren oder Prozeduren zu lenken, die bei falscher Ausführung zu schweren Verletzungen führen können.
WICHTIG!
Diese Meldungen werden den Prozeduren vorangestellt, die bei falscher Ausführung die Maschine beschädigen können.
HINWEIS
Die Hinweise enthalten wichtige aus dem Text hervorgehobene Informationen.
EINLAGERUNG
Bei dem Transport und der Einlagerung der Geräte müssen folgende Umgebungsbedingungen eingehalten werden:
Temperatur: -20 °C und + 70 °C
Rel. Luftfeuchtigkeit: 0 - 95% (nicht kond.)
INSTALLATIONSVORBEREITUNGEN
Beim Auspacken sorgfältig darauf achten, dass die Geräte nicht herunterfallen oder gegen irgendetwas stoßen. Das Verpackungsmaterial entsprechend den Vorschriften entsorgen. Das Material kann zu 100% rezykliert werden und entspricht den EWG Normen der Richtlinie 85/399.
INSTALLATION UND BENUTZUNG
!
Das Kit hat ein Batterieladegerät und ein dreiadriges Stromkabel mit international zugelassenem Sicherheitsstecker. Kabel und Stecker müssen an eine Steckdose mit richtiger Erdung angeschlossen werden, um elektrische Schläge zu verhindern. Die im Gerät erzeugte Hochspannung kann schwere Verletzungen verursachen oder zum Tode führen.
Beim Betrieb müssen folgende Umgebungs­bedingungen eingehalten werden:
Temperatur: -5 °C und + 40 °C
rel. Luftfeuchtigkeit: 0 - 95% (nicht kond.)
WARTUNG
Die einzigen Wartungsarbeiten für den HeliTest mit RS-232 Schnittstelle sind der Wechsel der Filter für den Standard- und den visuellen Filter. Alle anderen Eingriffe dürfen nur von autorisiertem Personal durchgeführt werden.
!
Jeder Eingriff durch nicht autorisierte Personen kann zu schweren Verletzungen und Sachschäden führen.
Bei Defekten kann man sich Varians Reparaturservice oder “Varian Advanced Exchange Service” bedienen, die das defekte Gerät gegen ein generalüberholtes austauschen.
Wenn ein Gerät oder ein Teil davon verschrottet werden soll, muß dies nach den nationalen Vorschriften geschehen.
GEFAHR!
GEFAHR!
GEFAHR!
Page 8
MODE D’EMPLOI
3 87-900-067-01 (B)
INFORMATIONS GENERALES
Ce manuel se réfère au dispositif HeliTest avec interface RS-232 et doit être utilisé avec le manuel de base HeliTest n. 87-900-045-01, dont il est une partie intégrante.
L'utilisation de cet équipement est réservée aux professionnels. L'utilisateur doit lire ces instructions pour l'utilisation et toute autre information supplémentaire fournie par la société Varian avant d'utiliser cet équipement. La société Varian décline toute responsabilité pour des dommages provoqués par le non-respect même partiel de ces instructions, par l'utilisation impropre de la part de personnel non adéquatement formé, par des modifications non autorisées ou par toute action contraire aux dispositions des normes nationales en la matière.
Les paragraphes suivants contiennent toutes les informations nécessaires pour la sécurité de l'opérateur pendant l'utilisation de l'équipement. Des informations détaillées sont contenues dans l'annexe "Informations techniques".
Ce manuel utilise les symboles suivants:
!
Les messages de danger servent à attirer l'attention de l'opérateur sur une procédure ou une opération spécifique qui, si elle n'est pas exécutée correctement, pourrait provoquer des graves lésions.
ATTENTION!
Les messages d'attention sont placés avant les procédures dont le non-respect pourrait entraîner des dommages à l'équipement.
NOTE
Il s'agit d'informations importantes tirées du texte.
STOCKAGE
L'équipement peut être transporté et stocké dans les conditions ambiantes suivantes:
Température: -20 °C à +70 °C
Humidité relative: 0 à 95% (sans condensat)
PREPARATION A L'INSTALLATION
Lors du déballage prenez soin de ne pas le faire tomber ou de lui faire subir des chocs.
Ne pas laisser l'emballage dans la nature. L'emballage est recyclable à 100% et est conforme aux normes CEE de la directive 85/399 pour la protection de l'environnement.
INSTALLATION ET UTILISATION
!
Le kit est livré avec un chargeur de batterie et un cordon d'alimentation doté d'une fiche à trois fils, homologuée au niveau international. Utilisez toujours ce cordon et branchez-le sur une prise d'alimentation dotée de mise à la terre appropriée pour éviter toute décharge électrique. La haute tension générée à l'intérieur de l'équipement peut entraîner des graves lésions, voire la mort.
L'équipement doit être utilisé dans les conditions ambiantes suivantes:
Température: -5 °C à +40 °C;
Humidité relative: 0 à 95% (sans condensats).
ENTRETIEN
En ce qui concerne l'entretien, le dispositif HeliTest avec interface RS-232 ne requiert que le remplacement des filtres standard et de ceux de la sonde visuelle. Toute autre intervention doit être effectuée par du personnel autorisé.
!
Toute intervention non autorisée effectuée sur le dispositif peut provoquer des lésions graves et des dommages aux biens.
En cas de défaillance du dispositif, vous pouvez vous adresser au service après-vente de la société Varian ou au “Varian Advanced Exchange Service” qui vous fournira un dispositif remis à neuf à la place de celui défaillant.
Si vous devez éliminer le dispositif, ou un de ses éléments, procéder à l'élimination conformément aux normes nationales en vigueur en la matière.
DANGER!
DANGER!
DANGER!
Page 9
INSTRUCTIONS FOR USE
4
87-900-067-01 (B)
GENERAL INFORMATION
This manual is relevant to the HeliTest with RS-232 interface and is to be used in conjunction with the HeliTest base manual n. 87-900-045-01 of which is an integral part.
The equipment described in this manual is intended for professional use. The user must carefully read this instruction manual and any additional information provided by Varian before using the equipment. Varian declines all responsibility for damage caused by the total or partial misuse of the instructions provided herein, by the improper use of the equipment by untrained personnel, by unauthorized interventions or by negligence in complying with any specific national rule or regulation.
The following sections provide you with all the information needed to guarantee the operator’s safety when using the equipment. Detailed information is provided in the appendix entitled “Technical Information".
The following conventions are used in this manual:
!
Danger messages call the operator’s attention to a specific procedure or operation that could cause serious injury if not performed correctly.
CAUTION!
Warning messages are provided before procedures that could cause damage to the equipment if not complied with.
NOTE
Notes provide you with important information extracted from the text.
STORAGE
The equipment can be transported and stored under the following environmental conditions:
Temperature: -20 °C to +70 °C
Relative humidity: 0 to 95% (non-condensing)
PRIOR TO INSTALLATION
When unpacking the equipment, be careful to avoid dropping it or knocking it against anything.
Do not dispose the packaging material in the environment. The packaging material is totally recyclable and complies with EEC directives 85/399 for the safeguard of the environment.
INSTALLATION AND USAGE
!
The kit comes with a battery charger and with three­wire power cords fitted with internationally approved plugs. Always use these power cords and insert the related plugs into appropriately grounded power outlets so as to avoid electrostatic discharges. High voltages that could cause serious injury or even death are generated inside the equipment.
The equipment must be used under the following environmental conditions:
Temperature: -5 °C to +40 °C
Relative humidity: 0 to 95% (non-condensing).
MAINTENANCE
As far as maintenance is concerned, the HeliTest with RS-232 interface requires only the replacement of probe filters. Any other intervention must be performed by authorized personnel.
!
Every unauthorized intervention on the device could cause serious injury to persons and damage to objects.
In the event of failure, it is possible to use the Varian repair service or the “Varian Advanced Exchange Service” through which you are assigned a refurbished device in replacement of the faulty one.
If a device, or a part of it, needs to be discarded, proceed to do so in compliance with the specific national standards.
WARNING!
WARNING!
WARNING!
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TECHNICAL INFORMATION
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87-900-067-01 (B)
OVERVIEW
The HeliTest with RS-232 interface is equipped with a communication serial port located on the side of the base module (see the following figure).
The communication serial port connections are shown in the figure "Serial Port Connection". Only the minimum configuration connection (3 wires) is available. No other connections or jumpers are required.
Note that all the connections into the HeliTest are optically isolated.
HeliTest with Battery and RS-232 Interface
RS-232 Connector
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TECHNICAL INFORMATION
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87-900-067-01 (B)
COMMUNICATION CABLE ASSEMBLY
To connect the RS-232 interface with the host computer a communication cable must be assembled.
For this purpose a mating connector with the hardware necessary to connect the cable is provide, Varian P/N SR51-10400201.
NOTE
The connecting cable should be shielded. The shield be connected to the Host computer ground.
For detail about the cable assembly and the connections see the following figures.
Serial Port Connections
Communication Cable Assembly
2 = TXD (Transmitted Data) 3 = RXD (Received Data) 5 = Ground
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TECHNICAL INFORMATION
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87-900-067-01 (B)
RS-232 COMMUNICATION DESCRIPTION
Communication Format
8 data bit
no parity
2 stop bit
baud rate 1200
Communication Protocol
The communication protocol is a Master-Slave type:
Host computer = Master
Helitest = Slave
The communication is performed in the following way:
Host HeliTest
Request + CRC
Answer + CRC
Request is an ASCII character identifying the action
that must be performed by the HeliTest (command) or the requested information (request).
CRC corresponds to the sum with inverted sign of all
the preceding bytes.
Answer is the answer of the HeliTest after a
command or a request from the host.
The Helitest will always answer in one of the following ways:
– After a command:
”ACK" + CRC
or
"NACK" + CRC
– After a request:
"MESSAGE" + CRC where MESSAGE contains the requested information
or
"NACK" + CRC if the request has not been correctly received.
COMMANDS
LOCAL/REMOTE Selection
"@"+CRC
It allows to switch from LOCAL (commands sent to HeliTest via front panel) to REMOTE (commands sent to HeliTest via RS-232 interface) mode of operation.
It is equivalent to push PROBE + SENS buttons on the HeliTest front panel.
When set to REMOTE operation only the following functions are available on the HeliTest keyboard:
OFF
LIGHT
AUDIO
PROBE + SENS (local/remote selection)
The local/remote selection can be always done through the HeliTest front panel or through the RS-232 interface.
When the REMOTE mode of operation is selected an "R" is flashing in the lower right corner of the display.
CALIBRATION COEFFICIENT Writing
"H"+<-sign>+<+sign>+CRC
It writes the new calibration coefficient into the EEPROM of HeliTest. The new parameter is used immediately by the measurement software. The Helitest will respond with "ACK" if writing is possible, or "
NACK" if writing is not possible.
LIGHT ON/OFF
"J"+CRC
It allows to switch ON or OFF the retroillumination of the HeliTest display. It is equivalent to press the two button AUDIO and SENS together on the HeliTest front panel.
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TECHNICAL INFORMATION
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87-900-067-01 (B)
Configuration Parameters Writing
"K"+<language>+<meas. unit>+<<set point mantissa>+<setpoint exponent>+CRC
where:
"language" can be one of the following values:
0 = Italian 1 = English 2 = French 3 = German
"measurement unit" can be one of the following values:
0 = ppm 1 = mbarL/s 2 = cm
3
/s
3 = cm
3
/min 4 = TorrL/s 5 = PaL/s 6 = Pam
3
/s 7 = kg/h 8 = g/y R12
"set point mantissa" is a number between 1 and 9
"set point exponent" is a number between 0 and 6
depending on the chosen measurement unit according to the following table:
EXPONENT
MEAS.
UNIT
0123456
010010-110-210-310-410-510
-6
110-610-510-410-310-210-110
-0
210-610-510-410-310-210-110
-0
310-410-310-210-110-010-110
-2
410-610-510-410-310-210-110
-0
510-410-310-210-110-010-110
-2
610-710-610-510-310-310-210
-1
710-810-710-610-410-410-310
-2
810-110-010-110-310-310-410
-5
Example:
to send a set point value of 2 x 10-4 cm3/s with English language you must send the following command:
K1222+CRC
command language measurement unit mantissa exponent
This command writes into EEPROM the configuration parameters. Incorrect value are not accepted. The HeliTest will respond with "ACK" if writing is possible, or "NACK" if writing is not possible.
ZERO Function
"L" + CRC
This command switches the unit from AUTOMATIC (AZ) to FIX ZERO (FZ) mode and viceversa. It is equivalent to push the ZERO button on the HeliTest front panel. This command is available only when the unit is in the REMOTE operation mode (letter "R" is flashing on the HeliTest display).
SENSITIVITY Selection
"M" + CRC
This command switches the unit from HIGH (HS) to LOW (LS) sensitivity mode and viceversa. It is equivalent to push the SENS button on the HeliTest front panel.
This command is available only when the unit is in the REMOTE operation mode (letter "R" is flashing on the HeliTest display).
MODE Selection
"N" + CRC
This command switches the unit from MEASUREMENT (MS) to SET POINT (SP) mode and viceversa. It is equivalent to push the MODE button on the HeliTest front panel. This command is available only when the unit is in the REMOTE operation mode (letter "R" is flashing on the HeliTest display).
PROBE Function
"O" + CRC
This command enables or disables the sampling pump. It is equivalent to push the PROBE button on the HeliTest front panel. This command is available only when the unit is in the REMOTE operation mode (letter "R" is flashing on the HeliTest display).
AUDIO ON/OFF
"P" + CRC
This command switches the beeper ON or OFF. It is equivalent to push the AUDIO button on the HeliTest front panel. This command is available only when the unit is in the REMOTE operation mode (letter "R" is flashing on the HeliTest display).
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TECHNICAL INFORMATION
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87-900-067-01 (B)
CLEANUP Function
"Q" + CRC
This command activates the cleaning function. It is equivalent to push the two buttons ZERO and PROBE together on the HeliTest front panel. This command is available only when the unit is in the REMOTE operation mode (letter "R" is flashing on the HeliTest display).
REQUEST OF INFORMATION
Operating Status Request
"A" + CRC
The HeliTest answers with a character (+CRC) with the following meaning:
76543210
bit 0 = zero: 0 =AZ; 1 = FZ
bit 1 = probe: 0 = OFF; 1 = ON
bit 2 = audio: 0 = OFF; 1 = ON
bit 3 = sensitivity: 0 = HS; 1 = LS
bit 4 = mode: 0 = MS; 1 = SP
bit 5 = local/remote: 0 = loc.; 1 = rem.
bit 6 = light: 0 = OFF; 1 = ON
bit 7 = always 1.
This information can be requested also when the HeliTest is set for LOCAL operation.
Operating Phase Request
"B" + CRC
The HeliTest answers with a character (+CRC) (with the bit 7 always 1) indicating the actual operating phase.
The character has the meaning detailed in the following table.
CHARACTER OPERATING PHASE DESCRIPTION
0 to 4 Self test phase
4 READY phase
6 STANDBY phase
7 Wait time STANDBY - OPERATIVE
8 Sampling line test
9 Measurement phase
10 Transition from High Sensitivity (HS) to
Low Sensitivity (LS) during measurement phase
11 Transition from Low Sensitivity (LS) to High
Sensitivity (HS) during measurement phase
13 Transition from High Sensitivity (HS) to
Low Sensitivity (LS) during ready phase
14 Transition from Low Sensitivity (LS) to High
Sensitivity (HS) during ready phase
17 Wait time before calibration routine
18 Calibration phase
20 Cleanup phase
21 Cleanup phase completed
22 Cleanup phase not completed.
The HeliTest does not accept any more command and it must be turned off to be reset.
23 Transition from
High Sensitivity (HS) to Low Sensitivity (LS) at the end of cleanup phase
25 Heater defective.
The HeliTest does not accept any more command and it must be turned off to be reset.
26 Sampling line fault.
The HeliTest does not accept any more command and it must be turned off to be reset.
27 Battery out of order or low voltage
The HeliTest does not accept any more command and it must be turned off to be reset.
29 Sensitivity Test Fault.
The HeliTest does not accept any more command and it must be turned off to be reset.
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TECHNICAL INFORMATION
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87-900-067-01 (B)
Self Test Phase Request
"C" + CRC
The HeliTest answers with a character (+CRC) (with the bit 7 always 1) indicating the actual self test phase (corresponding to the operating phase 0 to 4). The character has the following meaning:
CHARACTER SELF TEST PHASE DESCRIPTION
0 Initial delay time
1 Start self test procedure
2 Heater test
3 Heater test OK
4 Battery test
5 Battery test OK
6 Sensitivity test
7 Sensitivity test result: if operating phase
is 3, then sensitivity test is OK.
8 Sampling line test
15 Self test completed
21 Sensor test
23 The sensor test can not be completed due
to a too high Helium concentration (the display shows the message SPRAY NITROGEN)
This information can be requested also when the HeliTest is set for LOCAL operation.
Filament Voltage Request
"D" + CRC
The HeliTest answers with a character (+CRC) corresponding to the filament voltage divided by 255.
I.e. Filament voltage = character x 13.7 / 255.
Filament Current Request
"E" + CRC
The HeliTest answers with a character (+CRC) corresponding to the filament current divided by 255.
I.e. Filament current = character x 4.545 / 255.
Sensor Current Request
"F" + CRC
The HeliTest answers with:
"Less Significant Byte"+ "Most Significant Byte"+CRC
corresponding to the sensor current expressed in quarters (0.25) of nanoampere.
Calibration Coefficient Request
"G" + CRC
The HeliTest answers with:
"Less Significant Byte"+ "Most Significant Byte"+CRC
corresponding to the actual value of the calibration coefficient.
Measurement Request
"I" + CRC
The HeliTest answers with:
"Exponent" + "Mantissa" + CRC
corresponding to the Helium concentration expressed in parts per million (ppm).
The He concentration is always expressed in ppm also if the measurement unit set on the HeliTest front panel is different.
In the following table the conversion factor from ppm to the other measurement units are shown.
1 ppm corresponds to:
mbarL/s 2.5 x 10
-6
cm3/s 2.5 x 10
-6
cm3/min 1.5 x 10
-4
TorrL/s 1.9 x 10
-6
PaL/s 2.5 x 10
-4
Pam3/s 2.5 x 10
-7
kg/h 1.1 x 10
-8
g/y R12 3.9 x 10
-1
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TECHNICAL INFORMATION
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87-900-067-01 (B)
Fine Measurement Request
"R" + CRC
The HeliTest answers with a character (+CRC) corresponding to the measured ppm in the range 0 to 100.
If the value is higher, the character is 255.
Set Point Request
"S" + CRC
The HeliTest answers with:
"Mantissa" + "Exponent" + CRC
corresponding to the set point value expressed in the set measurement unit.
For the exponent value see the table of command K in the previous pages.
Language/Measurement Unit Request
"T" + CRC
The HeliTest answers with the following characters:
"Language" + "Meas. unit" + CRC
corresponding to the set language and measurement unit.
For the character values see the command K in the previous pages.
Set Point Status Request
"U" + CRC
The HeliTest answers with a character (+CRC) corresponding to the set point status:
0 = threshold not exceeded 1 = threshold exceeded
Duty Cycle Request
"V" + CRC
The HeliTest answers with the following characters:
"n" + CRC
corresponding to the duty cycle value of the heater power control. The "n" value is from 460 to 18431, and the duty cycle value is n/18432.
TEST PROGRAM
A program to test all the HeliTest functionality is shown in the following pages.
The test also include a DEMO option to simulate the HeliTest front panel on the computer screen.
The program is written in BASIC.
In order to execute the program the following steps should be performed:
store the program into a file with .BAS extension
connect the HeliTest to the port COM1 of
your PC
– activate the BASIC interpreter of your PC and load
the program.
If the program is run with the HeliTest switched off or the RS232 interface disconnected, the program will send an error message.
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TECHNICAL INFORMATION
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87-900-067-01 (B)
DECLARE SUB answer (lung%) OPEN "com1:1200,n,8,1,rs,ds" FOR RANDOM AS 1 ON ERROR GOTO ai star: demo = 0 CLS WHILE 1
PRINT "1-STATUS 2-OPERATING PHASE" PRINT "3-SELF-TEST PHASE 4-FILAMENT VOLTAGE" PRINT "5-FILAMENT CURRENT 6-SENSOR CURRENT" PRINT "7-READ CALIBRATION COEFFICIENT 8-MEASURE" PRINT "9-LIGHT ON/OFF 0-LOCAL/REMOTE" PRINT "A-ZERO BUTTON B-SENS BUTTON" PRINT "C-MODE BUTTON D-PROBE BUTTON" PRINT "E-AUDIO BUTTON F-CLEANUP" PRINT "H-WRITE CALIBRATION COEFFICIENT R-HIGH RESOLUTION" PRINT "K-WRITE CONFIGURATION S-READ SETPOINT VALUE" PRINT "U-READ SETPOINT STATUS T-READ CONFIGURATION" PRINT "V-READ DUTY CYCLE PRINT PRINT "G-DEMO" PRINT "Q-QUIT" a$ = "" WHILE a$ = "": a$ = INKEY$: WEND SELECT CASE a$
CASE "G", "g"
dem:
demo = 1 CLS LOCATE 25, 1 LOCATE 2, 10: PRINT "+----------------+" LOCATE 3, 10: PRINT "|----HeliTest----|" LOCATE 4, 10: PRINT "| |" LOCATE 5, 10: PRINT "+----------------+" PRINT "1-ZERO 2-PROBE 3-AUDIO 4-SENS 5-MODE 6-CLEANUP "; PRINT "7-LIGHT 8-LOC/REM 9-END"; WHILE 1
PRINT #1, "A"; CHR$(&HBF);
answer 2 IF risp$ = "" THEN
LOCATE 8, 1: PRINT "NOT CONNECTED" WHILE risp$ = ""
PRINT #1, "A", CHR$(&HBF); answer 2 a$ = INKEY$ IF a$ = "9" GOTO star
WEND END IF LOCATE 8, 1: PRINT " " stato% = ASC(LEFT$(risp$, 1)) LOCATE 4, 26 IF (stato% AND &H20) THEN PRINT "R"; ELSE PRINT "*"; PRINT #1, "B"; CHR$(&HBE); answer 2 IF risp$ = "" THEN GOTO fineloop fase% = ASC(LEFT$(risp$, 1)) AND &H7F SELECT CASE fase%
CASE 0, 1, 2, 3, 4
PRINT #1, "C"; CHR$(&HBD); answer 2 IF risp$ = "" THEN GOTO fineloop fasest% = ASC(LEFT$(risp$, 1)) AND &H7F SELECT CASE fasest%
Page 18
TECHNICAL INFORMATION
13
87-900-067-01 (B)
CASE 0:
LOCATE 3, 11: PRINT "----HeliTest----" LOCATE 4, 11: PRINT " Welcome "
CASE 1:
LOCATE 3, 11: PRINT " Self test " LOCATE 4, 11: PRINT " procedure "
CASE 2:
LOCATE 3, 11: PRINT " Heater test " LOCATE 4, 11: PRINT " "
CASE 3:
LOCATE 3, 11: PRINT " Heater test " LOCATE 4, 11: PRINT " "
CASE 4:
LOCATE 3, 11: PRINT " Battery test " LOCATE 4, 11: PRINT " "
CASE 6:
LOCATE 3, 11: PRINT "Sensitivity Test" LOCATE 4, 11: PRINT " "
CASE 7:
LOCATE 3, 11: PRINT "Sensitivity Test" LOCATE 4, 11 IF fase% = 3 THEN
PRINT " OK "
ELSE
PRINT " SPRAY HELIUM "
END IF
CASE 8:
LOCATE 3, 11: PRINT " Sampling line " LOCATE 4, 11: PRINT " "
CASE 15:
LOCATE 3, 11: PRINT " Self test " LOCATE 4, 11: PRINT " COMPLETED "
CASE 21:
LOCATE 3, 11: PRINT " Sensor test "
LOCATE 4, 11: PRINT " " END SELECT CASE 5:
LOCATE 3, 11: PRINT " READY "
LOCATE 4, 11
IF (stato% AND 8) THEN PRINT "LS"; ELSE PRINT "HS";
LOCATE 4, 14
IF (stato% AND &H10) THEN PRINT "SP"; ELSE PRINT "MS";
LOCATE 4, 17
IF (stato% AND 2) THEN PRINT "P.ON"; ELSE PRINT "P.OFF"; LOCATE 4, 23
IF (stato% AND 1) THEN PRINT "FZ"; ELSE PRINT "AZ"; CASE 6:
LOCATE 3, 11: PRINT " STAND-BY "
LOCATE 4, 11
IF (stato% AND 8) THEN PRINT "LS"; ELSE PRINT "HS";
LOCATE 4, 14
IF (stato% AND &H10) THEN PRINT "SP"; ELSE PRINT "MS";
LOCATE 4, 17
IF (stato% AND 2) THEN PRINT "P.ON"; ELSE PRINT "P.OFF";
LOCATE 4, 23
IF (stato% AND 1) THEN PRINT "FZ"; ELSE PRINT "AZ"; CASE 7, 8
LOCATE 3, 11: PRINT " --->> OPERATIVE"
LOCATE 4, 11: PRINT " PLEASE WAIT " CASE 10, 13, 23
LOCATE 3, 11: PRINT " HS -->> LS "
LOCATE 4, 11: PRINT " PLEASE WAIT " CASE 11, 14
Page 19
TECHNICAL INFORMATION
14
87-900-067-01 (B)
LOCATE 3, 11: PRINT " LS -->> HS "
LOCATE 4, 11: PRINT " PLEASE WAIT " CASE 17
LOCATE 3, 11: PRINT "-- Calibration "
LOCATE 4, 11: PRINT " PLEASE WAIT " CASE 20
LOCATE 3, 11: PRINT "--- CLEANUP --- "
LOCATE 4, 11: PRINT " " CASE 21
LOCATE 3, 11: PRINT "--- CLEANUP --- "
LOCATE 4, 11: PRINT " OK " CASE 22
LOCATE 3, 11: PRINT "--- CLEANUP --- "
LOCATE 4, 11: PRINT " NOT COMPLETED " CASE 9
LOCATE 4, 18: PRINT "ppm "
PRINT #1, "I"; CHR$(&HB7);
answer 3
IF risp$ = "" THEN GOTO fineloop
b$ = risp$
LOCATE 3, 11: PRINT " ";
a$ = RIGHT$(STR$(ASC(MID$(b$, 2, 1))), 1)
IF a$ = "0" THEN LOCATE 3, 11: PRINT " ................
IF a$ = "1" THEN LOCATE 3, 11: PRINT " .............
IF a$ = "2" THEN LOCATE 3, 11: PRINT "  .............
IF a$ = "3" THEN LOCATE 3, 11: PRINT " .........
IF a$ = "4" THEN LOCATE 3, 11: PRINT " ........
IF a$ = "5" THEN LOCATE 3, 11: PRINT " ........
IF a$ = "6" THEN LOCATE 3, 11: PRINT " .......
IF a$ = "7" THEN LOCATE 3, 11: PRINT " ....
IF a$ = "8" THEN LOCATE 3, 11: PRINT " ...
IF a$ = "9" THEN LOCATE 3, 11: PRINT "
PRINT a$; "E";
a$ = RIGHT$(STR$(ASC(LEFT$(b$, 1))), 1)
PRINT a$; " "
LOCATE 4, 23
IF (stato% AND 1) THEN PRINT "FZ "; ELSE PRINT " ";
LOCATE 4, 11
IF (stato% AND 8) THEN PRINT "LS "; ELSE PRINT " ";
LOCATE 4, 14
IF (stato% AND &H10) THEN PRINT "SP "; ELSE PRINT " "; END SELECT timeout = 1000 a$ = "" WHILE timeout <<>> 0 AND a$ = ""
timeout = timeout - 1
a$ = INKEY$ WEND IF a$ <<>><N>"" THEN
SELECT CASE a$
CASE "1"
PRINT #1, "L"; CHR$(&HB4); answer 2
CASE "2"
PRINT #1, "O"; CHR$(&HB1); answer 2
CASE "3"
PRINT #1, "P"; CHR$(&HB0); answer 2
CASE "4"
PRINT #1, "M"; CHR$(&HB3); answer 2
"; "; "; "; "; "; "; "; "; ";
Page 20
TECHNICAL INFORMATION
15
87-900-067-01 (B)
CASE "5"
PRINT #1, "N"; CHR$(&HB2); answer 2
CASE "6"
PRINT #1, "Q"; CHR$(&HAF); answer 2
CASE "7"
PRINT #1, "J"; CHR$(&HB6); answer 2
CASE "8"
PRINT #1, "@"; CHR$(&HC0); answer 2
CASE "9"
GOTO star
END SELECT END IF
fineloop:
WEND
CASE "A", "a"
PRINT #1, "L"; CHR$(&HB4); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
PRINT "ZERO BUTTON" END IF PRINT
CASE "B", "b"
PRINT #1, "M"; CHR$(&HB3);
answer 2
IF risp$ = "" THEN
PRINT "NOT CONNECTED"
ELSE
PRINT "SENS BUTTON" END IF PRINT
CASE "C", "c"
PRINT #1, "N"; CHR$(&HB2); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
PRINT "MODE BUTTON" END IF PRINT
CASE "D", "d"
PRINT #1, "O"; CHR$(&HB1); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED"
ELSE
PRINT "PROBE BUTTON" END IF PRINT
CASE "E", "e"
PRINT #1, "P"; CHR$(&HB0); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
PRINT "AUDIO BUTTON" END IF PRINT
Page 21
TECHNICAL INFORMATION
16
87-900-067-01 (B)
CASE "F", "f"
PRINT #1, "Q"; CHR$(&HAF); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
PRINT "CLEANUP" END IF PRINT
CASE "R", "r"
PRINT #1, "R"; CHR$(&HAE); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
PRINT "HIGH RESOLUTION= "; ASC(LEFT$(risp$, 1)); " ppm" END IF PRINT
CASE "1"
PRINT #1, "A"; CHR$(&HBF);
answer 2
IF risp$ = "" THEN
PRINT "NOT CONNECTED"
ELSE
b% = ASC(LEFT$(risp$, 1)) PRINT "STATUS HELITEST : "; HEX$(b%) PRINT "ZERO PROBE AUDIO SENS MODE LOC/REM LIGHT" IF (b% AND 1) THEN PRINT "FZ "; ELSE PRINT "AZ "; IF (b% AND 2) THEN PRINT "ON "; ELSE PRINT "OFF "; IF (b% AND 4) THEN PRINT "ON "; ELSE PRINT "OFF "; IF (b% AND 8) THEN PRINT "LS "; ELSE PRINT "HS "; IF (b% AND &H10) THEN PRINT "SP "; ELSE PRINT "MS "; IF (b% AND &H20) THEN PRINT "REMOTE "; ELSE PRINT "LOCAL "; IF (b% AND &H40) THEN PRINT "ON "; ELSE PRINT "OFF ";
PRINT END IF PRINT
CASE "2"
PRINT #1, "B"; CHR$(&HBE); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
b% = ASC(LEFT$(risp$, 1)) AND &H7F
PRINT "OPERATING PHASE: "; b% END IF PRINT
CASE "3"
PRINT #1, "C"; CHR$(&HBD); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
b% = ASC(LEFT$(risp$, 1)) AND &H7F
PRINT "SELF-TEST PHASE : "; b% END IF PRINT
CASE "4"
PRINT #1, "D"; CHR$(&HBC); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED"
ELSE
Page 22
TECHNICAL INFORMATION
17
87-900-067-01 (B)
b% = ASC(LEFT$(risp$, 1))
PRINT "FILAMENT VOLTAGE : "; ((13.77 * b%) / 255) END IF PRINT
CASE "5"
PRINT #1, "E"; CHR$(&HBB); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
b% = ASC(LEFT$(risp$, 1))
PRINT "FILAMENT CURRENT : "; ((4.545 * b%) / 255) END IF PRINT
CASE "6"
PRINT #1, "F"; CHR$(&HBA); answer 3 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
a$ = LEFT$(risp$, 2)
PRINT "SENSOR CURRENT : "; CVI(a$) END IF PRINT
CASE "s", "S"
PRINT #1, "S"; CHR$(&HAD); answer 3 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
a$ = LEFT$(risp$, 2)
PRINT "MANTISSA : "; CHR$(48 + ASC(LEFT$(risp$, 1)))
PRINT "EXPONENT : "; CHR$(48 + ASC(MID$(risp$, 2, 1))) END IF PRINT
CASE "t", "T"
PRINT #1, "T"; CHR$(&HAC); answer 3 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
PRINT "LANGUAGE : "; CHR$(48 + ASC(LEFT$(risp$, 1)))
PRINT "MEASUREMENT UNIT : "; CHR$(48 + ASC(MID$(risp$, 2, 1))) END IF PRINT
CASE "7"
PRINT #1, "G"; CHR$(&HB9); answer 3 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
a$ = LEFT$(risp$, 2)
PRINT "CALIBRATION COEFFICIENT : "; CVI(a$) END IF PRINT
CASE "v", "V"
PRINT #1, "V"; CHR$(&HAA); answer 3 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
a$ = LEFT$(risp$, 2)
PRINT "DUTY CYCLE : "; CVI(a$)
Page 23
TECHNICAL INFORMATION
18
87-900-067-01 (B)
END IF PRINT
CASE "u", "U"
PRINT #1, "U"; CHR$(&HAB); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
b% = ASC(LEFT$(risp$, 1))
IF b% THEN
PRINT "SET-POINT ON"
ELSE
PRINT "SET-POINT OFF"
END IF END IF PRINT
CASE "H", "h"
INPUT "ADJ. COEFFICIENT : ", ct% IF (ct% >>= 100) AND (ct% <<= 4170) THEN
cm$ = "H" + MKI$(ct%)
crc = 0
PRINT
FOR i = 1 TO LEN(cm$)
crc = crc - ASC(MID$(cm$, i, 1))
PRINT HEX$(ASC(MID$(cm$, i, 1))); " "; NEXT crc = crc AND &HFF PRINT HEX$(crc) cm$ = cm$ + CHR$(crc) PRINT #1, cm$; answer 10 IF risp$ = "" THEN
PRINT "NOT CONNECTED"
ELSE
PRINT "RECEIVED : "; LEN(risp$) FOR i = 1 TO LEN(risp$)
PRINT HEX$(ASC(MID$(risp$, i, 1))); " ";
NEXT PRINT
END IF
PRINT END IF
CASE "K", "k"
INPUT "LANGUAGE ", l% INPUT "MEASUREMENT UNIT ", u% INPUT "MANTISSA ", m% INPUT "EXPONENT ", e%
cm$ = "K" + CHR$(l%) + CHR$(u%) + CHR$(m%) + CHR$(e%) crc = 0 PRINT FOR i = 1 TO LEN(cm$)
crc = crc - ASC(MID$(cm$, i, 1))
PRINT HEX$(ASC(MID$(cm$, i, 1))); " "; NEXT crc = crc AND &HFF PRINT HEX$(crc) cm$ = cm$ + CHR$(crc) PRINT #1, cm$; answer 10 IF risp$ = "" THEN
PRINT "NOT CONNECTED" END IF
PRINT
Page 24
TECHNICAL INFORMATION
19
87-900-067-01 (B)
CASE "8"
PRINT #1, "I"; CHR$(&HB7); answer 3 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
PRINT "MEASURE: "; ASC(MID$(risp$, 2, 1)); "e"; ASC(LEFT$(risp$, 1)) END IF PRINT
CASE "9"
PRINT #1, "J"; CHR$(&HB6); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
PRINT "RECEIVED : "; HEX$(ASC(LEFT$(risp$, 1))) END IF PRINT
CASE "0"
PRINT #1, "@"; CHR$(&HC0); answer 2 IF risp$ = "" THEN
PRINT "NOT CONNECTED" ELSE
PRINT "RECEIVED : "; HEX$(ASC(LEFT$(risp$, 1))) END IF PRINT
CASE "q", "Q"
STOP
CASE ELSE
BEEP
END SELECT WEND ai:
CLOSE
OPEN "com1:1200,n,8,1,rs,ds" FOR RANDOM AS 1
IF demo = 0 THEN GOTO star ELSE GOTO dem SUB answer (lung%) SHARED risp$ timeout = 0 risp$ = "" WHILE timeout <<<N>2000
WHILE NOT EOF(1)
a$ = INPUT$(1, 1) risp$ = risp$ + a$
IF (LEN(risp$) = lung%) THEN EXIT SUB WEND timeout = timeout + 1
WEND END SUB
Page 25
Request for Return
1. A Return Authorization Number (RA#) WILL NOT be issued until this Request for Return is completely filled out, signed and returned to Varian Customer Service.
2. Return shipments shall be made in compliance with local and international Shipping Regulations (IATA, DOT, UN).
3. The customer is expected to take the following actions to ensure the
Safety
of workers at Varian: (a) Drain any oils or other liquids, (b) Purge or flush all gasses, (c) Wipe off any excess residues in or on the equipment, (d) Package the equipment to prevent shipping damage, (for Advance Exchanges please use packing material from replacement unit).
4. Make sure the shipping documents clearly show the RA# and then return the package to the Varian location nearest you.
North and South America
Varian Vacuum Technologies
121 Hartwell Ave
Lexington, MA 02421
Phone : +1 781 8617200
Fax: +1 781 8609252
Europe and Middle East
Varian SpA
Via Flli Varian 54
10040 Leini (TO) – ITALY
Phone: +39 011 9979111
Fax: +39 011 9979330
Asia and ROW
Varian Vacuum Technologies
Local Office
CUSTOMER INFORMATION
Company name: ..………………….……..……………….………………………………..……………………...…………..….
Contact person: Name: ……………………………………..… Tel: ……………………….…...…………….….…....
Fax: …………………………….…...…..…… E-Mail: ..……………………..…………..…..…..…..
Ship Method: …………….……....…… Shipping Collect #: ………….…..………… P.O.#: ………………….…......………..
Europe only: VAT reg. Number: ………………..……………... USA only: Taxable Non-taxable
Customer Ship To: ………………………….……… Customer Bill To: …………………..……………...
……………..…………………... ..………………………………...
………………..………………... ..………………………………...
PRODUCT IDENTIFICATION
Product Description Varian P/N Varian S/N Purchase Reference
TYPE OF RETURN (check appropriate box)
Paid Exchange Paid Repair
Warranty Exchange
Warranty Repair
Loaner Return
Credit Shipping Error
Evaluation Return
Calibration
Other ……………….
HEALTH and SAFETY CERTIFICATION
Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY. Call Varian Customer Service to discuss alternatives if this requirement presents a problem.
The equipment listed above (check one):
HAS NOT
been exposed to any toxic or hazardous materials
OR
HAS
been exposed to any toxic or hazardous materials. In case of this selection, check boxes for any materials that
equipment was exposed to, check all categories that apply:
Toxic Corrosive Reactive Flammable Explosive Biological Radioactive
List all toxic or hazardous materials. Include product name, chemical name and chemical symbol or formula.
.……………………………………………………………………………………………………………………..
Print Name: …………………………………. Customer Authorized Signature: ……………...…………………….
Print Title: …………………………………... Date: ..…../..…../……
NOTE:
If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed,
the customer
will be held responsible
for all costs incurred to ensure the safe handling of the product, and
is liable
for any harm or injury to Varian
employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
Do not write below this line
Notification (RA)#: ……………………….……….. Customer ID#: ……….…………. Equipment #: ……………………..
Page 26
Request for Return
FAILURE REPORT
TURBO PUMPS and TURBOCONTROLLERS
POSITION PARAMETERS
Does not start
Noise
Vertical
Power: Rotational Speed:
Does not spin freely
Vibrations
Horizontal
Current: Inlet Pressure:
Does not reach full speed
Leak
Upside-down
Temp 1: Foreline Pressure:
Mechanical Contact
Overtemperature Other: Temp 2: Purge flow:
Cooling defective …………………. OPERATION TIME:
TURBOCONTROLLER ERROR MESSAGE:
ION PUMPS/CONTROLLERS VALVES/COMPONENTS
Bad feedthrough
Poor vacuum
Main seal leak
Bellows leak
Vacuum leak
High voltage problem
Solenoid failure
Damaged flange
Error code on display
Other
Damaged sealing area
Other
Customer application:
Customer application:
LEAK DETECTORS INSTRUMENTS
Cannot calibrate
No zero/high backround
Gauge tube not working Display problem
Vacuum system unstable
Cannot reach test mode
Communication failure
Degas not working
Failed to start
Other
Error code on display
Other
Customer application:
Customer application:
PRIMARY PUMPS DIFFUSION PUMPS
Pump doesn’t start
Noisy pump (describe)
Heater failure
Electrical problem
Doesn’t reach vacuum
Over temperature
Doesn’t reach vacuum
Cooling coil damage
Pump seized
Other
Vacuum leak
Other
Customer application:
Customer application:
FAILURE DESCRIPTION
(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
NOTA: Su richiesta questo documento è disponibile anche in Tedesco, Italiano e Francese. REMARQUE : Sur demande ce document est également disponible en allemand, italien et français. HINWEIS: Auf Aufrage ist diese Unterlage auch auf Deutsch, Italienisch und Französisch erhältlich.
Page 27
Sales and Service Offices
Argentina Varian Argentina Ltd.
Sucursal Argentina Av. Ricardo Balbin 2316 1428 Buenos Aires Argentina Tel: (54) 1 783 5306 Fax: (54) 1 786 5172
Australia Varian Australia Pty Ltd.
679-701 Springvale Road Mulgrave, Victoria ZZ 3170 Australia Tel: (61) 395607133 Fax: (61) 395607950
Benelux Varian Vacuum Technologies
Rijksstraatweg 269 H, 3956 CP Leersum The Netherlands Tel: (31) 343 469910 Fax: (31) 343 469961
Brazil Varian Industria e Comercio Ltda.
Avenida Dr. Cardoso de Mello 1644 Vila Olimpia Sao Paulo 04548 005 Brazil Tel: (55) 11 3845 0444 Fax: (55) 11 3845 9350
Canada Central coordination through:
Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA 02421 USA Tel: (781) 861 7200 Fax: (781) 860 5437 Toll Free: (800) 882 7426
China Varian Technologies - Beijing
Room 1201, Jinyu Mansion No. 129A, Xuanwumen Xidajie Xicheng District Beijing 1000031 P.R. China Tel: (86) 10 6608 1530 Fax: (86) 10 6608 1534
France and Wallonie Varian s.a.
7 avenue des Tropiques Z.A. de Courtaboeuf – B.P. 12 Les Ulis cedex (Orsay) 91941 France Tel: (33) 1 69 86 38 13 Fax: (33) 1 69 28 23 08
Germany and Austria Varian Deutschland GmbH
Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel: (49) 6151 703 353 Fax: (49) 6151 703 302
India Varian India PVT LTD
101-108, 1st Floor 1010 Competent House 7, Nangal Raya Business Centre New Delhi 110 046 India Tel: (91) 11 5548444 Fax: (91) 11 5548445
Italy Varian Vacuum Technologies
Via F.lli Varian, 54 10040 Leini, (Torino) Italy Tel: (39) 011 997 9111 Fax: (39) 011 997 9350
Japan Varian Vacuum Technologies
Sumitomo Shibaura Building, 8th Floor 4-16-36 Shibaura Minato-ku, Tokyo 108 Japan Tel: (81) 3 5232 1253 Fax: (81) 3 5232 1263
Korea Varian Technologies Korea, Ltd.
Shinsa 2nd Bldg. 2F 966-5 Daechi-dong Kangnam-gu, Seoul Korea 135-280 Tel: (82) 2 3452 2452 Fax: (82) 2 3452 2451
Mexico Varian S. A .
Concepcion Beistegui No 109 Col Del Valle C.P. 03100 Mexico, D.F. Tel: (52) 5 523 9465 Fax: (52) 5 523 9472
Ta i w a n Varian Technologies Asia Ltd.
18F-13 No.79, Hsin Tai Wu Road Sec. 1, Hsi Chih Taipei Hsien Taiwan, R.O.C. Tel: (886) 2 2698 9555 Fax: (886) 2 2698 9678
UK and Ireland Varian L t d .
28 Manor Road Walton-On-Thames Surrey KT 12 2QF England Tel: (44) 1932 89 8000 Fax: (44) 1932 22 8769
United States Varian Va c u u m Tech n o logie s
121 Hartwell Avenue Lexington, MA 02421 USA Tel: (781) 861 7200 Fax: (781) 860 5437 Toll Free: (800) 882 7426
Other Countries Varian Va c u u m Tech n o logie s
Via F.lli Varian, 54 10040 Leini, (Torino) Italy Tel: (39) 011 997 9111 Fax: (39) 011 997 9350
Internet Users:
Customer Service & Technical Support:
vtt.customer.service@varianinc.com
Wor l d w i de Web Site:
www.varianinc.com/vacuum
Order On-line:
www.evarian.com
Representatives in most countries
11/01
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