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vacuum technologies
FRG-700
Inverted
Magnetron Pirani
Gauge
Manual No. tqma48e1
Revision -November 2008
SHORT OPERATING
INSTRUCTIONS
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FRG-700 Inverted Magnetron Pirani
Gauge
Copyright 2008
Vacuum Technologies
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FRG-700 Inverted Magnetron Pirani Gauge
Warranty
Products manufactured by Seller are warranted against defects
in materials and workmanship for twelve (12) months from date
of shipment thereof to Customer, and Seller’s liability under valid
warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of
the Product. Items expendable in normal use are not covered by
this warranty. All warranty replacement or repair of parts shall be
limited to equipment malfunctions which, in the sole opinion of
Seller, are due or traceable to defects in original materials or
workmanship. All obligations of Seller under this warranty shall
cease in the event of abuse, accident, alteration, misuse, or
neglect of the equipment. In-warranty repaired or replaced parts
are warranted only for the remaining unexpired portion of the
original warranty period applicable to the repaired or replaced
parts. After expiration of the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or damage caused by use of
its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or
implied (either in fact or by operation of law), statutory or otherwise; and, except as stated herein, Seller shall have no liability
under any warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made by any
person, including representatives of Seller, which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an
officer of Seller.
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FRG-700 Inverted Magnetron Pirani Gauge
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto, and must be received
within the applicable warranty period by Seller or its authorized
representative. Such claims should include the Product serial
number, the date of shipment, and a full description of the circumstances giving rise to the claim. Before any Products are
returned for repair and/or adjustment, written authorization from
Seller or its authorized representative for the return and instructions as to how and where these Products should be returned
must be obtained. Any Product returned to Seller for examination
shall be prepaid via the means of transportation indicated as
acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on any
item that has been altered or has been returned by non-acceptable means of transportation. When any Product is returned for
examination and inspection, or for any other reason, Customer
shall be responsible for all damage resulting from improper
packing or handling, and for loss in transit, not withstanding any
defect or non-conformity in the Product. In all cases, Seller has
the sole responsibility for determining the cause and nature of
failure, and Seller’s determination with regard thereto shall be
final.
If it is found that Seller’s Product has been returned without
cause and is still serviceable, Customer will be notified and the
Product returned at Customer’s expense; in addition, a charge
for testing and examination may be made on Products so
returned.
3/1/00
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FRG-700 Inverted Magnetron Pirani Gauge
Product Identification
In all communications with VARIAN, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
VARIAN Lexington MA 02421 USA
Model:
PN:
SN:
V W
Validity
This document applies to products with the following part numbers:
FRG700KF25
FRG700CF35 (DN 40 CF-F)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to the gauge with vacuum connection
DN 25 ISO-KF. They apply to the gauge with other vacuum
connection by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
5
(DN 25 ISO-KF)
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FRG-700 Inverted Magnetron Pirani Gauge
Intended Use
The Inverted Magnetron Pirani Gauge FRG-700 has been
designed for vacuum measurement in the pressure range of
-9
5×10
… 1000 mbar.
The Inverted Magnetron Pirani Gauge must not be used for
measuring flammable or combustible gases which react in air.
The gauge can be operated in connection with a VARIAN
FRG Control Unit, a VARIAN Turbo AG Rack Controller, or with
another controller.
Functional Principle
The gauge consists of two separate measurement systems
(Pirani and cold cathode system) the signals of which are
combined in such a way that one measurement signal is output.
The Pirani measurement circuit is always on.
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FRG-700 Inverted Magnetron Pirani Gauge
Contents
Warranty 3
Warranty Replacement and Adjustment 4
Product Identification 5
Validity 5
Intended Use 6
Functional Principle 6
1
Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
2 Technical Data 10
3 Installation 17
3.1 Vacuum Connection 17
3.2 Electrical Connection 21
4 Operation 22
4.1 Gas Type Dependence 22
4.2 Ignition Delay 22
4.3 Adjusting the Gauge 23
5 Deinstallation 26
6 Maintenance, Troubleshooting 27
7 Returning the Product 28
8 Disposal 28
9 Literature 29
EC Declaration of Conformity 30
For cross-references within this document, the symbol (→ XY)
is used, for cross-references to further documents, listed under
literature, the symbol (→ [Z]).
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FRG-700 Inverted Magnetron Pirani Gauge
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-user
of the product.
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FRG-700 Inverted Magnetron Pirani Gauge
1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
DANGER
DANGER: magnetic fields
Strong magnetic fields can disturb electronic
devices like heart pacemakers or impair their
function.
Maintain a safety distance of ≥10 cm between the
magnet and the heart pacemaker or prevent the
influence of strong magnetic fields by antimagnetic
Communicate the safety instructions to all other users.
shielding.
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FRG-700 Inverted Magnetron Pirani Gauge
2 Technical Data
Measuring range (air, N2) 5×10-9 … 1000 mbar
Accuracy
Repeatability
Output signal (measuring signal)
Voltage range 0 … +10.5 V
Measurement range 1.82 … 8.6 V
Voltage vs. pressure logarithmic , 0.6 V/decade
Error signal <0.5 V no supply
Output impedance 2×10 Ω
Minimum loaded impedance 10 k
Response time
-6
p > 10
mbar
-8
mbar ≈1000 ms
p = 10
Identification gauge
Status pin 6
-2
p > 10
mbar
Pirani-only mode
-2
p < 10
mbar
Cold cathode not ignited
Pirani-only mode
-2
mbar
p < 10
Cold cathode ignited
Combined Pirani / cold
cathode mode
LED High voltage on (LED on)
≈±30% (in the range
-8
… 100 mbar)
1×10
≈±5% (in the range
-8
1×10
… 100 mbar)
>9.5 V Pirani sensor defective (filament rupture)
Ω, short-circuit proof
(pressure dependent)
<10 ms
85 kΩ, referenced to
supply common
Low = 0 V
Low = 0 V
High = 15 … 30 VDC
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FRG-700 Inverted Magnetron Pirani Gauge
Supply
DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform
to the requirements of a grounded protective extralow voltage (SELV-E according to EN 61010). The
connection to the gauge has to be fused
1)
.
Voltage at the gauge 15 … 30 VDC
(ripple
≤1 V
)
≤1 V
pp
) 2)
pp
-4
mbar
Power consumption
1)
Fuse
Voltage at the supply unit with
maximum cable length
Adjustment
Potentiometer <HV>
Potentiometer <ATM>
≤2 W
≤1 AT
16 … 30 VDC
(ripple
adjustment under 10
adjustment at atmospheric
pressure
Electrical connection FCC68 socket, 8 poles
Sensor cable 8 poles, shielded
Line length
≤50 m (8×0.14 mm²)
Operating voltage ≤3.3 kV
Operating current
Grounding concept
Vacuum connection –measuring
common
≤500 µA
→ "Electrical Connection"
connected via 10 kΩ (max.
voltage differential with
respect to safety ±50 V
accuracy ±10 V)
Supply common – signal common conducted separately
1)
VARIAN controllers fulfill this requirement.
2
)
The minimum voltage of the power supply unit must be increased
proportionally to the length of the sensor cable
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FRG-700 Inverted Magnetron Pirani Gauge
Materials on the vacuum side
Vacuum connection
Measurement chamber
Feedthrough isolation
Internal seal
Anode
Ignition aid
Pirani measurement tube
Pirani filament
Internal volume
Pressure
stainless steel
stainless steel
ceramic
FPM 75
Mo
stainless steel
Ni, Au
W
≈20 cm³
≤10 bar (absolute),
limited to inert gases
Temperatures
Operation
Bakeout
Pirani filament
Storage
Relative humidity
+5 … +55 °C
150 °C (without electronics
and magnetic shielding)
120 °C
-40 … +65 °C
≤80% at temperatures
≤+31°C decreasing to 50%
at +40°C
Mounting orientation
any
Use indoors only, altitude up to
2000 m
Type of protection IP 40
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FRG-700 Inverted Magnetron Pirani Gauge
Dimensions [mm]
75
60
92
28 55
18
DN 25 ISO-KF
Weight
FRG700KF25
FRG700CF35
ø 63.5
24
DN 40 CF-F
≈700 g
≈980 g
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FRG-700 Inverted Magnetron Pirani Gauge
Measuring Signal vs. Pressure
Pressure p
1E+04
1E+02
1E+00
1E–02
underrange
sensor error
1E–04
1E–06
1E–08
0.00.5 1.5 2. 5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.5
p = 10
1.667U-d
p = 10
U [V]
Measurement signal U [V]
1.667×U-d
⇔
U = c + 0.6log10 p
mbar Pa Torr
d 11.33 9.33 11.46
c 6.8 5.6 6.875
valid in the range 5×10
-9
mbar <p< 1000 mbar
-9
Torr <p< 750 Torr
3.8×10
-7
Pa <p< 1×105 Pa
5×10
overrange
Pa
mbar
torr
sensor error
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FRG-700 Inverted Magnetron Pirani Gauge
Gas Type Dependence
p (mbar)
2
10
8
6
4
2
1
10
8
Indication range
6
4
2
0
10
8
6
4
2
–1
10
8
6
4
2
–2
10
–3
10
Water
vapor
2
46
>10
-2
mbar)
–2
10
–1
10
46
2
2
46
10
0
2
H2He Ne
46
Air
O2
CO
N2
CO
2
Ar
Freon 12
Kr
Xe
1
10
2
10
46
2
p
(mbar)
eff
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FRG-700 Inverted Magnetron Pirani Gauge
p (mbar)
–1
10
8
6
4
2
Indication range
–2
10
8
6
4
2
10
8
6
4
2
10
8
6
4
2
10
8
6
4
2
10
In the range below 10
–3
–4
–5
–6
10
-6
246
-6
-1
... 10
10
mbar
Ar
Air
N2
O2
CO
He
-6
10
–4
-3
246
10
-5
10
246
mbar, the pressure indication is linear.
246
10
-2
246
p
eff
-1
10
(mbar)
For gases other than air, the pressure can be determined by
means of a simple conversion formula:
p
= K × pressure reading
eff
Where Gas type K (mean values)
Air (O2, CO, N2)
Xe
Kr
Ar
H
2
Ne
He
1.0
0.4
0.5
0.8
2.4
4.1
5.9
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FRG-700 Inverted Magnetron Pirani Gauge
3 Installation
3.1 Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.
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FRG-700 Inverted Magnetron Pirani Gauge
DANGER
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection according to EN 61010:
• CF flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
18
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
Caution
Caution
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FRG-700 Inverted Magnetron Pirani Gauge
WARNING
WARNING: electric arcing
Helium may cause electric arcing with detrimental
effects on the electronics of the product.
Before performing any tightness tests put the pro-
duct out of operation and remove the electronics
unit.
The gauge may be mounted in any orientation. To keep
condensates and particles from getting into the measuring chamber preferably choose a horizontal to upright
position and possibly use a seal with a centering ring
and filter.
If adjustment should be possible after the gauge has
been installed, be sure to install it so that potentiometers
<HV> and <ATM> can be accessed with a screwdriver
(
→ "Adjusting the Gauge").
When making a CF flange connection, it can be ad-
vantageous to temporarily remove the electronics and
the magnet unit (
→ Instruction Manual tqna48e1).
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FRG-700 Inverted Magnetron Pirani Gauge
Remove the protective lid and connect the product to the vacuum system.
Seal with
centering ring
or
Protective lid
20
Clamp
Keep the protective lid.
Seal with centering
ring and filter
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FRG-700 Inverted Magnetron Pirani Gauge
3.2 Electrical Connection
Make sure the vacuum connection is properly made
(→ "Vacuum Connection").
n If no sensor cable is available, make one according to the
following diagram.
10 k
Signal
Ident
6
10
10
3
5
4
1
2
+
–
+
–
1
Electrical connection
Pin 1 Supply (
Pin 2 Supply common
Pin 3 Signal output
(measuring signal)
Pin 4 Identification
Pin 5 Signal common
Pin 6 Status
Pin 7, 8 n.c.
15 … 30 VDC
8
)
8 poles FCC-68
o Connect the gauge to the controller using the sensor cable.
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FRG-700 Inverted Magnetron Pirani Gauge
4 Operation
When the supply voltage is applied, the measuring signal is
available between pins 3 and 5. Over the whole measurement
range, the measuring signal is output as a logarithm of the
pressure (measuring signal vs. pressure → "Technical Data").
Allow for a stabilizing time of ≈10 minutes. Once the gauge has
been switched on, permanently leave it on irrespective of the
pressure.
• The Pirani measurement circuit is always on.
• The cold cathode measurement circuit is controlled by the
Pirani circuit and is activated only at pressures <1×10
4.1 Gas Type Dependence
The measurement value depends on the type of gas being
measured. The value displayed is accurate for dry air, O
. It can be mathematically converted for other gases
and N
2
(→ "Technical Data").
If the gauge is operated in connection with an VARIAN vacuum
gauge controller, a calibration factor can be entered for
correction of the reading.
4.2 Ignition Delay
When cold cathode measurement systems are activated upon
switching the gauge on, an ignition delay occurs, which is
typically:
As long as the cold cathode measurement circuit has not yet
ignited, the measurement value of the Pirani is output as
measuring signal ("Pirani underrange" is displayed for pressures
<5×10
-5
10
mbar ≈ 1 second
-7
mbar ≈ 20 seconds
10
-9
5×10
mbar ≈ 2 minutes
-4
mbar).
-2
mbar.
, CO
2
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FRG-700 Inverted Magnetron Pirani Gauge
4.3 Adjusting the Gauge
The gauge is factory-calibrated. If used under different climatic
conditions, through extreme temperatures, aging or contamination, and after exchanging the sensor, the characteristic curve
can be offset and readjustment may become necessary.
The cold cathode measurement circuit, which is dominant for low
pressures (<1×10
trast, the Pirani measurement circuit can be adjusted. Any adjustment has a negligible effect on the pressure range between
approx. 10
-3
mbar), is factory-calibrated. By way of con-
-2
mbar and 102 mbar.
n If you are using a seal with centering ring and filter, check
that they are clean or replace them if necessary (→ "Deinstallation").
o Activate the gauge.
p Evacuate it to p << 10
-4
mbar and wait at least 10 minutes.
q Turn the nameplate counter-clockwise until the mechanical
stop is reached.
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FRG-700 Inverted Magnetron Pirani Gauge
r
While depressing the tactile switch with a cylindrical pin
≈ 3 mm), adjust the <HV> potentiometer by means of a
(ø
… to 4.20 V or … to 5×10
1.5 mm screwdriver …
s Vent the gauge with air or nitrogen to atmospheric pres-
sure, and wait at least 10 minutes.
t Turn the nameplate clockwise until the mechanical stop is
reached.
24
-4
mbar
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FRG-700 Inverted Magnetron Pirani Gauge
u
Using the 1.5 mm screwdriver, adjust the <ATM>
potentiometer …
… to 8.60 V or … to 1×10
3
mbar
v Turn the nameplate back to its original position (it catches).
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FRG-700 Inverted Magnetron Pirani Gauge
5 Deinstallation
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
n Vent the vacuum system.
26
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
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FRG-700 Inverted Magnetron Pirani Gauge
o Put the gauge out of operation and unplug the sensor
cable.
p Remove the gauge from the vacuum system and place the
protective lid.
When deinstalling a CF flange connection, it can be ad-
vantageous to temporarily remove the electronics and
the magnet unit (→ Instruction Manual tqna48e1).
6 Maintenance, Troubleshooting
→ Instruction Manual tqna48e1
If operated at high pressures or under dirty conditions,
the gauge must be regularly cleaned.
Gauge failures due to contamination, as well as expend-
able parts (filament), are not covered by the warranty.
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FRG-700 Inverted Magnetron Pirani Gauge
7 Returning the Product
WARNING
WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to VARIAN should preferably be
free of harmful substances. Adhere to the forwarding regulations of all involved countries and
forwarding companies and enclose a duly completed declaration of contamination.
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.
8 Disposal
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
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FRG-700 Inverted Magnetron Pirani Gauge
WARNING
N
WARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the
relevant local regulations.
Separating the components
After disassembling the product, separate its components according to the following criteria:
• Contaminated components
Contaminated components (radioactive, toxic, caustic or bio-
logical hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.
• Other components
Such components must be separated according to their ma-
terials and recycled.
9 Literature
[1] www.varianinc.com
Instruction Manual
Inverted Magnetron Pirani Gauge FRG-700
tqna38e1
Varian Vacuum Technologies, MA 02421, USA
29
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FRG-700 Inverted Magnetron Pirani Gauge
EC Declaration of Conformity
We, VARIAN, hereby declare that the equipment mentioned
below complies with the provisions of the Directive relating to
electrical equipment designed for use within certain voltage limits
2006/95/EC and the Directive relating to electromagnetic compatibility 2004/108/EC.
FRG-700
Inverted Magnetron Pirani Gauge
Part numbers
FRG700KF25
FRG700CF35
Standards
Harmonized and international/national standards and specifications:
• EN 61000-6-2
• EN 61000-6-3
• EN 61010-1
for measurement, control and laboratory use)
Signatures
Varian Vacuum Technologies, USA
9 December 2008
(EMC: generic immunity standard)
(EMC: generic emission standard)
(Safety requirements for electrical equipment
Frederick C. Campbell
Operations Manager
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FRG-700 Inverted Magnetron Pirani Gauge
Notes
31
Page 32
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA, 02421 USA
Tel: (781) 861 7200
Fax: (781) 861 5437
Original: English custserv@varianinc.com
t qma48e1
www.varianinc.com
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