Page 1
DS102 1Ph
DS202 1Ph
DS302 1Ph
Dual Stage Rotary
Vane Pumps U.K.
Model 949-9350
Model 949-9351
Model 949-9352
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D’EMPLOI
INSTRUCTION MANUAL
87-900-943-01(E)
JANUARY 2006
Page 2
DS102 – DS202 – DS302
Page 3
Page 4
Page 5
ISTRUZIONI PER L’USO ....................................................................................................1
GEBRAUCHSANLEITUNG .................................................................................................3
MODE D’EMPLOI................................................................................................................5
INSTRUCTIONS FOR USE.................................................................................................7
TECHNICAL INFORMATION ..............................................................................................9
SECTION I .....................................................................................................................................9
TECHNICAL DESCRIPTION.........................................................................................................9
LUBRICATION...............................................................................................................................9
VACUUM SEALS...........................................................................................................................9
GAS BALLAST VALVE................................................................................................................10
ANTI-SUCKBACK DEVICE..........................................................................................................10
TECHNICAL DATA......................................................................................................................14
DIMENSIONS....................................................................................................................15
SAFETY PRECAUTIONS............................................................................................................17
TRANSPORT AND INSTALLATION............................................................................................17
PRELIMINARY OPERATIONS....................................................................................................17
SECTION II ..................................................................................................................................18
ELECTRICAL MOTORS..............................................................................................................18
Single phase universal motors...........................................................................................18
CONNECTIONS TO THE INLET AND EXHAUST FLANGES ....................................................20
STARTING AND RUNNING THE PUMP.....................................................................................20
STOPPING THE PUMP...............................................................................................................21
SAFETY RULES..........................................................................................................................21
WARNING NOTES ,..................................................................................................21
CAUTION NOTES ....................................................................................................22
MAINTENANCE ACTIONS..........................................................................................................22
LUBRICANTS ..............................................................................................................................23
SCHEDULED MAINTENANCE CARDS......................................................................................25
UNSCHEDULED MAINTENANCE CARDS.................................................................................30
TROUBLESHOOTING AND CORRECTIVE ACTION.................................................................57
SPARE PARTS LIST ...................................................................................................................59
Page 6
ISTRUZIONI PER L’USO
1 87-900-943-01(E)
INFORMAZIONI GENERALI
Questa apparecchiatura è destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla
Varian prima dell'utilizzo dell'apparecchiatura. La Varian si ritiene sollevata da eventuali responsabilità dovute all'inosservanza
totale o parziale delle istruzioni, ad uso improprio da parte di
personale non addestrato, ad interventi non autorizzati o ad uso
contrario alle normative nazionali specifiche.
Le pompe DS102 1Ph, DS202 1Ph, DS302 1Ph sono delle
pompe rotative bistadio a palette, a tenuta in bagno d'olio, azionate da motore elettrico mono o trifase.
Queste pompe da alto vuoto sono adatte al pompaggio di gas
non corrosivi.
Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell'operatore durante l'utilizzo
dell'apparecchiatura. Informazioni dettagliate sono fornite nell'appendice “Technical information”.
Questo manuale utilizza le seguenti convenzioni:
,
PERICOLO!
I messaggi di pericolo attirano l'attenzione dell'operatore su una
procedura o una pratica specifica che, se non eseguita in modo
corretto, potrebbe provocare gravi lesioni personali.
ATTENZIONE!
I messaggi di attenzione sono visualizzati prima di procedure
che, se non osservate, potrebbero causare danni all'apparecchiatura.
NOTA
Le note contengono informazioni importanti estrapolate dal testo.
IMMAGAZZINAMENTO
Durante il trasporto e l'immagazzinamento delle pompe non
devono essere superate le seguenti condizioni ambientali:
− temperatura: da -20 °C a +70 °C
− umidità relativa: 0 - 95% (non condensante)
PREPARAZIONE PER L'INSTALLAZIONE
La pompa viene fornita in un imballo protettivo speciale; se si
presentano segni di danni, che potrebbero essersi verificati durante il trasporto, contattare l'ufficio vendite locale.
Il peso dell’imballo, comprensivo della pompa, è, al massimo, di
circa 27 [Kg].
Durante l'operazione di disimballaggio, prestare particolare attenzione a non lasciar cadere la pompa e a non sottoporla ad
urti o vibrazioni.
Non disperdere l'imballo nell'ambiente. Il materiale è completamente riciclabile e risponde alla direttiva CEE 85/399 per la
tutela dell'ambiente.
NOTA
La pompa non può essere danneggiata rimanendo semplicemente esposta all'atmosfera. Si consiglia comunque di mantenerla chiusa fino al momento dell'installazione sul sistema onde
evitare eventuale inquinamento da polvere.
INSTALLAZIONE
Non installare e/o utilizzare la pompa in ambienti esposti ad
agenti atmosferici (pioggia, gelo, neve), polveri, gas aggressivi,
in ambienti esplosivi o con elevato rischio di incendio.
Durante il funzionamento è necessario che siano rispettate le
seguenti condizioni ambientali:
− temperatura: da +12 °C a +40 °C
− umidità relativa: 0 - 95% (non condensante).
ATTENZIONE!
Prima di avviare la pompa, occorre procedere al rifornimento di
olio lubrificante, poichè la pompa viene fornita scarica.
,
PERICOLO!
Togliere i tappi di protezione posti sulle flange di aspirazione e
scarico prima di ogni successiva operazione. L’aria contenuta
all’interno della pompa, in caso di accensione involontaria, può
proiettarli contro l’operatore.
,
PERICOLO!
Durante l'installazione prestare la massima attenzione che la
flangia di aspirazione sia collegata alla camera da evacuare e
che la flangia di scarico non sia tappata (vedere la figura
seguente).
La pompa non deve essere usata come compressore.
La massima pressione interna al contenitore dell'olio non deve
superare 1,5 bar (abs).
L'inosservanza di queste precauzioni può causare danni alla
macchina ed all'operatore.
Page 7
ISTRUZIONI PER L’USO
2 87-900-943-01(E)
ATTENZIONE!
Controllare che la tensione di alimentazione corrisponda a quella indicata sul cartellino del motore.
Collegare la pompa all’alimentazione.
ATTENZIONE!
Nel caso di motore trifase, una inversione di polarità provoca
l'inversione del verso di rotazione della pompa, con conseguenti possibili danni di natura meccanica.
USO
Prima di mettere la pompa in servizio effettivo è necessario, per
il raggiungimento del vuoto limite, far marciare per circa un’ora
la pompa con zavorra aperta allo scopo di eliminare l’umidità
nell’olio.
L'accensione della pompa non richiede particolari manovre; è
sufficiente collegarla all’alimentazione elettrica agendo
sull’interruttore bipolare (versione con motore monofase) o onnipolare (versione con motore trifase).
,
PERICOLO!
La pompa è progettata per operare con fluidi neutri o non corrosivi. È assolutamente vietato l'impiego con sostanze potenzialmente esplosive o infiammabili.
Lo spegnimento della pompa non richiede particolari manovre;
è sufficiente scollegarla dall’alimentazione elettrica agendo
sull’interruttore bipolare (versione con motore monofase) o onnipolare (versione con motore trifase).
MANUTENZIONE
Il personale addetto alla condotta ed alla manutenzione della
pompa deve essere ben addestrato e deve avere un'approfondita conoscenza delle norme antinfortunistiche.
,
PERICOLO!
Le alte tensioni possono causare morte al contatto. Operare
sempre con la massima cautela e secondo le norme antinfortunistiche in vigore.
,
PERICOLO!
Quando la macchina è alimentata prestare attenzione per la
presenza di parti in movimento e di alta tensione.
,
PERICOLO!
Nel caso si debba procedere ad operazioni di manutenzione
della pompa al termine di un periodo di esercizio, è necessario
lasciarla raffreddare, poichè la temperatura esterna può superare i 60 °C.
,
PERICOLO!
Escludere sempre l'alimentazione della pompa prima di compiere operazioni di manutenzione. Apporre specifici cartelli di
avvertenza: APPARECCHIATURA IN MANUTENZIONE - NON
INSERIRE L'ALIMENTAZIONE, in corrispondenza dell'interruttore di alimentazione. Al termine ripristinare i dispositivi di sicurezza.
,
PERICOLO!
Non effettuare la sostituzione dell’olio subito dopo l’arresto della macchina, in quanto la temperatura dello stesso può essere
elevata.
ATTENZIONE!
In fase di sostituzione di pezzi, operare con attenzione. In particolare nel caso di adozione di motore trifase, una inversione di
polarità provoca l'inversione del verso di rotazione della pompa,
con conseguenti possibili danni di natura meccanica.
NOTA
Prima di rispedire al costruttore una pompa per riparazioni è
indispensabile compilare e far pervenire al locale ufficio vendite
la scheda "Sicurezza e Salute" allegata al presente manuale di
istruzioni. Copia della stessa deve essere inserita nell'imballo
della pompa prima della spedizione.
Qualora una pompa dovesse essere rottamata, procedere alla
sua eliminazione nel rispetto delle normative nazionali specifiche.
Page 8
GEBRAUCHSANLEITUNG
3 87-900-943-01(E)
ALLGEMEINE HINWEISE
Dieses Gerät ist für den professionellen Gebrauch bestimmt.
Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie
alle weiteren von Varian mitgelieferten Zusatzinformationen
genau lesen. Bei vollständiger bzw. teilweiser Nichtbeachtung
der enthaltenen Hinweise, unsachgemäßem Gebrauch durch
ungeschultes Personal, nicht autorisierten Eingriffen und
Benutzung unter Mißachtung der nationalen Bestimmungen
übernimmt Firma Varian keinerlei Haftung.
Die Pumpen DS102 1Ph, DS202 1Ph, DS302 1Ph sind dichte
ölbadgeschmierte zweistufige Flügelzellenpumpen, die von
einem Ein- oder Dreiphasenstrommotor betätigt werden.
Diese Hochvakuumpumpen eignen sich für das Pumpen von
nicht korrosiven Gasen.
In den folgenden Abschnitten sind alle erforderlichen
Informationen für die Sicherheit des Bedieners bei der
Verwendung des Geräts aufgeführt. Detaillierte technische
Informationen sind im Anhang "Technical Information"
enthalten.
In dieser Gebrauchsanleitung werden Sicherheitshinweise
folgendermaßen hervorgehoben:
,
GEFAHR!
Die Gefahrenhinweise richten die Aufmerksamkeit des Bedieners auf eine spezielle Prozedur oder Praktik, die bei unkorrekter Ausführung schwere Personenschäden zur Folge haben
könnte.
ACHTUNG!
Die Warnhinweise vor bestimmten Prozeduren machen den
Bediener darauf aufmerksam, daß bei Nichteinhaltung Schäden
am Gerät entstehen können.
ANMERKUNG
Die Anmerkungen enthalten wichtige Informationen, die aus
dem Text hervorgehoben werden.
LAGERUNG
Während des Transports und der Lagerung der Pumpen sollen
die folgenden Umgebungsbedingungen gegeben sein:
− Temperatur: -20 °C bis +70 °C
− Relative Feuchtigkeit: 0 - 95% (niederschlagsfrei)
VOR DER INSTALLATION
Die Pumpe wird in einer speziellen Schutzverpackung geliefert.
Eventuelle Transportschäden sind der zuständigen örtlichen
Verkaufsstelle zu melden.
Das Verpackungsgewicht beträgt, einschließlich der Pumpe,
maximal 27 Kg.
Beim Auspacken ist darauf zu achten, daß die Pumpe nicht
fallengelassen oder Stößen oder Vibrationen ausgesetzt wird.
Das Verpackungsmaterial ist ordnungsgemäß zu entsorgen. Es
ist vollständig recyclebar und entspricht der EG-Richtlinie
85/399 für den Umweltschutz.
ANMERKUNG
Die Pumpe kann, wenn sie einfach der Atmosphäre ausgesetzt
ist, nicht beschädigt werden. Sie sollte jedoch bis zur
Installation an der Anlage geschlossen bleiben, um
Verunreinigungen durch Staub zu vermeiden.
INSTALLATION
Die Pumpe darf nicht in Umgebungen installiert und/oder
benutzt werden, die ungeschützt vor Witterungsbedingungen
(Regen, Frost, Schnee), Staub und aggressiven Gasen sind
und in denen Explosions- oder erhöhte Brandgefahr besteht.
Während des Betriebs sollen die folgenden
Umgebungsbedingungen gegeben sein:
− Temperatur: +12 °C bis +40 °C
− Relative Feuchtigkeit: 0 - 95% (niederschlagsfrei).
ACHTUNG!
Die Pumpe ist vor ihrer Inbetriebnahme mit Schmieröl zu füllen,
da sie leer geliefert wird.
,
GEFAHR!
Vor Aufnahme jeglicher Arbeiten sind die Schutzkappen an den
Saug- und Druckflanschen zu entfernen. Die im Pumpeninnern
enthaltene Luft könnte diese bei unbeabsichtigter Einschaltung
gegen den Bediener schleudern.
,
GEFAHR!
Bei der Installation ist unbedingt darauf zu achten, dass der
Saugflansch an die zu entleerende Kammer angeschlossen ist
und der Ablassflansch nicht verschlossen ist (siehe nachstehende Abbildung).
Die Pumpe darf nicht als Verdichter verwendet werden.
Der Druck im Ölbehälter darf nicht größer als 1,5 bar (abs) sein.
Bei Nichtbeachtung dieser Anweisungen besteht
Schadensgefahr für das Gerät und die Bedienperson.
Page 9
GEBRAUCHSANLEITUNG
4 87-900-943-01(E)
ACHTUNG!
Kontrollieren, daß die Versorgungsspannung mit der
Spannungsangabe auf dem Typenschild des Motors
übereinstimmt.
Die Pumpe an das Versorgungsnetz anschließen.
ACHTUNG!
Bei Dreiphasenstrommotoren bewirkt eine Polumkehrung die
Umkehrung des Drehsinns der Pumpe, was Schäden an der
Mechanik zur Folge haben kann.
GEBRAUCH
Vor der eigentlichen Inbetriebnahme der Pumpe ist es zur
Erreichung des Grenzvakuums erforderlich, die Pumpe
ungefähr eine Stunde mit geöffnetem Ballast laufen zu lassen,
um die Feuchtigkeit aus dem Öl zu entfernen.
Die Einschaltung der Pumpe erfordert keine speziellen Schritte,
sie braucht nur durch Betätigung des zweipoligen (Version mit
Einphasenstrommotor) oder des allpoligen Trennschalters
(Version mit Dreiphasenstrommotor) an die elektrische
Energieversorgungsquelle angeschlossen werden.
,
GEFAHR!
Die Pumpe ist für den Betrieb mit neutralen und nicht
korrosiven Fluiden konzipiert. Der Einsatz mit potentiell
explosions- oder feuergefährlichen Substanzen ist streng
verboten.
Die Ausschaltung der Pumpe erfordert keine speziellen
Schritte, sie braucht nur durch Betätigung des zweipoligen
(Version mit Einphasenstrommotor) oder des allpoligen
Trennschalters (Version mit Dreiphasenstrommotor) von der
elektrischen Energieversorgungsquelle getrennt zu werden.
WARTUNG
Das für den Betrieb und die Wartung zuständige Personal soll
geschult sein und über eine solide Kenntnis der
Unfallschutzvorschriften verfügen.
,
GEFAHR!
Hochspannungen können bei Kontakt tödliche Folgen haben.
Es ist stets mit größter Vorsicht und gemäß der geltenden
Unfallschutzvorschriften vorzugehen.
,
GEFAHR!
Bei eingeschaltetem Gerät ist auf Bewegungs- und
Hochspannungsteile zu achten.
,
GEFAHR!
Falls die Pumpe im Anschluß an den Betrieb gewartet werden
soll, ist abzuwarten, bis sie abgekühlt ist, da ihre Oberfläche
eine Temperatur von 60°C überschreiten kann.
,
GEFAHR!
Vor Wartungsarbeiten ist die Pumpe stets energiefrei zu
schalten. Am Netzschalter sind spezielle Warnschilder
“INSTANDHALTUNG AM GERÄT – NICHT EINSCHALTEN”
anzubringen. Nach Abschluß der Arbeiten sind die
Sicherheitseinrichtungen wieder zu aktivieren.
,
GEFAHR!
Keine Ölwechsel unmittelbar nach Stillsetzung des Gerätes
vornehmen, da die Öltemperatur sehr hoch sein kann.
ACHTUNG!
Bei Ersatz von Teilen ist mit Vorsicht vorzugehen.
Insbesondere bei der Version mit Dreiphasenstrommotor
bewirkt eine Polumkehrung die Umkehrung des Drehsinns der
Pumpe, was Schäden an der Mechanik zur Folge haben kann.
ANMERKUNG
Bevor dem Hersteller eine Pumpe zur Reparatur zurückgesandt
wird, ist das Formular “Sicherheit und Gesundheit” in der
Anlage zum vorliegenden Handbuch auszufüllen und der
lokalen Verkaufsstelle zuzustellen. Eine Kopie des Formulars
ist der Pumpenverpackung vor dem Versand beizulegen.
Bei eventueller Verschrottung einer Pumpe ist diese
entsprechend der einschlägigen nationalen Vorschriften zu
entsorgen.
Page 10
MODE D'EMPLOI
5 87-900-943-01(E)
INDICATIONS GÉNÉRALES
Cet appareillage a été conçu en vue d'une utilisation professionnelle. Il est conseillé à l'utilisateur de lire attentivement
cette notice d'instructions ainsi que toute autre indication fournie par Varian avant d'utiliser l'appareil. Varian décline par
conséquent toute responsabilité en cas de non-respect total ou
partiel des instructions fournies, d'utilisation incorrecte de la
part d'un personnel non formé, d'opérations non autorisées ou
d'un emploi contraire aux réglementations nationales spécifiques.
Les pompes DS102 1Ph, DS202 1Ph, DS302 1Ph sont des
pompes rotatives à deux stades à palettes, étanches en bain
d'huile, actionnées par un moteur électrique mono ou triphasé.
Ces pompes à vide poussé sont adaptées au pompage de gaz
non corrosifs.
Les paragraphes suivants fournissent toutes les indications
nécessaires pour garantir la sécurité de l'opérateur pendant
l'utilisation de l'appareillage. Des renseignements plus détaillés
se trouvent dans l'appendice “Technical information”.
Cette notice utilise les signes conventionnels suivants :
,
DANGER!
Les messages de danger attirent l'attention de l'opérateur sur
une procédure ou une manœuvre spéciale dont la mauvaise
exécution risque de provoquer de graves lésions.
ATTENTION !
Les messages d'attention apparaissent avant certaines procédures dont le non-respect peut endommager sérieusement
l'appareillage.
NOTE
Les notes contiennent des renseignements importants, extrapolés du texte.
EMMAGASINAGE
Pendant le transport et l'emmagasinage des pompes, il faut
veiller à respecter les conditions environnementales suivantes :
− température: de -20 °C à +70 °C
− humidité relative: 0 - 95% (non condensante)
PRÉPARATION POUR L'INSTALLATION
La pompe est fournie dans un emballage de protection spécial;
si l'on constate des marques de dommages pouvant s'être produits pendant le transport, contacter aussitôt le bureau de vente
local.
Le poids total de l'emballage et de la pompe est au maximum
de 27 Kg.
Pendant l'opération d'ouverture de l'emballage, veiller tout particulièrement à ne pas laisser tomber la pompe et à ne lui faire
subir aucun choc ni aucune vibration
Ne pas jeter l'emballage dans la nature. Le matériel est entièrement recyclable et il est conforme à la directive CEE 85/399
en matière de protection de l'environnement.
NOTE
La pompe ne peut être endommagée en restant simplement
exposée à l'atmosphère. Il est de toute façon conseillé de la
garder dans son emballage jusqu'au moment de sa mise en
fonction afin d'éviter toute pollution due à la poussière
INSTALLATION
Ne pas installer et/ou utiliser la pompe dans des milieux exposés aux agents atmosphériques (pluie, gel, neige), à des poussières, à des gaz agressifs ainsi que dans des milieux explosifs
ou à risque élevé d'incendie.
Pendant le fonctionnement, il est nécessaire de respecter les
conditions environnementales suivantes :
− Température: de +12 °C à +40 °C
− Humidité relative : 0 - 95% (non condensante).
ATTENTION !
Avant toute utilisation de la pompe, il est impératif de procéder
à son remplissage en huile de lubrification car elle est livrée
vide.
,
DANGER!
Avant toute autre opération, retirer les bouchons de protection
placés sur les brides d'aspiration et de vidange. En cas de mise
en marche inopinée de l'appareillage, l'air contenu à l'intérieur
de la pompe peut les projeter contre l'opérateur.
,
DANGER!
Pendant l'installation, faire très attention que la bride d'aspiration soit reliée à la chambre à vider et que la bride d'évacuation
ne soit pas bouchée (voir la figure ci-après).
La pompe ne doit pas être utilisée comme un compresseur.
La pression maximale à l'intérieur du réservoir d'huile ne doit
pas dépasser 1,5 bar (abs).
Le non-respect de ces précautions peut entraîner un danger
pour l'opérateur et l'endommagement de la machine.
Page 11
MODE D'EMPLOI
6 87-900-943-01(E)
ATTENTION !
Contrôler que la tension d'alimentation correspond à la tension
indiquée sur la plaquette du moteur.
Brancher la pompe à la source d'alimentation.
ATTENTION !
En cas de moteur triphasé, une inversion de polarité provoque
l'inversion du sens de rotation de la pompe et peut entraîner
des dommages de nature mécanique
UTILISATION
Avant la mise en service de la pompe, il est nécessaire, pour
atteindre le vide maximum, de faire fonctionner la pompe pendant environ une heure avec le reniflard ouvert afin de supprimer l'humidité de l'huile.
La mise en marche de la pompe ne requiert aucune manœuvre
particulière ; il suffit de la brancher à l'alimentation électrique et
d'agir sur l'interrupteur bipolaire (version avec moteur monophasé) ou unipolaire (version avec moteur triphasé).
,
DANGER!
La pompe a été conçue pour fonctionner avec des fluides neutres ou non corrosifs. L'emploi de substances potentiellement
explosives ou inflammables est strictement interdit.
L'arrêt de la pompe ne requiert aucune manœuvre particulière ;
il suffit de la débrancher de l'alimentation électrique en agissant
sur l'interrupteur bipolaire (version avec moteur monophasé) ou
unipolaire (version avec moteur triphasé).
MAINTENANCE
Le personnel chargé de la conduite et de la maintenance de la
pompe doit avoir reçu la formation nécessaire et posséder une
connaissance approfondie des normes de prévention des accidents du travail.
,
DANGER!
Les hautes tensions peuvent entraîner la mort par contact. Veiller à toujours opérer avec le maximum de prudence et dans le
respect des normes de prévention des accidents du travail en
vigueur.
,
DANGER!
Lorsque la machine est sous alimentation, faire attention à la
présence d'organes en mouvement et de haute tension.
,
DANGER!
En cas de nécessité de procéder à des opérations de maintenance de la pompe au terme d'une période de fonctionnement,
il est indispensable de la laisser refroidir car sa température
extérieure peut être supérieure à 60°C.
,
DANGER!
Avant toute opération de maintenance, il est impératif de toujours couper l'alimentation de la pompe. Placer les pancartes
spécifiques d'avertissement : APPAREILLAGE EN COURS DE
MAINTENANCE – NE PAS BRANCHER L'ALIMENTATION,
près de l'interrupteur d'alimentation. Au terme des opérations
de maintenance, restaurer les dispositifs de sécurité.
,
DANGER!
Ne pas effectuer la substitution d'huile immédiatement après
l'arrêt de la machine car la température de cette dernière peut
être élevée.
ATTENTION !
En phase de substitution de pièces, opérer avec le maximum
d'attention. En particulier, en cas de moteur triphasé, une inversion de polarité provoque l'inversion du sens de rotation de
la pompe et peut entraîner des dommages de nature mécanique.
NOTE
Avant de retourner une pompe au constructeur pour réparation,
il est indispensable de remplir et d'adresser au bureau local de
vente la fiche "Sécurité et Santé" jointe à la présente notice
d'instructions. Une copie de celle-ci devra être mise dans l'emballage de la pompe avant expédition.
En cas de mise au rebut de la pompe, procéder à son élimination conformément aux réglementations nationales en la matière.
Page 12
INSTRUCTION MANUAL
7 87-900-943-01(E)
GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional
information supplied by Varian before operating the equipment.
Varian will not be held responsible for any events occurring due
to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorized interference
with the equipment or any action contrary to that provided for by
specific national standards.
The DS102 1Ph, DS202 1Ph, DS302 1Ph pumps are dualstage, rotary vane pumps oil sealed, driven by a single-phase
or three-phase electric motor.
These high vacuum pumps are suitable for pumping non corrosive gases.
The following paragraphs contain all the information necessary
to guarantee the safety of the operator when using the equipment. Detailed information is supplied in the appendix "Technical Information".
This manual uses the following standard protocol:
,
WARNING!
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury.
CAUTION
The caution messages are displayed before procedures which,
if not followed, could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.
STORAGE
When transporting and storing the pumps, the following environmental requirements should not be exceeded:
− temperature: from -20° to +70 °C
− relative humidity: 0 - 95% (non-condensing)
PREPARATION FOR INSTALLATION
The pump is supplied in a special protective packing. If this
shows signs of damage which may have occurred during transport, contact your local sales office.
Total weight of the pack, including the pump, is approx. 27 Kg.
When unpacking the pump, be sure not to drop it and avoid any
kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized
manner. The material is 100% recyclable and complies with
EEC Directive 85/399.
NOTE
Normal exposure to the environment cannot damage the pump.
Nevertheless, it is advisable to keep it closed until it is installed
in the system, thus preventing any form of pollution by dust.
INSTALLATION
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases,
or in explosive environments or those with a high fire risk. During operation, the following environmental conditions must be
respected:
− temperature: from +12 °C to +40 °C
− relative humidity: 0 - 95% (non-condensing)
CAUTION
Before starting the pump, fill up with lubricating oil as the pump
is delivered empty.
,
WARNING!
Take out the protective caps on the suction and exhaust
flanges before doing anything else. In the event of an accidental start-up, the air inside the pump could violently expel the
protective caps and harm the operator.
,
WARNING!
During installation, pay maximum attention that the suction
flange is connected to the vacuum chamber and the exhaust
flange is not closed (see the following figure).
The pump must not be used as a compressor.
Maximum pressure inside the oil container must not exceed 1.5
bar (abs.)
Non-observance of these precautions may be dangerous for
the machine and the operator.
Page 13
INSTRUCTION MANUAL
8 87-900-943-01(E)
CAUTION
Check that your electrical mains voltage corresponds to that
indicated on the motor’s plate.
Connect the pump to the power supply.
CAUTION
Pay special attention to the three-phase motor, where an inversion of polarity causes inversion of the direction of rotation of
the pump with consequent possibilities of mechanical damage.
USE
Before being put into service, in order to reach maximum vacuum, the pump must be left running for about an hour with the
gas ballast valve open. This will eliminate any humidity from the
oil.
There are no special procedures for switching the pump on; it
needs only to be connected to the electric power by means of
the bipolar switch (version with single-phase motor) or of the
multipolar switch (version with three-phase motor).
,
WARNING!
The pump is designed for operation with neutral or noncorrosive fluids. It is absolutely forbidden to use potentially explosive or flammable substances.
There are no special procedures for switching the pump off; it
needs only to be disconnected from the electric power by
means of the bipolar switch (version with single-phase motor)
or of the multipolar switch (version with three-phase motor).
MAINTENANCE
Personnel responsible for pump operation and maintenance
must be well-trained and must be aware of the accident prevention rules.
,
WARNING!
Death may result from contact with high voltages. Always take
extreme care and observe the accident prevention regulations
in force.
,
WARNING!
When machine is powered take care on account of moving
parts and high voltages.
,
WARNING!
If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as temperature of
the outer surface may be in excess of 60 °C.
,
WARNING!
Always disconnect the power supply to the pump before starting maintenance work. Place a special warning signs over the
power supply breaker switch: MACHINE UNDERGOING
MAINTENANCE - DO NOT POWER ON. When finished, remove the safety warning.
,
WARNING!
Do not change the oil immediately after stopping the machine
as the oil temperature may still be high.
CAUTION
When replacing a part, take great care. Pay special attention to
the three-phase motor, where an inversion of polarity causes
inversion of the direction of rotation of the pump with consequent possibilities of mechanical damage.
NOTE
Before returning the pump to the constructor for repairs the
"Health and Safety" sheet attached to this instruction manual
must be filled-in and sent to the local sales office. A copy of the
sheet must be inserted in the pump package before shipping.
If a pump is to be scrapped, it must be disposed of in accordance with the specific national standards.
Page 14
TECHNICAL INFORMATION
SECTION I
TECHNICAL DESCRIPTION
The DS102 1Ph, DS202 1Ph and DS302 1Ph
pumps are dual-stage, rotary vane pumps oil
sealed, driven by a single-phase or three-phase
electric motor.
These vacuum pumps are suitable for pumping
non corrosive gases.
The main features are:
- all parts in direct contact with the fluid pumped
are free of copper alloys;
- all materials are carefully selected to provide
extended life;
- a high capacity gas ballast device allow to
pump condensable vapors;
- all the parts composing the pump are fully replaceable due to the close machining tolerances and to the centering obtained by using
reference pins;
- due to its design features and low number of
gaskets, the pump requires little maintenance,
disassembly and reassemble are easy and
require minimal time.
The pump works with force-feed lubrication, provided by an auxiliary gear-pump driven by the rotor
of the vacuum pump itself. This ensures proper
lubrication even when pressures are close to
atmospheric
.
The entire pump functional block is immersed in
the oil contained in the casing. The oil guarantees
perfect sealing of the discharge valves, enters the
pump to ensure lubrication and sealing of the parts
inside, facilitates heat dissipation and reduces
pump noise.
The pump is equipped with a special antisuckback device which automatically isolates the
vacuum system when the pump stops. This avoids
rises in pressure or oil flow in the vacuum system
while air is allowed back into the stator chambers.
The air entering the pump after the anti-suckback
device has closed prevents the oil in the casing
from filling the stator chambers.
The inner seals are achieved by the lubricating oil,
thanks to the close machining tolerances.
The vacuum pumps are connected directly to the
electric motor through a flexible coupling, so that
motion is transmitted even in case of poor alignment.
A fan fitted on the joint and housed in the pump
support produces a forced air flow over the finned
surfaces of the casing to avoid oil overheating.
LUBRICATION
The pump’s lubricating system is force-feed type.
Oil circulation is obtained by means of a gear
pump connected to the rotor shaft.
The oil is sucked through a gauze filter to prevent
any foreign bodies from entering the pump.
Shunt-mounted on the delivery line is a hydraulic
piston which, besides actuating the anti-suckback
device (see ANTI-SUCKBACK DEVICE), also
regulates pressure by discharging excess oil flow
directly into the tank.
The required flow of oil under pressure passes
through ducts that are drilled in the walls of the
pump and lubricates the bushings and the inside
parts.
VACUUM SEALS
A special feature of this pump is the low number of
gaskets that are employed.
The seals in the circuit are obtained by means of
VITON gaskets.
The careful surface finish of the various parts of
the pump means that vacuum sealing of the functional block is ensured by the film of oil separating
metal surfaces. Sealing of the rotor shaft is guaranteed by a rotating gasket with dust-guard lip.
The suction flange and duct are sealed by mean of
OR gaskets.
INLET PORT
OUTLET PORT
9 87-900-943-01(E)
Page 15
TECHNICAL INFORMATION
GAS BALLAST VALVE
When the pump sucks in vapors, these condense
during compression and mix with the oil, forming
an emulsion (an aqueous vapor, for example) or a
solution (organic solvent vapors, for example).
A number of problems arise from this, such as the
impossibility of obtaining high vacuums, the alteration of the properties of the oil, could cause scaling
on parts of the pump.
To avoid this, during compression at the second
stage, atmospheric air is let into the pump through
an adjustable valve, or “gas ballast valve”, located
at the top of the pump.
In this way, the discharge valve of the second
stage opens through the effect of the atmospheric
air before the partial pressure of the vapor reaches
saturation point, thus preventing condensation
from occurring. The vapors are expelled mixed
with air.
ANTI-SUCKBACK DEVICE
The pump is equipped with a special antisuckback device to avoid air pressure rises and/or
oil backflow towards the evacuated vessel when
the pump is switched off. This device has a shutter
which automatically closes the suction duct.
In this way the pump and vacuum system are
completely isolated from each other and air can
enter the pump without any risk for the vacuum
produced in the system.
The device includes some special features,
namely:
- drive obtained avoiding any form of contamination of the inlet duct by fluids (oil and/or air)
used to command the shutter. Thanks to this,
when the pump is started again, the pumpdown to vacuum conditions is extremely fast
as these contaminants are not present and no
degassing is therefore required;
- suction flange maintained closed even when
the pump is idle, so that pollutants cannot enter from the environment and no oil can overflow from the pump.
10 87-900-943-01(E)
Page 16
TECHNICAL INFORMATION
View of the pump
11 87-900-943-01(E)
Page 17
TECHNICAL INFORMATION
Legend (cf. figure View of the pump)
N° Description DS 102 DS202 DS302
1 Electric motor SR03700702 SR03700702 SR03700702
1A Electric motor 370-450W SR03700865 SR03700865 SR03700865
1B Three phase electric motor SR03700922 SR03700922 SR03700922
2 Rubber foot
3 Screw
4 Screw
5 Screw
7 Spacer
8 Motor support
9 Handle
10 Screw
11 Right sideplate
12 Board
14 Screw
15 Support plate
16 Cylindrical pin (3) - (1) (3) - (2) (3) - (2)
17 Screw
18 Rubber crown (3) - (1) (3) - (2) (3) - (2)
19 Half-joint with fan
20 Half-joint (pump side)
21 Oil-seal ring (3) - (1) (3) - (2) (3) - (2)
22 Special screw
23 OR gasket (3) - (1) (3) - (2) (3) - (2)
24 Gas Ballast Valve knob SR03700219 SR03700219 SR03700219
25 Half-plate
26 Inlet screen SR03700237 SR03700237 SR03700237
27 OR gasket (3) - (1) (3) - (2) (3) - (2)
28 Suction flange
29 Anti-suckback shutter (3) - (1) (3) - (2) (3) - (2)
30 Piston
31 OR gasket (3) - (1) (3) - (2) (3) - (2)
32 Casing gasket (3) - (1) (3) - (2) (3) - (2)
33 Inner plate SR03700260 SR03700260 SR03700260
34 Pump support
35 Anti-wear bushing
36 OR gasket (3) - (1) (3) - (2) (3) - (2)
37 Kei motor side SR8999980101 SR8999980101 SR8999980101
38 First stage vane (1) (2) (2)
39 First stage rotor SR03700273 SR03700319 SR03700319
40 Spring (3) - (1) (3) - (2) (3) - (2)
41 Tongue SR8999980001 SR8999980001 SR8999980001
42 Second stage vane (1) (2) (2)
43 Second stage rotor SR03700269 SR03700269 SR03700269
44 Tie-rod SR03700209 SR03700308 SR03700308
45 OR gasket (3) - (1) (3) - (2) (3) - (2)
46 Bracket
47 Screw
49 Valve cover plate
50 Valve spring (3) - (1) (3) - (2) (3) - (2)
12 87-900-943-01(E)
Page 18
TECHNICAL INFORMATION
13 87-900-943-01(E)
N° Description DS 102 DS202 DS302
51 Valve gasket (3) - (1) (3) - (2) (3) - (2)
52 First stage stator SR03700261 SR03700316 SR03700495
53 Middle plate SR03700262 SR03700262 SR03700262
56 GasBallast Valve shutter (3) - (1) (3) - (2) (3) - (2)
57 GasBallast Valve spring (3) - (1) (3) - (2) (3) - (2)
58 Second stage stator SR03700321 SR03700321 SR03700321
59 Oil pump joint SR03700280 SR03700280 SR03700280
60 Special screw
61 End plate SR03700285 SR03700285 SR03700285
62 Tongue
63 Washer
64 Nut
69A External oil pump gear SR03700281 SR03700281 SR03700281
69B Internal oil pump gear SR03700277 SR03700277 SR03700277
70 Oil pump cover
71 Screw
73 Plate
74 Filter
75 Casing
76 Exhaust flange
77 OR gasket (3) - (1) (3) - (2) (3) - (2)
78 Oil fill plug 03.701218 03.701218 03.701218
79 Oil drain plug SR03700256 SR03700256 SR03700256
80 Oil drain plug gasket SR03700256 SR03700256 SR03700256
81 Left sideplate
83 Spring
84 Filter
85 Flange
86 Sight glass 03.701326 03.701326 03.701326
87 OR gasket (3) - (1) (3) - (2) (3) - (2)
99 Special screw
100 Piston
101 Arm
102 Spring (1) (2) (2)
103 OR gasket (3) - (1) (3) - (2) (3) - (2)
104 OR gasket (3) - (1) (3) - (2) (3) - (2)
105 Sleeve
106 Spring (1) (2) (2)
107 Ring (3) - (1) (3) - (2) (3) - (2)
108 Arm
109 Insert
110 Special washer
111 Screw
NOTES
(1) Part of DS 102 Major Maintenance Kit (P/N 9499380)
(2) Part of DS 202-302 Major Maintenance Kit (P/N9499381)
(3) Part of DS 102-202-302 Minor Maintenance Kit (P/N 9499370)
Page 19
TECHNICAL INFORMATION
TECHNICAL DATA
The following table lists the main technical data of the DS102 1Ph, DS202 1Ph and DS302 1Ph pumps.
TECHNICAL DATA Hz UNITS DS102 DS202 DS302
60 l/min (cfm) 114 (4) 192 (6,8) 285 (10)
FREE AIR DISPLACEMENT
50 l/min (m
3
/h) 95 (5,7) 160 (9,6) 237 (14,2)
60 cfm 3,5 5,8 8,2
PUMPING SPEED *
50 m
3
/h 5 8,3 11,6
ULTIMATE PARTIAL PRESSURE * mbar 10
-4
10
-4
10
-4
ULTIMATE TOTAL PRESSURE *
mbar
2⋅10
-3
2⋅10
-3
2⋅10
-3
ULTIMATE TOTAL PRESSURE WITH GAS BALLAST *
mbar
2⋅10
-2
2⋅10
-2
2⋅10
-2
WATER VAPOR TOLERANCE mbar 15 15 20
WATER VAPOR CAPACITY g/h 60 100 160
OIL CAPACITY min/max l 0,3/0,5 0,4/0,6 0,4/0,6
MOTOR RATING 1ph 50/60 kW 0,37/0,45 0,37/0,45 0,37/0,45
50 rpm 1500 1500 1500
NOMINAL ROTATION SPEED
60 rpm 1800 1800 1800
OIL TEMPERATURE °C 50 50 52
(pump operating) ** °F 122 122 126
OPERATING TEMPERATURE RANGE °C 12 - 40 12 - 40 12 - 40
Installation category II
Pollution degree 2
Kg 22 24 24
WEIGHT
lb 48 53 53
INLET FLANGE DN 25KF 25KF 25KF
EXHAUST FLANGE DN 25KF 25KF 25KF
Dimensions (cf. also next table):
- length, 1ph mm 454 491 491
- width mm 134 134 134
- height mm 212 212 212
* According to PNEUROP 6602
** At ultimate total pressure, 20 °C (68 °F) room temperature
14 87-900-943-01(E)
Page 20
TECHNICAL INFORMATION
DIMENSIONS
MODEL UNITS A B C D H L M N P R W
DS102
mm
inch
30
1,18
30
1,18
35
1,38 3 0,12
212
8,3
430
16,9
250
9,8
100
3,9
105
4,1
165
6,5
132
5,2
DS202
mm
inch
30
1,18
30
1,18
35
1,38 3 0,12
212
8,3
467
18,4
250
9,8
100
3,9
105
4,1
205
8,1
132
5,2
DS302
mm
inch
30
1,18
30
1,18
35
1,38 3 0,12
212
8,3
467
18,4
250
9,8
100
3,9
105
4,1
205
8,1
132
5,2
Pump dimensions
15 87-900-943-01(E)
Page 21
TECHNICAL INFORMATION
Typical Performance Curves
16 87-900-943-01(E)
Page 22
TECHNICAL INFORMATION
SAFETY PRECAUTIONS
- Always carry the pump by means of the handles provided.
- The pump must be set in position taking the
upmost care in order to avoid accidental falls.
,
WARNING!
In case of a need to handle the pump after a period of operation, it must be left to cool first as the
external surface temperature may be in excess of
60 °C.
TRANSPORT AND INSTALLATION
The pumps are shipped to the customer inside
cardboard boxes.
Total weight of the pack, including the pump, is between 25 and 27 Kg according to the different
pump models.
The case must be handled with care, using appropriate lifting equipment.
CAUTION
When moving the case, ensure that it is securely
bound to the lifting equipment and that the equipment is strong enough to support the weight.
The pump’s working environment is a traditional
industrial environment. Naturally sites with corrosive vapors or excessive heat are best avoided.
Room temperature should ideally be between 12
°C and 40 °C.
If the temperature is not inside this range, consult
Varian technical service for the changes required.
Setting the pump in position should be performed
as follows:
- Pump laid on the ground. There are no special instructions for this type of installation, except that the floor should be as flat as
possible and suited to bear the weight of the
pump (it should ideally be a concrete floor)
and of any accessories mounted on it. Note
that the pump is stable on its base plate and it
should not be necessary to anchor it to the
floor with bolts and screws; also vibrations to
and from the pump are greatly reduced by the
use of rubber feet.
- Pump off the ground. In this case, the user
must design a suitable support structure, remembering the following points:
* the plane supporting the pump must be
perfectly horizontal;
* the structure should be adequately rigid;
* the relevant safety precautions should be
applied.
Note also that the pump should be attached to
the supporting structure after replacing the
rubber feet with special anti-vibration feet,
which should be screwed to the pump base
and to the supporting plane.
After taking the pump out of its packing case, you
are advised to make the following checks:
a. Ensure that the pump has not suffered any
damage during shipping.
b. Check that the guards are mounted correctly
(side plates, refs. 11 and 81 in fig. View of the
pump) and that there are no uncovered or
loose parts.
PRELIMINARY OPERATIONS
Before starting the pump, fill up with lubricating oil
as the pumps are delivered empty.
NOTE
A tin of oil is included in the packing.
For details on how to fill up, see Scheduled Maintenance Card 01.
CAUTION
Oil must be poured into the casing through the
special threaded plughole and NOT through the
suction line.
,
WARNING!
Take out the protective caps on the suction and
exhaust flanges before doing anything else. In the
event of an accidental start-up, the air inside the
pump could violently expel the protective caps and
harm the operator.
17 87-900-943-01(E)
Page 23
TECHNICAL INFORMATION
The motor has a main on/off bipolar switch.
SECTION II
ELECTRICAL MOTORS
The motor includes a thermal protection against
overloads. If the motor is switched off by this relay,
it can be started again after a few minutes.
Single phase universal motors
They are world wide motors, dual voltages and
dual frequencies, and they are in accordance with
major international standards (UL, CSA, CE). On
the table below are shown the technical specifications of the motor.
Consult the trouble shooting section in order to
understand and remove the overload cause.
NOTE
If fuses are installed on the power line, they must
be in accordance with the table below.
CAUTION
If you start a pump at low temperature, the current
absorbed by the motors will be for several seconds
higher than the nominal one, for this reason the
fuse on the line must be of the slow-blow type.
Before connecting to the mains, check the position
of the voltage selector situated inside the electrical
box (see next paragraph).
200 to 240 V,
50/60 Hz
100 to 120 V,
50/60 Hz
Voltage selector
Motor specifications for different pumps
PUMP NOMINAL
VOLTAGE [V]
Hz RPM kW START UP
CURRENT [A]
FULL LOAD
CURRENT [A]
MAXIMUM FUSE
RATING [A]
100 50 1450 0.37 31 6.3 8
100 to 120 60 1730 0.45 33 6.5 8
200 to 240 50 1450 0.37 19 3.5 6
DS 102
DS 202
DS 302
200 to 230 60 1730 0.45 17 3.7 6
18 87-900-943-01(E)
Page 24
TECHNICAL INFORMATION
Single-Phase Universal Motors Voltage Setting
CAUTION
Before connecting to the mains, check that your
electrical mains voltage corresponds to the motor
voltage setting.
,
WARNING!
Disconnect the motor from the mains before opening the electrical box.
The motors are factory set to operate at 200-240 V
(50/60 Hz) nominal voltages.
To modify the voltage setting, change the position
of the voltage selector situated inside the motor
electrical box.
To confirm the change of the voltage setting from
High Voltage to Low Voltage, glow the orange label above the yellow label positioned on the electrical box cover.
,
WARNING!
Close the motor electrical box cover before connecting to the main.
Voltage Selector
Orange label (100 to 120 V)
IEC 320 main socket
On/off switch
Motor Electrical box
19 87-900-943-01(E)
Page 25
TECHNICAL INFORMATION
CONNECTIONS TO THE INLET AND EXHAUST
FLANGES
Remove the protective caps from both flanges.
Connect the system to be evacuated to the inlet
flange, using a centering ring with OR and a locking collar.
NOTE
For guaranteed reliable sealing, use an OR gasket
in Perbunan or Viton.
The inlet duct is equipped with a sieve filter preventing solid particles from entering and damaging
the pump.
NOTE
When the gases to be pumped out contain dust, it
is advisable to insert a dust filter before the inlet
flange.
NOTE
When the gases to be pumped out contain large
quantities of vapor, it is advisable to include a
condense separator before the inlet flange.
To make best use of the pump’s capacity, use only
short, straight piping, with a diameter not smaller
than that of the inlet flange.
NOTE
If rigid piping is used, it is good practice to use a
flexible joint in order to avoid undue forcing of the
connection on the pump.
The exhaust duct must be connected to a pipe that
will take away the pumped out gases.
NOTE
Application of an oil trap filter is necessary to avoid
pollution of the surrounding atmosphere by the oil
present in the exhaust duct during pump operation.
CAUTION
Never block the pump exhaust line. This would
cause overpressure in the casing with the risk of
breaking the glass window of the level indicator
and/or expelling the oil seal gasket.
STARTING AND RUNNING THE PUMP
Before being put into service, in order to reach
maximum vacuum, the pump must be left running
for about an hour with the gas ballast valve open.
This will eliminate any humidity from the oil.
,
WARNING!
The pump is designed for operation with neutral or
non-corrosive fluids. It is absolutely forbidden to
use potentially explosive or flammable substances.
NOTE
If the pump is started with cold oil, initially more
than normal noise will be heard; this will last for a
few minutes only until the oil reaches its working
temperature.
There are no special instructions for normal operation of the pump, which is delivered to you after
completion of a running-in cycle in the factory. The
maintenance operations for a pump in working
condition may be found on the Scheduled Maintenance Cards.
If the pump is sucking in environments with liquids
or vapors, it is important to leave it to run with the
gas ballast open so as to avoid condensation of
the vapors and contamination of the lubricating oil
as a result. When there is no danger of the oil being contaminated, the gas ballast valve should be
closed to reduce the pump’s power absorption.
The gas ballast valve will prove useful in the cold
season when, due to the lower room temperatures, it takes longer for the pump to reach rated
temperature when switched on. Compression of
the air forced in by the gas ballast valve develops
heat, which in turn increases temperature of the oil
faster.
NOTE
If gases without vapors are sucked in, you are advised to open the gas ballast device from time to
time in order to eliminate the traces of humidity
they contain.
NOTE
For repetitive work cycles, with brief time intervals
in between, it is better not to stop the pump.
20 87-900-943-01(E)
Page 26
TECHNICAL INFORMATION
STOPPING THE PUMP
There are no special procedures for switching the
pump off; it needs only to be disconnected from
the electric power by means of the bipolar switch
(see section MODELS WITH SINGLE-PHASE
UNIVERSAL MOTORS).
When the pump is stopped, the anti-suckback device makes it possible to maintain vacuum in the
vessel connected on the inlet flange of the pump.
If the pump is expected to be stopped for a lengthy
period, or in any case if it has pumped in large
amounts of vapors, it is good practice to run it with
the gas ballast open and the inlet line closed for a
few minutes before switching off in order to limit
the risk of corrosion or scaling due to pollution of
the oil by condensed vapors.
SAFETY RULES
Personnel responsible for pump operation and
maintenance must be well-trained and must be
aware of the accident prevention rules.
The accident prevention precautions contained in
this section must be respected at all times during
operation and maintenance of the pump to avoid
damage to operators and to the pump.
These precautions are provided in the form of
WARNING and CAUTION notes.
,
WARNING!
Operating procedures, technical information and
precautions which, if not respected and/or implemented correctly may cause body harm to operators.
CAUTION
Operating procedures, technical information and
precautions which, if not respected and/or implemented correctly may cause damage to the pump.
WARNING NOTES ,
a. Death may result from contact with high volt-
ages. Always take extreme care and observe
the accident prevention regulations in force.
b. Always disconnect the power supply to the
pump before maintenance work. Place a special warning signs over the power supply
breaker switch: MACHINE UNDERGOING
MAINTENANCE - DO NOT POWER ON.
c. If you are performing maintenance after the
pump has been operating for a considerable
time, allow sufficient time for it to cool as the
external surface temperature may be in excess of 60 °C.
d. Failure to provide the pump with an earth
connection may cause serious damage to operators. Always ensure that there is an earth
connection and that it complies with the standards.
e. When cleaning the pump and its component
parts, avoid the use of flammable or toxic solvents, such as benzin, benzol, ether or alcohol. The recommendation is to use a soap
and water solution, preferably in ultrasound
washing machines, taking care to dry all the
cleaned parts at temperatures under 100 °C in
order to eliminate residual moisture.
f. Prolonged overloads or breakdowns may
cause the electric motor to overheat, and to
release noxious smoke; remove the power
immediately as a precaution and do not approach the pump at least until you have provided ventilation to drive out the smoke. Take
care not to breathe in the fumes remaining inside the pump in the course of repair work.
g. In case of fire, do not throw water on the
pump. Switch the power off and use CO
2
ex-
tinguishers.
h. Carefully inspect the flanges to ensure that
there are no dust, oil, dirt or defects of the
mating surfaces, before making the required
connections.
i. Ensure that all joints and couplings are locked
correctly before starting the pump again after
repair work.
j. Do not wear any objects that may become en-
tangled in the mechanisms and/or act as conductors (chains, bracelets, etc.).
k. Ensure that the tools to be used are in perfect
working condition and have insulating grips,
where necessary. Check that the insulating
material of the cables and that the conductors
of the test equipment do not show any signs
of damage.
l. Do not replace the oil immediately after stop-
ping the machine as the oil may still be at high
temperature.
m. Perform repairs in clean and, where possible,
dust-free areas. Protect all the clearances of
connection points with suitable plastic caps and
cover the machined surface areas of all parts
stripped down until they are put back on the
pump again.
n. Do not start the pump if the protective side-
plates (refs. 11 and 81 of fig. View of the pump)
are not properly in place.
21 87-900-943-01(E)
Page 27
TECHNICAL INFORMATION
CAUTION NOTES
a. Before putting the pump back into operation
after a breakdown, inspect it and check carefully for any other signs of damage.
b. Use only tools that are in perfect working or-
der and specially designed for the job; use of
inappropriate or ineffective tools may cause
serious damage.
c. Perform repairs in clean and, where possible,
dust-free areas. Protect all the clearances of
connection points with suitable plastic caps
and cover the machined surface areas of all
parts stripped down until they are put back on
the pump again.
d. Always check the lubricant and that it is prop-
erly distributed through the pump; inadequate
lubrication may damage the pump seriously.
e. Give the parts some form of marking as you
strip them down to ensure that you reassemble them again in the proper order.
f. Check that there are no scratches or grooves
on the machined shafts, in their seats inside
the pump or on machine-ground surfaces.
Slight scratches and abrasions may be eliminated with very fine emery paper or by a little
light grinding.
g. Before putting a group together, always
spread a little oil over inner parts and mating
surfaces. Replace all seals with original spare
parts before reassembling components.
MAINTENANCE ACTIONS
Maintenance may be seen as the totality of all
scheduled and unscheduled maintenance work.
Maintenance includes:
1. SCHEDULED MAINTENANCE: Maintaining the
nominal state of operation.
2. UNSCHEDULED MAINTENANCE: Restoring
the nominal state of operation
NOTE
The frequency with which repairs are performed
depends on the process and presence of substances that shorten pump life (dust, abrasives,
solvents, water, chemically aggressive substances).
The pump must be cleaned at regular intervals of
time.
CAUTION
Do not clean with Alcohol the plastic or rubber
components of the pump.
Use only the strictly necessary amount of lubricant; an excess of lubricating oil, like when there is
none, may sometimes compromise proper operation of the pump.
Only the recommended lubricants, or lubricating
oils with similar characteristics and known and experimented quality, should be used.
Oil changes must be made with the oil at a sufficiently high temperature, after leaving the pump to
cool for a few minutes following operation.
The drain and filler plugs must not be left open any
longer than is strictly necessary.
When performing maintenance, look out for all
signals that may precede a breakdown, in particular:
• traces of corrosion;
• oil leaks;
• slack joints or couplings.
Maintenance technicians must:
• be aware of all applicable national directives
concerning accident prevention during work
on motor-driven pumps and should know how
to apply them;
• have read and understood all the sections on
“Safety Rules";
• be familiar with the essential design features
and operation of the pump;
• know how to use and consult the pump docu-
mentation;
• be concerned about proper operation of the
pump;
• make a note of any irregularities in operation
of the pump and take the necessary action,
where appropriate.
Use original spare parts wherever possible and
repair a broken part as best as possible on site or
send it back to the manufacturer for repairs.
For all problems arising, or to order spare parts,
refer to our service department.
22 87-900-943-01(E)
Page 28
TECHNICAL INFORMATION
Varian S.p.A. - Vacuum Technologies
Via Varian 54
10040 Leinì (Torino) - Italy
Telephone: (39) 011.9979111
Fax: (39) 011.9979344
LUBRICANTS
It will be readily understood how important adequate lubrication is to high technology pumps like
the Varian vacuum pumps. Correct use of appropriate lubricants makes a significant contribution to
achieving best performance and warding off defects.
When handling lubricants, the following sanitary
protection measures should be observed at all
times:
• Avoid prolonged, excessive or repeated con-
tact of the skin with products for lubrication,
and also avoid directly inhaling the fumes or
vapors of such products.
• Protect the skin by wearing appropriate
clothes and equipment (e.g. special suits,
glasses or, where permitted by the safety
regulations, gloves) or by applying a special
protective product.
• Clean the skin carefully after contact with the
lubricants by washing freely with water and
soap.
• Apply a skin cream after washing.
• Take off and change clothes or shoes on
which oil has been spilled.
• Never put rags dripping with oil into the pock-
ets of your clothes.
When disposing of waste lubricants, observe the
following environment protection regulations:
• The lubricants risk contaminating the water
and the ground! Therefore never pour lubricating products on to the ground, into water or in
the sewage system. All violations of these
rules are liable to persecution as provided for
by law. When using lubricants always keep an
oil can nearby.
• Take care in draining off waste oils. In disposal of these products respect all regulations
in force concerning waste oil disposal.
The recommended lubricating oil is the Varian GP
oil. The GP oil is a general purpose mechanical
pump fluid specifically engineered to provide superior performance in high speed direct drive mechanical pumps.
These precisely distilled fluids (100% solvent refined neutral paraffinic oil) deliver lower base pressure capability, faster pump-down cycles, and
reduced maintenance requirements on both the
pump and the fluid.
It is absolutely necessary to continue using the lubricants initially used to fill the tank. If this is not
possible for organizational or business reasons,
use only products with the same characteristics as
the previous oils.
Only use of lubricants of suitable quality will guarantee safe operation of the pumps.
CAUTION
Mineral oils and the PFPE oil are incompatible. To
change from one type to another, the pump must
be stripped down completely and all parts washed
carefully to eliminate all oil residues.
If you expect to have to use other lubricants, first
find out if the two products are compatible. In
cases of doubt, the lubricant used up to that time
must be flushed out by way of a pump flushing
procedure.
CAUTION
To avoid the risk of contaminating the oil, absolute
cleanliness of the pump and surrounding area
must be ensured during the lubrication procedures.
23 87-900-943-01(E)
Page 29
TECHNICAL INFORMATION
Varian GP oil characteristics
PROPERTY UNIT OF
MEASURE
GP oil
Vapor pressure @ 25 °C < 3 10
-5
Boiling point @ 0,01 torr °C 112
Viscosity @ 40 °C cSt (SUS) 55 (258)
Viscosity @ 100 °C cSt (SUS) 8,1 (52,7)
Viscosity index 119
Pour point °C (°F) -15 (5)
Flash point °C (°F) 213 (415)
Fire point °C (°F) 244 (472)
Density g/cm
3
0,87
Varian GP oil vapor pressure curve Varian GP oil viscosity curve
24 87-900-943-01(E)
Page 30
TECHNICAL INFORMATION
SCHEDULED MAINTENANCE CARDS
No. FREQUENCY PUMP STATUS (*) OPERATION
01 MONTHLY R OIL LEVEL CHECKING
02 TWICE YEARLY S CLEANING THE INLET FILTER
(*) R=RUNNING S=STOPPED
NOTE
When the pump is equipped with:
•
a filter for dust on the inlet side
•
a condensation separator on the inlet side
these items must also be maintained, by following the Manufacturer’s instructions.
NOTE
The numbers used in the drawings on the Scheduled Maintenance Cards are those used in Figure View of the
pump.
25 87-900-943-01(E)
Page 31
TECHNICAL INFORMATION
Scheduled Maintenance
Card No.
01
Pump type:
DS102 1Ph, DS202 1Ph, DS302 1Ph
Frequency:
MONTHLY
Time:
5 min.
Machine status: S R
Type of action:
LUBRIFICATION
Item:
LUBRIFICATING OIL
1
No. Description Time Equipment Materials
Oil
1
Check the oil level and top
up if necessary.
5 min
• Cleaning rags
• Liquid detergent
,
WARNING!
Machine powered: take care on account of moving parts and high voltages.
,
WARNING!
If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as
temperature of the outer surface may be in excess of 60°C.
26 87-900-943-01(E)
Page 32
TECHNICAL INFORMATION
1. Check the oil level through the sight glass: there are two clearly visible arrows indicating maximum and
minimum levels for proper pump operation.
NOTE
The amount of oil consumed depends on the type of work, particularly on the volume being evacuated and on
the frequency of the vacuum cycles.
2. If necessary, open the pump filling plug on the top plane of the pump and add oil.
NOTE
Before starting the procedure, check that the quality and type of oil used corresponds to the indications of Table Varian GP oil characteristics of this manual.
CAUTION
Take great care to avoid oily residues or dust from entering the pump and jeopardizing proper operation.
3. Close the fill plug and, using cotton or other suitable material rags, clean thoroughly the outer surface of
the top plane of the pump.
CAUTION
Never mix lubricants of different brands or quality. To change from one oil to another, the pump must be
stripped down and all parts washed carefully, taking care to eliminate oil residues.
4. Open the gas ballast valve to purify the oil.
27 87-900-943-01(E)
Page 33
TECHNICAL INFORMATION
Scheduled Maintenance
Card No.
02
Pump type:
DS102 1Ph, DS202 1Ph, DS302 1Ph
Frequency:
TWICE YEARLY
Time:
10 min.
Machine status: S R
Type of action:
CLEANING
INLET FILTER
Item:
1
No. Description Time Equipment Materials
1
Clean the suction filter. 10 min.
• Compressed air gun
,
WARNING!
Machine safety: disconnect all power lines. Hang the card “MACHINE UNDERGOING MAINTENANCE - DO
NOT POWER ON” from the main breaker switch. When finished, remove the safety warning.
,
WARNING!
If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as
temperature of the outer surface may be in excess of 60 °C.
28 87-900-943-01(E)
Page 34
TECHNICAL INFORMATION
1. Remove the filter (26) from the inlet flange (28).
2. Clean the filter using an aqueous solution and dry with hot air.
3. Put the filter back in place.
CAUTION
The filter element is designed to prevent solid particles in the air from entering the inside of the pump and if it
is not working properly, serious damage could be caused the pump’s inner parts. In such cases, it may be
worthwhile installing a large surface area filter in the pump's suction line to improve effectiveness and reduce
maintenance frequency.
If the pump sucks in gases and vapors that contain large quantities of solid particles, the filter must be
checked and cleaned more often than indicated here.
29 87-900-943-01(E)
Page 35
TECHNICAL INFORMATION
UNSCHEDULED MAINTENANCE CARDS
No. SUBJECT FREQUENCY
101 General Warnings
102 Changing the oil Whenever necessary
103 Disassembly of oil level indicator When damaged
104 Disassembly of anti-suckback device shutter When damaged
105 Disassembly of electric motor and joint When damaged
106 Disassembly of discharge valve When damaged
107 Disassembly of oil circulating pump When damaged
108 Disassembly of anti-suckback valve When damaged
109 Disassembly of pump body When damaged
110 Replacement of oil seal ring/wear bushing When damaged
111 Disassembly of functional block rotors When damaged
NOTE
The numbers used in the drawings on the Unscheduled Maintenance Cards are those used in Figure View of
the pump.
30 87-900-943-01(E)
Page 36
TECHNICAL INFORMATION
Unscheduled Maintenance
Card No.
101
Pump type:
DS102 1Ph, DS202 1Ph, DS302 1Ph
Frequency:
Time: Machine status: F L
Type of action:
GENERAL WARNINGS
Item:
1. Pump disassembly and reassembly require some basic operations and use of tools found in most workshops.
31 87-900-943-01(E)
Page 37
TECHNICAL INFORMATION
NOTE
The pump’s component parts are modular and therefore fully interchangeable. Whenever parts have to replaced, please specify in the order:
- Pump type
- Serial number (marked on pump identification plate).
- Reference number on the detailed diagram, name and part number as indicated on the spare parts and
accessories list (section SPARE PARTS LIST of this manual).
To simplify maintenance work, two kits have been devised.
The
Gaskets Kit, containing all the gaskets recommended for substitution after disassembly of the pump and
the most commonly used removable parts.
You are advised to keep this kit in a dry room, away from heat and light (sun and UV rays) in order to prevent
hardening of the elastomer parts.
The
Maintenance Kit, including, as well as the Gaskets Kit, the 1st and 2nd stage vanes and other parts that it
may be necessary to replace when overhauling the pump completely. These parts have a life of approx. two
years under conditions of normal operation.
KIT PUMP TYPE ORDER
DS102 1Ph DS202 1Ph DS302 1Ph CODE
GASKETS KIT X X X 949-9370
MAINTENANCE KIT X 949-9380
MAINTENANCE KIT X X 949-9381
2. Before reassembling the pump, all parts must be cleaned thoroughly with a soap and water solution and
rinsed with demineralized water.
CAUTION
Particular care must be taken in cleaning the lubrication ducts and oil passage nozzles, which must always be
kept free of impurities.
CAUTION
Take care that the soap and water solution does not remain in the various cavities and recesses of the pump,
in the blind holes in particular.
3. Then dry the parts, by heating where possible but without using compressed air (it generally contains
polluting substances), taking care not to exceed a temperature of 80 °C
.
4. The sequence of reassembly is the inverse of the disassembly operation. Take the same precautions:
- Spread some clean oil of the same type as used to lubricate the pump over the different parts, in particular the inner lip of the oil seal, the bushings and vanes.
- If the oil seal has the dust-block lip, 2/3 fill the area between the two lips with ISOFLEX TOPAS
NB5051 grease.
CAUTION
Do not allow the grease into the area of the circumferential spring.
32 87-900-943-01(E)
Page 38
TECHNICAL INFORMATION
- Lock without forcing the nuts on the four tie-rods (44) connecting the parts of the pump block. Before
locking, check that all parts are touching as required.
- Before putting the springs and shutters of the discharge valves back in, pour a little oil into the stators
through the holes in the valves.
CAUTION
Before hooking the recall spring to the anti-suckback command bar, make sure you have put the bar all the
way into the sleeve of the rotary feedthrough to avoid bending the tapered part of the bar.
NOTE
On DS102 1Ph, DS202 1Ph and DS302 1Ph pumps, fit the joint on the motor shaft after careful removal of
grease from the surfaces and application of LOCTITE 242.
33 87-900-943-01(E)
Page 39
TECHNICAL INFORMATION
Unscheduled Maintenance
Card No.
102
Pump type:
DS102 1Ph, DS202 1Ph, DS302 1Ph
Frequency:
AS REQUIRED
Time:
30 min.
Machine status: S R
Type of action:
CHANGING OIL
LUBRICANT
Item:
A
CTION AREA
Materials required: Equipment required:
• Varian GP oil (1 liter) • Fixed wrench for oil exhaust.
• Tank to collect oil.
• Cotton (or other suitable material) rags for cleaning.
• Soap and water solution for cleaning.
,
WARNING!
Do not change the oil immediately after stopping the machine as the oil temperature may still be high.
,
WARNING!
Machine safety: disconnect all power lines. Hang the card “MACHINE UNDERGOING MAINTENANCE - DO
NOT POWER ON” from the main breaker switch. When finished, remove the safety warning.
34 87-900-943-01(E)
Page 40
TECHNICAL INFORMATION
,
WARNING!
If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as
temperature of the outer surface may be in excess of 60 °C.
NOTE
The oil has to be replaced:
1) when it has become particularly dirty due to the presence of contaminants in the environments being
evacuated;
2) when the degree of vacuum achieved by the pump is no longer satisfactory, even after running for one
hour with the gas ballast device open.
1. Place a tank for the waste oil under the oil drain plug (79).
NOTE
You are advised to empty the pump before it cools down completely so that the oil flows out more easily.
NOTE
The pump contains up to 1 liter of oil - make sure the tank you use for the waste oil can hold this amount.
2. Open the oil drain plug (79) slowly; let the oil flow out by opening the fill plug (78) located at the top of the
pump. In the meantime, clean the inside of the drain plug (magnetic plug).
3. After closing the drainage hole with its plug, make the pump perform a number of turns, giving it a brief
current pulse, so as to let residual oil in the pump chambers flow out. Then drain off the residual oil again.
4. After all the oil has been drained, close the drain plug tight; take the tank of waste oil away and clean
thoroughly, using rags of cotton or other suitable material to dry.
5. Clean thoroughly the pourer lip of the new oil tin; pour the oil slowly into the pump through the filler plug
(78).
35 87-900-943-01(E)
Page 41
TECHNICAL INFORMATION
NOTE
Monitor through the sight glass at the front of the pump that you are not exceeding the maximum oil level permitted.
CAUTION
For disposal of waste oil, it is strictly necessary to respect the currently applicable legislation on this matter.
6. To achieve a good vacuum level again, run the pump for one hour with the gas ballast open.
36 87-900-943-01(E)
Page 42
TECHNICAL INFORMATION
Unscheduled Maintenance
Card No.
103
Pump type:
DS102 1Ph, DS202 1Ph, DS302 1Ph
Frequency:
WHEN DAMAGED
Time:
30 min.
Machine status: S R
Type of action:
DISASSEMBLY
SIGHT GLASS
Item:
A
CTION AREA
Materials required: Equipment required:
• Mechanical tools
• OR gaskets
(for pumps DS102 1Ph, DS202 1Ph
and DS302 1Ph Gaskets kit p/n 949-9370)
• Sight glass
,
WARNING!
Machine safety: disconnect all power lines. Hang the card “MACHINE UNDERGOING MAINTENANCE - DO
NOT POWER ON” from the main breaker switch. When finished, remove the safety warning.
37 87-900-943-01(E)
Page 43
TECHNICAL INFORMATION
,
WARNING!
If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as
temperature of the outer surface may be in excess of 60 °C.
1. Drain off the oil from the pump.
NOTE
For a description of how to drain off the oil, see the Unscheduled Maintenance Card No. 102.
2. Unscrew the securing screws (71) and disconnect the flange (85) from the casing.
3. Take out the OR gasket (87) and the sight glass (86).
NOTE
When reassembling, replace the gaskets that you have stripped down.
CAUTION
When reassembly is complete, proceed to fill the pump with oil again following the instructions of Unscheduled Maintenance Card No. 102.
38 87-900-943-01(E)
Page 44
TECHNICAL INFORMATION
Unscheduled Maintenance
Card No.
104
Pump type:
DS102 1Ph, DS202 1Ph, DS302 1Ph
Frequency:
WHEN DAMAGED
Time:
30 min.
Machine status: S R
Type of action:
REPLACEMENT
ANTI-SUCKBACK DEVICE SHUTTER
Item:
A
CTION AREA
Materials required: Equipment required:
• Shutter • Mechanical tools
,
WARNING!
Machine safety: disconnect all power lines. Hang the card “MACHINE UNDERGOING MAINTENANCE - DO
NOT POWER ON” from the main breaker switch. When finished, remove the safety warning.
,
WARNING!
If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as
temperature of the outer surface may be in excess of 60 °C.
39 87-900-943-01(E)
Page 45
TECHNICAL INFORMATION
1. Disconnect the flange (28) from the inlet pipe line.
2. Remove the 6 securing screws (17) and remove the two half-plates (25) pressing the suction flange (28)
into its seat.
3. Remove the flange (28) and take out the piston (30) with the shutter (29) of the anti-suckback device, dis-
engage it by exerting force on arm (101). Separate the shutter (29) from the piston rod (30) simply by
pulling.
CAUTION
Be careful not to scratch the sealing surface of the shutter (29).
4. Reassemble by proceeding in the inverse order.
40 87-900-943-01(E)
Page 46
TECHNICAL INFORMATION
Unscheduled Maintenance
Card No.
105
Pump type:
DS102 1Ph, DS202 1Ph, DS302 1Ph
Frequency:
WHEN DAMAGED
Time:
30 min.
Machine status: S R
Type of action:
REPLACEMENT
ELECTRIC MOTOR AND JOINT
Item:
ACTION AREA
Materials required: Equipment required:
• Electric motor • Mechanical tools
,
WARNING!
Machine safety: disconnect all power lines. Hang the card “MACHINE UNDERGOING MAINTENANCE - DO
NOT POWER ON” from the main breaker switch. When finished, remove the safety warning.
,
WARNING!
If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as
temperature of the outer surface may be in excess of 60 °C.
41 87-900-943-01(E)
Page 47
TECHNICAL INFORMATION
1. Disconnect the motor bearing plate (8) from the support (34) by removing the four screws (4).
2. Remove the half-joint/fan (19) from the support, together with the motor (1), the plate (8).
3. Slacken the nut blocking the half-joint (19) to the motor shaft and take it out, using leverage between the
plate (8) and the back of the joint.
4. Remove the four screws (5) and separate the plate (8) from the motor (1).
5. Reassemble by proceeding in the inverse order.
Extractor
42 87-900-943-01(E)
Page 48
TECHNICAL INFORMATION
Unscheduled Maintenance
Card No.
106
Pump type:
DS102 1Ph, DS202 1Ph, DS302 1Ph
Frequency:
WHEN DAMAGED
Time:
1 hour
Machine status: S R
Type of action:
DISASSEMBLY
DISCHARGE VALVES
Item:
A
CTION AREA
Materials required: Equipment required:
• Valves (Gaskets kit) • Mechanical tools
,
WARNING!
Machine safety: disconnect all power lines. Hang the card “MACHINE UNDERGOING MAINTENANCE - DO
NOT POWER ON” from the main breaker switch. When finished, remove the safety warning.
,
WARNING!
If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as
temperature of the outer surface may be in excess of 60 °C.
43 87-900-943-01(E)
Page 49
TECHNICAL INFORMATION
1. Drain off all the oil from the pump.
NOTE
For a description of how to drain off the oil, see the Unscheduled Maintenance Card No. 102.
2. Disconnect the discharge flange from its piping.
3. Remove the nuts (3) and remove the pump casing (75).
4. Remove the securing screw (47) holding the splash guard (49) and remove it.
44 87-900-943-01(E)
Page 50
TECHNICAL INFORMATION
5. Remove the two screws (47) on the valve press-bracket (46) and remove the bracket (46), the springs
(50) and the shutters (51).
6. Reassemble by proceeding in the inverse order.
NOTE
When reassembling, replace all the gaskets stripped down.
CAUTION
When reassembly is complete, proceed to fill the pump with oil following the instructions of Unscheduled
Maintenance Card No. 102.
45 87-900-943-01(E)
Page 51
TECHNICAL INFORMATION
Unscheduled Maintenance
Card No.
107
Pump type:
DS102 1Ph, DS202 1Ph, DS302 1Ph
Frequency:
WHEN DAMAGED
Time:
1 hour
Machine status: S R
Type of action:
DISASSEMBLY
OIL CIRCULATION PUMP
Item:
A
CTION AREA
Materials required: Equipment required:
• Oil circulating pump • Mechanical tools
,
WARNING!
Machine safety: disconnect all power lines. Hang the card “MACHINE UNDERGOING MAINTENANCE - DO
NOT POWER ON” from the main breaker switch. When finished, remove the safety warning.
,
WARNING!
If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as
temperature of the outer surface may be in excess of 60 °C.
46 87-900-943-01(E)
Page 52
TECHNICAL INFORMATION
1. Drain off all the oil from the pump.
NOTE
For a description of how to drain the oil from the pump, see the Unscheduled Maintenance Card No. 102.
2. Disconnect the discharge flange from its piping.
3. Remove the nuts (3) and remove the casing from the pump (75).
4. Remove the three screws (71) connecting the closing plate (70) to the side and take it out.
5. Remove the pump gear-wheels (69).
47 87-900-943-01(E)
Page 53
TECHNICAL INFORMATION
NOTE
A magnet may be used to remove the gear-wheels.
6. Reassemble by proceeding in the inverse order.
NOTE
When reassembling, replace all the gaskets you have stripped down.
CAUTION
When reassembly is complete, proceed to fill the pump with oil again following the instructions of Unscheduled Maintenance Card No. 102.
48 87-900-943-01(E)
Page 54
TECHNICAL INFORMATION
Unscheduled Maintenance
Card No.
108
DS102 1Ph, DS202 1Ph, DS302 1Ph
Pump type:
Frequency:
WHEN DAMAGED
Time:
1 hour
Machine status: S R
DISASSEMBLY
Type of action:
ANTI-SUCKBACK DEVICE
Item:
A
CTION AREA
Materials required: Equipment required:
• Gaskets kit • Mechanical
,
WARNING!
Machine safety: disconnect all power lines. Hang the card “MACHINE UNDERGOING MAINTENANCE - DO
NOT POWER ON” from the main breaker switch. When finished, remove the safety warning.
,
WARNING!
If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as
temperature of the outer surface may be in excess of 60 °C.
49 87-900-943-01(E)
Page 55
TECHNICAL INFORMATION
1. Drain off all the oil from the pump.
NOTE
For a description of how to drain the oil, see the Unscheduled Maintenance Card No. 102.
2. Disconnect the discharge flanges from their piping.
3. Remove the locking nuts (3) and remove the casing (75) from the pump.
4. Remove the securing screw (47) and remove the splash guard (49).
5. Remove the shutter from the anti-suckback device.
NOTE
For more details on how to remove the anti-suckback device, see Unscheduled Maintenance Card No. 104.
6. Remove the screw (102), take out the arm (101) from the rod.
7. Release the spring (106) from the rod arm (108).
8. Pull the rod (108) out of the rotary feedthrough (105) sleeve.
9. Remove the two OR gaskets (104) from the rod (108) using a screwdriver, if necessary. Be careful not to
bend the rod in doing so.
10. Remove the sleeve (105) and remove it from the support (34) together with its OR gasket (103).
11. Remove the hydraulic piston (100) from its seat in the body.
12. Reassemble by proceeding in the inverse order.
50 87-900-943-01(E)
Page 56
TECHNICAL INFORMATION
NOTE
When reassembling, replace all the gaskets stripped down.
CAUTION
When reassembly is complete, proceed to fill the pump with oil again following the instructions of Unscheduled Maintenance Card No. 102.
51 87-900-943-01(E)
Page 57
TECHNICAL INFORMATION
Card No.
Unscheduled Maintenance
109
Pump type:
DS102 1Ph, DS202 1Ph, DS302 1Ph
Frequency:
WHEN DAMAGED
Time:
1 hour
Machine status: S R
Type of action:
DISASSEMBLY
PUMP BODY
Item:
Materials required:
A
CTION AREA
Equipment required:
• Gaskets kit • Mechanical tools
,
WARNING!
Machine safety: disconnect all power lines. Hang the card “MACHINE UNDERGOING MAINTENANCE - DO
NOT POWER ON” from the main breaker switch. When finished, remove the safety warning.
,
WARNING!
If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as
temperature of the outer surface may be in excess of 60 °C.
52 87-900-943-01(E)
Page 58
TECHNICAL INFORMATION
1. Drain off all the oil from the pump.
NOTE
For a description of how to drain off the oil, see the Unscheduled Maintenance Card No. 102.
2. Disconnect the discharge flange from its piping.
3. Disconnect the electric motor (1) complete with half-joint.
NOTE
For a description of how to disassemble the electric motor, see the Unscheduled Maintenance Card No. 105.
4. Unscrew the securing screw (47) and remove the valve screen (49).
5. Slacken the four nuts (64) and take out the tie-rods (44) and the complete functional block (76), lifting it
from the pump support (34) and take out the OR gaskets (27) and (45), from the gas ballast line and suction line respectively.
CAUTION
Be careful not to cut the lip of the oil seal with the sharp edges of the shaft key seat.
6. Reassemble by proceeding in the inverse order.
NOTE
When reassembling, replace all the gaskets stripped down.
CAUTION
When reassembly is complete, proceed to fill the pump with oil again following the instructions of Unscheduled Maintenance Card No. 102.
53 87-900-943-01(E)
Page 59
TECHNICAL INFORMATION
Card No.
110
Unscheduled Maintenance
Pump type:
DS102 1Ph, DS202 1Ph, DS302 1Ph
Frequency:
WHEN DAMAGED
Time:
2 hours
Machine status: S R
Type of action:
DISASSEMBLY
FUNCTIONAL BLOCK ROTORS
Item:
A
CTION AREA
Materials required: Equipment required:
• Oil shaft seal ring
• Anti-wear bushing
• OR gaskets
• 1st stage vanes
• 2nd stage vanes
• Gas Ballast shutter
(the above items of material are included in
the Major Maintenance kit)
• Mechanical tools
54 87-900-943-01(E)
Page 60
TECHNICAL INFORMATION
,
WARNING!
Machine safety: disconnect all power lines. Hang the card “MACHINE UNDERGOING MAINTENANCE - DO
NOT POWER ON” from the main breaker switch. When finished, remove the safety warning.
,
WARNING!
If you have to perform maintenance on the pump after a considerable time in operation, leave it to cool as
temperature of the outer surface may be in excess of 60 °C.
1. Drain off all the oil from the pump.
NOTE
For a description of how to drain the oil from the pump, see the Unscheduled Maintenance Card No. 102.
2. Detach the entire functional block from the pump support.
NOTE
For a description of how to detach the functional block, see the Unscheduled Maintenance Card No. 109.
55 87-900-943-01(E)
Page 61
TECHNICAL INFORMATION
3. Disassemble the discharge valves.
NOTE
For a description of how to disassemble the discharge valves, see the Unscheduled Maintenance Card No.
106.
4. Detach the end plate (61) from the rest of the pump body, exerting leverage if necessary on the reference
notches between the parts. This will give you access to the retaining valve (56) and associated spring
(57) at the gas ballast inlet.
5. Disconnect the 2nd stage stator (58), remove the two vanes (42), take the 2nd stage rotor (43) off the
shaft and take out the key (41).
6. Remove the partition wall (53) from between the 1st and 2nd stages.
7. Detach the 1st stage stator (52) from the inner side (33), pressing back on the springs (40) of the vanes
(38) to avoid the vanes from touching against the sharp corners of the body and becoming damaged.
8. Take out the 1st stage rotor (39), the vanes (38) and the springs (40).
9. Reassemble by proceeding in the inverse order.
NOTE
When reassembling, replace all the gaskets stripped down.
CAUTION
After reassembly is complete, proceed to fill the pump again with oil following the instructions of Unscheduled
Maintenance Card No. 102.
56 87-900-943-01(E)
Page 62
TECHNICAL INFORMATION
TROUBLESHOOTING AND CORRECTIVE ACTION
NOTE
If the pump breaks down or does not work well, first check thoroughly that all the standards rules listed in the
sections relevant installation and operation are currently observed.
If you cannot get sufficiently low pressure, the problem may lie with the system connected to the pump, i.e.
the vacuum chamber and inlet line.
Even when the design sizes are correct, the problems listed below are still fairly frequent:
a) faulty seals: check that the seals are fitted, are in good working order and are clean; check all
joints, taps, sight glasses, weld joints, etc.
b) unsuitable materials: avoid the use of rubber, plastic or even metal parts that are porous or permeable.
c) volatile substances: as far as possible, eliminate humidity, grease, dirt, rust, solvents (even small traces).
SYMPTOM PROBABLE CAUSE SUGGESTED REMEDY CARD
REF.
1 The pump does not start (or
stops immediately).
A) The motor-pump coupling is
defective.
Check state of the elastic joint and replace
the parts as needed.
105
B) Viscosity of the oil has in-
creased.
Examine the oil and change if necessary
(find out why it has deteriorated).
102
C) Excessive friction inside
pump.
Test the resistance to rotation, by turning
the joint by hand. If the rotors are blocked,
disassemble the pump body and check
state of the parts inside.
110
D) Electrical protections not set. Adjust the protections.
E) Oil too viscous because of
low room temperature.
Heat the oil up to a temperature of 20 °C
or use an oil recommended for low temperatures.
102
2 The pump stops (stalls). A) Seizure of some internal
parts.
Proceed as at 1-C.
B) Oil very dirty. Proceed as at 1-B.
3 The pump overheats. A) Too much friction inside. Proceed as at 1-C.
B) Oil ducts clogged inside. Try changing the oil, otherwise disassem-
ble the pump and clean it well.
102
110
4 Too much oil drained off by the
exhaust.
A) Gas Ballast device broken
(always open).
Check the device to ensure the gas ballast
is properly adjusted.
110
B) Heavy duty work (high suc-
tion pressures or very frequent
cycles).
Check condition of the oil trap filter.
C) Leak in system. Check the system (see “Note”).
5 The pump is loosing oil. A) Gaskets defective. Identify the areas where seeping occurs
and check the associated gaskets.
Refer to the
card related
to involved
item
B) Oil level window broken Replace the oil level window.
57 87-900-943-01(E)
Page 63
TECHNICAL INFORMATION
SYMPTOM PROBABLE CAUSE SUGGESTED REMEDY CARD
REF.
6 The pump is very noisy even at
steady operating conditions.
A) Exhaust valves damaged. Inspect the valves. 106
B) High suction pressure, or gas
ballast device is open.
Check the system and the gas ballast
valve (see items 4-A and 4-B).
C) Elastic star of joint is dam-
aged.
Check and replace if necessary.
D) A grain of the joint has be-
come loose.
Lock the grain after application of Loctite
222 (for slack threads).
7 When the pump is stopped, the
inlet pressure rises rapidly.
A) The anti-suckback device is
defective.
Disassemble and check the anti-suckback
device.
108
B) The cause of the problem is
not with the pump.
See “Note”.
8 The pump does not produce a
sufficient vacuum.
A) Not enough oil, or oil contaminated.
Check level and appearance of the oil.
Open the Gas Ballast for half an hour at
least; change the oil whenever necessary.
01
102
B) Oil ducts clogged inside. Proceed as at 3-B.
C) Direction of rotation inverted. Proceed as at 3-C.
D) OR gaskets communicating
with the inlet line defective.
Replace the gaskets. 109
E) Exhaust valves damaged or
out of place.
Proceed as at 6-A.
F) Insufficient oil pressure in the
lubricating circuit, preventing the
anti-suckback device from
opening.
Inspect the gears of the oil pump and
check that it is working.
107
G) Internal moving parts worn. Disassemble the pump, and replace any
worn parts.
110
H) Pump working with gas bal-
last device open.
Close the gas ballast device.
I) Anti-suckback valve fails to
open.
Disassemble the suction flange and check
the device.
104
108
J) Parts of the functional block
not in perfect contact because
of deposits of dirt or failure to
put a plug on the service holes.
Disassemble and check condition of the
part surfaces and that plugs have been
used.
110
K) The cause of the problem is
not with the pump.
See “Note”.
58 87-900-943-01(E)
Page 64
TECHNICAL INFORMATION
SPARE PARTS LIST
OTHER SPARE PARTS P/N
DS102 1Ph DS202 1Ph DS302 1Ph
MINOR MAINTENANCE KIT (*) X X X 949-9370
MINOR MAINTENANCE KIT (*) 949-9371
MAJOR MAINTENANCE KIT (**) X 949-9380
MAJOR MAINTENANCE KIT (**) X X 949-9381
MAJOR MAINTENANCE KIT (**) 949-9382
ACCESSORY ITEM ON EXHAUST Q.TY P/N
DS102 1Ph DS202 1Ph DS302 1Ph
OIL MIST ELIMINATOR KF25 X X X 949-9395
OIL MIST CARTRIDGE (Q.ty 2) X X X 949-9394
RECOMMENDED OIL P/N Q.TY
Varian GP oil (Europe) 949-9390 1 liter
Varian GP oil (Europe) 949-9391 2 liters
Varian GP oil (USA) K7516301 1 liter
Varian GP oil (USA) K7516302 1 gallon
(*) Contains all the valves, O-rings and seals to refurbish the pump to vacuum integrity.
(**) Includes all the items of the minor maintenance kit plus the vanes.
59 87-900-943-01(E)
Page 65
TECHNICAL INFORMATION
60 87-900-943-01(E)
Varian S.p.A.
Via F.lli Varian, 54
10040 Leinì (TO) - Italy
Tel: +39-011-9979-111
Fax:+39-011-9979-237
http://www. vari aninc.com
Varian GP - OIL - Scheda di sicurezza del materiale
DATA REVISIONE: DICEMBRE 2002
1. Sostanza/Identificativo ditta NOME PRODOTTO: VARIAN GP-OIL 949-9390/949-9391
NUMERO CAS: 64742-65-0
2. Composizione/Ingredienti NOME GENERICO: Olio paraffinico neutro al 100%
raffinato con solvente
FORMULA CHIMICA: (CH2)n 20 =< n =< 40
INGREDIENTI PERICOLOSI: Nessuno
3. Identificazione dei rischi POSSIBILI VIE DI INGRESSO: Ingerimento, inalazione di nebbie d'olio
Il prodotto non è classificato
come pericoloso.
EFFETTI ACUTI: L'esposizione alle nebbie d'olio
può causare nausea e irritazione
agli occhi.
Non sono stati eseguiti studi
dettagliati, tuttavia non si ritiene che
il materiale possa causare dermatiti
o avere effetti sensibilizzanti.
EFFETTI CRONICI: Sconosciuti
4. Misure di primo intervento PELLE: Lavare con acqua e sapone.
OCCHI: Sciacquare con abbondante
acqua. Contattare un medico!
INGERIMENTO: Se la vittima è cosciente, som-
ministrare liquidi ed indurre il
vomito. Contattare un medico!
Per piccole quantità penetrate in
bocca è sufficiente risciacquare.
5. Misure antincendio PUNTO DI INFIAMMABILITA': >213° C
METODO USATO: Cleveland a vaso aperto
LIMITI DI ESPLOSIVITÀ: INFERIORE: Sconosciuto
SUPERIORE: Sconosciuto
MEZZO ESTINGUENTE: Acqua nebulizzata, schiuma chi-
mica o anidride carbonica.
Materiale NFPA Classe III B.
Page 66
TECHNICAL INFORMATION
61 87-900-943-01(E)
Varian S.p.A.
Via F.lli Varian, 54
10040 Leinì (TO) - Italy
Tel: +39-011-9979-111
Fax:+39-011-9979-237
http://www. vari aninc.com
PROCEDURE ANTINCENDIO
PARTICOLARI: Quando si opera per spegnere
un incendio in ambiente chiuso,
indossare sempre il respiratore; la
combustione incompleta di questo
materiale genera monossido di
carbonio!
RISCHI DI INCENDIO E/O
ESPLOSIONE PARTICOLARI: Nessuno
6. Misure contro le perdite accidentali PROCEDURE DA SEGUIRE
NEL CASO DI PERDITE: Piccole perdite possono essere
asciugate con uno strofinaccio.
Perdite maggiori devono essere
immediatamente asportate utilizzando un mezzo assorbente.
7. Movimentazione e magazzinaggio MOVIMENTAZIONE: Nessun rischio conosciuto
MAGAZZINAGGIO: Nessun rischio conosciuto
8. Controlli dell'esposizione/ MISURE DI CONTROLLO
Protezione personale A LIVELLO INGEGNERIA: Non necessarie
PROTEZIONE RESPIRATORIA:Vedere le note sulla venti-
lazione sotto citate.
GUANTI PROTETTIVI: Sì - in gomma impermeabile all'olio.
OCCHIALI PROTETTIVI: Sì - dotati di schermi laterali.
ALTRI MEZZI PROTETTIVI: Non necessari in condizioni di
utilizzo normali.
9. Proprietà chimiche e fisiche STATO FISICO: Liquido
PRESSIONE DEL VAPORE: < 0001 Torr a 25° C
PUNTO DI EBOLLIZIONE: >200° C
VELOCITÀ DI EVAPORAZIONE (etere=1): Nulla
DENSITÀ DEL VAPORE: Circa 14
% PESO COMP. VOLATILI: Nulla
DENSITA' RELATIVA: 0.87
VISCOSITA': 54 cst a 40° C
SOLUBILITA' IN ACQUA: Nulla
ASPETTO: Liquido viscoso giallo pallido
con leggero odore di petrolio
Page 67
TECHNICAL INFORMATION
62 87-900-943-01(E)
Varian S.p.A.
Via F.lli Varian, 54
10040 Leinì (TO) - Italy
Tel: +39-011-9979-111
Fax:+39-011-9979-237
http://www. vari aninc.com
10. Stabilità & Reattività STABILITÀ: Materiale stabile
CONDIZIONI DA EVITARE: Esposizione continua a tempe-
rature > 200° C
INCOMPATIBILITÀ
(MATERIALI DA EVITARE): Ossidanti potenti
PRODOTTI DI DECOMPO-
SIZIONE PERICOLOSI: La combustione incompleta può
produrre monossido di carbonio.
11. Informazioni tossicologiche LD50 ORALE ACUTA(MG/KG): Nessuna nota
LD 50 CUTANEA ACUTA: Nessuna
INALAZIONE ACUTA: Il limite degli USA di esposizione
alle nebbie d'olio TWA 8 ore è di
5 mg al metro cubo.
12. Informazioni ecologiche AMBIENTALI: Non sono previsti effetti am-
bientali negativi nel caso di uso e
smaltimento secondo le indicazioni.
MOBILITÀ: Non volatile e non solubile in
acqua.
DEGRADABILITÀ: Lentamente biodegradabile in
condizioni aerobiche.
13. Smaltimento Il prodotto e il relativo imballo
devono essere smaltiti in base
alla locale normativa vigente.
14. Classificazione di trasporto Non classificato come a rischio
per trasporto via aerea, nave o
terra.
15. Informazioni normative Nessuna
16. Altre informazioni VALUTAZIONE NFPA
INFIAMMABILITÀ 1
RISCHIO SALUTE 0
REATTIVITÀ 0
RISCHI
PARTICOLARI
NESSUNO
Page 68
TECHNICAL INFORMATION
63 87-900-943-01(E)
Varian S.p.A.
Via F.lli Varian, 54
10040 Leinì (TO) - Italy
Tel.: +39-011-9979-111
Fax:+39-011-9979-237
http://www. vari aninc.com
Varian GP - OIL – Datenblatt zur Materialsicherheit
REVISIONSDATUM: DEZEMBER 2002
1. Substanz/Herstelleridentifikation PRODUKTNAME: VARIAN GP-OIL 949-9390/949-9391
CAS-NUMMER: 64742-65-0
2. Zusammensetzung/Inhaltsstoffe ALLGEMEINER NAME: 100 % neutrales mit
Lösungsmittel raffiniertes Parafinöl
CHEMISCHE FORMEL: (CH2)n 20 =< n =< 40
GEFÄHRLICHE INHALTS-
STOFFE: Keine
3. Gefahrenidentifikation MÖGLICHE AUFNAHME: Verschlucken, Einatmen von Ölnebel
Dieses Produkt ist nicht als
gefährlich klassifiziert.
AKUTE WIRKUNGEN: Sich öligen Dämpfen
auszusetzen kann Übelkeit und
Augenreizungen verursachen.
Es wurden keine detaillierten
Untersuchungen durchgeführt, es
wird jedoch nicht erwartet, dass
das Material Dermatitis verursacht
oder ein Sensibilisator ist.
CHRONISCHE WIRKUNGEN: Unbekannt
4. Erste-Hilfe-Maßnahmen HAUT: Mit Seife und Wasser waschen.
AUGEN: Mit Wasser ausspülen. Einen
Arzt verständigen!
VERSCHLUCKEN: Flüssigkeit verabreichen und
Erbrechen herbeiführen, wenn
das Opfer bei Bewusstsein ist.
Einen Arzt verständigen! Kleine
Mengen im Mund können
ausgewaschen werden.
5. Brandschutzmaßnahmen FLAMMPUNKT: > 213° C
METHODE: Cleveland-Verfahren im offenen
Tiegel
EXPLOSIONSGRENZEN: UNTERE: Unbekannt
OBERE: Unbekannt
LÖSCHMITTEL: Wassernebel, chemischer
Schaum oder Kohlendioxid.
Material NFPA-Klasse III B.
Page 69
TECHNICAL INFORMATION
64 87-900-943-01(E)
Varian S.p.A.
Via F.lli Varian, 54
10040 Leinì (TO) - Italy
Tel.: +39-011-9979-111
Fax:+39-011-9979-237
http://www. vari aninc.com
SPEZIELLE Bei Feuer in geschlossenen
LÖSCHMETHODEN: Räumen Atemgerät tragen.
Bei unvollständiger Verbrennung
dieses Materials entsteht
Kohlenmonoxid!
BESONDERE BRAND- ODER Keine
EXPLOSIONSGEFAHREN:
6. Bei unvorgesehener Freisetzung BEI FREISETZUNG ZU Kleine Verluste können mit
BEFOLGENDE einem Lappen aufgewischt
VORGEHENSWEISEN: werden.
Große Verluste sollten umgehend
mit einem aufsaugenden Material
aufgenommen werden.
7. Handhabung und Lagerung HANDHABUNG: Nicht bekannt
LAGERUNG: Nicht bekannt
8. Expositionskontrolle/Personenschutz TECHNISCHE KONTROLL- Nicht erforderlich
MASSNAHMEN:
ATEMSCHUTZ: Siehe Anmerkungen zur
Belüftung unten.
SCHUTZHANDSCHUHE: Ja – a u s ö l undurchlässigem Gummi.
SCHUTZBRILLE: Ja – Brille sollte seitliche
Abschirmungen haben.
WEITERE SCHUTZ- Bei normaler Verwendung nicht
AUSRÜSTUNG: erforderlich.
9. Physikalische und chemische PHYSIKALISCHE Flüssig
Eigenschaften BESCHAFFENHEIT:
DAMPFDRUCK: < 0001 Torr bei 25° C
SIEDEPUNKT: > 200° C
VERDAMPFUNGS-
GESCHWINDIGKEIT (Äther=1): Null
DAMPFDICHTE: ungefähr 14
GWT % FLÜCHTIGE Null
BESTANDTEILE:
RELATIVE DICHTE: 0.87
VISKOSITÄT: 54 cst bei 40° C
LÖSLICHKEIT IN WASSER: Null
AUSSEHEN: Blassgelbe viskose Flüssigkeit
mit schwachem Petroleumgeruch.
Page 70
TECHNICAL INFORMATION
65 87-900-943-01(E)
Varian S.p.A.
Via F.lli Varian, 54
10040 Leinì (TO) - Italy
Tel.: +39-011-9979-111
Fax:+39-011-9979-237
http://www. vari aninc.com
10. Stabilität und Reaktivität STABILITÄT: Das Material ist stabil
ZU VERMEIDENDE BE- Kontinuierlich
DINGUNGEN: Temperaturen von > 200°C
aussetzen
INKOMPATIBILITÄT Starke Oxidationsmittel
(ZU VERMEIDENDE MATERIALIEN)
GEFÄHRLICHE ZERFALLS- Unvollständige Verbrennung
PRODUKTE: erzeugt Kohlenmonoxid.
11. Toxikologische Informationen AKUT ORAL LD50 (MG/KG): Nicht bekannt
AKUT DERMAL LD 50: Keine
AKUTES EINATMEN: Der US-amerikanische Grenzwert
für die Ölnebelexposition TWA 8
Stunden beträgt 5 mg pro
Kubikmeter.
12. Umweltinformationen UMWELT: Bei vorgeschriebener
Verwendung/Entsorgung sind
keine Umweltschäden zu erwarten.
FLIESSFÄHIGKEIT: Nicht flüchtig und nicht in
Wasser löslich.
ABBAU: Unter aeroben Bedingungen
langsam biologisch abbaubar.
13. Entsorgung Das Produkt und die
Verpackung müssen in
Übereinstimmung mit den geltenden
Bestimmungen entsorgt werden.
14. Transportklassifizierung Nicht als für den Luft-, See-
oder Straßentransport gefährlich
eingestuft.
17. Informationen zu geltenden Bestimmungen Keine
18. Weitere Informationen NFPA-BWERTUNG
ENTZÜNDLICHKEIT 1
GESUNDHEITSRISIKO 0
REAKTIVITÄT 0
BESONDERE GEFAHREN KEINE
Page 71
TECHNICAL INFORMATION
66 87-900-943-01(E)
Varian S.p.A.
Via F.lli Varian, 54
10040 Leinì (TO) - Italy
Tél.: +39-011-9979-111
Fax:+39-011-9979-237
http://www. vari aninc.com
Varian GP - OIL - Fiche technique de sécurité sur les matériaux
DATE DE RÉVISION DÉCEMBRE 2002
1. Substance/Identification entreprise NOM DE PRODUIT: VARIAN GP-OIL 949-9390/949-9391
NUMERO CAS : 64742-65-0
2. Composition/Ingrédients NOM GÉNÉRIQUE: 100% Huile de paraffine neutre
de raffinage avec solvant
FORMULE CHIMIQUE: (CH2)n 20 =< n =< 40
INGRÉDIENTS DANGEREUX: Aucun
3. Identification de risques VOIES POSSIBLES Ingestion, inhalation de vapeurs
D'ABSORPTION: d'huile. Ce produit n'est pas
classifié comme dangereux.
EFFETS AIGUS: L'exposition aux vapeurs d'huiles
peut causer des nausées et
l'irritation des yeux.
Des études détaillées n'ont pas
été effectuées, mais on ne
s'attend pas à ce que le matériel
provoque des dermatites ou une
sensibilisation de la peau.
EFFETS CHRONIQUES: Inconnue
4. Premiers soins PEAU: Laver avec de l'eau savonneuse.
YEUX: Rincer avec de l'eau. Contacter
un médecin!
INGESTION: Faire absorber des liquides et
provoquer le vomissement si la
victime est consciente. Contacter
un médecin ! De petites quantités
présentes dans la bouche peuvent
être éliminées par lavage.
5. Mesures de lutte contre les incendies POINT D'INFLAMMABILITÉ: > 213° C
MÉTHODE EMPLOYÉE: Cleveland Open Cup
LIMITES D'EXPLOSION: INFÉRIEURE : Inconnue
SUPÉRIEURE : Inconnue
MOYENS D'EXTINCTION: Eau nébulisée, mousse chimique
ou gaz carbonique. Matériau
Classe III B NFPA.
Page 72
TECHNICAL INFORMATION
67 87-900-943-01(E)
Varian S.p.A.
Via F.lli Varian, 54
10040 Leinì (TO) - Italy
Tél.: +39-011-9979-111
Fax:+39-011-9979-237
http://www. vari aninc.com
PROCÉDURES SPÉCIALES Porter un respirateur en
DE LUTTE CONTRE combattant des incendies dans
LES INCENDIES : des espaces fermés; la
combustion incomplète de ce
matériau produit de l'oxyde de
carbone!
DANGERS EXCEPTIONNELS
DE FEU ET/OU D'EXPLOSION Aucun
6. Mesures en cas d'émissions PROCÉDURES A SUIVRE De petites quantités peuvent
accidentelles EN CAS D'ÉMISSIONS: être essuyées à l'aide d'un
chiffon. De grandes quantités
doivent être enlevées à l'aide
d'un absorbant.
7. Manipulation et stockage MANIPULATION : Aucun risque connu
STOCKAGE : Aucun risque connu
8. Contrôles de l'exposition / MESURES DE CONTRÔLE Aucune mesure nécessaire
Protection personnelle TECHNIQUE
PROTECTION RESPIRATOIRE: Voir les notes sur la ventilation
ci-dessous.
GANTS DE PROTECTION: Oui - en caoutchouc imperméable
à l'huile.
LUNETTES DE SÉCURITÉ: Oui - les lunettes doivent avoir
des oeillères latérales.
AUTRE MATÉRIEL DE Aucun n'est nécessaire lors
PROTECTION: d'une utilisation normale.
9. Propriétés physiques et chimiques ÉTAT PHYSIQUE: Liquide
PRESSION DE VAPEUR: < 0001 Torr à 25° C
POINT D'ÉBULLITION: > 200° C
TAUX D'ÉVAPORATION (éther=1): Zéro
DENSITÉ DE VAPEUR: environ 14
% PRODUITS VOLATILES EN POIDS: Zéro
POIDS SPÉCIFIQUE: 0.87
VISCOSITÉ: 54 cst à 40° C
HYDROSOLUBILITÉ: Zéro
ASPECT: Liquide visqueux jaune pâle avec
une légère odeur de pétrole.
Page 73
TECHNICAL INFORMATION
68 87-900-943-01(E)
Varian S.p.A.
Via F.lli Varian, 54
10040 Leinì (TO) - Italy
Tél.: +39-011-9979-111
Fax:+39-011-9979-237
http://www. vari aninc.com
10. Stabilité et réactivité STABILITÉ: Le matériau est stable
CONDITIONS À ÉVITER: Exposition continue aux
températures > à 200° C
INCOMPATIBILITÉ
(MATÉRIAUX À ÉVITER): Oxydants forts
PRODUITS DE La combustion incomplète peut
DÉCOMPOSITION produire de l'oxyde de carbone.
DANGEREUX:
11. Informations toxicologiques LD50 ORAL AIGU (MG/KG): Aucun risque connu
LD 50 CUTANÉ AIGU: Aucun
INHALATION AIGUË: La limite prévue par
l'administration des USA pour
TWA de 8 heures d'exposition
aux vapeurs d'huile est de 5 mg
par mètre cube.
12. Informations écologiques ENVIRONNEMENT : Si le produit est utilisé et/ou mis
au rebut de la façon indiquée,
aucun effet défavorable sur
l'environnement n'est prévu.
MOBILITÉ : Non volatile et insoluble dans
l'eau.
DEGRADABILITÉ : Lentement biodégradable en
conditions aérobiques
13. Considérations pour la mise au rebut Le produit et le conditionnement
doivent être mis au rebut dans le
respect des règlements
nationaux, régionaux et locaux.
14. Classification pour le transport N'est pas classifié comme
dangereux pour le transport par
air, mer ou route.
15. Informations sur le réglementation Aucune
16. Autres informations EVALUATION NFPA
INFLAMMABILITÉ 1
RISQUE SANITAIRE 0
RÉACTIVITÉ 0
RISQUES SPÉCIAUX AUCUN
Page 74
TECHNICAL INFORMATION
69 87-900-943-01(E)
Varian S.p.A.
Via F.lli Varian, 54
10040 Leinì (TO) - Italy
Ph: +39-011-9979-111
Fax:+39-011-9979-237
http://www. vari aninc.com
Varian GP - OIL - Material Safety Data Sheet
REVISION DATE DECEMBER 2002
1. Substance/Company Identification PRODUCT NAME: VARIAN GP-OIL 949-9390/949-9391
CAS NUMBER: 64742-65-0
2. Composition/Ingredients GENERIC NAME: 100% Solvent refined Neutral
paraffinic oil
CHEMICAL FORMULA: (CH2)n 20 =< n =< 40
HAZARDOUS INGREDIENTS: None
3. Hazards Identification POSSIBLE ENTRY ROUTES: Ingestion, inhalation of oil mists
This product is not classified as
hazardous.
ACUTE EFFECTS: Exposure to oils mists may
cause nausea and eye irritation.
Detailed studies have not been
made, but material is not
expected to be dermatitic or a
sensitizer.
CHRONIC EFFECTS: Unknown
4. First Aid Measures SKIN: Wash with soap and water.
EYES: Flush with water. Contact a
physician!
INGESTION: Give liquids and induce vomiting
if victim is conscious. Contact a
physician! Small amounts in
mouth may be washed out.
5. Fire Fighting Measures FLASH POINT: >213° C
METHOD USED: Cleveland Open Cup
EXPLOSIVE LIMITS: LOWER: Unknown
UPPER: Unknown
EXTINGUISHING MEDIA: Water fog, chemical foam or
carbon dioxide. NFPA Class III B
Material.
Page 75
TECHNICAL INFORMATION
70 87-900-943-01(E)
Varian S.p.A.
Via F.lli Varian, 54
10040 Leinì (TO) - Italy
Ph: +39-011-9979-111
Fax:+39-011-9979-237
http://www. vari aninc.com
SPECIAL FIREFIGHTING
PROCEDURES: Wear breathing gear when
fighting fires in enclosed
spaces; incomplete combustion
of this material produces carbon
monoxide!
UNUSUAL FIRE AND/OR
EXPLOSION HAZARDS: None
6. Accidental Release Measures PROCEDURES TO BE FOLLOWED
IN EVENT OF RELEASE: Small spills may be wiped up
with a rag. Large spills should
be picked up immediately with
an absorbent.
7. Handling and Storage HANDLING: None Known
STORAGE: None Known
8. Exposure Controls/Personal Protection ENGINEERING CONTROL
MEASURES: None required
RESPIRATORY PROTECTION: See notes on ventilation below.
PROTECTIVE GLOVES: Yes - made of oil-impermeable
rubber.
SAFETY GLASSES/GOGGLES: Yes - glasses should have side
shields.
OTHER PROTECTIVE EQUIPMENT: None should be required
under normal use.
9. Physical & Chemical Properties PHYSICAL STATE: Liquid
VAPOR PRESSURE: < 0001 Torr at 25° C
BOILING POINT: >200° C
EVAPORATION RATE (ether=1): Nil
VAPOR DENSITY: approximately 14
WT%VOLATILES: Nil
SPECIFIC GRAVITY: 0.87
VISCOSITY: 54 cst at 40° C
SOLUBILITY IN WATER: Nil
APPEARANCE: Pale yellow viscous liquid with
a faint petroleum odor.
Page 76
TECHNICAL INFORMATION
71 87-900-943-01(E)
Varian S.p.A.
Via F.lli Varian, 54
10040 Leinì (TO) - Italy
Ph: +39-011-9979-111
Fax:+39-011-9979-237
http://www. vari aninc.com
10. Stability & Reactivity STABILITY: Material is stable
CONDITIONS TO AVOID: Continuous exposure to
temperatures > 200° C
INCOMPATIBILITY
(MATERIALS TO AVOID): Strong oxidizers
HAZARDOUS DECOMPOSITION
PRODUCTS: Incomplete combustion may
produce carbon monoxide.
11. Toxicological Information ACUTE ORAL LD50 (MG/KG): None known
ACUTE DERMAL LD 50: None
ACUTE INHALATION: US Gov’t 8 hr TWA limit for
exposure to oil mists is 5 mg per
cubic meter.
12. Ecological Information ENVIRONMENTAL: When used and/or disposed of
as indicated, no adverse
environmental effects are
foreseen.
MOBILITY: Non-volatile and insoluble in
water.
DEGRADABILITY: Slowly biodegradable in aerobic
conditions.
13. Disposal Considerations Product and packaging must be
disposed of in accordance with
Federal, State and local
regulations.
14. Transport Classification Not classified as hazardous for
transport by air, sea or road.
15. Regulatory Information None
16. Other Information NFPA RATING
FLAMMABILITY 1
HEALTH HAZARD 0
REACTIVITY 0
SPECIAL HAZARD NONE
Page 77
Request for Return
1. A Return Authorization Number (RA#) WILL NOT be issued until this Request for Return is completely filled out,
signed and returned to Varian Customer Service.
2. Return shipments shall be made in compliance with local and international Shipping Regulations (IATA, DOT, UN).
3. The customer is expected to take the following actions to ensure the
Safety
of workers at Varian: (a) Drain any oils or
other liquids, (b) Purge or flush all gasses, (c) Wipe off any excess residues in or on the equipment, (d) Package the
equipment to prevent shipping damage, (for Advance Exchanges please use packing material from replacement unit).
4. Make sure the shipping documents clearly show the RA# and then return the package to the Varian location nearest you.
North and South America
Varian Vacuum Technologies
121 Hartwell Ave
Lexington, MA 02421
Phone : +1 781 8617200
Fax: +1 781 8609252
Europe and Middle East
Varian SpA
Via Flli Varian 54
10040 Leini (TO) – ITALY
Phone: +39 011 9979111
Fax: +39 011 9979330
Asia and ROW
Varian Vacuum Technologies
Local Office
CUSTOMER INFORMATION
Company name: ..………………….……..……………….………………………………..……………………...…………..….
Contact person: Name: ……………………………………..… Tel: ……………………….…...…………….….…....
Fax: …………………………….…...…..…… E-Mail: ..……………………..…………..…..…..…..
Ship Method: …………….……....…… Shipping Collect #: ………….…..………… P.O.#: ………………….…......………..
Europe only: VAT reg. Number: ………………..……………... USA only: Taxable Non-taxable
Customer Ship To: ………………………….……… Customer Bill To: …………………..……………...
……………..…………………... ..………………………………...
………………..………………... ..………………………………...
PRODUCT IDENTIFICATION
Product Description Varian P/N Varian S/N Purchase Reference
TYPE OF RETURN (check appropriate box)
Paid Exchange Paid Repair
Warranty Exchange
Warranty Repair
Loaner Return
Credit Shipping Error
Evaluation Return
Calibration
Other ……………….
HEALTH and SAFETY CERTIFICATION
Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or
RADIOACTIVITY. Call Varian Customer Service to discuss alternatives if this requirement presents a problem.
The equipment listed above (check one):
HAS NOT
been exposed to any toxic or hazardous materials
OR
HAS
been exposed to any toxic or hazardous materials. In case of this selection, check boxes for any materials that
equipment was exposed to, check all categories that apply:
Toxic Corrosive Reactive Flammable Explosive Biological Radioactive
List all toxic or hazardous materials. Include product name, chemical name and chemical symbol or formula.
.……………………………………………………………………………………………………………………..
Print Name: …………………………………. Customer Authorized Signature: ……………...…………………….
Print Title: …………………………………... Date: ..…../..…../……
NOTE:
If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed,
the customer
will be held responsible
for all costs incurred to ensure the safe handling of the product, and
is liable
for any harm or injury to Varian
employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
Do not write below this line
Notification (RA)#: ……………………….……….. Customer ID#: ……….…………. Equipment #: ……………………..
Page 78
Request for Return
FAILURE REPORT
TURBO PUMPS and TURBOCONTROLLERS
POSITION PARAMETERS
Does not start
Noise
Vertical
Power: Rotational Speed:
Does not spin freely
Vibrations
Horizontal
Current: Inlet Pressure:
Does not reach full speed
Leak
Upside-down
Temp 1: Foreline Pressure:
Mechanical Contact
Overtemperature Other: Temp 2: Purge flow:
Cooling defective …………………. OPERATION TIME:
TURBOCONTROLLER ERROR MESSAGE:
ION PUMPS/CONTROLLERS VALVES/COMPONENTS
Bad feedthrough
Poor vacuum
Main seal leak
Bellows leak
Vacuum leak
High voltage problem
Solenoid failure
Damaged flange
Error code on display
Other
Damaged sealing area
Other
Customer application:
Customer application:
LEAK DETECTORS INSTRUMENTS
Cannot calibrate
No zero/high backround
Gauge tube not working Display problem
Vacuum system unstable
Cannot reach test mode
Communication failure
Degas not working
Failed to start
Other
Error code on display
Other
Customer application:
Customer application:
PRIMARY PUMPS DIFFUSION PUMPS
Pump doesn’t start
Noisy pump (describe)
Heater failure
Electrical problem
Doesn’t reach vacuum
Over temperature
Doesn’t reach vacuum
Cooling coil damage
Pump seized
Other
Vacuum leak
Other
Customer application:
Customer application:
FAILURE DESCRIPTION
(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
NOTA: Su richiesta questo documento è disponibile anche in Tedesco, Italiano e Francese.
REMARQUE : Sur demande ce document est également disponible en allemand, italien et français.
HINWEIS: Auf Aufrage ist diese Unterlage auch auf Deutsch, Italienisch und Französisch erhältlich.
Page 79
Sales and Service Offices
Argentina
Varian Argentina Ltd.
Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel: (54) 1 783 5306
Fax: (54) 1 786 5172
Benelux
Varian Vacuum Technologies
Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel: (31) 343 469910
Fax: (31) 343 469961
Brazil
Varian Industria e Comercio Ltda.
Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel: (55) 11 3845 0444
Fax: (55) 11 3845 9350
Canada
Central coordination through:
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free # 1 (800) 882 7426
China
Varian Technologies - Beijing
Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 100031 P.R. China
Tel: (86) 10 6641 1530
Fax: (86) 10 6641 1534
France and Wallonie
Varian s.a.
7 avenue des Tropiques
Z.A. de Courtaboeuf - B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: (33) 1 69 86 38 13
Fax: (33) 1 69 28 23 08
Germany and Austria
Varian Deutschland GmbH
Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: (49) 6151 703 353
Fax: (49) 6151 703 302
07/03
India
Varian India PVT LTD
101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: (91) 11 5548444
Fax: (91) 11 5548445
Italy
Varian Vacuum Technologies
via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9 111
Fax: (39) 011 997 9 350
Japan
Varian Vacuum Technologies
Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: (81) 3 5232 1253
Fax: (81) 3 5232 1263
Korea
Varian Technologies Korea, Ltd
Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: (82) 2 3452 2452
Fax: (82) 2 3452 2451
Mexico
Varian, S. de R.L. de C.V.
Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: (52) 5 523 9465
Fax: (52) 5 523 9472
Taiwan
Varian Technologies Asia Ltd.
14F-6, No.77, Hsin Tai Wu Rd., Sec. 1
Hsi chih, Taipei Hsien
Taiwan, R.O.C.
Tel: (886) 2 2698 9555
Fax: (886) 2 2698 9678
UK and Ireland
Varian Ltd.
28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel: (44) 1932 89 8000
Fax: (44) 1932 22 8769
United States
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Other Countries
Varian Vacuum Technologies
via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9 111
Fax: (39) 011 997 9 350
Customer Support & Service:
North America
Tel: 1 (800) 882 7426 (toll-free)
vtl.technical.support@varianinc.com
Europe
Tel: 00 (800) 234 234 00 (toll-free)
vtt.technical.support@varianinc.com
Japan
Tel: (81) 3 5232 1253 (dedicated line)
vtj.technical.support@varianinc.com
Korea
Tel: (82) 2 3452 2452 (dedicated line)
vtk.technical.support@varianinc.com
Taiwan
Tel: 0 (800) 051 342 (toll-free)
vtw.technical.support@varianinc.com
Worldwide Web Site, Catalog
and Order On-line:
www.varianinc.com
Representative in most countries
Loading...