NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
Component
Leak Detector
vacuum technologies
OPERATIONS MANUAL
Manual No. 699909694
Revision F
April 2007
Page 2
Model 990 dCLD II
Component Leak Detector
shown with Optional Front Control Panel
DRAFT 4/2007
Contra-Flow, MacroTorr, ConvecTorr, TriScroll, and VacuSolv are trademarks or registered trademarks of
Vacuum Technologies.
Alconox is a registered trademark of Alconox, Inc.
Apiezon is a registered trademark of M&I Materials Ltd.
Loctite and PST are registered trademarks of Loctite Corporation.
Scotch-Brite is a trademark of 3M Corporation.
Slo-Blo is a registered trademark of Littelfuse, Inc.
Copyright 2007
Varian, Inc.
Page 3
Model 990 dCLD II Component Leak Detector
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any
warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements
made by any person, including representatives of Seller, which are inconsistent or in conflict with the
terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an
officer of Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or
adjustment, written authorization from Seller or its authorized representative for the return and
instructions as to how and where these Products should be returned must be obtained. Any Product
returned to Seller for examination shall be prepaid via the means of transportation indicated as
acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and
any warranty claim on any item that has been altered or has been returned by non-acceptable means of
transportation. When any Product is returned for examination and inspection, or for any other reason,
Customer shall be responsible for all damage resulting from improper packing or handling, and for loss
in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole
responsibility for determining the cause and nature of failure, and Seller’s determination with regard
thereto shall be final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at its expense; in addition, a charge for testing and examination
may be made on Products so returned.
C.6.1 Test Piece Evacuated (Figure C-1a and Figure C-1b) ..............................................C-6
C.6.2 Test Piece Pressurized (Figure C-2) .........................................................................C-6
C.6.3 Test Piece Already Sealed (Figure C-3) ....................................................................C-7
C.7 Mass Spectrometer Leak Detector—Simplified Description................................................C-8
Index ................................................................................................................................................. I-1
Sales and Service Offices
viii
Page 9
Model 990 dCLD II Component Leak Detector
List of Figures
Figure DescriptionPage
1-1Control Unit Front Panel .....................................................................................................1-2
1-2Control Unit Rear Panel......................................................................................................1-3
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
DECLARATION OF CONFORMITY
Varian, Inc.
121 Hartwell Avenue
Lexington, MA, 02421-3133 USA
Model 990 dCLD II Component Leak Detector
to which this declaration relates is in conformity with the following standards:
• EN61010-1-1993
Safety requirements for electrical equipment for control and laboratory use, incorporating amendments
No. 1 and 2
per the provisions of the Low Voltage Directive 73/23/EEC of 19 February 1973 as Amended by 93/68/EEC, Article 13, of 22 July 1993.
• CAN/CSA-C22.2 No. 1010-1, 1992 - Standard for Electrical Equipment for Laboratory Use: Part 1: General Requirements.
• UL3101-1:1993, - Standard for Electrical Equipment for Laboratory Use: Part 1: General Requirements.
Declaration of Conformity
The authorized representative located within Community is:
Va rian Vacuum Technologies (Torino)
Var i an S.p . A
Via F.lli Varian.54
Leini (Torino) - Italy
Tel: (39) 011 997 9 111
Fax: (39) 011 997 9 350
Frederick C. Campbell
Operations Manager
Varian, Inc.
Lexington, Massachusetts, USA
Page 14
Model 990 dCLD II Component Leak Detector
Preface
Hazard and Safety Information
This manual uses the following standard safety protocols:
WARNINGThe warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
CAUTIONThe caution messages are displayed before procedures, which
if not followed, could cause damage to the equipment.
NOTEThe notes contain important information.
/2007
Operators and service personnel must be aware of all hazards associated with this
equipment. They must know how to recognize hazardous and potentially hazardous
conditions, and know how to avoid them. The consequences of unskilled, improper, or
careless operation of the equipment can be serious. This product must only be operated and
maintained by trained personnel. Every operator or service person must read and
thoroughly understand operation/maintenance manuals and any additional information
DRAFT 4
provided by Varian. All warning and cautions should be read carefully and strictly observed.
Consult local, state, and national agencies regarding specific requirements and regulations.
Address any safety, operation, and/or maintenance questions to your nearest Varian office.
xiv
Page 15
Model 990 dCLD II Component Leak Detector
Vacuum Equipment and Cleanliness
Cleanliness is vital when servicing any vacuum equipment.
CAUTION❑ Do not use silicone oil or silicone grease.
❑ Use powder-free butyl or polycarbonate gloves to prevent
❑ Do not clean any aluminum parts with Alconox
NOTENormally, it is unnecessary to use vacuum grease.
However, if it must be used, avoid silicone types, and
use it sparingly. Apiezon
(Varian Part Number 695400004).
O-ring Care
When removing, checking, or replacing O-rings, keep in mind the following:
skin oils from getting on vacuum surfaces.
®
. Alconox
is not compatible with aluminum and will cause damage.
®
L grease is recommended
NOTEVarian recommends replacing all O-rings during routine
maintenance or during any maintenance procedure requiring
that O-rings be removed.
CAUTIONRemove O-rings carefully with your fingers. Do not use metal
tools for this task. Follow these guidelines to prevent scratching
of any sealing surfaces:
❑ Wipe all O-rings clean with a lint-free cloth before
installation to ensure that no foreign matter is present to
impair the seal.
❑ Do not use grease or use other substances on O-rings that
will come in contact with the spectrometer tube.
❑ Do not use alcohol, methanol, or other solvents on O-rings.
To do so causes deterioration and reduces the O-ring’s
ability to hold a vacuum.
❑ In allowable situations, apply a small amount of Apiezon
grease and wipe the O-rings “shiny” dry.
DRAFT 4/2007
®
L
xv
Page 16
Model 990 dCLD II Component Leak Detector
NOTEIncluded in the Varian’ Component and Spectrometer Tube
Contacting Varian
In the United States, you can contact Varian Customer Service at 1-800-8VARIAN.
Internet users:
❑Send email to Customer Service & Technical Support at
vpl.customer.support@varianinc.com
Cleaning Kit (p/n 670029096), is recommended for cleaning
the spectrometer tube components.
VacuSolv
the leak detector’s vacuum system, such as valves and fittings.
No rinsing steps or high-temperature drying is required
following cleaning with VacuSolv. Although appropriate
precautions are advised, VacuSolv is compatible with most
materials and does not contain toxic chemicals or CFCs
(chlorofluorocarbons).
®
can also be used for fine cleaning of other parts in
❑Visit our web site at www.varianinc.com/vacuum
❑Order on line at www.evarian.com
/2007
See the back cover of this manual for a listing of our sales and service offices.
DRAFT 4
xvi
Page 17
Model 990 dCLD II Component Leak Detector
Section 1. Introduction to the Model 990 dCLD II
The Varian Model 990 dCLD II is an industrial component Helium Mass Spectrometer Leak
Detector designed to be integrated into dedicated leak testing systems. Its ease of use,
remote communications capability, and integration flexibility make it the ideal leak detector
for solving demanding leak-testing applications.
The 990 dCLD II is comprised of a 19-inch (48.26 cm), rack-mountable control unit and a
Turbomolecular high vacuum pumped spectrometer tube assembly (turbo spec tube). An
optional front control panel, which can be mounted either on the front of the control unit
or remotely, provides easy set up of operating parameters, visual display of leak rate and
pressure, and system status via a state-of-the-art industrial touch panel. The 990 dCLD II
uses Varian Varian’ Platform leak detector electronics architecture to operate the turbo spec
tube assembly and provide leak rate and system status information to the operator interface.
1.1 Unpacking the 990 dCLD II
The 990 dCLD II is shipped to you in two or three boxes, depending on whether or not
you ordered the optional front control panel. The contents of the boxes include:
❑ 990 dCLD II Control Unit, Cables, Mating Connector Kit, and Operations Manual
❑ Turbomolecular Pump Spectrometer Tube Assembly and Cal Leak Certification
Envelope
❑ Optional Front Control Panel, Cable
Carefully unpack the boxes. Keep the original packaging in the event you have to
return 3an item. If you have to return an item for replacement or repair, contact
Vacuum Technologies Customer Service at 1-800-8VARIAN (1-800-882-7426).
Descriptions of the Control Unit, Turbo Spec Tube Assembly, and Cables follow. A brief
description of the Optional Front Control Panel is included in this section. A more detailed
description is in Section 4, “Setup and Monitor Operations via the Optional Front Control
Panel”.
1-1
Page 18
Model 990 dCLD II Component Leak Detector
1.2 Control Unit
The 990 dCLD II control unit operates and controls the turbo spec tube assembly and provides leak rate and system status information to a host computer or Programmable Logic
Controller (PLC) through optically isolated discrete I/O connections and/or an RS-232 host
serial port, or to the optional front control panel interface. Inside the control unit, the
Varian’ Platform performs the various functions of a helium mass spectrometer leak detector.
1.2.1 Front Panel Connections
Figure 1-1 shows the front panel hardware and connections of the 990 dCLD II control unit.
➃➄
➀
➁➂
Figure 1-1Control Unit Front Panel
➀ Connector for
Optional Front
Control Panel
The connector provides signals and power for the 990 dCLD II
Optional Front Control Panel only.
➁ POWER LEDSteady ON verifies the presence of +5 VDC from the main power
supply.
➅
1-2
➂ HIGH VAC LEDSteady ON verifies that the turbo pump is up to speed.
➃ SPEC TUBE LEDSteady ON verifies that the ion source filament is operational,
flashing indicates that the system is busy.
➄ Fan filter guardThe dual air intakes have replaceable filters (see “Dual Air Intake
Filter Replacement” on page -18).
➅ Brackets for
Optional Front
Control Panel
The Brackets provide a quick connect/disconnect latch and
connector arrangement for the optional front control panel.
Page 19
Model 990 dCLD II Component Leak Detector
1.2.2 Rear Panel Connections and Controls
The rear panel of the 990 dCLD II, Figure 1-2, provides power, cooling for the control unit,
connection and control to various devices through the interfaces discussed below.
➀➁
➀ Power Entry
Module
➂
Figure 1-2Control Unit Rear Panel
A power module that consists of a fuse drawer with voltage selector, power on/off switch, and mains power input.
➃➄➅ ➆
➇➈➉
➁ J12 Diagnostic Port A male, 9-pin, polled RS-232 D-sub diagnostic connector desig-
nated for service use only. A null modem cable is required.
➂ J11 Turbo Spec
Tube Connector
A keyed, locking connector for the turbo spec tube assembly cable.
➃ Exhaust FanA fan for cooling the control unit and optional front control panel.
➄ J6 Host Serial PortA female 7-pin connector for a high-speed, interrupt-driven RS-232
interface for host computer control and monitoring.
Provides high vacuum for spectrometer tube operation.
Magnetic-sector spectrometer optimized for the detection of
helium ions.
A helium leak standard that provides verification of 990 dCLD II
operation.
Provides valving for the internal calibrated leak.
1-4
Page 21
1.4 Cables
All cables necessary to power the control unit and to connect the control unit to the turbo
spec tube assembly have been provided. The cables have been customized to the length
you specified at the time of your order. Section 3, “Setup and Operations via the
Rear Panel” includes details about the connections. Part numbers are included in
Section 5.7 “Spare Parts List” on page 5-23.
❑ Power Cable − Connects to main power.
❑ 37-pin Cal Leak Valve Block Cable − Connects to the cal leak valve block for
❑ Turbo Spec Tube Cable − Connects to the turbo spec tube assembly. It ends with the
❑ Turbo Pump Cable − Connects from the spec tube block connector to the turbo
❑ 14-pin Display I/O Cable − Connects to the optional front control panel when it is
Model 990 dCLD II Component Leak Detector
calibrated leak operation.
spectrometer tube block connector (spec tube block connector), the turbo cooling
fan, and the connector for the turbo pump power input.
pump. It provides power to the turbo pump.
remotely located. This cable is supplied with the optional front control panel.
1.5 Mating Connectors
A kit containing mating connectors and pins for building cables for connections J3, J4 and
J6 is supplied with your 990 dCLD II. Build the cables according to the tables included in
Appendix B “Customer Accessible Inputs and Outputs”.
1.6 Optional Front Control Panel
The Model 990 dCLD II Optional Front Control Panel provides indication of the leak rate
measurement and spectrometer pressure through bar graph displays, and control of the leak
detector via control buttons and a touch screen panel. The optional front control panel can
be mounted remotely from the control unit or directly onto its front face.
Once the 990 dCLD II is set up, calibrated and put into production, control is turned over
to the PLC or host computer when PARALLEL ENABLE is asserted. Control remains with
the PLC or host computer until that control is specifically released by de-asserting PARALLEL ENABLE. However, during operation you can use the optional front control panel to
monitor leak rate, pressure and operating parameters.
Section 4, “Setup and Monitor Operations via the Optional Front Control Panel”, of this
manual provides a detailed description of the optional front control panel, a discussion of
the bar graph and pressure displays, and details of the touch screen display and how to use
the menus provided to set up and monitor the 990 dCLD II.
1-5
Page 22
Model 990 dCLD II Component Leak Detector
1.7 Specifications
The specifications for the 990 dCLD II are listed below.
Maximum Test
Pressure
Helium SensitivityV70 Turbo Configuration
V70 Configuration
Fast Speed
Slow Speed
V70D Configuration
Fast Speed
Slow Speed
V70LP Configuration
Fast Speed
Slow Speed
Slow SpeedMin. Detectable Leak: 2 x 10
Fast SpeedMin. Detectable Leak: 2 x 10
V70D Turbo Configuration
Slow SpeedMin. Detectable Leak: 2 x 10
Fast SpeedMin. Detectable Leak: 2 x 10
≤ 500 mTorr
≤ 100 mTorr
≤ 3 Torr
≤ 1 Torr
≤ 5 Torr
≤ 3 Torr
Display: 10
Display: 10
Display: 10
Display: 10
−10
−9
through 10−6atm cc/sec
−9
atm cc/sec
−8
through 10−5atm cc/sec
−9
atm cc/sec
−8
through 10−5atm cc/sec
−8
atm cc/sec
−7
through 10−4atm cc/sec
atm cc/sec
V70LP Turbo Configuration
Slow SpeedMin. Detectable Leak: 2 x 10
−7
Display: 10
Fast SpeedMin. Detectable Leak: 2 x 10
Display: 10
Response Time< 0.5 seconds for helium
Typical Recovery
Time
Noise Level< 2% of the most sensitive scale, peak-to-peak, in accordance with AVS Std. 2.1
1-6
< 2 seconds to recover below 20% of a 10
through 10−4atm cc/sec
−6
through 10−3atm cc/sec
−3
leak
−8
atm cc/sec
−7
atm cc/sec
Page 23
Model 990 dCLD II Component Leak Detector
Recommended
Ambient Operating
Conditions
Heat Load350 W
Power RequirementsVoltage Range115 / 230 VAC
Operating TemperatureControl Unit: 0°C to 50°C (32°F to 122°F)
Turbo Spec Tube Assy.: 5°C to 35°C (41°F to
95 °F)
Optional Front Control Panel: 0 °C to 35 °C
(32 °F to 95 °F)
Maximum Relative Humidity80% for temperatures up to 31 °C (88 °F),
decreasing linearly to 50% HR at 40 °C (104 °F).
No hoarfrost, dew, percolating water, rain, solar
radiation, etc.
Atmospheric Air Pressure75 kPa to 106 kPa
Pollution DegreeII
Installation (Overvoltage)Category II in accordance with UL3101-1
standard.
47 Hz to 63 Hz
Maximum Current3 A/1.5 A, 350 Watts
Fuse Rating5 A, 250 VAC, slo-blo
®
Conformance
Standards
DimensionsControl Unit 19" rack, 5.25" high by 16.5" deep
WeightControl Unit Assembly27 lbs. (12.25 kg)
Meets applicable UL, CSA, and CE Standards
48.26 cm rack, 13.33 cm by 41.91 cm
(including mating connectors)
Turbo Spec Tube Assembly19" wide by 9" high by 8" deep
48.26 cm by 13.33 cm by 11.43 cm
Optional Front Control Panel17.2" wide by 5.25" high by 4.5" deep
43.69 cm by 22.86 cm by 20.32 cm
(including mating connectors)
Turbo Spec Tube Assembly17 lbs. (7.71 kg)
Optional Front Control Panel7 lbs. (3.18 kg)
Cables (turbo and valves)14 lbs. (6.35 kg)
1-7
Page 24
Model 990 dCLD II Component Leak Detector
System I/O Capability J3 InputsOpto-isolated, 5 to 24 VDC 3600 Ohm resistive
load.
J3 OutputsEmitter follower with 10 Ohm series resistor,
14 mA max drive current, 24 VDC max.
J3 Momentary InputsOpto-isolated, 5 to 24 VDC 3600 Ohm resistive
load, requires 200 ms per min pulse width.
J3 Analog Leak Rate Output0 to 10 V per decade linear; 1, 2 or 3 V per
decade logarithmic. Note: 3 V per decade
logarithmic has limited use on the highest
decade.
J4 BCD Leak Rate Output Emitter follower with 10 Ohm series resistor,
14 mA max drive current, 24 VDC max. Note:
This output is valid only when the leak rate output
pulse is low. The leak rate is updated every
50 ms.
J6 Host Serial Port9600 Baud, No parity, 8 Bits, 1 Stop Bit,
interrupt-driven RS-232 port for connection to
a host computer.
J12 Diagnostic Port 9600 Baud, No parity, 8 Bits, 1 Stop Bit,
configured as DTE (Data Terminal Equipment).
Use null modem cable when connecting to a host
computer.
1-8
Page 25
Model 990 dCLD II Component Leak Detector
Section 2. Customer Integration
The information provided in this section assists you in making decisions to provide the
optimum level of leak detection for your operation.
2.1 Physical Considerations
The control unit of the Model 990 dCLD II is intended to be mounted in a standard 19-inch
rack enclosure. It can, however, be mounted in any orientation provided that air movement
through the unit is not impeded. For efficiency sake, mount the Model 990 dCLD II so that
the LEDs can be seen from a convenient location to determine the status of the system at a
glance.
The Optional Front Control Panel can be mounted either directly onto the face of the control unit or remotely in a standard 19-inch rack enclosure. A 10-foot cable provides connection to the front of the control unit. As is the case with the control unit, it can be mounted in
any orientation that provides unimpeded ventilation, and that allows easy viewing and
access to the displays, touch screen panel, and control buttons. Also, keep in mind that the
audio for the 990 dCLD II emanates from the rear of this panel.
The Turbo Spec Tube Assembly can be mounted in any orientation. The spectrometer tube
must be isolated from strong magnetic fields such as motors, transformers, and magnets.
Steel structures and steel objects should be should be kept at least 2 inches away from the
closest edge of the spectrometer tube. Failure to do so will result in damage to the magnet in
the spectrometer tube. During normal operation, the spectrometer tube feels quite warm. A
continuously running fan at the end of the high vacuum pump directs cooling air toward the
end of the pump.
To achieve maximum sensitivity, mount the turbo spec tube assembly as close as possible to
the test chamber or part being tested. The length and number of bends in the plumbing
between the turbo spec tube assembly and the test chamber should be less than the length
and number of bends in the plumbing between the turbo spec tube assembly and the
mechanical backing pump. Likewise, the diameter of the plumbing between the turbo spec
tube assembly and the test chamber should be the same size or larger than the diameter of
the plumbing between the mechanical backing pump and the turbo spec tube assembly.
You must also consider the type and size of the mechanical pumps for your system. For
accurate and repeatable leak testing, Varian recommends that customer-supplied roughing
and forepumps be helium-stable mechanical pumps, such as Varian oil-sealed mechanical
pumps. (See Section 2.3 “Size of Mechanical Pumps” on page 2-7.) The use of
non-helium-stable pumps will result in erratic, unreliable leak rate readings and an inability
to calibrate successfully.
2-1
Page 26
Model 990 dCLD II Component Leak Detector
2.2 Common Configurations
The 990 dCLD II is available with your choice of three pumps:
❑ V70 Turbomolecular Pump
❑ V70D MacroTorr
❑ V70LP MacroTorr
Table 2-1 lists operating information about the three pumps and compares advantages and
limitations relating to sensitivity and clean up time.
Table 2-1V70, V70D and V70LP Turbomolecular Pump Comparison
®
Turbomolecular Pump
®
Turbomolecular Pump
Helium
Range of
Leak Rate
Speed
Pumpin
g
Speed
(L/sec)*(atm cc/sec)(Torr)
V70 Turbomolecular Pump
Slow6010
−9
to 10
−6
Fast6010
−8
V70D MacroTorr Turbomolecular Pump
Slow3010
Fast3010
−8
−7
V70LP MacroTorr Turbomolecular Pump
Slow6010
Fast6010
−7
−6
to 10
to 10
to 10
to 10
to 10
−5
−5
−4
−4
−3
Minimum
Detectabl
e Leak
−10
2 x 10
−9
2 x 10
−9
2 x 10
−8
2 x 10
−8
2 x 10
−7
2 x 10
Maximum
Foreline
PressureAdvantagesLimitations
0.1
0.1
Provides the highest
sensitivity of the three
pumps.
Provides faster clean
up than V70 in Slow
speed, with slight loss
Has the slowest clean
up time of the three
pumps.
Requires low foreline
pressure.
in sensitivity.
1.0
5.0
Provides higher
foreline pressure than
V70 in Fast speed.
Provides faster clean
up than V70D in Slow
speed and V70 in
Provides less
sensitivity than the
V70.
Provides less
sensitivity than the
V70.
either speed.
5.0
10
Provides the fastest
clean up for the
sensitivity.
Provides the highest
foreline pressure and
the fastest clean up
Sensitivity is low, and
is lower than the V70
or V70D.
Sensitivity is the
lowest in fast mode of
all three pumps.
time of all three
pumps.
* Total helium pumping speed is affected by backing pump.
2-2
Page 27
The 990 dCLD II component system has been modularly designed to fit your operations.
Table 2-2 provides a comparison of the three most commonly used configurations:
❑ Single mechanical pump
See Figure 2-1 and Table 2-3 on page 2-4.
❑ Dual mechanical pump
See Figure 2-2 and Table 2-4 on page 2-5.
❑ Split flow dual mechanical pump
See Figure 2-3 and Table 2-5 on page 2-6.
ConfigurationAdvantagesLimitations
Single Mechanical Pump
Model 990 dCLD II Component Leak Detector
Table 2-2Configuration Comparison
❑
Higher sensitivity
❑ Lower cost
❑ Longer cycle time
❑ Backing pump doubles
as rough pump
Dual Mechanical Pump
Split Flow Dual Mechanical Pump
Higher sensitivity
❑
❑ Faster pump-down.
❑ Shorter cycle time
❑ Separate pumps for rough
and backing
Faster pump-down
❑
❑ Faster clean-up
❑ Shorter cycle time
❑ Separate pumps for rough
and backing
❑ Higher cost.
❑ Lower sensitivity
❑ Higher cost
2-3
Page 28
Model 990 dCLD II Component Leak Detector
2.2.1 Single Mechanical Pump Configuration
Keep Distance as Short as Possible
Cal
Leak
Spec
Tube
Cal
Leak
Turbo
Foreline
Turbo Spec Tube Assembly
(in box)
Length is Proportional
to Sensitivity
Figure 2-1Single Pump Configuration
Te st
Valve
Primary
Pump
Fixture
Vent Valve
Rough Valve
Table 2-3Single Mechanical Pump System Valve Sequence
StateVent
Valve
Pre-VentedClosedClosedClosedThe Pre-Vented state allows time to ensure that all valves
VentedOpenedClosedOpenedThe Vented state places the fixture at atmosphere. The
Pre-Roughing ClosedClosedClosedThe Pre-Roughing state allows time to ensure that all
RoughingClosedOpenedClosedThe Roughing state brings the fixture to vacuum. The
TestClosedOpenedOpenedThe Test Valve re-opens at the appropriate foreline
Rough
Valve
Test
Valve
Remarks
are closed before any open. The time spent in the
pre-vented state depends on valve actuation time.
Test Valve keeps the turbo backed.
valves are closed before any open. The time spent in the
pre-roughing state depends on valve actuation time.
turbo is not being pumped. The maximum time here is
approximately 3 minutes.
pressure, backing the turbo and exposing the fixture to
the foreline.
Note: Foreline and Cal Leak valves are under the control of the 990 dCLD II.
2-4
Page 29
Model 990 dCLD II Component Leak Detector
2.2.2 Dual Mechanical Pump Configuration
Cal
Leak
Spec
Tube
Cal
Leak
Turbo
Foreline
Turbo Spec Tube Assembly
(in box)
Keep Distance as
Short as Possible
Tes t Val ve
Fixture
Vent Valve
Rough Valve
Length is Proportional
to Sensitivity
Backing
Primary
Pump
Roughing
Primary
Pump
Figure 2-2Dual Mechanical Pump Configuration
Table 2-4Dual Mechanical Pump System Valve Sequence
StateVent
Valve
Pre-VentedClosedClosedClosedThe Pre-Vented state allows time to ensure that all valves
VentedOpenedClosedClosedThe Vented state places the fixture at atmosphere. The
Pre-Roughing ClosedClosedClosedThe Pre-Roughing state allows time to ensure that all
RoughingClosedOpenedClosedThe Roughing state brings the fixture to vacuum.
Rough
Valve
Test
Valve
Remarks
are closed before any open. The time spent in the
pre-vented state depends on valve actuation time.
backing primary pump keeps the turbo backed.
valves are closed before any open. The time spent in the
pre-roughing state depends on valve actuation time.
TestClosedClosedOpenedThe Test Valve re-opens at the appropriate foreline
pressure, exposing the fixture to the foreline.
Note: Foreline and Cal Leak valves are under the control of the 990 dCLD II.
Table 2-5Split Flow Dual Mechanical Pump System Valve Sequence
StateVent
Valve
Pre-VentedClosedClosedClosedThe Pre-Vented state allows time to ensure that all valves
VentedOpenedClosedClosedThe Vented state places the fixture at atmosphere.
Pre-Roughing ClosedClosedClosedThe Pre-Roughing state allows time to ensure that all
RoughingClosedOpenedClosedThe Roughing state brings the fixture to vacuum.
Rough
Valve
Test
Valve
Remarks
are closed before any open. The time spent in the
pre-vented state depends on valve actuation time.
valves are closed before any open. The time spent in the
pre-roughing state depends on valve actuation time.
TestClosedOpenedOpenedThe Test Valve re-opens at the appropriate foreline
pressure, exposing the fixture to the foreline.
Note: Foreline and Cal Leak valves are under the control of the 990 dCLD II.
2-6
Page 31
Model 990 dCLD II Component Leak Detector
2.3 Size of Mechanical Pumps
When selecting rough and forepumps for your system, the pumps listed in Table 2-6 are
recommended. These pumps can be paired (within type) in any combination for forepump
and rough pump except where noted. For more information, contact Varian Customer Service 1-800-8VARIAN.
Table 2-6Recommended Mechanical Pumps
Type/Model
Pump
Rotary Vane
DS-102
DS-202ll200 L/min (7.0 cfm)9499320
DS-302ll300 L/min (10.6 cfm)9499325
DS-402l400 L/min (14.1 cfm)9499330
Dry Scroll
PTS 300ll300 L/min (10.6 cfm)PTS03001UNIV
PTS 600ll600 L/min (21.2 cfm)PTS06101UNIV
Recommended forMaximum
Pumping Speed
ForeRough
l
100 L/min (3.6 cfm)Do not pair with a Rough
Pump size
RemarksVarian
Part Number
9499305
≤ DS-202
2-7
Page 32
Model 990 dCLD II Component Leak Detector
2.4 Electronic Considerations
This section includes information necessary to interface the 990 dCLD II with a PLC or a
host computer using either serial or parallel communications. This includes connection via
J3 Discrete I/O, J4 BCD Outputs and J6 Host Serial Port.
2.4.1 Discrete I/O J3 Inputs
The discrete I/O is used to control operations via a PLC. Table 2-7 provides the input connections. For detailed information see Table B-1 on page B-1. For a cross reference of the
function in other modes of operation, see Table 2-11 on page 2-15.
J3 Level inputs are opto-isolated, 5 to 24 VDC 3600 Ohm resistive load. J3 Momentary
inputs are opto-isolated, 5 to 24 VDC 3600 Ohm resistive load, and require 200 ms minimum pulse width. Figure 2-4 shows the J3 input circuit sketch.
2-8
Page 33
Model 990 dCLD II Component Leak Detector
Table 2-7J3 Inputs Summary Table
J3/
Pin
1Input CommonN/AReturn for J3 inputs (with pin 25).
5RUN / IDLE
6PARALLEL ENABLELevelDisable changes to the parameters from discrete I/O, serial
7ZEROMomentaryPerforms a ZERO function.
8STDLEAKMomentaryPuts the Leak Detector in Read STD LEAK mode.
9Full Internal CalibrateMomentaryPerforms a Full Calibration using the internal leak.
10DECREMENTMomentaryDecrements the Exponent in Manual Ranging.
11INCREMENTMomentaryIncrements the Exponent in Manual Ranging.
12AUTO / MANUAL
23Full External CalMomentaryPerforms a Full Calibration with External Leak.
24Quick Internal CalMomentaryPerforms a Quick Calibration using the internal leak.
25Input CommonN/AReturn for J3 inputs (with pin 1).
35FIL OFFLevelTurns the operating Filament OFF when active.
Input NameMomentary
or Level
LevelTurns ON the spec tube and turbo (leave IDLE state).
LevelPuts the system in Auto Ranging if active.
Description
inputs or optional front control panel.
37Quick External CalMomentaryPerforms a Quick Calibration using the external leak.
Figure 2-4J3 Input Circuit Sketch
2-9
Page 34
Model 990 dCLD II Component Leak Detector
2.4.2 Discrete I/O J3 Outputs
Table 2-8 provides the J3 output connections. For detailed information see Table B-2 on
page B-4. For a cross reference of the functions in other modes of operation, see Table 2-11
on page 2-15.
J3 Level outputs are opto-isolated emitter followers with 10 Ohm series resistor, 14 mA max
drive current, 24 VDC max. Figure 2-5 shows the J3 output circuit sketch.
2-10
Page 35
Model 990 dCLD II Component Leak Detector
Table 2-8J3 Outputs Summary Table
J3/
Pin
2REJECT #1LevelActive when Leak Rate is over set point #1.
14ReadyLevelActive when Fil and Turbo ok, i.e., the system is ready to test.
15ZeroingLevelActive when performing a ZERO function.
16Leak Rate
17Filament FaultLevelActive when selected Ion Source Filament is non-functional.
18CAL OKLevelActive when last calibration ok. It is set inactive at the start of a
22CalibratingLevelActive when performing a CALIBRATE routine.
26REJECT #2LevelActive when Leak Rate is greater than set point #2.
27+V InputN/ACustomer-supplied +5 to +24 VDC for J3.
28+V InputN/ACustomer-supplied +5 to +24 VDC for J3.
29REJECT #3LevelActive when Leak Rate greater than set point #3.
30REJECT #4LevelActive when Leak Rate greater than set point #4.
33HiVac OKLevelActive when turbo is ok.
Output NameMomentary
or Level
Update
Description
Valid data on BCD when low, becomes active during the time that
the BCD leak rate output is updated.
32Analog ReturnGroundAnalog Leak Rate output voltage return.
Figure 2-5J3 Output Circuit Sketch
2-11
Page 36
2.4.3 BCD J4 Outputs
Table 2-9 provides the J4 output connections. For detailed information see Table B-2 on
page B-4.
J4 outputs are opto-isolated emitter followers with 10 Ohm series resistor, 14 mA max drive
current, 24 VDC max. Note: This output is valid only when the leak rate output pulse is low.
The leak rate is updated every 50 ms. Figure 2-6 shows the J4 output circuit sketch.
Model 990 dCLD II Component Leak Detector
2-12
Page 37
Model 990 dCLD II Component Leak Detector
Table 2-9J4 Outputs Summary Table
J4/
Pin
3LSD A MANLevelMantissa BCD Leak Rate, the ones place of the least significant digit.
4LSD B MANLevelMantissa BCD Leak Rate; the twos place of the least significant digit.
5LSD C MANLevelMantissa BCD Leak Rate; the fours place of the least significant digit.
6LSD D MANLevelMantissa BCD Leak Rate; the eights place of the least significant digit.
7MSD A MAN LevelMantissa BCD Leak Rate; the ones place of the most significant digit.
8MSD B MAN LevelMantissa BCD Leak Rate; the twos place of the most significant digit.
9MSD C MAN LevelMantissa BCD Leak Rate; the fours place of the most significant digit.
10MSD D MAN LevelMantissa BCD Leak Rate; the eights place of the most significant digit.
11LSD A EXPLevelExponent BCD Leak Rate; the ones place of the least significant digit.
12LSD B EXPLevelExponent BCD Leak Rate; the twos place of the least significant digit.
13LSD C EXPLevelExponent BCD Leak Rate; the fours place of the least significant digit.
14LSD D EXPLevelExponent BCD Leak Rate; the eights place of the least significant digit.
15MSD A EXPLevelExponent BCD Leak Rate; the ones place of the most significant digit.
20+V InputN/ACustomer-supplied +5 to +24 VDC for J4.
Output
Name
Momentary
or Level
Description
21+V InputN/ACustomer-supplied +5 to +24 VDC for J4.
990 dCLD II
Customer
Figure 2-6J4 Output Circuit Sketch
2-13
Page 38
Model 990 dCLD II Component Leak Detector
2.4.4 Host Serial Port J6
The Host Serial Port is used to interface the 990 dCLD II to a PLC or computer via an
RS-232 connection. Table 2-10 and Figure 2-7 provide details of the connection.
J6 connections are referenced to the chassis ground and are not isolated. Electrical characteristics comply with EIA/TIA Standard EIA/TIA-232-E.
Table 2-10J6 Summary Table
J6/
Pin
2Received Data Data Into the 990 dCLD II
3Transmitted Data Data Out of the 990 dCLD I
5Signal CommonGround
6Clear To SendHandshaking Signal Out of the 990 dCLD II
7Request To SendHandshaking Signal Into the 990 dCLD II
EIA NameDescription
I
Customer
990 dCLD II
Supplied Cable
IBM Standard
Supplied Cable
Serial Port
2-14
Figure 2-7J6 Circuit Sketch
Page 39
Model 990 dCLD II Component Leak Detector
and Parameter
RS-232 CommandOptional Front Control Panel Menu
/ Pin
Table 2-11Commands for Operating Modes
ZEROING screen, Section 4.6.6 “Zeroing”.
1 INIT-AZ<0<CR>
AUTO-ZERO<0 -
0 INIT-AZ<0<CR>
1 Active, 0 Inactive
?AZ<0<CR>SYSTEM INFORMATION screen, Section 4.5
“System Information Screen”
Ensure USE NORM CAL and USE EXT LEAK are
set in the SET UP CAL LEAK menu, Section 4.6.1
“Calibrated Leak Set-Up”.
then
?QUICK-CAL<CR>
J3/23 EXTERNAL<CR>
Status inquiry
Calibrate - Full -
External
Press the CALIBRATE button, Section 4.1 “Control
if returns 0, then
Buttons”.
CALIBRATE<CR>
else
0 INIT-QUICK-CAL<CR>
then
CALIBRATE<CR>
❑ J6 Host Serial Port RS-232 Command (detailed information is provided in Appendix A “Communications Protocol”)
❑ Discrete I/O J3 (detailed information is provided in Appendix B “Customer Accessible Inputs and Outputs”)
❑ Optional Front Control Panel (detailed information is provided in Section 5, “Maintenance”)
Except for the first entry in the table, PARALLEL ENABLE, the table is organized alphabetically by function, sub-function, and
to be able to set it Active or Inactive, and to inquire about its status. Those two activities are grouped together, and listed alpha-
Most functions can be accomplished in at least two of the setup or operating modes of the 990 dCLD II. Table 2-11 lists func-
tions and provides the commands to accomplish those functions in each operating mode:
2.5 Operating Modes Commands Cross Reference
betically within the group. This table will prove useful as you learn to set up and run the 990 dCLD II.
various tasks you might need to accomplish within that function. For instance, the commands available for AUTO-ZERO<0 are
What you want to doFunctionConn
Turn control over to the PLC PARALLEL ENABLE J3/6NoneNone
Set Auto-Zero<0 Active or
Inactive
Is Auto-Zero<0 enabled?AUTO-ZERO<0 -
Perform a full external
calibration
2-15
Page 40
and Parameter
Ensure USE NORM CAL and USE INT LEAK are
set in the SET UP CAL LEAK screen, Section
Model 990 dCLD II Component Leak Detector
4.6.1 “Calibrated Leak Set-Up”. Press the
CALIBRATE button. Section 4.1 “Control Buttons”.
SET UP CAL LEAK screen, Section 4.6.1
“Calibrated Leak Set-Up”, set FAST or NORM
“Calibrated Leak Set-Up”,
USE NORM CAL / USE FAST CAL
Ensure USE FAST CAL and USE EXT LEAK are
set in the SET UP CAL LEAK menu, Section 4.6.1
“Calibrated Leak Set-Up”
Press the CALIBRATE button, Section 4.1 “Control
Buttons”.
RS-232 CommandOptional Front Control Panel Menu
then
?QUICK-CAL<CR>
if returns 0, then
CALIBRATE<CR>
else
0 INIT-QUICK-CAL<CR>
then
CALIBRATE<CR>
0 INIT-QUICK-CAL<CR>
1 INIT-QUICK-CAL<CR>
Table 2-11Commands for Operating Modes (Continued)
?QUICK-CAL<CR>SET UP CAL LEAK screen, Section 4.6.1
/ Pin
J3/9INTERNAL<CR>
Calibrate - Full -
Internal
Calibrate - Mode -
0Normal, 1Fast
Calibrate - Mode
inquiry - 0 Normal,
1Fast
then
?QUICK-CAL<CR>
if returns 1, then
CALIBRATE<CR>
else
J3/37 EXTERNAL<CR>
Calibrate - Quick -
External
1 INIT-QUICK-CAL<CR>
then
CALIBRATE<CR>
2-16
What you want to doFunctionConn
Perform a full internal
calibration
Set the Calibration mode to
Normal or Fast
Will a Normal or a Fast
calibration be performed
when asked.
Perform a fast external
calibration
Page 41
Model 990 dCLD II Component Leak Detector
and Parameter
Ensure USE FAST CAL and USE INT LEAK are
set in the SET UP CAL LEAK menu, Section 4.6.1
“Calibrated Leak Set-Up”.
Press the CALIBRATE button, Section 4.1 “Control
Buttons”.
Screen”,
or exponent display not flashing C.
menu, Section 4.6.1 “Calibrated Leak Set-Up”.
“Calibrated Leak Set-Up”, set EXTERNAL LEAK
VALUE
“Calibrated Leak Set-Up”, EXTERNAL LEAK
VALUE
“Calibrated Leak Set-Up”, set INTERNAL LEAK
VALUE
Screen”.
SET UP CAL LEAK Menu, Section 4.6.1
“Calibrated Leak Set-Up”, INTERNAL LEAK
VALUE.
Table 2-11Commands for Operating Modes (Continued)
RS-232 CommandOptional Front Control Panel Menu
then
?QUICK-CAL<CR>
if returns 1, then
CALIBRATE<CR>
else
1 INIT-QUICK-CAL<CR> then
CALIBRATE<CR>
/ Pin
J3/24 INTERNAL<CR>
Calibrate - Quick -
Internal
J3/18 ?CALOK<CR>HOME screen, Section 4.4 “Touch Panel Home
Calibrate - Successful
inquiry
N/AEXTERNAL<CR>Set USE EXT LEAK in the SET UP CAL LEAK
Calibrated Leak -
N/AX.XE-XX INIT-EXTLEAK<CR> SET UP CAL LEAK screen, Section 4.6.1
EXTERNAL
Calibrated Leak -
External - Set Value
?EXTLEAK<CR>SET UP CAL LEAK screen, Section 4.6.1
Calibrated Leak -
External - Value
?STDLEAK<CR>HOME screen, Section 4.4 “Touch Panel Home
N/AX.XE-XX INIT-STDLEAK<CR> SET UP CAL LEAK screen, Section 4.6.1
inquiry
Calibrated Leak -
Internal - Set Value
Calibrated Leak -
Internal - Value
inquiry
What you want to doFunctionConn
Perform a fast internal
calibration
Was the last Calibration
successful?
Use an external calibrated
leak
Set the External calibrated
leak value
What is the value of the
external calibrated leak?
Set the Internal calibrated
leak value
What is the value of the
internal calibrated leak?
2-17
Page 42
and Parameter
Model 990 dCLD II Component Leak Detector
menu, Section 4.6.1 “Calibrated Leak Set-Up”.
“Manual Tuning”
EMISSION I
MANUAL TUNING, Section 4.7.2 “Manual Tuning”,
FIL1ACTV / FIL2ACTV
Calibration”
“System Information Screen”
N/A
N/A
RS-232 CommandOptional Front Control Panel Menu
DISABLE-IDLE<CR>
IDLE - allow or notENABLE-IDLE<CR>
J3/5IDLE<CR>
IDLE - Mode
RUN<CR>
RUN - Mode
Table 2-11Commands for Operating Modes (Continued)
/ Pin
N/AINTERNAL<CR>Set USE INT LEAK in the SET UP CAL LEAK
Calibrated Leak -
Use INTERNAL
Emission I - Set TempXXXX PUT-EMISSION<CR>MANUAL TUNING, set EMISSION I, Section 4.7.2
VERsion - InquiryVER<CR>VERsion screen, Section 4.5.1 “System Software
What you want to doFunctionConn
Set the operating speed of
the turbo pump
Store the Variable Focus
Voltage in Non-Volatile RAM
What is the Variable Focus
Voltage?
What is the installed
software revision?
What is the status of the
Turbo?
Temporarily Set Variable
Focus Voltage
ZERO the leak rateZEROJ3/7 ZERO<CR>Press the ZERO button. Section 4.1 “Control
2-25
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Model 990 dCLD II Component Leak Detector
This page intentionally left blank.
Page 51
Model 990 dCLD II Component Leak Detector
Section 3. Setup and Operations via the
Rear Panel
3.1 Physical Setup
Figure 3-1 on page 3-3 shows the system block diagram for the 990 dCLD II. Information
regarding the physical setup is discussed below.
3.1.1 Control Unit
The Control Unit is designed to be mounted in a 19-inch rack cabinet. Air is required to
flow through the control unit entering through the two filtered air intakes at the front of the
unit and exiting at the rear of the unit through a fan. Locate the control unit in a way that
allows easy viewing of the front LEDs and easy access to the rear panel connections.
3.1.2 Turbo Spec Tube Assembly
The Turbo Spec Tube assembly can be mounted in any orientation. The spectrometer tube
must be isolated from strong magnetic fields such as motors, transformers, and magnets.
Steel structures and steel objects should also be kept at least two inches away from the closest edge of the spectrometer tube. During normal operation, the spectrometer tube feels
quite warm. A continuously running fan at the end of the high vacuum pump directs cooling air toward the end of the pump. The pump operates between 5 °C and 35 °C ambient
temperature.
3-1
Page 52
Model 990 dCLD II Component Leak Detector
3.1.3 Connecting the Control Unit to the Turbo Spec Tube Assembly
Make the following connections from the rear panel of the 990 dCLD II to the turbo spec
tube assembly. The rear panel connections are shown in Figure 1-2. This section discusses
connection to turbo spec tube assembly only.
WARNINGAll connections should be made with power OFF.
1. Connect the Cal Leak Valve Block cable to J1 and the cal leak valve block.
2. Connect the keyed, locking end of the Turbo Spec Tube cable to J11.
3. Place the spec tube block connector firmly onto the spectrometer and tighten the
hold-down screw.
4. Attach the turbo fan power connection from the turbo into the white plastic fitting on
the spec tube block connector.
5. Attach the turbo pump cable to the pump and onto the spec tube block connector and
tighten it firmly.
6. Verify that the proper mains voltage is set and connect the power cord to the power
entry module.
To change the input voltage, remove the fuse drawer and remove the gray fuse holder.
Rotate the fuse holder 180° so that the correct voltage appears in the fuse drawer
window.
Replace the fuse drawer.
7. Plug the power cord into an appropriate power source.
3.1.4 Customer Controlled Connections
As previously discussed in Section 2, “Customer Integration”, setup of the parameters is
most easily accomplished via the optional front control panel or host computer, but can also
be accomplished using a combination of PLC and host computer. Once setup is complete,
operation is from the PLC, host computer, or a combination of the two. Monitoring of operations can be from the optional front control panel, PLC, or host computer. Table 2-11 on
page 2-15 cross references the different modes of operation and details the pin connections,
commands, RS-232 commands and optional front control panel menus and buttons.
3-2
Page 53
Model 990 dCLD II Component Leak Detector
CONTROL UNIT
OPTIONAL FRONT CONTROL PANEL
Figure 3-1System Block Diagram
3-3
Page 54
Model 990 dCLD II Component Leak Detector
3.1.4.1 Optional Front Control Panel Connection
If you are using the optional front control panel for setup and monitoring of the
990 dCLD II, connect it to the front of the control unit by lining up the connection brackets
and giving it a straight, firm push. The power and signal connection
and you hear the optional front control panel click into place via the quick connect/disconnect latch arrangement. To disconnect it, give it a solid tug and it easily disconnects.
The optional front control panel can also be mounted remotely from the control unit (see
discussion in Section 2.1 “Physical Considerations” on page 2-1). Mount the optional front
control unit in a rack and connect the Display I/O cable to connector J5 on the rear panel of
the control unit to the connection J4
Figure 3-2).
¡ on the back of the optional front control panel (see
➀
¿ mates (Figure 3-2),
➁
Figure 3-2Optional Front Control Panel, Left Rear View
3-4
Page 55
Model 990 dCLD II Component Leak Detector
3.1.4.2 Discrete I/O Connection
To use the Discrete I/O J3 for operations, build the cable for PLC connection according to
Table B-1 on page B-1 in Appendix B “Customer Accessible Inputs and Outputs”. Remember, the 990 dCLD II does not provide power to this I/O.
Setup of the parameters must be accomplished in one of three ways:
❑ Using a host computer via host serial port J6
❑ The combination of PLC and host computer (see Appendix A “Communications
Protocol” and Table B-3 on page B-9
❑ Via the optional front control panel
Control is then turned over to the PLC for operation.
3.1.4.3 Host Computer Connection
To use a computer for operations, build the cable according to Table B-3 on page B-9 and
connect to the host serial port J6. For greater security, you must also make connection to J3,
pin 6 to make PARALLEL ENABLE available. Asserting PARALLEL ENABLE prevents operating parameters from being changed while it is active. See Appendix A “Communications
Protocol” for detailed information regarding the commands used to set up, monitor and
operate the 990 dCLD II. A cross reference of the different modes of operation is provided in
Table 2-11 on page 2-15.
3.1.4.4 BCD Output Connection
To use BCD J4 for output, build the cable for PLC connection according to Table B-2 on
page B-4. Remember, the 990 dCLD II does not provide power to this I/O.
3-5
Page 56
Model 990 dCLD II Component Leak Detector
3.2 System Sensitivity and Configuration
During the process of installing the 990 dCLD II and building the associated vacuum system, it is necessary to determine the sensitivity of the system. The 990 dCLD II is able to
measure four decades of leak rate signal at once for a given configuration. For example, in a
typical system with the V70D MacroTorr pump running at high speed, the four decades of
leak rate are 10
yields 10
type and speed on the four decades of detectable leak rate. Table 3-1 shows the four
decades displayed for any given configuration and turbo speed setting.
Table 3-1Leak Rate Range for High Vacuum Pump Type and Speed Combinations
−7
−8
, 10−7, 10−6, and 10−5 decades of leak rate. Table 3-1 shows the effects of pump
, 10−6, 10−5, and 10−4. Running the V70D MacroTorr pump at slow speed
Turbo Speed FastTurbo Speed SlowMaximum Test
Pressure
V70 Turbo Pump10
V70D MacroTorr Pump10
V70LP MacroTorr Pump10
Note: The underlined decade represents the variable set in TOP RANGE parameter.
The pumping speed of the backing pump and the conductance of the vacuum system also
play an important role in the determination of system sensitivity. A calibrated helium leak
on the as configured system must be used to characterize the leak rate measurements.
The 990 dCLD II must be set up to display the desired four (4) decades of leak rate
measurement by setting the Range (Top Range) and selecting the Turbo speed and Ranging
method. These and other parameters are discussed in the next section.
−8
, 10−7, 10−6, 10
−7
, 10−6, 10−5, 10
−6
, 10−5, 10−4, 10
−5
−4
−3
10−9, 10−8, 10−7, 10
10−8, 10−7, 10−6, 10
10−7, 10−6, 10−5, 10
−6
−5
−4
100 mTorr
3 Torr
5 Torr
3-6
Page 57
Model 990 dCLD II Component Leak Detector
3.3 Initial System Parameter Setup
The 990 dCLD II performs functions and tests based upon parameter values. Some parameters are entered and set when the system is assembled and tested. Some parameters are calculated and change automatically during power up, Calibrate, or Zero functions. Other
parameters should be changed when a change is made to the physical system, such as when
the button thermocouple (TC), ion source or preamplifier is changed. What these parameters are set to are a function of the physical configuration and sensitivity needs as was discussed in the previous section and in more detail in Section 2.
Adding to the stability and reliability of the 990 dCLD II, several parameters relating to the
operation and performance are stored in EPROM in the control unit. This means if you lose
power, or when the control unit is shut off, you do not lose that information. Parameters can
be viewed and changed through commands entered via the rear serial port or the optional
front control panel, if it is installed (refer to Section 4, “Setup and Monitor Operations
via the Optional Front Control Panel”).
This section explains each of the parameters and what happens during the related function;
related functions or parameters are grouped together. There is also reference to the area in
the document where you can find information on how to set the parameter or perform the
function. Remember, Table 2-11 on page 2-15 cross references functions and how to set
parameters across all operating modes.
3.3.1 Parameters and Operating Modes
The parameters and operating modes work together to perform leak detection, and what
you enter determines the type of test and sensitivity of testing performed. The discussion
below includes an explanation of what the parameter or function means, so you know how
to use it for your system and how to set it in varying operating modes. Some parameters are
grouped together so you can see how they relate to one another or affect an operation.
NOTEFor more information on how to set a parameter or select a
function, refer to the following:
❑ Appendix A “Communications Protocol”
❑ Appendix B “Customer Accessible Inputs and Outputs”
❑ Section 4, “Setup and Monitor Operations via the
Optional Front Control Panel”
❑ Table 2-11 on page 2-15, Cross Reference of Commands
for Operating Modes
3-7
Page 58
Model 990 dCLD II Component Leak Detector
TURBO SPEEDSet the speed of the high vacuum pump to FAST or SLOW, depend-
ing on the sensitivity requirement of the system. (Refer to Table 2-1
on page 2-2.) Note that the highest tolerable testing pressure is
achieved with the pump running in the high-speed (fast) mode.
To set the turbo speed, issue the INIT-SPEED<CR> command or, if
the optional front control panel is installed, set the turbo speed via
the Leak Rate Ranging Set-Up screen (see Section 4.6.4 “Range
Stop and Manual Range Set Up and Control” on page 4-15).
RANGERange must be set equal to the exponent of the least sensitive range
of the leak detector (Section 3.2 “System Sensitivity and Configuration” on page 3-6), depending on the sensitivity of the vacuum system. (See “TOP RANGE”.)
To set the RANGE variable, issue the INIT-RANGE<CR> command.
TOP RANGETOP RANGE is the exponent value of the least sensitive range of
leak detection for the configured system. The system detects four
decades starting from the TOP RANGE. The TOP RANGE variable
must be set appropriately for the given system configuration and is
the largest exponent value. See Table 3-1 on page 3-6.
To set the TOP RANGE, issue the INIT-RANGE<CR> command, or
if the optional front control panel is installed, set the parameter via
AUTO-RANGE
MANUAL RANGE
the Leak Rate Ranging Set-Up screen (see Section 4.6.4 “Range
Stop and Manual Range Set Up and Control” on page 4-15).
Auto-Ranging causes the leak detector to detect leaks within the
four decades starting at the least sensitive value set in the RANGE
variable (RS-232) or TOP RANGE (optional front control panel).
The 990 dCLD II is shipped from the factory with Auto-Ranging
enabled set as the default.
Manual Range is used to force the 990 dCLD II to respond to a leak
rate detected in only one decade (the exponent never changes).
This feature is useful when the test operator is only concerned with
monitoring the leak rate measurement within a single decade. You
must set Manual Range ON and also set the EXPONENT variable
(see “MANUAL EXPONENT” below) to the desired decade.
Regardless of the ranging mode selected, the RANGE variable
(above) must be set to the least sensitive decade.
To set Manual Range ON, issue the MANUAL<CR> command or, if
the optional front control panel is installed, turn Manual Range ON
via the Leak Rate Ranging Set-Up screen (see Section 4.6.4 “Range
Stop and Manual Range Set Up and Control” on page 4-15).
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Model 990 dCLD II Component Leak Detector
MANUAL EXPONENT The MANUAL EXPONENT is the exponent value that you want
Manual Range to display when Manual-Ranging is set to ON.
To set the exponent, use the INIT-EXPONENT<CR> command, or if
the optional front control panel is installed, set the MANUAL
RANGE parameter via the Leak Rate Ranging Set-Up screen (see
Section 4.6.4 “Range Stop and Manual Range Set Up and Control”
on page 4-15).
RANGE STOPThe RANGE STOP feature configures the 990 dCLD II so that it
only auto-ranges down to the pre-selected decade entered in the
range stop variable field, as opposed to all four decades beginning
at the TOP RANGE. For example, if RANGE STOP is enabled and
set to −07, then the most sensitive range that the leak detector displays is 10
This feature is useful when a product specification is more than one
decade less stringent than the sensitivity of the leak detection system as it is configured. If the configured system is capable of
detecting 10
−07
10
reduces the test cycle time by eliminating the need for the leak
detector to reach its most sensitive decade (10
cycle.
−07
.
−09
atm cc/sec but the test specification is only in the
atm cc/sec range, then setting the RANGE STOP to −08
−09
) during each test
ENABLE-IDLE
DISABLE-IDLE
To set the RANGE STOP exponent, issue the INIT-RANGESTOP<CR> command, or if the optional front control panel is
installed, set the RANGE STOP parameter via the Leak Rate Ranging Set-Up screen (see Section 4.6.4 “Range Stop and Manual
Range Set Up and Control” on page 4-15).
The ENABLE-IDLE command allows the control unit to be put into
IDLE or RUN mode. The factory default setting is DISABLE-IDLE.
Issue the ENABLE-IDLE<CR> command to allow the control unit to
be put into RUN or IDLE mode. If IDLE is DISABLEd, the
990 dCLD II will operate without asserting the IDLE/RUN input
(J3/5) in the discrete I/O.
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Model 990 dCLD II Component Leak Detector
IDLE MODE
RUN MODE
NOTEThe ENABLE-IDLE command must be issued for the IDLE and
CALIBRATECALIBRATE is used to perform an automated calibration based
IDLE mode allows the spectrometer tube and turbo pump to be
shut down without turning off main power. Volatile operating
parameters will not be lost in this mode. The factory default setting
is the IDLE function is disabled. The Idle function must be
ENABLED before it can be used.
To put the control unit in IDLE mode, de-assert the IDLE/RUN input
(J3/5) in the discrete I/O.
RUN mode powers the spectrometer tube and turbo pump. The
IDLE function must be ENABLED before RUN can be used.
To put the control unit in RUN mode, assert the IDLE/RUN input
(J3/5) in the discrete I/O
RUN modes to be operational. The factory default setting is
DISABLE-IDLE.
upon the parameters set. Calibration is either to a known INTERNAL or EXTERNAL leak whose value has been entered into the
appropriate parameter, and is either performed in NORMAL or
FAST mode.
To perform an automated calibration, issue the CALIBRATE<CR>
command or, if the optional front control panel is installed, press
the CALIBRATE button.
CALIBRATED
LEAK VALUE
INTERNALTo enter the value of the internal calibrated leak, issue the
EXTERNALIf you are using an external leak, you must enter its value so the
The 990 dCLD II is shipped from the factory with a calibrated leak
(Cal Leak) as part of the turbo spec tube assembly. Its value is noted
on the tag attached to it and on the Cal Leak Certification. During
setup, enter the value of the calibrated leak (Section 4.6.1
“Calibrated Leak Set-Up” on page 4-13). When a Calibration is performed, the system compares the leak rate signal with the stored
value.
INIT-STDLEAK<CR> command or, if the optional front control
panel is installed, enter the value via the Calibrated Leak Set-Up
screen (Section 4.6.4 “Range Stop and Manual Range Set Up and
Control” on page 4-15).
system can use it for comparison when a Calibration is performed.
To enter the value of the external calibrated leak, issue the
INIT-EXTLEAK<CR> command or, if the optional front control
panel is installed, enter the value via the Calibrated Leak Set-Up
screen (Section 4.6.1 “Calibrated Leak Set-Up” on page 4-13).
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Model 990 dCLD II Component Leak Detector
NORMAL
CALIBRATION
FAST
CALIBRATION
The NORMAL calibration routine performs a thorough tuning process and a system gain adjustment (calibration). The full tuning process involves independently scanning the ion source chamber
voltage and the variable focus voltage, and optimizing each value
for a maximum helium signal. Once the tuning process is complete, the preamplifier gain is adjusted to bring the leak detector
into calibration.
The SPEC TUBE LED on the front of the control unit flashes while
calibration is taking place, the Discrete I/O J3/22 is active, and the
response to the inquiry ?STATUS<CR> includes CAL. If the optional
front control panel is installed, the calibrate indicator LED lights
while calibration is taking place.
To set the mode to NORMAL, issue the 0 INIT-QUICK-CAL<CR>
command or, if the optional front control panel is installed, select
NORM from the CAL LEAK SET-UP screen (Section 4.6.1
“Calibrated Leak Set-Up” on page 4-13).
During FAST calibration, the leak detector compares the leak rate
signal with the calibrated leak value and, if the gain adjustment
required to bring the system into calibration is within the allowable
limits. The full tuning operation is omitted.
The SPEC TUBE LED on the front of the control unit flashes while
calibration is taking place, the Discrete I/O J3/22 is active, and the
response to the inquiry ?STATUS<CR> includes CAL. If the optional
front control panel is installed, the calibrate indicator LED lights
while calibration is taking place.
If the calibration parameters are set to INTERNAL, the system notes
the leak rate, turns off the leak and ZEROs the system. Then the system performs a NORMAL or FAST calibration as described above.
The SPEC TUBE LED on the front of the control unit flashes while
calibration is taking place, the Discrete I/O J3/22 is active, and the
response to the inquiry ?STATUS<CR> includes CAL. If the optional
front control panel is installed, the calibrate indicator LED lights
while calibration is taking place.
If the calibration parameters are set to EXTERNAL, the system performs a NORMAL or FAST calibration as described above.
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Model 990 dCLD II Component Leak Detector
NOTENo ZEROing takes place during an EXTERNAL calibration
because the 990 dCLD II has no control over the external
calibrated leak.
The SPEC TUBE LED on the front of the control unit flashes while
calibration is taking place, the Discrete I/O J3/22 is active, and the
response to the inquiry ?STATUS<CR> includes CAL. If the optional
front control panel is installed, the calibrate indicator LED lights
while calibration is taking place.
To set the mode to FAST, issue the 1 INIT-QUICK-CAL<CR> command or, if the optional front control panel is installed, select FAST
from the CAL LEAK SET-UP screen (Section 4.6.1 “Calibrated Leak
Set-Up” on page 4-13).
ZEROThe ZERO function reads the background leak rate signal, stores
the reading in memory, and then resets the zero reference point.
Subsequent actual test measurements include both helium from the
real leak and helium from background conditions, however, the
recorded background signal from the measurement is subtracted
and the resultant real leak rate is displayed.
NOTEPerforming the ZERO function while introducing helium to the
test object can result in the suppression of a real leak. Only use
ENABLE or DISABLE
REJECT SET POINTS
the ZERO function after the helium source has been removed.
To perform a ZERO function, assert J3/7 in the discrete I/O, issue
the ZERO<CR> command or, if the optional front control panel is
installed, press the ZERO button (Section 4.1 “Control Buttons” on
page 4-2).
Each REJECT SET POINT must be enabled before the function is
operational. Conversely, each must be disabled to stop its operation.
To ENABLE set points, issue the ENABLE-nREJECT<CR> command,
where n is equal to 1 through 4. If the optional front control panel
is installed, enable individual reject set points by setting the ON/
OFF buttons located to the right of each set point field to ON in the
Reject and Audio Set Points screen (Section 4.6.2 “Reject and
Audio Set Points” on page 4-14).
To DISABLE set points, issue the DISABLE-nREJECT<CR> command, where n is equal to 1 through 4. If the optional front control
panel is installed, disable individual reject set points by setting the
ON/OFF buttons to OFF in the Reject and Audio Set Points screen
(Section 4.6.2 “Reject and Audio Set Points” on page 4-14).
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Model 990 dCLD II Component Leak Detector
REJECT SET POINTSThe REJECT SET POINTS are used to alert the operator that a mea-
sured leak rate has exceeded the set value. There are four set points
available. Each set point must be enabled before they are operational.
To set the value of the REJECT SET POINTS, issue the
INIT-nREJECT<CR> command, where n is equal to 1 through 4. If
the optional front control panel is installed, enter the value through
the Reject and Audio Set Points screen (Section 4.6.2 “Reject and
Audio Set Points” on page 4-14).
ENABLE AUDIO
REJECT
AUDIO SET POINTThe AUDIO SET POINT control is used to activate the audio tone
AUDIO REJECT must be enabled before the function is operational
and reacts based upon its set point value.
To ENABLE the AUDIO set point, issue the ENABLE-AREJECT<CR>
command or, if the optional front control panel is installed, enable
AUDIO by setting the ON/OFF button located to the right of the
audio set point field to ON in the Reject and Audio Set Points screen
(Section 4.6.2 “Reject and Audio Set Points” on page 4-14).
To DISABLE the AUDIO set point, issue the DISABLE-AREJECT<CR>
command or, if the optional front control panel is installed, disable
AUDIO by setting the ON/OFF button to OFF in the Reject and
Audio Set Points screen (Section 4.6.2 “Reject and Audio Set
Points” on page 4-14).
from the optional front control panel when the measured leak rate
value exceeds the threshold value (leak rate pass/fail specification)
set by the operator. The audio tone frequency increases as the size
of the measured leak increases beyond the set point. As stated
above, you must enable AUDIO REJECT before the function is
operational. If AUDIO REJECT is disabled, the audio tone frequency will increase from zero leak rate instead of from the audio
reject set point.
The audio volume control is located on the optional front control
panel (see Figure 4-1 on page 4-1). The sound emanates from the
rear of the optional front control panel.
To set the Audio Reject set point, issue the INIT-AREJECT<CR>
command or, if the optional front control panel is installed, set the
audio reject set point value in the Reject and Audio Set Points screen
(Section 4.6.2 “Reject and Audio Set Points” on page 4-14).
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Model 990 dCLD II Component Leak Detector
LOG BAR
GRAPH DISPLAY
LINEAR BAR
GRAPH DISPLAY
LINEAR ANALOG
OUTPUT
1 V/DEC LOG
OUTPUT
In LOG BAR GRAPH DISPLAY mode, the 50-segment bar graph
display on the optional front control panel represents the entire
leak rate range of the leak detector, spanning from 10
0
to 10
LOG is displayed to the upper right of the bar graph.
In LINEAR BAR GRAPH DISPLAY mode, the 50-segment bar graph
display on the optional front control panel represents the mantissa
value of the leak rate, spanning from 0 to 10. The scale shows
below the bar graph and LIN is displayed to the lower right of the
bar graph. The numerical display, located to the far right of the bar
graph, displays the leak rate exponent value. This mode offers
exceptional resolution within a decade.
Set the display to LOG or LINEAR on the Output Control Set-Up
screen (Section 4.6.5 “Output Control Setup” on page 4-16).
ANALOG options allow you to configure the output voltage to the
I/O port (J3) on the back of the control unit. The options for output
are LINEAR and 1, 2, or 3 volts per decade LOGarithmic output.
To set the leak rate analog output to LOG, issue the INIT-nLOG
command, where n is 1, 2, or 3 volts or, if the optional front control
panel is installed, toggle to the desired LOG output value on the Output Control Set-Up screen (Section 4.6.5 “Output Control Setup” on
page 4-16).
atm cc/sec. The scale is displayed above the bar graph and
−11
atm cc/sec
To set the leak rate analog output to LINEAR, issue the
INIT-LINEAR<CR> command, if the optional front control panel is
installed, toggle to the LINEAR ANALOG OUTPUT on the Output
Control Set-Up screen (Section 4.6.5 “Output Control Setup” on
page 4-16).
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Model 990 dCLD II Component Leak Detector
AUTO-ZERO<0
ACTIVE
When AUTO-ZERO<0 is activated, it automatically adjusts the
zero reference point back up to zero when the helium level drops
below the previously set zero reference point. This feature ensures
that the leak detector maintains calibration after a previously
zeroed background signal naturally cleans up. The factory default
setting is active.
If the optional front control panel is installed, when the
AUTO-ZERO<0 feature is in the process of re-adjusting the zero
reference point, the UNDER light indicator located on the left end
of the bar graph illuminates.
The duration of time that the UNDER light stays on during this process is a function of how much helium is cleaning up and how fast
it is cleaning up. If the magnitude of helium clean up is great, the
UNDER light remains lit until the clean up rate has slowed or stabilized. Although leaks can be located in this state, quantitative testing must not be performed until the UNDER light is off. Occasional
flashing of the UNDER light indicates normal minor adjustments to
small changes in background. This does not impact the leak detector’s ability to accurately locate and measure leaks.
To set AUTO-ZERO<0 to active, issue the 1 INIT-AZ<0<CR> command or, if the optional front control panel is installed, set the
mode via the Zeroing screen (Section 4.6.6 “Zeroing” on
page 4-17).
AUTO-ZERO < 0
INACTIVE
When AUTO-ZERO<0 is inactive, the leak detector does not automatically adjust the zero reference point back up to zero when the
helium level drops below the previously set zero reference point.
When this occurs, issue the ZERO command to re-adjust the zero
reference point manually.
If the optional front control panel is installed, the UNDER light
remains lit, indicating that the background level is below the previously set zero reference point. Press the ZERO button on the front
panel to re-adjust the zero reference point manually. This clears the
UNDER light indication.
To set AUTO-ZERO<0 to inactive, issue the 0 INIT-AZ<0<CR>
command or, if the optional front control panel is installed, set the
mode via the Zeroing screen (Section 4.6.6 “Zeroing” on
page 4-17).
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3.4 Startup
Turn the power ON by placing the power switch in the l position.
When first powered, the control unit performs a front panel lamp test, lighting all LEDs, after
which the SPEC TUBE and HIGH VAC LEDs should extinguish and the POWER LED should
remain lit. The following short three-line identification is sent via the host serial port J6:
polyFORTHII <LF>
Varian 990II_dCLD <LF>
hi <LF>
The cursor is positioned on the next line and is blinking. After the messages are sent, the
control unit is running and ready to accept commands. See Appendix A “Communications
Protocol” for a listing of commands and Table 2-11 on page 2-15 for a cross reference of
commands in the different modes of operation.
Model 990 dCLD II Component Leak Detector
NOTEUnless otherwise stated, all commands must be issued in
capital letters.
The NOT READY line in the discrete I/O is active and the response to ?STATUS<CR>
contains RDY/, indicating that the 990 dCLD II is not ready. If IDLE is enabled
(see “IDLE MODE RUN MODE” on page 3-10), the control unit is waiting for the RUN
command to be issued. If IDLE is disabled, the unit is waiting for the pressure (as read by
the ConvecTorr™ gauge in the spectrometer) to be less than 1 Torr.
The forepump in the system should be able to pump the spectrometer tube through the high
vacuum pump to a pressure of much less than 1 Torr. When the spectrometer tube pressure
passes through 1 Torr and RUN is active (IDLE is disabled) the control unit starts the high
vacuum pump and waits for it to achieve the set speed (see ?SETUP in Appendix A
“Communications Protocol”, Table A-1 on page A-2). When the high vacuum pump
achieves operating speed, the HIGH VAC LED on the front panel illuminates. When the
pressure is less than 10 mTorr, the control unit sets the preamplifier offset and attempts to
light the ion source filament. Setting the preamplifier offset takes up to two minutes. During
this time, the SPEC TUBE LED flashes and a ?STATUS<CR> inquiry response contains ZRO.
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Model 990 dCLD II Component Leak Detector
When the ion source filament is successfully lit, the SPEC TUBE LED illuminates steadily,
the READY line in the discrete I/O is active and, after a short time for verification that the
ion source filament remains lit, the FILAMENT FAULT line in the discrete I/O becomes inactive. If you repeatedly issue the ?STATUS<CR> inquiry during this process, you see the
response change from containing RDY/ to RDY and FLT, and, after a short time, FLT/.
The system is ready when the 3 LEDs on the control unit front panel remain steadily lit.
If the vacuum system has been at atmosphere or the electronics have been off for longer
than a few minutes but less than a few hours, a wait of approximately 30 minutes is recommended so that the vacuum system and spectrometer tube can stabilize. During the stabilization period, the ZERO signal drifts, making zeroing and calibrating difficult.
NOTEAllow approximately 30 minutes for the system to stabilize
before running any tests if it has been off or IDLE for more than
a few minutes.
3.4.1 Start up Indications on the Optional Front Control Panel
If the optional front control panel is installed, the leak detector is ready for operation when
the SYSTEM READY indication appears on the Home Screen, the test mode is displayed in
the line above SYSTEM READY and the LED lights above the TEST/HOLD button (which is
inoperable on the 990 dCLD II). For more information see Section 4.4, “Touch Panel Home
Screen”. If the 990 dCLD II is being started after a long period of being off (several hours), it
can take up to 30 minutes to stabilize and provide reliable, quantitative leak rate readings.
3.4.2 Calibration
Calibration of the 990 dCLD II should be checked at least once every shift using a known
helium leak at a known temperature, such as the internal calibrated leak supplied with the
990 dCLD II. A pressure burst in the spectrometer tube, a blown Ion Source filament, a large
temperature change (over 10 °C), a power outage, contamination, or helium buildup in the
vacuum system are all factors that could affect calibration. The value of the calibrated leak
should be as close as possible to the decade most used during testing. This enhances the
accuracy of the leak detector.
To perform a calibration, set the parameters previously described in Section 3.3.1 “Parameters and Operating Modes” on page 3-7 and then issue the CALIBRATE<CR> command.
When calibration is complete, the systems should respond yes, to ?CALOK<CR>.
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3.4.3 Tuning
The 990 dCLD II is tuned to the spectrometer assembly at the factory. In normal operation,
the 990 dCLD II upon issue of the CALIBRATE<CR> command or upon request via the
optional front control panel (press the CALIBRATE button) performs a calibration to the
value of the calibrated leak in the system or to the value of an external leak. If you are calibrating to an external leak, it should be rough pumped before opening the isolation valve to
avoid excessive pressure and helium signal burst. A leak calibrated to the middle two
decades of the four decades of range based upon your system configuration is recommended for use during the calibration routine.
Manually tuning (see Section 5.6 “Manual Tuning” on page 5-20) the 990 dCLD II is more
likely to be necessary if:
Model 990 dCLD II Component Leak Detector
❑ The control unit is connected to a spectrometer assembly in the field other than the
one with which it was tested
❑ It cannot successfully CALIBRATE (respond yes to ?CALOK<CR>)
❑ The gain (?GAIN<CR>) is greater than 5.0
3.4.4 Running
❑ A board in the Platform is changed
❑ The ion source is changed
The 990 dCLD II senses the level of helium in the foreline of the high vacuum pump and
converts the signal into a leak rate based upon the latest calibration and zero parameters in
memory.
The leak rate is always available:
❑ Through the host serial port (J6) by entering the ?LEAK<CR> command
❑ By measuring the voltage at the analog voltage output on J3
❑ By reading the BCD output on J4
If the optional front control panel is installed, observe the leak rate bar graph display or the
leak rate displayed in the Home screen (Section 4.4 “Touch Panel Home Screen” on
page 4-7).
The leak rate is valid if the READY line in the discrete I/O is active (?STATUS<CR> response
contains RDY). In the event that the ready line is inactive, (?STATUS<CR> response contains
RDY/) a leak rate might be able to be read, but it would not be a valid leak rate. For example, if the active ion source filament is burned out, READY would be inactive and
FILAMENT FAULT would be active. This causes the host computer or PLC to halt testing and
signal for help. Appendix B “Customer Accessible Inputs and Outputs”contains a description of the available discrete I/O lines in the 990 dCLD II.
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Model 990 dCLD II Component Leak Detector
3.5 Quick Start Checklist
❑ Make the vacuum connections between the 990 dCLD II spectrometer assembly and
your vacuum system.
❑ Make electrical connections between the turbo spec tube assembly and the control
unit (see Section 3.1.3 “Connecting the Control Unit to the Turbo Spec Tube
Assembly” on page 3-2).
❑ Make mains power connection to the control unit.
❑ Power the 990 dCLD II by turning on the main power switch on the rear panel.
❑ Check that the POWER LED on the front panel of the control unit is lit after the
power on lamp test is completed.
❑ Make sure that either IDLE mode is disabled and/or that the RUN input is active.
❑ Start the backing pump(s).
❑ Check that the HIGH VAC LED lights after the turbo pump achieves the set speed.
❑ Check that the SPEC TUBE LED lights after the spectrometer tube pressure goes
below 10 mTorr.
❑ Allow the system to run for at least 30 minutes to stabilize.
❑ Calibrate the 990 dCLD II to a known helium leak.
❑ Zero the 990 dCLD II.
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Model 990 dCLD II Component Leak Detector
3.6 Operation via Rear Panel
Once setup is complete and the 990 dCLD II is warmed up, operation can be turned over
to the PLC by asserting PARALLEL ENABLE. Monitoring operations can take place using the
optional front control panel or PLC, or by issuing commands using a host computer
connected to the host serial port.
3.6.1 PARALLEL ENABLE
PARALLEL ENABLE turns control of the 990 dCLD II over to the PLC. Operations can be
monitored by issuing commands using a host computer connected to the host serial
port but most parameter values cannot be changed. If a command is issued that is not
allowed once PARALLEL ENABLE is asserted, the system responds cant. See Appendix A
“Communications Protocol”.
If the optional front control panel is installed, you can monitor operations via the bar
graph display, the SPEC-TUBE PRESSURE display, and view the HOME and SYSTEM
INFORMATION screens on the touch panel, but, again, you cannot change parameter
values. The CALIBRATE, READ STANDARD LEAK, and ZERO buttons are not functional.
If you have set AUDIO to ON during setup, it remains operational, however you cannot
change its set point value. If you attempt to initiate an action from the optional front control
panel that is not allowed once PARALLEL ENABLE is asserted, you hear a double beep. See
Appendix B “Customer Accessible Inputs and Outputs”.
To remove control from the PLC, you must de-assert PARALLEL ENABLE. Even if the system
is shut down with PARALLEL ENABLE asserted, control remains with the PLC.
NOTEIf PARALLEL ENABLE is asserted, but the ?STATUS<CR>
response contains RDY/, indicating that the 990 dCLD II is not
able to measure a leak rate, check to see if IDLE is enabled. If
IDLE is enabled (see Table 2-11 on page 2-15 or Appendix A
“Communications Protocol”), the control unit is waiting for the
RUN command.
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Model 990 dCLD II Component Leak Detector
3.7 Analog Leak Rate Output Voltage
To use the analog leak rate output voltage to measure leak rate, you must set the format of
the output voltage. The 990 dCLD II offers a choice of four leak rate output voltage formats
as shown in Table 3-2. The output voltage format is selected by entering the appropriate
command listed in Table 3-2, through the host serial port or, if the optional front control
panel is installed, through the Output Control Set-Up screen (see Section 4.6.5 “Output
Control Setup” on page 4-16).
Table 3-2 also shows the conversion formulas for each output. The last column of the table
references a graph to use for converting the output voltage to the leak rate for each output
option. These graphs are in Section 3.7.1 “Analog Leak Rate Output Voltage Conversion
Charts” on page 3-22.
Section 3.7.2 “Conversion of 2 V/Dec Log to Leak Rate if 10X Function Not Available” on
page 3-24 contains an explanation of the recommended output and conversion formula if
your PLC does not have a 10
Table 3-2Analog Leak Rate Voltage Outputs
x
function.
Output
Option
Linear 0 - 10 V INIT-LINEAR<CR> Vout /
1 V/decadeINIT-1LOG <CR>Leak Rate =
2 V/decadeINIT-2LOG<CR>Leak Rate =
3 V/decadeINIT-3LOG<CR>Leak Rate =
Set-up
Command
Leak RateVout
|RANGE variable|
(10
Vou t
10
10
10
10
10
10
/
|RANGE variable| +3
Vou t/2
/
|RANGE variable| +3
Vou t/3
/
|RANGE variable| +3
FormulaOutput Response
Curve
(Leak Rate) X
)
|RANGE variable|
(10
LOG (Leak Rate X
|RANGE variable| +3
10
2 X LOG (Leak Rate X
|RANGE variable|+3
10
3 X LOG (Leak Rate X
|RANGE variable| +3
10
)
)
)
)
Figure 3-3 on
page 3-22
Figure 3-4 on
page 3-22
Figure 3-5 on
page 3-23
Figure 3-6 on
page 3-23
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Model 990 dCLD II Component Leak Detector
3.7.1 Analog Leak Rate Output Voltage Conversion Charts
Use the charts below (Figure 3-3 to 3-6) to convert the output voltage to the leak rate.
Linear Analog Output Voltage
Leak Rate Mantissa = Output Voltage
10.0
9.0
8.0
7.0
6.0
5.0
4.0
3.0
2.0
1.0
Leak Rate Mantissa (Atm cc/Sec)
0.0
0.01.02.03.04.05.06.07.08.09.010.0
Output Voltage (V)
Figure 3-3Linear Leak Rate Output Voltage Response
1 V/Decade Log Analog Output Voltage
Leak Rate = 10^(Output Voltage)/10^(Top Range Variable + 3)
Output Voltage = LOG(Leak Rate X (10^(Top Range Variable + 3)))
1.00E+01
1.00E+00
1.00E-01
1.00E-02
1.00E-03
1.00E-04
1.00E-05
1.00E-06
Leak Rate (Atm cc/Sec)
1.00E-07
1.00E-08
1.00E-09
0.00.51.01.52.02.53.03.54.0
Output Voltage (V)
Top Range Variable
0
1
2
3
4
5
6
3-22
Figure 3-41 V/Decade Logarithmic Leak Rate Output Voltage Response
Page 73
1.00E+01
0
2
345
6
Model 990 dCLD II Component Leak Detector
2 V/Decade Log Analog Output Voltage
1.00E+00
1.00E-01
1.00E-02
1.00E-03
1.00E-04
1.00E-05
Leak Rate (Atm cc/Sec)
1.00E-06
1.00E-07
1.00E-08
1.00E-09
0.01.02.03.04.05.06.07.08.0
Output Voltage (V)
Top Range Variable
Figure 3-52 V/Decade Logarithmic Analog Output Voltage
3 V/Decade Log Analog Output Voltage
Leak Rate = 10^(Output Voltage/3)/10^(Top Range Variable + 3)
Output Voltage = 3 X LOG(Leak Rate X 10^(Top Range Variable + 3))
1
1.00E+01
1.00E+00
1.00E-01
1.00E-02
1.00E-03
1.00E-04
1.00E-05
1.00E-06
Leak Rate (Atm cc/Sec)
1.00E-07
1.00E-08
1.00E-09
0.01.02.03.04.05.06.07.08.09.010.0
Output Voltage (V)
Top Range Variable
Figure 3-63 V/Decade Logarithmic Analog Output Voltage
0
1
2
3
4
5
6
3-23
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Model 990 dCLD II Component Leak Detector
3.7.2 Conversion of 2 V/Dec Log to Leak Rate if 10X Function Not Available
To read leak rates in all four decades of the 990 dCLD II using the analog leak rate output
voltage, it is recommended that the 2 V/Decade Log format be used. Use the following
method to obtain the leak rate from the 2 V/Decade Log format if a 10
able in the host computer or PLC.
The leak rate is split into two integers; the first integer is the exponent of the leak rate, the
second integer is the mantissa of the leak rate.
Exponent = INT (Vout /2) - |RANGE variable| + 3
Where: INT ( ) is the integer part of the expression
Vout is the analog leak rate output voltage
RANGE variable is the RANGE number from the ?SETUP<CR> command or viewed through
the touch screen panel menu
| | is the absolute value of the expression inside the bars (change the sign to + if it is -)
Where:Y = 2.302259·(Vout / 2 - INT (Vout / 2))
INT ( ) is the integer part of the expression in parentheses
x
function is not avail-
3.8 Shutdown
Shutting down the 990 dCLD II is as simple as turning the power off by moving the power
switch on the rear panel to the
down. When the system is shut down, all valves controlled by the system close. Also, if the
PLC has asserted PARALLEL ENABLE when the system is shut down, it remains asserted and
control remains with the PLC when it is turned back on.
position. The system can be in any mode when it is shut
°
3-24
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Model 990 dCLD II Component Leak Detector
Section 4. Setup and Monitor Operations via the
Optional Front Control Panel
The Optional Front Control Panel of the 990 dCLD II is shown in Figure 4-1. It can be
mounted remotely from the control unit or directly onto the front face of the unit. Operation
controls include control buttons and a touch panel for the initial setup of the leak detector.
A three-position access key switch is also provided to prevent unauthorized changes of the
system setup commands.
➀➁
➆
Figure 4-1990 dCLD II Optional Front Control Panel
➈
➇➈
➂➃➄➅
➀ Touch Screen Panel The touch screen panel provides a convenient menu interface to
set up the 990 dCLD II and displays information about the system
while it is running.
➁ Leak Rate DisplayThe bar graph displays the leak rate in one of two forms:
❑ A mantissa on the bar and a numerical exponent
❑ Just the bar as a logarithmic bar graph display
The label at the right of the bar graph changes to indicate the cur-
➂ Spec-Tube
Pressure Display
rent mode of operation: LOG or LIN. When in LOG, the values
above the bar graph display the log scale 10
LIN, values below the bar graph display the linear scale 0 to 10.
If the leak rate goes below the zero point that has been set, UNDER
displays at the left of the bar graph. If the leak rate goes above the
highest set point, OVER displays at the right of the bar graph.
The bar graph displays the pressure in the spectrometer tube. The
graph changes color to indicate more or less favorable conditions.
−11
to 10−0; when in
4-1
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Model 990 dCLD II Component Leak Detector
➃ ZeroThe ZERO button is used to initiate a function that zeros the leak
rate. The LED illuminates while Zeroing is taking place.
➄ Read Standard Leak The READ STANDARD LEAK button is used to verify calibration by
exposing the internal calibrated leak to the system. The LED illuminates while the function is taking place.
➅ CalibrateThe CALIBRATE button is used to initiate an automated calibrate
function. The LED illuminates while calibration is taking place.
➆ Audio
Volume Control
➇ Key SwitchThe three-position key switch, SET-UP/RUN/SERVICE, is used to
NOTEThese panel items are not operational:
4.1 Control Buttons
The ZERO button is functional only when the key switch is in the SET-UP or
SERVICE positions, and when PARALLEL ENABLE is off.
The Audio Volume Control buttons are provided to change the volume level of the audio leak rate indication.
access and control operational parameters, as well as
service-related functions
❑ Test Port Pressure Bar Graph (displays as full)
❑ SNIFFER ON/OFF button
❑ VENT button
❑ TEST/HOLD button
The LED above the TEST/HOLD button lights when
the System is ready, it does not refer to the function
of the button.
4-2
Press the ZERO button to cause the 990 dCLD II to read the background leak
rate signal, store the reading in memory, and then reset the zero reference point.
While zeroing is taking place, ZEROING displays on the HOME screen operating state line and the ZERO button LED indicator lights.
NOTEPressing the ZERO button while you are introducing helium
tracer gas to the test object could result in the suppression of a
real leak. Only use the ZERO button after the helium tracer gas
source has been removed.
Page 77
Model 990 dCLD II Component Leak Detector
‘jP
The READ STANDARD LEAK button is functional only when the key switch is in
the SET-UP or SERVICE positions and when PARALLEL ENABLE is not asserted.
Press the READ STANDARD LEAK button to display the value on the bar graph,
and on the System Information screen allowing verification of 990 dCLD II calibration. When the system is in READ STANDARD LEAK mode, its LED indicator
lights and STD LEAK is displayed on the HOME screen operating state line.
After verifying the 990 dCLD II calibration, press the READ STANDARD LEAK
button to turn it off.
The CALIBRATE button is functional only when the key switch is in the SET-UP
or SERVICE positions, and when PARALLEL ENABLE is not asserted.
Press the CALIBRATE button to perform an automated calibration based upon
the parameters set on the Calibrated Leak Set-Up screen (Section 4.6.1
“Calibrated Leak Set-Up” on page 4-13). The calibrate indicator LED lights while
calibration is taking place and CALIBRATING is displayed on the HOME screen
operating state line.
The Audio leak rate indication volume is controlled by the two buttons labeled
HI and LOW and with up and down arrows. Press the HI arrow button to
increase the volume of the tone. Press the LOW arrow button to decrease the
volume of the tone.
When the leak rate bar graph display is set to LINEAR mode (see “Output
Control Setup” on page -16), the audio signal increases from a low to high pitch
as the leak rate increases within each decade. The pitch cycles low to high as it
passes through each decade.
When the leak rate bar graph display is set to LOG mode (see “Output Control
Setup” on page -16), the audio signal increases from a low to high pitch as the
leak rate increases through the entire bar graph scale.
If it is set up before PARALLEL ENABLE is asserted, the audio signal is operable.
The set point must be set before PARALLEL ENABLE is asserted.
4-3
Page 78
4.1.1 Key Switch
The 990 dCLD II Key Switch allows three different levels of access to the touch panel system controls, RUN, SET-UP or SERVICE. Two different keys are provided with the leak
detector:
❑ Key T008 operates the switch in either the RUN or SET-UP positions.
The T008 key is intended for use by a line supervisor or engineer.
In RUN mode (PARALLEL ENABLE is asserted), the control buttons are inoperable,
and the touch panel MENUS box is not displayed on the HOME screen, allowing
access to only SYSTEM and VERSION information. Leak rate can be observed on the
bar graph display, and pressure can be observed on the SPEC-TUBE PRESSURE display. If it was enabled before PARALLEL ENABLE was asserted, the Audio signal is
operational.
In SET-UP mode, the control buttons for zeroing, calibrating and reading internal leak
are functional, but the balance of the functions are the same as in RUN mode.
❑ Key T009 operates the switch in RUN, SET-UP or SERVICE positions.
The T009 key is intended for service personnel and those who are very familiar with
the operation of the unit, and those who are responsible for setting up and verifying
changes of the operating parameters. All menus and control buttons are operational
in SERVICE mode. RUN and SET-UP modes operate as discussed above.
Model 990 dCLD II Component Leak Detector
4.2 Touch Screen Menus
The 990 dCLD II optional front control panel has a touch panel display for the initial setup
and configuration of the leak detector parameters. Once the leak detector is set up, basic
operation and control is taken over by the PLC when PARALLEL ENABLE is asserted. The
instructions below apply to all menus of the touch panel.
4.2.1 Contrast Adjustment of the Touch Panel Display
Press the upper left or right corner of the Touch Panel Home Screen to change the contrast.
4-4
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Model 990 dCLD II Component Leak Detector
4.2.2 Changing Variables in Touch Panel Screens
Touching the box that contains the variable to be changed causes the first digit of the variable to be highlighted.
1. Touch the box for the parameter you want to change
to highlight the digit.
2. Touch the UP or DN arrow to change the value of
the highlighted digit.
3. Touch the NXT arrow to select the next digit to be
changed and set its value by repeating step 2.
4. Touch the OK box to accept changes and store the new value of the parameter into the
memory of the leak detector. Touch BACK to exit the screen and return to the previous
menu screen.
To change any digit, touch the box containing the parameter you want to change and then
touch the NXT arrow to scroll to that digit and change it, as indicated in step 2.
NOTETouching the ESC box before touching OK or BACK causes the
selected parameter to revert to its previously stored value.
4.2.3 Selecting Options in Touch Panel Screens
Many parameters are set via toggle boxes that you touch to switch between values or
modes. For example, Manual Range can be set to ON or OFF by touching the toggle box to
switch between displaying ON and OFF. In all cases, the information displayed in the box is
the selected value. Most screen values do not change until you press OK, but some changes
are immediate, for example, selecting the units from the UNITS SET-UP screen or selecting
Linear or Logarithmic display from the OUTPUT CONTROL SET-UP screen.
4-5
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Model 990 dCLD II Component Leak Detector
4.3 Menu Hierarchy
Figure 4-2 and Figure 4-3 show the hierarchy of the 990 dCLD II touch screen menus and
the parameters that can be changed from each menu. The numbers to the left of each menu
refer to the section in this document that discusses that menu in detail.
LINEAR ANALOG OUTPUTtoggle 1V/DEC, 2V/DEC, 3V/DEC LOG
LINEAR ANALOGOUTPUTtoggle1V/DEC, 2V/DEC, 3V/DEC LOG
LINEAR BAR GRAPH DISPLAY toggle LOG BAR GRAPH DISPLAY
LINEARBAR GRAPHDISPLAYtoggleLOG BAR GRAPHDISPLAY
AUTO-ZERO<0 AC TIVEtoggle INACTIVE
AUTO-ZERO<0 ACTIVEtoggleINACTIVE
See Figure 4-3
See Figure4-3
3
3
/sec
/sec
4-6
Figure 4-2Menu Hierarchy (up to Service Menu)
Page 81
Model 990 dCLD II Component Leak Detector
BACK
4.6
SeeFigure4-2
4.7
SERVICE
Main Menu
Screen
SERVICE
MENU
TO
MENU
TO
BACK
4.7.1
4.7.2
4.7.3
Figure 4-3Service Menu Hierarchy
4.4 Touch Panel Home Screen
The 990 dCLD II Touch Panel Home Screen, Figure 4-4, displays a summary of the status
and configuration that has been set, and has two touch screen boxes that either provide
access to information or change the configuration. The Home Screen is displayed on power
up and each time the RUN/SET-UP/SERVICE key is switched. The information provided on
the Home Screen is:
❑ Digital Leak Rate Display❑ Reject Status Indicator
❑ Operating States❑ Leak Detector Status
❑ Condition States❑
❑
SYS INFO touch screen box❑ MENUS touch screen box
Varian 990 dCLD II
LEAK RATE: XXXE-XX atm-cc/sec
Reject Status Indicator
Operating States
REJECT #2,4
SYS INFO
FINE TEST
SYSTEM READY
[Blank]Condition States
MENUS
Figure 4-4Touch Panel Home Screen
Digital Leak Rate
Leak Detector Status
4-7
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Model 990 dCLD II Component Leak Detector
0
1
2
3
45678910
-09
N
X10
c/sec
Digital Leak RateThe Digital Leak Rate displayed on the touch panel Home screen
correlates directly with the bar graph leak rate display when the
mantissa value of the leak rate is greater than one. Leak rate readings with a mantissa value of less than one are shown on the touch
panel Home screen with an exponent that is one decade below the
bar graph display exponent. The units are user selectable from the
Units Set-Up screen (see Section 4.6.3 “Units Set-Up” on
page 4-15).
For example, the bar graph displays 0.8 x 10 −09 atm cc/sec
(Figure 4-5), then the leak rate displayed on the touch panel Home
screen is 8.0E-10 (8.0 x 10 −10) atm cc/sec (Figure 4-6). This feature provides exceptional leak rate resolution.
LI
Figure 4-5Bar Graph Display: 0.8 x 10 −09 atm cc/sec
LEAK RATE: 8.0E-10 atm c
Figure 4-6Touch Panel Digital Display: 8.0E −10 atm cc/sec
Reject Status Indicator A REJECT status indicator displays below the Leak Detector Condi-
tion on the left-hand center of the Home screen when any of the
four independent set points are enabled and have been activated
(see Section 4.6.2, “Reject and Audio Set Points”). If all set points
are disabled or are not active, then this indicator is not present.
Leak Detector
Operating States
This line displays the current operating state. See Table 4-1 on
page 4-9 for a listing and description of the messages that can
appear here.
Leak Detector StatusThis line displays the current operating state of the 990 dCLD II.
Under normal operating conditions, this line reads SYSTEM
READY. See Table 4-2 on page 4-9 for a listing and description of
the messages that can appear here.
Leak Detector
Condition States
Under normal operating conditions, this line is blank. If a problem
occurs, it displays the condition that needs attention. See Table 4-3
on page 4-10 for a listing and description of the messages that can
appear here.
4-8
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Model 990 dCLD II Component Leak Detector
SYS INFO and MENUS
Touch Screen Boxes
Two touch screen boxes are displayed on the bottom of the Home
screen. Touch the SYS INFO box to display the System Info screen,
or touch the MENUS box to display the Main Menu screen.
NOTEFlashing C on the exponent display indicates that the leak
detector requires calibration.
Table 4-1990 dCLD II Operating States
DisplayDescription
CALIBRATINGIndicates that the leak detector is currently performing a calibration routine.
CALIBRATION PREPIndicates that the leak detector is preparing for a calibration routine.
FINE TESTIndicates that the leak detector is in FINE TEST mode. When in FINE TEST mode
the leak detector is ready for fine leak testing.
STD LEAKIndicates that the internal calibrated leak standard valve is open and the leak
detector is reading the leak value.
STD LEAK PREPIndicates that the internal calibrated leak standard is being roughed before it is
introduced to the system for calibration or verification.
ZEROINGIndicates that the leak detector is in the process of Zeroing out a background signal.
The Zero routine is only initiated automatically during the start up and calibration
routines, or manually when the operator presses the ZERO button on the optional
front control panel.
Table 4-2990 dCLD II Leak Detector Status
DisplayDescription
FILAMENT WAITIndicates that the system is lighting the filament.
OFFSET WAITIndicates that the system is setting the OFFSET value during the
start-up routine.
SPEC TUBE PRESSURE WAITIndicates that the system (spectrometer tube) pressure is too high to
light the filament.
STABILIZATION WAITIndicates that the system is waiting for the electronics to stabilize
before completing the start-up routine.
SYSTEM READYIndicates that the system is ready for testing. This message is only
present during the initial start-up. Flashing C on the exponent display
indicates that the leak detector requires calibration.
ZEROING WAITIndicates that the system is setting the initial zero values during the
start-up routine.
4-9
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Model 990 dCLD II Component Leak Detector
Table 4-3990 dCLD II Condition States
DisplayDescription
[BLANK]This line is blank under normal operating conditions.
BOTH FILAMENTS BURNT OUTIndicates that both filament 1 and filament 2 of the ion source have
burnt out.
FILAMENT 1 BURNT OUTIndicates that filament 1 of the ion source has burnt out. Filament 2
automatically illuminates, if it is still good, and the optional front control
panel displays a flashing C in the leak rate exponent indicating that a
calibration routine is required.
FILAMENT 2 BURNT OUTIndicates that filament 2 of the ion source has burnt out. Filament 1
automatically illuminates, if it is still good, and the optional front control
panel displays a flashing C in the leak rate exponent indicating that a
calibration routine is required.
GAIN TOO HIGHIndicates that the gain value required to calibrate the leak detector
during the calibration routine is greater than the allowable value. This
is generally the result of the system sensitivity being too low.
GAIN TOO LOWIndicates that the gain value required to calibrate the leak detector
during the calibration routine is less than the allowable value. This is
generally the result of the system sensitivity being too high.
NO FOCUS PEAKIndicates a tuning/calibration failure due to the system not detecting a
focus peak during the tuning or calibration routine.
NO ION PEAKIndicates a tuning/calibration failure due to the system not detecting
an ion peak during the tuning or calibration routine.
SWITCHING FILAMENTSIndicates that the system is momentarily in the process of switching
from a burnt out filament to the next available filament.
4-10
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Model 990 dCLD II Component Leak Detector
4.5 System Information Screen
The System Information screen, Figure 4-7, displays details of the leak detector setup and
operating conditions. Table 4-4 describes the displayed system information in detail.
SYSTEM INFORMATION
FIL 2 ON
TURBO SLOW
INT CAL LEAK:
REJECT SET POINT #
AUDIO SET POINT:
GAIN LEVEL:
PARALLEL: DISABLED
Figure 4-7System Information Screen, Typical Display
Touch the box labeled BACK to return to the Home screen. Touch the box labeled VER to
display the System Software Version screen.
4.0E-06
5.0E-08
0.7
AUTO ZERO
atm-cc/sec
1,2
ENABLED
atm-cc/sec
VER
<0
ACTIVE
BACK
a
Table 4-4System Information Screen Conditions
ConditionDisplayDescription
AUDIO SET-POINTAUDIO SET POINT: X.XE-XXAudio Set Point is active, and is set at the
value displayed.
AUDIO SET POINT: INACTIVEAudio Set Point is inactive.
CALIBRATED LEAKINT CAL LEAKSystem is set up to calibrate to the internal
standard leak.
EXT CAL LEAKSystem is set up to calibrate to an external
standard leak.
ION SOURCE FILAMENT FIL 1 OFFFilament 1 is selected and not lit.
FIL 1 ONFilament 1 is selected and lit.
FIL 2 OFFFilament 2 is selected and not lit.
FIL 2 ONFilament 2 is selected and lit.
REJECT SETPOINTREJECT# 1,2,3,4 ENABLEDReject set points displayed are active. If
blank, all set points are disabled or inactive.
TURBO PUMPTURBO FASTSystem turbo pump is operating at high
speed.
TURBO SLOWSystem turbo pump is operating at slow
speed.
4-11
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Model 990 dCLD II Component Leak Detector
4.5.1 System Software Version
The System Software Version screen (Figure 4-8) provides system software revision information and the phone number for Varian.
SYSTEM INFORMATION
FIL 2 ON
TURBO SLOW
INT CAL LEAK:
REJECT SET POINT #
AUDIO SET POINT:
GAIN LEVEL:
PARALLEL: DISABLED
4.0E-06
0.7
AUTO ZERO
atm-cc/sec
1,2
ENABLED
5.0E-08
VER
Touch the VER box. VERSION PLEASE WAIT is displayed while the inquiry takes place.
The VERSION screen then displays the revision date and checksum of the main CPU and
the optional front control panel CPU software. Inquiry of the checksum information takes
several seconds.
<0
atm-cc/sec
Figure 4-8Software Version Screen
ACTIVE
BACK
VERSION
AAXX.XX
AAXX.XX
1-800-882-7426
XXXXXX
XXXXXX
This screen automatically reverts to the System Information screen approximately
15 seconds after the revision data is displayed in full.
4-12
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Model 990 dCLD II Component Leak Detector
4.6 Main Menu Selection Screen
Touch the MENUS box on the Home screen to display the Main Menu screen (Figure 4-9).
The Main Menu screen displays the screens available for performing general setup of the
990 dCLD II. Touching the BACK box from this screen displays the Home screen. The
screens available through the Main Menu screen are described in this section. Many menus
contain toggle boxes that switch between selections each time you touch them. The value
or selection that is displayed when you touch OK, is what is set. Other menus contain
parameters. Change their values by following the procedure in Section 4.2.2 “Changing
Variables in Touch Panel Screens” on page 4-5.
Figure 4-9Main Menu Selection Screen
4.6.1 Calibrated Leak Set-Up
Touch the SET-UP CAL LEAK box to display the Calibrated Leak Set-Up screen, shown in
Figure 4-10. It is used to set the values of the Internal and External Calibrated leaks, to select
whether to use an INTERNAL or EXTERNAL calibrated leak standard for calibration, and to
select NORMAL or FAST CALIBRATION mode.
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
SET-UP
TO
SERVICE
MENU
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING
SCREEN
TO
SERVICE
MENU
BACK
CALIBRATED LEAK SET-UP
INTERNAL LEAK VALUE: X.XE-XX
EXTERNAL LEAK VALUE: X.XE-XX
USE
INT
LEAK
USE
NORM
CAL
OK
ESC
UNITS
SET-UP
ZEROING
SCREEN
BACK
DN
UP
Figure 4-10Calibrated Leak Set-Up Screen
NXT
BACK
4-13
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Model 990 dCLD II Component Leak Detector
4.6.1.1 Selecting Internal or External Calibrated Leak for Calibration
Touch the USE INT/EXT LEAK toggle box to switch between selecting whether the
990 dCLD II performs an automated calibration to the internal calibrated leak standard supplied with the leak detector, or to an external calibrated leak placed in the test port.
INTERNAL LEAKTouch the USE INT/EXT LEAK toggle box to switch to USE INT
LEAK. Check or change the values of the internal leak in the
INTERNAL LEAK VALUE box. The values you enter must be in the
units specified in the Units Set-Up screen (Section 4.6.3 “Units
Set-Up” on page 4-15).
EXTERNAL LEAKTouch the USE INT/EXT LEAK toggle box to switch to USE EXT
LEAK. Check or change the values of the external leak in the
EXTERNAL LEAK VALUE box. The values you enter must be in the
units specified in the Units Set-Up screen (Section 4.6.3 “Units
Set-Up” on page 4-15).
4.6.1.2 Selecting Normal or Fast Calibration Routine
Touch the USE NORM/FAST CAL toggle box to switch between NORMAL CALIBRATION
and FAST CALIBRATION modes.
4.6.2 Reject and Audio Set Points
Touch the REJECT & AUDIO SET POINTS box to display the Reject and Audio Set Points
screen (Figure 4-11). From this screen, set the parameters to enable/disable, display and/or
change the value of the four reject set points and the audio set point using the procedure
outlined in “Changing Variables in Touch Panel Screens” on page -5.
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
UNITS
SET-UP
SET-UP
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING
ZEROING
SCREEN
SCREEN
Figure 4-11Reject and Audio Set Points Screen
TO
SERVICE
MENU
BACK
REJECT AND AUDIO SET POINTS
REJECT SET POINT #1: X.XE-XX
REJECT SET POINT #2: X.XE-XX
REJECT SET POINT #3: X.XE-XX
REJECT SET POINT #4: X.XE-XX
AUDIO SET POINT:X.XE-XX
DN
UP
NXT
OFF
ON
OFF
OFF
ON
OK
ESC
BACK
4-14
REJECT SET POINTSTouch the REJECT SET POINT #1(2, 3 or 4) box to change each
reject’s set point value. Touch the ON/OFF toggle box located to
the right of each set point field to turn the Reject Point on or off.
AUDIO SET POINTTouch the AUDIO SET POINT box to change the threshold leak
rate value. Touch the ON/OFF toggle box located to the right of the
audio setpoint box to turn the Audio Set Point on or off.
Page 89
4.6.3 Units Set-Up
Touch the UNITS SET-UP box to display the Units Set-Up screen (Figure 4-12). This setup
screen is used to select the leak rate and pressure units that are displayed on the leak rate
bar graph, and in the Gauge Calibration screen, Section 4.7.3 “Gauge Calibration” on
page 4-20. Note, this change is effective immediately upon selection.
Model 990 dCLD II Component Leak Detector
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
SET-UP
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING
SCREEN
TO
SERVICE
MENU
BACK
LEAK RATEPRESSURE
Figure 4-12Units Set-up Screen
LEAK RATE UNITSTouch the LEAK RATE units selection box to switch the leak rate
units between atm-cc/sec, mbar-l/sec, Torr-l/sec, and Pa-m
PRESSURE UNITSTouch the PRESSURE units selection box to switch units between
Torr, mbar, and Pa.
4.6.4 Range Stop and Manual Range Set Up and Control
Touch the LEAK RATE RANGE SET-UP box to display the Leak Rate Ranging Set-Up screen
(Figure 4-13). From this screen, set up and enable the RANGE STOP and MANUAL RANGE
functions, set the TOP RANGE, and control the TURBO speed. For a discussion of how to
determine these values, see Section 3.3.1 “Parameters and Operating Modes” on page 3-7.
UNITS SET-UP
USE
atm-cc/sec
USE
To rr
BACK
3
/sec.
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
SET-UP
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING
SCREEN
TO
SERVICE
MENU
BACK
MANUALRANGE
DN
LEAK RATE RANGING SET-UP
RANGE
10-XX
OFFON
UP
Figure 4-13Leak Rate Ranging Set-Up Screen
STOP
10-XX
NXT
TOP
RANGE
10-XX
TURBO
SPEED
FAST
OK
ESC
BACK
4-15
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Model 990 dCLD II Component Leak Detector
MANUAL RANGETo read out one fixed decade, touch the MANUAL RANGE ON/
OFF toggle box to display ON and then set the value of the decade
in the MANUAL RANGE box. This value must be set between the
values of the TOP and STOP Range; other values are rejected.
Auto-Ranging
ENABLED
When MANUAL RANGE is set to OFF, Auto-Ranging is enabled.
The system reads out a maximum four decades starting from the
value set for the TOP RANGE parameter. If RANGE STOP is ON,
the system measures from the TOP RANGE decade to the RANGE
STOP decade.
RANGE STOPWhen Auto-Ranging is enabled (MANUAL RANGE is set to OFF),
you can limit the range to less than four decades. Touch the
RANGE STOP ON/OFF toggle box to display ON and then set the
decade in the RANGE STOP box. The system then measures from
the TOP RANGE decade to the RANGE STOP decade.
TOP RANGESet the TOP RANGE to the least sensitive value the configured sys-
tem will evaluate. See Table 3-1 on page 3-6 and “TOP RANGE”
on page 3-8 for a discussion of how to determine this value.
4.6.4.1 Leak Rate Range Selection through Turbo Speed Set-Up
The 990 dCLD II electronics allow for the display of only four full decades of sensitivity at
one time. The four decades displayed depend on the pump model being used in conjunction with the TURBO SPEED and TOP RANGE selection set by the user.
Touch the TURBO SPEED FAST/SLOW toggle box to switch between SLOW and FAST. The
mode displayed indicates the current speed of the turbo.
4.6.5 Output Control Setup
Touch the OUTPUT CONTROL SET-UP box to display the Output Control Set-Up screen
(Figure 4-14). From here, select the desired leak rate output and type of bar graph display.
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING
SCREEN
Figure 4-14Output Control Set-Up Screen
4-16
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
SET-UP
TO
SERVICE
MENU
BACK
OUTPUT CONTROL SET-UP
1V/DEC
LOG
OUTPUT
LINEAR
BAR GRAPH
DISPLAY
BACK
Page 91
Model 990 dCLD II Component Leak Detector
4.6.5.1 Bar Graph Display Set-Up
Touch the LINEARBAR GRAPH DISPLAY toggle box to switch the bar graph display
between LOG BAR GRAPH DISPLAY mode and LINEAR BAR GRAPH DISPLAY mode.
Note, this change is effective immediately upon selection.
4.6.5.2 Leak Rate Analog Output Voltage Selection
Touch the LEAK RATE OUTPUT selection box located at the left of Output Control Set-Up
screen to switch the output voltage at the I/O port (J3 or J4) on the back of the control unit
among the selections listed below.
LINEAR ANALOG
OUTPUT
Convert the voltage to the leak rate using the appropriate chart in Section 3.7 “Analog Leak
Rate Output Voltage” on page 3-21.
4.6.6 Zeroing
Touch the ZEROING SCREEN box to display up the Zeroing screen shown in Figure 4-15.
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
SET-UP
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING
SCREEN
Touch the box to switch between LINEAR ANALOG OUTPUT or
LOG output voltage selections, which are 1V/DEC LOG, 2V/
DEC LOG and 3V/DEC LOG.
<Ø
ZEROING
ACTIVE
BACK
TO
SERVICE
MENU
AUTO-ZERO
BACK
Figure 4-15Zeroing Screen
Touch the AUTO-ZERO<0 box to switch AUTO-ZERO<0 between ACTIVE and INACTIVE
states. Touch BACK to return to the Main Menu. Note, this change is effective immediately
upon selection.
4-17
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Model 990 dCLD II Component Leak Detector
4.7 Service Menus
The Service Menus are mainly used by service technicians to provide service to your system. There are times, however, that you may want to view the information that is accessed
via these screens to troubleshoot a situation, or you may be asked to provide this information to a service technician.
Touch the TO SERVICE MENU box on the Main Menu to display the Service Menu Selection screen as shown in Figure 4-16, or BACK to return to the Home Screen.
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
SET-UP
CAUTIONMany of the values for the parameters included in the Service
4.7.1 Manual Calibration
Touch the MANUAL CALIBRATE box to display the Manual Calibration screen shown in
Figure 4-17.
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING
SCREEN
TO
SERVICE
MENU
BACK
MANUAL
CALIBRATE
MANUAL
TUNING
Figure 4-16Service Menu Selection Screen
Menus are calculated when the 990 dCLD II performs functions
such as CALIBRATE and ZERO. Changing these values can
cause unreliable test results.
GAUGE
CAL
BACK
4-18
MANUAL
CALIBRATE
MANUAL
TUNING
GAUGE
CAL
BACK
GAIN: X.X
DN
MANUAL CALIBRATION
UP
NXT
OK
ESC
BACK
Figure 4-17Manual Calibration Screen
You can use the Manual Calibration screen to view or change the calculated Gain. Setting
the gain greater than 5.0 or less than 0.5 causes the system to report an unsuccessful calibration and revert to the values stored prior to calibration.
Page 93
4.7.2 Manual Tuning
Touch the MANUAL TUNING box to view the Manual Tuning screen shown in Figure 4-18.
Model 990 dCLD II Component Leak Detector
MANUAL
CALIBRATE
MANUAL
TUNING
GAUGE
CAL
BACK
REPELLER V:
EMISSION I: X.XXX
ION V: XXX
VAR FOCUS: XXX
DN
UP
MANUAL TUNING
XXX
FACTORY
PRE-SET
VAL UES
FIL
1
ACTV
GAIN X.X
BACK
Figure 4-18Manual Tuning Screen
You may need to manually tune the 990 dCLD II if:
❑ The control unit is connected to a spectrometer assembly in the field other than the
one with which it was tested
❑ It cannot successfully CALIBRATE
❑ The gain is greater than 5.0
❑ A board in the Platform is changed
❑ The ion source is changed
OK
ESC
Refer to Section 5.6 “Manual Tuning” on page 5-20 for detailed instructions on Manual Tuning.
Touch the FACTORY PRE-SET VALUES box to change the values to those set at the factory.
Note, this change is effective immediately upon selection.
The Manual Tuning screen allows you to change the REPELLER V, EMISSION I, ION V,
VAR FOCUS values.
4-19
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Model 990 dCLD II Component Leak Detector
4.7.3 Gauge Calibration
Touch the GAUGE CAL box to view the Gauge Calibration screen shown in Figure 4-19.
MANUAL
CALIBRATE
MANUAL
TUNING
GAUGE
CAL
SPEC-TUBE TC ZERO
SPEC-TUBE TC ATM
SPEC-TUBE PRESSURE:
BACK
GAUGE CALIBRATION
7.6
E + 02 Tor r
OK
ESC
BACK
Figure 4-19Gauge Calibration Screen
The Gauge Calibration screen displays the spectrometer tube pressure. Use this screen to
calibrate the gauge following the procedure below:
1. With the system running, move to this screen and touch SPEC-TUBE TC ZERO. Verify
that Passed appears to the right of TC ZERO.
2. Power off the 990 dCLD II.
3. Loosen the Turbo Vent screw and repower the system.
4. Power on the 990 dCLD II.
5. Move to this screen and touch SPEC-TUBE TC ATM. Verify that Passed appears to the
right of TC ATM.
If Failed appears after either test, the ConvecTorr gauge must be replaced.
4-20
Page 95
Model 990 dCLD II Component Leak Detector
Section 5. Maintenance
Like other sensitive test equipment, a mass spectrometer leak detector requires periodic
maintenance to ensure continued reliable operation. After prolonged use, the leak detector
accumulates contaminants from even the cleanest of products tested. These contaminants
eventually impair operation. A thorough disassembly and cleaning of the entire vacuum
system, which includes the cal leak valve block and spectrometer tube, restores normal
operation. For heavy production use, more frequent overhauls may be needed. Conversely,
lighter use may permit a longer period between overhauls. In most cases, this work is done
by user maintenance personnel, but it may also be done by Varian under the terms of a service contract.
This maintenance section does not cover overhaul of the entire vacuum system, nor does
it cover customer-supplied parts except for the brief discussion regarding pumps below. It
does cover maintenance that may have to be performed on a daily or as-required basis or,
if the item has not required maintenance, on an annual preventive basis.
Customer-Supplied Pumps
Most pumps require regular maintenance. Oil gets contaminated over time and has to
be replaced. In a system with dry pumps, tip seals have to be checked for wear. The customer-supplied roughing and forepumps of the system must be maintained at the intervals
recommended by their manufacturer for this application in order to ensure reliable leak
detection by the 990 dCLD II.
Important Reminders
Heed the following notes, cautions, and warnings when performing maintenance.
WARNINGDisconnect power from the 990 dCLD II before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
CAUTIONThe preamplifier is a static sensitive device. Wear a grounding
device while the preamplifier is being handled.
WARNINGStore the Ion Source in a cool, dry area in a tightly sealed
container. When handling the Ion Source, wear powder-free
butyl or polycarbonate gloves. If you handle the Ion Source
with bare hands, wash them thoroughly and especially before
smoking or eating.
5-1
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Model 990 dCLD II Component Leak Detector
Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are
some techniques more important in leak detector servicing than in general vacuum work:
CAUTIONDo not use silicone oil or silicone grease.
Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
Do not clean any aluminum parts with Alconox
®
. Alconox is
not compatible with aluminum and will cause damage.
NOTENormally, it is unnecessary to use vacuum grease. However, if it
must be used, avoid silicone types, and use it sparingly.
®
Apiezon
L grease is recommended (Varian Part No.
695400004).
When removing, checking or replacing O-rings:
CAUTIONRemove O-rings carefully with your fingers. Do not use metal
tools for this task. This prevents scratching of any sealing
surfaces.
Do not use alcohol, methanol or other solvents on O-rings. To
do so causes deterioration and reduces their ability to hold a
vacuum.
Do not use grease or other substance on O-rings that will come
in contact with the spectrometer tube.
Wipe all O-rings clean with a lint-free cloth before installation
to ensure that no foreign matter is present to impair the seal.
Apply a small amount of Apiezon
®
L grease and wipe the
O-rings “shiny” dry.
5-2
NOTEDue to the effective cleaning nature of VacuSolv solvent and its
residue-free properties, Varian’ Component and Spectrometer
Tube Cleaning Kit (Part Number 670029096), used in
accordance with the kit instructions, is recommended for
cleaning the spectrometer tube components. The kit can also be
used for fine cleaning of other parts in the leak detector’s
vacuum system such as valves and fittings. No rinsing steps or
high-temperature drying is required following cleaning with
VacuSolv. Although appropriate precautions are advised,
VacuSolv is compatible with most materials and does not
contain toxic chemicals or CFCs (chlorofluorocarbons).
Page 97
Model 990 dCLD II Component Leak Detector
For simplicity, the maintenance functions in this section are grouped by recommended
frequency, as shown in Table 5-1, based on assumed everyday use.
Table 5-1Scheduled Maintenance
DescriptionDaily12 MonthsRefer to
Calibration check
Recalibrate the internal calibrated leak
Spectrometer tube overhaul
Dual air intake filter replacement
These functions can be carried out at routine intervals, as indicated. The 990 dDLD II must
be calibrated to verify sensitivity at least once a day. However, other functions may be carried out either more or less often, depending on the frequency of use.
Maintenance functions that may be required on a demand basis, for example, changing an
Ion Source after filament failure, are listed in Table 5-2.
Table 5-2As-required Maintenance
X
X
X
X
Section 5.1 “Daily
Maintenance” on page 5-4
Section 5.2 “Recalibrate
the Internal Calibrated
Leak” on page 5-5
Section 5.3 “Spectrometer
Tube Overhaul” on
page 5-5
Section 5.4 “Dual Air
Intake Filter Replacement”
on page 5-18
FunctionMost Common SymptomRefer to
Spectrometer tube cleaningLoss of sensitivity, increase in background,
high ion voltage (> 300 VDC), required to tune
the leak detector.
Ion source replacementFilament failure (as soon as convenient after
second filament is in use).
Tuning adjustmentsUse of a calibrated leak in the field other than
the one tested at the factory, or if calibration is
not successful.
Section 5.3 “Spectrometer
Tube Overhaul” on
page 5-5
Section 5.5 “Ion Source
Replacement Outside of
Spectrometer Tube Overh
aul” on page 5-19
Section 5.6 “Manual
Tuning” on page 5-20
5-3
Page 98
Model 990 dCLD II Component Leak Detector
5.1 Daily Maintenance
5.1.1 Sensitivity Check using the Optional Front Control Panel
1. Press the READ STANDARD LEAK button.
2. Compare the value displayed on the HOME screen (Section 4.4, “Touch Panel Home
Screen”) to the value of the known calibrated leak displayed on the SYSTEM
INFORMATION screen (Section 4.5 “System Information Screen” on page 4-11) or listed
on the tag of the calibrated leak. Adjust the value for temperature if necessary.
❑ If the values do not match, press the CALIBRATE button to perform an automated
calibration and then repeat step 1.
❑ If specification is still not met, Manual Tuning may be required. See Section 5.6
“Manual Tuning” on page 5-20.
5.1.2 Sensitivity Check using the Diagnostic Serial Port J12
1. Send the inquiry ?STDLEAK<CR>.
2. Compare the value returned in the response to the value of the known internal
calibrated leak.
❑ If necessary, adjust the value for temperature.
3. If the values do not match, perform an automated calibration:
❑ Issue the INTERNAL<CR> command to ensure performing an internal calibration.
❑ Issue the 0 INIT-QUICK-CAL<CR> command to ensure pilfering a full calibration.
❑ Issue the CALIBRATE<CR> command to perform the calibration.
❑ The system should respond ok<CR><LF>.
4. Repeat step 1.
If specification is still not met, Manual Tuning may be required. See Section 5.6
“Manual Tuning” on page 5-20.
5-4
Page 99
Model 990 dCLD II Component Leak Detector
5.2 Recalibrate the Internal Calibrated Leak
Helium calibrated leaks typically degrade at 3 percent per year. The calibrated leak supplied with your 990 dCLD II must be checked at least once a year to ensure it is at the value
stated on its tag. Failure to check the leak could result in unreliable testing. You can arrange
for testing and re-calibration at a lab of your choice.
Varian provides NIST-traceable calibrated leak testing and verification services. You can
contact Customer Service at 1-800-8VARIAN (1-800-882-7426) to arrange for re-calibration.
5.3 Spectrometer Tube Overhaul
Spectrometer tube overhaul consists of removing, cleaning, and re-installing the
990 dCLD II Spectrometer Tube Assembly. There are four basic sub-assemblies in the spectrometer tube. Removal instructions follow in the order below.
❑ Thermocouple Button (TC)
❑ Ion Source
❑ Preamplifier
❑ Magnetic Poles
Table 5-3 lists the tools and parts required during spectrometer tube overhaul.
Table 5-3Tools and Parts Required for Spectrometer Tube Overhaul
Tools
Slotted screwdriver
5/64" Hex wrench
Part NumberDescription
82850302Ion Source
R1266301Button Thermocouple (Button TC)
670029096Varian
Spectrometer Tube Cleaning Kit
O-rings (Parker 2-025 V747-75 Black)
Supplied with Ion Source, Button TC and
Preamplifier
5-5
Page 100
Model 990 dCLD II Component Leak Detector
5.3.1 Removing the Spectrometer Tube Assembly
The spectrometer tube operates at a very high vacuum produced by the high vacuum pump.
Service of the spectrometer tube requires that this vacuum be vented to the atmosphere.
NOTERebuilt spectrometer tubes are available from Varian on an
exchange basis. Contact Varian Customer Service at
1-800-8VARIAN (1-800-882-7426) for details.
1. Loosen the hold-down screw
spectrometer assembly (Figure 5-1).
➀ to remove the spec tube block connector from the
➀
Figure 5-1Removing the Spec Tube Block Connector
2. Remove the turbo fan power connection and the turbo pump power connection from
the spec tube block connector.
5-6
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