Varian 990 dCLD II Operation Manual

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Model 990 dCLD II
NOTICE: This document contains references to Varian. Please note that Varian, Inc. is now part of Agilent Technologies. For more information, go to
www.agilent.com/chem.
Component
Leak Detector
vacuum technologies
OPERATIONS MANUAL
Manual No. 699909694 Revision F April 2007
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Model 990 dCLD II
Component Leak Detector
shown with Optional Front Control Panel
DRAFT 4/2007
Contra-Flow, MacroTorr, ConvecTorr, TriScroll, and VacuSolv are trademarks or registered trademarks of Vacuum Technologies.
Alconox is a registered trademark of Alconox, Inc.
Apiezon is a registered trademark of M&I Materials Ltd.
Loctite and PST are registered trademarks of Loctite Corporation.
Scotch-Brite is a trademark of 3M Corporation.
Slo-Blo is a registered trademark of Littelfuse, Inc.
Copyright 2007
Varian, Inc.
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Model 990 dCLD II Component Leak Detector
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of the Product. Items expendable in normal use are not covered by this warranty. All warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired portion of the original warranty period applicable to the repaired or replaced parts. After expiration of the applicable warranty period, Customer shall be charged at the then current prices for parts, labor, and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto, and must be received within the applicable warranty period by Seller or its authorized representative. Such claims should include the Product serial number, the date of shipment, and a full description of the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjustment, written authorization from Seller or its authorized representative for the return and instructions as to how and where these Products should be returned must be obtained. Any Product returned to Seller for examination shall be prepaid via the means of transportation indicated as acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on any item that has been altered or has been returned by non-acceptable means of transportation. When any Product is returned for examination and inspection, or for any other reason, Customer shall be responsible for all damage resulting from improper packing or handling, and for loss in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for determining the cause and nature of failure, and Seller’s determination with regard thereto shall be final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will be notified and the Product returned at its expense; in addition, a charge for testing and examination may be made on Products so returned.
3/1/00
DRAFT 4/2007
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Model 990 dCLD II Component Leak Detector
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Model 990 dCLD II Component Leak Detector
Table of Contents
Declaration of Conformity
Preface ..............................................................................................................................................xv
Hazard and Safety Information ...................................................................................................xv
Vacuum Equipment and Cleanliness ...................................................................................xvi
O-ring Care ..........................................................................................................................xvi
Contacting Varian ..................................................................................................................... xvii
Section 1. Introduction to the Model 990 dCLD II ........................................................................... 1-1
1.1 Unpacking the 990 dCLD II .................................................................................................1-1
1.2 Control Unit ..........................................................................................................................1-2
1.2.1 Front Panel Connections.............................................................................................1-2
1.2.2 Rear Panel Connections and Controls........................................................................ 1-3
1.3 Turbomolecular Pump Spectrometer Tube Assembly .........................................................1-4
1.4 Cables.................................................................................................................................. 1-5
1.5 Mating Connectors...............................................................................................................1-5
1.6 Optional Front Control Panel ............................................................................................... 1-5
1.7 Specifications....................................................................................................................... 1-6
Section 2. Customer Integration .....................................................................................................2-1
2.1 Physical Considerations ......................................................................................................2-1
2.2 Common Configurations ......................................................................................................2-2
2.2.1 Single Mechanical Pump Configuration ...................................................................... 2-4
2.2.2 Dual Mechanical Pump Configuration......................................................................... 2-5
2.2.3 Split Flow Dual Mechanical Pump Configuration ........................................................ 2-6
2.3 Size of Mechanical Pumps...................................................................................................2-7
2.4 Electronic Considerations .................................................................................................... 2-8
2.4.1 Discrete I/O J3 Inputs..................................................................................................2-8
2.4.2 Discrete I/O J3 Outputs............................................................................................. 2-10
2.4.3 BCD J4 Outputs ........................................................................................................ 2-12
2.4.4 Host Serial Port J6 .................................................................................................... 2-14
2.5 Operating Modes Commands Cross Reference ................................................................ 2-15
Section 3. Setup and Operations via the Rear Panel ..................................................................... 3-1
3.1 Physical Setup .................................................................................................................... 3-1
3.1.1 Control Unit .................................................................................................................3-1
3.1.2 Turbo Spec Tube Assembly........................................................................................ 3-1
3.1.3 Connecting the Control Unit to the Turbo Spec Tube Assembly.................................3-2
3.1.4 Customer Controlled Connections .............................................................................. 3-2
3.1.4.1 Optional Front Control Panel Connection .......................................................3-4
3.1.4.2 Discrete I/O Connection ................................................................................. 3-5
3.1.4.3 Host Computer Connection ............................................................................ 3-5
3.1.4.4 BCD Output Connection ................................................................................. 3-5
3.2 System Sensitivity and Configuration .................................................................................. 3-6
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Model 990 dCLD II Component Leak Detector
3.3 Initial System Parameter Setup ........................................................................................... 3-7
3.3.1 Parameters and Operating Modes.............................................................................. 3-7
3.4 Startup ............................................................................................................................... 3-16
3.4.1 Start up Indications on the Optional Front Control Panel.......................................... 3-17
3.4.2 Calibration................................................................................................................. 3-17
3.4.3 Tuning ....................................................................................................................... 3-18
3.4.4 Running.....................................................................................................................3-18
3.5 Quick Start Checklist.......................................................................................................... 3-19
3.6 Operation via Rear Panel...................................................................................................3-20
3.6.1 PARALLEL ENABLE................................................................................................. 3-20
3.7 Analog Leak Rate Output Voltage ..................................................................................... 3-21
3.7.1 Analog Leak Rate Output Voltage Conversion Charts.............................................. 3-22
3.7.2 Conversion of 2 V/Dec Log to Leak Rate if 10
3.8 Shutdown........................................................................................................................... 3-24
Section 4. Setup and Monitor Operations via the Optional Front Control Panel ............................. 4-1
4.1 Control Buttons ................................................................................................................... 4-2
4.1.1 Key Switch .................................................................................................................. 4-4
4.2 Touch Screen Menus........................................................................................................... 4-4
4.2.1 Contrast Adjustment of the Touch Panel Display ....................................................... 4-4
4.2.2 Changing Variables in Touch Panel Screens ............................................................. 4-5
4.2.3 Selecting Options in Touch Panel Screens................................................................. 4-5
4.3 Menu Hierarchy.................................................................................................................... 4-6
4.4 Touch Panel Home Screen.................................................................................................. 4-7
4.5 System Information Screen................................................................................................4-11
4.5.1 System Software Version.......................................................................................... 4-12
4.6 Main Menu Selection Screen............................................................................................. 4-13
4.6.1 Calibrated Leak Set-Up............................................................................................. 4-13
4.6.1.1 Selecting Internal or External Calibrated Leak for Calibration ..................... 4-14
4.6.1.2 Selecting Normal or Fast Calibration Routine .............................................. 4-14
4.6.2 Reject and Audio Set Points ..................................................................................... 4-14
4.6.3 Units Set-Up..............................................................................................................4-15
4.6.4 Range Stop and Manual Range Set Up and Control................................................ 4-15
4.6.4.1 Leak Rate Range Selection through Turbo Speed Set-Up .......................... 4-16
4.6.5 Output Control Setup ................................................................................................4-16
4.6.5.1 Bar Graph Display Set-Up ............................................................................ 4-17
4.6.5.2 Leak Rate Analog Output Voltage Selection ................................................ 4-17
4.6.6 Zeroing...................................................................................................................... 4-17
4.7 Service Menus ................................................................................................................... 4-18
4.7.1 Manual Calibration .................................................................................................... 4-18
4.7.2 Manual Tuning .......................................................................................................... 4-19
4.7.3 Gauge Calibration ..................................................................................................... 4-20
X
Function Not Available ................... 3-24
Section 5. Maintenance .................................................................................................................. 5-1
5.1 Daily Maintenance ..............................................................................................................5-4
5.1.1 Sensitivity Check using the Optional Front Control Panel ..........................................5-4
5.1.2 Sensitivity Check using the Diagnostic Serial Port J12............................................... 5-4
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Model 990 dCLD II Component Leak Detector
5.2 Recalibrate the Internal Calibrated Leak.............................................................................. 5-5
5.3 Spectrometer Tube Overhaul...............................................................................................5-5
5.3.1 Removing the Spectrometer Tube Assembly..............................................................5-6
5.3.2 Removing the Button TC............................................................................................. 5-9
5.3.3 Removing the Ion Source..........................................................................................5-10
5.3.4 Removing the Preamplifier........................................................................................ 5-13
5.3.5 Removing the Magnetic Poles ..................................................................................5-13
5.3.6 Examining and Cleaning the Spectrometer Parts ..................................................... 5-15
5.3.7 Reassembly .............................................................................................................. 5-17
5.4 Dual Air Intake Filter Replacement ....................................................................................5-18
5.5 Ion Source Replacement Outside of Spectrometer Tube Overhaul................................... 5-19
5.5.1 Reassembly .............................................................................................................. 5-20
5.6 Manual Tuning ................................................................................................................... 5-20
5.6.1 Manual Tuning via the Serial Port............................................................................. 5-20
5.6.2 Manual Tuning via the Optional Front Control Panel ................................................ 5-22
5.7 Spare Parts List ................................................................................................................. 5-23
Section 6. Troubleshooting .............................................................................................................6-1
6.1 General ............................................................................................................................... 6-1
6.2 Symptoms Discussed in this Section ...................................................................................6-2
6.2.1 POWER LED does not Light....................................................................................... 6-2
6.2.2 HIGH VAC LED does not Light ................................................................................... 6-3
6.2.3 SPEC TUBE LED does not Light or Stay Lit ............................................................... 6-4
6.2.3.1 Check the Control Unit SPEC TUBE LED
Using Diagnostic Port Interface J12 ...........................................................................6-4
6.2.3.2 Check the Control Unit SPEC TUBE LED
Using Optional Front Control Panel Interface .............................................................6-4
6.2.4 No Helium Response .................................................................................................. 6-5
6.2.4.1 Check the Helium Response Using Diagnostic Port Interface J12 ................ 6-5
6.2.4.2 Check the Helium Response
Using the Optional Front Control Panel Interface .......................................................6-6
6.2.5 Station Fails to Pump Down........................................................................................6-8
6.2.6 A High Number of Rejects, Suspected of being False Rejects................................... 6-8
Appendix A. Communications Protocol ...........................................................................................A-1
A.1 Protocol (RS-232)................................................................................................................A-1
Appendix B. Customer Accessible Inputs and Outputs ..................................................................B-1
B.1 Customer Accessible Inputs ................................................................................................B-1
B.2 Customer Accessible Outputs .............................................................................................B-4
B.3 Customer Accessible Inputs and Outputs ...........................................................................B-9
Appendix C. Introduction to Leak Detection ................................................................................... C-1
C.1 Leak Testing—Why is it Needed? ...................................................................................... C-1
C.2 Classes of Leak Detection.................................................................................................. C-1
C.3 Terminology........................................................................................................................ C-2
C.4 Various Methods of Testing for Leaks................................................................................ C-3
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Model 990 dCLD II Component Leak Detector
C.5 Helium Mass Spectrometer Leak Detection (MSLD)...........................................................C-4
C.5.1 Principles of Mass Spectrometry ...............................................................................C-4
C.5.2 Application as a Leak Detector ..................................................................................C-4
C.5.3 The Nature of Flow in a Vacuum ...............................................................................C-4
C.5.4 Facts About Leak Rates ............................................................................................C-5
C.6 Leak Detection Methods......................................................................................................C-5
C.6.1 Test Piece Evacuated (Figure C-1a and Figure C-1b) ..............................................C-6
C.6.2 Test Piece Pressurized (Figure C-2) .........................................................................C-6
C.6.3 Test Piece Already Sealed (Figure C-3) ....................................................................C-7
C.7 Mass Spectrometer Leak Detector—Simplified Description................................................C-8
Index ................................................................................................................................................. I-1
Sales and Service Offices
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Model 990 dCLD II Component Leak Detector
List of Figures
Figure Description Page
1-1 Control Unit Front Panel .....................................................................................................1-2
1-2 Control Unit Rear Panel......................................................................................................1-3
1-3 Turbomolecular Pump Spectrometer Tube Assembly ........................................................ 1-4
2-1 Single Pump Configuration ................................................................................................. 2-4
2-2 Dual Mechanical Pump Configuration.................................................................................2-5
2-3 Split Flow Dual Mechanical Pump Configuration ................................................................2-6
2-4 J3 Input Circuit Sketch........................................................................................................ 2-9
2-5 J3 Output Circuit Sketch ................................................................................................... 2-11
2-6 J4 Output Circuit Sketch ................................................................................................... 2-13
2-7 J6 Circuit Sketch ............................................................................................................... 2-14
3-1 System Block Diagram........................................................................................................3-3
3-2 Optional Front Control Panel, Left Rear View..................................................................... 3-4
3-3 Linear Leak Rate Output Voltage Response .................................................................... 3-22
3-4 1 V/Decade Logarithmic Leak Rate Output Voltage Response........................................ 3-22
3-5 2 V/Decade Logarithmic Analog Output Voltage .............................................................. 3-23
3-6 3 V/Decade Logarithmic Analog Output Voltage .............................................................. 3-23
4-1 990 dCLD II Optional Front Control Panel .......................................................................... 4-1
4-2 Menu Hierarchy (up to Service Menu) ................................................................................ 4-6
4-3 Service Menu Hierarchy......................................................................................................4-7
4-4 Touch Panel Home Screen.................................................................................................4-7
4-5 Bar Graph Display: 0.8 x 10 -09 atm cc/sec .......................................................................4-8
4-6 Touch Panel Digital Display: 8.0E -10 atm cc/sec .............................................................. 4-8
4-7 System Information Screen, Typical Display .................................................................... 4-11
4-8 Software Version Screen .................................................................................................. 4-12
4-9 Main Menu Selection Screen ............................................................................................4-13
4-10 Calibrated Leak Set-Up Screen ........................................................................................ 4-13
4-11 Reject and Audio Set Points Screen.................................................................................4-14
4-12 Units Set-up Screen.......................................................................................................... 4-15
4-13 Leak Rate Ranging Set-Up Screen...................................................................................4-15
4-14 Output Control Set-Up Screen.......................................................................................... 4-16
4-15 Zeroing Screen ................................................................................................................. 4-17
4-16 Service Menu Selection Screen........................................................................................4-18
4-17 Manual Calibration Screen................................................................................................4-18
4-18 Manual Tuning Screen......................................................................................................4-19
4-19 Gauge Calibration Screen.................................................................................................4-20
5-1 Removing the Spec Tube Block Connector........................................................................ 5-6
5-2 KF-25 Quick Clamp.............................................................................................................5-7
5-3 Magnet Body Bracket Screws............................................................................................. 5-7
5-4 Slotted Screws that Attach the Magnet Assembly to Spectrometer....................................5-8
5-5 Set Screws that Secure the Tuning Magnets......................................................................5-8
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Model 990 dCLD II Component Leak Detector
5-6 Button TC Assembly ...........................................................................................................5-9
5-7 Removing the Button TC Header........................................................................................ 5-9
5-8 Button TC.......................................................................................................................... 5-10
5-9 Removing the Ion Source ................................................................................................. 5-11
5-10 The Ion Source ................................................................................................................. 5-11
5-11 Ion Source Cavity ............................................................................................................. 5-12
5-12 Ground Slit Plate............................................................................................................... 5-12
5-13 Removing the Preamplifier ............................................................................................... 5-13
5-14 Magnetic Pole Piece .........................................................................................................5-13
5-15 Removing the O-ring from Magnetic Pole Piece............................................................... 5-14
5-16 Removing the Second Magnetic Pole Piece..................................................................... 5-14
5-17 Discolored Ground Slit Plate............................................................................................. 5-15
5-18 Discolored Ground Magnet Pole Piece............................................................................. 5-15
5-19 VacuSolv Cleaning Wipe .................................................................................................. 5-16
5-20 Inspecting the O-ring ........................................................................................................ 5-16
5-21 Spectrometer Tube Reassembly ...................................................................................... 5-17
5-22 Control Unit Front Panel ...................................................................................................5-18
C-1a Test Piece Evacuated: Tracer Probe Used to Locate Leak................................................C-6
C-1b Test Piece Evacuated and Hooded with Helium Atmosphere to
Determine Overall Leak Rate .............................................................................................C-6
C-2 Test Piece Pressurized: Detector Probe Used to Locate Leak...........................................C-6
C-3 Test Piece Sealed with Helium or Mixture of Helium and Other Gases:
Bell Jar Used to Determine Overall Leak Rate ...................................................................C-7
C-4 Magnetic Separation Principle ............................................................................................C-8
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Model 990 dCLD II Component Leak Detector
List of Tables
Table Description Page
2-1 V70, V70D and V70LP Turbomolecular Pump Comparison.............................................. 2-2
2-2 Configuration Comparison ................................................................................................. 2-3
2-3 Single Mechanical Pump System Valve Sequence ........................................................... 2-4
2-4 Dual Mechanical Pump System Valve Sequence.............................................................. 2-5
2-5 Split Flow Dual Mechanical Pump System Valve Sequence ............................................. 2-6
2-6 Recommended Mechanical Pumps ................................................................................... 2-7
2-7 J3 Inputs Summary Table .................................................................................................. 2-9
2-8 J3 Outputs Summary Table ............................................................................................. 2-11
2-9 J4 Outputs Summary Table ............................................................................................. 2-13
2-10 J6 Summary Table........................................................................................................... 2-14
2-11 Commands for Operating Modes..................................................................................... 2-15
3-1 Leak Rate Range for High Vacuum Pump Type and Speed Combinations ...................... 3-6
3-2 Analog Leak Rate Voltage Outputs.................................................................................. 3-21
4-1 990 dCLD II Operating States ........................................................................................... 4-9
4-2 990 dCLD II Leak Detector Status ..................................................................................... 4-9
4-3 990 dCLD II Condition States ......................................................................................... 4-10
4-4 System Information Screen Conditions ........................................................................... 4-11
5-1 Scheduled Maintenance .................................................................................................... 5-3
5-2 As-required Maintenance................................................................................................... 5-3
5-3 Tools and Parts Required for Spectrometer Tube Overhaul.............................................. 5-5
5-4 Example: Setting REPELLER Parameter Value using J12 Diagnostic Port .................... 5-21
5-5 Example: Setting EMISSION Parameter Value using J12 Diagnostic Port ..................... 5-21
5-6 Spare Parts List ............................................................................................................... 5-23
A-1 Internal Operating Parameters .........................................................................................A-2
A-2 Non-Volatile Operating Parameters ..................................................................................A-5
A-3 Spectrometer Operating Parameters .................................................................................A-7
A-4 Leak Detection Actions ....................................................................................................A-8
B-1 Customer Accessible Inputs ..............................................................................................B-1
B-2 Customer Accessible Outputs ............................................................................................B-4
B-3 J6 Summary Table .............................................................................................................B-9
C-1 Decimal Notation ............................................................................................................... C-2
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We Wir Nous Nosotros Wij Noi
declare under our sole responsibility that the product, erklären, in alleniniger Verantwortung, daß dieses Produkt, déclarons sous notre seule responsabilité que le produit, declaramos, bajo nuestra sola responsabilidad, que el producto, verklaren onder onze verantwoordelijkheid, dat het product, dichiariamo sotto nostra unica responsabilità, che il prodotto,

DECLARATION OF CONFORMITY

Varian, Inc.
121 Hartwell Avenue
Lexington, MA, 02421-3133 USA
Model 990 dCLD II Component Leak Detector
to which this declaration relates is in conformity with the following standards:
• EN61010-1-1993
Safety requirements for electrical equipment for control and laboratory use, incorporating amendments
No. 1 and 2
per the provisions of the Low Voltage Directive 73/23/EEC of 19 February 1973 as Amended by 93/68/EEC, Article 13, of 22 July 1993.
• CAN/CSA-C22.2 No. 1010-1, 1992 - Standard for Electrical Equipment for Laboratory Use: Part 1: General Requirements.
• UL3101-1:1993, - Standard for Electrical Equipment for Laboratory Use: Part 1: General Requirements.
Declaration of Conformity
The authorized representative located within Community is:
Va rian Vacuum Technologies (Torino) Var i an S.p . A Via F.lli Varian.54 Leini (Torino) - Italy Tel: (39) 011 997 9 111 Fax: (39) 011 997 9 350
Frederick C. Campbell
Operations Manager Varian, Inc. Lexington, Massachusetts, USA
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Model 990 dCLD II Component Leak Detector

Preface

Hazard and Safety Information
This manual uses the following standard safety protocols:
WARNING The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury.
CAUTION The caution messages are displayed before procedures, which
if not followed, could cause damage to the equipment.
NOTE The notes contain important information.
/2007
Operators and service personnel must be aware of all hazards associated with this equipment. They must know how to recognize hazardous and potentially hazardous conditions, and know how to avoid them. The consequences of unskilled, improper, or careless operation of the equipment can be serious. This product must only be operated and maintained by trained personnel. Every operator or service person must read and thoroughly understand operation/maintenance manuals and any additional information
DRAFT 4
provided by Varian. All warning and cautions should be read carefully and strictly observed. Consult local, state, and national agencies regarding specific requirements and regulations. Address any safety, operation, and/or maintenance questions to your nearest Varian office.
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Model 990 dCLD II Component Leak Detector
Vacuum Equipment and Cleanliness
Cleanliness is vital when servicing any vacuum equipment.
CAUTION Do not use silicone oil or silicone grease.
Use powder-free butyl or polycarbonate gloves to prevent
Do not clean any aluminum parts with Alconox
NOTE Normally, it is unnecessary to use vacuum grease.
However, if it must be used, avoid silicone types, and use it sparingly. Apiezon (Varian Part Number 695400004).
O-ring Care
When removing, checking, or replacing O-rings, keep in mind the following:
skin oils from getting on vacuum surfaces.
®
. Alconox
is not compatible with aluminum and will cause damage.
®
L grease is recommended
NOTE Varian recommends replacing all O-rings during routine
maintenance or during any maintenance procedure requiring that O-rings be removed.
CAUTION Remove O-rings carefully with your fingers. Do not use metal
tools for this task. Follow these guidelines to prevent scratching of any sealing surfaces:
Wipe all O-rings clean with a lint-free cloth before
installation to ensure that no foreign matter is present to impair the seal.
Do not use grease or use other substances on O-rings that
will come in contact with the spectrometer tube.
Do not use alcohol, methanol, or other solvents on O-rings.
To do so causes deterioration and reduces the O-ring’s ability to hold a vacuum.
In allowable situations, apply a small amount of Apiezon
grease and wipe the O-rings “shiny” dry.
DRAFT 4/2007
®
L
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Model 990 dCLD II Component Leak Detector
NOTE Included in the Varian’ Component and Spectrometer Tube
Contacting Varian
In the United States, you can contact Varian Customer Service at 1-800-8VARIAN.
Internet users:
Send email to Customer Service & Technical Support at
vpl.customer.support@varianinc.com
Cleaning Kit (p/n 670029096), is recommended for cleaning the spectrometer tube components.
VacuSolv the leak detector’s vacuum system, such as valves and fittings. No rinsing steps or high-temperature drying is required following cleaning with VacuSolv. Although appropriate precautions are advised, VacuSolv is compatible with most materials and does not contain toxic chemicals or CFCs (chlorofluorocarbons).
®
can also be used for fine cleaning of other parts in
Visit our web site at www.varianinc.com/vacuum
Order on line at www.evarian.com
/2007
See the back cover of this manual for a listing of our sales and service offices.
DRAFT 4
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Model 990 dCLD II Component Leak Detector

Section 1. Introduction to the Model 990 dCLD II

The Varian Model 990 dCLD II is an industrial component Helium Mass Spectrometer Leak Detector designed to be integrated into dedicated leak testing systems. Its ease of use, remote communications capability, and integration flexibility make it the ideal leak detector for solving demanding leak-testing applications.
The 990 dCLD II is comprised of a 19-inch (48.26 cm), rack-mountable control unit and a Turbomolecular high vacuum pumped spectrometer tube assembly (turbo spec tube). An optional front control panel, which can be mounted either on the front of the control unit or remotely, provides easy set up of operating parameters, visual display of leak rate and pressure, and system status via a state-of-the-art industrial touch panel. The 990 dCLD II uses Varian Varian’ Platform leak detector electronics architecture to operate the turbo spec tube assembly and provide leak rate and system status information to the operator interface.

1.1 Unpacking the 990 dCLD II

The 990 dCLD II is shipped to you in two or three boxes, depending on whether or not you ordered the optional front control panel. The contents of the boxes include:
990 dCLD II Control Unit, Cables, Mating Connector Kit, and Operations Manual
Turbomolecular Pump Spectrometer Tube Assembly and Cal Leak Certification
Envelope
Optional Front Control Panel, Cable
Carefully unpack the boxes. Keep the original packaging in the event you have to return 3an item. If you have to return an item for replacement or repair, contact Vacuum Technologies Customer Service at 1-800-8VARIAN (1-800-882-7426).
Descriptions of the Control Unit, Turbo Spec Tube Assembly, and Cables follow. A brief description of the Optional Front Control Panel is included in this section. A more detailed description is in Section 4, “Setup and Monitor Operations via the Optional Front Control Panel”.
1-1
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Model 990 dCLD II Component Leak Detector

1.2 Control Unit

The 990 dCLD II control unit operates and controls the turbo spec tube assembly and pro­vides leak rate and system status information to a host computer or Programmable Logic Controller (PLC) through optically isolated discrete I/O connections and/or an RS-232 host serial port, or to the optional front control panel interface. Inside the control unit, the Varian’ Platform performs the various functions of a helium mass spectrometer leak detector.

1.2.1 Front Panel Connections

Figure 1-1 shows the front panel hardware and connections of the 990 dCLD II control unit.
➃➄
➁➂
Figure 1-1 Control Unit Front Panel
Connector for
Optional Front Control Panel
The connector provides signals and power for the 990 dCLD II Optional Front Control Panel only.
POWER LED Steady ON verifies the presence of +5 VDC from the main power
supply.
1-2
HIGH VAC LED Steady ON verifies that the turbo pump is up to speed.
SPEC TUBE LED Steady ON verifies that the ion source filament is operational,
flashing indicates that the system is busy.
Fan filter guard The dual air intakes have replaceable filters (see “Dual Air Intake
Filter Replacement” on page -18).
Brackets for
Optional Front Control Panel
The Brackets provide a quick connect/disconnect latch and connector arrangement for the optional front control panel.
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Model 990 dCLD II Component Leak Detector

1.2.2 Rear Panel Connections and Controls

The rear panel of the 990 dCLD II, Figure 1-2, provides power, cooling for the control unit, connection and control to various devices through the interfaces discussed below.
➀➁
Power Entry
Module
Figure 1-2 Control Unit Rear Panel
A power module that consists of a fuse drawer with voltage selec­tor, power on/off switch, and mains power input.
➃➄➅ ➆
➇➈
J12 Diagnostic Port A male, 9-pin, polled RS-232 D-sub diagnostic connector desig-
nated for service use only. A null modem cable is required.
J11 Turbo Spec
Tube Connector
A keyed, locking connector for the turbo spec tube assembly cable.
Exhaust Fan A fan for cooling the control unit and optional front control panel.
J6 Host Serial Port A female 7-pin connector for a high-speed, interrupt-driven RS-232
interface for host computer control and monitoring.
J4 BCD Output A female 37-pin connector for BCD (Binary Coded Decimal)
output.
J3 Discrete I/O A female 37-pin connector to provide discrete I/O for PLC control.
J5 Display I/O A female 14-pin connector for display I/O to the optional front con-
trol panel. Connects to control unit front panel when the optional front control panel is remotely mounted.
J1 Valve Block A female 37-pin connector to provide valve control signals to the
cal leak valve block.
J2 Valve Logic Not operational.
1-3
Page 20
Model 990 dCLD II Component Leak Detector

1.3 Turbomolecular Pump Spectrometer Tube Assembly

The Turbomolecular Pump Spectrometer tube (turbo spec tube) assembly is shown in Figure 1-3. It consists of the four subassemblies described below.
➀➁
➃➂
Figure 1-3 Turbomolecular Pump Spectrometer Tube Assembly
Turbomolecular
pump
Spectrometer
Assembly
Internal calibrated
leak
Cal leak valve
block
Provides high vacuum for spectrometer tube operation.
Magnetic-sector spectrometer optimized for the detection of helium ions.
A helium leak standard that provides verification of 990 dCLD II operation.
Provides valving for the internal calibrated leak.
1-4
Page 21

1.4 Cables

All cables necessary to power the control unit and to connect the control unit to the turbo spec tube assembly have been provided. The cables have been customized to the length you specified at the time of your order. Section 3, “Setup and Operations via the Rear Panel” includes details about the connections. Part numbers are included in Section 5.7 “Spare Parts List” on page 5-23.
Power Cable Connects to main power.
37-pin Cal Leak Valve Block Cable Connects to the cal leak valve block for
Turbo Spec Tube Cable Connects to the turbo spec tube assembly. It ends with the
Turbo Pump Cable Connects from the spec tube block connector to the turbo
14-pin Display I/O Cable Connects to the optional front control panel when it is
Model 990 dCLD II Component Leak Detector
calibrated leak operation.
spectrometer tube block connector (spec tube block connector), the turbo cooling fan, and the connector for the turbo pump power input.
pump. It provides power to the turbo pump.
remotely located. This cable is supplied with the optional front control panel.

1.5 Mating Connectors

A kit containing mating connectors and pins for building cables for connections J3, J4 and J6 is supplied with your 990 dCLD II. Build the cables according to the tables included in Appendix B “Customer Accessible Inputs and Outputs”.

1.6 Optional Front Control Panel

The Model 990 dCLD II Optional Front Control Panel provides indication of the leak rate measurement and spectrometer pressure through bar graph displays, and control of the leak detector via control buttons and a touch screen panel. The optional front control panel can be mounted remotely from the control unit or directly onto its front face.
Once the 990 dCLD II is set up, calibrated and put into production, control is turned over to the PLC or host computer when PARALLEL ENABLE is asserted. Control remains with the PLC or host computer until that control is specifically released by de-asserting PARAL­LEL ENABLE. However, during operation you can use the optional front control panel to monitor leak rate, pressure and operating parameters.
Section 4, “Setup and Monitor Operations via the Optional Front Control Panel”, of this manual provides a detailed description of the optional front control panel, a discussion of the bar graph and pressure displays, and details of the touch screen display and how to use the menus provided to set up and monitor the 990 dCLD II.
1-5
Page 22
Model 990 dCLD II Component Leak Detector

1.7 Specifications

The specifications for the 990 dCLD II are listed below.
Maximum Test Pressure
Helium Sensitivity V70 Turbo Configuration
V70 Configuration
Fast Speed
Slow Speed
V70D Configuration
Fast Speed
Slow Speed
V70LP Configuration
Fast Speed
Slow Speed
Slow Speed Min. Detectable Leak: 2 x 10
Fast Speed Min. Detectable Leak: 2 x 10
V70D Turbo Configuration
Slow Speed Min. Detectable Leak: 2 x 10
Fast Speed Min. Detectable Leak: 2 x 10
500 mTorr
100 mTorr
3 Torr
1 Torr
5 Torr
3 Torr
Display: 10
Display: 10
Display: 10
Display: 10
10
9
through 10−6atm cc/sec
9
atm cc/sec
8
through 10−5atm cc/sec
9
atm cc/sec
8
through 10−5atm cc/sec
8
atm cc/sec
7
through 10−4atm cc/sec
atm cc/sec
V70LP Turbo Configuration
Slow Speed Min. Detectable Leak: 2 x 10
7
Display: 10
Fast Speed Min. Detectable Leak: 2 x 10
Display: 10
Response Time < 0.5 seconds for helium
Typical Recovery Time
Noise Level < 2% of the most sensitive scale, peak-to-peak, in accordance with AVS Std. 2.1
1-6
< 2 seconds to recover below 20% of a 10
through 10−4atm cc/sec
6
through 10−3atm cc/sec
3
leak
8
atm cc/sec
7
atm cc/sec
Page 23
Model 990 dCLD II Component Leak Detector
Recommended Ambient Operating Conditions
Heat Load 350 W
Power Requirements Voltage Range 115 / 230 VAC
Operating Temperature Control Unit: 0°C to 50°C (32°F to 122°F)
Turbo Spec Tube Assy.: 5°C to 35°C (41°F to
95 °F)
Optional Front Control Panel: 0 °C to 35 °C (32 °F to 95 °F)
Maximum Relative Humidity 80% for temperatures up to 31 °C (88 °F),
decreasing linearly to 50% HR at 40 °C (104 °F). No hoarfrost, dew, percolating water, rain, solar radiation, etc.
Atmospheric Air Pressure 75 kPa to 106 kPa
Pollution Degree II
Installation (Overvoltage) Category II in accordance with UL3101-1
standard.
47 Hz to 63 Hz
Maximum Current 3 A/1.5 A, 350 Watts
Fuse Rating 5 A, 250 VAC, slo-blo
®
Conformance Standards
Dimensions Control Unit 19" rack, 5.25" high by 16.5" deep
Weight Control Unit Assembly 27 lbs. (12.25 kg)
Meets applicable UL, CSA, and CE Standards
48.26 cm rack, 13.33 cm by 41.91 cm (including mating connectors)
Turbo Spec Tube Assembly 19" wide by 9" high by 8" deep
48.26 cm by 13.33 cm by 11.43 cm
Optional Front Control Panel 17.2" wide by 5.25" high by 4.5" deep
43.69 cm by 22.86 cm by 20.32 cm (including mating connectors)
Turbo Spec Tube Assembly 17 lbs. (7.71 kg)
Optional Front Control Panel 7 lbs. (3.18 kg)
Cables (turbo and valves) 14 lbs. (6.35 kg)
1-7
Page 24
Model 990 dCLD II Component Leak Detector
System I/O Capability J3 Inputs Opto-isolated, 5 to 24 VDC 3600 Ohm resistive
load.
J3 Outputs Emitter follower with 10 Ohm series resistor,
14 mA max drive current, 24 VDC max.
J3 Momentary Inputs Opto-isolated, 5 to 24 VDC 3600 Ohm resistive
load, requires 200 ms per min pulse width.
J3 Analog Leak Rate Output 0 to 10 V per decade linear; 1, 2 or 3 V per
decade logarithmic. Note: 3 V per decade logarithmic has limited use on the highest decade.
J4 BCD Leak Rate Output Emitter follower with 10 Ohm series resistor,
14 mA max drive current, 24 VDC max. Note: This output is valid only when the leak rate output pulse is low. The leak rate is updated every 50 ms.
J6 Host Serial Port 9600 Baud, No parity, 8 Bits, 1 Stop Bit,
interrupt-driven RS-232 port for connection to a host computer.
J12 Diagnostic Port 9600 Baud, No parity, 8 Bits, 1 Stop Bit,
configured as DTE (Data Terminal Equipment). Use null modem cable when connecting to a host computer.
1-8
Page 25
Model 990 dCLD II Component Leak Detector

Section 2. Customer Integration

The information provided in this section assists you in making decisions to provide the optimum level of leak detection for your operation.

2.1 Physical Considerations

The control unit of the Model 990 dCLD II is intended to be mounted in a standard 19-inch rack enclosure. It can, however, be mounted in any orientation provided that air movement through the unit is not impeded. For efficiency sake, mount the Model 990 dCLD II so that the LEDs can be seen from a convenient location to determine the status of the system at a glance.
The Optional Front Control Panel can be mounted either directly onto the face of the con­trol unit or remotely in a standard 19-inch rack enclosure. A 10-foot cable provides connec­tion to the front of the control unit. As is the case with the control unit, it can be mounted in any orientation that provides unimpeded ventilation, and that allows easy viewing and access to the displays, touch screen panel, and control buttons. Also, keep in mind that the audio for the 990 dCLD II emanates from the rear of this panel.
The Turbo Spec Tube Assembly can be mounted in any orientation. The spectrometer tube must be isolated from strong magnetic fields such as motors, transformers, and magnets. Steel structures and steel objects should be should be kept at least 2 inches away from the closest edge of the spectrometer tube. Failure to do so will result in damage to the magnet in the spectrometer tube. During normal operation, the spectrometer tube feels quite warm. A continuously running fan at the end of the high vacuum pump directs cooling air toward the end of the pump.
To achieve maximum sensitivity, mount the turbo spec tube assembly as close as possible to the test chamber or part being tested. The length and number of bends in the plumbing between the turbo spec tube assembly and the test chamber should be less than the length and number of bends in the plumbing between the turbo spec tube assembly and the mechanical backing pump. Likewise, the diameter of the plumbing between the turbo spec tube assembly and the test chamber should be the same size or larger than the diameter of the plumbing between the mechanical backing pump and the turbo spec tube assembly. You must also consider the type and size of the mechanical pumps for your system. For accurate and repeatable leak testing, Varian recommends that customer-supplied roughing and forepumps be helium-stable mechanical pumps, such as Varian oil-sealed mechanical pumps. (See Section 2.3 “Size of Mechanical Pumps” on page 2-7.) The use of non-helium-stable pumps will result in erratic, unreliable leak rate readings and an inability to calibrate successfully.
2-1
Page 26
Model 990 dCLD II Component Leak Detector

2.2 Common Configurations

The 990 dCLD II is available with your choice of three pumps:
V70 Turbomolecular Pump
V70D MacroTorr
V70LP MacroTorr
Table 2-1 lists operating information about the three pumps and compares advantages and limitations relating to sensitivity and clean up time.
Table 2-1 V70, V70D and V70LP Turbomolecular Pump Comparison
®
Turbomolecular Pump
®
Turbomolecular Pump
Helium
Range of
Leak Rate
Speed
Pumpin
g
Speed
(L/sec)* (atm cc/sec) (Torr)
V70 Turbomolecular Pump
Slow 60 10
9
to 10
6
Fast 60 10
8
V70D MacroTorr Turbomolecular Pump
Slow 30 10
Fast 30 10
8
7
V70LP MacroTorr Turbomolecular Pump
Slow 60 10
Fast 60 10
7
6
to 10
to 10
to 10
to 10
to 10
5
5
4
4
3
Minimum Detectabl
e Leak
10
2 x 10
9
2 x 10
9
2 x 10
8
2 x 10
8
2 x 10
7
2 x 10
Maximum
Foreline
Pressure Advantages Limitations
0.1
0.1
Provides the highest sensitivity of the three pumps.
Provides faster clean up than V70 in Slow speed, with slight loss
Has the slowest clean up time of the three pumps.
Requires low foreline pressure.
in sensitivity.
1.0
5.0
Provides higher foreline pressure than V70 in Fast speed.
Provides faster clean up than V70D in Slow speed and V70 in
Provides less sensitivity than the V70.
Provides less sensitivity than the V70.
either speed.
5.0
10
Provides the fastest clean up for the sensitivity.
Provides the highest foreline pressure and the fastest clean up
Sensitivity is low, and is lower than the V70 or V70D.
Sensitivity is the lowest in fast mode of
all three pumps. time of all three pumps.
* Total helium pumping speed is affected by backing pump.
2-2
Page 27
The 990 dCLD II component system has been modularly designed to fit your operations. Table 2-2 provides a comparison of the three most commonly used configurations:
Single mechanical pump
See Figure 2-1 and Table 2-3 on page 2-4.
Dual mechanical pump
See Figure 2-2 and Table 2-4 on page 2-5.
Split flow dual mechanical pump
See Figure 2-3 and Table 2-5 on page 2-6.
Configuration Advantages Limitations
Single Mechanical Pump
Model 990 dCLD II Component Leak Detector
Table 2-2 Configuration Comparison
Higher sensitivity
Lower cost
Longer cycle time
Backing pump doubles
as rough pump
Dual Mechanical Pump
Split Flow Dual Mechanical Pump
Higher sensitivity
Faster pump-down.
Shorter cycle time
Separate pumps for rough
and backing
Faster pump-down
Faster clean-up
Shorter cycle time
Separate pumps for rough
and backing
Higher cost.
Lower sensitivity
Higher cost
2-3
Page 28
Model 990 dCLD II Component Leak Detector

2.2.1 Single Mechanical Pump Configuration

Keep Distance as Short as Possible
Cal
Leak
Spec
Tube
Cal
Leak
Turbo
Foreline
Turbo Spec Tube Assembly
(in box)
Length is Proportional
to Sensitivity
Figure 2-1 Single Pump Configuration
Te st
Valve
Primary
Pump
Fixture
Vent Valve
Rough Valve
Table 2-3 Single Mechanical Pump System Valve Sequence
State Vent
Valve
Pre-Vented Closed Closed Closed The Pre-Vented state allows time to ensure that all valves
Vented Opened Closed Opened The Vented state places the fixture at atmosphere. The
Pre-Roughing Closed Closed Closed The Pre-Roughing state allows time to ensure that all
Roughing Closed Opened Closed The Roughing state brings the fixture to vacuum. The
Test Closed Opened Opened The Test Valve re-opens at the appropriate foreline
Rough
Valve
Test
Valve
Remarks
are closed before any open. The time spent in the pre-vented state depends on valve actuation time.
Test Valve keeps the turbo backed.
valves are closed before any open. The time spent in the pre-roughing state depends on valve actuation time.
turbo is not being pumped. The maximum time here is approximately 3 minutes.
pressure, backing the turbo and exposing the fixture to the foreline.
Note: Foreline and Cal Leak valves are under the control of the 990 dCLD II.
2-4
Page 29
Model 990 dCLD II Component Leak Detector

2.2.2 Dual Mechanical Pump Configuration

Cal
Leak
Spec
Tube
Cal
Leak
Turbo
Foreline
Turbo Spec Tube Assembly
(in box)
Keep Distance as Short as Possible
Tes t Val ve
Fixture
Vent Valve
Rough Valve
Length is Proportional
to Sensitivity
Backing
Primary
Pump
Roughing
Primary
Pump
Figure 2-2 Dual Mechanical Pump Configuration
Table 2-4 Dual Mechanical Pump System Valve Sequence
State Vent
Valve
Pre-Vented Closed Closed Closed The Pre-Vented state allows time to ensure that all valves
Vented Opened Closed Closed The Vented state places the fixture at atmosphere. The
Pre-Roughing Closed Closed Closed The Pre-Roughing state allows time to ensure that all
Roughing Closed Opened Closed The Roughing state brings the fixture to vacuum.
Rough
Valve
Test
Valve
Remarks
are closed before any open. The time spent in the pre-vented state depends on valve actuation time.
backing primary pump keeps the turbo backed.
valves are closed before any open. The time spent in the pre-roughing state depends on valve actuation time.
Test Closed Closed Opened The Test Valve re-opens at the appropriate foreline
pressure, exposing the fixture to the foreline.
Note: Foreline and Cal Leak valves are under the control of the 990 dCLD II.
2-5
Page 30
Model 990 dCLD II Component Leak Detector

2.2.3 Split Flow Dual Mechanical Pump Configuration

Cal
Leak
Spec
Turbo
Turbo Spec Tube Assembly
(in box)
Tube
Cal
Leak
Foreline
Keep Distance as Short as Possible
Test Valve
Fixture
Vent Valve
Rough Valve
Length is Proportional
to Sensitivity
Backing
Primary
Pump
Roughing
Primary
Pump
Figure 2-3 Split Flow Dual Mechanical Pump Configuration
Table 2-5 Split Flow Dual Mechanical Pump System Valve Sequence
State Vent
Valve
Pre-Vented Closed Closed Closed The Pre-Vented state allows time to ensure that all valves
Vented Opened Closed Closed The Vented state places the fixture at atmosphere.
Pre-Roughing Closed Closed Closed The Pre-Roughing state allows time to ensure that all
Roughing Closed Opened Closed The Roughing state brings the fixture to vacuum.
Rough
Valve
Test
Valve
Remarks
are closed before any open. The time spent in the pre-vented state depends on valve actuation time.
valves are closed before any open. The time spent in the pre-roughing state depends on valve actuation time.
Test Closed Opened Opened The Test Valve re-opens at the appropriate foreline
pressure, exposing the fixture to the foreline.
Note: Foreline and Cal Leak valves are under the control of the 990 dCLD II.
2-6
Page 31
Model 990 dCLD II Component Leak Detector

2.3 Size of Mechanical Pumps

When selecting rough and forepumps for your system, the pumps listed in Table 2-6 are recommended. These pumps can be paired (within type) in any combination for forepump and rough pump except where noted. For more information, contact Varian Customer Ser­vice 1-800-8VARIAN.
Table 2-6 Recommended Mechanical Pumps
Type/Model
Pump
Rotary Vane
DS-102
DS-202 ll200 L/min (7.0 cfm) 9499320
DS-302 ll300 L/min (10.6 cfm) 9499325
DS-402 l 400 L/min (14.1 cfm) 9499330
Dry Scroll
PTS 300 ll300 L/min (10.6 cfm) PTS03001UNIV
PTS 600 ll600 L/min (21.2 cfm) PTS06101UNIV
Recommended for Maximum
Pumping Speed
Fore Rough
l
100 L/min (3.6 cfm) Do not pair with a Rough
Pump size
Remarks Varian
Part Number
9499305
DS-202
2-7
Page 32
Model 990 dCLD II Component Leak Detector

2.4 Electronic Considerations

This section includes information necessary to interface the 990 dCLD II with a PLC or a host computer using either serial or parallel communications. This includes connection via J3 Discrete I/O, J4 BCD Outputs and J6 Host Serial Port.

2.4.1 Discrete I/O J3 Inputs

The discrete I/O is used to control operations via a PLC. Table 2-7 provides the input con­nections. For detailed information see Table B-1 on page B-1. For a cross reference of the function in other modes of operation, see Table 2-11 on page 2-15.
J3 Level inputs are opto-isolated, 5 to 24 VDC 3600 Ohm resistive load. J3 Momentary inputs are opto-isolated, 5 to 24 VDC 3600 Ohm resistive load, and require 200 ms mini­mum pulse width. Figure 2-4 shows the J3 input circuit sketch.
2-8
Page 33
Model 990 dCLD II Component Leak Detector
Table 2-7 J3 Inputs Summary Table
J3/ Pin
1 Input Common N/A Return for J3 inputs (with pin 25).
5 RUN / IDLE
6 PARALLEL ENABLE Level Disable changes to the parameters from discrete I/O, serial
7 ZERO Momentary Performs a ZERO function.
8 STDLEAK Momentary Puts the Leak Detector in Read STD LEAK mode.
9 Full Internal Calibrate Momentary Performs a Full Calibration using the internal leak.
10 DECREMENT Momentary Decrements the Exponent in Manual Ranging.
11 INCREMENT Momentary Increments the Exponent in Manual Ranging.
12 AUTO / MANUAL
23 Full External Cal Momentary Performs a Full Calibration with External Leak.
24 Quick Internal Cal Momentary Performs a Quick Calibration using the internal leak.
25 Input Common N/A Return for J3 inputs (with pin 1).
35 FIL OFF Level Turns the operating Filament OFF when active.
Input Name Momentary
or Level
Level Turns ON the spec tube and turbo (leave IDLE state).
Level Puts the system in Auto Ranging if active.
Description
inputs or optional front control panel.
37 Quick External Cal Momentary Performs a Quick Calibration using the external leak.
Figure 2-4 J3 Input Circuit Sketch
2-9
Page 34
Model 990 dCLD II Component Leak Detector

2.4.2 Discrete I/O J3 Outputs

Table 2-8 provides the J3 output connections. For detailed information see Table B-2 on page B-4. For a cross reference of the functions in other modes of operation, see Table 2-11 on page 2-15.
J3 Level outputs are opto-isolated emitter followers with 10 Ohm series resistor, 14 mA max drive current, 24 VDC max. Figure 2-5 shows the J3 output circuit sketch.
2-10
Page 35
Model 990 dCLD II Component Leak Detector
Table 2-8 J3 Outputs Summary Table
J3/
Pin
2 REJECT #1 Level Active when Leak Rate is over set point #1.
14 Ready Level Active when Fil and Turbo ok, i.e., the system is ready to test.
15 Zeroing Level Active when performing a ZERO function.
16 Leak Rate
17 Filament Fault Level Active when selected Ion Source Filament is non-functional.
18 CAL OK Level Active when last calibration ok. It is set inactive at the start of a
22 Calibrating Level Active when performing a CALIBRATE routine.
26 REJECT #2 Level Active when Leak Rate is greater than set point #2.
27 +V Input N/A Customer-supplied +5 to +24 VDC for J3.
28 +V Input N/A Customer-supplied +5 to +24 VDC for J3.
29 REJECT #3 Level Active when Leak Rate greater than set point #3.
30 REJECT #4 Level Active when Leak Rate greater than set point #4.
33 HiVac OK Level Active when turbo is ok.
Output Name Momentary
or Level
Update
Description
Valid data on BCD when low, becomes active during the time that the BCD leak rate output is updated.
CALIBRATE routine and at power on.
31 Analog Output Analog Analog Leak Rate output voltage.
32 Analog Return Ground Analog Leak Rate output voltage return.
Figure 2-5 J3 Output Circuit Sketch
2-11
Page 36

2.4.3 BCD J4 Outputs

Table 2-9 provides the J4 output connections. For detailed information see Table B-2 on page B-4.
J4 outputs are opto-isolated emitter followers with 10 Ohm series resistor, 14 mA max drive current, 24 VDC max. Note: This output is valid only when the leak rate output pulse is low. The leak rate is updated every 50 ms. Figure 2-6 shows the J4 output circuit sketch.
Model 990 dCLD II Component Leak Detector
2-12
Page 37
Model 990 dCLD II Component Leak Detector
Table 2-9 J4 Outputs Summary Table
J4/
Pin
3 LSD A MAN Level Mantissa BCD Leak Rate, the ones place of the least significant digit.
4 LSD B MAN Level Mantissa BCD Leak Rate; the twos place of the least significant digit.
5 LSD C MAN Level Mantissa BCD Leak Rate; the fours place of the least significant digit.
6 LSD D MAN Level Mantissa BCD Leak Rate; the eights place of the least significant digit.
7 MSD A MAN Level Mantissa BCD Leak Rate; the ones place of the most significant digit.
8 MSD B MAN Level Mantissa BCD Leak Rate; the twos place of the most significant digit.
9 MSD C MAN Level Mantissa BCD Leak Rate; the fours place of the most significant digit.
10 MSD D MAN Level Mantissa BCD Leak Rate; the eights place of the most significant digit.
11 LSD A EXP Level Exponent BCD Leak Rate; the ones place of the least significant digit.
12 LSD B EXP Level Exponent BCD Leak Rate; the twos place of the least significant digit.
13 LSD C EXP Level Exponent BCD Leak Rate; the fours place of the least significant digit.
14 LSD D EXP Level Exponent BCD Leak Rate; the eights place of the least significant digit.
15 MSD A EXP Level Exponent BCD Leak Rate; the ones place of the most significant digit.
20 +V Input N/A Customer-supplied +5 to +24 VDC for J4.
Output
Name
Momentary
or Level
Description
21 +V Input N/A Customer-supplied +5 to +24 VDC for J4.
990 dCLD II
Customer
Figure 2-6 J4 Output Circuit Sketch
2-13
Page 38
Model 990 dCLD II Component Leak Detector

2.4.4 Host Serial Port J6

The Host Serial Port is used to interface the 990 dCLD II to a PLC or computer via an RS-232 connection. Table 2-10 and Figure 2-7 provide details of the connection.
J6 connections are referenced to the chassis ground and are not isolated. Electrical charac­teristics comply with EIA/TIA Standard EIA/TIA-232-E.
Table 2-10 J6 Summary Table
J6/
Pin
2 Received Data Data Into the 990 dCLD II
3 Transmitted Data Data Out of the 990 dCLD I
5 Signal Common Ground
6 Clear To Send Handshaking Signal Out of the 990 dCLD II
7 Request To Send Handshaking Signal Into the 990 dCLD II
EIA Name Description
I
Customer
990 dCLD II
Supplied Cable
IBM Standard
Supplied Cable
Serial Port
2-14
Figure 2-7 J6 Circuit Sketch
Page 39
Model 990 dCLD II Component Leak Detector
and Parameter
RS-232 Command Optional Front Control Panel Menu
/ Pin
Table 2-11 Commands for Operating Modes
ZEROING screen, Section 4.6.6 “Zeroing”.
1 INIT-AZ<0<CR>
AUTO-ZERO<0 -
0 INIT-AZ<0<CR>
1 Active, 0 Inactive
?AZ<0<CR> SYSTEM INFORMATION screen, Section 4.5
“System Information Screen”
Ensure USE NORM CAL and USE EXT LEAK are
set in the SET UP CAL LEAK menu, Section 4.6.1
“Calibrated Leak Set-Up”.
then
?QUICK-CAL<CR>
J3/23 EXTERNAL<CR>
Status inquiry
Calibrate - Full -
External
Press the CALIBRATE button, Section 4.1 “Control
if returns 0, then
Buttons”.
CALIBRATE<CR>
else
0 INIT-QUICK-CAL<CR>
then
CALIBRATE<CR>
J6 Host Serial Port RS-232 Command (detailed information is provided in Appendix A “Communications Protocol”)
Discrete I/O J3 (detailed information is provided in Appendix B “Customer Accessible Inputs and Outputs”)
Optional Front Control Panel (detailed information is provided in Section 5, “Maintenance”)
Except for the first entry in the table, PARALLEL ENABLE, the table is organized alphabetically by function, sub-function, and
to be able to set it Active or Inactive, and to inquire about its status. Those two activities are grouped together, and listed alpha-
Most functions can be accomplished in at least two of the setup or operating modes of the 990 dCLD II. Table 2-11 lists func-
tions and provides the commands to accomplish those functions in each operating mode:

2.5 Operating Modes Commands Cross Reference

betically within the group. This table will prove useful as you learn to set up and run the 990 dCLD II.
various tasks you might need to accomplish within that function. For instance, the commands available for AUTO-ZERO<0 are
What you want to do Function Conn
Turn control over to the PLC PARALLEL ENABLE J3/6 None None
Set Auto-Zero<0 Active or
Inactive
Is Auto-Zero<0 enabled? AUTO-ZERO<0 -
Perform a full external
calibration
2-15
Page 40
and Parameter
Ensure USE NORM CAL and USE INT LEAK are
set in the SET UP CAL LEAK screen, Section
Model 990 dCLD II Component Leak Detector
4.6.1 “Calibrated Leak Set-Up”. Press the
CALIBRATE button. Section 4.1 “Control Buttons”.
SET UP CAL LEAK screen, Section 4.6.1
“Calibrated Leak Set-Up”, set FAST or NORM
“Calibrated Leak Set-Up”,
USE NORM CAL / USE FAST CAL
Ensure USE FAST CAL and USE EXT LEAK are
set in the SET UP CAL LEAK menu, Section 4.6.1
“Calibrated Leak Set-Up”
Press the CALIBRATE button, Section 4.1 “Control
Buttons”.
RS-232 Command Optional Front Control Panel Menu
then
?QUICK-CAL<CR>
if returns 0, then
CALIBRATE<CR>
else
0 INIT-QUICK-CAL<CR>
then
CALIBRATE<CR>
0 INIT-QUICK-CAL<CR>
1 INIT-QUICK-CAL<CR>
Table 2-11 Commands for Operating Modes (Continued)
?QUICK-CAL<CR> SET UP CAL LEAK screen, Section 4.6.1
/ Pin
J3/9 INTERNAL<CR>
Calibrate - Full -
Internal
Calibrate - Mode -
0Normal, 1Fast
Calibrate - Mode
inquiry - 0 Normal,
1Fast
then
?QUICK-CAL<CR>
if returns 1, then
CALIBRATE<CR>
else
J3/37 EXTERNAL<CR>
Calibrate - Quick -
External
1 INIT-QUICK-CAL<CR>
then
CALIBRATE<CR>
2-16
What you want to do Function Conn
Perform a full internal
calibration
Set the Calibration mode to
Normal or Fast
Will a Normal or a Fast
calibration be performed
when asked.
Perform a fast external
calibration
Page 41
Model 990 dCLD II Component Leak Detector
and Parameter
Ensure USE FAST CAL and USE INT LEAK are
set in the SET UP CAL LEAK menu, Section 4.6.1
“Calibrated Leak Set-Up”.
Press the CALIBRATE button, Section 4.1 “Control
Buttons”.
Screen”,
or exponent display not flashing C.
menu, Section 4.6.1 “Calibrated Leak Set-Up”.
“Calibrated Leak Set-Up”, set EXTERNAL LEAK
VALUE
“Calibrated Leak Set-Up”, EXTERNAL LEAK
VALUE
“Calibrated Leak Set-Up”, set INTERNAL LEAK
VALUE
Screen”.
SET UP CAL LEAK Menu, Section 4.6.1
“Calibrated Leak Set-Up”, INTERNAL LEAK
VALUE.
Table 2-11 Commands for Operating Modes (Continued)
RS-232 Command Optional Front Control Panel Menu
then
?QUICK-CAL<CR>
if returns 1, then
CALIBRATE<CR>
else
1 INIT-QUICK-CAL<CR> then
CALIBRATE<CR>
/ Pin
J3/24 INTERNAL<CR>
Calibrate - Quick -
Internal
J3/18 ?CALOK<CR> HOME screen, Section 4.4 “Touch Panel Home
Calibrate - Successful
inquiry
N/A EXTERNAL<CR> Set USE EXT LEAK in the SET UP CAL LEAK
Calibrated Leak -
N/A X.XE-XX INIT-EXTLEAK<CR> SET UP CAL LEAK screen, Section 4.6.1
EXTERNAL
Calibrated Leak -
External - Set Value
?EXTLEAK<CR> SET UP CAL LEAK screen, Section 4.6.1
Calibrated Leak -
External - Value
?STDLEAK<CR> HOME screen, Section 4.4 “Touch Panel Home
N/A X.XE-XX INIT-STDLEAK<CR> SET UP CAL LEAK screen, Section 4.6.1
inquiry
Calibrated Leak -
Internal - Set Value
Calibrated Leak -
Internal - Value
inquiry
What you want to do Function Conn
Perform a fast internal
calibration
Was the last Calibration
successful?
Use an external calibrated
leak
Set the External calibrated
leak value
What is the value of the
external calibrated leak?
Set the Internal calibrated
leak value
What is the value of the
internal calibrated leak?
2-17
Page 42
and Parameter
Model 990 dCLD II Component Leak Detector
menu, Section 4.6.1 “Calibrated Leak Set-Up”.
“Manual Tuning”
EMISSION I
MANUAL TUNING, Section 4.7.2 “Manual Tuning”,
FIL1ACTV / FIL2ACTV
Calibration”
“System Information Screen”
N/A
N/A
RS-232 Command Optional Front Control Panel Menu
DISABLE-IDLE<CR>
IDLE - allow or not ENABLE-IDLE<CR>
J3/5 IDLE<CR>
IDLE - Mode
RUN<CR>
RUN - Mode
Table 2-11 Commands for Operating Modes (Continued)
/ Pin
N/A INTERNAL<CR> Set USE INT LEAK in the SET UP CAL LEAK
Calibrated Leak -
Use INTERNAL
Emission I - Set Temp XXXX PUT-EMISSION<CR> MANUAL TUNING, set EMISSION I, Section 4.7.2
Emission I - Store XXXX INIT-EMISSION<CR> N/A
?EMISSIONCURRENT<CR> MANUAL TUNING, Section 4.7.2 “Manual Tuning”,
EMISSION I - Value
inquiry
active
?FIXEDFOCUS<CR> N/A
FIXED FOCUS V -
Value inquiry
2 INIT-FILAMENT<CR>
?FILAMENTBIAS<CR> N/A
J3/35 0 INIT0FILAMENT<CR> N/A
FIL Bias Volt -
FIL OFF - when
Value inquiry
2-18
What you want to do Function Conn
Use the internal calibrated
leak
Turn the operating filament
off.
Temporarily Set Emission
Current
Store the Emission Current
in Non-Volatile RAM
What is the Emission
Current?
Set the operating Filament FIL - Set operating 1 INIT-FILAMENT<CR>
What is the Filament Bias
Voltage?
What is the Fixed Focus
Voltage?
Temporarily Set Gain Gain - Set Temp X.X PUT-GAIN<CR> MANUAL CALIBRATION, Section 4.7.1 “Manual
What is the system Gain? Gain - Value inquiry ?GAIN<CR> SYSTEM INFORMATION screen, Section 4.5
Allow or disallow control unit
to be put into RUN or IDLE
mode
Put the control unit into
RUN or IDLE mode
Page 43
and Parameter
Model 990 dCLD II Component Leak Detector
MANUAL TUNING, ION V, Section 4.7.2 “Manual
Tuning”
MANUAL TUNING, VAR FOCUS
MANUAL TUNING, REPELLER V
MANUAL TUNING, EMISSION I
Information Screen”
Information Screen”, ION V
Screen”
Bar graph display
bar graph display.
Press again to turn off. Section 4.1 “Control
Buttons”.
Table 2-11 Commands for Operating Modes (Continued)
RS-232 Command Optional Front Control Panel Menu
Note: Values are for example
only.
?ALL<CR>
Reports:
FILAMENTBIAS 122.1
IONCHAMBER 269.1
VARIABLEFOCUS 235.4
REPELLER 402.2
FIXEDFOCUS 212.7
SUPPRESSOR 145.0
EMISSIONCURRENT 1.040
OFFSET 59
/ Pin
ION Source -
Values inquiry
ION V - Store XXX INIT-ION<CR> N/A
?LEAK<CR> HOME screen Section 4.4 “Touch Panel Home
J3 or
J4
Outp
uts
J3/8 ?STDLEAK<CR> Press the READ STANDARD LEAK button, read
Leak Rate - Current -
Value inquiry
Leak Rate - Standard
- Value inquiry
OFFSET - Set Temp XX PUT-OFFSET<CR> N/A
What you want to do Function Conn
Obtain a summary of all Ion
Source Parameters.
Temporarily Set Ion Voltage ION V - Set Temp XXX PUT-ION<CR> MANUAL TUNING, set ION V, Section 4.5 “System
Store the Ion Voltage in
Non-Volatile RAM
What is the Ion Voltage? ION V - Value inquiry ?IONCHAMBER<CR> MANUAL TUNING, Section 4.5 “System
Obtain the present leak rate
value
Read the last Standard Leak
value input.
Temporarily Set Preamplifier
Offset
2-19
Page 44
and Parameter
Model 990 dCLD II Component Leak Detector
4.6.5 “Output Control Setup”.
4.6.5 “Output Control Setup”.
4.6.5 “Output Control Setup”.
4.6.5 “Output Control Setup”.
sure it is ON in LEAK RATE RANGING SET-UP
Menu, Section 4.6.4 “Range Stop and Manual
Range Set Up and Control”.
Set MANUAL RANGE to ON in LEAK RATE
RANGING SET-UP Menu, Section 4.6.4 “Range
Stop and Manual Range Set Up and Control”.
Set MANUAL RANGE to OFF for Auto-Ranging.
Set the MANUAL RANGE parameter and make
sure it is ON in LEAK RATE RANGING SET-UP
Menu, Section 4.6.4 “Range Stop and Manual
Range Set Up and Control”.
RS-232 Command Optional Front Control Panel Menu
Table 2-11 Commands for Operating Modes (Continued)
Log 1V
INIT-2LOG<CR> OUTPUT CONTROL SET-UP screen, Section
Output - Analog -
?OFFSET<CR> N/A
/ Pin
INIT-LINEAR<CR> OUTPUT CONTROL SET-UP screen, Section
Output - Analog -
Value inquiry
Linear
INIT-1LOG<CR> OUTPUT CONTROL SET-UP screen, Section
Output - Analog -
Log 2V
INIT-3LOG<CR> OUTPUT CONTROL SET-UP screen, Section
Output - Analog -
Log 3V
J3/10 DECREMENT<CR> Set the MANUAL RANGE parameter and make
Range - Manual -
DECREMENT
MANUAL<CR>
AUTO<CR>
J3/
12
Range - MANUAL -
if inactive, AUTO
Make sure MANUAL is set by
viewing
?SETUP<CR>
if necessary, use
MANUAL<CR>
J3/11 INCREMENT<CR>
if active
(Note: Auto-Ranging
is factory default.)
Range - Manual -
INCREMENT
2-20
What you want to do Function Conn
Decrement the Manual
Range exponent by 1 (more
Set the Analog Output to 3V
Set the Analog Output to 2V
Set the Analog Output to
Linear
Set the Analog Output to 1V
What is the Preamp offset? OFFSET -
Logarithmic
Logarithmic
Logarithmic
negative)
Select Manual Ranging or
Auto-Ranging mode
Increment the Manual
Range exponent by 1 (less
negative)
Page 45
and Parameter
“Range Stop and Manual Range Set Up and
Model 990 dCLD II Component Leak Detector
“Range Stop and Manual Range Set Up and
Control”.
Control”.
Set the MANUAL RANGE
Set the MANUAL RANGE
“Range Stop and Manual Range Set Up and
Control”.
Set the RANGE STOP.
“Range Stop and Manual Range Set Up and
Control”.
Set the TOP RANGE.
“Range Stop and Manual Range Set Up and
Control”, TOP RANGE
4.6.4 “Range Stop and Manual Range Set Up and
Control”
REPELLER V
Table 2-11 Commands for Operating Modes (Continued)
RS-232 Command Optional Front Control Panel Menu
?REPELLER<CR> MANUAL TUNING, Section 4.7.2 “Manual Tuning”,
REPELLER Voltage -
Value inquiry
/ Pin
Range - Manual - Set N/A -XX INIT-EXPONENT<CR> LEAK RATE RANGE SET-UP Menu, Section 4.6.4
?EXPONENT<CR> LEAK RATE RANGE SET-UP Menu, Section 4.6.4
Range - Manual -
Value inquiry
-XX INIT-RANGESTOP<CR> LEAK RATE RANGE SET-UP Menu, Section 4.6.4
Range - Range Stop -
Set Value
Range - Top - Set N/A -XX INIT-RANGE<CR> LEAK RATE RANGE SET-UP Menu, Section 4.6.4
?RANGE<CR> LEAK RATE RANGE SET-UP Menu, Section 4.6.4
Range - Top - Value
inquiry
Repeller V - Set Temp XXX PUT-REPELLER<CR> MANUAL TUNING, set REPELLER V, Section
Repeller V - Store XXX INIT-REPELLER<CR> N/A
What you want to do Function Conn
Temporarily Set Repeller
Set the value that
Auto-range will range
Set the exponent of the
Manual Range
What decade is manual
ranging in?
down to
Set the exponent of the
least sensitive range of
detectable leak
What is the least sensitive
decade that can be
measured in this
configuration?
Voltage
Store the Repeller Voltage
in Non-Volatile RAM
What is the Repeller
Voltage?
2-21
Page 46
Model 990 dCLD II Component Leak Detector
and Parameter
REJECT & AUDIO SET POINTS screen, Section
4.6.2 “Reject and Audio Set Points”.
“System Information Screen”, which reject set
points are enabled. Values are on REJECT &
AUDIO SET POINTS screen,
Section 4.6.2 “Reject and Audio Set Points”.
4.6.2 “Reject and Audio Set Points”.
REJECT & AUDIO SET POINTS screen, Section
4.6.2 “Reject and Audio Set Points”.
Section 4.6.2 “Reject and Audio Set Points”.
“System Information Screen”, which reject set
points are enabled. Values are on REJECT &
AUDIO SET POINTS screen,
Section 4.6.2 “Reject and Audio Set Points”.
REJECT & AUDIO SET POINTS screen, Section
4.6.2 “Reject and Audio Set Points”.
4.6.2 “Reject and Audio Set Points”.
“System Information Screen”, which reject set
points are enabled. Values are on REJECT &
AUDIO SET POINTS screen, Section 4.6.2
“Reject and Audio Set Points”.
RS-232 Command Optional Front Control Panel Menu
ENABLE-AREJECT<CR>
DISABLE-AREJECT<CR>
Table 2-11 Commands for Operating Modes (Continued)
?AREJECT<CR> SYSTEM INFORMATION screen, Section 4.5
/ Pin
Set point - Audio -
Enable
Set point - Audio -
Value inquiry
Set point - Audio - Set N/A X.XE-XX INIT-AREJECT<CR> REJECT & AUDIO SET POINTS screen, Section
ENABLE-1REJECT<CR>
DISABLE-1REJECT<CR>
N/A X.XE-XX INIT-1REJECT<CR> REJECT & AUDIO SET POINTS SET-UP screen,
Enable
Set point - Reject 1 -
?1REJECT<CR> SYSTEM INFORMATION screen, Section 4.5
Set
Set point - Reject 1 -
Value inquiry
ENABLE-2REJECT<CR>
DISABLE-2REJECT<CR>
N/A X.XE-XX INIT-2REJECT<CR> REJECT & AUDIO SET POINTS screen, Section
Enable
Set point - Reject 2 -
?2REJECT<CR> SYSTEM INFORMATION screen, Section 4.5
Set
Set point - Reject 2 -
Value inquiry
2-22
What you want to do Function Conn
Enable / Disable Audio Set
Point
What is the value of the
Audio Set Point?
Set the Value of the Audio
Set Point
Enable / Disable Reject #1 Set point - Reject 1 -
Set the Value of Reject Set
Point #1
What is the value of Reject
Set Point #1?
Enable / Disable Reject #2 Set point - Reject 2 -
Set the Value of Reject Set
Point #2
What is the value of Reject
Set Point #2?
Page 47
Model 990 dCLD II Component Leak Detector
and Parameter
REJECT & AUDIO SET POINTS screen, Section
4.6.2 “Reject and Audio Set Points”.
4.6.2 “Reject and Audio Set Points”.
“System Information Screen”, which reject set
points are enabled. Values are on REJECT &
AUDIO SET POINTS screen,
Section 4.6.2 “Reject and Audio Set Points”.
REJECT & AUDIO SET POINTS screen, Section
4.6.2 “Reject and Audio Set Points”.
4.6.2 “Reject and Audio Set Points”.
“System Information Screen”, which reject set
points are enabled. Values are on REJECT &
AUDIO SET POINTS screen,
Section 4.6.2 “Reject and Audio Set Points”.
Table 2-11 Commands for Operating Modes (Continued)
RS-232 Command Optional Front Control Panel Menu
ENABLE-3REJECT<CR>
DISABLE-3REJECT<CR>
/ Pin
N/A X.XE-XX INIT-3REJECT<CR> REJECT & AUDIO SET POINTS screen, Section
Enable
Set point - Reject 3 -
?3REJECT<CR> SYSTEM INFORMATION screen, Section 4.5
Set
Set point - Reject 3 -
Value inquiry
ENABLE-4REJECT<CR>
DISABLE-4REJECT<CR>
N/A X.XE-XX INIT-4REJECT<CR> REJECT & AUDIO SET POINTS screen, Section
Enable
Set point - Reject 4 -
?4REJECT<CR> SYSTEM INFORMATION screen, Section 4.5
Set
Set point - Reject 4 -
Value inquiry
What you want to do Function Conn
Enable / Disable Reject #3 Set point - Reject 3 -
Set the Value of Reject Set
Point #3
What is the value of Reject
Set Point #3?
Enable / Disable Reject #4 Set point - Reject 4 -
Set the Value of Reject Set
Point #4
What is the value of Reject
Set Point #4?
2-23
Page 48
and Parameter
Model 990 dCLD II Component Leak Detector
GAUGE CAL screen, Section 4.7.3 “Gauge
SYSTEM INFORMATION screen, Section 4.5
“System Information Screen”
LEAK RATE RANGE SET UP menu Section 4.6.4
“Range Stop and Manual Range Set Up and
Control”
LEAK RATE RANGE SET UP, set RANGE STOP
HOME screen, Section 4.4 “Touch Panel Home
Screen”
SYSTEM INFORMATION screen
Bar Graph display, SYSTEM INFO. screen
SYSTEM INFORMATION screen
n/a
Calibration”
HOME screen, Section 4.4 “Touch Panel Home
Screen”
SYSTEM INFORMATION screen, Section 4.5
“System Information Screen”.
RS-232 Command Optional Front Control Panel Menu
Table 2-11 Commands for Operating Modes (Continued)
Value inquiry
?PRESSURES<CR> SPEC-TUBE PRESSURE display
System Pressure -
Value inquiry
only.
?SETUP<CR>
Reports:
turbo speed Slow
range -05
auto exponent -08
reject 1.0E-05
stdleak 4.0E-06
output linear
filament Two Lit
use idle no
/ Pin
Setup - Values inquiry Note: Values are for example
?SUPPRESSOR<CR> N/A
SUPPRESSOR V -
reports, in an ASCII string, the
status of the system as
System Status inquiry ?STATUS<CR> One line that
reported by the discrete I/O
lines. If the function is inactive,
the format is: REJ/ RDY/ HLD/
FLT/ ZRO/ CAL/ where a
three-letter mnemonic is
followed by a /.
2-24
What you want to do Function Conn
Obtain a summary of set-up
What are the System and
parameters.
What is the Suppressor
Voltage?
Test Port pressure values?
Obtain the status of the
990 dCLD II
Page 49
and Parameter
Model 990 dCLD II Component Leak Detector
Table 2-11 Commands for Operating Modes (Continued)
LEAK RATE RANGE SET-UP screen, Section
4.6.4 “Range Stop and Manual Range Set Up and
Control”
“System Information Screen”
4.7.2 “Manual Tuning”
VAR FOCUS
Version”
Buttons”.
RS-232 Command Optional Front Control Panel Menu
0 INIT-SPEED<CR>
/ Pin
Turbo - Speed - Set
1 INIT-SPEED<CR>
0Slow, 1 Fast
Turbo - Status inquiry ?TURBO<CR> SYSTEM INFORMATION screen, Section 4.5
XXX PUT-FOCUS<CR> MANUAL TUNING, set VAR FOCUS, Section
VAR FOCUS - Set
VAR FOCUS - Store XXX INIT-FOCUS<CR> N/A
Tem p
?VARIABLEFOCUS<CR> MANUAL TUNING, Section 4.7.2 “Manual Tuning”,
VAR FOCUS - Value
inquiry
VERsion - Inquiry VER<CR> VERsion screen, Section 4.5.1 “System Software
What you want to do Function Conn
Set the operating speed of
the turbo pump
Store the Variable Focus
Voltage in Non-Volatile RAM
What is the Variable Focus
Voltage?
What is the installed
software revision?
What is the status of the
Turbo?
Temporarily Set Variable
Focus Voltage
ZERO the leak rate ZERO J3/7 ZERO<CR> Press the ZERO button. Section 4.1 “Control
2-25
Page 50
Model 990 dCLD II Component Leak Detector
This page intentionally left blank.
Page 51
Model 990 dCLD II Component Leak Detector
Section 3. Setup and Operations via the
Rear Panel

3.1 Physical Setup

Figure 3-1 on page 3-3 shows the system block diagram for the 990 dCLD II. Information regarding the physical setup is discussed below.

3.1.1 Control Unit

The Control Unit is designed to be mounted in a 19-inch rack cabinet. Air is required to flow through the control unit entering through the two filtered air intakes at the front of the unit and exiting at the rear of the unit through a fan. Locate the control unit in a way that allows easy viewing of the front LEDs and easy access to the rear panel connections.

3.1.2 Turbo Spec Tube Assembly

The Turbo Spec Tube assembly can be mounted in any orientation. The spectrometer tube must be isolated from strong magnetic fields such as motors, transformers, and magnets. Steel structures and steel objects should also be kept at least two inches away from the clos­est edge of the spectrometer tube. During normal operation, the spectrometer tube feels quite warm. A continuously running fan at the end of the high vacuum pump directs cool­ing air toward the end of the pump. The pump operates between 5 °C and 35 °C ambient temperature.
3-1
Page 52
Model 990 dCLD II Component Leak Detector

3.1.3 Connecting the Control Unit to the Turbo Spec Tube Assembly

Make the following connections from the rear panel of the 990 dCLD II to the turbo spec tube assembly. The rear panel connections are shown in Figure 1-2. This section discusses connection to turbo spec tube assembly only.
WARNING All connections should be made with power OFF.
1. Connect the Cal Leak Valve Block cable to J1 and the cal leak valve block.
2. Connect the keyed, locking end of the Turbo Spec Tube cable to J11.
3. Place the spec tube block connector firmly onto the spectrometer and tighten the hold-down screw.
4. Attach the turbo fan power connection from the turbo into the white plastic fitting on the spec tube block connector.
5. Attach the turbo pump cable to the pump and onto the spec tube block connector and tighten it firmly.
6. Verify that the proper mains voltage is set and connect the power cord to the power entry module.
To change the input voltage, remove the fuse drawer and remove the gray fuse holder. Rotate the fuse holder 180° so that the correct voltage appears in the fuse drawer window.
Replace the fuse drawer.
7. Plug the power cord into an appropriate power source.

3.1.4 Customer Controlled Connections

As previously discussed in Section 2, “Customer Integration”, setup of the parameters is most easily accomplished via the optional front control panel or host computer, but can also be accomplished using a combination of PLC and host computer. Once setup is complete, operation is from the PLC, host computer, or a combination of the two. Monitoring of oper­ations can be from the optional front control panel, PLC, or host computer. Table 2-11 on page 2-15 cross references the different modes of operation and details the pin connections, commands, RS-232 commands and optional front control panel menus and buttons.
3-2
Page 53
Model 990 dCLD II Component Leak Detector
CONTROL UNIT
OPTIONAL FRONT CONTROL PANEL
Figure 3-1 System Block Diagram
3-3
Page 54
Model 990 dCLD II Component Leak Detector
3.1.4.1 Optional Front Control Panel Connection
If you are using the optional front control panel for setup and monitoring of the 990 dCLD II, connect it to the front of the control unit by lining up the connection brackets and giving it a straight, firm push. The power and signal connection and you hear the optional front control panel click into place via the quick connect/discon­nect latch arrangement. To disconnect it, give it a solid tug and it easily disconnects.
The optional front control panel can also be mounted remotely from the control unit (see discussion in Section 2.1 “Physical Considerations” on page 2-1). Mount the optional front control unit in a rack and connect the Display I/O cable to connector J5 on the rear panel of the control unit to the connection J4 Figure 3-2).
¡ on the back of the optional front control panel (see
¿ mates (Figure 3-2),
Figure 3-2 Optional Front Control Panel, Left Rear View
3-4
Page 55
Model 990 dCLD II Component Leak Detector
3.1.4.2 Discrete I/O Connection
To use the Discrete I/O J3 for operations, build the cable for PLC connection according to Table B-1 on page B-1 in Appendix B “Customer Accessible Inputs and Outputs”. Remem­ber, the 990 dCLD II does not provide power to this I/O.
Setup of the parameters must be accomplished in one of three ways:
Using a host computer via host serial port J6
The combination of PLC and host computer (see Appendix A “Communications
Protocol” and Table B-3 on page B-9
Via the optional front control panel
Control is then turned over to the PLC for operation.
3.1.4.3 Host Computer Connection
To use a computer for operations, build the cable according to Table B-3 on page B-9 and connect to the host serial port J6. For greater security, you must also make connection to J3, pin 6 to make PARALLEL ENABLE available. Asserting PARALLEL ENABLE prevents operat­ing parameters from being changed while it is active. See Appendix A “Communications Protocol” for detailed information regarding the commands used to set up, monitor and operate the 990 dCLD II. A cross reference of the different modes of operation is provided in Table 2-11 on page 2-15.
3.1.4.4 BCD Output Connection
To use BCD J4 for output, build the cable for PLC connection according to Table B-2 on page B-4. Remember, the 990 dCLD II does not provide power to this I/O.
3-5
Page 56
Model 990 dCLD II Component Leak Detector

3.2 System Sensitivity and Configuration

During the process of installing the 990 dCLD II and building the associated vacuum sys­tem, it is necessary to determine the sensitivity of the system. The 990 dCLD II is able to measure four decades of leak rate signal at once for a given configuration. For example, in a typical system with the V70D MacroTorr pump running at high speed, the four decades of leak rate are 10 yields 10 type and speed on the four decades of detectable leak rate. Table 3-1 shows the four decades displayed for any given configuration and turbo speed setting.
Table 3-1 Leak Rate Range for High Vacuum Pump Type and Speed Combinations
7
8
, 10−7, 10−6, and 10−5 decades of leak rate. Table 3-1 shows the effects of pump
, 10−6, 10−5, and 10−4. Running the V70D MacroTorr pump at slow speed
Turbo Speed Fast Turbo Speed Slow Maximum Test
Pressure
V70 Turbo Pump 10
V70D MacroTorr Pump 10
V70LP MacroTorr Pump 10
Note: The underlined decade represents the variable set in TOP RANGE parameter.
The pumping speed of the backing pump and the conductance of the vacuum system also play an important role in the determination of system sensitivity. A calibrated helium leak on the as configured system must be used to characterize the leak rate measurements. The 990 dCLD II must be set up to display the desired four (4) decades of leak rate measurement by setting the Range (Top Range) and selecting the Turbo speed and Ranging method. These and other parameters are discussed in the next section.
8
, 10−7, 10−6, 10
7
, 10−6, 10−5, 10
6
, 10−5, 10−4, 10
5
4
3
10−9, 10−8, 10−7, 10
10−8, 10−7, 10−6, 10
10−7, 10−6, 10−5, 10
6
5
4
100 mTorr
3 Torr
5 Torr
3-6
Page 57
Model 990 dCLD II Component Leak Detector

3.3 Initial System Parameter Setup

The 990 dCLD II performs functions and tests based upon parameter values. Some parame­ters are entered and set when the system is assembled and tested. Some parameters are cal­culated and change automatically during power up, Calibrate, or Zero functions. Other parameters should be changed when a change is made to the physical system, such as when the button thermocouple (TC), ion source or preamplifier is changed. What these parame­ters are set to are a function of the physical configuration and sensitivity needs as was dis­cussed in the previous section and in more detail in Section 2.
Adding to the stability and reliability of the 990 dCLD II, several parameters relating to the operation and performance are stored in EPROM in the control unit. This means if you lose power, or when the control unit is shut off, you do not lose that information. Parameters can be viewed and changed through commands entered via the rear serial port or the optional front control panel, if it is installed (refer to Section 4, “Setup and Monitor Operations via the Optional Front Control Panel”).
This section explains each of the parameters and what happens during the related function; related functions or parameters are grouped together. There is also reference to the area in the document where you can find information on how to set the parameter or perform the function. Remember, Table 2-11 on page 2-15 cross references functions and how to set parameters across all operating modes.

3.3.1 Parameters and Operating Modes

The parameters and operating modes work together to perform leak detection, and what you enter determines the type of test and sensitivity of testing performed. The discussion below includes an explanation of what the parameter or function means, so you know how to use it for your system and how to set it in varying operating modes. Some parameters are grouped together so you can see how they relate to one another or affect an operation.
NOTE For more information on how to set a parameter or select a
function, refer to the following:
Appendix A “Communications Protocol”
Appendix B “Customer Accessible Inputs and Outputs”
Section 4, “Setup and Monitor Operations via the
Optional Front Control Panel”
Table 2-11 on page 2-15, Cross Reference of Commands
for Operating Modes
3-7
Page 58
Model 990 dCLD II Component Leak Detector
TURBO SPEED Set the speed of the high vacuum pump to FAST or SLOW, depend-
ing on the sensitivity requirement of the system. (Refer to Table 2-1 on page 2-2.) Note that the highest tolerable testing pressure is achieved with the pump running in the high-speed (fast) mode.
To set the turbo speed, issue the INIT-SPEED<CR> command or, if the optional front control panel is installed, set the turbo speed via the Leak Rate Ranging Set-Up screen (see Section 4.6.4 “Range Stop and Manual Range Set Up and Control” on page 4-15).
RANGE Range must be set equal to the exponent of the least sensitive range
of the leak detector (Section 3.2 “System Sensitivity and Configura­tion” on page 3-6), depending on the sensitivity of the vacuum sys­tem. (See “TOP RANGE”.)
To set the RANGE variable, issue the INIT-RANGE<CR> command.
TOP RANGE TOP RANGE is the exponent value of the least sensitive range of
leak detection for the configured system. The system detects four decades starting from the TOP RANGE. The TOP RANGE variable must be set appropriately for the given system configuration and is the largest exponent value. See Table 3-1 on page 3-6.
To set the TOP RANGE, issue the INIT-RANGE<CR> command, or if the optional front control panel is installed, set the parameter via
AUTO-RANGE MANUAL RANGE
the Leak Rate Ranging Set-Up screen (see Section 4.6.4 “Range Stop and Manual Range Set Up and Control” on page 4-15).
Auto-Ranging causes the leak detector to detect leaks within the four decades starting at the least sensitive value set in the RANGE variable (RS-232) or TOP RANGE (optional front control panel). The 990 dCLD II is shipped from the factory with Auto-Ranging enabled set as the default.
Manual Range is used to force the 990 dCLD II to respond to a leak rate detected in only one decade (the exponent never changes). This feature is useful when the test operator is only concerned with monitoring the leak rate measurement within a single decade. You must set Manual Range ON and also set the EXPONENT variable (see “MANUAL EXPONENT” below) to the desired decade.
Regardless of the ranging mode selected, the RANGE variable (above) must be set to the least sensitive decade.
To set Manual Range ON, issue the MANUAL<CR> command or, if the optional front control panel is installed, turn Manual Range ON via the Leak Rate Ranging Set-Up screen (see Section 4.6.4 “Range Stop and Manual Range Set Up and Control” on page 4-15).
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Model 990 dCLD II Component Leak Detector
MANUAL EXPONENT The MANUAL EXPONENT is the exponent value that you want
Manual Range to display when Manual-Ranging is set to ON.
To set the exponent, use the INIT-EXPONENT<CR> command, or if the optional front control panel is installed, set the MANUAL RANGE parameter via the Leak Rate Ranging Set-Up screen (see Section 4.6.4 “Range Stop and Manual Range Set Up and Control” on page 4-15).
RANGE STOP The RANGE STOP feature configures the 990 dCLD II so that it
only auto-ranges down to the pre-selected decade entered in the range stop variable field, as opposed to all four decades beginning at the TOP RANGE. For example, if RANGE STOP is enabled and set to 07, then the most sensitive range that the leak detector dis­plays is 10
This feature is useful when a product specification is more than one decade less stringent than the sensitivity of the leak detection sys­tem as it is configured. If the configured system is capable of detecting 10
07
10 reduces the test cycle time by eliminating the need for the leak detector to reach its most sensitive decade (10 cycle.
07
.
09
atm cc/sec but the test specification is only in the
atm cc/sec range, then setting the RANGE STOP to −08
09
) during each test
ENABLE-IDLE DISABLE-IDLE
To set the RANGE STOP exponent, issue the INIT-RANG­ESTOP<CR> command, or if the optional front control panel is installed, set the RANGE STOP parameter via the Leak Rate Rang­ing Set-Up screen (see Section 4.6.4 “Range Stop and Manual Range Set Up and Control” on page 4-15).
The ENABLE-IDLE command allows the control unit to be put into IDLE or RUN mode. The factory default setting is DISABLE-IDLE.
Issue the ENABLE-IDLE<CR> command to allow the control unit to be put into RUN or IDLE mode. If IDLE is DISABLEd, the 990 dCLD II will operate without asserting the IDLE/RUN input (J3/5) in the discrete I/O.
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Model 990 dCLD II Component Leak Detector
IDLE MODE RUN MODE
NOTE The ENABLE-IDLE command must be issued for the IDLE and
CALIBRATE CALIBRATE is used to perform an automated calibration based
IDLE mode allows the spectrometer tube and turbo pump to be shut down without turning off main power. Volatile operating parameters will not be lost in this mode. The factory default setting is the IDLE function is disabled. The Idle function must be ENABLED before it can be used.
To put the control unit in IDLE mode, de-assert the IDLE/RUN input (J3/5) in the discrete I/O.
RUN mode powers the spectrometer tube and turbo pump. The IDLE function must be ENABLED before RUN can be used.
To put the control unit in RUN mode, assert the IDLE/RUN input (J3/5) in the discrete I/O
RUN modes to be operational. The factory default setting is DISABLE-IDLE.
upon the parameters set. Calibration is either to a known INTER­NAL or EXTERNAL leak whose value has been entered into the appropriate parameter, and is either performed in NORMAL or FAST mode.
To perform an automated calibration, issue the CALIBRATE<CR> command or, if the optional front control panel is installed, press the CALIBRATE button.
CALIBRATED
LEAK VALUE
INTERNAL To enter the value of the internal calibrated leak, issue the
EXTERNAL If you are using an external leak, you must enter its value so the
The 990 dCLD II is shipped from the factory with a calibrated leak (Cal Leak) as part of the turbo spec tube assembly. Its value is noted on the tag attached to it and on the Cal Leak Certification. During setup, enter the value of the calibrated leak (Section 4.6.1 “Calibrated Leak Set-Up” on page 4-13). When a Calibration is per­formed, the system compares the leak rate signal with the stored value.
INIT-STDLEAK<CR> command or, if the optional front control panel is installed, enter the value via the Calibrated Leak Set-Up screen (Section 4.6.4 “Range Stop and Manual Range Set Up and Control” on page 4-15).
system can use it for comparison when a Calibration is performed.
To enter the value of the external calibrated leak, issue the INIT-EXTLEAK<CR> command or, if the optional front control panel is installed, enter the value via the Calibrated Leak Set-Up screen (Section 4.6.1 “Calibrated Leak Set-Up” on page 4-13).
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Model 990 dCLD II Component Leak Detector
NORMAL
CALIBRATION
FAST
CALIBRATION
The NORMAL calibration routine performs a thorough tuning pro­cess and a system gain adjustment (calibration). The full tuning pro­cess involves independently scanning the ion source chamber voltage and the variable focus voltage, and optimizing each value for a maximum helium signal. Once the tuning process is com­plete, the preamplifier gain is adjusted to bring the leak detector into calibration.
The SPEC TUBE LED on the front of the control unit flashes while calibration is taking place, the Discrete I/O J3/22 is active, and the response to the inquiry ?STATUS<CR> includes CAL. If the optional front control panel is installed, the calibrate indicator LED lights while calibration is taking place.
To set the mode to NORMAL, issue the 0 INIT-QUICK-CAL<CR> command or, if the optional front control panel is installed, select NORM from the CAL LEAK SET-UP screen (Section 4.6.1 “Calibrated Leak Set-Up” on page 4-13).
During FAST calibration, the leak detector compares the leak rate signal with the calibrated leak value and, if the gain adjustment required to bring the system into calibration is within the allowable limits. The full tuning operation is omitted.
The SPEC TUBE LED on the front of the control unit flashes while calibration is taking place, the Discrete I/O J3/22 is active, and the response to the inquiry ?STATUS<CR> includes CAL. If the optional front control panel is installed, the calibrate indicator LED lights while calibration is taking place.
If the calibration parameters are set to INTERNAL, the system notes the leak rate, turns off the leak and ZEROs the system. Then the sys­tem performs a NORMAL or FAST calibration as described above.
The SPEC TUBE LED on the front of the control unit flashes while calibration is taking place, the Discrete I/O J3/22 is active, and the response to the inquiry ?STATUS<CR> includes CAL. If the optional front control panel is installed, the calibrate indicator LED lights while calibration is taking place.
If the calibration parameters are set to EXTERNAL, the system per­forms a NORMAL or FAST calibration as described above.
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Model 990 dCLD II Component Leak Detector
NOTE No ZEROing takes place during an EXTERNAL calibration
because the 990 dCLD II has no control over the external calibrated leak.
The SPEC TUBE LED on the front of the control unit flashes while calibration is taking place, the Discrete I/O J3/22 is active, and the response to the inquiry ?STATUS<CR> includes CAL. If the optional front control panel is installed, the calibrate indicator LED lights while calibration is taking place.
To set the mode to FAST, issue the 1 INIT-QUICK-CAL<CR> com­mand or, if the optional front control panel is installed, select FAST from the CAL LEAK SET-UP screen (Section 4.6.1 “Calibrated Leak Set-Up” on page 4-13).
ZERO The ZERO function reads the background leak rate signal, stores
the reading in memory, and then resets the zero reference point. Subsequent actual test measurements include both helium from the real leak and helium from background conditions, however, the recorded background signal from the measurement is subtracted and the resultant real leak rate is displayed.
NOTE Performing the ZERO function while introducing helium to the
test object can result in the suppression of a real leak. Only use
ENABLE or DISABLE REJECT SET POINTS
the ZERO function after the helium source has been removed.
To perform a ZERO function, assert J3/7 in the discrete I/O, issue the ZERO<CR> command or, if the optional front control panel is installed, press the ZERO button (Section 4.1 “Control Buttons” on page 4-2).
Each REJECT SET POINT must be enabled before the function is operational. Conversely, each must be disabled to stop its opera­tion.
To ENABLE set points, issue the ENABLE-nREJECT<CR> command, where n is equal to 1 through 4. If the optional front control panel is installed, enable individual reject set points by setting the ON/ OFF buttons located to the right of each set point field to ON in the Reject and Audio Set Points screen (Section 4.6.2 “Reject and Audio Set Points” on page 4-14).
To DISABLE set points, issue the DISABLE-nREJECT<CR> com­mand, where n is equal to 1 through 4. If the optional front control panel is installed, disable individual reject set points by setting the ON/OFF buttons to OFF in the Reject and Audio Set Points screen (Section 4.6.2 “Reject and Audio Set Points” on page 4-14).
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Model 990 dCLD II Component Leak Detector
REJECT SET POINTS The REJECT SET POINTS are used to alert the operator that a mea-
sured leak rate has exceeded the set value. There are four set points available. Each set point must be enabled before they are opera­tional.
To set the value of the REJECT SET POINTS, issue the INIT-nREJECT<CR> command, where n is equal to 1 through 4. If the optional front control panel is installed, enter the value through the Reject and Audio Set Points screen (Section 4.6.2 “Reject and Audio Set Points” on page 4-14).
ENABLE AUDIO REJECT
AUDIO SET POINT The AUDIO SET POINT control is used to activate the audio tone
AUDIO REJECT must be enabled before the function is operational and reacts based upon its set point value.
To ENABLE the AUDIO set point, issue the ENABLE-AREJECT<CR> command or, if the optional front control panel is installed, enable AUDIO by setting the ON/OFF button located to the right of the audio set point field to ON in the Reject and Audio Set Points screen (Section 4.6.2 “Reject and Audio Set Points” on page 4-14).
To DISABLE the AUDIO set point, issue the DISABLE-AREJECT<CR> command or, if the optional front control panel is installed, disable AUDIO by setting the ON/OFF button to OFF in the Reject and Audio Set Points screen (Section 4.6.2 “Reject and Audio Set Points” on page 4-14).
from the optional front control panel when the measured leak rate value exceeds the threshold value (leak rate pass/fail specification) set by the operator. The audio tone frequency increases as the size of the measured leak increases beyond the set point. As stated above, you must enable AUDIO REJECT before the function is operational. If AUDIO REJECT is disabled, the audio tone fre­quency will increase from zero leak rate instead of from the audio reject set point.
The audio volume control is located on the optional front control panel (see Figure 4-1 on page 4-1). The sound emanates from the rear of the optional front control panel.
To set the Audio Reject set point, issue the INIT-AREJECT<CR> command or, if the optional front control panel is installed, set the audio reject set point value in the Reject and Audio Set Points screen (Section 4.6.2 “Reject and Audio Set Points” on page 4-14).
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Model 990 dCLD II Component Leak Detector
LOG BAR GRAPH DISPLAY LINEAR BAR GRAPH DISPLAY
LINEAR ANALOG OUTPUT 1 V/DEC LOG OUTPUT
In LOG BAR GRAPH DISPLAY mode, the 50-segment bar graph display on the optional front control panel represents the entire leak rate range of the leak detector, spanning from 10
0
to 10 LOG is displayed to the upper right of the bar graph.
In LINEAR BAR GRAPH DISPLAY mode, the 50-segment bar graph display on the optional front control panel represents the mantissa value of the leak rate, spanning from 0 to 10. The scale shows below the bar graph and LIN is displayed to the lower right of the bar graph. The numerical display, located to the far right of the bar graph, displays the leak rate exponent value. This mode offers exceptional resolution within a decade.
Set the display to LOG or LINEAR on the Output Control Set-Up screen (Section 4.6.5 “Output Control Setup” on page 4-16).
ANALOG options allow you to configure the output voltage to the I/O port (J3) on the back of the control unit. The options for output are LINEAR and 1, 2, or 3 volts per decade LOGarithmic output.
To set the leak rate analog output to LOG, issue the INIT-nLOG command, where n is 1, 2, or 3 volts or, if the optional front control panel is installed, toggle to the desired LOG output value on the Out­put Control Set-Up screen (Section 4.6.5 “Output Control Setup” on page 4-16).
atm cc/sec. The scale is displayed above the bar graph and
11
atm cc/sec
To set the leak rate analog output to LINEAR, issue the INIT-LINEAR<CR> command, if the optional front control panel is installed, toggle to the LINEAR ANALOG OUTPUT on the Output Control Set-Up screen (Section 4.6.5 “Output Control Setup” on page 4-16).
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Model 990 dCLD II Component Leak Detector
AUTO-ZERO<0 ACTIVE
When AUTO-ZERO<0 is activated, it automatically adjusts the zero reference point back up to zero when the helium level drops below the previously set zero reference point. This feature ensures that the leak detector maintains calibration after a previously zeroed background signal naturally cleans up. The factory default setting is active.
If the optional front control panel is installed, when the AUTO-ZERO<0 feature is in the process of re-adjusting the zero reference point, the UNDER light indicator located on the left end of the bar graph illuminates.
The duration of time that the UNDER light stays on during this pro­cess is a function of how much helium is cleaning up and how fast it is cleaning up. If the magnitude of helium clean up is great, the UNDER light remains lit until the clean up rate has slowed or stabi­lized. Although leaks can be located in this state, quantitative test­ing must not be performed until the UNDER light is off. Occasional flashing of the UNDER light indicates normal minor adjustments to small changes in background. This does not impact the leak detec­tor’s ability to accurately locate and measure leaks.
To set AUTO-ZERO<0 to active, issue the 1 INIT-AZ<0<CR> com­mand or, if the optional front control panel is installed, set the mode via the Zeroing screen (Section 4.6.6 “Zeroing” on page 4-17).
AUTO-ZERO < 0 INACTIVE
When AUTO-ZERO<0 is inactive, the leak detector does not auto­matically adjust the zero reference point back up to zero when the helium level drops below the previously set zero reference point. When this occurs, issue the ZERO command to re-adjust the zero reference point manually.
If the optional front control panel is installed, the UNDER light remains lit, indicating that the background level is below the previ­ously set zero reference point. Press the ZERO button on the front panel to re-adjust the zero reference point manually. This clears the UNDER light indication.
To set AUTO-ZERO<0 to inactive, issue the 0 INIT-AZ<0<CR> command or, if the optional front control panel is installed, set the mode via the Zeroing screen (Section 4.6.6 “Zeroing” on page 4-17).
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3.4 Startup

Turn the power ON by placing the power switch in the l position.
When first powered, the control unit performs a front panel lamp test, lighting all LEDs, after which the SPEC TUBE and HIGH VAC LEDs should extinguish and the POWER LED should remain lit. The following short three-line identification is sent via the host serial port J6:
polyFORTHII <LF> Varian 990II_dCLD <LF> hi <LF>
The cursor is positioned on the next line and is blinking. After the messages are sent, the control unit is running and ready to accept commands. See Appendix A “Communications Protocol” for a listing of commands and Table 2-11 on page 2-15 for a cross reference of commands in the different modes of operation.
Model 990 dCLD II Component Leak Detector
NOTE Unless otherwise stated, all commands must be issued in
capital letters.
The NOT READY line in the discrete I/O is active and the response to ?STATUS<CR> contains RDY/, indicating that the 990 dCLD II is not ready. If IDLE is enabled (see “IDLE MODE RUN MODE” on page 3-10), the control unit is waiting for the RUN command to be issued. If IDLE is disabled, the unit is waiting for the pressure (as read by the ConvecTorr™ gauge in the spectrometer) to be less than 1 Torr.
The forepump in the system should be able to pump the spectrometer tube through the high vacuum pump to a pressure of much less than 1 Torr. When the spectrometer tube pressure passes through 1 Torr and RUN is active (IDLE is disabled) the control unit starts the high vacuum pump and waits for it to achieve the set speed (see ?SETUP in Appendix A “Communications Protocol”, Table A-1 on page A-2). When the high vacuum pump achieves operating speed, the HIGH VAC LED on the front panel illuminates. When the pressure is less than 10 mTorr, the control unit sets the preamplifier offset and attempts to light the ion source filament. Setting the preamplifier offset takes up to two minutes. During this time, the SPEC TUBE LED flashes and a ?STATUS<CR> inquiry response contains ZRO.
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Model 990 dCLD II Component Leak Detector
When the ion source filament is successfully lit, the SPEC TUBE LED illuminates steadily, the READY line in the discrete I/O is active and, after a short time for verification that the ion source filament remains lit, the FILAMENT FAULT line in the discrete I/O becomes inac­tive. If you repeatedly issue the ?STATUS<CR> inquiry during this process, you see the response change from containing RDY/ to RDY and FLT, and, after a short time, FLT/.
The system is ready when the 3 LEDs on the control unit front panel remain steadily lit.
If the vacuum system has been at atmosphere or the electronics have been off for longer than a few minutes but less than a few hours, a wait of approximately 30 minutes is recom­mended so that the vacuum system and spectrometer tube can stabilize. During the stabili­zation period, the ZERO signal drifts, making zeroing and calibrating difficult.
NOTE Allow approximately 30 minutes for the system to stabilize
before running any tests if it has been off or IDLE for more than a few minutes.

3.4.1 Start up Indications on the Optional Front Control Panel

If the optional front control panel is installed, the leak detector is ready for operation when the SYSTEM READY indication appears on the Home Screen, the test mode is displayed in the line above SYSTEM READY and the LED lights above the TEST/HOLD button (which is inoperable on the 990 dCLD II). For more information see Section 4.4, “Touch Panel Home Screen”. If the 990 dCLD II is being started after a long period of being off (several hours), it can take up to 30 minutes to stabilize and provide reliable, quantitative leak rate readings.

3.4.2 Calibration

Calibration of the 990 dCLD II should be checked at least once every shift using a known helium leak at a known temperature, such as the internal calibrated leak supplied with the 990 dCLD II. A pressure burst in the spectrometer tube, a blown Ion Source filament, a large temperature change (over 10 °C), a power outage, contamination, or helium buildup in the vacuum system are all factors that could affect calibration. The value of the calibrated leak should be as close as possible to the decade most used during testing. This enhances the accuracy of the leak detector.
To perform a calibration, set the parameters previously described in Section 3.3.1 “Parame­ters and Operating Modes” on page 3-7 and then issue the CALIBRATE<CR> command. When calibration is complete, the systems should respond yes, to ?CALOK<CR>.
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3.4.3 Tuning

The 990 dCLD II is tuned to the spectrometer assembly at the factory. In normal operation, the 990 dCLD II upon issue of the CALIBRATE<CR> command or upon request via the optional front control panel (press the CALIBRATE button) performs a calibration to the value of the calibrated leak in the system or to the value of an external leak. If you are cali­brating to an external leak, it should be rough pumped before opening the isolation valve to avoid excessive pressure and helium signal burst. A leak calibrated to the middle two decades of the four decades of range based upon your system configuration is recom­mended for use during the calibration routine.
Manually tuning (see Section 5.6 “Manual Tuning” on page 5-20) the 990 dCLD II is more likely to be necessary if:
Model 990 dCLD II Component Leak Detector
The control unit is connected to a spectrometer assembly in the field other than the
one with which it was tested
It cannot successfully CALIBRATE (respond yes to ?CALOK<CR>)
The gain (?GAIN<CR>) is greater than 5.0

3.4.4 Running

A board in the Platform is changed
The ion source is changed
The 990 dCLD II senses the level of helium in the foreline of the high vacuum pump and converts the signal into a leak rate based upon the latest calibration and zero parameters in memory.
The leak rate is always available:
Through the host serial port (J6) by entering the ?LEAK<CR> command
By measuring the voltage at the analog voltage output on J3
By reading the BCD output on J4
If the optional front control panel is installed, observe the leak rate bar graph display or the leak rate displayed in the Home screen (Section 4.4 “Touch Panel Home Screen” on page 4-7).
The leak rate is valid if the READY line in the discrete I/O is active (?STATUS<CR> response contains RDY). In the event that the ready line is inactive, (?STATUS<CR> response contains RDY/) a leak rate might be able to be read, but it would not be a valid leak rate. For exam­ple, if the active ion source filament is burned out, READY would be inactive and FILAMENT FAULT would be active. This causes the host computer or PLC to halt testing and signal for help. Appendix B “Customer Accessible Inputs and Outputs”contains a descrip­tion of the available discrete I/O lines in the 990 dCLD II.
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Model 990 dCLD II Component Leak Detector

3.5 Quick Start Checklist

Make the vacuum connections between the 990 dCLD II spectrometer assembly and
your vacuum system.
Make electrical connections between the turbo spec tube assembly and the control
unit (see Section 3.1.3 “Connecting the Control Unit to the Turbo Spec Tube Assembly” on page 3-2).
Make mains power connection to the control unit.
Power the 990 dCLD II by turning on the main power switch on the rear panel.
Check that the POWER LED on the front panel of the control unit is lit after the
power on lamp test is completed.
Make sure that either IDLE mode is disabled and/or that the RUN input is active.
Start the backing pump(s).
Check that the HIGH VAC LED lights after the turbo pump achieves the set speed.
Check that the SPEC TUBE LED lights after the spectrometer tube pressure goes
below 10 mTorr.
Allow the system to run for at least 30 minutes to stabilize.
Calibrate the 990 dCLD II to a known helium leak.
Zero the 990 dCLD II.
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Model 990 dCLD II Component Leak Detector

3.6 Operation via Rear Panel

Once setup is complete and the 990 dCLD II is warmed up, operation can be turned over to the PLC by asserting PARALLEL ENABLE. Monitoring operations can take place using the optional front control panel or PLC, or by issuing commands using a host computer connected to the host serial port.

3.6.1 PARALLEL ENABLE

PARALLEL ENABLE turns control of the 990 dCLD II over to the PLC. Operations can be monitored by issuing commands using a host computer connected to the host serial port but most parameter values cannot be changed. If a command is issued that is not allowed once PARALLEL ENABLE is asserted, the system responds cant. See Appendix A “Communications Protocol”.
If the optional front control panel is installed, you can monitor operations via the bar graph display, the SPEC-TUBE PRESSURE display, and view the HOME and SYSTEM INFORMATION screens on the touch panel, but, again, you cannot change parameter values. The CALIBRATE, READ STANDARD LEAK, and ZERO buttons are not functional. If you have set AUDIO to ON during setup, it remains operational, however you cannot change its set point value. If you attempt to initiate an action from the optional front control panel that is not allowed once PARALLEL ENABLE is asserted, you hear a double beep. See Appendix B “Customer Accessible Inputs and Outputs”.
To remove control from the PLC, you must de-assert PARALLEL ENABLE. Even if the system is shut down with PARALLEL ENABLE asserted, control remains with the PLC.
NOTE If PARALLEL ENABLE is asserted, but the ?STATUS<CR>
response contains RDY/, indicating that the 990 dCLD II is not able to measure a leak rate, check to see if IDLE is enabled. If IDLE is enabled (see Table 2-11 on page 2-15 or Appendix A “Communications Protocol”), the control unit is waiting for the RUN command.
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Model 990 dCLD II Component Leak Detector

3.7 Analog Leak Rate Output Voltage

To use the analog leak rate output voltage to measure leak rate, you must set the format of the output voltage. The 990 dCLD II offers a choice of four leak rate output voltage formats as shown in Table 3-2. The output voltage format is selected by entering the appropriate command listed in Table 3-2, through the host serial port or, if the optional front control panel is installed, through the Output Control Set-Up screen (see Section 4.6.5 “Output Control Setup” on page 4-16).
Table 3-2 also shows the conversion formulas for each output. The last column of the table references a graph to use for converting the output voltage to the leak rate for each output option. These graphs are in Section 3.7.1 “Analog Leak Rate Output Voltage Conversion Charts” on page 3-22.
Section 3.7.2 “Conversion of 2 V/Dec Log to Leak Rate if 10X Function Not Available” on page 3-24 contains an explanation of the recommended output and conversion formula if your PLC does not have a 10
Table 3-2 Analog Leak Rate Voltage Outputs
x
function.
Output Option
Linear 0 - 10 V INIT-LINEAR<CR> Vout /
1 V/decade INIT-1LOG <CR> Leak Rate =
2 V/decade INIT-2LOG<CR> Leak Rate =
3 V/decade INIT-3LOG<CR> Leak Rate =
Set-up
Command
Leak Rate Vout
|RANGE variable|
(10
Vou t
10 10
10 10
10 10
/
|RANGE variable| +3
Vou t/2
/
|RANGE variable| +3
Vou t/3
/
|RANGE variable| +3
Formula Output Response
Curve
(Leak Rate) X
)
|RANGE variable|
(10
LOG (Leak Rate X
|RANGE variable| +3
10
2 X LOG (Leak Rate X
|RANGE variable|+3
10
3 X LOG (Leak Rate X
|RANGE variable| +3
10
)
)
)
)
Figure 3-3 on page 3-22
Figure 3-4 on page 3-22
Figure 3-5 on page 3-23
Figure 3-6 on page 3-23
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Model 990 dCLD II Component Leak Detector

3.7.1 Analog Leak Rate Output Voltage Conversion Charts

Use the charts below (Figure 3-3 to 3-6) to convert the output voltage to the leak rate.
Linear Analog Output Voltage
Leak Rate Mantissa = Output Voltage
10.0
9.0
8.0
7.0
6.0
5.0
4.0
3.0
2.0
1.0
Leak Rate Mantissa (Atm cc/Sec)
0.0
0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
Output Voltage (V)
Figure 3-3 Linear Leak Rate Output Voltage Response
1 V/Decade Log Analog Output Voltage
Leak Rate = 10^(Output Voltage)/10^(Top Range Variable + 3)
Output Voltage = LOG(Leak Rate X (10^(Top Range Variable + 3)))
1.00E+01
1.00E+00
1.00E-01
1.00E-02
1.00E-03
1.00E-04
1.00E-05
1.00E-06
Leak Rate (Atm cc/Sec)
1.00E-07
1.00E-08
1.00E-09
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0
Output Voltage (V)
Top Range Variable
0
1
2
3
4
5
6
3-22
Figure 3-4 1 V/Decade Logarithmic Leak Rate Output Voltage Response
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1.00E+01
0
2
345
6
Model 990 dCLD II Component Leak Detector
2 V/Decade Log Analog Output Voltage
1.00E+00
1.00E-01
1.00E-02
1.00E-03
1.00E-04
1.00E-05
Leak Rate (Atm cc/Sec)
1.00E-06
1.00E-07
1.00E-08
1.00E-09
0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0
Output Voltage (V)
Top Range Variable
Figure 3-5 2 V/Decade Logarithmic Analog Output Voltage
3 V/Decade Log Analog Output Voltage
Leak Rate = 10^(Output Voltage/3)/10^(Top Range Variable + 3)
Output Voltage = 3 X LOG(Leak Rate X 10^(Top Range Variable + 3))
1
1.00E+01
1.00E+00
1.00E-01
1.00E-02
1.00E-03
1.00E-04
1.00E-05
1.00E-06
Leak Rate (Atm cc/Sec)
1.00E-07
1.00E-08
1.00E-09
0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
Output Voltage (V)
Top Range Variable
Figure 3-6 3 V/Decade Logarithmic Analog Output Voltage
0
1
2
3
4 5
6
3-23
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Model 990 dCLD II Component Leak Detector

3.7.2 Conversion of 2 V/Dec Log to Leak Rate if 10X Function Not Available

To read leak rates in all four decades of the 990 dCLD II using the analog leak rate output voltage, it is recommended that the 2 V/Decade Log format be used. Use the following method to obtain the leak rate from the 2 V/Decade Log format if a 10 able in the host computer or PLC.
The leak rate is split into two integers; the first integer is the exponent of the leak rate, the second integer is the mantissa of the leak rate.
Exponent = INT (Vout /2) - |RANGE variable| + 3
Where: INT ( ) is the integer part of the expression Vout is the analog leak rate output voltage RANGE variable is the RANGE number from the ?SETUP<CR> command or viewed through the touch screen panel menu | | is the absolute value of the expression inside the bars (change the sign to + if it is -)
Mantissa = 1 + Y·(1 + Y/2·(1 + Y/3·(1 + Y/4·(1 + Y/5·(1 + Y/6·(1 + Y/7)))))
Where:Y = 2.302259·(Vout / 2 - INT (Vout / 2)) INT ( ) is the integer part of the expression in parentheses
x
function is not avail-

3.8 Shutdown

Shutting down the 990 dCLD II is as simple as turning the power off by moving the power switch on the rear panel to the down. When the system is shut down, all valves controlled by the system close. Also, if the PLC has asserted PARALLEL ENABLE when the system is shut down, it remains asserted and control remains with the PLC when it is turned back on.
position. The system can be in any mode when it is shut
°
3-24
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Model 990 dCLD II Component Leak Detector
Section 4. Setup and Monitor Operations via the
Optional Front Control Panel
The Optional Front Control Panel of the 990 dCLD II is shown in Figure 4-1. It can be mounted remotely from the control unit or directly onto the front face of the unit. Operation controls include control buttons and a touch panel for the initial setup of the leak detector. A three-position access key switch is also provided to prevent unauthorized changes of the system setup commands.
➀➁
Figure 4-1 990 dCLD II Optional Front Control Panel
➇➈
➂➃➄➅
Touch Screen Panel The touch screen panel provides a convenient menu interface to
set up the 990 dCLD II and displays information about the system while it is running.
Leak Rate Display The bar graph displays the leak rate in one of two forms:
A mantissa on the bar and a numerical exponent
Just the bar as a logarithmic bar graph display
The label at the right of the bar graph changes to indicate the cur-
Spec-Tube
Pressure Display
rent mode of operation: LOG or LIN. When in LOG, the values above the bar graph display the log scale 10 LIN, values below the bar graph display the linear scale 0 to 10.
If the leak rate goes below the zero point that has been set, UNDER displays at the left of the bar graph. If the leak rate goes above the highest set point, OVER displays at the right of the bar graph.
The bar graph displays the pressure in the spectrometer tube. The graph changes color to indicate more or less favorable conditions.
11
to 10−0; when in
4-1
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Model 990 dCLD II Component Leak Detector
Zero The ZERO button is used to initiate a function that zeros the leak
rate. The LED illuminates while Zeroing is taking place.
Read Standard Leak The READ STANDARD LEAK button is used to verify calibration by
exposing the internal calibrated leak to the system. The LED illumi­nates while the function is taking place.
Calibrate The CALIBRATE button is used to initiate an automated calibrate
function. The LED illuminates while calibration is taking place.
Audio
Volume Control
Key Switch The three-position key switch, SET-UP/RUN/SERVICE, is used to
NOTE These panel items are not operational:

4.1 Control Buttons

The ZERO button is functional only when the key switch is in the SET-UP or SERVICE positions, and when PARALLEL ENABLE is off.
The Audio Volume Control buttons are provided to change the vol­ume level of the audio leak rate indication.
access and control operational parameters, as well as service-related functions
Test Port Pressure Bar Graph (displays as full)
SNIFFER ON/OFF button
VENT button
TEST/HOLD button
The LED above the TEST/HOLD button lights when the System is ready, it does not refer to the function of the button.
4-2
Press the ZERO button to cause the 990 dCLD II to read the background leak rate signal, store the reading in memory, and then reset the zero reference point. While zeroing is taking place, ZEROING displays on the HOME screen operat­ing state line and the ZERO button LED indicator lights.
NOTE Pressing the ZERO button while you are introducing helium
tracer gas to the test object could result in the suppression of a real leak. Only use the ZERO button after the helium tracer gas source has been removed.
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Model 990 dCLD II Component Leak Detector
‘jP
The READ STANDARD LEAK button is functional only when the key switch is in the SET-UP or SERVICE positions and when PARALLEL ENABLE is not asserted.
Press the READ STANDARD LEAK button to display the value on the bar graph, and on the System Information screen allowing verification of 990 dCLD II cali­bration. When the system is in READ STANDARD LEAK mode, its LED indicator lights and STD LEAK is displayed on the HOME screen operating state line.
After verifying the 990 dCLD II calibration, press the READ STANDARD LEAK button to turn it off.
The CALIBRATE button is functional only when the key switch is in the SET-UP or SERVICE positions, and when PARALLEL ENABLE is not asserted.
Press the CALIBRATE button to perform an automated calibration based upon the parameters set on the Calibrated Leak Set-Up screen (Section 4.6.1 “Calibrated Leak Set-Up” on page 4-13). The calibrate indicator LED lights while calibration is taking place and CALIBRATING is displayed on the HOME screen operating state line.
The Audio leak rate indication volume is controlled by the two buttons labeled HI and LOW and with up and down arrows. Press the HI arrow button to increase the volume of the tone. Press the LOW arrow button to decrease the volume of the tone.
When the leak rate bar graph display is set to LINEAR mode (see “Output Control Setup” on page -16), the audio signal increases from a low to high pitch as the leak rate increases within each decade. The pitch cycles low to high as it passes through each decade.
When the leak rate bar graph display is set to LOG mode (see “Output Control Setup” on page -16), the audio signal increases from a low to high pitch as the leak rate increases through the entire bar graph scale.
If it is set up before PARALLEL ENABLE is asserted, the audio signal is operable. The set point must be set before PARALLEL ENABLE is asserted.
4-3
Page 78

4.1.1 Key Switch

The 990 dCLD II Key Switch allows three different levels of access to the touch panel sys­tem controls, RUN, SET-UP or SERVICE. Two different keys are provided with the leak detector:
Key T008 operates the switch in either the RUN or SET-UP positions.
The T008 key is intended for use by a line supervisor or engineer.
In RUN mode (PARALLEL ENABLE is asserted), the control buttons are inoperable, and the touch panel MENUS box is not displayed on the HOME screen, allowing access to only SYSTEM and VERSION information. Leak rate can be observed on the bar graph display, and pressure can be observed on the SPEC-TUBE PRESSURE dis­play. If it was enabled before PARALLEL ENABLE was asserted, the Audio signal is operational. In SET-UP mode, the control buttons for zeroing, calibrating and reading internal leak are functional, but the balance of the functions are the same as in RUN mode.
Key T009 operates the switch in RUN, SET-UP or SERVICE positions.
The T009 key is intended for service personnel and those who are very familiar with the operation of the unit, and those who are responsible for setting up and verifying changes of the operating parameters. All menus and control buttons are operational in SERVICE mode. RUN and SET-UP modes operate as discussed above.
Model 990 dCLD II Component Leak Detector

4.2 Touch Screen Menus

The 990 dCLD II optional front control panel has a touch panel display for the initial setup and configuration of the leak detector parameters. Once the leak detector is set up, basic operation and control is taken over by the PLC when PARALLEL ENABLE is asserted. The instructions below apply to all menus of the touch panel.

4.2.1 Contrast Adjustment of the Touch Panel Display

Press the upper left or right corner of the Touch Panel Home Screen to change the contrast.
4-4
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Model 990 dCLD II Component Leak Detector

4.2.2 Changing Variables in Touch Panel Screens

Touching the box that contains the variable to be changed causes the first digit of the vari­able to be highlighted.
1. Touch the box for the parameter you want to change
to highlight the digit.
2. Touch the UP or DN arrow to change the value of
the highlighted digit.
3. Touch the NXT arrow to select the next digit to be
changed and set its value by repeating step 2.
4. Touch the OK box to accept changes and store the new value of the parameter into the
memory of the leak detector. Touch BACK to exit the screen and return to the previous menu screen.
To change any digit, touch the box containing the parameter you want to change and then touch the NXT arrow to scroll to that digit and change it, as indicated in step 2.
NOTE Touching the ESC box before touching OK or BACK causes the
selected parameter to revert to its previously stored value.

4.2.3 Selecting Options in Touch Panel Screens

Many parameters are set via toggle boxes that you touch to switch between values or modes. For example, Manual Range can be set to ON or OFF by touching the toggle box to switch between displaying ON and OFF. In all cases, the information displayed in the box is the selected value. Most screen values do not change until you press OK, but some changes are immediate, for example, selecting the units from the UNITS SET-UP screen or selecting Linear or Logarithmic display from the OUTPUT CONTROL SET-UP screen.
4-5
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Model 990 dCLD II Component Leak Detector

4.3 Menu Hierarchy

Figure 4-2 and Figure 4-3 show the hierarchy of the 990 dCLD II touch screen menus and the parameters that can be changed from each menu. The numbers to the left of each menu refer to the section in this document that discusses that menu in detail.
MENUS
MENUS
4.4
4.4
SYS
SYS
INFO
INFO
BACK
BACK
BACK
BACK
4.6
4.6
HOME
HOME
SCREEN
SCREEN
4.5
4.5
Main Menu
Main Menu
Screen
Screen
SYS
SYS
INFO
INFO
4.5.1
4.5.1
BACK
BACK
VER
VER
4.6.1
4.6.1
4.6.2
4.6.2
4.6.3
4.6.3
4.6.4
4.6.4
4.6.5
4.6.5
4.6.6
4.6.6
4.7
4.7
SET-UP
SET-UP
CAL
CAL
LEAK
LEAK
REJECT &
REJECT &
AUDIO SET
AUDIO SET
POINTS
POINTS
UNITS
UNITS
SET-UP
SET-UP
LEAK RATE
LEAK RATE
RANGE
RANGE
SET-UP
SET-UP
OUTPUT
OUTPUT
CONTROL
CONTROL
SET-UP
SET-UP
ZEROING
ZEROING
SCREEN
SCREEN
TO
TO
SERVICE
SERVICE
MENU
MENU
INTERNAL LEAK VALUE: X.XE-XX
INTERNAL LEAK VALUE: X.XE-XX
EXTERNAL LEAK VALUE: X.XE-XX
EXTERNAL LEAK VALUE: X.XE-XX
USE INT LEAK toggle USE EXT LEAK
USE INT LEAK toggle USE EXT LEAK
USE NORM CAL toggle USE FAST CAL
USE NO RM CA L toggl e U SE FAS T C AL
REJECT SET POINT #1: X.XE-XX ON toggle OFF
REJECT SET PO INT #1: X.XE-XX ON toggle OFF
REJECT SET POINT #2: X.XE-XX ON toggle OFF
REJECT SET PO INT #2: X.XE-XX ON toggle OFF
REJECT SET POINT #3: X.XE-XX ON toggle OFF
REJECT SET PO INT #3: X.XE-XX ON toggle OFF
REJECT SET POINT #4: X.XE-XX ON toggle OFF
REJECT SET PO INT #4: X.XE-XX ON toggle OFF
AUDIO SET POINT: X.XE-XX ON toggle O FF
AUDIO SET POINT: X.XE-XX ON toggle OFF
LEAK RATE: toggle atm -cc/sec, mbar-l/sec, Torr-l/sec, Pa-m
LEAK RATE: toggle atm-cc/sec, mbar-l/sec, Torr-l/sec, Pa-m
PRESSURE: toggle Torr, mbar, Pa
PRESSURE: toggle Torr, mbar, Pa
MANUAL RANGE: 10-XX ON toggle OFF
MANUAL RANGE: 10-XX ON toggle OFF
RANGE STOP: 10-XX ON toggle OFF
RANGE STOP: 10-XX ON toggle OFF
TOP RANGE: 10-XX
TOP RANGE: 10-XX
TURBO SPEED: FAST toggle SLOW
TURBO SPEED: FAST toggle SLOW
LINEAR ANALOG OUTPUT toggle 1V/DEC, 2V/DEC, 3V/DEC LOG
LINEAR ANALOG OUTPUT toggle 1V/DEC, 2V/DEC, 3V/DEC LOG
LINEAR BAR GRAPH DISPLAY toggle LOG BAR GRAPH DISPLAY
LINEAR BAR GRAPH DISPLAY toggle LO G BAR GRAPH DISPLAY
AUTO-ZERO<0 AC TIVE toggle INACTIVE
AUTO-ZERO<0 ACT IVE toggle INACTIVE
See Figure 4-3
See Figure 4-3
3
3
/sec
/sec
4-6
Figure 4-2 Menu Hierarchy (up to Service Menu)
Page 81
Model 990 dCLD II Component Leak Detector
BACK
4.6
SeeFigure4-2
4.7
SERVICE
Main Menu
Screen
SERVICE
MENU
TO
MENU
TO
BACK
4.7.1
4.7.2
4.7.3
Figure 4-3 Service Menu Hierarchy

4.4 Touch Panel Home Screen

The 990 dCLD II Touch Panel Home Screen, Figure 4-4, displays a summary of the status and configuration that has been set, and has two touch screen boxes that either provide access to information or change the configuration. The Home Screen is displayed on power up and each time the RUN/SET-UP/SERVICE key is switched. The information provided on the Home Screen is:
MANUAL
CALIBRATE
MANUAL
TUNING
GAUGE
CAL
GAIN: X.X
REPELLER V: XXX EMISSION I: X.XXX ION V: XXX VARFOCUS: XXX FACTORY PRE-SET VALUES press to reset FIL 1 ACTV toggle FIL 2 ACTV
SPEC-TUBE TC ZERO SPEC-TUBE TC ATM
Digital Leak Rate Display Reject Status Indicator
Operating States Leak Detector Status
Condition States
SYS INFO touch screen box MENUS touch screen box
Varian 990 dCLD II
LEAK RATE: XXXE-XX atm-cc/sec
Reject Status Indicator
Operating States
REJECT #2,4
SYS INFO
FINE TEST SYSTEM READY [Blank] Condition States
MENUS
Figure 4-4 Touch Panel Home Screen
Digital Leak Rate
Leak Detector Status
4-7
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Model 990 dCLD II Component Leak Detector
0
1
2
3
45678910
-09
N
X10
c/sec
Digital Leak Rate The Digital Leak Rate displayed on the touch panel Home screen
correlates directly with the bar graph leak rate display when the mantissa value of the leak rate is greater than one. Leak rate read­ings with a mantissa value of less than one are shown on the touch panel Home screen with an exponent that is one decade below the bar graph display exponent. The units are user selectable from the Units Set-Up screen (see Section 4.6.3 “Units Set-Up” on page 4-15).
For example, the bar graph displays 0.8 x 10 09 atm cc/sec (Figure 4-5), then the leak rate displayed on the touch panel Home screen is 8.0E-10 (8.0 x 10 10) atm cc/sec (Figure 4-6). This fea­ture provides exceptional leak rate resolution.
LI
Figure 4-5 Bar Graph Display: 0.8 x 10 −09 atm cc/sec
LEAK RATE: 8.0E-10 atm c
Figure 4-6 Touch Panel Digital Display: 8.0E 10 atm cc/sec
Reject Status Indicator A REJECT status indicator displays below the Leak Detector Condi-
tion on the left-hand center of the Home screen when any of the four independent set points are enabled and have been activated (see Section 4.6.2, “Reject and Audio Set Points”). If all set points are disabled or are not active, then this indicator is not present.
Leak Detector Operating States
This line displays the current operating state. See Table 4-1 on page 4-9 for a listing and description of the messages that can appear here.
Leak Detector Status This line displays the current operating state of the 990 dCLD II.
Under normal operating conditions, this line reads SYSTEM READY. See Table 4-2 on page 4-9 for a listing and description of the messages that can appear here.
Leak Detector Condition States
Under normal operating conditions, this line is blank. If a problem occurs, it displays the condition that needs attention. See Table 4-3 on page 4-10 for a listing and description of the messages that can appear here.
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Model 990 dCLD II Component Leak Detector
SYS INFO and MENUS Touch Screen Boxes
Two touch screen boxes are displayed on the bottom of the Home screen. Touch the SYS INFO box to display the System Info screen, or touch the MENUS box to display the Main Menu screen.
NOTE Flashing C on the exponent display indicates that the leak
detector requires calibration.
Table 4-1 990 dCLD II Operating States
Display Description
CALIBRATING Indicates that the leak detector is currently performing a calibration routine.
CALIBRATION PREP Indicates that the leak detector is preparing for a calibration routine.
FINE TEST Indicates that the leak detector is in FINE TEST mode. When in FINE TEST mode
the leak detector is ready for fine leak testing.
STD LEAK Indicates that the internal calibrated leak standard valve is open and the leak
detector is reading the leak value.
STD LEAK PREP Indicates that the internal calibrated leak standard is being roughed before it is
introduced to the system for calibration or verification.
ZEROING Indicates that the leak detector is in the process of Zeroing out a background signal.
The Zero routine is only initiated automatically during the start up and calibration routines, or manually when the operator presses the ZERO button on the optional front control panel.
Table 4-2 990 dCLD II Leak Detector Status
Display Description
FILAMENT WAIT Indicates that the system is lighting the filament.
OFFSET WAIT Indicates that the system is setting the OFFSET value during the
start-up routine.
SPEC TUBE PRESSURE WAIT Indicates that the system (spectrometer tube) pressure is too high to
light the filament.
STABILIZATION WAIT Indicates that the system is waiting for the electronics to stabilize
before completing the start-up routine.
SYSTEM READY Indicates that the system is ready for testing. This message is only
present during the initial start-up. Flashing C on the exponent display indicates that the leak detector requires calibration.
ZEROING WAIT Indicates that the system is setting the initial zero values during the
start-up routine.
4-9
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Model 990 dCLD II Component Leak Detector
Table 4-3 990 dCLD II Condition States
Display Description
[BLANK] This line is blank under normal operating conditions.
BOTH FILAMENTS BURNT OUT Indicates that both filament 1 and filament 2 of the ion source have
burnt out.
FILAMENT 1 BURNT OUT Indicates that filament 1 of the ion source has burnt out. Filament 2
automatically illuminates, if it is still good, and the optional front control panel displays a flashing C in the leak rate exponent indicating that a calibration routine is required.
FILAMENT 2 BURNT OUT Indicates that filament 2 of the ion source has burnt out. Filament 1
automatically illuminates, if it is still good, and the optional front control panel displays a flashing C in the leak rate exponent indicating that a calibration routine is required.
GAIN TOO HIGH Indicates that the gain value required to calibrate the leak detector
during the calibration routine is greater than the allowable value. This is generally the result of the system sensitivity being too low.
GAIN TOO LOW Indicates that the gain value required to calibrate the leak detector
during the calibration routine is less than the allowable value. This is generally the result of the system sensitivity being too high.
NO FOCUS PEAK Indicates a tuning/calibration failure due to the system not detecting a
focus peak during the tuning or calibration routine.
NO ION PEAK Indicates a tuning/calibration failure due to the system not detecting
an ion peak during the tuning or calibration routine.
SWITCHING FILAMENTS Indicates that the system is momentarily in the process of switching
from a burnt out filament to the next available filament.
4-10
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Model 990 dCLD II Component Leak Detector

4.5 System Information Screen

The System Information screen, Figure 4-7, displays details of the leak detector setup and operating conditions. Table 4-4 describes the displayed system information in detail.
SYSTEM INFORMATION
FIL 2 ON
TURBO SLOW
INT CAL LEAK:
REJECT SET POINT #
AUDIO SET POINT:
GAIN LEVEL:
PARALLEL: DISABLED
Figure 4-7 System Information Screen, Typical Display
Touch the box labeled BACK to return to the Home screen. Touch the box labeled VER to display the System Software Version screen.
4.0E-06
5.0E-08
0.7
AUTO ZERO
atm-cc/sec
1,2
ENABLED
atm-cc/sec
VER
<0
ACTIVE
BACK
a
Table 4-4 System Information Screen Conditions
Condition Display Description
AUDIO SET-POINT AUDIO SET POINT: X.XE-XX Audio Set Point is active, and is set at the
value displayed.
AUDIO SET POINT: INACTIVE Audio Set Point is inactive.
CALIBRATED LEAK INT CAL LEAK System is set up to calibrate to the internal
standard leak.
EXT CAL LEAK System is set up to calibrate to an external
standard leak.
ION SOURCE FILAMENT FIL 1 OFF Filament 1 is selected and not lit.
FIL 1 ON Filament 1 is selected and lit.
FIL 2 OFF Filament 2 is selected and not lit.
FIL 2 ON Filament 2 is selected and lit.
REJECT SETPOINT REJECT# 1,2,3,4 ENABLED Reject set points displayed are active. If
blank, all set points are disabled or inactive.
TURBO PUMP TURBO FAST System turbo pump is operating at high
speed.
TURBO SLOW System turbo pump is operating at slow
speed.
4-11
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Model 990 dCLD II Component Leak Detector

4.5.1 System Software Version

The System Software Version screen (Figure 4-8) provides system software revision informa­tion and the phone number for Varian.
SYSTEM INFORMATION
FIL 2 ON
TURBO SLOW
INT CAL LEAK:
REJECT SET POINT #
AUDIO SET POINT:
GAIN LEVEL:
PARALLEL: DISABLED
4.0E-06
0.7
AUTO ZERO
atm-cc/sec
1,2
ENABLED
5.0E-08
VER
Touch the VER box. VERSION PLEASE WAIT is displayed while the inquiry takes place. The VERSION screen then displays the revision date and checksum of the main CPU and the optional front control panel CPU software. Inquiry of the checksum information takes several seconds.
<0
atm-cc/sec
Figure 4-8 Software Version Screen
ACTIVE
BACK
VERSION
AAXX.XX
AAXX.XX
1-800-882-7426
XXXXXX
XXXXXX
This screen automatically reverts to the System Information screen approximately 15 seconds after the revision data is displayed in full.
4-12
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Model 990 dCLD II Component Leak Detector

4.6 Main Menu Selection Screen

Touch the MENUS box on the Home screen to display the Main Menu screen (Figure 4-9). The Main Menu screen displays the screens available for performing general setup of the 990 dCLD II. Touching the BACK box from this screen displays the Home screen. The screens available through the Main Menu screen are described in this section. Many menus contain toggle boxes that switch between selections each time you touch them. The value or selection that is displayed when you touch OK, is what is set. Other menus contain parameters. Change their values by following the procedure in Section 4.2.2 “Changing Variables in Touch Panel Screens” on page 4-5.
Figure 4-9 Main Menu Selection Screen

4.6.1 Calibrated Leak Set-Up

Touch the SET-UP CAL LEAK box to display the Calibrated Leak Set-Up screen, shown in Figure 4-10. It is used to set the values of the Internal and External Calibrated leaks, to select whether to use an INTERNAL or EXTERNAL calibrated leak standard for calibration, and to select NORMAL or FAST CALIBRATION mode.
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
SET-UP
TO
SERVICE
MENU
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING SCREEN
TO
SERVICE
MENU
BACK
CALIBRATED LEAK SET-UP
INTERNAL LEAK VALUE: X.XE-XX
EXTERNAL LEAK VALUE: X.XE-XX
USE
INT
LEAK
USE
NORM
CAL
OK
ESC
UNITS
SET-UP
ZEROING SCREEN
BACK
DN
UP
Figure 4-10 Calibrated Leak Set-Up Screen
NXT
BACK
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Model 990 dCLD II Component Leak Detector
4.6.1.1 Selecting Internal or External Calibrated Leak for Calibration
Touch the USE INT/EXT LEAK toggle box to switch between selecting whether the 990 dCLD II performs an automated calibration to the internal calibrated leak standard sup­plied with the leak detector, or to an external calibrated leak placed in the test port.
INTERNAL LEAK Touch the USE INT/EXT LEAK toggle box to switch to USE INT
LEAK. Check or change the values of the internal leak in the INTERNAL LEAK VALUE box. The values you enter must be in the units specified in the Units Set-Up screen (Section 4.6.3 “Units Set-Up” on page 4-15).
EXTERNAL LEAK Touch the USE INT/EXT LEAK toggle box to switch to USE EXT
LEAK. Check or change the values of the external leak in the EXTERNAL LEAK VALUE box. The values you enter must be in the units specified in the Units Set-Up screen (Section 4.6.3 “Units Set-Up” on page 4-15).
4.6.1.2 Selecting Normal or Fast Calibration Routine
Touch the USE NORM/FAST CAL toggle box to switch between NORMAL CALIBRATION and FAST CALIBRATION modes.

4.6.2 Reject and Audio Set Points

Touch the REJECT & AUDIO SET POINTS box to display the Reject and Audio Set Points screen (Figure 4-11). From this screen, set the parameters to enable/disable, display and/or change the value of the four reject set points and the audio set point using the procedure outlined in “Changing Variables in Touch Panel Screens” on page -5.
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
UNITS
SET-UP
SET-UP
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING
ZEROING SCREEN
SCREEN
Figure 4-11 Reject and Audio Set Points Screen
TO
SERVICE
MENU
BACK
REJECT AND AUDIO SET POINTS
REJECT SET POINT #1: X.XE-XX
REJECT SET POINT #2: X.XE-XX
REJECT SET POINT #3: X.XE-XX
REJECT SET POINT #4: X.XE-XX
AUDIO SET POINT: X.XE-XX
DN
UP
NXT
OFF
ON
OFF
OFF
ON
OK
ESC
BACK
4-14
REJECT SET POINTS Touch the REJECT SET POINT #1 (2, 3 or 4) box to change each
reject’s set point value. Touch the ON/OFF toggle box located to the right of each set point field to turn the Reject Point on or off.
AUDIO SET POINT Touch the AUDIO SET POINT box to change the threshold leak
rate value. Touch the ON/OFF toggle box located to the right of the audio setpoint box to turn the Audio Set Point on or off.
Page 89

4.6.3 Units Set-Up

Touch the UNITS SET-UP box to display the Units Set-Up screen (Figure 4-12). This setup screen is used to select the leak rate and pressure units that are displayed on the leak rate bar graph, and in the Gauge Calibration screen, Section 4.7.3 “Gauge Calibration” on page 4-20. Note, this change is effective immediately upon selection.
Model 990 dCLD II Component Leak Detector
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
SET-UP
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING SCREEN
TO
SERVICE
MENU
BACK
LEAK RATE PRESSURE
Figure 4-12 Units Set-up Screen
LEAK RATE UNITS Touch the LEAK RATE units selection box to switch the leak rate
units between atm-cc/sec, mbar-l/sec, Torr-l/sec, and Pa-m
PRESSURE UNITS Touch the PRESSURE units selection box to switch units between
Torr, mbar, and Pa.

4.6.4 Range Stop and Manual Range Set Up and Control

Touch the LEAK RATE RANGE SET-UP box to display the Leak Rate Ranging Set-Up screen (Figure 4-13). From this screen, set up and enable the RANGE STOP and MANUAL RANGE functions, set the TOP RANGE, and control the TURBO speed. For a discussion of how to determine these values, see Section 3.3.1 “Parameters and Operating Modes” on page 3-7.
UNITS SET-UP
USE
atm-cc/sec
USE
To rr
BACK
3
/sec.
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
SET-UP
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING SCREEN
TO
SERVICE
MENU
BACK
MANUAL RANGE
DN
LEAK RATE RANGING SET-UP
RANGE
10-XX
OFF ON
UP
Figure 4-13 Leak Rate Ranging Set-Up Screen
STOP 10-XX
NXT
TOP
RANGE
10-XX
TURBO
SPEED
FAST
OK
ESC
BACK
4-15
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Model 990 dCLD II Component Leak Detector
MANUAL RANGE To read out one fixed decade, touch the MANUAL RANGE ON/
OFF toggle box to display ON and then set the value of the decade in the MANUAL RANGE box. This value must be set between the values of the TOP and STOP Range; other values are rejected.
Auto-Ranging ENABLED
When MANUAL RANGE is set to OFF, Auto-Ranging is enabled. The system reads out a maximum four decades starting from the value set for the TOP RANGE parameter. If RANGE STOP is ON, the system measures from the TOP RANGE decade to the RANGE STOP decade.
RANGE STOP When Auto-Ranging is enabled (MANUAL RANGE is set to OFF),
you can limit the range to less than four decades. Touch the RANGE STOP ON/OFF toggle box to display ON and then set the decade in the RANGE STOP box. The system then measures from the TOP RANGE decade to the RANGE STOP decade.
TOP RANGE Set the TOP RANGE to the least sensitive value the configured sys-
tem will evaluate. See Table 3-1 on page 3-6 and “TOP RANGE” on page 3-8 for a discussion of how to determine this value.
4.6.4.1 Leak Rate Range Selection through Turbo Speed Set-Up
The 990 dCLD II electronics allow for the display of only four full decades of sensitivity at one time. The four decades displayed depend on the pump model being used in conjunc­tion with the TURBO SPEED and TOP RANGE selection set by the user.
Touch the TURBO SPEED FAST/SLOW toggle box to switch between SLOW and FAST. The mode displayed indicates the current speed of the turbo.

4.6.5 Output Control Setup

Touch the OUTPUT CONTROL SET-UP box to display the Output Control Set-Up screen (Figure 4-14). From here, select the desired leak rate output and type of bar graph display.
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING SCREEN
Figure 4-14 Output Control Set-Up Screen
4-16
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
SET-UP
TO
SERVICE
MENU
BACK
OUTPUT CONTROL SET-UP
1V/DEC
LOG
OUTPUT
LINEAR
BAR GRAPH
DISPLAY
BACK
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Model 990 dCLD II Component Leak Detector
4.6.5.1 Bar Graph Display Set-Up
Touch the LINEAR BAR GRAPH DISPLAY toggle box to switch the bar graph display between LOG BAR GRAPH DISPLAY mode and LINEAR BAR GRAPH DISPLAY mode. Note, this change is effective immediately upon selection.
4.6.5.2 Leak Rate Analog Output Voltage Selection
Touch the LEAK RATE OUTPUT selection box located at the left of Output Control Set-Up screen to switch the output voltage at the I/O port (J3 or J4) on the back of the control unit among the selections listed below.
LINEAR ANALOG OUTPUT
Convert the voltage to the leak rate using the appropriate chart in Section 3.7 “Analog Leak Rate Output Voltage” on page 3-21.

4.6.6 Zeroing

Touch the ZEROING SCREEN box to display up the Zeroing screen shown in Figure 4-15.
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
SET-UP
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING SCREEN
Touch the box to switch between LINEAR ANALOG OUTPUT or LOG output voltage selections, which are 1V/DEC LOG, 2V/ DEC LOG and 3V/DEC LOG.
ZEROING
ACTIVE
BACK
TO
SERVICE
MENU
AUTO-ZERO
BACK
Figure 4-15 Zeroing Screen
Touch the AUTO-ZERO<0 box to switch AUTO-ZERO<0 between ACTIVE and INACTIVE states. Touch BACK to return to the Main Menu. Note, this change is effective immediately upon selection.
4-17
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Model 990 dCLD II Component Leak Detector

4.7 Service Menus

The Service Menus are mainly used by service technicians to provide service to your sys­tem. There are times, however, that you may want to view the information that is accessed via these screens to troubleshoot a situation, or you may be asked to provide this informa­tion to a service technician.
Touch the TO SERVICE MENU box on the Main Menu to display the Service Menu Selec­tion screen as shown in Figure 4-16, or BACK to return to the Home Screen.
SET-UP
CAL
LEAK
REJECT &
AUDIO SET
POINTS
UNITS
SET-UP
CAUTION Many of the values for the parameters included in the Service

4.7.1 Manual Calibration

Touch the MANUAL CALIBRATE box to display the Manual Calibration screen shown in Figure 4-17.
LEAK RATE
RANGING
SET-UP
OUTPUT
CONTROL
SET-UP
ZEROING SCREEN
TO
SERVICE
MENU
BACK
MANUAL
CALIBRATE
MANUAL
TUNING
Figure 4-16 Service Menu Selection Screen
Menus are calculated when the 990 dCLD II performs functions such as CALIBRATE and ZERO. Changing these values can cause unreliable test results.
GAUGE
CAL
BACK
4-18
MANUAL
CALIBRATE
MANUAL
TUNING
GAUGE
CAL
BACK
GAIN: X.X
DN
MANUAL CALIBRATION
UP
NXT
OK
ESC
BACK
Figure 4-17 Manual Calibration Screen
You can use the Manual Calibration screen to view or change the calculated Gain. Setting the gain greater than 5.0 or less than 0.5 causes the system to report an unsuccessful cali­bration and revert to the values stored prior to calibration.
Page 93

4.7.2 Manual Tuning

Touch the MANUAL TUNING box to view the Manual Tuning screen shown in Figure 4-18.
Model 990 dCLD II Component Leak Detector
MANUAL
CALIBRATE
MANUAL
TUNING
GAUGE
CAL
BACK
REPELLER V:
EMISSION I: X.XXX
ION V: XXX
VAR FOCUS: XXX
DN
UP
MANUAL TUNING
XXX
FACTORY
PRE-SET
VAL UES
FIL
1
ACTV
GAIN X.X
BACK
Figure 4-18 Manual Tuning Screen
You may need to manually tune the 990 dCLD II if:
The control unit is connected to a spectrometer assembly in the field other than the
one with which it was tested
It cannot successfully CALIBRATE
The gain is greater than 5.0
A board in the Platform is changed
The ion source is changed
OK
ESC
Refer to Section 5.6 “Manual Tuning” on page 5-20 for detailed instructions on Manual Tun­ing.
Touch the FACTORY PRE-SET VALUES box to change the values to those set at the factory. Note, this change is effective immediately upon selection.
The Manual Tuning screen allows you to change the REPELLER V, EMISSION I, ION V, VAR FOCUS values.
4-19
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Model 990 dCLD II Component Leak Detector

4.7.3 Gauge Calibration

Touch the GAUGE CAL box to view the Gauge Calibration screen shown in Figure 4-19.
MANUAL
CALIBRATE
MANUAL
TUNING
GAUGE
CAL
SPEC-TUBE TC ZERO
SPEC-TUBE TC ATM
SPEC-TUBE PRESSURE:
BACK
GAUGE CALIBRATION
7.6
E + 02 Tor r
OK
ESC
BACK
Figure 4-19 Gauge Calibration Screen
The Gauge Calibration screen displays the spectrometer tube pressure. Use this screen to calibrate the gauge following the procedure below:
1. With the system running, move to this screen and touch SPEC-TUBE TC ZERO. Verify that Passed appears to the right of TC ZERO.
2. Power off the 990 dCLD II.
3. Loosen the Turbo Vent screw and repower the system.
4. Power on the 990 dCLD II.
5. Move to this screen and touch SPEC-TUBE TC ATM. Verify that Passed appears to the right of TC ATM.
If Failed appears after either test, the ConvecTorr gauge must be replaced.
4-20
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Model 990 dCLD II Component Leak Detector

Section 5. Maintenance

Like other sensitive test equipment, a mass spectrometer leak detector requires periodic maintenance to ensure continued reliable operation. After prolonged use, the leak detector accumulates contaminants from even the cleanest of products tested. These contaminants eventually impair operation. A thorough disassembly and cleaning of the entire vacuum system, which includes the cal leak valve block and spectrometer tube, restores normal operation. For heavy production use, more frequent overhauls may be needed. Conversely, lighter use may permit a longer period between overhauls. In most cases, this work is done by user maintenance personnel, but it may also be done by Varian under the terms of a ser­vice contract.
This maintenance section does not cover overhaul of the entire vacuum system, nor does it cover customer-supplied parts except for the brief discussion regarding pumps below. It does cover maintenance that may have to be performed on a daily or as-required basis or, if the item has not required maintenance, on an annual preventive basis.
Customer-Supplied Pumps
Most pumps require regular maintenance. Oil gets contaminated over time and has to be replaced. In a system with dry pumps, tip seals have to be checked for wear. The cus­tomer-supplied roughing and forepumps of the system must be maintained at the intervals recommended by their manufacturer for this application in order to ensure reliable leak detection by the 990 dCLD II.
Important Reminders
Heed the following notes, cautions, and warnings when performing maintenance.
WARNING Disconnect power from the 990 dCLD II before performing any
maintenance procedure that requires physically disconnecting any part of the system.
CAUTION The preamplifier is a static sensitive device. Wear a grounding
device while the preamplifier is being handled.
WARNING Store the Ion Source in a cool, dry area in a tightly sealed
container. When handling the Ion Source, wear powder-free butyl or polycarbonate gloves. If you handle the Ion Source with bare hands, wash them thoroughly and especially before smoking or eating.
5-1
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Model 990 dCLD II Component Leak Detector
Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are some techniques more important in leak detector servicing than in general vacuum work:
CAUTION Do not use silicone oil or silicone grease.
Use powder-free butyl or polycarbonate gloves to prevent skin oils from getting on vacuum surfaces.
Do not clean any aluminum parts with Alconox
®
. Alconox is
not compatible with aluminum and will cause damage.
NOTE Normally, it is unnecessary to use vacuum grease. However, if it
must be used, avoid silicone types, and use it sparingly.
®
Apiezon
L grease is recommended (Varian Part No.
695400004).
When removing, checking or replacing O-rings:
CAUTION Remove O-rings carefully with your fingers. Do not use metal
tools for this task. This prevents scratching of any sealing surfaces.
Do not use alcohol, methanol or other solvents on O-rings. To do so causes deterioration and reduces their ability to hold a vacuum.
Do not use grease or other substance on O-rings that will come in contact with the spectrometer tube.
Wipe all O-rings clean with a lint-free cloth before installation to ensure that no foreign matter is present to impair the seal. Apply a small amount of Apiezon
®
L grease and wipe the
O-rings “shiny” dry.
5-2
NOTE Due to the effective cleaning nature of VacuSolv solvent and its
residue-free properties, Varian’ Component and Spectrometer Tube Cleaning Kit (Part Number 670029096), used in accordance with the kit instructions, is recommended for cleaning the spectrometer tube components. The kit can also be used for fine cleaning of other parts in the leak detector’s vacuum system such as valves and fittings. No rinsing steps or high-temperature drying is required following cleaning with VacuSolv. Although appropriate precautions are advised, VacuSolv is compatible with most materials and does not contain toxic chemicals or CFCs (chlorofluorocarbons).
Page 97
Model 990 dCLD II Component Leak Detector
For simplicity, the maintenance functions in this section are grouped by recommended frequency, as shown in Table 5-1, based on assumed everyday use.
Table 5-1 Scheduled Maintenance
Description Daily 12 Months Refer to
Calibration check
Recalibrate the internal calibrated leak
Spectrometer tube overhaul
Dual air intake filter replacement
These functions can be carried out at routine intervals, as indicated. The 990 dDLD II must be calibrated to verify sensitivity at least once a day. However, other functions may be car­ried out either more or less often, depending on the frequency of use.
Maintenance functions that may be required on a demand basis, for example, changing an Ion Source after filament failure, are listed in Table 5-2.
Table 5-2 As-required Maintenance
X
X
X
X
Section 5.1 “Daily Maintenance” on page 5-4
Section 5.2 “Recalibrate the Internal Calibrated Leak” on page 5-5
Section 5.3 “Spectrometer Tube Overhaul” on page 5-5
Section 5.4 “Dual Air Intake Filter Replacement” on page 5-18
Function Most Common Symptom Refer to
Spectrometer tube cleaning Loss of sensitivity, increase in background,
high ion voltage (> 300 VDC), required to tune the leak detector.
Ion source replacement Filament failure (as soon as convenient after
second filament is in use).
Tuning adjustments Use of a calibrated leak in the field other than
the one tested at the factory, or if calibration is not successful.
Section 5.3 “Spectrometer Tube Overhaul” on page 5-5
Section 5.5 “Ion Source Replacement Outside of Spectrometer Tube Overh aul” on page 5-19
Section 5.6 “Manual Tuning” on page 5-20
5-3
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Model 990 dCLD II Component Leak Detector

5.1 Daily Maintenance

5.1.1 Sensitivity Check using the Optional Front Control Panel

1. Press the READ STANDARD LEAK button.
2. Compare the value displayed on the HOME screen (Section 4.4, “Touch Panel Home Screen”) to the value of the known calibrated leak displayed on the SYSTEM INFORMATION screen (Section 4.5 “System Information Screen” on page 4-11) or listed on the tag of the calibrated leak. Adjust the value for temperature if necessary.
If the values do not match, press the CALIBRATE button to perform an automated
calibration and then repeat step 1.
If specification is still not met, Manual Tuning may be required. See Section 5.6
“Manual Tuning” on page 5-20.

5.1.2 Sensitivity Check using the Diagnostic Serial Port J12

1. Send the inquiry ?STDLEAK<CR>.
2. Compare the value returned in the response to the value of the known internal calibrated leak.
If necessary, adjust the value for temperature.
3. If the values do not match, perform an automated calibration:
Issue the INTERNAL<CR> command to ensure performing an internal calibration.
Issue the 0 INIT-QUICK-CAL<CR> command to ensure pilfering a full calibration.
Issue the CALIBRATE<CR> command to perform the calibration.
The system should respond ok<CR><LF>.
4. Repeat step 1.
If specification is still not met, Manual Tuning may be required. See Section 5.6 “Manual Tuning” on page 5-20.
5-4
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Model 990 dCLD II Component Leak Detector

5.2 Recalibrate the Internal Calibrated Leak

Helium calibrated leaks typically degrade at 3 percent per year. The calibrated leak sup­plied with your 990 dCLD II must be checked at least once a year to ensure it is at the value stated on its tag. Failure to check the leak could result in unreliable testing. You can arrange for testing and re-calibration at a lab of your choice.
Varian provides NIST-traceable calibrated leak testing and verification services. You can contact Customer Service at 1-800-8VARIAN (1-800-882-7426) to arrange for re-calibra­tion.

5.3 Spectrometer Tube Overhaul

Spectrometer tube overhaul consists of removing, cleaning, and re-installing the 990 dCLD II Spectrometer Tube Assembly. There are four basic sub-assemblies in the spec­trometer tube. Removal instructions follow in the order below.
Thermocouple Button (TC)
Ion Source
Preamplifier
Magnetic Poles
Table 5-3 lists the tools and parts required during spectrometer tube overhaul.
Table 5-3 Tools and Parts Required for Spectrometer Tube Overhaul
Tools
Slotted screwdriver
5/64" Hex wrench
Part Number Description
82850302 Ion Source
R1266301 Button Thermocouple (Button TC)
670029096 Varian
Spectrometer Tube Cleaning Kit
O-rings (Parker 2-025 V747-75 Black) Supplied with Ion Source, Button TC and Preamplifier
5-5
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Model 990 dCLD II Component Leak Detector

5.3.1 Removing the Spectrometer Tube Assembly

The spectrometer tube operates at a very high vacuum produced by the high vacuum pump. Service of the spectrometer tube requires that this vacuum be vented to the atmosphere.
NOTE Rebuilt spectrometer tubes are available from Varian on an
exchange basis. Contact Varian Customer Service at 1-800-8VARIAN (1-800-882-7426) for details.
1. Loosen the hold-down screw spectrometer assembly (Figure 5-1).
to remove the spec tube block connector from the
Figure 5-1 Removing the Spec Tube Block Connector
2. Remove the turbo fan power connection and the turbo pump power connection from the spec tube block connector.
5-6
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