Varian 979 Series Operation Manual

vacuum technologies

Model 979 Series

Helium

Mass Spectrometer

Leak Detector

OPERATIONS MANUAL

03

DRAFT 9/15/

Manual No. 699909979
Revision K
September 2003

Model 979 Series

Helium Mass Spectrometer Leak Detector

DRAFT 9/15/03

Contra-Flow, ConvecTorr, and TriScroll are trademarks or registered trademarks of Vacuum Technologies.
Alconox i s a registered trademark of Alconox, Inc.
Apiezon is a registered trademark of M&I Materials Ltd.
Loctite and PST are registered trademarks of Loctite Corporation.
Scotch-Brite is a trademark of 3M.

Copyright 2003

Varian Vacuum Technologies

Model 979 Series Helium Mass Spectrometer Leak Detector

Warranty

Products manufactured by Seller are warranted against defects in materials and workmanship for
twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid war­ranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of
the purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war­ranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust­ment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith­standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at its expense; in addition, a charge for testing and examination
may be made on Products so returned.

Items Not Covered by the Warranty

Examples of items not normally covered under warranty include ion sources, TC gauges, O-rings, spec­trometer tube cleaning and overhaul, mechanical pump oils, vacuum system overhauls, and obvious
abuse or customer error. These items are considered normal maintenance for this type of equipment.

3/1/00

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Model 979 Series Helium Mass Spectrometer Leak Detector

Table of Contents

Warranty ............................................................................................................................................iii

Warranty Replacement and Adjustment ......................................................................................iii

Items Not Covered by the Warranty .............................................................................................iii

Declaration of Conformity ................................................................................................................xiii

Preface ... .... ..... .... .. ..... .... .. ..... .... .. ..... .... ..... .. .... ..... .. .... ..... .. .... ..... .... .. ..... .... .. ..... .... .. ..........................xiv

Hazard and Safety Information ............................................................... ...................................xiv

Solvents .................................................................................................................................xv

Equipment, General ..............................................................................................................xvi

Power and Static.......... .. ............. ... .......................... .. ........................... .. ............. .. ... ...........xvii

Vacuum Equipment and Cleanliness................................................................................. ...xix

O-ring Care ................................. ... .......................... .. ............. ... .. ............. .. .............. .. .. . ........xx

Spectrometer Tube...............................................................................................................xxi

Gross Leak Option................................ .. ..................................................... .........................xxi

Pumps...................................................................................................................................xxi

Vacuum Technologies Services ................................................................................................xxii

Contacting V a c u um Technolog ie s ............ .. .............. .. .. ............. .. .............. .. .. ............. ... ...........xxii

Section 1. Introduction to the Model 979 Series .............................................................................1-1

1.1 The Model 979 ....................................................................................................................1-1

1.1.1 Model 979 Series Configurations................................................................................1-1

1.2 Unpacking the 979...............................................................................................................1-7

1.2.1 Unpacking Instructions................................................................................................1-7

1.2.2 Removing the 979 from the Skid.................................................................................1-8

1.2.3 Removing Loose Packing ............................................................................ .. .............1-8

1.3 Services Required for Operation..........................................................................................1-9

1.3.1 Power............................. .. ........................... .. ............. .. .. .............. .. .............................1-9

1.3.2 Helium............... .. .. ............. ... ............. .. .. ............. ... .......................... .. .............. .. .. .....1-10

1.3.3 Recommended Additional Services..........................................................................1-10

1.4 Preparation for Operation..................................................................................................1-10

1.5 Install a tio n.................... .. ............. ... .. ............. .. ........................... .. ............. .. ... ....................1-11

1.5.1 Bench S y s tem Installatio n s........................... .. .. ............. ... .......................... .. ............1-11

1.6 Storage .... ............. .. .............. .. .. ............. ... .......................... .. ........................... .. ................1-12

1.7 Front Pa n el Di sp lays and Con tr ols ............. .. ............. .. ... ............. .. ........................... .. .......1-12

1.8 Rear Panel Controls...........................................................................................................1-14

1.8.1 System Control and Communication Panel ..............................................................1-14

1.8.2 Power Control and Circuit Breakers................................. ............................ .............1-15

1.9 Universal Remote Option...................................................................................................1-17

1.10 Specif ic a tions.. .. .. ............. ... ............. .. .. .............. .. .......................... ... ............. .. .. ..............1-18

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Model 979 Series Helium Mass Spectrometer Leak Detector

Section 2. O p erating the 979 L e ak D e te c to r .................... .. ........................... .. ............. ... .. ............. . 2-1

2.1 Initial Startup and Shutdown ...............................................................................................2-1

2.1.1 Startup .......................... .. ........................... .. ............. ... .. ............. .. .............. .. .. ............2-1

2.1.2 Calibr a ti on.............................. .. .............. .. .. ............. .. .............. .. .. ............. ... ................2-1

2.1.3 Shutdo w n ........... ........................... .. .......................... ... ............. .. .. .............. .. .............. 2-1

2.2 Operato r In te rface....... ............. ... ............. .. .. .............. .. .......................... ... ............. .. .. ..........2-2

2.2.1 Sniffer S e t- U p Pr o cedure............ ............. .. ............. .. ... ............. .. ........................... .. ...2 -5

2.2.2 Key Swi tc h .............. ............. .. ........................... .. .......................... ... ............. .. .. .......... 2-5

2.3 Touch Panel Menus............................................................................................................. 2-6

2.3.1 Contrast Adjustment of the Touch Panel Display .......................................................2-6

2.3.2 Changing Variables in Touch Panel Screens .............................................................2-6

2.3.3 Selecting Options in Touch Panel Screens.................................................................2-7

2.4 979 Touch Panel Home Screen...........................................................................................2-8

2.4.1 Digital L ea k R a te............................. .. ............. ... .. ............. .. ........................... .. ............2-8

2.4.2 Test Por t P re s s u re ...................... .. .. ............. .. ........................... .. ............. ... .. ............. . 2-9

2.4.3 Leak Detector Status..................................................................................................2-9

2.4.4 Leak Detector Condition .............................................................................................2-9

2.4.5 Reject S ta t u s In d ic a tor.. .. ........................... .. ............. ... .. ............. .. ........................... .. . 2-9

2.4.6 SYS INFO and MENUS Touch Screen Boxes............................................................2-9

2.5 979 System Information Screen.........................................................................................2-12

2.6 First Menu Selection Screen..............................................................................................2-14

2.6.1 Calibr a te d Le a k S et -U p... .............. .. .. ............. ... .......................... .. .............. .. .. .......... 2-14

2.6.1.1 Selecting Internal or External Calibrated Leak for Calibration .....................2-15

2.6.1.2 Selecting Full or Fast Calibration Routine ....................................................2-15

2.6.2 Reject a n d Au dio Set Points ............. ........................... .. ............. .. ... ............. .. .......... 2-16

2.6.2.1 Changing and Enabling Set Point Values ....................................................2-16

2.6.3 Auto Se q uen cer Set-Up.............. ............. .. ............. .. ... ............. .. ........................... .. . 2-17

2.6.3.1 Auto Sequencer Set-Up Controls .................................................................2-18

2.6.4 Rough Pump Set-Up.................................................................................................2-19

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2.7 Second Menu Selection Screen.........................................................................................2-28

2.6.4.1 Selecting Rough Only or Split Flow Mode ................... ............................ .....2-19

2.6.4.2 Inputting the Rough Pump and Forepump Sizes .........................................2-20

2.6.4.3 VENT LOCK Function ..................................................................................2-20

2.6.5 Leak Rate Ranging Set-Up.......................................................................................2-20

2.6.5.1 Range Stop and Manual Range Set-Up and Control ...................................2-21

2.6.5.2 Selecting Fine Test or Gross Test On ly Mode .............................................2-22

2.6.5.3 System Sensitivity ........................................................................................ 2-22

2.6.6 Output Con trol Set-Up ................ .. .......................... .. .............. .. .. ............. ... .............. 2-24

2.6.6.1 Leak Rate Analog Output Voltage Selection ................................................2-24

2.6.6.2 Bargraph Display Set-Up ................. ........................................ ....................2-24

2.6.6.3 Seri a l C o m mu n i c a t io n s P ro t ocol Set-Up ...................... .. .. .............. .. ............ 2-26

2.6.7 Transfe r Pr e ss u re Set-Up.......................... .. .. .............. .. .. ............. ... ............. .. .. ........2-26

2.6.8 NEXT and BACK Boxes............................................................................................2-27

2.7.1 Units Se t- U p.............. .. .. .............. .. ............. .. .. .............. .. .......................... ... ..............2-28

2.7.1.1 Leak Rate and Test Port Pressure Units Selection ......................................2-28

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Model 979 Series Helium Mass Spectrometer Leak Detector

Section 3. Se rvice ....................... .. ... ............. .. ............. ... .. ............. .. ........................... .. ..................3-1

3.1 Version ........... .. ............. .. .............. .. .. ............. .. ........................... .. ............. ... .. ....................3-1

3.1.1 Manual Zeroing and Calibrate .....................................................................................3-3

3.1.1.1 AUTO-ZERO < 0 . .. ... ............. .. .......................... ... ............. .. .. .............. .. .........3 -3

3.1.1.2 Gain ................................................................................................................3-4

3.1.1.3 Offset ..............................................................................................................3-4

3.1.2 Manual Spectube Tuning............................................................................................3-4

3.1.2.1 Changing Manual Tuning Parameters ............................................................3-5

3.1.2.2 Repeller ............................. ..................................................... ........................3-5

3.1.2.3 Emission Current ............................................................................................3-5

3.1.2.4 Ion Voltage .....................................................................................................3-6

3.1.2.5 Variable Focus Voltage .......................................................................... .. ......3-6

3.1.2.6 Suppressor Voltage ............................. .. ..................................................... .. ..3-6

3.1.2.7 Fixed Focus Voltage ........ .................... .................... .................... ...................3-6

3.1.2.8 Filament Selection ..........................................................................................3-6

3.1.3 Manual Valve Control..................................................................................................3-7

3.1.4 Syste m In itialize Set- U p. ............. .. ... ............. .. ............. .. ... ............. .. ............. ... .. .........3 -9

3.1.5 Gauge Calibration Procedures............................. ..................................................... ..3-9

3.1.5.1 System Pressure Gauge Calibration Procedure ........................................ ..3-10

3.1.5.1.1 Va c u u m (L o w P re s s ur e) Calibration................ .. .. ............. .. ............3-10

3.1.5.1.2 Atmospheric Calibration ................................................................3-11

3.1.5.2 Test Port Pressure Gauge Calibration Proc edure ..................... ...................3-11

3.1.5.2.1 Va c u u m (L o w P re s s ur e) Calibration................ .. .. ............. .. ............3-12

3.1.5.2.2 Atmospheric Calibration ................................................................3-12

Section 4. Maintenance ..................................................................................................................4-1

4.1 Daily Maintenance ..............................................................................................................4-4

4.1.1 Sensitivity Check............ .. .. .............. .. .......................... .. .............. .. .. ............. ... ...........4-4

4.2 Recalibrate the Internal Calibrated Leak..............................................................................4-4

4.3 Spectrometer Tube Overhaul...............................................................................................4-4

4.3.1 Removing the Spectrometer Tube Assembly................ ..............................................4-5

4.3.2 Removing the Button TC...........................................................................................4-11

4.3.3 Removing the Ion Source..........................................................................................4-13

4.3.4 Removing the Preamplifier........................................................................................4-15

4.3.5 Remove the Magnetic Poles.....................................................................................4-16

4.3.6 Examining and Cleaning the Spectrometer Parts.....................................................4-17

4.3.7 Reasse mbly . ............. ... .. ............. .. .............. .. .. ............. .. ........................... .. ............. .4-19

4.4 Ion Source Replacement Outside of Annual Maintenance................................................4-20

4.4.1 Reasse mbly . ............. ... .. ............. .. .............. .. .. ............. .. ........................... .. ............. .4-21

4.5 Mechanical Pump ..............................................................................................................4-22

4.5.1 Oil-Sealed Pump Fluid Change.................................................................................4-22

4.5.2 TriScr o ll Pump Tip Seal R e p la c e m e n t ... .. ........................... .. ............. ... .. ............. .. ...4-22

4.6 979 Spare Parts List..........................................................................................................4-22

4.7 979 Accessory Item List.....................................................................................................4-24

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Model 979 Series Helium Mass Spectrometer Leak Detector

Appendix A. Rear Panel Interface Connectors ...............................................................................A-1

A.1 Optically Isolated Outputs....................................................................................................A-1

A.2 Optically Isolated Inputs ......................................................................................................A-3

A.3 Non-Isol ated Serial and A n a l o g In te rf a c es............. ... .. ............. .. ........................... .. ............A-4

A.4 Remote Control Connector.................................................................................................. A-5

Appendix B. Communications Protocol ..........................................................................................B-1

B.1 Protocol (RS-232)................................................................................................................B-1

B.2 Communicating with RS-232...............................................................................................B-2

B.2.1 Window s HyperTermin a l S et -Up Instruc tio n s ........ .. ... ............. .. ........................... .. ...B-2

B.2.2 Printing with HyperTerminal ......................................................................................B-4

Appendix C. Introduction to Leak Detection ...................................................................................C-1

C.1 Leak Testing—Why is it Needed?.......................................................................................C-1

C.2 Classes o f Le a k D et e c tio n.................................. .. ............. ... .. ............. .. ........................... .. .C-1

C.3 Terminol o g y.................................. .. ............. ... .. ............. .. ........................... .. ............. ..........C-2

C.4 Various Methods of Testing for Leaks . ................................................................................C-3

C.5 Helium Mass Spectrometer Leak Detection (MSLD).............................. .................... .........C-4

C.5.1 Principles of Mass Spectrometry ...............................................................................C-4

C.5.2 Application as a Leak Detector .................................. ................................................C-4

C.5.3 The Nature of Flow in a Vacuum .................... ......................................... ..................C-4

C.5.4 Facts About Leak Rates ...................... ............................ .. ........................................C-5

C.6 Leak Detection Methods......................................................................................................C-5

C.6.1 Test Piece Evacuated (Figure C-1a and Figure C-1b) ..............................................C-6

C.6.2 Test Piece Pressurized (Figure C-2) .........................................................................C-6

C.6.3 Test Piece Already Sealed (Figure C-3) ................. .................... ...............................C-7

C.7 Mass Spectrometer Leak Detector—Simplified Description................................................C-8

Index................................................................................................................................................. I-1

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Model 979 Series Helium Mass Spectrometer Leak Detector

List of Figures

1-1 979 Bench Mount Unit .............................. .. ............................ ........................... .................1-1

1-2 Single, Oil-Sealed Mechanical Pump Configuration on Two-Wheel Cart ...........................1-2

1-3 Single, Dry Mechanical Pump Configuration on Two-Wheel Cart................... .. .................1-3

1-4 Single, Dry Mechanical Pump Configuration on Four-Wheel Cart.............................. .. ......1-4

1-5 Dual, Oil-Sealed Mechanical Pump Configuration on Four-Wheel Cart .............................1-5

1-6 Dual, Dry Mechanical Pump Configuration on Four-Wheel Cart........................................1-6

1-7 970 Bench System Installation.................................................................. ........................1-11

1-8 Front Panel Displays and Controls ...................................................................................1-12

1-9 System Control and Communication Panel............................... ............................ ...........1-14

1-10 Power Control and Circuit Breakers........................... ........................................ ...............1-15

1-11 Unive rs a l R e m o te O p ti o n......... .. ........................... .. ........................... .. ............. .. .. ............1-17

2-1 979 Front Panel .................. .................... ............................................................. ...............2-2

2-2 979 Touch Panel Home Screen...................... .. ..................................................... .............2-6

2-3 979 Touch Panel Home Screen...................... .. ..................................................... .............2-8

2-4 Leak Rate Displayed on Home Screen: 0.6E-09 atm cc/sec..............................................2-8

-

2-5 Bar Graph Display: 0.6 x 10

2-6 System Information Screen, Typical Display....................................................................2-12

2-7 First Menu Selection Screen.............................................................................................2-14

2-8 Calibrated Leak Set-Up Screen............................. ..................................................... .. ....2-14

2-9 Reject and Audio Set Points Screen.................................................................................2-16

2-10 Auto Sequencer Set-Up Screen........................................................................................2-17

2-11 Rough Pump Set-Up Screen............................................................................................2-19

2-12 Leak Rate Ranging Set-Up Screen................................................................................... 2-20

2-13 Output Control Set-Up Screen..........................................................................................2-24

2-14 Leak Detector Logarithmic Output Voltage.......................................................................2-25

2-15 Leak Detector Linear Output Voltage.............. ..................................................... .............2-25

2-16 Transfer Pressure Set-Up Screen.....................................................................................2-26

2-17 Second Menu Screen.......................................................................................................2-28

2-18 Units S e t-Up Screen ... .. ............. ... .......................... .. ........................... .. ............. .. ... .........2-28

3-1 Second Menu Screen.........................................................................................................3-1

3-2 Version S cr e e n ............................... .. ............. .. ... ............. .. ........................... .. ............. .. .....3-1

3-3 Service Menu Screen..........................................................................................................3-2

3-4 Manual Zeroing and Cal Screen................................................................................... .. ....3-3

3-5 Manual Spectube Tuning Screen............................................ ............................................3-4

3-6 Manual Valve Control Screen........................................................ .. ...................................3-7

3-7 979 Vacuum System Diagram..................................... ........................... ............................3-8

3-8 System Initialize Set-Up Screen .........................................................................................3-9

3-9 Gauge Calibration Screen............................................ ..................................................... ..3-9

3-10 979 Touch Panel Home Screen........................................................................... .. ...........3-10

4-1 Front Panel .........................................................................................................................4-6

4-2 Front View of the Spectrometer Tube Assembly ................................................................4-7

09 atm cc/sec......................................................................... 2-8

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Model 979 Series Helium Mass Spectrometer Leak Detector

4-3 Removing the Connectors..................................................................... ........................... ..4-7

4-4 Wing Nut ......... .. .............. .. .. ............. ... .......................... .. ............. ... .. ............. .. ...................4-8

4-5 KF-25 Qu ick Clamp ..... .............. .. ............. .. ... ............. .. ............. .. ... ............. .. .....................4-8

4-6 Magnet Body Bracket Screws.............................................................................................4-9

4-7 Magnet Assembly Slotted Screws....................................................................................4-10

4-8 Tuning Magnet Set Screws...............................................................................................4-10

4-9 Button T C As s e m b ly ......... .......................... ... ............. .. .. ............. ... .......................... .. ......4-11

4-10 Removing the Button TC ..................................................................................................4-11

4-11 Button TC Wires (View with Header on)..................................................... ......................4-12

4-12 Removing the Ion Source .................................................................................................4-13

4-13 The Ion Source.................... ..................................................... ........................................4-14

4-14 Ion Source Cavity ............................................................................................................. 4-14

4-15 Ground Slit Plate...............................................................................................................4-15

4-16 Removing the Preamplifier ...............................................................................................4-15

4-17 Magnetic Pole Piece.........................................................................................................4-16

4-18 Removing the O-ring from Magnetic Pole Piece............................................................... 4-16

4-19 Removing the Second Magnetic Pole Piece.................. .................... .................... ...........4-17

4-20 Discolored Ground Slit Plate..................................................... .. ......................................4-17

4-21 Discolored Ground Magnet Pole Piece......................................................... ....................4-18

4-22 VacuSolv Cleaning Wipe.................. ........................... .....................................................4-18

4-23 Inspe c tin g the O-ring ... .............. .. ............. .. ... ............. .. ........................... .. ............. .. .. ......4-19

4-24 Spectrometer Tube Reassembly......................................................................................4-19

A-1 System Control and Communication Panel........................................................................A-1

A-2 Optically Isolated Output Circuit Sketch .............................................................................A-2

A-3 Optically Isolated Input Circuit Sketch ........................................................ .................... ....A-3

A-4 979 COM Cab le Wiring Diagram .......... .. ............. .. ... ............. .. ........................... .. ............. .A-4

C-1a Test Piece Evacuated: Tracer Probe Used to Locate Leak.......................... ......................C-6

C-1b Test Piece Evacuated and Hooded with Helium Atmosphere to

Determine Overall Leak Rate .............................................................................................C-6

C-2 Test Piece Pressurized: Detector Probe Used to Locate Leak...........................................C-6

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C-3 Test Piece Sealed with Helium or Mixture of Helium and Other Gases:

Bell Jar Used to Determine Overall Leak Rate ...................................................................C-7

C-4 Mass Spectrometer Leak Detector.....................................................................................C-8

C-5 Magnetic Separation Principle............................................................................................C-9

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Model 979 Series Helium Mass Spectrometer Leak Detector

List of Tables

1-1 979 Series Specifications................................................................................................. 1-18

2-1 Sniffer Mode Sensitivity Range (Full Scale).......................................... .................... ......... 2-5

2-2 979 Operating States.................................... ..................................................... .. ............ 2-10

2-3 979 Condition States........................................................................ .................... ............ 2-10

2-4 System Information Screen Conditions....... .. ..................................................... .. ............ 2-12

2-5 979 Standard Sensitivity Leak Detector................... .................... .................... ................ 2-23

2-6 979 High Sensitivity Leak Detector.................... ......................................... ..................... 2-23

3-1 979 Valve State Table - Single Mechanical Pump System.................................... ............ 3-7

3-2 979 Valve State Table - Dual Mechanical Pump System ....................... ........................... 3-8

4-1 Schedu l ed M a in tenance ..................... .. ........................... .. ............. ... .. ............. .. ............... 4-3

4-2 As-Required Maintenance........................................................................ .. ....................... 4-3

4-3 Tools and Parts Required for Spectrometer Tube Overhaul.............................................. 4-5

4-4 979 Spare Parts.................................................................. .. ........................................... 4-22

4-5 979 Accessory Item List............................................................... .................................... 4-24

A-1 Summary Table of Optically Isolated Outputs ....................................................................A-2

A-2 Summary Table of Optically Isolated Inputs ......................................................................A-3

A-3 Summary Table of Non-Isolated I/O ................................................................................ ..A-4

A-4 Summary Table of Non-Isolated Serial and Power ............................................................A-5

B-1 Interna l O p e ra ting Paramete rs ......... .. .. .............. .. ............. .. .. .............. .. ............. .. ... ...........B-5

B-2 Non-Vola tile Operatin g Par a m e te rs .......... .. ............. .. ... ............. .. ............. ... .. ............. .. .. ...B-7

B-3 Spectro meter Operating Paramete rs .......... .. ............. ... ............. .. .. .............. .. ............. .. .. ...B-9

B-4 Leak Detection Actions ......................................................................................................B-9

C-1 Decimal Notation ............ .. ........................... .. ............. ... .. ............. .. ........................... .. ...... C-2

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D

eclaration of Conform

ity

Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità

We
Wir
Nous
Nosotros
Wij
Noi

declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,

Varian, Inc.
Vacuum Technologies
121 Hartwell Avenue
Lexington, MA, 02421-3133 USA

Model 979 Series Helium Mass Spectrometer Leak Detector

to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.

89/336/EEC Electromagnetic Compatibility Directive

EN61326:1997 . . . . . . . . . . . . . . . . Measurement Control and Laboratory Equipment EMC Requirements

EN61010A-1:2001 . . . . . . . . . . . . . Safety Requirements for Electrical Equipment for Measurement, Control and

Laboratory Use, Part 1, General Requirements

Frederick C. Campbell
Operations Manager
Vacuum Technologies
Varian, Inc.
Lexington, Massachusetts, USA

May 2003

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

l

Preface

Hazard and Safety Information

Some common international symbols used in this manual and the equipment itself are
shown below.

OFF Power Switch Position Earth Ground

ON Power Switch Position Hot Surface

AC – Alternating Current Dangerous Voltage, Risk of

This manual uses the following standard safety protocol:

Electrical Shock

NOTE The notes contain important information taken from the text.

CAUTION The caution messages are displayed before procedures, which

DRAFT 9/15/03

Operators and service personnel must be aware of all hazards associated with this equip­ment. They must know how to recognize hazardous and potentially hazardous conditions,
and know how to avoid them. The consequences of unskilled, improper, or careless opera­tion of the equipment can be serious. This product must only be operated and maintained
by trained personnel. Every operator or service person must read and thoroughly understand
operation/maintenance manuals and any additional information provided by Vacuum
Technologies. All warning and cautions should be read carefully and strictly observed. Con­sult local, state, and national agencies regarding specific requirements and regulations.
Address any safety, operation, and/or maintenance questions to your nearest Vacuum
Technologies office.

WARNING The warning messages are for attracting the attention of the

if not followed, could cause damage to the equipment.

operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.

xiv

Solvents

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

CAUTION The mechanical components of leak detectors are typically

cleaned with alcohol, methanol, or other solvents.

When heated, sprayed, or exposed to high-temperature
equipment, these solvents become flammable and explosive,
causing serious injury or death. Do not use these solvents near
a high-temperature source. Ventilate the working area with a
blower and work in a large, well-ventilated room.

Alcohol, methanol, or other solvents are irritants, narcotics,
depressants and/or carcinogens. Their inhalation and/or
ingestion may produce serious side effects. Prolonged or
continued contact with the skin will result in absorption
through the skin and mod erate toxicity. Always ensure that
cleaning operations are carried out in large, well-ventilated
rooms, and wear eyeshields, gloves, and protective clothing.

CAUTION Do not clean any aluminum parts with Alconox

not compatible with aluminum and will cause damage.

NOTE During reassembly, always use Loctite

(teflon-i mpregn ated pi pe threa d c ompoun d) on pipe thr eads.

®

PST®

®

. Alconox is

DRAFT 9/15/03

xv

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Equipment, General

WARNING The leak detector is not designed for use with hazardous gases.

WARNING Equipment tightness is guaranteed for normal operating

CAUTION The performance and operating safety of this equipment can

Verify that t h e system to be t ested has been purged of all
hazardous gases p rior to using the leak detector.When testing a
system that contained hazardous gases, the ex haust of the leak
detector should be connected to a scrubbed or toxic
containment exhaust. Exposure to hazardous gas es c ould result
in serious i njury or death.

conditions when the equipment leaves the factory. It is the
user’s responsibility to maintain the level of tightness
particularly when pumping dangerous products.

only be guaranteed if it is operated according to normal
condi tions of use.

CAUTION Always allow at least 4 inches of clearance adjacent to the

DRAFT 9/15/03

ventilation holes at the front , back and bot tom of t he equipment
enclosure.

xvi

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Power and Static

WARNING Electrical insulation must include the appropriate br anch circuit

(at least 20 A), with long time delay and a reliable earth ground.
Do not use an extension cord.

Disconnect power from the 979 before performing any
maintenance procedure that requires physically disconnecting
any part of the system.

Use only the power cord tha t was provided with your leak
detector. The use of extension cords is not recommended and
could result in damage to the equipment and loss of warranty.

To avoid electric shock, connect the prod uct power cord to a
grounded p ower recep tacle. A prot ective ground connection by
way of the grounding conduct or in the power cord is essential
for safe operation.

CAUTION Vacuum Technologies strongly recommends the use of surge

protection to improve the immunity of the 979 Series leak
detectors against unidirectional transients caused by the
following phenomena:

❑ Switching phenomena in the power network (e.g., switching

of capacitor banks)

❑ Faults in the power network
❑ Indirect lightning strokes

CAUTION Many components of the 979 are static sensitive devices.

Vacuum Technologies recommends that you wear a grounding
device when performing any maintenance on the 979 and
especially when performing maintenance of static sensitive
parts.

DRAFT 9/15/03

xvii

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

WARNING This equipment is designed to meet current EEC regulations:

LVD (Low Voltage Directive, 73/23/EEC) and EMC
(Electromagnetic Compatibili ty, 89/336/EEC Directive) for
Installation Category II, Pollution Degree II environment for
Industrial, Scientific, Measuring and Process Control electrical
equipment.

❑ Any modifications on the part of the user are liable to cause

non-compliance with regulations or affect the EMC
performance and the safety of the product. Vacuum
Technologies cannot be held responsible for consequences
resulting from such intervention.

❑ The equipment can be damaged by incorrect mains AC

supply voltages, the Radio Frequency (RF) and Electrostatic
Discharge (ESD) energy inputs that can exceed the
maximum ratings, operating in very high temperatures or
without adequate ventilation, immersion in liquids, and
physical abuse.

❑ All electrical connections must be performed by a qualified

electrician and must comply with national and local codes.

DRAFT 9/15/03

❑ Ensure that the electrical installation conforms with your

local safety requirements.

❑ Electrical installation must include the appropriate branch

circuit (at least 20 A) with long time delay and reliable earth
ground. Do not use an extension cord.

❑ Use only the power cord that was provided with your leak

detector. The use of extension cords is not recommended
and could result in damage to the equipment and loss of
warranty.

❑ To avoid electric shock, connect the product power cord to

a grounded power receptacle. A protective ground
connection by way of the grounding conductor in the power
cord is essential for safe operation.

❑ Before powering the unit the first time, verify that the unit is

configured to operate for the local mains supply voltage.

❑ Opening the enclosure may expose hazardous voltages.

Always disconnect the power cord and interface cables
before opening the enclosure. Do not touch the power
inlet’s contacts for at least 10 seconds after disconnecting
the power cord.

xviii

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

CAUTION This equipment generates, uses, and can radiate RF energy and

if not installed and used in accordance with the instructional
manual, may cause harmful interference to radio
communications.

When this equipment is operated in a commercial environment
operation is subject to the following two conditions:

❑ This equipment may not cause harmful interference, and

❑ This equipment must accept any interference received,

including interference (RF and ESD) that may cause
undesired operation.

This equipment may need to b e reset after RF and/or ESD events
by cycling the Power Switch/Circuit Breaker on the back panel
of the unit.

Operation of this equipment in a residential area is also likely to
cause harmful radio communications i nterference in whi ch
case the user will be required to correct the interference at his
own expense.

Vacuum Equipment and Cleanliness

Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are
some techniques that are more important in leak detector servicing than in general vacuum
work:

CAUTION Do not use silicone oi l or sil icone grease.

Use powder- free butyl o r polycarbonate gl o ves to prevent skin
oils from getting on vacuum surfaces.

Do not clean any aluminum parts with Alconox
not compatible with aluminum and will cause damage.

NOTE Normally, it is unnecessary to use vacuum greas e. However, if it

must be used , avoid silicone types, and use it sparingly.
Apiezon
No. 695400004).

®

. Alconox is

®

L grease is recommended (Vacuum T echnologies Part

DRAFT 9/15/03

xix

O-ring Care

When removing, checking or replacing O-rings, keep in mind the following:

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

NOTE Vacuum Technologies recommends replacing all O-rings

during routine maintenance or during any maintenance
procedure requiring that O-rings be removed.

CAUTION Remove O-rings carefully with your fingers. Do not use metal

tools for this task. This prevents scratching of any sealing
surfaces.

❑ Wipe all O-rings clean with a lint-free cloth before

install ation to ensure that no foreign matter is present to
impair the seal.

❑ Do not use grease or other substance on O-rings that will

come in contact with the spectrometer tube.

❑ Do not use alcohol, methanol or other solvents on O-rings.

To do so causes deterioration and reduces their ability to
hold a vacuum.

❑ If applicable, apply a small amount of Apiezon

and wipe the O-rings “shiny” dry.

®

L grease

NOTE Due to the effective cleaning nature of VacuSolv solvent and

DRAFT 9/15/03

its residue-free properties, Vacuum Technologies’ Component
and Spectrometer Tube Cleani ng Kit
Part Number 670029096), used in accordance with the kit
instructions, is recommended for cleaning the spectrometer
tube components. The kit can also be used for fine cleaning of
other par ts in the leak detector’s vacuum system such as va lves
and fittings. No rinsing steps or high-temperature drying is
required following cleaning with VacuSolv. Although
appropriate precautions are advised, VacuSolv is compatible
with most materials and does not contain toxic chemicals or
CFCs (chlorofluorocarbons).

xx

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Spectrometer Tube

CAUTION The spectrometer tube operates at a very high vacuum

produced by the high vacuum pump. Service of the
spectrometer tube requires that this vacuum be vented to the
atmosphere.

CAUTION Do not use grease or other sub st ance on O-rings that will come

in contact with the spectrometer tube.

CAUTION If the spectrometer tube magnet comes in contact with a

magnetic surface, the magnet may lose its gauss, causing the
spectrometer tube to lose sensitiv ity.

WARNING Store the Ion Source in a cool, dry area in a tightly sealed

container . Wash hand s thoroughly after han dling the Ion Source
and especially before smoking or eating.

Gross Leak Option

If the Gross Leak option is installed, heed the following:

Pumps

CAUTION Do not make any alterations to the Gross Leak. Do not touch

the knurled nut on th e Gross Leak.

The Gross Leak is calibrated at the factory and if any alteration
is made, the Gross Leak must be returned to the factory for
recalibration. For returns, contact Vacuum Technologies
Customer Service at 1-800-8VARIAN.

WARNING To avoid injury, use proper lifting techniques when moving

pumps. Your system may have pumps that require two people
to move them safely.

DRAFT 9/15/03

xxi

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

WARNING The vacuum pumps are also compressors; incorrect operation

may be dangerous. Study the “Mechanical Pump Operation
Manual” enclosed with your pump before starting pumps.

The pumps are designed to prevent any thermal ri sk for user
safety. However, specific operating conditions may generate
temperatures >70 °C.

Hot oil will burn the skin. Service of the pumps in this area
must be performed by authorized personnel only. Stand back
from mechanical pump before start ing.

CAUTION Check the oil level often. Do not allow oil-based mechanical

pumps to run when oil level i s below LOW mark. Damage to
pumps can occur if operated with no oil.

WARNING To avoid injury, wait until the turbo pump is completely

stopped before disconnecting it from the vacuum system.

Vacuum Technologies Services

The following are two of the many services that Vacuum Technologies offers its customers.
Please see our catalog, or contact us to learn of the services that are available. Contact
Vacuum Technologies Customer Service at 1-800-8VARIAN for details.

❑ Rebuilt spectrometer tubes are available on an exchange basis.

DRAFT 9/15/03

❑ NIST-traceable calibrated leak testing and verification services.

Contacting Vacuum Technologies

In the United States, you can contact Vacuum Technologies Customer Service at
1-800-8VARIAN.

Internet users:

❑ Send email to Customer Service & Technical Support at

[e-mail]

❑ Visit our web site at www.varianinc.com/vacuum

❑ Order on line at www.evarian.com

xxii

See the back cover of this manual for a listing of our sales and service offices.

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Section 1. Introduction to the Model 979 Series

1.1 The Model 979

The Model 979 is a wide-range Helium Mass Spectrometer Leak Detector. It is
comprised of a turbomolecular high vacuum pump, spectrometer tube, valve block,
Vacuum Technologies’ Platform leak detector electronics, and an operator interface in a
stylish, yet rugged housing. The 979 is available as a stand-alone, bench-mount unit or as
a single or dual, dry or oil sealed mechanically pumped leak testing station on a cart.
Outline drawings for each configuration are shown in Section 1.1.1 “Model 979 Series
Configurations”.

The 979 uses Vacuum Technologies’ Platform leak detector electronics architecture to oper­ate the spectrometer assembly, control the mechanical and high vacuum pumps, control the
valve block, and provide leak rate and system status information to the operator interface.

1.1.1 Model 979 Series Configurations

This section contains outline drawings of the various configurations of the 979 Series leak
detector.

Figure 1-1 shows the outline drawing and physical dimensions of the stand-alone,
bench-mount 979 Series Leak Detector.

DRAFT 9/15/03

Figure 1-1 979 Bench Mount Unit

1-1

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Figure 1-2 shows the outline drawing and physical dimensions of a single, oil sealed
mechanically pumped leak testing station with the 979 Series Leak Detector on a two-wheel
cart.

Figure 1-2 Single, Oil-Sealed Mechanical Pump Configuration on Two-Wheel Cart

DRAFT 9/15/03

1-2

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Figure 1-3 shows the outline drawing and physical dimensions of a single, dry mechanically
pumped leak testing station with the 979 Series Leak Detector mounted on a two-wheel
cart.

Figure 1-3 Single, Dry Mechanical Pump Configuration on Two-Wheel Cart

DRAFT 9/15/03

1-3

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Figure 1-4 shows the outline drawing and physical dimensions of a single, dry mechanically
pumped leak testing station with the 979 Series Leak Detector on a four-wheel cart.

Figure 1-4 Single, Dry Mechanical Pump Configuration on Four-Wheel Cart

DRAFT 9/15/03

1-4

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Figure 1-5 shows the outline drawing and physical dimensions of a dual, oil sealed
mechanically pumped leak testing station with the 979 Series Leak Detector on a four-wheel
cart.

Figure 1-5 Dual, Oil-Sealed Mechanical Pump Configuration on Four-Wheel Cart

DRAFT 9/15/03

1-5

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Figure 1-6 shows the outline drawing and physical dimensions of a dual, dry mechanically
pumped leak testing station with the 979 Series Leak Detector on a four-wheel cart.

Figure 1-6 Dual, Dry Mechanical Pump Configuration on Four-Wheel Cart

DRAFT 9/15/03

1-6

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

1.2 Unpacking the 979

The 979 leak detector is carefully packed onto a resiliently mounted skid and enclosed by a
heavy cardboard container banded to the skid. Upon receipt, inspect the container for evi­dence of damage in shipment. Do not discard any evidence of rough handling. When open­ing the container, refer to the unpacking instructions located on the outside of the shipping
container. Factory packing provides for maximum protection during shipment. However,
inspect the leak detector and related items immediately. Report any damage to the carrier
without delay.

The following items are included in the shipment:

❑ Model 979 Series Operations Manual

❑ Model 979 leak detector configured and completely assembled as ordered

❑ All necessary power cords

❑ Pump manuals (for the purchased configuration)

❑ Any optional equipment ordered

❑ Any manuals for optional equipment purchased.

1.2.1 Unpacking Instructions

To unpack the 979 leak detector and remove it from the skid:

1. Inspect the container for evidence of damage in shipment. Do not discard any evidence
of rough handling.

Report any damage to the carrier and to Vacuum Technologies Customer Service at
1-800-8VARIAN without delay.

2. Carefully remove the outer shipping container.

3. Inspect the leak detector and related items immediately for any indication of shipping
damage.

4. Carefully cut the strapping holding the leak detector on the skid.

5. Remove any loose boxes or packages and put them aside.

Keep the original packing for re-use in the event that it is necessary to return the leak

detector to Varian Vacuum Technologies.

6. Carefully remove the front brace by removing the two lag bolts.

DRAFT 9/15/03

7. Carefully remove the plastic bag covering the leak detector.

The leak detector can now be removed from the skid.

1-7

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

1.2.2 Removing the 979 from the Skid

There are two methods for removing the 979 from the skid. Both methods require two

people. The second method involves removing the Skid-Mates (the blue donut-shaped

mounts at the front of the skid) from the skid.

WARNING Handle the leak detect or carefully and proper ly in the following

steps. Per sonal injury or damage to the leak detector could
result from improper handling. The 979 is heavy and can cause
personal injury if not handled carefully when removing it from
the skid.

Method 1

1. With the assistance of a helper, carefully roll the leak detector toward the front of the
skid.

2. Lift the front end of the unit and gently lower it onto the floor.

3. Lift the rear of the unit and roll it on the front casters until it is clear of the skid.

4. Gently lower the rear end onto the floor.

Method 2

1. Using the brace removed in Step 6 of Section 1.2.1 “Unpacking Instructions” as a lever,
carefully raise the front edge of the skid between 1" and 2".

2. While a helper holds the leak detector against the back brace, unscrew and remove the

front two Skid-Mates by turning them in a counterclockwise direction.

3. Make sure the helper is still holding the leak detector against the back of the skid, then
gently lower the front of the skid to the floor.

4. Carefully and slowly roll the leak detector off the skid and onto the floor.

DRAFT 9/15/03

1.2.3 Removing Loose Packing

Once the 979 is off the skid, take out and remove all loose packing from the leak detector.

1-8

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

1.3 Services Required for Operation

1.3.1 Power

Depending upon the configuration you ordered, the mains power supply requirements for
the 979 Series leak detector are:

❑ 100 VAC, 20 A, 50 Hz / 115 VAC, 20 A, 60 Hz, or

❑ 230 VAC, 20 A, 50/60 Hz

CAUTION Mains supply voltage fluctuations shall not exceed ±10% of th e

nominal voltage.

Transient overvoltages shall not exceed values according to
Installation Category (Overvoltage Category) II of the
UL3101-1 Standard.

Fixed mains socket-outlet shall be connected to PROTECTIVE
EARTHING system.

For indoor use only, Pollution Degree II in accordance with
UL3101-1 Standard.

CAUTION Vacuum Technologies strongly recommends the use of surge

protection to improve the immunity of the 979 Series leak
detectors against unidirectional transients caused by the
following phenomena:

❑ Switching phenomena in the power network

(e.g., switching of capacitor banks)

❑ Faults in the power network
❑ Indirect lightning strokes

WARNING Use only the power cord tha t was provided with your leak

detector. The use of extension cords is not recommended and
could result in damage to the equipment and loss of warranty.

DRAFT 9/15/03

1-9

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

1.3.2 Helium

For testing products, or leak checking the 979, welding grade helium in a standard cylinder
with pressure regulating valve and hose is required.

1.3.3 Recommended Add itional Services

The following additional services are recommended, especially in the case of clean room
use:

❑ A roughing/foreline pump exhaust hose to the outside of the room using the

connection on pump exhausts. This can help reduce the particulate count and the
helium background signal.

❑ When using oil lubricated mechanical pumps, an oil mist eliminator can be used on

the exhaust port of the mechanical pump to reduce the oil mist from the exhaust. Oil
mist eliminators can, however, become saturated with oil causing slower pumping
speeds and higher helium backgrounds in the leak detector. The replacement time
interval of the oil mist eliminator is determined by whether the user frequently
operates at elevated roughing pressures, pumps on large volumes, or frequently
cycles the system. Refer to Section 4.6 “979 Spare Parts List” on page 4-22 and
Section 4.7 “979 Accessory Item List” on page 4-24 for the mist eliminator and
replacement cartridge part number.

1.4 Preparation for Operation

Pre-operational set up is minimal for the 979 Series leak detector.

Oil sealed vacuum pumps are shipped with the proper initial charge of oil. On the front of
the roughing and forepumps is an oil level sight glass. The oil level should be in the middle
of the glass when the pump is not running. Check the oil level after running the pump for at

DRAFT 9/15/03

least 10 minutes. For additional information, see the Mechanical Pump Operation Manual

that was enclosed with your pump.

1-10

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

1.5 Installation

The 979 Series leak detector is delivered completely assembled as ordered. Locate the
979 close to its power source and be sure there is at least four inch clearance for proper
ventilation, and sufficient room for the operator to safely maneuver to perform testing.
Additional ventilation requirements for your specific application as discussed in
Section 1.3.3 “Recommended Additional Services” on page 1-10 must also be provided at
this point.

NOTE Refer to Section 1.5.1 “Bench System In s tallations ” on

page 1-1 1 for instructions on bench system installations, which
require some customer configuration.

1.5.1 Bench System Installations

Figure 1-7 represents the process for installation of a bench system version of the 959/959D.
Note, cut the 3/4" black tubing into 2 equal lengths for use as shown.

Foreline
Connector

Figure 1-7 970 Bench System Installation

DRAFT 9/15/03

1-11

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

1.6 Storage

If the leak detector is not used immediately, it can be stored as received without special
precautions. A dry, relatively dust-free area is preferred. The required environmental
conditions for storage are:

❑ 0% to 95% relative humidity, non-condensing

❑ −20 °C (−4 °F) to +60 °C (+140 °F) ambient temperature

1.7 Front Panel Displays and Controls

The 979 front panel leak rate display and control buttons are located on the front right-hand
side of the leak detector (Figure 1-8). The panel features large, color coded and clearly
labeled buttons, and a large, easy to read bar graph display. A brief description of the
control buttons follows. A more detailed discussion is included in Section 2 “Operating the
979 Leak Detector” on page 2-1.

➀

➂

➃➄➅

DRAFT 9/15/03

Figure 1-8 Front Panel Displays and Controls

11

12

➆

➁

➇➈➉

1-12

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

➀ Leak Rate Display The large bar graph displays the leak rate in one of two forms:

❑ A mantissa on the bar and a numerical exponent
❑ Just the bar as a logarithmic bar graph display

The label for the bar graph changes to indicate the current mode of
operation.

➁ Pressure Displays Two smaller bar graphs display the pressures in the spectrometer

tube and the test port. The small bar graphs change color to
indicate more or less favorable conditions.

➂ Audio Volume

Control

A pair of buttons are provided to change the volume level of the
audio leak rate indication.

➃ Sniffer On/Off The SNIFFER ON/OFF button toggles the 979 into and out of

SNIFFER mode. The LED illuminates when SNIFFER mode is
enabled.

➄ Vent The VENT button advances the 979 to the vented state. The

LED indicator illuminates while the 979 is in the vented state.

➅ Test/Hold When in VENT or HOLD, pressing the TEST/HOLD button

automatically advances the 979 through roughing, then through
the various test states, depending on the achievable test port
pressures and leak rates. The green LED above the button illumi­nates when the 979 is in a test state. When in TEST, pressing the
TEST/HOLD button automatically advances the 979 to the HOLD
state. The yellow LED below the button illuminates when the 979
is in the HOLD state.

➆ Zero The ZERO button is functional only in the test state. The ZERO

function zeros the leak rate in the current valve test state. The LED
illuminates while the zero function is taking place.

➇ Read Standard Leak The READ STANDARD LEAK button is functional only in the test

state. This function is used to verify calibration by exposing the
optional internal calibrated leak or the external calibrated leak to
the system.

DRAFT 9/15/03

➈ Calibrate The CALIBRATE button initiates the calibrate function using either

the optional internal calibrated leak or an external leak in the test
port, as dictated by the parameters set on the Calibrated Leak
Set-Up screen (see Section 2.6.1 “Calibrated Leak Set-Up” on
page 2-14). The LED illuminates to indicate that calibration is
taking place.

➉ Key Switch This three-position key switch, SET-UP/RUN/SERVICE, allows for

access and control of operational parameters, as well as service
related functions.

1-13

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

11

12

Under

Over

The UNDER range light indicates that the measured helium leak
rate is currently less than the minimum displayable value. The light
may flash briefly as the system recovers from a leak indication and
the displayable leak rate approaches zero. If the AUTO-ZERO < 0
is turned on, the UNDER light may also flash briefly as the system
resets the zero point to a lower value. Refer to Section 3.1.1.1
“AUTO-ZERO < 0” on page 3-3.

The 979 does not display a leak rate while the UNDER light is on.
If this light stays on for more than a few seconds, recalibrate the
system to set operating parameters to the correct zero value. This
situation can take place if the 979 was not fully warmed up before
calibration was initiated.

The OVER range light indicates that the system is saturated with
helium and the measured leak rate is higher than the maximum
displayable value.

1.8 Rear Panel Controls

1.8.1 System Control and Communication Panel

The system control and communication panel (Figure 1-9) is located on the lower left
section of the rear panel.

➄

➁

DRAFT 9/15/03

➅

Figure 1-9 System Control and Communication Panel

➀

➂

➃

1-14

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

➀ I/O connector The I/O connector is a 37-pin female D-type connector. Access to

all discrete input/output functions, RS-232, reject set points, and
analog leak rate output signals are available at this connector. A
detailed summary of information related to I/O communications is
provided in Appendix B “Communications Protocol”.

➁ Foreline Pump

Connection

➂ Remote Control

Input

The KF25 foreline pump connection is used to connect the
fore/roughing pump of a single mechanical pump configuration,
or the dedicated forepump of a dual pump configuration.

A 9-pin female D-type connector is provided to connect the
optional remote control device (Part Number L9558301). The
operation procedure for the optional remote is outlined in the

Remote Control Operation Manual (Part Number 699909915).

➃ Control Logic Not currently used.

➄ Sniffer Inlet Not currently used.

➅ System Vent Port Not currently used.

1.8.2 Power Control and Circuit Breakers

The 979 power entry control and circuit breaker module is located on the lower right
section of the rear panel (Figure 1-10). The label above this panel contains information
regarding the connections on this panel.

➄

➅

➆

➁

Figure 1-10 Power Control and Circuit Breakers

DRAFT 9/15/03

➀

➂➃

1-15

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

➀ Main Power

Switch/Circuit
Breaker

➁ Power Input Filter

Connector

The power entry module contains the main power ON/OFF switch/
circuit breaker. The 979 may be powered down in any state. Upon
power down, all internal valves close in order to protect and main­tain the cleanliness of the vacuum system.

The main power input connector accepts the power cord that is
provided with the leak detector. The power cord is rated for 20 A
service and must not be modified to plug into a lower rated recep­tacle.

➂ Forepump Power The 20 A forepump power output connector accepts the mating

connector from the fore/roughing pump of a single mechanical
pump configuration, or the mating connector from the dedicated
forepump of a dual mechanical pump configuration.

➃ Rough Pump

Power

➄ Roughing Valve

Power

The 20 A rough pump power output connector accepts the mating
connector from the dedicated roughing pump of a dual mechanical
pump configuration. This connection is not used on the single
mechanical pump configuration.

The roughing valve power output connector accepts the mating
connector from the roughing valve in dual mechanical pump con­figurations.

➅ Rough Valve

Circuit Breaker

➆ Turbo Pump

Circuit Breaker

DRAFT 9/15/03

❑ 3.0 A (100 VAC / 115 VAC)
❑ 1.5 A (230 VAC)

❑ 3.0 A (100 VAC / 115 VAC)
❑ 1.5 A (230 VAC)

1-16

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

1.9 Universal Remote Option

The Universal Remote shown in Figure 1-11 allows the operator limited control of the
979 Series Leak Detector at a distance of up to 25 feet from the unit. The Universal
Remote is connected through the port labeled Varian Remote Control on the rear panel
(see Figure 1-9 on page 1-14). For operation instructions, refer to the Universal Remote

Instruction Manual provided with the remote.

Figure 1-11 Universal Remote Option

DRAFT 9/15/03

1-17

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

1.10 Specifications

The specifications for the 979 Series Leak Detector are provided in Table 1-1.

Table 1-1 979 Series Specifications

Specifications 979 Helium Mass Spectrometer Versions

System Sensitivity Standard Sensitivity High Sensitivity
High Vacuum Pump Type,

Air-cooled,
maintenance-free

Vacuum Technologies Turbomolecular Pump

Rough/Fore Pump Wet (Oil-sealed) Dry (TriScroll
Rough Pump Type

Free Air Displacemen t
l/min, 60/50 Hz

Fore Pump Type

Free Air Displacemen t,
l/min, 60/50 Hz

Minimum Detectable Leak,
atm-cc/sec

Leak Units atm-cc/sec, mbar-l/sec, torr-l/sec, Pa-m3/sec
Response Time Less than 0.5 second, in accordance with AV S Standard 2.1.
Amplifier Drift Less than 5% of full scale of the most sensitive range, in accordance with AVS

DRAFT 9/15/03

Noise Level Less than 5% of full scale, peak-to-peak, in accordance with AVS Standard 2.1.
Calibration Fully automated tuning and calibration using the internal or external calibrated

— SD-451 — TS-620 — SD-451 — TS-620

— 410/342 — 500/420 — 410/342 — 500/420

DS-302 DS-302 TS-620 TS-320 DS-302 DS-302 TS-620 TS-320

285/237 285/237 500/420 250/210 285/237 285/237 520/420 250/210

–10

5 x 10

Standard 2.1.

leak. The fast calibrate feature allows the standard version to calibrate in less
than 20 seconds and the high sensitivity version to calibrate in less than
1minute.

) Wet (Oil-sealed) Dry (TriScroll)

–11

5 x 10

Zero Control Selectable mode background elimination with unique AUTOZERO<0 feature.
Leak Indication A 50-segment bar graph (linear or log) indicator displays leak rates

automatically; alphanumeric indication on LCD display. A leak can also trigger
an audible alarm frequency that varies in proportion to the size of the leak,
dedicated volume control and programmable audio threshold. Analog voltage is
proportional to the leak rate.

1-18

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Table 1-1 979 Series Specifications (Continued)

Specifications 979 Helium Mass Spectrometer Versions

Pressure Indication Test port and spectrometer pressure bar graph displays and test port pressure

alphanumeric indication on LCD display.

Spectrometer Tube Sensitivity optimized design, header mounted ion source with dual thoria-coated

iridium filament, preamplifier, ConvecTorr

Automatic Valve
Sequencing

Safety Interlocks A valve system design that completely protects the high-vacuum system under

Cycle Time Blanked port can be cycled to the fine leak test in 4 seconds. An auto sequencer

Test Port NW25; A 1
Remote I/O Capabilities Interface (DB-37S) with optically isolated (5-24 VDC) outputs and inputs,

Accessories (optional) Universal Remote (part # L9558301) with 25 foot cord, External Calibrated Leak,

Installation Indoor use only. Altitude up to 2000 m (6,400 feet). Installation (Overvoltage)

Microprocessor-controlled valve operation provides automatic system cycling.

test against pressure surge and power interruption.

feature provides clear accept/reject signals and allows programming of a
complete test cycle (START/ROUGH/TEST/VENT).

1

/

" (28 mm) ID Compression Port is available as an accessory.

8

Non-isolated Serial RS-232 interface, and Non-isolated Analog output (0-10 V).
Non-isolated Remote Control (DB-9S) interface.

and Power Probe.

Recommended Operating Ambient Conditions

Category II, Pollution Degree II according to UL3101-1 Standard

®

, and vacuum gauge.

Temperature +12 °C (54 °F) to +40 °C (104 °F) for Wet Version

(w/oil-sealed mechanical pumps)
+5 °C (41 °F) to +40 °C (104 °F) for Dry Version

(w/TriScroll™ mechanical pumps)

Humidity Maximum relative humidity (HR) 80% for temperatures up to +31 °C (88 °F)

decreasing linearly to 50% HR at +40 °C (104 °F). No hoarfrost, dew, percolating

water, rain, solar irradiation, etc.
Air Pressure 75 kPa (563 Torr) to 106 kPa (795 Torr)
Storage Ambient

Conditions
Power Requirements 100 VAC, 20 A, 50 Hz / 115 VAC, 20 A, 60Hz or 230 VAC, 20 A, 50/60 Hz.

Relative humidity: 0% to 95%, non-condensing. Temperature:

−20 °C (−4 °F) to +60 °C (140 °F)

Start-Up current for “Wet” version up to 85 A peak for up to 10 seconds at

temperature less then 20 °C (68 °F).

Note: 1. Input voltage cannot be modified by customer

Note: 2. No extension cord can be used.

DRAFT 9/15/03

1-19

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Table 1-1 979 Series Specifications (Continued)

Specifications 979 Helium Mass Spectrometer Versions

EMC 89/392/EEC Directive; EN61326:1997.
Dimensions See Outline Drawings (Figure 1-1 on page 1-1 to Figure 1-6 on page 1-6).
Weight 50 lb. (23 kg) net – stand-alone, bench-mount unit.

180 lb. (82 kg.) net – wet 1-pump 979 version with
DS-302 oil-sealed pump on a two wheel cart.

243 lb. (111 kg) net – wet 2-pump 979 version with
DS-302 and SD-451 oil-sealed pumps on a four-wheel cart.

DRAFT 9/15/03

1-20

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Section 2. Operating the 979 Leak Detector

2.1 Initial Startup and Shutdown

2.1.1 Startup

Plug the leak detector power cord into an appropriate receptacle and place the power
switch on the rear power control panel in the l position.

When the SYSTEM READY indication appears on the home screen, the leak detector is
ready for operation. If the 979 is being started after a long period of being off (several hours),
it may take up to 30 minutes to stabilize and provide reliable, quantitative leak rate
readings.

2.1.2 Calibration

The 979 is capable of performing an automated calibration routine using either an internal
calibrated leak (factory installed), or an external calibrated leak placed into the test port.
Refer to Section 2.6.1 “Calibrated Leak Set-Up” on page 2-14 for proper set-up of the 979
for auto-calibration.

After starting the 979, a calibration routine must be executed. If using the internal calibrated
leak, a calibration is performed by pressing the TEST button on the front panel to place the
system in test mode, then pressing the CALIBRATE button on the front panel to perform an
automated calibration of the system.

Calibration can be verified by pressing the READ STANDARD LEAK button on the front
panel when in TEST mode. Press the READ STANDARD LEAK button again to return to TEST
mode.

If an external leak is to be used, first press the VENT button to vent the leak detector and
then install a calibrated leak into the test port. Press the TEST button to place the leak
detector in Fine Test mode. Verify the correct leak rate value for the external leak by going to
the Calibrated Leak Set-Up screen (Section 2.6.1 “Calibrated Leak Set-Up” on page 2-14).
Once in Fine Test, press the CALIBRATE button to perform an automated calibration.

When calibration is complete, the leak detector reverts to a Fine Test mode of operation to
allow for calibration verification.

2.1.3 Shutdown

Shutting down the 979 is as simple as moving the power switch on the rear panel to
the

°

that when the system is shut down, all valves in the system close, so if the system is not in
VENT mode, the test port remains under vacuum and may be difficult to open.

DRAFT 9/15/03

position. The system may be in any mode when shut down. It bears noting, however,

2-1

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.2 Operator Interface

The front panel of the Model 979 is shown in Figure 2-1. Operation controls include
buttons for AUDIO VOLUME, SNIFFER, ZERO, READ STANDARD LEAK, CALIBRATE,
TEST, HOLD and VENT functions. In addition to the basic control buttons, the 979 utilizes a
touch panel display for the initial set-up of the leak detector. An access key switch is also
provided to prevent unauthorized changes to the system set-up variables.

Figure 2-1 979 Front Panel

Press the TEST/HOLD button when in VENT mode to automatically advance the
979 through roughing and then into the test state. The optimum sampling mode
is automatically selected, depending on the system configuration and set-up,
and the achievable test port pressure and leak rate. The TEST indicator LED,
located above TEST, illuminates when the 979 is in a test state.

If the TEST/HOLD button is pressed while the 979 is in the test state, the unit
advances to the HOLD state and the HOLD indicator LED, located below
HOLD, illuminates. When in HOLD mode, the test port valve V6 is closed,

DRAFT 9/15/03

isolating the test port and any test objects or fixturing from the leak detector
vacuum system. The test port pressure gauge is located on the test port side of
V6 and subsequently a rise in test pressure may be observed while in this mode.

While in TEST or HOLD, pressing the TEST/HOLD button causes the machine to
alternate between the two states.

Press the VENT button to isolate the test port from the leak detector vacuum
system and vent the test port to the atmosphere. The VENT indicator LED,
located above VENT, remains lit while the 979 is in the vented state.

2-2

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

The ZERO button is only active while the leak detector is in the test state. Press
the ZERO button to cause the 979 to read the background leak rate signal plus
electronic noise signal for the current flow rate (for example, mid-stage), store
the reading in memory, and then reset the zero reference point on the leak rate
display. The ZERO indicator LED lights while zeroing is taking place.

Subsequent test measurements include both helium from the real leak and
helium from background conditions. The 979 automatically subtracts the
recorded background signal from the measurement and displays the real leak
rate only.

NOTE Pressing the ZERO button while you are introducing helium

tracer gas t o the test object could result in the supp ression of a
real leak. Only use the ZERO b utton after the helium tracer gas
source has been removed.

When used correctly, the ZERO capability of the 979 is very powerful. It allows
for testing to sensitivity levels that are below the system background. This feature
also reduces test cycle times by reducing the amount of time required for
background levels to naturally clean up or by allowing for testing to begin at
relatively high test pressures.

The READ STANDARD LEAK button is only functional while the leak detector is
in a test state. The READ STANDARD LEAK button activates the optional internal
calibrated leak, allowing verification of the system calibration. When the system
is in READ STANDARD LEAK mode, its LED indicator lights.

Press the READ STANDARD LEAK button to isolate the test port from the system,
evacuate the calibrated leak manifold, and expose the leak to the spectrometer

tube. Compare the displayed leak rate value to the calibrated leak value.

Because the test port is isolated from the forepump and rough pump in this
mode, a slight increase in test port pressure may be indicated on the test port
pressure bar graph display.

The CALIBRATE button is used to perform an automated calibration based upon
the parameters set on the Calibrated Leak Set-Up screen (Section 2.6.1
“Calibrated Leak Set-Up” on page 2-14). CALIBRATE causes the 979 to rough
out and expose the internal standard leak to the system or, if EXTERNAL LEAK is
set during configuration, verifies that the test port is roughed out and exposed to
the system. The variable focus is scanned, then the ion voltage is scanned to find
the peak signal. The system notes the leak rate reading, then the leak is turned
off and the system is zeroed. Finally, a gain is calculated from the leak rate
reading to make the signal match the value of the calibrated leak and the system
is returned to TEST mode. The CALIBRATE indicator LED lights while calibration
is taking place.

DRAFT 9/15/03

2-3

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

The Audio leak rate indication volume is controlled by the two buttons labeled
HI and LOW and with up and down arrows. Press the HI arrow button to
increase the volume of the tone. Press the LOW arrow button to decrease the
volume of the tone.

When the leak rate bar graph display is set to LINEAR mode (Section 2.7.1
“Units Set-Up” on page 2-28), the audio signal increases from a low to high
pitch as the leak rate increases within each decade. The pitch cycles low to high
as it passes through each decade.

When the leak rate bar graph display is set to LOG mode, the audio signal
increases from a low to high pitch as the leak rate increases through the entire
bar graph scale. The LOG mode display setting is often desirable in sniffer
applications so the audio response corresponds directly to the size of the leak.

The SNIFFER ON/OFF button is used to toggle the 979 leak detector in and out
of SNIFFER mode. The SNIFFER indicator LED illuminates when SNIFFER mode
is enabled.

When the leak detector is in VENT mode, press the SNIFFER ON/OFF
button to start the test cycle. This automatically locks the leak detector into
CONTRA-FLOW™ LEAK mode, auto-ranging through four decades down to the
most sensitive range available for the current leak detector configuration.

If the leak detector is in TEST mode, pressing the SNIFFER ON/OFF button
performs the same function, with the exception of performing the test cycle start
sequence.

When in SNIFFER mode, press the SNIFFER ON/OFF button to switch the leak
detector back into the currently configured normal TEST mode.

DRAFT 9/15/03

2-4

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.2.1 Sniffer Set-Up Procedure

1. Vent the 979 and insert a Vacuum Technologies Power Probe
(Part Number K9565306) into the test port. Refer to the product catalog for additional
Power Probe configurations.

2. Set Range Stop to 10 - 07 (See Figure 2-12 on page 2-20).

3. Monitor the test port pressure reading on the touch panel display and adjust the Power
Probe flow valve for a test port pressure of 1 to 2 Torr.

4. Press ZERO to suppress the helium background signal.

Table 2-1 shows sniffer mode sensitivity.

Table 2-1 Sniffer Mode Sensitivity Range (Full Scale)

Standard Sensitivity High Sensitivity

All values in this table are at test port pressures between 1 and 2 Torr.

2.2.2 Key Switch

The 979 Key Switch allows three different levels of access to the touch panel system
controls—RUN, SET-UP or SERVICE. Two different keys are provided with the leak detector:

❑ Key T008 operates the switch in either the RUN or SET-UP positions.

The T008 key is intended for use by a line supervisor or engineer and allows most
parameters to be changed, but does not allow any operation that could damage the
unit.

❑ Key T009 operates the switch in RUN, SET-UP or SERVICE positions.

The T009 key is intended for service personnel and those who are very familiar with
the operation of the unit. Operations such as manually changing the valves can only
be performed when the key switch is in the SERVICE position. A first-level operator
would not have a key and would be able to operate the 979 with the key switch in
the RUN position only (key removed). No changes to the operating parameters are
allowed when the key switch is in the RUN position.

10

−

4

to 10

−

7

10

−

5

to 10

−

8

DRAFT 9/15/03

2-5

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.3 Touch Panel Menus

The 979 Leak Detector uses a touch panel display for the initial set-up and configuration of
the leak detector. Once the leak detector is set up and configured for a specific application,
basic operation is controlled primarily by the clearly labeled buttons described in the previ­ous section. The touch panel Home screen is shown below in Figure 2-2 and discussed in
detail in Section 2.4 “979 Touch Panel Home Screen” on page 2-8.

REJECT# 2,4

979

LEAK RATE: X.XXE-XX atm-cc/sec

T .P. PRESSURE: X.XE-XX Torr

SYSTEM READY

SYS INFO

Figure 2-2 979 Touch Panel Home Screen

2.3.1 Contrast Adjustment of the Touch Panel Display

Press the upper left or right corner of the Touch Panel Home Screen to change the contrast.

2.3.2 Changing Variables in Touch Panel Screens

Touching the box that contains the variable to be changed causes the first digit of the
variable to be highlighted.

To change a variable in the Touch Panel Screens:

DRAFT 9/15/03

1. Touch the box for the parameter you want to
change to highlight the digit.

2. Touch the UP or DN arrow to change the value of
the highlighted digit.

MENUS

2-6

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3. Touch the NXT arrow to select the next digit to be

changed and set its value by repeating step 2.

4. Touch the OK box to accept changes and store the new value of the parameter into the

memory of the leak detector. Touch DONE to exit the screen and return to the previous
menu screen.

To change any digit, touch the box containing the parameter you want to change and
then touch the NXT arrow to scroll to that digit and change it, as indicated in step 2.

NOTE Touching the ESC box before touching OK or BACK causes the

selected parameter to revert to its previousl y stored value.

2.3.3 Selecting Options in Touch Panel Screens

Many parameters are set via toggle boxes that you touch to switch between values or
modes. For example, Manual Range can be set to ON or OFF by touching the toggle box to
switch between displaying ON and OFF. In all cases, the information displayed in the box is
the selected value. Most screen values do not change until you press OK, but some changes
are immediate, such as the selection of units from the UNITS Set-Up screen or the selection
of the Linear or Logarithmic display from the OUTPUT CONTROL Set-Up screen.

DRAFT 9/15/03

2-7

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.4 979 Touch Panel Home Screen

The 979 Touch Panel Home Screen displays a summary of the following status and
configuration settings:

❑ Digital Leak Rate Display ❑ Test Port Pressure
❑ Leak Detector Status (not shown) ❑ Condition Indication (not shown)
❑ Reject Status Indicator ❑ System Ready Indicator
❑ SYS INFO touch screen box ❑ MENUS touch screen box

Two touch screen buttons, SYS INFO and MENUS, access or change the configuration as
shown in Figure 2.3.

979

LEAK RATE: X.XXE-XX atm-cc/sec

T.P. PRESSURE: X.XE-XX Torr

REJECT# 2,4

SYSTEM READY

Figure 2-3 979 Touch Panel Home Screen

2.4.1 Digital Leak Rate

The Digital Leak Rate (Figure 2.4) displayed on the touch panel Home screen correlates
directly with the bar graph leak rate display (Figure 2.5). The units for the measurements are

DRAFT 9/15/03

user selectable from the Units Set-Up screen (see Section 2.7.1 “Units Set-Up” on
page 2-28).

Figure 2-4 Leak Rate Displayed on Home Screen: 0.6E-09 atm cc/sec

Figure 2-5 Bar Graph Display: 0.6 x 10

SYS INFO

LEAK RATE: 0.6E-09 atm cc/sec

MENUS

-09

atm cc/sec

2-8

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.4.2 Test Port Pressure

The Test Port Pressure value displayed on the touch panel Home screen represents the test
port pressure as measured by a thermocouple device mounted on the valve block just
below the test port. The pressure transducer and associated electronics provide reliable and
repeatable measurements, protecting the leak detector from damage due to over-pressure
conditions. The test port pressure gauge is not intended to provide precise, absolute pres­sure measurements. Use an external pressure transducer if the test process requires accurate
monitoring of the test object pressure. The units for the measurements are user selectable
from the Units Set-Up screen (Section 2.7.1 “Units Set-Up” on page 2-28).

2.4.3 Leak Detector Status

Leak Detector Status (not shown in Figure 2.4) is displayed just below the test port pressure
reading and indicates the current operating state of the 979. The normal operating states are
detailed in Table 2-2 on page 2-10.

2.4.4 Leak Detector Condition

The Leak Detector Condition (not shown in Figure 2.4) is displayed below the Leak Detec­tor Status and indicates the current condition of the leak detector. Under normal operating
conditions this line is blank. The 979 leak detector conditions are detailed in Table 2-3 on
page 2-10.

2.4.5 Reject Status Indicator

A REJECT status indicator displays below the Leak Detector Condition on the left-hand cen­ter of the Home screen when any of the four independent set points are enabled and have
been activated (see Section 2.6.2 “Reject and Audio Set Points” on page 2-16). If all set
points are disabled or are not active, then this indicator is not present.

2.4.6 SYS INFO and MENUS Touch Screen Boxes

Two touch screen boxes are displayed on the bottom of the Home screen. Touch the
SYS INFO box on the left-bottom of the Home screen to display the System Info screen,
which is discussed in the next section.

Touch the MENUS box on the right-bottom of the Home screen to display the First Menu
Selection screen. The First Menu Selection screen is discussed in Section 2.6 “First Menu
Selection Screen” on page 2-14.

DRAFT 9/15/03

2-9

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Table 2-2 979 Operating States

Display Description

CALIBRATING Indicates that the leak detector is currently performing a calibration routine. The leak

detector reverts to HOLD mode while calibrating to the internal leak standard.

FINE TEST Indicates that the leak detector is in FINE TEST mode. When in FINE TEST mode

the test port valve opens and the leak detector is ready for fine leak testing.

GROSS TEST Indicates that the leak detector is in GROSS TEST mode. When in GROSS TEST

mode the test port valve closes and the GROSS LEAK valve and ROUGHING
valves are open. While testing in this mode, the majority of the gas introduced into
the test port is swept away through the roughing pump, and a small sample is
introduced to the system through the GROSS LEAK needle valve. Gross leak
testing capability is only provided on dual pump configurations.

HOLD Indicates that the leak detector is in HOLD mode. When in HOLD mode the test port

valve and the roughing valve are closed, isolating the test port and any test objects
or fixturing from the leak detector vacuum system.

ROUGHING Indicates that the leak detector is currently ROUGHING the test port and any

attached test objects or fixturing attached to the test port.

STD LEAK Indicates that the optional internal calibrated leak standard valve opens and the leak

detector is reading the leak value. The leak detector reverts to HOLD mode while
reading the internal leak standard.

VENTED Indicates that the test port is vented to atmosphere. The test port and all objects

attached to the test port are isolated from the internal vacuum system of the 979.

Table 2-3 979 Condition States

DRAFT 9/15/03

[BLANK] This line is blank under normal operating conditions.
BACKING Indicates that the leak detector is momentarily backing the foreline of

BOTH FILAMENTS BURNT OUT Indicates that both filament 1 and filament 2 of the ion source have

CAL OK Indicates that the calibration routine was executed successfully.
CALIBRATION PREP Indicates that the leak detector is preparing for a calibration routine.
FILAMENT 1 BURNT OUT Indicates that filament 1 of the ion source has burnt out. Filament 2 will

Display Description

the high vacuum pump during an extended rough period. This
condition will only be present on single pump configurations.

burnt out.

automatically light, if it is still good, and the leak detector will display a
flashing C in the leak rate exponent indicating that a calibration routine
is required.

2-10

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Table 2-3 979 Condition States (Continued)

Display Description

FILAMENT 2 BURNT OUT Indicates that filament 2 of the ion source has burnt out. Filament 1 will

automatically light, if it is still good, and the leak detector will display a
flashing C in the leak rate exponent indicating that a calibration routine

is required.
FILAMENT WAIT Indicates that the system is lighting the filament.
Flashing C on exponent display Indicates that the leak detector requires calibration.
GAIN TOO HIGH Indicates that the gain value required to calibrate the leak detector

during the calibration routine is greater than the maximum allowable

value. This is generally the result of the system sensitivity being too

low.
GAIN TOO LOW Indicates that the gain value required to calibrate the leak detector

during the calibration routine is less than the minimum allowable value.

This is generally the result of the system sensitivity being too high.
NO FOCUS PEAK Indicates a tuning/calibration failure due to the system not detecting a

focus peak during the auto-tuning routine.
NO ION PEAK Indicates a tuning/calibration failure due to the system not detecting an

ion peak during the auto-tuning routine.
OFFSET WAIT Indicates that the system is setting the OFFSET value.
REJECT Indicates a test object failure during an Auto Sequencer Test cycle.

See Section 2.6.3 “Auto Sequencer Set-Up” on page 2-17.
STABILIZATION WAIT Indicates that the system is waiting for the electronics to stabilize

before completing the start-up routine.
STD LEAK PREP Indicates that the optional internal calibrated leak is being roughed

before it is introduced directly to the system for calibration verification.
SWITCHING FILAMENTS Indicates that the system is momentarily in the process of switching

from a burnt out filament to the next available filament.
SYSTEM PRESSURE WAIT Indicates that the system (spectrometer tube) pressure is too high to

light the ion source filament.
SYSTEM READY Indicates that the system is ready for testing. This message will only

be present during the initial start-up and is cleared after the first test

cycle.
ZEROING Indicates that the leak detector is in the process of Zeroing out a

background signal. The Zero routine is only initiated automatically

during the start up and calibration routines, or manually when the

operator presses the ZERO button on the front control panel.

DRAFT 9/15/03

ZEROING WAIT Indicates that the system is setting the initial zero values during the

start-up routine.

2-11

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.5 979 System Information Screen

The System Info screen, shown in Figure 2-6, displays details of the current leak detector
set-up and operating conditions. The left-hand column displays filament status, reject set
point status, turbo status, gross leak configuration, auxiliary rough pump set-up, auto
sequencer status, and audio set point status. The right-hand column displays the calibrated
leak setting, leak rate range settings, and the sensitivity configuration. Table 2-4 describes
the displayed system information in detail.

979

LEAK RATE: X.XXE-XX atm-cc/sec

T .P. PRESSURE: X.XE-XX Torr

REJECT# 2,4

SYSTEM READY

SYS INFO

FIL 2 ON
REJECTS# 1,2,3,4
GROSS LEAK INSTALLED
ROUGH PUMP: ROUGH ONLY
AUTO SEQUENCER: OFF

MENUS

SYSTEM INFO

INT. CAL LEAK
AUTO RANGING
RANGE STOP: -7
HIGH SENS

BACK

Figure 2-6 System Information Screen, Typi cal Display

A touch screen box labeled BACK is located on the lower right-hand of the System Info
screen. Touch this box to return to the 979 Home screen.

a

Table 2-4 System Information Screen Conditions

CONDITION DISPLAY DESCRIPTION

AUDIO SET POINT AUDIO SET POINT: ACTIVE Audio Set Point is active.

AUDIO SET POINT: INACTIVE Audio Set Point is inactive.

DRAFT 9/15/03

AUTO SEQUENCER AUTO SEQUENCER: ON Auto Sequencer (automatic test cycle)

is enabled.

AUTO SEQUENCER: OFF Auto Sequencer (automatic test cycle)

is disabled.

CALIBRATED LEAK INT CAL LEAK System is set up to calibrate to the

internal standard leak.

EXT CAL LEAK System is set up to calibrate to an

external standard leak.

2-12

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Table 2-4 System Information Screen Conditions (Continued)

CONDITION DISPLAY DESCRIPTION

GROSS LEAK GROSS LEAK: INSTALLED Gross leak installed–standard on dual

pump configurations.

GROSS LEAK: NOT INST ALLED Gross leak not installed.

ION SOURCE FILAMENT FIL 1 OFF Filament 1 is selected and not lit.

FIL 1 ON Filament 1 is selected and lit.
FIL 2 OFF Filament 2 is selected and not lit.
FIL 2 ON Filament 2 is selected and lit.

LEAK RATE RANGE AUTO RANGING System is set up to auto range through

leak rate scale.

MANUAL RANGING System is set up for manual range

control.

RANGE STOP RANGE STOP -[EXP] System is set up so that the most

sensitive leak rate range displayed is

-

[EXP]

10

.

REJECT SET POINT REJECT# 1,2,3,4 ACTIVE Reject set points displayed are active;

this line is blank when all set points are
disabled or inactive.

ROUGH PUMP (Dual pump
configuration only)

SYSTEM SENSITIVITY HIGH SENS Leak detector is configured for high

ROUGH PUMP: ROUGH ONLY Dedicated rough pump is connected to

the test port only during the roughing
cycle.

ROUGH PUMP: SPLIT FLOW Dedicated rough pump is connected to

the test port during rough and test
cycles, providing additional pumping
capacity during test.

sensitivity testing. This line is blank
when the leak detector is configured for
standard sensitivity testing.

DRAFT 9/15/03

2-13

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.6 First Menu Selection Screen

Touch the MENUS box on the Home screen to display the Main Menu screen (Figure 2-7).
The Main Menu screen displays the screens available for performing general set-up of the

979. Touching the BACK box from this screen displays the Home screen. Touching the
NEXT box calls up the Second Menu screen. Many menus contain toggle boxes that switch
between selections each time you touch them. The value or selection that is displayed when
you touch OK is what is set (Section 2.3.3 “Selecting Options in Touch Panel Screens” on
page 2-7). Other menus contain parameters. Change their values by following the proce­dure in Section 2.3.2 “Changing Variables in Touch Panel Screens” on page 2-6.

The screens available through the Main Menu screen are described in this section.

979

LEAK RATE: X.XXE-XX atm-cc/sec

T .P. PRESSURE: X.XE-XX Torr

REJECT# 2,4

SYSTEM READY

SYS INFO

MENUS

Figure 2-7 First Menu Selection Screen

2.6.1 Calibrated Leak Set-Up

Touch the CAL LEAK SET-UP box to display the Calibrated Leak Set-Up screen, shown in
Figure 2-8. It is used to set the values of the Internal and External Calibrated leaks, to select
whether to use an internal or external calibrated leak standard for calibration, and to select
either FULL or FAST CALIBRATION mode.

DRAFT 9/15/03

CAL

LEAK

SET-UP

REJECT &

AUDIO SET

POINTS

AUTO

SEQUENCER

SET-UP

ROUGH

PUMP

SET-UP

LEAK RATE

RANGING

SET-UP

OUTPUT

CONTROL

SET-UP

TRANSFER

NEXT

POINTS
SET-UP

BACK

CAL

LEAK

SET-UP

REJECT &

AUDIO SET

POINTS

AUTO

SEQUENCER

SET-UP

CALIBRATED LEAK SET-UP

INTERNAL LEAK VALUE: X.XE-XX

EXTERNAL LEAK VALUE: X.XE-XX

DN

UP

NXT

ROUGH

PUMP

SET-UP

LEAK RATE

RANGING

SET-UP

OUTPUT

CONTROL

SET-UP

ESC DONE

NEXT

TRANSFER

POINTS
SET-UP

BACK

USE

INT

LEAK

USE

FULL

CAL

OK

2-14

Figure 2-8 Calibrated Leak Set-Up Screen

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.6.1.1 Selecting Internal or External Calibrated Leak for Calibration

Touch the USE INT/EXT LEAK box to switch between selecting whether the 979 performs an
automated calibration to the optional internal calibrated leak or to an external calibrated
leak placed in the test port.

2.6.1.2 Selecting Full or Fast Calibration Routine

Touch the USE FULL/FAST CAL box to switch between FULL CALIBRATION and
FAST CALIBRATION modes.

FULL CALIBRATION The calibration routine performs a thorough tuning process and a

system gain adjustment (calibration). The full tuning process
involves independently scanning the ion source chamber voltage
and the variable focus voltage, optimizing each value for a maxi­mum helium signal. Once the tuning process is complete, the sys­tem gain is adjusted to bring the leak detector into calibration.

FAST CALIBRATION During fast calibration, the leak detector compares the leak rate

signal with the calibrated leak value and, if the gain adjustment
required to bring the system into calibration is within the allowable
value, the full tuning operation is omitted.

The Calibration routine may be executed without removing the test object or test fixture
from the test port on single mechanical pump configurations, and on dual mechanical
pump configurations set in ROUGH ONLY mode.

NOTE A test po rt cap must be in place (isolating the test port) while

performing the Calibration routine on Dual Mechanical Pump
Configurations set in SPLIT FLOW mode.

DRAFT 9/15/03

2-15

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.6.2 Reject and Audio Set Points

Touch the REJECT & AUDIO SET POINTS box to display the Reject and Audio Set Points
screen (Figure 2-9). From this screen set the parameters to enable/disable, display and/or
change the value of the four reject set points and the audio set point.

CAL

LEAK

SET-UP

REJECT &

AUDIO SET

POINTS

AUTO

SEQUENCER

SET-UP

ROUGH

PUMP

SET-UP

LEAK RATE

RANGING

SET-UP

OUTPUT

CONTROL

SET-UP

NEXT

TRANSFER

POINTS
SET-UP

BACK

Figure 2-9 Reject and Audio Set Points Screen

2.6.2.1 Changing and Enabling Set Point Values

REJECT SET POINTS Set REJECT SET POINTS 1 through 4 so that the set points activate

when the measured leak rate value exceeds the set point value.
When a reject set point activates, the word REJECT is displayed on
the Home screen of the touch panel along with the number of the
reject set point that has been activated. The status of the reject set
points are also available at the I/O communications port and upon
inquiry through the RS-232 line (see Appendix B “Communications
Protocol”). Disable individual reject set points using the ON/OFF
buttons located to the right of each set point field.

REJECT AND AUDIO S ET POINTS

REJECT SET POINT #1: X.XE-XX
REJECT SET POINT #2: X.XE-XX

REJECT SET POINT #3: X.XE-XX
REJECT SET POINT #4: X.XE-XX
AUDIO SET POINT: X.XE-XX

DN

UP

NXT

ESC DONE

OFF

ON
OFF
OFF

ON

OK

AUDIO SET POINT The AUDIO SET POINT control is used to activate the audio tone

DRAFT 9/15/03

2-16

when the measured leak rate value exceeds the threshold value
(leak rate pass/fail specification) set by the operator. When the
audio set point control is set to ON, the audio tone frequency
increases as the size of the measured leak increases beyond the set
point. The audio volume control is located on the front panel (see
Figure 1-8 on page 1-12) and is discussed in Section 2.2 “Operator
Interface” on page 2-2.

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.6.3 Auto Sequencer Set-Up

Touch the AUTO SEQUENCER SET-UP box to display the Auto Sequencer Set-Up screen
Figure 2-10. Auto sequencer provides the ability to set up the 979 so that it automatically
runs through a complete test cycle (START/ROUGH/TEST/VENT), passing or failing the test
part per the test specification entered by the user. The auto sequencer set-up controls
include test object rough time, test time, and auto sequencer on/off. A Pass or Fail condition
is determined based upon the reject set point selected by the user and/or achievement of the
pressure transfer set points within the period of time specified in Rough Time.

CAL

LEAK

SET-UP

REJECT &

AUDIO SET

POINTS

AUTO

SEQUENCER

SET-UP

ROUGH

PUMP

SET-UP

LEAK RATE

RANGING

SET-UP

OUTPUT

CONTROL

SET-UP

NEXT

TRANSFER

POINTS
SET-UP

BACK

ROUGH TIME (SECS): XXX

TEST TIME (SECS): XXX

DN

AUTO SEQUENCER SET-UP

UP

NXT

ESC DONE

OK

OFF

Figure 2-10 Auto Sequencer Set-Up Screen

The auto sequencer pass or fail leak rate value is selected through the Reject Set Point
screen. The pass/fail criterion is based on the reject set point that is enabled (ON). If more
than one set point is enabled, then the pass/fail criterion is based on the most stringent reject
set point value.

A Pass condition is indicated by the system reverting to the VENT mode upon completion of
the test cycle. A Fail condition is indicated by the system reverting to the HOLD mode, and

all operating buttons being disabled except VENT. A failed condition also results in
REJECTED being displayed on the Home screen of the touch panel, and a reject set point
activation upon completion of the test cycle. The status of the reject set points are available
at the I/O port and upon inquiry through the RS-232 line (see Appendix B “Communications
Protocol”).

DRAFT 9/15/03

Upon the completion of an automated test cycle, the 979 captures the leak rate signal mea­sured just prior to the end of the automated test cycle. This leak rate is displayed on the front
panel and held at the analog output I/O port on the back of the leak detector until the next
test cycle is initiated. This allows the end user to record the actual leak rate value for each
test object.

2-17

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.6.3.1 Auto Sequencer Set-Up Controls

ROUGH TIME The ROUGH TIME variable determines the amount of time that the

leak detector is allowed to evacuate the test object to the tolerable
test transfer pressure. In AUTO SEQUENCER mode, the 979 trans­fers into test as soon as the tolerable transfer pressure is met. It does
not wait for the total rough time allotted if it is not required. If the
tolerable test transfer pressure is not achieved within the
pre-selected rough time, the system aborts the cycle and goes into
HOLD mode.

The ROUGH TIME value can be determined empirically and
should reflect the typical time required to rough your test object to
the tolerable test pressure. Failure to achieve the tolerable test pres­sure within the pre-selected rough time is an indication of a gross
leak in your test object or test fixturing or that time allowed was
insufficient.

TEST TIME The TEST TIME variable determines the amount of time that the

leak detector remains in test before it compares the measured leak
rate with the selected reject set point. Sufficient time must be
allowed for the leak rate reading to stabilize before the system
makes a pass/fail decision. This is a function of the part configura­tion and the leak rate specification. In AUTO SEQUENCER mode,
the 979 remains in test for the entire duration of the preselected test
time.

The ON/OFF box located to the right of the TEST TIME box provides the capability to enable
and disable the Auto Sequencer feature.

DRAFT 9/15/03

2-18

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.6.4 Rough Pump Set-Up

Touch the ROUGH PUMP SET-UP box to display the Rough Pump Set-Up screen
(Figure 2-11), which provides the end user with the ability to select the function of the dedi­cated rough pump on a dual pump system. The dual pump version of the 979 can be con­figured so that the dedicated rough pump is connected to the test port only during the
roughing cycle, or so that it is connected to the test port during the rough and test cycles.

CAL

LEAK

SET-UP

REJECT &

AUDIO SET

POINTS

AUTO

SEQUENCER

SET-UP

ROUGH

PUMP

SET-UP

LEAK RATE

RANGING

SET-UP

OUTPUT

CONTROL

SET-UP

NEXT

TRANSFER

POINTS
SET-UP

BACK

Figure 2-11 Rough Pump Set-Up Screen

2.6.4.1 Selecting Rough Only or Split Flow Mode

The first toggle box in the Rough Pump Set-Up screen is used to select the function of the
dedicated rough pump: ROUGH ONLY, SPLIT FLOW, and NOT INSTALLED.

ROUGH ONLY In ROUGH ONLY mode, the dedicated roughing pump pumps on

the test port only during the roughing phase of the test cycle. Once
the test object reaches the tolerable test transfer pressure, the
roughing valve closes and the dedicated rough pump is isolated
from the test object.

SPLIT FLOW In SPLIT FLOW mode, the dedicated rough pump continues to

pump on the test object after the tolerable test transfer pressure has
been achieved. Split flow testing provides additional pumping
capacity on the test object during the test cycle. Use this mode for
systems with potentially high gas load or net volumes greater than a
few liters. In SPLIT FLOW MODE a test port cap must be in place
(isolating the test port) while performing an autocalibration routine
to the optional internal calibrated leak.

ROUGH PUMP SET-UP

ROUGH ONLY
ROUGH PUMP SIZE 400 LPM
FORE PUMP SIZE 300 LPM

DONE

DRAFT 9/15/03

NOT INSTALLED Always select this mode for single mechanical pump systems.

To change the rough pump operation, the system must be in VENT mode and the front panel
key switch in the SET-UP or SERVICE position.

2-19

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.6.4.2 Inputting the Rough Pump and Forepump Sizes

The next two toggle boxes are used to select the ROUGH PUMP SIZE and the FORE PUMP
SIZE on dual mechanical pump systems.

❑ Touch the ROUGH PUMP SIZE box to select either 400 LPM or 600 LPM.

❑ Touch the FORE PUMP SIZE box to select 300 LPM or 600 LPM.

It is important to set these values correctly when the 979 is configured for split-flow testing.
This allows for direct readings of leak rate.

2.6.4.3 VENT LOCK Function

Turning the VENT LOCK function ON disables the VENT button. This ensures that a user
does not vent a system unintentionally. The function status remains unchanged after a
system power down. The VENT LOCK function is inactive when the AUTO SEQUENCER
feature is enabled.

❑ Touch the VENT LOCK box to toggle the status to ON or OFF.

❑ Touch DONE to return to the previous menu screen.

2.6.5 Leak Rate Ranging Set-Up

Touch the LEAK RATE RANGING SET-UP box to display the Leak Rate Ranging Set-Up
screen (Figure 2-12). From this screen, set up and enable the RANGE STOP and MANUAL
RANGE functions and select USE FINE TEST or GROSS TEST ONLY.

CAL

LEAK

SET-UP

DRAFT 9/15/03

REJECT &

AUDIO SET

POINTS

AUTO

SEQUENCER

SET-UP

ROUGH

PUMP

SET-UP

LEAK RATE

RANGING

SET-UP

OUTPUT

CONTROL

SET-UP

TRANSFER

Figure 2-12 Leak Rate Ranging Set-Up Screen

NEXT

POINTS
SET-UP

BACK

LEAK RATE RANGING SET-UP

RANGE

STOP

10-XX

OFF OFF

DN

UP

MANUAL

STOP

10-XX

NXT

VENT LOCK OFF

ESC

USE
FINE
TEST

OK

DONE

2-20

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.6.5.1 Range Stop and Manual Range Set-Up and Control

RANGE STOP The RANGE STOP feature configures the 979 so that it only

auto-ranges down to the pre-selected decade entered in the range
stop variable field. For example, if range stop was enabled and the
range stop setting was 10-07, then the most sensitive range that the
leak detector displays is full-scale 10

This feature is useful when a product specification is more
than one decade less stringent than the actual sensitivity of the
leak detector. If the leak detector is capable of displaying full
scale 10
the 10
10-08 atm cc/sec reduces the test cycle time by eliminating
the need for the leak detector to reach its most sensitive scale
during each test cycle.

To enable or disable RANGE STOP, touch the ON or OFF box
under the desired function.

MANUAL RANGE The MANUAL RANGE feature configures the 979 so that it only

displays the pre-selected decade entered in the manual range
variable field. For example, if the manual range feature was
enabled and the manual range variable was set to 10-06, then the
leak rate decade displayed on the LED bar graph during testing will
be the 10-06 atm cc/sec range only. This feature is useful when the
test operator is only concerned with monitoring the leak rate mea­surement within a single decade.

−9

atm cc/sec but the test specification is only in

−7

atm cc/sec range, then setting the range stop to

−7

atm cc/sec.

To enable or disable MANUAL RANGE, touch the ON or OFF box
under the desired function.

DRAFT 9/15/03

2-21

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.6.5.2 Selecting Fine Test or Gross Test Only Mode

Touch the USE FINE TEST (GROSS TEST ONLY) box to toggle the leak detector between a
fine test (normal) operating mode and a gross leak test only mode.

FINE TEST MODE When USE FINE TEST (normal operating mode) is displayed, the

leak detector automatically tests for gross leaks and then transfers
into fine test if no gross leaks are detected.

GROSS TEST ONLY When GROSS TEST ONLY is displayed (this feature is only avail-

able on dual mechanical pump configurations), the leak detector
does not transfer into FINE TEST mode. This feature is useful for
qualifying parts that have an unusually high rate of gross leak fail­ures prior to fine leak testing.

2.6.5.3 System Sensitivity

Table 2-5 and Table 2-6 show sensitivity matrixes for performing Fine and Gross tests using
standard and high sensitivity configurations.

High Sensitivity
System

Standard Sensitivity
System

DRAFT 9/15/03

The High Sensitivity 979 system can achieve 10
(5E-11 MDL) sensitivity. This sensitivity can be achieved at a
transfer pressure of 100 mTorr. High ambient helium background
conditions may prevent 10
high pressures. The maximum detectable leak capability in the
CONTRA-FLOW mode for single rough/forepump configurations

−5

is 9.9 x 10

atmc/sec (full-scale reading on 10−5 range).

The Standard Sensitivity 979 System can achieve 10
(5E-10 MDL) sensitivity. This sensitivity can be achieved at a
transfer pressure of 100 mTorr. High ambient helium background
conditions may prevent 10
high pressures. The maximum detectable leak capability in the
CONTRA-FLOW mode for single rough/forepump configurations

−4

is 9.9 x 10

atm cc/sec (full-scale reading on 10−4range).

−10

atm cc/sec

−10

atm cc/sec testing at relatively

−9

−9

atm cc/sec testing at relatively

atm cc/sec

2-22

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Table 2-5 979 Standard Sensitivity Leak Detector

Test

Fine Gross (2 Pump)

Range –9 –8 –7 –6 –5 –4 –3 –2 –1

Valve Path MS* MS MS/CF MS/CF CF** CF/GL GL*** GL GL

Transfer Pressure

100 mTorr 100 mTorr

100 mTorr /

5Torr

100 mTorr /

5Torr

5 Torr 5 Torr atm atm atm

*MS – MIDSTAGE
**CF – CONTRA-FLOW
***GL – GROSS LEAK

Table 2-6 979 High Sensitivity Leak Detector

T est

Fine Gross (2 Pump)

Range –10 –9 –8 –7 –6 –5 –4 –3 –2

Valve Path MS

Transfer Pressure
1 Pump

4

Transfer Pressure
2 Pump

4

100 mTorr 100 mTorr

100 mTorr 100 mTorr

1

MS MS/CF MS/CF CF

100 mTorr

/ 5 Torr

100 mTorr

/ 2 Torr

100 mTorr

/ 5 Torr

100 mTorr

/ 2 Torr

2

CF/GL CF/GL GL

3

GL

5 Torr 5 Torr

2 Torr 2 Torr / atm atm atm atm

DRAFT 9/15/03

1

MS – MIDSTAGE

2

CF – CONTRA-FLOW

3

GL – GROSS LEAK

4

Contra-flow tranfers settings are as follows:

❑ Single pump systems (no gross test): 5 Torr max.
❑ Two pumps (has gross test): 2 Torr max.

2-23

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.6.6 Output Control Set-Up

Touch the OUTPUT CONTROL SET-UP box to display the Output Control Set-Up screen
(Figure 2-13). From this screen, select the desired leak rate output, BARGRAPH DISPLAY
mode, and the RS-232 communication protocol.

CAL

LEAK

SET-UP

REJECT &

AUDIO SET

POINTS

AUTO

SEQUENCER

SET-UP

ROUGH

PUMP

SET-UP

LEAK RATE

RANGING

SET-UP

OUTPUT

CONTROL

SET-UP

NEXT

TRANSFER

POINTS
SET-UP

BACK

Figure 2-13 Output Control Set-Up Screen

2.6.6.1 Leak Rate Analog Output Voltage Selection

Touch the Output toggle box located at the top left of Output Control Set-Up screen to
switch the output voltage at the I/O port on the back of the leak detector between
1V/DEC LOG OUTPUT and LINEAR ANALOG OUTPUT.

1V/DEC LOG

The output voltage conversion chart is displayed in Figure 2-14.

OUTPUT

LINEAR ANALOG

The output voltage conversion chart is displayed in Figure 2-15.

OUTPUT

OUTPUT CONT RO L SE T-UP

IV/DEC

LOG

OUTPUT

9600

BAUD

LINEAR

BARGRAPH

DISPLAY

SERIAL PORT

1 STOP

BIT

DONE

NO

PRTY

2.6.6.2 Bargraph Display Set-Up

DRAFT 9/15/03

Touch the Bargraph Display toggle box to switch the bar graph display between
LOG BARGRAPH DISPLAY mode and LINEAR BARGRAPH DISPLAY mode.

LOG BARGRAPH
DISPLAY

LINEAR BARGRAPH
DISPLAY

In the LOG BARGRAPH DISPLAY mode, the 50-segment bar graph
display represents the entire leak rate range of the leak detector,

−11

spanning from 10

atm cc/sec to 100 atm cc/sec. The numerical
display, located to the upper right of the bar graph, is not lit in this
mode.

In the LINEAR BARGRAPH DISPLAY mode, the 50-segment bar
graph display represents the mantissa value of the leak rate, span­ning from 0 to 10. The numerical display, located to the upper right
of the bar graph, indicates the leak rate exponent value. This mode
offers exceptional resolution within a decade.

2-24

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Figure 2-14 Leak Detector Logarithmic Output Voltage

DRAFT 9/15/03

Figure 2-15 Leak Detector Linear Output Voltage

2-25

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.6.6.3 Serial Communications Protocol Set-Up

The Output Control Set-Up screen also allows for the selection of RS-232 communication
parameters, BAUD RATE, STOP BITS, and PARITY (see Appendix B “Communications
Protocol”).

2.6.7 Transfer Pressure Set- Up

Touch the TRANSFER POINTS SET-UP selection box to display the Transfer Pressure Set-Up
screen (Figure 2-16). From this screen set the test transfer pressures for each testing mode.
The factory default settings are shown in Figure 2-16.

CAL

LEAK

SET-UP

REJECT &

AUDIO SET

POINTS

AUTO

SEQUENCER

SET-UP

ROUGH

PUMP

SET-UP

LEAK RATE

RANGING

SET-UP

OUTPUT

OUTPUT

CONTROL

CONTROL

SET-UP

SET-UP

TRANSFER

Figure 2-16 Transfer Pressure Set-Up Screen

The transfer pressure settings may be adjusted to lower values for specific applications. The
979 has pre-programmed upper transfer pressure limits that are slightly greater than the
default settings. These limits prevent the operator from inadvertently setting the 979 to trans­fer into test at too high a pressure, resulting in excessive spectrometer tube contamination or
ion source filament failure. Touch DONE to return to the previous menu.

If you make changes to the settings, touch OK to load the new values into memory and then

DRAFT 9/15/03

touch DONE to return to the previous menu.

Touching the ESC box before touching OK or DONE causes the selected parameter to revert
to its previously stored value.

NEXT

POINTS
SET-UP

BACK

TRANSFER PRESSURE SET-UP

GROSS LEAK XFER: 7.5E+2
CONTRAFLOW LEAK XFER 5.0E-0

DN

UP

NXT

ESC DONE

OK

2-26

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

GROSS LEAK XFER The GROSS LEAK XFER set point determines the test pressure cross

over point at which the 979 transfers into the GROSS LEAK TEST
mode from Roughing mode. In the GROSS LEAK TEST mode, the
majority of the sampled gas is pumped away through the dedicated
roughing pump while a small sample of gas is introduced into the
leak detector through a throttle valve. Gross leak testing is a stan­dard feature available on dual mechanical pump configurations
only.

CONTRA-FLOW LEAK
XFER

2.6.8 NEXT and BACK Boxes

Touch the NEXT box on the First Menu screen to display the Second Menu selection screen.
The operations of the Second Menu screen are discussed in Section 2.7 “Second Menu
Selection Screen”. Touch the BACK box to return to the Home screen.

The CONTRA-FLOW LEAK XFER set point determines the test
pressure cross over point at which the 979 transfers into the
CONTRA-FLOW LEAK test mode from Roughing mode or
Gross Leak Test mode. In the CONTRA-FLOW LEAK test mode, the
gas sample is pumped through the leak detector and swept across
the high vacuum pump foreline. The CONTRA-FLOW LEAK test
mode allows for relatively high sensitivity testing at exceptionally
high test pressures.

2-27

DRAFT 9/15/03

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

2.7 Second Menu Selection Screen

The Second Menu screen (Figure 2-17) displays the screens available for performing general
set-up and service functions. Touch the BACK box from this screen to display the First Menu
screen. Touch the NEXT box to display the Home screen. UNITS SET-UP is described in this
section. The VERSION and SERVICE menus are discussed in Section 3 “Service”. These
menus include procedures that are generally performed outside of day-to-day operations.

CAL

LEAK

SET-UP

REJECT &

AUDIO SET

POINTS

AUTO

SEQUENCER

SET-UP

ROUGH

PUMP

SET-UP

LEAK RATE

RANGING

SET-UP

OUTPUT

CONTROL

SET-UP

TRANSFER

Figure 2-17 Second Menu Screen

2.7.1 Units Set-Up

Touch the UNITS SET-UP box to display the Units Set-Up screen (Figure 2-18).

UNITS

SET-UP

SERVICE

MENUS

VERSION

DRAFT 9/15/03

NEXT

POINTS
SET-UP

BACK

NEXT

BACK

UNITS

SET-UP

SERVICE

MENUS

UNITS SET-UP

LEAK RATE PRESSURE

USE

atm-cc/sec

NEXT

VERSION

BACK

USE

Torr

DONE

Figure 2-18 Units Set-Up Screen

2.7.1.1 Leak Rate and Test Port Pressure Units Selection

Select the leak rate and test port pressure units to be displayed on the leak rate bar graph
and the digital touch screen display.

LEAK RATE UNITS Touch the LEAK RATE units toggle box to switch the leak rate units

between atm-cc/sec, mbar-l/sec, Torr-l/sec, and Pa-m

PRESSURE UNITS Touch the PRESSURE units toggle box to switch the test port pres-

sure units between Torr, mbar, and Pa.

2-28

3

/sec.

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Section 3. Service

This section discusses the VERSION and SERVICE menus, which are accessed from the
Second Menu screen (Figure 3-1). These menus provide access to information and proce­dures that are generally outside of day-to-day operations. Most of these functions should be
performed by trained service personnel as they significantly affect the performance of the
Model 979.

Touch the BACK box from this screen to display the First Menu screen. Touch the NEXT box
to display the Home screen.

3.1 Version

The VERSION screen (Figure 3-2) provides system software revision information.

UNITS

SET-UP

SERVICE

MENUS

UNITS

SET-UP

SERVICE

MENUS

NEXT

VERSION

BACK

Figure 3-1 Second Menu Screen

NEXT

AAXX.XX

VERSION

AAXX.XX

VERSION

DRAFT 9/15/03

XXXXXX

XXXXXX

BACK

1-800-882-7426

Figure 3-2 Version Screen

3-1

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Touch the VERSION box to display the revision and checksum of the main CPU and the
front panel CPU software. Inquiry of the checksum information takes several seconds.

Approximately 15 seconds after the revision data is displayed in full, the VERSION screen
automatically reverts to the Second Menu screen.

CAUTION The controls available through the Service Menu screens

significantly affect the perfor mance of the 979 and must only be
accessed by trained service personnel.

CAUTION Many of the values for the parameters included in the Service

Menus are calculated when the 979 p er forms f unct ions such as
CALIBRATE and ZERO. Changing these values can cause
unreliable test results.

Touch the SERVICE MENUS box to display the Service Menu screen (Figure 3-3). This
screen shows the functions that may be performed as part of a troubleshooting or
maintenance routine. To return to the Second Menu screen, touch the BACK box from the
Service Menu screen. Values and options are changed in the same manner as the First Menu
screens. For review, see Section 2.3.2 “Changing Variables in Touch Panel Screens” on
page 2-6 and Section 2.3.3 “Selecting Options in Touch Panel Screens” on page 2-7.

UNITS

SET-UP

SERVICE

MENUS

VERSION

DRAFT 9/15/03

Figure 3-3 Service Menu Screen

NEXT

BACK

MANUAL

ZEROING &

CALIBRATE

MANUAL

SPEC TUBE

TUNING

MANUAL

VALVE

CONTROL

SYSTEM

INIT

SET-UP

GAUGE

CAL

BACK

3-2

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3.1.1 Manual Zeroing and Calibrate

Touch the MANUAL ZEROING and CALIBRATE box to display the Manual Zeroing and Cal
screen (Figure 3-4), which provides control over the leak detector AUTO-ZERO < 0 feature
and allows for viewing and adjusting the spectrometer tube Gain.

MANUAL
ZEROING &
CALIBRATE

MANUAL
SPEC TUBE

TUNING

MANUAL

VALVE

CONTROL

SYSTEM

INIT

SET-UP

3.1.1.1 AUTO-ZERO < 0

Touch the AUTO-ZERO < 0 toggle box to switch the Auto Zero < 0 feature between Active
and Inactive. The display in the touch screen box indicates the current setting.

ACTIVE AUTO-ZERO < 0, when activated, automatically adjusts the zero

MANUAL ZEROING AND CAL

AUTO-ZERO <0 ACTIVE
GAIN: X.X

GAUGE

CAL

BACK

OFFSET: XX

DN

UP

NXT

Figure 3-4 Manual Zeroing and Cal Screen

reference point back up to zero when the helium background level
drops below the previously set zero reference point. This feature
ensures that the leak detector maintains calibration after a previ­ously zeroed background signal naturally cleans up.

ESC DONE

When the AUTO-ZERO < 0 feature is in the process of re-adjusting the zero reference point,
the UNDER light indicator located on the left end of the bar graph illuminates. This light
indicates that the measured helium leak rate is currently less than the minimum displayable
value. The light may flash briefly as the system recovers from a leak indication and the dis­playable leak rate approaches zero. If the AUTO-ZERO < 0 is turned on, the UNDER light
may also flash briefly as the system resets the zero point to a lower value. The 979 does not
display a leak rate while the UNDER light is on. If this light stays on for more than a few sec­onds, recalibrate the system to set operating parameters to the correct zero value. This situa­tion can take place if the 979 had not been fully warmed up before a previous calibration
was initiated.

INACTIVE When AUTO-ZERO < 0 is inactive, the leak detector does not

automatically adjust the zero reference point back up to zero
when the helium background level drops below the previously set
zero reference point. When this occurs, the UNDER light remains
lit, indicating that the background level is below the previously set
zero reference point. Press the ZERO button on the front panel to
readjust the zero reference point manually. This clears the UNDER
light indication.

DRAFT 9/15/03

3-3

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3.1.1.2 Gain

Touch the GAIN box to manually adjust the calibration gain. The gain parameter is used to
calibrate the leak detector to a known helium source. The gain parameter is adjusted after
the leak detector has been tuned to helium.

Typical gain values range from 0.5 to 5.0. The gain value is automatically set during the
Calibration routine. The higher the gain, the more noise shows up in the least sensitive
range.

3.1.1.3 Offset

The variable displayed in the OFFSET box represents the current value of the preamplifier
offset. This value is used by the service technician to evaluate the condition of the preampli­fier. The normal operating range is between 35 and 80. If this value is outside of the range,
contact your local Vacuum Technologies service representative.

3.1.2 Manual Spectube Tuning

Touch the MANUAL SPECTUBE TUNING box to display the Manual Spectube Tuning
screen (Figure 3-5). This screen is used to manually adjust the parameters of the Ion Source
in the spectrometer tube for a maximum helium signal.

MANUAL

ZEROING &

CALIBRATE

MANUAL

SPEC TUBE

TUNING

MANUAL

VALVE

CONTROL

SYSTEM

INIT

SET-UP

DRAFT 9/15/03

Figure 3-5 Manual Spectube Tuning Screen

GAUGE

CAL

BACK

MANUAL SPECTUBE TUNING

REPELLER V: XXX.X
EMISSION I: X.XXX
ION V: XXX.X

VAR FOCUS: XXX.X

SUPRESSOR: XXX.X
FIXED FOCUS: XXX.X

FIL

1

ACTV

ESC DONE

UP

OK

DN

3-4

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3.1.2.1 Changing Manual Tuning Parameters

To change a manual tuning parameter:

1. Touch the box for the desired parameter.

When you touch the box containing the desired variable, a highlighted indicator
appears to the right of the numbers.

2. Touch the UP or DN arrow to change the parameter value.

NOTE Do not touch the ESC box before touching the OK box. This

causes the selected parameter to revert to its previously stored
value.

3. Touch the OK box to accept the changes and to store the new parameter value in the

leak detector memory.

4. Touch DONE to exit the screen and return to the previous menu screen.

3.1.2.2 Repeller

The REPELLER (Voltage) box displays the current Repeller Voltage value of the Ion Source in
the spectrometer tube and allows for manual adjustment of this parameter. The repeller volt­age parameter is used to tune the leak detector, maximizing the leak detector output for a
peak helium signal. The repeller voltage parameter is adjusted before the leak detector is

calibrated to helium. This parameter is not adjusted automatically during the Calibration

routine.

Typical Repeller Voltage values range from 320 VDC to 360 VDC.

3.1.2.3 Emission Current

The EMISSION adjustment box displays the value of the existing Emission current of the Ion
Source in the spectrometer tube and allows for the adjustment of this parameter. The emis­sion current parameter is used to tune the leak detector, maximizing the leak detector out­put for a peak helium signal. The emission current parameter is adjusted before the leak
detector is calibrated to helium. This parameter is not adjusted automatically during the Cal­ibration routine.

Typical Emission current values range from .7 mA to 1.4 mA.

NOTE To obtain a maximum Helium peak signal, adjust emissi on

DRAFT 9/15/03

current during a manual tune.

3-5

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3.1.2.4 Ion Voltage

Touch the ION VOLTAGE box to display the current ion voltage value of the Ion Source in
the spectrometer tube. This value can also be manually adjusted. The ion voltage parameter
is used to tune the leak detector, maximizing the leak detector output for a peak helium sig­nal. The ion voltage parameter is adjusted before the leak detector is calibrated to helium.

Typical ion voltage values range from 230 VDC to 270 VDC. The ion voltage value is auto­matically adjusted and set during the Calibration routine.

3.1.2.5 Variable Focus Voltage

The VAR FOCUS Voltage adjustment box displays the current Variable Focus Voltage value
of the ion source in the spectrometer tube and allows for the adjustment of this parameter.
The variable focus voltage parameter is used to tune the leak detector, maximizing the leak
detector output for a peak helium signal. The variable focus voltage parameter is adjusted
before the leak detector is calibrated to helium.

Typical Variable Focus Voltage values range from 180 VDC to 200 VDC.

3.1.2.6 Suppressor Voltage

The SUPPRESSOR indicator displays the current Suppressor Voltage value in the
preamplifier in the spectrometer tube. The suppressor voltage parameter is not variable.
This parameter cannot be changed by the operator.

3.1.2.7 Fixed Focus Volt age

The FIXED FOCUS Voltage indicator displays the current Fixed Focus Voltage value of the
ion source in the spectrometer tube. The fixed focus voltage parameter is not variable and
cannot be changed by the operator.

DRAFT 9/15/03

3.1.2.8 Filament Selection

The Filament Selection box switches between FIL 1 ACTIVE and FIL 2 ACTIVE. The filament
selection can be performed manually, or it will occur automatically in the event that the
current operating filament burns out. Execute a calibration routine each time the operating
filament is changed.

FILAMENT
SELECTION

In the event that the current operating filament burns out, the 979
automatically switches over to the next available filament. The
change is indicated on the touch screen display and the leak rate
exponent display flashes a C, indicating that calibration is required.

3-6

NOTE We recommended that you replace the ion source as soon as it

is convenient after the sp are f ilament has been p ut into use. Se e
Section 4.4 “Ion Source Replacement Outside of Annual
Maintenance” on page 4-20.

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3.1.3 Manual Valve Control

Touch the MANUAL VALVE CONTROL box to display the Manual Valve Control screen
(Figure 3-6), which provides manual control of the valves in the 979 vacuum system for
troubleshooting purposes. See Figure 3-7 on page 3-8 for an illustration of the 979 Vacuum
System.

CAUTION Manipulation of the valves through the Manual Valve Control

screen should only be done by persons who are extremely
familiar with the 979 Series leak detector as damage to critical
components (e.g., spectrometer tube) could occur.

MANUAL
ZEROING &
CALIBRATE

MANUAL
SPEC TUBE

TUNING

MANUAL

VALVE

CONTROL

SYSTEM

INIT

SET-UP

GAUGE

CAL

BACK

OPEN VENT VALVE
CLOSE CONTRAFLOW VALVE
CLOSE TEST PORT VALVE
CLOSE FORELINE VALVE
CLOSE MIDSTAGE VALVE
OPEN STD LEAK VALVE

MANUAL VALVE CONTROL

CLOSED
OPENED
OPENED
OPENED
OPENED
CLOSED

DONE

Figure 3-6 Manual Valve Control Screen

To change the state of a specific valve, touch the box corresponding to that valve. The
valve changes state and the box changes from OPEN to CLOSE. Touch DONE to return to
the maintenance menu screen. The valve state displayed to the right of each valve control
box represents the current state of the corresponding valve. The normal operating states of
valves for single mechanical and dual pump systems are provided in Table 3-1 and
Table 3-2 on page 3-8, respectively.

Table 3-1 979 Valve State Table - Single Mechanical Pump System

979 Operating State V1 V2 V4 V5 V6 V7

DRAFT 9/15/03

VENT O* C** C O C C
ROUGH COCCOC
CONTRA-FLOW COCOOC
MIDSTAGE CCOOOC
SNIFF MODE COCOOC

*O – Open **C – Closed

3-7

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Table 3-2 979 Valve State Table - Dual Mechanical Pump System

979 Operating State V1 V2 V4 V5 V6 V7 V8

VENT O*C**COCCC
ROUGH COCCCCC
GROSS TEST COCOCCO
CONTRA-FLOW COCOOCC
MIDSTAGE CCOOOCC
SNIFF MODE COCOOCC

*O – Open **C – Closed

GROSS LEAK

OPTION

NEEDLE VALVE

V8 GROSS

LEAK VALVE

V7 (3 WAY)

DRAFT 9/15/03

CAL LEAK

Figure 3-7 979 Vacuum System Diagram

TEST
PORT

V6 TESTPORT

V2

P

FORE
PUMP

V1 VENT

TEST PORT

TC

V4 MIDSTAGE

V5 FORELINE

GROSS LEAK OPTION

P

ROUGH

VALVE

ROUGH

PUMP

SYSTEM

TC

TURBO

PUMP

SPEC
TUBE

3-8

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3.1.4 System Initialize Set-Up

Touch the SYSTEM INIT SET-UP box to display the System Initialize Set-Up screen
(Figure 3-8), which allows for the front panel push buttons to be enabled or disabled, and
displays the current status of the buttons.

MANUAL
ZEROING &
CALIBRATE

MANUAL
SPEC TUBE

TUNING

MANUAL

VALVE

CONTROL

SYSTEM

INIT

SET-UP

GAUGE

CAL

BACK

Figure 3-8 System Initialize Set-Up Screen

The CTRL PNL ENABLED toggle box switches between enabling and disabling the front
panel push buttons. Touch the CTRL PNL ENABLED box to disable the front panel push but­tons. Touch the box a second time to enable the push buttons. Touch DONE to exit the cur­rent screen and return to the previous menu.

3.1.5 Gaug e Calibration Procedures

Touch the GAUGE CAL box to display the Gauge Calibration screen (Figure 3-9), which
provides the ability to perform a calibration on either the system pressure thermocouple
(button TC) or the test port thermocouple gauge.

SYSTEM INITIALIZE SET-UP

CTRL PNL ENABLED

DONE

MANUAL
ZEROING &
CALIBRATE

MANUAL
SPEC TUBE

TUNING

NOTE The calibration of the test port thermocouple (TC) gauge is

factory set and requires the use of a reference TC and a PC.

MANUAL

VALVE

CONTROL

SYSTEM

INIT

SET-UP

GAUGE

CAL

BACK

SYSTEM TC ZERO
SYSTEM TC ATM
TEST PORT TC ZERO
TEST PORT TC ATM
SYSTEM P IS: X.XXE-X

TEST PORT P IS: X.XXE-X

GAUGE CALIBRATION

DONE

Figure 3-9 Gauge Calibration Screen

DRAFT 9/15/03

3-9

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3.1.5.1 System Pressure Gauge Calibration Procedure

This procedure allows for calibration of the system pressure thermocouple gauge. Both the
Vacuum and Atmospheric Calibrations procedures must be performed in the order written.g

3.1.5.1.1 Vacuum (Low Pressure) Calibration

1. Verify that the leak detector is in the SYSTEM READY condition on the Home Screen
(Figure 3-10) and that a test port cap is in place.

979

LEAK RATE: X.XXE-XX atm-cc/sec

T.P. PRESSURE: X.XE-XX Torr

REJECT# 2,4

SYSTEM READY

Figure 3-10 979 Touch Panel Home Screen

2. Place the service key (T009) into the key switch and set the key switch to the SERVICE
position (see Figure 1-8 on page 1-12).

3. If the system is not already in VENT mode, press the VENT button.

4. Press the TEST button and verify that the leak detector transfers to FINE TEST mode,

−9

displaying 10

atm cc/sec or lower.

5. Wait approximately five minutes for the vacuum system pressure to stabilize.

6. Move to the GAUGE CALIBRATION screen (Figure 3-9 on page 3-9) if you are not
already there.

DRAFT 9/15/03

7. Touch the SYSTEM TC ZERO box.

❑ A CAL OK indication, to the right of the SYSTEM TC ZERO box, confirms that the

calibration was successful.

❑ A FAILED message indicates that the calibration was not successful. This could be

the result of a defective or contaminated thermocouple gauge, or that the actual
pressure was substantially greater than 1 mTorr.

SYS INFO

MENUS

3-10

8. Touch DONE to leave the screen and return to the previous menu.

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3.1.5.1.2 Atmospheric Calibration

Calibration of the system pressure thermocouple (TC) gauge to atmosphere is only required
if the system TC gauge tube is replaced or if calibration appears to be off.

1. Upon replacement of the system TC, unplug the mechanical pump(s) from the back of

the 979 before powering up the leak detector.

2. Turn the power ON to the 979 and go to the Gauge Calibration touch screen menu.

3. Place the service key (T009) into the key switch and set the key switch to the SERVICE

position.

4. Touch the SYSTEM TC ATM box.

❑ A CAL OK indication to the right of the SYSTEM TC ATM box confirms that the

calibration was successful.

❑ A FAILED message indicates that the calibration was not successful. This could be

the result of a defective or contaminated thermocouple gauge, or that the actual
pressure was not at or near atmosphere.

5. Power down the leak detector.

6. Plug the mechanical pumps into the appropriate receptacles and turn the power

back on.

3.1.5.2 Test Port Pressure Gauge Calibration Procedure

This procedure allows for calibration of the test port pressure thermocouple gauge. Both the
Vacuum and Atmospheric Calibrations procedures must be performed in the order written.
The vacuum calibration is factory set. Do not change this setting unless you have the appro­priate equipment.

NOTE The calibration of the test port thermocouple (TC) gauge is

factory set and requires the use of a reference TC and a PC.

DRAFT 9/15/03

3-11

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3.1.5.2.1 Vacuum (Low Pressure) Calibration

1. Verify that the leak detector is in the SYSTEM READY condition (Figure 3-10 on
page 3-10) and that a test port cap is in place.

2. Place the service key (T009) into the key switch and set the key switch to the SERVICE
position.

3. If the system is not already in VENT mode, press the VENT button.

4. Press the TEST button and verify that the leak detector transfers to FINE TEST mode,
displaying 10

5. Wait approximately 15 minutes for the vacuum system pressure to stabilize.

6. Touch the TEST PORT TC ZERO box.

❑ A CAL OK indicator, to the right of the TEST PORT TC ZERO box confirms that the

calibration was successful.

❑ A FAILED message indicates that the calibration was not successful.

A FAILED message can result from a defective or contaminated thermocouple gauge,
or the fact that the actual pressure was not at or near zero.

7. Touch the DONE button to leave the screen and return to the previous menu.

3.1.5.2.2 Atmospheric Calibration

1. Place the service key (T009) into the key switch and set the key switch to the SERVICE
position.

2. If the system is not already in VENT mode, press the VENT button.

3. Wait approximately ten seconds for the test port pressure to stabilize. Move to the
Gauge Calibration screen (Figure 3-9 on page 3-9).

−9

atm cc/sec or lower.

DRAFT 9/15/03

3-12

4. Touch the TEST PORT TC ATM box.

❑ A CAL OK indication, to the right of the TEST PORT TC ATM box, confirms that the

calibration was successful.

❑ A FAILED message indicates that the calibration was not successful. This could be

the result of a defective or contaminated thermocouple gauge, or that the actual
pressure was not at or near atmosphere.

5. Touch DONE to leave the screen and return to the previous menu.

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Section 4. Maintenance

Like other sensitive test equipment, a mass spectrometer leak detector requires periodic
maintenance to ensure continued reliable operation. After prolonged use, the leak detector
accumulates contaminants from even the cleanest of products tested. These contaminants
eventually impair operation. A thorough disassembly and cleaning of the entire vacuum
system, which includes the valve block and spectrometer tube, restores normal operation.
For heavy production use, more frequent overhauls may be needed. Conversely, lighter use
may permit a longer period between overhauls. In most cases, this work is done by user
maintenance personnel, but it may also be done by Vacuum Technologies under the terms
of a service contract.

This maintenance section does not cover overhaul of the entire vacuum system. It does
cover maintenance that may have to be performed on a daily or as-required basis or, if the
item has not required maintenance, on an annual preventive basis.

If your 979 leak detector requires service that is not covered in this section, contact Vacuum
Technologies Customer Service at 1-800-8VARIAN.

Important Reminders

In addition to the safety notes at the beginning of this manual, heed the following notes,
cautions, and warnings when performing maintenance.

WARNING Disconnect power from the 979 before performing any

maintenance procedure that requires physically disconnecting
any part of the system.

Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are
some techniques more important in leak detector servicing than in general vacuum work:

CAUTION Do not use silicone oil or silicone grease.

Use powder- free butyl o r polycarbonate gl o ves to prevent skin
oils from getting on vacuum surfaces.

®

Do not clean any aluminum parts with Alconox
not compatible with aluminum and will cause damage.

NOTE Normally, it is unnecessary to use vacuum grease. However, if

it must be used, avoid silicone types, and use it sparingly.

®

Apiezon
No. 695400004).

L grease is recommended (Vacuum Technologies Part

. Alconox is

DRAFT 9/15/03

4-1

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

When removing, checking or replacing O-rings:

CAUTION Remove O-rings carefully with your fingers. Do not use metal

tools for this task. This prevents scratching of any sealing
surfaces.

Wipe all O-rings clean with a lint-free cloth before installation
to ensure that no foreign matter is present to impair the seal.

Do not use grease or ot her substance on O-rings that will come
in contact with the spectrometer tube.

Do not use alcohol, methanol or other solvents on O-rings. To
do so causes deterioration and reduces their ability to hold a
vacuum.

NOTE If applicable, apply a small amount of Apiezon L grease and

wipe the O-rings “shiny” dry.

NOTE Due to the effect ive cleaning nature of VacuSolv solvent and its

DRAFT 9/15/03

residue-free properties, Vacuum Technologies’ Component and
Spectrometer Tube Cleaning Kit (Part Number 670029096),
used in accordance with the kit instructions, is recommended
for cleaning the spectrometer tube components. The kit can
also be used for fine cleaning of other parts in the leak
detect or’s v acuum system suc h as valves and fittings. No rinsing
steps or high-temperature drying is required following cleaning
with VacuSolv. Although ap propriate precautions are advised,
VacuSolv is compatible with most materials and does not
contain toxic chemicals or CFCs (chlorofluorocarbons).

4-2

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

For simplicity, the maintenance functions in this section are grouped by recommended
frequency, as shown in Table 4-1, based on assumed everyday use.

Table 4-1 Scheduled Maintenance

Description Daily 12 Months Refer to

Calibration check

Recalibrate the
internal calibrated leak

Spectrometer tube overhaul

X

X

X

These functions can be carried out at routine intervals, as indicated. The 979 must be cali­brated to verify sensitivity at least once a day. However, other functions may be carried out
either more or less often, depending on the frequency of use.

Maintenance functions that may be required on a demand basis, such as changing an Ion
Source after filament failure, are listed in Table 4-2.

Table 4-2 As-Required Maintenance

Function Most Common Symptom Refer to

Spectrometer tube cleaning Loss of sensitivity, increase in

background, high ion voltage
(> 300 VDC), required to tune the leak
detector.

Section 4.1 “Daily Maintenance” on
page 4-4

Section 4.2 “Recalibrate the Internal
Calibrated Leak” on page 4-4

Section 4.3 “Spectrometer Tube
Overhaul” on page 4-4

Section 4.3 “Spectrometer
Tube Overhaul” on page 4-4

Ion source replacement Filament failure (as soon as convenient

after second filament is in use).

Tuning adjustments Use of a calibrated leak in the field other

than the one tested at the factory, or if
calibration is not successful.

Mechanical Pump
Fluid Change

Mechanical Pump Tip Seal
Replacement

Persistent, high helium background
signal. Fluid contamination (dirty brown
color indicates burnt or contaminated
fluid, milky white consistency indicates
high water vapor content in fluid).

Pump base pressure has risen to an
unacceptable high level for the particular
application.

Section 4.4 “Ion Source
Replacement Outside of
Annual Maintenance” on
page 4-20

Section 3.1.2 “Manual
Spectube Tuning” on page 3-4

Section 4.5 “Mechanical Pump”
on page 4-22

Section 4.5 “Mechanical Pump”
on page 4-22

4-3

DRAFT 9/15/03

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

4.1 Daily Maintenance

4.1.1 Sensitivity Check

1. Press the READ STANDARD LEAK button.

2. Compare the value displayed on the HOME screen (Section 2.4 “979 Touch Panel
Home Screen” on page 2-8) to the value of the known calibrated leak displayed on the
SYSTEM INFORMATION screen (Section 2.5 “979 System Information Screen” on
page 2-12) or in the CALIBRATED LEAK Set-Up screen (Figure 2-6 on page 2-12).

3. If the values do not match, press the CALIBRATE button to perform an automated
calibration and then repeat step 1. If specification is still not met, Manual Tuning may
be required. See Section 3.1.2 “Manual Spectube Tuning” on page 3-4.

4.2 Recalibrate the Internal Calibrated Leak

Helium calibrated leaks typically degrade at 3 percent per year. The calibrated leak sup­plied with your 979 must be checked at least once a year to ensure it is at the value stated
on its tag. Failure to check the leak could result in unreliable testing. You can arrange for
testing and re-calibration at a lab of your choice.

Vacuum Technologies provides NIST-traceable calibrated leak testing and verification ser­vices. You can contact Customer Service at 1-800-8VARIAN to arrange for recalibration.

4.3 Spectrometer Tube Overhaul

Spectrometer tube overhaul consists of removing, cleaning, and re-installing the 979 Spec­trometer Tube. There are four basic sub-assemblies in the spectrometer tube. Table 4-3 lists
the tools and parts required during overhaul. Removal instructions follow in the order

DRAFT 9/15/03

below.

❑ Thermocouple Button (TC)

❑ Ion Source

❑ Preamplifier

❑ Magnetic Assembly

4-4

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

Table 4-3 Tools and Parts Required for Spectrometer Tube Overhaul

Tools
Screwdrivers Slotted and Phillips
Gloves Butyl or polycarbonate, powder-free
Parts
Part Number Description
82850302 Ion Source
R1266301 Button TC
670029096 Vacuum Technologies Spectrometer Tube Cleaning Kit

O-rings (Parker 2-025 V747-75 Black) – (supplied with Ion Source, Button TC and
Preamplifier)

CAUTION Use powder- free butyl o r polycarbonate gl o ves to prevent skin

oils from getting on vacuum surfaces.

4.3.1 Removing the Spectrometer Tube Assembly

WARNING Disconnect power from the 979 before performing any

maintenance procedure that requires physically disconnecting
any part of the system.

The spectrometer tube operates at a very high vacuum produced by the high vacuum pump.
Service of the spectrometer tube requires that this vacuum be vented to the atmosphere.
Perform this procedure every twelve months, or sooner if required. Access to the spectrom­eter tube is gained by removing the 2 Phillips screws from the front panel and dropping the
top of the front panel down.

NOTE Rebuilt spectromete r tubes are available from Vacuum

Technologies on an exchange basis. Contact the Vacuum
Technologies Service Center (1-800-8VARIAN) for details.

DRAFT 9/15/03

4-5

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

1. Remove the 2 Phillips screws from the Model 979 front panel (Figure 4-1).

2

1

1

2. Lean the top of the front panel forward to allow access to the spectrometer tube

DRAFT 9/15/03

assembly. Be careful not to place tension on the front panel display PCB harness.

Figure 4-1 Front Panel

2

4-6

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3. The spectrometer tube is located in the center front of the 979 just behind the front

panel (Figure 4-2).

➀

➁

➂

Figure 4-2 Front View of the Spectrometer Tube Assembly

In addition to the three connectors on the top of the unit, indicated by
and the ground cable
quick clamp

4. Remove the three connectors from the top of the spectrometer tube (Figure 4-3). The

connector cables are labeled TC, Ion Source, and Preamplifier. If the cables are not
labeled, label them now for future reference.

➂ and a wing nut located below the tube (not shown in this view).

➁, the spectrometer tube is attached by a KF-25 (ISO NW-25)

➀ in Figure 4-2,

➀

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Figure 4-3 Removing the Connectors

4-7

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

5. Disconnect the ground cable from the spectrometer tube magnet by removing the screw

➀ with a slotted screwdriver (Figure 4-3 on page 4-7).

6. Remove the wing nut
(Figure 4-4).

➀ located underneath the shelf below the spectrometer tube

➀

Figure 4-4 Wing Nut

7. Remove the KF-25 (ISO NW-25) quick clamp
from the 979 vacuum system (Figure 4-5).

➀ to disconnect the spectrometer tube

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Figure 4-5 KF-25 Quick Clamp

4-8

➀

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

8. Lift the spectrometer tube up and off of the tray and lay it down on a clean

non-magnetic surface.

CAUTION If the spectrometer tube magnet comes in contact with a

magnetic surface, it may become de-magnetized causing the
spectrometer tube to lose sensitiv ity.

CAUTION Do not remove the 6 magnet body bracket screws ➀ shown in

Figure 4-6 while performing maintenance on the spectr ome ter
tube.

➀

Figure 4-6 Magnet Body Bracket Screws

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4-9

Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

9. Remove the 2 slotted screws ➀ that mount the spectrometer tube magnet assembly to
the spectrometer tube body (Figure 4-7).

➀

Figure 4-7 Magnet Assembly Slotted Screws

10. Carefully slide the magnet assembly off of the spectrometer tube body.

If the magnet assembly does not slide off easily, it may be necessary to loosen the tuning
magnets
(Figure 4-8). Do not remove the set screws and tuning magnets completely.

➀ by backing out the set screws ➁ located on both sides of the assembly

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Figure 4-8 Tuning Magnet Set Screws

➁

➀

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Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

4.3.2 Removing the Button TC

1. Remove the 4 Phillips screws ➀ that hold the Button TC header (Figure 4-9).

➀

Figure 4-9 Button TC Assembly

2. Remove the Button TC header

center post

➀ and lifting the header ➁ up and off of the Button TC ➂.

Figure 4-10 Removing the Button TC

➁ (Figure 4-10) by pressing down on the Button TC

➁

➀

➂

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Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3. If the header and Button TC come up together, hold one hand under the Button TC to
catch it, and push down on the center post to remove the header from the Button TC. Be
careful not to damage the sensing wire.

CAUTION The sensing wire on the bottom side of the Button TC is

approximately 3 mils thick. Care must be taken not to damage
this wire.

4. Remove the Button TC carefully and place it sensing wire
Figure 4-11, (contact pin side down) on a clean surface.

Figure 4-11 Button TC Wires (View with Header on)

5. Carefully remove the O-ring.

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➀ side up as shown in

➀

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Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

4.3.3 Removing the Ion Source

WARNING Store the Ion Source in a cool, dry area in a tightly sealed

CAUTION Use powder- free butyl o r polycarbonate gl o ves to prevent skin

NOTE The ion source is typically replaced during the normal

container . Wash hand s thoroughly after han dling the Ion Source
and especially before smoking or eating.

oils from getting on vacuum surfaces.

maintenance procedure. A new and clean ion source provides
optimum sensitivity and system performance.

See Section 4.4 “Ion Source Replacement Outside of Annual
Maintenance” on page 4-20 when replacing the ion source
outside of annual maintenance.

1. Remove the 4 Phillips screws that hold the ion source header piece, repeating steps 1, 2,

and 3 (Section 4.3.2 “Removing the Button TC” on page 4-11) to release the ion source.

2. Remove the ion source from the spectrometer tube body (Figure 4-12).

Figure 4-12 Removing the Ion Source

NOTE Dark carbon-like deposits around the ion source fil ament and/

or a rainbow-like discoloration on the inside walls of the ion
source cavity indicate that the spectromete r tube has been
operated at too high a pressure. This can occur from a system
pressure leak or from transferring into test at too high a
pressure.

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Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3. Examine the ion source (Figure 4-13) and cavity (Figure 4-14) for deposits and
discoloration. When examination is completed, dispose of it properly or return it to
Vacuum Technologies for exchange.

Figure 4-13 The Ion Source

4. Looking into the ion source cavity (Figure 4-14) you will see the ground slit plate

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Figure 4-14 Ion Source Cavity

➀.

➀

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Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

5. Remove the ground slit plate (Figure 4-15) by placing a thin, slotted screwdriver snug

into the slot and carefully twisting and prying with the screwdriver.

Figure 4-15 Ground Slit Plate

NOTE A locking screwdriver designed to grab onto the slot of a screw

will work very well for this procedure.

4.3.4 Removing the Preamplifier

CAUTION The preamplifier is a static sensitive device. Wear a grounding

1. Remove the 4 Phillips screws that hold the preamplifier header piece, repeating steps 1,

2, and 3 to release the preamplifier (Section 4.3.2 “Removing the Button TC” on
page 4-11) to release the preamplifier.

2. Carefully remove the preamplifier from the spectrometer tube body (Figure 4-16) and

place it carefully on a clean, safe, non-magnetic surface.

device whil e the preamplifi er is being handled.

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Figure 4-16 Removing the Preamplifier

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Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

4.3.5 Remove the Magnetic Poles

1. Remove the 4 slotted screws ➀ to free the magnet pole piece ➁ (Figure 4-17).

➁

Figure 4-17 Magnetic Pole Piece

2. Pick up the spectrometer tube body and tilt it over to remove the magnetic pole piece.

3. Remove the O-ring from the magnetic pole piece and place both the O-ring and the
magnetic pole piece on a clean surface (Figure 4-18).

➀

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Figure 4-18 Removing the O-ring from Magnetic Pole Piece

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Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

4. Repeat steps 1, 2, and 3 (Section 4.3.5 “Remove the Magnetic Poles” on page 4-16) to

remove the second magnetic pole piece (Figure 4-19) from the other side of the
spectrometer tube body.

Figure 4-19 Removing the Second Magnetic Pole Piece

4.3.6 Examining and Cleaning the Spectrometer Parts

1. Using the Scotch-Brite™ pad from the spectrometer tube cleaning kit, polish away any

discolored areas inside the spectrometer tube cavity.

2. Using the Scotch-Brite pad, polish away any discolored areas of the ground slit plate

(Figure 4-20).

Figure 4-20 Discolored Ground Slit Plate

CAUTION The ground slit plate is very thin. Take care not to bend or

disfigure it during cleaning.

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Model 979 Series He lium Ma ss Spe ctrometer Lea k Dete ctor

3. Using the Scotch-Brite pad, polish away any discolored areas of the magnetic pole
pieces (Figure 4-21).

Figure 4-21 Discolored Ground Magnet Pole Piece

4. Using the VacuSolv presaturated cleaning wipes and swabs (Figure 4-22), thoroughly
wipe down all surfaces of the spectrometer tube body, magnetic pole pieces, and
ground slit plate.

Figure 4-22 VacuSolv Cleaning Wipe

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5. Examine the Button TC, taking care not to damage the wires. If there is no damage, it
may be reused after it is properly cleaned.

6. To clean the Button TC properly, soak it in liquid VacuSolv (or acetone) followed by an
isopropyl alcohol rinse. Air dry the Button TC thoroughly before re-assembling into
spectrometer tube.

CAUTION The sensing wire on the bottom side of the Button TC is

NOTE If you were seeing false system pressure readings prior to

approximately 3 mils thick. Care must be taken not to damage
this wire.

overhaul, it may be best to replace the Button TC whether or
not you det ect any physical signs of damage.

4-18