Varian Turbo-V60, 969-9840 Instruction Manual

Page 1
87-900-865-01 (B)
JULY 2006
(GB) INSTRUCTION MANUAL
Turbo-V60
Leak Detector
PCB Controller
Model 969-9840
Page 2
Turbo-V 60 Leak Detector
PCB Controller
Page 3
Page 4
Page 5
TABLE OF CONTENTS
Section Page
- Safety summary
1
I Description
1-1 General 2 1-2 Turbo-V60 controller description 2 1-3 Controller specifications 3 1-4 Controller outline 3
II Installation
2-1 General 4 2-2 Line voltage selection 4 2-3 Power interconnections 4 2-4 Input/Output interconnections 5 2-5 Turbo-V pump connection 5
III Operation
3-1 General 6 3-2 Start-up 6 3-3 Soft Start mode deselection 6 3-4 Starting the pump 6 3-5 Pump shutdown 7 3-6 Power failure 7
IV Maintenance
4-1 General 8 4-2 Controller test 8
Page 6
87-900-865-01 (B)1
SAFETY SUMMARY
Operators and service personnel must be aware of all hazards associated with this equipment. They must know how to recognize hazardous and potentially hazardous conditions, and know how to avoid them. The consequences of unskilled, improper, or careless operation of the equipment can be serious. This product must only be operated and maintained by trained personnel. Every operator or service person must read and thoroughly understand operation/maintenance manuals and any additional information provided by Varian. All warnings and cautions should be read carefully and strictly observed. Address any safety, operation, and/or maintenance questions to your nearest Varian office.
The following format is used in this manual to call attention to hazards:
!
Warning are used when failure to observe instructions or precautions could result in injury or death.
Cautions are used when failure to observe instructions could result in damage to equipment, whether Varian supplied or
other associated equipment.
NOTE
Infomation to aid the operator in obtaining the best performance from the equipment.
WARNING!
CAUTION!
Page 7
SECTION I - DESCRIPTION
87-900-865-01 (B)
2
1-1 General
The Turbo-V60 Leak Detector PCB controller is a microprocessor-controlled, solid-state, frequency converter with self-diagnostic and protection features.
The controller drives (within ten steps) the Turbo V-60 pump during the starting phase by controlling the voltage and current respect to the speed reached by the pump.
It incorporates all the facilities required for the automatic operation of the Turbo-V60 pump series. Remote start/stop and output control capability are provided via auxiliary connectors.
1-2 Turbo-V60 controller description
The controller is a solid-state frequency converter which is driven by a single chip microcomputer. The package composition is:
Power transformer with interconnection cables
PCB including: power supply and 3-phase output,
analog and input/output section, microprocessor and digital section
Controller to pump interconnection cable.
The power supply and the 3-phase output converts the single phase (50-60 Hz) AC mains supply into a 3­phase, low voltage, medium frequency output which is required to power the Turbo-V pump.
The microcomputer generates the variable output frequency and controls the 3-phase output voltage according to the software and the gas load condition of the pump.
Moreover, it manages input and output signals for a fully automatic operation.
A dedicated non-volatile RAM is used to store pump operating parameters and the input/output programmed information upon failure for a period of 10 years accumulated off time.
Two adjustable trimmers are provided to set the pump rotational speed as follows:
P1 – High speed trimmer: 50 to 70 KRPM
P2 – Low speed trimmer: 30 to 50 KRPM
The controller can be operated via remote signals through input/output connector.
Page 8
SECTION I - DESCRIPTION
87-900-865-01 (B)
3
1-3 Controller specifications
Input: Voltage
Frequency Power
Two ranges selectables on a three pin connector on the transformer primary:
- 120 Vac±20%,
- 220 Vac±20%, 1-phase 47 to 63 Hz
350 VA maximum
Output: Voltage
Frequency Power
54 Vac nominal ±10%, 3-phase 1167 Hz, ±2% 150 W maximum
Operating temperaure 0°C to + 40 °C
Storage temperature -20°C to + 70°C
J2 optoisolator input
4 to 12 Vdc
J2 optoisolator output
ICsat 1.6 mA VCE max 0.6 V
VCEO 70 V Interconnecting cables
Pump cable (5-wire,
55 cm long)
Weight 0.5 Kg (1.1 Ibs)
1-4 Controller outline
The outline dimensions for the Turbo-V60 Leak Detector PCB controller are shown in Fig. 1-1.
.
Figure 1-1 – Controller outline
Page 9
SECTION II - INSTALLATION
87-900-865-01 (B)
4
2-1 General
Inspect the controller for any shipping damage.
!
High voltage developed in the controller can cause severe injury or death. Before servicing the unit, disconnect the input power cable.
NOTE
The PCB installed into the customer system must be positioned so that cold air (forced or natural convec­tion) can flow through the PCB components
2-2 Line voltage selection
The controller can operates with two ranges of input voltage:
– 120 Vac ±20% – 220 Vac ±20%
The line voltage selection is done on the three pin male connector on the primary wires of the transformer:
for 120 Vac connect the line wires as follows: – 120 Vac to pin 2 (white) – 0 V to pin 3 (bleu)
for 220 Vac connect the line wires as follows: – 220 Vac to pin 1 (brown) – 0 V to pin 3 (bleu)
NOTE
The mating connector and the female pins are provided
2-3 Power interconnections
The power supply from the external transformer must be connected to J8 connector
See Fig. 2-1 for interconnections detail.
Figure 2-1 - J8 connector interconnections
WARNING!
Page 10
SECTION II - INSTALLATION
87-900-865-01 (B)
5
2-4 Input/Output interconnections
All the input/output signals to the controller must be connected at J15 mating connector (see Fig. 2-2).
Figure 2-2 – Input/Output connector
Pin 1-6 Input A optically isolated from the internal circuit. In conjunction with the Input B determines the controller mode of operation according to the following truth table.
Pin 2-7 Input B optically isolated from the internal circuit. In conjunction with the Input A determines the controller mode of operation according to the following truth table.
INPUT SIGNAL
LOGIC LEVEL
CONTROL UNIT
CONDITION
AB
LOW LOW LOW FREQUENCY
LOW HIGH HIGH FREQUENCY
HIGH LOW HIGH FREQUENCY
HIGH HIGH LOW FREQUENCY
Pin 3-8 Output Normal optically isolated from the internal circuit.
Pin 4-9 Output Overload optically isolated from the internal circuit.
2-5 Turbo-V pump connection
A 55 cm long cable is provided to connect the controller to the pump.
Figure 2-3 shows the pump output connector configuration where pins:
Pins A-F = pump temperature sensor
Pins B-C-D = 54 Vac 3-phase output to pump motor stator
Pin E = ground.
Figure 2-3 – Turbo-V pump connector
Page 11
SECTION III - OPERATION
87-900-865-01 (B)6
3-1 General
Make all vacuum manifold and electrical connections and refer to Turbo-V pump instruction manual prior to operating the Turbo-V controller.
!
To avoid injury to personnel and damage to the equipment, if the pump is laying on a table make sure it is steady. Never operate the Turbo-V pump if the pump inlet is not connected to the system or blanked off.
The controller operates completely automatically after the remote start command is given.
The only user available commands are two trimmers to set the pump rotational speed: the first one (P1) sets the high speed, the second (P2) sets the low speed.
The two trimmers are factory preset as follows:
– P1 (high speed) to 60 KRPM
– P2 (low speed) to 33 KRPM
To select different rotational speeds, act on the appropriate trimmer. The variation ranges are:
– P1: 50 to 70 KRPM
– P2: 30 to 50 KRPM
3-2 Startup
Plug the controller power cable into a suitable power source.
The controller is factory preset with the Soft Start mode enabled that allows the pump to ramp-up to Normal speed slowly with a minimum ramp-up time of 75 seconds and a maximum of about 45 minutes.
If it is necessary to deselct this mode refer to paragraph 3-3.
If the Soft Start mode is deselected, the ramp-up will be done within 60 seconds.
3-3 Soft Start mode deselection
The Soft Start mode is enabled and disabled by means of a jumper located on the controller PCB.
To deselect the Soft Start mode operate as follows:
– Disconnect the power from the controller.
– Move the red jumper from the actual position to the
other according to the label attached over the integrated circuit near the jumper (see Fig. 3-1).
– Connect the power.
Figure 3-1- Soft Start jumper
3-4 Starting the pump
To start the pump it is necessary to set the Input A and Input B signals on J15 connector both to low logic level, or one to low and the other to high logic level.
In the first case the output to the pump is at low frequency, in the other case the output is at high frequency.
The time to change the speed from low frequency (33 KRPM) to high frequency (60 KRPM) is 12 sec.
The time to change from high frequency (60 KRPM) to low frequency (33 KRPM) is 3 sec.
WARNING!
Page 12
SECTION III - OPERATION
87-900-865-01 (B)7
3-5 Pump shutdown
To shutdown the pump it is necessary to set the Input A and Input B signals on J15 connector both to high logic level.
3-6 Power failure
In the event of a power failure (momentary or long term), the Turbo-V controller will stop the turbopump.
When power is restored, the Turbo-V controller automatically restarts the turbopump.
Page 13
SECTION IV - MAINTENANCE
87-900-865-01 (B)8
4-1 General
Replacement controllers are available on an advance exchange basis through Varian. If necessary, information is provided to aid the operator in determining malfunctions and corrective steps to be taken.
!
Voltages developed in the unit are dangerous and may be fatal. Service must be performed by authorized personnel only.
4-2 Controller test
a) Equipment required
– Digital voltmeter (DVM) true RMS.
Dummy load: 3 x 48, 50W each or 3 x 78, 50W
each.
Potentiometer 50KΩ, 1/4W minimum.
b) Test set up
Remove the power cable.
Disconnect the Turbo-V controller.
Set potentiometer to 30K and connect it as
directed in Fig. 4-1.
Figure 4-1 – Dummy load connections
4-2.1 Power supply test
a) DC voltage test
Check the DC voltages referring to test points indicated in Fig. 4-2. Refer also to Figg. 4-3 and 4-4. The meter should read:
– + 5Vdc ± 5%
– ± 12 Vdc ± 5%
– Ground reference = case of Q3.
Switch on the controller and check:
– 54 Vdc ± 10% between TP3(-) a TP5(+) (Fig. 4-2).
b) AC three-phase output voltage test
On the pump connector connect the DVM in turn between: pins B and C, B and D, C and D.
The meter should read 44 Vac ±15%; a different value of 0.4 Vac is tolerable between phase and phase.
4-2.2 Test with dummy load
– Connect the 48Ω or the 78 dummy loads to the
pump connector pins B, C, D as shown in Fig. 4-1.
– Disconnect the potentiometer, set it to 10KΩ, and
then reconnect it.
Connect the power cable.
Switch on the controller and check the values as
per he following table.
WARNING!
Page 14
SECTION IV - MAINTENANCE
87-900-865-01 (B)
9
During start-up
without Soft Start
mode
After start-up
With 48
dummy
load
With 78
dummy
load
With 48
dummy
load
With
78
dummy
load Current ±10%
1.62 A 1.1 A 1 A 1 A
Power ±10%
80 W 58 W 30 W 48 W
Speed ±4KRPM
17 70 40 63
Temperature ±2°C
52° C 52° C 52° C 52° C
– Check the 3-phase ac output voltage.
After start up it should be: 36 Vac with 78 dummy load and 21 Vac with 48 du y load.
Switch off the controller and remove the power cable.
4-2.3 Pump over-temperature test
– Disconnect the potentiometer, set it to 5K, and
then reconnect it.
– Disconnect the dummy loads.
– Connect the power cable.
– Switch on the controller.
– Check the 3-phase ac output voltage.
It should be zero.
– Switch off the controller and remove
power cable.
4-2.4 Functional test
Perform the functional test with the turbo-pump, taking care to check the ramp sequence and start up time.
DISPOSAL
Meaning of the "WEEE" logo found in labels
The following symbol is applied in accordance with the EC WEEE (Waste Electrical and Electronic Equipment) Directive. This symbol (valid only in countries of the European Community) indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system. The end user is therefore invited to contact the supplier of the device, whether the Parent Company or a retailer, to initiate the collection and disposal process after checking the contractual terms and conditions of sale.
Page 15
SECTION IV - MAINTENANCE
87-900-865-01 (B)10
Figure 4-1
Page 16
Request for Return
1. A Return Authorization Number (RA#) WILL NOT be issued until this Request for Return is completely filled out, signed and returned to Varian Customer Service.
2. Return shipments shall be made in compliance with local and international Shipping Regulations (IATA, DOT, UN).
3. The customer is expected to take the following actions to ensure the
Safety
of workers at Varian: (a) Drain any oils or other liquids, (b) Purge or flush all gasses, (c) Wipe off any excess residues in or on the equipment, (d) Package the equipment to prevent shipping damage, (for Advance Exchanges please use packing material from replacement unit).
4. Make sure the shipping documents clearly show the RA# and then return the package to the Varian location nearest you.
North and South America
Varian Vacuum Technologies
121 Hartwell Ave
Lexington, MA 02421
Phone : +1 781 8617200
Fax: +1 781 8609252
Europe and Middle East
Varian SpA
Via Flli Varian 54
10040 Leini (TO) – ITALY
Phone: +39 011 9979111
Fax: +39 011 9979330
Asia and ROW
Varian Vacuum Technologies
Local Office
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PRODUCT IDENTIFICATION
Product Description Varian P/N Varian S/N Purchase Reference
TYPE OF RETURN (check appropriate box)
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Warranty Exchange
Warranty Repair
Loaner Return
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Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY. Call Varian Customer Service to discuss alternatives if this requirement presents a problem.
The equipment listed above (check one):
HAS NOT
been exposed to any toxic or hazardous materials
OR
HAS
been exposed to any toxic or hazardous materials. In case of this selection, check boxes for any materials that
equipment was exposed to, check all categories that apply:
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List all toxic or hazardous materials. Include product name, chemical name and chemical symbol or formula.
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Print Title: …………………………………... Date: ..…../..…../……
NOTE:
If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed,
the customer
will be held responsible
for all costs incurred to ensure the safe handling of the product, and
is liable
for any harm or injury to Varian
employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
Do not write below this line
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Page 17
Request for Return
FAILURE REPORT
TURBO PUMPS and TURBOCONTROLLERS
POSITION PARAMETERS
Does not start
Noise
Vertical
Power: Rotational Speed:
Does not spin freely
Vibrations
Horizontal
Current: Inlet Pressure:
Does not reach full speed
Leak
Upside-down
Temp 1: Foreline Pressure:
Mechanical Contact
Overtemperature
Other: Temp 2: Purge flow:
Cooling defective …………………. OPERATION TIME:
TURBOCONTROLLER ERROR MESSAGE:
ION PUMPS/CONTROLLERS VALVES/COMPONENTS
Bad feedthrough
Poor vacuum
Main seal leak
Bellows leak
Vacuum leak
High voltage problem
Solenoid failure
Damaged flange
Error code on display
Other
Damaged sealing area
Other
Customer application:
Customer application:
LEAK DETECTORS INSTRUMENTS
Cannot calibrate
No zero/high backround
Gauge tube not working Display problem
Vacuum system unstable
Cannot reach test mode
Communication failure
Degas not working
Failed to start
Other
Error code on display
Other
Customer application:
Customer application:
PRIMARY PUMPS DIFFUSION PUMPS
Pump doesn’t start
Noisy pump (describe)
Heater failure
Electrical problem
Doesn’t reach vacuum
Over temperature
Doesn’t reach vacuum
Cooling coil damage
Pump seized
Other
Vacuum leak
Other
Customer application:
Customer application:
FAILURE DESCRIPTION
(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
NOTA: Su richiesta questo documento è disponibile anche in Tedesco, Italiano e Francese. REMARQUE : Sur demande ce document est également disponible en allemand, italien et français. HINWEIS: Auf Aufrage ist diese Unterlage auch auf Deutsch, Italienisch und Französisch erhältlich.
Page 18
Sales and Service Offices
France and Benelux Varian s.a.
7 Avenue des Tropiques Z.A. de Courtaboeuf - B.P. 12 Les Ulis cedex (Orsay) 91941 France Tel: (33) 1 69 86 38 84 Fax: (33) 1 69 86 29 88 From Benelux Tel: (31) 118 67 15 70 From Benelux Fax: (31) 118 67 15 69
Canada Central coordination through:
Varian Vacuum Technologies
121 Hartwell Avenue Lexington, MA 02421 USA Tel: (781) 861 7200 Fax: (781) 860 5437 Toll Free # 1 (800) 882 7426
China Varian Technologies - Beijing
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Via F.lli Varian 54 10040 Leini, (Torino) Italy Tel: (39) 011 997 9 111 Fax: (39) 011 997 9 350
03/06
Japan Varian Vacuum Technologies
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United States Varian Vacuum Technologies
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Other Countries Varian Inc. Vacuum Technologies
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Customer Support & Service:
North America
Toll-Free: 1 800 882 7426 vtl.technical.support@varianinc.com
Europe
Tel: 00 800 234 234 00 vtt.technical.support@varianinc.com
China
Toll-Free: 800 820 8266 vtc.technical.support@varianinc.com
Japan
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Korea
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