Page 1
Service Pendant
Hand-Held
Terminal
INSTRUCTION MANUAL
Manual No. 699909985
Revision C
December 2001
DRAFT 2/4/02
Page 2
Service Pendant Hand-Held Terminal
Hazard and Safety Information
This manual uses the following standard safety protocols:
WARNING
CAUTION
NOTE
The Service Pendant has no user-serviceable parts.
The Service Pendant is used with the following leak detectors:
❑
Model 947
❑
Model 948
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
The caution messages are displayed before procedures, which
if not followed, could cause damage to the equipment.
The notes contain important information.
❑ Model 960
DRAFT 2/4/02
This equipment is designed solely to be used with the leak detectors listed above. The
Service Pendant itself poses no inherent hazard or safety threat to an operator.
However, leak detector operators and service personnel must be aware of all hazards associated with leak detector operation. They must know how to recognize hazardous and
potentially hazardous conditions, and know how to avoid them. The consequences of
unskilled, improper, or careless operation of the equipment can be serious. This product
must only be operated and maintained by trained personnel.
Every leak detector operator or service person must read and thoroughly understand leak
detector operation/maintenance manuals and any additional information provided by
Varian Vacuum Technologies. All warnings and cautions should be read carefully and
strictly observed. Consult local, state, and national agencies regarding specific requirements
and regulations. Address any safety, operation, and/or maintenance questions to your nearest Varian Vacuum Technologies office.
ii
Copyright 2001
Varian Vacuum Technologies
Page 3
Service Pendant Hand-Held Terminal
The Service Pendant
The service pendant is used to set up and display parameters for the Model 947, 948 and
960 Leak Detectors. It is a hand-held terminal with a 40-key keypad and a 20 character
by 4 line backlit LCD display (see Figure 1). The service pendant is stored in the turret and
connects to the leak detector via a six-foot cable that connects to an RS-232 serial port (J1, a
9-pin D sub connector) located inside the lockable turret.
The service pendant is used to monitor and set up:
❑
Reject set points
❑ Crossover pressures
❑
Auto sequence parameters
❑
System setup parameters (such as the value of the calibrated leak)
❑ Ion Source parameters (should only be performed by qualified service personnel)
When the pendant is powered by the 947, 948 or 960, the display indicates the model of
the leak detector to which it is connected.
Refer to Model 947, Model 948 Operations Manual or the Model 960 Operations Manual
for further information on the operation of the leak detector.
DRAFT 2/4/02
Figure 1 Service Pendant
1
Page 4
Service Pendant Hand-Held Terminal
Keypad Functions
Figure 2 shows the service pendant keypad. A glossary of the keys begins on page 8. Table 1
on page 8 explains the keys that perform special functions when entering information.
Table 2 on page 8 explains the remaining keys, which are used to input or display data.
To give you a better understanding of how to use the pendant, step-by-step instructions for a
few common leak detector functions follow this figure.
Figure 2 Service Pendant Keypad
DRAFT 2/4/02
Using the Service Pendant – Parameter Examples
Except for numbers and special function keys, most keys have three lines of text—the
parameter and two operations.
❑
The function is generally printed in black in the center of the key (for example,
RNG ST
Some functions require the input of a number before the function key is pressed. Other
functions, such as queries, do not require any numeric input. When a command or
request is successfully completed, the display ends with ok and a line feed. The pendant
is ready for the next command.
❑
The operation to be performed on that parameter is printed in either blue (for
example,
part of the key).
The keys to set the Reject Points and some of the service group keys are the exceptions.
On these keys, the operation (SET or SHOW) is the center text.
2
on the top, left-most key).
on the lower part of the key), or red (for example,
SHOW
on the upper
SET
Page 5
Service Pendant Hand-Held Terminal
Figure 3 has four illustrations of the keypad each highlighting a different functional group of
keys (Service, System Setup, Operation/Status, and Auto Sequence). As an operator, you will
primarily use the System Setup and the Operation/Status keys. We have not included an
illustration grouping the general entry keys, such as SHIFT, CANCEL and the numeric keys.
Initial System Setup Keys
Auto Sequence Setup Keys
Service Keys
Operation / Status Keys
Figure 3 Keypad showing Four Functional Groups
DRAFT 2/4/02
3
Page 6
Service Pendant Hand-Held Terminal
Example 1 – Set Reject Set Point
Four individual reject set points can be set, but only one reject set point is enabled at a time.
To set a reject set point value and make it the active reject set point:
1. Display (show) the existing reject set point value and see if it is enabled (on or off).
❑ Press
❑ Press:
(the number of the reject set point you want to display, i.e., 1 though 4)
1
SET
REJ #
SHOW
The currently enabled set point is displayed along with its value and on or off. On
indicates that the displayed set point is enabled.
2. Set reject set point 1 value to 5.5E−5.
NOTE
The pendant will display exponential values to 2 characters.
However, the single digit (in this case 5) or both digits (05) are
valid entries.
❑
Press the following keys in order from left to right to enter the value:
5 . 5 E
SHIFT
_
. 5
REJ3
SET
REJ 1
The system displays INIT, followed by the value and ends the string with ok.
3. Enable reject set point 1 (make it the active reject set point).
DRAFT 2/4/02
❑
The pendant displays the reject set point, its value and on to indicate reject set point 1 is
enabled.
Press the following keys in order from left to right to enable reject set point 1:
SET
1
SHIFT
REJ #
SHOW
4
Page 7
Service Pendant Hand-Held Terminal
Example 2 – Check and Set the Value of the Crossover (Transfer) Pressure to Fine Test
The pressure at which a test transfers to fine (or gross) test can be set and verified using the
pendant. The value can also be verified on the test port pressure display on the front panel.
1. Verify the current fine test transfer value.
❑ Press:
2. Set the fine test transfer point to 5.0E−2.
SET
FN XFR
SHOW
The pendant displays the current value and ends the string with ok.
❑ Press the following keys in order from left to right to enter the value:
5 . 0 E
SHIFT
_
.
SHIFT
2
SET
FN XFR
SHOW
The system displays an INIT string, including the value, and ends the string with ok.
3. Verify the fine test transfer value.
a. Using the pendant:
❑
Press:
SET
FN XFR
SHOW
The pendant displays the current value and ends the string with ok.
DRAFT 2/4/02
b. On the leak detector front panel:
❑
Place the test mode switch to AUTO
❑
Press and hold the Display button
The test port pressure bar graph display will show the transfer value (in this case,
50 mTorr).
5
Page 8
Service Pendant Hand-Held Terminal
Example 3 – Check and Set the Auto Sequence Parameters
The Auto Sequence rough time and test time intervals can be set and the Auto Sequence
option turned on using the pendant.
1. Display the currently set rough time and test time.
❑ Press:
SET
RUF TM
SHOW
The pendant displays the current rough time interval and ends the string with ok.
❑
Press:
SET
TST TM
SHOW
The pendant displays the current test time interval and ends the string with ok.
2. Set the rough time interval to 12 seconds.
❑
3. Set the test time interval to 5 seconds.
❑
DRAFT 2/4/02
4. Verify the values by repeating steps 1 and 2.
5. Set Auto Sequence to on.
❑
Press the following keys in order from left to right to enter the value:
SET
1 2
SHIFT
RUF TM
SHOW
Press the following keys in order from left to right to enter the value:
SET
5 SHIFT
TST TM
SHOW
Press the following keys in order from left to right:
ON
SHIFT
A SEQ
OFF
6
Page 9
Service Pendant Hand-Held Terminal
Example 4 – Check and Set the Value of the Internal Standard Leak
To set the value of the internal standard leak:
1. Display the current value of the internal standard leak.
❑
Press:
SET
STD LK
SHOW
The pendant displays the current value of the standard leak.
2. Enter and set the new standard leak value, for example, 1.6 E−7 atm cc/sec.
❑
Press the following keys in order from left to right to enter the value:
3. Verify the new value of the standard leak on the LCD display.
❑
Press:
Example 5 – Display the Ion Source Parameter
Parameters such as Ion Source Voltage should only be changed by Varian qualified service
personnel. The example is included here because in determining the cause of a problem, a
service person may request that you display these values.
1. Display the Ion Voltage.
SET
STD LK
SHOW
The new leak rate should be displayed and the string should end with ok. If not, repeat
the procedure.
❑
Press:
SHIFT
_
.
SHIFT
7
SET
STD LK
SHOW
DRAFT 2/4/02
TURBO
SHOW
ION V
The pendant displays the current value of the ion voltage and ends the string with ok.
7
Page 10
Glossary
Service Pendant Hand-Held Terminal
Table 1 Glossary of Function Keys
SHIFT
LK RATE
Performs the red function on the key that is pressed after the
key is pressed.
Enters the E for exponential notation inputs such as reject set point.
SHIFT
E
[SHIFT] LK RATE
Displays the current leak rate.
E
_
Enters a . (decimal point) for input values such as in range stop.
.
[SHIFT]
_
.
CANCEL
All digits
2
from
to 9
0
.
and
RAW DTA
Enters a – (minus sign) for negative input values such as in
range stop.
Erases an entry if a mistake is made.
Enters the digit pressed.
Enters the digit 1.
1
The keys listed in Table 2 start at the top left corner of the keypad and continue from left
to right.
DRAFT 2/4/02
[SHIFT] SET
[SHIFT] LOG
SET
RNG ST
SHOW
RNG ST
SHOW
LOG
OUT V
LlN
OUT V
LlN
SET
GR XFR
SHOW
Table 2 Glossary of Input and Data Keys
Displays the value of the range stop, the lowest decade that the
leak detector will show on the bar graph.
Sets the value of the range stop, the lowest decade that the leak
detector will show on the bar graph. Enter
followed by the SHIFT and the function key. Example:
Sets the analog leak rate output voltage on the rear panel to Linear
format. (Only functional on systems with the I/O option.)
Sets the analog leak rate output voltage on the rear panel to
2 V / Decade Log format. (Only functional on systems with the I/O
option.)
Displays the value of the Gross Leak Transfer Point.
−
XX (the desired value),
−
08, −10.
8
Page 11
Service Pendant Hand-Held Terminal
Table 2 Glossary of Input and Data Keys (continued)
[SHIFT] SET
GR XFR
SHOW
SET
FN XFR
SHOW
[SHIFT] SET
FN XFR
SHOW
VER
B’LITE
[SHIFT] VER
B’LITE
V FOC
SHOW
RPLR
Sets the value of the Gross Leak Transfer Point.
Enter X.XE−X (the desired value), followed by SHIFT, then the
function key.
Example: 5.0E−3 [SHIFT] SET GR XFR (sets Gross Leak
Transfer Point to 500 mTorr).
Displays the value of the Fine Leak Transfer Point.
Sets the value of the Fine Leak Transfer Point.
Enter X.XE−X (the desired value), followed by SHIFT, then the
function key.
Example: 5.0E−2 [SHIFT] SET GR XFR (sets Fine Leak
Transfer Point to 50 mTorr).
Switches the display backlight. If on, turns it off. If off, turns it on.
Displays the version, date and checksum of the installed software.
Displays the value of the Repeller Voltage in the Ion Source.
[SHIFT] V FOC
SHOW
RPLR
EMIS
SHOW
GAIN
[SHIFT] EMIS
SHOW
GAIN
TURBO
SHOW
ION V
[SHIFT] TURBO
SHOW
ION V
PRSRS
SHOW
VLV ST
Displays the value of the Variable Focus Voltage in the Ion Source.
Displays the value of the System Gain in the format:
?GAIN X.X ok
DRAFT 2/4/02
Displays the value of the Emission Current in the Ion Source in the
format:
?EMISSION CURRENT X.XXX ok
Displays the value of the Ion Voltage in the Ion Source in the
format:
?ION CHAMBER XXX.X ok
Displays the status of the Turbo Pump in the leak detector in the
format:
?turbo
turbo Ready (meaning the turbo is up to speed)
turbo No Fault (meaning no fault condition present)
turbo speed Slow ok (Slow or Fast)
Displays the present valve mode of the leak detector as VENT,
FINE TEST, or GROSS TEST.
9
Page 12
Service Pendant Hand-Held Terminal
Table 2 Glossary of Input and Data Keys (continued)
[SHIFT] PRSRS
SHOW
VLV ST
SET
OFFSET
SHOW
[SHIFT] SET
OFFSET
SHOW
INIT
RPLR
PUT
Displays the Test Port and System Pressures in the format:
?test port 2.3 (value is in mTorr)
system TC 1 ok (value is in mTorr)
Displays the value of the electronic offset of the Preamplifier in the
format:
?OFFSET XX ok
Sets a temporary value of the electronic offset in the
Preamplifier. Enter XX (the desired value), followed by the SHIFT
key, then the function key.
Sets a temporary new value for Repeller Voltage. Enter XXX
(the desired value), then the function key.
NOTE
Values that are entered using INIT are
permanently stored in non-volatile RAM
unless they are replaced using another
INIT command.
Values that are entered using PUT are
temporary. The parameter reverts to the
previously stored (INIT) value when the
system is shut down.
[SHIFT] INIT
DRAFT 2/4/02
[SHIFT] INIT
[SHIFT] INIT
[SHIFT] INIT
RPLR
PUT
INIT
ION V
PUT
ION V
PUT
INIT
V FOC
PUT
V FOC
PUT
INIT
GAIN
PUT
GAIN
PUT
Sets a permanent new value for Repeller Voltage. Enter XXX
(the desired value), followed by the SHIFT key, then the
function key.
Sets a temporary new value for Ion Voltage. Enter XXX (the desired
value), then the function key.
Sets a permanent new value for Ion Voltage. Enter XXX (the
desired value), followed by the SHIFT key, then the function key.
Sets a temporary new value for Variable Focus Voltage. Enter XXX
(the desired value), then the function key.
Sets a permanent new value for Variable Focus Voltage. Enter XXX
(the desired value), followed by the SHIFT key, then the function
key.
Sets a temporary new value for System Gain. Enter X.X (the
desired value), then the function key.
Sets a permanent new value for System Gain. Enter X.X (the
desired value), followed by the SHIFT key, then the function key.
INIT
EMIS
PUT
10
Sets a temporary new value for Emission Current. Enter XXXX
(the desired value), then the function key.
Page 13
Service Pendant Hand-Held Terminal
Table 2 Glossary of Input and Data Keys (continued)
[SHIFT] INIT
EMIS
PUT
ZERO
TP TC
ATM
[SHIFT] ZERO
TP TC
ATM
ZERO
SY TC
ATM
[SHIFT] ZERO
SY TC
ATM
Sets a permanent new value for Emission Current. Enter XXXX
(the desired value), followed by the SHIFT key, then the
function key.
Initiates an atmosphere calibration of the Test Port TC.
Initiates a zero calibration of the Test Port TC.
Initiates an atmosphere calibration of the System TC.
CAUTION
System TC being set to atmosphere is not
a normal state for the leak detector. The
turbo pump must be turned off, and the
spectrometer tube must be vented. For
additional information, see the Model
947/948 or the Model 960 Operation
manuals.
Initiates a zero calibration of the System TC.
SET
TST TM
SHOW
[SHIFT] SET
TST TM
SHOW
SET
RUF TM
SHOW
[SHIFT] SET
RUF TM
SHOW
ON
A SEQ
OFF
[SHIFT] ON
A SEQ
OFF
2
FIL SEL
1
Displays the value of the Auto Sequencer Test Time.
Sets the value of the Auto Sequencer Test Time. Enter XXX
(the desired value), followed by the SHIFT key, then the
function key.
Displays the value of the Auto Sequencer Roughing Time.
Sets the value of the Auto Sequencer Roughing Time. Enter XXX
(the desired value), followed by the SHIFT key, then the
function key.
Turns the Auto Sequencer function off.
Turns the Auto Sequencer function on.
Selects filament #1 in the Ion Source.
DRAFT 2/4/02
11
Page 14
Service Pendant Hand-Held Terminal
Table 2 Glossary of Input and Data Keys (continued)
[SHIFT] 2
FIL SEL
1
OUT V
SHOW
FIL #
[SHIFT] OUT V
SHOW
FIL #
[SHIFT] RAW DTA
1
SET
REJ #
SHOW
[SHIFT] SET
REJ #
SHOW
SET
STD LK
SHOW
[SHIFT] SET
STD LK
SHOW
Selects filament #2 in the Ion Source.
Displays the active filament number.
Displays the format (LOG or LIN) of the analog leak rate output
voltage.
Displays a set of readings from the leak rate A to D conversion.
Displays the active reject set point (1 through 4) and the value of
the reject set point.
Sets the active reject set point. Enter a number from 1 through 4,
followed by the SHIFT key, then the function key.
Displays the leak rate value of the internal calibrated leak. The leak
detector calibrates to this value.
Sets the leak rate value to which the leak detector calibrates. Enter
−
X.XE
X or X.XE−XX (the desired value), followed by the SHIFT
key, then the function key.
DRAFT 2/4/02
[SHIFT] REJ3
[SHIFT] REJ 4
REJ3
SET
REJ 1
SET
REJ 1
REJ 4
SET
REJ 2
SET
REJ 2
Sets the leak rate value for Reject Set Point #1. Enter X.XE−X
(the desired value), then the function key.
Sets the leak rate value for Reject Set Point #3. Enter X.XE−X
(the desired value), followed by the SHIFT key, then the
function key.
Sets the leak rate value for Reject Set Point #2. Enter X.XE−X
(the desired value), followed by the SHIFT key, then the
function key.
Sets the leak rate value for Reject Set Point #4. Enter X.XE−X
(the desired value), followed by the SHIFT key, then the
function key.
12
Page 15
Page 16
Sales and Service Offices
Argentina
Varian Argentina Ltd.
Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel: (54) 1 783 5306
Fax: (54) 1 786 5172
Australia
Varian Australia Pty Ltd.
679-701 Springvale Road
Mulgrave, Victoria ZZ 3170
Australia
Tel: (61) 395607133
Fax: (61) 395607950
Benelux
Varian Vacuum Technologies
Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel: (31) 343 469910
Fax: (31) 343 469961
Brazil
Varian Industria e Comercio Ltda.
Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel: (55) 11 3845 0444
Fax: (55) 11 3845 9350
Canada
Central coordination through:
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426
China
Varian Technologies - Beijing
Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 1000031 P.R. China
Tel: (86) 10 6641 1530
Fax: (86) 10 6641 1534
France and Wallonie
Varian s.a.
7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: (33) 1 69 86 38 13
Fax: (33) 1 69 28 23 08
Germany and Austria
Varian Deutschland GmbH
Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: (49) 6151 703 353
Fax: (49) 6151 703 302
India
Varian India PVT LTD
101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: (91) 11 5548444
Fax: (91) 11 5548445
Italy
Varian Vacuum Technologies
Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350
Japan
Varian Vacuum Technologies
Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: (81) 3 5232 1253
Fax: (81) 3 5232 1263
Korea
Varian Technologies Korea, Ltd.
Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: (82) 2 3452 2452
Fax: (82) 2 3452 2451
Mexico
Varian S.A.
Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: (52) 5 523 9465
Fax: (52) 5 523 9472
Ta i w a n
Varian Technologies Asia Ltd.
18F-13 No.79, Hsin Tai Wu Road
Sec. 1, Hsi Chih
Taipei Hsien
Taiwan, R.O.C.
Tel: (886) 2 2698 9555
Fax: (886) 2 2698 9678
UK and Ireland
Varian Ltd.
28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel: (44) 1932 89 8000
Fax: (44) 1932 22 8769
United States
Varian Vacuum Tec h n o l ogies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426
Other Countries
Varian Vacuum Tec h n o l ogies
Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350
Internet Users:
Customer Service & Technical Support:
vpl.customer.support@varianinc.com
Wor l d w i d e Web Site:
www.varianinc.com/vacuum
Order On-line:
www.evarian.com
Representatives in most countries
02/02
Loading...