Page 1
VacIon Plus 20
pumps
Model 919-1115
Model 919-1125
Model 919-1145
Model 919-1146
Model 919-1114
Model 919-1124
Model 919-1144
(I) MANUALE DI ISTRUZIONI
(D) BEDIENUNGSHANDBUCH
(F) NOTICE DE MODE D’EMPLOI
(GB) INSTRUCTION MANUAL
87-900-106-01(B)
APRIL 2006
Page 2
VacIon Plus 20
Page 3
Page 4
Page 5
ISTRUZIONI PER L’USO ....................................................................................................1
GEBRAUCHSANLEITUNG ................................................................................................. 3
MODE D’EMPLOI................................................................................................................5
INSTRUCTIONS FOR USE.................................................................................................7
TECHNICAL INFORMATION .............................................................................................. 9
DESCRIPTION OF THE VACION PUMP......................................................................................9
TECHNICAL SPECIFICATION ......................................................................................................9
OUTLINE DRAWING ...................................................................................................................12
STRAY MAGNETIC FIELD..........................................................................................................13
VACION PLUS PUMP INSTALLATION.......................................................................................14
Inspection procedure .........................................................................................................14
Visual inspection................................................................................................................14
Vacuum evaluation ............................................................................................................14
Short circuits ......................................................................................................................14
TYPICAL INSTALLATION............................................................................................................14
INLET FLANGE CONNECTION ..................................................................................................15
CONTROL UNIT CONNECTION.................................................................................................16
SAFETY INTERLOCK..................................................................................................................16
HEATER INSTALLATION............................................................................................................16
HEATER REPLACEMENT...........................................................................................................17
BAKEOUT OPERATION..............................................................................................................17
Bakeout of VacIon pump with the integral heaters...........................................................17
OPERATING PROCEDURE........................................................................................................17
MAINTENANCE ...........................................................................................................................18
Exchange of the high voltage feedthrough........................................................................18
Leakage current check ......................................................................................................19
High-potting........................................................................................................................19
PUMP TROUBLESHOOTING .....................................................................................................20
VACION PLUS PUMP REPLACEMENT PARTS AND ACCESSORIES ....................................21
VACION PLUS PUMP CONTROLLER........................................................................................22
Page 6
ISTRUZIONI PER L'USO
1 87-900-106-01(B)
INFORMAZIONI GENERALI
Questa apparecchiatura è destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla
Varian prima dell'utilizzo dell'apparecchiatura. La Varian si ritiene sollevata da eventuali responsabilità dovute all'inosservanza
totale o parziale delle istruzioni, ad uso improprio da parte di
personale non addestrato, ad interventi non autorizzati o ad uso
contrario alle normative nazionali specifiche.
Le pompe della serie VacIon Plus sono pompe ioniche utilizzate comunemente per applicazioni di ultra alto vuoto, grazie alla
loro pulizia, capacità di pompare qualsiasi tipo di gas, e del loro
funzionamento senza vibrazioni e necessità di manutenzione.
Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell'operatore durante l'utilizzo
dell'apparecchiatura. Informazioni dettagliate sono fornite nell'appendice “Technical information”.
Questo manuale utilizza le seguenti convenzioni:
,
PERICOLO!
I messaggi di pericolo attirano l'attenzione dell'operatore su una
una procedura o una pratica specifica che, se non eseguita in
modo corretto, potrebbe provocare gravi lesioni personali.
ATTENZIONE!
I messaggi di attenzione sono visualizzati prima di procedure
che, se non osservate, potrebbero causare danni all'apparecchiatura.
NOTA
Le note contengono informazioni importanti estrapolate dal testo.
PREPARAZIONE PER L'INSTALLAZIONE
La pompa viene fornita in un imballo protettivo speciale; se si
presentano segni di danni, che potrebbero essersi verificati durante il trasporto, contattare l'ufficio vendite locale. Durante l'operazione di disimballaggio, prestare particolare attenzione a
non lasciar cadere la pompa e a non sottoporla ad urti o vibrazioni. Non disperdere l'imballo nell'ambiente. Il materiale è
completamente riciclabile e risponde alla direttiva CEE 85/399
per la tutela dell'ambiente.
ATTENZIONE!
Onde evitare problemi di degassamento, non toccare con le
mani nude i componenti destinati ad essere esposti al vuoto.
Utilizzare sempre i guanti o altra protezione adeguata.
NOTA
La pompa non può essere danneggiata rimanendo semplicemente esposta all'atmosfera. Si consiglia comunque di mantenerla chiusa fino al momento dell'installazione sul sistema onde
evitare eventuale inquinamento da polvere.
INSTALLAZIONE
Non installare e/o utilizzare la pompa in ambienti esposti ad agenti atmosferici (pioggia, gelo, neve), polveri, gas aggressivi, in ambienti esplosivi o con elevato rischio di incendio. Durante il
funzionamento, per ottenere le specifiche tecniche dichiarate, la
temperatura ambiente deve essere compresa tra 0 °C e +85 °C.
ATTENZIONE!
La pompa deve essere tenuta sigillata con il suo tubo di ingresso schiacciato finchè non è pronta per essere collegata al sistema.
NO!
,
PERICOLO!
Per evitare lesioni alla persona, non collegare l’alta tensione alla pompa prima che sia installata nel sistema e
che tutte le flange di ingresso siano adeguatamente collegate o chiuse.
Page 7
ISTRUZIONI PER L'USO
Il funzionamento delle pompe è ottimizzato solo con l’uso delle
apposite unità di controllo Varian (Dual, MidiVac o MiniVac).
6. La pressione nella pompa può anche essere calcolata leggendo la corrente e convertendo la lettura in pressione tramite l’apposito diagramma pressione-corrente illustrato
nell’appendice “Technical Information” di questo manuale.
ATTENZIONE!
Il rispetto delle normative di sicurezza nell’uso delle pompe è
garantito solo con l’uso delle unità di controllo Varian.
NOTA
I gradini nei diagrammi pressione - corrente sono una caratteristica del modo di funzionamento del Dual. Quando la corrente
assorbita dalla pompa raggiunge determinati valori, l'unità di
controllo cambia il valore dell'alta tensione in uscita ad un valore più basso.
La pompa VacIon Plus può essere installata in qualsiasi posi-
zione. Per convenienza normalmente viene montata in posizione verticale con la flangia di ingresso in alto.
Le pompe possono anche essere mantenute sospese in ogni
posizione tramite la loro flangia di ingresso. Per informazioni
dettagliate sull’installazione della pompa, vedere l’appendice
"Technical Information".
7. Quando si porta la pompa alla pressione atmosferica, usare
azoto secco in modo da evitare l’assorbimento di vapore
acqueo da parte delle pareti della pompa.
USO
,
Tutte le istruzioni per il corretto funzionamento delle pompe VacIon Plus sono contenute nel manuale dell'unità di controllo. Leggere attentamente tale manuale prima dell'utilizzo. Si raccomanda
di portare la pompa ad una pressione di 1x10
PERICOLO!
Quando la pompa viene utilizzata per il pompaggio di gas tossici, infiammabili o radioattivi, seguire le appropriate procedure
tipiche di ciascun gas. Non usare la pompa in presenza di gas
esplosivi.
-4
Torr (mbar) in modo da ottenere un avvio più rapido. A questo scopo è meglio non
utilizzare una pompa meccanica sigillata con olio, ma se deve
essere utilizzata una tale pompa, si raccomanda di inserire una
trappola lungo la linea di vuoto per ridurre la pressione causata
dai vapori di acqua e di olio provenienti dalla pompa meccanica.
Cercare di ridurre al minimo il tempo in cui la pompa meccanica è
aperta verso il sistema e verso la pompa ionica, poiché i suoi vapori si diffondono nel sistema a pressioni inferiori a 1x10
,
PERICOLO!
Quando è installato il riscaldatore, non toccare la pompa durante le operazioni di riscaldamento e di raffreddamento. L'elevata
temperatura può causare lesioni alle persone.
-1
Torr
(mbar) causando una contaminazione dello stesso. Nei sistemi in
cui l’olio deve essere completamente assente, è meglio utilizzare
pompe Turbo per la suddetta operazione. Depositi igroscopici e
l’assorbimento dell’idrogeno all’interno del composto di titanio
possono provocare l’allungamento del tempo di avvio con
l’invecchiamento della pompa. Durante l’esposizione all’aria, il
deposito del composto di titanio assorbe vapore acqueo; in conseguenza di ciò, al successivo avvio, il riscaldamento della pompa provoca il rilascio del vapore e di parte dell’idrogeno pompato
precedentemente, con l’effetto dell’allungamento del tempo di
avvio.
ATTENZIONE!
Non avvicinare dispositivi elettronici alla pompa. Il campo magnetico attorno ad essa può provocare dei malfunzionamenti
dei dispositivi stessi.
MANUTENZIONE
Le pompe della serie VacIon Plus non richiedono alcuna manutenzione. Qualsiasi intervento deve essere eseguito da
personale autorizzato.
Procedure di uso
,
Controllare che la polarità dell’unità di controllo sia corretta per
la pompa: polarità positiva per le pompe Diode e negativa per
le StarCell. Fare riferimento al relativo manuale ed osservare la
seguente procedura per l’uso della pompa:
PERICOLO!
Prima di effettuare qualsiasi intervento sulla pompa scollegarla
dall’alta tensione.
1. Tramite una pompa di pre-vuoto portare il sistema da vuoto
ad una pressione minima di avvio in accordo alla tabella di
pagina 9 ed a seconda del tipo di pompa ionica.
Qualora una pompa dovesse essere rottamata, procedere alla
sua eliminazione nel rispetto delle normative nazionali specifiche.
2. Collegare l’unità di controllo ad una apposita fonte di ali-
mentazione ed accenderla.
3. Osservare la tensione, la corrente e la pressione. Se l’avvio
è avvenuto ad una pressione di 5x10
SMALTIMENTO
-2
Torr (mbar), è tipica
una tensione di circa 300 - 400 V. Un valore di corrente
prossimo alla corrente di corto circuito dell’unità di controllo
è indice dell’esistenza di una perdita nella pompa e nel sistema. Un temporaneo incremento della pressione di prevuoto è normale durante la fase di avvio.
Significato del logo "WEEE" presente sulle etichette
Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata "WEEE".
Questo simbolo (valido solo per i paesi della Comunità Eu-
ropea) indica che il prodotto sul quale è applicato, NON deve
essere smaltito insieme ai comuni rifiuti domestici o industriali,
ma deve essere avviato ad un sistema di raccolta differenziata.
4. Lasciare la valvola di pre-vuoto aperta durante l’avvio della
pompa ionica finchè non si raggiunge una adeguata pressione di avvio. Se la tensione della pompa ionica scende
dopo la chiusura della valvola, riaprirla per un prepompaggio aggiuntivo. Appena la pressione diminuisce, la
tensione cresce nuovamente e la valvola di pre-vuoto può
essere chiusa.
Si invita pertanto l'utente finale a contattare il fornitore del dispositivo, sia esso la casa madre o un rivenditore, per avviare il
processo di raccolta e smaltimento, dopo opportuna verifica dei
termini e condizioni contrattuali di vendita.
5. Quando la tensione ha raggiunto i 2 - 3kV, mettere l’unità di
controllo nello stato PROTECT. Il sistema sarà così autoprotetto dall’incremento della pressione oltre 1x10
-4
Torr
(mbar) quando la pompa non è controllata. Nel caso in cui
ci fosse un tale incremento, l’unità di controllo viene spenta
automaticamente.
2 87-900-106-01(B)
Page 8
GEBRAUCHSANWEISUNGEN
ALLGEMEINE HINWEISE
Dieses Gerät ist für den professionellen Gebrauch bestimmt.
Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie
alle weiteren von Varian mitgelieferten Zusatzdokumentationen
genau lesen. Bei vollständiger bzw. teilweiser Nichtbeachtung
der enthaltenen Hinweise, unsachgemäßem Gebrauch durch
ungeschultes Personal, nicht autorisierten Eingriffen und Mißachtung der nationalen Bestimmungen übernimmt Firma Varian keinerlei Haftung.
Die Pumpen der Serie VacIon Plus sind Ionenpumpen, die aufgrund ihrer Reinheit, ihrer Fähigkeit, alle Arten von Gas zu
pumpen, und ihres vibrations- und wartungsfreien Betriebes,
allgemein für Ultrahochvakuumanwendungen zum Einsatz
kommen.
In den folgenden Abschnitten sind alle erforderlichen Informationen für die Sicherheit des Bedieners bei der Anwendung des
Geräts aufgeführt. Detaillierte technische Informationen sind im
Anhang "Technical Information" enthalten.
In dieser Gebrauchsanleitung werden Sicherheitshinweise
folgendermaßen hervorgehoben:
,
GEFAHR!
Die Gefahrenhinweise lenken die Aufmerksamkeit des Bedieners auf eine spezielle Prozedur oder Praktik, die bei unkorrekter Ausführung schwere Verletzungen hervorrufen könnte.
INSTALLATION
Die Pumpe darf nicht in Umgebungen installiert und/oder benutzt werden, die ungeschützt vor Witterungsbedingungen (Regen, Frost, Schnee), Staub und aggressiven Gasen sind, und in
denen Explosions- und erhöhte Brandgefahr besteht.
ACHTUNG!
Die Warnhinweise vor bestimmten Prozeduren machen den
Bediener darauf aufmerksam, daß bei Nichteinhaltung Schäden
am Gerät entstehen können.
Während des Betriebes soll die Umgebungstemperatur zwischen 0°C und +85°C betragen, um die angegebenen technischen Merkmale zu gewährleisten.
ANMERKUNG
ACHTUNG!
Die Anmerkungen enthalten wichtige Informationen, die aus
dem Text hervorgehoben werden.
Die Pumpe soll versiegelt und mit flachgedrücktem Eintrittsschlauch gehalten werden, bis sie für den Anschluß an das
System bereit ist.
VOR DER INSTALLATION
Die Pumpe wird in einer speziellen Schutzverpackung geliefert.
Eventuelle Transportschäden sind der zuständigen örtlichen
Verkaufsstelle zu melden. Beim Auspacken vorsichtig vorgehen, damit die Pumpe nicht fällt oder Stößen oder Vibrationen
ausgesetzt wird. Das Verpackungsmaterial ist ordnungsgemäß
zu entsorgen. Es ist vollständig recyclebar und entspricht der
EG-Richtlinie 85/399 für den Umweltschutz.
FALSCH!
ACHTUNG!
Um Entgasungsprobleme zu vermeiden, dürfen die Komponenten, die mit dem Vakuum in Kontakt kommen, nicht mit bloßen
Händen berührt werden. Stets Handschuhe oder einen anderen
geeigneten Schutz tragen.
,
GEFAHR!
Um Personenschäden zu vermeiden, darf die Hochspannungsleitung der Pumpe erst angeschlossen werden, wenn
die Pumpe im System installiert ist und alle Eintrittsflansche
entsprechend angeschlossen oder geschlossen sind.
ANMERKUNG
Die Pumpe kann, wenn sie einfach der Atmosphäre ausgesetzt
ist, nicht beschädigt werden. Sie sollte jedoch bis zur Installation an der Anlage geschlossen bleiben, um Verunreinigungen
durch Staub zu vermeiden.
3 87-900-106-01(B)
Page 9
GEBRAUCHSANWEISUNGEN
Der Pumpenbetrieb wird nur durch den Einsatz speziell dafür
vorgesehener Varian Steuereinheiten (Dual, MidiVac oder MiniVac) optimiert.
ACHTUNG!
Die Einhaltung der Sicherheitsvorschriften beim Gebrauch der
Pumpen ist nur bei Verwendung von Varian Steuereinheiten
gewährleistet.
Die Pumpe VacIon Plus kann in einer beliebigen Position installiert werden. Aus praktischen Gründen wird sie in der Regel
senkrecht mit nach oben gerichtetem Eintrittsflansch. Die Pumpen können auch in einer beliebigen Position an ihrem Eintrittsflansch hängend eingebaut werden. Detaillierte Informationen
zur Installation der Pumpe sind dem Anhang “Technical Information” zu entnehmen.
GEBRAUCH
Sämtliche Hinweise für den korrekten Betrieb der Pumpen VacIon Plus sind im Handbuch der Steuereinheit enthalten. Dieses Handbuch ist vor der Inbetriebnahme genau durchzulesen.
Es wird empfohlen, die Pumpe auf einen Druck von 1x10
-4
Torr
(mbar) zu bringen, um einen rascheren Anlauf zu gewährleisten. Zu diesem Zweck empfiehlt es sich, keine ölversiegelte
mechanische Pumpe zu verwenden. Falls hingegen eine derartige Pumpe benutzt werden muß, soll an der Vakuumleitung
eine Falle eingesetzt werden, um den durch die Wasser- und
Öldämpfe aus der mechanischen Pumpe erzeugten Druck zu
verringern. Es ist zu versuchen, die Zeit auf ein Mindestmaß zu
reduzieren, während der die mechanische Pumpe zum System
und zur Ionenpumpe geöffnet ist, da sich ihre Dämpfe bei Drücken unter 1x10
-1
Torr (mbar) im System verbreiten und dessen
Verunreinigung verursachen. Bei Systemen, die vollkommen
ölfrei sein müssen, erweisen sich für den obengenannten Vorgang Turbopumpen als geeigneter. Hygroskopische Ablagerungen und die Absorption von Wasserstoff in der
Titanverbindung können die Anlaufzeit verlängern und eine
kürzere Standzeit der Pumpe verursachen. Die Ablagerungen
der Titanverbindungen absorbieren Wasserdampf, wenn sie der
Luft ausgesetzt werden. Dadurch bewirkt beim anschließenden
Anlaufvorgang die Aufheizung der Pumpe die Abgabe des
Dampfes und eines Teils des zuvor gepumpten Wasserstoffs,
so daß sich die Anlaufzeit verlängert.
Bedienungsschritte
Es ist zu kontrollieren, daß die Steuereinheit in bezug auf die
Pumpe richtig gepolt ist: positive Polarität für Dioden Pumpen
und negative für StarCell Pumpen. Es ist nach dem diesbezüglichen Handbuch vorzugehen, für den Gebrauch der Pumpe
sind die folgenden Bedienungsschritte zu beachten:
1. Mit einer Vorvakuumpumpe das System auf einen Min-
destanlaufdruck gemäß Tabelle 9 in Abhängigkeit vom Ionenpumpentyp bringen.
2. Die Steuereinheit an eine entsprechende Versorgungs-
quelle anschließen und einschalten.
3. Die Spannung, die Stromstärke und den Druck beobach-
ten. Wenn der Anlauf bei einem Druck von 5x10
-2
Torr
(mbar) erfolgt ist, ist eine Spannung von ca. 300 – 400 V
typisch. Ein Stromwert, der sich dem Kurzschlußstromwert
der Steuereinheit annähert, weist auf eine Leckstelle an
der Pumpe und am System hin. Ein zeitweiliger Anstieg
des Vorvakuumdruckes ist während der Anlaufphase normal.
4. Während des Anlaufes der Ionenpumpe soll das Vorvakuumventil geöffnet bleiben, bis ein angemessener Anlaufdruck erreicht ist. Wenn die Spannung der Ionenpumpe
nach Schließung des Ventils abfällt, ist das Ventil für eine
zusätzliche Vorvakuumpumpung zu öffnen. Sobald der
Druck sinkt, steigt die Spannung erneut an und kann das
Vorvakuumventil geschlossen werden.
5. Wenn die Spannung 2 – 3 kV erreicht hat, ist die Steuereinheit auf den Status PROTECT zu schalten. Das System
verfügt auf diese Weise über einen Selbstschutz vor einem Druckanstieg über 1x10
-4
Torr (mbar), wenn die
Pumpe nicht kontrolliert ist. Falls ein solcher Anstieg stattfindet, wird die Steuereinheit automatisch ausgeschaltet.
6. Der Pumpendruck kann auch berechnet werden, indem
die Stromstärke abgelesen wird und der abgelesene Wert
mittels des Druck-Stromstärke-Diagramms im Anhang
“Technical Information” des vorliegenden Handbuches in
einen Druckwert umgerechnet wird.
ANMERKUNG
Die Stufen im Druck-Stromstärke-Diagramm sind charakteristisch für die Funktionsweise des Dual. Wenn die Stromaufnahme der Pumpe ein bestimmtes Ausmaß erreicht, ändert die
Steuereinheit die ausgangsseitige Hochspannung auf einen
niedrigeren Wert ab.
7. Wenn die Pumpe auf den atmosphärischen Druck gebracht wird, ist trockener Stickstoff zu verwenden, um die
Aufnahme von Wasserdampf durch die Pumpenwände zu
verhindern.
,
GEFAHR!
Wenn die Pumpe zur Förderung von giftigen, leicht entflammbaren oder radioaktiven Gasen benutzt wird, sind die für das
jeweilige Gas vorgeschriebenen Vorgänge zu befolgen. Die
Pumpe nie bei Vorhandensein von explosivem Gas benutzen.
,
GEFAHR!
Wenn die Heizung installiert ist, darf die Pumpe während der
Aufheizung und Abkühlung nicht berührt werden. Die hohe
Temperatur kann zu Personenschäden führen.
ACHTUNG!
Keine elektronischen Geräte in die Nähe der Pumpe bringen.
Das darum befindliche Magnetfeld kann zu Funktionsstörungen
der Geräte führen.
WARTUNG
Die Pumpen der Serie VacIon Plus erfordern keine Wartung.
Sämtliche Eingriffe dürfen nur von autorisiertem Personal vorgenommen werden.
,
GEFAHR!
Vor Eingriffen an der Pumpe ist diese von der Hochspannungsquelle zu trennen.
Bei eventueller Verschrottung einer Pumpe ist diese entsprechend der einschlägigen nationalen Vorschriften zu entsorgen.
ENTSORGUNG
Bedeutung des "WEEE" Logos auf den Etiketten
Das folgende Symbol ist in Übereinstimmung mit der EURichtlinie WEEE (Waste Electrical and Electronic Equipment)
angebracht.
Dieses Symbol (nur in den EU-Ländern gültig) zeigt an, dass
das betreffende Produkt nicht zusammen mit Haushaltsmüll
entsorgt werden darf sondern einem speziellen Sammelsystem
zugeführt werden muss.
Der Endabnehmer sollte daher den Lieferanten des Geräts d.h. die Muttergesellschaft oder den Wiederverkäufer - kontaktieren, um den Entsorgungsprozess zu starten, nachdem er die
Verkaufsbedingungen geprüft hat.
4 87-900-106-01(B)
Page 10
INSTRUCTIONS D’UTILISATION
INDICATIONS GÉNÉRALES
Cet appareillage a été conçu en vue d’une utilisation professionnelle. Il est conseillé à l’utilisateur de lire attentivement
cette notice d’instructions ainsi que toute autre indication supplémentaire fournie par Varian avant d’utiliser l’appareil. Varian
décline toute responsabilité en cas de non respect total ou partiel des instructions fournies, d’opérations non autorisées,
d’utilisation impropre par du personnel non formé ou contraires
aux réglementations nationales spécifiques.
Grâce à leur propreté, à leur capacité de pomper tous les types
de gaz, à leur fonctionnement sans vibrations et à l’absence
d’entretien, les pompes de la série Vacion Plus sont des pompes ioniques généralement utilisées pour des applications de
vide ultra poussé.
Les paragraphes suivants fournissent toutes les indications
nécessaires à garantir la sécurité de l'opérateur pendant l'utilisation de l'appareillage. Des renseignements plus détaillés se
trouvent dans l'appendice "Technical Information".
Cette notice utilise les signes conventionnels suivants:
,
DANGER!
Les messages de danger attirent l'attention de l'opérateur sur
une procédure ou une manoeuvre spéciale dont la mauvaise
exécution peut provoquer de graves lésions.
INSTALLATION
Ne pas installer et/ou utiliser la pompe dans des milieux exposés à des agents atmosphériques (pluie, gel, neige), à des
poussières, à des gaz de combat ainsi que dans des milieux
explosifs ou à fort risque d'incendie. Pendant le fonctionnement, pour respecter les spécifications techniques déclarées la
température ambiante doit être comprise entre 0°C et +85°C;
ATTENTION!
Les messages d'attention apparaissent avant certaines procédures dont le non respect peut provoquer des dommages irréversibles à l'appareillage.
NOTE
ATTENTION!
Les notes contiennent des renseignements importants, extrapolés du texte.
La pompe doit être conservée scellée avec son tuyan d’entrée
aplati jusqu’à ce qu’elle soit prête à être branchée au système.
PRÉPARATION DE L'INSTALLATION
La pompe est fournie dans un emballage de protection spécial;
si l'on constate des signes d’endommagement imputables au
transport, contacter aussitôt le revendeur local. Pendant l'opération de déballage, veiller tout particulièrement à ne pas laisser tomber la pompe et à ne lui faire subir aucun choc ni
aucune vibration. Ne pas abandonner l'emballage dans la nature. Le matériel est entièrement recyclable et il est conforme à
la directive CEE 85/399 en matière de protection de l'environnement.
NON!
ATTENTION!
En vue d'éviter tout problème de dégazage, ne pas toucher à
mains nues les éléments devant être exposés au vide. Mettre
toujours des gants ou toute autre protection appropriée.
,
DANGER!
Pour éviter toute lésion aux personnes, ne pas brancher la
haute tension à la pompe avant que celle-ci soit installée
dans le système et avant que toutes les brides d’entrées
soient correctement assemblées ou fermées.
NOTE
La pompe ne peut être endommagée si elle reste simplement
exposée à l'atmosphère. Il est quoi qu’il en soit conseillé de ne
pas la retirer de son emballage avant le moment de l'installation, afin d'éviter toute pollution due à la poussière.
5 87-900-106-01(B)
Page 11
INSTRUCTIONS D’UTILISATION
Le fonctionnement de la pompe n'est optimisé que si celle-ci
est utilisée avec l'une des unités de contrôle Varian spécifiques
(Dual, MidiVac ou MiniVac).
ATTENTION!
Lors de l'utilisation des pompes, le respect des normes de sécurité est impérativement subordonné à l'emploi des unités de
contrôle Varian.
La pompe Vacion Plus peut être installée dans toutes les positions. Par facilité elle est généralement montée en position verticale avec bride d’entrée en partie haute. Les pompes peuvent
également être suspendues dans toutes les positions à l’aide
de leur bride d’entrée. Pour plus de détails sur l’installation de
la pompe, consulter l’appendice “Technical information”.
UTILISATION
Toutes les instructions pour le fonctionnement correct de la
pompe Vacion Plus sont fournies dans la notice de l'unité de
contrôle. Il est conseillé de lire attentivement cette notice avant
d'utiliser la pompe. Il est recommandé de porter la pompe à
une pression de 1x10
-4
Torrs (mbars) de façon à obtenir un démarrage plus rapide. Pour ce faire il est préférable de ne pas
utiliser une pompe mécanique scellée à l’huile mais au cas où il
serait nécessaire d’utiliser une telle pompe, il est recommandé
d’introduire un dispositif de retenue le long de la ligne de vide
afin de réduire la pression due aux vapeurs d’eau et d’huile engendrées par la pompe mécanique. Essayer de réduire au minimum le temps où la pompe mécanique est ouverte vers le
système et vers la pompe ionique car ses vapeurs se répandent dans le système à des pressions inférieures à 1x10
-1
Torrs
(mbars) causant une contamination de celui-ci. Dans les systèmes où l’huile doit être complètement absente, il est préférable d’effectuer ladite opération à l’aide d’une pompe Turbo. Des
dépôts hygroscopiques et l’absorption d’hydrogène dans le
composé de titane peuvent provoquer, par effet du vieillissement de la pompe, l’allongement du temps de démarrage. Pendant l’exposition à l’air, le dépôt du composé de titane absorbe
de la vapeur d’eau et cette action a pour conséquence qu’au
démarrage suivant le chauffage de la pompe entraînera la dispersion de la vapeur et d’une partie de l’hydrogène pompée
précédemment ce qui aura pour effet d’allonger le temps de
démarrage.
Procédure d’utilisation
Contrôler que la polarité de l’unité de contrôle soit correcte pour
la pompe: polarité positive pour les pompes Diode et négative
pour les pompes StarCell. Se reporter au manuel correspondant et observer la procédure suivante pour l’utilisation de
la pompe:
1. A l'aide d'une pompe de pré-vide, porter le système à une
pression minimale de démarrage en suivant le tableau de
la page 9 et en fonction du type de pompe ionique.
2. Brancher l’unité de contrôle à une source d’alimentation
appropriée et l’allumer.
3. Contrôler la tension, le courant et la pression. Lorsque la
mise en route est effectuée à une pression de 5x10
-2
Torrs
(mbars) la tension est généralement d’environ 300 - 400
V. Une valeur de courant proche du courant de courtcircuit de l’unité de contrôle révèle l’existence d’une fuite
dans la pompe et dans le système. Au cours de la phase
de démarrage, un accroissement momentané de la pression de pré-vide est normal.
4. Laisser la soupape de pré-vide ouverte pendant le démarrage de la pompe ionique tant qu’une pression de démarrage appropriée n’a pas été atteinte. Si la tension de la
pompe ionique descend après la fermeture de la soupape,
la rouvrir pour un pré-pompage supplémentaire. Dès que
la pression commence à diminuer, la tension augmente à
nouveau et la valve de pré-vide peut être fermée.
5. Lorsque la tension a atteint 2 - 3 kV, mettre l’unité de
contrôle en état de PROTECT. Le système sera ainsi protégé contre toute augmentation de pression au-delà de
1x10
Torrs (mbars) lorsque la pompe n’est pas contrôlée.
Si une telle augmentation devait être enregistrée, l’unité
de contrôle s’éteindrait automatiquement.
6. La pression de la pompe peut également être calculée en
relevant le courant et en convertissant la lecture en pression à l’aide du diagramme pression-courant illustré dans
l’appendice “Technical Information” de ce manuel.
NOTE
Les paliers du diagramme de pression – courant sont une caractéristique du mode de fonctionnement du Dual. Lorsque le
courant absorbé par la pompe atteint des valeurs déterminées,
l'unité de contrôle porte la valeur de haute tension en sortie à
une valeur inférieure.
7. Lorsque l’on porte la pompe à la pression atmosphérique ,
utiliser de l’azote sec de façon à éviter que les parois de la
pompe n’absorbent de la vapeur aqueuse.
,
DANGER!
Lorsque la pompe est utilisée pour le pompage de gaz toxiques, inflammables ou radioactifs, suivre les procédures appropriées à chaque gaz. Ne pas utiliser la pompe en présence
de gaz explosifs.
,
DANGER!
Lorsque le réchauffeur est installé, éviter de toucher la pompe
pendant les opérations de chauffage et de refroidissement. La
température élevée peut provoquer des brûlures.
ATTENTION!
Ne pas approcher de dispositifs électroniques de la pompe. Le
champ magnétique environnant cette dernière peut entraîner
des dysfonctionnements desdits dispositifs.
MAINTENANCE
Les pompes de la série Vacion Plus ne demandent aucun entretien. Toute intervention doit être exécutée par un personnel
agréé.
,
DANGER!
Avant toute intervention sur la pompe, la débrancher de la
haute tension.
En cas de mise au rebut d’une pompe, procéder à son élimination dans le respect des normes nationales en vigueur.
MISE AU REBUT
Signification du logo "WEEE" figurant sur les étiquettes
Le symbole ci-dessous est appliqué conformément à la directive CE nommée "WEEE".
Ce symbole (uniquement valide pour les pays de la Com-
munauté européenne) indique que le produit sur lequel il est
appliqué NE doit PAS être mis au rebut avec les ordures ménagères ou les déchets industriels ordinaires, mais passer par
un système de collecte sélective.
Après avoir vérifié les termes et conditions du contrat de vente,
l’utilisateur final est donc prié de contacter le fournisseur du
dispositif, maison mère ou revendeur, pour mettre en œuvre le
processus de collecte et mise au rebut.
-4
6 87-900-106-01(B)
Page 12
INSTRUCTIONS FOR USE
GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional
information supplied by Varian before operating the equipment.
Varian will not be held responsible for any events occurring due
to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorized interference
with the equipment or any action contrary to that provided for by
specific national standards.
The VacIon Plus series pumps are ion pumps commonly used
to create ultra-high vacuum, due to their cleanliness, ability to
pump different gases, and maintenance- and vibration-free operation.
The following paragraphs contain all the information necessary
to guarantee the safety of the operator when using the equipment. Detailed information is supplied in the appendix "Technical Information".
This manual uses the following standard protocol:
,
WARNING!
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury.
INSTALLATION
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases,
or in explosive environments or those with a high fire risk. During operation, to obtain the specified operation, the ambient
temperature must be between 0 °C and +85 °C.
CAUTION
The caution messages are displayed before procedures which,
if not followed, could cause damage to the equipment.
CAUTION
NOTE
The notes contain important information taken from the text.
The pump should be kept sealed with its pinch-off tube until it is
ready for attachment to the vacuum system.
PREPARATION FOR INSTALLATION
The pump is supplied in a special protective packing. If this
shows signs of damage which may have occurred during transport, contact your local sales office. When unpacking the pump,
be sure not to drop it and avoid any kind of sudden impact or
shock vibration to it. Do not dispose of the packing materials in
an unauthorized manner. The material is 100% recyclable and
complies with EEC Directive 85/399.
NO!
CAUTION
In order to prevent outgassing problems, do not use bare hands
to handle components which will be exposed to vacuum. Always use gloves or other appropriate protection.
,
WARNING!
NOTE
To avoid injury, never connect the high voltage to the pump
before it is installed into the system and all the inlet flanges
are properly connected or blanked off.
Normal exposure to the environment cannot damage the pump.
Nevertheless, it is advisable to keep it closed until it is installed
in the system, thus preventing any form of pollution by dust.
7 87-900-106-01(B)
Page 13
INSTRUCTIONS FOR USE
The pump operation is optimized using one of the special Varian controllers (Dual, MidiVac or MiniVac) only.
6. The pressure in the pump can also be determined by read-
ing the current and converting this reading to pressure with
the appropriate pressure versus current graph shown in the
appendix “Technical Information” of this manual.
CAUTION
NOTE
The safety specifications agreement using the pump is guaranteed using the Varian controller only.
The steps on the pressure – current charts are a characteristic
of the Dual step voltage operation. When the current drawn by
the VacIon pump reaches the specified values, the controller
will change the high voltage output to a lower applied voltage.
The VacIon Plus pump can be installed in any position. For
convenience, a pump is usually mounted vertically with the inlet
up. Pumps can be supported by the mounting flange in any position. For detailed information about the pump installation, see
the appendix “Technical Information”.
7. When venting the pump, use dry nitrogen. This will avoid
water vapor absorption on the pump walls.
USE
,
WARNING!
All the instructions for the correct use of the VacIon Plus pumps
are contained in the control unit manual. Read the manual carefully before using the pump. Rough pumping down to 1x10
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal. Do not use the pump in presence of explosive gases.
-4
Torr (mbar) is recommended for the most rapid starting. Roughing with an oil-sealed mechanical pump is not desirable, but
when used, a trap in the roughing line is recommended to reduce pressure due to water vapor and oils from the mechanical
pump. Be careful to minimize the time that the mechanical
pump is open to the system and ion pump, since mechanical
pump vapors will start diffusing into the system at pressures
below 1x10
,
WARNING!
When the heating element is installed, do not touch the pump
during the heating and cooling phases. The high temperature
may cause a serious damage.
-1
Torr (mbar) and cause contamination. In systems
where oils must be completely eliminated, turbopump roughing
pumps should be used. Hygroscopic deposits and hydrogen
absorption into titanium may cause starting times to increase
with age. During exposure to air, the deposits of titanium compound absorb water vapor. In subsequent start ups, pump heating causes release of the water vapor and some previously
pumped hydrogen; thus, the starting time may be lengthened.
CAUTION
Do not put any electronic device near the pump otherwise the
magnetic field around it may cause a device malfunctioning.
MAINTENANCE
Operating procedure
The VacIon Plus series pump does not require any maintenance. Any work performed on the pump must be carried out by
authorized personnel.
Check that the controller HV polarity is correct for the pump:
positive polarity for Diode pumps and negative for StarCell
pumps. Refer to the relevant pump control unit instruction manual and follow the procedure below when operating the pump:
,
WARNING!
1. With a clean roughing pump, establish a minimum starting
pressure in the vacuum system per the table on page 9 for
the type of ion pump.
Before carrying out any work on the pump, disconnect it from
the High Voltage supply.
2. Plug the control unit into a suitable power source and
switch the power ON.
If a pump is to be scrapped, it must be disposed of in accordance with the specific national standards.
3. Observe the voltage, current, and roughing pressure. If
started at 5x10
-2
Torr (mbar), a controller voltage of approximately 300 to 400 volts is typical. A current value near
the short-circuit current of the control unit could indicate
that an unconfined flow discharge exists in the pump and
system. A temporary rise in roughing pressure will usually
be noticed during any starting procedure.
DISPOSAL
Meaning of the "WEEE" logo found in labels
The following symbol is applied in accordance with the EC
WEEE (Waste Electrical and Electronic Equipment) Directive.
4. Allow the roughing valve to remain open after turning on the
ion pump until an adequate starting pressure is reached. If
the ion pump voltage drops after closing the roughing
valves, reopen the valve for additional rough pumping. As
the pressure decreases, the voltage again will rise, and the
roughing valve may be closed.
This symbol (valid only in countries of the European Com-
munity) indicates that the product it applies to must NOT be
disposed of together with ordinary domestic or industrial waste
but must be sent to a differentiated waste collection system.
The end user is therefore invited to contact the supplier of the
device, whether the Parent Company or a retailer, to initiate the
collection and disposal process after checking the contractual
terms and conditions of sale.
5. When the voltage has increased to 2-3 kV, place the control
unit in the PROTECT condition. The system is now automatically protected against pressure increases to 10
-4
Torr
(mbar) when the pump is left unattended. If such an increase should occur, the control unit will be turned off
automatically.
8 87-900-106-01(B)
Page 14
TECHNICAL INFORMATION
DESCRIPTION OF THE VACION PUMP
The Varian VacIon Plus 20 pumps are ion pumps
and are available in three types:
• StarCell
• Noble Diode
• Diode
They operate in the pressure range from 10
-2
to
below 10
-11
Torr (mbar). Virtually all gases and vapors can be pumped successfully with the ion
pump. The pumping speed will vary depending on
the system pressure, the gas type, and the applied
operating voltage. The latter can be optimized using Varian controllers to achieve the lowest possible operating pressure.
The VacIon Plus StarCell pumps allow starting
from as high as 5x10
-2
Torr (6.6x10-2 mbar), because ions are prevented from bombarding the
system and pump walls at starting pressures, and
have high speed for inert gases. The VacIon Plus
Diode and Noble Diode pumps require a lower
starting pressure (i.e. 10
-3
Torr (mbar)). The Diode
contains more titanium than triode pumps, and
thus has a higher hydrogen capacity and longer
life.
The tantalum in the Noble Diode pump enhances
the noble gas pumping capacity, although it
somewhat reduces the high getterable gas pumping speed that the standard diode pump provides.
The VacIon Plus StarCell is the latest version of
this pump. Its patented design makes this ion
pump the only one that can handle a high amount
of Noble Gases (equal or better than Noble Diode)
and Hydrogen (comparable to the Diode).
A positive polarity, high voltage supply is required
to operate Diode and Noble Diode pumps. A negative polarity high voltage supply is required to operate StarCell pump since the anode is grounded
and the cathode is held at negative potential.
The pump can operate in any position and can be
supported on the mounting flange. The inlet ConFlat flange is a 2 3/4” (NW 35).
Fig. 1 shows the VacIon Plus 20 pump, Fig. 2
shows the main assemblies of the pump.
Fig. 1 - VacIon Plus 20 pump
Fig. 2 - Pump main assemblies
TECHNICAL SPECIFICATION
The following table details the main technical
specifications of the VacIon Plus 20 pumps.
MODEL
SPECIFICATION
STARCELL
NOBLE
DIODE
DIODE
Nominal pumping
speed for Nitrogen
(*) (l/s)
20 22 27
Operating life at
1x10
-6
mbar (hours)
80,000 50,000 50,000
Operating voltage
(max)
-7000 Vdc
+/- 10%
+7000 Vdc
+/- 10%
Max starting current 150 mA
Max baking current 10 mA
Protect current 20 mA
Maximum starting
pressure (mbar)
≤5x10
-2
≤1x10
-3
Ultimate pressure Below 10
-11
Inlet flange 2 3/4” CFF (NW 35) AISI 304 ESR SST
Internal volume (litres)
0.9
Maximum baking
temperature (°C)
350
Temperature limits
(°C): Pump
Magnet (ferrite)
Flange
400
350
500
Material: Body AISI 304 SST
Cathode Titanium Titanium/
Tantalum
Titanium
Anode AISI 304 SST
Magnet Ferrite or Sm-Co
Weight, lbs (kg)
with ferrite magnet
with Sm-Co magnet
7 (11)
5 (8)
(*) Tested according to ISO/DIS 3556-1-1992
Figures 3 to 10 show the pumping speed vs pressure diagrams for saturated and unsaturated
pumps and the pressure vs current diagrams for
the same pump. The diagrams are for pumps controlled by means of a Dual controller.
9 87-900-106-01(B)
Page 15
TECHNICAL INFORMATION
The pumping speed of a newly regenerated (i.e.
baked) sputter ion pump decreases during operation until it reaches a stabilized level known as
"saturation" (nominal pumping speed). To saturate
the VacIon Plus 20 pump, it normally requires an
amount of gas equal to 0.6 Torr-litres (mbar-litres).
Consequently, pumps can operate for extended
periods of time at low pressures in the nonsaturated state, if they are properly conditioned.
VACION PLUS 20 STARCELL
Fig. 3 - Pumping speed vs pressure for Nitrogen
Fig. 4 - Pumping speed vs pressure for Argon
Fig. 5 - Pressure vs current diagram
10 87-900-106-01(B)
Page 16
TECHNICAL INFORMATION
VACION PLUS 20 NOBLE DIODE
Fig. 6 - Pumping speed vs pressure for Nitrogen
Fig. 7 - Pumping speed vs pressure for Argon
Fig. 8 - Pressure vs current diagram
11 87-900-106-01(B)
Page 17
TECHNICAL INFORMATION
VACION PLUS 20 DIODE
Fig. 9 - Pumping speed vs pressure for Nitrogen
Fig. 10 - Pressure vs current diagram
OUTLINE DRAWING
The following figure shows the outline drawing for the VacIon Plus pump.
Fig. 11 - VacIon Plus pump outline drawing
12 87-900-106-01(B)
Page 18
TECHNICAL INFORMATION
STRAY MAGNETIC FIELD
Curves of stray magnetic field strength along the centre line of the pump and in the plane of the flange as a
function of distance from the pump are shown in Figs. 13, 14 and 15.
Fig. 12 - VacIon Plus pump axis identification
Fig. 13 - Stray magnetic field along X axis
Fig. 14 - Stray magnetic field along Y axis
Fig. 15 - Stray magnetic field along Z axis
13 87-900-106-01(B)
Page 19
TECHNICAL INFORMATION
VACION PLUS PUMP INSTALLATION
Inspection procedure
VacIon Plus pumps are evacuated, baked out,
sealed and leak-checked at below 1x10
-10
Torr
(mbar) or below prior to shipping. The following
information and procedures can be used to establish the vacuum integrity of a VacIon Plus pump
before installation.
Visual inspection
Inspect the pump and magnet for physical damage
which may have occurred during shipment. Inspect
the pinch-off seal. If it is open, the pump is at atmospheric pressure.
,
WARNING!
The pinch-off seal is extremely sharp. Be careful.
A VacIon Plus pump that has been exposed to atmosphere during shipment, or while in storage, will
operate properly if it has otherwise not been damaged.
The pump is not harmed by such exposure, although it is good practice to keep it under vacuum
when not in use to exclude dust and the accumulation of water vapor from the environment.
Vacuum evaluation
The ion pump is shipped in an evacuated condition. Before removing the shipping flange for installation on a vacuum system, it is recommended
that the pump be started briefly to verify vacuum
integrity and proper operation.
To verify the vacuum integrity of the new pump before venting:
1. Connect the pump to the control unit as di-
rected in the instruction manual of the control
unit.
,
WARNING!
The high voltage which is present in the ion pump
from the control unit can cause severe injury or
death.
2. With the main power switch in the OFF posi-
tion, plug the control unit into a suitable power
source.
3. Turn the power to ON.
4. Observe the reading for an indication of one of
the following conditions:
− If the pump is free of leaks and is at a low
pressure, the pressure indication shall within
10 minutes fall to or below the 10
-8
Torr
(mbar) range as the volume of gas is
pumped.
− If the pressure inside the pump is at or near
atmospheric level, an arc may strike inside
the high voltage feedthrough giving a popping sound and the pump current will fluctuate. If this occurs, turn the power OFF
immediately.
5. If the vacuum integrity has been lost, the pump
should be leak-checked with a mass spectrometer leak detector before installation on the
system.
Short circuits
If there is a short circuit between the anode and
cathodes in the pump (or cathode to pump body),
the short-circuit current of the control unit will be
drawn and low voltage will be indicated. If a short
circuit exists in the control unit or high voltage cable and connector, low voltage will also be observed when the high voltage connector is
disconnected from the pump (refer to the control
unit manuals). An ohm meter reading on the pump
feedthrough may not be effective in finding a short.
Short circuits may be caused by mechanical shock
to the pump. If the pump is shorted, contact Varian.
TYPICAL INSTALLATION
A typical installation is shown in Fig. 16 and consists of:
1. VacIon Plus pump.
2. A Valve to seal off the pump from the rest of
the system (if required).
3. The control unit.
4. A clean roughing pump (i.e. turbo).
5. A thermocouple gauge capable of indicating
pressure from atmosphere to 10
-3
Torr/mbar
range.
6. A valve to seal off the roughing pump from the
vacuum chamber. Roughing lines, are usually
made of stainless steel or copper tubing, or
other low vapour pressure material.
7. High voltage cable.
8. Backing pump (diaphragm or scroll).
14 87-900-106-01(B)
Page 20
TECHNICAL INFORMATION
Fig. 16 - Typical installation
INLET FLANGE CONNECTION
The pump should be mounted allowing a sufficient
clearance for installation and removal of the high
voltage connector.
To achieve good performance of the ion pump at
low vacuum pressure, it is critical that atmospheric
pollution and dust must not enter the pump during
venting. This type of contamination will not be removed by the standard high temperature bake
procedure and may degrade ion pump performance. The pump should be kept sealed with its
pinch-off tubulation until it is ready for attachment
to the vacuum system. Before venting the pump,
consult the inspection procedure (see preceding
paragraph).
Vent the ion pump by opening the pinch-off tubulation in a clean area free from smog, dust, pollen,
etc. Venting with dry nitrogen gas is further recommended. This can be done by placing a clean
polyethylene bag over the ion pump flange. Small
pumps can be placed inside of the bag. Purge the
bag with clean, dry nitrogen for several minutes,
then reach into the bag and release the internal
vacuum using pliers to open the copper tube
pinch-off.
CAUTION
Do not open the pinch off-seal with a saw or
grinder. These methods will cause metal particles
to be drawn into the pump by the inrushing air as
the pump is opened.
,
WARNING!
The pinch-off seal is extremely sharp. Be careful
when opening. Watch your fingers.
Use appropriate procedures to maintain the clean
condition of the pump and vacuum system.
Unscrew the main flange bolts. Remove the ConFlat flange and the copper gasket plate. Some particles of copper oxide may adhere to the outer
edge of the flange gasket. Be careful not to allow
them or any other foreign materials to fall into the
pump.
Connect the ion pump to the vacuum chamber
with a short length and large diameter tubulation in
order to retain as much pumping speed as possible. Proceed as follows:
1. Inspect the mating flanges for cleanliness and
absence of scratches on the knife edge.
2. Place a new copper gasket between pump
flange and vacuum chamber flange.
3. Bolt mating flanges of the pump to the chamber
with the screws provided with the ion pump.
For flanges over NW 35 (2.75" o.d.) also mount
washers below the nuts and screw heads.
NOTE
Lubrication is essential to prevent galling of the nut
and screw after bakeout.
15 87-900-106-01(B)
Page 21
TECHNICAL INFORMATION
4. Use silver-plated screws or apply high temperature lubricant to the screw threads. Lubrication simplifies sealing and disassembly. A
recommended lubricant is Fel-Pro C-100.
5. Attach the nuts and tighten each one to 4.5 - 8
ft.-lbs (0.6 - 1.1 Kgm) of torque. After tightening
a nut, always tighten the opposite nut with respect to the center of the flange. This will partially close the gap between the flange faces.
6. Repeat the sequential tightening for two more
cycles.
7. Continue tightening the bolts until the flange
faces meet and a pronounced increase in
torque is felt.
Note that it’s not possible to install the screws from
the lower side, but only from the upper side of the
flange. To allow complete flexibility in the installation, a stud mounting kit is available (see Fig. 17).
For ordering information refer to the “VacIon Plus
pump replacement parts and accessories” paragraph.
Fig. 17 - Stud mounting kit
CONTROL UNIT CONNECTION
,
WARNING!
The high voltage present in the high voltage cable
which connects the control unit to the ion pump,
can cause severe injury or death. Before mounting
the high voltage connector of the cable on the
pump high voltage feedthrough, or before removing it, be sure the main power is removed from the
control unit.
To avoid injury, never connect the high voltage to
the pump before it is installed into the system and
all the inlet flanges are properly connected or
blanked off.
,
WARNING!
Before removing the high voltage connector of the
cable from the control unit, be sure the main power
is removed from the control unit. Wait at least 10
seconds after removing the main power from the
control unit, to allow capacitors to discharge completely.
To disconnect the coaxial high voltage cable from
the controller, slide the safety locking sleeve (very
little sleeve travel is required) from the control unit
and at the same time pull on the male end of the
cable connector to remove it from the socket on
the control unit.
SAFETY INTERLOCK
The VacIon Plus pump feedthrough in conjunction
with the cable P/N 929-0705, when used with the
Varian MidiVac and DUAL control units, allows the
operation of the “High Voltage Cable Safety Interlock” feature.
When the high voltage cable connector is disconnected from the VacIon Plus pump feedthrough,
the high voltage is automatically switched off by
the control unit
HEATER INSTALLATION
The heating element is a coaxial resistance heater
shaped to fit the bottom of the pump body.
To install the element proceed as follows (Fig. 18):
1. Disassemble the red cover by loosening the
two screws;
2. Remove the pump from the magnet;
,
WARNING!
If some shock occur to the magnet assembly,
when the pump is removed, the magnets can attract each other with the possibility of trapping fingers, shattering the magnets or damaging the
equipment.
In order to avoid this insert a piece of wood or
plastic in place of the pump body to keep the
magnets separated.
3. Install the heater around the pump body;
4. Reinstall the pump body and the red cover.
16 87-900-106-01(B)
Page 22
TECHNICAL INFORMATION
Fig. 18 - Heater element mounting
(cover removed)
HEATER REPLACEMENT
To replace the pump heaters, first remove the
faulty heater following, in the reverse order, the instructions of the paragraph “HEATER
INSTALLATION”, and then reassembly the new
heater following the instructions of the above mentioned paragraph.
BAKEOUT OPERATION
When a VacIon pump does not reach the desired
base pressure, and there are no leaks, it is necessary to bake the system. This is done by heating
the pump and all the components in the system,
and is generally required to achieve base pressures less than 10
-8
Torr (mbar).
1. Heat the pump body and the system with a
bakeout oven unit or heating strips to temperatures between 150 °C and 250 °C (250 °C is
the maximum allowable for most bakeable high
voltage cables). This temperature is high
enough to degas the pump surfaces of water
vapor without damaging the magnet and high
voltage connector. Note that the system components must be compatible with the bakeout
temperature. The heating must be approximately even on all surfaces or evaporated water will condence on the colder surfaces
resulting in an incomplete bake and preventing
achievement of UHV vacuum pressure.
2. Leave the pump control unit on and monitor the
pressure. Varian recommends that current during bake not exceed 10 mA; if this value is exceeded, turn the bakeout off and then on again
when low pressure is restored. To control the
heaters and to monitor the high pressure limit
during bakeout, an automatically controlled relay may be used.
3. Bake the VacIon Plus pump for at least 24
hours. Longer bakeout periods are recommended when the pump has been used with
heavy gas loads or when UHV pressure, 10
-9
Torr (mbar) or less is desired.
4. As the pump and system cool down to room
temperature, a drop in pressure should be observed.
Note that the ion pump can be also baked when
switched off, into an external turbo pump through a
bakeable isolation valve. This method gives the
best vacuum performance.
Bakeout of VacIon pump with the integral
heaters
1. The integral heaters are to be powered with the
appropriate voltage. (Please refer to the
inscription on the heaters to apply correct voltage).
2. The integral heaters are designed to provide a
temperature of 250 °C to 300 °C when the
pump is wrapped in a 3-fold aluminum foil.
NOTE
A three-layer foil wrapping is advisable and sufficient to achieve full bakeout/regeneration if the
standard European heaters (220 Vac) are operated at 240 Vac, thus preventing overheating.
3. Bakeout the VacIon pump for 24 hours. If the
pump is used in heavy gas load applications, it
is recommended to bakeout the pump for a
longer period.
4. Wait until the pump cools down to room temperature and recovers its base pressure before
using it in the application.
,
WARNING!
Do not touch the pump during the heating and
cooling phases. The high temperature may cause
serious damage.
OPERATING PROCEDURE
1. Using a clean roughing pump, evacuate the
system to a minimum starting pressure per the
charts on pages from 10 to 12 for the type of
ion pump. 10
-4
Torr (mbar) or less is recommended. A turbo-molecular roughing pump is
recommended.
2. When starting an ion pump, a slight increase
in vacuum pressure is normal as the internal
components are heated and outgassed. If
possible leave the roughing pump connected
to the system while starting the ion pump. This
will make the startup faster and easier.
3. Connect the control unit to a suitable power
source and switch the power on.
4. Switch on high voltage to the pump and observe the current and voltage. Fastest starting
is obtained using a high applied voltage, 7 kilovolts for example. The applied voltage may be
17 87-900-106-01(B)
Page 23
TECHNICAL INFORMATION
be reduced later to optimize pumping and
achieve the lowest vacuum pressure.
5. If started at 10
-4
Torr (mbar) the voltage will
start at approximately 800 volts and increase
to full voltage as the pump starts operating.
The current will start at several milliamps and
slowly decrease to microamps or nanoamps
as low vacuum pressure is achieved.
6. When first starting the pump, if the voltage decreases instead of increasing, reduce the vacuum pressure then start the ion pump again.
7. When the pump reaches its full operating voltage, you may close the roughing valve.
8. If the pump does not start after 30 minutes of
pumping, see the section PUMP
TROUBLESHOOTING.
9. Once the pump reaches its base pressure with
stable voltage and current, the ion pump may
be baked at high temperature if required per
the section titled BAKEOUT OPERATION.
10. To stop the ion pump, simply switch off the
high voltage. The pump surfaces will continue
to pump for a few minutes de
pending on the
system pressure.
11. When venting the pump use clean,
dry nitro-
gen. This will avoid water absorption on the
pump surfaces and make subsequent pump
do
wns easier.
MAINTENANCE
,
WARNING!
The high voltage present in the high voltage cable
which connects the control unit to the ion pump,
can cause severe injury or death. Before mounting
the high voltage connector of the cable on the
pump high voltage feedthrough, or before removing it, be sure the main power is removed from the
control unit.
Before removing the high voltage connector of the
cable from the control unit, be sure the main power
is removed from the control unit. Wait at least 10
seconds after removing the main power from the
control unit, to allow capacitors to discharge completely.
VacIon Plus pumps are maintenance free. In case
of life time expiry or premature failure of the pump,
please contact your nearest Varian sales/service
office for repair.
The VacIon Plus 20 pumps are designed with exchangeable high-voltage feedthrough and pump
elements.
Exchange of the high voltage feedthrough.
CAUTION
The high voltage feedthrough contains a ceramic
insulator that can be damaged if excessive force is
applied in torque, in bending, or in tension. When
installing or removing the feedthrough, the applied
torque should not exceed 2 Nm. Rotate the
feedthrough gently when making the threaded
connection to avoid excessive force.
1. Remove the 6 bolts of the Mini-ConFlat flange
connection (see Fig. 19).
2. Remove the cable connection disc.
3. Gently relieve the feedthrough from the metal
gasket connection and turn the feedthrough
counterclockwise until it is completely detached
from the internal high voltage threaded connection.
4. Replace the feedthrough and the copper gasket, making sure that the feedthrough is connected to the pumps internal connector. Check
that the feedthrough is not shorted.
5. Bake out the pump while it is operating, and
leave it to cool down; then verify that the base
pressure is below 10
-9
Torr (mbar).
Fig. 19 - High voltage feedthrough connection
18 87-900-106-01(B)
Page 24
TECHNICAL INFORMATION
Leakage current check
If the pump current reading is to be used as pressure measurement, check the pump leakage currents as follows:
1. Turn off the pump control unit.
2. Remove the pump magnet.
3. Turn on the pump control unit and wait for current stabilization. The current reading should
not be higher than 10 nA at 3 kV. Make sure
that the control unit and the high voltage cable
leakage current is negligible.
4. If leakage current comes from the pump, perform "high-potting" per the following procedure;
then recheck the pump and install the magnet.
5. If it is not possible to "high-pot" the pump, the
pressure reading is biased by the leakage current value.
High-potting
A constant pump current when no vacuum leak
exists is often caused by field emission currents
which prevent the use of the pump current as a
UHV pressure indicator. To reduce this field emission current, "high potting" should be performed.
"High potting" is the term used to describe the application of higher than normal operating voltage
(10-12 KV, 20-50 mA) for the purpose of burning
off "whiskers" (sharp edges) on the pump cathode.
High potting should be done under vacuum and
preferably without pump magnets installed (to reduce the drawn current).
The output of an appropriately sized AC transformer (i.e. neon sign type) may be applied to the
pump. High-potting should be done carefully and
in voltage steps since uncontrolled arcing inside
the pump can cause permanent damage. Slowly
increase the applied voltage and watch the current
meter for indication of arcing inside the pump as
whiskers are burned away. If arcing occurs wait at
this voltage until the current is stable again. Then
slowly increase voltage again in steps up to a
maximum of 12 kV. The current should never exceed 50 mA.
,
WARNING!
Voltages developed in the High Potter power supply are potentially lethal. Use caution during operation and ensure correct grounding connection.
19 87-900-106-01(B)
Page 25
TECHNICAL INFORMATION
PUMP TROUBLESHOOTING
SYMPTOM POSSIBLE CAUSE CORRECTION PROCEDURE
Reduce pressure to 10-5 Torr recommended 10
-4
Torr minimum.
1) – Slow starting Starting vacuum pressure too high.
2) – Slow starting (more than 30
minutes).
Air leaks which limit pressure to
above 10
-6
Torr (mbar) and cause
longer starting time.
Leak check the vacuum system
with a helium leak detector.
3) – Slow pump-down due to long
exposure of viton parts to air.
Viton releases considerable gas
after long exposure to air.
(A bell-jar system which reached
1.5 x 10
-8
Torr (2 x 10-8 mbar) in 24
hours after 30 minutes air exposure, will only reach 7.5 x 10
-8
Torr
(1 x 10
-7
mbar) in 24 hours after 20
hours air exposure).
With the system under vacuum,
pump for several days, or heat to
100-150°C for up to 15 hours.
4) – Slow pump-down due to absorption of vapours on pump and
system walls.
Vapours and gases admitted to a
system are absorbed on the walls
of the system and pump. Subsequent reduction in pressure depends on the rate of depletion of
this vapour. Heavy hydrocarbons
are most troublesome because of
their relative low vapour pressure
and they are very difficult to remove, even by baking.
Bake the system walls, thereby
accelerating the desorption process. Baking mobilizes the vapours
so they can be cracked and
pumped by discharge (see para.
“BAKEOUT OPERATION”).
5) – Slow starting or slow pumpdown.
High voltage feedthrough is leaking.
Replace the feedthrough.
6) – Current higher than expected
at any given pressure.
Ion pump leakage current causing
higher pressure reading.
Highpot the pump.
7) – System fails to achieve desired UHV vacuum pressure.
System not fully baked. Water vapour limits base pressure.
Bake the system walls, thereby
accelerating the desorption process. Baking mobilizes the vapours
so they can be cracked and
pumped by discharge (see para.
“BAKEOUT OPERATION”).
8) – System fails to achieve desired UHV vacuum pressure.
System not appropriately cleaned
for UHV. Excessive outgassing
from walls limits base pressure.
Clean all components for UHV and
bake the system again.
20 87-900-106-01(B)
Page 26
TECHNICAL INFORMATION
VACION PLUS PUMP REPLACEMENT PARTS AND ACCESSORIES
PART NUMBER
STARCELL
with Sm-Co
magnets
DIODE
NOBLE
DIODE
STARCELL
Basic pump 919-1115 919-1125 919-1145 919-1146
Cables and accessories
HV radiation resistant cable with interlock 929-0705
Replacement parts
HV Feedthrough 959-5125
Pump without magnets 919-1114 919-1124 919-1144
Ferrite magnets 919-0040 919-0039 919-0035 --
Samarium-Cobalt magnets -- -- -- 919-0036
Heaters (120V)
(220V)
919-0044
919-0043
Copper gasket for 2 3/4” inlet flange
(10-pack, individually sealed)
FG-0275-CI
Nut and bolt set for 2 3/4" inlet flange,
1/4 – 28 x 1 1/4 (25-pack)
FB-0275-C12
Copper gasket for 1 1/3" CF feedthrough
flange (10-pack, individually sealed)
FG-0133-CI
Nut and bolt set for 1 1/3" CF feedthrough
flange, 8-32x3/4 (25-pack)
FB-0133-C
For a complete overview of Varian's extensive vacuum product line, please refer to the Varian Vacuum Catalogue.
21 87-900-106-01(B)
Page 27
TECHNICAL INFORMATION
VACION PLUS PUMP CONTROLLER
CONTROLLER MODEL PART NUMBER
Dual
Dual (base configuration): 120 Vac 1 Neg
120 Vac 2 Neg
120 Vac 1 Pos
120 Vac 2 Pos
230 Vac 1 Neg
230 Vac 2 Neg
230 Vac 1 Pos
230 Vac 2 Pos
929-7000
929-7001
929-7002
929-7003
929-7004
929-7005
929-7006
929-7007
Dual with RS 232: 120 Vac 1 Neg
120 Vac 2 Neg
120 Vac 1 Pos
120 Vac 2 Pos
230 Vac 1 Neg
230 Vac 2 Neg
230 Vac 1 Pos
230 Vac 2 Pos
929-7008
929-7009
929-7010
929-7011
929-7012
929-7013
929-7014
929-7015
MidiVac
120 Vac with single output
120 Vac with double output
230 Vac with single output
230 Vac with double output
929-5001
929-5005
929-5003
929-5007
MiniVac
MiniVac 120 Vac
220 Vac
24 Vdc
929-0191
929-0290
929-0196
MiniLink 120 Vac
220 Vac
929-0300
929-0301
Please refer to the Varian Vacuum Catalogue to choose the correct controller.
22 87-900-106-01(B)
Page 28
Request for Return
1. A Return Authorization Number (RA#) WILL NOT be issued until this Request for Return is completely filled out,
signed and returned to Varian Customer Service.
2. Return shipments shall be made in compliance with local and international Shipping Regulations (IATA, DOT, UN).
3. The customer is expected to take the following actions to ensure the
Safety
of workers at Varian: (a) Drain any oils or
other liquids, (b) Purge or flush all gasses, (c) Wipe off any excess residues in or on the equipment, (d) Package the
equipment to prevent shipping damage, (for Advance Exchanges please use packing material from replacement unit).
4. Make sure the shipping documents clearly show the RA# and then return the package to the Varian location nearest you.
North and South America
Varian Vacuum Technologies
121 Hartwell Ave
Lexington, MA 02421
Phone : +1 781 8617200
Fax: +1 781 8609252
Europe and Middle East
Varian SpA
Via Flli Varian 54
10040 Leini (TO) – ITALY
Phone: +39 011 9979111
Fax: +39 011 9979330
Asia and ROW
Varian Vacuum Technologies
Local Office
CUSTOMER INFORMATION
Company name: ..………………….……..……………….………………………………..……………………...…………..….
Contact person: Name: ……………………………………..… Tel: ……………………….…...…………….….…....
Fax: …………………………….…...…..…… E-Mail: ..……………………..…………..…..…..…..
Ship Method: …………….……....…… Shipping Collect #: ………….…..………… P.O.#: ………………….…......………..
Europe only: VAT reg. Number: ………………..……………... USA only: Taxable Non-taxable
Customer Ship To: ………………………….……… Customer Bill To: …………………..……………...
……………..…………………... ..………………………………...
………………..………………... ..………………………………...
PRODUCT IDENTIFICATION
Product Description Varian P/N Varian S/N Purchase Reference
TYPE OF RETURN (check appropriate box)
Paid Exchange Paid Repair
Warranty Exchange
Warranty Repair
Loaner Return
Credit Shipping Error
Evaluation Return
Calibration
Other ……………….
HEALTH and SAFETY CERTIFICATION
Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or
RADIOACTIVITY. Call Varian Customer Service to discuss alternatives if this requirement presents a problem.
The equipment listed above (check one):
HAS NOT
been exposed to any toxic or hazardous materials
OR
HAS
been exposed to any toxic or hazardous materials. In case of this selection, check boxes for any materials that
equipment was exposed to, check all categories that apply:
Toxic Corrosive Reactive Flammable Explosive Biological Radioactive
List all toxic or hazardous materials. Include product name, chemical name and chemical symbol or formula.
.……………………………………………………………………………………………………………………..
Print Name: …………………………………. Customer Authorized Signature: ……………...…………………….
Print Title: …………………………………... Date: ..…../..…../……
NOTE:
If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed,
the customer
will be held responsible
for all costs incurred to ensure the safe handling of the product, and
is liable
for any harm or injury to Varian
employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
Do not write below this line
Notification (RA)#: ……………………….……….. Customer ID#: ……….…………. Equipment #: ……………………..
Page 29
Request for Return
FAILURE REPORT
TURBO PUMPS and TURBOCONTROLLERS
POSITION PARAMETERS
Does not start
Noise
Vertical
Power: Rotational Speed:
Does not spin freely
Vibrations
Horizontal
Current: Inlet Pressure:
Does not reach full speed
Leak
Upside-down
Temp 1: Foreline Pressure:
Mechanical Contact
Overtemperature Other: Temp 2: Purge flow:
Cooling defective …………………. OPERATION TIME:
TURBOCONTROLLER ERROR MESSAGE:
ION PUMPS/CONTROLLERS VALVES/COMPONENTS
Bad feedthrough
Poor vacuum
Main seal leak
Bellows leak
Vacuum leak
High voltage problem
Solenoid failure
Damaged flange
Error code on display
Other
Damaged sealing area
Other
Customer application:
Customer application:
LEAK DETECTORS INSTRUMENTS
Cannot calibrate
No zero/high backround
Gauge tube not working Display problem
Vacuum system unstable
Cannot reach test mode
Communication failure
Degas not working
Failed to start
Other
Error code on display
Other
Customer application:
Customer application:
PRIMARY PUMPS DIFFUSION PUMPS
Pump doesn’t start
Noisy pump (describe)
Heater failure
Electrical problem
Doesn’t reach vacuum
Over temperature
Doesn’t reach vacuum
Cooling coil damage
Pump seized
Other
Vacuum leak
Other
Customer application:
Customer application:
FAILURE DESCRIPTION
(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
NOTA: Su richiesta questo documento è disponibile anche in Tedesco, Italiano e Francese.
REMARQUE : Sur demande ce document est également disponible en allemand, italien et français.
HINWEIS: Auf Aufrage ist diese Unterlage auch auf Deutsch, Italienisch und Französisch erhältlich.
Page 30
Sales and Service Offices
France and Benelux
Varian s.a.
7 Avenue des Tropiques
Z.A. de Courtaboeuf - B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: (33) 1 69 86 38 84
Fax: (33) 1 69 86 29 88
From Benelux Tel: (31) 118 67 15 70
From Benelux Fax: (31) 118 67 15 69
Canada
Central coordination through:
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free # 1 (800) 882 7426
China
Varian Technologies - Beijing
Rm 1648 Central Tower South Wing
Beijing Junefield Plaza
No. 10 XuanWuMenWai Street
Beijing 100052
P.R. China
Tel: (86) 10 63108550
Fax: (86) 10 63100141
Toll Free: 800 820 6556
Germany and Austria
Varian Deutschland GmbH
Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: (49) 6151 703 353
Fax: (49) 6151 703 302
India
Varian India PVT LTD
101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: (91) 11 28521171
Fax: (91) 11 28521173
Italy
Varian Inc.
Vacuum Technologies
Via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9 111
Fax: (39) 011 997 9 350
03/06
Japan
Varian Vacuum Technologies
Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: (81) 3 5232 1253
Fax: (81) 3 5232 1263
Toll Free: 0120 655 040
Korea
Varian Technologies Korea, Ltd
Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: (82) 2 3452 2452
Fax: (82) 2 3452 2451
Toll Free: 080 222 2452
Mexico
Varian, S. de R.L. de C.V.
Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: (52) 5 523 9465
Fax: (52) 5 523 9472
Taiwan
Varian Technologies Asia Ltd.
14F-6, No.77, Hsin Tai Wu Rd., Sec. 1
Hsi chih, Taipei Hsien
Taiwan, R.O.C.
Tel: (886) 2 2698 9555
Fax: (886) 2 2698 9678
Toll Free: 0800 051342
UK and Ireland
Varian Ltd.
6 Mead Road
Oxford Industrial Park - Yarnton
Oxford OX5 1QU - England
Tel: (44) 1865 291570
Fax: (44) 1865 291571
United States
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Other Countries
Varian Inc.
Vacuum Technologies
Via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9 111
Fax: (39) 011 997 9 350
Customer Support & Service:
North America
Toll-Free: 1 800 882 7426
vtl.technical.support@varianinc.com
Europe
Tel: 00 800 234 234 00
vtt.technical.support@varianinc.com
China
Toll-Free: 800 820 8266
vtc.technical.support@varianinc.com
Japan
Toll-Free: 0120 655 040
vtj.technical.support@varianinc.com
Korea
Toll-Free: 080 222 2452
vtk.technical.support@varianinc.com
Taiwan
Toll-Free: 0 800 051 342
vtw.technical.support@varianinc.com
Worldwide Web Site, Catalog
and Order On-line:
www.varianinc.com
Representative in most countries
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