Trek 1100TN User Manual

Trek Model 1100TN
Electrostatic Force
Microscope (EFM)

Electrostatic Voltage Distribution
Measurement System

rek Model

The T

spatial

high

can

EFM
microscope

equal to the

is

100TN Electrostatic Force

1

resolution –

measure voltage distribution

also

when operated under

measured

better

than 10

voltage thus

atmospheric conditions.

preventing

Microscope (EFM) enables voltage

well beyond

µm

– which

is

across a much

arcing between the detector

Key Specifications

!

Voltage Range: ±1 kV

!

Voltage Sensitivity:
Accuracy: Better than 0.5% of full scale

!

Incremental Step: 1 µm, minimum (detector)

!

Detector Tip: 5 µm X 5 µm

!

Measurement Area: 5 mm X 5 mm

!

Better than 100 mV

Typical Applications Include

! Measurement of antistatic bags, Si wafer

! Electrophotography material testing

Photovoltaic materials evaluation

!

MEMS testing

!

rek's

T

larger

distribution

the capability

surface area as compared to a

employs a

EFM

Measurement Sample of the Antistatic Bag (500 µm X 500 µm)

of typical

feedback

the surface

and

measurements with a very

electrostatic voltmeters. T

scanning

detector which

voltage

under

to the

test.

rek's

probe

Features and Benefits

!

Can be used in atmosphere conditions

!

Spatial resolution is better than 10 µm

!

Three measurement modes:

- Static

- Line Profile

- 3D Mapping

TREK, INC. • 190 Walnut Street • Lockport, NY 14094 • USA • 800-FOR TREK

716-438-7555 • 716-201-1804 (fax) • www.trekinc.com • [e-mail]

Features (cont.)

Three Measurement
Modes

Static
Line Profile
3D Mapping

Video Camera

For observing actual point of measurement

Note

DC to bias voltage controlled by PC to surface
test available

Optical System

Laser Unit for
Detecting Cantilever
Distortion

Laser Diode 670 nm with detector photodiode

Observation for
Actual Measurement
Point

Light Source

Green LED

Camera

CCD with 380k pixels

Object Lens

10X lens for 500 µm square under the monitor
camera

Optional Accessories

Photoreceptor Drum
Installation Holder

Contact the factory for the Model Number

Laser System for
Exposure

Contact the factory for the Model Number
Clean Booth

Contact the factory for the Model Number

Additional Information

For additional information, please refer to

“A New Field Nullification Method for Electrostatic Force Microscope

(EFM) for Unknown High Voltage Measurement,”

a paper co-authored by Trek and Nihon University presented at the

Imaging Science & Technology's Digital Printing Technologies

Conference (IS&T/NIP27) on Wednesday, October 5, 2011 during NIP

Track 2 Photoelectronic Imaging Materials and Devices session,

in Minneapolis, Minnesota.

http://www.trekinc.com/pdf/EFMPaper.pdf

Model 1100TN Specifications

Performance

Measurement Range

0 to ±1 kV DC

Spatial Resolution
(Reference to input
voltage with comb­shaped electrode

60% of signal strength for 10 µm width
70% of signal strength for 20 µm width

Separation between
Detector Tip and
Surface Under Test
(Controlled with piezo
stage in Z axis)

Typically 5 µm

Accuracy

Better than 0.5% of full scale

Voltage Sensitivity

Better than 100 mV

Sampling Speed

30 ms to 0.1 ms per data sample

Scanning Area

X and Y Axis

±15 mm with 1 µm resolution

Z Axis Range

0 to 5 mm

Z Axis Piezo Stage

Range

0 to 80 µm with 1 m accuracyµ

Features

Detector (Computer Generated Image)

Copyright © 2012 TREK, INC. All specifications are subject to change. 1229/DEC

TREK Japan K.K. • Sumitomo Aobadai Hills, 10F • 4-7-7-Aobadai, Meguro-ku,Tokyo 153-0042, Japan

585-798-3140 • 585-798-3106 (fax) • www.trekinc.com • [e-mail]

[phone] (tel) • [phone] (fax) • www.trekj.com • [e-mail]

Measurement and Power Solutions

TREK, INC. • 190 Walnut Street • Lockport, NY 14094 • USA • 800-FOR TREK

TM