MAX300 Series
NanoMax 3-Axis Flexure
Stage
User Guide
Original Instructions
HA0094T
MAX300 Series 3-Axis Flexure Stages
Contents
Chaper 1 Overview ..................................................................................................... 1
1.1 Description of the NanoMax 3-Axis Flexure Stage ......................... 1
1.2 Component Identification ..................................................................1
1.2.1 NanoMax Stage ......................................................................................1
1.2.2 Drives and Actuators ...............................................................................3
Chaper 2 Safety .......................................................................................................... 5
2.1 Safety Information ............................................................................. 5
2.2 General Warnings ..............................................................................5
Chaper 3 Operation ....................................................................................................6
3.1 Manual Differential Drives and Differential Micrometer Drives ..... 6
3.1.1 Adjusting Micrometer Drives ...................................................................6
3.1.2 Reading Micrometer Drives ....................................................................6
3.2 Stepper Motor Drives .................................................... ... .................. 6
3.3 Piezo Actuators ................................................................................ 11
Chaper 4 Installation ................................................................................................12
4.1 Unpacking ............................................... ......................................... 12
4.2 Attaching to a Work Surface ........................................ ... ... ............. 12
4.3 Fitting and Removal of Drives ........................................................ 13
4.4 Orienting the Moving Platform .......................................................14
4.5 Mounting Equipment. ........................................... ... ........................ 15
4.6 Transportation. ................................................................................ 15
4.7 Dimensions .......................................................................................16
4.7.1 Top Platform ......................................................................................... 16
4.8 Replacing the Top Platform ............................................................ 17
Chaper 5 Maintenance and Troubleshooting .........................................................18
5.1 Maintenance of Motor Drives .......................................................... 18
5.2 Troubleshooting ...............................................................................18
Chaper 6 Specifications ........................................................................................... 19
6.1 Specifications ...................................................................................19
Chaper 7 Regulatory ................................................................................................ 21
7.1 Declarations Of Conformity ............................................................ 21
7.1.1 For Customers in Europe ...................................................................... 21
7.1.2 For Customers In The USA ...................................................................21
7.2 CE Certificate ................................................................................... 22
Chaper 8 Thorlabs Worldwide Contacts ................................................................ 23
Page 0 10997-D02
Chapter 1 Overview
75 V
SMC connectors
7-pin LEMO connectors
Chapter 1 Overview
1.1 Description of the NanoMax 3-Axis Flexure Stage
The NanoMax 3-axis flexure stage has been designed to integrate seamlessly into the
Thorlabs Modular Electronic System and provide nanometric positioning on three
orthogonal axes. It is suited to the alignment of optical fibres, waveguides,
optoelectronic packages and any other high resolution alignment or positioning
application including general purpose laboratory tasks. The innovative flexure design,
combined with the system of modular drives, offers exceptional performance and
flexibility.
Three types of drive are available, the DRV208 stepper motor drive, the DRV3
differential micrometer and the DRV004 thumbscrew. An external piezo actuator is
also available which increases the piezo travel to 40 µm.
1.2 Component Identification
1.2.1 NanoMax Stage The NanoMax 3-axis flexure stage is available in three versions; piezo-actuated with feedback on all axes, piezo-actuated without feedba ck and without piezo actuation, as shown in Fig. 1.1 to Fig. 1.4.
Fig. 1.1 MAX301 NanoMax piezo-actuated stage with feedback on all axes
Rev 24 Oct 2018
Page 1
MAX300 Series 3-Axis Flexure Stages
75 V
SMC connectors
5
4
3
2
1
7
6
Fig. 1.2 MAX302 NanoMax piezo-actuated stage without feedback
The piezo-actuated models deliver 20 microns of travel, each piezo channel has a
coaxial SMC connector (see Fig. 1.1 and Fig. 1.2). In addition, the MAX30 1 has a 7pin LEMO connector for each feedback channel (see Fig. 1.1). A corresponding
number of leads for connection to the Thorlabs piezoelectric controllers are also
supplied.The piezo-actuated models deliver 20 microns of travel, with a coaxial SMC
connector for each piezo channel.
The pin functions for the Lemo connectorare detailed below.
Pin Description
1 +15 V
2 Oscillator +
30 V
4 Sig Out 5 Sig Out +
6-15 V
7Travel
Fig. 1.3 Feedback Lemo connector pin functions
Page 2 10997-D02
Chapter 1 Overview
Fig. 1.4 MAX303 NanoMax without piezo-actuation
The MAX303 has no electrical connections.
1.2.2 Drives and Actuators There are three types of drive available for the NanoMax, a motorized drive as shown in Fig. 1.5. and two manual drives as shown in Fig. 1.6. In addition, external piezo actuators are available to give an additional 20 µm piezo travel – see Fig. 1.7.
Note
The DRV208 stepper motor drive should be used in conjunction with the BSC20x
series benchtop driver or the MST602 control module.
Fig. 1.5 DRV208 stepper motor drive
Rev 24 Oct 2018
Page 3
MAX300 Series 3-Axis Flexure Stages
DRV3 differential micrometer drive DRV004 thumbscrew drive
DRV120
External piezo actuator
with feedback
Fig. 1.6 Manual Drives
The external piezo actuator can be fitted in-line with the standard drives described on
the previous page. The DRV120 provides an additional 20 µm of piezo travel.
Fig. 1.7 Compatible Piezo Actuators
Page 4 10997-D02
Chapter 2 Safety
Chapter 2 Safety
2.1 Safety Information
For the continuing safety of the operators of this equipment, and the protection of the
equipment itself, the operator should take note of the Warnings, Cautions and Notes
throughout this handbook and, where visible, on the product itself.
The following safety symbols may be used throughout the handbook and on the
equipment itself.
Warning: Risk of Electrical Shock
Given when there is a risk of injury from electrical shock.
Warning
Given when there is a risk of injury to users.
Caution
Given when there is a risk of damage to the product.
Note
Clarification of an instruction or additional information.
2.2 General Warnings
Warning: Risk of Electrical Shock
The piezo actuators in this product use high voltages and up to 75V may be
present at the SMC connectors. This is hazardous and can cause serious
injury. Appropriate care should be taken when using this device.
Persons using the device must understand the hazards associated with using
high voltages and the steps necessary to avoid risk of electrical shock.
Warning
If the device is used in a manner not specified by Thorlabs, the protective
features provided by the product may be impaired. In particular, excessive
moisture may impair operation.
Spillage of fluid, such as sample solutions, should be avoided. If spillage does
occur, clean up immediately using absorbant tissue. Do not allow spilled fluid to
enter the internal mechanism.
Rev 24 Oct 2018
Page 5
MAX300 Series 3-Axis Flexure Stages
fine adjuster (300 μm)
coarse adjuster 4 mm
50 μm per rev
1.0 μm per division
0.5 mm per rev
10.0 μm per division
Chapter 3 Operation
3.1
Manual Differential Drives and Differential Micrometer
3.1.1 Adjusting Micrometer Drives Turn the coarse adjustment clockwise until the platform of the NanoMax begin s to move. By use of the fine adjustment, sub-micron resolution is now achievable.
3.1.2 Reading Micrometer Drives
Drives
Fig. 3.1 Reading micrometer drives
3.2 Stepper Motor Drives
To ensure that a particular stage is driven properly by the system, a number of parameters
must first be set. These parameters relate to the physical characteristics of the stage being
driven (e.g. min and max positions, leadscrew pitch, homing direction etc.).
To assist in setting these parameters correctly, it is possible to associate a specific stage
type and axis with the motor controller channel. Once this association has been made, the
server applies automatically, suitable default parameter values on boot up of the software.
Note
To ensure correct operation, it is important to select the correct stage and axis type
as described above. Selecting an incompatible stage/axis type could result in
reduced velocity and/or resolution, and in the worst case could cause the motor to
run into the end stops or home incorrectly.
Page 6 10997-D02
Chapter 3 Operation
Using Kinesis Software
Caution
The host PC must be running Kinesis v1.14.12 or higher.
1) Ensure that the device is connected to the PC and powered up.
2) Run the Kinesis software - Start/All Programs/Thorlabs/Kinesis/Kinesis.
3) On start-up, the 'Actuator/Startup Settings' window is displayed. This window
allows the correct actuator to be selected.
Rev 24 Oct 2018
Fig. 3.2 Stage Configuration Window
Page 7
MAX300 Series 3-Axis Flexure Stages
4) Select your stage type (e.g. NanoMax 300 X-Axis (DRV208) if you have a
NanoMax stage fitted with DRV208 actuators on the X-axis) as shown in Fig. 3.2.
5) Click OK.
6) The server reads in the stage and controller information automatically.
Refer to the handbook for the associated controller for more information on driving
the actuator/stage.
Note
These stepper motor drives have no forward limit switch and the travel is limited
dependent on the axis to which it is attached. When the DRV208 motors are used
with our Nanomax series stages, suitable defaults are loaded at start up to prevent
the motor being overdriven. If the axis is driven towards the reverse limit switch, at
a certain position the platform stops moving while the drive itself continues to move
until the limit switch is reached. The drive must then be moved positively by a certain
distance before the platform begins to move. This distance is just less than the
offset.
When fitted to other stages or third party optomech products, it is possible that the
motor will reach the mechanical hardstops of the stage before the travel limits of the
actuator. In this case, consideration should be given to creating custom travel limit
settings - see the handbook for the associated motor controller for more information.
When creating a program to control the actuator, it is recommended to avoid running
into the mechanical hard stops.
Page 8 10997-D02
Chapter 3 Operation
Using APT Software
Caution
The host PC must be running APT v3.21.3 or higher.
1) Shut down all applications using the APT server (e.g. APT User or your own
custom application).
2) Run the APT Config utility - Start/All Programs/Thorlabs/APT Config/APT Config.
3) From the 'APT Configuration Utility' window, click the 'Stage' tab.
Fig. 3.3 APT Configuration Utility - Stage Tab
4) In the ‘Motor’ field, select the serial number of the stepper motor controller to be
configured (this number can be found on the rear panel of the controller unit).
5) In the ‘Stage’ field, select your actuator type from the list displayed (e.g. NanoMax
300 X Axis (DRV208)), as shown in Fig. 3.3.
6) Click the 'Add Stage Association' button.
7) A default configuration is set at the factory and stored in the non-volatile memory
of the motor controller. The server reads in the stage and controller information on
Rev 24 Oct 2018
Page 9
MAX300 Series 3-Axis Flexure Stages
start up. Refer to the handbook for the associated controller for more information
on driving the actuator/stage.
Note
These stepper motor drives have no forward limit switch and the travel is limited
dependent on the axis to which it is attached. When the DRV208 motors are used
with our Nanomax series stages, suitable defaults are loaded at start up to prevent
the motor being overdriven. If the axis is driven towards the reverse limit switch, at
a certain position the platform stops moving while the drive itself continues to move
until the limit switch is reached. The drive must then be moved positively by a certain
distance before the platform begins to move. This distance is just less than the
offset.
When fitted to other stages or third party optomech products, it is possible that the
motor will reach the mechanical hardstops of the stage before the travel limits of the
actuator. In this case, consideration should be given to creating custom travel limit
settings - see the handbook for the associated motor controller for more information.
When creating a program to control the actuator, it is recommended to avoid running
into the mechanical hard stops.
Page 10 10997-D02
Chapter 3 Operation
3.3 Piezo Actuators
Warning
The piezo actuators in this product use high voltages and up to 75V may be
present at the SMC connectors. This is hazardous and can cause serious
injury. Appropriate care should be taken when using this device.
Persons using the device must understand the hazards associated with using
high voltages and the steps necessary to avoid risk of electrical shock.
Piezo actuators are used to give nanometric positioning of the top pla tform over a
range of 20 microns (40 µm or 100 µm if external piezo actuators are used). They can
also modulate the position of the platform at high frequency.
On a piezo-actuated NanoMax, position feedback may be incorporated on the l inear
axes to enhance the repeatability and linearity of piezo motion.
The piezo-actuated NanoMax should be used together with one of the Thorlabs
piezoelectric controllers – see the handbook for the relevant piezoelectric controller.
The NanoMax monitors the ambient temperature using thermistors and applies small
movements to the stage to compensate for the expansion and contraction of metals
within the stage. Note that this compensation is active only when the associated piezo
controller is set to ‘closed loop’ (feedback on) mode – see the relevant piezo controller
handbook for more details on the operation of piezo actuators.
Caution
Under normal operation, the piezo mechanism uses contact with the
micrometer drives in order to move the top pl atform. If for any re ason the sta ge
is operated with the micrometer drives removed, blanking pl ugs must be fitted
before the pizo actuators can function.
Rev 24 Oct 2018
Page 11
MAX300 Series 3-Axis Flexure Stages
Chapter 4 Installation
4.1 Unpacking
Note
Retain the packing in which the unit was shipped, for use in future transportation.
Caution
Once removed from its packaging, the NanoMax is easily damaged by
mishandling. The unit should only be handled by its base, not by the top
platform or any attachments to the top platform.
4.2 Attaching to a Work Surface
The base of the NanoMax is provided with a number of fixing holes and slots for
attachment to metric or inch optical tables, as supplied by Thorlabs and other
manufacturers.
When mounting the NanoMax close to other equipment, ensure that the travel of the
moving platform is not obstructed. If the moving platform is driven against a solid
object, damage to the internal flexures could occur. The range of travel on each axis
is 4 mm total, that is ± 2 mm about the nominal position.
Page 12 10997-D02
Chapter 4 Installation
mounting
lock ring
coarse adjustment
locking screw
coarse adjustment
fine adjustment
mounting bush
fixed body
drive rod
moving
plate
4.3 Fitting and Removal of Drives
The following procedure details how to fit a drive to the NanoMax 300 stage. A
micrometer drive is shown for illustration purposes but the procedure is equally
applicable to motor or thumbscrew actuators.
1) For manual drives, rotate the coarse adjuster counter-clockwise a few turns to
retract the drive rod. For motor drives, retract the drive rod by turning the manual
adjuster clockwise.
Then, referring to Fig. 4.1 on the next page...
2) Insert the drive into the mounting bush.
3) Tighten the knurled locking ring until finger tight.
Note
To remove a drive reverse the above procedure.
When removing a motor drive, rotate only the locking ring, do not rotate the motor
body.
Rev 24 Oct 2018
Fig. 4.1 Micrometer drive inserted into mounting bush
Page 13
MAX300 Series 3-Axis Flexure Stages
Y
X
Z
Y
X
Z
Optical axis
4.4 Orienting the Moving Platform
The stage is normally oriented such that the X axis is the optical axis. If it is necessary
to change the orientation for left or right-handed use, the Y axis becomes the optical
axis as shown in Fig. 4.2 (The Z axis is always vertical).
Note. On both imperial and metric models, the top platform is secured to the stage
using four M3 screws.
Fig. 4.2 Platform orientation
Page 14 10997-D02
Chapter 4 Installation
1.3 (0.05)
2.95 (0.12)
3.0 (0.12)
typical
3.0 (0.12)
typical
3.0 (0.12)
14.55 (0.57)
32.0 (1.26)
P
as required
slot each side for mounting cleats
optical axis
all dimensions in mm
inches given in parentheses
4.5 Mounting Equipment
Caution
The internal mechanism of the unit is delicate and is easily damaged by
mishandling.
Do not apply excessive forces to the moving platform.
When attaching accessories (e.g. fiber holders) to the top platform or angle
brackets (e.g. AMA007 and AMA009) to the side of the unit, do not use long
bolts which protrude into the internal mechanism as this could cause damage
to the internal flexures.
The weight attached to the moving platform must not exceed 1 kg.
Thorlabs manufactures a variety of fibre chucks, holders and fixtures to fit the
NanoMax stage. However, custom hardware can be designed using a tongue-ingroove arrangement and the cleats provided, see Fig. 4.3 for a typical fixture.
4.6 Transportation
Rev 24 Oct 2018
Caution
When packing the unit for shipping, use the original packing. If this is not
available, use a strong box and surround the NanoMax with at least 100 mm of
shock absorbent material.
Fig. 4.3 Typical fixture, view along X-axis, length as required
Page 15
MAX300 Series 3-Axis Flexure Stages
B holes M3 (6-32 UNC)
4 holes for M3
attachment screws
20
(0.79)
20
(0.79)
7.5
(0.3)
60 (2.36)
A
60
(2.36)
Product No
AMA001
AMA003
AMA005
A
28 (1.10
35 (1.38)
45 (1.77)
B
12 (0.47)
12 (0.47)
14 (0.55)
30.0 (1.18)
17.0 (0.67) 17.0 (0.67)
20.0 (0.79) 20.0 (0.79)
5.3 (0.21)
5.3 (0.21)
20.0 (0.79) 20.0 (0.79)
17.0 (0.67) 17.0 (0.67)
5.3 (0.21)
5.3 (0.21)
10.0 (0.39)
10.0 (0.39)
10.0 (0.39) 10.0 (0.39)
30.0 (1.18)
60.0 (2.36)
7.5
(0.3)
7.5
(0.3)
3 Pitches of 15.00 (0.59) = 45.0 (1.77)
3 Pitches of 15.00 (0.59) = 45.0 (1.77)
60.0 (2.36)
4.0 (0.16)
1.6 (0.06)
3.0 (0.12)
3.00 (0.12)
1.6
(0.06)
all dimensions in millimetres (inches)
4.7 Dimensions
4.7.1 Top Platform
Fig. 4.4 Dimensions – top platform
Page 16 10997-D02
Chapter 4 Installation
4.8 Replacing the Top Platform
If desired, the top platform can be replaced by one of the AMA series extended
platforms shown in the dimensions section, or by the RB13P1 ad apter plate which
offers an array of 1/4”-20 (M6) and 8-32 (M4) mounting holes. A replacement grooved
top plate (MMP1) is also available.
In all cases, the top platform is secured to the stage using four M3 screws, irrespective
of whether the stage is an imperial and metric model.
Caution
When replacing or refitting the top plate, do not overtighten the retaining
screws.
Rev 24 Oct 2018
Page 17
MAX300 Series 3-Axis Flexure Stages
Chapter 5 Maintenance and Troubleshooting
5.1 Maintenance of Motor Drives
After prolonged use, and particularly in applications where small movements are
continually repeated, the grease on the drive shaft may build up in ridge s. This may
cause rough or noisy movement, vibration and excessive heating.
It is good practise to run the motor periodically from one end of travel to the other
several times in order to redistribute the grease.
5.2 Troubleshooting
Caution
Under normal operation, the piezo mechanism uses contact with the
micrometer drives in order to move the top platform. If for any reason the stage
is operated with the micrometer drives removed, blanking plugs (DRV000
available as a custom from Thorlabs) must be fitted before the pizo actuator s
can function.
Page 18 10997-D02
Chapter 6 Specifications
Chapter 6 Specifications
6.1 Specifications
Parameter Value
Load capacity 1 kg
Travel Manual (coarse) and motor: 4 mm
Resolution Manual (coarse) 0.5 mm per revolution
Note
The resolution of a manual drive corresponds to a 0.5 degree adjustment of the
thimble; the actual resolution obtained depends on the skill of the user.
The resolutions of the piezo actuators are those typically obtained using Thorlabs
controllers.
Piezo Capacitance 3.6 µF
Top Plate Parallelism Error <100 µm
Arcuate displacement See next page
Power supply
Piezoactuated NanoMax Nominal maximum input voltage: 75 V
Stepper Motor Maximum input voltage: 24 V
Manual (fine): 300µm
Piezo: 20 micron
Manual (fine) 50 µm per revolution
Piezo (without feedback) 20 nm
Piezo (with feedback) 5 nm
Caution
The NanoMax should only be used in conjunction with the appropriate Thorlabs
Piezoelectric Controllers.
Rev 24 Oct 2018
Page 19
MAX300 Series 3-Axis Flexure Stages
Arcuate Displacement
The measured maximum cross talk to the Z axis, when a movement is demanded in
X or Y is <88 µm. The table below shows the theoretical amount of cross talk to the Z
axis, for movement at various X positions (Y axis at zero).
Cross talk at Y axis positions (with X at zero) would be the same.
X axis position (mm): 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0
Arcuate Motion in Z axis (µm) 88.0 45.0 20.0 5.0 0.0 5.0 20.0 45.0 88.0
The measured maximum cross talk to the X and Y axes, when a movement is
demanded in Z is <66 µm. The table below shows the theoretical amount of cross talk
to the X axis, for movement at various Z axis positions (Y axis at zero).
Cross talk to Y axis positions (with X axis at zero) would be the same..
Z axis position (mm): 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0
Arcuate Motion in X axis (µm) 57.1 32.1 14.3 3.6 0.0 3.6 14.3 32.1 57.1
Page 20 10997-D02
Chapter 7 Regulatory
Chapter 7 Regulatory
7.1 Declarations Of Conformity
7.1.1 For Customers in Europe See Section 7.2.
7.1.2 For Customers In The USA
This equipment has been tested and found to comply with the limits for a Class A
digital device, pursuant to part 15 of the FCC rules. These limits are designed to
provide reasonable protection against harmful interference when the equipment is
operated in a commercial environment. This equipment generates, uses and can
radiate radio frequency energy and, if not installed and used in accordance with the
instruction manual, may cause harmful interference to radio communications.
Operation of this equipment in a residential area is likely to cause harmful interference
in which case the user will be required to correct the interference at his own expense.
Changes or modifications not expressly approved by the company could void the
user’s authority to operate the equipment.
Rev 24 Oct 2018
Page 21
MAX300 Series 3-Axis Flexure Stages
7.2 CE Certificate
Page 22 10997-D02
Chapter 8 Thorlabs Worldwide Contacts
USA, Canada, and South America
Thorlabs, Inc.
56 Sparta Avenue
Newton, NJ 07860
USA
Tel: 973-300-3000
Fax: 973-300-3600
www.thorlabs.com
www.thorlabs.us (West Coast)
Email: sales@thorlabs.com
Support: techsupport@thorlabs.com
Europe
Thorlabs GmbH
Hans-Böckler-Str. 6
85221 Dachau
Germany
Tel: +49-(0)8131-5956-0
Fax: +49-(0)8131-5956-99
www.thorlabs.de
Email: europe@thorlabs.com
France
Thorlabs SAS
109, rue des Côtes
78600 Maisons-Laffitte
France
Tel: +33 (0) 970 444 844
Fax: +33 (0) 825 744 800
www.thorlabs.com
Email: sales.fr@thorlabs.com
Japan
Thorlabs Japan, Inc.
3-6-3 Kitamachi,
Nerima-ku, Tokyo 179-0081
Japan
Tel: +81-3-6915-7701
Fax: +81-3-6915-7716
www.thorlabs.co.jp
Email: sales@thorlabs.jp
UK and Ireland
Thorlabs Ltd.
1 Saint Thomas Place, Ely
Cambridgeshire CB7 4EX
Great Britain
Tel: +44 (0)1353-654440
Fax: +44 (0)1353-654444
www.thorlabs.de
email: sales@uk.thorlabs.com
Support: techsupport.uk@thorlabs.com
Scandinavia
Thorlabs Sweden AB
Bergfotsgatan 7
431 35 Mölndal
Sweden
Tel: +46-31-733-30-00
Fax: +46-31-703-40-45
www.thorlabs.com
Email: scandinavia@thorlabs.com
Brazil
Thorlabs Vendas de Fotônicos Ltda.
Rua Riachuelo, 171
São Carlos, SP 13560-110
Brazil
Tel: +55-16-3413 7062
Fax: +55-16-3413 7064
www.thorlabs.com
Email: brasil@thorlabs.com
China
Thorlabs China
Room A101, No. 100
Lane 2891, South Qilianshan Road
Putuo District
Shanghai
China
Tel: +86 (0) 21-60561122
Fax: +86 (0)21-32513480
www.thorlabschina.cn
Email: chinasales@thorlabs.com
Chapter 8 Thorlabs Worldwide Contacts
Thorlabs verifies our compliance with the WEEE (Waste Electrical and Electr onic
Equipment) directive of the European Commun ity and the corresponding n ational
laws. Accordingly, all end users in the EC may return "end of life" Annex I category
electrical and electronic equipment sold after August 13, 2005 t o Thorlabs, without
incurring disposal charges. Eligible units are marked with the crossed out "wheelie
bin" logo (see right), were sold to and are currently owned by a company or institute
within the EC, and are not dissembled or conta mina ted. Conta ct Th orlab s for mor e
information. Waste treatment is your own responsibility. "End of life" units must be
returned to Thorlabs or handed to a company specializing in waste recovery. Do not
dispose of the unit in a litter bin or at a public waste disposal site.
Rev 24 Oct 2018
Page 23
www.thorlabs.com
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