Tempress Systems TS-6303, TS-6304, TS-6603, TS-6604, TS-6803 Reference Manual
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Furnace Reference Manual
Tempress Systems Inc.
Furnace manual
M320_01 January 2004
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TABLE OF CONTENTS
Table of contents
1. Introduction .......................................................... 1-1
1.1 Scope of the manual ................................................................. 1-1
1.2 Furnace models ........................................................................ 1-1
2. Description ........................................................... 2-1
2.1 Diffusion system........................................................................ 2-1
2.2 Components of the furnace....................................................... 2-3
2.3 Furnace cabinet ........................................................................ 2-4
2.4 Scavenger................................................................................. 2-4
2.4.1 Available models........................................................ 2-4
2.4.2 Description of the Scavenger..................................... 2-4
2.5 Cooling unit............................................................................... 2-5
2.6 Fast Cooldown.......................................................................... 2-6
2.7 Heating elements (disposacore) ............................................... 2-7
2.7.1 Tube heating module ................................................. 2-7
2.7.2 Heating elements, tube adapters, isolation collars .... 2-8
2.8 Support and sealing ................................................................ 2-10
2.9 Furnace temperature control................................................... 2-11
3. Installation ............................................................ 3-1
3.1 Introduction ............................................................................... 3-1
3.2 Unpacking................................................................................. 3-1
3.3 Installation................................................................................. 3-2
3.4 The furnace............................................................................... 3-2
3.5 The scavenger .......................................................................... 3-3
3.6 Inspection ................................................................................. 3-3
4. Start-up ................................................................. 4-1
4.1 Introduction ............................................................................... 4-1
4.2 Start-up ..................................................................................... 4-1
4.3 Fast Cooldown.......................................................................... 4-3
4.4 Burn-in and Oxidation of an Heating element ........................... 4-3
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TABLE OF CONTENTS
4.5 Installation of the Quartz Tube.................................................. 4-5
4.6 Test and Calibration Procedure ................................................ 4-6
4.7 Pre-Cleaning of the Process Tube............................................ 4-6
4.8 Automatic profiling procedure ................................................... 4-8
4.8.1 Automatic profiling procedure .................................... 4-8
4.8.1.1 Introduction to profiling................................ 4-8
4.8.1.2 Profiling recipe setup................................... 4-9
4.8.2 automatic profiling preparation ................................ 4-11
4.8.3 Paddle TC installation.............................................. 4-11
4.8.3.1 Profile recipe selection .............................. 4-12
4.8.4 Automatic profiling RUN .......................................... 4-12
4.8.5 Summary automatic profiling ................................... 4-13
5. Maintenance ......................................................... 5-1
5.1 Introduction ............................................................................... 5-1
5.2 Heating Element Coil ................................................................ 5-1
5.3 Heating elements...................................................................... 5-3
5.4 The SCR-Module ...................................................................... 5-3
5.5 Heat Exchanger ........................................................................ 5-4
5.6 Tube change............................................................................. 5-5
5.7 Tube change diffusion system tubes......................................... 5-5
5.8 Tube change LPCVD and vacuum system tubes ..................... 5-6
5.9 Preventive Maintenance ........................................................... 5-7
6. Calibration/Adjustments ..................................... 6-1
7. Trouble Shooting ................................................. 7-1
FURNACE REFERENCE MANUAL
II
LIST OF FIGURES
List of figures
Figure 2-1 Outline drawing of a Furnace System, model TS6804.......... 2-2
Figure 2-2 Round scavenger box layout (Diffusion) ............................... 2-5
Figure 2-3 Cooling unit........................................................................... 2-5
Figure 2-4 Fast Cooldown principle........................................................ 2-6
Figure 2-5 Heating element for diffusion furnaces.................................. 2-8
Figure 2-6 Tube adaptors, support and radiation heat shield ............... 2-10
Figure 2-7 Zone paddle profiling thermocouple.................................... 2-11
Figure 2-8 Double spike thermocouple................................................. 2-11
Figure 4-1
: Spike thermocouple .............................................................. 4-2
Figure 4-2
: Tube adapter......................................................................... 4-2
Figure 4-3
: Position of the thermocouple................................................. 4-5
Figure 5-1 The heating element adjustment............................................ 5-2
FURNACE REFERENCE MANUAL
III
INTRODUCTION
1.Introduction
1.1 Scope of the manual
The contents of this manual and drawings are to provide the necessary instructions and
information for installing, adjustment, operating, maintenance and understanding of the
Amtech/Tempress Systems Furnace. Before starting up, installing, operating and/or
maintaining the system, read this manual first.
1.2 Furnace models
This manual is meant for the following Tempress Diffusion models:
Model number
Wafersize
Capability
Nr of tubes
Flat-zone length
TS-6300 series
TS-6303
TS-6304
150 mm
3
4
25-30 cm
(12 inch)
TS-6600 series
TS-6603
TS-6604
150 mm
3
4
55-60 cm
(24 inch)
TS-6800 series
TS-6803
TS-6804
150 mm
3
4
75-80 cm
(32 inch)
TS-61000 series
TS-61003
TS-61004
150 mm
3
4
95-100 cm
(40 inch)
TS-8600 series
TS-8603
TS-8604
200 mm
3
4
55-60 cm
(24 inch)
TS-81000 series
TS-81003
TS-81004
200 mm
3
4
95-100 cm
(40 inch)
TS-12800 series
TS-12803
TS-12804
300 mm
2
3
75-80
(32 inch)
Table 1 Different types of furnace models
FURNACE REFERENCE MANUAL
1-1
INTRODUCTION
The TS-6000 series
The TS-6000 series is a line of horizontal furnaces for up to 150 mm. (6 inch) wafers. This
system is standard equipped with an accurate 3 zone digital controller for optimum
temperature control.
In this line the following models are available:
• TS-6300 series: Designed for 150 mm R&D institutes. With its flatzone of 30 cm,
loads of 25 to 50 wafers can be processed.
• TS-6600 series: Designed for small batch or pilot production, 150 mm facilities.
With its flatzone of 60 cm, loads of 50 to 100 wafers can be
processed.
• TS-6800 series: Designed for 150 mm production facilities. With its flatzone of 80
cm, loads of 100 to 200 wafers can be processed.
• TS-61000 series: Designed for high volume, 150 mm production facilities. With its
flatzone of 100 cm, loads of 150 to 300 wafers can be processed.
The TS-8000 series
The TS-8000 series is a line of horizontal furnaces for up to 200 mm. (8 inch) wafers. These
systems are equipped with an accurate 5 zone digital controller for optimum temperature
control.
In this line the following models are available:
•
TS-8600 series: Designed for small batch or pilot production, 200 mm facilities.
With its flatzone of 60 cm, loads of 50 to 100 wafers can be
processed
• TS-81000 series: Designed for high volume production, 200 mm facilities. With its
flatzone of 100 cm, loads of 100 to 200 wafers can be processed.
The TS-12800 series
The TS-12800 series is a line of horizontal furnaces for up to 300 mm. (12 inch) wafers.
These systems are equipped with an accurate 5 zone digital controller for optimum
temperature control.
In this line the following models is available:
•
TS-12800 series: Designed for high volume production, 300 mm facilities. With its
flatzone of 80 cm, loads of 100 to 150 wafers can be processed.
FURNACE REFERENCE MANUAL
1-2
DESCRIPTION
2.Description
2.1 Diffusion system
The Furnace is designed to perform Diffusion/Atmospheric and Low Pressure Chemical
Vapor Deposition (LPCVD) processing on wafers from 75 mm up to 300 mm, and may be
installed in a cleanroom environment.
The furnace is housed in a utilized cabinet of heavy gauge metal construction with a Clean
Room Compatible Polyurethane finish. It contains max. 4 heating elements. Within the
furnace the heating elements are numbered from 1 to 4, starting with tube number 1 at the
top. The heat exchanger on the top of the furnace cools the exhausted air (a water-cooled
mantle for each tube is available as an option). Three phase power transformers are used to
maintain a constant temperature with a minimum of disturbance on the mainpower
distribution system.
The integrated modular construction provides discrete compartments for control equipment.
All electrical wiring, including the basic units of the temperature controller and electrical
components are housed in the base of the furnace.
The diffusion system may have a right or left handed orientation to suit the customers needs
(furnace on the right when standing in front of the loadstation means a right-handed system).
Major components of the diffusion system are:
• Load Station
• Furnace System
• Cross flow box (Horizontal or Vertical Flow Loadstation)
• Gas Cabinet
• Control system
On the next page an outline drawing of a Furnace System, model TS6804 is shown:
FURNACE REFERENCE MANUAL
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DESCRIPTION
Figure 2-1 Outline drawing of a Furnace System, model TS6804
FURNACE REFERENCE MANUAL
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DESCRIPTION
A: top view of the furnace with scavenger
1: Water outlet Bulkhead Swagelok (furnace cooling)
2: Water inlet Bulkhead Swagelok (furnace cooling)
3: Exhaust Furnace
4: Water outlet Bulkhead Swagelok (cooling vacuum-flanges)
5: Water inlet Bulkhead Swagelok (cooling vacuum-flanges)
6: Exhaust scavenger-box
7: Exhaust scavenger-housing
B: sideview of the furnace
C: frontview of the furnace
8: Scavenger box exhaust.
9: Tube switch
10: Key switch control power on-off
11: Mainswitch (lockable in off-position)
12: Mainpowerconnection
13: Excess Temperature Controller
D: view of the loadside of the furnace
8: Scavenger-box exhaust
E: rearside of the furnace
8: Scavenger-box exhaust
2.2 Components of the furnace
• Furnace cabinet
• Scavenger
• Cooling unit
• Fast Cool down
• Heating elements
• Tube (support and sealing)
• Flange
• Furnace Temperature Control
• Power supply
• Main switch assembly
FURNACE REFERENCE MANUAL
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DESCRIPTION
2.3 Furnace cabinet
The furnace is housed in a utilized cabinet of heavy gauge metal construction with a Clean
Room Compatible Polyurethane finish. (See Figure 2-1).
• Optional: Cabinet over-temperature protection sensor on top of the cabinet.
2.4 Scavenger
All 3-stack and 4-stack furnaces are provided with a toxic gas scavenger. Depending on the
application, with or without a front door.
2.4.1
Available models
A) Stainless steel round box with adjustable outlet in the box and one exhaust pipe with
outlet on the top of the furnace on which all boxes are connected. Normally used for
OMEGA-Juniors and all one-stack furnaces.
B) Same as A, however with the provision that service now can be done from the
maintenance room. Each box provided with a separate outlet to the top of the furnace
with adjustable valve. All outlets on the top connected to a manifold. Used for furnaces
with automatically boatloading, cantilever systems etc.
2.4.2
Description of the Scavenger
• Sealing between clean room and service room.
• One exhaust connection on top, there is however also an exhaust connection
possible on the bottom (optional).
• Door for maintenance on the service side.
• Stainless steel round scavengers.
• Each compartment is exhausted and adjustable independently.
• Each compartment has an individual monitor for the scavenger pressure (optional).
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DESCRIPTION
Figure 2-2 Round scavenger box layout (Diffusion)
2.5 Cooling unit
The cooling module is mounted on the top of the furnace. It is a water/air heat exchanger,
with high-efficiency aluminium fins, for optimised surface area. The water quantity
(preferably soft water) is 3-7 l/min, depending on the inlet water temperature. (see Figure 2-1
and Figure 2-3) The electrical fans on top of the module extract the hot air through the
radiator fins and cooled air is blown-out in the room again. The fans start running, as soon as
the main switch of the furnace is switched on.
Figure 2-3 Cooling unit
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DESCRIPTION
2.6 Fast Cooldown
Air is forced by a blower to travel between the heating element mantle and the outside of the
process tube. The direction of airflow is alternated to achieve balanced cooling faster than
the conventional furnace.
The air used for cooling is re-circulated. It is cooled by a water-cooled heat exchanger built
in, in the furnace cabinet.
The blower is a centrifugal type. The speed is controlled by the DTC and is varied according
to requirements. The blower is connected to the heat exchanger and heating element via
tubing. The Cool down modules (blower and heat exchanger) are both situated behind the
heating elements.
Cooling Process
Cool down is assisted by conditioned air that is forced to flow between the heating element
and the process tube (Figure 2-4). The flow of air is periodically reversed left-to-right; rightto-left to equalize out the cooling effect over the whole wafer load. During cool-down, only
paddle thermocouples are used for temperature measurement. The flowing past the spike
thermocouples makes their use inaccurate.
Figure 2-4 Fast Cooldown principle
Control of the valves and blower during cool-down is done by the DTC which has dedicated
software for the purpose. The cool rate in the temperature table determines the cool down
time and the DTC attempts to maintain this rate over all zones.
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DESCRIPTION
At the start of the cool-down step, the DTC checks the current temperature setpoint, the
paddle setpoint (target temperature) and the ramp (slope) to see if forced cooling is
necessary. If it is, the DTC calculates a profile (temperature over time) required to reach the
target setpoint, and sets the blower speed to an appropriate value (determined by an
algorithm). While cooling is in progress, the DTC applies power to the element end zone to
maintain an even cooling “ramp” and to maintain a flat zone.
When the system reaches the paddle setpoint, the blower is ramped down and turned off. At
this point the DTC switches automatically back to cascade control.
2.7 Heating elements (disposacore)
• The furnace contains 3 or 5 zone heating elements of the standard Tempress
Systems specification and are used for optimum temperature characteristics.
• The furnace can contain any of the following heating elements: a multipurpose
Kanthal A-1 coil, a high temp APM coil, an ultra high temp Kanthal Superthal
®
coil,
Low temp white John, MRL heating elements or light Gauge for high/low
temperature applications. Insulation made from high purity, high density, vacuum
molded alumina silica fiber (optional light Gauge). It depends on the process
temperature, which kind of element is used. Custom desired other elements can be
implemented on request.
• Over temperature protection is provided by an Excess Temperature Controller,
connected to separate Thermocouples. See section Error! Reference source not
found.
• Each heating element has its own transformer with isolated coils powering individual
control zones via high-efficiency zero-crossover fired Silicon Control Rectifier (SCR)
power control modules.
• One tube switch per heating element, to shut off one tube only.
• Tube sizes depending on customer demand.
• The combination of the special coil-design, insulation, stainless steel shell and the
DTC guarantees:
• better uniformity
• long lifetime
• energy saving
• no element sagging
2.7.1
Tube heating module
This module, most of the times multi-zone, consists of a Fibrothal® heating element with
embedded Kanthal alloys and a stainless steel mantle. This module is meant for diffusion
furnaces. See Figure 2-5.
The advantages of this construction are:
• High temperature equability
• Exact temperature profile
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