TELEVAC MM200 User Manual

MM200

TELEVAC

A DIVISION OF THE FREDERICKS COMPANY

2400 PHILMONT AVE.
HUNTINGDONVALLEY, PA 19006

TELEVAC

PARTS

#

QTY

ITEM DESCRIPTION

1

1

MM200

2

1

Instruction Manual

3

1

AC Power Cable

4

1

Power supply module

5

1 SET

Rubber Feet

1 3 4

5

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 1 of 160

TELEVAC

TABLE OF CONTENTS

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

SECTION TITLE PAGE

TABLE OF CONTENTS 1

100 INTRODUCTION 10

101 DESCRIPTION 10

102 STANDARD FEATURES 11

Measurement Expansion 11

Sensor interface Modules 11

Computer Interface Modules 11
Non-volatile Memory 11
Display 11
Keyboard 11
CPU Configuration 11

103 SETPOINT RELAYS 11

104 VACUUM GAUGE TUBES 11

Diaphragm 12
Thermocouple 12
Convection 12
Cold Cathode 12
Hot Cathode 12
Capacitance Diaphragm Gauge 13

200 INITIAL CHECKOUT 14

201 UNPACKING AND INSPECTION PROCEDURES 14

202 INVENTORY 14

203 INTIAL CHECK PROCEDURES 14

Correct Operating Voltage 14
Initial Displays 15

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 2 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

SECTION TITLE PAGE

300 INSTALLATION 18

301 MODULE CONFIGURATION 18

302 LINE VOLTAGE SELECTION 23

303 GAUGE CONTROLLER INSTALLATION 23

Freestanding 23
Rack Mounted 23

304 GAUGE SENSOR INSTALLATION WARNINGS 24

305 VACUUM CONNECTION FITTINGS 25

NPT Pipe Thread Connections 25
0-ring Compression Fittings 25
Conflat Flange Fittings 25
KF Flange Connections 26
Cajon Fittings 26

306 GAUGE SENSOR INSTALLATION 26

307 REMOVAL AND INSTALLATION OF MODULES 27

308 DESCRIPTION OF MODULES 28

Power Supply Module 28
Setpoint Relay Module 29
Communications Module 29
Thermocouple Module 30
Convection Module 31
Diaphragm Module 31
Cold Cathode Module 32
3D Hot Cathode Resident Module (I² R Degas) 32
3E Hot Cathode Resident Module (EB Degas) 34

3F Hot Cathode Mini BA Module (software ver. 2.31 or higher) 35

Capacitance Diaphragm Modules 38

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 3 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

SECTION TITLE PAGE

400 OPERATION 40

401 DISPLAY DESCRIPTION DEFINITIONS 40

Station Number 40
Data Display 41
Units 41
Gas Type 41
Leak Rate Indicator 41
Setpoint Relay Status Indicator 41

402 ERROR INDICATIONS 41

403 KEYPAD DESCRIPTION 42

PUSHBUTTON Functions 43
TEST/OP Pushbutton 43
SETUP Pushbutton 43
N2/GAS Pushbutton 43
UP/DOWN Arrows 43
UNITS Pushbutton 43
LEAK RT Pushbutton 43

404 RELAY SETPOINTS 43

Range of Use 44
Changing Sensor Assignment 44

405 ANALOG 0-10V OUTPUTS 45

0-10V Outputs 46
0-10V Output Options 49

406 INITIAL OPERATION SETUP SEQUENCE 50

Pressure Readings 50
Relay Setup 50
Gas 51
Measurement Units 51
Leak rate 51

407 3F HOT CATHODE MODULE (Mini BA) (software ver. 2.31 or higher) 52

Sensitivity 52
Degas 52
Filament 52

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 4 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

SECTION TITLE PAGE

500 SETUP 53

501 INTIALIZATION 53

Initial Displays 53

502 USE OF PUSHBUTTONS 54

TEST/OP Pushbutton 54

Return to Normal Operation 54
Self-Diagnostic Test 54

UP/DOWN Arrows 56

SETUP Pushbutton 56

Cold Cathode Setup 56
3D & 3E Hot Cathode Setup 59
Degass Timer 62
Relay Setpoints 62

SP#1 – Station Assignment 62
SP#1 – Setpoint Selection 62

UNITS Pushbutton 63
N2/GAS Pushbutton 64
LEAK RT Pushbutton 64
HANDLING UNITS 64

For versions 2.31 or higher. Refer to Section 6.2, page 602

503 3F HOT CATHODE MODULE (Mini-BA) 65

F (AUTO or SELF or BOTH) 65

FIL (ON or OFF or RDY) 65
DGAS (0FF or ON) 65
DGAS (# time) 65
FIL NBR (1 or 2) 65
SENS (# sensitivity) 65

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 5 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

SECTION TITLE PAGE

600 COMMUNICATIONS 66

601 RS232 INTERFACING WITH COMPUTER USING MICROSOFT HYPER 66
TERMINAL

602 RS232 / RS485 PROTOCOL FOR SOFTWARE VERSIONS 2.31 OR HIGHER 67
RS232 or RS485 67

STD or ALT 67
UNIT #xx 67
PREF #xx 67
RS485 Prefix and Addresses Table – For Software Ver. 2.31 or Higher 68
New Commands For MM200 - For Software Ver. 2.31 or Higher 69
Commands That Have Been Updated For 3F Modules 69
Commands For The 3F Hot Cathode MINI-BA Module 70

603 COMMUNICATIONS – FOR SOFTWARE VER. 1.35 – 2.31 70

604 RS232/RS485 COMMANDS 70

RS232/RS485 70

Communications 75
Configuration 77 Data
Output 79
Display 81
Gas 82
Hot Cathode 83
Leak Rate 84
Outputs 85
Set Point Setting Values 88
Convection Gauge 4A atmosphere Adjustment 92
Zeroing Thermocouple, Convection, and Diaphragm Gauges 92
RS232/RS485 Command Summary 95
RS485 Host Command Set 99
RS232 Commands Used To Implement RS485 101
Alternate address Scheme for RS485 102
Special Commands 102
RS232 Hardware 103
RS485 Hardware 103

605 COMMUNICATIONS – FOR SOFTWARE VER. 1.21 – 1.34 104

RS232 Protocol 104

606 COMMAND SUMMARY – FOR SOFTWARE VER. 1.19 – 1.20 105
Hardware 108
Commands 109
“B” Mode Commands 109
Cold Cathode 110

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 6 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

SECTION TITLE PAGE

606 COMMAND SUMMARY – FOR SOFTWARE VER. 1.19 – 1.20

Communications 111

127 Data Output 113

Hot Cathode 115

Leak Rate 116

Output Formats 117

Set Points 117

Set Point Setting Values 118

607 COMMUNICATIONS – FOR SOFTWARE VER. 1.0 – 1.19 119

RS232 Protocol 119
RS232 Hardware 127
Special Commands 127

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 7 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

SECTION TITLE PAGE

700 CALIBRATION 128

701 ELECTRICAL "VERIFICATION" 128
Equipment Required 128
Procedure 129

702 VACUUM CALIBRATION 129
Equipment Required 130
Procedure 131

703 CALIBRATION FOR ALTERNATE GASSES 133

800 SPECIFICATIONS 134.

801 CONTROLLER SPECIFICATIONS 134

802 CONTROLLER DIMENSIONS 134

803 SENSORS 135

804 ORDERING INFORMATION 135

900 TROUBLESHOOTING 137

901 PRELIMINARY TROUBLESHOOTING 137

902 SETUP OF MODULE BOARDS 138
Setpoint relay module 138
Digital interface module 140
Thermocouple module 141
Convection module 143
Cold Cathode module 145
Diaphragm modules 149
Capacitance Diaphragm module 151
3D Hot Cathode module 153
3E Hot Cathode module 154

903 DRAWINGS AND SCHEMATICS 155

904 CLEANING COLD CATHODE GAUGE TUBES 156

905 SUPPRESSOR INSTALLATION FOR NOISY ENVIRONMENTS 157

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 8 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

SECTION TITLE PAGE

1000 MISCELLANEOUS 158

CALIBRATION MODE 158
DIAPHRAGM GAUGES 158

INSTALLATION OF EPROMS 159

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 9 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

100 INTRODUCTION

This manual provides information pertaining to the installation, operation, and maintenance of the Televac MM 200
vacuum gauge. Various sensor modules, their options, and associated sensors are covered in this manual.

Fig. 1.1 - TELEVAC Modular Gauge

101 DESCRIPTION

The TELEVAC MM200 programmable vacuum gauge controller consists of a basic electronic unit and modular
sensor signal processing interface boards. These components utilize the latest in digital and analog technology
and provide a versatile, easy to use means for measuring pressure (vacuum). With the appropriate system and
sensors, pressures ranging from 10
vacuum chamber leak-up rate can be measured. A large selection of sensors and mounting configurations, as well
as hardware control interfaces, are available for user convenience.

There is one basic electronics unit, which accepts modules for all gauge types as well as relay modules and digital
interface modules. Several sensors are presently available. These are described in Section 104. Other sensor
modules will be available in the future. User-installed modules permit expansion. The controller provides a choice
of display data formats, display

-11

Torr through 7.5 x 10

+ 3

(10 Bar) are accurately monitored. Additionally,

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 10 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

102 STANDARD FEATURES

MEASUREMENT EXPANSION - The electronics unit can support additional measurement modules. These

additional modules can be any mix of the above listed sensors.

SENSOR INTERFACE MODULES - Each gauge has several available sensor interface modules (See Section 300).

These modules contain the signal conditioning and measurement circuitry required to operate the sensor properly.
They also provide the user with a scalable analog output of pressure.

COMPUTER INTERFACE MODULES - The computer interface provides a means for electronic communication

with the gauge controller. An RS232 and an RS485 serial data link is provided. The data format is discussed in
Section 600.

NON-VOLATILE MEMORY - The instrument contains non-volatile memory (EEPROM) that saves all programmable

SETUP parameters when the instrument power is off.

DISPLAY - The display system for all gauges has two large multiplexed light emitting diode (LED) displays. Each

display can show a maximum of four (4) digits of data including an exponent. The display also has smaller displays
which indicate selected station number, selected measurement units, alternate gas type, and setpoint relay status.

KEYPAD - The keypad is a tactile feel, non-membrane unit that provides keys for programming and control

operations. The number of keys has been optimized for simple operation.

CPU CONFIGURATION - The central processing unit (CPU) provides the operator choices for the display format,

measurement units, communications format and baud rates as well as the ability to lock out keyboard parameter
changes.

103 SETPOINT RELAYS

The Process Control Relay or Setpoint Relay Module provides four (4) relays per module (eight maximum. These
relays are assignable to any installed station.

104 VACUUM GAUGE TUBES

This instrument supports several types of vacuum gauge tubes (sensors). Combinations of sensors can be used to
cover a wide range of absolute pressures. These
sensors can also be used to make measurements in several locations.

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 11 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

104 VACUUM GAUGE TUBES (cont.)

DIAPHRAGM GAUGE - Measures absolute pressure by detecting very small deflections of a metal diaphragm via

a strain gauge. It is not sensitive to gas type. These sensors are temperature compensated, but do respond to
rapid changes of temperature. Temperature changes cause zero shifts. Users should note that occasional
adjustments of the zero point are normal for sustaining accuracy with this type of sensor, and provision for making
this adjustment should be included in the installation. Fine adjustment of the zero and atmospheric point is
accomplished at the rear panel on the diaphragm module. Sensor range: 1E: 1 to 800 Torr; 1F: 1000 to 9999
mbar.

THERMOCOUPLE GAUGE - Measures absolute pressures by determining the heat loss from a fine wire filament.
The response of the sensor depends on the gas type. These sensors are compensated for room temperature
variation and are calibrated for vertical operation but operate with little error in any orientation. "Zero" calibration
potentiometers are provided for occasional adjustment as required. Sensor range: 10-3 to 20 Torr.

CONVECTION GAUGE - Measures absolute pressures by determining the heat loss from a fine wire filament. The
response of the sensor depends on the gas type. These sensors are compensated for room temperature variation
and are calibrated for operation in the VERTICAL POSITION ONLY. ZERO and ATM (atmospheric pressure)
calibration potentiometers are provided for occasional adjustment as required. Sensor range: 10-3 to 10+3 Torr.

COLD CATHODE GAUGE - A high vacuum sensor that measures pressure by ionizing the residual gases in a

magnetron discharge. The body of the gauge serves as the cathode, and is at ground potential. The anode

operates at voltages up to 3000 volts. A permanent magnet traps electrons in the gauge to sustain the discharge at

very low pressure. This type of gauge may be less precise in its reading than hot cathode gauges and, like the hot

cathode gauge, is also sensitive to gas type. However, it is relatively rugged and has no filament to burn out, so

that it is often used in applications where hot cathode gauges are not reliable. Cold cathode tubes might experience

ignition time delay when trying to turn them on at high vacuum. The 7FCS quick start gauge has a thermo emission

igniter inside so every time when power applies to MM200 the filament goes on for 5 second to start ionization

chain reaction.There are various designs to cover different pressure (vacuum) ranges. Refer to Table 4.1. Sensor

range: 10

-11

to 10-2 Torr.

HOT CATHODE GAUGE - Hot cathode gauges typically have the Bayard-Alpert geometry and are used for high

vacuum measurements. Both glass enclosed and nude sensors are available. These sensors measure absolute

pressures by sensing the ion current generated by the interaction of a beam of electrons from a hot filament with

gas molecules in the vacuum system. This kind of gauge is sensitive to gas types. Filaments can be tungsten or

Thoria-Coated Iridium. The Iridium filaments don't burn out as readily if accidentally exposed to air when hot, but

can be attacked by chlorides and fluorides, which decompose the coating. Tungsten filaments also run noticeably

hotter. It is normal for such gauges to have a residual current (the x-ray limit), which may introduce significant

errors below 10

outgassing when the hot filament is turned on. Degassing is often used to accelerate this process prior to making

measurements at very low pressures. Sensor range: 10

-10

Torr depending on construction. It is also normal for sensors to generate significant amounts of

-11

to 10-2 Torr.

The pressure range for various sensors is shown in Table 4.1.

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 12 of 160

TELEVAC

NOTE:

Capacitance Diaphragm Gauge Tubes with a range of greater than 1 Torr will not control the Cold

Cathode automatic turn on!

INSTRUMENT MANUAL

VACUUM GAUGE MODEL MM200

104 VACUUM GAUGE TUBES (cont.)

CAPACITANCE DIAPHRAGM GAUGE - Measures absolute pressure by detecting very small deflections of a
metal diaphragm via a change in capacitance between the diaphragm and one or more electrodes. It is not
sensitive to gas type. These sensors are temperature compensated, but do respond to rapid changes of
temperature. Temperature changes cause zero shifts. In some cases the gauges are heated for stability and to
prevent condensation of process gasses. Users should note that occasional adjustments of the zero point are
normal for sustaining accuracy with this type of sensor, and provision for making this adjustment should be included
in the installation. Fine adjustment of the zero and atmospheric point is accomplished at the rear panel on the
diaphragm module. Sensor ranges (full scale):

5A = 1000 Torr; 5B = 100 Torr; 5C = 10 Torr

5D = 1 Torr; 5E = 0.1 Torr; 5F = special

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 13 of 160

TELEVAC

INSTRUMENT MANUAL

VACUUM GAUGE MODEL MM200

200 INITIAL CHECKOUT

201 UNPACKING AND INSPECTION PROCEDURES

1. Remove the Vacuum Gauge Controller from its shipping container

2. Carefully examine the unit for damage that may have occurred during shipping. This is especially important

if you notice signs of obvious rough handling on the outside of the cartons. REPORT ANY DAMAGE TO

THE CARRIER AND TO TELEVAC IMMEDIATELY.

3. DO NOT discard any packing materials until you have taken inventory and completed the check
procedures. You may wish retain the packing material for later use.

4. If the instrument must be returned to TELEVAC be sure to contact the service department (215-947-2500)
for a Return Material Authorization (RMA) number. Items will not be accepted without an assigned RMA.
They must be packaged, insured and shipped with transportation charges prepaid to:

TELEVAC - Division of
The Fredericks Company
2400 Philmont Avenue

Huntingdon Valley, PA 19006

202 INVENTORY

Compare the contents of the shipping containers with the invoice to be sure you received all necessary equipment.

203 INITIAL CHECK PROCEDURES

For the Initial Check Procedure you need only the control unit and the power cord. Do not connect any sensors,
cables or other devices to the unit for this check.

CORRECT OPERATING VOLTAGE - Before connecting the power cord, check the line voltage selector, which is
part of the power supply board at the rear of the unit. For 100-120V application the arrow should point to the
embossed "110" on the switch as shown in Fig. 2.1. To change to 220-240V, use a small screwdriver to turn the
switch from its position to align the arrow with the embossed "220" on the switch. (220V not permitted for
Capacitance Diaphragm Gauges. Make sure that the power switch is OFF and then plug the power cord into the
unit's socket and an appropriate outlet.

It is recommended that a surge protector circuit is used or make sure that your power line is safe from power surge.
The noise (power surge) through the power line may alter the contents of a non-volatile memory (known as data
memory) in EEPROM and cause the controller to operate erratically.

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 14 of 160

TELEVAC

CC 7E

RS485

POSITION #0 #1 #2 #3 #4 #5 #6 #7

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

WARNING: Voltages may exist on rear panel connectors.

DO NOT touch the exposed connectors when power is connected to the

instrument.

Note that the rear panel configuration shown in Fig. 2.1 is just one of the many possible combinations of gauges
and relay modules. This configuration has the following characteristics:

MM200 - Microprocessor with power supply,
4 relays, 5 stations and RS232

SLOT 0 - Power supply
SLOT 1 - S1- Setpoint relay module
SLOT 2 - S1- Setpoint relay module
SLOT 3 - T1- Dual thermocouple module (2 stations)
SLOT 4 - C1- Dual convection module (2 stations)
SLOT 5 - B1- Blank panel
SLOT 6 - C1- Cold cathode module (1 station)
SLOT 7 - R1- RS232 /RS485 module

INITIAL DISPLAYS - The front panel (shown in Fig. 2.2) is used to observe the displays and to execute the initial
self-test of the unit. Remove the protective plastic covering over the displays. Turn the power on by pressing the

rear panel power switch to ON. The initial display shows the word "SOFt" followed by a number indicating which
software version is present (See Fig. 2.3).

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 15 of 160

TELEVAC

Fig. 2.2 – Front Panel

.

Fig. 2.3 – Software Version

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 16 of 160

TELEVAC

Fig. 2.4 - Typical Initial Display

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

This message is followed by an error code, if any errors are present. (see Section 900). If no errors are present,
the initial display for the installed sensor modules appears.

In the initial right-hand display, the default mode is to display the lowest number station installed (except ionization
type gauge if there are other than ionization gauges installed). Since no sensor and/or cable is plugged in, the
right-hand display reads "CAbL" and the adjacent small number reads the corresponding station number (typically
#1). The left hand display shows the lowest number ionization (cold cathode or hot cathode) station installed
(station #7 in the example shown in Fig. 2.4). Since the high voltage power is off, the display reads "OFF". (See
Fig. 2.4). If no ionization gauge is installed, the left-hand display shows the second lowest station installed.

Fig. 2.4 shows the correct initial display for this configuration. If a display does not appear, check the power outlet
and the main fuse on the rear of the unit.

If further checkout is desired, refer to Section 502.

Assuming that the initial display check is successful, the instrument if ready for installation. Otherwise contact your
TELEVAC Service Department (See front cover).

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 17 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

300 INSTALLATION

301 MODULE CONFIGURATION

A controller is normally ordered with various optional sensor interface modules and they are factory installed before
shipment. Before installation, verify that the selection of modules will accomplish the desired results in your
application. If additional modules are required or you have any questions about using this gauge in your
application, please call Televac at 215-947-2500. If you wish to add modules, refer to Section 307 AND 308.

One possible configuration for this gauge was shown in Section 203. The allowable configurations are restricted by
the number of cold cathode and/or hot cathode ionization stations installed.

The MM200 has six slots, which can be populated with various Televac modules. There is also a half slot that can
be used to insert a communications module. This is the only slot into which the communications module can be
inserted. This board will currently accommodate an RS232/RS485 interface. The other slots can be fitted with
various combinations of the following currently available boards:

PCB #
TYPE 6200 STA SLOT DESCRIPTION
1E -220 2 1 A dual diaphragm module.
1F -224 2 1 A dual diaphragm module.
2A -186 2 1 A dual thermocouple module.
3D -226 1 4 A single hot cathode module with Joule de-gassing.
3E -232 1 4 A single hot cathode module with EB de-gassing.
4A -215 2 1 A dual convection module.
7B -227 1 2 A single cold cathode module.
7E -223 1 2 A single cold cathode module.
7F -245 1 1 A single cold cathode module (7F UHV or 7E as req'd)
7F -253 1 1 An interface to the 7ER & 7FR remote modules.
SP -211 4 1 A four relay Process Control relay board.
3F -290 2 2 A dual Mini BA module

The 3D and 3E modules occupy four slots each.

The 7B and 7E modules occupy one and a half slots. One of these can be combined with the RS232/RS485 digital
interface module so that no space is wasted. In other locations, they will take up two slots.

The 7F module takes up only one slot. It is used with the 7F UHV tube down to 10

-11

Torr or with multiple 7E gauge
tubes where space available in the MM200 is limited.
The 7FCS module has a phone jack labeled “starter” at the back panel to plug the igniter cable in.

The 7F 6200-253 module can interface with 7ER & 7FR gauge tubes which have the remote electronics
modules.

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 18 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

The maximum number of stations that can be configured is ten. This can be done

only if all stations are any mixture of dual modules (e.g., 1E, 1F, 2A, 4A, 5A/B).

WARNING: If any cold cathode gauge modules are installed, no sensors should be

assigned to station number ten (10).

If there is one relay module installed, then five other slots are available, and still up

to ten stations can be installed. With two relay modules, four slots are available,
and up to eight stations can be accommodated.

Setpoints must be consecutively numbered starting with number 1 (1 through 4) or

number 5 (5 through 8).

WARNING: All relays must be assigned to a station when first installed, even if they will

not be used (any station will suffice).

Allowable configurations for the MM200 are shown in
Table 3.1.

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 19 of 160

TELEVAC

10 8*

9 8*

MAX MAX
# #

STATIONS RELAYS

MAX MAX
# #

STATIONS RELAYS

8 8*

8 4*

MAX MAX
# #

STATIONS RELAYS

5 8*

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

Table 3.1a - Examples of Allowable Configurations for the MM200

MAX MAX MAX MAX
# # # #

STATIONS RELAYS STATIONS RELAYS

EPLANATION OF TERMS USED

2X = Dual station Thermocouple, Convection, Diaphragm, 7F Cold Cathode or single slot 7E cold

cathode
CC = Single station (two slot) Cold Cathode module (** shared space with RS232)
4S = Four setpoint module - * Can substitute for a 2X module
RS = RS232 or RS485
HC = Resident Hot Cathode module

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 20 of 160

TELEVAC

MM200

MAX MAX
# #

STATIONS RELAY

10
+ 48

8 (SUBSTITUTE 4S FOR 2X)

RS485 LINK TO UP TO
16 REMOTE MODULES

INTERNAL TERMINATION
RESISTOR AT LAST UNIT

Up to 48 remote sensors consisting of
Up to 16 hot cathode remote modules
(with no displays) each with up to
2 additional sensors in a daisy
chain hook up of up to 4000’

* optional local thermocouple,
convection, diaphragm or cold
cathode gauges. Maximum is
2 additional sensors but only 1
cold cathode

REMOTE HOT CATHODE MODULE(S) VIA` MM200

One of several possible combinations using the remote hot cathode module

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

( CONTINUED)

MM-200_im REV M

Page 21 of 160

TELEVAC

(CONTINUED)

RS232 Link

Computer

* Optional thermocouple, diaphragm,
convection or cold cathode gauges.
Maximum # remote station = 3
Including the hot cathode.

REMOTE HOT CATHODE MODULE(S) VIA COMPUTER

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

Table 3.1c – Allowable Configuration for the MM200 (Continued)

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 22 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

302 LINE VOLTAGE SELECTION

The instruments are shipped from the factory with the line voltage set at 110 for 100-120 VAC operation and
operates at 50-60 Hz. If 200-240 VAC operation is desired, refer to Section 203 for procedure.

303 GAUGE CONTROLLER INSTALLATION

FREE STANDING
The instrument can be used as a freestanding unit, panel mounted or mounted in a standard 19" rack.

RACK MOUNTED - A rack adapter kit is required to rack mount one or two controllers in a standard 19" rack.

Refer to Fig. 3.2 for component configuration.

For one controller, install the small interconnecting adapter to the unit and then the long filler panel to the inter­connecting adapter. Use the four (4) screws, nut and washers provided. Alternately use the adapter fillers.

For two controllers, install the two (2) small interconnecting adapters, in front and in back, between the two units.

Fig. 3.2 – Rack Adapter Details

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 23 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

304 GAUGE SENSOR INSTALLATION WARNINGS

--------------------------------------------------------------------

WARNING: OVERPRESSURE - Do not use quick connects or other friction type connections

where positive pressure exists within sensors, such as in backfilling operations.

--------------------------------------------------------------------

WARNING: SENSOR LOCATION - The gauge sensors should be located as close as possible

to the section of the vacuum system where pressure measurement is important.
Valves or other constrictions between the sensor and the area where pressure
measurement is required may cause erroneous readings or increase the response
time.

--------------------------------------------------------------------

WARNING: CONTAMINATION - Be careful during handling and installation to prevent any

loose debris or contamination of any type from entering the gauge sensors. It is
good practice to not handle the inside surfaces of any vacuum sensor.

--------------------------------------------------------------------

WARNING: Implosion and Explosion - Hot Cathode Ionization Gauges

If handled roughly, glass ionization gauges may implode under vacuum causing

flying glass, which may injure personnel. Be sure that cabling to the gauge tube
has proper strain relief so that cable tension cannot break the glass. If pressurized
above atmospheric pressure, glass tubes may explode, causing dangerous flying
glass. A substantial shield should be placed around vacuum glassware to prevent
injury to personnel.

--------------------------------------------------------------------

WARNING: Temperature - Hot Cathode Ionization Gauges

During degas operations, the envelope of glass ION gauge tubes becomes heated

much more than in normal operation. Be sure that materials that are heat sensitive
are not in contact with the gauge tube, and be sure that the gauge tube is not
located where personnel might come in contact with it.

--------------------------------------------------------------------

CAUTION: Breakage - Hot Cathode Ionization Gauges

If the ConFlat flanges are of the rotatable type, check that the flange bolt ring does

not drop on the glass tube during installation and cause breakage.

--------------------------------------------------------------------

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 24 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

305 VACUUM CONNECTION FITTINGS

Six types of vacuum connection fittings are used in the
gauge system: NPT, O-ring compression, ConFlat flange,
KF, CAJON 8VCR and CAJON 8VCO. (See Table 3.2). A discussion of each is provided below

1. NPT PIPE THREAD CONNECTIONS - These connections should be sealed using vacuum sealing compound

such as TORR-SEAL, Teflon tape or paste. TORR-SEAL is a trademark of Varian Associates Inc.

2. O-RING COMPRESSION FITTINGS - Insert the tubulation of the gauge sensor into the fitting carefully to

avoid damage to the O-ring inside the fitting. The connection is then hand-tightened to create a seal. Do not
over tighten the connection.

If necessary, a small amount of vacuum grease may be used to obtain a good vacuum seal.

3. CONFLAT FLANGE FITTINGS - ConFlat and similar compatible types made by other manufacturers are

widely used for attaching devices to ports on high vacuum systems. These flanges utilize knife-edge surfaces
and compression of copper gaskets to secure a vacuum seal. Be careful not to damage or contaminate the
knife-edges or gaskets during handling operations. (Do not touch copper gasket with hands.) Copper
gaskets should be utilized when high temperature or ultra-high vacuum operation is intended. Tighten all
flange bolts evenly and fully in a crisscross pattern. Do not use copper gaskets more than once. If the flange
is to be baked, pre-lubricate the bolt threads with an antiseize compound (FelPro R C 100 or equivalent).

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 25 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

CAUTION: Be careful that the anti-seize compound does not come in contact with the gaskets or the

vacuum parts of the flange.

4. KF FLANGE CONNECTIONS - These connections consist of a centering ring and clamp. The centering ring

is self-centering and aids in alignment. The clamps should be finger-tightened until both flanges are firmly in
contact with the O-ring seal.

Use a new gasket whenever the gauge is reconnected, unless gasket retainer assemblies are used.

5 CAJON FITTINGS - If necessary, a small amount of vacuum grease may be used on the O-ring to obtain a

good seal.

306 GAUGE SENSOR INSTALLATION (Refer to Table 3.3 for Gauge Sensor Installation)

Table 3.3 - Gauge Sensor Installation

GAUGE
TYPE MOUNTING INLET
ORIENTATION

Diaphragm A Vertical, down, desired
Convection A Vertical, down, required
Thermocouple A Vertical, down, desired
Cold Cathode B NA
Hot Cathode-glass C Horizontal
Hot Cathode-nude C NA

A - To prevent debris from entering the gauge sensor and to provide the highest accuracy, it is recommended that
the gauge sensor be installed with its main body vertical. Do not mount the sensor in areas where gases are
allowed to stream directly into the gauge tube since damage to the filament could result. Install cable to sensor and
chassis sockets. Connector is keyed to provide proper orientation at the sensor socket. Do not force connector
into socket.

B - The gauge sensor can be mounted in any position. The magnet should not be closer than 1" to any magnetic
material. Additionally, when mounting the sensor take into account that the field of the gauge magnet may disturb
beams of charged particles in the vacuum system. Install shielded high-voltage BNC connector to gauge and
chassis sockets before turning on the power.

C - The gauge sensor can be mounted in any position. It is important that gauge have good
communication with the vacuum space for accurate pressure readings, especially at lower pressures.

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 26 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

307 REMOVAL AND INSTALLATION OF MODULES

Mounting screws are located at the top and the bottom of each module. To remove a module, remove both screws
and pull on the rear panel of the module. If necessary, use a small screwdriver to start the module moving by
prying between the module and the enclosure. The module will then slide out easily (See Fig. 3.3).

Fig. 3.3 - Removal / Installation of Modules

To install a module, slide it in place along the track and firmly press it into the mating socket connector. Reinstall
screws.

If you wish to add optional modules, install them as outlined below:

WARNING: TO AVOID POSSIBLE SHOCK, DISCONNECT THE POWER CORD FROM THE
CONTROLLER.

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 27 of 160

TELEVAC

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

1. Remove the sensor interface module from its packaging. Examine it for shipping damage. If damaged,

refer to Section 201.

2. Place jumpers in the desired position to select station numbers, setpoint station assignment, etc. as

described in Section 902.

3. Remove the two screws holding the blank cover plate over the module position you plan to use.

4. Align the module with the slots in the instrument and push into place. Press to secure edge connector into

the connector on the motherboard.

5. Reinstall the two screws.

308 DESCRIPTION OF MODULES

Various types of modules are available for installation in
the MM200 gauge. Descriptions of available modules follow as they appear from the rear panel. For detailed
descriptions of available modules and their setup, see Section 902.

POWER SUPPLY MODULE - The power supply module is located in module slot "0" on the left rear of the
instrument. It contains a plug socket for the power cord, a voltage selection switch and an on/off switch. (Fig. 3.4).

Fig. 3.4 - Power Supply Module

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 28 of 160

TELEVAC

TOP

MID1

MID2

BOTTOM

INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200

SETPOINT RELAY MODULE - The rear panel of the setpoint process control relay module is shown in Fig. 3.5.

Three (3) terminals are available for each of the four (4) relays. These are NC (Normally Closed), NO (Normally
Open) and C (Common).

Fig. 3.5 - Rear Panel of the Setpoint Relay Module

COMMUNICATIONS MODULE - The rear panel of the module is shown in Fig. 3.6. It features a DE9S (female)
connector for the RS232 or RS485 interface cable. A SETUP lock switch is used to permit or to lock out the
capability to reset or reassign relays using the SETUP function. Two (2) phone jacks are also shown. The larger
one (3.5 mm) is labeled LEAK AUDIO and is used to provide an audible signal whose pitch (frequency) is a function
of the instantaneous pressure. The smaller one (2.5 mm) is labeled GAS SW and is used to remotely switch the
display to the "alternative gas" (See Section 401). See Figure 9.2 for RS485 termination. An alternate function
provided by the smaller phone jack is to accept an enable 24-volt signal that would prevent operation of ion type
gauges if not present.

Fig. 3.6 - Rear Panel of the Communications Module

160Phone:[phone] fax:[phone] e-mail:[e-mail] web site:www.televac.com

MM-200_im REV M

Page 29 of 160