Teledyne IGE 3000 User Manual 2
TELEDYNE
HASTINGS
INSTRUMENTS
INSTRUCTION MANUAL
IGE 3000
ION GAUGE
ISO 9001
CERTIFIED
Manual Print History
The print history shown below lists the printing dates of all revisions and addenda created for this
manual. The revision level letter increases alphabetically as the manual undergoes subsequent updates.
Addenda, which are released between revisions, contain important change information that the user should
incorporate immediately into the manual. Addenda are numbered sequentially. When a new revision is
created, all addenda associated with the previous revision of the manual are incorporated into the new
revision of the manual. Each new revision includes a revised copy of this print history page.
Revision A (Document Number 169-032006) ........................................................................ March 2006
Revision B (Document Number 169-082006)..........................................................................August 2006
Revision C (Document Number 169-102007)........................................................................ October 2007
Revision D (Document Number 169-062008) .............................................................................June 2008
Revision E (Document Number 169-082010) ..........................................................................August 2010
Visit www.teledyne-hi.com for WEEE disposal guidance.
CAUTION
If equipment is not used in the manner specified by this manual,
protection provided by the equipment may be impaired.
Read sections marked with this symbol with care.
DANGER
Paragraphs marked by this symbol in this document, indicates that a
potential hazard to your personal safety exists from a high voltage source.
Hastings Instruments reserves the right to change or modify the design of its equipment without
any obligation to provide notification of change or intent to change.
169-082010_Ion-Gauge-3000 Page 2 of 21
Table of Contents
1. QUICK START INFORMATION.................................................................................................................................... 5
2. GENERAL INFORMATION............................................................................................................................................ 6
2.1. GENERAL INFORMATION.....................................................................................................................................6
2.2. IGE-3000 MINI BAYARD/ALPERT (B/A) TUBE............................................................................................................ 6
2.3. SPECIFICATIONS...........................................................................................................................................................6
2.4. MATERIALS EXPOSED TO VACUUM ..............................................................................................................................7
3. INSTALLATION................................................................................................................................................................8
3.1. INSTALLATION........................................................................................................................................................8
3.2. RECEIVING INSPECTION ...............................................................................................................................................8
3.3. MOUNTING .................................................................................................................................................................. 8
3.4. GROUNDING................................................................................................................................................................. 8
3.5. “D” CONNECTOR ELECTRICAL PIN OUTS .....................................................................................................................9
3.6. B/A TUBE INSTALLATION ............................................................................................................................................9
3.7. MOUNTING B/A TUBE TO IGE-3000 ELECTRONICS MODULE ......................................................................................9
3.8. ENVIRONMENTAL:.......................................................................................................................................................9
4. OPERATION....................................................................................................................................................................10
4.1. OPERATION................................................................................................................................................................10
4.2. FRONT PANEL OVERVIEW.......................................................................................................................................... 10
4.3. OPERATING MODES ...................................................................................................................................................11
4.4. REMOTE FILAMENT CONTROL.......................................................................................................................... 12
5. THEORY OF OPERATION........................................................................................................................................... 14
6. SET UP GUIDE................................................................................................................................................................ 15
6.1. ADVANCE SETUP GUIDE.....................................................................................................................................15
6.2. RS485 ADDRESS........................................................................................................................................................15
6.3. BAUD RATE ...............................................................................................................................................................15
6.4. DATA BITS/PARITY BITS/STOP BITS ..........................................................................................................................16
6.5. TURNAROUND DELAY................................................................................................................................................ 16
6.6. SAVE EEPROM.........................................................................................................................................................16
6.7. RESTORE EEPROM................................................................................................................................................... 16
7. RS 232/RS 485...................................................................................................................................................................17
7.1. RS232/RS485............................................................................................................................................................ 17
8. DEVICE STATUS............................................................................................................................................................18
8.1. ION GAUGE DEVICE STATUS: 4-DIGIT OCTAL WORD................................................................................... 18
8.2. COMMAND SYNTAX...................................................................................................................................................18
8.3. INTERROGATION COMMANDS ....................................................................................................................................19
8.4. PARAMETER MODIFICATION COMMANDS ..................................................................................................................19
9. WARRANTY.................................................................................................................................................................... 20
9.1. WARRANTY REPAIR POLICY ......................................................................................................................................20
9.2. NON-WARRANTY REPAIR POLICY .............................................................................................................................20
10. DRAWINGS & SCHEMATICS.................................................................................................................................21
169-082010_Ion-Gauge-3000 Page 3 of 21
DANGER HIGH VOLTAGE
High voltages capable of causing injury or death are present within the IGE 3000 Avoid touching the
connector sockets, tube pins and all internal circuitry within the IGE 3000. SERVICE MUST ONLY BE
PERFORMED BY QUALIFIED TELEDYNE INSTRUMENTS PERSONNEL.
DANGER
Do not turn on the IGE 3000 if there is any danger of explosion from explosive or combustible gasses or gas
mixtures. Ionization gauge tube filaments operate at a temperature sufficiently high enough to be considered an
ignition source.
DANGER
Safe operation of ion producing equipment, including the IGE 3000, requires grounding of its power supply
and the vacuum chamber. LETHAL VOLTAGES may be established under some operating conditions unless
grounding is provided.
DANGER
Ion producing equipment such as the IGE 3000, from any manufacturer, may, under some conditions
provide sufficient conduction via plasma to couple a high voltage electrode to the vacuum chamber. If
conductive parts of the chamber are not grounded, they may attain a potential near that of the high voltage
electrodes during this coupling. Potentially fatal electrical shock could then occur because of the high voltage
between these vacuum chamber parts and ground. Grounding, though simple, is imperative! Ensure that the
ground circuits are correctly utilized, both on your IGE 3000 power supplies and your vacuum chambers,
regardless of the manufacturer, for this phenomenon is not peculiar to the IGE 3000.
CAUTION
Ensure that BA tube filaments are not turned on unless vacuum IS LESS THAN 10
-2
Torr.
TURNING ON filaments at atmosphere MAY result in damage to the BA tube.
CAUTION
Before initiating Degas, vacuum must be 10
-7
Torr or less.
Performing Degas at Higher Pressures Could Damage the B/A Tube
169-082010_Ion-Gauge-3000 Page 4 of 21
1. Quick Start Information
• Apply Power
• Apply 24 VDC Power to the “D” connector Pin 3 and 4.
• After power is applied the IGE 3000 will go through self test, CPU initialization, and LED test.
(The individual LEDs will sequentially illuminate then the IGE 3000 enters the “No Mode” and
is operational).
• Operate Tube
Before operating tube, ensure vacuum is below 1x10-2 Torr. The IGE 3000 has an automatic shutoff
feature that will not allow filament turn on at pressures above 1x10-2 Torr. The shutoff feature will also
automatically turn off the filament if it is turned on (below 1x10-2 Torr) and pressure rises above 1x10-2
TO TURN ON THE TUBE’S FILAMENTS:
• “DOUBLE CLICK” the select button. (note: Double clicking the SELECT button while the
filament is already On will turn it OFF).
Initially dashes will remain on the display. However, as the tube heats up and starts operating, within
seconds the pressure will be displayed. LED’s (F1 or F2) will be illuminated, indicating which filament is
selected and that it is turned on.
F2
F1High Low
Emis DGas
Fil
KSP
2X=On/Off
169-082010_Ion-Gauge-3000 Page 5 of 21
2. General Information
2.1. GENERAL INFORMATION
The Teledyne Hastings Instruments IGE-3000 is a small, fully self contained ion gauge electronics
module. The mini- Bayard Alpert style ion gauge tube is attached to the electronics module by a 12 pin
circular connector. The IGE-3000 is designed for quick, easy installation and will provide the user with
long lasting, trouble free, reliable vacuum measurement.
2.2. IGE-3000 Mini Bayard/Alpert (B/A) Tube
The IGE-3000 mini B/A tube is all metal construction, with the primary enclosure fabricated of 304
stainless steel. It is UHV compatible and utilizes a fine wire collector located in the center of the grid. The
duel Yttria coated filaments are individually supported to provide uniform output over variations in
temperature and normal ageing. The typical user should experience a filament lifetime of approximately
10,000 hours. Its physical size is much smaller than the traditional glass type B/A tube. Since there is no
glass envelope, the traditional safety concerns associated with glass type B/A tubes is eliminated.
2.3. Specifications.
Pressure Range ........................................................................................................1x10-2 to 1x10-10 Torr
*Accuracy ................................................................±15% of reading for the range 1x10-2 to 1x10-8 Torr
Degas .......................................................................................................................................... 5W e-beam
Emission Current....................................................................................................0.01, 0.1, 1 mA, or Auto
Filament Bias Potential ............................................................................................................ +30 V ±0.3%
Grid Potential ........................................................................................................................ +180 V ±0.3%
Operating Temperature ..................................................................................................................... 0-50°C
Digital Communications.............................................................................................................. RS232/485
Connector ................................................................................................................. 15-pin subminiature D
Bake out Temperature ................................................................................ 200°C with electronics removed
** Electrical Noise Immunity........................................ENC 61010 Class A and IEC 61326-1: Section 6.2
Input Voltage Operating Range ................................................................................. 11.5 VDC to 30 VDC
Input Power.......... ........................................................................24 VDC @ 350 mA (Normal Operation)
.............................................................................................................24 VDC @ 850 mA (During Degas)
Power/Interface Connector ............................................................................................ 15 pin subminiature
Process Control.................................................................................. 2 independent TTL set point outputs
Weight......................................................................................................................................1.5 lbs. (max)
Transducer Mounting................................................................................................................Any position
Remote Control Capable ...............................................................................................................................
Automatic High Pressure Cut off ..................................................................................................................
*Accuracy specification is with the B/A tube originally shipped with the IGE 3000. The
IGE 3000 is calibrated with and matched to the B/A tube at the factory. Changing or swapping the B/A
tube with a B/A tube one other than the one originally shipped with the unit may effect the calibration.
**Complies with IEC 61010-1 (Safety requirements for measurement, control, and laboratory use).
169-082010_Ion-Gauge-3000 Page 6 of 21
2.4. Materials exposed to Vacuum
• Yttia coated Iridium
• Nickel
• 304 Stainless Steel
• Glass
• Tungsten
• Platinum Clad Molybdenum
169-082010_Ion-Gauge-3000 Page 7 of 21
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